CN116299499A - A transfer system and calibration method for realizing accurate and repeatable positioning of multi-station equipment - Google Patents
A transfer system and calibration method for realizing accurate and repeatable positioning of multi-station equipment Download PDFInfo
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- CN116299499A CN116299499A CN202211732713.8A CN202211732713A CN116299499A CN 116299499 A CN116299499 A CN 116299499A CN 202211732713 A CN202211732713 A CN 202211732713A CN 116299499 A CN116299499 A CN 116299499A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/10—Radiation diagrams of antennas
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/66—Tracking systems using electromagnetic waves other than radio waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/02—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S13/00
- G01S7/40—Means for monitoring or calibrating
- G01S7/4004—Means for monitoring or calibrating of parts of a radar system
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Abstract
本发明公开一种实现多工位设备精确重复定位的转运系统和标定方法,涉及转运标定技术领域,以解决现有装置无法实现工作位和贮存位自由切换,设备工作位无法重复精确定位的问题。其中转运系统的刚性预埋支撑成对安装在测试基础上,固定支撑框架水平安装在对应刚性预埋支撑上;升降轨道车工作在工作位直线轨道上,先后两次将刚性托架的两侧放置在对应固定支撑框架上,标定设备在构建的空间坐标系内,先后对刚性托架和固定支撑框架进行两次标定,定位装置在标定设备完成首次标定后锁定,标定设备先后两次标定读数小于预设值时,升降轨道车承托刚性托架运动至存储位直线轨道。上述系统和方法实现了多工位设备的精确重复定位和转运,具有很强实用性。
The invention discloses a transfer system and a calibration method for realizing accurate and repeated positioning of multi-station equipment, relates to the technical field of transfer calibration, and solves the problem that the existing device cannot realize the free switching between the working position and the storage position, and the working position of the equipment cannot be accurately positioned repeatedly . The rigid pre-embedded supports of the transfer system are installed in pairs on the test foundation, and the fixed support frame is installed horizontally on the corresponding rigid pre-embedded supports; the lifting rail car works on the straight track of the working position, and the two sides of the rigid bracket are placed twice successively Placed on the corresponding fixed support frame, the calibration equipment is in the constructed space coordinate system, and the rigid bracket and the fixed support frame are calibrated twice successively. The positioning device is locked after the calibration equipment completes the first calibration, and the calibration equipment calibrates the reading twice successively. When the value is less than the preset value, the lifting rail car supports the rigid bracket and moves to the straight track of the storage position. The above-mentioned system and method realize the precise and repeated positioning and transfer of multi-station equipment, and have strong practicability.
Description
技术领域technical field
本发明涉及转运标定技术领域,尤其涉及一种实现多工位设备精确重复定位的转运系统和标定方法。The invention relates to the technical field of transfer calibration, in particular to a transfer system and a calibration method for realizing accurate and repeated positioning of multi-station equipment.
背景技术Background technique
天线测试、天线罩测试、RCS测试等均需要使用微波暗室作为测试基础设施,而微波暗室一般涉及到征地、土建、屏蔽室建设、吸波材料铺设等,建设周期长、投入资金大,为减少重复投入,缩短建设周期,不少厂商选择将上述三种测试需求整合在一个多功能微波暗室中。然而,上述三种测试场景对测试设备的要求存在不同,各个测试设备在暗室内的安装位置、高度均有区别,在传统单一功能暗室中,各个测试设备的安装位置唯一确定,在标定后均固定不动,不存在重复定位的问题。天线测试、天线罩测试和RCS测试的关键技术指标对各个设备测试位置的几何量精度要求极高,而在多功能暗室中,各个设备具有不同的工作位,且需要在工作位、贮存位之间切换,因而实现各个设备工作位的精确重复定位是实现多功能测试暗室具备测试功能的关键。Antenna test, radome test, RCS test, etc. all need to use microwave anechoic chamber as the test infrastructure, and microwave anechoic chamber generally involves land acquisition, civil engineering, shielding room construction, wave-absorbing material laying, etc., and the construction period is long and the investment is large. To repeat investment and shorten the construction period, many manufacturers choose to integrate the above three test requirements into a multi-functional microwave anechoic chamber. However, the above three test scenarios have different requirements for test equipment. The installation positions and heights of each test equipment in the darkroom are different. In the traditional single-function darkroom, the installation position of each test equipment is uniquely determined. Fixed, there is no problem of repeated positioning. The key technical indicators of antenna test, radome test and RCS test have extremely high requirements on the geometric accuracy of the test position of each device. Therefore, the precise and repeated positioning of each equipment working position is the key to realize the testing function of the multi-functional test darkroom.
为解决精确重复定位的问题,一种方式是将转换轨道设计为精密级滚珠直线导轨和齿轮齿条驱动形式,该方式需要将工作位轨道和贮存位轨道按照精密滚珠直线导轨的安装要求进行设计,一般是将轨道安装在整体铣削加工的底座框架上,同时工作位轨道和贮存位轨道要存在高度差,以保证换轨托架的安装空间。此外,该精密滚珠直线导轨的拼接需要精密的配合,间隙一般要小于0.1mm,这就需要复杂的拼接机构确保设备可在不同轨道上移动切换。因此,采用这种方式势必在设备转换轨道系统上投入较大的成本,而工作位本身在该轨道系统中占比很小,大部分建设并未精确投入到重复定位这一问题本身。更为矛盾的是,中大型测试设备对测试工位的刚性要求较高,若该轨道底座刚性不足则难以完成高精度要求的测试,若要提高刚性则会进一步增加成本。In order to solve the problem of precise and repetitive positioning, one way is to design the conversion track as a precision ball linear guide and rack and pinion drive form. This method needs to design the working track and storage track according to the installation requirements of the precision ball linear guide Generally, the track is installed on the base frame of the overall milling process. At the same time, there must be a height difference between the working position track and the storage position track to ensure the installation space of the track change bracket. In addition, the splicing of the precision ball linear guide requires precise cooperation, and the gap is generally less than 0.1mm, which requires a complex splicing mechanism to ensure that the equipment can move and switch on different tracks. Therefore, adopting this method will inevitably invest a large cost in the equipment conversion track system, and the work station itself accounts for a small proportion of the track system, and most of the construction has not been accurately invested in the problem of repeated positioning itself. What is even more paradoxical is that medium and large-scale test equipment requires high rigidity of the test station. If the track base is not rigid enough, it will be difficult to complete the test with high precision requirements. If the rigidity is to be improved, the cost will be further increased.
