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CN103774201A - Hanger and electroplating system with same - Google Patents

Hanger and electroplating system with same Download PDF

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Publication number
CN103774201A
CN103774201A CN201310009275.7A CN201310009275A CN103774201A CN 103774201 A CN103774201 A CN 103774201A CN 201310009275 A CN201310009275 A CN 201310009275A CN 103774201 A CN103774201 A CN 103774201A
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Prior art keywords
hanger
retainer
substrate
holder
edge
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CN201310009275.7A
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Chinese (zh)
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许贵滨
郑光祖
彭俊达
赵汝谦
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Process Automation International Ltd
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Process Automation International Ltd
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Publication of CN103774201A publication Critical patent/CN103774201A/en
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06Suspending or supporting devices for articles to be coated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

本发明公开了一种用于可释放地保持印刷电路板(PCB)(28)以便电镀的吊架(10),其中PCB(28)具有顶边缘(30)、底边缘(32)和两个侧边缘,该两个侧边缘彼此相对并且垂直于顶边缘(30),该吊架(10)包括许多用于可释放地保持PCB(28)的顶边缘(30)的导电顶夹具(22),以及用于可释放地保持PCB(28)的侧边缘的电绝缘的侧夹具(24、26)。

Disclosed is a hanger (10) for releasably holding a printed circuit board (PCB) (28) for plating, wherein the PCB (28) has a top edge (30), a bottom edge (32) and two side edges opposite each other and perpendicular to the top edge (30), the hanger (10) including a plurality of conductive top clamps (22) for releasably retaining the top edge (30) of the PCB (28) , and electrically insulating side clamps (24, 26) for releasably retaining side edges of the PCB (28).

Description

吊架和具有这种吊架的电镀系统Hanger and electroplating system having such a hanger

技术领域technical field

本发明涉及一种吊架,特别是一种用于保持基板以便电镀的吊架、具有这种吊架的电镀系统和一种将基板装载到这种吊架和从这种吊架卸载所述基板的方法。The present invention relates to a hanger, in particular a hanger for holding substrates for electroplating, an electroplating system having such a hanger and a method for loading and unloading substrates to and from such a hanger. substrate method.

背景技术Background technique

在常规的竖直连续电镀系统中,要被电镀的基板(例如印刷电路板[PCB])以PCB的主表面朝侧向的取向由吊架承载。PCB的顶边缘以可释放的方式由吊架的许多夹具从上方夹持。除了将PCB接合到吊架外,该夹具也是导电的,以便形成用于电镀PCB的电路的一部分。In conventional vertical in-line plating systems, the substrate to be plated, such as a printed circuit board [PCB], is carried by a hanger with the major surface of the PCB facing sideways. The top edge of the PCB is releasably gripped from above by the hanger's many clamps. In addition to bonding the PCB to the hanger, the jig is also conductive so as to form part of the circuit used to plate the PCB.

已经设计各种布置来改善在电镀机中的处理和穿过电镀机期间的PCB的稳定性。在一个这种的常规布置中,导电夹具也被设置用于以可释放的方式夹持PCB的下边缘。然而,难以调节这种布置以适合不同尺寸的PCB。此外,这种布置的电镀分布性能是差的。Various arrangements have been devised to improve the stability of the PCB during handling in and through the plating machine. In one such conventional arrangement, conductive clamps are also provided for releasably clamping the lower edge of the PCB. However, it is difficult to adjust this arrangement to suit PCBs of different sizes. Furthermore, the plating distribution performance of this arrangement is poor.

另一已知布置是提供导电夹具以便以可释放地方式夹持PCB的一对竖直侧边缘。这种布置是昂贵的,并且也难以调节这种布置以适合不同尺寸的PCB。此外,这种布置需要手动操作。此外,存在大的拖延率(drag out rate)。Another known arrangement is to provide conductive clips to releasably grip a pair of vertical side edges of the PCB. This arrangement is expensive and also difficult to adapt to different sized PCBs. Furthermore, this arrangement requires manual operation. Furthermore, there is a large drag out rate.

