CN116820035A - Control method and system of semiconductor process flow and electronic equipment - Google Patents
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Abstract
本公开提供了一种半导体工艺流程的控制方法及系统、电子设备，该方法包括：获取用于控制半导体设备执行半导体生产的执行文件；解析执行文件定义的需执行的独立工艺流程及执行顺序，将各独立工艺流程作为路径节点并根据执行顺序得到主路径；解析对各路径节点是否定义对应的子路径，及是否设置自动跳转到子路径执行对应控制后再跳转回来的自动跳转功能，子路径为子工艺流程；接收指示删除子路径的指令，确定指示删除的子路径对应的路径节点设置有自动跳转功能时，输出禁止删除子路径的提示信息。本公开通过系统判断是否可以删除此子路径节省用户查询时间，准确率高，提高半导体产品的良率。
The present disclosure provides a semiconductor process flow control method, system and electronic equipment. The method includes: obtaining an execution file for controlling the semiconductor equipment to perform semiconductor production; parsing the independent process flow and execution sequence defined by the execution file to be executed, Use each independent process flow as a path node and obtain the main path according to the execution sequence; analyze whether the corresponding sub-path is defined for each path node, and whether to set the automatic jump function to automatically jump to the sub-path to execute the corresponding control and then jump back. , the sub-path is a sub-process flow; when receiving an instruction instructing to delete a sub-path, and confirming that the path node corresponding to the sub-path instructed to be deleted is set with an automatic jump function, a prompt message prohibiting deletion of the sub-path is output. This disclosure uses the system to determine whether this sub-path can be deleted to save user query time, has high accuracy, and improves the yield rate of semiconductor products.
Description
Technical Field
The disclosure relates to the technical field of rights management, and in particular relates to a control method and system of a semiconductor process flow and electronic equipment.
Background
Semiconductor is a highly automated industry, semiconductor manufacturing lines are a manufacturing system with a large number of processing equipment and extremely complex process flows, and there are many independently executed processes in the overall process flow, and there are many independently executed test items in the process flow of semiconductor production test. However, at least the following problems exist in the field of semiconductor control at present, in which the execution sequence of test items is controlled by a system end for the whole process flow including a plurality of independent controls, and the test flow is too single to adapt to the diversity of the execution sequence of the test items.
Disclosure of Invention
The invention aims to provide a control method and system for a semiconductor process flow and electronic equipment. The method is used for solving the problem that the test flow is too single and cannot adapt to the diversity of the sequence of executing test items.
In a first aspect, an embodiment of the present disclosure provides a method for controlling a semiconductor process flow, the method including:
acquiring an execution file for controlling semiconductor equipment to execute semiconductor production;
analyzing the independent process flows and the execution sequences which are defined by the execution files and need to be executed, taking each independent process flow as a path node and obtaining a main path according to the execution sequences;
Analyzing whether corresponding sub-paths are defined for each path node or not, and whether an automatic jump function of automatically jumping to the sub-paths to execute corresponding control and then jumping back is set, wherein the sub-paths are sub-process flows;
and receiving an instruction for indicating to delete the sub-path, and outputting prompt information for prohibiting the deletion of the sub-path when determining that the path node corresponding to the sub-path indicated to be deleted is provided with an automatic skip function.
In some possible embodiments, the method further comprises:
and deleting the sub-path indicating deletion when the path node corresponding to the sub-path indicating deletion is not provided with the automatic skip function.
In some possible embodiments, the automatic jump function that jumps back after the corresponding control is performed on each path node to determine whether to set an automatic jump to a sub path is resolved, including at least one step of:
precompiled the script of the execution file, and if the independent process flow corresponding to each path node is associated with the first control information of the corresponding automatic skip function, determining that the path node is provided with the automatic skip function of script skip; and/or
When the second control information of the corresponding automatic jump function is set for the independent process flow corresponding to each path node in the system is determined, the path node is determined to be provided with the automatic jump function of the system jump.
In some possible embodiments, determining that the path node is provided with an automatic jump function for script jumps comprises:
when the first control information associated with the independent process flow corresponding to each path node is determined to comprise a keyword indicating automatic skip or comprise a keyword indicating automatic skip and sub-path information, the path node is determined to be provided with an automatic skip function of script skip.
In some possible embodiments, determining that the path node is provided with an automatic jump function for system jumps comprises:
when the second control information which is set for the independent process flow corresponding to each path node in the system is determined to comprise the keyword for indicating automatic jump or comprise the keyword for indicating automatic jump and sub path information, the path node is determined to be provided with the automatic jump function for system jump.
In some possible embodiments, receiving an instruction for indicating to delete a sub-path, determining that a path node corresponding to the sub-path indicating to delete is provided with an automatic skip function, and outputting prompt information for prohibiting deletion of the sub-path, where the method includes:
receiving an instruction for deleting a sub-path, acquiring a first path node which is obtained by analysis and provided with an automatic jump function of script jump, and a second path node which is provided with an automatic jump function of system jump;
Acquiring a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node;
and outputting prompt information for prohibiting the deletion of the sub-paths when the sub-paths indicating the deletion are determined to be contained in the first sub-path or the second sub-path.
