CN114435935A - Conveying equipment is kept to wafer box - Google Patents
Conveying equipment is kept to wafer box Download PDFInfo
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- CN114435935A CN114435935A CN202011214239.0A CN202011214239A CN114435935A CN 114435935 A CN114435935 A CN 114435935A CN 202011214239 A CN202011214239 A CN 202011214239A CN 114435935 A CN114435935 A CN 114435935A
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- 230000007246 mechanism Effects 0.000 claims abstract description 104
- 239000012636 effector Substances 0.000 claims abstract description 22
- 230000005540 biological transmission Effects 0.000 claims description 49
- 239000003638 chemical reducing agent Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 22
- 230000001360 synchronised effect Effects 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/901—Devices for picking-up and depositing articles or materials provided with drive systems with rectilinear movements only
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention belongs to the technical field of electronic semiconductor production, and particularly relates to a piece box storage and transportation device. Comprises a wafer box storage and transportation robot; the wafer box storage and transportation robot comprises an X-axis driving mechanism, a Z-axis driving mechanism and an R-axis driving mechanism which are sequentially connected, wherein the R-axis driving mechanism comprises a rotary driving mechanism, a big arm, a small arm and an end pick-up, and the rotary driving mechanism is connected with the Z-axis driving mechanism through a Z-axis sliding plate; the rear end of the large arm is connected with the rotary driving mechanism, the front end of the large arm is rotationally connected with the rear end of the small arm, and the front end of the small arm is rotationally connected with the end effector; the rotary driving mechanism drives the large arm to rotate, and the large arm drives the small arm to rotate reversely, so that the end effector is driven to translate along the direction of the R axis. The R-axis driving mechanism can enable the end effector to move back and forth in the horizontal direction, so that the robot has the degrees of freedom in three directions of an X axis, a Z axis and an R axis, the robot is more flexible, and the grabbing range is enlarged.
Description
Technical Field
The invention belongs to the technical field of electronic semiconductor production, and particularly relates to a piece box storage and transportation device.
Background
In the field of electronic semiconductor, wafers are usually placed in a wafer cassette to perform the transportation and transportation. The number of units in the chip manufacturing equipment is more and more, the requirement of high-capacity small space is required to be met to achieve the expected target, the capacity of the chip conveying equipment is determined by the number of the wafer boxes, the transverse increase of the wafer boxes can cause the machine to be too wide, the occupied area is increased, the transverse stroke of the robot is lengthened, and other bad problems are solved, and therefore, in order to ensure that the high-capacity machine can continuously feed wafers, novel equipment capable of storing and carrying the wafer boxes is required.
The existing film box grabbing robot only has 2 degrees of freedom, namely the degrees of freedom of movement of an X axis and a Z axis, so that only film boxes on one side can be grabbed, the grabbing range is limited, and an overhead travelling crane position and a buffer position can be grabbed on one side together with a loadport (loading equipment).
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a film cassette storage and transportation apparatus, so as to solve the problem that the existing film cassette grabbing robot can only grab a film cassette on one side, and the grabbing range is limited.
In order to achieve the purpose, the invention adopts the following technical scheme:
a kind of film cassette keeps the transport apparatus, including the film cassette keeps the transport robot;
the wafer box storage and transportation robot comprises an X-axis driving mechanism, a Z-axis driving mechanism and an R-axis driving mechanism which are sequentially connected, wherein the R-axis driving mechanism comprises a rotary driving mechanism, a large arm, a small arm and an end pick-up, and the rotary driving mechanism is connected with the Z-axis driving mechanism through a Z-axis sliding plate; the rear end of the large arm is connected with the rotary driving mechanism, the front end of the large arm is rotationally connected with the rear end of the small arm, and the front end of the small arm is rotationally connected with the end effector;
the rotary driving mechanism drives the large arm to rotate, and the large arm drives the small arm to rotate reversely, so that the end effector is driven to translate along the direction of the R axis.
The large arm comprises a large arm body and a belt transmission mechanism I, wherein the rear end of the large arm body is connected with the output end of the rotary driving mechanism; the belt transmission mechanism I is arranged in the large arm body and is connected with the rear end of the small arm; the rotary driving mechanism drives the large arm body to rotate, so that the belt transmission mechanism I is driven to rotate in the opposite direction.
