CN116698097A - Mixed parameter synchronous measurement method based on optical fiber Fabry-Perot interference microcavity - Google Patents
Mixed parameter synchronous measurement method based on optical fiber Fabry-Perot interference microcavity Download PDFInfo
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Abstract
本发明公开了一种基于光纤法布里‑珀罗干涉微腔的混合参量同步测量方法,测量步骤包括:对光纤传感器在温度、介质浓度、横向应变以及扭转角度下的波长灵敏度和反射率灵敏度标定,再结合波长相关系数、反射率相关系数与三个灵敏度之间的关系构建矩阵,从而得出混合参量的同步测量与解耦关系式。本发明利用波长与反射率双相关检测方法,可实现两种不同类型参量的同步测量与解耦,消除了参量间交叉敏感的影响,同时提高了光纤传感器的灵敏度,具有可行可靠、标定过程简单、且实施成本较低的优势。
The invention discloses a method for synchronously measuring mixed parameters based on optical fiber Fabry-Perot interference microcavity. The measuring steps include: measuring the wavelength sensitivity and reflectivity sensitivity of an optical fiber sensor under temperature, medium concentration, transverse strain and torsion angle Calibration, combined with the wavelength correlation coefficient, reflectivity correlation coefficient and the relationship between the three sensitivities to construct a matrix, so as to obtain the synchronous measurement and decoupling relationship of the mixed parameters. The present invention utilizes the dual correlation detection method of wavelength and reflectivity to realize synchronous measurement and decoupling of two different types of parameters, eliminates the influence of cross-sensitivity between parameters, and improves the sensitivity of the optical fiber sensor at the same time, which is feasible and reliable, and the calibration process is simple , and the advantages of lower implementation costs.
Description
技术领域technical field
本发明涉及混合参量的同步测量与解耦,具体来说是区分如温度、介质浓度类的恒腔长型参量和应变、扭转角度类的变腔长型参量的光学测量方法。The invention relates to synchronous measurement and decoupling of mixed parameters, specifically an optical measurement method for distinguishing constant cavity length parameters such as temperature and medium concentration from variable cavity length parameters such as strain and torsion angle.
背景技术Background technique
光纤光栅传感技术在诸多方面具有明显优势,如高灵敏度、紧凑体积、抗电磁干扰性、便于构建传感网络以及强大的多路复用能力。它已经引起了广泛关注,尤其在温度、折射率、应变和压力等参数的测量方面,使得光纤布拉格光栅(FBG)成为在生物化学传感、结构健康监测、气体/石油勘探等领域中具有巨大潜力的敏感元件。尽管结构简单的FBG传感器具有良好的线性度和稳定性,但由于其灵敏度较低,难以满足高精度传感领域的要求。为了提高测量灵敏度,人们采用了化学蚀刻法、电弧放电、机械抛光、飞秒激光修饰等微加工方法对光栅进行处理。然而,这些方法在提高测量灵敏度的同时,可能会降低机械强度和使用寿命。因此,FBG在应用中需要权衡灵敏度和可靠性的平衡,致力于进一步提高光纤布拉格光栅的灵敏度,同时保持其机械强度和使用寿命,以满足更广泛的高精度传感需求。Fiber Bragg grating sensing technology has obvious advantages in many aspects, such as high sensitivity, compact size, anti-electromagnetic interference, easy construction of sensor networks, and powerful multiplexing capabilities. It has attracted widespread attention, especially in the measurement of parameters such as temperature, refractive index, strain, and pressure, making fiber Bragg gratings (FBG) a huge potential in the fields of biochemical sensing, structural health monitoring, and gas/oil exploration. potential sensitive components. Although the FBG sensor with simple structure has good linearity and stability, it is difficult to meet the requirements of high-precision sensing field due to its low sensitivity. In order to improve the measurement sensitivity, micromachining methods such as chemical etching, arc discharge, mechanical polishing, and femtosecond laser modification are used to process the grating. However, these methods may reduce mechanical strength and lifetime while improving measurement sensitivity. Therefore, FBG needs to balance the balance between sensitivity and reliability in the application, and is committed to further improving the sensitivity of fiber Bragg gratings while maintaining its mechanical strength and service life to meet a wider range of high-precision sensing needs.
通常光纤光栅传感器仅使用波长作为被测参量的检测手段,这限制了其直接区分不同参数的能力,容易导致交叉敏感。交叉敏感顾名思义就是传感器的一个参数同时对多个外界物理量的敏感,要确定单个外界物理量的变化,这种交叉敏感是我们不希望看到的,所以必须消除其它物理量对此参数的影响。为了克服这个问题,研究人员不断探索新的方法和结构,如多光栅结构、特殊光纤结构、添加聚合物涂层、和多传感器网络等技术,这些创新措施旨在提高光纤光栅传感器的多参数测量能力和抗交叉干扰能力。Usually the fiber grating sensor only uses the wavelength as the detection method of the measured parameter, which limits its ability to directly distinguish different parameters and easily leads to cross-sensitivity. As the name implies, cross-sensitivity means that a parameter of the sensor is sensitive to multiple external physical quantities at the same time. To determine the change of a single external physical quantity, this cross-sensitivity is something we do not want to see, so the influence of other physical quantities on this parameter must be eliminated. In order to overcome this problem, researchers continue to explore new methods and structures, such as multi-grating structures, special fiber structures, adding polymer coatings, and multi-sensor networks. These innovative measures aim to improve the multi-parameter measurement of fiber grating sensors. ability and anti-interference ability.
