CN115305358A - A low-oxygen ultra-high-purity arsenic rod forming device - Google Patents

Abstract

The invention relates to a low-oxygen ultrahigh-purity arsenic rod forming device, which comprises a bracket and an arsenic rod forming furnace pipe arranged on the bracket; the arsenic rod forming furnace pipe comprises a furnace body, wherein a furnace chamber is formed inside the furnace body; a forming die fixing seat is arranged in the furnace cavity, and an installation groove is formed in the forming die fixing seat and used for installing an arsenic rod forming die; the outer side of the furnace body is also provided with a gas pipeline assembly which is communicated with the furnace chamber and used for controlling the gas in the furnace chamber; the bracket is also provided with a horizontal rotation mechanism which is connected with the arsenic rod forming furnace pipe and is used for driving the arsenic rod forming furnace pipe to rotate horizontally; the support is also provided with a heating mechanism which is matched with the arsenic rod forming furnace pipe and used for heating the arsenic rod forming furnace pipe. The low-oxygen ultrahigh-purity arsenic rod forming device can effectively assist in reducing the oxygen content of a formed arsenic rod, effectively assist in improving the density of the formed arsenic rod and enable the surface of the arsenic rod to be smooth and flat; meets the requirements of corresponding industries on the ultra-high purity arsenic rod.

Description

A low-oxygen ultra-high-purity arsenic rod forming device

technical field

The invention relates to the field of arsenic rod forming, in particular to a low-oxygen ultra-high-purity arsenic rod forming device.

Background technique

Ultra-high-purity arsenic refers to metallic arsenic with a total impurity of less than 1ppm. It is a non-metallic element widely distributed in nature, and the surface in contact with air gradually oxidizes and turns black. High-purity arsenic can be used to prepare GaAs, InA and other III-V compound semiconductor materials and silicon and germanium single crystal dopants, and can also be used to prepare As ₂ Se ₃ (infrared transmission glass, laser printers, etc.), As ₂ S ₃ (infrared transparent glass), etc. Its main function is to synthesize gallium arsenide, and the demand for high-purity arsenic is basically determined by the market for gallium arsenide. Gallium arsenide is now widely used to make diodes, infrared emitting tubes, lasers, and solar cells, and it is also playing an increasingly important role in cutting-edge technology fields such as microelectronics, optoelectronics, military industry, aerospace industry, and computers.

At present, ultra-high-purity arsenic is mainly used in compound semiconductors. The shape of ultra-high-purity arsenic used is irregular and fragmented. It is inevitable that other impurities or high oxygen content will be introduced during processing. However, with the development of semiconductor material technology Rapid development needs, especially the development of molecular beam epitaxy technology, downstream industries have higher requirements for the shape and oxygen content of ultra-high-purity arsenic.

Conventional arsenic rod molding methods generally adopt direct casting or machining. However, the nature of arsenic is special. Its melting point is 814°C, but when heated to 615°C, it begins to sublime into gaseous arsenic. The liquefaction becomes a high-purity liquid, which cannot be achieved by direct casting due to the special properties of arsenic. At the same time, high-purity arsenic is brittle, and it is difficult to process it into the desired shape by machining. Moreover, high-purity arsenic will come into contact with other metals or substances during processing, which will easily cause pollution to high-purity arsenic.

Therefore, it is necessary to study the forming device of ultra-high-purity arsenic rods to meet the needs of the development of the semiconductor material industry. However, there is no relevant equipment for forming low-oxygen dense ultra-high-purity arsenic rods in the currently available information. Therefore, the development of the high-purity arsenic rod forming equipment can meet the requirements of the development of molecular beam epitaxy technology in the semiconductor industry.

Contents of the invention

In order to solve the above technical problems, the present invention provides a low-oxygen ultra-high-purity arsenic rod forming device, which can effectively assist in reducing the oxygen content of the formed arsenic rod, and can also effectively assist in increasing the density of the formed arsenic rod and make the The surface of the arsenic rod is smooth and flat; it meets the requirements of the corresponding industry for ultra-high purity arsenic rods.

