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CN116606636A - Composite thermal interface material based on liquid metal enhanced heat transfer and its preparation method - Google Patents

Composite thermal interface material based on liquid metal enhanced heat transfer and its preparation method Download PDF

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CN116606636A
CN116606636A CN202310580422.XA CN202310580422A CN116606636A CN 116606636 A CN116606636 A CN 116606636A CN 202310580422 A CN202310580422 A CN 202310580422A CN 116606636 A CN116606636 A CN 116606636A
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liquid metal
gallium
gasket
thermally conductive
conductive filler
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位松
杨易仁
谌思宇
李望云
杨道国
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08Materials not undergoing a change of physical state when used
    • C09K5/10Liquid materials
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08Materials not undergoing a change of physical state when used
    • C09K5/14Solid materials, e.g. powdery or granular

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Abstract

本发明公开了基于液态金属增强传热的复合热界面材料及其制备方法,由镓基液态金属增强导热垫片以及设置在镓基液态金属增强导热垫片上下面以及四周的封装垫片组成;镓基液态金属增强导热垫片是由小粒径混合物料颗粒铺平后压制成型,再均匀填充高分子聚合物并交联固化所得;封装垫片是将高分子聚合物与导热填料搅拌均匀,得混合物料;采用成型工艺将混合物料固定在镓基液态金属增强导热垫片的上下以及四周,再将高分子聚合物交联固化所得;本发明封装垫片能够防止内部液态金属从上下方及四周渗漏,避免液态金属与散热基底的直接接触,从而消除液态金属造成短路和腐蚀问题,提高传热的可靠性。

The invention discloses a composite thermal interface material based on liquid metal enhanced heat transfer and a preparation method thereof, which consists of a gallium-based liquid metal enhanced heat conduction gasket and packaging gaskets arranged on the upper, lower and surrounding sides of the gallium-based liquid metal enhanced heat conduction gasket; The gallium-based liquid metal enhanced thermal conductivity gasket is obtained by flattening the small particle size mixture material particles, then uniformly filling the high molecular polymer and cross-linking and curing; the packaging gasket is made by stirring the high molecular polymer and the thermal conductivity filler evenly. The mixed material is obtained; the mixed material is fixed on the upper, lower and surrounding areas of the gallium-based liquid metal reinforced thermal conduction pad by using a molding process, and then the high molecular polymer is cross-linked and solidified; the packaging gasket of the present invention can prevent the internal liquid metal from top, bottom and Leakage around prevents direct contact between liquid metal and the heat dissipation substrate, thereby eliminating short circuit and corrosion problems caused by liquid metal, and improving the reliability of heat transfer.

Description

基于液态金属增强传热的复合热界面材料及其制备方法Composite thermal interface material based on liquid metal enhanced heat transfer and its preparation method

技术领域technical field

本发明涉及热界面材料技术领域,具体涉及一种基于液态金属增强传热的复合热界面材料及其制备方法。The invention relates to the technical field of thermal interface materials, in particular to a composite thermal interface material based on liquid metal enhanced heat transfer and a preparation method thereof.

背景技术Background technique

随着微电子技术的高速发展,芯片的功率密度急剧增高,芯片局部过热区域的热通量现已达到300W/cm2,温升过高会严重影响电子设备的电学参数,制约其电学性能发挥,甚至造成电子元器件的失效,降低器件的可靠性。因此,对电子设备尤其是芯片的热管理变得越来越重要。在某种意义上,通过降低电子元件的热阻,特别是不同材料之间的界面热阻,能够有效防止芯片及电子元件过热问题。电子设备工作时热源产生的热量需要通过热沉散发出去,而采用热界面材料则可以填充至热源与热沉之间的空隙,提高电子设备的散热效率。With the rapid development of microelectronics technology, the power density of the chip has increased sharply, and the heat flux in the local overheated area of the chip has reached 300W/cm 2 . Excessive temperature rise will seriously affect the electrical parameters of electronic equipment and restrict its electrical performance. , and even cause the failure of electronic components, reducing the reliability of the device. Therefore, thermal management of electronic devices, especially chips, is becoming more and more important. In a sense, by reducing the thermal resistance of electronic components, especially the interface thermal resistance between different materials, it is possible to effectively prevent overheating problems of chips and electronic components. When the electronic equipment is working, the heat generated by the heat source needs to be dissipated through the heat sink, and the use of thermal interface materials can fill the gap between the heat source and the heat sink to improve the heat dissipation efficiency of the electronic equipment.

传统的热界面材料包括导热硅脂、相变材料和导热硅胶片等,通常由聚合物材料与导热填料组成,每颗导热填料都被聚合物基质隔离,其分布类似于“海岛”结构。此类材料已广泛应用于电子设备和散热器之间的热连接,但导热填料颗粒之间存在着巨大的热阻,造成其导热性能较差,难以满足更高的散热需求。Traditional thermal interface materials include thermally conductive silicone grease, phase change materials, and thermally conductive silicone sheets. They are usually composed of polymer materials and thermally conductive fillers. Each thermally conductive filler is isolated by a polymer matrix, and its distribution is similar to an "islands in the sea" structure. Such materials have been widely used in the thermal connection between electronic equipment and heat sinks, but there is a huge thermal resistance between the thermally conductive filler particles, resulting in poor thermal conductivity, which makes it difficult to meet higher heat dissipation requirements.

从材料力学和传热学方面来看,理想的热界面材料必须具有聚合物材料的弹性体基质,以满足柔软性、顺应性以及支撑强度的要求;而导热填料应通过连续通道进行连接,以消除聚合物较高热阻的影响。此外,传热通道必须具有足够的变形能力,否则复合材料不能满足良好的相容性要求。基于上述两个方面的要求,考虑到镓基液态金属具备高导热性、优异的流动性、低粘度和无毒性等优点,使用镓基液态金属有可能实现热界面材料传热性能的大幅提高。然而,在服役过程中,由于镓基液态金属往往存在着渗出外溢的问题,尤其是液态金属在遇到一些金属散热基底时会发生腐蚀现象,导致器件与热沉之间的热连接失效,严重影响器件散热的可靠性。From the perspective of material mechanics and heat transfer, an ideal thermal interface material must have an elastomeric matrix of polymer material to meet the requirements of softness, compliance, and support strength; while thermally conductive fillers should be connected through continuous channels to Eliminates the effect of the polymer's higher thermal resistance. In addition, the heat transfer channel must have sufficient deformability, otherwise the composite material cannot meet the requirement of good compatibility. Based on the requirements of the above two aspects, considering the advantages of gallium-based liquid metals with high thermal conductivity, excellent fluidity, low viscosity and non-toxicity, it is possible to greatly improve the heat transfer performance of thermal interface materials by using gallium-based liquid metals. However, during the service process, gallium-based liquid metal often has the problem of seepage and overflow, especially when the liquid metal encounters some metal heat dissipation substrates, it will corrode, resulting in the failure of the thermal connection between the device and the heat sink. Seriously affect the reliability of device heat dissipation.

现有基于液态金属强化传热的复合热界面材料无法同时满足高热导和防泄露的要求。中国发明专利CN108912683B公开了一种基于低熔点金属\导热粒子复合导热网络的热界面材料及其制备方法,由低熔点金属、导热粒子和高分子聚合物组成,导热粒子之间以低熔点金属为连接剂,各导热粒子通过低熔点金属相连接后形成三维导热网络通道;三维导热网络通道之间的孔隙由高分子聚合物填充;所述低熔点金属的熔点低于80℃,其化学成分中含有镓、铋、镉、锡、铅、镝和铟元素中的一种或几种;导热粒子为金属导热填料和/或无机非金属导热填料,无机非金属导热填料表面能够进行金属化处理;金属导热填料为纯金属或合金材料,无机非金属导热填料为金刚石、氮化硼、氧化铝、氮化铝、氮化硅、石墨、纳米碳管和石墨烯中的一种或几种。该技术利用镓基液态金属与导热粒子构建高效三维导热通道,且在使用过程中,低熔点金属与金属基底的界面形成冶金互连,高分子聚合物与基底产生粘接作用,两种连接方式限制了低熔点合金的溢流问题,但是液态金属在遇到一些金属散热基底时会发生腐蚀现象,导致器件与热沉之间的热连接失效,严重影响器件散热的可靠性,因此不宜将含有液态金属的复合导热热界面材料与散热基底进行直接接触。Existing composite thermal interface materials based on liquid metal enhanced heat transfer cannot meet the requirements of high thermal conductivity and anti-leakage at the same time. Chinese invention patent CN108912683B discloses a thermal interface material based on a low-melting-point metal/heat-conducting particle composite heat-conducting network and its preparation method. It is composed of a low-melting-point metal, heat-conducting particles and a high molecular polymer. As a linking agent, each heat-conducting particle is connected by a low-melting-point metal to form a three-dimensional heat-conducting network channel; the pores between the three-dimensional heat-conducting network channels are filled with polymers; the melting point of the low-melting-point metal is lower than 80°C, and its chemical composition is Containing one or more of gallium, bismuth, cadmium, tin, lead, dysprosium and indium elements; the heat-conducting particles are metal heat-conducting fillers and/or inorganic non-metal heat-conducting fillers, and the surface of the inorganic non-metal heat-conducting fillers can be metallized; The metal thermally conductive filler is pure metal or alloy material, and the inorganic non-metallic thermally conductive filler is one or more of diamond, boron nitride, aluminum oxide, aluminum nitride, silicon nitride, graphite, carbon nanotube and graphene. This technology uses gallium-based liquid metal and heat-conducting particles to build an efficient three-dimensional heat-conducting channel, and in the process of use, the interface between the low-melting point metal and the metal substrate forms a metallurgical interconnection, and the high-molecular polymer and the substrate are bonded. Two connection methods The overflow problem of low-melting point alloys is limited, but liquid metal will corrode when it encounters some metal heat dissipation substrates, resulting in the failure of the thermal connection between the device and the heat sink, which seriously affects the reliability of device heat dissipation, so it is not suitable to contain The liquid metal composite thermal interface material makes direct contact with the heat dissipation substrate.

