CN116633191A - Walking piezoelectric actuated displacement device and assembly method - Google Patents

Abstract

The invention discloses a walking type piezoelectric actuation displacement device and an assembly method, wherein a guide rail is detachably arranged between a second platform and a first platform, extends along a first direction and is provided with at least two guide rails at intervals along a second direction perpendicular to the first direction; the driving assembly is positioned between the two guide rails and comprises a rotor and a walking type piezoelectric motor capable of driving the rotor to move along a first direction, the walking type piezoelectric motor is connected with the first platform, the rotor extends along the first direction and is detachably arranged on the second platform, a centering block is arranged between each guide rail and the rotor, and the two opposite side surfaces of the centering block are perpendicular to a second direction; the lateral compression assemblies are at least two at intervals along the second direction, and each lateral compression assembly is movably connected with the first platform and is abutted to the guide rail so that the two opposite side surfaces of the centering block are respectively attached to the guide rail and the rotor. The invention can ensure that the output direction of the walking piezoelectric motor, the moving direction of the mover and the guide rail are consistent, and avoid the problem of movement displacement deviation.

Description

Walking piezoelectric actuated displacement device and assembly method

technical field

The invention belongs to the technical field of precision driving equipment, and in particular relates to a walking piezoelectric actuated displacement device and an assembly method.

Background technique

As various instruments and equipment have higher and higher requirements for large-stroke and high-precision displacement control, the demand for micro-nano level high-precision motion platforms driven by piezoelectric motors has also increased. The driving device directly determines the size, speed and accuracy of the motion platform, and the structural design directly determines the stroke and system efficiency of the motion platform, especially optical detection equipment, electron microscopes, piezoelectric dispensing equipment, etc. Working in an environment that puts forward higher requirements for the motion stroke and motion precision of the motion platform.

In the existing technology, the motion platform based on piezoelectric drive uses a flexible mechanism, and only reaches a stroke of hundreds to thousands of microns, which is not enough to meet the actual requirements of large stroke, high precision, and high resolution motion. For example, a large-stroke piezoelectric precision displacement platform and driving method disclosed in the patent application document with the publication number CN113285629A is based on the stick-slip principle and piezoelectric driving technology design, and adopts the integrated structure of the mover and the driving mechanism, which overcomes the existing There is a problem of limited stroke of the piezoelectric actuator, and it has stable driving ability in a large stroke range. Although the stroke of the displacement platform is increased by using a flexible hinge mechanism, the stroke of the displacement platform driven by piezoelectricity has not yet been significantly increased.

The walking piezoelectric actuator uses the inverse piezoelectric effect to convert electrical energy into mechanical energy, and realizes high-precision motion based on the principle of inchworm walking in bionics. It has the characteristics of small size, large output force, and strong anti-interference ability. It is especially suitable for vacuum, In the case of no magnetism and low heat consumption, large stroke displacement and nanoscale displacement fine-tuning are realized. For example, the piezoelectric displacement device disclosed in the patent application document with the publication number CN114598180A and the piezoelectric actuator disclosed in the patent application document with the publication number CN114629374A can realize large-stroke actuation without relying on structures such as guide rails and flexible mechanisms.

However, in the related art, the long-stroke displacement platform driven by a walking piezoelectric motor includes a guide rail and a mover. During its assembly work, the installation position and movement direction of the mover will appear relative to the guide rail due to the deviation of the pre-tightening force. The deflection causes the output direction of the walking piezoelectric motor, the moving direction of the mover and the moving direction of the guide rail to be inconsistent, resulting in deviations in the output and displacement of the long-stroke displacement platform, resulting in a decrease in the motion accuracy of the long-stroke displacement platform.

Contents of the invention

The purpose of the present invention is to provide a walking-type piezoelectric actuated displacement device and an assembly method, which not only have the advantages of large motion stroke, high resolution, high positioning accuracy, fast response speed, and strong robustness, but also can ensure that the walking type The output direction of the piezoelectric motor, the moving direction of the mover and the moving direction of the guide rail are consistent, thereby effectively improving the motion accuracy and motion stability of the walking piezoelectric actuated displacement device after assembly, and avoiding the problem of motion displacement deviation.

The technical solution adopted for solving the above-mentioned technical problems:

In a first aspect, the present invention provides a walking piezoelectric actuated displacement device, comprising:

the first platform;

The second platform is located above the first platform, and is detachably connected to the first platform with a guide rail extending along the first direction, and at least two guide rails are provided at intervals along the second direction, the second direction is perpendicular to the first direction;

The drive assembly is located between the two guide rails, the drive assembly includes a mover and a traveling piezoelectric motor for driving the mover to move in a first direction, and the traveling piezoelectric motor is connected to the first Platform connection, the mover extends along the first direction, and is detachably connected to the second platform, a centering block is provided between each guide rail and the mover, and the opposite of the centering block The two sides are perpendicular to the second direction;

There are at least two lateral pressing assemblies at intervals along the second direction, each of the lateral pressing assemblies is movably connected to the first platform, and abuts against the guide rail, so that the centering block The opposite side surfaces of the guide rail and the mover are attached to the guide rail and the mover respectively.

The walking type piezoelectric actuated displacement device provided by the present invention has at least the following beneficial effects: a driving assembly, a centering block and a guide rail are arranged between the first platform and the second platform, and the driving assembly is used to drive the second platform relative to the first platform. The platform moves along the first direction, and the guide rail is used to guide and support the linear motion of the second platform stably; in the assembly work of the walking piezoelectric actuator displacement device, when the walking piezoelectric motor is fixedly connected to the second platform After the first platform, the mover can move along the first direction under the driving action of the walking piezoelectric motor, and can be used to drive the second platform to perform a large-stroke displacement.

