CN116673249B - Cleaning system and cleaning process for monocrystalline silicon slice production - Google Patents
Cleaning system and cleaning process for monocrystalline silicon slice production Download PDFInfo
- Publication number
- CN116673249B CN116673249B CN202310725001.1A CN202310725001A CN116673249B CN 116673249 B CN116673249 B CN 116673249B CN 202310725001 A CN202310725001 A CN 202310725001A CN 116673249 B CN116673249 B CN 116673249B
- Authority
- CN
- China
- Prior art keywords
- monocrystalline silicon
- cleaning
- assembly
- discharging frame
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a cleaning system for monocrystalline silicon slice production, and belongs to the technical field of monocrystalline silicon production and processing equipment. The cleaning system for the monocrystalline silicon slice production comprises a base, a supporting frame and a box body, wherein the supporting frame and the box body are arranged at the top of the base, a lifting assembly is arranged on the supporting frame, the output end of the lifting assembly is connected with a Z-shaped connecting plate, one end, far away from the lifting assembly, of the Z-shaped connecting plate is detachably connected with a discharging frame for placing monocrystalline silicon slices, a cleaning assembly and a spraying assembly are arranged in the box body, the cleaning assembly and the spraying assembly are matched with each other, a swinging assembly connected with the spraying assembly is arranged on the inner wall of the box body, and a transmission assembly is arranged between the end part of the discharging frame and the inner wall of the box body; the invention can clean a plurality of groups of monocrystalline silicon slices at the same time, improves the cleaning efficiency of the monocrystalline silicon slices, can comprehensively spray and rinse the monocrystalline silicon slices, and avoids the impurities still adhered on the surfaces of the monocrystalline silicon slices, thereby thoroughly cleaning the monocrystalline silicon slices and ensuring the cleaning effect of the monocrystalline silicon slices.
Description
Technical Field
The invention relates to the technical field of monocrystalline silicon production and processing equipment, in particular to a cleaning system and a cleaning process for monocrystalline silicon slice production.
Background
The crystal silicon wafer is a crystal with a basically complete lattice structure, has different properties in different directions, is a good semiconductor material and is widely used for manufacturing semiconductor devices, solar cells and the like, and the monocrystalline silicon is a relatively active nonmetallic element and is an important component part of a crystal material and is in the front of the development of new materials. The material is mainly used as a semiconductor material, and is used for generating electricity, supplying heat and the like by utilizing solar energy and photovoltaic. Because solar energy has many advantages such as clean, environmental protection, convenience, etc., solar energy utilization technology has obtained long-term development in research and development, commercial production, market development in the past thirty years, become one of the emerging industry of quick, steady development in the world, and monocrystalline silicon piece is orderly processed from the silicon rod through the slicer, and the surface of monocrystalline silicon piece after cutting can be attached with binder, organic matter and silica flour, if do not get rid of this material, influence monocrystalline silicon piece's performance, consequently need wash it.
Through retrieving, the invention patent of publication number CN107737744A discloses a belt cleaning device for monocrystalline silicon slice production, which comprises a base, the support frame of L shape structure has all been welded in the top outer wall four corners of base, the bottom joint of support frame has the sucking disc, the top outer wall of base has the box through the screw fixation, and the top of box is open structure, the closing cap has been cup jointed at the top of box, the top outer wall welding of closing cap has the mounting box, the bottom inner wall joint of mounting box has the battery, the bottom inner wall of closing cap has the second hydraulic cylinder through the screw fixation, the bottom welding of second hydraulic cylinder has the connecting plate, and the bottom of connecting plate has the motor through the screw fixation. The invention has simple structure, and the whole design ensures that some adhesives, organic matters and silicon powder attached to the surface of the monocrystalline silicon wafer can be cleaned up quickly, so that the physical and chemical cleaning methods are carried out simultaneously, the cleaning speed is increased, and the working efficiency is improved; although the device can play certain cleaning effect to monocrystalline silicon section, the device is complex in operation when using, and can only wash a monocrystalline silicon section at every turn, and cleaning efficiency is comparatively low, secondly, the device only adopts to wash with the soft wool top in the box inside, and the condition that the impurity still can appear adhering on monocrystalline silicon section surface after the washing, and the clearance is comparatively thorough, therefore the device still has certain shortcoming.