In some possible embodiments, the method further comprises:
determining that the sub-path indicating deletion is not contained in the first sub-path and the second sub-path, and automatically disconnecting or according to the association of the sub-path indicating deletion and the corresponding path node, so as to disable the corresponding automatic jump function.
In some possible embodiments, acquiring a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node includes:
when determining and analyzing to obtain sub-path information corresponding to the automatic jump of the first path node and the automatic jump of the second path node, searching a first sub-path and a second sub-path which exist correspondingly according to the sub-path information;
when the automatic jump of the first path node and the automatic jump of the second path node are not obtained through the analysis, searching a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node in the semiconductor file.
In some possible embodiments, the method further comprises:
after determining the update of the execution file, analyzing the updated execution file;
according to the sequence of path nodes on the main path obtained by analysis, executing independent process flows corresponding to the path nodes to carry out semiconductor production control/semiconductor product test control;
when the path node with the automatic jump function is executed, the corresponding sub-process flow is jumped to execute the semiconductor production control/semiconductor product test control according to the sub-path corresponding to the path node, and then the path node is jumped back to continue executing the corresponding semiconductor production control/semiconductor product test control.
In some possible embodiments, the independent process flows included in the semiconductor execution file are multiple-stage independent process flows, each independent process flow in each stage of independent process flow serves as a path node in the same stage of independent process flow, a first path is obtained according to the execution sequence of the path nodes, and the first path is a sub-path relative to the upper stage of independent process flow, and is a main path relative to the independent control path of the next stage.
In a second aspect, embodiments of the present disclosure provide a control system for a semiconductor process flow, comprising:
The acquisition module is used for acquiring an execution file for controlling the semiconductor equipment to execute semiconductor production;
the first analysis module is used for analyzing the independent process flows and the execution sequences which are defined by the execution files and need to be executed, taking each independent process flow as a path node and obtaining a main path according to the execution sequences;
the second analysis module is used for analyzing whether corresponding sub-paths are defined for each path node or not and whether an automatic jump function of automatically jumping to the sub-paths to execute corresponding control and then jumping back is set, and the sub-paths are sub-process flows;
the determining module is used for receiving the instruction for deleting the sub-path, and outputting prompt information for prohibiting the deletion of the sub-path when determining that the path node corresponding to the sub-path for indicating the deletion is provided with an automatic skip function.
In a third aspect, embodiments of the present disclosure provide an electronic device comprising at least one processor; and a memory communicatively coupled to the at least one processor; wherein the memory stores instructions executable by the at least one processor to enable the at least one processor to perform the method of controlling a semiconductor process flow provided in the first aspect above.
In a fourth aspect, an embodiment of the present disclosure provides a computer storage medium storing a computer program for causing a computer to execute the control method of the semiconductor process flow provided in the first aspect.
In order to solve the problem that the test flow is too single and cannot adapt to the diversity of the sequence of executing test items, the embodiment of the disclosure automatically checks whether an automatic jump function is set on a path node before a user deletes a sub-path on the path node, and prompts the user to prohibit deletion of the sub-path when the automatic jump function is checked, so that the defect loss of a product is caused because the card control time set by a semiconductor product is overtime after the user deletes the sub-path. The system judges whether the sub-path can be deleted, so that the user inquiry time is saved, the accuracy is high, and the yield of semiconductor products is improved.
Additional features and advantages of the disclosure will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the disclosure. The objectives and other advantages of the disclosure will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings that are needed in the embodiments of the present disclosure will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present disclosure, and other drawings may be obtained according to these drawings without inventive effort to a person of ordinary skill in the art.
FIG. 1 is a flow diagram of a method of controlling a semiconductor process flow according to one embodiment of the present disclosure;
FIG. 2 is a schematic diagram of a main path and sub-path relationship according to one embodiment of the present disclosure;
FIG. 3 is a schematic overall flow diagram of a method for controlling a semiconductor process flow according to one embodiment of the disclosure;
FIG. 4 is a schematic diagram of a control system architecture of a semiconductor process flow according to one embodiment of the present disclosure;
fig. 5 is a schematic structural diagram of an electronic device according to an embodiment of the present disclosure.
Detailed Description
Technical solutions in the embodiments of the present disclosure will be clearly and thoroughly described below with reference to the accompanying drawings. In the description of the embodiments of the present disclosure, unless otherwise indicated, "/" means or, for example, a/B may represent a or B; the text "and/or" is merely an association relation describing the associated object, and indicates that three relations may exist, for example, a and/or B may indicate: the three cases where a alone exists, a and B together, and B alone exist, and in addition, "a plurality" means two or more in the description of the embodiments of the present disclosure.