中国发明专利CN110643331B公开了一种液态金属导热膏及其制备方法和应用,该发明使用聚合物材料将液态金属包裹其中,并且采用粘度调节剂增加复合材料粘度,避免液态金属的泄露,从而保证在使用过程中导热膏更加稳定安全,但是该复合热界面材料采用共混法制备,大部分导热填料都被聚合物基质隔离,导致材料导热性能较差。因此,亟需开发兼顾高热导和防泄露特点的基于液态金属强化传热的复合热界面材料。Chinese invention patent CN110643331B discloses a liquid metal heat conduction paste and its preparation method and application. The invention uses a polymer material to wrap the liquid metal in it, and uses a viscosity modifier to increase the viscosity of the composite material to avoid the leakage of the liquid metal. The thermal paste is more stable and safe during use, but the composite thermal interface material is prepared by a blending method, and most of the thermal conductive fillers are isolated by the polymer matrix, resulting in poor thermal conductivity of the material. Therefore, it is urgent to develop a composite thermal interface material based on liquid metal to enhance heat transfer that takes into account the characteristics of high thermal conductivity and anti-leakage.

发明内容Contents of the invention

针对现有热界面材料存在的不足之处,本发明的目的在于提供一种基于液态金属增强传热的复合热界面材料及其制备方法,制备的热界面材料具有极高的热导率、良好的柔软性与热连接可靠性。Aiming at the shortcomings of existing thermal interface materials, the purpose of the present invention is to provide a composite thermal interface material based on liquid metal enhanced heat transfer and its preparation method. The prepared thermal interface material has extremely high thermal conductivity, good Excellent flexibility and thermal connection reliability.

为达到上述目的,本发明所提供的技术方案如下:In order to achieve the above object, the technical scheme provided by the present invention is as follows:

一种基于液态金属增强传热的复合热界面材料,由镓基液态金属增强导热垫片以及设置在镓基液态金属增强导热垫片上下面以及四周的封装垫片组成;所述的镓基液态金属增强导热垫片是由粒径为1-1000μm小粒径混合物料颗粒铺平后压制成型,再均匀填充高分子聚合物并交联固化所得;所述的小粒径混合物料是镓基液态金属与导热填料搅拌均匀,粉碎制粒,筛分所得;所述的封装垫片是将高分子聚合物与导热填料搅拌均匀,得混合物料;采用成型工艺将混合物料固定在镓基液态金属增强导热垫片的上下以及四周,再将高分子聚合物交联固化所得;A composite thermal interface material based on liquid metal enhanced heat transfer, which is composed of a gallium-based liquid metal enhanced thermal conduction gasket and packaging gaskets arranged on the upper, lower and surrounding sides of the gallium-based liquid metal enhanced thermal conduction gasket; the gallium-based liquid metal The metal-reinforced heat-conducting gasket is obtained by flattening the small particle size mixed material particles with a particle size of 1-1000 μm, pressing and forming, and then uniformly filling high molecular polymer and cross-linking and curing; the small particle size mixed material is gallium-based liquid Stir the metal and the heat-conducting filler evenly, pulverize and granulate, and sieve the obtained product; the packaging gasket is obtained by mixing the high-molecular polymer and the heat-conducting filler evenly to obtain a mixed material; the mixed material is fixed on a gallium-based liquid metal-reinforced The upper, lower, and surrounding areas of the thermal pad are obtained by cross-linking and curing high molecular polymers;

所述的液态金属为纯镓、镓铟合金、镓锡合金、镓锌合金、镓铟锡合金、镓铟锌合金或镓铟锡锌合金;所述高分子聚合物为环氧树脂、有机硅树脂或聚氨酯树脂。The liquid metal is pure gallium, gallium-indium alloy, gallium-tin alloy, gallium-zinc alloy, gallium-indium-tin alloy, gallium-indium-zinc alloy or gallium-indium-tin-zinc alloy; the high molecular polymer is epoxy resin, organic silicon resin or polyurethane resin.

为进一步实现本发明目的,优选地,以体积百分比计,所述的所述液态金属增强导热垫片中,镓基液态金属占5%-40%,导热填料占35%-75%,高分子聚合物占20%-60%。In order to further realize the purpose of the present invention, preferably, in terms of volume percentage, in the said liquid metal enhanced thermal conduction gasket, the gallium-based liquid metal accounts for 5%-40%, the thermally conductive filler accounts for 35%-75%, and the polymer Polymer accounts for 20%-60%.

优选地,所述的导热填料为金属导热填料和/或无机非金属导热填料,导热填料的粒径为0.1-300μm;所述的均匀填充高分子聚合物是通过真空浸渗工艺将液态高分子聚合物填充到小粒径混合物料颗粒铺平后压制成型的三维网络结构材料的孔隙当中。。Preferably, the thermally conductive filler is a metal thermally conductive filler and/or an inorganic non-metallic thermally conductive filler, and the particle size of the thermally conductive filler is 0.1-300 μm; The polymer is filled into the pores of the three-dimensional network structure material formed by pressing the mixed material particles with small particle size after they are flattened. .

优选地,所述的金属导热填料为铜、镍、钼、钨、铜合金、镍合金、钼合金或钨合金中的一种或多种;所述无机非金属导热填料为氮化硼、氧化铝、氮化铝、氮化硅、石墨、金刚石、石墨烯和纳米碳管中的一种或多种;所述的真空浸渗工艺的真空度为1-1000Pa。Preferably, the metal thermally conductive filler is one or more of copper, nickel, molybdenum, tungsten, copper alloy, nickel alloy, molybdenum alloy or tungsten alloy; the inorganic non-metallic thermally conductive filler is boron nitride, oxide One or more of aluminum, aluminum nitride, silicon nitride, graphite, diamond, graphene and carbon nanotubes; the vacuum degree of the vacuum impregnation process is 1-1000Pa.

优选地,所述的采用成型工艺将混合物料固定在镓基液态金属增强导热垫片的上下以及四周通过如下方法实现:Preferably, the molding process is used to fix the mixed material on the upper, lower and surrounding sides of the gallium-based liquid metal enhanced thermal conductivity gasket through the following methods:

将高分子聚合物与导热填料置于混料机中,反复搅拌,直至高分子聚合物与导热填料充分混合,得到混合物料;采用网版印刷工艺将混合物料涂覆于塑料薄膜上;将第一张涂覆混合物料的塑料薄膜置于的镓基液态金属增强导热垫片的上方;真空压制成型,实现液态金属增强导热垫片与第一面封装垫片结合;Put the high molecular polymer and the thermal conductive filler in the mixer, and stir repeatedly until the high molecular polymer and the thermal conductive filler are fully mixed to obtain the mixed material; the mixed material is coated on the plastic film by the screen printing process; the second A plastic film coated with mixed materials is placed on top of the gallium-based liquid metal enhanced thermal conduction gasket; vacuum press molding realizes the combination of the liquid metal enhanced thermal conduction gasket and the first surface packaging gasket;

将镓基液态金属增强导热垫片结合第一面封装垫片的像对面朝上,在镓基液态金属增强导热垫片的外周设置环形槽模具,在环形槽模具中填充混合物料;将另一张涂覆高分子混合物料的塑料薄膜置于镓基液态金属增强导热垫片的上方,真空压制成型,将混合物料在镓基液态金属增强导热垫片的上表面和四周与封装垫片结合。The gallium-based liquid metal-enhanced thermal conduction gasket is combined with the opposite side of the packaging gasket on the first side facing up, and an annular groove mold is arranged on the outer periphery of the gallium-based liquid metal-enhanced thermal conduction gasket, and the mixed material is filled in the annular groove mold; the other A plastic film coated with a polymer mixture material is placed on the gallium-based liquid metal-enhanced thermal conduction gasket, vacuum-pressed, and the mixture material is combined with the package gasket on the upper surface and surroundings of the gallium-based liquid metal-enhanced heat conduction gasket.