At this time, the mover is used as the movement base surface, and a centering block is set between the mover and the guide rail. When using the lateral pressing assembly to exert equal and stable pressure on the guide rail, and make the mover and guide rail respectively aligned with the centering When the opposite sides of the block are fitted together, since the opposite sides of the centering block are perpendicular to the second direction, the movement direction of the guide rail is consistent with the movement direction of the mover, and at the same time, the assembly is pressed laterally Under the action of , the guide rail and the mover reach a state of force balance in the second direction, and the displacement in the second direction is not easy to occur. Therefore, when the guide rail and the mover are respectively fixedly connected with the second platform, the mover and mover can be overcome. The guide rail deflects to a certain extent in the second direction due to the connection force received, thereby causing the problem of a decrease in motion accuracy, thereby reducing the difficulty of assembly and processing of the walking piezoelectric actuator displacement device, while ensuring that the walking piezoelectric actuator The dynamic displacement device has very high motion precision and motion stability after assembly, which prevents deviation during motion and can meet the displacement control requirements of large stroke and high precision.

As a further improvement of the above technical solution, the first platform is provided with protrusions extending along the first direction, at least two protrusions are provided at intervals along the second direction, each of the protrusions is provided with a plurality of The screw holes arranged in the first direction, the lateral pressing assembly includes a plurality of jacking screws, each of the jacking screws is threadedly connected with the screw holes, and abuts against the guide rail.

The guide rail, the mover and the centering block are located between the two bumps on the first platform, screw the top tightening screw into the screw hole on the bump, make the top tightening screw contact the guide rail, and apply a certain force to the guide rail The force makes the guide rail, the mover and the centering block contact and fit each other, and the multiple screw holes on the bump are arranged along the first direction, so the contact area between the lateral pressing component and the guide rail can be increased to realize Uniform pressure is applied to the guide rail in the first direction through a plurality of tightening screws.

As a further improvement of the above technical solution, the walking piezoelectric motor is detachably connected to the first platform, the first platform is provided with a first mounting surface and a first positioning block, and the first mounting surface is perpendicular to In the up and down direction, the first positioning block has a first positioning surface perpendicular to the first direction, the bottom surface of the walking piezoelectric motor is attached to the first mounting surface, and the side surface of the walking piezoelectric motor is in contact with the first mounting surface. The first positioning surface is bonded.

When the walking piezoelectric motor is installed on the first platform, the side surface of the walking piezoelectric motor is in contact with the first positioning surface, so that the walking piezoelectric motor is parallel to the first direction, and the walking piezoelectric motor The bottom surface of the walking piezoelectric motor is in close contact with the first mounting surface, so that the mover mounted on the walking piezoelectric motor can be in contact with the bottom surface of the second platform, and finally the precise installation and positioning of the walking piezoelectric motor on the first platform is completed. Work.

As a further improvement of the above technical solution, the walking piezoelectric motor includes a casing and a combined stack, the casing is provided with a groove with an opening facing upward, and the opposite sides of the casing in the first direction are both There is a notch communicating with the groove, and the combined stack is arranged in two groups at intervals along the second direction, and is arranged in the groove, and each group of the combined stack includes at least two Piezoelectric stacks arranged at intervals, the mover passes through the gap and is located between two groups of combined stacks.

The mover is arranged between the two groups of combination stacks in the housing, so that the mover can be balanced when the walking piezoelectric motor is working, and at the same time, the two groups of combination stacks can be used to exert a clamping force on the mover to realize The mover and the walking piezoelectric motor are connected by a pre-tightening force, so as to ensure that the output force direction of the walking piezoelectric motor is consistent with the moving direction of the mover, and ensure that the walking piezoelectric actuated displacement device has high motion accuracy. Moreover, each group of combined stacks includes at least two piezoelectric stacks, which can realize high-precision motion of the mover according to the principle of inchworm walking.

As a further improvement of the above technical solution, the mover is connected to the second platform through bolts, and the guide rail includes a fixed rail and a sliding rail; the fixed rail is connected to the first platform through bolts, and the sliding rail It is connected with the second platform by bolts.

This setting makes the mover and guide rail easy to disassemble and assemble, and the connection effect received after installation is strong, avoiding the position deviation of the mover and guide rail relative to the first platform and the second platform, which will cause the mover and guide rail to be in the same position. The inconsistency in the motion direction causes the problem that the motion accuracy is affected.

As a further improvement of the above technical solution, the centering block is connected to the second platform by bolts. Such setting enables the centering block to move together with the second platform, the mover and the guide rail, so that the mover and the guide rail are respectively attached to the opposite sides of the centering block during the movement, and are always in contact. At this time , the centering block plays a good role in guiding the movement of the mover, so that the mover can move smoothly along the first direction, avoiding the position deviation of the mover in the second direction, causing the mover and guide rail to move in the direction of motion Inconsistency on the surface causes the problem that the motion accuracy of the second platform decreases.

As a further improvement of the above technical solution, a linear grating scale for measuring the displacement of the second platform relative to the first platform is provided between the first platform and the second platform. A linear grating scale is used to accurately measure the amount of displacement of the second platform relative to the first platform, so as to control the movement position of the second platform relative to the first platform with high precision.

As a further improvement of the above technical solution, the guide rail is a cross roller guide rail. Adopting cross roller guideway, the rolling friction force is small, it can bear the load in all directions, and realizes high precision, high rigidity and smooth linear motion.

In a second aspect, the present invention provides a method for assembling a walking piezoelectric actuated displacement device, comprising the following steps:

Installing a walking piezoelectric motor on the first platform, and loading a mover on the walking piezoelectric motor, so that the mover moves along a first direction;

Centering blocks and guide rails are sequentially provided on opposite sides of the mover along the second direction, and the upper surfaces where the centering block, the mover and the guide rails are located are flush, wherein the first The second direction is perpendicular to the first direction;

pre-fixing the guide rail to the first platform, and fixedly connecting the second platform to the mover;

Utilize a lateral pressing assembly to drive each of the guide rails to move toward the mover, and make the opposite side surfaces of the centering block fit on the guide rail and the mover respectively, wherein the The opposite side surfaces of the centering block are perpendicular to the second direction;

The first platform and the second platform are respectively fixedly connected to the guide rails.

