CN116456567A - Cooling structure for superconducting ECR ion source and water-cooling arc cavity assembly - Google Patents

Abstract

The invention discloses a cooling structure and a water-cooling arc cavity assembly for a superconducting ECR ion source, wherein the cooling structure for the superconducting ECR ion source comprises the following components: the arc cavity outer cylinder comprises a thin-wall outer cylinder structure and an outer flange positioned at the outer side of one axial end of the thin-wall outer cylinder structure, and a plurality of water holes are formed in the outer flange at intervals along the circumferential direction; the arc cavity inner cylinder comprises a thin-wall inner cylinder structure sleeved by the thin-wall outer cylinder structure and an inner side flange positioned at the end part of the thin-wall inner cylinder structure far away from the outer side flange, wherein a mounting position for arranging a plasma extraction electrode is arranged in the middle of the inner side flange, and a plurality of independent bending pipelines are arranged around the mounting position in the inner side; and the thin-wall outer cylinder structure and the thin-wall inner cylinder structure are matched to form a plurality of independent pore passages which are respectively communicated with the water through holes, and one bending pipeline is communicated with at least two independent pore passages so as to form a water inlet pipeline and a water outlet pipeline. The invention can fully cool the superconducting ECR ion source arc cavity and the plasma electrode.

Description

Cooling structure and water-cooled arc chamber assembly for superconducting ECR ion source

technical field

The invention relates to the technical field of superconducting ECR ion source confinement devices, in particular to a cooling structure and a water-cooled arc chamber assembly for a superconducting ECR ion source.

Background technique

In normal temperature coil or full permanent magnet ECR ion source, lower microwave power (less than 2KW) and lower frequency (less than 18GHz) are usually used. The water-cooled design of the ion source arc chamber adopts a straight cylinder with single-way entry and exit, and does not cool the plasma electrode, which can meet the requirements under the working conditions of low magnetic field, low microwave frequency, and low microwave power.

Because physics users need high-charged and heavy ion beams such as Bi ³¹⁺ , it is necessary to develop a high-charged superconducting ECR ion source with a microwave power of 5KW. However, the length and volume of the ion source arc cavity are much larger than the conventional ion source design, so the original arc cavity design can no longer meet the higher requirements of the ion source. Therefore, it is necessary to provide a cooling structure capable of sufficiently cooling the arc cavity of the superconducting ECR ion source and the plasma electrode.

Contents of the invention

In view of the above problems, the object of the present invention is to provide a cooling structure and a water-cooled arc chamber assembly for superconducting ECR ion sources, aiming to fully cool the cooling structure of superconducting ECR ion source arc chambers and plasma electrodes.

To achieve the above object, the present invention takes the following technical solutions:

A cooling structure for a superconducting ECR ion source according to an embodiment of the first aspect of the present invention, comprising: an arc cavity outer cylinder, including a thin-walled outer cylinder structure and an outer side located outside one axial end of the thin-walled outer cylinder structure Flange, the outer flange is provided with a plurality of water holes at intervals in the circumferential direction; the inner cylinder of the arc chamber includes a thin-walled inner cylinder structure for the thin-walled outer cylinder structure, and a thin-walled inner cylinder structure located on the thin-walled outer cylinder structure. The inner cylinder structure is far away from the inner flange at the end of the outer flange, the middle of the inner flange is provided with a plasma extraction electrode installation position and a plurality of independent bending pipes are arranged around the installation position and, the thin-walled outer cylinder structure cooperates with the thin-walled inner cylinder structure to form a plurality of independent channels respectively communicating with a plurality of the water passage holes, one of the bent pipelines and at least two of them The independent holes are connected to form the water inlet pipeline and the water outlet pipeline.

According to some embodiments of the present invention, the number of the water passage holes and the independent channels is evenly arranged in six along the circumferential direction, the number of the bent pipelines is evenly arranged in three along the circumferential direction, and every two of the independent channels The hole communicates with the same bent pipeline.

According to some embodiments of the present invention, the inner flange includes: an outer peripheral wall located in the outer circumferential direction; an intermediate wall located in the middle, the middle position of the intermediate wall is provided with the installation position, and the intermediate wall has The protruding end is used to connect with the outer peripheral wall to form the bent pipeline, and the two ends of the bent pipeline far away from each other form a water inlet to communicate with the water inlet pipeline and a water outlet to communicate with the water inlet. The water outlet pipeline; and a water retaining column, one end of the water retaining column is arranged on the outer peripheral wall between the water inlet and the water outlet, and the other end extends toward the inside of the bent pipeline and is connected to the middle wall The body forms a water outlet.

According to some embodiments of the present invention, the water retaining column is suitable for detachable connection with the peripheral wall.

According to some embodiments of the present invention, a fixed round hole is drilled on the outer peripheral wall body located in the middle of the water inlet and the water outlet, and the water retaining column is set in a cylindrical shape and is suitable for being inserted into the fixed A round hole; the thin-walled outer cylinder structure covers to the outside of the water-retaining column to abut against the water-retaining column.

According to some embodiments of the present invention, the outer peripheral wall surface of the thin-walled inner cylinder structure is in contact with the inner wall surface of the thin-walled outer cylinder structure, and one of them is provided with six water passages evenly distributed along the circumferential direction, and the other It is suitable for covering part of the opening of the water channel to form the independent channel, and the openings at both ends of the water channel correspond to the water inlet and the water outlet provided by the water hole and the inner flange respectively.

According to some embodiments of the present invention, the thin-walled inner cylinder structure and the thin-walled outer cylinder structure are assembled through a tight sliding fit.

A water-cooled arc chamber assembly according to an embodiment of the second aspect of the present invention is used for confining plasma in an ion source, and the water-cooled arc chamber assembly includes: the cooling structure for a superconducting ECR ion source described in any one of the above; and a plasma extraction electrode, the installation position is set as an installation via hole, the plasma extraction electrode is detachably arranged in the installation via hole and a through hole is opened in the middle, and the plasma extraction electrode is close to the thin wall One side of the inner space of the barrel structure is a plane, and the other side facing away from it is set as a conical surface conforming to the electric field required for ion extraction.

According to some embodiments of the present invention, the plasma extraction electrode includes a cylindrical body and a protruding ring provided on the outer periphery of one end of the cylindrical body, the through hole is set in the middle of the cylindrical body; the installation position is set It is a stepped hole, and the stepped hole includes a first hole section close to the inner space of the thin-walled inner cylinder structure and a second hole section away from the inner space of the thin-walled inner cylinder structure, and the first hole section is suitable for The cylindrical body is provided, and the second hole section is adapted to provide the protruding ring.

According to some embodiments of the present invention, the outer peripheral surface of the cylindrical body is in close contact with the hole wall of the first hole segment.

According to some embodiments of the present invention, the protruding ring is locked to the second hole segment by screws.

The present invention has at least the following advantages due to the adoption of the above technical scheme:

1. Input cooling water from some water holes provided on the outer flange, and the cooling water flows through the independent channel connected with the water hole, the bent pipeline connected with the independent channel, and the bent pipe Another independent channel connected with the road, and the water hole connected with the other independent channel, so as to have the effect of cooling the thin-walled inner cylinder structure and the inner flange;

2. The continuous flow of cooling water can effectively cool;

3. The cooling water flowing through the bent pipeline can absorb heat and cool the plasma extraction electrode on the installation position;

4. Multiple independent channels are separated to avoid water short circuit between the water inlet pipe and the water outlet pipe, and multiple bent pipes are set independently around the installation position to avoid mixed flow of cooling water between each other;

5. According to the magnetic field characteristics of the ion source, multiple independent channels are set to pass through the weak field distribution positions, which can fully cool these weak field positions.

Description of drawings

Fig. 1 is a schematic cross-sectional view of a water-cooled arc chamber assembly in some embodiments of the present invention;

Fig. 2 is another schematic cross-sectional view of the water-cooled arc chamber assembly of some embodiments of the present invention;

Fig. 3 is another schematic cross-sectional view of the water-cooled arc chamber assembly of some embodiments of the present invention;

Fig. 4 is a schematic structural view of the arc chamber inner cylinder in the water-cooled arc chamber assembly of some embodiments of the present invention;

Fig. 5 is a schematic structural view of the outer cylinder of the arc chamber in the water-cooled arc chamber assembly of some embodiments of the present invention;

Fig. 6 is a schematic structural view of the plasma extraction electrode in the water-cooled arc chamber assembly of some embodiments of the present invention;

FIG. 7 is a structural schematic view of another viewing angle of the plasma extraction electrode shown in FIG. 6 .

Marked in the attached drawings:

100. Arc cavity outer cylinder;

110. Thin-walled outer cylinder structure;

120. Outer flange;

130, water hole;

140. Independent channel;

200. Arc cavity inner cylinder;

210. Thin-walled inner cylinder structure;

220. Inner flange;

221. Installation position;

230. Bending pipeline;

240. Intermediate wall body;

300. Water retaining column;

400. Plasma extraction electrode;

410. Cylindrical body;

420, convex ring;

430. Through holes.

Detailed ways

In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear" etc. is based on the orientation or positional relationship shown in the drawings, and is only for It is convenient to describe the present invention and simplify the description, but does not indicate or imply that the system or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and thus should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "assembly", "setting", and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

The invention provides a cooling structure and a water-cooled arc chamber assembly for superconducting ECR ion sources, aiming to solve the problem of sufficient cooling of superconducting ECR ion sources, and can effectively improve the yield of superconducting ECR ion sources and optimize ion sources performance. Based on the embodiments of the present invention and beneficial effects, the ion source can work reliably under 5KW microwave power, which can provide such as Bi ³¹⁺ strong current and high charge state ion beam current, which can reach the leading level in the world. It plays an irreplaceable role in the HIRFL, a large scientific device of the institute.

In the following, the cooling structure for the superconducting ECR ion source and the water-cooled arc cavity assembly provided by the embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Example 1:

Referring to Figures 1 to 5, the cooling structure for a superconducting ECR ion source according to an embodiment of the first aspect of the present invention includes: an arc chamber outer cylinder 100 and an arc chamber inner cylinder 200; the arc chamber outer cylinder 100 includes a thin-walled The outer cylinder structure 110 and the outer flange 120 located outside the axial end of the thin-walled outer cylinder structure 110, the outer flange 120 is provided with a plurality of water holes 130 at intervals along the circumferential direction; the arc chamber inner cylinder 200 includes a thin-walled outer The thin-walled inner cylinder structure 210 sleeved by the cylinder structure 110, and the inner flange 220 located at the end of the thin-walled inner cylinder structure 210 away from the outer flange 120, the inner flange 220 is provided with a plasma extraction electrode 400 installation position 221 and a plurality of independent bending pipelines 230 are arranged around the installation position 221; and the thin-walled outer cylinder structure 110 cooperates with the thin-walled inner cylinder structure 210 to form a plurality of water holes 130 respectively communicated There are a plurality of independent holes 140, and a bent pipe 230 communicates with at least two of the independent holes 140 to form a water inlet pipe and a water outlet pipe.

In this embodiment, a plurality of independent channels 140 and water passage holes 130 are divided into multiple groups according to bending, and each group of independent channels 140 and water passage holes 130 can be set to at least two, wherein at least one independent channel 140 And the water hole 130 is used for water inlet, and at least one independent hole 140 and water hole 130 are used for water outlet, that is, each group of independent holes 140 and water hole 130 and a bent pipeline 230 form at least one inlet Water pipeline and at least one outlet pipeline. It can be understood that each group of independent holes 140 and water holes 130 and a bent pipe 230 are an independent cooling unit, and optionally, different numbers of cooling units are provided according to actual needs, and/or, the cooling unit includes There are different numbers of independent channels 140 and water holes 130 .

Specifically, cooling water is input from some water holes 130 provided on the outer flange 120, and the cooling water flows through the independent channels 140 communicating with the water holes 130 and the bent pipeline 230 communicating with the independent channels 140 in sequence. , another independent channel 140 communicated with the bent pipeline 230, and the water hole 130 communicated with the other independent channel 140, so as to simultaneously cool the thin-walled inner cylinder structure 210 and the inner flange 220 Effect. It should be noted that when the cooling water flows, it can directly absorb the heat of the arc chamber inner cylinder 200 .

Further, the cooling water is driven to flow continuously, so as to effectively cool the position where it flows. Considering the cooling requirement of the plasma extraction electrode 400, the bent pipeline is arranged closely around the installation position 221, so that the cooling water flowing through the bent pipeline 230 can absorb heat on the plasma extraction electrode 400 located on the installation position 221 for effective cooling.

Furthermore, a plurality of independent holes 140 are separated so as to avoid a water short circuit between the water inlet pipeline and the water outlet pipeline, and a plurality of bent pipelines 230 are independently arranged around the installation position 221 to avoid mutual interference. Mixed flow of cooling water occurs.

It is worth pointing out that the cooling structure for the superconducting ECR ion source in the embodiment of the present invention calculates the weak field distribution positions according to the magnetic field characteristics of the ion source, so that a plurality of independent channels 140 are set to pass through these weak field distribution positions, thereby The weak field can be sufficiently cooled.

Optionally, as shown in FIGS. 1 to 4 , in this embodiment, six water passage holes 130 and independent channels 140 are evenly arranged along the circumferential direction, and three bent pipelines 230 are evenly arranged along the circumferential direction. Each two independent channels 140 communicate with the same bent pipeline 230 . In this way, the six weak field locations can be sufficiently cooled according to the magnetic field characteristics of the ECR ion source.

Specifically, in this embodiment, the independent channels 140 are arranged in pairs at intervals of 60 degrees in the circumferential direction of the thin-walled inner cylinder structure 210 , and the independent channels 140 are arranged to extend along the axial direction of the thin-walled inner cylinder structure 210 . Optionally, the inner flange 220 is divided into three modules that are equally divided in the circumferential direction for respectively setting three bent pipelines 230 .

However, the design is not limited thereto. In other embodiments, the water holes 130 and the independent channels 140 are evenly arranged in other numbers along the circumferential direction, such as 12. The arrangement of the bent pipeline 230 and the connection with the independent channels 140 Adaptive adjustments are made to ensure the cooling effect, and there is no specific limitation.

Optionally, as shown in FIGS. 1 to 4 , in this embodiment, the inner flange 220 includes: an outer peripheral wall located in the outer circumferential direction; an intermediate wall 240 located in the middle, and the middle position of the intermediate wall 240 is installed Position 221, the middle wall body 240 has a protruding end for connecting with the peripheral wall body to form a bent pipeline 230, and the two ends of the bent pipeline 230 away from each other form a water inlet to communicate with the water inlet pipeline and a water outlet with Connected with the water outlet pipeline; and the water retaining column 300 , one end of the water retaining column 300 is set on the outer peripheral wall between the water inlet and the water outlet, and the other end extends toward the inside of the bent pipeline 230 and forms a water outlet with the middle wall 240 . It can be understood that setting the water retaining column 300 can restrict the cooling water from flowing through the water outlet close to the intermediate wall 240, that is, it can make each flow of cooling water turn around and flow through the area close to the plasma extraction electrode 400, thereby increasing the cooling effect.

Optionally, the cross section of the intermediate wall 240 is similar to a triangular shape, and its three protruding ends are connected to the outer peripheral wall, so as to form three independent bending pipeline 230 areas surrounded by the outer peripheral wall.

Without loss of generality, in this embodiment, the water blocking column 300 is suitable for detachable connection with the peripheral wall. In this way, the manufacturing process can be simplified through the detachable connection method, no integral processing is required, and the processing cost is reduced. In addition, the replacement of the water retaining column 300 can also be facilitated. It should be pointed out that the detachable connection between the water retaining column 300 and the outer peripheral wall means that before the arc chamber outer cylinder 100 is sleeved with the arc chamber inner cylinder 200 , the water retaining column 300 and the outer peripheral wall are detachably connected to each other.

However, the present design is not limited thereto, and in other embodiments, the water retaining column 300 and the peripheral wall body may also be connected through an integral molding process.

Further, as shown in Fig. 1 and Fig. 3, in this embodiment, a fixed round hole is drilled on the outer peripheral wall in the middle of the water inlet and the water outlet, and the water retaining column 300 is set in a cylindrical shape and is suitable for insertion into The round hole is fixed; the thin-walled outer cylinder structure 110 covers the outer side of the water blocking column 300 to abut against the water blocking column 300 . In this way, it can be used as an optional way to realize the detachable connection between the water blocking column 300 and the outer peripheral wall.

Specifically, in this embodiment, the water retaining column 300 can divide the bent pipeline 230 into two parts, which are respectively used for water inlet and water outlet. The size and shape of the water retaining column 300 are compatible with the size and shape of the fixing hole. When the water retaining column 300 is inserted into the fixing hole, its outer peripheral surface can seal the fixing hole. The water retaining column 300 can be limited in the axial direction with the fixed round hole by setting a limit step surface, etc., and can also achieve limit fixation and enhance the sealing effect through the abutment effect of the thin-walled outer cylinder structure 110 .

Optionally, as shown in Fig. 1 to Fig. 4, in this embodiment, the outer peripheral wall surface of the thin-walled inner cylinder structure 210 is attached to the inner wall surface of the thin-walled outer cylinder structure 110, and one of them is provided with six along The circumferentially uniform water channel, the other one is suitable for covering part of the opening of the water channel to form an independent channel 140. The openings at both ends of the water channel correspond to the water inlet and outlet provided by the water hole 130 and the inner flange 220 respectively. In this way, it can be used as an optional way to set the independent channel 140. In this embodiment, the water channel is opened on the surface of the structure, and the processing method is simple and easy, for example, it can be processed by milling.

Exemplarily, six water passage grooves uniformly distributed in the circumferential direction are provided on the outer peripheral wall of the thin-walled inner cylinder structure 210, the water passage grooves have an opening facing the outside direction, and the water passage holes 130 provided on the outer flange 120 extend to the thin-walled outer cylinder The inner wall surface of the structure 110 is in communication with the end opening of the water passage groove, the inner wall surface of the thin-walled outer cylinder structure 110 covers the opening other than the end connected to the water passage hole 130, and the water passage groove is close to the end groove of the inner flange 220 The bottom is used for connecting the water inlet and the water outlet.

Without loss of generality, in this embodiment, after the arc chamber outer cylinder 100 is sleeved with the arc chamber inner cylinder 200 in place, the two can be firmly connected by a welding process, and the sealing of the waterway can be ensured to prevent water leakage.

Further, in this embodiment, the thin-walled inner cylinder structure 210 and the thin-walled outer cylinder structure 110 are assembled through a tight sliding fit. It can be understood that when assembling the arc chamber outer cylinder 100 and the arc chamber inner cylinder 200, the assembly is realized through the relative sliding of the thin-walled inner cylinder structure 210 and the thin-walled outer cylinder structure 110, which has the advantage of simple and easy operation, and can Together, the independent channels 140 are formed. In addition, the outer peripheral wall surface of the thin-walled inner cylinder structure 210 is in close contact with the inner wall surface of the thin-walled outer cylinder structure 110 , so that the independent channels 140 can be independent.

Example 2:

Referring to Figures 1 to 7, the water-cooled arc chamber assembly according to the second embodiment of the present invention is used to confine the plasma in the ion source and includes: any cooling structure for the superconducting ECR ion source in Embodiment 1; And the plasma extraction electrode 400, the installation position 221 is set as an installation via hole, the plasma extraction electrode 400 is detachably arranged in the installation via hole and a through hole 430 is opened in the middle, the plasma extraction electrode 400 is close to the inner space of the thin-walled inner cylinder structure 210 One side is a plane, and the opposite side is set as a conical surface conforming to the electric field required for ion extraction. Wherein, the tapered surface on the plasma extraction electrode 400 is optionally set to have a special angle, so as to meet the electric field required for ion extraction.

The detachable arrangement of the plasma extraction electrode 400 can facilitate operations such as disassembly and replacement.

It should be noted that the above explanations on the embodiment and beneficial effects of the cooling structure for the superconducting ECR ion source are also applicable to the water-cooled arc chamber assembly of this embodiment, and will not be elaborated here to avoid redundancy.

Further, referring to FIG. 6 and FIG. 7 , in this embodiment, the plasma extraction electrode 400 includes a cylindrical body 410 and a protruding ring 420 disposed on the outer periphery of one end of the cylindrical body 410 , and a through hole is arranged in the middle of the cylindrical body 410 . hole 430; the installation position 221 is set as a stepped hole, the stepped hole includes a first hole section close to the inner space of the thin-walled inner cylinder structure 210, and a second hole section away from the inner space of the thin-walled inner cylinder structure 210, the first hole section is suitable for After setting the cylindrical body 410 , the second hole section is suitable for setting the protruding ring 420 . In this way, the cooling effect can be ensured by matching the cylindrical body 410 with the first hole section of the stepped hole. On the one hand, the protruding ring 420 can be used to fix the plasma extraction electrode 400, and on the other hand, it can also cover the cylindrical body 410 and the connection of the stepped hole to further ensure the cooling effect.

Furthermore, the outer peripheral surface of the cylindrical body 410 is in close contact with the hole wall of the first hole section.

Without loss of generality, in this embodiment, the protruding ring 420 is locked to the second hole segment by screws, so that the detachable connection between the protruding ring 420 and the inner flange 220 can be realized. Specifically, the second hole section has a plane connecting the first hole section, and a plurality of threaded holes spaced apart from each other are arranged on the plane, and a plurality of holes corresponding to the threaded holes are arranged at intervals on the protruding ring 420 for the screws to pass through. The protruding ring 420 is locked to the second hole segment. The way of screw locking has the advantage of easy disassembly and assembly, and can be conveniently carried out in the direction outside the arc cavity.

However, the present design is not limited thereto. In other embodiments, the protruding ring 420 may also be detachably connected to the second hole section through other structures, for example, through a turnbuckle connection.

It is worth pointing out that, in the embodiment of the present invention, since the plasma extraction electrode 400 and the installation via hole are arranged in a stepped shape that closely fits, the heat conduction between the two can be increased, thereby improving the cooling of the plasma extraction electrode 400 Effect. Combined with the setting of the water cooling structure, the present invention has an excellent cooling effect on the superconducting ECR ion source.

It should be noted that "and/or" in the full text includes three solutions, taking "A and/or B" as an example, including A technical solution, B technical solution, and a technical solution that A and B satisfy at the same time.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it can still be Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent replacements are made to some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims (10)

1. A cooling structure for a superconducting ECR ion source, characterized in that it comprises: The arc cavity outer cylinder includes a thin-walled outer cylinder structure and an outer flange located outside one axial end of the thin-walled outer cylinder structure, and the outer flange is provided with a plurality of water holes at intervals along the circumferential direction; The arc cavity inner cylinder includes a thin-walled inner cylinder structure for the thin-walled outer cylinder structure, and an inner flange located at the end of the thin-walled inner cylinder structure away from the outer flange, the inner flange In the middle of the blue, there is an installation position for setting the plasma extraction electrode, and a plurality of independent bent pipelines are arranged around the installation position inside; In addition, the thin-walled outer cylinder structure cooperates with the thin-walled inner cylinder structure to form a plurality of independent channels respectively communicating with the plurality of water passage holes, and one of the bent pipelines is connected to at least two of them. The above-mentioned independent holes are connected to form a water inlet pipeline and a water outlet pipeline. 2. the cooling structure for superconducting ECR ion source according to claim 1, is characterized in that, The number of the water passage holes and the independent channels is evenly arranged to be six along the circumferential direction, and the number of the bent pipelines is evenly arranged to be three along the circumferential direction, and every two of the independent channels are connected to the same bent Pipe connection. 3. the cooling structure for superconducting ECR ion source according to claim 2, is characterized in that, The inner flange includes: an outer peripheral wall located in the outer peripheral direction; An intermediate wall in the middle, the installation position is provided in the middle of the intermediate wall, and the intermediate wall has a protruding end for connecting with the outer peripheral wall to form the bent pipeline, the The two ends of the bent pipeline that are far away from each other form water inlets to communicate with the water inlet pipeline, and water outlets to communicate with the water outlet pipeline; and A water retaining column, one end of the water retaining column is arranged on the outer peripheral wall between the water inlet and the water outlet, and the other end extends toward the inside of the bent pipeline and forms a water outlet with the intermediate wall. 4. the cooling structure for superconducting ECR ion source according to claim 3, is characterized in that, The water retaining column is suitable for detachable connection with the outer peripheral wall. 5. the cooling structure for superconducting ECR ion source according to claim 4, is characterized in that, A fixed round hole is drilled on the outer peripheral wall located in the middle of the water inlet and the water outlet, and the water retaining column is set in a cylindrical shape and is suitable for being inserted into the fixed round hole; The thin-walled outer cylinder structure covers to the outside of the water retaining column to abut against the water retaining column. 6. The cooling structure for a superconducting ECR ion source according to any one of claims 1 to 5, characterized in that, The outer peripheral wall surface of the thin-walled inner cylinder structure is in contact with the inner wall surface of the thin-walled outer cylinder structure, and one of them is provided with six water passages uniformly distributed along the circumferential direction, and the other is suitable for covering the water passage grooves part of the opening to form the independent channel, and the openings at both ends of the water channel correspond to the water inlet and outlet provided by the water hole and the inner flange respectively. 7. the cooling structure for superconducting ECR ion source according to claim 6, is characterized in that, The thin-walled inner cylinder structure and the thin-walled outer cylinder structure are assembled through a tight sliding fit. 8. A water-cooled arc chamber assembly for ion source confinement plasma, characterized in that the water-cooled arc chamber assembly includes: The cooling structure for a superconducting ECR ion source according to any one of claims 1 to 7; and The plasma extraction electrode, the installation position is set as an installation via hole, the plasma extraction electrode is detachably arranged in the installation via hole and a through hole is opened in the middle, and the plasma extraction electrode is close to the thin-walled inner cylinder One side of the internal space of the structure is a plane, and the other side facing away from it is set as a conical surface conforming to the electric field required for ion extraction. 9. The water-cooled arc chamber assembly according to claim 8, characterized in that, The plasma extracting electrode includes a cylindrical body and a protruding ring provided on the outer periphery of one end of the cylindrical body, and the through hole is arranged in the middle of the cylindrical body; The installation position is set as a stepped hole, and the stepped hole includes a first hole section close to the inner space of the thin-walled inner cylinder structure and a second hole section away from the inner space of the thin-walled inner cylinder structure. A bore section is adapted to accommodate the cylindrical body, and the second bore section is adapted to accommodate the collar. 10. The water-cooled arc chamber assembly according to claim 9, characterized in that, The outer peripheral surface of the cylindrical body is in close contact with the hole wall of the first hole section; and/or The protruding ring is locked to the second hole segment by screws.