In the description of the embodiments of the present disclosure, unless otherwise indicated, the term "plurality" refers to two or more, and other words and phrases are to be understood and appreciated that the preferred embodiments described herein are for illustration and explanation of the present disclosure only, and are not intended to limit the present disclosure, and embodiments of the present disclosure and features of the embodiments may be combined with one another without conflict.
In order to further explain the technical solutions provided by the embodiments of the present disclosure, the following details are described with reference to the accompanying drawings and the detailed description. Although the embodiments of the present disclosure provide the method operational steps as shown in the following embodiments or figures, more or fewer operational steps may be included in the method based on routine or non-inventive labor. In steps where there is logically no necessary causal relationship, the order of execution of the steps is not limited to the order of execution provided by embodiments of the present disclosure. The methods may be performed sequentially or in parallel as shown in the embodiments or the drawings when the actual processing or the control device is executing.
In view of the problem that the test procedure is too single in the related art, the method cannot adapt to the diversity of the sequence of executing the test items. The control method, the system and the electronic equipment for the semiconductor process flow are provided, whether the sub-path can be deleted or not is judged by the system, so that the user inquiry time is saved, the accuracy is high, and the yield of semiconductor products is improved.
Additional features and advantages of the disclosure will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the disclosure. The objectives and other advantages of the disclosure will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings.
The following describes a control method of a semiconductor process flow in an embodiment of the present disclosure in detail with reference to the accompanying drawings.
Fig. 1 shows a flow diagram of a control method of a semiconductor process flow according to an embodiment of the disclosure, including:
step 101: an execution file for controlling a semiconductor device to execute semiconductor production is acquired.
A semiconductor production line is a manufacturing system with a plurality of processing devices and extremely complex process flows, a plurality of independently executed process treatments exist in the whole process flow of semiconductor production, and a plurality of independently executed test items exist in the process flow of semiconductor production test. The semiconductor device is controlled to execute the process or test items according to the pre-compiled execution file.
Step 102: analyzing the independent process flows and the execution sequences which are defined by the execution files and need to be executed, taking each independent process flow as a path node and obtaining a main path according to the execution sequences.
Specifically, in the field of semiconductor control, for an overall process flow including a plurality of independent controls, by controlling at a system end, each independently executed process flow may be used as a path node, and the execution sequence of each independent control set in the system in advance may be obtained as a main path, for example, for semiconductor process control, slicing, diffusing, etching, etc. are used as main paths predefined in the system, and for example, on a semiconductor production chain, an aging experiment, a high temperature experiment, and a wear resistance experiment need to be sequentially performed, each experiment may be understood as a path node, and the execution sequence of first executing the aging experiment and then executing the high temperature experiment and finally executing the wear resistance experiment may be defined as a main path, in other words, the main path is used to predefine the execution sequence of each independent process flow.
Step 103: analyzing whether each path node defines a corresponding sub-path and whether an automatic jump function of automatically jumping to the sub-path to execute corresponding control and then jumping back is set, wherein the sub-path is a sub-process flow.
According to the actual production process requirement, it is sometimes required to temporarily switch a certain path node in the main path to other control processes except the path node, for example, the above-defined main path of executing the path node a, then executing the path node B, and finally executing the path node D, if after the path node experiment is executed, it is required to switch to execute a test experiment under other process conditions, and after the test is executed, it is required to switch to execute the path node experiment on the main path again, then executing the test under other process conditions can be understood as executing a branch path, that is, a sub path, in the main path process, and automatically completing the skip function, which is defined as an automatic skip function in the present disclosure. In detail, referring to fig. 2, a main path and a sub-path relationship diagram, the main path includes a first path node, a second path node, a third path node, and a fourth path node, an automatic skip function is set at the second path node, and a sub-path is entered, where the sub-path may include, for example: the path nodes a, b and c, that is, after the first path node is executed, before the second path node, automatically jump to the sub path, after the sub path is executed, automatically jump to the main path, for example, after the first path node is returned, before the second path node, the third path node and the fourth path node remained on the main path are continuously executed, and of course, other path nodes on the main path can be returned.
Step 104: and receiving an instruction for indicating to delete the sub-path, and outputting prompt information for prohibiting the deletion of the sub-path when determining that the path node corresponding to the sub-path indicated to be deleted is provided with an automatic skip function.
As an optional implementation manner, when it is determined that the path node corresponding to the sub-path indicating deletion is not provided with the automatic skip function, the sub-path indicating deletion is deleted.
When the user instructs to delete the sub-path on the designated path node, it is first required to determine whether the path node is provided with an automatic skip function, and if the path node is determined to be provided with the automatic skip function, the user is prevented from deleting the sub-path by feeding back prompt information for prohibiting deletion of the sub-path to the user. If the automatic jump function is not set on the path node, the prompt information of the sub path which can be deleted is fed back to the user so as to prompt the user to perform the deletion operation.
