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CN114784199A - Narrow-band optical detector with wide-angle detection imaging capability and preparation method thereof - Google Patents

Narrow-band optical detector with wide-angle detection imaging capability and preparation method thereof Download PDF

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CN114784199A
CN114784199A CN202210431325.XA CN202210431325A CN114784199A CN 114784199 A CN114784199 A CN 114784199A CN 202210431325 A CN202210431325 A CN 202210431325A CN 114784199 A CN114784199 A CN 114784199A
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魏浩桐
冯晓蓬
杨柏
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Jilin University
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Abstract

A narrow-band optical detector with wide-angle detection imaging capability and a preparation method thereof belong to the technical field of optical detection.The detector comprises a hemispherical substrate, an anode, a hole transport layer, a perovskite thin film, an electron transport layer, a buffer layer and a cathode, or comprises a hemispherical substrate, a cathode, an electron transport layer, a perovskite thin film, a hole transport layer and an anode, and the perovskite thin film PEA2FA3Pb4X13(X ═ Br, I, or Br and I) is an active material for absorbing photons. According to the invention, the quasi-two-dimensional perovskite film is deposited on the hemispherical substrate by introducing a solution spraying method, so that the optical detector has the characteristic of lens-free wide-angle response. The recombination capability at the surface short wave position is improved by controlling the thickness of the film and changing the proportion of phenylethylamine cations, and the narrow-band response of the optical detector under the condition of no filter is realized. The detector has low preparation cost and good narrow-band and wide-angle detection capability.

Description

一种具有广角探测成像能力的窄带光探测器及其制备方法A narrow-band photodetector with wide-angle detection imaging capability and preparation method thereof

技术领域technical field

本发明属于光探测技术领域,具体涉及一种具有广角探测成像能力的窄带光探测器及其制备方法。The invention belongs to the technical field of light detection, and in particular relates to a narrow-band light detector with wide-angle detection and imaging capability and a preparation method thereof.

背景技术Background technique

光探测在光通信、医疗、国防以及遥远星系的探测等众多领域被广泛应用,而光探测器是实现上述光探测应用的核心技术之一。因此开发低成本、颜色识别、多角度可感知的球面光探测器是光探测技术领域的一个重要研究方向。Optical detection is widely used in many fields such as optical communication, medical treatment, national defense, and detection of distant galaxies, and optical detectors are one of the core technologies for realizing the above-mentioned optical detection applications. Therefore, the development of low-cost, color recognition, multi-angle perceptible spherical light detectors is an important research direction in the field of light detection technology.

球面探测器相对于平面探测器具有更广的空间探测范围,同时也降低了探测器对光学透镜的依赖。对于传统的光探测材料,由于其刚性的结构和高温的加工条件,一般认为是很难实现在球体表面原发地制备器件。使用溶液喷涂法将钙钛矿前驱体溶液喷洒在曲面基底上结晶成膜具有一定的可行性。同时喷涂法制备过程中,极快的蒸发速率使得钙钛矿前驱体液滴在钙钛矿表面结晶过程中很难发生溶解。Compared with the flat detector, the spherical detector has a wider spatial detection range, and also reduces the dependence of the detector on the optical lens. For traditional photodetection materials, it is generally considered difficult to realize the primary fabrication of devices on the surface of spheres due to their rigid structure and high temperature processing conditions. It is feasible to spray the perovskite precursor solution on the curved substrate to form a film by using the solution spraying method. At the same time, during the preparation process of the spray method, the extremely fast evaporation rate makes it difficult for the perovskite precursor droplets to dissolve during the crystallization process of the perovskite surface.

准二维钙钛矿材料同时具有半径更大的有机阳离子阻碍载流子的流动又兼具可以广泛调节的带隙在窄带光探测方面具有很好的应用前景,这有利于制备无光学透镜的低成本广角探测的窄带的光探测器。Quasi-2D perovskite materials have both organic cations with larger radii to hinder the flow of carriers and a bandgap that can be widely adjusted. A low-cost, narrow-band photodetector for wide-angle detection.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提供一种具有广角探测成像能力的窄带光探测器及其制备方法,该光探测器具有空间探测范围广、光色可识别、成本低廉等优点。The purpose of the present invention is to provide a narrow-band photodetector with wide-angle detection and imaging capability and a preparation method thereof. The photodetector has the advantages of wide spatial detection range, identifiable light color, and low cost.

本发明所述的具有广角探测成像能力的窄带光探测器,从下至上,由半球基底、阳极、空穴传输层、钙钛矿薄膜、电子传输层、缓冲层和阴极组成,或由半球基底、阴极、电子传输层、钙钛矿薄膜、空穴传输层和阳极组成,苯乙胺甲脒铅卤素PEA2FA3Pb4X13(X=Br,I)钙钛矿薄膜为用于吸收光子的活性材料。The narrow-band photodetector with wide-angle detection and imaging capability of the present invention, from bottom to top, is composed of a hemispherical substrate, an anode, a hole transport layer, a perovskite film, an electron transport layer, a buffer layer and a cathode, or is composed of a hemispherical substrate , cathode, electron transport layer, perovskite film, hole transport layer and anode composition, phenethylamine formamidine lead halogen PEA 2 FA 3 Pb 4 X 13 (X=Br, I) perovskite film for absorption Photonic active material.

本发明所述的一种具有广角探测成像能力的窄带光探测器(半球基底、阳极、空穴传输层、钙钛矿薄膜、电子传输层、缓冲层、阴极)的制备方法,如图1所示,其步骤如下:The preparation method of a narrow-band photodetector (hemispherical substrate, anode, hole transport layer, perovskite film, electron transport layer, buffer layer, cathode) with wide-angle detection and imaging capability according to the present invention is shown in FIG. 1 . shown, the steps are as follows:

(1)选取直径为0.8~2cm的半球基底(材质为普通玻璃,可由商业渠道获得),在超纯水、丙酮和异丙醇中分别超声清洗10~20分钟后干燥;(1) Select a hemispherical substrate with a diameter of 0.8 to 2 cm (the material is ordinary glass, which can be obtained from commercial channels), ultrasonically clean it in ultrapure water, acetone and isopropanol for 10 to 20 minutes, and then dry;

(2)通过真空蒸发将金属Cr蒸镀到半球基底表面作为阳极,厚度为8~15nm,然后对金属Cr表面进行紫外-臭氧处理15~30分钟,再进行等离子体处理5~10分钟;(2) Evaporating metal Cr onto the surface of the hemispherical substrate as an anode by vacuum evaporation, with a thickness of 8-15 nm, and then performing ultraviolet-ozone treatment on the surface of metal Cr for 15-30 minutes, and then performing plasma treatment for 5-10 minutes;

(3)在阳极表面沉积空穴传输层(3) Deposit a hole transport layer on the anode surface

(a)将聚(3,4-亚乙二氧基噻吩)-聚(苯乙烯磺酸)(PEDOT:PSS)水溶液用超纯水稀释,得到PEDOT:PSS浓度为0.05~0.2%wt的空穴传输层溶液;(a) Dilute the poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) (PEDOT:PSS) aqueous solution with ultrapure water to obtain a PEDOT:PSS concentration of 0.05-0.2%wt. hole transport layer solution;

(b)将步骤(a)中的空穴传输层溶液400~1000μL加入到喷嘴直径0.2~0.5mm的气动喷枪中;(b) adding 400-1000 μL of the hole transport layer solution in step (a) into a pneumatic spray gun with a nozzle diameter of 0.2-0.5 mm;

(c)将表面制备有阳极的半球基底放置在60~80℃的热台上,将步骤(b)中的气动喷枪连接空气压缩机,输出压强为1~3MPa,喷涂速率为0.10~0.3mL/min,将空穴传输层溶液喷涂到阳极表面,在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.20~0.30r/min,平移速度为5~20cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用4~7MPa的高速氮气吹扫整个半球表面至形成较为干燥的薄膜;当溶液耗尽后,将薄膜在160~180℃下退火20~40分钟,从而在阳极表面得到厚度10~100nm的空穴传输层;(c) place the hemispherical substrate with the anode prepared on the surface on a hot stage at 60-80°C, connect the pneumatic spray gun in step (b) to an air compressor, the output pressure is 1-3 MPa, and the spraying rate is 0.10-0.3 mL /min, spray the hole transport layer solution on the surface of the anode, during the spraying process, keep the rotation and translation of the hemispherical substrate, the rotation speed is 0.20~0.30r/min, and the translation speed is 5~20cm/s, so as to keep the spraying The flatness of the film; in the process of spraying, after each droplet of the solution completely covers the surface of the hemisphere, the entire surface of the hemisphere is purged with high-speed nitrogen of 4-7MPa to form a relatively dry film; when the solution is exhausted, the film is removed. Annealing at 160-180°C for 20-40 minutes, thereby obtaining a hole transport layer with a thickness of 10-100 nm on the anode surface;

(4)在空穴传输层表面沉积PEA2FA3Pb4X13(X=Br、I或Br和I,其下角标之和为13)钙钛矿薄膜(4) Deposition of PEA 2 FA 3 Pb 4 X 13 (X=Br, I or Br and I, the sum of the subscripts is 13) perovskite thin film on the surface of the hole transport layer

(a)将甲脒氢卤酸盐(FAX)、卤化铅(PbX2)、苯乙胺氢卤酸盐(PEAX)以及甲胺盐酸盐(MACl)按照PEA2FA3Pb4X13(X=Br,I)的分子式配比配置成铅离子浓度0.4~0.6M的前驱体溶液,溶剂为乙腈(ACN)和N,N-二甲基甲酰胺(DMF)的混合溶剂,或者乙二醇甲醚(2-Me)和N,N-二甲基甲酰胺(DMF)的混合溶剂,乙腈(ACN)或乙二醇甲醚(2-Me)与N,N-二甲基甲酰胺(DMF)的体积比为1:1~3,通过调节N,N-二甲基甲酰胺(DMF)的用量比例可以提高前驱体的溶解度,从而使钙钛矿粉末溶解完全;(a) Formamidine hydrohalide (FAX), lead halide (PbX 2 ), phenethylamine hydrohalide (PEAX) and methylamine hydrochloride (MAC1) were prepared according to PEA 2 FA 3 Pb 4 X 13 ( The molecular formula ratio of X=Br,I) is configured as a precursor solution with a lead ion concentration of 0.4-0.6M, and the solvent is a mixed solvent of acetonitrile (ACN) and N,N-dimethylformamide (DMF), or ethylene di Mixed solvent of alcohol methyl ether (2-Me) and N,N-dimethylformamide (DMF), acetonitrile (ACN) or ethylene glycol methyl ether (2-Me) and N,N-dimethylformamide The volume ratio of (DMF) is 1:1 to 3. By adjusting the dosage ratio of N,N-dimethylformamide (DMF), the solubility of the precursor can be improved, so that the perovskite powder can be completely dissolved;

(b)将步骤(a)配制的前驱体溶液500~2000μL加入到喷嘴直径0.2~0.5mm的气动喷枪中;(b) adding 500-2000 μL of the precursor solution prepared in step (a) into a pneumatic spray gun with a nozzle diameter of 0.2-0.5 mm;

(c)将表面沉积有空穴传输层的半球基底放置在80~120℃的加热台上,将步骤(b)中的气动喷枪连接输出压强为1~3MPa的空气压缩机,喷涂速率为0.1~0.3mL/min,将前驱体溶液喷涂到空穴传输层表面;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.20~0.30r/min,平移速度为5~20cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用4~7MPa的高速氮气吹扫整个半球表面至形成较为干燥的薄膜;(c) Place the hemispherical substrate with the hole transport layer deposited on the surface on a heating table at 80-120°C, connect the pneumatic spray gun in step (b) to an air compressor with an output pressure of 1-3 MPa, and the spraying rate is 0.1 ~0.3mL/min, spray the precursor solution on the surface of the hole transport layer; during the spraying process, keep the rotation and translation of the hemispherical substrate, the rotation speed is 0.20~0.30r/min, and the translation speed is 5~20cm/s , so as to maintain the flatness of the sprayed film; in the process of spraying, after each droplet of the solution completely covers the surface of the hemisphere, the entire surface of the hemisphere is purged with high-speed nitrogen of 4-7MPa to form a relatively dry film;

(d)将步骤(c)得到的半球基底在80~120℃下退火8~15分钟,然后在120~140℃下退火20~40分钟,最后在160~170℃下退火60~90分钟,退火过程中保持黑暗条件,从而得到厚度2~40μm的钙钛矿薄膜;(d) annealing the hemispherical substrate obtained in step (c) at 80-120°C for 8-15 minutes, then annealing at 120-140°C for 20-40 minutes, and finally annealing at 160-170°C for 60-90 minutes, Dark conditions are maintained during the annealing process to obtain perovskite films with a thickness of 2-40 μm;

(5)通过真空蒸发将购买得到的富勒烯(C60)蒸镀到钙钛矿薄膜表面,得到厚度15~30nm的电子传输层;(5) Evaporating the purchased fullerene (C 60 ) onto the surface of the perovskite thin film by vacuum evaporation to obtain an electron transport layer with a thickness of 15-30 nm;

(6)通过真空蒸发将购买得到的2,9-二甲基-4,7-联苯-1,10-邻二氮杂菲(BCP)蒸镀到电子传输层表面,得到厚度4~10nm的缓冲层;(6) The purchased 2,9-dimethyl-4,7-biphenyl-1,10-phenanthroline (BCP) was evaporated to the surface of the electron transport layer by vacuum evaporation to obtain a thickness of 4-10 nm the buffer layer;

(7)通过真空蒸发将金属Cr蒸发到缓冲层表面作为阴极,厚度为8~15nm;从而制备得到本发明所述的具有广角探测成像能力的窄带光探测器,结构为半球基底/Cr/PEDOT:PSS/PEA2FA3Pb4X13/C60/BCP/Cr。(7) Evaporating metal Cr onto the surface of the buffer layer as a cathode by vacuum evaporation, with a thickness of 8-15 nm; thereby preparing the narrow-band photodetector with wide-angle detection and imaging capability according to the present invention, the structure is hemispherical substrate/Cr/PEDOT : PSS/PEA 2 FA 3 Pb 4 X 13 /C 60 /BCP/Cr.

