CN114923448B - Detection device for light-emitting diode wafer - Google Patents
Detection device for light-emitting diode wafer Download PDFInfo
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- CN114923448B CN114923448B CN202210491579.0A CN202210491579A CN114923448B CN 114923448 B CN114923448 B CN 114923448B CN 202210491579 A CN202210491579 A CN 202210491579A CN 114923448 B CN114923448 B CN 114923448B
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- 238000001514 detection method Methods 0.000 title claims abstract description 61
- 235000012431 wafers Nutrition 0.000 claims description 37
- 238000013016 damping Methods 0.000 claims description 20
- 230000000694 effects Effects 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims description 2
- 238000001125 extrusion Methods 0.000 abstract description 4
- 239000000306 component Substances 0.000 description 10
- 238000007789 sealing Methods 0.000 description 10
- 230000009471 action Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a detection device for a light-emitting diode wafer, which comprises a detection table, a detection module and a detection module, wherein the detection table is of a hollow structure and is used for providing a support platform for the light-emitting diode wafer to be detected; the pre-positioning assembly is arranged in the detection table and is used for concentrically pre-clamping the light-emitting diode wafer; the flexible positioning assembly is arranged in the detection table and is used for concentrically positioning and clamping the light-emitting diode wafer in a flexible mode; a main drive assembly. According to the invention, through the cavity formed by the air to the rubber strip and the air bag, the air pressure in the air bag is increased and expanded, so that the air bag is expanded and drives the rubber strip to bend towards the middle part of the detection table, and further the rubber strip bends and drives the light-emitting diode wafer to move to the center position of the top of the detection table in a flexible manner, thereby realizing automatic positioning of the light-emitting diode wafer and avoiding extrusion damage of the light-emitting diode wafer.
Description
Technical Field
The invention relates to the technical field of wafer detection, in particular to a detection device for a light-emitting diode wafer.
Background
The light emitting diode wafer is a semiconductor light emitting component formed by semiconductor substances, is a main raw material of an LED, is a light emitting core component of the LED, and is required to detect parameters such as brightness, voltage, wavelength, length, thickness, width and the like of the semiconductor wafer in the production and manufacturing process of the light emitting diode wafer.
However, in the prior art, when the light-emitting diode wafer detection device is actually used, the light-emitting diode wafer is manually centered on the detection table for position adjustment, so that the use convenience of detecting the thickness of the light-emitting diode wafer is reduced, and meanwhile, the risk of extrusion damage to the light-emitting diode wafer is easily caused due to the structure of automatically adjusting the position of the light-emitting diode wafer.
Disclosure of Invention
The present invention is directed to a device for inspecting a light emitting diode wafer, so as to solve the above-mentioned problems in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions: comprising the following steps:
the detection platform is of a hollow structure and is used for providing a support platform for the light-emitting diode wafer to be detected;
the pre-positioning assembly is arranged in the detection table and is used for concentrically pre-clamping the light-emitting diode wafer;
the flexible positioning assembly is arranged in the detection table and is used for concentrically positioning and clamping the light-emitting diode wafer in a flexible mode;
the main driving assembly is fixedly arranged in the detection table and used for driving the pre-positioning assembly and the flexible positioning assembly to work.
Preferably, the main driving assembly comprises a driving air cylinder, the driving air cylinder is fixedly connected to the bottom of the inner wall of the detection table, an output shaft of the driving air cylinder is fixedly connected with a driving frame, one end, away from the driving air cylinder, of the driving frame is of an open frame-shaped structure, and the middle part of the top of the detection table is of a protruding structure.
Preferably, the preset component comprises a fixed shaft, the fixed shaft is fixedly connected to the bottom of the inner wall of the detection table, the surface of the fixed shaft is rotationally connected with a rotation connecting seat, a groove is formed in the surface of the rotation connecting seat, the inner wall of the groove is hinged with a hinge arm, one end, away from the position of the rotation connecting seat, of the hinge arm is hinged with a movable seat, the number of the hinge arms is three, and the three hinge arms are annularly arranged on the surface of the rotation connecting seat.
Preferably, the bottom fixedly connected with installation piece of movable seat, the inner wall swing joint of installation piece has the slider, and slider fixed connection is in the bottom of detecting the platform inner wall, the top fixedly connected with guide rail of movable seat, the top of guide rail is fixed and is equipped with the first clamping component that is used for the preset position to the emitting diode wafer.