例如在温度与应变同时测量中,必须独立测量FBG传感器周围的温度,最常见的方法是嵌入一个温度传感器,如一个热电偶和一个FBG传感器,以补偿该FBG传感器的温度,通过在毛细管中嵌入无应变FBG传感器并测量温度的应变测量温度补偿方法也得到了广泛的应用。此外,人们提出了许多混合结构,如FBG与法布里-珀罗腔进行级联,FBG与上锥形马赫-曾德尔干涉仪进行级联,FBG与多模光纤进行级联;以上方法都是利用两个以上传感器,其中一个传感器作为补偿传感器以消除交叉敏感性,以实现多参量的同时测量,这大大增加了传感系统的复杂性。此外,学术界一般都采用后期数据处理或者通过器件补偿等手段尽量减小交叉敏感对测量结果准确度的影响,这在一定程度上增加了光纤传感器的成本。For example, in the simultaneous measurement of temperature and strain, the temperature around the FBG sensor must be measured independently. The most common method is to embed a temperature sensor, such as a thermocouple and a FBG sensor, to compensate the temperature of the FBG sensor. By embedding in the capillary The strain measurement temperature compensation method of strain-free FBG sensor and measuring temperature has also been widely used. In addition, many hybrid structures have been proposed, such as cascading FBGs with Fabry-Perot cavities, cascading FBGs with upper tapered Mach-Zehnder interferometers, and cascading FBGs with multimode fibers; It is to use more than two sensors, one of which is used as a compensation sensor to eliminate cross-sensitivity, so as to realize simultaneous measurement of multiple parameters, which greatly increases the complexity of the sensing system. In addition, the academic community generally uses post-data processing or device compensation to minimize the impact of cross-sensitivity on the accuracy of measurement results, which increases the cost of fiber optic sensors to a certain extent.
发明内容Contents of the invention
本发明是为了解决上述现有技术存在的不足之处,提出一种基于光纤法布里-珀罗干涉微腔的混合参量同步测量方法,以期能查明各种参量的共同性与差异性,消除参量间交叉敏感的影响,同时提高传感器的灵敏度;从而实现无任何涂覆层的单一光纤光栅传感器混合参量同步测量,在工程健康监测、生物传感、化学过程监测等相关测量领域具有巨大的应用潜力和价值。The present invention is to solve the shortcomings of the above-mentioned prior art, and proposes a method for synchronous measurement of mixed parameters based on optical fiber Fabry-Perot interference microcavity, in order to find out the commonality and difference of various parameters, Eliminate the influence of cross-sensitivity between parameters, while improving the sensitivity of the sensor; thus realizing the simultaneous measurement of mixed parameters of a single fiber grating sensor without any coating layer, which has great potential in engineering health monitoring, biosensing, chemical process monitoring and other related measurement fields application potential and value.
本发明为解决技术问题采用如下的技术方案:The present invention adopts following technical scheme for solving technical problems:
本发明一种基于光纤法布里-珀罗干涉微腔的混合参量同步测量方法的特点是,包括如下步骤:A kind of mixed parameter synchronous measurement method based on optical fiber Fabry-Perot interference microcavity of the present invention is characterized in that, comprises the following steps:
步骤1、利用式(1)构建光纤法布里-珀罗干涉微腔的光纤传感器的第m个干涉峰的波长变化量Δλm与光纤传感器的轴向应变Δε的关系式:Step 1, using formula (1) to construct the relationship between the wavelength variation Δλ m of the mth interference peak of the optical fiber sensor of the optical fiber Fabry-Perot interference microcavity and the axial strain Δε of the optical fiber sensor:
Δλm=(1-Pe)·λm·Δε=Kε·Δε (1)Δλ m = (1-P e )·λ m ·Δε=K ε ·Δε (1)
式(1)中:Pe是光纤的有效光弹性系数;λm是第m个干涉峰的波长;Kε是应变的波长灵敏度;In formula (1): P e is the effective photoelastic coefficient of the fiber; λ m is the wavelength of the mth interference peak; K ε is the wavelength sensitivity of the strain;
利用式(2)构建光纤传感器的第m个干涉峰的反射率变化量ΔRm与光纤传感器的轴向应变Δε的关系式:Use formula (2) to construct the relationship between the reflectivity change ΔR m of the m-th interference peak of the optical fiber sensor and the axial strain Δε of the optical fiber sensor:
式(2)中:α是某一量程标定下的归一化系数;LM表示光纤法布里-珀罗干涉微腔的长度;Sε是应变的反射率灵敏度;In formula (2): α is the normalization coefficient under a certain range calibration; L M represents the length of the optical fiber Fabry-Perot interference microcavity; S ε is the reflectivity sensitivity of the strain;
步骤2、利用式(3)构建光纤传感器的第m个干涉峰的波长变化量Δλm与光纤传感器的扭转角度Δθ的关系式:Step 2, using formula (3) to construct the relationship between the wavelength variation Δλ m of the m-th interference peak of the optical fiber sensor and the torsion angle Δθ of the optical fiber sensor:
式(3)中:r是光纤的纤芯半径;d是扭转梁的长度;Kθ是扭转角度的波长灵敏度;In formula (3): r is the fiber core radius; d is the length of the torsion beam; K θ is the wavelength sensitivity of the twist angle;
