CN114001812A - Optical fiber sensing probe and ultrasonic sensor based on Fabry-Perot interferometer - Google Patents
Optical fiber sensing probe and ultrasonic sensor based on Fabry-Perot interferometer Download PDFInfo
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- CN114001812A CN114001812A CN202111272733.7A CN202111272733A CN114001812A CN 114001812 A CN114001812 A CN 114001812A CN 202111272733 A CN202111272733 A CN 202111272733A CN 114001812 A CN114001812 A CN 114001812A
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- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The application belongs to the technical field of optical fiber sensing, and particularly relates to an optical fiber sensing probe and an ultrasonic sensor based on a Fabry-Perot interferometer. The optical fiber sensing probe comprises: a capillary, a single mode fiber with one end stretched into a micro fiber taper and a hemispherical cavity; the single-mode optical fiber is arranged in the capillary, and the hemispherical cavity is positioned at the cone tip of the micro optical fiber cone; the bottom surface of the hemispherical cavity is of a sheet structure made of silicon dioxide and uniform in thickness, and the thickness is related to the frequency of external ultrasonic waves induced by the bottom surface; the arc-shaped end surface of the micro optical fiber cone and the bottom surface of the hemispherical cavity form two reflecting surfaces of the Fabry-Perot interferometer. The probe takes light waves as a carrier for information transmission, accurately reflects the tiny change of a structure by the change of an optical phase, and can be suitable for the detection of ultrasonic waves in any environment; and the probe can be manufactured by only one single-mode optical fiber, is simple to process and is easy to be practically applied.
Description
Technical Field
The application belongs to the technical field of optical fiber sensing, and particularly relates to an optical fiber sensing probe and an ultrasonic sensor based on a Fabry-Perot interferometer.
Background
The optical fiber sensor has the advantages of small volume, high temperature and high pressure resistance and electromagnetic interference resistance, and gradually becomes a hot point of global research, and the developed diversified optical fiber sensor gradually replaces the conventional electromagnetic sensor and is widely applied to the fields of oil and gas field exploration and development, petroleum industry, military, national defense, aerospace, medicine and health and the like. The optical fiber Fabry-Perot interferometer is based on the principle of light interference, original light beams are reflected by a plurality of reflecting surfaces after entering the interferometer, interference phenomena can occur on the reflected light, interference signals contain the cavity length change of an optical fiber Fabry-Perot cavity, and the cavity length change information can be obtained by demodulating the interference signals. The manufacturing method and the structure of the fiber Fabry-Perot interferometer are various, and the fiber Fabry-Perot interferometer can be manufactured by different devices and materials so as to realize the modulation of optical signals or the measurement of other external parameters.
The traditional ultrasonic sensors are all manufactured by utilizing a piezoelectric effect, and electromagnetic ultrasonic sensors are easily subjected to electromagnetic interference, so that the measurement accuracy of the sensors is greatly influenced; and the electromagnetic ultrasonic sensor is extremely easy to be damaged in a high-temperature or humid extreme working environment, so that great loss is brought to actual production and life. The diaphragm type optical fiber Fabry-Perot ultrasonic sensor has complex manufacturing process and high cost, and cannot be produced in practice, so that the diaphragm type optical fiber Fabry-Perot ultrasonic sensor cannot be really applied to production and life.
Therefore, there is a need for an ultrasonic sensor that can perform ultrasonic detection in a strong electromagnetic, high temperature, or humid environment and has a simplified manufacturing process.
Disclosure of Invention
Technical problem to be solved
In view of the above-mentioned shortcomings and drawbacks of the prior art, the present application provides a fiber optic sensing probe and method based on a fabry-perot interferometer.