The technical solution adopted by the present invention to solve the technical problem is: a low-oxygen ultra-high-purity arsenic rod forming device, including a bracket, and an arsenic rod forming furnace installed on the bracket; the arsenic rod forming furnace includes a furnace body, A furnace cavity is formed inside the furnace body; a forming mold fixing seat is installed in the furnace cavity, and a mounting groove is arranged on the forming mold fixing seat for installing the arsenic rod forming mold; a gas pipeline is also arranged on the outside of the furnace body Assemblies, the gas pipeline assembly communicates with the furnace cavity, and is used to control the gas in the furnace cavity; the support is also equipped with a translation mechanism, which is connected with the arsenic rod forming furnace, and is used to drive the arsenic rod forming furnace The gallbladder rotates horizontally; the support is also equipped with a heating mechanism, which cooperates with the arsenic rod forming furnace to heat the arsenic rod forming furnace.

Further, the gas pipeline assembly includes a gas pipeline bus connected to the furnace chamber; the gas pipeline bus is connected with a vacuum pipeline, an inert gas pressurization pipeline, and an exhaust gas discharge pipeline; A vacuum control valve is provided, and a pressurization control valve is provided on the inert gas pressurization pipeline; a discharge valve is provided on the tail gas discharge pipeline.

Further, the molding device also includes a control module; the vacuum control valve, pressurization control valve, and discharge valve are valves that can be switched on and off in response to the control commands of the control module; The pressure sensor of the cavity pressure; the control module is configured to: respond to the vacuum pumping command, control the vacuum control valve to open; respond to the translation command, control the translation mechanism to start; respond to the pressurization command, control the vacuum control valve to close, And control the pressurization control valve to open, receive the furnace chamber pressure data monitored by the pressure sensor, and control the pressurization control valve to close when the pressure value reaches the first set value; in response to the furnace discharge instruction, control the discharge valve to open.

Further, the gas pipeline assembly also includes a safety protection pipeline, and a safety valve is arranged on the safety protection pipeline; the safety valve is a valve that can be switched on and off in response to the control command of the control module; the control The module is also configured to: receive furnace chamber pressure data monitored by the pressure sensor, and control the safety valve to open when the pressure value reaches the second set value.

Further, the top of the furnace body is open, and a furnace cover is installed at the opening; the furnace cover and the furnace body are connected through connecting pieces; a sealing member is also arranged between the furnace cover and the furnace body; the side wall of the furnace body is A cooling mechanism is also provided near the top opening.

Further, the heating mechanism includes a heating part, and a heating channel with upper and lower openings is formed in the heating part; the heating channel cooperates with the arsenic rod forming furnace for heating the arsenic rod forming furnace.

Further, the heating mechanism also includes a temperature sensor installed on the heating part, the working end of the temperature sensor is close to the heating channel; the control module is also configured to: receive the temperature data monitored by the temperature sensor, and control the temperature according to the set temperature parameters The heating part is heated.

Further, the molding device also includes a lifting mechanism installed on the bracket; the heating mechanism is fixed to the lifting and moving end of the lifting mechanism.

Further, the lifting mechanism includes a screw assembly installed on the bracket, a lifting drive element for driving the screw, and a mounting frame fixed to the screw nut, and the mounting frame is fixed to the heating mechanism as the lifting moving end of the lifting mechanism.

Further, the forming mold fixing base includes a fixing base body; a plurality of holes are opened on the top side of the fixing base body, and the holes are used as installation grooves for placing the arsenic rod forming mold.