Disclosure of Invention
The invention aims to solve the problems that the prior art is complex in operation, only one single crystal silicon slice can be cleaned each time, the cleaning efficiency is low, and secondly, the device only adopts soft wool tops to brush the inside of a box body, impurities still adhere to the surface of the single crystal silicon slice after the brushing, and the cleaning is not thorough.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the utility model provides a cleaning system is used in monocrystalline silicon section production, includes the base and sets up support frame and the box at the base top, be provided with lifting unit on the support frame, the lifting unit output is connected with Z type connecting plate, Z type connecting plate is kept away from lifting unit's one end and can is dismantled and be connected with the work or material rest that is used for placing monocrystalline silicon section, the box is inside to have set gradually down with work or material rest matched with cleaning unit and spray the subassembly, be provided with on the box inner wall and be connected with the swing subassembly that realizes spraying the subassembly and swing in order to realize improving the spraying effect with spraying the subassembly, be provided with between work or material rest tip and the box inner wall and be used for driving monocrystalline silicon section on the work or material rest and rotate and spray the drive assembly that the subassembly cooperatees in order to realize the clearance thoroughly, the work or material rest reciprocates along the support frame under lifting unit's effect, work or material rest moves to the bottom with cleaning unit when reaching the lifting unit.
As the preferred technical scheme of this application, lifting unit is including setting up in the first driving motor at support frame top, setting up between the support frame and the lead screw that is connected with first driving motor output, connect the guide bar between the support frame and link to each other with the lead screw thread and the mounting panel that links to each other with the guide bar slip, Z type connecting plate connects on the mounting panel outer wall.
As the preferred technical scheme of this application, the blowing frame includes the supporting seat, rotates first support column and two sets of second support columns of connection between the supporting seat, all be provided with on first support column and the two sets of second support columns with monocrystalline silicon section matched with draw-in groove, and be triangular structure between first support column and the second support column, wherein, first support column passes through the locating plate activity setting on the supporting seat inner wall, and is connected with the supporting seat through the locking bolt, and the both ends portion of two sets of second support columns pass the supporting seat and are connected with drive assembly.
As the preferred technical scheme of this application, be provided with the fluting on the Z type connecting plate inner wall, be provided with on the supporting seat outer wall with fluting matched with connecting strip, be provided with the locating pin between Z type connecting plate and the connecting strip.
As the preferred technical scheme of this application, wash the subassembly including through first fixed plate setting second driving motor on the box outer wall, through the axis of rotation that the drive belt is connected with second driving motor and set up on the axis of rotation outer wall and with the blowing frame cooperate in order to realize carrying out abluent brush roller to the monocrystalline silicon section on the blowing frame.
As the preferred technical scheme of this application, spray the subassembly and include setting up mount pad and the shower head of rotationally installing on the mount pad on the box inner wall.
As the preferred technical scheme of this application, swing subassembly includes through the third driving motor of second fixed plate setting on the box inner wall, connects at the half gear of third driving motor output, sliding connection in second fixed plate bottom and with half gear engagement continuous tooth frame and with tooth frame link to each other and with the link that the shower head rotated and link to each other.
As the preferred technical scheme of this application, drive assembly is including setting up the pinion rack that just meshes with the pinion rack on the box inner wall at two sets of second support column both ends.
As the preferred technical scheme of this application, box, blowing frame, cleaning module, spray assembly and drive assembly all are provided with two sets of along lifting unit symmetry, and two sets of blowing frames are all connected with lifting unit through Z connecting plate.
The cleaning process of the cleaning system for producing the monocrystalline silicon slice specifically comprises the following steps:
s1: placing the monocrystalline silicon slice to be cleaned in a clamping groove 304 formed in a second support column 303, arranging a first support column 302 and the monocrystalline silicon slice on a support seat correspondingly, and fixing the positions of the first support column 302 and the monocrystalline silicon slice through a positioning plate and a locking bolt, so that the monocrystalline silicon slice is stably fixed in a discharging frame;
s2: the material placing frame is fixed on the Z-shaped connecting plate, and when the material placing frame is fixed, connecting strips on the material placing frame are butted into grooves on the Z-shaped connecting plate and positioned through positioning pins, so that the material placing frame and the Z-shaped connecting plate are fixed;
