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CN115266766A - Multi-target unmarked cancer detection radio frequency biosensor based on heterogeneous resonance unit - Google Patents

Multi-target unmarked cancer detection radio frequency biosensor based on heterogeneous resonance unit Download PDF

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CN115266766A
CN115266766A CN202210897319.3A CN202210897319A CN115266766A CN 115266766 A CN115266766 A CN 115266766A CN 202210897319 A CN202210897319 A CN 202210897319A CN 115266766 A CN115266766 A CN 115266766A
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王琮
李喆一
魏杰
易洋
张明新
宋文昊
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Abstract

基于异质谐振单元的多目标无标记癌症检测射频生物传感器,本发明为了解决现有生物检测癌症的检测范围较小,难以实现多目标检测的问题。本发明多目标无标记癌症检测射频生物传感器中连接微带线的两端连接两段馈线,第一开环谐振器和第二开环谐振器分布在连接微带线的两侧,开环谐振器和输入输出微带线组的开口相对并电磁耦合,在第二开环谐振器的表面沉积有二氧化硅层,在二氧化硅层表面修饰氨基,通过氨基键连羧基‑DNA适配体,在第一开环谐振器的表面修饰巯基‑DNA适配体。本发明采用微波检测技术,应用微波器件作为传感单元,通过表面定向修饰技术实现特异性检测,实现多目标适配体的高灵敏度、高选择性无标记生物传感。

Figure 202210897319

The multi-target label-free cancer detection radio frequency biosensor based on the heterogeneous resonance unit is designed to solve the problem that the detection range of the existing biological detection of cancer is small and it is difficult to realize multi-target detection. The two ends of the microstrip line in the multi-target label-free cancer detection radio frequency biosensor of the present invention are connected to two feed lines, the first open-loop resonator and the second open-loop resonator are distributed on both sides of the connected microstrip line, and the open-loop resonance A silicon dioxide layer is deposited on the surface of the second open-loop resonator, an amino group is modified on the surface of the silicon dioxide layer, and a carboxyl-DNA aptamer is bonded through the amino group. , thiol-DNA aptamers are modified on the surface of the first ring-opening resonator. The invention adopts microwave detection technology, applies microwave devices as sensing units, realizes specific detection through surface orientation modification technology, and realizes label-free biosensing of multi-target aptamers with high sensitivity and high selectivity.

Figure 202210897319

Description

基于异质谐振单元的多目标无标记癌症检测射频生物传感器Multi-target radiofrequency biosensor for label-free cancer detection based on heterogeneous resonant cell

技术领域technical field

本发明采用先进的QFN封装与生物表面定向修饰工艺,提出了一种基于异质谐振单元的射频生物传感器,实现多目标无标记癌症检测。The invention adopts advanced QFN encapsulation and biological surface directional modification technology, and proposes a radio frequency biosensor based on a heterogeneous resonance unit to realize multi-target and label-free cancer detection.

背景技术Background technique

随着社会的不断发展以及人口规模的扩大,癌症的患病率逐渐提高,目前已成为影响人类社会发展及限制幸福指数提升的首要因素。规范的防癌体检能够早期发现癌症,约1/3的癌症可以通过早期发现和早期治疗降低死亡率并且减少社会医疗负担。以全球女性新发病例前四位的乳腺癌与宫颈癌为例,通过疾病前期初筛诊疗,乳腺癌的治愈率可提升40%左右,宫颈癌的死亡率可降低20%至60%。目前针对癌细胞的传感检测是实现癌症早期诊断的主要方式,主要包括电化学法、基于酶的比色法、免疫荧光法等。相较于现有生物检测技术,微波检测技术的检测范围大、操作简单、经济、便携,可实现大范围应用,同时还可以结合微流控及表面修饰等辅助技术实现了非侵入式、实时以及无标签式检测,在多类型癌症早期初筛检测具备显著优势。With the continuous development of society and the expansion of population size, the prevalence of cancer has gradually increased, and it has become the primary factor affecting the development of human society and limiting the improvement of happiness index. Standardized cancer prevention physical examination can detect cancer early, and about one-third of cancer can reduce mortality and social medical burden through early detection and early treatment. Taking breast cancer and cervical cancer, which are the top four new cases among women in the world, as an example, the cure rate of breast cancer can be increased by about 40%, and the mortality rate of cervical cancer can be reduced by 20% to 60%. At present, the sensing detection of cancer cells is the main way to realize the early diagnosis of cancer, mainly including electrochemical method, enzyme-based colorimetric method, immunofluorescence method and so on. Compared with the existing biological detection technology, the microwave detection technology has a large detection range, simple operation, economy, and portability, and can be used in a wide range of applications. As well as label-free detection, it has significant advantages in the early screening of multiple types of cancer.

发明内容Contents of the invention

本发明的目的是为了解决现有生物检测癌症的检测范围较小,难以实现多目标检测的问题,而提供一种基于异质谐振单元的多目标无标记癌症检测射频生物传感器。The purpose of the present invention is to solve the problem that the detection range of the existing biological detection cancer is small and it is difficult to realize multi-target detection, and to provide a multi-target label-free cancer detection radio frequency biosensor based on a heterogeneous resonance unit.