The belt transmission mechanism I comprises a belt wheel I, a transmission belt I and a belt wheel II, wherein the belt wheel I is arranged on the Z-axis sliding plate and is accommodated in the rear end of the large arm; the belt wheel II is rotatably arranged at the front end of the large arm and is connected with the belt wheel I through a transmission belt I; the small arm is connected with the belt wheel II.
The small arm comprises a small arm body and a belt transmission mechanism II, wherein the rear end of the small arm body is connected with the belt wheel II; the belt transmission mechanism II is arranged in the small arm body and is connected with the end effector; the small arm body rotates to drive the belt transmission mechanism II to rotate along the reverse direction, so that the posture of the end picking device is kept unchanged.
The belt transmission mechanism II comprises a belt wheel III, a transmission belt II and a belt wheel IV, wherein the belt wheel III is arranged at the front end of the large arm and connected with the large arm and is accommodated in the rear end of the small arm body; the belt wheel IV is rotatably arranged at the front end of the small arm body and is connected with the belt wheel III through a transmission belt II; the end picking-up device is connected with the belt wheel IV.
The gear ratio of the belt wheel I to the belt wheel II is 2: 1; the gear ratio of the belt wheel III to the belt wheel IV is 1: 2.
The rotary driving mechanism comprises an R-axis motor and an R-axis speed reducer, wherein the R-axis speed reducer is arranged on the Z-axis sliding plate, an input shaft is connected with the R-axis motor, and an output shaft is connected with the rear end of the large arm.
The X-axis driving mechanism and the Z-axis driving mechanism are both belt transmission mechanisms; the X-axis driving mechanism has freedom of movement along the X-axis direction; the Z-axis driving mechanism has a degree of freedom of movement in the Z-axis direction.
The wafer box keeping and transporting equipment also comprises a wafer box storage frame; the wafer box storage and transport robot is arranged in the wafer box storage frame and used for conveying the wafer boxes.
One side of the wafer box storage frame is sequentially provided with a crown block position and a buffer position from top to bottom, and the other side of the wafer box storage frame is provided with loading equipment.
The invention has the advantages and beneficial effects that:
1. the invention can enlarge the grabbing range of the grabbing piece box by adding the R-axis driving mechanism.
2. The R-axis driving mechanism can enable the end effector to move back and forth in the horizontal direction, so that the robot has the degrees of freedom in three directions of an X axis, a Z axis and an R axis, and is more flexible.
3. The storage frame of the film box can be matched with the R shaft to design two rows of cache regions, so that the storage capacity of the film box is increased, and the requirement of high yield is met.
Drawings
FIG. 1 is a schematic structural view of a wafer cassette storage and transportation apparatus according to the present invention;
FIG. 2 is a schematic diagram of the X-axis linear drive of the present invention;
FIG. 3 is an isometric view of the R-axis drive mechanism of the present invention;
FIG. 4 is a schematic structural view of an R-axis driving mechanism according to the present invention;
FIG. 5 is a schematic view of a cassette storage frame according to the present invention;
fig. 6 is a right side view of fig. 5.
In the figure: the device comprises an X-axis driving mechanism 1, an X-axis frame 11, an X-axis sliding plate 12, an X-axis guide rail 13, an X-axis motor 14, an X-axis reducer 15, an X-axis driving wheel 16, an X-axis transmission belt 17, an X-axis driven wheel 18, a Z-axis driving mechanism 2, an R-axis driving mechanism 3, a Z-axis sliding plate 31, a rotary driving mechanism 32, an R-axis motor 321, an R-axis reducer 322, a big arm 33, a big arm 331, a belt wheel I332, a transmission belt I, a belt wheel II, a small arm 34, a small arm 341, a belt wheel III, a belt wheel II, a belt wheel IV 344, an end pick-up 35, a box storage frame 4, a crown block 5, a buffer storage position 6 and a loading device 7.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1 and 3, the present invention provides a wafer cassette storage and transport apparatus, including a wafer cassette storage and transport robot; the wafer box storage and transportation robot comprises an X-axis driving mechanism 1, a Z-axis driving mechanism 2 and an R-axis driving mechanism 3 which are sequentially connected, wherein the R-axis driving mechanism 3 comprises a rotary driving mechanism 32, a large arm 33, a small arm 34 and an end picking device 35, and the rotary driving mechanism 32 is connected with the Z-axis driving mechanism 2 through a Z-axis sliding plate 31; the rear end of the large arm 33 is connected with the rotary driving mechanism 32, the front end of the large arm 33 is rotatably connected with the rear end of the small arm 34, and the front end of the small arm 34 is rotatably connected with the end effector 35; the rotary driving mechanism 32 drives the large arm 33 to rotate, and the large arm 33 drives the small arm 34 to rotate reversely, thereby driving the end effector 35 to translate along the R-axis direction.