Preferably, the first clamping assembly comprises a fixing rod, the fixing rod is fixedly connected to the top of the guide rail, a movable sleeve is movably connected to the surface of the fixing rod, a fixing block is fixedly connected to the top of the fixing rod and movably connected to the inner wall of the movable sleeve, a first damping spring is fixedly connected to the bottom of the fixing block and fixedly connected to the bottom of the inner wall of the movable sleeve, the opening diameter of the bottom of the movable sleeve is smaller than that of the bottom of the fixing block, one end of the driving frame, away from the driving cylinder, is rotatably connected to the middle of one movable seat, a rubber layer is fixedly connected to the surface of the movable sleeve, a first movable groove is formed in the top of the corresponding movable sleeve of the detection table, and the inner wall of the first movable groove is movably connected with the surface of the movable sleeve.
Preferably, the flexible positioning assembly comprises a mounting plate, mounting plate fixed connection is at the one end inner wall of the corresponding drive cylinder position of drive frame, the one end fixedly connected with bellows of drive cylinder position is kept away from to the mounting plate, the one end fixedly connected with fixed plate of mounting plate position is kept away from to the bellows, and fixed plate fixed connection is at the top of fixed axle, the fixed pipe of fixed plate's fixed surface fixedly connected with, the through-hole has been seted up at the middle part of fixed plate, the inner wall swing joint of fixed pipe has the piston, the top fixedly connected with second damping spring of piston, the equal fixed connection of second damping spring and fixed pipe is at the top of detecting the platform inner wall, the inside of bellows, through-hole and fixed pipe is linked together, the fixed second clamping assembly that adopts the flexible tentacle to realize the centre gripping function that is equipped with in top of fixed pipe.
Preferably, the second clamping assembly comprises a connecting frame, the surface at fixed pipe top is fixed to the connecting frame, the one end fixedly connected with rubber strip and gasbag package of fixed pipe position are kept away from to the connecting frame, and rubber strip fixed connection is at the top of gasbag package, the coefficient of expansion that rubber strip position one end surface was kept away from to the gasbag package reduces gradually, the quantity of connecting frame is three, and three connecting frame is the annular setting at the surface of fixed pipe, the inside of fixed pipe and connecting frame is linked together with the inside of constituteing the cavity between rubber strip and the gasbag package, the surface of fixed pipe is equipped with the atmospheric pressure circulation subassembly that is used for accomplishing air inlet and exhaust function.
Preferably, the air pressure circulation assembly comprises a first fixed frame, the fixed embedding of first fixed frame is at the surface of fixed pipe, the fixed check valve that is equipped with in rear side end of first fixed frame, the fixed frame of second is all fixed to the both ends of first fixed frame respectively, the middle part activity grafting of the fixed frame of second has the closing plate, two the equal fixedly connected with connecting plate in top of closing plate, the bottom fixedly connected with reset spring of connecting plate, and reset spring fixedly connected at the top of the fixed frame of second, the bottom at connecting plate both ends is fixedly connected with guide block respectively, the guide block is semi-circular structure, the top fixedly connected with actuating frame of the corresponding guide block position of actuating frame.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, through the cavity formed by the air to the rubber strip and the air bag, the air pressure in the air bag is increased and expanded, so that the air bag is expanded and drives the rubber strip to bend towards the middle part of the detection table, and further the rubber strip bends and drives the light-emitting diode wafer to move to the center position of the top of the detection table in a flexible manner, thereby realizing automatic positioning of the light-emitting diode wafer and avoiding extrusion damage of the light-emitting diode wafer;
2. the driving frame is driven to move to the position of the guide block through the driving frame, the driving frame is matched with the guide block to drive the connecting plate to move upwards, the connecting plate is further driven to drive the sealing plate to move upwards and stretch the reset spring, the second fixing frame is in a communicating state, the fixing pipe is further communicated with the outside through the first fixing frame and the second fixing frame, at the moment, air in the fixing pipe can be discharged outwards through the first fixing frame and the second fixing frame, namely under the action of reset stretching of the second damping spring, the second damping spring drives the piston to move downwards, further, the rubber strip and the air bag package form the inner air of the cavity to return to the top of the fixing pipe, namely at the moment, the rubber strip and the connecting frame are in a shrunken state, and are retracted into the inside of the detection table through the second movable groove, so that the device is restored to an initial state, and at the same time, the reset spring is arranged, when the mounting plate is used for driving the corrugated pipe to shrink again, at the moment, the driving frame is far away from the guide block, the connecting plate is driven to move the sealing plate downwards under the action of reset shrinkage of the reset spring, and the sealing plate is enabled to close the second fixing frame again, so that the sealing plate is enabled to be closed, and the device can be repeatedly used.