Before a user deletes a sub-path on a path node, the method automatically checks whether an automatic jump function is set on the path node, and prompts the user to prohibit deletion of the sub-path when the automatic jump function is set, so that the defect loss of a product caused by overtime of the card control time set by a semiconductor product after the user deletes the sub-path is avoided. The system judges whether the sub-path can be deleted, so that the user inquiry time is saved, the accuracy is high, and the yield of semiconductor products is improved.
As an optional implementation manner, analyzing whether each path node is provided with an automatic jump function of automatically jumping to a sub path to execute corresponding control and then jumping back, includes at least one step of:
precompiled the script of the execution file, and if the independent process flow corresponding to each path node is associated with the first control information of the corresponding automatic skip function, determining that the path node is provided with the automatic skip function of script skip; and/or
When the second control information of the corresponding automatic jump function is set for the independent process flow corresponding to each path node in the system is determined, the path node is determined to be provided with the automatic jump function of the system jump.
Script is a piece of text command which can be seen (e.g. can be opened, checked and edited by a notepad), and when the script program is executed, an interpreter of the system translates a piece of script program into machine-recognizable instructions and executes the script program in program sequence. Specifically, for judging whether the path node is provided with the automatic skip function, the present disclosure provides two ways, in which the path node can be determined to be provided with the automatic skip function at the same time, and in which the path node can be determined to be provided with the automatic skip function at any one of the two ways.
Mode one: the path nodes are provided with an automatic jump function of script jumping.
As an alternative embodiment, determining that the path node is provided with an automatic jump function for script jumping includes: when the first control information associated with the independent process flow corresponding to each path node is determined to comprise a keyword indicating automatic skip or comprise a keyword indicating automatic skip and sub-path information, the path node is determined to be provided with an automatic skip function of script skip.
If the sub-path to be deleted by the user is retrieved, checking that a script jump is set on the path node before submitting, wherein the keyword indicating automatic jump comprises 'jump', and the keyword indicating automatic jump and sub-path information refer to that the script comprises 'jump' keyword and sub-path ID for locating the sub-path.
Mode two: the path nodes are provided with an automatic jump function for system jump.
As an alternative embodiment, determining that the path node is provided with an automatic jump function for system jumps includes:
when the second control information which is set for the independent process flow corresponding to each path node in the system is determined to comprise the keyword for indicating automatic jump or comprise the keyword for indicating automatic jump and sub path information, the path node is determined to be provided with the automatic jump function for system jump.
Reference is made to the above description of the first embodiment, and the description thereof is omitted here.
As an optional implementation manner, receiving an instruction for indicating to delete a sub-path, determining that a path node corresponding to the sub-path indicating to delete is provided with an automatic skip function, and outputting prompt information for prohibiting deletion of the sub-path, where the method includes:
receiving an instruction for deleting a sub-path, acquiring a first path node which is obtained by analysis and provided with an automatic jump function of script jump, and a second path node which is provided with an automatic jump function of system jump;
acquiring a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node;
and outputting prompt information for prohibiting the deletion of the sub-paths when the sub-paths indicating the deletion are determined to be contained in the first sub-path or the second sub-path.
Specifically, after receiving an instruction for deleting a sub-path, traversing the first path node provided with script hopping in the first mode and the second path node provided with system hopping in the second mode, acquiring all path nodes provided with an automatic hopping function, and then acquiring the sub-path of the path node provided with the automatic hopping function. By checking all sub-paths with path nodes that jump automatically, if there is a sub-path that is only deleted, a hint message is output that prohibits deletion of this sub-path. Outputting the prompting message in the present disclosure may, but is not limited to, prompting in the form of a bullet box.
As an alternative embodiment, the method further comprises:
determining that the sub-path indicating deletion is not contained in the first sub-path and the second sub-path, and automatically disconnecting or according to the association of the sub-path indicating deletion and the corresponding path node, so as to disable the corresponding automatic jump function.
Specifically, when the sub-path indicating deletion is not included in the path node on which the automatic jump is set, that is, although the association relationship between the path node and the sub-path regarding the jump is still in the past, the sub-path is deleted or modified so as not to be stuck at the path node during the execution of the process flow, so when it is determined that the sub-path indicating deletion is not included in the path node on which the automatic jump is set, the association relationship between the sub-path and the corresponding path node is disconnected, the automatic jump function on the path node is disabled, and then the case where the jump to the sub-path but the corresponding sub-path is not found occurs when the execution flow passes through the path node.
As an optional implementation manner, acquiring a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node includes:
When determining and analyzing to obtain sub-path information corresponding to the automatic jump of the first path node and the automatic jump of the second path node, searching a first sub-path and a second sub-path which exist correspondingly according to the sub-path information;
when the automatic jump of the first path node and the automatic jump of the second path node are not obtained through the analysis, searching a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node in the semiconductor file.
Specifically, the sub-path corresponding to the path node is searched in two ways, when the path node sets the automatic jump function, the sub-path can be searched according to the sub-path information corresponding to the automatic jump, and when the path node does not set the automatic jump function, the sub-path corresponding to the path node is searched through the manageability of the pre-compiled path node and the sub-path thereof in the semiconductor file.
