CN115055814A - Workpiece five-axis adjustment frame, five-axis motion device, laser processing system and method - Google Patents
Workpiece five-axis adjustment frame, five-axis motion device, laser processing system and method Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
- B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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Abstract
Description
技术领域technical field
本发明属于激光加工领域,更具体地,涉及工件五轴调整架、五轴运动装置、激光加工系统和方法。The invention belongs to the field of laser processing, and more particularly, relates to a five-axis adjustment frame of a workpiece, a five-axis motion device, and a laser processing system and method.
背景技术Background technique
随着全球工业加工制造技术的不断发展,各领域对材料加工的需求从二维平面向三维曲面发展,诸如球面、圆柱面、圆锥面等回转曲面的加工,往往采用两种方式:With the continuous development of global industrial processing and manufacturing technology, the demand for material processing in various fields has developed from two-dimensional planes to three-dimensional curved surfaces. The processing of revolving surfaces such as spherical surfaces, cylindrical surfaces, and conical surfaces often adopts two methods:
一是传统的机械加工特制掩膜和离子腐蚀的方式,在工件待加工曲面上刻蚀出应用所需的图形。这种加工方式的缺点在于,图形的加工精度取决于掩膜的加工精度,而掩膜材料往往较薄,容易变形,且具有图形参数难以控制、加工时间长、对刀具要求高等缺点。One is the traditional method of machining a special mask and ion etching, and etching the pattern required for the application on the surface of the workpiece to be processed. The disadvantage of this processing method is that the processing accuracy of the graphics depends on the processing accuracy of the mask, and the mask material is often thin and easily deformed, and has the disadvantages of difficult to control graphics parameters, long processing time, and high requirements for tools.
二是利用激光方法对工件待加工曲面进行刻蚀,通常可以利用振镜进行二维平面内的精准扫描,而通过工件或激光光束的位移调控,使激光束在工件上的聚焦位置形成三维的扫描,则可以实现对曲面的加工,但这种方式也存在焦平面的变化导致光斑分布不均匀、振镜偏转导致光束未严格垂直加工表面等缺点。The second is to use the laser method to etch the surface of the workpiece to be processed. Usually, a galvanometer can be used to perform precise scanning in a two-dimensional plane, and through the displacement control of the workpiece or the laser beam, the focus position of the laser beam on the workpiece forms a three-dimensional shape. Scanning can realize the processing of curved surfaces, but this method also has disadvantages such as uneven distribution of light spots due to changes in the focal plane, and that the beam is not strictly vertical to the surface due to the deflection of the galvanometer.
专利CN103266323A公开了一种用于具有曲面结构的金属制品表面蚀刻加工方法,先将金属制品平面部分和曲面部分进行掩膜处理,平面部分的掩膜间隙均匀一致,曲面部分掩膜间隙从平面与曲面的结合处到曲面的边缘处逐渐增大,再采用耐腐蚀遮挡物沿与金属制品平面平行的方向将金属制品的曲面部分遮挡,然后进行蚀刻加工。该蚀刻加工方法过程繁琐,初次蚀刻之后还需要进行脱膜、再次刻蚀、浸泡、清洗等后续处理过程,且所用的蚀刻液、耐腐胶、清洗液等均属于化学制品,对环境会有一定的污染。由于加工图形是通过蚀刻液与金属表面的化学反应形成的,存在着不可控性,需要被加工的区域可能由于化学反应的不充分性未被刻蚀,或是不需要加工的区域可能受化学反应的影响受到刻蚀,其蚀刻加工效果会受到一定的影响。Patent CN103266323A discloses a method for etching the surface of metal products with a curved surface structure. First, the flat part and the curved part of the metal product are masked, the mask gap of the flat part is uniform, and the mask gap of the curved part is from the plane to the surface. The junction of the curved surface gradually increases to the edge of the curved surface, and then a corrosion-resistant shield is used to block the curved surface part of the metal product along the direction parallel to the plane of the metal product, and then the etching process is performed. This etching processing method has a cumbersome process. After the initial etching, follow-up processes such as stripping, re-etching, soaking, and cleaning are required, and the etching solution, anti-corrosion glue, cleaning solution, etc. used are all chemical products, which may have adverse effects on the environment. certain pollution. Since the processing pattern is formed by the chemical reaction between the etching solution and the metal surface, there is uncontrollability. The area that needs to be processed may not be etched due to the insufficiency of the chemical reaction, or the area that does not need to be processed may be affected by chemical reactions. The effect of the reaction is affected by etching, and its etching processing effect will be affected to a certain extent.
专利CN109940270A公开了一种七轴五联动超快激光加工系统,该方法将待加工工件置于旋转台上,通过对工件进行结构光的投影和拍照反馈,进而修改光路偏折,再利用振镜对工件进行扫描,该方法实现曲面加工的原理是通过旋转台调整工件的位置,再利用振镜进行小扫场范围内的平面扫描,实际上是将曲面分割成了细小的平面,曲面连续性不高。且通过结构光拍照反馈计算机,修改光路,实际上仍会造成一定程度的聚焦不均匀。Patent CN109940270A discloses a seven-axis five-linkage ultrafast laser processing system. The method places the workpiece to be processed on a rotary table, and then modifies the deflection of the optical path by projecting structured light and taking pictures of the workpiece, and then using the galvanometer. Scan the workpiece. The principle of this method to realize the surface processing is to adjust the position of the workpiece through the rotary table, and then use the galvanometer to scan the plane within the small scanning field. In fact, the curved surface is divided into small planes, and the surface is continuous. not tall. And through structured light photography feedback to the computer, modifying the optical path, in fact, will still cause a certain degree of uneven focus.