利用式(4)构建光纤传感器的第m个干涉峰的反射率变化量ΔRm与扭转角度Δθ的关系式:Use formula (4) to construct the relationship between the reflectivity change ΔR m and the twist angle Δθ of the m-th interference peak of the optical fiber sensor:
式(4)中:Sθ是扭转角度Δθ的反射率灵敏度;In formula (4): S θ is the reflectivity sensitivity of twist angle Δθ;
步骤3、利用式(5)构建光纤传感器的第m个干涉峰的波长变化量ΔRm与环境温度ΔT的关系式:Step 3, using formula (5) to construct the relationship between the wavelength variation ΔR m of the mth interference peak of the optical fiber sensor and the ambient temperature ΔT:
式(5)中:ζ是光纤的热光系数;α是光纤的热膨胀系数;KT是温度的波长灵敏度;In formula (5): ζ is the thermo-optic coefficient of the optical fiber; α is the thermal expansion coefficient of the optical fiber; K T is the wavelength sensitivity of temperature;
步骤4、利用式(6)构建光纤传感器的第m个干涉峰的波长变化量Δλm与介质浓度ΔW的关系式:Step 4, using formula (6) to construct the relationship between the wavelength variation Δλ m of the mth interference peak of the optical fiber sensor and the medium concentration ΔW:
式(6)中:δw是某一介质的折射率变化系数;neff是光纤的有效折射率;ncore是纤芯的折射率;Kw是介质浓度的波长灵敏度;L表示光纤光栅的总长度;In formula (6): δ w is the coefficient of change of the refractive index of a certain medium; n eff is the effective refractive index of the fiber; n core is the refractive index of the fiber core; K w is the wavelength sensitivity of the medium concentration; total length;
步骤5、利用式(7)构建波长相关系数Δvλ与波长灵敏度系数的关系式:Step 5, using formula (7) to construct the relationship between the wavelength correlation coefficient Δv λ and the wavelength sensitivity coefficient:
Δvλ=KC·ΔC+KV·ΔV (7)Δv λ =K C ·ΔC+K V ·ΔV (7)
式(7)中:ΔC表示温度、介质浓度类的恒腔长型参量;ΔV表示横向应变、扭转角度类的变腔长型参量;KC是恒腔长型参量独立变化时干涉峰波长漂移的灵敏度系数;KV是变腔长型参量独立变化时干涉峰波长漂移的灵敏度系数;In formula (7): ΔC represents the constant cavity length parameters such as temperature and medium concentration; ΔV represents the variable cavity length parameters such as lateral strain and torsion angle; K C is the interference peak wavelength shift when the constant cavity length parameters change independently The sensitivity coefficient of K V is the sensitivity coefficient of the interference peak wavelength drift when the variable cavity length parameter changes independently;
步骤6、利用式(8)构建对偶反射率相关系数ΔvR与变腔长型参量ΔV的关系式:Step 6. Use formula (8) to construct the relationship between the dual reflectance correlation coefficient Δv R and the variable cavity length parameter ΔV:
ΔvR=(SC1-SC2)·ΔC+(SV1-SV2)·ΔV=δSV·ΔV (8)Δv R =(S C1 -S C2 )·ΔC+(S V1 -S V2 )·ΔV=δS V ·ΔV (8)
式(8)中:SC1、SC2是恒腔长型参量独立变化时反射率相关谱中对偶相关峰λ1和λ2的反射率响应的灵敏度系数,且SC1-SC2=0;SV1、SV2是变腔长型参量独立变化时反射率相关谱中对偶相关峰λ1和λ2的反射率响应的灵敏度系数;δSV是对偶反射率系数,且δSV=SV1-SV2;In the formula (8): S C1 and S C2 are the sensitivity coefficients of the reflectance responses of the dual correlation peaks λ 1 and λ 2 in the reflectance correlation spectrum when the parameters of the constant cavity length change independently, and S C1 -S C2 =0; S V1 and S V2 are the sensitivity coefficients of the reflectance responses of the dual correlation peaks λ 1 and λ 2 in the reflectance correlation spectrum when the variable cavity length parameters change independently; δS V is the dual reflectance coefficient, and δS V =S V1 - S V2 ;
步骤7、利用式(9)构建波长相关系数、对偶反射率相关系数和三个灵敏度系数的矩阵表达式:Step 7, using formula (9) to construct the matrix expressions of wavelength correlation coefficient, dual reflectance correlation coefficient and three sensitivity coefficients:
步骤8、对式(9)进行解矩阵,从而利用式(10)得到温度、介质浓度类的恒腔长型参量ΔC和应变、扭转角度类的变腔长型参量ΔV:Step 8, solve the matrix of formula (9), so as to obtain the constant cavity length parameter ΔC of temperature and medium concentration and the variable cavity length parameter ΔV of strain and torsion angle by using formula (10):
本发明一种电子设备,包括存储器以及处理器的特点在于,所述存储器用于存储支持处理器执行所述混合参量同步测量方法的程序,所述处理器被配置为用于执行所述存储器中存储的程序。An electronic device according to the present invention, comprising a memory and a processor, is characterized in that the memory is used to store a program that supports the processor to execute the method for synchronous measurement of mixed parameters, and the processor is configured to execute the method in the memory stored program.
本发明一种计算机可读存储介质,计算机可读存储介质上存储有计算机程序的特点在于,所述计算机程序被处理器运行时执行所述混合参量同步测量方法的步骤。The present invention is a computer-readable storage medium, wherein a computer program is stored on the computer-readable storage medium, and the computer program is executed by a processor to execute the steps of the mixed parameter synchronous measurement method.