发明内容Contents of the invention
本发明的目的在于提供一种实现多工位设备精确重复定位的转运系统和标定方法,用于解决多功能暗室中,各个设备具有不同的工作位,需要在工作位、贮存位之间切换,要求各个设备工作位的精确重复定位,而现有的装置和方法无法实现工作位和贮存位的自由切换,设备的工作位也无法重复精确定位的问题。The purpose of the present invention is to provide a transfer system and a calibration method for realizing accurate and repeated positioning of multi-station equipment, which is used to solve the problem that in a multi-functional darkroom, each equipment has different work positions and needs to be switched between work positions and storage positions. Accurate and repeated positioning of the working positions of each equipment is required, but the existing devices and methods cannot realize the free switching between the working position and the storage position, and the working positions of the equipment cannot repeat the precise positioning.
为了实现上述目的,本发明提供如下技术方案:In order to achieve the above object, the present invention provides the following technical solutions:
提供一种实现多工位设备精确重复定位的转运系统,包括固定位置支撑框架、设备承载托架、升降轨道车、转运轨道、标定设备和测试基础;Provide a transfer system for accurate and repeatable positioning of multi-station equipment, including a fixed position support frame, equipment carrying brackets, lifting rail cars, transfer rails, calibration equipment and test bases;
所述固定位置支撑框架包括多组刚性预埋支撑和等数量的固定支撑框架,多组所述刚性预埋支撑成对安装在所述测试基础上,所述固定支撑框架水平安装在对应所述刚性预埋支撑上;所述设备承载托架包括多个刚性托架和多个对所述固定支撑框架和所述刚性托架进行定位的定位装置;The fixed position support frame includes multiple sets of rigid embedded supports and an equal number of fixed support frames, multiple sets of rigid embedded supports are installed in pairs on the test foundation, and the fixed support frames are installed horizontally on the corresponding Rigid pre-embedded support; the equipment carrying bracket includes a plurality of rigid brackets and a plurality of positioning devices for positioning the fixed support frame and the rigid bracket;
所述转运轨道包括工作位直线轨道和存储位直线轨道,所述升降轨道车工作在所述工作位直线轨道上,先后两次将所述刚性托架的两侧放置在对应所述固定支撑框架上,所述标定设备在构建的空间坐标系内,先后对所述刚性托架和所述固定支撑框架进行两次标定,所述定位装置在所述标定设备完成首次标定后锁定,所述标定设备先后两次标定读数小于预设值时,所述升降轨道车承托所述刚性托架运动至所述存储位直线轨道。The transfer track includes a working position linear track and a storage position linear track, and the lifting rail car works on the working position linear track, and the two sides of the rigid bracket are placed on the corresponding fixed support frame twice successively. Above, the calibration device calibrates the rigid bracket and the fixed support frame twice successively in the constructed space coordinate system, the positioning device is locked after the calibration device completes the first calibration, and the calibration When the calibration reading of the equipment is less than the preset value twice successively, the lifting rail car supports the rigid bracket to move to the storage position linear track.
与现有技术相比,本发明提供的实现多工位设备精确重复定位的转运系统中选用的是轮轨式轨道,架设成本低,兼容性好,定位装置选用的是销轴式紧密配合的形式,具有有效的高重复精度,在工作位的高精度重复定位为机械式,无控制设备控制精度及反馈元件的精度影响,且可靠性更高;仅在工作位处进行高精度的测量和定位,转运部分仅实现转运功能即可,避免了无效的重复建设;若试用期间损坏工作位支撑框架等,可采用复建坐标系进行重新标定,更加方便。上述转运系统整体架设成本低,采用的机械式定位可以在工作位实现重复高精度定位,实现了多功能暗室内多工位设备的精确重复定位和转运,具有很强实用性,Compared with the prior art, the transfer system provided by the present invention to realize accurate and repeated positioning of multi-station equipment adopts the wheel-rail type track, which has low erection cost and good compatibility, and the positioning device adopts the pin shaft type closely matched Form, with effective high repeatability, high-precision repetitive positioning at the working position is mechanical, without the influence of the control accuracy of the control equipment and the accuracy of the feedback element, and has higher reliability; only high-precision measurement and positioning at the working position The positioning and transfer part can only realize the transfer function, avoiding invalid repeated construction; if the supporting frame of the working position is damaged during the trial period, the reconstruction coordinate system can be used for recalibration, which is more convenient. The overall erection cost of the above-mentioned transfer system is low, and the mechanical positioning adopted can realize repeated high-precision positioning at the working position, and realize the accurate and repeated positioning and transfer of multi-station equipment in a multi-functional darkroom, which has strong practicability.
