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CN114478035A - Method for treating suspension of yttrium oxide and similar oxide ceramic materials - Google Patents

Method for treating suspension of yttrium oxide and similar oxide ceramic materials Download PDF

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Publication number
CN114478035A
CN114478035A CN202210048727.1A CN202210048727A CN114478035A CN 114478035 A CN114478035 A CN 114478035A CN 202210048727 A CN202210048727 A CN 202210048727A CN 114478035 A CN114478035 A CN 114478035A
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suspension
rotating
yttria
ceramic materials
treating
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王嘉雨
安朋娜
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Beijing Fuchuang Precision Semiconductor Co ltd
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Beijing Fuchuang Precision Semiconductor Co ltd
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/66Monolithic refractories or refractory mortars, including those whether or not containing clay
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/50Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
    • C04B35/505Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds based on yttrium oxide
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62222Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic coatings
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605Treating the starting powders individually or as mixtures
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605Treating the starting powders individually or as mixtures
    • C04B35/62625Wet mixtures
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225Yttrium oxide or oxide-forming salts thereof
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    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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    • C04B2235/50Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54Particle size related information
    • C04B2235/5418Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
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    • C04B2235/5418Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5445Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
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  • Coating By Spraying Or Casting (AREA)

Abstract

The invention relates to a method for treating suspensions of yttrium oxide and similar oxide ceramic materials, the raw materials being treated for application in a plasma spraying process. The processing method comprises the following steps: (1) preparing a solution using submicron to nanoscale yttrium oxide powder in combination with a suitable solvent; (2) if the solution is deposited for more than 6 hours, the solution is inverted and mixed by tapping with a cortical tool; (3) placing the solution on a rotating table or a rotating roller to uniformly rotate; (4) the mixture is used after being rotated and kept for a certain time, and the rotation treatment is carried out again within 1.5 hours; (5) no stirring material can be added during the processing of the suspension to avoid destroying the particle size of the raw material. The processing method adopted by the invention ensures that the properties of the raw materials sprayed by the suspension are stable, the process is consistent, and the performance of the sprayed coating cannot fluctuate.