与已有技术相比,本发明的有益效果体现在:Compared with the prior art, the beneficial effects of the present invention are reflected in:
1、本发明中将不同被测参量根据作用机理归为两大类:一类是恒腔长型参量,仅引起光纤光栅自身参数(光栅的周期、有效折射率)的变化,例如温度、介质浓度等;另一类是变腔长型参量,在引起光纤光栅自身参数变化的同时,也会改变干涉腔的长度,例如应变、扭转角度等。通过两类参量不同的作用机理,在不同的被测参量之间建立相关性与差异性,从而能实现混合参量的同步感测。1. In the present invention, different measured parameters are classified into two categories according to the mechanism of action: one is the constant cavity length type parameter, which only causes changes in the parameters of the fiber grating itself (period of the grating, effective refractive index), such as temperature, medium Concentration, etc.; the other type is variable cavity length parameters, which will change the length of the interference cavity, such as strain, torsion angle, etc., while causing changes in the parameters of the fiber grating itself. Through the different action mechanisms of the two types of parameters, the correlation and difference between different measured parameters are established, so that the synchronous sensing of mixed parameters can be realized.
2、本发明中采用一种光纤法布里-珀罗干涉微腔,是由两部分切趾FBG和中间的微腔组成,通过电阻加热的方法于切趾光纤光栅中间一体形成。由于其独特的微腔结构,相比于均匀光纤光栅的单峰特性,其反射光谱中存在多个干涉峰,不同峰之间可以组成对偶相关峰以消除恒腔长型参量对反射率的影响,同时提高了测量的灵敏度。2. In the present invention, an optical fiber Fabry-Perot interference microcavity is used, which is composed of two parts of apodized FBG and a microcavity in the middle, and is integrally formed in the middle of the apodized fiber grating by means of resistance heating. Due to its unique microcavity structure, compared with the single-peak characteristic of a uniform fiber grating, there are multiple interference peaks in its reflection spectrum, and dual correlation peaks can be formed between different peaks to eliminate the influence of constant cavity length parameters on reflectivity. At the same time, the sensitivity of the measurement is improved.
3、本发明中引入了波长与反射率双相关检测方法,与仅使用波长检测的方法而言,传统波长检测的波长漂移灵敏度系数校准只能在每个参量独立作用时通过波长变化得到,当多个参量(例如应变和温度)同时改变并应用于同一FBG传感器时,仅使用单独的波长漂移,由混合参数引起的FBG波长漂移的交叉耦合是未知的,并且不能区分每个参量的贡献。因此,通过波长检测与反射率检测相结合的方式,根据两个参数的变化实现了两个参量真正意义上的同步检测,能够区分每个参量的贡献,从而消除了参量间交叉敏感的影响。3. The present invention introduces a double-correlation detection method of wavelength and reflectivity. Compared with the method of only using wavelength detection, the calibration of wavelength drift sensitivity coefficient of traditional wavelength detection can only be obtained by changing the wavelength when each parameter acts independently. When multiple parameters (such as strain and temperature) are changed simultaneously and applied to the same FBG sensor, only the individual wavelength shifts are used, the cross-coupling of the FBG wavelength shift caused by the mixed parameters is unknown, and the contribution of each parameter cannot be distinguished. Therefore, through the combination of wavelength detection and reflectance detection, the real synchronous detection of the two parameters can be realized according to the changes of the two parameters, and the contribution of each parameter can be distinguished, thereby eliminating the influence of cross-sensitivity between parameters.
4、本发明中建立了恒腔长型参量和变腔长型参量与多干涉峰波长和对偶峰归一化反射率的交叉解耦关系式,通过跟踪反射谱中波长改变量和归一化反射率变化量,即可实现混合参量的同步测量与解耦。该方法可行可靠、标定过程简单、实施成本较低、具有一定的普遍适用性。4. In the present invention, the cross-decoupling relationship between constant cavity length parameters and variable cavity length parameters and multi-interference peak wavelengths and even-peak normalized reflectivity is established. By tracking the wavelength change and normalization in the reflection spectrum The amount of change in reflectivity can realize the simultaneous measurement and decoupling of mixing parameters. The method is feasible and reliable, the calibration process is simple, the implementation cost is low, and it has certain universal applicability.
附图说明Description of drawings
图1是腔长为0.4mm的光纤传感器反射光谱仿真图;Figure 1 is a simulation diagram of the reflection spectrum of an optical fiber sensor with a cavity length of 0.4 mm;
图2是腔长为0.8mm的光纤传感器反射光谱仿真图;Figure 2 is a simulation diagram of the reflection spectrum of an optical fiber sensor with a cavity length of 0.8mm;
图3是光纤法布里-珀罗干涉微腔的结构示意图;Fig. 3 is the structure diagram of optical fiber Fabry-Perot interference microcavity;
图4是26-40℃温度范围内多个干涉峰的波长标定测量结果图;Figure 4 is a graph of wavelength calibration measurement results of multiple interference peaks in the temperature range of 26-40°C;
图5是26-40℃温度范围内多个干涉峰的归一化反射率标定测量数据图;Figure 5 is a graph of normalized reflectance calibration measurement data of multiple interference peaks in the temperature range of 26-40°C;
图6是0-800με应变范围内多个干涉峰的波长标定测量结果图;Figure 6 is a graph of wavelength calibration measurement results of multiple interference peaks in the strain range of 0-800με;
图7是0-800με应变范围内多个干涉峰的归一化反射率标定测量结果图;Figure 7 is a graph of normalized reflectance calibration measurement results of multiple interference peaks within the strain range of 0-800με;
图8是0-360°扭转角度范围内多个干涉峰的波长标定测量结果图;Fig. 8 is a graph of wavelength calibration measurement results of multiple interference peaks in the range of 0-360° torsion angle;
图9是0-360°扭转角度范围内多个干涉峰的归一化反射率标定测量结果图;Fig. 9 is a graph of normalized reflectance calibration measurement results of multiple interference peaks in the range of 0-360° torsion angle;
图10是温度与应变同时测量中第1、2对偶干涉峰的波长测量均值图;Figure 10 is a graph of the wavelength measurement average of the first and second dual interference peaks in the simultaneous measurement of temperature and strain;
图11是温度与应变同时测量中第1、2对偶干涉峰的归一化反射率测量均值图。Fig. 11 is a graph of the normalized reflectance measurement average value of the first and second dual interference peaks in the simultaneous measurement of temperature and strain.