The assembly method of the walking piezoelectric actuated displacement device provided by the present invention has at least the following beneficial effects: After the walking piezoelectric motor and the mover are installed on the first platform, centering blocks are installed on opposite sides of the mover and the guide rail, arrange the mover, the centering block and the guide rail in sequence along the second direction, and make their upper surfaces flush with each other, so that their upper surfaces can be in close contact with the lower surface of the second platform; then, move the The mover is fixedly connected with the second platform, and the mover is used as the precise positioning, and the guide rail is pre-fixed on the first platform. When the lateral pressing component is used to exert pressure on the guide rail, the guide rail can move toward the direction close to the mover, so that The guide rail and the mover clamp the centering block, and make contact with the opposite sides of the centering block, so as to complete the adjustment of the movement direction of the guide rail, and realize that the movement direction of the guide rail is consistent with the movement direction of the mover after assembly, which is helpful Improving high-precision motion of a walking piezo-actuated displacement device.

As a further improvement of the above technical solution, after the second platform is fixedly connected to the guide rail, the following step is further included: the second platform is fixedly connected to the centering block.

The centering block is fixedly connected with the second platform, so that the centering block can move together with the second platform, and, during the movement, the guide rail and the mover are always in contact with the centering block, which can prevent the mover from happening to the second stage. The position offset in two directions ensures that the second platform has high motion precision.

Description of drawings

Below in conjunction with accompanying drawing and embodiment the present invention will be further described;

Fig. 1 is an exploded view of the structure of a walking piezoelectric actuated displacement device provided by an embodiment of the present invention;

Fig. 2 is a front view of the walking piezoelectric actuated displacement device provided by the embodiment of the present invention in the first state;

Fig. 3 is a schematic structural view of the walking piezoelectric actuated displacement device provided in the embodiment of the present invention in the second state;

Fig. 4 is a schematic structural diagram of the connection between the linear grating scale and the centering block of the walking piezoelectric actuated displacement device provided by the embodiment of the present invention;

Fig. 5 is an exploded view of the structure of the mover in the walking piezoelectric actuated displacement device provided by the embodiment of the present invention;

Fig. 6 is a schematic structural diagram of a walking piezoelectric motor in a walking piezoelectric actuated displacement device provided by an embodiment of the present invention;

Fig. 7 is a schematic structural diagram of the second platform in the walking piezoelectric actuated displacement device provided by the embodiment of the present invention;

Fig. 8 is a schematic diagram of the working principle of the walking piezoelectric motor in the walking piezoelectric actuated displacement device provided by the embodiment of the present invention; wherein, (a) is the first piezoelectric stack and the second piezoelectric stack The working schematic diagram of jointly clamping the mover, (b) is the working schematic diagram of the first piezoelectric stack clamping the movable member alone, and (c) is the working schematic diagram of the first piezoelectric stack driving the mover to move;

Fig. 9 is a second schematic diagram of the working principle of the walking piezoelectric motor in the walking piezoelectric actuated displacement device provided by the embodiment of the present invention; where (d) is the first piezoelectric stack and the second piezoelectric stack The working schematic diagram of jointly clamping the mover after moving; (e) is the working schematic diagram of the second piezoelectric stack clamping the movable member alone; (f) is the working schematic diagram of the second piezoelectric stack driving the mover to move;

Fig. 10 is a schematic flowchart of an assembly method provided by an embodiment of the present invention.

The marks in the drawings are as follows: 100, second platform; 110, second step surface; 200, centering block; 300, mover; 310, plate core; 311, installation groove; 320, wear-resistant plate; 400, guide rail; 500. Walking piezoelectric motor; 510. Shell; 511. Groove; 512. Notch; 520. Composite stack; 521. First piezoelectric stack; 522. Second piezoelectric stack; 600. First Platform; 610, screw hole; 620, first step surface; 630, receiving groove; 640, bump; 650, first positioning block; 660, first installation surface; 670, second installation surface; 710, scale grating; 720. Grating reading head.

Detailed ways

This part will describe the specific embodiment of the present invention in detail, and the preferred embodiment of the present invention is shown in the accompanying drawings. Each technical feature and overall technical solution of the invention, but it should not be understood as a limitation on the protection scope of the present invention.

In the description of the present invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc. indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only In order to facilitate the description of the present invention and simplify the description, it does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

In the description of the present invention, if there is a word description such as "several", the meaning is one or more, and the meaning of multiple is two or more. Greater than, less than, exceeding, etc. are understood as not including the original number, above, Below, within, etc. are understood as including the original number. If the description of the first, second, and third is only for the purpose of distinguishing the technical features, it cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the indicated technology The sequence of features.

It should be noted that in the drawings, the X direction is from the rear side of the walking piezoelectric actuated displacement device to the front side; the Y direction is from the left side of the walking piezoelectric actuated displacement device to the right; the Z direction is from the The underside of the walking piezo-actuated displacement device points up.

In the description of the present invention, unless otherwise clearly defined, words such as setting, installation, and connection should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in the present invention in combination with the specific content of the technical solution.

Referring to Fig. 1 to Fig. 10, several embodiments are given below for the walking type piezoelectric actuated displacement device and assembly method of the present invention.

As shown in Figures 1 to 9, Embodiment 1 of the present invention provides a walking piezoelectric actuated displacement device, which has the advantages of large motion stroke, high resolution, high positioning accuracy, fast response speed and strong robustness , can be used as a high-precision motion platform at the micro-nano level, and can realize large stroke displacement and fine-tuning of nano-scale displacement in the case of vacuum, non-magnetic, and low heat consumption. High precision displacement control requirements.

The structure of the walking piezoelectric actuated displacement device includes a first platform 600, a second platform 100, a guide rail 400, a centering block 200, a driving assembly and a lateral pressing assembly, which can ensure that the driving direction of the driving assembly is consistent with that of the guide rail 400. The motion directions are consistent, thereby effectively improving the motion accuracy and motion stability of the walking piezoelectric actuated displacement device, and avoiding the problem of motion displacement deviation.

