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CN115057703A - Composite ceramic composed of antiferroelectric and GaN semiconductor and preparation method thereof - Google Patents

Composite ceramic composed of antiferroelectric and GaN semiconductor and preparation method thereof Download PDF

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CN115057703A
CN115057703A CN202210696004.2A CN202210696004A CN115057703A CN 115057703 A CN115057703 A CN 115057703A CN 202210696004 A CN202210696004 A CN 202210696004A CN 115057703 A CN115057703 A CN 115057703A
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pnzst
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李玲
汪尧进
潘天泽
马家骏
戴雨鑫
王书豪
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Nanjing University of Science and Technology
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Abstract

The invention discloses a composite ceramic composed of antiferroelectric and GaN semiconductor, the structural formula of which is (1-x) PNZST: xGaN, wherein x is more than or equal to 0.01 and less than or equal to 0.10; the specific structural formula of PNZST is Pb 0.99 Nb 0.02 [(Zr 0.57 Sn 0.43 ) 1‑y Ti y ] 0.98 O 3 Y is more than or equal to 0.060 and less than or equal to 0.067. The composite material is prepared by a two-step solid phase sintering reaction method, the matrix material is converted from an antiferroelectric phase to a ferroelectric phase by adding the GaN, the composite material can generate ferroelectric-antiferroelectric phase change along with the change of temperature through temperature induction, and the higher polarization strength change rate is realized, so that the excellent pyroelectric performance is obtained. The new process develops a new material design idea for the development of pyroelectric materials and provides a new material design idea for the technical field of uncooled infrared detectionAnd (5) material foundation.

Description

一种反铁电体与GaN半导体组成的复合陶瓷及其制备方法A composite ceramic composed of antiferroelectric and GaN semiconductor and preparation method thereof

技术领域technical field

本发明涉及陶瓷材料技术领域,尤其是涉及一种反铁电体与GaN半导体组成的复合陶瓷及其制备方法。The invention relates to the technical field of ceramic materials, in particular to a composite ceramic composed of an antiferroelectric and a GaN semiconductor and a preparation method thereof.

背景技术Background technique

热释电探测器的主要作用就是可以探知环境温度的改变,所以可以用于夜晚观察和探测目标的辐射,由于该特性使得热释电探测器得到了广泛的关注,尤其是得到了军工部门的大力关注,使其运用于红外预警、红外成像等军事侦查领域。The main function of pyroelectric detectors is to detect changes in ambient temperature, so they can be used to observe and detect target radiation at night. Due to this feature, pyroelectric detectors have received extensive attention, especially by the military industry. Vigorously pay attention to make it used in military reconnaissance fields such as infrared early warning and infrared imaging.

现如今,各行各业都已经用上了热释电探测器,热释电成像技术更是一跃成为和雷达还有电视并称的三大传感系统之一。热释电器件最为核心的零件就是热释电材料,可以说热释电材料的发展直接影响着探测器的发展,所以探讨热释电材料的研究进展具有非常重要的意义。热释电探测器之所以能够探测,是靠热释电敏感单元的作用,所以敏感单元是探测器的核心部分,敏感单元的核心材料就是热释电材料。热释电的工作机理简单的解释就是热释电敏感材料对外界环境的感知(温度的变化),并产生相应的感应电荷,再经外部电路流出放大的过程。所以热释电材料的研究变得至关重要。热释电效应从微观层面来说就是材料的极化强度随着外界环境温度的变化而产生感应电荷,从宏观层面来说就是随着温度的变化而产生电流。Nowadays, pyroelectric detectors have been used in all walks of life, and pyroelectric imaging technology has become one of the three major sensing systems together with radar and TV. The core part of pyroelectric devices is pyroelectric materials. It can be said that the development of pyroelectric materials directly affects the development of detectors. Therefore, it is of great significance to discuss the research progress of pyroelectric materials. The reason why the pyroelectric detector can detect is by the function of the pyroelectric sensitive unit, so the sensitive unit is the core part of the detector, and the core material of the sensitive unit is the pyroelectric material. The simple explanation of the working mechanism of pyroelectricity is that the pyroelectric sensitive material senses the external environment (change in temperature), generates corresponding induced charges, and then flows out and amplifies through the external circuit. Therefore, the research of pyroelectric materials becomes crucial. From the microscopic level, the pyroelectric effect is that the polarization intensity of the material generates an induced charge with the change of the external ambient temperature, and from the macroscopic level, it generates an electric current with the change of the temperature.