Advantages of the present invention: a low-oxygen ultra-high-purity arsenic rod forming device of the present invention can improve the deoxidation effect of arsenic through horizontal rotation when the gas pipeline assembly controls the gas in the furnace chamber, and effectively reduces the formed ultra-high-purity arsenic rod. The oxygen content of the arsenic rod can be reduced, and the air bubbles inside the material liquid can be removed by horizontal rotation, the density of the formed ultra-high-purity arsenic rod can be improved, and the surface of the ultra-high-purity arsenic rod can be smooth and flat; to meet the requirements of the corresponding industry for ultra-high-purity arsenic Great request.

Description of drawings

Fig. 1 is a schematic diagram of a low-oxygen ultra-high-purity arsenic rod forming device of the present embodiment;

2 is a schematic diagram of the arsenic rod forming furnace of a low-oxygen ultra-high-purity arsenic rod forming device of the present embodiment;

Fig. 3 is a schematic diagram of a forming mold holder of a low-oxygen ultra-high-purity arsenic rod forming device of the present embodiment;

Fig. 4 is a schematic diagram of the top surface of the molding die holder of a low-oxygen ultra-high-purity arsenic rod molding device of the present embodiment;

Among them, 1-support, 2-heating mechanism, 3-arsenic rod forming furnace, 4-horizontal mechanism, 5-lifting mechanism, 11-support stand, 12-support base, 13-support top frame, 21-heating Department, 22-heating channel, 23-temperature sensor, 31-furnace body, 32-furnace cover, 33-furnace cavity, 34-cooling mechanism, 35-gas pipeline assembly, 36-molding mold fixing seat, 37-connector , 351-Gas pipeline bus, 352-Evacuation pipeline, 353-Inert gas pressurization pipeline, 354-Tail gas discharge pipeline, 355-Safety protection pipeline, 356-Vacuum control valve, 357-Pressure control valve , 358-discharge valve, 359-safety valve, 361-fixed seat body, 362-hole, 51-screw assembly, 52-lifting drive element, 53-installation frame.

Detailed ways

In order to deepen the understanding of the present invention, the present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments, which are only used to explain the present invention and do not limit the protection scope of the present invention.

Example

Please refer to Figures 1 to 4, this embodiment provides a low-oxygen ultra-high-purity arsenic rod forming device, including a bracket 1, an arsenic rod forming furnace 3 installed on the bracket 1; the arsenic rod forming furnace The liner 3 includes a furnace body 31, and the inside of the furnace body 31 forms a furnace cavity 33; a forming mold holder 36 is installed in the furnace cavity 33, and a mounting groove is arranged on the forming mold holder 36 for installing an arsenic rod forming mold; The outer side of the furnace body 31 is also provided with a gas pipeline assembly 35, the gas pipeline assembly 35 communicates with the furnace cavity, and is used to control the gas in the furnace cavity 33; the support 1 is also equipped with a translation mechanism 4, The horizontal rotation mechanism 4 is connected with the arsenic rod forming furnace 3, and is used to drive the arsenic rod forming furnace 3 to rotate horizontally; the support 1 is also equipped with a heating mechanism 2, and the heating mechanism 2 cooperates with the arsenic rod forming furnace 3 for The arsenic rod forming furnace 3 is heated. Among them, the gas control methods of the gas pipeline assembly 35 include but are not limited to: vacuuming, filling inert gas, exhaust, etc.; When controlling the gas in the furnace chamber, the deoxidation effect on arsenic can be improved through the horizontal rotation, which can effectively reduce the oxygen content of the formed ultra-high-purity arsenic rod, and the bubbles inside the material liquid can also be removed through the horizontal rotation to improve the formed ultra-high-purity arsenic rod. The density of the arsenic rod is improved, and the surface of the ultra-high-purity arsenic rod is smooth and flat.

Referring again to shown in Figure 1, described support 1 comprises support stand 11, is positioned at the support base 12 of support stand 11 bottom sides, is positioned at the support top frame 13 of support stand 11 top sides; Described support top frame 13 is used for Installation 3; the top side of the support stand 11 is also equipped with the translation mechanism 4, and the output end of the translation mechanism 4 is connected to the arsenic rod forming furnace 3 of the arsenic rod forming furnace.