本发明还提供一种实现多工位设备精确重复定位的标定方法,包括以下步骤:The present invention also provides a calibration method for realizing accurate and repeated positioning of multi-station equipment, which includes the following steps:
步骤S10:在暗室静区前方的测试基础上构建以激光跟踪仪为坐标原点的测试三维坐标系,所述激光跟踪仪的X轴与暗室中心线重合,根据暗室尺寸,在暗室区域X轴的两侧对称设置多个靶球组件,使用所述激光跟踪仪测量每个所述靶球组件的坐标值,根据原始设计参考点坐标值复建暗室原始坐标系;Step S10: On the basis of the test in front of the quiet area of the darkroom, build a test three-dimensional coordinate system with the laser tracker as the coordinate origin. The X-axis of the laser tracker coincides with the centerline of the darkroom. A plurality of target ball assemblies are arranged symmetrically on both sides, and the coordinate value of each target ball assembly is measured by using the laser tracker, and the original coordinate system of the darkroom is reconstructed according to the coordinate values of the original design reference point;
步骤S20:根据测量坐标值和原始设计参考点坐标值在预埋件本体上标记螺栓孔位,将调节螺栓安装在对应螺栓孔位,将固定支撑框架安装在调节螺栓上,在所述固定支撑框架上固定多个靶球组件,对所述固定支撑框架进行调平,完成所有固定支撑框架的安装;Step S20: According to the measured coordinates and the coordinates of the original design reference point, mark the bolt holes on the body of the embedded part, install the adjusting bolts in the corresponding bolt holes, install the fixed support frame on the adjusting bolts, Fixing a plurality of target ball assemblies on the frame, leveling the fixed support frame, and completing the installation of all the fixed support frames;
步骤S30:位于工作位直线轨上的升降轨道车承载刚性托架安装在所述固定支撑框架上,确保所述固定支撑框架上的支撑框架定位销穿过所述刚性托架上活动安装的托架定位销座,将所述刚性托架移动式设计位置,对所述托架定位销座进行紧固,使用所述激光跟踪仪对所述刚性托架进行首次标定,记录首次几何量读数;Step S30: The lifting rail car on the straight rail of the working position is installed on the fixed support frame to ensure that the positioning pins of the support frame on the fixed support frame pass through the brackets movably installed on the rigid bracket. Positioning pin seat of the bracket, fastening the positioning pin seat of the bracket with the mobile design position of the rigid bracket, using the laser tracker to calibrate the rigid bracket for the first time, and recording the geometric quantity reading for the first time;
步骤S40:所述升降轨道车固定位置顶升所述刚性托架与所述固定支撑框架分离,所述升降轨道车泄压使所述刚性托架重新下落在所述固定支撑框架上,使用所述激光跟踪仪对所述刚性托架进行二次标定,记录二次几何量读数,在两次几何量读数差值小于预设值时,由所述能够将轨道车承载所述刚性托架移动至所述存储位直线轨道,完成工位切换。Step S40: The fixed position of the lifting rail car lifts the rigid bracket to separate from the fixed supporting frame, and the lifting rail car releases pressure so that the rigid bracket falls on the fixed supporting frame again, using the The laser tracker performs secondary calibration on the rigid bracket, records the secondary geometric quantity readings, and when the difference between the two geometric quantity readings is less than a preset value, the rigid bracket that can carry the rail car is moved To the linear track of the storage position, the station switching is completed.
与现有技术相比,本发明提供的实现多工位设备精确重复定位的标定方法的有益效果与上述技术方案所述实现多工位设备精确重复定位的转运系统的有益效果相同,此处不做赘述。Compared with the prior art, the beneficial effect of the calibration method for realizing accurate and repeated positioning of multi-station equipment provided by the present invention is the same as that of the transfer system for realizing accurate and repeated positioning of multi-station equipment described in the above technical solution, which is not mentioned here Do repeat.
附图说明Description of drawings
此处所说明的附图用来提供对本发明的进一步理解,构成本发明的一部分,本发明的示意性实施例及其说明用于解释本发明,并不构成对本发明的不当限定。在附图中:The accompanying drawings described here are used to provide a further understanding of the present invention, and constitute a part of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention, and do not constitute improper limitations to the present invention. In the attached picture:
图1为地基示意图;Figure 1 is a schematic diagram of the foundation;
图2为本发明实施例中转运系统组成示意图;2 is a schematic diagram of the composition of the transport system in the embodiment of the present invention;
图3为本发明实施例中转运系统转运状态示意图;3 is a schematic diagram of the transport state of the transport system in the embodiment of the present invention;
图4为本发明实施例中固定支撑框架标定示意图;Fig. 4 is a schematic diagram of the calibration of the fixed support frame in the embodiment of the present invention;
图5为本发明实施例中承载托架升起状态剖面示意图;Fig. 5 is a schematic cross-sectional view of the lifting state of the bearing bracket in the embodiment of the present invention;
图6为本发明实施例中固定支撑框架与刚性托架配合状态示意图;Fig. 6 is a schematic diagram of the cooperation state between the fixed support frame and the rigid bracket in the embodiment of the present invention;
图7为本发明实施例中支撑框架定位销与托架定位销座配合示意图;Fig. 7 is a schematic diagram of cooperation between the positioning pin of the supporting frame and the positioning pin seat of the bracket in the embodiment of the present invention;
图8为本发明实施例中刚性托架落下状态示意图;Fig. 8 is a schematic diagram of the falling state of the rigid bracket in the embodiment of the present invention;
图9为本发明实施例中刚性托架升起状态示意图;Fig. 9 is a schematic diagram of the rising state of the rigid bracket in the embodiment of the present invention;
图10为本发明实施例中转运方法的示意性流程图。Fig. 10 is a schematic flow chart of the transfer method in the embodiment of the present invention.