专利CN112475591A公开了一种双摆头式五轴联动激光加工机床以及工作方法,利用两个旋转台实现工件的曲面加工,其中一个旋转台用来固定和旋转工件,以使工件得到周向的扫描,另一个旋转台和Z轴位移机构联动,通过激光头的摆动实现激光的曲面扫描。该方法理论上可保证激光焦点实时处于待加工曲面上,但由于Z轴位移机构的限制,无法提高扫描的速度,且联动扫描前需要进行标定,双旋转台与工件之间的同轴度也难以保证。Patent CN112475591A discloses a double swing head type five-axis linkage laser processing machine tool and a working method, using two rotary tables to realize the surface processing of the workpiece, one of which is used to fix and rotate the workpiece, so that the workpiece can be scanned in the circumferential direction , another rotary table is linked with the Z-axis displacement mechanism, and the laser surface scanning is realized by the swing of the laser head. This method can theoretically ensure that the laser focus is on the surface to be processed in real time, but due to the limitation of the Z-axis displacement mechanism, the scanning speed cannot be increased, and calibration needs to be performed before the linkage scanning, and the coaxiality between the dual rotary table and the workpiece is also Hard to guarantee.
专利CN206561203U公开了适用于头盔加工的五轴激光切割装置,先将工件放置在物料台面上进行定位,再对工件进行三维空间的预扫描,通过算法形成加工路径。工件的旋转通过物料台的平移和转动实现,工件表面的曲面扫描通过激光束的摆角头和Z轴位移机构实现。该方法理论上可实现激光焦点实时处于待加工曲面上,但实际操作较为复杂,预扫描影响了加工的效率和精度,物料台的平移和转动限制了加工的速度,且工件表面曲率中心和激光束的同轴情况难以保证。Patent CN206561203U discloses a five-axis laser cutting device suitable for helmet processing. First, the workpiece is placed on the material table for positioning, and then the workpiece is pre-scanned in three-dimensional space, and the processing path is formed through an algorithm. The rotation of the workpiece is realized by the translation and rotation of the material table, and the curved surface scanning of the workpiece surface is realized by the swing angle head of the laser beam and the Z-axis displacement mechanism. This method can theoretically realize that the laser focus can be placed on the surface to be processed in real time, but the actual operation is more complicated. Pre-scanning affects the efficiency and accuracy of processing. The translation and rotation of the material table limit the processing speed. The coaxiality of the beam is difficult to guarantee.
专利CN210817953U公开了一种基于扫描振镜的五轴激光微加工装置,将工件固定于一个旋转台上,同时通过另一个旋转台实现正交平面上的转动。当双旋转台协同作用时,可以通过振镜实现较为复杂的曲面加工。该方法利用双旋转台使工件具有两个正交的旋转自由度,理论上可以实现高效、较高精度的曲面加工。但不足之处在于,缺少特定的装置,使双旋转台转轴、工件曲率中心、激光光轴达到高精度的契合,当多轴协同运动时,微小的同轴误差将被放大,从而影响着加工的精度。Patent CN210817953U discloses a five-axis laser micro-machining device based on a scanning galvanometer. The workpiece is fixed on a rotary table, and at the same time, the rotation on an orthogonal plane is realized by another rotary table. When the double rotary tables work together, more complex curved surface processing can be achieved through the galvanometer. The method utilizes the double rotary table to make the workpiece have two orthogonal rotational degrees of freedom, which can theoretically realize high-efficiency and high-precision curved surface machining. However, the disadvantage is that there is a lack of specific devices, so that the rotation axis of the double rotary table, the center of curvature of the workpiece, and the laser optical axis can achieve a high-precision fit. accuracy.
上述公开的曲面成型装置及其表面刻蚀存在的问题有:The problems of the above-disclosed curved surface forming device and its surface etching are:
1、使用传统的机械加工特制掩膜和离子腐蚀方法能够制作的曲面结构有限,每制作一个曲面结构就需要制作相应的模具,过程繁琐,成本较高,对于一些复杂的曲面结构,其模具的加工难度系数较高,不易制作。当利用化学药品进行金属表面刻蚀时,由于化学反应的不确定性和不定向性,刻蚀区域和刻蚀深度不可操控,会使加工质量严重下降,且该刻蚀方法针对体积较小曲面金属材料来讲,掩膜处理的难度大大增加,化学药品容易从样品需刻蚀区域流出,致使样品被破坏。1. The surface structure that can be made by the traditional machining special mask and ion etching method is limited. Every time a surface structure is made, a corresponding mold needs to be made. The process is cumbersome and the cost is high. For some complex surface structures, the mold's The processing difficulty coefficient is high, and it is not easy to make. When using chemicals to etch metal surfaces, due to the uncertainty and non-directionality of chemical reactions, the etched area and etched depth cannot be controlled, which will seriously degrade the processing quality, and this etching method is suitable for small curved surfaces For metal materials, the difficulty of mask processing is greatly increased, and chemicals are easy to flow out from the area to be etched in the sample, resulting in damage to the sample.
2、使用振镜扫描的激光刻蚀方式加工表面的质量不理想。为了提高加工效率,目前大多数采用振镜扫描的方式,但曲面结构其形状为非平面,则激光作用的每片区域的焦点存在一定的差别,致使作用区域表面材料吸收激光的能量不同,其刻蚀效果会有所不同,刻蚀质量下降。对于激光振镜扫描方式刻蚀加工的装置,若要获得较好的刻蚀效果,则加工的金属表面形状需为平面结构,这就导致了刻蚀加工能力的局限性。2. The quality of the surface processed by the laser etching method scanned by the galvanometer is not ideal. In order to improve the processing efficiency, most of the current methods use galvanometer scanning, but the shape of the curved surface structure is non-planar, so there is a certain difference in the focus of each area affected by the laser, resulting in different absorption of laser energy by the surface material in the active area. The etching effect will be different, and the etching quality will be degraded. For a device that is etched and processed by a laser galvanometer scanning method, in order to obtain a better etching effect, the shape of the processed metal surface needs to be a planar structure, which leads to the limitation of the etching processing capability.