Wherein, the first platform 600 can be used as a fixed platform, installed on a connecting surface of a fixing member such as a workbench. The second platform 100 is arranged on the top of the first platform 600, then the second platform 100 can be used as a motion platform, installed on the connecting surface of movable parts such as instruments and equipment, so as to realize that the movable parts move together with the second platform 100 to promote The movable parts can produce large stroke displacement and fine-tuning of nanoscale displacement. It can be understood that the shapes and sizes of the first platform 600 and the second platform 100 are not limited, and are not specifically limited here. Of course, it is not excluded to use the second platform 100 as a fixed platform and use the first platform 600 as a moving platform.

A guide rail 400 is arranged between the second platform 100 and the first platform 600. The opposite ends of the guide rail 400 extend along the first direction. Move steadily back and forth in one direction. The guide rails 400 are detachably connected to the first platform 600 and the second platform 100 respectively. There are two guide rails 400, and the two guide rails 400 are arranged at a certain interval along the second direction, wherein the second direction is perpendicular to the first direction. In this way, the second platform 100 can be sufficiently supported, and the second platform 100 is less prone to vertical deviation.

In this embodiment, it is assumed that the first direction is the front-rear direction, and the second direction is the left-right direction. The two guide rails 400 are symmetrically arranged with respect to the second platform 100 and the first platform 600 .

It can be understood that the structure of the guide rail 400 includes a sliding rail and a fixed rail. Wherein, relative sliding can occur between the sliding rail and the fixed rail. In this embodiment, the sliding rail can move along a first direction relative to the fixed rail. The fixed rail and the first platform 600 are fixedly connected by bolts, and the sliding rail and the second platform 100 are also fixedly connected by bolts.

Specifically, as shown in Figure 2 and Figure 7, the first platform 600 is provided with a second installation surface 670 corresponding to the fixed rail, the second installation surface 670 is perpendicular to the up-down direction, and the lower surface of the fixed rail is in contact with the second installation surface 670 The bolts are used to pass through the connecting holes of the first platform 600 and the connecting holes of the fixing rail sequentially from bottom to top, so that the fixing rail is fixed on the first platform 600 . In the same way, the upper surface of the sliding rail fits with the mounting surface on the second platform 100, and bolts are used to pass through the corresponding connecting holes on the sliding rail and the second platform 100 from top to bottom, so as to realize the connection between the sliding rail and the second platform 100. Fixed connection.

In order to reduce the friction effect on the guide rail 400 during the movement, as shown in Figure 2 and Figure 7, the first platform 600 is provided with a first step surface 620, which is used to avoid the sliding rail on the second platform 100, avoiding the first Sliding friction is generated between the first platform 600 and the sliding rail; moreover, the second platform 100 is provided with a second step surface 110, which is used to avoid the fixed rail on the first platform 600 and prevent the gap between the second platform 100 and the fixed rail. Create sliding friction.

In this embodiment, the guide rail 400 is a crossed roller guide rail, so the guide rail 400 has the advantages of small rolling friction and good stability, can well withstand loads in all directions, and can achieve high precision, high rigidity and stable motion. linear motion. Since the crossed roller guideway has high rigidity, when the crossed roller guideway moves, the crossed roller guideway is less likely to be displaced in the second direction and in the up-down direction. Certainly, it is not ruled out that the guide rail 400 adopts other types of guide rail products.

The driving assembly is disposed between the two guide rails 400 , and in this embodiment, the driving assembly may be located at a middle position of the second platform 100 in the second direction. The first platform 600 is provided with an upward facing receiving groove 630 , the receiving groove 630 passes through two opposite sides of the first platform 600 in the first direction, and the driving assembly is installed in the receiving groove 630 .

The structure of the driving assembly includes a mover 300 and a traveling piezoelectric motor 500 . Wherein, opposite ends of the mover 300 are extended along the first direction, and the mover 300 is connected to the second platform 100 in a detachable manner. In this embodiment, the mover 300 is a rectangular block. Two opposite sides of the mover 300 in the second direction are planes. Moreover, the mover 300 is fixedly connected to the second platform 100 through bolts. The traveling piezoelectric motor 500 can drive the mover 300 to move along the first direction, and the traveling piezoelectric motor 500 is fixedly connected to the first platform 600 . When the walking piezoelectric motor 500 is working, the mover 300 will drive the second platform 100 to have a large displacement along the first direction relative to the first platform 600 .

In this embodiment, the mover 300 is connected to the walking piezoelectric motor 500 through the pre-tightening force, so that the mover 300 is clamped and fixed by the walking piezoelectric motor 500, so that the output force of the walking piezoelectric motor 500 can be guaranteed. The direction is consistent with the moving direction of the mover 300, thereby ensuring high movement precision of the walking piezoelectric actuated displacement device.

The mover 300 is provided with a centering block 200 on opposite sides in the second direction, and the centering block 200 is located between the mover 300 and each guide rail 400, and the opposite two sides of the centering block 200 are planes and are vertical in the second direction. It can be understood that the shape and size of the centering block 200 are not limited. In this embodiment, the number of centering blocks 200 is two, and may be rectangular plates.

There are two lateral pressing assemblies, and the two lateral pressing assemblies are arranged at certain intervals along the second direction. Each lateral pressing assembly is movably connected to the first platform 600, which can drive the lateral pressing assembly to move relative to the first platform 600, and make the lateral pressing assembly abut against the guide rail 400, allowing the guide rail 400 to compress laterally. Under the influence of the force of the component, it approaches and abuts against the centering block 200 along the first direction, so that the guide rail 400 is in contact with one side of the centering block 200, and the mover 300 is in contact with the other side of the centering block 200. contact. The lateral pressing components located on opposite sides of the mover 300 exert equal and stable forces on the corresponding guide rails 400 .

In this embodiment, the lengths of the centering block 200 and the mover 300 may be the same, and the length of the guide rail 400 is greater than that of the mover 300 .

It can be understood that, in the assembly work of the traveling piezoelectric actuated displacement device provided in this embodiment, when the traveling piezoelectric motor 500 is fixed on the first platform 600 and the mover 300 and the traveling piezoelectric motor 500 After assembly and installation, the mover 300 can be used as a motion reference plane, and the centering block 200 can be set between the mover 300 and the guide rail 400, and the two opposite sides of the centering block 200 in the second direction can be used as the mover 300 and the guide rail 400. The connecting bridge between the guide rails 400 ensures that the mover 300 and the guide rails 400 can keep consistent in the moving direction by setting the centering block 200 .