本发明所述的第二种器件结构(半球基底、阴极、电子传输层、钙钛矿薄膜、空穴传输层、阳极)的制备方法,其步骤如下:The preparation method of the second device structure (hemispherical substrate, cathode, electron transport layer, perovskite film, hole transport layer, anode) of the present invention comprises the following steps:

(1)选取直径为0.8~2cm的半球基底(材质为普通玻璃,可以由商业渠道获得),在超纯水、丙酮和异丙醇中分别超声清洗10~20分钟后干燥;(1) Select a hemispherical substrate with a diameter of 0.8 to 2 cm (the material is ordinary glass, which can be obtained from commercial channels), ultrasonically clean it in ultrapure water, acetone and isopropanol for 10 to 20 minutes, and then dry;

(2)通过真空蒸发将金属Cr蒸镀到半球基底表面作为阴极,厚度为8~15nm,然后对金属Cr表面进行紫外-臭氧处理15~30分钟,再进行等离子体处理5~10分钟;(2) Evaporating metal Cr onto the surface of the hemispherical substrate as a cathode by vacuum evaporation, with a thickness of 8-15 nm, and then performing UV-ozone treatment on the surface of metal Cr for 15-30 minutes, and then performing plasma treatment for 5-10 minutes;

(3)在阴极表面沉积电子传输层(3) Deposition of an electron transport layer on the surface of the cathode

(a)将购买的SnO2水溶液用超纯水稀释,制备SnO2浓度为0.05~0.1%wt的电子传输层溶液;(a) Dilute the purchased SnO 2 aqueous solution with ultrapure water to prepare an electron transport layer solution with SnO 2 concentration of 0.05-0.1%wt;

(b)将步骤(a)得到的电子传输层溶液400~1000μL加入到喷嘴直径0.2~0.5mm的气动喷枪中;(b) adding 400-1000 μL of the electron transport layer solution obtained in step (a) into a pneumatic spray gun with a nozzle diameter of 0.2-0.5 mm;

(c)将表面制备有阴极的半球基底放置在60~80℃加热台上,并将步骤(b)中的气动喷枪连接空气压缩机,输出压强为1~3MPa,喷涂速率为0.10~0.20mL/min,将电子传输层溶液喷涂到阴极表面;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.20~0.30r/min,平移速度为5~20cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用4~7MPa的高速氮气吹扫整个半球表面至形成较为干燥的薄膜;当溶液耗尽后,将薄膜在160~180℃下退火20~40分钟,再进行紫外-臭氧处理15~30分钟,从而在阴极表面得到厚度10~100nm的电子传输层;(c) placing the hemispherical substrate with the cathode prepared on the surface on a heating table at 60-80°C, and connecting the pneumatic spray gun in step (b) to an air compressor, the output pressure is 1-3 MPa, and the spraying rate is 0.10-0.20 mL /min, spray the electron transport layer solution on the surface of the cathode; during the spraying process, keep the rotation and translation of the hemispherical substrate, the rotation speed is 0.20~0.30r/min, and the translation speed is 5~20cm/s, so as to keep the sprayed film In the process of spraying, after each droplet of the solution completely covers the surface of the hemisphere, the entire surface of the hemisphere is purged with high-speed nitrogen of 4-7MPa to form a relatively dry film; when the solution is exhausted, the film is placed in Annealing at 160-180°C for 20-40 minutes, and then performing UV-ozone treatment for 15-30 minutes, thereby obtaining an electron transport layer with a thickness of 10-100 nm on the surface of the cathode;

(4)在电子传输层表面沉积PEA2FA3Pb4X13(X=Br、I或Br和I,其下角标之和为13)钙钛矿薄膜(4) Deposition of PEA 2 FA 3 Pb 4 X 13 (X=Br, I or Br and I, the sum of the subscripts is 13) perovskite thin film on the surface of the electron transport layer

(a)将甲脒氢卤酸盐(FAX)、卤化铅(PbX2)、苯乙胺氢卤酸盐(PEAX)以及甲胺盐酸盐(MACl)按照PEA2FA3Pb4X13(X=Br,I)的分子式配比配置成铅离子浓度0.4~0.6M的前驱体溶液,溶剂为乙腈(ACN)和N,N-二甲基甲酰胺(DMF)的混合溶剂,或者乙二醇甲醚(2-Me)和DMF的混合溶剂,乙腈(ACN)或乙二醇甲醚(2-Me)与N,N-二甲基甲酰胺(DMF)的体积比为1:1~3,通过调节N,N-二甲基甲酰胺(DMF)的用量比例可以提高前驱体的溶解度,使钙钛矿粉末溶解完全;(a) Formamidine hydrohalide (FAX), lead halide (PbX 2 ), phenethylamine hydrohalide (PEAX) and methylamine hydrochloride (MAC1) were prepared according to PEA 2 FA 3 Pb 4 X 13 ( The molecular formula ratio of X=Br,I) is configured as a precursor solution with a lead ion concentration of 0.4-0.6M, and the solvent is a mixed solvent of acetonitrile (ACN) and N,N-dimethylformamide (DMF), or ethylene di Mixed solvent of alcohol methyl ether (2-Me) and DMF, the volume ratio of acetonitrile (ACN) or ethylene glycol methyl ether (2-Me) to N,N-dimethylformamide (DMF) is 1:1~ 3. By adjusting the dosage ratio of N,N-dimethylformamide (DMF), the solubility of the precursor can be improved, so that the perovskite powder can be completely dissolved;

(b)将步骤(a)配制的前驱体溶液500~2000μL加入到喷嘴直径0.2~0.5mm的气动喷枪中;(b) adding 500-2000 μL of the precursor solution prepared in step (a) into a pneumatic spray gun with a nozzle diameter of 0.2-0.5 mm;

(c)将表面沉积有电子传输层的半球基底放置在80~120℃的加热台上,将步骤(b)中的气动喷枪连接输出压强为1~3MPa的空气压缩机,喷涂速率为0.1~0.3mL/min,将前驱体溶液喷涂到电子传输层表面;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.20~0.30r/min,平移速度为5~20cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用4~7MPa的高速氮气吹扫整个半球表面至形成干燥的薄膜;(c) placing the hemispherical substrate with the electron transport layer deposited on the surface on a heating table at 80-120°C, connecting the pneumatic spray gun in step (b) to an air compressor with an output pressure of 1-3 MPa, and a spraying rate of 0.1-3 MPa. 0.3mL/min, spray the precursor solution on the surface of the electron transport layer; during the spraying process, keep the rotation and translation of the hemispherical substrate, the rotation speed is 0.20~0.30r/min, and the translation speed is 5~20cm/s, thus Maintain the flatness of the sprayed film; in the process of spraying, after each droplet of the solution completely covers the surface of the hemisphere, the entire surface of the hemisphere is purged with high-speed nitrogen of 4-7MPa to form a dry film;

(d)将步骤(c)得到的半球基底在80~120℃下退火8~15分钟,然后在120~140℃下退火20~40分钟,最后在160~170℃下退火60~90分钟,退火过程中保持黑暗条件;从而得到厚度2~40μm的钙钛矿薄膜;(d) annealing the hemispherical substrate obtained in step (c) at 80-120°C for 8-15 minutes, then annealing at 120-140°C for 20-40 minutes, and finally annealing at 160-170°C for 60-90 minutes, Dark conditions are maintained during the annealing process; thus a perovskite film with a thickness of 2-40 μm is obtained;

(5)在钙钛矿薄膜表面沉积空穴传输层,其步骤如下:(5) depositing a hole transport layer on the surface of the perovskite thin film, the steps are as follows:

(a)将购买的聚[双(4-苯基)(2,4,6-三甲基苯基)胺](PTAA)与甲苯配置成PTAA浓度为0.05~0.2mg/mL空穴传输层溶液;(a) The purchased poly[bis(4-phenyl)(2,4,6-trimethylphenyl)amine] (PTAA) was prepared with toluene to form a hole transport layer with a PTAA concentration of 0.05-0.2 mg/mL solution;

(b)将步骤(a)得到的空穴传输层溶液400~1000μL加入到喷嘴直径0.2~0.5mm喷口的气动喷枪中;(b) adding 400-1000 μL of the hole transport layer solution obtained in step (a) into a pneumatic spray gun with a nozzle diameter of 0.2-0.5 mm;

(c)将表面制备有钙钛矿薄膜的半球基底固定在60~80℃加热台上,并将步骤(b)中的气动喷枪连接空气压缩机,输出压强为1~3MPa,喷涂速率为0.10~0.20mL/min,将空穴传输层溶液喷涂到钙钛矿薄膜上,在喷涂过程中,保持半球基底的旋转和平移,旋转速度在0.20~0.30r/min,平移速度为5~20cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用4~7MPa的高速氮气吹扫整个半球表面至形成比较干燥的薄膜;当溶液耗尽后,将薄膜在90~110℃下退火5~15分钟,从而得到厚度10~100nm的空穴传输层;(c) Fix the hemispherical substrate with the perovskite film on the surface on a heating table at 60-80 °C, and connect the pneumatic spray gun in step (b) to an air compressor, the output pressure is 1-3 MPa, and the spraying rate is 0.10 ~0.20mL/min, spray the hole transport layer solution on the perovskite film, during the spraying process, keep the rotation and translation of the hemispherical substrate, the rotation speed is 0.20~0.30r/min, and the translation speed is 5~20cm/ s, so as to maintain the flatness of the sprayed film; in the process of spraying, after each droplet of the solution completely covers the surface of the hemisphere, the entire surface of the hemisphere is purged with high-speed nitrogen of 4-7MPa to form a relatively dry film; when the solution is consumed After finishing, the film is annealed at 90-110° C. for 5-15 minutes to obtain a hole transport layer with a thickness of 10-100 nm;

(6)通过真空蒸发将金属Cr蒸发到空穴传输层表面作为阳极,厚度为8~15nm,从而制备得到本发明所述的具有广角探测成像能力的窄带光探测器,结构为半球基底/Cr/SnO2/PEA2FA3Pb4X13/PTAA/Cr。(6) Evaporating metal Cr onto the surface of the hole transport layer as an anode by vacuum evaporation, with a thickness of 8-15 nm, thereby preparing the narrow-band photodetector with wide-angle detection and imaging capability according to the present invention, the structure is hemispherical substrate/Cr /SnO 2 /PEA 2 FA 3 Pb 4 X 13 /PTAA/Cr.

本发明所述的一种广角探测成像能力的窄带光探测器的成像方法,其步骤如下:The imaging method of a narrow-band photodetector with wide-angle detection imaging capability according to the present invention, the steps are as follows:

(a)在X-Y二维位移平台上固定中心波长在400~900nm可调的单色光LED光源,光源功率为3~10W;(a) Fix a monochromatic LED light source whose center wavelength is 400-900nm adjustable on the X-Y two-dimensional displacement platform, and the light source power is 3-10W;

(b)将步骤(a)中的X-Y二维位移平台连接至计算机,控制其移动,移动单位距离为200~500μm/步;(b) connecting the X-Y two-dimensional displacement platform in step (a) to a computer to control its movement, and the moving unit distance is 200-500 μm/step;

(c)将步骤(a)中的LED光源连接函数发生器(型号为普源RIGOL DG1022Z),函数发生器输出频率为20~90Hz的方波信号;(c) connecting the LED light source in the step (a) to a function generator (the model is Puyuan RIGOL DG1022Z), and the function generator outputs a square wave signal with a frequency of 20 to 90 Hz;

(d)将待测物体(天鹅型发卡)放置于LED光源之下的玻璃平台上,将本发明制备的半球面窄带光探测器放置于玻璃平台之下;(d) placing the object to be measured (swan-shaped hairpin) on the glass platform under the LED light source, and placing the hemispherical narrow-band light detector prepared by the present invention under the glass platform;

(e)调整步骤(d)中所述的半球面窄带光探测器的角度,使之与成像系统呈现一定夹角(入射光方向与半球面光探测器底面法线间的夹角(ξ),半球面探测器通过沿球心旋转,可以用来改变ξ角来控制实现探测器对各个角度成像,ξ=0°~90°),然后将半球面窄带光探测器连接前置放大器、锁相放大器和计算机;在实验中,函数发生器输出方波信号给光源并与锁相放大器同频,器件接收光信号并转化为电流信号输出到前置放大器中,前置放大器将电流信号转化为电压信号并放大传输给锁相放大器,锁相放大器进一步放大来自前置放大器与函数发生器同频信号的电压信息并传输给计算机。步进电机每移动一步,一个数据点被读取,形成数据矩阵。(e) Adjust the angle of the hemispherical narrow-band photodetector described in step (d) so that it presents a certain angle with the imaging system (the angle (ξ) between the incident light direction and the normal to the bottom surface of the hemispherical photodetector) , the hemispherical detector can be used to change the ξ angle by rotating along the center of the sphere to control the imaging of the detector at various angles, ξ=0°~90°), and then connect the hemispherical narrow-band photodetector to the preamplifier, lock Phase amplifier and computer; in the experiment, the function generator outputs a square wave signal to the light source and the same frequency as the lock-in amplifier, the device receives the optical signal and converts it into a current signal and outputs it to the preamplifier, and the preamplifier converts the current signal into The voltage signal is amplified and transmitted to the lock-in amplifier, and the lock-in amplifier further amplifies the voltage information from the same frequency signal of the preamplifier and the function generator and transmits it to the computer. Each time the stepper motor moves one step, a data point is read, forming a data matrix.

(f)利用计算机读取电压数据矩阵,最终通过MATLAB软件获得成像结果。(f) The voltage data matrix is read by a computer, and the imaging results are finally obtained by MATLAB software.

本发明提供的一种提供具有广角探测能力的窄带光探测器及其制备方法与现有的技术相比,具有以下优点:Compared with the prior art, a narrow-band photodetector with wide-angle detection capability and a preparation method thereof provided by the present invention have the following advantages:

本发明所述光探测器通过喷涂法,将钙钛矿前驱体附着在球面基底上,低成本的制造出了无需透镜的低廉成本超广角光探测器。The photodetector of the present invention attaches the perovskite precursor on the spherical substrate through a spraying method, and thus a low-cost ultra-wide-angle photodetector without a lens is manufactured at low cost.

本发明所述的光探测器通过喷涂法控制钙钛矿前驱体附着在球面基底上,合理控制钙钛矿的厚度,复合表面载流子,可以达到没有滤光片的存在下实现,单波长响应的能力,其窄带响应达到~20nm的半高宽。The photodetector of the present invention controls the adhesion of the perovskite precursor to the spherical substrate through the spraying method, the thickness of the perovskite is reasonably controlled, and the composite surface carriers can be realized without the existence of a filter, and the single wavelength can be realized. The ability to respond, its narrowband response reaches a full width at half maximum of ~20nm.

本发明所述的使用准二维钙钛矿薄膜(PEA2FA3Pb4X13)作为活性材料,一方面大体积的阳离子能够有效复合表面短波长产生的载流子,提高钙钛矿的稳定性;另一方面,三维钙钛矿的加入,提高了窄带探测器可调节的探测范围。The quasi-two-dimensional perovskite film (PEA 2 FA 3 Pb 4 X 13 ) in the present invention is used as the active material. On the one hand, the large-volume cations can effectively recombine the carriers generated by the short wavelength on the surface and improve the perovskite performance. Stability; on the other hand, the addition of three-dimensional perovskites improves the adjustable detection range of narrow-band detectors.

附图说明Description of drawings

图1为在半球基底上制备PEA2FA3Pb4X13钙钛矿膜的过程示意图;分为喷涂、氮气辅助成膜、沉积循环、热退火等步骤。如图所示,前驱体溶液被气动喷枪喷射到半球基底表面,在氮气压作用下迅速成膜干燥;干燥后继续将前驱体溶液喷射到半球面表面,进行循环沉积;整个过程在一定温度(80~120℃)的情况下完成,从而在半球基底表面上得到PEA2FA3Pb4X13钙钛矿膜。Figure 1 is a schematic diagram of the process of preparing a PEA 2 FA 3 Pb 4 X 13 perovskite film on a hemispherical substrate; it is divided into spraying, nitrogen-assisted film formation, deposition cycle, thermal annealing and other steps. As shown in the figure, the precursor solution was sprayed onto the surface of the hemispherical substrate by a pneumatic spray gun, and quickly formed into a film and dried under the action of nitrogen pressure; after drying, the precursor solution was sprayed onto the surface of the hemispherical surface for cyclic deposition; 80-120°C), thereby obtaining a PEA 2 FA 3 Pb 4 X 13 perovskite film on the surface of the hemispherical substrate.