3、使用旋转台和位移机构联动的激光刻蚀方式效率较低。对于工件在竖直平面内的曲面面型加工,目前存在利用旋转台和激光束构建摆角头,然后和Z轴位移机构联动的方式。Z轴位移机构向下移动时摆角头向上摆动,可以对曲面进行扫描加工。然而,这种方式的加工效率受限于Z轴位移机构的移动速度,且在加工前需要进行较为复杂的标定或预扫描。3. The laser etching method using the linkage of the rotary table and the displacement mechanism is less efficient. For the curved surface machining of the workpiece in the vertical plane, there is currently a way of using a rotary table and a laser beam to construct a swivel head, and then linking it with the Z-axis displacement mechanism. When the Z-axis displacement mechanism moves down, the swivel head swings upward, and the curved surface can be scanned and processed. However, the processing efficiency of this method is limited by the moving speed of the Z-axis displacement mechanism, and more complex calibration or pre-scanning is required before processing.
4、使用双旋转台控制工件多自由度旋转的激光刻蚀方式难以保证定位的准确性。这种方式实际上利用了待加工工件的回转特性,通过工件旋转而激光光路固定的方式实现激光在工件曲面的实时聚焦。由于激光光路固定,则只需使工件的旋转中心和激光束同轴,即可保证激光束时刻垂直于待加工平面,获得高质量的聚焦效果。然而,多轴协同运动时,微小的同轴误差将被放大,这种加工方式需要保证双旋转台转轴、工件曲率中心、激光光轴达到高精度的契合。4. It is difficult to ensure the accuracy of positioning by the laser etching method that uses dual rotary tables to control the multi-degree-of-freedom rotation of the workpiece. This method actually utilizes the rotation characteristics of the workpiece to be processed, and realizes the real-time focusing of the laser on the surface of the workpiece through the rotation of the workpiece and the fixed laser optical path. Since the laser optical path is fixed, it is only necessary to make the rotation center of the workpiece and the laser beam coaxial to ensure that the laser beam is always perpendicular to the plane to be processed, and high-quality focusing effect can be obtained. However, when the multi-axis moves in coordination, the small coaxial error will be amplified. This processing method needs to ensure the high-precision fit between the rotation axis of the double turntable, the center of curvature of the workpiece, and the laser optical axis.
综上所述,亟需一种针对回转曲面工件进行刻蚀的激光加工方法与装置,其具有加工精度高、加工效率快、加工质量好等优点。To sum up, there is an urgent need for a laser processing method and device for etching a workpiece with a curved surface of revolution, which has the advantages of high processing accuracy, fast processing efficiency, and good processing quality.
发明内容SUMMARY OF THE INVENTION
针对现有技术的缺陷,本发明的目的在于提供工件五轴调整架、五轴运动装置、激光加工系统和方法,旨在解决现有加工方法多轴协同运动难以保证定位准确性、蚀刻效率低的问题。In view of the defects of the prior art, the purpose of the present invention is to provide a workpiece five-axis adjustment frame, a five-axis motion device, a laser processing system and method, and aims to solve the problem that the multi-axis coordinated movement of the existing processing method is difficult to ensure the positioning accuracy and the etching efficiency is low. The problem.
为实现上述目的,第一方面,本发明提供了一种工件五轴调整架,包括:上层件、下层件、定位盘、角度调节单元、位移调节单元和连接单元;In order to achieve the above object, in the first aspect, the present invention provides a five-axis adjustment frame for a workpiece, which includes: an upper part, a lower part, a positioning plate, an angle adjustment unit, a displacement adjustment unit and a connection unit;
所述上层件中间设有凹槽;A groove is arranged in the middle of the upper layer piece;
所述定位盘为上端面设有固定件的圆台,所述固定件用于固定待加工工件;The positioning plate is a circular platform with a fixing member on the upper end surface, and the fixing member is used for fixing the workpiece to be processed;
所述上层件和下层件之间弹性连接,且中间留有间隙,从而形成安装腔;The upper layer part and the lower layer part are elastically connected, and a gap is left in the middle, so as to form an installation cavity;
所述定位盘设于安装腔内,且底面与凹槽的槽表面贴合;The positioning plate is arranged in the installation cavity, and the bottom surface is fitted with the groove surface of the groove;
所述角度调节单元,贯穿上层件表面且抵在下层件上表面,用于调节上层件在空间中的俯仰角度;The angle adjustment unit penetrates through the surface of the upper layer and abuts on the upper surface of the lower layer, and is used to adjust the pitch angle of the upper layer in space;
所述位移调节单元,贯穿上层件侧面且抵在定位盘的圆台上,用于调节定位圆台在空间中的相对位置;The displacement adjusting unit penetrates through the side surface of the upper layer and abuts on the circular platform of the positioning plate, and is used to adjust the relative position of the positioning circular platform in space;
所述连接单元,贯穿下层件表面,用于固定下层件和B轴旋转台。The connecting unit penetrates through the surface of the lower layer and is used for fixing the lower layer and the B-axis rotary table.
优选地,所述角度调节单元和所述位移调节单元均为N个螺丝,N≥3。Preferably, both the angle adjustment unit and the displacement adjustment unit have N screws, and N≥3.
需要说明的是,本发明通过多个螺丝调节角度或者位移,可通过微调螺丝的旋转角度,调整其步进距离,步进幅度可至亚微米级别,从而极为精确地调节定位盘的俯仰角度和位移距离。It should be noted that the present invention adjusts the angle or displacement through a plurality of screws, and can adjust the stepping distance by fine-tuning the rotation angle of the screws, and the stepping amplitude can reach the sub-micron level, so that the pitch angle and displacement distance.
优选地,所述N个螺丝等间隔均匀分布。Preferably, the N screws are evenly distributed at equal intervals.