Referring again to Figure 2, the gas pipeline assembly 35 includes a gas pipeline busbar 351 communicated with the furnace chamber 33; Discharge pipeline 354; vacuum control valve 356 is provided on the vacuuming pipeline 352, and pressurization control valve 357 is provided on the inert gas pressurization pipeline 353; discharge valve 358 is provided on the tail gas discharge pipeline 354 .

In the low-oxygen ultra-high-purity arsenic rod molding device of this embodiment, the molding device also includes a control module; the vacuum control valve 356, the pressurization control valve 357, and the discharge valve 358 are controlled in response to the control module. command and switch action valve; the furnace body 31 is also provided with a pressure sensor for monitoring the furnace chamber pressure; the control module is configured to: respond to the vacuum command, control the vacuum control valve 356 to open; respond to the translation command , control the start of the translational mechanism; in response to the pressurization command, control the vacuum control valve 356 to close, and control the pressurization control valve 357 to open, receive the furnace chamber pressure data monitored by the pressure sensor, and when the pressure value reaches the first set value, The pressurization control valve 357 is controlled to be closed; in response to the firing command, the discharge valve 358 is controlled to be opened. In this embodiment, the evacuation pipeline 352 is used to connect the vacuum system (vacuum pump), the inert gas pressurization pipeline 353 is used to connect the high-pressure high-purity inert gas source, and the tail gas discharge pipeline 354 is used to connect the tail gas washing system; Under the control of the control module: the vacuum control valve 356 is opened when vacuuming and closed when pressurized; the pressurization control valve 357 is opened when pressurized, and high-purity inert gas is charged into the furnace chamber, and the pressurization control valve 357 is connected with the pressure The sensor forms an interlocking control to adjust the gas pressure charged into the furnace chamber until it reaches the required pressure (the first set value); the discharge valve 358 remains closed during the molding process, and is only opened when it is ready to be released from the furnace. The cavity is depressurized, and the discharged gas is processed through the exhaust gas washing system.

2, the gas pipeline assembly 35 also includes a safety protection pipeline 355, and a safety valve 359 is also provided on the safety protection pipeline 355; the safety valve 359 can respond to the control of the control module. The control module is also configured to: receive the furnace chamber pressure data monitored by the pressure sensor, and control the safety valve 359 to open when the pressure value reaches the second set value. In this embodiment, the outlet end of the safety protection pipeline 355 can be connected to the outlet end of the exhaust gas discharge pipeline 354; under the control of the control module, the safety valve 359 and the pressure sensor form an interlock control; When it is high (the second set value), the safety valve 359 is opened to relieve the pressure of the furnace chamber, and the discharged gas is processed through the tail gas washing system.

Referring again to shown in Fig. 2, described furnace body 31 top openings, and furnace lid 32 is installed at opening; Furnace lid 32 is connected with furnace body 31 by connector 37; Sealing element; the side wall of the furnace body 31 is also provided with a cooling mechanism 34 in the area close to the top opening. Wherein, the connecting piece 37 can be a bolt, and the bolts are evenly distributed around the joint area of the furnace body and the furnace cover. In this implementation, eight bolts are evenly distributed along the circumference, and the cooling mechanism 34 can be a circulating cooling water jacket for Reducing the temperature near the end of the furnace body 31 can protect the seal from being affected by high temperature and reduce the sealing effect on the one hand, and also reduce the arsenic vapor on the other hand.

Referring to Fig. 1 again, the heating mechanism 2 includes a heating part 21, and a heating channel 22 with upper and lower openings is formed in the heating part 21; the heating channel 22 cooperates with the arsenic rod forming furnace 3 for the Gall 3 is heated. Wherein, the heating part 21 may adopt a resistance heating furnace.