本发明基于异质谐振单元的多目标无标记癌症检测射频生物传感器包括基板、第一端口馈线、第二端口馈线、连接微带线、两个开环谐振器和两个输入输出微带线组,第一端口馈线、第二端口馈线、连接微带线、两个开环谐振器和两个输入输出微带线组采用薄膜工艺集成在基板上,第一端口馈线、第二端口馈线和连接微带线位于基板的轴线上,连接微带线的一端与第一端口馈线连通,连接微带线的另一端与第二端口馈线连通,第一开环谐振器和第二开环谐振器分布在连接微带线的两侧,第一输入输出微带线组和第二输入输出微带线组分布在连接微带线的两侧,且第一开环谐振器和第一输入输出微带线组的开口相对并电磁耦合,第二开环谐振器和第二输入输出微带线组的开口相对并电磁耦合,连接微带线与第一开环谐振器和第二开环谐振器均为平行线耦合;The multi-target radio frequency biosensor for cancer detection based on the heterogeneous resonance unit of the present invention includes a substrate, a first port feeder, a second port feeder, a connecting microstrip line, two open-loop resonators and two input and output microstrip line groups , the first port feeder, the second port feeder, the connecting microstrip line, two open-loop resonators and two input and output microstrip line groups are integrated on the substrate by thin film technology, the first port feeder, the second port feeder and the connection The microstrip line is located on the axis of the substrate, one end connected to the microstrip line communicates with the feeder line of the first port, and the other end connected to the microstrip line communicates with the feeder line of the second port, and the first open-loop resonator and the second open-loop resonator are distributed On both sides of the connecting microstrip line, the first input and output microstrip line group and the second input and output microstrip line group are distributed on both sides of the connecting microstrip line, and the first open-loop resonator and the first input and output microstrip line The openings of the line group are opposite and electromagnetically coupled, the openings of the second open-loop resonator and the second input-output microstrip line group are opposite and electromagnetically coupled, and the microstrip line is connected to the first open-loop resonator and the second open-loop resonator. for parallel line coupling;

其中两个开环谐振器和两个输入输出微带线组的材质为金,在第二开环谐振器的表面沉积有二氧化硅层,在二氧化硅层表面修饰氨基,通过氨基键连羧基-DNA适配体,在第一开环谐振器的表面修饰巯基-DNA适配体。Among them, the material of the two open-ring resonators and the two input and output microstrip line groups is gold, and a silicon dioxide layer is deposited on the surface of the second open-ring resonator, and amino groups are modified on the surface of the silicon dioxide layer, and the amino groups are connected through amino bonds. Carboxy-DNA aptamers, thiol-DNA aptamers are modified on the surface of the first ring-opening resonator.

本发明采用微波检测技术,应用微波器件作为传感单元,主要通过表面定向修饰生物适配体来准确区分被测物,通过微波传感器与被测样品表现出的强烈共振行为判断样品浓度。该微波传感器具有以下独特优势:第一,通过表面定向修饰技术实现特异性检测,解决微波传感无法很好区分生物大分子的问题;第二,采用异质谐振的双频微波传感器设计,以微波信号作为检测基准克服传统电化学生物传感器难以进行多目标识别的问题;第三,通过微波器件检测敏感频率的选择和器件的优化设计进一步提高检测性能,为微波传感器灵敏度的提升提供了更高的可行性;第四,引入具有信号放大效应的有源主动反馈电路与开窗式无引脚一体化表面贴装封装工艺,减小环境变化对传感器性能的干扰,使传感器芯片保持较好的灵敏度与可靠性。The invention adopts microwave detection technology, uses microwave devices as sensing units, and accurately distinguishes the measured objects mainly through surface directional modification of biological aptamers, and judges the sample concentration through the strong resonance behavior exhibited by the microwave sensor and the tested sample. The microwave sensor has the following unique advantages: first, specific detection is achieved through surface directional modification technology, which solves the problem that microwave sensing cannot distinguish biological macromolecules well; The microwave signal as the detection reference overcomes the problem that traditional electrochemical biosensors are difficult to perform multi-target recognition; thirdly, the detection performance is further improved through the selection of the detection sensitive frequency of the microwave device and the optimized design of the device, which provides a higher level for the improvement of the sensitivity of the microwave sensor. Feasibility; Fourth, the introduction of an active active feedback circuit with signal amplification effect and a window-type leadless integrated surface mount packaging process reduces the interference of environmental changes on sensor performance and keeps the sensor chip in good condition. sensitivity and reliability.

本发明以生物适配体表面定向修饰技术研究作为切入点,以解决微波传感技术中无特异性识别的问题为目标。本发明的研究成果将为微波测量与生物修饰协同检测的生物传感提供理论研究基础,同时为此类传感器的加工、修饰、封装与检测流程提供参考方案,对促进生物大分子微波检测领域的发展有重要的意义。The invention takes the research on the surface directional modification technology of biological aptamers as the entry point, and aims to solve the problem of non-specific recognition in the microwave sensing technology. The research results of the present invention will provide a theoretical research basis for the biosensing of microwave measurement and biomodification cooperative detection, and provide a reference scheme for the processing, modification, packaging and detection process of such sensors, and will promote the development of microwave detection in the field of biological macromolecules. development is important.