需要说明的是,本发明优选等间隔均匀分布,可使每次调节的权重相同,从而尽可能地减小调节的次数,同时,等间隔均匀分布可提升器件的稳定性,延长其使用寿命。It should be noted that the present invention preferably distributes evenly at equal intervals, so that the weight of each adjustment can be the same, thereby reducing the number of adjustments as much as possible.
优选地,所述工件五轴调整架的角度调节范围在0°到30°之间。Preferably, the angle adjustment range of the five-axis adjustment frame of the workpiece is between 0° and 30°.
优选地,所述工件五轴调整架的位移调节范围在0.0001mm到10mm之间。Preferably, the displacement adjustment range of the workpiece five-axis adjustment frame is between 0.0001mm and 10mm.
优选地,所述定位盘的固定件侧面设有紧固螺丝。Preferably, fastening screws are provided on the side of the fixing member of the positioning plate.
需要说明的是,固定件侧面设有紧固螺丝,可以适应不同尺寸的工件,进行不同深度的固定。It should be noted that there are fastening screws on the side of the fixing piece, which can adapt to workpieces of different sizes and fix at different depths.
优选地,所述上层件和下层件之间通过插销和弹簧,实现弹性连接,弹簧两端分别穿过上层件和下层件上的通孔,通孔处有放置插销的插销卡槽,插销用于使弹簧保持一定压缩或伸长状态。Preferably, the upper part and the lower part are elastically connected by a plug and a spring, and the two ends of the spring pass through the through holes on the upper part and the lower part respectively, and there is a plug slot for placing the plug in the through hole. To keep the spring in a certain state of compression or extension.
为实现上述目的,第二方面,本发明提供了一种五轴运动装置,包括:如第一方面所述的工件五轴调整架、A轴旋转台、旋转台连接件、B轴旋转台、XY轴二维直线位移平台;In order to achieve the above purpose, in the second aspect, the present invention provides a five-axis motion device, comprising: the workpiece five-axis adjustment frame described in the first aspect, an A-axis rotary table, a rotary table connector, a B-axis rotary table, XY axis two-dimensional linear displacement platform;
所述工件五轴调整架的下层件和B轴旋转台固定;The lower part of the five-axis adjustment frame of the workpiece is fixed with the B-axis rotary table;
所述B轴旋转台,用于带动下层件绕垂直于竖直平面的B轴旋转;The B-axis rotary table is used to drive the lower part to rotate around the B-axis perpendicular to the vertical plane;
所述A轴旋转台,用于带动旋转台连接件绕垂直于水平面的A轴旋转,所述A轴与Z轴方向平行;The A-axis rotary table is used to drive the rotary table connector to rotate around the A-axis perpendicular to the horizontal plane, and the A-axis is parallel to the Z-axis direction;
A轴旋转台、B轴旋转台通过旋转台连接件正交连接,使两个旋转台的旋转中心线在空间上重合于一点;The A-axis rotary table and the B-axis rotary table are orthogonally connected by the rotary table connector, so that the rotation center lines of the two rotary tables overlap at one point in space;
A轴旋转台固定在XY轴二维直线位移平台上;The A-axis rotary table is fixed on the XY-axis two-dimensional linear displacement platform;
所述XY轴二维直线位移平台,用于带动A轴旋转台在空间内做平移。The XY-axis two-dimensional linear displacement platform is used to drive the A-axis rotary table to translate in space.
为实现上述目的,第三方面,本发明提供了一种五轴激光加工系统,包括:第二方面所述的五轴运动装置、激光光源、激光扩束镜、固定反射镜、可升降反射镜、激光聚焦镜、CCD相机、接触式位移传感器、Z轴直线位移平台和控制器;In order to achieve the above object, in a third aspect, the present invention provides a five-axis laser processing system, including: the five-axis motion device described in the second aspect, a laser light source, a laser beam expander, a fixed reflector, and a liftable reflector , laser focusing mirror, CCD camera, contact displacement sensor, Z-axis linear displacement platform and controller;
所述激光光源,用于产生进入激光扩束镜的激光;the laser light source for generating laser light entering the laser beam expander;
所述激光扩束镜,用于获得更小的光斑尺寸;The laser beam expander is used to obtain a smaller spot size;
所述固定反射镜、可升降反射镜用于偏折调整光路;The fixed reflector and the liftable reflector are used to deflect and adjust the light path;
所述激光聚焦镜,用于将光斑聚焦于待加工工件的表面;The laser focusing mirror is used to focus the light spot on the surface of the workpiece to be processed;
所述CCD相机,位于和激光聚焦镜相同的Z轴直线位移平台上,用于寻找激光聚焦焦点的空间位置;The CCD camera is located on the same Z-axis linear displacement platform as the laser focusing mirror, and is used to find the spatial position of the laser focusing focus;
所述接触式位移传感器,位于和激光聚焦镜相同的Z轴直线位移平台上,用于对旋转台连接件的侧表面进行测定;The contact displacement sensor is located on the same Z-axis linear displacement platform as the laser focusing mirror, and is used to measure the side surface of the connecting piece of the rotary table;
所述Z轴直线位移平台,用于带动固定在Z轴直线位移平台上的激光聚焦镜在空间内做上下平移运动;The Z-axis linear displacement platform is used to drive the laser focusing mirror fixed on the Z-axis linear displacement platform to move up and down in space;
所述控制器,用于控制CCD相机、接触式位移传感器接进行定位,控制A轴旋转台和B轴旋转台、XY轴二维直线位移平台、Z轴直线位移平台进行运动,控制激光光源的激光参数的调节。The controller is used to control the CCD camera and the contact displacement sensor for positioning, control the A-axis rotary table and the B-axis rotary table, the XY-axis two-dimensional linear displacement platform, and the Z-axis linear displacement platform to move, and control the laser light source. Adjustment of laser parameters.