假如,如同在一些常规布置中,在竖直连续的电镀系统中使用框架,则将产生很强的边缘效应,使更多金属(例如铜)沿PCB的竖直边缘被镀到PCB的竖直边缘上。为了减轻这种问题,由电绝缘材料制成的竖直边缘电镀屏蔽件连接在框架上以控制沿PCB的竖直边缘电镀到PCB的竖直边缘上的铜的厚度。现有的竖直边缘电镀屏蔽件必须设置有许多孔以优化电镀在PCB的竖直边缘上的铜的厚度。在竖直边缘电镀屏蔽上没有这种孔的情况下,太薄的一层铜将被电镀在PCB的竖直边缘上。然而,具有竖直边缘电镀屏蔽的常规系统仍然遭受大的拖延(即电镀溶液的大量消耗)的问题,并且由于不可能调节屏蔽件上的孔图案以迎合不同电镀要求,以致难以微调电镀分布性能。If, as in some conventional arrangements, frames are used in a vertically continuous plating system, there will be a strong edge effect, causing more metal (such as copper) to be plated along the vertical edges of the PCB to the vertical edges of the PCB. on the edge. To alleviate this problem, vertical edge plating shields made of electrically insulating material are attached to the frame to control the thickness of copper plated onto the vertical edges of the PCB along the vertical edges. Existing vertical edge plating shields must be provided with many holes to optimize the thickness of copper plated on the vertical edges of the PCB. In the absence of such holes on the vertical edge plating shield, too thin a layer of copper will be plated on the vertical edges of the PCB. However, conventional systems with vertical edge plating shields still suffer from large delays (i.e. high consumption of plating solution) and difficulty in fine-tuning the plating distribution performance due to the impossibility of adjusting the hole pattern on the shield to cater for different plating requirements .

发明内容Contents of the invention

因此,本发明的目的是提供一种吊架、具有这种吊架的电镀系统和将基板装载到这种吊架和从这种吊架卸载所述基板的方法,从而减轻其中至少一个前述缺点或至少为行业和公共提供有用的替代。It is therefore an object of the present invention to provide a hanger, an electroplating system having such a hanger and a method of loading and unloading substrates to and from such a hanger such that at least one of the aforementioned disadvantages is alleviated Or at least provide useful alternatives for industry and the public.

根据本发明的第一方面,提供一种用于可释放地保持基板以便电镀的吊架,所述基板具有第一边缘、第二边缘和第三边缘,其中所述第二边缘和第三边缘彼此相对,所述吊架包括用于可释放地保持所述基板的所述第一边缘的至少一个第一保持器、用于可释放地保持所述基板的所述第二边缘的至少一个第二保持器和用于可释放地保持所述基板的所述第三边缘的至少一个第三保持器,其中所述第一保持器是导电的,并且其中所述第二保持器和所述第三保持器是电绝缘的。According to a first aspect of the present invention there is provided a hanger for releasably holding a substrate for electroplating, the substrate having a first edge, a second edge and a third edge, wherein the second edge and the third edge Opposite each other, the hanger includes at least one first retainer for releasably retaining the first edge of the substrate, at least one first retainer for releasably retaining the second edge of the substrate. Two holders and at least one third holder for releasably holding said third edge of said substrate, wherein said first holder is electrically conductive, and wherein said second holder and said first The three retainers are electrically insulated.

根据本发明的第二方面,提供一种电镀系统,该电镀系统包括用于可释放地保持基板以便电镀的至少一个吊架,所述基板具有第一边缘、第二边缘和第三边缘,其中所述第二边缘和第三边缘彼此相对,所述吊架包括用于可释放地保持所述基板的所述第一边缘的至少一个第一保持器、用于可释放地保持所述基板的所述第二边缘的至少一个第二保持器和用于可释放地保持所述基板的所述第三边缘的至少一个第三保持器,其中所述第一保持器是导电的,并且其中所述第二保持器和所述第三保持器是电绝缘的。According to a second aspect of the present invention there is provided an electroplating system comprising at least one hanger for releasably holding a substrate for electroplating, said substrate having a first edge, a second edge and a third edge, wherein The second and third edges are opposite each other, the hanger includes at least one first retainer for releasably retaining the first edge of the substrate, a releasable retainer for releasably retaining the substrate At least one second holder of the second edge and at least one third holder for releasably holding the third edge of the substrate, wherein the first holder is electrically conductive, and wherein the The second holder and the third holder are electrically isolated.