本发明从异质谐振单元加工与表面定向修饰、微波器件设计以及微波传感器微纳加工工艺等三个方面全方位多层次地展开对多目标、高灵敏度的微波生物检测技术的研究,实现对乳腺癌与宫颈癌肿瘤DNA的检测,灵敏度高达0.1MHz/nM,检测极限低于0.3nM。本发明构建了具有信号放大效应的微波双频谐振单元的模型,揭示微波检测与生物修饰在生物传感领域的协同检测机理,为基于微波检测特征实现材料的特异化合成以及修饰提供理论性指导。此外,该工作构建了初步的器件实时反馈评价体系,为未来实现可靠的小型化、集成化微波生物传感器奠定坚实的材料基础与器件基础。The present invention researches multi-objective and high-sensitivity microwave bio-detection technology comprehensively and multi-levelly from the three aspects of heterogeneous resonant unit processing and surface directional modification, microwave device design, and microwave sensor micro-nano processing technology, and realizes the detection of mammary glands. For the detection of cancer and cervical cancer tumor DNA, the sensitivity is as high as 0.1MHz/nM, and the detection limit is lower than 0.3nM. The invention constructs a model of microwave dual-frequency resonance unit with signal amplification effect, reveals the cooperative detection mechanism of microwave detection and biological modification in the field of biosensing, and provides theoretical guidance for the specific synthesis and modification of materials based on microwave detection characteristics . In addition, this work has established a preliminary device real-time feedback evaluation system, laying a solid material foundation and device foundation for the future realization of reliable miniaturized and integrated microwave biosensors.

本发明针对双频谐振敏感单元和多目标适配体,提出对谐振单元异侧修饰的优化策略,结合微波多维信号技术,实现多目标适配体的高灵敏度、高选择性无标记生物传感。该传感器还应用有源反馈回路,利用表面贴装和开窗式无引脚一体化封装工艺(QFN封装),不仅可以补偿谐振器的功率损耗,显著提高传感器的品质因数,而且有利于实现微波生物传感器的低成本、小型化与集成化,是一种新型有前景的癌症早期初筛检测方法。Aiming at the dual-frequency resonance sensitive unit and multi-target aptamer, the present invention proposes an optimization strategy for modifying the opposite side of the resonant unit, combined with microwave multi-dimensional signal technology, to realize the high-sensitivity and high-selectivity label-free biosensing of the multi-target aptamer . The sensor also uses an active feedback loop, using the surface mount and window-type leadless integrated packaging process (QFN package), which can not only compensate the power loss of the resonator, significantly improve the quality factor of the sensor, but also facilitate the realization of microwave The low cost, miniaturization and integration of biosensors is a new and promising method for early screening of cancer.

附图说明Description of drawings

图1是本发明基于异质谐振单元的多目标无标记癌症检测射频生物传感器的整体结构示意图;Fig. 1 is a schematic diagram of the overall structure of the multi-target label-free cancer detection radio frequency biosensor based on the heterogeneous resonance unit of the present invention;

图2是本发明基于异质谐振单元的多目标无标记癌症检测射频生物传感器的加工流程图;Fig. 2 is a processing flow chart of the multi-target label-free cancer detection radio frequency biosensor based on the heterogeneous resonance unit of the present invention;

图3是本发明基于异质谐振单元的多目标无标记癌症检测射频生物传感器中生物适配体表面定向修饰的示意图;Fig. 3 is a schematic diagram of the directional modification of the biological aptamer surface in the multi-target label-free cancer detection radio frequency biosensor based on the heterogeneous resonance unit of the present invention;

图4是实施例中多目标无标记癌症检测射频生物传感器的S参数幅度变化测试图,其中左侧椭圆代表乳腺癌,右侧椭圆代表宫颈癌,●代表3nM,★代表2nM,六边形代表1nM;Fig. 4 is the S-parameter amplitude change test diagram of the multi-target label-free cancer detection radio frequency biosensor in the embodiment, wherein the ellipse on the left represents breast cancer, the ellipse on the right represents cervical cancer, ● represents 3nM, * represents 2nM, and the hexagon represents 1nM;

图5是实施例中多目标无标记癌症检测射频生物传感器的S参数相位变化测试图,其中左侧椭圆代表乳腺癌,右侧椭圆代表宫颈癌,●代表3nM,★代表2nM,六边形代表1nM;Fig. 5 is the S-parameter phase change test diagram of multi-target label-free cancer detection RF biosensor in the embodiment, wherein the left ellipse represents breast cancer, the right ellipse represents cervical cancer, ● represents 3nM, * represents 2nM, and hexagon represents 1nM;

图6是实施例中封装后的微波生物传感器测试系统图。Fig. 6 is a diagram of the packaged microwave biosensor testing system in the embodiment.