According to the wafer box storage and transportation equipment provided by the invention, the R-axis driving mechanism 3 is additionally arranged, and the R-axis driving mechanism 3 can enable the end effector 35 to move back and forth in the horizontal direction, so that the robot has the degrees of freedom in three directions of an X axis, a Z axis and an R axis, the flexibility is higher, and the grabbing range is enlarged.
In the embodiment of the invention, the X-axis driving mechanism 1 and the Z-axis driving mechanism 2 are both belt transmission mechanisms; the X-axis drive mechanism 1 has a degree of freedom of movement in the X-axis direction; the Z-axis drive mechanism 2 has a degree of freedom of movement in the Z-axis direction.
As shown in fig. 2, in the embodiment of the present invention, the X-axis driving mechanism 1 includes an X-axis frame 11, an X-axis sliding plate 12, an X-axis guide rail 13, an X-axis motor 14, an X-axis reducer 15, an X-axis driving wheel 16, an X-axis transmission belt 17, and an X-axis driven wheel 18, wherein the X-axis frame 11 is provided with the X-axis guide rail 13; an X-axis driving wheel 16 and an X-axis driven wheel 18 are respectively arranged at two ends of the X-axis frame 11 and are connected through an X-axis transmission belt 17; the X-axis speed reducer 15 is arranged on the X-axis frame 11, the input end of the X-axis speed reducer 15 is connected with the X-axis motor 14, and the output end of the X-axis speed reducer 15 is connected with the X-axis driving wheel 16; the X-axis slide plate 12 is slidably fitted to the X-axis guide rail 13 and is connected to the Z-axis drive mechanism 2.
Specifically, the X-axis frame 11 is fixed to a frame of the cassette storage and transportation system, and the X-axis frame 11 is formed by welding stainless steel sections or by splicing aluminum sections. The X-axis transmission mechanism is driven by an X-axis motor 14 and an X-axis speed reducer 15 to drive an X-axis driving wheel 16 to rotate, and is driven by an X-axis transmission belt 17 between the X-axis driving wheel 16 and an X-axis driven wheel 18, and the X-axis transmission belt 17 is fixed with the X-axis sliding plate 12, so that the X-axis sliding plate 12 moves. The X-axis driven pulley 18 can be positionally adjusted by a tensioning device, so that tensioning of the X-axis drive belt 17 is achieved. A fan may be installed below the X-axis to discharge dust generated from the X-axis belt 17 through the fan. In this embodiment, two X-axis guide rails 13 are fixed on the X-axis frame 11, two sliders are arranged on each side of the X-axis guide rail 13, and the X-axis sliding plate 12 is mounted on the sliders. The X-axis guide 13 functions to support and guide the X-axis slide 12 to move along the guide direction. Hard limit and limit sensors are arranged on two sides of the X axis and are used as safety devices of the X axis sliding plate 12.