根据本发明的第三方面,提供一种将基板装载到吊架和从所述吊架卸载所述基板的方法,所述基板具有顶边缘和两个相对的侧边缘,并且所述吊架至少具有第一保持器、第二保持器和第三保持器,所述方法包括:(a)将所述基板以所述顶边缘基本上水平的取向基本上布置在所述吊架的正下方,(b)将所述基板基本上竖直向上地移动到所述吊架中,(c)所述吊架的所述第一保持器可释放地保持所述基板的所述顶边缘,(d)所述吊架的所述第二保持器和第三保持器的每一个可释放地保持所述基板的所述侧边缘的相应的一个,和(e)从所述吊架卸载所述基板。According to a third aspect of the present invention there is provided a method of loading and unloading a substrate from a hanger, the base plate having a top edge and two opposing side edges, and the hanger having at least Having a first holder, a second holder and a third holder, the method comprising: (a) disposing the base plate substantially directly below the hanger in a substantially horizontal orientation of the top edge, (b) moving the base plate substantially vertically upward into the hanger, (c) the first retainer of the hanger releasably retains the top edge of the base plate, (d ) each of said second and third retainers of said hanger releasably retains a respective one of said side edges of said substrate, and (e) unloading said substrate from said hanger .

附图说明Description of drawings

现在将参考附图且仅通过例子的方式描述根据本发明的实施例的一种吊架、具有这种吊架的电镀系统和将基板装载到这种吊架和从这种吊架卸载所述基板的方法,其中:A hanger, an electroplating system having the hanger, and loading and unloading of substrates to and from the hanger according to embodiments of the present invention will now be described by way of example only with reference to the accompanying drawings. The method of the substrate, wherein:

图1是根据本发明的实施例的吊架的顶前透视图;Figure 1 is a top front perspective view of a hanger according to an embodiment of the present invention;

图2是图1的吊架的底前透视图;Figure 2 is a bottom front perspective view of the hanger of Figure 1;

图3是图1的吊架的正视图;Fig. 3 is the front view of the hanger of Fig. 1;

图4是图1的吊架的侧视图;Figure 4 is a side view of the hanger of Figure 1;

图5是图1的保持印刷电路板(PCB)的吊架的前视透视图;5 is a front perspective view of the hanger holding a printed circuit board (PCB) of FIG. 1;

图6是图1的吊架的部分侧视图,其中顶部保持器被示出为处于关闭状态;Figure 6 is a partial side view of the hanger of Figure 1 with the top retainer shown in a closed position;

图7是图6的吊架的部分透视图,其中顶部保持器保持PCB的顶边缘;Figure 7 is a partial perspective view of the hanger of Figure 6, with the top retainer holding the top edge of the PCB;

图8是图1的吊架的部分侧视图,其中顶部保持器被示出为处于打开状态;Figure 8 is a partial side view of the hanger of Figure 1 with the top retainer shown in an open position;

图9是图8的吊架的部分透视图,其中顶部保持器脱离与PCB的顶边缘的接合;9 is a partial perspective view of the hanger of FIG. 8 with the top retainer out of engagement with the top edge of the PCB;

图10到图14示出包括图1的吊架的电镀系统的操作步骤,通过该操作步骤,PCB被装载到吊架;10 to 14 illustrate the operation steps of the electroplating system comprising the hanger of FIG. 1, by which the PCB is loaded to the hanger;

图15示出本发明的电镀系统的PCB装载/卸载模块;Figure 15 shows the PCB loading/unloading module of the electroplating system of the present invention;

图16到图20示出通过图15的PCB装载/卸载模块将PCB装载到吊架和从吊架卸载PCB的步骤;并且16 to 20 illustrate the steps of loading and unloading a PCB to and from a hanger by the PCB loading/unloading module of FIG. 15; and

图21是图1的吊架的放大视图。FIG. 21 is an enlarged view of the hanger of FIG. 1 .