图2(a)为制备的PEA2FA3Pb4I13钙钛矿膜的光学照片,说明喷涂形成的钙钛矿薄膜具有良好的成膜性和平整度;图(b)为PEA2FA3Pb4X13钙钛矿膜的X-射线粉末衍射(XRD)测试结果,表明薄膜显示出优异的结晶性。Figure 2(a) is the optical photo of the prepared PEA 2 FA 3 Pb 4 I 13 perovskite film, which shows that the perovskite film formed by spraying has good film-forming properties and flatness; Figure (b) is PEA 2 FA The X-ray powder diffraction (XRD) test results of the 3 Pb 4 X 13 perovskite film show that the film exhibits excellent crystallinity.

图3为本发明所述光探测器的结构示意图;如图所示,本发明一共包括两种器件结构:一种器件结构是由半球基底7、阳极6、空穴传输层2、钙钛矿薄膜1、电子传输层3、缓冲层4和阴极5组成,另一种器件结构是由半球基底f、阴极d、电子传输层c、钙钛矿薄膜a、空穴传输层b和阳极e组成。3 is a schematic structural diagram of the photodetector according to the present invention; as shown in the figure, the present invention includes two device structures: one device structure is composed of a hemispherical substrate 7, an anode 6, a hole transport layer 2, a perovskite Thin film 1, electron transport layer 3, buffer layer 4 and cathode 5 are composed of, another device structure is composed of hemispherical substrate f, cathode d, electron transport layer c, perovskite film a, hole transport layer b and anode e .

图4(a)为电压-电流密度测试系统示意图;图中用强度可变的光源照射本发明制备的器件,将电流源表与器件的正负极连接,再将电流源表连接计算机,测量不同电压,电压施加在器件正负极之间下器件在不同光照强度下的电流密度,并绘制成曲线。Figure 4 (a) is a schematic diagram of a voltage-current density test system; in the figure, a light source with variable intensity is used to irradiate the device prepared by the present invention, the current source meter is connected to the positive and negative electrodes of the device, and then the current source meter is connected to a computer to measure Different voltages, the current density of the device under different light intensities when the voltage is applied between the positive and negative electrodes of the device, and plotted as a curve.

图4(b)为半球基底/Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr光探测器在不同光照强度下的电压-电流密度曲线;结果显示该器件表现出低的暗电流并有光生电压现象,说明器件的噪声比较低,同时能够自供电工作。Figure 4(b) shows the voltage-current density curves of the hemispherical substrate/Cr/PEDOT:PSS/PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP/Cr photodetector under different illumination intensities; the results show that the device performs well The low dark current and photo-generated voltage phenomenon indicate that the device has low noise and can work with self-powered power.

图5(a)为光开关信号测试系统示意图;图中信号发生器给出一个方波信号触发光源,光源输出方波信号到器件表面;器件将采集到的光信号转化成电信号输出到示波器,产生方波图像;820nm和532nm的光源被分别使用,光强分别是0.72mW/cm2和2.17mW/cm2Figure 5(a) is a schematic diagram of the optical switch signal test system; in the figure, the signal generator gives a square wave signal to trigger the light source, and the light source outputs the square wave signal to the surface of the device; the device converts the collected optical signal into an electrical signal and outputs it to the oscilloscope , producing a square wave image; 820 nm and 532 nm light sources were used, respectively, with light intensities of 0.72 mW/cm 2 and 2.17 mW/cm 2 , respectively.

图5(b)为半球基底/Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr光探测器在不同波长光照触发下的方波信号图;图中器件在820nm的光照射下,有明显的方波信号;而在532nm的光的照射下,没有明显的信号。结果显示该器件能够特异性识别820nm波长的光,而对532nm的光几乎没有响应,这表明了器件的窄带响应效果显著。Figure 5(b) is the square wave signal diagram of the hemispherical substrate/Cr/PEDOT:PSS/PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP/Cr photodetector triggered by different wavelengths of light; the device in the figure is at 820nm Under the illumination of 532nm light, there is an obvious square wave signal; under the illumination of 532nm light, there is no obvious signal. The results show that the device can specifically recognize light with a wavelength of 820 nm, but has almost no response to light of 532 nm, which indicates that the narrow-band response of the device is remarkable.

图6(a)为器件广角探测能力测试系统示意图;图中光源位置可变,用于调整入射光的角度,器件连接电流源表和计算机,用来读取光探测器对不同入射角的光产生的电信号。Figure 6(a) is a schematic diagram of the device's wide-angle detection capability testing system; in the figure, the position of the light source is variable, which is used to adjust the angle of the incident light. generated electrical signal.

图6(b)半球基底或平面基底/Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr光探测器的角度响应范围曲线;横坐标为探测角度,纵坐标为归一化的光电流大小;结果显示半球面与平面光探测器对不同角度的入射光的响应能力不同,半球面光探测器表现出极高的广角探测能力。Fig. 6(b) The angular response range curve of the hemispherical or planar substrate/Cr/PEDOT:PSS/PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP/Cr photodetector; the abscissa is the detection angle, and the ordinate is The normalized photocurrent magnitude; the results show that the hemispherical and planar photodetectors have different responsiveness to incident light at different angles, and the hemispherical photodetector exhibits a very high wide-angle detection capability.

图7(a)为器件的窄带探测能力测试系统示意图;通过外量子效率(EQE)来衡量,图中氙灯光源经过单色仪,并通过斩波器,输出具有一定频率的单色光照射到探测器上。探测器产生的电流信号经过前置放大器放大并转化为电压信号,经过锁相放大器对同频信号再次放大,并输入到计算机,计算探测器产生的电流密度与照射到探测器上的光子密度的比值来计算量子效率。Figure 7(a) is a schematic diagram of the device's narrow-band detection capability testing system; it is measured by external quantum efficiency (EQE). on the detector. The current signal generated by the detector is amplified by the preamplifier and converted into a voltage signal, and the same-frequency signal is amplified again by the lock-in amplifier and input to the computer to calculate the difference between the current density generated by the detector and the photon density irradiated on the detector. ratio to calculate the quantum efficiency.

图7(b)为不同结构光探测器的窄带探测能力图;横坐标为波长,纵坐标为归一化的外量子效率(EQE),其中550nm响应的器件结构为半球基底/Cr/SnO2/PEA2FA3Pb4Br13/PTAA/Cr,600nm响应的器件结构为半球基底/Cr/SnO2/PEA2FA3Pb4Br11I2/PTAA/Cr,660nm响应的器件结构为半球基底/Cr/SnO2/PEA2FA3Pb4Br8I5/PTAA/Cr,820nm响应的器件结构为半球基底/Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr。该图说明我们通过改变卤素X中I、Br的相对比例能够成功的调控窄带探测器的响应中心波长的位置。同时其在不同波长下的EQE表现出只在中心波长附近有响应的特点。而在其他位置EQE很低,说明该探测器对其他波长的光几乎没有响应,体现出窄带探测器窄带探测的性质。Figure 7(b) is a graph of the narrowband detection capability of light detectors with different structures; the abscissa is the wavelength, the ordinate is the normalized external quantum efficiency (EQE), and the device structure of the 550nm response is hemispherical substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 Br 13 /PTAA/Cr, the device structure of 600nm response is hemispherical substrate /Cr/SnO 2 /PEA 2 FA 3 Pb 4 Br 11 I 2 /PTAA/Cr, the device structure of 660nm response is hemisphere Substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 Br 8 I 5 /PTAA/Cr, the device structure of 820nm response is hemispherical substrate/Cr/PEDOT:PSS/PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP /Cr. The figure shows that we can successfully tune the position of the response center wavelength of the narrowband detector by changing the relative ratio of I and Br in halogen X. At the same time, its EQE at different wavelengths shows the characteristic of only responding near the central wavelength. In other positions, the EQE is very low, indicating that the detector has almost no response to light of other wavelengths, which reflects the nature of narrow-band detection by narrow-band detectors.

图8为制备的光探测器成像系统示意图;函数发生器连接单色光源,函数发生器输出方波信号给单色光源并与锁相放大器同频,器件接收光信号并转化为电流信号输出到前置放大器中,前置放大器将电流信号转化为电压信号并放大传输给锁相放大器,锁相放大器进一步放大来自前置放大器与函数发生器同频信号的电压信息并传输给计算机。步进电机每移动一步,一个数据点被读取,形成数据矩阵。Figure 8 is a schematic diagram of the prepared photodetector imaging system; the function generator is connected to a monochromatic light source, the function generator outputs a square wave signal to the monochromatic light source and has the same frequency as the lock-in amplifier, the device receives the optical signal and converts it into a current signal and outputs it to In the preamplifier, the preamplifier converts the current signal into a voltage signal and amplifies it and transmits it to the lock-in amplifier. The lock-in amplifier further amplifies the voltage information from the same frequency signal of the preamplifier and the function generator and transmits it to the computer. Each time the stepper motor moves one step, a data point is read, forming a data matrix.

图9表示成像的具体系统以及与角度的关系示意图。图中光源为可移动光源,由位移台驱使移动。具体成像时,物体与探测器的相对位置保持不变,成像系统搭建完成后,可以通过旋转探测器的角度(ξ为半球基底法线与放置待成像物体的玻璃平台法线间的夹角,可在-90°~90°间变化)与调整物体的位置,来改变物体成像的起始角度(θ1)和结束角度(θ2)所在的范围。(a)图显示了当角度为0度时(ξ=0°),物体所占角度范围与器件的相对位置示意图。(b)图显示了当角度为-90度时(ξ=-90°),物体所占角度范围与器件的相对位置示意图。FIG. 9 shows a schematic diagram of the specific system of imaging and the relationship with the angle. The light source in the figure is a movable light source, which is driven by the displacement stage to move. During the specific imaging, the relative position of the object and the detector remains unchanged. After the imaging system is built, the angle of the detector can be rotated (ξ is the angle between the normal line of the hemispherical base and the normal line of the glass platform on which the object to be imaged is placed, It can be changed from -90° to 90°) and the position of the object can be adjusted to change the range of the start angle (θ 1 ) and end angle (θ 2 ) of the object imaging. Figure (a) shows a schematic diagram of the relative position of the angular range occupied by the object and the device when the angle is 0 degrees (ξ=0°). Figure (b) shows a schematic diagram of the relative position of the angular range occupied by the object and the device when the angle is -90 degrees (ξ=-90°).

图10物体占据不同成像角度(从-52度到-90度和从-8度到+30度)的成像示意图;因为探测器是轴对称结构,所以利用正负号来表示器件对称方位的探测成像能力。Figure 10. Imaging schematic diagrams of objects occupying different imaging angles (from -52 degrees to -90 degrees and from -8 degrees to +30 degrees); because the detector is an axisymmetric structure, the sign is used to indicate the detection of the symmetrical orientation of the device imaging capabilities.

图11为制备的半球面光探测器与平面光探测器成像结果图;图11(a)平面光探测器成像结果图,物体所占角度从-8度到+30度;图11(b)平面光探测器成像结果图,物体所占角度从-90度到-52度;图11(c)半球面光探测器成像结果图,物体所占角度从-8度到+30度;图11(d)半球面光探测器成像结果图,物体所占角度从-90度到-52度。这里说明球面光探测器对于各个角度的成像能力,要优于平面探测器。尤其是掠角(-90度)成像,平面探测器几乎没有信号,而半球面探测器依然能够保持成像效果。体现出喷涂方法制备的半球面探测器有很好的广角探测能力。Figure 11 shows the imaging results of the prepared hemispherical photodetector and the plane photodetector; Figure 11(a) The imaging results of the plane photodetector, the angle occupied by the object is from -8 degrees to +30 degrees; Figure 11(b) The imaging result of the plane light detector, the angle occupied by the object is from -90 degrees to -52 degrees; Figure 11(c) The imaging result of the hemispherical light detector, the angle occupied by the object is from -8 degrees to +30 degrees; Figure 11 (d) The imaging result of the hemispherical photodetector, the angle occupied by the object is from -90 degrees to -52 degrees. It is explained here that the imaging ability of spherical light detectors for various angles is better than that of plane detectors. Especially for glancing angle (-90 degree) imaging, the plane detector has almost no signal, while the hemispherical detector can still maintain the imaging effect. It shows that the hemispherical detector prepared by spraying method has good wide-angle detection ability.

图12不同单色光下不同结构半球面光探测器成像结果图;图12(a)为550nm单色光,成像器件结构为半球基底/Cr/SnO2/PEA2FA3Pb4Br13/PTAA/Cr,图12(b)为600nm单色光,成像器件结构为半球基底/Cr/SnO2/PEA2FA3Pb4I2Br11/PTAA/Cr,图12(c)为660nm单色光,成像器件结构为半球基底/Cr/SnO2/PEA2FA3Pb4I5Br8/PTAA/Cr,图12(d)为上述不同单色光成像结果的叠加图像。这种成像能够更真实的表现物体,同时各单色图像对于后期图像处理可以提供很大的帮助。Fig. 12 Imaging results of hemispherical photodetectors with different structures under different monochromatic light; Fig. 12(a) is 550 nm monochromatic light, and the imaging device structure is hemispherical substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 Br 13 / PTAA/Cr, Figure 12(b) is 600nm monochromatic light, the imaging device structure is hemispherical substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 2 Br 11 /PTAA/Cr, Figure 12(c) is 660nm monochromatic light Color light, the imaging device structure is hemispherical substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 5 Br 8 /PTAA/Cr, Fig. 12(d) is the superimposed image of the above-mentioned different monochromatic light imaging results. This imaging can represent objects more realistically, and each monochrome image can provide great help for post-image processing.

具体实施方式Detailed ways

实施例1:对制备的钙钛矿薄膜进行结构表征Example 1: Structural characterization of the prepared perovskite thin films

(a)将甲脒氢卤酸盐(FAI),卤化铅(PbI2),苯乙胺氢卤酸盐(PEAI)以及甲胺盐酸盐(MACl)按照物质的量比值为3:4:2:1.2配置成0.6M(相对于铅离子)的前驱体溶液,溶剂为乙腈(ACN)和N,N-二甲基甲酰胺(DMF)溶剂体积比例为1:1,控制溶液能将钙钛矿粉末溶解完全。(a) Formamidine hydrohalide (FAI), lead halide (PbI 2 ), phenethylamine hydrohalide (PEAI) and methylamine hydrochloride (MACl) are in a ratio of 3:4: 2:1.2 is configured as a precursor solution of 0.6M (relative to lead ions), the solvent is acetonitrile (ACN) and N,N-dimethylformamide (DMF), and the solvent volume ratio is 1:1. The titanium ore powder is completely dissolved.