In this embodiment, the Z-axis driving mechanism 2 includes a Z-axis frame, a Z-axis guide rail and a Z-axis belt transmission mechanism, the Z-axis frame is fixed on the X-axis sliding plate 12 and moves along the X-axis guide rail 13. The Z-axis sliding plate 31 is connected with the Z-axis guide rail in a sliding mode through a Z-axis sliding block and is connected with a Z-axis belt transmission mechanism, and the Z-axis belt transmission mechanism drives the Z-axis sliding plate 31 to slide along the Z-axis guide rail. Specifically, the Z-axis frame can be formed by welding stainless steel plates or splicing metal plates, and is driven by a motor reducer and a driving belt wheel through a driven belt wheel and a synchronous belt. Two Z-axis guide rails are fixed on the Z-axis frame, each Z-axis guide rail is provided with two sliding blocks, and Z-axis sliding plates 31 are arranged on the sliding blocks. The Z-axis sliding plate 31 is fixed with a synchronous belt, and the synchronous belt drives the Z-axis sliding plate 31 to move up and down along a Z-axis guide rail. The driven belt wheel is provided with a belt tensioning mechanism which can tension the synchronous belt.
As shown in fig. 4, in the embodiment of the present invention, the rotation driving mechanism 32 in the R-axis driving mechanism 3 includes an R-axis motor 321 and an R-axis reducer 322, wherein the R-axis reducer 322 is disposed on the Z-axis sliding plate 31, and an input shaft is connected to an output shaft of the R-axis motor 321, and an output shaft of the R-axis reducer 322 is connected to a rear end of the large arm 33.
Specifically, the input ends of the R-axis motor 321 and the R-axis reducer 322 are connected by a pulley and a belt, and the R-axis reducer 322 is a harmonic reducer.
As shown in fig. 4, in the embodiment of the present invention, the large arm 33 includes a large arm body 331 and a belt transmission mechanism i, wherein the rear end of the large arm body 331 is connected to the output shaft of the R-axis reducer 322; the belt transmission mechanism I is arranged in the large arm body 331 and is connected with the rear end of the small arm 34; the rotation driving mechanism 32 drives the large arm 331 to rotate, thereby driving the belt transmission mechanism i to rotate in the opposite direction.
Specifically, the belt transmission mechanism I comprises a belt wheel I332, a transmission belt I333 and a belt wheel II 334, wherein the belt wheel I332 is fixedly arranged on the Z-axis sliding plate 31 and is accommodated in the rear end of the large arm 33; the belt wheel II 334 is rotatably arranged at the front end of the large arm 33 and is connected with the belt wheel I332 through a transmission belt I333; and the small arm 34 is connected with a belt wheel II 334. When the large arm body 331 swings in the forward direction, the belt wheel II 334 at the front end is driven to swing together, and the belt wheel II 334 and the belt wheel I332 are connected through the transmission belt I333, so that the belt wheel II 334 rotates in the reverse direction, the small arm 34 and the belt wheel II 334 rotate synchronously, namely the swinging direction of the small arm 34 is opposite to the swinging direction of the large arm 33.
As shown in fig. 4, in the embodiment of the present invention, the small arm 34 includes a small arm body 341 and a belt transmission mechanism ii, wherein the rear end of the small arm body 341 is connected to a pulley ii 334; the belt transmission mechanism II is arranged in the small arm body 341 and connected with the end effector 35; the small arm 341 rotates to drive the belt transmission mechanism ii to rotate in the reverse direction, so that the attitude of the end effector 35 is kept unchanged.
Specifically, the belt transmission mechanism ii comprises a belt wheel iii 342, a transmission belt ii 343 and a belt wheel iv 344, wherein the belt wheel iii 342 is fixedly arranged at the front end of the large arm 33 for connection and is accommodated inside the rear end of the small arm body 341; a pulley IV 344 is rotatably arranged at the front end of the small arm body 341 and is connected with a pulley III 342 through a transmission belt II 343; end effector 35 is connected to pulley iv 344. When the small arm 341 swings reversely, the belt wheel iv 344 at the front end is driven to swing together, and the belt wheel iv 344 and the belt wheel iii 342 are connected through the transmission belt ii 343, so that the belt wheel iv 344 rotates in the forward direction, and the end effector 35 rotates together with the belt wheel iv 344, so that the end effector 35 always keeps in one direction.
Further, the gear ratio of the pulley I332 to the pulley II 334 is 2:1, and the gear ratio of the pulley III 342 to the pulley IV 344 is 1:2, so that the end effector 35 can always move linearly at an angle.