Description

Method for treating suspension of yttrium oxide and similar oxide ceramic materials
Technical Field
The invention relates to the field of preparation of ceramic coatings by thermal spraying, in particular to a method for treating a suspension raw material used in a suspension plasma spraying method
Background
At present, many enterprises adopt a mode of spraying yttrium oxide on an aluminum substrate to enhance the corrosion resistance and the wear resistance of the aluminum substrate, but most of enterprises use powder raw materials to spray yttrium oxide, and the particle size of the powder raw materials is larger (40-60um), so that the generated coating has larger pores. This makes the inside of the coating easy to embed contaminating impurities and the acid base and plasma etc. are easy to break down from the pores. The direct use of low-nanometer powder material will result in insufficient fluidity and thus affect the spraying process. As integrated circuit nano-fabrication processes become finer and finer, the requirements for coating density and cleanliness will become higher and higher. Therefore, the plasma spraying is carried out by using the raw material of the suspension, and an efficient process mode is realized. However, the suspension raw material has many factors to affect the internal structure, size and agglomeration degree of the material, and the coating sprayed by the unstable raw material has fluctuation in performance.
Therefore, the suspension raw material pretreatment method used in the patent is to prepare submicron or nanometer powder (0.5-5um) into a solvent through a proper solvent, and the suspension after being deposited for a certain time is knocked and mixed uniformly by using tools such as a skin hammer and the like, and is rotated at a fixed rotating speed for a fixed time, and the suspension is reprocessed within a certain using time.
Disclosure of Invention
The purpose of the invention is realized by the following technical scheme:
a method of treating a suspension of yttria and similar oxide ceramic materials, the method comprising the steps of:
(1) preparing a solution using submicron to nanoscale yttrium oxide powder in combination with a suitable solvent;
(2) if the solution is deposited for more than 6 hours, the solution is inverted and mixed by tapping with a cortical tool;
(3) placing the solution on a rotating table or a rotating roller to uniformly rotate;
(4) the mixture is used after being rotated and kept for a certain time, and the rotation treatment is carried out again within 1.5 hours;
(5) no stirrer may be added during the processing of the suspension to avoid disruption of the particle size of the feedstock.
The preferred technical scheme of the invention is as follows: the oxide species contained include, but are not limited to, yttria, alumina, zirconia.
The preferred technical scheme of the invention is as follows: the particle size of the submicron-to-nanometer yttrium oxide powder in the step (1) is between 0.2um and 5um, and the optimal range is 1 to 2 um.
The preferred technical scheme of the invention is as follows: suitable solvents for step (1) include, but are not limited to, deionized water, ethanol, isopropanol, acetone.
The preferred technical scheme of the invention is as follows: and (4) rotating on a rotating table or a rotating roller in the step (3), wherein the rotating direction of the rotating table or the rotating roller is different from the natural sinking direction of the raw materials.
The preferred technical scheme of the invention is as follows: in the rotating process in the step (4), the rotating speed is kept at 45-90r/min, and the rotating time is ensured to be 6-18 hours.
The preferred technical scheme of the invention is as follows: the non-addible stirrers in the step (5) comprise magnetons, metal stirring blades and the like.
The beneficial effects of the invention are:
1. the processing method adopted by the invention ensures that the properties of the raw materials sprayed by the suspension are stable, ensures the process consistency and ensures that the performance of the sprayed coating does not fluctuate
2. The processing method adopted by the invention can save the processing time before spraying, and the method is constant and has no threshold of operation difficulty
Detailed Description
The present invention will be described in further detail with reference to examples.
A method of treating a suspension of yttria and similar oxide ceramic materials, the method comprising the steps of:
(1) preparing a solution using submicron to nanoscale yttrium oxide powder in combination with a suitable solvent;
(2) if the solution is deposited for more than 6 hours, the solution is inverted and mixed by tapping with a cortical tool;
(3) placing the solution on a rotating table or a rotating roller to uniformly rotate;
(4) the mixture is used after being rotated and kept for a certain time, and the rotation treatment is carried out again within 1.5 hours;
(5) no stirring material can be added during the processing of the suspension to avoid destroying the particle size of the raw material.
The preferred technical scheme of the invention is as follows: the oxide species contained include, but are not limited to, yttria, alumina, zirconia.
The preferred technical scheme of the invention is as follows: the particle size of the submicron-to-nanometer yttrium oxide powder in the step (1) is between 0.2um and 5um, and the optimal range is 1 to 2 um.
The preferred technical scheme of the invention is as follows: suitable solvents for step (1) include, but are not limited to, deionized water, ethanol, isopropanol, acetone.
The preferred technical scheme of the invention is as follows: and (4) rotating on a rotating table or a rotating roller in the step (3), wherein the rotating direction of the rotating table or the rotating roller is different from the natural sinking direction of the raw materials.
The preferred technical scheme of the invention is as follows: in the rotating process in the step (4), the rotating speed is kept at 45-90r/min, and the rotating time is ensured to be 6-18 hours.
The preferred technical scheme of the invention is as follows: the non-addable stirrer in the step (5) comprises magnetons, a metal stirring blade and the like.
Examples
First, using submicron powder of yttrium oxide having an average particle size of 1um, deionized water was added and stirred. The yttrium oxide suspension is prepared into 30 mass percent yttrium oxide suspension, the suspension is deposited for more than 12 hours, the suspension is inverted, the bottom of the deposited raw material is knocked by a leather hammer to be uniformly mixed with deionized water, then the suspension is placed on a roller to uniformly rotate for 10 hours at the rotating speed of 75r/min, the placing direction of the suspension is ensured to be vertical to the bottom direction of an original bottle in the rotating process, and a magneton and a metal stirring blade are not placed in the bottle, so that the size of the raw material particles is prevented from being damaged. Then pouring the mixture into a feeder of an axial plasma spraying device for mixing, and spraying by using the axial plasma spraying device. After 1.5 hours of spraying, the suspension was again poured into the bottle and used again after one cycle of the above operation.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. The invention can be used for various parts in the semiconductor industry which need to be provided with the corrosion-resistant functional coating, but is not limited to the field of semiconductors. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. A method of treating a suspension of yttria and similar oxide ceramic materials, the method comprising the steps of:
(1) preparing a solution using submicron to nanoscale yttrium oxide powder in combination with a suitable solvent;
(2) if the solution is deposited for more than 6 hours, the solution is inverted and mixed by tapping with a cortical tool;
(3) placing the solution on a rotating table or a rotating roller to uniformly rotate;
(4) the mixture is used after being rotated and kept for a certain time, and the rotation treatment is carried out again within 1.5 hours;
(5) no stirring material can be added during the processing of the suspension to avoid destroying the particle size of the raw material.
2. A process for treating a suspension of yttria and similar oxide ceramic materials according to claim 1, wherein: the oxide species contained include, but are not limited to, yttria, alumina, zirconia.
3. A process for treating a suspension of yttria and similar oxide ceramic materials according to claim 1, wherein: the particle size of the submicron-to-nanometer yttrium oxide powder in the step (1) is between 0.2um and 5um, and the optimal range is 1 to 2 um.
4. A process for treating a suspension of yttria and similar oxide ceramic materials according to claim 1, wherein: suitable solvents for step (1) include, but are not limited to, deionized water, ethanol, isopropanol, acetone.
5. A process for treating a suspension of yttria and similar oxide ceramic materials according to claim 1, wherein: and (4) rotating on a rotating table or a rotating roller in the step (3), wherein the rotating direction of the rotating table or the rotating roller is different from the natural sinking direction of the raw materials.
6. A process for treating a suspension of yttria and similar oxide ceramic materials according to claim 1, wherein: in the rotating process in the step (4), the rotating speed is kept at 45-90r/min, and the rotating time is ensured to be 6-18 hours.
7. A process for treating a suspension of yttria and similar oxide ceramic materials according to claim 1, wherein: the non-addable stirrer in the step (5) comprises magnetons and a metal stirring blade.
CN202210048727.1A 2022-01-17 2022-01-17 Method for treating suspension of yttrium oxide and similar oxide ceramic materials Pending CN114478035A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115364732A (en) * 2022-08-01 2022-11-22 沈阳富创精密设备股份有限公司 Uniform treatment method for micro-nano material suspension
CN120041775A (en) * 2025-01-23 2025-05-27 安徽双峰新材料有限公司 Preparation method of anti-etching ceramic coating material