具体实施方式Detailed ways
本实施例中,一种基于光纤法布里-珀罗干涉微腔的混合参量同步测量方法,是探讨环境温度、介质浓度、横向应变以及扭转角度等机理影响因子对光纤光栅自身参数以及干涉结构的物理化学机理影响,将各种参量定义为恒腔长型参量和变腔长型参量两大类,基于反射率的微腔长度响应特性可进行两类参量的区分,使该研究在利用干涉结构进行物理化学测量中具有普遍指导意义;同时,基于光纤法布里-珀罗干涉微腔反射光谱的多峰特性,利用微腔长度响应特性的波长与反射率双相关检测方法,可实现两种不同类型参量的同步测量与解耦,消除了参量间交叉敏感的影响,具体的说,该方法包括如下步骤:In this embodiment, a method for synchronous measurement of mixed parameters based on fiber Fabry-Perot interference microcavity is to explore the influence factors such as ambient temperature, medium concentration, transverse strain and torsion angle on the parameters of the fiber grating itself and the interference structure. Influenced by the physical and chemical mechanism of the microcavity, various parameters are defined as constant cavity length parameters and variable cavity length parameters. At the same time, based on the multi-peak characteristics of the reflection spectrum of the optical fiber Fabry-Perot interference microcavity, using the double correlation detection method of wavelength and reflectance of the microcavity length response characteristics, two The simultaneous measurement and decoupling of two different types of parameters eliminates the influence of cross-sensitivity between parameters. Specifically, the method includes the following steps:
步骤1、利用式(1)构建光纤法布里-珀罗干涉微腔的光纤传感器的第m个干涉峰的波长变化量Δλm与光纤传感器的轴向应变Δε的关系式:Step 1, using formula (1) to construct the relationship between the wavelength variation Δλ m of the mth interference peak of the optical fiber sensor of the optical fiber Fabry-Perot interference microcavity and the axial strain Δε of the optical fiber sensor:
Δλm=(1-Pe)·λm·Δε=Kε·Δε (1)Δλ m = (1-P e )·λ m ·Δε=K ε ·Δε (1)
式(1)中:Pe是光纤的有效光弹性系数;λm是第m个干涉峰的波长;Kε是应变的波长灵敏度;In formula (1): P e is the effective photoelastic coefficient of the fiber; λ m is the wavelength of the mth interference peak; K ε is the wavelength sensitivity of the strain;
利用式(2)构建光纤传感器的第m个干涉峰的反射率变化量ΔRm与光纤传感器的轴向应变Δε的关系式:Use formula (2) to construct the relationship between the reflectivity change ΔR m of the m-th interference peak of the optical fiber sensor and the axial strain Δε of the optical fiber sensor:
式(2)中:α是某一量程标定下的归一化系数;Sε是应变的反射率灵敏度;LM表示光纤法布里-珀罗干涉微腔的长度;In formula (2): α is the normalization coefficient under a certain range calibration; S ε is the reflectivity sensitivity of the strain; L M represents the length of the optical fiber Fabry-Perot interference microcavity;
步骤2、利用式(3)构建光纤传感器的第m个干涉峰的波长变化量Δλm与光纤传感器的扭转角度Δθ的关系式:Step 2, using formula (3) to construct the relationship between the wavelength variation Δλ m of the m-th interference peak of the optical fiber sensor and the torsion angle Δθ of the optical fiber sensor:
式(3)中:r是光纤的纤芯半径;d是扭转梁的长度;Kθ是扭转角度的波长灵敏度;In formula (3): r is the fiber core radius; d is the length of the torsion beam; K θ is the wavelength sensitivity of the twist angle;
利用式(4)构建光纤传感器的第m个干涉峰的反射率变化量ΔRm与扭转角度Δθ的关系式:Use formula (4) to construct the relationship between the reflectivity change ΔR m and the twist angle Δθ of the m-th interference peak of the optical fiber sensor:
式(4)中:Sθ是扭转角度Δθ的反射率灵敏度;In formula (4): S θ is the reflectivity sensitivity of twist angle Δθ;
步骤3、利用式(5)构建光纤传感器的第m个干涉峰的波长变化量ΔRm与环境温度ΔT的关系式:Step 3, using formula (5) to construct the relationship between the wavelength variation ΔR m of the mth interference peak of the optical fiber sensor and the ambient temperature ΔT:
Δλm=(α+ζ)·λm·ΔT=KT·ΔT (5)式(5)中:ζ是光纤的热光系数;α是光纤的热膨胀系数;KT是温度的波长灵敏度;Δλ m = (α+ζ) λ m ΔT=K T ΔT (5) In formula (5): ζ is the thermo-optic coefficient of the optical fiber; α is the thermal expansion coefficient of the optical fiber; K T is the wavelength sensitivity of temperature;
步骤4、利用式(6)构建光纤传感器的第m个干涉峰的波长变化量Δλm与介质浓度Δw的关系式:Step 4, using formula (6) to construct the relationship between the wavelength variation Δλ m of the mth interference peak of the optical fiber sensor and the medium concentration Δw:
式(6)中:δw是某一介质的折射率变化系数;neff是光纤的有效折射率;ncore是纤芯的折射率;Kw是介质浓度的波长灵敏度;L表示光纤光栅的总长度;In formula (6): δ w is the coefficient of change of the refractive index of a certain medium; n eff is the effective refractive index of the fiber; n core is the refractive index of the fiber core; K w is the wavelength sensitivity of the medium concentration; total length;
步骤5、利用式(7)构建波长相关系数Δvλ与波长灵敏度系数的关系式:Step 5, using formula (7) to construct the relationship between the wavelength correlation coefficient Δv λ and the wavelength sensitivity coefficient:
Δvλ=KC·ΔC+KV·ΔV (7)Δv λ =K C ·ΔC+K V ·ΔV (7)
式(7)中:ΔC表示温度、介质浓度类的恒腔长型参量;ΔV表示横向应变、扭转角度类的变腔长型参量;KC是恒腔长型参量独立变化时干涉峰波长漂移的灵敏度系数;KV是变腔长型参量独立变化时干涉峰波长漂移的灵敏度系数;In formula (7): ΔC represents the constant cavity length parameters such as temperature and medium concentration; ΔV represents the variable cavity length parameters such as lateral strain and torsion angle; K C is the interference peak wavelength shift when the constant cavity length parameters change independently The sensitivity coefficient of K V is the sensitivity coefficient of the interference peak wavelength drift when the variable cavity length parameter changes independently;
步骤6、利用式(8)构建对偶反射率相关系数ΔvR与变腔长型参量ΔV的关系式:Step 6. Use formula (8) to construct the relationship between the dual reflectance correlation coefficient Δv R and the variable cavity length parameter ΔV:
ΔvR=(SC1-SC2)·ΔC+(SV1-SV2)·ΔV=δSV·ΔV (8)Δv R =(S C1 -S C2 )·ΔC+(S V1 -S V2 )·ΔV=δS V ·ΔV (8)
式(8)中:SC1、SC2是恒腔长型参量独立变化时反射率相关谱中对偶相关峰λ1和λ2的反射率响应的灵敏度系数,且SC1-SC2=0;SV1、SV2是变腔长型参量独立变化时反射率相关谱中对偶相关峰λ1和λ2的反射率响应的灵敏度系数;δSV是对偶反射率系数,且δSV=SV1-SV2;In the formula (8): S C1 and S C2 are the sensitivity coefficients of the reflectance responses of the dual correlation peaks λ 1 and λ 2 in the reflectance correlation spectrum when the parameters of the constant cavity length change independently, and S C1 -S C2 =0; S V1 and S V2 are the sensitivity coefficients of the reflectance responses of the dual correlation peaks λ 1 and λ 2 in the reflectance correlation spectrum when the variable cavity length parameters change independently; δS V is the dual reflectance coefficient, and δS V =S V1 - S V2 ;
步骤7、利用式(9)构建波长相关系数、对偶反射率相关系数和三个灵敏度系数的矩阵表达式:Step 7, using formula (9) to construct the matrix expressions of wavelength correlation coefficient, dual reflectance correlation coefficient and three sensitivity coefficients:
步骤8、对式(9)进行解矩阵,从而利用式(10)得到温度、介质浓度类的恒腔长型参量ΔC和应变、扭转角度类的变腔长型参量ΔV同步测量关系式:Step 8, solve the matrix of formula (9), so as to use formula (10) to obtain the constant cavity length parameter ΔC of temperature and medium concentration, and the variable cavity length parameter ΔV of strain and torsion angle. Synchronous measurement relational formula:
因此,式(10)给出了恒腔长型参量、变腔长型参量与波长和反射率的函数关系式,通过跟踪多个干涉峰的波长与对偶反射率变化,即可以实现混合参量的同时测量与解耦。Therefore, Equation (10) gives the functional relationship between constant cavity length parameters, variable cavity length parameters and wavelength and reflectivity. By tracking the wavelength and dual reflectivity changes of multiple interference peaks, the mixing parameters can be realized Simultaneous measurement and decoupling.
本实施例中,通过电阻加热技术制作了光纤法布里-珀罗干涉微腔传感器,微腔于切趾FBG一体成型,其微腔的直径与长度分别为110μm、1.1mm;其光纤法布里-珀罗干涉微腔的传输函数可表示为:In this example, an optical fiber Fabry-Perot interference microcavity sensor was fabricated by resistive heating technology. The transfer function of the R-Perot interference microcavity can be expressed as:
式(11)中:a[Z0]和b[Z0]表示光纤法布里-珀罗干涉微腔一端的前向和后向光,a[Z1]和b[Z1]是另一端的前向和后向光;β和β0分别表示普通光纤和微光纤的传播常数;L和LM分别表示光纤光栅的总长度和干涉微腔的长度;t是光纤光栅的透射率;FA1和FA2是左右两个切趾光纤光栅反射面的传输矩阵。In formula (11): a[Z 0 ] and b[Z 0 ] represent the forward and backward light at one end of the fiber Fabry-Perot interference microcavity, a[Z 1 ] and b[Z 1 ] are the other Forward and backward light at one end; β and β0 denote the propagation constants of ordinary fiber and microfiber, respectively; L and L M denote the total length of the fiber grating and the length of the interference microcavity, respectively; t is the transmittance of the fiber grating; F A1 and F A2 are the transmission matrices of the two left and right apodized FBG reflective surfaces.