s3: the method comprises the steps that a first driving motor is started to drive a screw rod connected with the output end of the first driving motor to rotate clockwise, a guide rod is arranged to drive a mounting plate connected to the outer wall of the first driving motor to move downwards along the axial direction of the guide rod, and then a Z-shaped connecting plate and a discharging frame are driven to move downwards along the axial direction of the guide rod, so that the discharging frame is conveyed into a box body, chemical cleaning agents are placed in the box body, when the mounting plate moves to the bottommost part of a lifting assembly, the discharging frame is matched with a cleaning assembly, and the cleaning assembly is started to clean monocrystalline silicon slices on the discharging frame;
s4: the second driving motor is started to drive the transmission belt connected with the output end of the second driving motor to rotate, so that the rotation shaft connected with the second driving motor is driven to rotate, the brush roller connected to the outer wall of the second driving motor is driven to rotate, monocrystalline silicon slices on the discharging frame are cleaned, a plurality of groups of monocrystalline silicon slices can be cleaned simultaneously through the matching of the discharging frame and the cleaning assembly, and the cleaning efficiency of the monocrystalline silicon slices is effectively improved;
s5: after a single crystal silicon slice is washed by a brush roller, a first driving motor is started to rotate anticlockwise, a Z-shaped connecting plate connected with the output end of the first driving motor and a discharging frame are driven to move upwards along the axial direction of a guide rod, a water pump is started to spray the single crystal silicon slice on the discharging frame through a spray header, when the discharging frame is driven to move upwards by a lifting assembly, through all gears arranged at two ends of the second supporting columns and toothed plates meshed with the all gears and arranged on the inner wall of a box body, when the discharging frame moves upwards, two groups of second supporting columns are driven to rotate, then the single crystal silicon slice on the discharging frame is driven to rotate, and the single crystal silicon slice is comprehensively sprayed by the spray header arranged in a matched mode, so that the condition that the washed impurities are adhered to the surface of the single crystal silicon slice to cause incomplete cleaning can be effectively prevented;
s6: when the spraying assembly is started to spray, the third driving motor is started to drive the semi-gear connected with the output end of the third driving motor to rotate, and then the toothed frame connected with the toothed frame in engagement with the toothed frame is driven to reciprocate left and right along the bottom wall of the second fixing plate, so that the connecting frame connected with the toothed frame is driven to reciprocate left and right, the toothed frame is connected with the toothed frame in rotation, the toothed frame is driven to swing through the connecting frame and the spraying head, the spraying head can be driven to swing, the spraying effect of the spraying head on monocrystalline silicon slices is further improved, and the cleaning effect on the monocrystalline silicon slices is further improved.
Compared with the prior art, the invention provides a cleaning system for monocrystalline silicon slice production, which has the following beneficial effects:
1. according to the cleaning system for single crystal silicon slice production, through the matching of the arranged discharging frame and the cleaning assembly, multiple groups of single crystal silicon slices can be cleaned at the same time, the cleaning efficiency of the single crystal silicon slices can be effectively improved, and the cleaning system is simple to operate and convenient to use;
2. according to the cleaning system for the monocrystalline silicon slice production, the monocrystalline silicon slice on the discharging frame can be driven to rotate through the spraying assembly, the transmission assembly and the swinging assembly, and meanwhile the swinging assembly can drive the spraying assembly to swing, so that the monocrystalline silicon slice can be comprehensively sprayed and washed, impurities are prevented from adhering to the surface of the monocrystalline silicon slice, the monocrystalline silicon slice is thoroughly cleaned, and the cleaning effect of the monocrystalline silicon slice is guaranteed;
3. this cleaning system is used in monocrystalline silicon section production is provided with two sets of through box, blowing frame, cleaning assembly, spray assembly and drive assembly along lifting unit symmetry to can wash monocrystalline silicon section on two sets of blowing frames simultaneously, further improvement cleaning efficiency.
Drawings
FIG. 1 is a schematic diagram of a cleaning system for producing silicon single crystal slices according to the present invention;
FIG. 2 is a front view of a cleaning system for single crystal silicon slice production according to the present invention;
FIG. 3 is a schematic diagram showing a cleaning system for producing silicon single crystal slices according to the second embodiment of the present invention;
FIG. 4 is a schematic view showing the structure of the portion A in FIG. 3 of a cleaning system for producing silicon single crystal slices according to the present invention;
FIG. 5 is a partial cross-sectional view of a cleaning system for single crystal silicon slice production according to the present invention;
FIG. 6 is a side cross-sectional view of a cleaning system for single crystal silicon slice production according to the present invention;
FIG. 7 is a partial cross-sectional view of a cleaning system for single crystal silicon slice production according to the present invention;
FIG. 8 is a schematic diagram showing the structure of part B in FIG. 7 of a cleaning system for producing silicon single crystal slices according to the present invention;
FIG. 9 is a schematic structural view of a Z-shaped connecting plate and a discharging frame in a cleaning system for producing monocrystalline silicon slices;
fig. 10 is a schematic structural view of a discharging frame in a cleaning system for producing monocrystalline silicon slices.