(b)将步骤(a)配制的前驱体溶液2000μL加入到型号HD180,喷嘴直径0.2的气动喷枪中;(b) adding 2000 μL of the precursor solution prepared in step (a) to a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2;

(c)将表面修饰的半球基底放置在100℃的加热台上,并将步骤(b)中的气动喷枪连接输出压强为1.7MPa的空气压缩机,喷涂时间由喷涂总体积决定。喷涂速率为0.13mL/min,喷涂到半球基底上,在半球的外表面上得到钙钛矿湿膜;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度0.25r/min,平移速度为10cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用5MPa的高速氮气吹扫整个半球表面至形成较为干燥的薄膜;(c) The surface-modified hemispherical substrate was placed on a heating table at 100 °C, and the pneumatic spray gun in step (b) was connected to an air compressor with an output pressure of 1.7 MPa. The spraying time was determined by the total spraying volume. The spraying rate was 0.13 mL/min, sprayed onto the hemispherical substrate, and a wet perovskite film was obtained on the outer surface of the hemisphere; during the spraying process, the rotation and translation of the hemispherical substrate were maintained, the rotation speed was 0.25r/min, and the translational speed was In the process of spraying, after each droplet of the solution completely covers the hemispherical surface, the entire hemispherical surface is purged with 5MPa high-speed nitrogen gas to form a relatively dry film;

(d)将步骤(c)得到的喷涂有钙钛矿湿膜的半球基底在120℃下退火10分钟,然后在160℃下退火30分钟,最后在170℃下退火60分钟,退火过程中保持黑暗条件,最后得到的钙钛矿薄膜的厚度为25μm;钙钛矿的分子式是PEA2FA3Pb4I13(d) The hemispherical substrate sprayed with the wet perovskite film obtained in step (c) was annealed at 120°C for 10 minutes, then annealed at 160°C for 30 minutes, and finally annealed at 170°C for 60 minutes, maintaining during the annealing process Under dark conditions, the thickness of the finally obtained perovskite film is 25 μm; the molecular formula of perovskite is PEA 2 FA 3 Pb 4 I 13 .

图2为制备的PEA2FA3Pb4I13钙钛矿膜的光学照片(a)及XRD图(b),同时薄膜显示出优异的结晶性。FIG. 2 is an optical photograph (a) and an XRD pattern (b) of the prepared PEA 2 FA 3 Pb 4 I 13 perovskite film, and the film shows excellent crystallinity.

实施例2:Example 2:

1、将半球基底(材质为普通玻璃,直径为0.8cm)在超纯水、丙酮、异丙醇中超声清洗各15分钟后,烘箱中干燥;1. The hemispherical substrate (made of ordinary glass, with a diameter of 0.8cm) was ultrasonically cleaned in ultrapure water, acetone, and isopropanol for 15 minutes each, and dried in an oven;

2、通过真空蒸发将金属Cr蒸镀到半球基底表面作为阳极,厚度为12nm,然后对金属Cr表面进行紫外-臭氧处理20分钟,再进行等离子体处理5分钟;2. Evaporate metal Cr onto the surface of the hemispherical substrate as an anode by vacuum evaporation, with a thickness of 12 nm, and then perform ultraviolet-ozone treatment on the surface of metal Cr for 20 minutes, and then perform plasma treatment for 5 minutes;

3、空穴传输层沉积到半球表面,其步骤如下:3. The hole transport layer is deposited on the surface of the hemisphere, and the steps are as follows:

(a)将聚(3,4-亚乙二氧基噻吩)-聚(苯乙烯磺酸)(PEDOT:PSS)水溶液用超纯水稀释,得到PEDOT:PSS浓度为0.1%wt的空穴传输层溶液;(a) Poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) (PEDOT:PSS) aqueous solution was diluted with ultrapure water to obtain hole transport with a PEDOT:PSS concentration of 0.1%wt layer solution;

(b)将步骤(a)中的空穴传输层溶液800μL加入到型号HD180,喷嘴直径0.2mm的气动喷枪中;(b) adding 800 μL of the hole transport layer solution in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2 mm;

(c)将表面制备有阳极的半球基底放置在65℃的热台上,将步骤(b)中的气动喷枪连接空气压缩机,输出压强为1.7MPa,喷涂速率为0.13mL/min,将空穴传输层溶液喷涂到阳极表面,在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.25r/min,平移速度为10cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用5MPa的高速氮气吹扫整个半球表面至形成干燥的薄膜;当溶液耗尽后,将薄膜在170℃下退火30分钟,从而在阳极表面得到厚度10nm的空穴传输层;(c) The hemispherical substrate with the anode prepared on the surface is placed on a hot stage at 65°C, the pneumatic spray gun in step (b) is connected to an air compressor, the output pressure is 1.7MPa, the spraying rate is 0.13mL/min, the air is The hole transport layer solution is sprayed onto the surface of the anode. During the spraying process, the rotation and translation of the hemispherical substrate are maintained. After each droplet of the solution completely covered the surface of the hemisphere, the entire surface of the hemisphere was purged with a high-speed nitrogen gas of 5 MPa to form a dry film; when the solution was exhausted, the film was annealed at 170 °C for 30 minutes, so that the anode surface A hole transport layer with a thickness of 10 nm was obtained;

4、PEA2FA3Pb4I13钙钛矿薄膜沉积到空穴传输层表面,其步骤如下:4. The PEA 2 FA 3 Pb 4 I 13 perovskite film is deposited on the surface of the hole transport layer, and the steps are as follows:

(a)将甲脒氢卤酸盐(FAI)、卤化铅(PbI2)、苯乙胺氢卤酸盐(PEAI)以及甲胺盐酸盐(MACl)按照物质的量比值为3:4:2:1.2配置成0.6M(相对于铅离子)的前驱体溶液溶剂为乙腈(ACN)和N,N-二甲基甲酰胺(DMF)的混合,体积比例为1:1;(a) Formamidine hydrohalide (FAI), lead halide (PbI 2 ), phenethylamine hydrohalide (PEAI) and methylamine hydrochloride (MACl) are in a ratio of 3:4: 2:1.2 The precursor solution solvent configured to be 0.6M (relative to lead ions) is a mixture of acetonitrile (ACN) and N,N-dimethylformamide (DMF), and the volume ratio is 1:1;

(b)将步骤(a)配制的前驱体溶液1500μL加入到型号HD180,喷嘴直径0.2的气动喷枪中;(b) adding 1500 μL of the precursor solution prepared in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2;

(c)将表面沉积有空穴传输层的半球基底放置在在100℃的加热台上,并将步骤(b)中的气动喷枪连接输出压强为1.7MPa的空气压缩机,喷涂速率为0.13mL/min喷涂到半球基底上,在半球的外表面上得到钙钛矿湿膜;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度0.25r/min,平移速度为10cm/s,从而保持喷涂薄膜的平整性,每次溶液的液滴完整覆盖一次表面,用5MPa的高速氮气吹扫整个表面至形成表面较为干燥的薄膜;(c) The hemispherical substrate with the hole transport layer deposited on the surface is placed on a heating stage at 100 °C, and the pneumatic spray gun in step (b) is connected to an air compressor with an output pressure of 1.7 MPa, and the spray rate is 0.13 mL /min sprayed onto the hemispherical substrate, and a wet perovskite film was obtained on the outer surface of the hemisphere; during the spraying process, the rotation and translation of the hemispherical substrate were maintained, the rotation speed was 0.25r/min, and the translational speed was 10cm/s, thereby To maintain the flatness of the sprayed film, the droplets of each solution completely cover the surface once, and the entire surface is purged with a high-speed nitrogen gas of 5MPa to form a relatively dry film on the surface;

(d)将步骤(c)得到的喷涂有钙钛矿湿膜的半球基底在120℃下退火10分钟,然后在140℃下退火30分钟,最后在170℃下退火60分钟,退火过程中保持黑暗条件,最后得到的钙钛矿层的厚度为12μm(d) The hemispherical substrate sprayed with the wet perovskite film obtained in step (c) was annealed at 120°C for 10 minutes, then annealed at 140°C for 30 minutes, and finally annealed at 170°C for 60 minutes, maintaining during the annealing process Dark conditions, the resulting perovskite layer has a thickness of 12 μm

5、通过真空蒸发将购买得到的富勒烯(C60)蒸镀到钙钛矿薄膜表面,得到厚度20nm的电子传输层;5. Evaporating the purchased fullerene (C 60 ) onto the surface of the perovskite film by vacuum evaporation to obtain an electron transport layer with a thickness of 20 nm;

6、通过真空蒸发将购买得到的2,9-二甲基-4,7-联苯-1,10-邻二氮杂菲(BCP)蒸镀到电子传输层表面,得到厚度6nm的缓冲层;6. Evaporate the purchased 2,9-dimethyl-4,7-biphenyl-1,10-phenanthroline (BCP) onto the surface of the electron transport layer by vacuum evaporation to obtain a buffer layer with a thickness of 6 nm ;

7、通过真空蒸发将金属Cr蒸发到缓冲层表面作为阴极,厚度为8nm;从而制备得到本发明所述的具有广角探测成像能力的窄带光探测器,结构为半球基底/Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr。7. Evaporating metal Cr onto the surface of the buffer layer as a cathode by vacuum evaporation, with a thickness of 8 nm; thereby preparing the narrow-band photodetector with wide-angle detection and imaging capability according to the present invention, the structure is hemispherical substrate/Cr/PEDOT:PSS/ PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP/Cr.

实施例3:Example 3:

1、将半球基底(材质为普通玻璃,直径为0.8cm)在超纯水、丙酮、异丙醇中超声清洗各15分钟后,烘箱中干燥;1. The hemispherical substrate (made of ordinary glass, with a diameter of 0.8cm) was ultrasonically cleaned in ultrapure water, acetone, and isopropanol for 15 minutes each, and dried in an oven;

2、通过真空蒸发将金属Cr蒸镀到半球基底表面作为阴极,厚度为15nm,然后对金属Cr表面进行紫外-臭氧处理20分钟,再进行等离子体处理5分钟;2. Evaporate metal Cr onto the surface of the hemispherical substrate as a cathode by vacuum evaporation, with a thickness of 15 nm, and then perform ultraviolet-ozone treatment on the surface of metal Cr for 20 minutes, and then perform plasma treatment for 5 minutes;

3、在阴极表面沉积电子传输层3. Deposition of an electron transport layer on the surface of the cathode

(a)将购买的SnO2水溶液用超纯水稀释,制备SnO2浓度为0.1%wt的电子传输层溶液;(a) Dilute the purchased SnO aqueous solution with ultrapure water to prepare an electron transport layer solution with a SnO concentration of 0.1% wt;

(b)将步骤(a)得到的电子传输层溶液600μL加入到型号HD180,喷嘴直径0.2mm的气动喷枪中;(b) adding 600 μL of the electron transport layer solution obtained in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2 mm;

(c)将表面制备有阴极的半球基底放置在70℃加热台上,并将步骤(b)中的气动喷枪连接空气压缩机,输出压强为2MPa,喷涂速率为0.12mL/min,将电子传输层溶液喷涂到阴极表面;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.25r/min,平移速度为15cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用5MPa的高速氮气吹扫整个半球表面至形成较为干燥的薄膜;当溶液耗尽后,将薄膜在170℃下退火30分钟,再进行紫外-臭氧处理20分钟,从而在阴极表面得到厚度10nm的电子传输层;(c) The hemispherical substrate with the cathode prepared on the surface is placed on a heating table at 70°C, and the pneumatic spray gun in step (b) is connected to an air compressor, the output pressure is 2MPa, and the spray rate is 0.12mL/min. The coating solution is sprayed onto the cathode surface; during the spraying process, the rotation and translation of the hemispherical substrate are maintained, the rotation speed is 0.25r/min, and the translation speed is 15cm/s, so as to maintain the flatness of the sprayed film; during the spraying process, After each droplet of the solution completely covered the surface of the hemisphere, the entire surface of the hemisphere was purged with a high-speed nitrogen gas of 5MPa to form a relatively dry film; when the solution was exhausted, the film was annealed at 170 °C for 30 minutes, and then UV-ozone was carried out. Treated for 20 minutes to obtain an electron transport layer with a thickness of 10 nm on the surface of the cathode;

4、PEA2FA3Pb4Br13钙钛矿薄膜沉积到电子传输层表面,其步骤如下:4. The PEA 2 FA 3 Pb 4 Br 13 perovskite film is deposited on the surface of the electron transport layer, and the steps are as follows:

(a)将甲脒氢卤酸盐(FABr)、卤化铅(PbBr2)、苯乙胺氢卤酸盐(PEABr)以及甲胺盐酸盐(MACl)按照物质的量比值为3:4:2:1.2配置成0.5M(相对于铅离子)的前驱体溶液溶剂为乙腈(ACN)和N,N-二甲基甲酰胺(DMF)的混合,体积比例为2:3;(a) Formamidine hydrohalide (FABr), lead halide (PbBr 2 ), phenethylamine hydrohalide (PEABr) and methylamine hydrochloride (MACl) are in a ratio of 3:4: 2:1.2 The precursor solution solvent configured to be 0.5M (relative to lead ions) is a mixture of acetonitrile (ACN) and N,N-dimethylformamide (DMF), and the volume ratio is 2:3;

(b)将步骤(a)配制的前驱体溶液1200μL加入到型号HD180,喷嘴直径0.2的气动喷枪中;(b) adding 1200 μL of the precursor solution prepared in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2;

(c)将表面沉积有电子传输层的半球基底放置在100℃的加热台上,将步骤(b)中的气动喷枪连接输出压强为2MPa的空气压缩机,喷涂速率为0.15mL/min,将前驱体溶液喷涂到电子传输层表面;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.25r/min,平移速度为10cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用5MPa的高速氮气吹扫整个半球表面至形成较为干燥的薄膜;(c) place the hemispherical substrate with the electron transport layer deposited on the surface on a heating table at 100°C, connect the pneumatic spray gun in step (b) to an air compressor with an output pressure of 2MPa, and the spray rate is 0.15mL/min. The precursor solution is sprayed onto the surface of the electron transport layer; during the spraying process, the rotation and translation of the hemispherical substrate are maintained, the rotation speed is 0.25r/min, and the translation speed is 10cm/s, so as to maintain the flatness of the sprayed film; During the process, after each droplet of the solution completely covers the surface of the hemisphere, the entire surface of the hemisphere is purged with a high-speed nitrogen gas of 5MPa to form a relatively dry film;

(d)将步骤(c)得到的喷涂有钙钛矿湿膜的半球基底在120℃下退火10分钟,然后在140℃下退火30分钟,最后在170℃下退火60分钟,退火过程中保持黑暗条件,钙钛矿薄膜的厚度为10μm;(d) The hemispherical substrate sprayed with the wet perovskite film obtained in step (c) was annealed at 120°C for 10 minutes, then annealed at 140°C for 30 minutes, and finally annealed at 170°C for 60 minutes, maintaining during the annealing process Dark conditions, the thickness of the perovskite film is 10 μm;

5、在钙钛矿薄膜表面沉积空穴传输层,其步骤如下:5. Deposit a hole transport layer on the surface of the perovskite film, the steps are as follows:

(a)将购买的聚[双(4-苯基)(2,4,6-三甲基苯基)胺](PTAA)与甲苯配置成PTAA浓度为0.1mg/mL空穴传输层溶液;(a) The purchased poly[bis(4-phenyl)(2,4,6-trimethylphenyl)amine] (PTAA) was prepared into a hole transport layer solution with a PTAA concentration of 0.1 mg/mL in toluene;