As shown in fig. 5 to 6, on the basis of the above embodiment, the cassette keeping and transporting apparatus provided by the present invention further includes a cassette storage frame 4; the cassette storage and transport robot is provided in the cassette storage frame 4 and is used for transporting cassettes. The cassette storing and transporting robot has three degrees of freedom, namely an X axis, a Z axis and an R axis, wherein the X axis moves horizontally from left to right, the Z axis moves vertically, and the R axis moves horizontally back and forth.
In the embodiment of the invention, one side of a wafer box storage frame 4 is sequentially provided with a sky parking space 5 and a buffer parking space 6 from top to bottom, and the other side is provided with a loading device 7. The buffer positions 6 can be designed into two rows, so that the storage capacity of the film box is increased, and the requirement of high yield is met.
Specifically, spool box storage frame 4 is built with the aluminium alloy and is formed, also can be with stainless steel tube welding frame, has the station that the spool box was placed IN two places, is overhead traveling crane position 5 and buffer position 6 respectively, can deposit four spool boxes on every row of station, and two on the left side are the IN position on the overhead traveling crane position 5, and the overhead traveling crane can be followed the higher authority and put the spool box on the IN position, and two on the right are the OUT position, and the overhead traveling crane takes OUT the spool box from the OUT position. The buffer position 6 can increase the storage capacity of the wafer box and meet the requirement of high yield.
According to the invention, the R-axis driving mechanism is added, so that the grabbing range of the grabbing box can be expanded, the end effector can move back and forth in the horizontal direction, and the robot has the freedom degrees in three directions of an X axis, a Z axis and an R axis and is more flexible. The storage frame of the film box can be matched with the R shaft to design two rows of cache regions, so that the storage capacity of the film box is increased, and the requirement of high yield is met.
The above description is only an embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, extension, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.
Claims (10)
1. A kind of film cassette keeps the transport apparatus, characterized by that, including the film cassette keeps the transport robot;
the wafer box storage and transportation robot comprises an X-axis driving mechanism (1), a Z-axis driving mechanism (2) and an R-axis driving mechanism (3) which are sequentially connected, wherein the R-axis driving mechanism (3) comprises a rotary driving mechanism (32), a large arm (33), a small arm (34) and an end picking device (35), and the rotary driving mechanism (32) is connected with the Z-axis driving mechanism (2) through a Z-axis sliding plate (31); the rear end of the large arm (33) is connected with the rotary driving mechanism (32), the front end of the large arm (33) is rotatably connected with the rear end of the small arm (34), and the front end of the small arm (34) is rotatably connected with the end effector (35);
the rotary driving mechanism (32) drives the large arm (33) to rotate, and the large arm (33) drives the small arm (34) to rotate in the reverse direction, so that the end effector (35) is driven to translate along the direction of the R axis.
2. The apparatus for keeping and transporting cassettes in accordance with claim 1, wherein the boom (33) comprises a boom body (331) and a belt transmission mechanism i, wherein the rear end of the boom body (331) is connected to the output end of the rotation driving mechanism (32); the belt transmission mechanism I is arranged in the large arm body (331) and is connected with the rear end of the small arm (34); the rotary driving mechanism (32) drives the large arm body (331) to rotate, so that the belt transmission mechanism I is driven to rotate in the opposite direction.
3. The cassette storage and transport apparatus according to claim 2, wherein the belt transmission mechanism i includes a pulley i (332), a transmission belt i (333), and a pulley ii (334), wherein the pulley i (332) is disposed on the Z-axis slide plate (31) and is accommodated inside a rear end of the upper arm (33); the belt wheel II (334) is rotatably arranged at the front end of the large arm (33) and is connected with the belt wheel I (332) through a transmission belt I (333); the small arm (34) is connected with the belt wheel II (334).
4. The cassette storage and transport apparatus according to claim 3, wherein the arm (34) includes an arm body (341) and a belt transmission mechanism II, and a rear end of the arm body (341) is connected to the pulley II (334); the belt transmission mechanism II is arranged in the small arm body (341) and is connected with the end effector (35); the small arm body (341) rotates to drive the belt transmission mechanism II to rotate along the reverse direction, so that the posture of the end effector (35) is kept unchanged.