In the figure:
100. a base; 101. a support frame; 102. a case; 200. a lifting assembly; 201. a Z-shaped connecting plate; 2011. slotting; 2012. a connecting strip; 2013. a positioning pin; 202. a first driving motor; 203. a screw rod; 204. a guide rod; 205. a mounting plate; 300. a discharging frame; 301. a support base; 302. a first support column; 303. a second support column; 304. a clamping groove; 305. a positioning plate; 306. a locking bolt; 400. cleaning the assembly; 401. a first fixing plate; 402. a second driving motor; 403. a transmission belt; 404. a rotating shaft; 405. a brush roller; 500. a spray assembly; 501. a mounting base; 502. a spray header; 503. a swing assembly; 504. a second fixing plate; 505. a third driving motor; 506. a half gear; 507. a tooth frame; 508. a connecting frame; 600. a transmission assembly; 601. all-gear; 602. toothed plate.
Description of the embodiments
The technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples
Referring to fig. 1, fig. 2, fig. 3 and fig. 6, a cleaning system for monocrystalline silicon slice production comprises a base 100, and a supporting frame 101 and a box body 102 which are arranged at the top of the base 100, and is characterized in that a lifting assembly 200 is arranged on the supporting frame 101, an output end of the lifting assembly 200 is connected with a Z-shaped connecting plate 201, one end, far away from the lifting assembly 200, of the Z-shaped connecting plate 201 is detachably connected with a discharging frame 300 for placing monocrystalline silicon slices, a cleaning assembly 400 and a spraying assembly 500 which are matched with the discharging frame 300 are sequentially arranged inside the box body 102 from bottom to top, a swinging assembly 503 which is connected with the spraying assembly 500 to realize swinging of the spraying assembly 500 so as to realize improved spraying effect is arranged on the inner wall of the box body 102, a transmission assembly 600 which is used for driving monocrystalline silicon slices on the discharging frame 300 to rotate and be matched with the spraying assembly 500 so as to realize thorough cleaning is arranged between the end of the discharging frame 300 and the inner wall of the box body 102, and the discharging frame 300 moves up and down along the supporting frame 101 under the action of the lifting assembly 200 so as to realize cleaning when the discharging frame 300 moves to the bottommost part of the lifting assembly 200.
Referring to fig. 1 to 5, the lifting assembly 200 includes a first driving motor 202 disposed at the top of the supporting frames 101, a screw rod 203 disposed between the supporting frames 101 and connected to an output end of the first driving motor 202, a guide rod 204 connected between the supporting frames 101, and a mounting plate 205 screw-coupled to the screw rod 203 and slidably coupled to the guide rod 204, and a z-shaped connection plate 201 connected to an outer wall of the mounting plate 205.
Referring to fig. 1, 3, 4, 9 and 10, the discharging frame 300 includes a supporting base 301, a first supporting column 302 and two sets of second supporting columns 303 rotatably connected between the supporting base 301, clamping grooves 304 matched with monocrystalline silicon slices are formed in the first supporting column 302 and the two sets of second supporting columns 303, and a triangular structure is formed between the first supporting column 302 and the second supporting columns 303, wherein the first supporting column 302 is movably arranged on the inner wall of the supporting base 301 through a positioning plate 305 and is connected with the supporting base 301 through a locking bolt 306, and two ends of the two sets of second supporting columns 303 penetrate through the supporting base 301 to be connected with a transmission assembly 600.
Referring to fig. 4 and 9,Z, a slot 2011 is provided on an inner wall of the connecting plate 201, a connecting bar 2012 matching with the slot 2011 is provided on an outer wall of the supporting seat 301, and a positioning pin 2013 is provided between the z-shaped connecting plate 201 and the connecting bar 2012.
Referring to fig. 1, 2, 3, 5 and 6, the cleaning assembly 400 includes a second driving motor 402 disposed on an outer wall of the case 102 through a first fixing plate 401, a rotation shaft 404 connected to the second driving motor 402 through a driving belt 403, and a brush roller 405 disposed on an outer wall of the rotation shaft 404 and cooperating with the discharging frame 300 to clean the monocrystalline silicon slices on the discharging frame 300.
Referring to fig. 7-8, a spray assembly 500 includes a mount 501 disposed on an interior wall of the housing 102 and a spray header 502 rotatably mounted to the mount 501.
Referring to fig. 5 to 8, the swing assembly 503 includes a third driving motor 505 disposed on an inner wall of the cabinet 102 through a second fixing plate 504, a half gear 506 connected to an output end of the third driving motor 505, a gear frame 507 slidably connected to a bottom of the second fixing plate 504 and engaged with the half gear 506, and a connection frame 508 connected to the gear frame 507 and rotatably connected to the showerhead 502.
Referring to fig. 6, the transmission assembly 600 includes all gears 601 provided at both end portions of the two sets of second supporting columns 303 and a toothed plate 602 provided on the inner wall of the case 102 and engaged with the all gears 601.