As an alternative embodiment, the method further comprises:
after determining the update of the execution file, analyzing the updated execution file;
according to the sequence of path nodes on the main path obtained by analysis, executing independent process flows corresponding to the path nodes to carry out semiconductor production control/semiconductor product test control;
When the path node with the automatic jump function is executed, the corresponding sub-process flow is jumped to execute the semiconductor production control/semiconductor product test control according to the sub-path corresponding to the path node, and then the path node is jumped back to continue executing the corresponding semiconductor production control/semiconductor product test control.
Specifically, when receiving the instruction of deleting the sub-path and judging that the sub-path can be deleted, after deleting the sub-path, the updating of the execution file is completed, the updated execution file is analyzed, the execution file is executed according to the sequence of each path node on the main path in the updated execution file, if an automatic jump function is set on a certain path node on the main path, the sub-path is jumped to the corresponding sub-path, and when the sub-path is executed, the next path node of the main path is jumped back to continue to execute.
As an optional implementation manner, the independent process flows included in the semiconductor execution file are multi-stage independent process flows, each independent process flow in each stage of independent process flow serves as a path node in the same stage of independent process flow, a first path is obtained according to the execution sequence of the path nodes, and the first path is a sub-path relative to the upper stage of independent process flow and is a main path relative to the independent control path of the next stage.
Specifically, for example, the semiconductor execution file includes an independent process flow composed of A, B, C, an automatic skip function is set on B, when B is executed, an automatic skip function is set on D to skip to an independent process flow composed of D, E, and a sub-path of D is F, that is, D is executed, skip to an independent process flow F automatically, F is executed to skip to E in a previous stage path automatically, and E is executed to skip to C in a previous stage automatically. In general, A, B, C in the above example corresponds to the main path of path D, E, D, E corresponds to the sub-path of the A, B, C path, but corresponds to the main path of F, thus, it can be seen that the example is a stand-alone process flow with three stages.
Referring to fig. 3, the overall execution flow of the present disclosure is:
step 301, receiving an instruction for deleting a sub-path;
step 302, judging whether the path node corresponding to the deleted sub-path is provided with an automatic jump function or not, if yes, executing step 303, and if no, executing step 305;
step 303, judging whether each path node sets a script jump or a system jump, and if the script is not modified or the system jump is not deleted, executing step 304 if yes, and if not, executing step 305;
Step 304, outputting prompt information for prohibiting deletion of the sub-path;
step 305, delete successfully.
Example 2
Based on the same inventive concept, the present disclosure also provides a control system of a semiconductor process flow, as shown in fig. 4, the system comprising:
an acquisition module 401 for acquiring an execution file for controlling the semiconductor device to execute semiconductor production;
the first analyzing module 402 is configured to analyze the independent process flows and the execution sequences to be executed defined by the execution file, and obtain a main path according to the execution sequences with each independent process flow as a path node;
a second parsing module 403, configured to parse whether to define a corresponding sub-path for each path node, and whether to set an automatic jump function for automatically jumping to the sub-path to execute corresponding control and then jumping back, where the sub-path is a sub-process flow;
and the determining module 404 is configured to receive an instruction for instructing to delete a sub-path, and output prompt information for prohibiting deletion of the sub-path when determining that the path node corresponding to the sub-path instructed to delete is provided with an automatic skip function.
Optionally, the determining module 404 is further configured to:
and deleting the sub-path indicating deletion when the path node corresponding to the sub-path indicating deletion is not provided with the automatic skip function.
Optionally, the second parsing module 403 is specifically configured to parse whether each path node sets an automatic skip function for performing corresponding control on an automatic skip sub path and then skip back, and includes at least one step as follows:
precompiled the script of the execution file, and if the independent process flow corresponding to each path node is associated with the first control information of the corresponding automatic skip function, determining that the path node is provided with the automatic skip function of script skip; and/or
When the second control information of the corresponding automatic jump function is set for the independent process flow corresponding to each path node in the system is determined, the path node is determined to be provided with the automatic jump function of the system jump.
Optionally, the second parsing module 403 is specifically configured to:
when the first control information associated with the independent process flow corresponding to each path node is determined to comprise a keyword indicating automatic skip or comprise a keyword indicating automatic skip and sub-path information, the path node is determined to be provided with an automatic skip function of script skip.
Optionally, the second parsing module 403 is specifically configured to:
when the second control information which is set for the independent process flow corresponding to each path node in the system is determined to comprise the keyword for indicating automatic jump or comprise the keyword for indicating automatic jump and sub path information, the path node is determined to be provided with the automatic jump function for system jump.
Optionally, the second parsing module 403 is specifically configured to receive an instruction for deleting a sub-path, obtain a parsed first path node with an automatic skip function of script skip, and set a second path node with an automatic skip function of system skip;
acquiring a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node;
and outputting prompt information for prohibiting the deletion of the sub-paths when the sub-paths indicating the deletion are determined to be contained in the first sub-path or the second sub-path.