(b)将步骤(a)中的空穴传输层溶液400μL加入到型号HD180,喷嘴直径0.2mm的气动喷枪中;(b) adding 400 μL of the hole transport layer solution in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2 mm;

(c)将表面制备有钙钛矿薄膜的半球基底固定在80℃加热台上,并将步骤(b)中的气动喷枪连接空气压缩机,输出压强为1.5MPa,喷涂时间由喷涂总体积决定。喷涂速率为0.13mL/min,喷涂到半球基底上,在半球的外表面上得到钙钛矿湿膜;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度0.25r/min,平移速度为10cm/s,每次溶液的液滴完整覆盖一次表面,用5MPa的高速氮气吹扫整个表面至形成表面较为干燥的薄膜;当溶液耗尽后,将薄膜半球在100℃下退火10分钟,最后得到的空穴传输层的厚度为10nm;(c) Fix the hemispherical substrate with the perovskite film on the surface on a heating table at 80°C, and connect the pneumatic spray gun in step (b) to an air compressor, the output pressure is 1.5MPa, and the spraying time is determined by the total spraying volume. . The spraying rate was 0.13 mL/min, sprayed onto the hemispherical substrate, and a wet perovskite film was obtained on the outer surface of the hemisphere; during the spraying process, the rotation and translation of the hemispherical substrate were maintained, the rotation speed was 0.25r/min, and the translational speed was 10cm/s, each droplet of the solution completely covers the surface once, and the entire surface is purged with a high-speed nitrogen gas of 5MPa to form a film with a relatively dry surface; when the solution is exhausted, the film hemisphere is annealed at 100 °C for 10 minutes, The thickness of the finally obtained hole transport layer is 10 nm;

6、通过真空蒸发将金属Cr蒸发到空穴传输层表面作为阳极,厚度为8nm,从而制备得到本发明所述的具有广角探测成像能力的窄带光探测器,结构为半球基底/Cr/SnO2/PEA2FA3Pb4Br13/PTAA/Cr。6. Evaporating metal Cr onto the surface of the hole transport layer as an anode by vacuum evaporation, with a thickness of 8 nm, thereby preparing the narrow-band photodetector with wide-angle detection and imaging capability according to the present invention, the structure is hemispherical substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 Br 13 /PTAA/Cr.

实施例4:Example 4:

1、选取直径为0.8cm的半球基底(材质为普通玻璃,可以由商业渠道获得),在超纯水、丙酮和异丙醇中分别超声清洗15分钟后干燥;1. Select a hemispherical substrate with a diameter of 0.8cm (the material is ordinary glass, which can be obtained from commercial channels), ultrasonically clean it in ultrapure water, acetone and isopropanol for 15 minutes and then dry;

2、通过真空蒸发将金属Cr蒸镀到半球基底表面作为阴极,厚度为13nm,然后对金属Cr表面进行紫外-臭氧处理20分钟,再进行等离子体处理5分钟;2. Evaporate metal Cr onto the surface of the hemispherical substrate as a cathode by vacuum evaporation, with a thickness of 13 nm, and then perform ultraviolet-ozone treatment on the surface of the metal Cr for 20 minutes, and then perform plasma treatment for 5 minutes;

3、在阴极表面沉积电子传输层3. Deposition of an electron transport layer on the surface of the cathode

(a)将购买的SnO2水溶液用超纯水稀释,制备SnO2浓度为0.1%wt的电子传输层溶液;(a) Dilute the purchased SnO aqueous solution with ultrapure water to prepare an electron transport layer solution with a SnO concentration of 0.1% wt;

(b)将步骤(a)得到的电子传输层溶液600μL加入到型号HD180,喷嘴直径0.2mm的气动喷枪中;(b) adding 600 μL of the electron transport layer solution obtained in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2 mm;

(c)将表面制备有阴极的半球基底放置在65℃加热台上,并将步骤(b)中的气动喷枪连接空气压缩机,输出压强为2MPa,喷涂速率为0.12mL/min,将电子传输层溶液喷涂到阴极表面;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.25r/min,平移速度为15cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用5MPa的高速氮气吹扫整个半球表面至形成较为干燥的薄膜;当溶液耗尽后,将薄膜在170℃下退火30分钟,再进行紫外-臭氧处理20分钟,从而在阴极表面得到厚度10nm的电子传输层;(c) Place the hemispherical substrate with the cathode prepared on the surface on a 65°C heating table, connect the pneumatic spray gun in step (b) to an air compressor, the output pressure is 2MPa, the spray rate is 0.12mL/min, and the electrons are transmitted The coating solution is sprayed onto the cathode surface; during the spraying process, the rotation and translation of the hemispherical substrate are maintained, the rotation speed is 0.25r/min, and the translation speed is 15cm/s, so as to maintain the flatness of the sprayed film; during the spraying process, After each droplet of the solution completely covered the surface of the hemisphere, the entire surface of the hemisphere was purged with a high-speed nitrogen gas of 5MPa to form a relatively dry film; when the solution was exhausted, the film was annealed at 170 °C for 30 minutes, and then UV-ozone was carried out. Treated for 20 minutes to obtain an electron transport layer with a thickness of 10 nm on the surface of the cathode;

4、PEA2FA3Pb4I2Br11钙钛矿薄膜沉积到电子传输层表面,其步骤如下:4. The PEA 2 FA 3 Pb 4 I 2 Br 11 perovskite film is deposited on the surface of the electron transport layer, and the steps are as follows:

(a)将甲脒氢卤酸盐(FABr)、卤化铅(PbBr2)、苯乙胺氢卤酸盐(PEAI)以及甲胺盐酸盐(MACl)按照物质的量比值为3:4:2:1.2配置成0.5M(相对于铅离子)的前驱体溶液,溶剂为乙腈(ACN)和N,N-二甲基甲酰胺(DMF)的混合,体积比例为2:3,控制溶液能将钙钛矿粉末溶解完全;(a) Formamidine hydrohalide (FABr), lead halide (PbBr 2 ), phenethylamine hydrohalide (PEAI) and methylamine hydrochloride (MACl) are in a ratio of 3:4: 2:1.2 is configured as a 0.5M (relative to lead ion) precursor solution, the solvent is a mixture of acetonitrile (ACN) and N,N-dimethylformamide (DMF), and the volume ratio is 2:3 to control the energy of the solution. Dissolve the perovskite powder completely;

(b)将步骤(a)配制的前驱体溶液1500μL加入到型号HD180,喷嘴直径0.2的气动喷枪中;(b) adding 1500 μL of the precursor solution prepared in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2;

(c)将表面沉积有电子传输层的半球基底放置在100℃的加热台上,将步骤(b)中的气动喷枪连接输出压强为2MPa的空气压缩机,喷涂速率为0.15mL/min,将前驱体溶液喷涂到电子传输层表面;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.25r/min,平移速度为10cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用5MPa的高速氮气吹扫整个半球表面至形成较为干燥的薄膜;(c) place the hemispherical substrate with the electron transport layer deposited on the surface on a heating table at 100°C, connect the pneumatic spray gun in step (b) to an air compressor with an output pressure of 2MPa, and the spray rate is 0.15mL/min. The precursor solution is sprayed onto the surface of the electron transport layer; during the spraying process, the rotation and translation of the hemispherical substrate are maintained, the rotation speed is 0.25r/min, and the translation speed is 10cm/s, so as to maintain the flatness of the sprayed film; During the process, after each droplet of the solution completely covers the surface of the hemisphere, the entire surface of the hemisphere is purged with a high-speed nitrogen gas of 5MPa to form a relatively dry film;

(d)将步骤(c)得到的喷涂有钙钛矿湿膜的半球基底在120℃下退火10分钟,然后在140℃下退火30分钟,最后在170℃下退火60分钟,退火过程中保持黑暗条件,最后得到厚度12μm的钙钛矿薄膜;(d) The hemispherical substrate sprayed with the wet perovskite film obtained in step (c) was annealed at 120°C for 10 minutes, then annealed at 140°C for 30 minutes, and finally annealed at 170°C for 60 minutes, maintaining during the annealing process In dark conditions, a perovskite film with a thickness of 12 μm was finally obtained;

5、将空穴传输层沉积到钙钛矿薄膜表面,其步骤如下:5. The hole transport layer is deposited on the surface of the perovskite film, and the steps are as follows:

(a)将购买的聚[双(4-苯基)(2,4,6-三甲基苯基)胺](PTAA)与甲苯配置成PTAA浓度为0.1mg/mL空穴传输层溶液;(a) The purchased poly[bis(4-phenyl)(2,4,6-trimethylphenyl)amine] (PTAA) was prepared into a hole transport layer solution with a PTAA concentration of 0.1 mg/mL in toluene;

(b)将步骤(a)得到的空穴传输层溶液400μL加入到型号HD180,喷嘴直径0.2mm的气动喷枪中;(b) adding 400 μL of the hole transport layer solution obtained in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2 mm;

(c)将涂有钙钛矿的半球基底固定在80℃加热台上,并将步骤(b)中的气动喷枪连接空气压缩机,输出压强为1.5MPa,喷涂时间由喷涂总体积决定。喷涂速率为0.13mL/min,喷涂到半球基底上,在半球的外表面上得到钙钛矿湿膜;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度在0.25r/min左右,平移速度为10cm/s,每次溶液的液滴完整覆盖一次表面,用5MPa的高速氮气吹扫整个表面至形成表面较为干燥的薄膜;当溶液耗尽后,将薄膜的半球在100℃下退火10分钟,得到的空穴传输层的厚度为10nm;(c) Fix the perovskite-coated hemispherical substrate on a heating table at 80 °C, and connect the pneumatic spray gun in step (b) to an air compressor, the output pressure is 1.5 MPa, and the spraying time is determined by the total spraying volume. The spraying rate is 0.13mL/min, sprayed onto the hemispherical substrate, and a wet perovskite film is obtained on the outer surface of the hemisphere; during the spraying process, the rotation and translation of the hemispherical substrate are maintained, and the rotation speed is about 0.25r/min, The translation speed is 10cm/s, the droplets of each solution cover the surface completely, and the entire surface is blown with a high-speed nitrogen of 5MPa to form a film with a relatively dry surface; when the solution is exhausted, the hemisphere of the film is annealed at 100 °C 10 minutes, the thickness of the obtained hole transport layer is 10 nm;

6、通过真空蒸发将金属Cr蒸发到空穴传输层表面作为阳极,厚度为8nm,从而制备得到本发明所述的具有广角探测成像能力的窄带光探测器,结构为半球基底/Cr/SnO2/PEA2FA3Pb4I2Br11/PTAA/Cr。6. Evaporating metal Cr onto the surface of the hole transport layer as an anode by vacuum evaporation, with a thickness of 8 nm, thereby preparing the narrow-band photodetector with wide-angle detection and imaging capability according to the present invention, the structure is hemispherical substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 2 Br 11 /PTAA/Cr.

实施例5:Example 5:

1、选取直径为0.8cm的半球基底(材质为普通玻璃,可以由商业渠道获得),在超纯水、丙酮和异丙醇中分别超声清洗15分钟后干燥;1. Select a hemispherical substrate with a diameter of 0.8cm (the material is ordinary glass, which can be obtained from commercial channels), ultrasonically clean it in ultrapure water, acetone and isopropanol for 15 minutes and then dry;

2、通过真空蒸发将金属Cr蒸镀到半球基底表面作为阴极,厚度为13nm,然后对金属Cr表面进行紫外-臭氧处理20分钟,再进行等离子体处理5分钟;2. Evaporate metal Cr onto the surface of the hemispherical substrate as a cathode by vacuum evaporation, with a thickness of 13 nm, and then perform ultraviolet-ozone treatment on the surface of the metal Cr for 20 minutes, and then perform plasma treatment for 5 minutes;

3、在阴极表面沉积电子传输层3. Deposition of an electron transport layer on the surface of the cathode

(a)将购买的SnO2水溶液用超纯水稀释,制备SnO2浓度为0.1%wt的电子传输层溶液;(a) Dilute the purchased SnO aqueous solution with ultrapure water to prepare an electron transport layer solution with a SnO concentration of 0.1% wt;

(b)将步骤(a)得到的电子传输层溶液600μL加入到型号HD180,喷嘴直径0.2mm的气动喷枪中;(b) adding 600 μL of the electron transport layer solution obtained in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2 mm;

(c)将表面制备有阴极的半球基底放置在65℃加热台上,并将步骤(b)中的气动喷枪连接空气压缩机,输出压强为2MPa,喷涂速率为0.12mL/min,将电子传输层溶液喷涂到阴极表面;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.25r/min,平移速度为15cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用5MPa的高速氮气吹扫整个半球表面至形成干燥的薄膜;当溶液耗尽后,将薄膜在170℃下退火30分钟,再进行紫外-臭氧处理20分钟,从而在阴极表面得到厚度10nm的电子传输层;(c) Place the hemispherical substrate with the cathode prepared on the surface on a 65°C heating table, connect the pneumatic spray gun in step (b) to an air compressor, the output pressure is 2MPa, the spray rate is 0.12mL/min, and the electrons are transmitted The coating solution is sprayed onto the cathode surface; during the spraying process, the rotation and translation of the hemispherical substrate are maintained, the rotation speed is 0.25r/min, and the translation speed is 15cm/s, so as to maintain the flatness of the sprayed film; during the spraying process, After each droplet of the solution completely covered the surface of the hemisphere, the entire surface of the hemisphere was purged with a high-speed nitrogen gas of 5 MPa to form a dry film; when the solution was exhausted, the film was annealed at 170 °C for 30 minutes, and then subjected to UV-ozone treatment 20 minutes, thereby obtaining an electron transport layer with a thickness of 10 nm on the surface of the cathode;

4、PEA2FA3Pb4I5Br8钙钛矿薄膜沉积到电子传输层表面,其步骤如下:4. The PEA 2 FA 3 Pb 4 I 5 Br 8 perovskite film is deposited on the surface of the electron transport layer, and the steps are as follows:

(a)将甲脒氢卤酸盐(FAI)、卤化铅(PbBr2)、苯乙胺氢卤酸盐(PEAI)以及甲胺盐酸盐(MACl)按照物质的量比值为3:4:2:1.2配置成0.5M(相对于铅离子)的前驱体溶液,溶剂为乙腈(ACN)和N,N-二甲基甲酰胺(DMF)的混合,体积比例为2:3,控制溶液能将钙钛矿粉末溶解完全;(a) Formamidine hydrohalide (FAI), lead halide (PbBr 2 ), phenethylamine hydrohalide (PEAI) and methylamine hydrochloride (MACl) are in a ratio of 3:4: 2:1.2 is configured as a 0.5M (relative to lead ion) precursor solution, the solvent is a mixture of acetonitrile (ACN) and N,N-dimethylformamide (DMF), and the volume ratio is 2:3 to control the energy of the solution. Dissolve the perovskite powder completely;

(b)将步骤(a)配制的前驱体溶液1500μL加入到型号HD180,喷嘴直径0.2的气动喷枪中;(b) adding 1500 μL of the precursor solution prepared in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2;