Referring to fig. 1-3, the box 102, the discharging frame 300, the cleaning assembly 400, the spraying assembly 500 and the transmission assembly 600 are symmetrically provided with two groups along the lifting assembly 200, the two groups of discharging frames 300 are connected with the lifting assembly 200 through the Z-shaped connecting plate 201, and the two groups of discharging frames 102, the cleaning assembly 400, the spraying assembly 500 and the transmission assembly 600 are symmetrically provided with two groups along the lifting assembly 200, so that monocrystalline silicon slices on the two groups of discharging frames 300 can be cleaned at the same time, and the cleaning efficiency of monocrystalline silicon wafers is further improved.
Specifically, when the cleaning system for single crystal silicon slice production is used:
firstly, placing a monocrystalline silicon slice to be cleaned in a clamping groove 304 formed in a second support column 303, arranging a first support column 302 on a support seat 301 corresponding to the monocrystalline silicon slice, and fixing the monocrystalline silicon slice by a positioning plate 305 and a locking bolt 306, so that the monocrystalline silicon slice is stably fixed in a discharging frame 300;
fixing the discharging frame 300 on the Z-shaped connecting plate 201, during fixing, butting a connecting strip 2012 on the discharging frame 300 into a groove 2011 on the Z-shaped connecting plate 201, and positioning through a positioning pin 2013 to finish fixing the discharging frame 300 and the Z-shaped connecting plate 201;
the first driving motor 202 is started to drive the screw rod 203 connected with the output end of the first driving motor to rotate clockwise, the guide rod 204 is arranged to drive the mounting plate 205 connected to the outer wall of the first driving motor to move downwards along the axial direction of the guide rod 204, and then the Z-shaped connecting plate 201 and the discharging frame 300 are driven to move downwards along the axial direction of the guide rod 204, so that the discharging frame 300 is conveyed into the box 102, chemical cleaning agents are placed in the box 102, when the mounting plate 205 moves to the bottommost part of the lifting assembly 200, the discharging frame 300 is matched with the cleaning assembly 400, and the cleaning assembly 400 is started to clean monocrystalline silicon slices on the discharging frame 300;
starting a second driving motor 402 to drive a driving belt 403 connected with the output end of the second driving motor to rotate, and further driving a rotating shaft 404 connected with the second driving motor to rotate, so as to drive a brush roller 405 connected to the outer wall of the second driving motor to rotate, and further cleaning a plurality of groups of monocrystalline silicon slices on the discharging frame 300, and cleaning multiple groups of monocrystalline silicon slices through the cooperation of the discharging frame 300 and the cleaning assembly 400, so that the cleaning efficiency of the monocrystalline silicon slices is effectively improved, wherein the first supporting column 302 and the second supporting column 303 are made of rubber materials, and damage to the monocrystalline silicon slices is avoided;
after a monocrystalline silicon slice is washed by a brush roller 405, a first driving motor 202 is started to rotate anticlockwise, a Z-shaped connecting plate 201 with the output end connected with the first driving motor and a discharging frame 300 are driven to move upwards along the axial direction of a guide rod 204, a water pump is started to spray monocrystalline silicon slices on the discharging frame 300 through a spray header 502, when the discharging frame 300 is driven to move upwards by a lifting assembly 200, through a full gear 601 arranged at two ends of a second supporting column 303 and a toothed plate 602 meshed with the full gear 601 and arranged on the inner wall of a box 102, when the discharging frame 300 moves upwards, two groups of second supporting columns 303 are driven to rotate, monocrystalline silicon slices on the discharging frame 300 are driven to rotate, and the cleaned monocrystalline silicon slices are comprehensively sprayed by the spray header 502, so that the situation that the cleaned monocrystalline silicon slices are not thoroughly cleaned due to the adhesion of impurities on the surface of the cleaned monocrystalline silicon slices can be effectively prevented;
when the spray assembly 500 is started to spray, the third driving motor 505 is started to drive the half gear 506 connected with the output end of the third driving motor to rotate, and then the toothed frame 507 meshed with the toothed frame 507 is driven to reciprocate left and right along the bottom wall of the second fixing plate 504, so that the connecting frame 508 connected with the toothed frame is driven to reciprocate left and right, the connecting frame 508 is rotationally connected with the spray header 502, the spray header 502 can be driven to swing, the spraying effect of the spray header 502 on monocrystalline silicon slices is further improved, and the cleaning effect of monocrystalline silicon slices is further improved.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (2)