Optionally, the second parsing module 403 is further configured to:
determining that the sub-path indicating deletion is not contained in the first sub-path and the second sub-path, and automatically disconnecting or according to the association of the sub-path indicating deletion and the corresponding path node, so as to disable the corresponding automatic jump function.
Optionally, the second parsing module 403 is specifically configured to find, when determining that parsing obtains sub-path information corresponding to automatic skip of the first path node and automatic skip of the second path node, a first sub-path and a second sub-path that exist correspondingly according to the sub-path information;
When the automatic jump of the first path node and the automatic jump of the second path node are not obtained through the analysis, searching a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node in the semiconductor file.
Optionally, the system further comprises an execution module 405 for:
after determining the update of the execution file, analyzing the updated execution file;
according to the sequence of path nodes on the main path obtained by analysis, executing independent process flows corresponding to the path nodes to carry out semiconductor production control/semiconductor product test control;
when the path node with the automatic jump function is executed, the corresponding sub-process flow is jumped to execute the semiconductor production control/semiconductor product test control according to the sub-path corresponding to the path node, and then the path node is jumped back to continue executing the corresponding semiconductor production control/semiconductor product test control.
Optionally, the independent process flows included in the semiconductor execution file are multiple-stage independent process flows, each independent process flow in each stage of independent process flow is used as a path node in the same stage of independent process flow, a first path is obtained according to the execution sequence of the path nodes, the first path is a sub-path relative to the upper stage of independent process flow, and the independent control path relative to the lower stage of independent process flow is a main path.
Having described the control method and control system of the semiconductor process flow of the exemplary embodiment of the present disclosure, next, an electronic device according to another exemplary embodiment of the present disclosure is described.
Those skilled in the art will appreciate that the various aspects of the present disclosure may be implemented as a system, method, or program product. Accordingly, various aspects of the disclosure may be embodied in the following forms, namely: an entirely hardware embodiment, an entirely software embodiment (including firmware, micro-code, etc.) or an embodiment combining hardware and software aspects may be referred to herein as a "circuit," module "or" system.
In some possible implementations, an electronic device according to the present disclosure may include at least one processor, and at least one memory. Wherein the memory stores program code that, when executed by the processor, causes the processor to perform the steps in the control method of the semiconductor process flow according to the various exemplary embodiments of the disclosure described above in this specification.
An electronic device 130, i.e., a control device of the above-described semiconductor process flow, according to this embodiment of the present disclosure is described below with reference to fig. 5. The electronic device 130 shown in fig. 5 is merely an example and should not be construed to limit the functionality and scope of use of embodiments of the present disclosure in any way.
As shown in fig. 5, the electronic device 130 is in the form of a general-purpose electronic device. Components of electronic device 130 may include, but are not limited to: the at least one processor 131, the at least one memory 132, and a bus 133 connecting the various system components, including the memory 132 and the processor 131.
Bus 133 represents one or more of several types of bus structures, including a memory bus or memory controller, a peripheral bus, a processor, and a local bus using any of a variety of bus architectures.
Memory 132 may include readable media in the form of volatile memory such as Random Access Memory (RAM) 1321 and/or cache memory 1322, and may further include Read Only Memory (ROM) 1323.
Memory 132 may also include a program/utility 1325 having a set (at least one) of program modules 1324, such program modules 1324 include, but are not limited to: an operating system, one or more application programs, other program modules, and program data, each or some combination of which may include an implementation of a network environment.
The electronic device 130 may also communicate with one or more external devices 134 (e.g., keyboard, pointing device, etc.), one or more devices that enable a user to interact with the electronic device 130, and/or any device (e.g., router, modem, etc.) that enables the electronic device 130 to communicate with one or more other electronic devices. Such communication may occur through an input/output (I/O) interface 135. Also, electronic device 130 may communicate with one or more networks such as a Local Area Network (LAN), a Wide Area Network (WAN), and/or a public network, such as the Internet, through network adapter 136. As shown, network adapter 136 communicates with other modules for electronic device 130 over bus 133. It should be appreciated that although not shown, other hardware and/or software modules may be used in connection with electronic device 130, including, but not limited to: microcode, device drivers, redundant processors, external disk drive arrays, RAID systems, tape drives, data backup storage systems, and the like.
In some possible embodiments, aspects of a control method of a semiconductor process flow provided by the present disclosure may also be implemented in the form of a program product comprising program code for causing a computer device to carry out the steps of the control method of a semiconductor process flow according to the various exemplary embodiments of the present disclosure as described above when the program product is run on the computer device.
The program product may employ any combination of one or more readable media. The readable medium may be a readable signal medium or a readable storage medium. The readable storage medium can be, for example, but is not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or a combination of any of the foregoing. More specific examples (a non-exhaustive list) of the readable storage medium would include the following: an electrical connection having one or more wires, a portable disk, a hard disk, random Access Memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.