具体实施方法Specific implementation method

具体实施方式一:本实施方式基于异质谐振单元的多目标无标记癌症检测射频生物传感器包括基板、第一端口馈线1、第二端口馈线2、连接微带线3、两个开环谐振器和两个输入输出微带线组,第一端口馈线1、第二端口馈线2、连接微带线3、两个开环谐振器和两个输入输出微带线组采用薄膜工艺集成在基板上,第一端口馈线1、第二端口馈线2和连接微带线3位于基板的轴线上,连接微带线3的一端与第一端口馈线1连通,连接微带线3的另一端与第二端口馈线2连通,第一开环谐振器4-1和第二开环谐振器4-2分布在连接微带线3的两侧,第一输入输出微带线组5-1和第二输入输出微带线组5-2分布在连接微带线3的两侧,且第一开环谐振器4-1和第一输入输出微带线组5-1的开口相对并电磁耦合,第二开环谐振器4-2和第二输入输出微带线组5-2的开口相对并电磁耦合,连接微带线3 与第一开环谐振器4-1和第二开环谐振器4-2均为平行线耦合;Specific Embodiment 1: In this embodiment, the multi-target label-free cancer detection RF biosensor based on the heterogeneous resonance unit includes a substrate, a first port feeder 1, a second port feeder 2, a connecting microstrip line 3, and two open-loop resonators And two input and output microstrip line groups, the first port feeder 1, the second port feeder 2, the connecting microstrip line 3, two open-loop resonators and two input and output microstrip line groups are integrated on the substrate by thin film technology , the first port feeder 1, the second port feeder 2 and the connecting microstrip line 3 are located on the axis of the substrate, one end of the connecting microstrip line 3 communicates with the first port feeder 1, and the other end of the connecting microstrip line 3 communicates with the second The port feeder 2 is connected, the first open-loop resonator 4-1 and the second open-loop resonator 4-2 are distributed on both sides of the connecting microstrip line 3, the first input and output microstrip line group 5-1 and the second input The output microstrip line group 5-2 is distributed on both sides of the microstrip line 3, and the openings of the first open-loop resonator 4-1 and the first input and output microstrip line group 5-1 are opposite and electromagnetically coupled, and the second The open-loop resonator 4-2 and the opening of the second input-output microstrip line group 5-2 are opposite and electromagnetically coupled, connecting the microstrip line 3 with the first open-loop resonator 4-1 and the second open-loop resonator 4- 2 are parallel line coupling;

其中两个开环谐振器和两个输入输出微带线组的材质为金,在第二开环谐振器4-2的表面沉积有二氧化硅层,在二氧化硅层表面修饰氨基,通过氨基(化学)键连羧基-DNA适配体,在第一开环谐振器4-1的表面修饰巯基-DNA适配体。The material of the two open-ring resonators and the two input-output microstrip line groups is gold, and a silicon dioxide layer is deposited on the surface of the second open-ring resonator 4-2, and amino groups are modified on the surface of the silicon dioxide layer. The amino group (chemically) bonds the carboxyl-DNA aptamer, and modifies the thiol-DNA aptamer on the surface of the first ring-opening resonator 4-1.

本实施方式利用生物适配体可特异性识别的特点,使修饰后的微波检测区域能对目标检测物产生特异性反应。建立入射波作用下适配体介电常数张量解析关系,根据微波微扰理论和德拜方程检测适配体介电常数变化,预测不同输入生物参量下的检测范围及灵敏度。This embodiment utilizes the characteristic that the biological aptamer can specifically recognize, so that the modified microwave detection region can produce a specific reaction to the target detection substance. Establish the aptamer permittivity tensor analytical relationship under the action of incident waves, detect the change of aptamer permittivity according to microwave perturbation theory and Debye equation, and predict the detection range and sensitivity under different input biological parameters.

本实施方式多目标无标记癌症检测射频生物传感器是由基本微波谐振回路构成的射频生物传感器,采用的生物适配体表面定向修饰开环谐振器,相较于现有的太赫兹癌症检测仪可检测特定种类的癌症大分子,更有利于辅助诊断早期癌症,节约检测时间与成本。该生物传感器不需要结合基因工程培养特定菌种,也无需配套的荧光检测系统分析信号,避免了紫外线照射,制作流程和操作更加简便,对环境要求低,简化了微生物传感器检测癌症的繁琐步骤。In this embodiment, the multi-target label-free cancer detection radio frequency biosensor is a radio frequency biosensor composed of a basic microwave resonant circuit, and the biological aptamer surface directional modified open-loop resonator is used. Compared with the existing terahertz cancer detector, it can Detection of specific types of cancer macromolecules is more conducive to assisting in the diagnosis of early cancers, saving detection time and costs. The biosensor does not need to be combined with genetic engineering to cultivate specific strains, nor does it need a supporting fluorescence detection system to analyze signals, avoids ultraviolet radiation, makes the production process and operation easier, has low environmental requirements, and simplifies the cumbersome steps of microbial sensor detection of cancer.

本实施方式所采用的微波检测方法采用了有源反馈放大与QFN封装,提高了检测灵敏度与抗干扰能力,相比于现有的光电化学基因传感而言,环境适应性好,无需密封,检测结果更可靠。The microwave detection method used in this embodiment adopts active feedback amplification and QFN packaging, which improves the detection sensitivity and anti-interference ability. Compared with the existing photoelectrochemical gene sensor, it has good environmental adaptability and does not need sealing. The test results are more reliable.

具体实施方式二:本实施方式与具体实施方式一不同的是第一端口馈线1、第二端口馈线2、连接微带线3、两个开环谐振器和两个输入输出微带线组采用光刻工艺集成在基板上。Specific embodiment two: the difference between this embodiment and specific embodiment one is that the first port feeder 1, the second port feeder 2, the connecting microstrip line 3, two open-loop resonators and two input and output microstrip line groups adopt The photolithography process is integrated on the substrate.

具体实施方式三:本实施方式与具体实施方式一或二不同的是所述的基板为硅基板。Embodiment 3: This embodiment is different from Embodiment 1 or Embodiment 2 in that the substrate is a silicon substrate.

具体实施方式四:本实施方式与具体实施方式一至三之一不同的是两个开环谐振器和两个输入输出微带线组的金层厚度为100~300nm。Embodiment 4: This embodiment differs from Embodiments 1 to 3 in that the thickness of the gold layer of the two open-loop resonators and the two input-output microstrip line groups is 100-300 nm.