为实现上述目的,第四方面,本发明提供了一种如第三方面的五轴激光加工系统的加工方法,所述待加工工件为具有回转中心的曲面工件,通过工件五轴调整架固定在B轴旋转台上,该方法包括:In order to achieve the above object, in the fourth aspect, the present invention provides a processing method for a five-axis laser processing system as in the third aspect, wherein the workpiece to be processed is a curved workpiece with a center of rotation, and is fixed on the workpiece by a five-axis adjustment frame of the workpiece. On the B-axis rotary table, the method includes:
S1.将球轴和B轴旋转台的转轴调整至同轴:S1. Adjust the ball axis and the rotation axis of the B-axis rotary table to be coaxial:
转动A轴旋转台,确保旋转台连接件的侧表面与接触式位移传感器的探头垂直;Rotate the A-axis rotary table to ensure that the side surface of the rotary table connector is perpendicular to the probe of the contact displacement sensor;
将接触式位移传感器的探头置于待加工工件的根部,旋转B轴旋转台,读取此时接触式位移传感器示数;Place the probe of the contact displacement sensor at the root of the workpiece to be processed, rotate the B-axis rotary table, and read the indication of the contact displacement sensor at this time;
调节工件五轴调整架的位移调节单元对定位盘进行位移调整,直至B轴旋转台旋转时,接触式位移传感器示数保持不变;Adjust the displacement adjustment unit of the five-axis adjustment frame of the workpiece to adjust the displacement of the positioning plate, until the B-axis rotary table rotates, the contact displacement sensor display remains unchanged;
将接触式位移传感器的探头置于待加工工件的表面,旋转B轴旋转台,读取此时接触式位移传感器示数;Place the probe of the contact displacement sensor on the surface of the workpiece to be processed, rotate the B-axis rotary table, and read the indication of the contact displacement sensor at this time;
通过工件五轴调整架的角度调节单元对定位盘进行倾斜角度调整,直至B轴旋转台旋转时,接触式位移传感器示数保持不变;Adjust the inclination angle of the positioning plate through the angle adjustment unit of the five-axis adjustment frame of the workpiece, until the B-axis rotary table rotates, the indication of the contact displacement sensor remains unchanged;
不断重复上述两个步骤,直至待加工工件根部和表面的调节精度都达到设定阈值,则停止;Repeat the above two steps continuously until the adjustment accuracy of the root and surface of the workpiece to be processed reaches the set threshold, then stop;
S2.将球心和A轴旋转台与B轴旋转台的交点调节至同心:S2. Adjust the center of the ball and the intersection of the A-axis rotary table and the B-axis rotary table to be concentric:
将接触式位移传感器的探头置于待加工工件的表面,读取此时接触式位移传感器的示数;Place the probe of the contact displacement sensor on the surface of the workpiece to be processed, and read the indication of the contact displacement sensor at this time;
通过调节工件五轴调整架的位移调节单元对工件五轴调整架进行整体的前后平移,直至A轴旋转台旋转90度时,接触式位移传感器示数保持不变;By adjusting the displacement adjustment unit of the five-axis adjustment frame of the workpiece, the entire five-axis adjustment frame of the workpiece is translated back and forth as a whole, until the A-axis rotary table rotates 90 degrees, the indication of the contact displacement sensor remains unchanged;
S3.根据待加工工件表面待加工的图形,计算出连续工作状态下A轴旋转台、B轴旋转台需要旋转的角度,从而在球面高速、精准地刻蚀出待加工的图形。S3. According to the graphics to be processed on the surface of the workpiece to be processed, calculate the angle at which the A-axis rotary table and the B-axis rotary table need to be rotated under continuous working conditions, so as to etch the graphics to be processed on the spherical surface at high speed and accurately.
总体而言,通过本发明所构思的以上技术方案与现有技术相比,具有以下有益效果:In general, compared with the prior art, the above technical solutions conceived by the present invention have the following beneficial effects:
(1)本发明提出一种工件五轴调整架,通过旋转位于五轴调整架上的调节单元,给予定位盘不同方向的力的作用,从而改变固定在五轴调整架上工件的俯仰角度和空间位置,实现对工件的高精度位姿调整,从而使得双旋转台转轴、工件曲率中心、激光光轴达到高精度的契合。(1) The present invention proposes a five-axis adjustment frame for the workpiece. By rotating the adjustment unit located on the five-axis adjustment frame, forces in different directions are given to the positioning plate, thereby changing the pitch angle and the pitch angle of the workpiece fixed on the five-axis adjustment frame. The spatial position of the workpiece can be adjusted with high precision, so that the rotation axis of the double turntable, the center of curvature of the workpiece, and the laser optical axis can achieve a high-precision fit.
(2)本发明提出一种五轴运动装置,通过A轴旋转台、B轴旋转台协同控制,利用待加工工件的回转特性,采用激光焦点位置固定不动,工件高速高精度旋转的加工方式,加工过程中无需控制Z轴的升降,且消除了光路扫描变化带来的聚焦精度误差,由于五轴调整架可对工件进行高精度的同轴、同心调节,可实现工件旋转时仍保持高质量的聚焦效果。(2) The present invention proposes a five-axis motion device, which is controlled by the A-axis rotary table and the B-axis rotary table, using the rotation characteristics of the workpiece to be processed, and adopts a processing method in which the laser focus position is fixed, and the workpiece rotates at high speed and high precision. , there is no need to control the lifting and lowering of the Z axis during the processing, and the focusing accuracy error caused by the change of the optical path scanning is eliminated. Since the five-axis adjustment frame can perform high-precision coaxial and concentric adjustment of the workpiece, the workpiece can still be kept high when it rotates. quality focus.