因此,式(11)给出了光纤法布里-珀罗干涉微腔的传递函数,可以模拟在恒腔长型参量和变腔长型参量影响下的反射和透射光谱变化,并且给出了不同微腔长度下的光谱形状,可用于梳状滤波器的制备。同时揭示了光栅周期和有效折射率的变化会引起波长的改变、而微腔长度的改变会引起反射率的改变,这为混合参量的同时测量提供可行性。Therefore, equation (11) gives the transfer function of the fiber Fabry-Perot interference microcavity, which can simulate the reflection and transmission spectrum changes under the influence of constant cavity length parameters and variable cavity length parameters, and gives The spectral shape under different microcavity lengths can be used in the preparation of comb filters. At the same time, it is revealed that the change of the grating period and the effective refractive index will cause the change of the wavelength, and the change of the length of the microcavity will cause the change of the reflectivity, which provides the feasibility for the simultaneous measurement of mixed parameters.
图1是微腔长度为0.4mm时反射光谱图,此时光谱中四个干涉峰呈轴对称状;图2是微腔长度为0.8mm时反射光谱图,此时光谱中五个干涉峰呈轴对称状。图3是光纤法布里-珀罗干涉微腔的形状示意图,由两部分切趾FBG和一个干涉微腔组成。Figure 1 is the reflectance spectrum when the microcavity length is 0.4mm, and the four interference peaks in the spectrum are axisymmetric at this time; Figure 2 is the reflection spectrum when the microcavity length is 0.8mm, and the five interference peaks in the spectrum are Axisymmetric shape. Fig. 3 is a schematic diagram of the shape of an optical fiber Fabry-Perot interference microcavity, which consists of two parts of apodized FBG and an interference microcavity.
本实例中,首先需进行温度、应变和扭转角度分别单独作用下的波长漂移灵敏度系数和归一化反射率漂移灵敏度系数的标定。In this example, it is first necessary to calibrate the wavelength drift sensitivity coefficient and the normalized reflectance drift sensitivity coefficient under the independent effects of temperature, strain and torsion angle.
为验证不同温度对光纤法布里-珀罗干涉微腔反射光谱的影响规律,设置26-40℃的温度变化范围。如图4所示,多干涉峰在温度影响下,波长呈现一致的线性变化,可得温度的波长灵敏度系数KT≈12pm/℃;图5表明多干涉峰归一化反射率在温度影响下也呈现一致的线性变化。In order to verify the influence of different temperatures on the reflection spectrum of the optical fiber Fabry-Perot interference microcavity, a temperature range of 26-40 °C was set. As shown in Figure 4, under the influence of temperature, the wavelength of multiple interference peaks shows a consistent linear change, and the wavelength sensitivity coefficient K T ≈ 12pm/℃ can be obtained; There is also a consistent linear change.
本实施例中,为提供光纤轴向微应变,将三维位移平台的X轴与步进电机转轴通过联轴器相连,并且通过FPGA程序控制电机转动,以实现分辨率为1με的精准应变。本实施例中为验证不同应变对光纤法布里-珀罗干涉结构反射光谱的影响规律,设置了从0-800με的应变范围。图6表明多干涉峰的波长与应变呈现一致增加的线性变化,可得应变的波长漂移灵敏度Kε≈0.8pm/με;图7表明不同干涉峰的归一化反射率与应变呈现变化趋势不一致的线性变化。结合温度测试中的归一化反射率变化趋势,因此在温度与应变同时测量中,利用两个干涉峰之差就可以消除温度的影响,干涉峰λ1和λ2归一化反射率应变灵敏度为0.00249/με,为应变的对偶反射率系数δSV提供具体数值。In this embodiment, in order to provide optical fiber axial micro-strain, the X-axis of the three-dimensional displacement platform is connected with the stepper motor shaft through a coupling, and the motor rotation is controlled by an FPGA program to achieve precise strain with a resolution of 1με. In this embodiment, in order to verify the influence of different strains on the reflection spectrum of the optical fiber Fabry-Perot interference structure, a strain range from 0-800 με is set. Figure 6 shows that the wavelength of multiple interference peaks and the strain increase linearly, and the wavelength drift sensitivity K ε ≈ 0.8pm/με of the strain can be obtained; Figure 7 shows that the normalized reflectance of different interference peaks is inconsistent with the strain linear change. Combining with the change trend of normalized reflectance in temperature test, in the simultaneous measurement of temperature and strain, the influence of temperature can be eliminated by using the difference between two interference peaks, the normalized reflectance strain sensitivity of interference peaks λ 1 and λ 2 is 0.00249/με, providing a specific value for the dual reflectance coefficient δS V of the strain.
本实施例中,将光纤夹具与特制联轴器固定,同时与步进电机转轴相连,使光纤与转轴中心处于同一水平线,并通过FPGA程序控制电机转动实现扭转角度的改变,分辨率为0.72°。本实施例中为验证不同扭转角度对光纤法布里-珀罗干涉微腔反射光谱的影响规律,设置了从0-360°的扭转角度范围。图8表明多干涉峰的波长与扭转角度呈现一致的余弦变化,扭转角度的波长灵敏度系数Kθ≈310.6pm;图9表明不同干涉峰的归一化反射率与应变呈现变化趋势不一致的余弦变化。同理,在温度与扭转角度同时测量中,利用差分的方法就可以消除温度的影响,可以得到扭转角度的对偶反射率系数δSV为0.935。In this embodiment, the optical fiber clamp is fixed with a special coupling, and at the same time it is connected to the rotating shaft of the stepping motor, so that the center of the optical fiber and the rotating shaft is at the same horizontal line, and the rotation of the motor is controlled by the FPGA program to change the torsion angle, with a resolution of 0.72° . In this embodiment, in order to verify the influence of different twist angles on the reflection spectrum of the optical fiber Fabry-Perot interference microcavity, a range of twist angles from 0° to 360° is set. Figure 8 shows that the wavelength of multiple interference peaks and the torsion angle show consistent cosine changes, and the wavelength sensitivity coefficient K θ ≈ 310.6pm of torsion angles; Figure 9 shows that the normalized reflectivity and strain of different interference peaks show inconsistent cosine changes . Similarly, in the simultaneous measurement of temperature and torsion angle, the influence of temperature can be eliminated by using the differential method, and the dual reflectance coefficient δS V of the torsion angle can be obtained as 0.935.