附图标记:Reference signs:
固定位置支撑框架1、刚性预埋支撑11、预埋件本体111、支撑螺柱112、底加固螺母113、下支撑调节螺母114、上锁紧螺母115、固定支撑框架12、支撑框架定位销14、设备承载托架2、刚性托架21、固定座安装面211、轨道车承载面212、托架定位销座24、定位销座本体241、锁紧螺钉242、托架转运定位销座25、升降轨道车3、轨道车车体31、承载托架32、液压支撑33、轨道车定位销34、工作位直线轨道41、存储位直线轨道42、轨道转台43、转换位直线轨道44、激光跟踪仪51、靶球组件52、参考靶球座53、测试基础6。Fixed
具体实施方式Detailed ways
为了使本发明所要解决的技术问题、技术方案及有益效果更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
需要说明的是,当元件被称为“固定于”或“设置于”另一个元件,它可以直接在另一个元件上或者间接在该另一个元件上。当一个元件被称为是“连接于”另一个元件,它可以是直接连接到另一个元件或间接连接至该另一个元件上。It should be noted that when an element is referred to as being “fixed” or “disposed on” another element, it may be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.
此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。“若干”的含义是一个或一个以上,除非另有明确具体的限定。In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined. "Several" means one or more than one, unless otherwise clearly and specifically defined.
在本发明的描述中,需要理解的是,术语“上”、“下”、“前”、“后”、“左”、“右”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right" etc. are based on those shown in the accompanying drawings. Orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention.
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connection, or integral connection; can be mechanical connection or electrical connection; can be direct connection or indirect connection through an intermediary, and can be the internal communication of two elements or the interaction relationship between two elements. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.
如图1至图9所示,本发明提供的实现多工位设备精确重复定位的转运系统,包括固定位置支撑框架1、设备承载托架2、升降轨道车3、转运轨道、标定设备和测试基础6;固定位置支撑框架1包括多组刚性预埋支撑11和等数量的固定支撑框架12,多组刚性预埋支撑11成对安装在测试基础6上,固定支撑框架12水平安装在对应刚性预埋支撑11上;设备承载托架2包括多个刚性托架21和多个对固定支撑框架12和刚性托架21进行定位的定位装置;转运轨道包括工作位直线轨道41和存储位直线轨道42,升降轨道车3工作在工作位直线轨道41上,先后两次将刚性托架21的两侧放置在对应固定支撑框架12上,标定设备先后对刚性托架21和固定支撑框架12进行两次标定,定位装置在标定设备完成首次标定后锁定,标定设备先后两次标定读数小于预设值时,升降轨道车3承托刚性托架21运动至存储位直线轨道42。As shown in Figures 1 to 9, the transfer system provided by the present invention to realize accurate and repeated positioning of multi-station equipment includes a fixed-
具体实施时:When implementing it:
该系统主要包括固定位置支撑框架1、设备承载托架2、升降轨道车3、转运轨道、标定设备、测试基础6。The system mainly includes fixed
固定位置支撑框架1包括刚性预埋支撑11、固定支撑框架12和支撑框架定位销14;固定支撑框架12可以根据设备的数量进行扩展,可扩展第一固定支撑框架12、第二固定支撑框架12、第三固定支撑框架12等,其中的支撑框架定位销14属于定位装置的组成部分;Fixed
刚性预埋支撑11采用厚钢板、锚钩焊接成型,成对安装,在地基混凝土凝固前埋入设计位置,安装精度达到10mm量级即可;The rigid
刚性预埋支撑11在地基混凝土凝固后进行标定,主要标定安装调节螺栓的螺纹孔的位置,在确定基孔(螺纹孔)位置后,在各个基孔上拧入调节螺栓,确定同组内两个固定支撑框架12在XOY平面的安装位置;Rigid
同组内的固定支撑框架12安装在刚性预埋支撑11上的调节螺栓上,不同位置高度可调;The fixed
其余组内的固定支撑框架12按照相同方法安装固定。固定支撑框架12根据设备1、设备2的技术特性进行设计,具有足够的刚性;一般采用钢板焊接后采用整体精密加工成型,上表面为安装配合面,具有较高的平面度,预留定位销安装孔;每个固定支撑框架12预留一个定位销安装位;The fixed support frames 12 in the remaining groups are installed and fixed in the same way. The fixed
支撑框架定位销14上部为锥形轴结构,与销孔配合;底部为圆止口,用于定位并增加安装刚性,采用轴孔精密配合的方式安装在同组内固定支撑框架12预先加工的安装孔位置上;The upper part of the support
设备承载托架2包括刚性托架21、托架定位销座24、托架转运定位销座25;刚性托架21的数量根据功能设备的数量确定。The
刚性托架21宽度与两个固定支撑框架12安装在地基上的总宽度基本持平,确保其底部安装面可跨越并安装在2个固定支撑框架12的两个上安装面上;刚性托架21顶部预留安装孔位,用于设备的固定和调整;The width of the
刚性托架21长度与固定支撑框架12的长度基本持平,侧边底部设置安装螺钉孔位;其余的刚性托架21和固定支撑框架12采用相同的规格。The length of the
刚性托架21包括固定座安装面211及轨道车承载面212两个底面,其中固定座安装面211位于底部两侧,为精密加工面;轨道车承载面212位于托架中部,在高度向低于固定座安装面211,可无需精密加工;该方式减少了精加工面积,便于保证两侧固定座安装面211的平面度,而中部的轨道车承载面212无需精加工也降低了成本;The
固定座安装面211预留2个托架定位销座24安装孔,该安装孔具有一定余量,可调整安装位置,与支撑框架定位销14配合使用;Two bracket positioning pin seats 24 mounting holes are reserved on the mounting
托架转运定位销座25预置在升降轨道车3承载面212上,与设置在升降轨道车3上的轨道车定位销34为低精度间隙配合,主要用于转运中的防倾覆;The bracket transfer
升降轨道车3包括轨道车车体21、承载托架32、液压支撑33、轨道车定位销34和轨道车控制器;The lifting rail car 3 includes a
转运轨道组包括工作位直线轨道41、存储位直线轨道42、轨道转台43、转换位直线轨道44;The transfer track group includes a working position
标定设备组包括激光跟踪仪51、靶球组件52、参考靶球座53,测试基础6设施主要为与上述分系统协调建设的测试环境基础;参考靶球座53为靶球组件52提供支撑,也可以直接选用靶球组件52。The calibration equipment group includes a