(3)本发明提出一种五轴激光加工系统,通过激光扩束镜、固定反射镜、可升降反射镜将激光沿水平方向聚焦于空间中一点,并通过调节Z轴直线位移平台,调整可升降反射镜和激光聚焦镜,从而调整激光在Z轴方向上的聚焦位置。通过位于和激光聚焦镜相同的Z轴直线位移平台上的CCD相机,寻找激光聚焦焦点的空间位置坐标,该坐标即为工件待加工表面需要调整至的位置坐标;通过位于和激光聚焦镜相同的Z轴直线位移平台上的接触式位移传感器,和本发明所提出的工件五轴调整架进行配合,对工件的同轴、同心精度进行测定和调整,从而实现空间聚焦位置和工件待加工表面的高精度重合。(3) The present invention proposes a five-axis laser processing system, which uses a laser beam expander, a fixed reflector, and a liftable reflector to focus the laser on a point in space along the horizontal direction, and adjusts the Z-axis linear displacement platform to adjust the Lift the mirror and the laser focusing mirror to adjust the focusing position of the laser in the Z-axis direction. Through the CCD camera located on the same Z-axis linear displacement platform as the laser focusing mirror, find the spatial position coordinates of the laser focusing focus, which are the position coordinates to which the workpiece surface to be processed needs to be adjusted; The contact displacement sensor on the Z-axis linear displacement platform cooperates with the five-axis adjustment frame of the workpiece proposed by the present invention to measure and adjust the coaxial and concentric accuracy of the workpiece, so as to realize the spatial focus position and the workpiece surface to be processed. High precision coincidence.
(4)本发明提出五轴激光加工系统的加工方法,通过五轴调整架对待加工工件的空间位姿调节,可将任意具有回转中心的曲面工件调整至待加工位置,使其具备的一个或多个旋转轴与A轴旋转台转轴、B轴旋转台转轴中的一个或多个同轴,从而通过A轴旋转台、B轴旋转台带动工件进行空间旋转,其旋转角度和速度由待加工图形决定,实现在工件表面高精度、高速度地加工出所设定的图形。(4) The present invention proposes a processing method for a five-axis laser processing system. By adjusting the spatial pose of the workpiece to be processed by the five-axis adjustment frame, any curved workpiece with a center of rotation can be adjusted to the position to be processed, so that it has one or more of the workpieces to be processed. Multiple rotating shafts are coaxial with one or more of the rotating shafts of the A-axis rotary table and the B-axis rotary table, so as to drive the workpiece to rotate in space through the A-axis rotary table and the B-axis rotary table, and its rotation angle and speed are determined by the to-be-processed The pattern is determined, and the set pattern can be machined on the workpiece surface with high precision and high speed.
附图说明Description of drawings
图1为本发明提供的一种五轴激光加工系统示意图。FIG. 1 is a schematic diagram of a five-axis laser processing system provided by the present invention.
图2为本发明提供的工件五轴调整架结构示意图。FIG. 2 is a schematic structural diagram of the workpiece five-axis adjustment frame provided by the present invention.
图3为本发明提供的工件五轴调整架工作示意图。FIG. 3 is a working schematic diagram of the five-axis adjustment frame of the workpiece provided by the present invention.
图4为本发明提供的工件表面激光刻蚀路径示意图。FIG. 4 is a schematic diagram of a laser etching path on the surface of a workpiece provided by the present invention.
在所有附图中,相同的附图标记用来表示相同的元件或结构,其中:Throughout the drawings, the same reference numbers are used to refer to the same elements or structures, wherein:
1-1:激光光源,1-2:激光扩束镜,1-3:固定反射镜,1-4:可升降反射镜,1-5:激光聚焦镜,2-1:CCD相机,2-2:接触式位移传感器,3:工件五轴调整架,4-1:A轴旋转台,4-2:旋转台连接件,4-3:B轴旋转台,5-1:XY轴二维直线位移平台,5-2:Z轴直线位移平台,6:相关控制系统,7:待加工工件,3-1:定位盘,3-2:固定件,3-3:紧固螺丝,3-4、3-7、3-10:螺纹孔,3-6、3-9、3-12:第一螺丝,3-5、3-8、3-11:第二螺丝,3-13:上层件,3-14:下层件。1-1: Laser light source, 1-2: Laser beam expander, 1-3: Fixed mirror, 1-4: Liftable mirror, 1-5: Laser focusing mirror, 2-1: CCD camera, 2- 2: Contact displacement sensor, 3: Workpiece five-axis adjustment frame, 4-1: A-axis rotary table, 4-2: rotary table connector, 4-3: B-axis rotary table, 5-1: XY-axis two-dimensional Linear displacement platform, 5-2: Z-axis linear displacement platform, 6: Related control system, 7: Workpiece to be processed, 3-1: Positioning plate, 3-2: Fixing piece, 3-3: Fastening screw, 3- 4, 3-7, 3-10: threaded holes, 3-6, 3-9, 3-12: first screw, 3-5, 3-8, 3-11: second screw, 3-13: upper layer Pieces, 3-14: Lower Pieces.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅用以解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
图1为本发明提供的一种五轴激光加工系统示意图。如图1所示,该加工系统包括:激光光源1-1、激光扩束镜1-2、固定反射镜1-3、可升降反射镜1-4、激光聚焦镜1-5、CCD相机2-1、定位传感器2-2、工件五轴调整架3、A轴旋转台4-1、旋转台连接件4-2、B轴旋转台4-3、XY轴二维直线位移平台5-1、Z轴直线位移平台5-2、相关控制系统6和待加工工件7。FIG. 1 is a schematic diagram of a five-axis laser processing system provided by the present invention. As shown in Figure 1, the processing system includes: a laser light source 1-1, a laser beam expander 1-2, a fixed mirror 1-3, a liftable mirror 1-4, a laser focusing mirror 1-5, and a CCD camera 2 -1. Positioning sensor 2-2, workpiece five-
所述激光光源1-1,用于产生激光。所述激光扩束镜1-2,用于获得更小的光斑尺寸。所述固定反射镜1-3、可升降反射镜1-4,用于偏折调整光路。所述激光聚焦镜1-5,用于将光斑聚焦于待加工工件7的表面。光斑聚焦于空间中一点,通过激光作用于导电玻璃,并在CCD相机、定位传感器的辅助下,得到激光焦点在空间中的三维位置。The laser light source 1-1 is used to generate laser light. The laser beam expander 1-2 is used to obtain a smaller spot size. The fixed reflector 1-3 and the liftable reflector 1-4 are used to deflect and adjust the optical path. The laser focusing mirrors 1-5 are used to focus the light spot on the surface of the
所述CCD相机2-1,用于确定空间中焦平面的准确位置及辅助工件定位,所述定位传感器2-2,用于检测系统加工前的定位精度和同轴精度。The CCD camera 2-1 is used to determine the exact position of the focal plane in space and to assist the positioning of the workpiece, and the positioning sensor 2-2 is used to detect the positioning accuracy and coaxial accuracy before the system is processed.