Then, when the guide rail 400 is pre-fixed on the first platform 600, the guide rail 400 can be displaced relative to the first platform 600 in the second direction. Then, the effect of the lateral compression assembly can be utilized to make the lateral compression assembly Apply equal and stable pressure to the guide rail 400 to urge the guide rail 400 to move in the second direction and push the centering block 200 to tightly abut against the mover 300. At this time, the centering block 200 is clamped by the passive member 300 and the guide rail 400 live, and the mover 300 and the guide rail 400 are attached to the two opposite sides of the centering block 200 respectively.

Since the opposite two sides of the centering block 200 are planes and are both perpendicular to the second direction, and the opposite two sides of the mover 300 are also planes and are also perpendicular to the second direction, therefore, the movement of the guide rail 400 can be realized The direction is parallel to the moving direction of the mover 300, and under the force of the lateral pressing assembly, the guide rail 400 and the mover 300 reach a good force balance state in the second direction, and it is not easy to occur in the second direction. displacement (that is, deflection relative to the first direction), then, when the second platform 100 is fixedly connected to the guide rail 400 and the mover 300, it can be well solved that the mover 300 and the guide rail 400 are connected due to the Due to the problem of deflection in the second direction due to the action, it can ensure that the walking piezoelectric actuated displacement device has very high motion accuracy and motion stability after the assembly work is completed, and prevent the second platform 100 from being displaced during the motion process. The deviation can meet the requirements of large-stroke and high-precision displacement control, and at the same time, it can reduce the assembly difficulty of the walking piezoelectric actuated displacement device.

In addition, there is no need to make a plurality of positioning holes on the first platform 600 and the second platform 100, so as to ensure that the guide rail 400 and the mover 300 are consistent in the moving direction, which helps to reduce the processing of the walking piezoelectric actuated displacement device. manufacturing difficulty.

As shown in FIG. 2 , the walking piezoelectric actuated displacement device is in the first state, and the second platform 100 is not displaced relative to the first platform 600 in the first direction. As shown in FIG. 3 , the walking piezoelectric actuated displacement device is in the second state, and the second platform 100 has a certain displacement relative to the first platform 600 in the first direction.

In some embodiments, the first platform 600 is provided with bumps 640 (or ribs), the opposite ends of the bumps 640 are extended along the first direction, the number of the bumps 640 is two, and the bumps 640 are arranged along the first direction. The two directions are set at a certain interval. In this embodiment, both the left side and the right side of the first platform 600 protrude upwards, and form a strip-shaped bump 640, the bump 640 is integrally formed with the first platform 600, and the length of the bump 640 is the same as The first platform 600 has the same length. The guide rail 400 , the centering block 200 and the mover 300 are all located between the two protrusions 640 on the first platform 600 .

Moreover, each protrusion 640 is provided with a screw hole 610 , the axis of the screw hole 610 is extended along the second direction, and there are multiple screw holes 610 arranged at uniform intervals along the first direction. The lateral pressing assembly includes jacking screws, and the number of jacking screws is multiple, corresponding to the number of screw holes 610 one by one. Each tightening screw can correspond to the screw hole 610 , so as to realize its threaded connection with the screw hole 610 . Since the screw hole 610 is a through hole, the jacking screw can be screwed into the screw hole 610 and abut against the surface of the guide rail 400 close to the protruding block 640 .

It can be understood that by controlling the length of the tightening screw extending into the screw hole 610 , the pressing force exerted by the tightening screw on the guide rail 400 can be adjusted. In this embodiment, the tightening screw is installed with a fixed value torque, and the tightening screw exerts uniform tightening pressure on the mover 300 under the condition that the torque value is not lower than 0.15 N/m.

In some other embodiments, when the first platform 600 is provided with two protrusions 640 , wedge-shaped blocks may be used instead of tightening screws. Specifically, a wedge-shaped block assembly can be provided between the protrusion 640 and the guide rail 400. The wedge-shaped block assembly includes two wedge-shaped blocks. The relative displacement of the two wedge-shaped blocks in the first direction changes the wedge-shaped block. The size of the assembly in the second direction allows the wedge block assembly to exert a certain pressing force on the guide rail 400 . Of course, it is not ruled out to use only one wedge-shaped block to cooperate with the protrusion 640 and the guide rail 400 to adjust the force exerted by the wedge-shaped block on the guide rail 400 .

In some embodiments, the walking piezoelectric motor 500 is connected to the first platform 600 in a detachable manner, or in a welding manner. In this embodiment, the traveling piezoelectric motor 500 is fixedly connected to the first platform 600 by bolts.

In some embodiments, as shown in FIG. 7 , the first platform 600 is provided with a first installation surface 660 , the first installation surface 660 is located in the receiving groove 630 , and the first installation surface 660 is perpendicular to the up-down direction. The bottom surface of the walking piezoelectric motor 500 is a plane, which can be attached to the first mounting surface 660 .

In addition, the first platform 600 is further provided with a first positioning block 650 , and the first positioning block 650 is integrally formed with the first platform 600 . The first positioning block 650 has a first positioning surface, and the first positioning surface is perpendicular to the first direction. The side surfaces of the walking piezoelectric motor 500 can be attached to the first positioning surface.

In this embodiment, the first positioning block 650 is located on the rear side of the first installation surface 660 , and the front side of the first positioning block 650 can be in surface contact with the rear side of the walking piezoelectric motor 500 .

It can be understood that when the walking piezoelectric motor 500 is fixedly installed on the first platform 600, the side surface of the walking piezoelectric motor 500 can be in contact with the first positioning surface, so as to ensure that the walking piezoelectric motor 500 The direction of the output force is parallel to the first direction. At the same time, the bottom surface of the walking piezoelectric motor 500 can be made to be in close contact with the first installation surface 660, so as to ensure that the mover 300 mounted on the walking piezoelectric motor 500 In contact with the bottom surface of the second platform 100, the precise positioning of the walking piezoelectric motor 500 when installed on the first platform 600 is finally completed, which helps to ensure that the output force direction of the walking piezoelectric motor 500 is consistent with the direction of the mover 300 The direction of motion is consistent, improving the motion accuracy of the walking piezoelectric actuated displacement device.