(c)将表面沉积有电子传输层的半球基底放置在100℃的加热台上,将步骤(b)中的气动喷枪连接输出压强为2MPa的空气压缩机,喷涂速率为0.15mL/min,将前驱体溶液喷涂到电子传输层表面;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度为0.25r/min,平移速度为10cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用5MPa的高速氮气吹扫整个半球表面至形成干燥的薄膜;(c) place the hemispherical substrate with the electron transport layer deposited on the surface on a heating table at 100°C, connect the pneumatic spray gun in step (b) to an air compressor with an output pressure of 2MPa, and the spray rate is 0.15mL/min. The precursor solution is sprayed onto the surface of the electron transport layer; during the spraying process, the rotation and translation of the hemispherical substrate are maintained, the rotation speed is 0.25r/min, and the translation speed is 10cm/s, so as to maintain the flatness of the sprayed film; During the process, after each droplet of the solution completely covers the surface of the hemisphere, the entire surface of the hemisphere is purged with a high-speed nitrogen gas of 5MPa to form a dry film;

(d)将步骤(c)得到的喷涂有钙钛矿湿膜的半球基底在120℃下退火10分钟,然后在140℃下退火30分钟,最后在170℃下退火60分钟,退火过程中保持黑暗条件,最后得到厚度12μm的钙钛矿薄膜;(d) The hemispherical substrate sprayed with the wet perovskite film obtained in step (c) was annealed at 120°C for 10 minutes, then annealed at 140°C for 30 minutes, and finally annealed at 170°C for 60 minutes, maintaining during the annealing process In dark conditions, a perovskite film with a thickness of 12 μm was finally obtained;

5、将空穴传输层沉积到钙钛矿薄膜表面,其步骤如下:5. The hole transport layer is deposited on the surface of the perovskite film, and the steps are as follows:

(a)将购买的聚[双(4-苯基)(2,4,6-三甲基苯基)胺](PTAA)与甲苯配置成PTAA浓度为0.1mg/mL空穴传输层溶液;(a) The purchased poly[bis(4-phenyl)(2,4,6-trimethylphenyl)amine] (PTAA) was prepared into a hole transport layer solution with a PTAA concentration of 0.1 mg/mL in toluene;

(b)将步骤(a)得到的空穴传输层溶液400μL加入到型号HD180,喷嘴直径0.2mm的气动喷枪中;(b) adding 400 μL of the hole transport layer solution obtained in step (a) into a pneumatic spray gun with a model HD180 and a nozzle diameter of 0.2 mm;

(c)将涂有钙钛矿的半球基底固定在80℃加热台上,并将步骤(b)中的气动喷枪连接空气压缩机,输出压强为1.5MPa,喷涂时间由喷涂总体积决定。喷涂速率为0.13mL/min,喷涂到半球基底上,在半球的外表面上得到钙钛矿湿膜;在喷涂的过程中,保持半球基底的旋转和平移,旋转速度在0.25r/min左右,平移速度为10cm/s,每次溶液的液滴完整覆盖一次表面,用5MPa的高速氮气吹扫整个表面至形成表面干燥的薄膜;当溶液耗尽后,将薄膜的半球在100℃下退火10分钟,得到的空穴传输层的厚度为10nm;(c) Fix the perovskite-coated hemispherical substrate on a heating table at 80 °C, and connect the pneumatic spray gun in step (b) to an air compressor, the output pressure is 1.5 MPa, and the spraying time is determined by the total spraying volume. The spraying rate is 0.13mL/min, sprayed onto the hemispherical substrate, and a wet perovskite film is obtained on the outer surface of the hemisphere; during the spraying process, the rotation and translation of the hemispherical substrate are maintained, and the rotation speed is about 0.25r/min, The translation speed was 10 cm/s, the droplets of each solution completely covered the surface once, and the entire surface was blown with a high-speed nitrogen gas of 5 MPa to form a dry film on the surface; when the solution was exhausted, the hemisphere of the film was annealed at 100 °C for 10 minutes, the thickness of the obtained hole transport layer is 10 nm;

6、通过真空蒸发将金属Cr蒸发到空穴传输层表面作为阳极,厚度为8nm,从而制备得到本发明所述的具有广角探测成像能力的窄带光探测器,结构为半球基底/Cr/SnO2/PEA2FA3Pb4I5Br8/PTAA/Cr。6. Evaporating metal Cr onto the surface of the hole transport layer as an anode by vacuum evaporation, with a thickness of 8 nm, thereby preparing the narrow-band photodetector with wide-angle detection and imaging capability according to the present invention, the structure is hemispherical substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 5 Br 8 /PTAA/Cr.

实施例6Example 6

将制备的半球基底/Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr光探测器(实施例2)阳极和阴极连接导线到电流源表上,在不同的光照强度的820nm单色光下测量电压-电流密度相关关系。图4(a)为测试系统示意图,图4(b)为Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr光探测器在不同光照强度下,820nm波长单色光下的电压-电流密度图,所述光探测器表现出很好的自供压行为和光响应行为。The prepared hemispherical substrate/Cr/PEDOT:PSS/PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP/Cr photodetector (Example 2) was connected to the anode and cathode of the current source meter, under different lighting conditions. The voltage-current density correlation was measured under the intensity of 820 nm monochromatic light. Figure 4(a) is the schematic diagram of the test system, and Figure 4(b) is the Cr/PEDOT:PSS/PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP/Cr photodetector under different illumination intensities, 820nm wavelength monochromatic Voltage-current density plot under light, the photodetector exhibits good self-voltage behavior and photoresponse behavior.

实施例7Example 7

将制备的半球基底/Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr光探测器(实施例2)阳极和阴极连接导线到示波器(MDO3000),置于一定光照强度下的单色光下,信号触发器(普源RIGOL DG1022Z)传递一个方波信号给到单色光,使得单色光输出方波信号通过示波器,将器件接收方波信号输出的电流信号图像显示,确定器件对于不同光色的响应能力。The prepared hemispherical substrate/Cr/PEDOT:PSS/PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP/Cr photodetector (Example 2) was connected to the anode and cathode of the oscilloscope (MDO3000), and placed under certain illumination. Under the monochromatic light intensity, the signal trigger (Puyuan RIGOL DG1022Z) transmits a square wave signal to the monochromatic light, so that the monochromatic light output square wave signal passes through the oscilloscope, and the device receives the current signal image output by the square wave signal. Display, determine the responsiveness of the device to different light colors.

图5为PEA2FA3Pb4I13钙钛矿半球面器件在不同波长下,归一化的开关信号波形图。可以看出来在响应波长下(820nm)有很好的开关信号,在非响应波长下(532nm)有几乎没有信号,表明本发明制备的光探测器表现出来很好的波长选择性响应。Fig. 5 is the normalized switching signal waveforms of the PEA 2 FA 3 Pb 4 I 13 perovskite hemispherical device at different wavelengths. It can be seen that there is a good switching signal at the response wavelength (820nm), and there is almost no signal at the non-response wavelength (532nm), indicating that the photodetector prepared by the present invention exhibits a good wavelength selective response.

实施例8Example 8

1、平面基底(材质为普通玻璃,长宽高尺寸1.5×1.5×0.2cm),在超纯水、丙酮、异丙醇中超声清洗各15分钟后,烘箱中干燥;1. The flat substrate (the material is ordinary glass, the length, width, and height dimensions are 1.5×1.5×0.2cm), ultrasonically cleaned in ultrapure water, acetone, and isopropanol for 15 minutes each, and dried in an oven;

2、通过真空蒸发将金属Cr蒸镀到半球基底表面作为阳极,厚度为12nm,然后对金属Cr表面进行紫外-臭氧处理20分钟,再进行等离子体处理5分钟;2. Evaporate metal Cr onto the surface of the hemispherical substrate as an anode by vacuum evaporation, with a thickness of 12 nm, and then perform ultraviolet-ozone treatment on the surface of metal Cr for 20 minutes, and then perform plasma treatment for 5 minutes;

3、在阳极表面沉积空穴传输层3. Deposit a hole transport layer on the surface of the anode

(a)将聚(3,4-亚乙二氧基噻吩)-聚(苯乙烯磺酸)(PEDOT:PSS)水溶液用超纯水稀释,得到PEDOT:PSS浓度为0.1%wt的空穴传输层溶液;(a) Poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) (PEDOT:PSS) aqueous solution was diluted with ultrapure water to obtain hole transport with a PEDOT:PSS concentration of 0.1%wt layer solution;

(b)将步骤(a)中的空穴传输层溶液600μL加入到型号HD180、喷嘴直径0.2mm的气动喷枪中;(b) adding 600 μL of the hole transport layer solution in step (a) into a pneumatic spray gun with model HD180 and a nozzle diameter of 0.2 mm;

(c)将表面制备有阳极的平面基底放置在60℃的加热台上,将步骤(b)中的气动喷枪连接空气压缩机,输出压强为1.5MPa,喷涂速率为0.15mL/min,将空穴传输层溶液喷涂到阳极表面,在喷涂的过程中,保持平面基底的平移,平移速度为10cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖半球表面后,用5MPa的高速氮气吹扫整个平面基底表面至形成较为干燥的薄膜;溶液消耗完后,薄膜在170℃下退火30分钟,从而在阳极表面得到厚度10nm的空穴传输层;(c) Place the flat substrate with the anode prepared on the surface on a heating table at 60°C, connect the pneumatic spray gun in step (b) to an air compressor, the output pressure is 1.5MPa, the spray rate is 0.15mL/min, and the air is The hole transport layer solution is sprayed onto the surface of the anode. During the spraying process, the translation of the plane substrate is maintained, and the translation speed is 10 cm/s, so as to maintain the flatness of the sprayed film; during the spraying process, the droplets of each solution are completely covered. After the hemispherical surface, the entire planar substrate surface was purged with 5MPa high-speed nitrogen gas to form a relatively dry film; after the solution was consumed, the film was annealed at 170 °C for 30 minutes, thereby obtaining a hole transport layer with a thickness of 10 nm on the anode surface;

(4)在空穴传输层表面沉积PEA2FA3Pb4I13钙钛矿薄膜(4) Deposition of PEA 2 FA 3 Pb 4 I 13 perovskite film on the surface of the hole transport layer

(a)将甲脒氢卤酸盐(FAI)、卤化铅(PbI2)、苯乙胺氢卤酸盐(PEAI)以及甲胺盐酸盐(MACl)按照3:4:2:1.6的配置成铅离子浓度0.6M的前驱体溶液,溶剂为乙腈(ACN)和N,N-二甲基甲酰胺(DMF)的混合溶剂,或者乙二醇甲醚(2-Me)和N,N-二甲基甲酰胺(DMF)的混合溶剂,乙腈(ACN)与N,N-二甲基甲酰胺(DMF)的体积比为1:1;(a) Formamidine hydrohalide (FAI), lead halide (PbI 2 ), phenethylamine hydrohalide (PEAI) and methylamine hydrochloride (MACl) were prepared in a 3:4:2:1.6 configuration Precursor solution with lead ion concentration of 0.6M, the solvent is a mixed solvent of acetonitrile (ACN) and N,N-dimethylformamide (DMF), or ethylene glycol methyl ether (2-Me) and N,N- The mixed solvent of dimethylformamide (DMF), the volume ratio of acetonitrile (ACN) and N,N-dimethylformamide (DMF) is 1:1;

(b)将步骤(a)配制的前驱体溶液1500μL加入到喷嘴型号HD180,直径0.2mm的气动喷枪中;(b) adding 1500 μL of the precursor solution prepared in step (a) into a pneumatic spray gun with a nozzle model HD180 and a diameter of 0.2 mm;

(c)将表面沉积有空穴传输层的半球基底放置在100℃的加热台上,将步骤(b)中的气动喷枪连接输出压强为1.5MPa的空气压缩机,喷涂速率为0.15mL/min,将前驱体溶液喷涂到空穴传输层表面;在喷涂的过程中,保持平面基底的旋转和平移,旋转速度为0.25r/min,平移速度为10cm/s,从而保持喷涂薄膜的平整性;在喷涂的过程中,每次溶液的液滴完整覆盖基底表面后,用5MPa的高速氮气吹扫整个半球表面至形成较为干燥的薄膜;(c) The hemispherical substrate with the hole transport layer deposited on the surface is placed on a heating table at 100°C, the pneumatic spray gun in step (b) is connected to an air compressor with an output pressure of 1.5MPa, and the spray rate is 0.15mL/min , spray the precursor solution on the surface of the hole transport layer; during the spraying process, keep the rotation and translation of the planar substrate, the rotation speed is 0.25r/min, and the translation speed is 10cm/s, so as to maintain the flatness of the sprayed film; In the process of spraying, after each droplet of the solution completely covers the surface of the substrate, the entire surface of the hemisphere is purged with a high-speed nitrogen gas of 5MPa to form a relatively dry film;

(d)将步骤(c)得到的半球基底在120℃下退火10分钟,然后在160℃下退火30分钟,最后在170℃下退火60分钟,退火过程中保持黑暗条件,从而得到厚度10μm的钙钛矿薄膜;(d) The hemispherical substrate obtained in step (c) was annealed at 120°C for 10 minutes, then annealed at 160°C for 30 minutes, and finally annealed at 170°C for 60 minutes, maintaining a dark condition during the annealing process, thereby obtaining a thickness of 10 μm. perovskite thin films;

(5)通过真空蒸发将购买得到的富勒烯(C60)蒸镀到钙钛矿薄膜表面,得到厚度15nm的电子传输层;(5) Evaporating the purchased fullerene (C 60 ) onto the surface of the perovskite thin film by vacuum evaporation to obtain an electron transport layer with a thickness of 15 nm;

(6)通过真空蒸发将购买得到的2,9-二甲基-4,7-联苯-1,10-邻二氮杂菲(BCP)蒸镀到电子传输层表面,得到厚度6nm的缓冲层;(6) The purchased 2,9-dimethyl-4,7-biphenyl-1,10-phenanthroline (BCP) was evaporated to the surface of the electron transport layer by vacuum evaporation to obtain a buffer with a thickness of 6 nm Floor;

(7)通过真空蒸发将金属Cr蒸发到缓冲层表面作为阴极,厚度为10nm;从而制备得到平面基底/Cr/PEDOT:PSS/PEA2FA3PbI13/C60/BCP/Cr光探测器。(7) The metal Cr was evaporated to the surface of the buffer layer as a cathode by vacuum evaporation with a thickness of 10 nm; thus a planar substrate/Cr/PEDOT:PSS/PEA 2 FA 3 PbI 13 /C 60 /BCP/Cr photodetector was prepared.

将实施例2制备的PEA2FA3Pb4I13钙钛矿半球面器件和本实施例制备的平面器件分别连接导线。以光源到器件中心距离为半径,以器件中心为圆点,沿该半圆改变光源的位置,将每个位置的电信号由电流源表测出并记录(定义光源垂直照射器件时,入射光角度为0度;光源水平照射器件时,入射光角度为90度)。The PEA 2 FA 3 Pb 4 I 13 perovskite hemispherical device prepared in Example 2 and the planar device prepared in this example are respectively connected to wires. Taking the distance from the light source to the center of the device as the radius and the center of the device as the dot, change the position of the light source along the semicircle, and measure and record the electrical signal at each position by the current source meter (defining the angle of incident light when the light source illuminates the device vertically is 0 degrees; when the light source illuminates the device horizontally, the incident light angle is 90 degrees).