1. The cleaning process of the cleaning system for the monocrystalline silicon slice production comprises a base (100), a supporting frame (101) and a box body (102), wherein the supporting frame (101) and the box body (102) are arranged at the top of the base (100), the cleaning system is characterized in that a lifting component (200) is arranged on the supporting frame (101), the output end of the lifting component (200) is connected with a Z-shaped connecting plate (201), one end of the Z-shaped connecting plate (201), far away from the lifting component (200), is detachably connected with a discharging frame (300) for placing monocrystalline silicon slices, the cleaning component (400) and the spraying component (500) which are matched with the discharging frame (300) are sequentially arranged inside the box body (102) from bottom to top, a swinging component (503) which is connected with the spraying component (500) to realize the swinging of the spraying component (500) to realize the effect improvement, a transmission component (600) which is used for driving the monocrystalline silicon slices on the discharging frame (300) to rotate and the spraying component (500) is arranged between the end of the discharging frame (300) and the inner wall of the box body (102) is arranged on the inner wall of the box body (102), the discharging frame (101) is thoroughly moved along the lifting component (600), the discharging frame (300) is matched with the cleaning assembly (400) when moving to the bottommost part of the lifting assembly (200) so as to realize cleaning;
the lifting assembly (200) comprises a first driving motor (202) arranged at the top of the supporting frame (101), a screw rod (203) arranged between the supporting frames (101) and connected with the output end of the first driving motor (202), a guide rod (204) connected between the supporting frames (101) and a mounting plate (205) connected with the screw rod (203) in a threaded manner and slidably connected with the guide rod (204), wherein the Z-shaped connecting plate (201) is connected to the outer wall of the mounting plate (205);
the discharging frame (300) comprises a supporting seat (301), a first supporting column (302) and two groups of second supporting columns (303), wherein the first supporting columns (302) and the two groups of second supporting columns (303) are rotatably connected between the supporting seats (301), clamping grooves (304) matched with monocrystalline silicon slices are formed in the first supporting columns (302) and the two groups of second supporting columns (303), triangular structures are formed between the first supporting columns (302) and the second supporting columns (303), the first supporting columns (302) are movably arranged on the inner wall of the supporting seats (301) through positioning plates (305), and are connected with the supporting seats (301) through locking bolts (306), and two ends of the two groups of second supporting columns (303) penetrate through the supporting seats (301) to be connected with a transmission assembly (600);
a slot (2011) is formed in the inner wall of the Z-shaped connecting plate (201), a connecting strip (2012) matched with the slot (2011) is arranged on the outer wall of the supporting seat (301), and a positioning pin (2013) is arranged between the Z-shaped connecting plate (201) and the connecting strip (2012);
the cleaning assembly (400) comprises a second driving motor (402) arranged on the outer wall of the box body (102) through a first fixing plate (401), a rotating shaft (404) connected with the second driving motor (402) through a transmission belt (403), and a brush roller (405) arranged on the outer wall of the rotating shaft (404) and matched with the discharging frame (300) to clean monocrystalline silicon slices on the discharging frame (300);
the spraying assembly (500) comprises a mounting seat (501) arranged on the inner wall of the box body (102) and a spraying head (502) rotatably arranged on the mounting seat (501);
the swinging assembly (503) comprises a third driving motor (505) arranged on the inner wall of the box body (102) through a second fixing plate (504), a half gear (506) connected with the output end of the third driving motor (505), a tooth frame (507) connected with the bottom of the second fixing plate (504) in a sliding way and meshed with the half gear (506), and a connecting frame (508) connected with the tooth frame (507) and rotationally connected with the spray header (502);
the transmission assembly (600) comprises all gears (601) arranged at two ends of the two groups of second support columns (303) and toothed plates (602) which are arranged on the inner wall of the box body (102) and meshed with the all gears (601);
the method specifically comprises the following steps:
s1: placing a monocrystalline silicon slice to be cleaned in a clamping groove (304) formed in a second support column (303), arranging a first support column (302) and the monocrystalline silicon slice on a support seat (301) correspondingly, and fixing the positions of the first support column and the monocrystalline silicon slice through a positioning plate (305) and a locking bolt (306), so that the monocrystalline silicon slice is stably fixed in a discharging frame (300);