The program product for monitoring of embodiments of the present disclosure may employ a portable compact disc read only memory (CD-ROM) and include program code and may run on an electronic device. However, the program product of the present disclosure is not limited thereto, and in this document, a readable storage medium may be any tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device.
The readable signal medium may include a data signal propagated in baseband or as part of a carrier wave with readable program code embodied therein. Such a propagated data signal may take any of a variety of forms, including, but not limited to, electro-magnetic, optical, or any suitable combination of the foregoing. A readable signal medium may also be any readable medium that is not a readable storage medium and that can communicate, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device.
Program code embodied on a readable medium may be transmitted using any appropriate medium, including but not limited to wireless, wireline, optical fiber cable, RF, etc., or any suitable combination of the foregoing.
Program code for carrying out operations of the present disclosure may be written in any combination of one or more programming languages, including an object oriented programming language such as Java, C++ or the like and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The program code may execute entirely on the consumer electronic device, partly on the consumer electronic device, as a stand-alone software package, partly on the consumer electronic device, partly on the remote electronic device, or entirely on the remote electronic device or server. In the case of remote electronic devices, the remote electronic device may be connected to the consumer electronic device through any kind of network, including a Local Area Network (LAN) or a Wide Area Network (WAN), or may be connected to an external electronic device (e.g., connected through the internet using an internet service provider).
It should be noted that although several units or sub-units of the apparatus are mentioned in the above detailed description, such a division is merely exemplary and not mandatory. Indeed, the features and functions of two or more of the units described above may be embodied in one unit in accordance with embodiments of the present disclosure. Conversely, the features and functions of one unit described above may be further divided into a plurality of units to be embodied.
Furthermore, although the operations of the methods of the present disclosure are depicted in the drawings in a particular order, this is not required to or suggested that these operations must be performed in this particular order or that all of the illustrated operations must be performed in order to achieve desirable results. Additionally or alternatively, certain steps may be omitted, multiple steps combined into one step to perform, and/or one step decomposed into multiple steps to perform.
It will be apparent to those skilled in the art that embodiments of the present disclosure may be provided as a method, system, or computer program product. Accordingly, the present disclosure may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present disclosure may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.
The present disclosure is described with reference to flowchart illustrations and block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the disclosure. It will be understood that each flowchart and/or block of the flowchart and block diagrams, and combinations of flowcharts and block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and block diagram block or blocks.
While the preferred embodiments of the present disclosure have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the disclosure.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present disclosure without departing from the spirit or scope of the disclosure. Thus, the present disclosure is intended to include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (14)
1. A method of controlling a semiconductor process flow, the method comprising:
acquiring an execution file for controlling semiconductor equipment to execute semiconductor production;
analyzing the independent process flows and the execution sequences which are defined by the execution files and need to be executed, taking each independent process flow as a path node and obtaining a main path according to the execution sequences;
analyzing whether corresponding sub-paths are defined for each path node or not, and whether an automatic jump function of automatically jumping to the sub-paths to execute corresponding control and then jumping back is set, wherein the sub-paths are sub-process flows;
and receiving an instruction for indicating to delete the sub-path, and outputting prompt information for prohibiting the deletion of the sub-path when determining that the path node corresponding to the sub-path indicated to be deleted is provided with an automatic skip function.
2. The method as recited in claim 1, further comprising:
And deleting the sub-path indicating deletion when the path node corresponding to the sub-path indicating deletion is not provided with the automatic skip function.
3. A method according to claim 1 or 2, characterized in that the automatic jump function of analyzing whether an automatic jump to sub-path is set for each path node, which is to be executed after corresponding control, comprises at least one of the following steps:
precompiled the script of the execution file, and if the independent process flow corresponding to each path node is associated with the first control information of the corresponding automatic skip function, determining that the path node is provided with the automatic skip function of script skip; and/or
When the second control information of the corresponding automatic jump function is set for the independent process flow corresponding to each path node in the system is determined, the path node is determined to be provided with the automatic jump function of the system jump.
4. A method according to claim 3, characterized in that determining that the path node is provided with an automatic jump function for script jumps, comprises:
when the first control information associated with the independent process flow corresponding to each path node is determined to comprise a keyword indicating automatic skip or comprise a keyword indicating automatic skip and sub-path information, the path node is determined to be provided with an automatic skip function of script skip.
5. A method according to claim 3, characterized in that determining that the path node is provided with an automatic jump function of the system jump comprises:
when the second control information which is set for the independent process flow corresponding to each path node in the system is determined to comprise the keyword for indicating automatic jump or comprise the keyword for indicating automatic jump and sub path information, the path node is determined to be provided with the automatic jump function for system jump.