具体实施方式Detailed ways

根据本发明的实施例的吊架图示于图1到图4中,并且总体上被标示为10。吊架10具有以基本上矩形框架12的形式的本体,该本体由连接在一起的四个细长的基本上矩形的杆(即顶杆14、相对的底杆16和两个相对的侧杆18、20)形成。当吊架10安装在电镀机中时,顶杆14和底杆16是水平的,并且两个侧杆18、20是竖直的。顶杆14可由导电材料制成,而底杆16和两个侧杆18、20均由电绝缘材料制成。A hanger according to an embodiment of the invention is shown diagrammatically in FIGS. 1-4 and is generally designated 10 . The hanger 10 has a body in the form of a substantially rectangular frame 12 consisting of four elongated substantially rectangular rods (i.e. a top rod 14, an opposing bottom rod 16 and two opposing side rods) connected together. 18, 20) formed. When the hanger 10 is installed in the plating machine, the top bar 14 and the bottom bar 16 are horizontal and the two side bars 18, 20 are vertical. The top bar 14 may be made of an electrically conductive material, while the bottom bar 16 and the two side bars 18, 20 are made of an electrically insulating material.

与顶杆14接合并且从顶杆14下垂的是四个顶夹具22。这些顶夹具22是导电的(例如,由导电材料制成)并且形成用于电镀基板(诸如,印刷电路板[PCB])的电路的一部分,该基板由顶夹具22保持在借助吊架10安装的本发明的电镀系统中。Engaged with and depending from the top rod 14 are four top clamps 22 . These top fixtures 22 are electrically conductive (eg, made of a conductive material) and form part of an electrical circuit for plating a substrate, such as a printed circuit board [PCB], which is held by the top fixtures 22 while mounted by means of the hanger 10. In the electroplating system of the present invention.

侧杆18、20的每一个接合有各自的细长的电绝缘的侧夹具24、26。侧夹具24、26可由电绝缘材料制成。当侧夹具24处于图1到图4中示出的状态(其中侧夹具24的面向侧杆18的主表面与侧杆18接触)时,侧夹具24被认为处于关闭状态。类似地,当侧夹具26处于图1到图4中示出的状态(其中侧夹具26的面向侧杆20的主表面与侧杆20接触)时,侧夹具26被认为处于关闭状态。Each of the side bars 18 , 20 engages a respective elongate electrically insulating side clamp 24 , 26 . The side clamps 24, 26 may be made of an electrically insulating material. The side clamp 24 is considered to be in the closed state when the side clamp 24 is in the state shown in FIGS. 1 to 4 in which a major surface of the side clamp 24 facing the side bar 18 is in contact with the side bar 18 . Similarly, the side clamp 26 is considered to be in the closed position when the side clamp 26 is in the state shown in FIGS. 1-4 in which the major surface of the side clamp 26 facing the side bar 20 is in contact with the side bar 20 .

侧夹具24、26能够相对于相应的侧杆18、20平移运动。特别地,侧夹具24、26能够从图1到图4中示出的位置移动远离相应的侧杆18、20至侧夹具24、26与相应的侧杆18、20间隔开且平行于相应的侧杆18、20的位置。当侧夹具24、26与相应的侧杆18、20这样间隔开时,侧夹具24、26被认为处于它们的相应的打开状态。夹具24、26被弹簧偏压向它们的相应的关闭状态。The side clamps 24 , 26 are movable in translation relative to the respective side bars 18 , 20 . In particular, the side clamps 24, 26 are movable away from the respective side bars 18, 20 from the positions shown in FIGS. The position of the side bars 18,20. When the side clamps 24, 26 are so spaced apart from the respective side bars 18, 20, the side clamps 24, 26 are considered to be in their respective open states. The clamps 24, 26 are spring biased towards their respective closed positions.