轨道车车体21为轮式驱动形式的轨道车;轨道车承载托架32安装于轨道车车体21顶部,可通过轨道车液压支撑33进行升降;The
轨道车液压支撑33的升降行程大于支撑架定位销的轴向净高度及轨道车定位销34的轴向净高度;The lifting stroke of the rail car
轨道车定位销34安装在轨道车承载托架32的四个角上;The rail
轨道车控制器(图中未标出)用于控制轨道车运动,如可优选采用无线控制的手持式控制设备;The rail car controller (not shown in the figure) is used to control the motion of the rail car, such as a hand-held control device with wireless control that can be preferably used;
工作位直线轨道41为两组相互平行的与测试坐标系X轴同向的轮轨,固定在地基上,固定前需进行具有一定几何精度的标定(一般不超过10mm)The working position
存储位直线轨道42一般与工作位直线轨道41相互垂直,分为两段跨过轨道转台43,在平行度及平面度进行一定几何精度的标定后固定在地基上;The
轨道转台43位于工作位直线轨道41及存储位直线轨道42交叉位置,在地基上预留安装下沉空间;The
转换位直线轨道44安装在轨道转台43上表面,在回转中可与分别与工作位直线轨道41及存储位直线轨道42实现拼接;The conversion position
拼接为圆弧形切线拼接,在轨道车驱动轮跨越不同轨道时可使得轮轨可保持连续的线面接触;The splicing is arc-shaped tangent splicing, which can make the wheel and rail maintain continuous line-surface contact when the driving wheel of the rail car crosses different tracks;
参考靶球座53预留在测试基础6设施的不同高程、不同截面的多个位置,一般不少于6个,用于测试系统坐标系的重建的基准;预留位由系统标定时确定XYZ三个坐标值,并记录在案;The reference
靶球组件52与参考靶球座53机械接触位置唯一,确保靶球测量坐标值唯一;The mechanical contact position between the
参考靶球座53需完全固定在测试基础6设施上,确保位置稳固、唯一。The reference
激光跟踪仪51、靶球组件52及参考靶球座53首先用于测试系统坐标系的重建;The
系统坐标系重建时采用激光跟踪仪51依次测量预留的靶球组件52的现有坐标值,并采集足够数量的靶球组件52的坐标值,预留的靶球组件52在原坐标系中记录有原坐标值及靶球组件52的序号,在重建中,根据采集到的靶球组件52现坐标值建立新的坐标系,将原纪录在案的坐标值和靶球组件的序号依次填入测量软件中,覆盖新测量的坐标值,此时测量软件可以生成一个新的坐标系,该坐标系为原有坐标系,使用软件中的转换功能,可实现原有坐标系的重建。When the system coordinate system is rebuilt, the
或者说,原有坐标系在建立中和重新标定时因激光跟踪仪51的假设位置不可能完全一致(即原点不同),因此需要采用靶球组件52作为坐标转换时的基准参考。在复建坐标系时,新架设的激光跟踪仪51依次测量原有靶球组件52的坐标值,并建立新的坐标系;在两侧软件中选择坐标系转换,将原有记录在案的靶球组件52的坐标值依次录入,即可生成暗室初始坐标系,便于系统检测的标定。In other words, the original coordinate system cannot be completely consistent (ie, the origin is different) because the assumed position of the
注:使用激光跟踪仪建立坐标系及复建为行业已有技术,测量软件SA可直接操作。Note: It is an existing technology in the industry to use a laser tracker to establish a coordinate system and reconstruct it, and the measurement software SA can be directly operated.
如前,因液压支撑33的有效支撑高度与托架倾角会影响到转运的安全;其中液压支撑33高度低于设定的极限值会造成轨道车运行过程中定位销与托架的干涉,倾角会造成上部承载的设备可能在轨道车急停状态下发生倾覆;因此,安全传感器(图中未标出)用于上述两个涉及安全的参数测量,实时监测,并在异常值出现时终止操作。As before, because the effective support height of the
与现有技术相比,本发明提供的实现多工位设备精确重复定位的转运系统中选用的是轮轨式轨道,架设成本低,兼容性好,定位装置选用的是销轴式紧密配合的形式,具有有效的高重复精度,在工作位的高精度重复定位为机械式,无控制设备控制精度及反馈元件的精度影响,且可靠性更高;仅在工作位处进行高精度的测量和定位,转运部分仅实现转运功能即可,避免了无效的重复建设;若试用期间损坏工作位支撑框架等,可采用复建坐标系进行重新标定,更加方便。上述转运系统整体架设成本低,采用的机械式定位可以在工作位实现重复高精度定位,实现了多功能暗室内多工位设备的精确重复定位和转运,具有很强实用性。Compared with the prior art, the transfer system provided by the present invention to realize accurate and repeated positioning of multi-station equipment adopts the wheel-rail type track, which has low erection cost and good compatibility, and the positioning device adopts the pin shaft type closely matched Form, with effective high repeatability, high-precision repetitive positioning at the working position is mechanical, without the influence of the control accuracy of the control equipment and the accuracy of the feedback element, and has higher reliability; only high-precision measurement and positioning at the working position The positioning and transfer part can only realize the transfer function, avoiding invalid repeated construction; if the supporting frame of the working position is damaged during the trial period, the reconstruction coordinate system can be used for recalibration, which is more convenient. The overall erection cost of the above-mentioned transfer system is low, and the mechanical positioning adopted can realize repeated high-precision positioning at the working position, and realize the accurate and repeated positioning and transfer of multi-station equipment in a multi-functional darkroom, which has strong practicability.