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5525559A (en) * 1993-02-13 1996-06-11 Tioxide Specialties Limited Preparation of mixed powders
US5609921A (en) * 1994-08-26 1997-03-11 Universite De Sherbrooke Suspension plasma spray
JP2010150617A (en) * 2008-12-25 2010-07-08 Fujimi Inc Slurry for thermal spraying, method of forming sprayed coating, and sprayed coating
CN104195499A (en) * 2014-09-11 2014-12-10 扬州大学 Method for preparing coating with micro-nano composite structure through liquid plasma spraying
US20160040278A1 (en) * 2013-03-13 2016-02-11 Fujimi Incorporated Slurry for thermal spraying, thermal sprayed coating, and method for forming thermal sprayed coating
US20170088930A1 (en) * 2015-09-25 2017-03-30 Fujimi Incorporated Slurry for thermal spraying, sprayed coating, and method for forming sprayed coating
US20170121804A1 (en) * 2014-09-18 2017-05-04 Oerlikon Metco (Us) Inc. Pre-formulated powder feedstock
CN112695266A (en) * 2020-12-23 2021-04-23 湘潭大学 Suspension, preparation method of coating and thermal barrier coating

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5525559A (en) * 1993-02-13 1996-06-11 Tioxide Specialties Limited Preparation of mixed powders
US5609921A (en) * 1994-08-26 1997-03-11 Universite De Sherbrooke Suspension plasma spray
JP2010150617A (en) * 2008-12-25 2010-07-08 Fujimi Inc Slurry for thermal spraying, method of forming sprayed coating, and sprayed coating
US20160040278A1 (en) * 2013-03-13 2016-02-11 Fujimi Incorporated Slurry for thermal spraying, thermal sprayed coating, and method for forming thermal sprayed coating
CN104195499A (en) * 2014-09-11 2014-12-10 扬州大学 Method for preparing coating with micro-nano composite structure through liquid plasma spraying
US20170121804A1 (en) * 2014-09-18 2017-05-04 Oerlikon Metco (Us) Inc. Pre-formulated powder feedstock
US20170088930A1 (en) * 2015-09-25 2017-03-30 Fujimi Incorporated Slurry for thermal spraying, sprayed coating, and method for forming sprayed coating
CN112695266A (en) * 2020-12-23 2021-04-23 湘潭大学 Suspension, preparation method of coating and thermal barrier coating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115364732A (en) * 2022-08-01 2022-11-22 沈阳富创精密设备股份有限公司 Uniform treatment method for micro-nano material suspension
CN120041775A (en) * 2025-01-23 2025-05-27 安徽双峰新材料有限公司 Preparation method of anti-etching ceramic coating material

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Application publication date: 20220513