5. The cassette storage and transportation apparatus of claim 4, wherein the belt driving mechanism II comprises a pulley III (342), a belt II (343), and a pulley IV (344), wherein the pulley III (342) is disposed at the front end of the large arm (33) and connected to the rear end of the small arm (341); the belt wheel IV (344) is rotatably arranged at the front end of the small arm body (341) and is connected with the belt wheel III (342) through a transmission belt II (343); the end effector (35) is connected to the pulley iv (344).
6. The cassette storage/transport apparatus according to claim 5, wherein a gear ratio of the pulley I (332) to the pulley II (334) is 2: 1; the gear ratio of the pulley III (342) to the pulley IV (344) is 1: 2.
7. The apparatus for keeping and transporting cassettes in accordance with claim 1, wherein the rotation driving mechanism (32) comprises an R-axis motor (321) and an R-axis reducer (322), wherein the R-axis reducer (322) is provided on the Z-axis slide plate (31), and an input shaft is connected to the R-axis motor (321) and an output shaft is connected to the rear end of the boom (33).
8. The cassette storage/transport apparatus according to claim 1, wherein the X-axis drive mechanism (1) and the Z-axis drive mechanism (2) are both belt transmission mechanisms; the X-axis driving mechanism (1) has freedom of movement along the X-axis direction; the Z-axis driving mechanism (2) has a degree of freedom of movement in the Z-axis direction.
9. A cassette storage and transport apparatus according to any one of claims 1 to 8, further comprising a cassette storage frame (4); the wafer box storage and transport robot is arranged in the wafer box storage frame (4) and used for conveying the wafer boxes.
10. A magazine storage and handling apparatus according to claim 9, wherein the magazine storage frame (4) is provided with a sky space (5) and a buffer space (6) on one side and a loading apparatus (7) on the other side in sequence from top to bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011214239.0A CN114435935A (en) | 2020-11-04 | 2020-11-04 | Conveying equipment is kept to wafer box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011214239.0A CN114435935A (en) | 2020-11-04 | 2020-11-04 | Conveying equipment is kept to wafer box |
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| Publication Number | Publication Date |
|---|---|
| CN114435935A true CN114435935A (en) | 2022-05-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011214239.0A Pending CN114435935A (en) | 2020-11-04 | 2020-11-04 | Conveying equipment is kept to wafer box |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001088065A (en) * | 1999-09-14 | 2001-04-03 | Sony Corp | Substrate transfer method, substrate transfer device, and flat panel display manufacturing method |
| JP2004363363A (en) * | 2003-06-05 | 2004-12-24 | Tokyo Electron Ltd | Carrying apparatus, processing apparatus and carrying method |
| CN1906748A (en) * | 2004-10-19 | 2007-01-31 | 东京毅力科创株式会社 | Vertical heat treatment apparatus and method for operating same |
| CN101190524A (en) * | 2006-12-01 | 2008-06-04 | 日本电产三协株式会社 | Arm driving device and robot used for industrial |
| CN111009485A (en) * | 2018-10-05 | 2020-04-14 | 东京毅力科创株式会社 | Substrate warehouse, substrate processing system and substrate inspection method |
-
2020
- 2020-11-04 CN CN202011214239.0A patent/CN114435935A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001088065A (en) * | 1999-09-14 | 2001-04-03 | Sony Corp | Substrate transfer method, substrate transfer device, and flat panel display manufacturing method |
| JP2004363363A (en) * | 2003-06-05 | 2004-12-24 | Tokyo Electron Ltd | Carrying apparatus, processing apparatus and carrying method |
| CN1906748A (en) * | 2004-10-19 | 2007-01-31 | 东京毅力科创株式会社 | Vertical heat treatment apparatus and method for operating same |
| CN101190524A (en) * | 2006-12-01 | 2008-06-04 | 日本电产三协株式会社 | Arm driving device and robot used for industrial |
| CN111009485A (en) * | 2018-10-05 | 2020-04-14 | 东京毅力科创株式会社 | Substrate warehouse, substrate processing system and substrate inspection method |
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