本实例中,进行了温度(恒腔长型参量)与应变(变腔长型参量)的同步测量。为准确控制应变和温度参量,实验分为三个步骤:首先施加预应力使光纤处于绷紧拉直状态,控制恒温箱温度恒定,将此状态记为初始状态(I)记录波长和光功率测量值;X方向位移平台移动50um,对应于500με的光纤轴向应力,将此状态记过渡状态(II),记录此时的波长和光功率测量值;保持此应力,将温度增加约3℃,将此状态记为温度与应变同时改变后的最终状态(III)记录下最后的波长和光功率测量值。图10是三个状态下第1、2对偶干涉峰的波长测量均值,波长相关系数图11是三个状态下第1、2对偶干涉峰的反射率测量均值,对偶反射率相关系数/>将上诉波长与对偶反射率相关系数代入交叉解耦公式,结合标定的灵敏度系数即可实现温度与应变的同步测量。同时经过误差修正后,以应变变化量500με、温度变化量3.0℃为标准量,实际测量和解耦计算的应变相对误差为0.8%,温度相对误差为4.0%,证明了混合参量同时测量的可行性。In this example, the simultaneous measurement of temperature (constant cavity length parameter) and strain (variable cavity length parameter) is carried out. In order to accurately control the strain and temperature parameters, the experiment is divided into three steps: firstly, prestress is applied to make the optical fiber in a state of tension and straightening, and the temperature of the thermostat is controlled to be constant. This state is recorded as the initial state (I) and the measured values of wavelength and optical power are recorded. ; The X-direction displacement platform moves 50um, corresponding to the fiber axial stress of 500με, this state is recorded as the transition state (II), and the measured value of wavelength and optical power at this time is recorded; keep this stress, increase the temperature by about 3°C, and The state is recorded as the final state (III) after simultaneous changes in temperature and strain. Record the final wavelength and optical power measurements. Figure 10 is the wavelength measurement average of the first and second dual interference peaks in the three states, and the wavelength correlation coefficient Figure 11 is the mean value of the reflectance measurement of the first and second dual interference peaks in the three states, and the correlation coefficient of the dual reflectance /> Substituting the correlation coefficient of wavelength and dual reflectivity into the cross decoupling formula, combined with the calibrated sensitivity coefficient, the simultaneous measurement of temperature and strain can be realized. At the same time, after error correction, the relative error of strain from actual measurement and decoupling calculation is 0.8%, and the relative error of temperature is 4.0%, taking the strain change of 500με and temperature change of 3.0°C as the standard quantity, which proves the feasibility of simultaneous measurement of mixed parameters sex.
综上所述,通过光纤法布里-珀罗干涉微腔的建模和光谱仿真,建立了恒腔长型和变腔长型参量的波长响应特性与反射率微腔长度响应特性关系,解析了基于微腔长度相关性的混合参量同步测量与解耦的机理。本文将各种参量根据影响机理的差异归为两大类,即恒腔长型和变腔长型的两大类参量,利用微腔长度对不同类型参量的相关响应特性进行多种参量的区分和解耦。该方法为多参量的同步测量提供了一种具有普遍适用性的理论方法,同时实现了无任何涂覆层的单一光纤光栅传感器实现多参量同时测量的机理和方法,且具有成本低、制造简单、参数可控等优势。To sum up, through the modeling and spectral simulation of the optical fiber Fabry-Perot interference microcavity, the relationship between the wavelength response characteristics of the constant cavity length type and variable cavity length type parameters and the reflectivity microcavity length response characteristics was established, and analyzed The mechanism of synchronous measurement and decoupling of mixing parameters based on microcavity length correlation is proposed. In this paper, various parameters are classified into two categories according to the difference in the influencing mechanism, namely, the two types of parameters of constant cavity length and variable cavity length, and use the length of the microcavity to distinguish the relevant response characteristics of different types of parameters. and decoupling. This method provides a theoretical method with universal applicability for simultaneous measurement of multiple parameters, and at the same time realizes the mechanism and method of simultaneous measurement of multiple parameters with a single fiber grating sensor without any coating layer, and has the advantages of low cost and simple manufacture , controllable parameters and other advantages.
本实施例中,一种电子设备,包括存储器以及处理器,该存储器用于存储支持处理器执行上述方法的程序,该处理器被配置为用于执行该存储器中存储的程序。In this embodiment, an electronic device includes a memory and a processor, the memory is used to store a program supporting the processor to execute the above method, and the processor is configured to execute the program stored in the memory.
本实施例中,一种计算机可读存储介质,是在计算机可读存储介质上存储有计算机程序,该计算机程序被处理器运行时执行上述方法的步骤。In this embodiment, a computer-readable storage medium stores a computer program on the computer-readable storage medium, and the computer program executes the steps of the above method when the computer program is run by a processor.
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| CN120489369A (en) * | 2025-07-17 | 2025-08-15 | 成都飞机工业(集团)有限责任公司 | Optical fiber temperature strain measurement decoupling method and system |
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