所述工件五轴调整架3,用于精密调节待加工工件7和B轴旋转台4-3、A轴旋转台4-1的空间位置关系。The workpiece five-
所述B轴旋转台4-3、A轴旋转台4-1,用于控制待加工工件7的刻蚀路径。The B-axis rotary table 4-3 and the A-axis rotary table 4-1 are used to control the etching path of the
所述XY轴二维直线位移平台5-1,用于控制待加工工件7的平面移动,所述Z轴直线位移平台5-2用于改变定位传感器2-2、激光聚焦镜1-5、CCD相机2-1与待加工工件7的相对位置。The XY-axis two-dimensional linear displacement platform 5-1 is used to control the plane movement of the
所述待加工工件7用于加工。所述相关控制系统6,用于控制激光光源1-1、定位传感器2-2、Z轴直线位移平台5-2、CCD相机2-1、B轴旋转台4-3、A轴旋转台4-1,XY轴二维直线位移平台5-1协同工作。The
图2为本发明提供的工件五轴调整架结构示意图。其中,(a)为俯视图,(b)为侧视图,(c)为爆炸视图。如图2所示,所述工件五轴调整架3为双层结构,其下层件3-14可通过三个贯穿调整架的螺纹孔3-4、3-7、3-10固定在B轴旋转台4-3上,上层件3-13具有安装工件的定位盘3-1,定位盘3-1上有固定件3-2和紧固螺丝3-3,可用以固定多种类型的待加工工件7,工件五轴调整架3的上下两层紧密相连可同轴旋转,通过工件五轴调整架3的联结,可即时向待加工工件7传递B轴旋转台4-3的运动控制。工件五轴调整架3的上下两层之间为空气层,留有空间供调节上下层的空间相对位置。FIG. 2 is a schematic structural diagram of the workpiece five-axis adjustment frame provided by the present invention. Among them, (a) is a top view, (b) is a side view, and (c) is an exploded view. As shown in FIG. 2 , the workpiece five-
进一步地,工件五轴调整架3的上层件3-13具有六个可用于调节工件位移和角度的螺丝,其中,螺丝3-5、螺丝3-8、螺丝3-11位于调整架的圆盘表面,可用于调控工件倾斜角度;螺丝3-6、螺丝3-9、螺丝3-12位于调整架的侧圆柱面,可用于调控工件位移。当待加工工件7通过定位盘3-1安装在工件五轴调整架3上时,可以通过上述零部件对待加工工件7进行位姿的调整,从而实现待加工工件7在A、B轴方向的回转轴分别与A轴旋转台4-1、B轴旋转台4-3高精度同轴。Further, the upper part 3-13 of the workpiece five-
图3为本发明提供的工件五轴调整架工作示意图。本发明适用于可旋转的工件,本实施例以球轴工件为例,进一步说明工件五轴调整架3的工作原理。待加工工件的球轴通过工件五轴调整架固定在B轴旋转台上,若需要保证待加工球体在旋转过程中,激光光轴时刻垂直于球面指向球心,此时需要进行的同轴同心调节有二:将球轴和B轴旋转台的转轴调整至同轴、将球心和A轴旋转台与B轴旋转台的交点调节至同心。FIG. 3 is a working schematic diagram of the five-axis adjustment frame of the workpiece provided by the present invention. The present invention is applicable to rotatable workpieces. In this embodiment, a ball shaft workpiece is taken as an example to further illustrate the working principle of the workpiece five-
如图3中(a)-(b)所示,当待加工工件7通过工件五轴调整架3固定在B轴旋转台4-3上之后,首先使用定位传感器2-2对B轴旋转台4-3的侧表面进行测定,通过转动A轴旋转台4-1,确保B轴旋转台4-3的侧表面与定位传感器2-2的探头垂直。As shown in (a)-(b) of Figure 3, after the
如图3中(c)-(d)所示,将定位传感器2-2的探头置于待加工工件7的根部,旋转B轴旋转台4-3,读取示数,并通过螺丝3-6、螺丝3-9、螺丝3-12对工件五轴调整架3进行位移调整,直至B轴旋转台4-3旋转时,定位传感器2-2示数保持不变,表明工件轴线与转台轴线在工件根部处相交。As shown in (c)-(d) of Figure 3, place the probe of the positioning sensor 2-2 at the root of the
如图3中(e)-(f)所示,将定位传感器2-2的探头置于待加工工件7的球面,旋转B轴旋转台4-3,读取示数,并通过螺丝3-5、螺丝3-8、螺丝3-11对工件五轴调整架3进行倾斜角度调整,直至B轴旋转台4-3旋转时,定位传感器2-2示数保持不变,表明工件轴线与转台轴线在工件顶部处相交,此时工件轴线与转台轴线完全重合。As shown in (e)-(f) of Figure 3, place the probe of the positioning sensor 2-2 on the spherical surface of the
在实际的调节过程中,上述对球轴根部的调节和对球轴上部的调节会相互影响,不断重复上述两个步骤,可将误差不断减小,直至球轴根部和球轴上部的调节精度都达到10μm以下,此时可以认为球轴和B轴旋转台的转轴已调整至同轴状态。下面将球心和A轴旋转台与B轴旋转台的交点调节至同心。In the actual adjustment process, the above adjustment of the root of the ball shaft and the adjustment of the upper part of the ball shaft will affect each other. Repeating the above two steps continuously can reduce the error continuously until the adjustment accuracy of the root of the ball shaft and the upper part of the ball shaft It can be considered that the ball axis and the rotation axis of the B-axis rotary table have been adjusted to the coaxial state at this time. Next, adjust the center of the ball and the intersection of the A-axis rotary table and the B-axis rotary table to be concentric.