具体实施方式五:本实施方式与具体实施方式一至四之一不同的是第一开环谐振器4-1 和第二开环谐振器4-2的开口处呈尖角结构。Embodiment 5: This embodiment differs from Embodiments 1 to 4 in that the openings of the first split-loop resonator 4-1 and the second split-loop resonator 4-2 are sharp-angled.

具体实施方式六:本实施方式与具体实施方式一至五之一不同的是采用磁控溅射工艺在第二开环谐振器4-2的表面沉积厚度为50~100nm的二氧化硅层。Embodiment 6: This embodiment differs from Embodiments 1 to 5 in that a silicon dioxide layer with a thickness of 50-100 nm is deposited on the surface of the second open-loop resonator 4-2 by magnetron sputtering.

具体实施方式七:本实施方式与具体实施方式一至六之一不同的是二氧化硅层表面修饰氨基的方法是将带有二氧化硅层的第二开环谐振器4-2浸泡在硅烷偶联剂溶液中。Embodiment 7: The difference between this embodiment and one of Embodiments 1 to 6 is that the method for modifying the surface of the silicon dioxide layer with amino groups is to soak the second ring-opening resonator 4-2 with a silicon dioxide layer in silane distillate. in the joint solution.

本实施方式所用的硅烷偶联剂为3-氨基-18烷基-三甲氧基硅烷,在水溶液中的体积含量为5%。The silane coupling agent used in this embodiment is 3-amino-18 alkyl-trimethoxysilane, and its volume content in the aqueous solution is 5%.

具体实施方式八:本实施方式与具体实施方式一至七之一不同的是在第一开环谐振器 4-1的表面修饰巯基-DNA是将第一开环谐振器4-1浸泡在巯基-DNA的溶液中。Embodiment 8: The difference between this embodiment and one of Embodiments 1 to 7 is that the surface modification of the first ring-opening resonator 4-1 is to immerse the first ring-opening resonator 4-1 in mercapto-DNA. in the DNA solution.

具体实施方式九:本实施方式与具体实施方式一至八之一不同的是输入输出微带线组与有源反馈电路相连。Embodiment 9: This embodiment differs from Embodiments 1 to 8 in that the input and output microstrip line groups are connected to the active feedback circuit.

具体实施方式十:本实施方式与具体实施方式一至九之一不同的是该基于异质谐振单元的多目标无标记癌症检测射频生物传感器采用QFN(方形扁平无引脚封装)工艺封装。Embodiment 10: The difference between this embodiment and Embodiments 1 to 9 is that the heterogeneous resonance unit-based radio frequency biosensor for multi-target label-free cancer detection is packaged in a QFN (quad flat no-lead package) process.

实施例:本实施例基于异质谐振单元的多目标无标记癌症检测射频生物传感器包括基板、第一端口馈线1、第二端口馈线2、连接微带线3、两个开环谐振器和两个输入输出微带线组,第一端口馈线1、第二端口馈线2、连接微带线3、两个开环谐振器和两个输入输出微带线组采用光刻工艺集成在高阻硅基板上,第一端口馈线1、第二端口馈线2和连接微带线3位于基板的轴线上,连接微带线3的一端与第一端口馈线1连通,连接微带线3 的另一端与第二端口馈线2连通,第一开环谐振器4-1和第二开环谐振器4-2分布在连接微带线3的两侧,第一输入输出微带线组5-1和第二输入输出微带线组5-2分布在连接微带线 3的两侧,且第一开环谐振器4-1和第一输入输出微带线组5-1的开口相对,第二开环谐振器4-2和第二输入输出微带线组5-2的开口相对,连接微带线3与第一开环谐振器4-1和第二开环谐振器4-2均为平行线耦合;Embodiment: In this embodiment, the multi-target label-free cancer detection radio frequency biosensor based on the heterogeneous resonance unit includes a substrate, a first port feeder 1, a second port feeder 2, a connecting microstrip line 3, two open-loop resonators and two One input and output microstrip line group, first port feeder 1, second port feeder 2, connecting microstrip line 3, two open-loop resonators and two input and output microstrip line groups are integrated on high-impedance silicon by photolithography On the substrate, the first port feeder 1, the second port feeder 2 and the connecting microstrip line 3 are located on the axis of the substrate, one end of the connecting microstrip line 3 communicates with the first port feeder 1, and the other end of the connecting microstrip line 3 communicates with the The second port feeder 2 is connected, the first open-loop resonator 4-1 and the second open-loop resonator 4-2 are distributed on both sides of the connecting microstrip line 3, the first input and output microstrip line group 5-1 and the second The two input-output microstrip line groups 5-2 are distributed on both sides of the microstrip line 3, and the first open-loop resonator 4-1 is opposite to the opening of the first input-output microstrip line group 5-1, and the second open-loop resonator 4-1 is opposite to the opening of the first input-output microstrip line group 5-1. The ring resonator 4-2 is opposite to the opening of the second input-output microstrip line group 5-2, and the connecting microstrip line 3 is parallel to the first open-loop resonator 4-1 and the second open-loop resonator 4-2 line coupling;

其中两个开环谐振器和两个输入输出微带线组的材质为金,采用磁控溅射工艺在第二开环谐振器4-2的表面沉积有二氧化硅层,在二氧化硅层表面修饰氨基,通过氨基键连羧基-DNA适配体,在第一开环谐振器4-1的表面修饰巯基-DNA适配体。The material of the two open-loop resonators and the two input-output microstrip line groups is gold, and a silicon dioxide layer is deposited on the surface of the second open-loop resonator 4-2 by using a magnetron sputtering process. Amino groups are modified on the surface of the layer, carboxyl-DNA aptamers are bonded through the amino groups, and mercapto-DNA aptamers are modified on the surface of the first ring-opening resonator 4-1.