Referring again to Figure 1, the heating mechanism 2 also includes a temperature sensor 23 mounted on the heating portion 21, the working end of the temperature sensor 23 is close to the heating channel 22; The temperature data controls the heating part 21 to heat according to the set temperature parameters. Among them, the temperature sensor can use a temperature control thermocouple, and the heating device can precisely control the temperature through the real-time feedback of the temperature control thermocouple.

Referring again to FIG. 1 , the molding device further includes a lifting mechanism 5 installed on the support 1 ; the heating mechanism 2 is fixed to the lifting and moving end of the lifting mechanism 5 . Wherein, the driving of the lifting mechanism 5 enables the heating mechanism 2 to move up and down, and the design of the heating channel with upper and lower openings in the heating mechanism 2 enables the heating mechanism to move upwards when the formed arsenic rod is solidified and formed, so that the arsenic rod is formed The temperature of the mold can be gradually lowered from the bottom to the top. This cooling molding method can make the arsenic material cool and solidify from the bottom first, and the top surface solidify last. The directional solidification molding can ensure the compactness of the formed arsenic rod. Compared with the upward movement of the arsenic rod forming mold, it can also ensure that the top of the arsenic rod is flat without shrinkage cavity after solidification.

With reference again to shown in Figure 1, described elevating mechanism 5 comprises the screw mandrel assembly that is installed on support 1, is used to drive the lifting drive element (servo motor) of screw mandrel, and the mounting frame 53 that is fixed with screw mandrel nut, and this mounting frame 53 The lifting moving end as the lifting mechanism 5 is fixed with the heating mechanism 2 .

Referring again to Fig. 3 and shown in Fig. 4, the forming mold holder 36 includes a holder body 361; the top side of the holder body 361 has a plurality of holes 362, and the holes are used as installation grooves for placing the arsenic rod forming mold; In this embodiment, there are 5 holes 362 distributed in a cross.

Example 1

This use example uses a low-oxygen ultra-high-purity arsenic rod forming device in the embodiment, and prepares an ultra-high-purity arsenic rod through the following steps:

S1, select five high-purity quartz tubes of φ 35 × 300mm (as arsenic rod forming molds), soak in aqua regia for 24 hours, rinse with high-purity water, dry, and set aside;

S2. Weigh 445g of arsenic with a purity of 99.999995% in the glove box under the protection of high-purity argon, and put the weighed material into the arsenic rod forming mold prepared in step S1;

S3, insert the charged arsenic rod forming mold into the hole on the forming mold fixing seat, fix it, cover the furnace cover, and fasten the bolts, so that the furnace cover and the furnace body are firmly fixed;

S4. Start the lifting mechanism to drive the heating mechanism to move upwards, so that the corresponding area of the furnace body equipped with the arsenic rod forming mold is located in the heating channel;

S5. Close the pressurization control valve of the inert gas pressurization pipeline, close the discharge valve of the exhaust gas discharge pipeline, open the vacuum control valve of the vacuum pipeline, and start vacuuming. The pressure sensor feeds back the real-time pressure in the furnace cavity. When the furnace cavity When the vacuum degree inside is pumped to 10 ^-4 Pa, the heating mechanism is started, and the temperature is raised according to the set temperature rise program. At the same time, the horizontal rotation mechanism is started, and the arsenic rod forming furnace is driven to rotate horizontally according to the set horizontal rotation operation program; , after heating up to 530°C-580°C, keep the temperature constant for 1 hour, and perform high-purity arsenic deoxidation treatment under high temperature and high vacuum;

S6. After the deoxidation treatment is completed, close the horizontal rotation mechanism, the arsenic rod forming furnace stops the horizontal rotation, and the heating mechanism continues to heat up according to the set temperature rise program. During the temperature rise process, close the vacuum control valve of the vacuum pipeline and open the inert gas The pressurization control valve of the pressurization pipeline fills the furnace cavity with high-purity argon at a constant pressure of 3.8-4.2MPa; the heating process is: according to the heating rate of 1°C/min, the temperature is raised to 815°C-850°C and then the temperature is constant. The pressure remains constant at constant temperature;