6. A method according to claim 3, wherein receiving an instruction for indicating deletion of a sub-path, determining that a path node corresponding to the sub-path indicating deletion is provided with an automatic skip function, and outputting prompt information for prohibiting deletion of the sub-path, comprises:
receiving an instruction for deleting a sub-path, acquiring a first path node which is obtained by analysis and provided with an automatic jump function of script jump, and a second path node which is provided with an automatic jump function of system jump;
acquiring a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node;
and outputting prompt information for prohibiting the deletion of the sub-paths when the sub-paths indicating the deletion are determined to be contained in the first sub-path or the second sub-path.
7. The method as recited in claim 6, further comprising:
determining that the sub-path indicating deletion is not contained in the first sub-path and the second sub-path, and automatically disconnecting or according to the association of the sub-path indicating deletion and the corresponding path node, so as to disable the corresponding automatic jump function.
8. The method of claim 6, wherein obtaining a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node comprises:
when determining and analyzing to obtain sub-path information corresponding to the automatic jump of the first path node and the automatic jump of the second path node, searching a first sub-path and a second sub-path which exist correspondingly according to the sub-path information;
when the automatic jump of the first path node and the automatic jump of the second path node are not obtained through the analysis, searching a first sub-path corresponding to the first path node and a second sub-path corresponding to the second path node in the semiconductor file.
9. The method as recited in claim 1, further comprising:
after determining the update of the execution file, analyzing the updated execution file;
According to the sequence of path nodes on the main path obtained by analysis, executing independent process flows corresponding to the path nodes to carry out semiconductor production control/semiconductor product test control;
when the path node with the automatic jump function is executed, the corresponding sub-process flow is jumped to execute the semiconductor production control/semiconductor product test control according to the sub-path corresponding to the path node, and then the path node is jumped back to continue executing the corresponding semiconductor production control/semiconductor product test control.
10. The method of claim 1, wherein the independent process flows included in the semiconductor execution file are multi-stage independent process flows, each independent process flow in each stage of independent process flow serves as a path node in the same stage of independent process flow, a first path is obtained according to an execution sequence of the path nodes, the first path is a sub-path with respect to a previous stage of independent process flow, and an independent control path with respect to a next stage of independent control path is a main path.
11. A control system for a semiconductor process flow, comprising:
the acquisition module is used for acquiring an execution file for controlling the semiconductor equipment to execute semiconductor production;
The first analysis module is used for analyzing the independent process flows and the execution sequences which are defined by the execution files and need to be executed, taking each independent process flow as a path node and obtaining a main path according to the execution sequences;
the second analysis module is used for analyzing whether corresponding sub-paths are defined for each path node or not and whether an automatic jump function of automatically jumping to the sub-paths to execute corresponding control and then jumping back is set, and the sub-paths are sub-process flows;
the determining module is used for receiving the instruction for deleting the sub-path, and outputting prompt information for prohibiting the deletion of the sub-path when determining that the path node corresponding to the sub-path for indicating the deletion is provided with an automatic skip function.
12. An electronic device comprising at least one processor; and a memory communicatively coupled to the at least one processor; wherein the memory stores instructions executable by the at least one processor to enable the at least one processor to perform the method of any one of claims 1-10.
13. A computer storage medium, characterized in that the computer storage medium stores a computer program for causing a computer to perform the method according to any one of claims 1-10.
14. A computer program product comprising computer program instructions which, when executed by a processor, implement the method of any of claims 1-10.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000070444A2 (en) * | 1999-05-13 | 2000-11-23 | Arc International U.S. Holdings Inc. | Method and apparatus for jump control in a pipelined processor |
| EP2367102A1 (en) * | 2010-02-11 | 2011-09-21 | Nxp B.V. | Computer processor and method with increased security properties |
| US20170264643A1 (en) * | 2016-03-08 | 2017-09-14 | Oracle International Corporation | Language-localized policy statements |
| CN113919728A (en) * | 2021-10-22 | 2022-01-11 | 长鑫存储技术有限公司 | Process flow management method and equipment |
| US20220019416A1 (en) * | 2020-07-14 | 2022-01-20 | ManyCore Corporation | Removing branching paths from a computer program |
-
2022
- 2022-03-21 CN CN202210281000.8A patent/CN116820035B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000070444A2 (en) * | 1999-05-13 | 2000-11-23 | Arc International U.S. Holdings Inc. | Method and apparatus for jump control in a pipelined processor |
| EP2367102A1 (en) * | 2010-02-11 | 2011-09-21 | Nxp B.V. | Computer processor and method with increased security properties |
| US20170264643A1 (en) * | 2016-03-08 | 2017-09-14 | Oracle International Corporation | Language-localized policy statements |
| US20220019416A1 (en) * | 2020-07-14 | 2022-01-20 | ManyCore Corporation | Removing branching paths from a computer program |
| CN113919728A (en) * | 2021-10-22 | 2022-01-11 | 长鑫存储技术有限公司 | Process flow management method and equipment |
Non-Patent Citations (1)
| Title |
|---|
| 张剑妹;陶世群;梁吉业;: "XML结构完整性约束下的路径表达式的最小化", 软件学报, no. 11, 15 November 2009 (2009-11-15) * |
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