本实施例在二氧化硅层表面修饰氨基是将溅射沉积有二氧化硅层的第二开环谐振器 4-2浸泡在硅烷偶联剂溶液中,再浸泡在羧基-DNA适配体溶液中。在第一开环谐振器4-1 的表面修饰巯基-DNA适配体是将第一开环谐振器4-1浸泡在巯基-DNA适配体溶液中。In this embodiment, the amino groups are modified on the surface of the silica layer by immersing the second ring-opening resonator 4-2 sputter-deposited with the silica layer in the silane coupling agent solution, and then soaking in the carboxyl-DNA aptamer solution middle. To modify the surface of the first ring-opening resonator 4-1 with the mercapto-DNA aptamer is to soak the first ring-opening resonator 4-1 in the mercapto-DNA aptamer solution.

本实施例中羧基-DNA适配体和巯基-DNA适配体均购买自北京赛百盛基因技术有限公司。Both the carboxyl-DNA aptamer and the thiol-DNA aptamer in this example were purchased from Beijing Saibaisheng Gene Technology Co., Ltd.

本实施例中敏感材料的修饰过程:The modification process of the sensitive material in this embodiment:

本实施例中的敏感材料选用的是乳腺癌与宫颈癌的DNA适配体,根据DNA的碱基互补配对原则实现微波传感器的特异性检测。适配体的表面定向修饰过程为:在二氧化硅表面修饰一层氨基,结合适配体端基的可修饰性,分别通过金巯键与酰胺键的作用将巯基 -DNA适配体固定在金表面,羧基-DNA适配体固定在氨基-二氧化硅表面,以提高整体检测灵敏度。在溶液中,分子间的范德华力作用导致巯基对金具有特殊的亲和力。因此,巯基修饰的DNA可定向修饰在Au表面,而羧基修饰的DNA由于缩合反应定向修饰在氨基化的二氧化硅表面。通过修饰材料的选择、修饰材料的浓度与修饰时间等因素的调节实现对谐振单元表面性能的调控。其中DNA适配体溶液浓度可根据DNA适配体的截面积大小与期望的器件表面覆盖率与器件表面积计算DNA适配体的摩尔数,具体计算公式如下:The sensitive material in this embodiment is the DNA aptamer of breast cancer and cervical cancer, and the specific detection of the microwave sensor is realized according to the principle of complementary base pairing of DNA. The surface-directed modification process of the aptamer is as follows: a layer of amino groups is modified on the surface of silica, combined with the modifiability of the end group of the suitable ligand, the sulfhydryl-DNA aptamer is immobilized on the gold surface through the action of the gold sulfhydryl bond and the amide bond, respectively. , the carboxy-DNA aptamer was immobilized on the amino-silica surface to improve the overall detection sensitivity. In solution, intermolecular van der Waals forces cause the sulfhydryl group to have a special affinity for gold. Therefore, sulfhydryl-modified DNA can be directional modified on the surface of Au, while carboxyl-modified DNA can be directional modified on the surface of aminated silica due to the condensation reaction. The surface properties of the resonant unit can be adjusted by adjusting the selection of the modification material, the concentration of the modification material, and the modification time. The concentration of the DNA aptamer solution can be calculated according to the cross-sectional area of the DNA aptamer, the expected device surface coverage and the device surface area to calculate the number of moles of the DNA aptamer. The specific calculation formula is as follows:

DNA数量(mol)=(器件表面积×预期覆盖率)/DNA适配体截面积。DNA amount (mol) = (device surface area × expected coverage) / cross-sectional area of DNA aptamer.

微波生物传感器的制造、封装和测试过程:Fabrication, packaging and testing process of microwave biosensor:

首先采用光刻、热蒸发等薄膜集成无源器件工艺,制备以金环为金属层的谐振单元,再通过磁控溅射工艺在金表面沉积二氧化硅。使用椭偏仪、台阶仪、AFM、SEM等半导体测量仪器对成品的物理尺寸、电磁参数、材料特性和表面形貌结构信息进行反馈。通过对蒸镀速率,旋转速度,补氧量等工艺流程进行调控,制备出均一、致密的异质谐振单元。有源反馈回路通过同轴电缆与传感器的SMA端口串联,补偿耗散的电磁功率。随后,在基板上贴敷粘性带,将待封装芯片以正面朝下倒扣放置在粘性带上;对封装芯片四周进行塑封,将芯片背面磨平,使芯片背面与塑封顶面平齐;去除基板和粘性带,形成芯片正面和背面均裸露、四周设有第一塑封的封装体。采用改进的开窗式QFN封装技术,将集成无源器件工艺制备的传感器以安全低成本的方式贴片键合到PCB板,芯片上下裸露的方式加大了芯片的散热面积,提高了组件及组件间的散热性能。Firstly, the thin-film integrated passive device technology such as photolithography and thermal evaporation is used to prepare the resonant unit with the gold ring as the metal layer, and then the silicon dioxide is deposited on the gold surface by the magnetron sputtering process. The physical size, electromagnetic parameters, material properties and surface topography and structure information of the finished product are fed back by using ellipsometer, proslometer, AFM, SEM and other semiconductor measuring instruments. By adjusting the evaporation rate, rotation speed, oxygen supply and other technological processes, a uniform and dense heterogeneous resonance unit is prepared. An active feedback loop is connected in series with the sensor's SMA port via a coaxial cable to compensate for dissipated electromagnetic power. Then, stick an adhesive tape on the substrate, place the chip to be packaged on the adhesive tape with the front facing down; plastic seal the packaged chip around it, and smooth the back of the chip so that the back of the chip is flush with the top surface of the plastic package; The substrate and the adhesive tape form a package with the front and back of the chip exposed and the surroundings provided with a first plastic seal. Using the improved window-opening QFN packaging technology, the sensor prepared by the integrated passive device process is bonded to the PCB board in a safe and low-cost way. The way of exposing the top and bottom of the chip increases the heat dissipation area of the chip and improves the components and Thermal performance between components.

本实施例多目标无标记癌症检测射频生物传感器主要包括异质双频微波谐振器、生物适配体表面修饰层和有源反馈放大电路,双频通过两个不同开环谐振器的尺寸控制,并采用开窗式无引脚一体化封装工艺。The multi-target radio frequency biosensor for label-free cancer detection in this embodiment mainly includes a heterogeneous dual-frequency microwave resonator, a biological aptamer surface modification layer and an active feedback amplifier circuit. The dual frequency is controlled by the size of two different open-loop resonators. And it adopts the window-type leadless integrated packaging process.

本发明设计的异质双频微波谐振器加工方法如图2。首先利用光刻、热蒸发等薄膜集成无源器件工艺,制备以金环为金属层的谐振单元,再通过磁控溅射、干法刻蚀等工艺在金表面沉积二氧化硅。随后,结合异质材料与适配体的可修饰性等优势,分别对谐振单元表面、适配体端基进行修饰,通过金巯键与酰胺键实现简便的、精确的和稳定的表面定向修饰,确保对多种适配体的高精准识别和检测,如图3。最后,使用椭偏仪、台阶仪、AFM、 SEM等半导体测量仪器对成品的物理尺寸、电磁参数、材料特性和表面形貌结构信息进行反馈,构建初步的器件实时反馈评价体系。通过对蒸镀速率,旋转速度,补氧量等工艺流程进行调控,制备出均一、致密的异质谐振单元。The processing method of the heterogeneous dual-frequency microwave resonator designed by the present invention is shown in Fig. 2 . Firstly, the resonant unit with the gold ring as the metal layer is prepared by thin-film integrated passive device technology such as photolithography and thermal evaporation, and then silicon dioxide is deposited on the gold surface by magnetron sputtering and dry etching. Subsequently, combined with the advantages of heterogeneous materials and aptamers' modifiability, the surface of the resonant unit and the end groups of the aptamers were respectively modified, and the simple, accurate and stable surface directional modification was realized through gold sulfhydryl bonds and amide bonds, ensuring High-precision identification and detection of various aptamers, as shown in Figure 3. Finally, the physical dimensions, electromagnetic parameters, material properties, and surface topography information of the finished product are fed back by semiconductor measuring instruments such as ellipsometers, profilometers, AFMs, and SEMs, and a preliminary real-time feedback evaluation system for devices is constructed. By adjusting the evaporation rate, rotation speed, oxygen supply and other technological processes, a uniform and dense heterogeneous resonance unit is prepared.

根据图4和图5可以看出,当测试液体中含有对应的待测DNA时,射频传感器谐振点的频率、幅值与相位随DNA浓度的变化。并且两个谐振点的变化范围不交叠,能清楚区分不同目标的变化。当谐振单元吸附适配体的含量变化时,传感器等效电路参数也会随之发生改变,导致传感器谐振频率、散射参数幅值、相位等参量发生改变。此外,本实施例将精准构建微波耦合馈电型开环谐振单元等效电路模型,并基于德拜方程修正现有的适配体介电常数张量解析模型,明确适配体介电常数张量随入射波强度、频率、适配体浓度变化的关系,进而构建适配体生物参量及介电常数张量、器件材料性质、结构参数与微波谐振器件多维电磁参数如谐振频率、散射参数幅值、相位等的标准函数映射模型,从而判断检测目标物的含量与种类。According to Fig. 4 and Fig. 5, it can be seen that when the test liquid contains the corresponding DNA to be tested, the frequency, amplitude and phase of the resonance point of the radio frequency sensor change with the DNA concentration. Moreover, the change ranges of the two resonance points do not overlap, and the changes of different targets can be clearly distinguished. When the content of the aptamer adsorbed by the resonant unit changes, the equivalent circuit parameters of the sensor will also change accordingly, resulting in changes in the resonant frequency of the sensor, the amplitude of the scattering parameters, and the phase. In addition, this embodiment will accurately construct the equivalent circuit model of the microwave-coupled feed type open-loop resonant unit, and based on the Debye equation, the existing analytical model of the dielectric constant tensor of the aptamer is corrected, and the dielectric constant tensor of the aptamer is clarified. Quantitative relationship with incident wave intensity, frequency, and aptamer concentration, and then construct aptamer biological parameters and dielectric constant tensors, device material properties, structural parameters, and multidimensional electromagnetic parameters of microwave resonator devices such as resonance frequency and scattering parameter amplitude The standard function mapping model of value, phase, etc., so as to judge the content and type of the detection target.

图6为加入有源反馈放大回路后的器件测试图。有源反馈回路通过同轴电缆与传感器的SMA端口串联,芯片通过带状键合或引线键合到QFN封装的金属引线。金属引线间距为0.5mm,QFN box的尺寸为4mm×4mm。该设计在保护器件的同时,方便后续实验测试,最终实现小型化和集成化的高品质因数射频生物传感器件。Fig. 6 is a device test diagram after adding an active feedback amplification loop. The active feedback loop is connected in series with the SMA port of the sensor via a coaxial cable, and the chip is ribbon bonded or wire bonded to the metal leads of the QFN package. The metal lead pitch is 0.5mm, and the size of the QFN box is 4mm×4mm. While protecting the device, the design facilitates subsequent experimental testing, and finally realizes a miniaturized and integrated radio frequency biosensor device with high quality factor.

基于以上说明,本发明的目的在于设计一款多目标、无标记、用于癌症检测的射频生物传感器,通过适配体表面定向修饰技术与有源/无源双反馈机制,实现特异性癌症标志物识别,能用于癌症早期的初筛检测。Based on the above description, the purpose of the present invention is to design a multi-target, label-free, radio frequency biosensor for cancer detection, through aptamer surface directional modification technology and active/passive double feedback mechanism, to achieve specific cancer markers Object recognition can be used for early screening of cancer.

Claims (10)

1. The radio frequency biosensor for detecting the multi-target unmarked cancer based on the heterogeneous resonance unit is characterized by comprising a substrate, a first port feeder line (1), a second port feeder line (2), a connecting microstrip line (3), two open-loop resonators and two input and output microstrip line groups, wherein the first port feeder line (1), the second port feeder line (2), the connecting microstrip line (3), the two open-loop resonators and the two input and output microstrip line groups are integrated on the substrate by adopting a thin film process, the first port feeder line (1), the second port feeder line (2) and the connecting microstrip line (3) are positioned on the axis of the substrate, one end of the connecting microstrip line (3) is communicated with the first port feeder line (1), the other end of the connecting microstrip line (3) is communicated with the second port feeder line (2), the first open-loop resonator (4-1) and the second open-loop resonator (4-2) are distributed on two sides of the connecting microstrip line (3), the first input and output microstrip line groups (5-1) and the second input and output microstrip lines (5-2) are distributed on two sides of the connecting microstrip line groups of the microstrip line (3), the first open-loop resonator (4-2) and the second open-2) are coupled oppositely, the connecting microstrip line (3) is coupled with the first open-loop resonator (4-1) and the second open-loop resonator (4-2) in parallel lines;
the two open-loop resonators and the two input and output microstrip line groups are made of gold, a silicon dioxide layer is deposited on the surface of the second open-loop resonator (4-2), amino groups are modified on the surface of the silicon dioxide layer, carboxyl-DNA aptamers are connected through amino bonds, and mercapto-DNA aptamers are modified on the surface of the first open-loop resonator (4-1).
2. The radio frequency biosensor for multi-target unmarked cancer detection based on heterogeneous resonance units as claimed in claim 1, wherein the first port feed line (1), the second port feed line (2), the connecting microstrip line (3), the two open-loop resonators and the two input and output microstrip line groups are integrated on the substrate by photolithography process.
3. The heterogeneous resonant cell-based multi-target label-free cancer detection radiofrequency biosensor of claim 1, wherein the substrate is a silicon substrate.
4. The radio frequency biosensor for detecting cancer without marking targets based on heterogeneous resonance units as claimed in claim 1, wherein the thickness of gold layer of two open-loop resonators and two input-output microstrip line groups is 100-300 nm.
5. The heterogeneous resonance unit based multiple target unmarked cancer detection radio frequency biosensor according to claim 1, wherein the openings of the first open loop resonator (4-1) and the second open loop resonator (4-2) are of pointed structure.
6. The heterogeneous resonance unit-based radio frequency biosensor for multi-target label-free cancer detection according to claim 1, wherein a silicon dioxide layer with a thickness of 50-100 nm is deposited on the surface of the second open-loop resonator (4-2) by magnetron sputtering process.
7. The heterogeneous resonance unit-based radio frequency biosensor for multi-target label-free cancer detection according to claim 1, wherein the surface of the silica layer is modified with amino groups by immersing the second open-loop resonator (4-2) with the silica layer in a silane coupling agent solution.
8. The heterogeneous resonance unit-based radio frequency biosensor for multi-target label-free cancer detection according to claim 1, wherein the surface modification of the thiol-DNA in the first open-loop resonator (4-1) is performed by soaking the first open-loop resonator 4-1 in a solution of thiol-DNA.
9. The heterogeneous resonance unit-based multi-target label-free cancer detection radio-frequency biosensor according to claim 1, wherein the input and output microstrip line set is connected to an active feedback circuit.
10. The heterogeneous resonance unit-based multi-target label-free cancer detection radio frequency biosensor of claim 1, wherein the heterogeneous resonance unit-based multi-target label-free cancer detection radio frequency biosensor is packaged using QFN process.
CN202210897319.3A 2022-07-28 2022-07-28 Multi-target unmarked cancer detection radio frequency biosensor based on heterogeneous resonance unit Pending CN115266766A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118874567A (en) * 2024-07-16 2024-11-01 山东大学 An integrated microwave-microfluidic chip and its preparation method and detection method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118874567A (en) * 2024-07-16 2024-11-01 山东大学 An integrated microwave-microfluidic chip and its preparation method and detection method

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