图5示出了通过顶夹具22和侧夹具24、26以可释放的方式由吊架10保持的PCB28(将被电镀的基板),该顶夹具22和侧夹具24、26都处于它们的关闭状态。PCB28具有四个边缘,即顶边缘30、相对的底边缘32和两个相对的侧边缘。顶边缘30和底边缘32垂直于两个侧边缘。当PCB28以可释放的方式由吊架10保持时,顶边缘30以可释放的方式由顶夹具22保持,并且侧边缘以可释放的方式由相应的侧夹具24、26保持。当保持PCB28的吊架10安装在本发明的电镀系统中时,PCB28的顶边缘30和底边缘32是水平的而PCB28的两个相对的侧边缘是竖直的。Figure 5 shows a PCB 28 (substrate to be plated) releasably held by the hanger 10 by the top clamp 22 and side clamps 24, 26, both in their closed state. PCB 28 has four edges, namely a top edge 30, an opposing bottom edge 32, and two opposing side edges. The top edge 30 and the bottom edge 32 are perpendicular to the two side edges. When the PCB 28 is releasably retained by the hanger 10 , the top edge 30 is releasably retained by the top clamp 22 and the side edges are releasably retained by the respective side clamps 24 , 26 . When the hanger 10 holding the PCB 28 is installed in the electroplating system of the present invention, the top edge 30 and the bottom edge 32 of the PCB 28 are horizontal and the two opposing side edges of the PCB 28 are vertical.

吊架10的顶夹具22在图6和7中被示出为通过夹持PCB28的顶边缘30以可释放的方式保持PCB28。能够看到,每一个顶夹具22具有两个夹持指件34、36,该两个夹持指件34、36由弹簧38连接,并且能够绕销40相对彼此枢转。通过这种布置,每一个顶夹具22能够在关闭状态和打开状态之间运动,在关闭状态中,夹持指件34的下末端34a和夹持装置件36的下末端36a彼此接触,在打开状态中,夹持指件34、36的下末端34a,36a彼此间隔开。每一个顶夹具22被相应的弹簧38偏压到关闭状态。The top clamp 22 of the hanger 10 is shown in FIGS. 6 and 7 to releasably hold the PCB 28 by clamping the top edge 30 of the PCB 28 . It can be seen that each top clamp 22 has two clamping fingers 34 , 36 connected by a spring 38 and pivotable relative to each other about a pin 40 . With this arrangement, each top clamp 22 is movable between a closed position in which the lower ends 34a of the clamping fingers 34 and a lower end 36a of the clamping device member 36 contact each other, and an open position in which the lower ends 34a of the clamping fingers 34 contact each other, and an open position in which In this state, the lower ends 34a, 36a of the clamping fingers 34, 36 are spaced apart from each other. Each top clamp 22 is biased by a corresponding spring 38 to the closed condition.

吊架10安装到其上的电镀系统设置有第一气动或液压缸42、第二气动或液压缸44和第三气动或液压缸46。第一缸42能够从图6中示出的位置向着吊架10的顶夹具22(沿图8中箭头A指示的方向)移动并且移动到图8中示出的位置,以作用在夹持指件36上从而使夹持指件36相对于相应的夹持指件34枢转,以便将顶夹具22从关闭状态移动到打开状态,如图9中所示。当顶夹具22处于打开状态时,PCB28能够从顶夹具22移开或者插在顶夹具22的夹持指件34、36之间以便以可释放的方式由顶夹具22保持。The electroplating system to which the hanger 10 is mounted is provided with a first pneumatic or hydraulic cylinder 42 , a second pneumatic or hydraulic cylinder 44 and a third pneumatic or hydraulic cylinder 46 . The first cylinder 42 can move from the position shown in FIG. 6 toward the top clamp 22 of the hanger 10 (in the direction indicated by arrow A in FIG. 8 ) and to the position shown in FIG. 8 to act on the clamping fingers. 36 so that the clamping fingers 36 pivot relative to the corresponding clamping fingers 34 to move the top clamp 22 from the closed position to the open position, as shown in FIG. 9 . When the top clamp 22 is in the open state, the PCB 28 can be removed from the top clamp 22 or inserted between the clamping fingers 34 , 36 of the top clamp 22 to be releasably retained by the top clamp 22 .

第二缸44能够从图6中示出的位置向着吊架10(沿图8中的箭头B指示的方向)移动并且移动到图8中示出的位置,其中由第二缸44支撑并且能够与第二缸44同时移动的板48接触且作用在框架12的侧杆18、20上但没有作用到侧夹具24、26上。这个板48用于在下面要讨论的侧夹具24、26的移动期间维持框架12静止。The second cylinder 44 is movable from the position shown in FIG. 6 toward the hanger 10 (in the direction indicated by arrow B in FIG. 8 ) and to the position shown in FIG. 8 , where it is supported by the second cylinder 44 and can The plate 48 moving simultaneously with the second cylinder 44 contacts and acts on the side bars 18 , 20 of the frame 12 but not on the side clamps 24 , 26 . This plate 48 is used to hold the frame 12 stationary during movement of the side clamps 24, 26 to be discussed below.