图6(a)为角度响应测试系统示意图,图6(b)为平面探测器与半球面探测器对于单色光入射角度的响应范围曲线;可见,半球面光探测器对不同角度的入射光均具有较好的响应能力,半球器件表现出极高的广角探测能力,在各个角度的点光源下,响应能力几乎不变,相应角度可达(-90度~+90度);而平面器件的响应能力则严重依赖入射光角度。Figure 6(a) is a schematic diagram of the angle response test system, and Figure 6(b) is the response range curve of the plane detector and the hemispherical detector to the incident angle of monochromatic light; it can be seen that the hemispherical photodetector responds to the incident light of different angles Both have good responsiveness. Hemispherical devices show extremely high wide-angle detection capabilities. Under point light sources at various angles, the responsiveness is almost unchanged, and the corresponding angle can reach (-90 degrees to +90 degrees); while flat devices The responsiveness is heavily dependent on the incident light angle.

实施例9Example 9

将改变卤素X(X=I,Br)比例的四种半球面光探测器进行不同波长光响应能力的测试,最终得到了通过调整中间层钙钛矿的卤素比例来控制器件对不同光色选择性相应的光探测器。The four hemispherical photodetectors with changing the ratio of halogen X (X=I, Br) were tested for the light response capability of different wavelengths, and finally obtained by adjusting the halogen ratio of the interlayer perovskite to control the device's selection of different light colors corresponding photodetectors.

器件结构及中心响应波长对应关系分别为The corresponding relationship between the device structure and the central response wavelength is as follows:

Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr(820nm),Cr/PEDOT:PSS/PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP/Cr(820nm),

Cr/SnO2/PEA2FA3Pb4I5Br8/PTAA/Cr(660nm),Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 5 Br 8 /PTAA/Cr(660nm),

Cr/SnO2/PEA2FA3Pb4I2Br11/PTAA/Cr(600nm),Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 2 Br 11 /PTAA/Cr(600nm),

Cr/SnO2/PEA2FA3Pb4Br13/PTAA/Cr(550nm),Cr/SnO 2 /PEA 2 FA 3 Pb 4 Br 13 /PTAA/Cr(550nm),

图7(a)为测试器件对于不同波长的光响应能力的测试系统示意图。通过外量子效率(EQE)来衡量;图中氙灯光源经过单色仪,并通过斩波器,输出具有一定频率的单色光照射到探测器上。探测器产生的电流信号经过前置放大器放大并转化为电压信号,经过锁相放大器对同频信号再次放大,并输入到计算机内部,计算探测器产生的电流密度与照射到探测器上的光子密度的比值来计算量子效率。通过不同波长的量子效率来(EQE)来衡量器件的各个波长的响应能力。FIG. 7( a ) is a schematic diagram of a testing system for testing the light responsiveness of a device to different wavelengths. It is measured by external quantum efficiency (EQE); in the figure, the xenon light source passes through a monochromator and a chopper, and outputs monochromatic light with a certain frequency to the detector. The current signal generated by the detector is amplified by the preamplifier and converted into a voltage signal. The lock-in amplifier amplifies the same-frequency signal again, and input it into the computer to calculate the current density generated by the detector and the photon density irradiated on the detector. to calculate the quantum efficiency. The responsiveness of each wavelength of the device is measured by the quantum efficiency (EQE) of different wavelengths.

图7(b)分别对应以上4种器件结构的EQE图,横坐标为波长,纵坐标为归一化的EQE。其半高宽在~20nm。该图说明了每种器件只能特异性响应其对应中心波长附近波长的光信号有响应,而对于其他波长几乎没有响应。说明器件表现出窄带光色识别的能力。器件只对特定颜色的光有响应,同时我们控制主体钙钛矿材料的X种I和Br的比例能够可控的调整器件的这种特异性识别的波长位置。Figure 7(b) corresponds to the EQE diagrams of the above four device structures respectively, the abscissa is the wavelength, and the ordinate is the normalized EQE. Its full width at half maximum is ~20 nm. The figure illustrates that each device can only respond specifically to optical signals at wavelengths near its corresponding central wavelength, and has almost no response to other wavelengths. It shows that the device exhibits the ability of narrow-band light color recognition. The device only responds to a specific color of light, and we control the ratio of X species I and Br in the host perovskite material to controllably adjust the wavelength position of this specific recognition of the device.

实施例10Example 10

广角探测的窄带光探测器的成像系统搭建:Construction of imaging system of narrow-band photodetector for wide-angle detection:

(a)将X-Y二维位移平台上固定820nm单色光LED光源,光源功率为3W。(a) Fix the 820nm monochromatic LED light source on the X-Y two-dimensional displacement platform, and the light source power is 3W.

(b)将(a)中所述的二维位移平台连接计算机,控制其移动,移动单位距离为500μm/步;(b) Connect the two-dimensional displacement platform described in (a) to a computer to control its movement, and the moving unit distance is 500 μm/step;

(c)将(a)中所述的LED光源连接函数发生器(普源RIGOL DG1022Z),输出频率为70Hz的方波信号,用于点亮LED光源,同时将信号与锁相放大器(SR830)联用,将器件转化的电信号与函数发生器产生的电信号作同频参照,如图8所示;(c) Connect the LED light source described in (a) to a function generator (Puyuan RIGOL DG1022Z), and output a square wave signal with a frequency of 70Hz to light up the LED light source, and at the same time connect the signal to a lock-in amplifier (SR830) Combined use, the electrical signal converted by the device and the electrical signal generated by the function generator are used as the same frequency reference, as shown in Figure 8;

(d)待测物体放置于光源之下的玻璃平台上,半球面光探测器放置于玻璃平台之下;(d) The object to be measured is placed on the glass platform under the light source, and the hemispherical light detector is placed under the glass platform;

(e)调整步骤(d)中所述的半球面光探测器的角度,如图9所示。半球面光探测器相对于平面光探测器可以对于极端角度的物体进行成像。可通过改变半球面光探测器基底所在平面与光源和物体的相对角度来调节物体相对于探测器的角度。这里我们选择的物体分别占据探测器从-8度到+30度的成像范围和-52度到-90度的成像范围,如图10所示。光探测器连接前置放大器(SR570)、锁相放大器(SR830)和计算机;(e) Adjust the angle of the hemispherical photodetector described in step (d), as shown in FIG. 9 . Hemispherical photodetectors can image objects at extreme angles relative to planar photodetectors. The angle of the object relative to the detector can be adjusted by changing the relative angle between the plane where the hemispherical light detector base is located, the light source and the object. Here we select objects occupying the imaging range of the detector from -8 degrees to +30 degrees and the imaging range of -52 degrees to -90 degrees, respectively, as shown in Figure 10. The photodetector is connected to the preamplifier (SR570), the lock-in amplifier (SR830) and the computer;

(f)利用计算机从系统中读取数据,获得成像结果成像器件类型为:Cr/PEDOT:PSS/PEA2FA3Pb4I13/C60/BCP/Cr。(f) Using a computer to read data from the system to obtain imaging results. The imaging device type is: Cr/PEDOT:PSS/PEA 2 FA 3 Pb 4 I 13 /C 60 /BCP/Cr.

图9为物体占据角度的示意图,其中θ1,θ2用于计算物体入射角度。图10为成像使用的角度物体占据-52到-90度的角度和-8度到+30度。同样这两种角度范围的成像也被应用在平面光探测器中成像结果在图11所示。图11(a)平面光探测器成像,物体所占角度从-8度到+30度;图11(b)平面光探测器成像,物体所占角度从-90度到-52度;图11(c)半球面光探测器成像,物体所占角度从-8度到+30度;图11(d)半球面光探测器成像,物体所占角度从-90度到-52度。图11说明半球面器件的成像范围远大于平面探测器,表现出广角探测的能力。尤其是掠角成像(-90度),平面成像受到了明显限制,而半球面探测器依旧可以保持成像效果。FIG. 9 is a schematic diagram of an angle occupied by an object, wherein θ 1 and θ 2 are used to calculate the incident angle of the object. Figure 10. The angled objects used for imaging occupy angles of -52 to -90 degrees and -8 to +30 degrees. The imaging of these two angular ranges is also applied to the planar light detector. The imaging results are shown in Fig. 11. Figure 11(a) The plane photodetector imaging, the angle occupied by the object is from -8 degrees to +30 degrees; Figure 11(b) The plane photodetector imaging, the angle occupied by the object is from -90 degrees to -52 degrees; Figure 11 (c) Hemispherical photodetector imaging, the angle occupied by the object is from -8 degrees to +30 degrees; Fig. 11(d) The hemispherical photodetector imaging, the angle occupied by the object is from -90 degrees to -52 degrees. Figure 11 illustrates that the imaging range of the hemispherical device is much larger than that of the planar detector, showing the capability of wide-angle detection. Especially for the grazing angle imaging (-90 degrees), the plane imaging is obviously limited, while the hemispherical detector can still maintain the imaging effect.

实施例11Example 11

广角探测的窄带光探测器的成像系统搭建:Construction of the imaging system of the narrow-band photodetector for wide-angle detection:

(a)将X-Y二维位移平台上固定550nm单色光LED光源,光源功率为3W。(a) Fix a 550nm monochromatic LED light source on the X-Y two-dimensional displacement platform, and the light source power is 3W.

(b)将(a)中所述的二维位移平台连接计算机,控制其移动,移动单位距离为500μm/步;(b) Connect the two-dimensional displacement platform described in (a) to a computer to control its movement, and the moving unit distance is 500 μm/step;

(c)将(a)中所述的LED光源连接函数发生器(普源RIGOL DG1022Z),输出频率为70Hz的方波信号,用于点亮LED光源,同时将信号与锁相放大器(SR830)联用,将器件转化的电信号与函数发生器产生的电信号作参照;(c) Connect the LED light source described in (a) to a function generator (Puyuan RIGOL DG1022Z), and output a square wave signal with a frequency of 70Hz to light up the LED light source, and at the same time connect the signal to a lock-in amplifier (SR830) Combined use, the electrical signal converted by the device and the electrical signal generated by the function generator are used as a reference;

(d)待测物体放置于光源之下的玻璃平台上,半球面光探测器放置于玻璃平台之下;(d) The object to be measured is placed on the glass platform under the light source, and the hemispherical light detector is placed under the glass platform;

(e)调整步骤(d)中所述的半球面光探测器的角度,调整半球探测器的角度与光源物体成0度角共线。光探测器连接前置放大器(SR570)、锁相放大器(SR830)和计算机。(e) Adjust the angle of the hemispherical light detector described in step (d), and adjust the angle of the hemispherical detector to be collinear with the light source object at an angle of 0 degrees. The photodetector is connected to the preamplifier (SR570), the lock-in amplifier (SR830) and the computer.

将器件结构Cr/SnO2/PEA2FA3Pb4Br13/PTAA/Cr的半球面光探测器置于玻璃平台之下,使用成像系统成像。The hemispherical photodetector of the device structure Cr/SnO 2 /PEA 2 FA 3 Pb 4 Br 13 /PTAA/Cr was placed under a glass platform and imaged using an imaging system.

实施例12Example 12

广角探测的窄带光探测器的成像系统搭建:Construction of the imaging system of the narrow-band photodetector for wide-angle detection:

(a)将X-Y二维位移平台上固定600nm单色光LED光源,光源功率为3W。(a) Fix a 600nm monochromatic LED light source on the X-Y two-dimensional displacement platform, and the light source power is 3W.

(b)将(a)中所述的二维位移平台连接计算机,控制其移动,移动单位距离为500μm/步;(b) Connect the two-dimensional displacement platform described in (a) to a computer to control its movement, and the moving unit distance is 500 μm/step;

(c)将(a)中所述的LED光源连接函数发生器(普源RIGOL DG1022Z),输出频率为70Hz的方波信号,用于点亮LED光源,同时将信号与锁相放大器(SR830)联用,将器件转化的电信号与函数发生器产生的电信号作参照;(c) Connect the LED light source described in (a) to a function generator (Puyuan RIGOL DG1022Z), and output a square wave signal with a frequency of 70Hz to light up the LED light source, and at the same time connect the signal to a lock-in amplifier (SR830) Combined use, the electrical signal converted by the device and the electrical signal generated by the function generator are used as a reference;

(d)待测物体放置于光源之下的玻璃平台上,半球面光探测器放置于玻璃平台之下;(d) The object to be measured is placed on the glass platform under the light source, and the hemispherical light detector is placed under the glass platform;

(e)调整步骤(d)中所述的半球面光探测器的角度,调整半球探测器的角度与光源物体成0度角共线。光探测器连接前置放大器(SR570)、锁相放大器(SR830)和计算机。(e) Adjust the angle of the hemispherical light detector described in step (d), and adjust the angle of the hemispherical detector to be collinear with the light source object at an angle of 0 degrees. The photodetector is connected to the preamplifier (SR570), the lock-in amplifier (SR830) and the computer.

将器件结构Cr/SnO2/PEA2FA3Pb4I2Br11/PTAA/Cr的半球面光探测器置于玻璃平台之下,使用成像系统成像。The hemispherical photodetector of the device structure Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 2 Br 11 /PTAA/Cr was placed under a glass platform and imaged using an imaging system.

实施例13Example 13

广角探测的窄带光探测器的成像系统搭建:Construction of the imaging system of the narrow-band photodetector for wide-angle detection:

(a)将X-Y二维位移平台上固定660nm单色光LED光源,光源功率为3W。(a) Fix a 660nm monochromatic LED light source on the X-Y two-dimensional displacement platform, and the light source power is 3W.

(b)将(a)中所述的二维位移平台连接计算机,控制其移动,移动单位距离为500μm/步;(b) Connect the two-dimensional displacement platform described in (a) to a computer to control its movement, and the moving unit distance is 500 μm/step;

(c)将(a)中所述的LED光源连接函数发生器(普源RIGOL DG1022Z),输出频率为70Hz的方波信号,用于点亮LED光源,同时将信号与锁相放大器(SR830)联用,将器件转化的电信号与函数发生器产生的电信号作参照;(c) Connect the LED light source described in (a) to a function generator (Puyuan RIGOL DG1022Z), and output a square wave signal with a frequency of 70Hz to light up the LED light source, and at the same time connect the signal to a lock-in amplifier (SR830) Combined use, the electrical signal converted by the device and the electrical signal generated by the function generator are used as a reference;

(d)待测物体放置于光源之下的玻璃平台上,半球面光探测器放置于玻璃平台之下;(d) The object to be measured is placed on the glass platform under the light source, and the hemispherical light detector is placed under the glass platform;

(e)调整步骤(d)中所述的半球面光探测器的角度,调整半球探测器的角度与光源物体成0度角共线。光探测器连接前置放大器(SR570)、锁相放大器(SR830)和计算机。(e) Adjust the angle of the hemispherical light detector described in step (d), and adjust the angle of the hemispherical detector to be collinear with the light source object at an angle of 0 degrees. The photodetector is connected to the preamplifier (SR570), the lock-in amplifier (SR830) and the computer.