Drawings
FIG. 1 is a schematic diagram showing the overall structure of a testing device for LED chips according to the present invention;
FIG. 2 is a schematic diagram of a predetermined assembly of a testing device for LED chips according to the present invention;
FIG. 3 is a cross-sectional view of an entire structure of a testing apparatus for LED chips according to the present invention;
FIG. 4 is a cross-sectional view of a second embodiment of an inspection apparatus for LED chips;
FIG. 5 is a schematic diagram showing a predetermined assembly of a testing device for LED chips according to the present invention;
FIG. 6 is a schematic diagram of a predetermined assembly of a testing device for LED dies according to the present invention;
FIG. 7 is a schematic diagram of a flexible positioning assembly of a testing device for LED chips according to the present invention;
FIG. 8 is a schematic diagram of a flexible positioning assembly of a testing device for LED chips according to the present invention;
FIG. 9 is a cross-sectional view of a movable sleeve of a testing device for LED chips according to the present invention;
FIG. 10 is a schematic diagram of a pneumatic circulation assembly of a testing device for LED chips according to the present invention;
FIG. 11 is a cross-sectional view of a rubber strip of a testing device for LED chips according to the present invention;
FIG. 12 is a front cross-sectional view of an air pressure circulation assembly of a testing apparatus for LED chips according to the present invention.
In the figure: 1. a detection table; 2. a main drive assembly; 201. a driving cylinder; 202. a drive frame; 3. a pre-positioning assembly; 301. a fixed shaft; 302. rotating the connecting seat; 303. an articulated arm; 304. a movable seat; 305. a mounting block; 306. a slide block; 307. a guide rail; 31. a first clamping assembly; 310. a fixed rod; 311. a movable sleeve; 312. a fixed block; 313. a first damping spring; 314. a first movable groove; 4. a flexible positioning assembly; 401. a mounting plate; 402. a bellows; 403. a fixing plate; 404. a fixed tube; 405. a through hole; 406. a piston; 407. a second damping spring; 41. a second clamping assembly; 410. a connection frame; 411. a rubber strip; 412. an airbag bag; 413. a second movable groove; 42. an air pressure circulation assembly; 421. a first fixing frame; 422. a one-way valve; 423. a second fixing frame; 424. a sealing plate; 425. a connecting plate; 426. a return spring; 427. a guide block; 428. and a driving frame.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-12, the present invention provides a technical solution: comprising the following steps:
the detection table 1 is of a hollow structure and is used for providing a support platform for a light emitting diode wafer to be detected;
the pre-positioning assembly 3 is arranged in the detection table 1 and is used for concentrically pre-clamping the light-emitting diode wafer;
the flexible positioning assembly 4 is arranged in the detection table 1 and is used for concentrically positioning and clamping the light-emitting diode wafer in a flexible manner;
the main driving component 2 is fixedly arranged in the detection table 1 and is used for driving the pre-positioning component 3 and the flexible positioning component 4 to work.
The main driving assembly 2 comprises a driving air cylinder 201, the driving air cylinder 201 is fixedly arranged at the bottom of the inner wall of the detection table 1 through a support, a driving frame 202 is fixedly arranged on an output shaft of the driving air cylinder 201 through bolts, one end, away from the position of the driving air cylinder 201, of the driving frame 202 is of an open frame-shaped structure, and the middle part of the top of the detection table 1 is of a protruding structure.