作为一种可实施方式,刚性预埋支撑11包括预埋件本体111和调节螺栓,预埋件本体111由钢板和锚钩焊接成型,预埋件本体111在测试基础6的混凝土凝固前埋入设计位置,预埋件本体111上设置有标定的螺纹孔,调节螺栓安装在对应螺纹孔内。As a possible implementation, the rigid embedded
由钢板和锚钩焊接成型的预埋件本体111,保证了整体的结构强度,预埋件本体111在测试基础6的混凝土凝固前买入设计位置,保证了安装后预埋件本体111在测试基础6上的稳定性,标定的螺纹孔,保证了安装位置的准确性。The embedded
作为一种可实施方式,调节螺栓包括支撑螺柱112、底加固螺母113、下支撑调节螺母114和上锁紧螺母115;支撑螺柱112向上穿出预埋件本体111,底加固螺母113将支撑螺柱112紧固在预埋件本体111上,下支撑调节螺母114安装在支撑螺杆中部,所有下支撑调节螺母114由标定设备标定水平,上锁紧螺母115在固定支撑框架12安装在预埋件本体111后,对固定支撑框架12进行紧固。As a possible implementation, the adjusting bolt includes a supporting
支撑螺柱112安装在标定的螺纹孔内,保证了对固定支撑框架12的安装效果,底加固螺母113的安装,实现对支撑螺柱112和预埋件本体111紧固,下支撑调节螺母114安装在支撑螺杆中部,可以根据标定的水平,进行高度的调节,上锁紧螺母115将固定支撑框架12紧固在支撑螺柱112上,通过对下支撑调节螺母114的水平标定,保证了固定支撑框架12的安装效果。The
作为一种可实施方式,升降轨道车3包括轨道车车体21、承载托架32、液压支撑33和用于对刚性托架21进行定位的轨道车定位销34;轨道车车体21走行在转运轨道上,承载托架32通过液压支撑33安装在轨道车车体21上,轨道车定位销34安装在承载托架32的四角位置,刚性托架21上对应的位置设置有托架转运定位销座25,托架转运定位销座25与轨道车定位销34轴孔配合。As a possible embodiment, the lifting rail car 3 includes a
轨道车车体21为轮式驱动形式的轨道车,走行在工作位直线轨道41和存储位直线轨道42上,承载托架32通过液压支撑33安装于轨道车车体21顶部,可以在液压支撑33的带动下实现升降,轨道车定位销34轴与托架转运定位销座25进行轴孔配合,实现了承载托架32对刚性托架21的精准定位和支撑。进一步的,轨道车定位销34安装在承载托架32的四角位置,为刚性托架21提供全方位的支撑,托架转运定位销座25与设置在升降轨道车3上的轨道车定位销34为低精度间隙配合,主要用于转运中的防倾覆;The
作为一种可实施方式,升降轨道车3还包括用于控制升降轨道车3运动的轨道车控制器;轨道车控制器为无线手持控制装置。As a possible implementation, the lifting rail car 3 also includes a rail car controller for controlling the movement of the lifting rail car 3; the rail car controller is a wireless handheld control device.
轨道控制器以无线手持的控制形式,对升降轨道车3的控制更加的方便。The track controller is in the form of wireless handheld control, which is more convenient for the control of the lifting track car 3 .
作为一种可实施方式,定位装置包括托架定位销座24和支撑框架定位销14;支撑框架定位销14安装在固定支撑框架12上,托架定位销座24安装在刚性托架21的对应位置,托架定位销座24与支撑框架定位销14轴孔配合。进一步的,托架定位销座24包括定位销座本体241、锁紧螺钉242和定位圆锥销(图中未标出)。定位销座本体241预先安装在刚性托架21预留的位置上,使用锁紧螺钉242将定位销座本体241以松固定的方式安置(定位销座本体241预留为大间隙孔),确定定位销座本体241可在X、Y两个方向小范围移动,在刚性托架21放置在固定支撑框架12上,且支撑框架定位销14滑入定位销座本体241内后,通过锁紧螺钉242对定位销座本体241进行紧固,在定位销座本体241预留的圆锥销孔上打入定位圆锥销,实现定位锁定。As a possible embodiment, the positioning device includes a bracket
刚性托架21上的托架定位销座24和固定支撑框架12上支撑框架定位销14相配合,实现了对刚性托架21与固定支撑框架12的精准定位。进一步的,通过对托架定位销座24的紧固和锁定,保证了支撑框架定位销14和托架定位销座24两者间的定位效果。The bracket
作为一种可实施方式,标定设备包括激光跟踪仪51和多个靶球组件52;激光跟踪仪51位于测试基础6长度方向上的中心线上,多个靶球组件52在暗室区域沿测试基础6的中心线对称分布。As a possible implementation mode, the calibration equipment includes a
激光跟踪仪51位于测试基础6长度方向的中心线上,也可以是位于工作位直线轨道41的中线上,配合在中心线两侧对称分布的多个靶球组件52,能够对静室范围内的装置进行准确定位,并构建三维空间坐标,实现对多个不同装置或部件的精准定位和检测。进一步的,靶球组件52还可以配合参考靶球座53使用,靶球组件52与参考靶球座53机械接触位置唯一,确保靶球测量坐标值唯一;参考靶球座53需完全固定在测试基础6设施上,确保位置稳固、唯一。The
作为一种可实施方式,转运轨道还包括轨道转台43和转换位直线轨道44;工作位直线轨道41和存储位直线轨道42垂直设置,轨道转台43设置在工作位直线轨道41和存储位直线轨道42相交的区域,转换为直线轨道设置在轨道转台43上,轨道转台43转动使转换为直线轨道选择连通工作位直线轨道41或存储位直线轨道42。As a possible embodiment, the transfer track also includes a
轨道转台43位于工作位直线轨道41及存储位直线轨道42交叉位置,在地基上预留安装下沉空间;转换位直线轨道44安装在轨道转台43上表面,在回转中可与分别与工作位直线轨道41及存储位直线轨道42实现拼接;拼接为圆弧形切线拼接,在轨道车驱动轮跨越不同轨道时可使得轮轨可保持连续的线面接触;实现升降轨道车3在工作位直线轨道41和存储位直线轨道42的切换。The
本发明还提供了一种实现多工位设备精确重复定位的标定方法,包括以下步骤:The present invention also provides a calibration method for realizing precise and repeated positioning of multi-station equipment, which includes the following steps:
步骤S10:在暗室静区前方的测试基础上构建以激光跟踪仪为坐标原点的测试三维坐标系,激光跟踪仪的X轴与暗室中心线重合,根据暗室尺寸,在暗室区域X轴的两侧对称设置多个靶球组件,使用激光跟踪仪测量每个靶球组件的坐标值,根据原始设计参考点坐标值复建暗室原始坐标系;Step S10: On the basis of the test in front of the quiet area of the darkroom, build a test three-dimensional coordinate system with the laser tracker as the coordinate origin. The X-axis of the laser tracker coincides with the centerline of the darkroom. According to the size of the darkroom, on both sides of the X-axis of the darkroom area Set up multiple target ball components symmetrically, use the laser tracker to measure the coordinate value of each target ball component, and rebuild the original coordinate system of the darkroom according to the coordinate values of the original design reference point;
步骤S20:根据测量坐标值和原始设计参考点坐标值在预埋件本体上标记螺栓孔位,将调节螺栓安装在对应螺栓孔位,将固定支撑框架安装在调节螺栓上,在固定支撑框架上固定多个靶球组件,对固定支撑框架进行调平,完成所有固定支撑框架的安装固定;Step S20: Mark the bolt holes on the body of the embedded part according to the measured coordinates and the coordinates of the original design reference point, install the adjusting bolts in the corresponding bolt holes, install the fixed support frame on the adjustment bolts, and install the fixed support frame on the fixed support frame. Fix multiple target ball components, level the fixed support frame, and complete the installation and fixation of all fixed support frames;
步骤S30:位于工作位直线轨上的升降轨道车承载刚性托架安装在固定支撑框架上,确保固定支撑框架上的支撑框架定位销穿过刚性托架上活动安装的托架定位销座,将刚性托架移动式设计位置,对托架定位销座进行紧固,使用激光跟踪仪对刚性托架进行首次标定,记录首次几何量读数;Step S30: The lifting rail car on the straight rail of the working position is installed on the fixed support frame to ensure that the support frame positioning pin on the fixed support frame passes through the bracket positioning pin seat movably installed on the rigid bracket. Rigid bracket mobile design position, fasten the positioning pin seat of the bracket, use the laser tracker to calibrate the rigid bracket for the first time, and record the first geometric reading;
步骤S40:升降轨道车固定位置顶升刚性托架与固定支撑框架分离,升降轨道车泄压使刚性托架重新下落在固定支撑框架上,使用激光跟踪仪对刚性托架进行二次标定,记录二次几何量读数,在两次几何量读数差值小于预设值时,由能够将轨道车承载刚性托架移动至存储位直线轨道42,完成工位切换。Step S40: Lift the rigid bracket at the fixed position of the lifting rail car and separate it from the fixed support frame, release the pressure of the lifting rail car so that the rigid bracket falls on the fixed support frame again, use the laser tracker to perform secondary calibration on the rigid bracket, and record For the secondary geometric quantity reading, when the difference between the two geometric quantity readings is less than the preset value, the rigid bracket carrying the rail car can be moved to the storage position
具体实施时:When implementing it:
为表述方便,以O为系统坐标系原点;X向为微波传递方向(即原点向静区中心向);Y向垂直于X向;OXY为水平面;Z向为高度方向;For the convenience of expression, take O as the origin of the system coordinate system; X direction is the microwave transmission direction (that is, the origin is toward the center of the quiet zone); Y direction is perpendicular to X direction; OXY is the horizontal plane; Z direction is the height direction;
1、在暗室建设中,以反射面等关键设备为基准建立测试系统总坐标系,该步骤为必要环节,一般由系统承制方承建;1. In the construction of the darkroom, the overall coordinate system of the test system is established based on the key equipment such as the reflective surface. This step is a necessary link and is generally undertaken by the system manufacturer;
2、在上述坐标系建立过程中,在暗室的静区附近,不同高程(即XYZ坐标存在一定跨度,该跨度视暗室尺寸确定,一般XY向大于2000mm,Z向大于200mm)的位置预留参考靶球座53,数量以12~20个为宜(因施工过程会有损坏且部分参考靶球座53在后续坐标系复建时可能处于新架设的激光跟踪仪51盲区);2. During the establishment of the above-mentioned coordinate system, near the quiet zone of the darkroom, there is a certain span of different elevations (that is, the XYZ coordinates have a certain span, and the span is determined by the size of the darkroom. Generally, the XY direction is greater than 2000mm, and the Z direction is greater than 200mm).