第三缸46能够从图6中示出的位置向着吊架10(沿图8中的箭头C指示的方向)移动并且移动到图8中示出的位置,其中由第三缸46支撑并且能够与第三缸46同时移动的板49接触且作用到固定在侧夹具24、26中的许多突起50上。The third cylinder 46 can move from the position shown in FIG. 6 toward the hanger 10 (in the direction indicated by arrow C in FIG. 8 ) and to the position shown in FIG. 8 , where it is supported by the third cylinder 46 and can A plate 49 moving simultaneously with the third cylinder 46 contacts and acts on a number of protrusions 50 fixed in the side clamps 24 , 26 .

通过上述布置,当希望使侧夹具24、26从图6中示出的关闭状态移动到图8中示出的打开状态时,第二缸44将板48移动到图8中示出的位置以用作框架12的支撑。然后,第三缸46将板49移动到图8中示出的位置以作用在突起50上并且沿箭头C指示的方向移动突起50,因此使侧夹具24、26沿相同的方向移动,并且逆着框架12上的板48的支撑平移离开框架12(在侧夹具24、26的移动期间该框架由板48维持静止)。侧夹具24、26因此同时移动到打开状态。With the above arrangement, when it is desired to move the side clamps 24, 26 from the closed position shown in FIG. 6 to the open position shown in FIG. 8, the second cylinder 44 moves the plate 48 to the position shown in FIG. Used as a support for the frame 12. Then, the third cylinder 46 moves the plate 49 to the position shown in FIG. The support of the plate 48 on the frame 12 translates away from the frame 12 (the frame is held stationary by the plate 48 during movement of the side clamps 24, 26). The side clamps 24, 26 are thus simultaneously moved into the open state.

为了允许侧夹具24、26返回到它们的相应的关闭状态,第三缸46沿箭头B指示的方向离开吊架10,因此释放突起50上的力。然后,侧夹具24、26在许多弹簧62(见图21)的作用下平移回到图6中示出的位置,而框架12仍然由板48维持静止。因此能够看到:当侧夹具24、26处于打开状态时,PCB28能够移开或插入侧夹具24、26和相应的侧杆18、20之间的空间;并且当侧夹具24、26处于关闭状态时,PCB28能够以可释放的方式被保持在侧夹具24、26和相应的侧杆18、20之间。To allow the side clamps 24 , 26 to return to their respective closed positions, the third cylinder 46 moves away from the hanger 10 in the direction indicated by arrow B, thus releasing the force on the protrusion 50 . The side clamps 24 , 26 then translate back to the position shown in FIG. 6 under the action of a number of springs 62 (see FIG. 21 ), while the frame 12 remains stationary by the plate 48 . It can thus be seen that when the side clamps 24, 26 are in the open position, the PCB 28 can be removed or inserted into the space between the side clamps 24, 26 and the corresponding side bars 18, 20; and when the side clamps 24, 26 are in the closed position , the PCB 28 can be releasably held between the side clamps 24, 26 and the corresponding side bars 18, 20.

图10到图14示意性地示出步骤,通过该些步骤,PCB28可被装载到安装于电镀系统中的吊架10上。如图10中所示,PCB28首先由基板载体52保持并且布置在吊架10的正下方,并且处于PCB28的顶边缘30为水平的并且直接面向吊架10的取向。顶夹具22和侧夹具24、26在图10中被示出为处于它们的相应的关闭状态。Figures 10 to 14 schematically illustrate the steps by which a PCB 28 may be loaded onto a hanger 10 mounted in an electroplating system. As shown in FIG. 10 , the PCB 28 is first held by the substrate carrier 52 and arranged directly below the hanger 10 and in an orientation where the top edge 30 of the PCB 28 is horizontal and directly facing the hanger 10 . The top clamp 22 and side clamps 24, 26 are shown in their respective closed states in FIG. 10 .