The pre-positioning component 3 comprises a fixed shaft 301, the fixed shaft 301 is fixedly installed at the bottom of the inner wall of the detection platform 1 through a flange, the surface of the fixed shaft 301 is rotationally connected with a rotating connecting seat 302, a groove is formed in the surface of the rotating connecting seat 302, the inner wall of the groove is hinged with a hinged arm 303, one end of the hinged arm 303 far away from the position of the rotating connecting seat 302 is hinged with a movable seat 304, the number of the hinged arms 303 is three, the three hinged arms 303 are annularly arranged on the surface of the rotating connecting seat 302, and due to the fact that the fixed shaft 301 and the rotating connecting seat 302 are in a rotating relation, the hinged arm 303 and the rotating connecting seat 302 are in a hinging relation, and meanwhile, the movable seat 304 can only move along the direction of a sliding block 306 through an installation block 305, so that when the movable seat 304 moves towards the rotating connecting seat 302, the movable seat 304 is matched with the hinged arm 303 to drive the rotating connecting seat 302 to rotate by taking the fixed shaft 301 as a rotating shaft, and further the rotating connecting seat 302 is matched with the hinged arm 303 to drive other movable seats 304 to move towards one end of the rotating connecting seat 302 under the matching of the installation block 305 and the sliding block 306.
The bottom of movable seat 304 is through bolt fixed mounting installation piece 305, and the inner wall swing joint of installation piece 305 has slider 306, and slider 306 passes through the bottom of bolt fixed mounting in the detection platform 1 inner wall, and the top of movable seat 304 is through bolt fixed mounting guide rail 307, and the top of guide rail 307 is fixed to be equipped with and is used for the first clamping assembly 31 to the light emitting diode wafer is fixed to be fixed.
The first clamping assembly 31 comprises a fixing rod 310, the fixing rod 310 is fixedly arranged at the top of the guide rail 307, a movable sleeve 311 is movably connected to the surface of the fixing rod 310, a fixing block 312 is fixedly arranged at the top of the fixing rod 310 and movably connected to the inner wall of the movable sleeve 311, a first damping spring 313 is fixedly arranged at the bottom of the fixing block 312 and fixedly arranged at the bottom of the inner wall of the movable sleeve 311, the diameter of an opening at the bottom of the movable sleeve 311 is smaller than that of the fixing block 312, one end of the driving frame 202, which is far away from the driving cylinder 201, is rotatably connected to the middle part of one movable seat 304 through a pin shaft, a rubber layer is fixedly arranged on the surface of the movable sleeve 311, a first movable groove 314 is formed in the top of the position of the detecting table 1 corresponding to the movable sleeve 311, and the inner wall of the first movable groove 314 is movably connected with the surface of the movable sleeve 311.
The flexible positioning assembly 4 comprises a mounting plate 401, the mounting plate 401 is fixedly mounted on the inner wall of one end of the driving frame 202 corresponding to the position of the driving cylinder 201 through bolts, a corrugated pipe 402 is fixedly mounted at one end of the mounting plate 401 away from the position of the driving cylinder 201, a fixing plate 403 is fixedly mounted at one end of the corrugated pipe 402 away from the position of the mounting plate 401, the fixing plate 403 is fixedly mounted on the top of the fixing shaft 301, a fixing pipe 404 is fixedly mounted on the surface of the fixing plate 403, a through hole 405 is formed in the middle of the fixing plate 403, a piston 406 is movably connected to the inner wall of the fixing pipe 404, a second damping spring 407 is fixedly mounted on the top of the piston 406, the second damping spring 407 and the fixing pipe 404 are fixedly mounted on the top of the inner wall of the detection table 1, and the corrugated pipe 402, the through hole 405 and the inside of the fixing pipe 404 are communicated, and a second clamping assembly 41 which adopts a flexible tentacle to realize a clamping function is fixedly arranged at the top of the fixing pipe 404.
The second clamping assembly 41 comprises a connecting frame 410, the connecting frame 410 is fixedly embedded into the surface of the top of the fixed pipe 404, one end of the connecting frame 410, which is far away from the position of the fixed pipe 404, is fixedly provided with a rubber strip 411 and an air bag 412, the rubber strip 411 is fixedly arranged at the top of the air bag 412, the expansion coefficient of the surface of the end of the air bag 412, which is far away from the position of the rubber strip 411, is gradually reduced, the number of the connecting frames 410 is three, the three connecting frames 410 are annularly arranged on the surface of the fixed pipe 404, the interiors of the fixed pipe 404 and the connecting frames 410 are communicated with the interiors of cavities formed between the rubber strip 411 and the air bag 412, and the surface of the fixed pipe 404 is provided with an air pressure circulating assembly 42 for completing air inlet and exhaust functions.