S7. After the constant temperature is over, start the horizontal rotation mechanism again, and the arsenic rod forming furnace will rotate horizontally. According to the set directional solidification program, start the lifting mechanism to drive the heating mechanism to rise. The moving speed is 10-50mm/h, and the heating channel moves upward. Until it leaves the corresponding area of the furnace body where the arsenic rod forming mold is installed; turn off the heating mechanism, the horizontal rotation mechanism, and the lifting mechanism, and naturally cool down to room temperature;

S8. Open the discharge valve of the tail gas discharge pipeline to relieve the pressure of the furnace chamber. After the pressure relief is completed, unscrew the bolts, open the furnace cover, take out the arsenic rod forming mold in the fixing seat of the forming mold, and place it under the protection of high-purity argon. In the glove box, demold the quartz mold and take out the arsenic rod.

Test the arsenic rod formed in Example 1:

1. Weigh the weight of 5 arsenic rods respectively, the weight of each rod is in the range of 435-443g, and the surface of each ultra-high-purity arsenic rod is smooth, dense and free of pores;

2. Randomly select a high-purity arsenic rod for sample testing. The purity of the arsenic rod reaches 99.999995%, and the oxygen content in the arsenic rod is <1PPm.

Example 2

The difference between this use example and use example 1 is that: in step S1, a flat-bottomed quartz tube of high-purity quartz material of φ 115 × 300mm is selected (as an arsenic rod forming mold); Arsenic 7072g is put into the arsenic rod forming mold prepared in step S1. Others are the same as Example 1.

Test the arsenic rod formed in Example 2:

1. Weigh the weight of the arsenic rod: 7064g, the surface of the arsenic rod is smooth, dense and free of pores;

2. The arsenic rod is sent for sample testing, the purity of the arsenic rod reaches 99.999995%, and the oxygen content in the arsenic rod is less than 1PPm.

A low-oxygen ultra-high-purity arsenic rod molding device according to the present invention weighs the material in the molding mold according to different size requirements and puts it into the molding cavity, then seals the molding cavity and starts vacuuming, and then passes through the high temperature A series of operations such as deoxidation under high vacuum, program-controlled pressurization, program temperature rise, constant temperature, horizontal rotation to remove air bubbles, directional solidification, cooling and demoulding, etc., can produce ultra-high-purity arsenic rods. This device avoids the problems of rough ingot surface, shrinkage cavity and high oxygen content in conventional ingot forming, and the forming form is flexible and variable, and the mold can be replaced according to the required forming size. During the forming process, the material only touches High-purity quartz will not affect the purity of high-purity arsenic rods; the device has a high degree of automation, good safety, and can be automatically controlled. It can be started and operated with one button according to the set program, and the prepared high-purity arsenic rods are dense and smooth. , No shrinkage cavity, oxygen content less than 1PPm; meet the requirements of the corresponding industry for ultra-high purity arsenic rods.

The above embodiments shall not limit the present invention in any way, and all technical solutions obtained by means of equivalent replacement or equivalent transformation fall within the protection scope of the present invention.

Claims (10)

1. A low-oxygen ultra-high-purity arsenic rod forming device is characterized in that: comprises a bracket and an arsenic rod forming furnace pipe arranged on the bracket; the arsenic rod forming furnace pipe comprises a furnace body, and a furnace chamber is formed inside the furnace body; a forming die fixing seat is arranged in the furnace cavity, and a mounting groove is formed in the forming die fixing seat and used for mounting an arsenic rod forming die; the outer side of the furnace body is also provided with a gas pipeline assembly which is communicated with the furnace chamber and used for controlling gas in the furnace chamber; the bracket is also provided with a horizontal rotation mechanism, and the horizontal rotation mechanism is connected with the arsenic rod forming furnace pipe and is used for driving the arsenic rod forming furnace pipe to rotate horizontally; the support is also provided with a heating mechanism which is matched with the arsenic rod forming furnace pipe and used for heating the arsenic rod forming furnace pipe.