In some embodiments, as shown in FIG. 6 , the structure of the walking piezoelectric motor 500 includes a housing 510 and a composite stack 520 .

The casing 510 is provided with a groove 511 , and the opening of the groove 511 is set upward, and two opposite sides of the casing 510 in the first direction are provided with notches 512 , and the notches 512 communicate with the groove 511 . It can be understood that the size of the notch 512 can allow the mover 300 to pass through and allow the mover 300 to move along the first direction.

The combined stacks 520 are divided into two groups and arranged at certain intervals along the second direction. Both sets of combined stacks 520 are disposed in the groove 511 . The mover 300 passes through the notch 512 of the casing 510 along the first direction, and the mover 300 is located between the two stacks 520 .

Each group of composite stacks 520 includes at least two piezoelectric stacks, and, for each group of composite stacks 520 , all piezoelectric stacks are arranged at intervals along the first direction.

In this embodiment, two sets of combination stacks 520 are symmetrically arranged. Each set of combined stacks 520 includes four piezoelectric stacks. Of course, it is not excluded that the number of piezoelectric stacks in each group of composite stacks 520 is set to six, eight, and so on. The upper part of the mover 300 is in contact with the centering block 200 , and the lower part of the mover 300 is in contact with the assembled stack 520 .

As shown in FIG. 8 and FIG. 9 , taking each group of composite stacks 520 including two piezoelectric stacks as an example, the first direction is set as the front-to-back direction (that is, the X direction), and the second direction is set as the left-right direction ( That is, the Y direction), and, for each group of combined stacks 520, one of the piezoelectric stacks is set as the first piezoelectric stack 521, and the other piezoelectric stack is set as the second piezoelectric stack 522.

It can be understood that each piezoelectric stack includes an X stack and a Y stack, the actuation direction of the X stack is defined as the X direction, and the actuation direction of the Y stack is defined as the Y direction, that is, each The piezoelectric stack has two actuation directions.

As shown in Fig. 8, wherein, Fig. 8 (a) has shown that the walking type piezoelectric motor 500 is in the starting state, at this moment, the Y stack load in the first piezoelectric stack 521 and the second piezoelectric stack 522 is high The voltages all pre-tighten the mover 300 in the Y direction. In Fig. 8(b), the first piezoelectric stack 521 maintains the Y direction to preload the mover 300, and the voltage of the Y stack in the second piezoelectric stack 522 is reduced to reduce the preload effect, so that the first The piezoelectric stack 521 is ready for actuation in the X direction. In FIG. 8(c), the first piezoelectric stack 521 keeps the Y direction to preload the mover 300, and at the same time, increases the voltage to the X stack in the first piezoelectric stack 521 to perform X direction actuation, The mover 300 can move linearly along the X direction.

As shown in FIG. 9, wherein, FIG. 9(d) shows that the walking piezoelectric motor 500 is in the end state of actuation in the X direction. At this time, the Y stack in the second piezoelectric stack 522 resumes high voltage loading to Preload the mover 300 in the Y direction. In FIG. 9( e ), the second piezoelectric stack 522 keeps the Y direction to preload the mover 300, reducing the voltage loading of the Y stack in the first piezoelectric stack 521, reducing the preloading effect, and at the same time, reducing The voltage of the X-stack in the first piezoelectric stack 521 releases the actuation in the X-direction. In FIG. 9( f ), the second piezoelectric stack 522 maintains the Y direction to preload the mover 300, and increases the voltage of the X stack in the second piezoelectric stack 522 to actuate in the X direction, The mover 300 is urged to continue to move linearly along the X direction.

It can be understood that after each actuation, the first piezoelectric stack 521 and the second piezoelectric stack 522 will prestress the mover 300, so that the first piezoelectric stack 521 and the second piezoelectric stack 521 and the second piezoelectric stack The two piezoelectric stacks 522 perform actuation actions in sequence, thereby realizing walking linear motion.

It can be understood that the walking piezoelectric motor 500 is electrically connected with the driver, and driven by an analog signal, so that the second platform 100 can perform full-step motion and micro-step motion under the driving action of the walking piezoelectric motor 500 . The mover 300 is loaded with preload by using the combination stack 520 .

In some embodiments, the two opposite sides of the mover 300 are made of high-rigidity wear-resistant materials, such as ceramics, alumina, silicon carbide, etc., to improve the wear resistance of the mover 300 .

In this embodiment, the structure of the mover 300 includes a plate core 310 and a wear-resistant plate 320 . Wherein, the plate core 310 is made of metal material, and the wear-resistant plate 320 is made of alumina material. Mounting grooves 311 are provided on opposite sides of the core 310 so that the wear-resistant plate 320 can be embedded in the mounting grooves 311 . The wear-resistant plate 320 is not only in contact with the centering block 200 , but also in contact with the combined stack 520 .

It can be understood that the opposite sides of the mover 300 are the motion base surfaces, that is, the contact surface between the mover 300 and the centering block 200, and the contact surface between the mover 300 and the walking piezoelectric motor 500. Meet certain plane processing requirements, among which, the flatness shall not be lower than 0.01 according to GB/T11337-2004, and the surface roughness shall not be lower than Ra1.6 according to GB/T3505-2000.

In some embodiments, the centering block 200 is fixedly connected to the second platform 100 through bolts. Then, the centering block 200 can move together with the second platform 100, the mover 300 and the guide rail 400, so that the mover 300 and the guide rail 400 are respectively attached to the opposite sides of the centering block 200 during the movement, and always keep in contact. state; at this time, using the stiffness of the centering block 200, the centering block 200 is used as the guide track of the mover 300, which plays an excellent guiding role in the movement of the mover 300 in the first direction, effectively avoiding the occurrence of the mover The position of the 300 is shifted in the second direction, which causes the moving direction of the actuator 300 to be inconsistent with the moving direction of the guide rail 400 , thereby causing a problem that the movement accuracy of the second platform 100 is reduced.