(II) technical scheme
In order to achieve the purpose, the technical scheme is as follows:
in a first aspect, an embodiment of the present application provides an optical fiber sensing probe based on a fabry-perot interferometer, including: a capillary, a single mode fiber with one end stretched into a micro fiber taper and a hemispherical cavity;
the single-mode optical fiber is arranged in the capillary, and the hemispherical cavity is positioned at the cone tip of the micro optical fiber cone;
the bottom surface of the hemispherical cavity is of a sheet structure made of silicon dioxide and uniform in thickness, and the thickness is related to the frequency of external ultrasonic waves induced by the bottom surface;
the arc-shaped end surface of the micro optical fiber cone and the bottom surface of the hemispherical cavity form two reflecting surfaces of the Fabry-Perot interferometer.
Optionally, the bottom surface of the hemispherical cavity has a thickness of 1-10 microns.
Optionally, the length of the cavity in the hemispherical cavity is 5-100 microns, and the internal gas is air.
Optionally, the single mode fiber comprises a fiber cladding and a fiber core, the fiber cladding has a diameter of 125 microns, and the fiber core has a diameter of 5 microns.
Optionally, the micro optical fiber cone and the hemispherical cavity are formed in one step by melting a single mode fiber, and the diameter of the cone tip of the micro optical fiber cone is 5-20 micrometers.
Optionally, the single-mode optical fiber is packaged at the axial center of the capillary tube by using a sealant, and a buffer solution is poured into the capillary tube.
In a second aspect, an embodiment of the present application provides an ultrasonic optical fiber sensor based on a fabry-perot interferometer, including: at least one optical fiber sensing probe according to any one of the first aspect, a light source module, an annular connector, a detector module, the light source module, the optical fiber sensing probe and the detector module being connected to a first port, a second port and a third port of the annular connector, respectively;
the light source module is used for emitting a laser signal with a single wavelength;
the annular connector is used for receiving the laser signal through the first port and sending the laser signal to the second port; receiving an interference signal sent by the optical fiber sensing probe through the second port, and sending the interference signal to the third port;
the optical fiber sensing probe is used for receiving the laser signal from the second port and sending an interference signal generated based on the laser signal to the second port; the optical fiber sensing probe senses vibration caused by external ultrasonic waves through the bottom surface of the hemispherical cavity;
the detector module is configured to receive the interference signal from the third port, and demodulate the interference signal by using a preset demodulation method to obtain a physical quantity to be detected, where the physical quantity to be detected is frequency and intensity of the ultrasonic wave.
Optionally, the detector module is a photodetector or a spectrometer.
Optionally, the wavelength of the single wavelength laser is 1550 nm.
Optionally, the detector wavelength range is 800-.
(III) advantageous effects
The beneficial effect of this application is: the application provides an optical fiber sensing probe and an ultrasonic sensor based on a Fabry-Perot interferometer. The optical fiber sensing probe comprises: a capillary, a single mode fiber with one end stretched into a micro fiber taper and a hemispherical cavity; the single-mode optical fiber is arranged in the capillary, and the hemispherical cavity is positioned at the cone tip of the micro optical fiber cone; the bottom surface of the hemispherical cavity is of a sheet structure made of silicon dioxide and uniform in thickness, and the thickness is related to the frequency of external ultrasonic waves induced by the bottom surface; the arc-shaped end surface of the micro optical fiber cone and the bottom surface of the hemispherical cavity form two reflecting surfaces of the Fabry-Perot interferometer. The probe takes light waves as a carrier for information transmission, accurately reflects the tiny change of a structure by the change of an optical phase, and can be suitable for the detection of ultrasonic waves in any environment; and the probe can be manufactured by only one single-mode optical fiber, is simple to process and is easy to be practically applied.
Drawings
The application is described with the aid of the following figures:
fig. 1 is a schematic structural diagram of a fiber optic sensing probe based on a fabry-perot interferometer according to an embodiment of the present application;
FIG. 2 is an enlarged view of a portion of area A of FIG. 1;
fig. 3 is a schematic structural diagram of an ultrasonic fiber sensor based on a fabry-perot interferometer according to another embodiment of the present disclosure.
Reference numerals:
1. a light source module; 2. an annular connector; 3. an optical fiber sensing probe; 4. a detector module;
31. a capillary tube; 32. single mode fiber, 321, fiber cladding; 322. a micro fiber taper; 3221. an arc-shaped end face; 323. a hemispherical cavity; 324. a bottom surface of the cavity.
Detailed Description
For the purpose of better explaining the present invention and to facilitate understanding, the present invention will be described in detail by way of specific embodiments with reference to the accompanying drawings. It is to be understood that the following specific examples are illustrative of the invention only and are not to be construed as limiting the invention. In addition, it should be noted that, in the case of no conflict, the embodiments and features in the embodiments in the present application may be combined with each other; for convenience of description, only portions related to the invention are shown in the drawings.
Fig. 1 is a schematic structural diagram of a fabry-perot interferometer-based optical fiber sensing probe according to an embodiment of the present application, and fig. 2 is a partially enlarged view of a region a in fig. 1. As shown in fig. 1 and 2, the optical fiber sensing probe based on the fabry-perot interferometer of the present embodiment includes: a capillary 31, a single mode fiber 32 with one end stretched into a micro fiber taper 322 and a hemispherical cavity 323;
the single-mode fiber 32 is arranged in the capillary 31, and the hemispherical cavity 323 is positioned at the cone tip of the micro-fiber cone 322;
the bottom surface 324 of the hemispherical cavity 323 is a sheet-shaped structure made of silicon dioxide and having uniform thickness, and the thickness is related to the frequency of external ultrasonic waves induced by the bottom surface;
the curved end surface 3221 of the micro fiber taper 322 and the bottom surface 324 of the hemispherical cavity 323 constitute two reflecting surfaces of the fabry-perot interferometer.
The optical fiber sensing probe based on the Fabry-Perot interferometer of the embodiment takes light waves as a carrier for information transmission, accurately reflects the tiny change of a structure by the change of an optical phase, and can be suitable for the detection of ultrasonic waves in any environment; and the probe can be manufactured by only one single-mode optical fiber, is simple to process and is easy to be practically applied. .
For a better understanding of the present invention, the following description will proceed with reference being made to the accompanying drawings.
In this embodiment, the single-mode fiber 32 is sealed in the axial position of the capillary 31 by a sealant, and in order to avoid the influence of the structural vibration on the sensing performance, a buffer solution is filled in the capillary 31.
Specifically, the capillary tube is made of silicon dioxide, is cylindrical in shape, and has a diameter of 300 to 500 micrometers and a length of 20mm to 50 mm. The sealant for fixing the optical fiber is epoxy resin AB adhesive, the preparation method is simple, and the optical fiber sensing probe is cylindrical.
In this embodiment, the single mode fiber 32 includes a fiber cladding 321 and a core, the fiber cladding diameter is 125 microns, and the core diameter is 5 microns. The material of the optical fiber cladding 321 may be polyimide
In this embodiment, the bottom surface 324 of the hemispherical cavity 323 is a thin wall made of silicon dioxide and having a uniform thickness, the thickness of the thin wall of the silicon dioxide ranges from 1 to 10 micrometers, and the end surface is a plane.
The thin wall of the bottom surface can vibrate more uniformly by processing the silicon dioxide into the plane, so that the measured frequency of the ultrasonic signal is more accurate.
In this embodiment, the microfiber cone 322 and the hemispherical cavity 323 are formed by melting the single mode fiber 32 in one step, and the diameter of the cone tip of the microfiber cone 322 is 5 to 20 μm. Specifically, the microfiber cone 322 is made by high temperature melting and drawing a single mode fiber with a cladding diameter of 125 microns and a core diameter of 5 microns, and finally forms a cone region on the single mode fiber, wherein the tip of the cone region is used for making the hemispherical cavity 323, and the diameter of the tip of the cone region is 5-20 microns. The incident light signal enters the cone area tip area to excite the high-order mode light signal, so that the Fabry-Perot interference spectrum in the hemispherical cavity 323 is enriched, and the measurement efficiency of ultrasonic waves is improved;
in this embodiment, the length of the hemispherical cavity is 5-100 microns, and the internal gas is air. The arc-shaped end face 3221 and the bottom surface 324 of the cavity form a Fabry-Perot interference cavity, and the Fabry-Perot interferometer is formed in the optical fiber at one time and does not comprise a separate structural component, so that the Fabry-Perot interference cavity is stable and compact in structure and stable and reliable in corresponding interference spectrum;
according to the optical fiber sensing probe based on the Fabry-Perot interferometer, a Fabry-Perot interference cavity is constructed by using a unique hemispherical air cavity structure, vibration caused by external ultrasonic waves is sensed by using a silicon dioxide thin-wall layer, and accurate measurement of the ultrasonic waves is realized through an optical wave interference technology. In addition, the unique micro-nano optical fiber cone structure and the micro Fabry-Perot interference cavity enable interference signals to be easily demodulated.
Example two
Fig. 3 is a schematic structural diagram of an ultrasonic fiber sensor based on a fabry-perot interferometer according to another embodiment of the present disclosure, and as shown in fig. 3, the ultrasonic fiber sensor includes: at least one optical fiber sensing probe 3, a light source module 1, an annular connector 2 and a detector module 4 as described in any of the above embodiments, wherein the light source module 1, the optical fiber sensing probe 3 and the detector module 4 are respectively connected with a first port, a second port and a third port of the annular connector 2;
the light source module 1 is used for emitting a laser signal with a single wavelength;
the annular connector 2 is used for receiving the laser signal through the first port and sending the laser signal to the second port; receiving an interference signal sent by the optical fiber sensing probe through the second port, and sending the interference signal to the third port;
the optical fiber sensing probe 3 is used for receiving the laser signal from the second port and sending an interference signal generated based on the laser signal to the second port; the optical fiber sensing probe senses vibration caused by external ultrasonic waves through the bottom surface of the hemispherical cavity;
and the detector module 4 is configured to receive the interference signal from the third port, and demodulate the interference signal by using a preset demodulation method to obtain a physical quantity to be detected, where the physical quantity to be detected is frequency and intensity of the ultrasonic wave.
According to the ultrasonic optical fiber sensor based on the Fabry-Perot interferometer, light waves are used as carriers of information transmission, the tiny change of the structure is accurately reflected through the change of optical phases, the structure is compact, and due to the fact that the adopted probe is resistant to electromagnetic interference and chemical corrosion, the sensor can be suitable for detecting ultrasonic waves in any environment, the problem of ultrasonic wave detection in strong electromagnetic and high-temperature humid environments is solved, and the process is simplified.
For better understanding of the present invention, each module in the present embodiment is explained below.
In this embodiment, the optical fiber sensing probe 3 includes a capillary, an optical fiber cladding, a micro-fiber taper, an air cavity, and a silica thin wall.
In this embodiment, the wavelength of the single-wavelength laser is 1550nm, and correspondingly, the wavelength range of the detector is 800-1700 nm.
In this embodiment, the detector module may be a photodetector or a spectrometer.
The following explains an embodiment of the present invention with respect to an ultrasonic measurement process as an example. When an ultrasonic wave optical fiber sensor based on the fabry-perot interferometer proposed in this embodiment is used to measure an ultrasonic wave, a single-wavelength optical signal emitted from the light source module 1 enters the optical fiber sensing probe 3 through the annular connector 2. In the optical fiber sensing probe 3, a part of light is reflected by the interface between the air cavity and the fiber core and enters the micro optical fiber cone; the other part of light directly enters the air cavity, is reflected by the inner surface of the silicon dioxide thin wall after reaching the silicon dioxide thin wall, returns to enter the micro optical fiber cone according to the original path, the returned two paths of light signals are interfered, and the generated interference signals are emitted from the interferometer structure and then enter the detector module 4 through the annular connector 2. Optical phase change information is extracted from the interference light signal through the detector module 4, so that the length change of the Fabry-Perot interference cavity is obtained, and finally frequency and intensity information of the ultrasonic wave is converted.
In the measuring process, the external to-be-measured changes the characteristic parameters of the sensing probe 3, so that the characteristics of the optical signal are influenced, and the detector module 4 demodulates the received interference signal by using various demodulation methods to obtain the frequency and intensity information of the ultrasonic wave. Specifically, in the present embodiment, when an ultrasonic signal acts on the thin silicon dioxide wall, the planar end surface can generate a simple harmonic vibration signal, so that the length of the Fabry-Perot interference cavity changes, and the amplitude of the vibration signal corresponds to the frequency range of the detected ultrasonic wave.
It should be noted that in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The invention may be implemented by means of hardware comprising several distinct elements, and by means of a suitably programmed computer. The use of the terms first, second, third and the like are for convenience only and do not denote any order. These words are to be understood as part of the name of the component.
Furthermore, it should be noted that in the description of the present specification, the description of the term "one embodiment", "some embodiments", "examples", "specific examples" or "some examples", etc., means that a specific feature, structure, material or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, the claims should be construed to include preferred embodiments and all changes and modifications that fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention should also include such modifications and variations.
Claims (10)
1. An optical fiber sensing probe based on a fabry-perot interferometer, comprising: a capillary, a single mode fiber with one end stretched into a micro fiber taper and a hemispherical cavity;
the single-mode optical fiber is arranged in the capillary, and the hemispherical cavity is positioned at the cone tip of the micro optical fiber cone;
the bottom surface of the hemispherical cavity is of a sheet structure made of silicon dioxide and uniform in thickness, and the thickness is related to the frequency of external ultrasonic waves induced by the bottom surface;
the arc-shaped end surface of the micro optical fiber cone and the bottom surface of the hemispherical cavity form two reflecting surfaces of the Fabry-Perot interferometer.
2. The fabry-perot interferometer based fiber optic sensing probe of claim 1, wherein the bottom surface of the hemispherical cavity is 1-10 microns thick.
3. The fabry-perot interferometer based fiber optic sensing probe of claim 2, wherein the length of the hemispherical cavity is 5-100 microns and the internal gas is air.
4. The fabry-perot interferometer based fiber sensing probe of claim 1, wherein the single mode fiber comprises a fiber cladding and a core, the fiber cladding having a diameter of 125 microns and the core having a diameter of 5 microns.
5. The fabry-perot interferometer based fiber optic sensing probe of claim 4, wherein the micro fiber taper and the hemispherical cavity are fused and formed in one piece from a single mode fiber, the micro fiber taper having a taper tip diameter of 5-20 microns.
6. The fabry-perot interferometer based fiber optic sensing probe of claim 1, wherein the single mode fiber is encapsulated in the axial position of the capillary tube with a sealant, and a buffer is poured into the capillary tube.
7. An ultrasonic fiber optic sensor based on a fabry-perot interferometer, comprising: at least one fiber optic sensing probe according to any of claims 1-6, a light source module, an annular connector, a detector module, the light source module, the fiber optic sensing probe, and the detector module being connected to a first port, a second port, and a third port, respectively, of the annular connector;
the light source module is used for emitting a laser signal with a single wavelength;
the annular connector is used for receiving the laser signal through the first port and sending the laser signal to the second port; receiving an interference signal sent by the optical fiber sensing probe through the second port, and sending the interference signal to the third port;
the optical fiber sensing probe is used for receiving the laser signal from the second port and sending an interference signal generated based on the laser signal to the second port; the optical fiber sensing probe senses vibration caused by external ultrasonic waves through the bottom surface of the hemispherical cavity;
the detector module is configured to receive the interference signal from the third port, and demodulate the interference signal by using a preset demodulation method to obtain a physical quantity to be detected, where the physical quantity to be detected is frequency and intensity of the ultrasonic wave.
8. The fabry-perot interferometer based ultrasonic fiber optic sensor of claim 7, wherein the detector module is a photodetector or a spectrometer.
9. The fabry-perot interferometer based ultrasonic fiber optic sensor of claim 7, wherein the single wavelength laser has a wavelength of 1550 nm.
10. The fabry-perot interferometer based ultrasonic fiber optic sensor of claim 7, wherein the detector wavelength range is 800-1700 nm.
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Cited By (1)
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