s2: fixing the discharging frame (300) on the Z-shaped connecting plate (201), and during fixing, butting connecting strips (2012) on the discharging frame (300) into grooves (2011) on the Z-shaped connecting plate (201), and positioning through positioning pins (2013) to finish fixing the discharging frame (300) and the Z-shaped connecting plate (201);
s3: starting a first driving motor (202) to drive a screw rod (203) connected with the output end of the first driving motor to rotate clockwise, driving a mounting plate (205) connected to the outer wall of the first driving motor to move downwards along the axial direction of the guide rod (204) by virtue of a guide rod (204), and driving a Z-shaped connecting plate (201) and a discharging frame (300) to move downwards along the axial direction of the guide rod (204), so that the discharging frame (300) is conveyed into a box body (102), a chemical cleaning agent is placed in the box body (102), and when the mounting plate (205) moves to the bottommost part of a lifting assembly (200), the discharging frame (300) is matched with a cleaning assembly (400), and starting the cleaning assembly (400) to clean monocrystalline silicon slices on the discharging frame (300);
s4: starting a second driving motor (402) to drive a driving belt (403) connected with the output end of the second driving motor to rotate, and further driving a rotating shaft (404) connected with the second driving motor to rotate, so as to drive a brush roller (405) connected to the outer wall of the second driving motor to rotate, further cleaning monocrystalline silicon slices on a discharging frame (300), and cleaning a plurality of groups of monocrystalline silicon slices simultaneously through the cooperation of the discharging frame (300) and a cleaning assembly (400), thereby effectively improving the cleaning efficiency of monocrystalline silicon slices;
s5: after a hairbrush roller (405) is used for brushing monocrystalline silicon slices, a first driving motor (202) is started to rotate anticlockwise, a Z-shaped connecting plate (201) with the output end connected with the first driving motor and a discharging frame (300) are driven to move upwards along the axial direction of a guide rod (204), meanwhile, a water pump is started to spray monocrystalline silicon slices on the discharging frame (300) through a spray header (502), when the discharging frame (300) is driven to move upwards by a lifting assembly (200), the situation that the cleaned monocrystalline silicon slices are not thoroughly caused by the adhesion of impurities on the surface of the monocrystalline silicon can be effectively prevented by a full gear (601) arranged at the two ends of a second supporting column (303) and a toothed plate (602) meshed with the full gear (601) and arranged on the inner wall of a box body (102), when the discharging frame (300) moves upwards, two groups of second supporting columns (303) are driven to rotate, and then the monocrystalline silicon slices on the discharging frame (300) are driven to rotate, and the matched spraying header (502) is used for spraying the monocrystalline silicon slices;
s6: when starting spray subassembly (500) and spraying, start third driving motor (505), semi-gear (506) that drive its output is connected rotates, and then can drive tooth frame (507) that link to each other rather than the meshing and carry out reciprocating left and right movement along second fixed plate (504) diapire, thereby drive reciprocating left and right movement rather than link (508) that links to each other, link to each other through link (508) and shower head (502) rotation, and then can drive shower head (502) and swing, further improvement shower head (502) are to monocrystalline silicon sliced spraying effect, thereby further improve monocrystalline silicon sliced cleaning effect.
2. The cleaning process of the cleaning system for producing monocrystalline silicon slices according to claim 1, wherein the box body (102), the discharging frames (300), the cleaning assembly (400), the spraying assembly (500) and the transmission assembly (600) are symmetrically provided with two groups along the lifting assembly (200), and the discharging frames (300) of the two groups are connected with the lifting assembly (200) through the Z-shaped connecting plate (201).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310725001.1A CN116673249B (en) | 2023-06-19 | 2023-06-19 | Cleaning system and cleaning process for monocrystalline silicon slice production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310725001.1A CN116673249B (en) | 2023-06-19 | 2023-06-19 | Cleaning system and cleaning process for monocrystalline silicon slice production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116673249A CN116673249A (en) | 2023-09-01 |
| CN116673249B true CN116673249B (en) | 2024-01-26 |
Family
ID=87781928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310725001.1A Active CN116673249B (en) | 2023-06-19 | 2023-06-19 | Cleaning system and cleaning process for monocrystalline silicon slice production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116673249B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117160984B (en) * | 2023-09-08 | 2024-04-12 | 无锡中环应用材料有限公司 | A single crystal silicon wafer water washing and degumming system |