2. The ultra-high-purity arsenic rod forming device with low oxygen content according to claim 1, wherein: the gas pipeline assembly comprises a gas pipeline busbar communicated with the furnace chamber; the gas path busbar is connected with a vacuumizing pipeline, an inert gas pressurizing pipeline and a tail gas discharging pipeline; a vacuum control valve is arranged on the vacuumizing pipeline, and a pressurizing control valve is arranged on the inert gas pressurizing pipeline; and the tail gas discharge pipeline is provided with a discharge valve.

3. The ultra-high-purity arsenic rod forming device with low oxygen content as claimed in claim 2, wherein: the molding device also comprises a control module; the vacuum control valve, the pressurization control valve and the discharge valve are valves which can be opened and closed in response to the control command of the control module; the furnace body is also provided with a pressure sensor for monitoring the pressure of the furnace chamber; the control module is configured to: controlling a vacuum control valve to be opened in response to a vacuumizing command; responding to a horizontal rotation instruction, and controlling a horizontal rotation mechanism to start; responding to a pressurization instruction, controlling a vacuum control valve to be closed, controlling a pressurization control valve to be opened, receiving furnace chamber pressure data monitored by a pressure sensor, and controlling the pressurization control valve to be closed when a pressure value reaches a first set value; and responding to the tapping instruction, and controlling the discharge valve to be opened.

4. The ultra-high-purity arsenic rod forming device with low oxygen content according to claim 3, wherein: the gas pipeline assembly also comprises a safety protection pipeline, and a safety valve is also arranged on the safety protection pipeline; the safety valve is a valve which can be opened and closed in response to a control command of the control module; the control module is further configured to: and receiving the pressure data of the furnace chamber monitored by the pressure sensor, and controlling the safety valve to open when the pressure value reaches a second set value.

5. A low-oxygen ultra-high-purity arsenic rod forming device according to any one of claims 1 to 4, wherein: the top of the furnace body is provided with an opening, and a furnace cover is arranged at the opening; the furnace cover is connected with the furnace body through a connecting piece; a sealing element is also arranged between the furnace cover and the furnace body; and a cooling mechanism is also arranged on the side wall of the furnace body in a region close to the top opening.

6. The ultra-high-purity arsenic rod forming device with low oxygen content according to claim 3, wherein: the heating mechanism comprises a heating part, wherein a heating channel with an upper opening and a lower opening is formed in the heating part; the heating channel is matched with the arsenic rod forming furnace pipe and used for heating the arsenic rod forming furnace pipe.

7. The ultra-high-purity arsenic rod forming device with low oxygen content according to claim 6, wherein: the heating mechanism also comprises a temperature sensor arranged on the heating part, and the working end of the temperature sensor is close to the heating channel; the control module is further configured to: and receiving temperature data monitored by the temperature sensor, and controlling the heating part to heat according to set temperature parameters.

8. A low-oxygen ultra-high-purity arsenic rod forming device according to claim 6 or 7, wherein: the forming device also comprises a lifting mechanism arranged on the bracket; the heating mechanism is fixed with the lifting moving end of the lifting mechanism.

9. The ultra-high-purity arsenic rod forming device with low oxygen content according to claim 8, wherein: the lifting mechanism comprises a screw rod assembly arranged on the support, a lifting driving element used for driving the screw rod and an installation frame fixed with the screw rod nut, and the installation frame is used as a lifting moving end of the lifting mechanism and fixed with the heating mechanism.

10. The ultra-high-purity arsenic rod forming device with low oxygen content as claimed in claim 1, wherein: the forming die fixing seat comprises a fixing seat body; and a plurality of holes are formed in the top side of the fixed base body and used as mounting grooves for placing arsenic rod forming dies.

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