The air pressure circulation assembly 42 comprises a first fixed frame 421, the first fixed frame 421 is fixedly embedded on the surface of the fixed pipe 404, a one-way valve 422 is fixedly arranged at the rear side end of the first fixed frame 421, a second fixed frame 423 is fixedly embedded at both ends of the first fixed frame 421 respectively, a sealing plate 424 is movably inserted in the middle of the second fixed frame 423, connecting plates 425 are fixedly arranged at the tops of the two sealing plates 424, a return spring 426 is fixedly arranged at the bottom of the connecting plate 425, the return spring 426 is fixedly arranged at the top of the second fixed frame 423, guide blocks 427 are fixedly arranged at the bottoms of both ends of the connecting plate 425 respectively, the guide blocks 427 are in a semicircular structure, a driving frame 428 is fixedly arranged at the top of the driving frame 202 corresponding to the positions of the guide blocks 427, when the movable sleeve 311 is restored to the initial position, the driving cylinder 201 drives the driving frame 202 to return to the initial position, so that the driving frame 428 drives the driving frame 428 to move to the positions of the guide blocks 427, and the driving frame 428 is matched with the guide block 427 to drive the connecting plate 425 to move upwards, so that the connecting plate 425 drives the sealing plate 424 to move upwards and stretches the reset spring 426, the second fixed frame 423 is in a communicating state, the fixed tube 404 is communicated with the outside through the first fixed frame 421 and the second fixed frame 423, at the moment, the air in the fixed tube 404 is discharged outwards through the first fixed frame 421 and the second fixed frame 423, namely under the action of reset stretching of the second damping spring 407, the second damping spring 407 drives the piston 406 to move downwards, and the air in the cavity formed by the rubber strip 411 and the air bag 412 is returned to the top of the fixed tube 404, namely, at the moment, the rubber strip 411 and the connecting frame 410 are in a shrunken state and are retracted into the inside of the detection table 1 through the second movable groove 413, so that the device is restored to the initial state, meanwhile, by arranging the reset spring 426, when the mounting plate 401 drives the corrugated pipe 402 to shrink again, the driving frame 428 is far away from the guide block 427, the connecting plate 425 drives the sealing plate 424 to move downwards under the action of reset shrinkage of the reset spring 426, and the sealing plate 424 closes the second fixing frame 423 again, so that the device can be repeatedly and continuously used.
Working principle: when in use, the invention is electrified and contracted by the driving air cylinder 201, and the driving air cylinder 201 drives the driving frame 202 to move, so that the driving frame 202 drives the movable seat 304 to move towards one end of the position of the rotating connecting seat 302, the three movable seats 304 synchronously move towards one end of the rotating connecting seat 302 by the cooperation of the hinge arms 303 and the rotating connecting seat 302, when the three movable seats 304 simultaneously move towards one end of the position of the rotating connecting seat 302, the movable seat 304 drives the first clamping component 31 to move towards the middle part of the detection platform 1 by the guide rail 307, the movable sleeve 311 moves on the inner wall of the first movable groove 314 and gathers the light emitting diode wafers on the detection platform 1 towards the middle part, and when the first clamping component 31 moves towards the middle part of the detection platform 1, the middle part of the top part of the detection platform 1 is of a convex structure, when the first clamping component 31 moves towards the middle of the detection table 1, the movable sleeve 311 can be enabled to move upwards under the guide of the protruding structure at the top of the detection table 1, the detection table 1 can drive the movable sleeve 311 to move upwards, the movable sleeve 311 is always positioned on the plane at the top of the detection table 1, so that the light-emitting diode wafer can be well driven, the purpose of pre-positioning the light-emitting diode wafer is achieved, meanwhile, when the movable sleeve 311 moves upwards under the guide of the detection table 1, the movable sleeve 311 is enabled to be matched with the fixed block 312 to press the first damping spring 313, when the movable sleeve 311 moves towards one end far away from the middle of the detection table 1, the movable sleeve 311 can be enabled to recover to the initial position under the reset stretching effect of the first damping spring 313, and then the top of the movable sleeve 311 is positioned at the bottom of the highest position at the top of the detection table 1, therefore, the movable sleeve 311 can not influence the normal feeding operation of the light emitting diode wafer, meanwhile, the purpose of protecting the light emitting diode wafer during driving can be better achieved through the rubber pad on the surface of the movable sleeve 311, when the driving