优选地,所述的真空压制是在真空贴合机内先制造真空环境,并在压强作用下将混合物料贴在镓基液态金属增强导热垫片上;所述的环形槽的空心环形的宽度为2~5mm。Preferably, the vacuum pressing is to create a vacuum environment in the vacuum laminating machine first, and paste the mixed material on the gallium-based liquid metal reinforced thermal conductivity gasket under the action of pressure; the hollow annular width of the annular groove is It is 2-5mm.

优选地,所述的压强为10kPa-500kPa,保持时间为0.1min-60min;真空贴合机抽取的真空度为1-1000Pa。Preferably, the pressure is 10kPa-500kPa, and the holding time is 0.1min-60min; the vacuum drawn by the vacuum laminating machine is 1-1000Pa.

优选地,所述的网版印刷工艺的网版厚度为0.1-1mm。Preferably, the thickness of the screen in the screen printing process is 0.1-1 mm.

优选地,所述的交联固化的温度为20℃-200℃,保持时间为0.1min-60min。Preferably, the temperature for crosslinking and curing is 20°C-200°C, and the holding time is 0.1min-60min.

所述的基于液态金属增强传热的复合热界面材料的制备方法,包括以下步骤:The preparation method of the composite thermal interface material based on liquid metal enhanced heat transfer comprises the following steps:

1)将镓基液态金属与导热填料搅拌均匀;粉碎制粒,筛分,得粒径为1-1000μm小粒径混合物料颗粒;1) Stir the gallium-based liquid metal and the thermally conductive filler evenly; pulverize and granulate, and sieve to obtain mixed material particles with a particle size of 1-1000 μm;

2)将所述的小粒径混合物料颗粒铺平,压制成型,得液态金属/导热填料三维网络结构材料;通过真空浸渗工艺将液态高分子聚合物填充到所述液态金属/导热填料三维网络结构材料的孔隙当中;交联固化后获得镓基液态金属增强导热垫片;2) Flatten the particles of the mixed material with small particle size and press them into shape to obtain a liquid metal/thermally conductive filler three-dimensional network structure material; fill the liquid high molecular polymer into the liquid metal/thermally conductive filler three-dimensional network structure material through a vacuum infiltration process In the pores of the network structure material; after cross-linking and solidification, a gallium-based liquid metal enhanced thermal conductivity gasket is obtained;

3)将高分子聚合物与导热填料搅拌均匀,得到高分子聚合物与导热填料混合物料;采用成型工艺将高分子聚合物与导热填料混合物料固定在镓基液态金属增强导热垫片的上下以及四周,将高分子聚合物交联固化,得基于液态金属增强传热的复合热界面材料。3) Stir the high molecular polymer and the thermally conductive filler evenly to obtain a mixed material of the high molecular polymer and the thermally conductive filler; use a molding process to fix the mixed material of the high molecular polymer and the thermally conductive filler on the upper and lower sides of the gallium-based liquid metal reinforced thermally conductive gasket and Four weeks, the high molecular polymer is cross-linked and solidified to obtain a composite thermal interface material based on liquid metal enhanced heat transfer.

相对于现有技术,本发明具有如下优点和有益效果:Compared with the prior art, the present invention has the following advantages and beneficial effects:

1)本发明的封装垫片设置在镓基液态金属增强导热垫片的上下面以及四周,而且通过一体的成型工艺保证了镓基液态金属增强导热垫片的密封性,有效避免了含有液态金属的复合导热热界面材料与散热基底进行直接接触,提高了安全性,可防止内部液态金属分别从导热垫片上下方以及四周泄露,并起到液态金属与散热基底之间的隔离作用,以防液态金属对散热器表面产生腐蚀。1) The packaging gasket of the present invention is arranged on the upper, lower and surrounding sides of the gallium-based liquid metal enhanced thermal conduction gasket, and the sealing performance of the gallium-based liquid metal enhanced thermal conduction gasket is ensured through an integral molding process, effectively avoiding the liquid metal The composite heat-conducting thermal interface material is in direct contact with the heat-dissipating substrate, which improves safety, prevents the internal liquid metal from leaking from the upper, lower and surrounding areas of the thermal pad, and acts as an isolation between the liquid metal and the heat-dissipating substrate to prevent The liquid metal corrodes the surface of the radiator.

2)本发明封装垫片作为液态金属逸流阻挡介质同时也是传热介质;而封装垫片主要是由高分子聚合物与导热填料形成;而镓基液态金属增强导热垫片也包括高分子聚合物与导热填料,这样的原料有效保证了封装垫片与镓基液态金属增强导热垫片的传热以及避免受热后应力过大的问题,导致封装垫片与镓基液态金属增强导热垫片结合不紧密以及传热不及时。2) The packaging gasket of the present invention is used as a liquid metal escape blocking medium and is also a heat transfer medium; and the packaging gasket is mainly formed by a high molecular polymer and a thermally conductive filler; and the gallium-based liquid metal enhanced thermally conductive gasket also includes a polymer polymer Materials and thermally conductive fillers, such raw materials effectively ensure the heat transfer between the package gasket and the gallium-based liquid metal-enhanced thermally conductive gasket and avoid the problem of excessive stress after heating, resulting in the combination of the package gasket and the gallium-based liquid metal-enhanced thermally conductive gasket Not tight and heat transfer is not timely.

3)本发明由于采用了具备填充导热垫片周围功能的模具,可将高分子聚合物与导热填料混合物填充至液态金属增强导热垫片的周围,因此导热垫片不仅能够防止内部液态金属从导热垫片的上下方渗漏,避免液态金属与散热基底直接接触而发生腐蚀的问题,还能有效阻挡液态金属从导热垫片的四周溢出,完全杜绝了液态金属造成电子器件短路的风险。3) Since the present invention adopts a mold with the function of filling around the thermal pad, the mixture of polymer and thermal filler can be filled around the liquid metal reinforced thermal pad, so the thermal pad can not only prevent the internal liquid metal from heat conduction Leakage from the top and bottom of the gasket avoids the problem of corrosion caused by direct contact between the liquid metal and the heat dissipation substrate, and can effectively prevent the liquid metal from overflowing from around the thermal pad, completely eliminating the risk of short circuit caused by liquid metal.

4)液态金属增强导热垫片由镓基液态金属、导热填料与高分子聚合物组成,由液态金属、导热填料构建的高效三维导热通道使复合材料拥有极高的热导率,高分子聚合物则赋予材料良好的支撑强度与柔韧性;4) The liquid metal reinforced thermal pad is composed of gallium-based liquid metal, thermally conductive filler and polymer. The efficient three-dimensional heat conduction channel constructed by liquid metal and thermally conductive filler makes the composite material have extremely high thermal conductivity, and the polymer It gives the material good support strength and flexibility;

5)本发明液态金属增强导热垫片具有“液态金属/导热填料”三维骨架与高分子聚合物双连续相结构,导热填料通过液态金属桥接后形成三维导热网络通道,而三维导热网络通道之间的连续贯通孔隙由柔性高分子聚合物填充。5) The liquid metal reinforced thermal conductive gasket of the present invention has a three-dimensional skeleton of "liquid metal/thermal conductive filler" and a double continuous phase structure of high molecular polymer. The thermal conductive filler forms a three-dimensional heat conduction network channel after being bridged by liquid metal, and the three-dimensional heat conduction network channel The continuous through pores are filled by flexible polymers.

6)本发明封装垫片与液态金属增强导热材料的结合采用了网版印刷及真空贴合技术,能够实现导热垫片厚度的灵活控制,并有效抑制其内部产生气孔,大大降低液态金属产生溢流的风险。6) The combination of the packaging gasket and the liquid metal-enhanced heat-conducting material of the present invention adopts screen printing and vacuum bonding technology, which can realize flexible control of the thickness of the heat-conducting gasket, effectively suppress the generation of pores inside it, and greatly reduce the leakage of liquid metal. flow risk.

7)本发明由液态金属、导热填料构建的高效三维导热通道使复合材料拥有极高的热导率,高分子聚合物则赋予材料良好的支撑强度与柔韧性。7) The high-efficiency three-dimensional heat conduction channel constructed by liquid metal and heat conduction filler in the present invention enables the composite material to have extremely high thermal conductivity, and the high molecular polymer endows the material with good support strength and flexibility.