| CN118676032B (en) * | 2024-07-01 | 2025-11-18 | 安徽富乐德长江半导体材料股份有限公司 | A large-size silicon wafer single-wafer cleaning machine |
| CN118721466B (en) * | 2024-09-04 | 2024-12-31 | 泰州东鼎光电科技有限公司 | Discharging device for cutting polycrystalline silicon core |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08130198A (en) * | 1994-10-28 | 1996-05-21 | Shin Etsu Handotai Co Ltd | Peeling method of carbon for slice from wafer and wafer handling jig |
| CN110918545A (en) * | 2019-11-18 | 2020-03-27 | 北京北方华创微电子装备有限公司 | Vibration mechanism and tank type cleaning machine |
| CN111570380A (en) * | 2020-06-19 | 2020-08-25 | 北京北方华创微电子装备有限公司 | Bubble passing protection device and bubble passing protection method of groove type cleaning equipment |
| CN111889437A (en) * | 2020-08-27 | 2020-11-06 | 江苏无恙半导体科技有限公司 | A wafer cleaning machine |
| CN215696180U (en) * | 2021-04-25 | 2022-02-01 | 曲靖阳光能源硅材料有限公司 | Cleaning machine is used in polycrystalline silicon production |
| CN216460483U (en) * | 2021-12-29 | 2022-05-10 | 英乐威环保科技(常州)有限公司 | Silicon chip belt cleaning device with stoving effect |
| CN114951121A (en) * | 2022-05-11 | 2022-08-30 | 苏州亚信华电子科技有限公司 | Quartz boat cleaning equipment and use method thereof |
| CN115350980A (en) * | 2022-08-09 | 2022-11-18 | 康单 | Ultrasonic cleaning machine |
| CN218835295U (en) * | 2022-09-26 | 2023-04-11 | 广东凡林装备科技有限公司 | Polishing and rotating integrated device for wafer cleaning |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6833035B1 (en) * | 1994-04-28 | 2004-12-21 | Semitool, Inc. | Semiconductor processing system with wafer container docking and loading station |
-
2023
- 2023-06-19 CN CN202310725001.1A patent/CN116673249B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08130198A (en) * | 1994-10-28 | 1996-05-21 | Shin Etsu Handotai Co Ltd | Peeling method of carbon for slice from wafer and wafer handling jig |
| CN110918545A (en) * | 2019-11-18 | 2020-03-27 | 北京北方华创微电子装备有限公司 | Vibration mechanism and tank type cleaning machine |
| CN111570380A (en) * | 2020-06-19 | 2020-08-25 | 北京北方华创微电子装备有限公司 | Bubble passing protection device and bubble passing protection method of groove type cleaning equipment |
| CN111889437A (en) * | 2020-08-27 | 2020-11-06 | 江苏无恙半导体科技有限公司 | A wafer cleaning machine |
| CN215696180U (en) * | 2021-04-25 | 2022-02-01 | 曲靖阳光能源硅材料有限公司 | Cleaning machine is used in polycrystalline silicon production |
| CN216460483U (en) * | 2021-12-29 | 2022-05-10 | 英乐威环保科技(常州)有限公司 | Silicon chip belt cleaning device with stoving effect |
| CN114951121A (en) * | 2022-05-11 | 2022-08-30 | 苏州亚信华电子科技有限公司 | Quartz boat cleaning equipment and use method thereof |
| CN115350980A (en) * | 2022-08-09 | 2022-11-18 | 康单 | Ultrasonic cleaning machine |
| CN218835295U (en) * | 2022-09-26 | 2023-04-11 | 广东凡林装备科技有限公司 | Polishing and rotating integrated device for wafer cleaning |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116673249A (en) | 2023-09-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN116673249B (en) | Cleaning system and cleaning process for monocrystalline silicon slice production | |
| CN108964602B (en) | Efficient solar panel cleaning equipment | |
| CN112827985A (en) | Bucket cleaning device for construction | |
| CN105414074A (en) | Washing tool of solar power station washing vehicle | |
| CN115762913B (en) | Full-automatic intelligent parcel device is used in wire and cable production | |
| CN214516256U (en) | Cleaning device for monocrystalline silicon wafer | |
| CN223222012U (en) | Brushing device for gear machining | |
| CN213996949U (en) | Silicon wafer cleaning machine for producing monocrystalline silicon epitaxial wafer | |
| CN113386010B (en) | Secondary pressurizing positive preparation device for cut silicon rod of solar cell panel | |
| CN216175142U (en) | Photovoltaic board cleans machine people system | |
| CN217569872U (en) | Aluminum alloy door and window processing belt cleaning device | |
| CN218108653U (en) | Degumming machine for monocrystalline silicon wafers | |
| CN218103069U (en) | Semi-automatic cleaning device for solar photovoltaic panel | |
| CN210886245U (en) | Pickling unit is used in steel preparation | |
| CN222712436U (en) | A water-retaining device for making celadon | |
| CN216540002U (en) | Independently abluent quartz capsule belt cleaning device | |
| CN216542442U (en) | Polishing device for heat-collecting power generation reflecting mirror | |
| CN219766125U (en) | Wafer belt cleaning device | |
| CN222058243U (en) | A cleaning device for production and processing of mechanical parts | |
| CN112317484A (en) | High-efficient cleaning equipment of container for machining | |
| CN216937222U (en) | Full-automatic cleaning machine for stripping silicon wafers | |
| CN216880569U (en) | Large-scale photovoltaic power plant photovoltaic module belt cleaning device | |
| CN220543845U (en) | Silicon wafer cleaning device | |
| CN216539685U (en) | Dust collector for photovoltaic board | |
| CN221620148U (en) | Polycrystalline silicon carbon head material processing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |