CN114397302A - A wafer cleaning and testing device - Google Patents

Abstract

The invention relates to the technical field of wafer detection, in particular to a wafer cleaning and detecting device, which comprises a workbench, a side plate and a pressing detector, wherein the pressing detector comprises a detector shell, the top of the detector shell is provided with a detection hole, one side of the detector shell is provided with a first sliding chute, a sliding block is connected in the first sliding chute in a sliding manner, one side of the sliding block is fixedly connected with a limiting block, one side of the limiting block, which is far away from the sliding block, is fixedly connected with a sliding rod, one side of the sliding block, which is far away from the limiting block, is fixedly connected with a separating rod, the other side of the detector shell is internally provided with a second sliding chute, a limiting sliding block is connected in the second sliding chute in a sliding manner, and one end, which is far away from the sliding block, of the separating rod is fixedly connected with the limiting sliding block, the method can be quickly and visually judged, is low in cost and can be repeatedly used.

Description

A wafer cleaning and testing device

technical field

The invention relates to the technical field of wafer detection, in particular to a wafer cleaning and detection device.

Background technique

Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. It can be processed into various circuit element structures on the silicon wafer, and become an IC with specific electrical functions. The original material of the wafer is silicon, and the inexhaustible silicon dioxide on the surface of the earth's crust, the silicon dioxide ore is extracted by electric arc furnace, hydrochloric acid is chlorinated, and after distillation, high-purity polycrystalline silicon is made, its purity As high as 99.999999999%, the wafer fab melts a lot of crystalline silicon, then seed crystals in the melt, and then slowly pull it out to form a cylindrical monocrystalline silicon ingot. The seed crystal with the determined crystal plane orientation is gradually formed in the molten silicon raw material. This process is called "crystal growth". The silicon crystal rod is then cut into sections, rolled, sliced, chamfered, polished, laser engraved, and packaged , that is to become the basic raw material of the integrated circuit factory - silicon wafer, which is the "wafer"; the main component of PVC is polyvinyl chloride, which is slightly yellow and translucent, shiny, and its transparency is better than that of polyethylene and polypropylene. Worse than polystyrene, it is divided into soft and hard polyvinyl chloride according to the dosage of additives. Soft products are flexible and flexible, and feel sticky. The hardness of hard products is higher than that of low-density polyethylene, but lower than that of polypropylene. There will be whitening phenomenon. It is a polymer material that uses a chlorine atom to replace a hydrogen atom in polyethylene. After the wafer is cleaned, it is necessary to check whether there are scratches or burrs on it. The current technology is to use the human eye under the searchlight. Look, the searchlight is equivalent to the headlight of the car. Using the searchlight for a long time to inspect the wafer is particularly harmful to the eyes, and the efficiency is low, and the detection accuracy is not high, and the use of high-precision imaging detectors is expensive. High cost.

Therefore, there is an urgent need to design a wafer cleaning and inspection apparatus that can solve one or more of the above problems.

SUMMARY OF THE INVENTION

In order to solve one or more problems existing in the prior art, the present invention provides a wafer cleaning and testing device.

The technical solution adopted by the present invention to achieve the above object is: a wafer cleaning and testing device, comprising a worktable, a side plate and a pressing detector, wherein the pressing detector includes a detector housing, and the top of the detector housing is A detection hole is opened, a first chute is opened on one side of the detector shell, a sliding block is slidably connected in the first chute, one side of the sliding block is fixedly connected with a limit block, and the limit The side of the block away from the sliding block is fixedly connected with a sliding rod, the side of the sliding block away from the limit block is fixedly connected with a partition rod, and the other side of the detector shell is provided with a second sliding groove, and the first A limit slider is slidably connected in the second chute, and one end of the separating rod away from the slider is fixedly connected with the limit slider.

Preferably, a bottom plate is fixedly connected to the inner bottom of the detector shell, third chute is symmetrically opened on both sides of the detector shell, and the bottom of each third chute is symmetrically and fixedly connected with a plurality of A second spring, each of the third chute is slidably connected with a buffer block, the bottom of each of the buffer blocks is fixedly connected with a plurality of corresponding second springs, and the two buffer blocks are fixedly connected together There are pvc color fluorescent soft film.

Preferably, a side plate is fixedly connected to the top of the workbench, a swing groove is formed inside the side plate, a fixed plate is fixedly connected to the inner bottom of the swing groove, and one side of the fixed plate is connected by a rotating shaft. There are a third connecting rod and a first connecting rod, the side of the fixed plate close to the third connecting rod is rotatably connected with a rotating rod, and the end of the rotating rod away from the fixed plate penetrates the other end of the first connecting rod. The side of the first connecting rod away from the fixed plate is provided with a second connecting rod, and one end of the second connecting rod is rotatably connected with the rotating rod.

Preferably, the other end of the second connecting rod and the other end of the third connecting rod are both connected with a fourth connecting rod through a rotating shaft, and a connecting plate is fixedly connected to the end of the fourth connecting rod away from the side plate, so The side of the connecting plate away from the fourth connecting rod is fixedly connected with the bottom of the pressing detector.

Preferably, one end of the rotating rod away from the fixed plate is rotatably connected with a rotating plate through the side plate, and a rotating rod is fixedly connected with the side of the rotating plate away from the side plate.

Preferably, a first guide plate, a second guide plate, a third guide plate and a limiting groove plate are fixedly connected to the top of the workbench.

Preferably, a placement groove is formed inside the worktable, a first fixing block is fixedly connected to the inner bottom of the placing groove, a first spring is fixedly connected to the top of the first fixing block, and the first spring is The top is fixedly connected with a sliding plate, and the sliding plate is slidably connected with the placing slot.

Preferably, a fixed seat is fixedly connected to the top of the worktable, a rotating column is rotatably connected to the top of the fixed seat, and a clamping rod is fixedly connected to a side of the rotating column close to the placement slot.

Preferably, a casing is fixedly connected to the top of the workbench, a second fixing block is fixedly connected to the inner side wall of the casing, and a cylinder is fixedly connected to the other side of the second fixing block, and the telescopic rod of the cylinder is fixedly connected. A push rod is fixedly connected on the top.

The beneficial effects of the present invention are as follows: the present invention can place the wafer to be inspected through the placement slot, maintain the state to be inspected under the action of the first spring and the clamping rod, and drive the push rod to push out the wafer to be inspected when inspection is required. To the detection area, and then drive the press detector to detect by rotating the rotating rod. The press detector is composed of the pvc color fluorescent soft film and the bottom plate. When pressing down, the pvc color fluorescent soft film will contact the bottom plate, so that the pvc color fluorescent soft film will develop color. Obviously, the shape image of the pressing object is formed. If the surface of the wafer is uneven and has burrs, a corresponding light spot image will be formed on the image, which can quickly judge whether the surface of the wafer is flat, and by pushing the separator bar The pvc color fluorescent soft film is quickly separated from the bottom plate, which is convenient for the next detection. Compared with the existing lighting human eye observation, the present invention can make the pvc color fluorescent soft film and the bottom plate contact and form an image by pressing, which can be quickly and intuitively judged, and the cost is low. Can be reused.

Description of drawings

Fig. 1 is the three-dimensional structure schematic diagram of the present invention;

Fig. 2 is the side view internal structure schematic diagram of the present invention;

Fig. 3 is the side view structure schematic diagram of the present invention;

4 is a schematic diagram of the internal structure of the workbench of the present invention;

FIG. 5 is a schematic three-dimensional structure diagram of a press detector according to the present invention;

6 is a schematic top view of the internal structure of the pressing detector of the present invention;

FIG. 7 is a schematic side view of the internal structure of the press detector of the present invention.

Description of reference numerals: 1. Workbench; 2. Side plate; 3. Press detector; 4. Connecting plate; 5. Turntable; 6. Turning rod; 7. Chassis; 8. Fixed seat; 11, the first guide plate; 12, the second guide plate; 13, the third guide plate; 14, the limit slot plate; 15, the placement slot; 16, the fixing plate; 17, the first connecting rod; 18 , rotating rod; 19, second link; 20, third link; 21, fourth link; 22, swing groove; 23, first fixed block; 24, first spring; 25, slide plate; 26, first Two fixed blocks; 27, cylinder; 28, push rod; 30, the first chute; 31, limit block; 32, sliding rod; 33, pvc color fluorescent soft film; 34, sliding block; 35, dividing rod; 36 37, the second chute; 38, the bottom plate; 39, the third chute; 40, the buffer block; 41, the second spring; 42, the detector shell; 43, the detection hole.

In order to make the above objects, features and advantages of the present invention easier to understand, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

As shown in FIGS. 1-7 , the present invention provides a wafer cleaning and testing device, which includes a worktable 1, a side plate 2 and a pressing detector 3. The pressing detector 3 includes a detector housing 42, and the detecting The top of the detector housing 42 is provided with a detection hole 43 , and a side of the detector housing 42 is provided with a first chute 30 , and a sliding block 34 is slidably connected in the first chute 30 . The side is fixedly connected to a limit block 31 , a side of the limit block 31 away from the sliding block 34 is fixedly connected with a sliding rod 32 , and a side of the sliding block 34 away from the limit block 31 is fixedly connected with a separation rod 35 . The other side of the detector housing 42 is provided with a second chute 37 . The second chute 37 is slidably connected to the limit slider 36 , and one end of the separation rod 35 away from the slider 34 is connected to the limit slider 36 . Fixed connection, the separation rod 35 is conducive to separating the pvc color fluorescent soft film 33 from the bottom plate 38, which is convenient for the next detection.

Further, the bottom plate 38 is fixedly connected to the inner bottom of the detector shell 42 , and third chute 39 is symmetrically opened on both sides of the detector shell 42 , and the bottom of each third chute 39 is symmetrical. A plurality of second springs 41 are fixedly connected, each of the third chute 39 is slidably connected with a buffer block 40, and the bottom of each of the buffer blocks 40 is fixedly connected with a plurality of corresponding second springs 41. A pvc colored fluorescent soft film 33 is fixedly connected between each of the buffer blocks 40 . The cooperation of the buffer block 40 and the second spring 41 is conducive to the contact between the pvc colored fluorescent soft film 33 and the bottom plate 38 when the pressure detector 3 detects.

Further, a side plate 2 is fixedly connected to the top of the worktable 1 , a swing groove 22 is opened inside the side plate 2 , and a fixed plate 16 is fixedly connected to the inner bottom of the swing groove 22 , and the fixed plate 16 The third connecting rod 20 and the first connecting rod 17 are rotatably connected to one side of the fixed plate 16 through the rotating shaft. The side of the fixed plate 16 close to the third connecting rod 20 is rotatably connected with a rotating rod 18, and the rotating rod 18 is far away from the fixed plate. One end of 16 penetrates the other end of the first connecting rod 17 , the side of the first connecting rod 17 away from the fixing plate 16 is provided with a second connecting rod 19 , and one end of the second connecting rod 19 is rotatably connected with the rotating rod 18 , the swing groove 22 is conducive to swing.

Further, the other end of the second connecting rod 19 and the other end of the third connecting rod 20 are both connected with a fourth connecting rod 21 through a rotating shaft, and the end of the fourth connecting rod 21 away from the side plate 2 is fixedly connected There is a connecting plate 4, the side of the connecting plate 4 away from the fourth connecting rod 21 is fixedly connected with the bottom of the pressing detector 3, and the connecting plate 4 is conducive to connecting the pressing detector 3 to make it stable.

Further, one end of the rotating rod 18 away from the fixed plate 16 penetrates through the side plate 2 and is rotatably connected with a rotating plate 5, and the side of the rotating plate 5 away from the side plate 2 is fixedly connected with a rotating rod 6, and the rotating plate 5 and the rotating rod 6 are matched with a rotating rod 6. It is beneficial to rotate the turntable 5 by the rotating rod 6 to drive the rotating rod 18 to rotate, so that the pressing detector 3 can swing, so that it can perform pressing detection.

Further, a first guide plate 11 , a second guide plate 12 , a third guide plate 13 and a limit slot plate 14 are fixedly connected to the top of the worktable 1 . The circle moves steadily to the detection position.

Further, a placement slot 15 is opened inside the worktable 1, the inner bottom of the placement slot 15 is fixedly connected with a first fixing block 23, and the top of the first fixing block 23 is fixedly connected with a first spring 24, The top of the first spring 24 is fixedly connected with a slide plate 25, and the slide plate 25 is slidably connected with the placement slot 15. The cooperation of the first spring 24 and the slide plate 25 is conducive to moving the placed wafer upward, and a wafer is sent to the inspection. After the zone, the next one moves to the top to facilitate the next transfer.

Further, a fixed seat 8 is fixedly connected to the top of the workbench 1, a rotating column 9 is rotatably connected to the top of the fixed seat 8, and a clamping rod 10 is fixedly connected to the side of the rotating column 9 close to the placement slot 15, The clamping rod 10 is beneficial to limit the wafer, so that the wafer is in a position that is convenient for pushing.

Further, a case 7 is fixedly connected to the top of the workbench 1, a second fixing block 26 is fixedly connected to the inner side wall of the case 7, and a cylinder 27 is fixedly connected to the other side of the second fixing block 26, A push rod 28 is fixedly connected to the telescopic rod of the air cylinder 27 , and the push rod 28 is beneficial to push the wafer out and transfer it to the detection area.

Working principle: first place the wafer to be inspected in the placement slot 15, and maintain the state to be inspected under the action of the first spring 24 and the clamping rod 10. When inspection is required, the cylinder 27 drives the push rod 28 to push out the wafer to be inspected Send it to the detection area, and then drive the press detector 3 to perform detection by rotating the rotary rod 6. The press detector 3 is composed of the pvc color fluorescent soft film 33 and the bottom plate 38. When pressed down, the pvc color fluorescent soft film 33 will be in contact with the bottom plate 38. The color of the pvc color fluorescent film 33 is obvious, and the shape image of the pressed object can be formed, which can quickly judge whether the surface of the wafer is flat. After the inspection is completed, the pvc color fluorescent film 33 can be quickly separated from the bottom plate 38 by pushing the separation rod 35. , which is convenient for the next inspection. After inspecting one side, turn the wafer over to inspect the other side. If the image formed by the pvc color fluorescent film 33 and the bottom plate 38 has light spots, or blank traces, it means that the surface is uneven and has burrs. When the image is clear, it means that the surface of the wafer is flat and smooth. Compared with the existing illuminating human eye observation, the present invention can make the pvc color fluorescent film 33 contact the bottom plate 38 for imaging by pressing, which can be quickly and intuitively judged, the cost is low, and it can be repeated. use.

The above-mentioned embodiments only represent one or more embodiments of the present invention, and the descriptions thereof are specific and detailed, but should not be construed as a limitation on the scope of the invention patent. It should be pointed out that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can also be made, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims (9)

1. The utility model provides a wafer washs detection device, includes workstation (1), curb plate (2) and presses detector (3), its characterized in that: the pressing detector (3) comprises a detector shell (42), the top of the detector shell (42) is provided with a detection hole (43), a first sliding groove (30) is formed in one side of the detector shell (42), a sliding block (34) is connected in the first sliding groove (30) in a sliding manner, one side of the sliding block (34) is fixedly connected with a limiting block (31), one side of the limiting block (31) far away from the sliding block (34) is fixedly connected with a sliding rod (32), a separating rod (35) is fixedly connected on one side of the sliding block (34) far away from the limiting block (31), a second sliding chute (37) is arranged inside the other side of the detector shell (42), and a limiting sliding block (36) is connected in the second sliding groove (37) in a sliding manner, and one end, far away from the sliding block (34), of the separating rod (35) is fixedly connected with the limiting sliding block (36).

2. The wafer cleaning and detecting device according to claim 1, wherein: interior bottom fixedly connected with bottom plate (38) of detector shell (42), third spout (39), every have been seted up to the inside symmetry in both sides of detector shell (42) the equal symmetrical a plurality of second springs (41) of bottom of third spout (39), every equal sliding connection has buffer block (40), every in third spout (39 the bottom of buffer block (40) all with a plurality of second spring (41) fixed connection that correspond, two common fixedly connected with pvc colored fluorescence mantle (33) between buffer block (40).

3. The wafer cleaning and detecting device according to claim 1, wherein: top fixedly connected with curb plate (2) of workstation (1), swing groove (22) have been seted up to the inside of curb plate (2), interior bottom fixedly connected with fixed plate (16) of swing groove (22), one side of fixed plate (16) is rotated through the pivot and is connected with third connecting rod (20) and first connecting rod (17), one side of being close to third connecting rod (20) of fixed plate (16) is rotated and is connected with dwang (18), the one end that fixed plate (16) were kept away from in dwang (18) runs through the other end of first connecting rod (17), one side that fixed plate (16) were kept away from in first connecting rod (17) is equipped with second connecting rod (19), the one end and dwang (18) of second connecting rod (19) rotate and are connected.

4. The wafer cleaning and detecting device according to claim 3, wherein: the other end of second connecting rod (19) and the other end of third connecting rod (20) all rotate jointly through the pivot and are connected with fourth connecting rod (21), the one end fixedly connected with connecting plate (4) of curb plate (2) are kept away from in fourth connecting rod (21), one side that fourth connecting rod (21) were kept away from in connecting plate (4) with press the bottom fixed connection of detector (3).

5. The wafer cleaning and detecting device according to claim 3, wherein: the one end that fixed plate (16) were kept away from in dwang (18) runs through curb plate (2) and rotates and be connected with carousel (5), one side fixedly connected with bull stick (6) of curb plate (2) are kept away from in carousel (5).

6. The wafer cleaning and detecting device according to claim 3, wherein: the top of the workbench (1) is fixedly connected with a first guide plate (11), a second guide plate (12), a third guide plate (13) and a limiting groove plate (14).

7. The wafer cleaning and detecting device according to claim 6, wherein: the novel workbench is characterized in that a placing groove (15) is formed in the workbench (1), a first fixing block (23) is fixedly connected to the inner bottom of the placing groove (15), a first spring (24) is fixedly connected to the top of the first fixing block (23), a sliding plate (25) is fixedly connected to the top of the first spring (24), and the sliding plate (25) is in sliding connection with the placing groove (15).

8. The wafer cleaning and detecting device according to claim 7, wherein: the top fixedly connected with fixing base (8) of workstation (1), the top of fixing base (8) is rotated and is connected with and is rotated post (9), rotate one side fixedly connected with kelly (10) that post (9) is close to standing groove (15).

9. The wafer cleaning and detecting device according to claim 8, wherein: the top fixedly connected with quick-witted case (7) of workstation (1), fixedly connected with second fixed block (26) on the inside wall of machine case (7), opposite side fixedly connected with cylinder (27) of second fixed block (26), fixedly connected with push rod (28) on the telescopic link of cylinder (27).

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