It can be understood that since the centering blocks 200 are provided on opposite sides of the mover 300 and are attached to each other, the centering blocks 200 can limit the mover 300 in the second direction, Prevent the mover 300 from easily shifting in the second direction under the driving action of the walking piezoelectric motor 500; since the upper surface of the mover 300 is attached to the lower surface of the second platform 100, the second platform 100 It can limit the mover 300 in the up and down direction, and prevent the mover 300 from easily shifting in the up and down direction under the driving action of the walking piezoelectric motor 500 . Therefore, the walking piezoelectric actuated displacement device of this embodiment has a strong load capacity.

In some other embodiments, the centering block 200 is not fixedly connected to the second platform 100, therefore, when the second platform 100 moves, the centering block 200 will be relative to the second platform 100, the guide rail 400 and the mover 300. When moving in the first direction, sliding friction exists between the centering block 200 and the mover 300 , between the centering block 200 and the guide rail 400 , and between the centering block 200 and the second platform 100 . In order to ensure that the second platform 100 has high motion accuracy, the geometric size and shape of the centering block 200 can be adjusted according to the actual space size or engineering requirements, which can ensure that the mover 300 and the guide rail 400 can maintain the same position as the centering block within the maximum travel range of the displacement device. 200 contacts.

It can be understood that, in order to reduce the weight of the second platform 100 and the centering block 200 , weight-reducing holes may be processed on the second platform 100 and the centering block 200 .

In some embodiments, the traveling piezoelectric actuated displacement device further includes a linear grating scale. The linear grating scale is arranged between the first platform 600 and the second platform 100 and can be used to measure the displacement of the second platform 100 relative to the first platform 600 .

Further, the linear grating scale and the traveling piezoelectric motor 500 can be electrically connected to a host computer or a controller, thereby forming a closed-loop control system. Use the linear grating scale to accurately measure the displacement of the second platform 100 relative to the first platform 600, and obtain corresponding data. After receiving the corresponding data from the linear grating scale, the controller controls the walking piezoelectric motor 500 to stop working, Therefore, the movement position of the second platform 100 relative to the first platform 600 can be controlled with high precision.

The linear encoder includes a scale grating 710 and a grating reading head 720 . Specifically, the scale grating 710 can be fixedly connected to the second platform 100 or the mover 300 , and the grating reading head 720 is installed in the receiving groove 630 of the first platform 600 . If the centering block 200 is fixed to the second platform 100 , the scale grating 710 can be installed on one of the centering blocks 200 . In this embodiment, as shown in FIG. 2 and FIG. 4 , the lower surface of the centering block 200 extends downward to form ribs, which provide installation positions for the scale grating 710 .

The first platform 600 is provided with an installation plane of the grating reading head 720 , and the reading direction of the grating reading head 720 is parallel to the moving direction of the cross roller guide rail. The height of the scale grating 710 is consistent with that of the grating reading head 720 and kept horizontal.

In addition, as shown in Figures 1 to 10, Embodiment 1 of the present invention also provides an assembly method of a walking piezoelectric actuated displacement device, the assembly method includes the following steps:

Step S1: Install the traveling piezoelectric motor 500 on the first platform 600, and load the mover 300 on the traveling piezoelectric motor 500, so that the mover 300 moves along the first direction.

Wherein, after the walking piezoelectric motor 500 is positioned on the first platform 600 , it can be fixed with screws. The mover 300 and the walking piezoelectric motor 500 can be installed with a pre-tightening force to form a driving assembly, which can make the combined stack 520 of the walking piezoelectric motor 500 clamp and fix the mover 300, so that the walking The output force direction of the piezoelectric motor 500 is consistent with the moving direction of the mover 300 .

Step S2: The centering block 200 and the guide rail 400 are sequentially provided on opposite sides of the mover 300 along the second direction, and the upper surfaces where the centering block 200, the mover 300 and the guide rail 400 are located are flush, wherein, The second direction is perpendicular to the first direction.

After the installation of the drive assembly is completed, a centering block 200 and a guide rail 400 are arranged on opposite sides of the mover 300, and the centering block 200 is located between the mover 300 and the guide rail 400. The upper surface of the upper surface of the mover 300 and the upper surface of the guide rail 400 are in the same horizontal plane (that is, coplanar), so that the centering block 200, the mover 300 and the guide rail 400 are respectively aligned with the lower surface of the second platform 100. fit, so as to ensure that the second platform 100 can maintain a level.

Step S3: pre-fix the guide rail 400 to the first platform 600 , and fix the second platform 100 to the mover 300 .

Then, the guide rail 400 can be pre-installed on the first platform 600 by using bolts, at this time, the position of the guide rail 400 in the second direction can be adjusted. Since the moving direction of the mover 300 is parallel to the output force direction of the walking piezoelectric motor 500 and based on the moving direction of the mover 300 , the second platform 100 and the mover 300 can be fixed.

Step S4: Use the lateral pressing assembly to drive each guide rail 400 to move toward the mover 300, and make the opposite side surfaces of the centering block 200 fit on the guide rail 400 and the mover 300 respectively, wherein the centering block 200 The opposite side surfaces of are perpendicular to the second direction.

The opposite sides of the first platform 600 are provided with lateral pressing components, and the lateral pressing components exert force on the guide rail 400, driving the guide rail 400 to push the centering block 200 to move, and make the centering block 200 abut against For the mover 300, at this time, the mover 300 and the guide rail 400 clamp the centering block 200 correspondingly, and make contact with the opposite side surfaces of the centering block 200, so as to complete the adjustment of the movement direction of the guide rail 400 and realize the alignment of the guide rail 400. The movement direction is consistent with the movement direction of the mover 300 after assembly, which helps to improve the high-precision movement of the walking piezoelectric actuated displacement device.

It can be understood that when the guide rail 400 is pushed against the centering block 200 by using the lateral pressing assembly, the lateral pressing assemblies located on the opposite sides of the mover 300 are sequentially operated to prevent the mover 300 from being affected by the centering block. A strong force of 200 causes a deflection in the second direction.