cylinder 201 drives the driving frame 202 to shrink, the driving frame 202 drives the corrugated tube 402 to stretch through the mounting plate 401, the volume of the corrugated tube 402 is increased, the air pressure inside the corrugated tube 402 is reduced, and then the inside of the corrugated tube 402 generates negative pressure, at the moment, the outside air penetrates through the first fixed frame 421 through the check valve 422 to enter the inside of the fixed tube 404 until the light emitting diode wafer is driven to the protruding structure position at the top of the detection table 1 when the movable sleeve 311 completes the pre-positioning of the light emitting diode wafer, at the moment, the corrugated tube 402 stretches to the maximum state, and at the same time, part of air is sucked into the inside of the corrugated tube 402, then the driving cylinder 201 drives the driving frame 202 to stretch, so that the driving frame 202 drives the movable seat 304 to move towards one end far away from the rotary connecting seat 302, and then the rotary connecting seat 302 is matched with the hinge arms 303 to drive the three movable seats 304 to move towards one end far away from the rotary connecting seat 302, and then the movable sleeve 311 can be restored to the initial state, meanwhile, when the driving cylinder 201 drives the driving frame 202 to stretch, the driving frame 202 presses the corrugated tube 402 through the mounting plate 401 matched with the fixing plate 403, and then air in the corrugated tube 402 enters the inside of the fixing tube 404 through the through hole 405, and the air pressure drives the piston 406 to move upwards and presses the second damping spring 407, and when the piston 406 moves upwards, the piston 406 injects the air positioned at the top of the piston 406 in the fixing tube 404 into the connecting frame 410, and then the air at the top of the fixed tube 404 enters the cavity formed by the rubber strip 411 and the air bag 412 through the connecting frame 410, so that when the air enters the cavity formed by the rubber strip 411 and the air bag 412, the air pressure in the air bag 412 is increased and expanded, and meanwhile, as the expansion coefficient of the air bag 412 at one end surface far away from the rubber strip 411 is gradually reduced, the air bag 412 expands and drives the rubber strip 411 to bend towards the middle part of the detection table 1 at the inner wall of the second movable groove 413, and then the three rubber strips 411 simultaneously bend and drive the light emitting diode wafer to move to the center position at the top of the detection table 1 in a flexible manner, so that the situation that the light emitting diode wafer can be automatically positioned and extrusion damage is avoided is realized.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. A test device for a light emitting diode wafer, characterized by: comprising the following steps:
the detection table (1) is of a hollow structure and is used for providing a support platform for the light-emitting diode wafer to be detected;
the preset positioning component (3) is arranged in the detection table (1) and is used for concentrically pre-clamping the light-emitting diode wafers, the preset positioning component (3) comprises a fixed shaft (301), the fixed shaft (301) is fixedly connected to the bottom of the inner wall of the detection table (1), the surface of the fixed shaft (301) is rotationally connected with a rotary connecting seat (302), a groove is formed in the surface of the rotary connecting seat (302), the inner wall of the groove is hinged with an articulated arm (303), one end of the articulated arm (303) far away from the position of the rotary connecting seat (302) is hinged with a movable seat (304), the number of the articulated arms (303) is three, the three articulated arms (303) are annularly arranged on the surface of the rotary connecting seat (302), the bottom of the movable seat (304) is fixedly connected with a mounting block (305), the inner wall of the mounting block (305) is movably connected with a sliding block (306), the bottom of the inner wall of the detection table (1) is fixedly connected with a guide rail (307), the top of the movable seat (304) is fixedly connected with a guide rail (307), the top of the guide rail (307) is fixedly provided with a first clamping rod (310) fixedly connecting the light-emitting diode wafer (31) to the first clamping component (310), the surface of the fixed rod (310) is movably connected with a movable sleeve (311), the top of the fixed rod (310) is fixedly connected with a fixed block (312), the fixed block (312) is movably connected with the inner wall of the movable sleeve (311), the bottom of the fixed block (312) is fixedly connected with a first damping spring (313), the first damping spring (313) is fixedly connected with the bottom of the inner wall of the movable sleeve (311), the diameter of an opening at the bottom of the movable sleeve (311) is smaller than the diameter of the bottom of the fixed block (312), the surface of the movable sleeve (311) is fixedly connected with a rubber layer, a first movable groove (314) is formed in the top of the position of the detection table (1) corresponding to the movable sleeve (311), and the inner wall of the first movable groove (314) is movably connected with the surface of the movable sleeve (311);