如图3中(g)-(h)所示,定位传感器2-2的探头置于待加工工件7的球面,将A轴旋转台4-1旋转90度,读取两次定位传感器2-2的示数,并通过螺丝3-5、螺丝3-8、螺丝3-11对工件五轴调整架3进行整体的前后平移,直至A轴旋转台4-1旋转时,定位传感器2-2示数保持不变,表明A轴的旋转轴与工件的球心重合。As shown in (g)-(h) in Figure 3, the probe of the positioning sensor 2-2 is placed on the spherical surface of the
上述实例可简单说明工件五轴调整架3的工作原理,在实际的加工过程中,其适用对象包括但不仅限于球轴工件,还包括待加工表面为圆锥面、圆柱面或其它各种具有回转中心的曲面工件,任何基于此发明所适用的对待加工工件7进行的位移、倾斜角度等调整,均属于本发明保护的范围。The above example can briefly illustrate the working principle of the workpiece five-
图4为本发明提供的工件表面激光刻蚀路径示意图。如图4所示,以球轴工件为例,激光由激光聚焦镜1-5聚焦于待加工工件7表面,待加工工件7由A轴旋转台4-1、B轴旋转台4-3控制,可实现工件绕A轴、B轴旋转,激光由A轴、B轴分别产生的刻蚀路径为曲线,通过二轴的协同运动,实现激光在待加工工件7的表面刻蚀出曲面图形。FIG. 4 is a schematic diagram of a laser etching path on the surface of a workpiece provided by the present invention. As shown in Fig. 4, taking the spherical shaft workpiece as an example, the laser is focused on the surface of the
后续的加工步骤为:通过XY轴二维直线位移平台带动双转台工件(A轴旋转台和B轴旋转台)旋转装置及工件移动至所记录的激光焦点在空间中的三维位置;所述激光聚焦系统和其前置的可升降反射镜固定在Z轴直线位移平台上,可在加工前对光路进行Z轴方向上的移动。加工过程中,激光光路固定不动,其空间聚焦位置已在加工前对准工件表面,通过双转台工件旋转装置带动待加工工件运动,使待加工工件与激光焦点产生相对运动,从而获得激光曲面路径所刻蚀出的图形。The subsequent processing steps are: driving the double turntable workpiece (A-axis rotary table and B-axis rotary table) rotating device and the workpiece to move to the recorded three-dimensional position of the laser focus in space through the XY-axis two-dimensional linear displacement platform; the laser The focusing system and its front liftable mirror are fixed on the Z-axis linear displacement platform, which can move the optical path in the Z-axis direction before processing. During the processing, the laser light path is fixed, and its spatial focus position has been aligned with the surface of the workpiece before processing. The workpiece to be processed is driven to move by the double turntable workpiece rotating device, so that the workpiece to be processed and the laser focus move relative to each other, thereby obtaining a laser curved surface. The pattern etched by the path.
回转曲面工件激光刻蚀加工过程如下:利用激光光束整形和聚焦装置的激光扩束镜和聚焦镜组,在聚焦镜组后工作距约3mm到10mm内获得聚焦光斑的大致位置,光斑直径约为0.5μm-50μm。聚焦完成后,通过CCD相机对预扫描光斑进行准确测量,确定并记录空间中焦点的准确位置;将工件固定于B轴旋转台的工件五轴调整架上,通过同轴心定位装置的定位传感器对B轴旋转台转轴、工件曲率中心、激光光轴的同轴情况进行测量,并通过工件五轴调整架的螺丝进行工件位移和角度的调节,调节后再次通过定位传感器进行测量,重复此步骤,直至定位精度调整至10μm以下。调整完成后,使用XY轴二维直线位移平台移动安装有待加工工件的双转台工件旋转装置,使工件表面位于记录好的焦点位置;通过待加工图形设定双旋转台的运动路径,从而使工件运动时,激光束在曲面工件的待加工表面刻蚀出预设的图形。The laser etching process of the surface of revolution workpiece is as follows: Using the laser beam expander and focusing lens group of the laser beam shaping and focusing device, the approximate position of the focusing spot is obtained within the working distance of about 3mm to 10mm behind the focusing lens group, and the spot diameter is about 0.5μm-50μm. After the focusing is completed, the pre-scanned light spot is accurately measured by the CCD camera to determine and record the exact position of the focus in space; the workpiece is fixed on the five-axis adjustment frame of the workpiece on the B-axis rotary table, and the positioning sensor of the coaxial positioning device is used. Measure the coaxial condition of the rotation axis of the B-axis rotary table, the center of curvature of the workpiece, and the laser optical axis, and adjust the workpiece displacement and angle through the screws of the five-axis adjustment frame of the workpiece. After adjustment, use the positioning sensor to measure again, and repeat this step. , until the positioning accuracy is adjusted to less than 10μm. After the adjustment is completed, use the XY axis two-dimensional linear displacement platform to move and install the double turntable workpiece rotation device with the workpiece to be processed, so that the workpiece surface is located at the recorded focus position; set the movement path of the double turntable through the to-be-processed graphics, so that the workpiece can be During movement, the laser beam etches a preset pattern on the surface to be machined of the curved workpiece.
本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。Those skilled in the art can easily understand that the above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, etc., All should be included within the protection scope of the present invention.
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