3、在暗室静区(即设备工作区空间包络范围)前的硬质地面架设激光跟踪仪51,在Y向尽可能靠近暗室中线;3. Set up a
4、将靶球组件52依次固定在参考靶球座53上(此步骤可只使用靶球,视参考靶球座53结构确定即可),使用激光跟踪仪51依次测量各个位置的坐标值,根据原纪录的各个参考点坐标值复建暗室原始坐标系;4. Fix the
5、将靶球组件52置于刚性预埋支撑11上表面预留标定位上,根据坐标值及设计理论值标记安装螺柱孔位,此步骤精度量级需求为±3mm;5. Place the
6、按照上述步骤在刚性预埋支撑11上打孔攻丝,安装支撑螺柱112,在每个支撑螺柱112上拧入底部加固螺母及安装下层螺母;6. According to the above steps, drill holes and tap on the rigid embedded
7、将固定支撑框架12按照安装孔位吊装至支撑螺柱112上,将靶球组件52置于固定支撑框架12顶部至少4个位置处,调整安装下层螺母,使得各个位置的Z值一致,然后拧入固定上层螺母,即完成调平,此步骤水平度可优于±0.02mm;7. Hoist the fixed
8、重复上述5~7步骤依次完成两侧的固定支撑框架12,以及其余设备用的固定支撑框架12的定位和固定;8. Repeat steps 5 to 7 above to complete the positioning and fixing of the fixed support frames 12 on both sides and the fixed support frames 12 for other equipment in sequence;
9、将设备承载托架2置于升降轨道车3上,确保轨道车定位销34位于托架转运定位销座25内,升起液压支撑33,使升降轨道车3位于高位状态;9. Put the
10、将托架定位销座24中的定位销座本体241预先安装在托架预留的位置上,使用锁紧螺钉242将定位销座本体241以松固定的方式安置(定位销座本体241预留为大间隙孔),确定定位销座本体241可在X、Y两个方向小范围移动;10. Install the positioning
11、使用轨道车控制器控制升降轨道车3运行至固定支撑框架12位置,此时承载托架32可完全跨过固定支撑框架12,控制液压支撑33降低高度直至完全泄压,将承载托架32落入固定支撑框架12上表面;11. Use the rail car controller to control the lifting rail car 3 to move to the position of the fixed
12、此时,托架定位销座24将沿支撑框架定位销14锥度导向落入,完成支撑框架定位销14与定位销座本体241的紧密配合;12. At this time, the bracket
13、将靶球组件52置于设备或设备刚性托架21上的参考零位上,使用激光跟踪仪51(51)测量当前OXY位置,控制升降轨道车3移动或人工调整将刚性托架21移动到设计所需位置;(该位置在OXY坐标系上绝对位置精度可达±3mm;该位置以满足测试需求为准,为该位置确定后的重复定位)13. Place the
14、检查两个托架定位销座24状态,确定完成步骤12的配合,锁紧各自的锁紧螺钉242,在定位销座本体241预留的圆锥销孔上打入定位圆锥销;14. Check the state of the positioning pin seats 24 of the two brackets, confirm that the cooperation in
15、使用轨道车控制器将液压支撑33举升至最大高度,实现托架定位销座24和支撑框架定位销14的脱离,并再次降下液压支撑33至泄压,检查激光跟踪仪51的几何量读数。此时读数变化一般在±0.02mm左右;15. Use the rail car controller to lift the
16、至此,刚性托架21与固定支撑框架12实现高精度的可重复机械配合;16. So far, the
17、记录液压支撑33高度值,并设定高度监测传感器范围;17. Record the height value of the
18、对其余固定支撑框架12重复步骤11~17完成其余固定支撑框架12及刚性托架21之间的高精度可重复机械配合;18. Repeat steps 11 to 17 for the remaining fixed support frames 12 to complete the high-precision repeatable mechanical cooperation between the remaining fixed support frames 12 and the
19、上述步骤完成后可设置倾角传感器的报警范围;19. After the above steps are completed, the alarm range of the inclination sensor can be set;
20、控制升降轨道车3向轨道车转台移动,待轨道车完全位于转台部分轨道上时控制转台旋转,在转动至贮存位轨道拼接位时(有限位机构)20. Control the lifting rail car 3 to move to the rail car turntable, and control the turntable to rotate when the rail car is completely on the part of the track of the turntable.
21、控制升降轨道车3(含承载设备)运行至存储位,即完成设备的工位切换;21. Control the lifting rail car 3 (including the carrying equipment) to run to the storage position, that is, complete the station switching of the equipment;
22、步骤20~21过程中,液压支撑33始终保持高位状态,在存储位就位后可降至低位状态;22. During the process of steps 20-21, the
23、在安全传感器报警情况下需检查液压支撑33,报警解除后方可运行。23. When the safety sensor alarms, the
与现有技术相比,本发明提供的实现多工位设备精确重复定位的标定方法中选用的是轮轨式轨道,架设成本低,兼容性好,定位装置选用的是销轴式紧密配合的形式,具有有效的高重复精度,在工作位的高精度重复定位为机械式,无控制设备控制精度及反馈元件的精度影响,且可靠性更高;仅在工作位处进行高精度的测量和定位,转运部分仅实现转运功能即可,避免了无效的重复建设;若试用期间损坏工作位支撑框架等,可采用复建坐标系进行重新标定,更加方便。上述转运系统整体架设成本低,采用的机械式定位可以在工作位实现重复高精度定位,实现了多功能暗室内多工位设备的精确重复定位和转运,具有很强实用性。Compared with the prior art, the calibration method for accurate and repeated positioning of multi-station equipment provided by the present invention uses a wheel-rail type track, which has low erection cost and good compatibility, and the positioning device uses a pin-type close fit Form, with effective high repeatability, high-precision repetitive positioning at the working position is mechanical, without the influence of the control accuracy of the control equipment and the accuracy of the feedback element, and has higher reliability; only high-precision measurement and positioning at the working position The positioning and transfer part can only realize the transfer function, avoiding invalid repeated construction; if the supporting frame of the working position is damaged during the trial period, the reconstruction coordinate system can be used for recalibration, which is more convenient. The overall erection cost of the above-mentioned transfer system is low, and the mechanical positioning adopted can realize repeated high-precision positioning at the working position, and realize the accurate and repeated positioning and transfer of multi-station equipment in a multi-functional darkroom, which has strong practicability.
作为一种可实施方式,预设值为±0.02mm。As an implementable manner, the preset value is ±0.02mm.
在上述实施方式的描述中,具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in an appropriate manner.
以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应以所述权利要求的保护范围为准。The above is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Anyone skilled in the art can easily think of changes or substitutions within the technical scope disclosed in the present invention. Should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be determined by the protection scope of the claims.
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