8)本发明基于液态金属增强传热的复合热界面材料兼具高热导和防渗漏的优点,适用于高性能计算机、5G通讯和电子电力等高功率界面传热应用。8) The composite thermal interface material based on liquid metal enhanced heat transfer of the present invention has the advantages of high thermal conductivity and anti-leakage, and is suitable for high-power interface heat transfer applications such as high-performance computers, 5G communications, and electronic power.

附图说明Description of drawings

图1为本发明基于液态金属增强传热的复合热界面材料的制备方法过程示意图。Fig. 1 is a schematic diagram of the preparation method of the composite thermal interface material based on liquid metal enhanced heat transfer of the present invention.

图2是实施例中液态金属增强导热垫片的三维显微组织照片。Fig. 2 is a photo of the three-dimensional microstructure of the liquid metal-enhanced thermally conductive gasket in the embodiment.

图3为普通导热垫片第二次与液态金属增强导热垫片真空贴合时所使用的模具;Figure 3 is the mold used for the second vacuum bonding of the ordinary thermal pad and the liquid metal enhanced thermal pad;

图4为本发明复合热界面材料的实物展示。Fig. 4 is a physical display of the composite thermal interface material of the present invention.

图5为导热系数测试平台的结构原理图。Figure 5 is a schematic diagram of the structure of the thermal conductivity test platform.

图6为本发明复合热界面材料的密封性测试试验;Fig. 6 is the sealing performance test of the composite thermal interface material of the present invention;

具体实施方式Detailed ways

下面结合附图和实施例对本发明的内容作进一步的阐述,实施例仅用来说明本发明,但不是对本发明保护范围构成限定。The content of the present invention will be further elaborated below in conjunction with the accompanying drawings and examples. The examples are only used to illustrate the present invention, but not to limit the protection scope of the present invention.

实施例1Example 1

如图1所示,一种基于液态金属增强传热的复合热界面材料的制备方法,包括如下步骤:As shown in Figure 1, a method for preparing a composite thermal interface material based on liquid metal enhanced heat transfer includes the following steps:

(1)材料准备:纯镓(纯度99.99wt%,东北有色金属公司,中国)、铬涂层金刚石粉末(平均粒径40μm,HFD-D型,河南黄河旋风公司(中国)、有机硅树脂(PDMS,Caster 1010,中国)。(1) Material preparation: pure gallium (purity 99.99wt%, Northeast Nonferrous Metals Company, China), chromium-coated diamond powder (average particle size 40 μm, HFD-D type, Henan Huanghe Cyclone Company (China), silicone resin ( PDMS, Caster 1010, China).

(2)取液态金属镓与导热填料铬涂层金刚石粉末按照体积比1:1.6混合,置于研钵中,反复搅拌直至获得导热填料完全被液态金属润湿的充分混合物料;将所得混合物料置于恒温炉中,在200℃温度条件下保温2h,使液态金属与导热填料之间形成牢固的冶金结合。(2) Take liquid metal gallium and thermally conductive filler chromium-coated diamond powder and mix them according to the volume ratio of 1:1.6, place them in a mortar, and stir repeatedly until the fully mixed material in which the thermally conductive filler is completely wetted by the liquid metal is obtained; the resulting mixed material Place it in a constant temperature furnace and keep it warm at 200°C for 2 hours to form a firm metallurgical bond between the liquid metal and the heat-conducting filler.

(3)将液态金属与导热填料混合物料进行粉碎制粒、通过不同孔径的标准筛进行分级分离,得到表面包覆液态金属的细粒径导热填料颗粒,颗粒直径在100μm以下;将筛选后的细粒径颗粒粉体铺平后,以1.16×106Pa的压强(保持30min)将其压实成型,得到由液态金属裹覆互连的导热填料三维网络结构材料。(3) Grinding and granulating the mixture of liquid metal and heat-conducting filler, passing through standard sieves with different apertures for fractional separation, to obtain fine-sized heat-conducting filler particles coated with liquid metal on the surface, and the particle diameter is below 100 μm; the screened After the fine-grain particle powder is flattened, it is compacted with a pressure of 1.16×10 6 Pa (holding for 30 minutes) to obtain a three-dimensional network structure material of thermally conductive fillers coated and interconnected by liquid metal.

(4)将所得的带有连续空隙的三维网络结构材料置于冰箱或液氮低温环境中,使液态金属镓凝固;再将所得材料浸没于液态有机硅树脂中并置于真空炉内(真空度10Pa),通过真空浸渗的工艺将液态高分子聚合物有机硅树脂填充到所得材料的孔隙当中。(4) Place the obtained three-dimensional network structure material with continuous voids in a refrigerator or a liquid nitrogen low-temperature environment to solidify the liquid metal gallium; then immerse the obtained material in liquid silicone resin and place it in a vacuum furnace (vacuum Degree 10Pa), the liquid high molecular polymer silicone resin is filled into the pores of the obtained material through the process of vacuum impregnation.

(5)将填充有液态有机硅树脂的三维网络结构材料表面多余残留的树脂清除干净,将样品放入恒温箱内,在120℃温度条件下使高分子聚合物交联固化,时间为40min;固化后使用刀具限定其厚度为1.5mm,最后得到镓基液态金属增强导热垫片,其显微组织照片如图2所示。由图可看出,该液态金属增强导热垫片由液态金属镓与金刚石导热填料构建的三维导热网络通道以及在其空隙中填充的有机硅树脂构成。(5) Clean up excess residual resin on the surface of the three-dimensional network structure material filled with liquid silicone resin, put the sample in a constant temperature box, and cross-link and solidify the high molecular polymer at a temperature of 120°C for 40 minutes; After curing, use a cutter to limit its thickness to 1.5 mm, and finally obtain a gallium-based liquid metal-enhanced thermal pad, and its microstructure photo is shown in Figure 2. It can be seen from the figure that the liquid metal enhanced thermal conduction gasket is composed of a three-dimensional heat conduction network channel constructed by liquid metal gallium and diamond heat conduction fillers, and silicone resin filled in the gaps.

(6)将有机硅树脂与氧化铝颗粒按照体积比1:1置于研钵中,反复搅拌直至获得高分子聚合物与导热填料充分混合的物料,随后采用0.2mm厚度的网版将上述混合物料以网版印刷的方式涂覆于塑料薄膜上,制作两份,以满足上下面的结合需求。(6) Put the silicone resin and alumina particles in the mortar according to the volume ratio of 1:1, and stir repeatedly until the high molecular polymer and the thermally conductive filler are fully mixed, and then use a 0.2mm thick screen to mix the above mixture The material is coated on the plastic film by screen printing, and two copies are made to meet the combination requirements of the upper and lower sides.

(7)将第一张涂覆高分子聚合物与导热填料混合物料的塑料薄膜置于上述液态金属增强导热垫片的上方,并使用橡皮泥使其悬空,并置于真空贴合机中抽真空至10Pa,随后在1.16×106Pa的压强下将其压紧结合(保持时间30min)。(7) Place the first plastic film coated with a mixture of polymer and thermally conductive filler on the above liquid metal reinforced thermally conductive gasket, and use plasticine to suspend it, and place it in a vacuum laminating machine for vacuuming. Vacuum to 10 Pa, and then press bond them under a pressure of 1.16×10 6 Pa (holding time 30 min).

(8)将样品放入恒温箱内在120℃温度条件下待有机硅树脂交联固化,固化时间为40min。(8) Put the sample into a constant temperature box and wait for the silicone resin to be cross-linked and cured at a temperature of 120° C., and the curing time is 40 minutes.

(9)将所得的液态金属增强导热垫未涂覆面朝上,把图3所示的环形槽模具放置于液态金属增强导热垫片上表面,在距离垫片外径2mm处填充一圈高分子聚合物与导热填料混合物料;随后取走模具,将第二张涂覆高分子聚合物与导热填料混合物料的塑料薄膜置于上述液态金属增强导热垫片的上方悬空,置于真空贴合机中抽真空至10Pa,再次在1.16×106Pa的压强下将其压紧结合(保持时间30min),在压力作用下,混合物料即可覆盖在镓基液态金属增强导热垫片表面,并填充至其周围;混合物料在镓基液态金属增强导热垫片的上下面以及四周形成封装垫片。(9) Put the uncoated side of the obtained liquid metal reinforced thermal pad facing upwards, place the annular groove mold shown in Figure 3 on the upper surface of the liquid metal reinforced thermal pad, and fill a circle of polymer at a distance of 2 mm from the outer diameter of the pad The mixture of polymer and thermal conductive filler; then remove the mold, place the second plastic film coated with the mixed material of high molecular polymer and thermal conductive filler on the above liquid metal reinforced thermal conductive gasket, and place it in a vacuum laminating machine Vacuum to 10Pa in the center, and press them again under the pressure of 1.16×10 6 Pa (holding time 30min). Under the pressure, the mixed material can cover the surface of the gallium-based liquid metal reinforced thermal pad, and fill to its surroundings; the mixed material forms packaging gaskets on the upper, lower, and surrounding sides of the gallium-based liquid metal enhanced thermal conductivity gasket.

(10)将样品放入恒温箱内在120℃温度条件下待有机硅树脂交联固化,固化时间为40min,最终可得到如图4所示的复合热界面材料。(10) Put the sample into a constant temperature box and wait for the silicone resin to be cross-linked and cured at a temperature of 120°C. The curing time is 40 minutes, and finally a composite thermal interface material as shown in Figure 4 can be obtained.

实施例2Example 2

(1)材料准备:镓铟锡合金(镓、铟、锡质量比7:2:1,东北有色金属公司,中国)、氮化硼颗粒(粒径≈5μm,纯度99.9%,河南黄河旋风公司(中国)、环氧树脂(PDMS,Caster1010,中国)。(1) Material preparation: gallium indium tin alloy (mass ratio of gallium, indium, and tin is 7:2:1, Northeast Nonferrous Metals Company, China), boron nitride particles (particle size ≈5 μm, purity 99.9%, Henan Huanghe Cyclone Company (China), epoxy resin (PDMS, Caster1010, China).

(2)采用磁控溅射技术在氮化硼颗粒表面镀覆金属铬薄膜,这一过程中通过超声振动平台实现氮化硼粉体的自由翻转,保证导热填料表面均覆盖金属薄膜。在本步骤中,可由真空蒸镀、化学镀、电镀等工艺方法代替磁控溅射技术,可以起到类似的效果。(2) Magnetron sputtering technology is used to coat metal chromium film on the surface of boron nitride particles. During this process, the boron nitride powder is freely turned over by an ultrasonic vibration platform to ensure that the surface of the thermally conductive filler is covered with a metal film. In this step, the magnetron sputtering technology can be replaced by vacuum evaporation, electroless plating, electroplating and other processes, which can achieve similar effects.

(3)取液态镓铟锡合金与氮化硼导热填料按照体积比1:1.6混合,置于研钵中,反复搅拌直至获得导热填料完全被液态金属润湿的充分混合物料;将所得混合物料置于恒温炉中,在200℃温度条件下保温2h,使液态金属与导热填料之间形成牢固的冶金结合。(3) Take liquid gallium indium tin alloy and boron nitride thermally conductive filler and mix according to the volume ratio of 1:1.6, place it in a mortar, and stir repeatedly until the fully mixed material in which the thermally conductive filler is completely wetted by the liquid metal is obtained; the obtained mixed material Place it in a constant temperature furnace and keep it warm at 200°C for 2 hours to form a firm metallurgical bond between the liquid metal and the heat-conducting filler.

(4)将液态金属与导热填料混合物料进行粉碎制粒、通过不同孔径的标准筛进行分级分离,得到表面包覆液态金属的细粒径导热填料颗粒,颗粒直径在100μm以下;将筛选后的细粒径颗粒粉体铺平后,以1.16×106Pa的压强(保持30min)将其压实成型,得到由液态金属裹覆互连的导热填料三维网络结构材料。(4) Grinding and granulating the mixture of liquid metal and heat-conducting filler, passing through standard sieves with different apertures for fractional separation, to obtain fine-sized heat-conducting filler particles coated with liquid metal on the surface, and the particle diameter is below 100 μm; the screened After the fine-grain particle powder is flattened, it is compacted with a pressure of 1.16×10 6 Pa (holding for 30 minutes) to obtain a three-dimensional network structure material of thermally conductive fillers coated and interconnected by liquid metal.

(5)将所得的带有连续空隙的三维网络结构材料置于冰箱或液氮低温环境中,使液态镓铟锡合金凝固;再将材料浸没于液态环氧树脂中并置于真空炉内(真空度10Pa),通过真空浸渗的工艺将液态高分子聚合物填充到材料的孔隙当中。(5) Place the obtained three-dimensional network structure material with continuous voids in a refrigerator or a liquid nitrogen low-temperature environment to solidify the liquid gallium indium tin alloy; then immerse the material in liquid epoxy resin and place it in a vacuum furnace ( The vacuum degree is 10Pa), and the liquid polymer is filled into the pores of the material through the process of vacuum impregnation.

(6)将填充有液态环氧树脂的三维网络结构材料表面多余残留的树脂清除干净,将样品放入恒温箱内,在120℃温度条件下使高分子聚合物交联固化,时间为40min;固化后使用刀具限定其厚度为1.5mm,,得到镓基液态金属增强导热垫片。(6) Clean up the excess residual resin on the surface of the three-dimensional network structure material filled with liquid epoxy resin, put the sample in a constant temperature box, and cross-link and solidify the high molecular polymer at a temperature of 120°C for 40 minutes; After curing, use a cutter to limit its thickness to 1.5mm, and obtain a gallium-based liquid metal enhanced thermal conduction gasket.

(7)将有机硅树脂与氧化铝颗粒按照体积比1:1置于研钵中,反复搅拌直至获得高分子聚合物与导热填料充分混合的物料,随后采用0.2mm厚度的网版将上述混合物料以网版印刷的方式涂覆于塑料薄膜上,样品需制作两份以满足上下面的结合需求。(7) Put the silicone resin and alumina particles in a mortar at a volume ratio of 1:1, and stir repeatedly until a material that is fully mixed with a high molecular polymer and a thermally conductive filler is obtained, and then use a 0.2mm thick screen to mix the above mixture The material is coated on the plastic film by screen printing, and two samples need to be made to meet the combination requirements of the upper and lower parts.

(8)将第一张涂覆高分子聚合物与导热填料混合物料的塑料薄膜置于上述液态金属增强导热垫片的上方,并使用橡皮泥使其悬空,并置于真空贴合机中抽真空至10Pa,随后在1.16×106Pa的压强下将其压紧结合(保持时间30min)。(8) Place the first plastic film coated with a mixture of high molecular polymer and thermal conductive filler on the above liquid metal reinforced thermal conductive gasket, and use plasticine to suspend it, and place it in a vacuum laminating machine to pump it. Vacuum to 10Pa, and then press and bond them under a pressure of 1.16×106Pa (holding time 30min).

(9)将样品放入恒温箱内在120℃温度条件下待环氧树脂交联固化,固化时间为40min。(9) Put the sample into a constant temperature box and wait for the epoxy resin to be cross-linked and cured at a temperature of 120° C., and the curing time is 40 minutes.

(10)将所得的液态金属增强导热垫未涂覆面朝上,把图3所示的环形槽模具放置于液态金属增强导热垫片上表面,在距离垫片外径2mm处填充一圈高分子聚合物与导热填料混合物料;随后取走模具,将第二张涂覆高分子聚合物与导热填料混合物料的塑料薄膜置于上述镓基液态金属增强导热垫片的上方悬空,置于真空贴合机中抽真空至10Pa,再次在1.16×106Pa的压强下将其压紧结合(保持时间30min),在压力作用下,混合物料即可在覆盖镓基液态金属增强导热垫片表面,并填充至其周围;混合物料在镓基液态金属增强导热垫片的上下面以及四周形成封装垫片。(10) Place the uncoated side of the obtained liquid metal reinforced thermal pad upwards, place the annular groove mold shown in Figure 3 on the upper surface of the liquid metal reinforced thermal pad, and fill a circle of polymer at a distance of 2mm from the outer diameter of the pad Polymer and thermal conductive filler mixed material; then remove the mold, place the second plastic film coated with high molecular polymer and thermal conductive filler mixed material above the above-mentioned gallium-based liquid metal reinforced thermal conductive gasket, and place it in a vacuum Vacuumize the machine to 10Pa, and press it again under the pressure of 1.16×106Pa (holding time 30min). Under the pressure, the mixed material can cover the surface of the gallium-based liquid metal reinforced thermal pad and fill it to its surroundings; the mixed material forms packaging gaskets on the upper, lower, and surrounding sides of the gallium-based liquid metal enhanced thermal conductivity gasket.

(11)将样品放入恒温箱内在120℃温度条件下待环氧树脂交联固化,固化时间为40min,最终得到液态金属增强传热的复合热界面材料。(11) Put the sample into a constant temperature box and wait for the epoxy resin to be cross-linked and cured at a temperature of 120°C. The curing time is 40 minutes, and finally a composite thermal interface material with liquid metal enhanced heat transfer is obtained.

实施例3Example 3

(1)材料准备:纯镓(纯度99.99wt%,东北有色金属公司,中国)、铬涂层金刚石粉末(平均粒径40μm,HFD-D型,河南黄河旋风公司(中国)、有机硅树脂(PDMS,Caster 1010,中国)。(1) Material preparation: pure gallium (purity 99.99wt%, Northeast Nonferrous Metals Company, China), chromium-coated diamond powder (average particle size 40 μm, HFD-D type, Henan Huanghe Cyclone Company (China), silicone resin ( PDMS, Caster 1010, China).

(2)取液态镓金属与金刚石导热填料按照体积比1:1.6混合,置于研钵中,反复搅拌直至获得导热填料完全被液态金属润湿的充分混合物料;将所得混合物料置于恒温炉中,在200℃温度条件下保温2h,使液态金属与导热填料之间形成牢固的冶金结合。(2) Mix liquid gallium metal and diamond heat-conducting filler according to the volume ratio of 1:1.6, place it in a mortar, and stir repeatedly until the heat-conducting filler is completely wetted by the liquid metal; place the resulting mixture in a constant temperature furnace In the process, heat preservation at 200°C for 2 hours to form a firm metallurgical bond between the liquid metal and the thermally conductive filler.

(3)将液态金属与导热填料混合物料进行粉碎制粒、通过不同孔径的标准筛进行分级分离,得到表面包覆液态金属的细粒径导热填料颗粒,颗粒直径在100μm以下;将筛选后的细粒径颗粒粉体铺平后,以1.16×106Pa的压强(保持30min)将其压实成型,得到由液态金属裹覆互连的导热填料三维网络结构材料。(3) Grinding and granulating the mixture of liquid metal and heat-conducting filler, passing through standard sieves with different apertures for fractional separation, to obtain fine-sized heat-conducting filler particles coated with liquid metal on the surface, and the particle diameter is below 100 μm; the screened After the fine-grain particle powder is flattened, it is compacted with a pressure of 1.16×10 6 Pa (holding for 30 minutes) to obtain a three-dimensional network structure material of thermally conductive fillers coated and interconnected by liquid metal.

(4)将所得的带有连续空隙的三维网络结构材料置于冰箱或液氮低温环境中,使液态金属镓凝固;再将材料浸没于液态有机硅树脂中并置于真空炉内(真空度10Pa),通过真空浸渗的工艺将液态高分子聚合物填充到材料的孔隙当中。(4) Place the obtained three-dimensional network structure material with continuous voids in a refrigerator or a liquid nitrogen low-temperature environment to solidify the liquid metal gallium; then immerse the material in liquid silicone resin and place it in a vacuum furnace (vacuum degree 10Pa), the liquid polymer is filled into the pores of the material through the process of vacuum impregnation.

(5)将填充有液态有机硅树脂的三维网络结构材料表面多余残留的树脂清除干净,将样品放入恒温箱内,在120℃温度条件下使高分子聚合物交联固化,时间为40min;固化后使用刀具限定其厚度为1.5mm,,得到镓基液态金属增强导热垫片。(5) Clean up excess residual resin on the surface of the three-dimensional network structure material filled with liquid silicone resin, put the sample in a constant temperature box, and cross-link and solidify the high molecular polymer at a temperature of 120°C for 40 minutes; After curing, use a cutter to limit its thickness to 1.5mm, and obtain a gallium-based liquid metal enhanced thermal conduction gasket.

(6)将环氧树脂与金刚石颗粒按照体积比1:1置于研钵中,反复搅拌直至获得高分子聚合物与导热填料充分混合的物料,随后采用0.2mm厚度的网版将上述混合物料以网版印刷的方式涂覆于塑料薄膜上,样品需制作两份以满足上下面的结合需求。(6) Put epoxy resin and diamond particles in a mortar with a volume ratio of 1:1, and stir repeatedly until a material that is fully mixed with a polymer and a thermally conductive filler is obtained, and then use a 0.2mm thick screen to mix the above mixed material It is coated on the plastic film by screen printing, and two samples need to be made to meet the combination requirements of the upper and lower sides.

(7)将第一张涂覆高分子聚合物与导热填料混合物料的塑料薄膜置于上述液态金属增强导热垫片的上方,并使用橡皮泥使其悬空,并置于真空贴合机中抽真空至10Pa,随后在1.16×106Pa的压强下将其压紧结合(保持时间30min)。(7) Place the first plastic film coated with a mixture of polymer and thermally conductive filler on the above liquid metal reinforced thermally conductive gasket, and use plasticine to suspend it, and place it in a vacuum laminating machine for vacuuming. Vacuum to 10Pa, and then press and bond them under a pressure of 1.16×106Pa (holding time 30min).

(8)将样品放入恒温箱内在120℃温度条件下待有机硅树脂交联固化,固化时间为40min。(8) Put the sample into a constant temperature box and wait for the silicone resin to be cross-linked and cured at a temperature of 120° C., and the curing time is 40 minutes.

(9)将所得的液态金属增强导热垫未涂覆面朝上,把图3所示的环形槽模具放置于液态金属增强导热垫片上表面,在距离垫片外径2mm处填充一圈高分子聚合物与导热填料混合物料;随后取走模具,将第二张涂覆高分子聚合物与导热填料混合物料的塑料薄膜置于上述液态金属增强导热垫片的上方悬空,置于真空贴合机中抽真空至10Pa,再次在1.16×106Pa的压强下将其压紧结合(保持时间30min),在压力作用下,混合物料即可在覆盖镓基液态金属增强导热垫片表面,并填充至其周围;混合物料在镓基液态金属增强导热垫片的上下面以及四周形成封装垫片。(9) Put the uncoated side of the obtained liquid metal reinforced thermal pad facing upwards, place the annular groove mold shown in Figure 3 on the upper surface of the liquid metal reinforced thermal pad, and fill a circle of polymer at a distance of 2 mm from the outer diameter of the pad The mixture of polymer and thermal conductive filler; then remove the mold, place the second plastic film coated with the mixed material of high molecular polymer and thermal conductive filler above the above liquid metal reinforced thermal conductive gasket, and place it in a vacuum laminating machine evacuate to 10Pa, and press them again under the pressure of 1.16×106Pa (holding time 30min). Under the pressure, the mixed material can cover the surface of the gallium-based liquid metal reinforced thermal pad and fill it to its Surrounding: The mixed material forms a packaging gasket on the upper, lower and surrounding sides of the gallium-based liquid metal enhanced thermal conductivity gasket.

(10)将样品放入恒温箱内在120℃温度条件下待有机硅树脂交联固化,固化时间为40min,最终得到液态金属增强传热的复合热界面材料。(10) Put the sample into a constant temperature box and wait for the silicone resin to be cross-linked and cured at a temperature of 120°C. The curing time is 40 minutes, and finally a composite thermal interface material with liquid metal enhanced heat transfer is obtained.

以实施例1为例,采用导热系数测试仪(湘潭湘仪公司中国公司生产的DRL-IV型热阻测试仪)进行实验,主要采用ASTM D5470稳态热流法评估复合材料的导热系数。测试时,将热源温度设置为125℃,冷源温度设置为5℃,使得测试时样品处的平均温度为60℃。计算机系统将完成数据的采集、数据处理以及仪器的控制,实现全自动测试。测试设备的结构原理如图5所示。Taking Example 1 as an example, a thermal conductivity tester (DRL-IV thermal resistance tester produced by Xiangtan Xiangyi Company in China) was used for the experiment, and the thermal conductivity of the composite material was mainly evaluated by the ASTM D5470 steady-state heat flow method. During the test, the temperature of the heat source was set to 125°C, and the temperature of the cold source was set to 5°C, so that the average temperature at the sample was 60°C during the test. The computer system will complete data collection, data processing and instrument control to realize fully automatic testing. The structure principle of the test equipment is shown in Fig. 5.

将测试参数结果导出后,导热系数λS可按如下公式计算:After exporting the test parameter results, the thermal conductivity λ S can be calculated according to the following formula:

式中:λs——测定样品的导热系数In the formula: λs——the thermal conductivity of the measured sample

λcu——铜热极平均温度的导热系数λ cu ——the thermal conductivity of the average temperature of the copper hot pole

Acu——垂直于热流方向的热极截面积A cu ——The cross-sectional area of the hot pole perpendicular to the direction of heat flow

As——垂直于热流方向的样品截面积As—sample cross-sectional area perpendicular to the direction of heat flow

t1、t2——热电偶T1、T2的温度t 1 , t 2 ——Temperatures of thermocouples T1 and T2

t3、t4——热电偶T3、T4的温度t 3 , t 4 ——Temperatures of thermocouples T3 and T4

Ls——样品的长度Ls - the length of the sample

L1——热电偶1和热电偶2之间的距离L 1 ——The distance between thermocouple 1 and thermocouple 2

L2——热电偶2和热源端面之间的距离L 2 ——The distance between the thermocouple 2 and the end face of the heat source

经过测试可得:所述复合热界面材料的整体的导热系数为23.4W/(m·K)。After testing, it can be obtained that the overall thermal conductivity of the composite thermal interface material is 23.4W/(m·K).

在中国发明专利CN108912683B中,其实施例1所提及的镓基液态金属增强导热垫片的导热系数为29.28W/(m·K),本实施例中由于引入了两侧导热垫片,复合材料的整体到热性能会降低;但传统的热界面材料包括导热硅脂、相变材料和导热硅胶片等,其热导率仅为1-8W/(m·K),本发明的复合热界面材料的导热性能虽不及直接使用液态金属增强导热垫片,但其导热性能已远远高于传统热界面材料,且与现有复合热界面材料的导热性能差距较小。In the Chinese invention patent CN108912683B, the thermal conductivity of the gallium-based liquid metal enhanced thermal conductivity pad mentioned in Example 1 is 29.28W/(m K). In this embodiment, due to the introduction of both sides of the thermal pad, the compound The overall thermal performance of the material will be reduced; but traditional thermal interface materials include thermal conductive silicone grease, phase change materials and thermal conductive silica gel sheets, etc., and their thermal conductivity is only 1-8W/(m K). Although the thermal conductivity of the interface material is not as good as the direct use of liquid metal to enhance the thermal conductivity of the gasket, its thermal conductivity is much higher than that of the traditional thermal interface material, and the thermal conductivity of the existing composite thermal interface material is not far behind.

同样以实施例1为例,如图6所示,进行液态金属增强传热的复合导热垫片的防泄露测试:Also taking Example 1 as an example, as shown in Figure 6, the anti-leakage test of the composite heat conduction gasket with liquid metal enhanced heat transfer is carried out:

1.将导热垫片徒手弯折超过45°,未发生液态金属泄露情况。1. The thermal pad was bent more than 45° by hand, and no liquid metal leakage occurred.

2.使用重物在导热垫片垂直方向施加载荷,所用重物为铁块,尺寸为50mm×50mm2. Use a heavy object to apply a load in the vertical direction of the thermal pad. The weight used is an iron block with a size of 50mm×50mm

×30mm,重量600g;将样品置于两片亚克力板间,顶部放置铁块,静置后样品未发生任何泄露。×30mm, weight 600g; the sample was placed between two acrylic plates, and an iron block was placed on the top, and the sample did not leak after standing still.

从上述实施例可见,本发明的封装垫片设置在镓基液态金属增强导热垫片的上下面以及四周,而且通过一体的成型工艺保证了镓基液态金属增强导热垫片的密封性,有效避免了含有液态金属的复合导热热界面材料与散热基底进行直接接触,提高了安全性,可防止内部液态金属分别从导热垫片上下方以及四周泄露,并起到液态金属与散热基底之间的隔离作用,以防液态金属对散热器表面产生腐蚀。本发明由于采用了具备填充导热垫片周围功能的模具,可将高分子聚合物与导热填料混合物填充至液态金属增强导热垫片的周围,因此导热垫片不仅能够防止内部液态金属从导热垫片的上下方渗漏,避免液态金属与散热基底直接接触而发生腐蚀的问题,还能有效阻挡液态金属从导热垫片的四周溢出,完全杜绝了液态金属造成电子器件短路的风险。It can be seen from the above embodiments that the packaging gasket of the present invention is arranged on the upper, lower and surrounding sides of the gallium-based liquid metal enhanced thermal conduction gasket, and the sealing performance of the gallium-based liquid metal enhanced thermal conduction gasket is ensured through an integrated molding process, effectively avoiding The composite thermal interface material containing liquid metal is in direct contact with the heat dissipation substrate, which improves safety, prevents the internal liquid metal from leaking from the top, bottom and surroundings of the thermal pad, and serves as an isolation between the liquid metal and the heat dissipation substrate The effect is to prevent liquid metal from corroding the surface of the radiator. Because the present invention adopts the mold with the function of filling the surroundings of the heat-conducting gasket, the mixture of high molecular polymer and heat-conducting filler can be filled around the liquid metal-enhanced heat-conducting gasket, so the heat-conducting gasket can not only prevent the internal liquid metal from flowing from the heat-conducting gasket Leakage from the top and bottom of the heat sink avoids the problem of corrosion caused by direct contact between the liquid metal and the heat dissipation substrate. It can also effectively prevent the liquid metal from overflowing from the surroundings of the thermal pad, completely eliminating the risk of short circuit caused by the liquid metal.

本发明封装垫片作为液态金属逸流阻挡介质同时也是传热介质;而封装垫片主要是由高分子聚合物与导热填料形成;而镓基液态金属增强导热垫片也包括高分子聚合物与导热填料,这样的原料有效保证了封装垫片与镓基液态金属增强导热垫片的传热以及避免受热后应力过大的问题,导致封装垫片与镓基液态金属增强导热垫片结合不紧密以及传热不及时。The packaging gasket of the present invention is used as a liquid metal escape flow blocking medium and is also a heat transfer medium; the packaging gasket is mainly formed of a high molecular polymer and a thermally conductive filler; and the gallium-based liquid metal enhanced thermal conductive gasket also includes a high molecular polymer and a Thermally conductive filler, such raw materials effectively ensure the heat transfer between the package gasket and the gallium-based liquid metal enhanced thermal conduction gasket and avoid the problem of excessive stress after heating, resulting in a loose combination of the package gasket and the gallium-based liquid metal enhanced thermal conduction gasket And the heat transfer is not timely.

本发明镓基液态金属增强导热垫片由镓基液态金属、导热填料与高分子聚合物组成,由液态金属、导热填料构建的高效三维导热通道使复合材料拥有极高的热导率,高分子聚合物则赋予材料良好的支撑强度与柔韧性。The gallium-based liquid metal reinforced thermal conduction gasket of the present invention is composed of gallium-based liquid metal, thermally conductive fillers and polymers. The efficient three-dimensional heat conduction channel constructed by liquid metal and thermally conductive fillers makes the composite material have extremely high thermal conductivity, and the polymer Polymers give the material good support strength and flexibility.

本发明基于液态金属增强传热的复合热界面材料兼顾高导热性能与液态金属防渗漏功能,并有效解决了中国发明专利CN108912683B中液态金属与散热器直接接触问题的,实现液态金属更好的密封,极大提高了导热材料的可用性。The composite thermal interface material based on liquid metal enhanced heat transfer in the present invention takes into account high thermal conductivity and liquid metal anti-leakage function, and effectively solves the problem of direct contact between liquid metal and radiator in Chinese invention patent CN108912683B, and realizes better liquid metal Sealing greatly improves the availability of thermally conductive materials.

Claims (10)

1.基于液态金属增强传热的复合热界面材料,其特征在于,由镓基液态金属增强导热垫片以及设置在镓基液态金属增强导热垫片上下面以及四周的封装垫片组成;所述的镓基液态金属增强导热垫片是由粒径为1-1000μm小粒径混合物料颗粒铺平后压制成型,再均匀填充高分子聚合物并交联固化所得;所述的小粒径混合物料是镓基液态金属与导热填料搅拌均匀,粉碎制粒,筛分所得;所述的封装垫片是将高分子聚合物与导热填料搅拌均匀,得混合物料;采用成型工艺将混合物料固定在镓基液态金属增强导热垫片的上下以及四周,再将高分子聚合物交联固化所得;1. The composite thermal interface material based on liquid metal enhanced heat transfer is characterized in that it is composed of a gallium-based liquid metal enhanced thermal conduction gasket and packaging gaskets arranged on the gallium-based liquid metal enhanced thermal conduction gasket and around it; The gallium-based liquid metal reinforced thermal conductivity gasket is obtained by paving the small particle size mixed material particles with a particle size of 1-1000 μm, pressing and forming, and then uniformly filling high molecular polymer and crosslinking and curing; the small particle size mixed material It is obtained by stirring the gallium-based liquid metal and the heat-conducting filler evenly, crushing and granulating, and sieving; the packaging gasket is obtained by stirring the high-molecular polymer and the heat-conducting filler evenly to obtain a mixed material; the mixed material is fixed on the gallium The base liquid metal strengthens the top, bottom and surroundings of the thermal pad, and then cross-links and solidifies the high molecular polymer; 所述的镓基液态金属为纯镓、镓铟合金、镓锡合金、镓锌合金、镓铟锡合金、镓铟锌合金或镓铟锡锌合金;所述高分子聚合物为环氧树脂、有机硅树脂或聚氨酯树脂。The gallium-based liquid metal is pure gallium, gallium-indium alloy, gallium-tin alloy, gallium-zinc alloy, gallium-indium-tin alloy, gallium-indium-zinc alloy or gallium-indium-tin-zinc alloy; the polymer is epoxy resin, Silicone resin or polyurethane resin. 2.根据权利要求1所述的基于液态金属增强传热的复合热界面材料,其特征在于,以体积百分比计,所述的所述液态金属增强导热垫片中,镓基液态金属占5%-40%,导热填料占35%-75%,高分子聚合物占20%-60%。2. The composite thermal interface material based on liquid metal enhanced heat transfer according to claim 1, characterized in that, in terms of volume percentage, gallium-based liquid metal accounts for 5% of the liquid metal enhanced thermal conductivity gasket -40%, thermally conductive fillers account for 35%-75%, and polymers account for 20%-60%. 3.根据权利要求1所述的基于液态金属增强传热的复合热界面材料,其特征在于,所述的导热填料为金属导热填料和/或无机非金属导热填料,导热填料的粒径为0.1-300μm;所述的均匀填充高分子聚合物是通过真空浸渗工艺将液态高分子聚合物填充到小粒径混合物料颗粒铺平后压制成型的三维网络结构材料的孔隙当中。。3. The composite thermal interface material based on liquid metal enhanced heat transfer according to claim 1, wherein the thermally conductive filler is a metal thermally conductive filler and/or an inorganic non-metallic thermally conductive filler, and the particle size of the thermally conductive filler is 0.1 -300 μm; The uniformly filled high molecular polymer is to fill the liquid high molecular polymer into the pores of the three-dimensional network structure material formed by pressing and forming the mixed material particles with small particle size through the vacuum impregnation process. . 4.根据权利要求3所述的基于液态金属增强传热的复合热界面材料,其特征在于,所述的金属导热填料为铜、镍、钼、钨、铜合金、镍合金、钼合金或钨合金中的一种或多种;所述无机非金属导热填料为氮化硼、氧化铝、氮化铝、氮化硅、石墨、金刚石、石墨烯和纳米碳管中的一种或多种;所述的真空浸渗工艺的真空度为1-1000Pa。4. The composite thermal interface material based on liquid metal enhanced heat transfer according to claim 3, wherein the metal thermally conductive filler is copper, nickel, molybdenum, tungsten, copper alloy, nickel alloy, molybdenum alloy or tungsten One or more of alloys; the inorganic non-metallic thermally conductive filler is one or more of boron nitride, aluminum oxide, aluminum nitride, silicon nitride, graphite, diamond, graphene and carbon nanotubes; The vacuum degree of the vacuum impregnation process is 1-1000Pa. 5.根据权利要求1所述的基于液态金属增强传热的复合热界面材料,其特征在于,所述的采用成型工艺将混合物料固定在镓基液态金属增强导热垫片的上下以及四周通过如下方法实现:5. The composite thermal interface material based on liquid metal enhanced heat transfer according to claim 1, characterized in that, the molding process is used to fix the mixed material on the upper, lower and surrounding sides of the gallium-based liquid metal enhanced heat conduction gasket through the following steps Method implementation: 将高分子聚合物与导热填料置于混料机中,反复搅拌,直至高分子聚合物与导热填料充分混合,得到混合物料;采用网版印刷工艺将混合物料涂覆于塑料薄膜上;将第一张涂覆混合物料的塑料薄膜置于的镓基液态金属增强导热垫片的上方;真空压制成型,实现液态金属增强导热垫片与第一面封装垫片结合;Put the high molecular polymer and the thermal conductive filler in the mixer, and stir repeatedly until the high molecular polymer and the thermal conductive filler are fully mixed to obtain the mixed material; the mixed material is coated on the plastic film by the screen printing process; the second A plastic film coated with mixed materials is placed on top of the gallium-based liquid metal enhanced thermal conduction gasket; vacuum press molding realizes the combination of the liquid metal enhanced thermal conduction gasket and the first surface packaging gasket; 将镓基液态金属增强导热垫片结合第一面封装垫片的像对面朝上,在镓基液态金属增强导热垫片的外周设置环形槽模具,在环形槽模具中填充混合物料;将另一张涂覆高分子混合物料的塑料薄膜置于镓基液态金属增强导热垫片的上方,真空压制成型,将混合物料在镓基液态金属增强导热垫片的上表面和四周与封装垫片结合。The gallium-based liquid metal-enhanced thermal conduction gasket is combined with the opposite side of the packaging gasket on the first side facing up, and an annular groove mold is arranged on the outer periphery of the gallium-based liquid metal-enhanced thermal conduction gasket, and the mixed material is filled in the annular groove mold; the other A plastic film coated with a polymer mixture material is placed on the gallium-based liquid metal-enhanced thermal conduction gasket, vacuum-pressed, and the mixture material is combined with the package gasket on the upper surface and surroundings of the gallium-based liquid metal-enhanced heat conduction gasket. 6.根据权利要求5所述的基于液态金属增强传热的复合热界面材料,其特征在于,所述的真空压制是在真空贴合机内先制造真空环境,并在压强作用下将混合物料贴在镓基液态金属增强导热垫片上;所述的环形槽的空心环形的宽度为2~5mm。6. The composite thermal interface material based on liquid metal enhanced heat transfer according to claim 5, characterized in that, the vacuum pressing is to create a vacuum environment in the vacuum laminating machine first, and under the action of pressure, the mixed material Pasted on the gallium-based liquid metal reinforced heat conduction gasket; the width of the hollow ring of the annular groove is 2-5 mm. 7.根据权利要求6所述的基于液态金属增强传热的复合热界面材料,其特征在于,所述的压强为10kPa-500kPa,保持时间为0.1min-60min;真空贴合机抽取的真空度为1-1000Pa。7. The composite thermal interface material based on liquid metal enhanced heat transfer according to claim 6, characterized in that, the pressure is 10kPa-500kPa, and the holding time is 0.1min-60min; 1-1000Pa. 8.根据权利要求5所述的基于液态金属增强传热的复合热界面材料,其特征在于,所述的网版印刷工艺的网版厚度为0.1-1mm。8 . The composite thermal interface material based on liquid metal enhanced heat transfer according to claim 5 , wherein the thickness of the screen in the screen printing process is 0.1-1 mm. 9.根据权利要求1所述的基于液态金属增强传热的复合热界面材料,其特征在于,所述的交联固化的温度为20℃-200℃,保持时间为0.1min-60min。9 . The composite thermal interface material based on liquid metal enhanced heat transfer according to claim 1 , characterized in that, the crosslinking curing temperature is 20° C.-200° C. and the holding time is 0.1 min-60 min. 10.权利要求1-9任一项所述的基于液态金属增强传热的复合热界面材料的制备方法,其特征在于包括以下步骤:10. The preparation method of the composite thermal interface material based on liquid metal enhanced heat transfer according to any one of claims 1-9, characterized in that it comprises the following steps: 1)将镓基液态金属与导热填料搅拌均匀;粉碎制粒,筛分,得粒径为1-1000μm小粒径混合物料颗粒;1) Stir the gallium-based liquid metal and the thermally conductive filler evenly; pulverize and granulate, and sieve to obtain mixed material particles with a particle size of 1-1000 μm; 2)将所述的小粒径混合物料颗粒铺平,压制成型,得液态金属/导热填料三维网络结构材料;通过真空浸渗工艺将液态高分子聚合物填充到所述液态金属/导热填料三维网络结构材料的孔隙当中;交联固化后获得镓基液态金属增强导热垫片;2) Flatten the particles of the mixed material with small particle size and press them into shape to obtain a liquid metal/thermally conductive filler three-dimensional network structure material; fill the liquid high molecular polymer into the liquid metal/thermally conductive filler three-dimensional network structure material through a vacuum infiltration process In the pores of the network structure material; after cross-linking and solidification, a gallium-based liquid metal enhanced thermal conductivity gasket is obtained; 3)将高分子聚合物与导热填料搅拌均匀,得到高分子聚合物与导热填料混合物料;采用成型工艺将高分子聚合物与导热填料混合物料固定在镓基液态金属增强导热垫片的上下以及四周,将高分子聚合物交联固化,得基于液态金属增强传热的复合热界面材料。3) Stir the high molecular polymer and the thermally conductive filler evenly to obtain a mixed material of the high molecular polymer and the thermally conductive filler; use a molding process to fix the mixed material of the high molecular polymer and the thermally conductive filler on the upper and lower sides of the gallium-based liquid metal reinforced thermally conductive gasket and Four weeks, the high molecular polymer is cross-linked and solidified to obtain a composite thermal interface material based on liquid metal enhanced heat transfer.
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