将器件结构Cr/SnO2/PEA2FA3Pb4I5Br8/PTAA/Cr的半球面光探测器置于玻璃平台之下,使用成像系统成像。The hemispherical photodetector of the device structure Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 5 Br 8 /PTAA/Cr was placed under a glass platform and imaged using an imaging system.

图12为制备的调节卤素制备的不同响应波长的窄带光探测器成像对于与其中心对应单色光下的响应成像。对应的响应波长分别为550nm、600nm、660nm以及光色叠加获得的加和图。这样成像会极大的减少来自其他颜色的光对成像的影响。由于器件只能够对其中心波长周围一定范围的颜色的光成像,而对其他波段的光几乎没有响应能力。因此仅能使用与之对应的光色的光源才能满足器件成像要求,而其他的光色的光源并不能使器件响应而成像。这种成像方式,选择性的过滤掉了其他颜色的光对成像过程的干扰,同时能够由目的的选择某一颜色的光进行成像。Figure 12 shows the imaging of the prepared narrow-band photodetectors with different response wavelengths prepared by adjusting the halogen response imaging under the monochromatic light corresponding to its center. The corresponding response wavelengths are 550nm, 600nm, 660nm, and the summation diagram obtained by superimposing light colors. Such imaging will greatly reduce the influence of light from other colors on the imaging. Since the device can only image light in a certain range of colors around its central wavelength, it has almost no responsiveness to light in other wavelengths. Therefore, only the light source of the corresponding light color can meet the imaging requirements of the device, and the light source of other light colors cannot make the device image in response. This imaging method selectively filters out the interference of other colors of light on the imaging process, and at the same time, it is possible to select a certain color of light for imaging purposes.

图12(a)550nm单色光成像器件结构为半球基底/Cr/SnO2/PEA2FA3Pb4Br13/PTAA/Cr;图12(b)600nm单色光成像器件结构为半球基底/Cr/SnO2/PEA2FA3Pb4I2Br11/PTAA/Cr;图12(c)660nm单色光成像器件结构为半球基底/Cr/SnO2/PEA2FA3Pb4I5Br8/PTAA/Cr;图12(d)不同单色光成像结果的叠加图像,这种成像能够更真实的表现物体,同时各单色图像对于后期图像处理可以提供很大的帮助。这种成像结果,有助于在光色波长方面对物像进行分析。Fig. 12(a) The structure of the 550nm monochromatic light imaging device is hemispherical substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 Br 13 /PTAA/Cr; Fig. 12(b) The structure of the 600 nm monochromatic light imaging device is hemispherical substrate/ Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 2 Br 11 /PTAA/Cr; Figure 12(c) The structure of the 660nm monochromatic light imaging device is hemispherical substrate/Cr/SnO 2 /PEA 2 FA 3 Pb 4 I 5 Br 8 /PTAA/Cr; Fig. 12(d) The superimposed image of different monochromatic light imaging results, this imaging can represent the object more realistically, and each monochromatic image can provide great help for post-image processing. This imaging result facilitates the analysis of object images in terms of light color wavelengths.

综上,本发明提出的光探测器在广角和窄带探测中具有广泛的应用前景。In conclusion, the light detector proposed by the present invention has broad application prospects in wide-angle and narrow-band detection.

Claims (4)

1. A preparation method of a narrow-band photodetector with wide-angle detection imaging capability sequentially comprises a hemispherical substrate, an anode, a hole transport layer, a perovskite thin film, an electron transport layer, a buffer layer and a cathode, and comprises the following steps:
(1) selecting a hemispherical substrate with the diameter of 0.8-2 cm, carrying out ultrasonic cleaning in ultrapure water, acetone and isopropanol for 10-20 minutes respectively, and then drying;
(2) evaporating metal Cr to the surface of a hemispherical substrate through vacuum evaporation to be used as an anode, wherein the thickness of the metal Cr is 8-15 nm, then carrying out ultraviolet-ozone treatment on the surface of the metal Cr for 15-30 minutes, and then carrying out plasma treatment for 5-10 minutes;
(3) depositing a hole transport layer on the surface of the anode
(a) Diluting a poly (3, 4-ethylenedioxythiophene) -poly (styrenesulfonic acid) water solution with ultrapure water to obtain a hole transport layer solution with the concentration of 0.05-0.2 wt% of poly (3, 4-ethylenedioxythiophene) -poly (styrenesulfonic acid);
(b) adding 400-1000 mu L of the hole transport layer solution in the step (a) into a pneumatic spray gun with a nozzle diameter of 0.2-0.5 mm;
(c) placing the hemispherical substrate with the anode prepared on the surface on a hot table at the temperature of 60-80 ℃, connecting the pneumatic spray gun in the step (b) with an air compressor, wherein the output pressure is 1-3 MPa, the spraying speed is 0.10-0.3 mL/min, spraying the hole transport layer solution on the surface of the anode, and in the spraying process, keeping the rotation and translation of the hemispherical substrate, the rotation speed is 0.20-0.30 r/min, and the translation speed is 5-20 cm/s, so that the flatness of the sprayed film is kept; in the spraying process, after the liquid drops of the solution completely cover the surface of the hemisphere every time, blowing the whole hemisphere surface by high-speed nitrogen with the pressure of 4-7 MPa until a dry film is formed; when the solution is exhausted, annealing the film for 20-40 minutes at 160-180 ℃, thereby obtaining a hole transport layer with the thickness of 10-100 nm on the surface of the anode;
(4) depositing PEA on the surface of the hole transport layer2FA3Pb4X13Perovskite film, X ═ Br, I or Br and I, with the sum of subscripts 13
(a) Mixing formamidine hydrohalide, lead halide, phenethylamine hydrohalide and methylamine hydrochloride according to PEA2FA3Pb4X13Of (a)The lead ion concentration of the precursor solution is 0.4-0.6M, the solvent is a mixed solvent of acetonitrile and N, N-dimethylformamide or a mixed solvent of ethylene glycol monomethyl ether and N, N-dimethylformamide, and the volume ratio of the acetonitrile or the ethylene glycol monomethyl ether to the N, N-dimethylformamide is 1: 1-3;
(b) adding 500-2000 mu L of the precursor solution prepared in the step (a) into a pneumatic spray gun with a nozzle diameter of 0.2-0.5 mm;
(c) placing the hemispherical substrate with the hole transport layer deposited on the surface on a heating table at the temperature of 80-120 ℃, connecting the pneumatic spray gun in the step (b) with an air compressor with the output pressure of 1-3 MPa, spraying at the speed of 0.1-0.3 mL/min, and spraying the precursor solution on the surface of the hole transport layer; in the spraying process, the rotation and translation of the hemispherical substrate are kept, the rotation speed is 0.20-0.30 r/min, and the translation speed is 5-20 cm/s, so that the flatness of the sprayed film is kept; in the spraying process, after the liquid drops of the solution completely cover the surface of the hemisphere each time, blowing the whole hemisphere surface by using high-speed nitrogen with the pressure of 4-7 MPa until a dry film is formed;
(d) annealing the hemispherical substrate obtained in the step (c) at 80-120 ℃ for 8-15 minutes, then annealing at 120-140 ℃ for 20-40 minutes, finally annealing at 160-170 ℃ for 60-90 minutes, and keeping a dark condition in the annealing process, thereby obtaining a perovskite thin film with the thickness of 2-40 mu m;
(5) the obtained fullerene (C) was evaporated in vacuo60) Evaporating the film on the surface of the perovskite film to obtain an electron transmission layer with the thickness of 15-30 nm;
(6) evaporating the purchased 2, 9-dimethyl-4, 7-biphenyl-1, 10-phenanthroline to the surface of the electron transport layer through vacuum evaporation to obtain a buffer layer with the thickness of 4-10 nm;
(7) evaporating metal Cr to the surface of the buffer layer through vacuum evaporation to be used as a cathode, wherein the thickness of the buffer layer is 8-15 nm; the prepared structure with wide-angle detection imaging capability is a hemispherical substrate/Cr/PEDOT: PSS/PEA2FA3Pb4X13/C60a/BCP/Cr narrow-band photodetector.
2. A preparation method of a narrow-band photodetector with wide-angle detection imaging capability comprises the following steps:
(1) selecting a hemispherical substrate with the diameter of 0.8-2 cm, carrying out ultrasonic cleaning in ultrapure water, acetone and isopropanol for 10-20 minutes respectively, and then drying;
(2) evaporating metal Cr to the surface of a hemispherical substrate through vacuum evaporation to be used as a cathode, wherein the thickness of the cathode is 8-15 nm, then carrying out ultraviolet-ozone treatment on the surface of the metal Cr for 15-30 minutes, and then carrying out plasma treatment for 5-10 minutes;
(3) depositing an electron transport layer on the surface of the cathode
(a) SnO to be purchased2The aqueous solution is diluted with ultrapure water to prepare SnO2An electron transport layer solution having a concentration of 0.05 to 0.1 wt%;
(b) adding 400-1000 mu L of the electron transport layer solution obtained in the step (a) into a pneumatic spray gun with a nozzle diameter of 0.2-0.5 mm;
(c) placing the hemispherical substrate with the cathode prepared on the surface on a heating table at 60-80 ℃, connecting the pneumatic spray gun in the step (b) with an air compressor, spraying the electron transport layer solution on the surface of the cathode, wherein the output pressure is 1-3 MPa, and the spraying speed is 0.10-0.20 mL/min; in the spraying process, the rotation and translation of the hemispherical substrate are kept, the rotation speed is 0.20-0.30 r/min, and the translation speed is 5-20 cm/s, so that the flatness of the sprayed film is kept; in the spraying process, after the liquid drops of the solution completely cover the surface of the hemisphere each time, blowing the whole hemisphere surface by using high-speed nitrogen with the pressure of 4-7 MPa until a dry film is formed; after the solution is exhausted, annealing the film for 20-40 minutes at 160-180 ℃, and then carrying out ultraviolet-ozone treatment for 15-30 minutes, thereby obtaining an electron transport layer with the thickness of 10-100 nm on the surface of the cathode;
(4) depositing PEA on the surface of the electron transport layer2FA3Pb4X13Perovskite film, X ═ Br, I or Br and I, with the sum of subscripts 13
(a) Mixing formamidine hydrohalide, lead halide, phenethylamine hydrohalide and methylamine saltAcid salt according to PEA2FA3Pb4X13The lead ion concentration of the precursor solution is 0.4-0.6M, the solvent is a mixed solvent of acetonitrile and N, N-dimethylformamide or a mixed solvent of ethylene glycol monomethyl ether and N, N-dimethylformamide, and the volume ratio of the acetonitrile or the ethylene glycol monomethyl ether to the N, N-dimethylformamide is 1: 1-3;
(b) adding 500-2000 mu L of the precursor solution prepared in the step (a) into a pneumatic spray gun with a nozzle diameter of 0.2-0.5 mm;
(c) placing the hemispherical substrate with the electron transport layer deposited on the surface on a heating table at the temperature of 80-120 ℃, connecting the pneumatic spray gun in the step (b) with an air compressor with the output pressure of 1-3 MPa, spraying at the speed of 0.1-0.3 mL/min, and spraying the precursor solution on the surface of the electron transport layer; in the spraying process, the rotation and translation of the hemispherical substrate are kept, the rotation speed is 0.20-0.30 r/min, and the translation speed is 5-20 cm/s, so that the flatness of the sprayed film is kept; in the spraying process, after the liquid drops of the solution completely cover the surface of the hemisphere each time, blowing the whole hemisphere surface by using high-speed nitrogen with the pressure of 4-7 MPa until a dry film is formed;
(d) annealing the hemispherical substrate obtained in the step (c) at 80-120 ℃ for 8-15 minutes, then annealing at 120-140 ℃ for 20-40 minutes, finally annealing at 160-170 ℃ for 60-90 minutes, and keeping a dark condition in the annealing process; thereby obtaining a perovskite thin film with the thickness of 2-40 mu m;
(5) depositing a hole transport layer on the surface of the perovskite thin film, wherein the steps are as follows:
(a) preparing poly [ bis (4-phenyl) (2,4, 6-trimethylphenyl) amine ] and toluene into a hole transport layer solution with the concentration of the poly [ bis (4-phenyl) (2,4, 6-trimethylphenyl) amine ] of 0.05-0.2 mg/mL;
(b) adding 400-1000 mu L of the hole transport layer solution obtained in the step (a) into a pneumatic spray gun with a nozzle with the diameter of 0.2-0.5 mm;
(c) fixing a hemispherical substrate with a perovskite film prepared on the surface on a heating table at 60-80 ℃, connecting a pneumatic spray gun in the step (b) with an air compressor, wherein the output pressure is 1-3 MPa, the spraying speed is 0.10-0.20 mL/min, spraying the hole transport layer solution on the perovskite film, and in the spraying process, keeping the rotation and translation of the hemispherical substrate, the rotation speed is 0.20-0.30 r/min, and the translation speed is 5-20 cm/s, so that the flatness of the sprayed film is kept; in the spraying process, after the liquid drops of the solution completely cover the surface of the hemisphere every time, blowing the whole hemisphere surface by high-speed nitrogen with the pressure of 4-7 MPa until a relatively dry film is formed; when the solution is exhausted, annealing the film at 90-110 ℃ for 5-15 minutes to obtain a hole transport layer with the thickness of 10-100 nm;
(6) evaporating metal Cr to the surface of the hole transport layer through vacuum evaporation to be used as an anode, wherein the thickness of the metal Cr is 8-15 nm, and thus the prepared metal Cr/SnO with a hemispherical substrate/SnO2/PEA2FA3Pb4X13a/PTAA/Cr narrow band photodetector.
3. A narrow-band photodetector with wide-angle detection imaging capability, comprising: prepared by the process of claim 1 or 2.
4. An imaging method of a narrow-band photodetector with wide-angle detection imaging capability comprises the following steps:
(a) fixing a monochromatic light LED light source with adjustable central wavelength of 400-900 nm on an X-Y two-dimensional displacement platform, wherein the power of the light source is 3-10W;
(b) connecting the X-Y two-dimensional displacement platform in the step (a) to a computer, and controlling the movement of the X-Y two-dimensional displacement platform, wherein the unit distance of the movement is 200-500 mu m/step;
(c) connecting the LED light source in the step (a) with a function generator, wherein the function generator outputs a square wave signal with the frequency of 20-90 Hz;
(d) placing an object to be tested on a glass platform below an LED light source, and placing the hemispherical narrow-band photodetector of claim 3 below the glass platform;
(e) adjusting the angle of the hemispherical narrow-band photodetector in the step (d) to form a certain included angle with an imaging system, and then connecting the hemispherical narrow-band photodetector with a preamplifier, a phase-locked amplifier and a computer; in the experiment, the function generator outputs square wave signals to the light source and has the same frequency with the phase-locked amplifier, the device receives light signals and converts the light signals into current signals to be output to the preamplifier, the preamplifier converts the current signals into voltage signals, the voltage signals are amplified and transmitted to the phase-locked amplifier, and the phase-locked amplifier further amplifies voltage information of the signals with the same frequency from the preamplifier and the function generator and transmits the voltage information to the computer. Reading a data point when the stepping motor moves one step to form a data matrix;
(f) and reading the voltage data matrix by using a computer, and finally obtaining an imaging result by using MATLAB software.
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