目前,热释电材料主要可分为单晶材料(如LiTaO3、SBN、LiNbO3、KTN等);复合材料及有机聚合物(如PVDF、PVF、PVDF-PZT等);压电陶瓷材料(如BaTiO3、ZnO、PMN、PLZT、PbTiO3、PZT等)。单晶热释电材料探测优质高,晶体易于生长,热扩散系数小,介电常数小,其缺点是易受潮分解,需密封好,加工和使用均不方便,工艺过程复杂;复合材料及高分子有机聚合物居里温度高,物化性能稳定,热导率小,易于加工,适合制作大面积电子器件,其缺点是热释电系数低,强度比较低,与微电子技术兼容差。At present, pyroelectric materials can be mainly divided into single crystal materials (such as LiTaO 3 , SBN, LiNbO 3 , KTN, etc.); composite materials and organic polymers (such as PVDF, PVF, PVDF-PZT, etc.); piezoelectric ceramic materials ( Such as BaTiO 3 , ZnO, PMN, PLZT, PbTiO 3 , PZT, etc.). Single-crystal pyroelectric materials have high detection quality, easy crystal growth, small thermal diffusivity, and low dielectric constant. The disadvantages are that they are easily decomposed by moisture, need to be well sealed, are inconvenient to process and use, and have complex process; composite materials and high Molecular organic polymers have high Curie temperature, stable physicochemical properties, low thermal conductivity, and easy processing. They are suitable for making large-area electronic devices. Their disadvantages are low pyroelectric coefficient, relatively low strength, and poor compatibility with microelectronics technology.

压电陶瓷材料尤其是PZT基陶瓷的热释电性能和居里温度适中,相比于单晶材料来说,制备工艺简单,生产成本低,因此是热释电领域的热门材料。Piezoelectric ceramic materials, especially PZT-based ceramics, have moderate pyroelectric properties and Curie temperature. Compared with single crystal materials, the preparation process is simple and the production cost is low, so they are popular materials in the field of pyroelectricity.

发明内容SUMMARY OF THE INVENTION

针对现有技术存在的上述问题,本发明提供了一种反铁电体与GaN半导体组成的复合陶瓷及其制备方法。本发明复合陶瓷在室温可以获得超高的热释电系数p。In view of the above problems existing in the prior art, the present invention provides a composite ceramic composed of an antiferroelectric and a GaN semiconductor and a preparation method thereof. The composite ceramic of the present invention can obtain an ultra-high pyroelectric coefficient p at room temperature.

本发明的技术方案如下:The technical scheme of the present invention is as follows:

一种反铁电体与GaN半导体组成的0-3型复合陶瓷,所述复合陶瓷的结构式为(1-x)PNZST:xGaN,其中0.01≤x≤0.10;A 0-3 type composite ceramic composed of an antiferroelectric and a GaN semiconductor, the structural formula of the composite ceramic is (1-x)PNZST:xGaN, wherein 0.01≤x≤0.10;

PNZST为反铁电体的简写,具体结构式为Pb0.99Nb0.02[(Zr0.57Sn0.43)1-yTiy]0.98O3,0.060≤y≤0.067。PNZST is an abbreviation for antiferroelectric, and its specific structural formula is Pb 0.99 Nb 0.02 [(Zr 0.57 Sn 0.43 ) 1-y Ti y ] 0.98 O 3 , 0.060≤y≤0.067.

一种反铁电体与GaN半导体组成的复合陶瓷的制备方法,采用二步固相法的制备工艺,第一步为制备结构稳定的PNZST陶瓷粉体,第二步为引入GaN,与PNZST形成复合陶瓷。A preparation method of a composite ceramic composed of an antiferroelectric and a GaN semiconductor adopts a preparation process of a two-step solid-phase method. Composite ceramics.

所述制备方法包括如下步骤:The preparation method comprises the following steps:

(1)制备PNZST粉体:(1) Preparation of PNZST powder:

Pb0.99Nb0.02[(Zr0.57Sn0.43)1-yTiy]0.98O3,0.060≤y≤0.067,按照元素计量比称量原料PbO、TiO2、ZrO2、Nb2O5和SnO2,再球磨,烘干后煅烧,将煅烧后的粉体再次进行高温预烧结,再次球磨、烘干,获得所述PNZST粉体;Pb 0.99 Nb 0.02 [(Zr 0.57 Sn 0.43 ) 1-y Ti y ] 0.98 O 3 , 0.060≤y≤0.067, weigh the raw materials PbO, TiO 2 , ZrO 2 , Nb 2 O 5 and SnO 2 according to the element stoichiometric ratio, ball-milling, drying and then calcining, pre-sintering the calcined powder at high temperature again, ball-milling and drying again to obtain the PNZST powder;

再次进行高温预烧结可以提高PNZST的相稳定性;High temperature pre-sintering can improve the phase stability of PNZST;

(2)引入GaN半导体,与PNZST形成复合陶瓷:(2) Introducing GaN semiconductors to form composite ceramics with PNZST:

根据化学式(1-x)PNZST:xGaN,0.01≤x≤0.10,分别称量步骤(1)制得的PNZST粉末和GaN纳米粉体,球磨处理使其混合均匀,混匀后的粉末经干燥处理后压制成型,并置于坩埚中快速高温烧结,获得所述复合陶瓷。According to the chemical formula (1-x) PNZST:xGaN, 0.01≤x≤0.10, the PNZST powder and GaN nano-powder obtained in step (1) were weighed respectively, and the powder was uniformly mixed by ball milling, and the mixed powder was dried. The composite ceramic is obtained by post-press molding, and then placed in a crucible for rapid high-temperature sintering.

步骤(1)中,球磨是在无水乙醇中球磨12h。In step (1), ball milling is performed in absolute ethanol for 12 hours.

步骤(1)中,煅烧的条件为850~900℃下煅烧4~5h;高温预烧结的条件为1200~1300℃下预烧结2~4h。In step (1), the calcination conditions are calcination at 850-900° C. for 4-5 hours; the high-temperature pre-sintering conditions are pre-sintering at 1200-1300° C. for 2-4 hours.

步骤(2)中,快速高温烧结时的升降温速率为9-10℃/min,烧结的条件为1000~1100℃下烧结0.5~1h。In step (2), the temperature rise and fall rate during rapid high temperature sintering is 9-10°C/min, and the sintering condition is sintering at 1000-1100°C for 0.5-1 h.

步骤(2)中,GaN纳米粉体粒径为30~50nm。In step (2), the particle size of the GaN nano-powder is 30-50 nm.

步骤(2)中,混匀后的粉末中还掺入黏结剂PVA,压制成型,坯体在650℃排胶。In step (2), the mixed powder is also mixed with a binder PVA, and is pressed and formed, and the green body is debonded at 650°C.

本发明有益的技术效果在于:The beneficial technical effects of the present invention are:

本发明复合陶瓷中GaN分布在反铁电PNZST的晶界位置,由于两相之间热膨胀系数失陪而产生局域应力场,实现了反铁电相向铁电相转变。在室温附近构建了铁电/反铁电相界,在温度驱动下,获得超高的热释电系数p,而达到优异的热释电性能。The GaN in the composite ceramic of the invention is distributed at the grain boundary position of the antiferroelectric PNZST, and a local stress field is generated due to the mismatch of thermal expansion coefficients between the two phases, and the transition from the antiferroelectric phase to the ferroelectric phase is realized. A ferroelectric/antiferroelectric phase boundary was constructed near room temperature, and an ultra-high pyroelectric coefficient p was obtained under the drive of temperature, resulting in excellent pyroelectric performance.

本发明复合陶瓷的制备方法简便、效率高,期间无复杂工艺和昂贵的设备,成本较低;与传统的基于同类材料的固溶体相比,本发明利用GaN的加入,构建铁电/反铁电相界,降低极化翻转的势垒,促进极化转向而增强热释电效应,为热释电红外传感器提供材料基础和物理基础。The preparation method of the composite ceramic of the present invention is simple and efficient, without complicated processes and expensive equipment, and the cost is low; compared with the traditional solid solution based on similar materials, the present invention utilizes the addition of GaN to construct ferroelectric/antiferroelectric The phase boundary reduces the potential barrier of polarization reversal, promotes polarization reversal and enhances the pyroelectric effect, providing material and physical basis for pyroelectric infrared sensors.

附图说明Description of drawings

图1为本发明实施例1所得复合陶瓷样品的铁电回线。FIG. 1 is the ferroelectric loop of the composite ceramic sample obtained in Example 1 of the present invention.

图2为本发明实施例1所得复合陶瓷样品随温度变化的热释电系数值。FIG. 2 is the pyroelectric coefficient value of the composite ceramic sample obtained in Example 1 of the present invention as a function of temperature.

具体实施方式Detailed ways

下面结合附图和实施例,对本发明进行具体描述。The present invention will be described in detail below with reference to the accompanying drawings and embodiments.

实施例1:Example 1:

一种反铁电体与GaN半导体形成0-3型复合陶瓷,所述复合陶瓷的化学式为0.99Pb0.99Nb0.02[(Zr0.57Sn0.43)0.937Ti0.063]0.98O3:0.01GaN,其制备方法为:An antiferroelectric and a GaN semiconductor form a 0-3 type composite ceramic, the chemical formula of the composite ceramic is 0.99Pb 0.99 Nb 0.02 [(Zr 0.57 Sn 0.43 ) 0.937 Ti 0.063 ] 0.98 O 3 :0.01GaN, and a preparation method thereof for:

(1)以分析纯PbO(99.99%),TiO2(99.5%),ZrO2(99.99%),Nb2O5(99.9%),SnO2(99.5%)为原料,按照元素化学计量比,称量27.0843g的PbO,0.5977g的TiO2,7.7403g的ZrO2,0.3193g的Nb2O5,7.1768g的SnO2,在无水乙醇中球磨12h以使原料充分混合均匀,烘干后,在900℃下煅烧4h,将煅烧得到的PNZST粉体在1250℃预烧结3h,再次球磨12h使粉体磨细,烘干,获得纯钙钛矿相结构PNZST粉体。(1) Using analytically pure PbO (99.99%), TiO 2 (99.5%), ZrO 2 (99.99%), Nb 2 O 5 (99.9%), SnO 2 (99.5%) as raw materials, according to the element stoichiometric ratio, Weigh 27.0843g of PbO, 0.5977g of TiO 2 , 7.7403g of ZrO 2 , 0.3193g of Nb 2 O 5 , 7.1768g of SnO 2 , ball-milled in absolute ethanol for 12 hours to make the raw materials fully mixed, and dried. , calcined at 900°C for 4h, pre-sintered the calcined PNZST powder at 1250°C for 3h, ball milled again for 12h to make the powder finely ground, and dried to obtain a pure perovskite phase structure PNZST powder.

(2)根据化学式0.99PNZST:0.01GaN分别称量29.9282g步骤(1)获得的PNZST粉体和0.0718g GaN纳米粉体(粒径为30nm),球磨12h,烘干,掺入黏结剂PVA,压制成型,坯体在650℃排胶后,以每分钟9℃快速升温至1050℃烧结,保温1h,同样以每分钟9℃快速降温至室温,制得所述复合陶瓷,该结构致密性良好。(2) According to the chemical formula 0.99PNZST:0.01GaN, 29.9282g of the PNZST powder obtained in step (1) and 0.0718g of GaN nano-powder (particle size: 30nm) were respectively weighed, ball milled for 12h, dried, mixed with the binder PVA, Press molding, after the green body is degummed at 650 °C, it is rapidly heated to 1050 °C for sintering at 9 °C per minute, and kept for 1 hour, and also rapidly cooled to room temperature at 9 °C per minute to obtain the composite ceramic. The structure has good compactness .

实施例2:Example 2:

一种反铁电体与GaN半导体形成0-3型复合陶瓷,所述复合陶瓷的化学式为0.97Pb0.99Nb0.02[(Zr0.57Sn0.43)0.937Ti0.063]0.98O3:0.03GaN,其制备方法参照实施例1;其中,PNZST粉体煅烧温度为850℃保温5h,预烧温度为1200℃,保温4h,0.97PNZST:0.03GaN复相陶瓷中PNZST的质量为29.7813g,GaN纳米粉体(粒径为40nm)的质量为0.2187g,烧结温度为1030℃,保温1h。An antiferroelectric and a GaN semiconductor form a 0-3 type composite ceramic, the chemical formula of the composite ceramic is 0.97Pb 0.99 Nb 0.02 [(Zr 0.57 Sn 0.43 ) 0.937 Ti 0.063 ] 0.98 O 3 :0.03GaN, and a preparation method thereof Refer to Example 1; wherein, the calcination temperature of PNZST powder is 850°C for 5h, the pre-sintering temperature is 1200°C, and the temperature is kept for 4h. The mass is 0.2187g, the sintering temperature is 1030°C, and the temperature is kept for 1h.

实施例3:Example 3:

一种反铁电体与GaN半导体形成0-3型复合陶瓷,所述复合陶瓷的化学式为0.90Pb0.99Nb0.02[(Zr0.57Sn0.43)0.937Ti0.063]0.98O3:0.10GaN,其制备方法参照实施例1;其中,PNZST粉体煅烧温度为870℃,保温4h,预烧温度为1230℃,保温3h,0.90PNZST:0.10GaN复相陶瓷中PNZST的质量为29.2287g,GaN纳米粉体(粒径为50nm)的质量为0.7713g,烧结温度为1020℃,保温1h。An antiferroelectric and a GaN semiconductor form a 0-3 type composite ceramic, the chemical formula of the composite ceramic is 0.90Pb 0.99 Nb 0.02 [(Zr 0.57 Sn 0.43 ) 0.937 Ti 0.063 ] 0.98 O 3 : 0.10GaN, and a preparation method thereof Refer to Example 1; wherein, the calcination temperature of PNZST powder is 870°C, the temperature is kept for 4h, the pre-sintering temperature is 1230°C, and the temperature is kept for 3h. The mass of the particle size is 50nm) is 0.7713g, the sintering temperature is 1020°C, and the temperature is kept for 1h.

测试例:Test case:

采用热释电测试仪对实施例1-3所得复合陶瓷进行性能测试,测试结果如表1所示。The performance of the composite ceramics obtained in Examples 1-3 was tested by a pyroelectric tester, and the test results are shown in Table 1.

表1Table 1

Figure BDA0003702544130000041
Figure BDA0003702544130000041

由表1数据可以看出,随着半导体GaN的加入,实现了基体材料从反铁电相转变为铁电相,通过温度诱导,复合材料会随着温度的变化而发生铁电-反铁电相变,而实现较大的极化强度变化率,从而获得优异的热释电性能;随着半导体GaN含量的增多,铁电-反铁电相变温度增加,则热释电性能温度稳定性提高。From the data in Table 1, it can be seen that with the addition of the semiconductor GaN, the matrix material is transformed from the antiferroelectric phase to the ferroelectric phase. Through temperature induction, the composite material will undergo ferroelectric-antiferroelectricity with the change of temperature. phase transition, and achieve a large polarization change rate, thereby obtaining excellent pyroelectric performance; with the increase of semiconductor GaN content, the ferroelectric-antiferroelectric phase transition temperature increases, and the temperature stability of pyroelectric performance improve.

Claims (7)

1. The composite ceramic composed of the antiferroelectric and the GaN semiconductor is characterized in that the structural formula of the composite ceramic is (1-x) PNZST: xGaN, wherein x is more than or equal to 0.01 and less than or equal to 0.10;
PNZST is a abbreviation of antiferroelectric, and the specific structural formula is Pb 0.99 Nb 0.02 [(Zr 0.57 Sn 0.43 ) 1-y Ti y ] 0.98 O 3 ,0.060≤y≤0.067。
2. A method for preparing a composite ceramic composed of the antiferroelectric and the GaN semiconductor according to claim 1, wherein the method comprises the steps of:
(1) preparing PNZST powder:
Pb 0.99 Nb 0.02 [(Zr 0.57 Sn 0.43 ) 1-y Ti y ] 0.98 O 3 y is more than or equal to 0.060 and less than or equal to 0.067, and raw materials PbO and TiO are weighed according to the element metering ratio 2 、ZrO 2 、Nb 2 O 5 And SnO 2 Then ball milling, drying and calcining, performing high-temperature presintering on the calcined powder again, and performing ball milling and drying again to obtain PNZST powder;
(2) introducing a GaN semiconductor to form a composite ceramic with PNZST:
and (2) respectively weighing the PNZST powder and the GaN nano powder prepared in the step (1) according to a chemical formula (1-x) PNZST: xGaN, wherein x is more than or equal to 0.01 and less than or equal to 0.10, performing ball milling treatment to uniformly mix the powder and the GaN nano powder, drying the uniformly mixed powder, performing compression molding, placing the powder in a crucible, and performing rapid high-temperature sintering to obtain the composite ceramic.
3. The preparation method according to claim 2, wherein in the step (1), the ball milling is performed in absolute ethyl alcohol for 12 hours.
4. The preparation method according to claim 2, wherein in the step (1), the calcination is performed at 850-900 ℃ for 4-5 h; the high-temperature presintering condition is presintering for 2-4 h at 1200-1300 ℃.
5. The preparation method according to claim 2, wherein in the step (2), the temperature rise and fall rate during the rapid high-temperature sintering is 9-10 ℃/min, and the sintering condition is 1000-1100 ℃ for 0.5-1 h.
6. The preparation method according to claim 2, wherein in the step (2), the particle size of the GaN nano powder is 30-50 nm.
7. The preparation method according to claim 2, wherein in the step (2), the adhesive PVA is further added into the uniformly mixed powder, the mixture is pressed and formed, and the blank is subjected to binder removal at 650 ℃.
CN202210696004.2A 2022-06-20 2022-06-20 Composite ceramic composed of antiferroelectric and GaN semiconductor and preparation method thereof Pending CN115057703A (en)

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