the flexible positioning component (4) is arranged in the detection table (1) and is used for concentrically positioning and clamping the light-emitting diode wafer in a flexible mode, the flexible positioning component (4) comprises a mounting plate (401), the mounting plate (401) is fixedly connected with the inner wall of one end of the driving frame (202) corresponding to the position of the driving cylinder (201), one end of the mounting plate (401) away from the position of the driving cylinder (201) is fixedly connected with a corrugated pipe (402), one end of the corrugated pipe (402) away from the position of the mounting plate (401) is fixedly connected with a fixing plate (403), the fixing plate (403) is fixedly connected with the top of the fixing shaft (301), the surface of the fixing plate (403) is fixedly connected with a fixing pipe (404), a through hole (405) is formed in the middle of the fixing plate (403), the inner wall of the fixing pipe (404) is movably connected with a piston (406), the top of the piston (406) is fixedly connected with a second damping spring (407), the top of the second damping spring (407) and the fixing pipe (404) are fixedly connected with the top of the inner wall of the detection table (1), the through hole (402), the corrugated pipe (405) and the inner wall (404) are fixedly connected with the second damping spring (404) by adopting the fixing pipe (404), the second clamping assembly (41) comprises a connecting frame (410), the connecting frame (410) is fixedly embedded into the surface of the top of the fixed pipe (404), one end of the connecting frame (410) away from the position of the fixed pipe (404) is fixedly connected with a rubber strip (411) and an airbag (412), the rubber strip (411) is fixedly connected to the top of the airbag (412), the expansion coefficient of the surface of one end of the airbag (412) away from the position of the rubber strip (411) is gradually reduced, and the interiors of the fixed pipe (404) and the connecting frame (410) are communicated with the interiors of cavities formed between the rubber strip (411) and the airbag (412);
the main driving component (2) is fixedly arranged in the detection table (1) and used for driving the pre-positioning component (3) and the flexible positioning component (4) to work.
2. A testing device for light emitting diode chips as defined in claim 1, wherein: the main drive assembly (2) comprises a drive cylinder (201), the drive cylinder (201) is fixedly connected to the bottom of the inner wall of the detection table (1), an output shaft of the drive cylinder (201) is fixedly connected with a drive frame (202), one end, away from the position of the drive cylinder (201), of the drive frame (202) is of an open frame-shaped structure, and the middle part of the top of the detection table (1) is of a protruding structure.
3. A testing device for light emitting diode chips as defined in claim 2, wherein: one end of the driving frame (202) far away from the driving cylinder (201) is rotatably connected to the middle part of one of the movable seats (304).
4. A test apparatus for a light emitting diode die as recited in claim 3, wherein: the number of the connecting frames (410) is three, the three connecting frames (410) are annularly arranged on the surface of the fixed pipe (404), and the surface of the fixed pipe (404) is provided with an air pressure circulation assembly (42) for completing air inlet and exhaust functions.
5. The inspection apparatus for a light emitting diode chip as claimed in claim 4, wherein: the air pressure circulation assembly (42) comprises a first fixed frame (421), the surface at fixed pipe (404) is fixed to be embedded in first fixed frame (421), the rear side end of first fixed frame (421) is fixed to be equipped with check valve (422), the both ends of first fixed frame (421) are all fixed respectively to be embedded with second fixed frame (423), the middle part activity of second fixed frame (423) is pegged graft there is closing plate (424), two equal fixedly connected with connecting plate (425) in top of closing plate (424), the bottom fixedly connected with reset spring (426) of connecting plate (425), and reset spring (426) fixedly connected with is at the top of second fixed frame (423), the bottom at connecting plate (425) both ends is fixedly connected with guide block (427) respectively, guide block (427) are semi-circular structure, the top fixedly connected with drive frame (428) of corresponding guide block (427) position of drive frame (202).
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| CN117606758B (en) * | 2024-01-22 | 2024-08-23 | 深圳市零奔洋光电股份有限公司 | Quality inspection device before LED module assembly |
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| WO2011108352A1 (en) * | 2010-03-01 | 2011-09-09 | パスカルエンジニアリング株式会社 | Clamping device |
| CN207548558U (en) * | 2017-10-19 | 2018-06-29 | 新昌县回山镇启迪五金经营部 | A kind of refrigeration accessory Special Fixture for Machining |
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