Step S5: Fixing the first platform 600 and the second platform 100 to the guide rail 400 respectively.

Finally, the first platform 600 can be fixedly connected to the guide rail 400 with bolts, and the second platform 100 can be fixedly connected to the guide rail 400 to complete the assembly work of the walking piezoelectric actuated displacement device.

In some other embodiments, after adjusting the position between the guide rail 400, the centering block 200 and the mover 300 by means of the lateral pressing assembly, the first platform 600 is fixedly connected to the guide rail 400 in turn, and the second platform 100 is fixedly connected with the guide rail 400 and the mover 300 respectively. Such setting ensures that the guide rail 400 and the mover 300 are balanced in force in the second direction under the action of the lateral pressing assembly, and the displacement is not easy to occur. Therefore, the bolts between the mover 300 and the guide rail 400 and the second platform 100 During the connection, the displacement deviation of the mover 300 and the guide rail 400 due to the force of the bolts during the bolt connection process can be overcome, thereby ensuring that the walking piezoelectric actuated displacement device has very high motion accuracy after assembly.

It can be understood that the mover 300 , guide rail 400 , centering block 200 and other components are positioned based on the output force direction of the walking piezoelectric motor 500 during the installation process, and move back and forth successively to complete positioning and assembly in sequence.

In some embodiments, in step S5 , that is, after the step of fixing the second platform 100 to the guide rail 400 , the following step is further included: fixing the second platform 100 to the centering block 200 .

Such setting enables the centering block 200 to move together with the second platform 100, and, during the movement of the second platform 100, the guide rail 400 and the mover 300 always keep in contact with the centering block 200, which can prevent the mover from The positional deviation of the mover 300 in the second direction ensures that the mover 300 and the guide rail 400 are consistent in the moving direction, thereby ensuring that the second platform 100 has high movement accuracy.

The preferred embodiments of the present invention have been described in detail above, but the invention is not limited to the described embodiments, and those skilled in the art can also make various equivalent modifications or replacements without violating the spirit of the present invention. These equivalent modifications or replacements are all within the scope defined by the claims of the present application.

Claims (10)

1. A walking piezoelectric actuated displacement device, characterized in that it comprises: the first platform; The second platform is located above the first platform, and is detachably connected to the first platform with a guide rail extending along the first direction, and at least two guide rails are provided at intervals along the second direction, the second direction is perpendicular to the first direction; The drive assembly is located between the two guide rails, the drive assembly includes a mover and a traveling piezoelectric motor for driving the mover to move in a first direction, and the traveling piezoelectric motor is connected to the first Platform connection, the mover extends along the first direction, and is detachably connected to the second platform, a centering block is provided between each guide rail and the mover, and the opposite of the centering block The two sides are perpendicular to the second direction; There are at least two lateral pressing assemblies at intervals along the second direction, each of the lateral pressing assemblies is movably connected to the first platform, and abuts against the guide rail, so that the centering block The opposite side surfaces of the guide rail and the mover are attached to the guide rail and the mover respectively. 2. The walking type piezoelectric actuated displacement device according to claim 1, wherein the first platform is provided with bumps extending along the first direction, and the bumps are spaced at least along the second direction by Two, each of the protrusions is provided with a plurality of screw holes arranged along the first direction, and the lateral pressing assembly includes a plurality of tightening screws, and each of the tightening screws is threaded with the screw holes connected and abutted against the rail. 3. The travel-type piezoelectric actuated displacement device according to claim 1, wherein the travel-type piezoelectric motor is detachably connected to the first platform, and the first platform is provided with a first mounting surface and a first positioning block, the first mounting surface is perpendicular to the up-down direction, the first positioning block has a first positioning surface perpendicular to the first direction, the bottom surface of the walking piezoelectric motor is connected to the first mounting surface The side surface of the walking piezoelectric motor is attached to the first positioning surface. 4. The travel-type piezoelectric actuated displacement device according to claim 3, wherein the travel-type piezoelectric motor comprises a housing and a combined stack, and the housing is provided with a groove with an upward opening, The opposite sides of the shell in the first direction are provided with notches communicating with the groove, and the combined stack is arranged in two groups at intervals along the second direction, and is arranged in the groove, each The set of combined stacks includes at least two piezoelectric stacks arranged at intervals along the first direction, and the mover passes through the gap and is located between the two sets of combined stacks. 5. The walking piezoelectric actuated displacement device according to claim 4, wherein the mover is connected to the second platform through bolts, and the guide rail includes a fixed rail and a sliding rail; the fixed rail The first platform is connected by bolts, and the sliding rail is connected with the second platform by bolts. 6 . The walking piezoelectric actuated displacement device according to claim 1 , wherein the centering block is connected to the second platform by bolts. 7. The walking type piezoelectric actuated displacement device according to claim 1, characterized in that, a device for measuring the relative position of the second platform relative to the first platform is provided between the first platform and the second platform. Linear encoder for stage displacement. 8. The walking piezoelectric actuated displacement device according to claim 1, wherein the guide rail is a cross roller guide rail. 9. A method for assembling a walking piezoelectric actuated displacement device, comprising the steps of: Installing a walking piezoelectric motor on the first platform, and loading a mover on the walking piezoelectric motor, so that the mover moves along a first direction; Centering blocks and guide rails are sequentially provided on opposite sides of the mover along the second direction, and the upper surfaces where the centering block, the mover and the guide rails are located are flush, wherein the first The second direction is perpendicular to the first direction; pre-fixing the guide rail to the first platform, and fixedly connecting the second platform to the mover; Utilize a lateral pressing assembly to drive each of the guide rails to move toward the mover, and make the opposite side surfaces of the centering block fit on the guide rail and the mover respectively, wherein the The opposite side surfaces of the centering block are perpendicular to the second direction; The first platform and the second platform are respectively fixedly connected to the guide rails. 10. The assembly method of the walking piezoelectric actuated displacement device according to claim 9, characterized in that, after the second platform is fixedly connected to the guide rail, the following step is further included: placing the second platform The second platform is fixedly connected with the centering block.