参考图11,第一缸42向着吊架10移动以打开顶夹具22。第二缸44也向着吊架10移动以便促使板48接触框架12并且为框架12提供支撑。然后,PCB28沿箭头D指示的方向从下方向着吊架10竖直向上移动。Referring to FIG. 11 , the first cylinder 42 moves toward the hanger 10 to open the top clamp 22 . The second cylinder 44 also moves toward the hanger 10 to force the plate 48 into contact with and provide support for the frame 12 . Then, the PCB 28 moves vertically upward toward the hanger 10 from below in the direction indicated by the arrow D. As shown in FIG.

在具有PCB28的基板保持器52向着吊架10移动期间,第三缸46移动板49以作用到固定于侧夹具24、26的突起50上,从而使侧夹具24、26沿箭头C指示的方向并且逆着框架12上的板48的支撑平移地移动离开框架12。侧夹具24、26因此移动到它们的打开状态。During the movement of the substrate holder 52 with the PCB 28 towards the hanger 10, the third cylinder 46 moves the plate 49 to act on the protrusion 50 fixed to the side clamps 24, 26 so that the side clamps 24, 26 move in the direction indicated by the arrow C And moves away from the frame 12 in translation against the support of the plate 48 on the frame 12 . The side clamps 24, 26 are thus moved to their open state.

当侧夹具24、26处于它们的打开状态时,PCB28进一步竖直向上移动并且移动到吊架10中,使得PCB28的侧边缘分别行进穿过侧夹具24、26和侧杆18、20之间的空间,直到PCB28的顶边缘30在顶夹具22的夹持指件34、36的下末端24a、36a之间的空间内,如图12中所示。When the side clamps 24, 26 are in their open state, the PCB 28 is moved further vertically up and into the hanger 10 so that the side edges of the PCB 28 travel through the gap between the side clamps 24, 26 and the side bars 18, 20, respectively. Space until the top edge 30 of the PCB 28 is in the space between the lower ends 24a, 36a of the clamping fingers 34, 36 of the top clamp 22, as shown in FIG.

如图13中示出的,第一缸42然后移动离开吊架10以释放作用在顶夹具22上的力,以便允许顶夹具22在弹簧38的偏压力下返回到它们的关闭状态,以便以可释放的方式保持PCB28的顶边缘30。第三缸46也移动离开吊架10以使板49与突起50的脱离接触,以便允许侧夹具24、26在弹簧62(见图21)的偏压力下返回到关闭状态,以便以可释放的方式保持PCB28的侧边缘。As shown in Figure 13, the first cylinder 42 then moves away from the hanger 10 to release the force acting on the top clamp 22, so as to allow the top clamp 22 to return to their closed state under the biasing force of the spring 38, so as to The top edge 30 of the PCB 28 is retained in a releasable manner. The third cylinder 46 also moves away from the hanger 10 to disengage the plate 49 from the protrusion 50 to allow the side clamps 24, 26 to return to the closed state under the biasing force of the spring 62 (see FIG. way to keep the side edges of the PCB 28.

如图14中所示,在侧夹具24、26返回到它们的关闭状态之后,第二缸44移动离开吊架10以使板48与框架12的脱离接触。由此,PCB28以可释放的方式由吊架10保持。基板载体52然后释放与PCB28的接合并且随后(沿箭头E指示的方向)竖直向下移动离开由此装载有PCB28的吊架10,以允许吊架10(具有装载的PCB28)移动通过电镀系统以便电镀和其它处理过程。As shown in FIG. 14 , after the side clamps 24 , 26 return to their closed state, the second cylinder 44 moves away from the hanger 10 to disengage the plate 48 from the frame 12 . Thus, PCB 28 is held by hanger 10 in a releasable manner. The substrate carrier 52 then releases engagement with the PCB 28 and is then moved vertically downward (in the direction indicated by arrow E) away from the hanger 10 thus loaded with the PCB 28 to allow the hanger 10 (with the loaded PCB 28) to move through the electroplating system For electroplating and other treatment processes.

为了从吊架10中卸载PCB28,基板载体52向上移动到吊架10中以与PCB28再次接合。顶夹具22和侧夹具24、26然后移动到它们的各自打开状态(以上述方式)以便释放对PCB28的顶边缘30的保持和对侧边缘的保持。基板载体52然后竖直向下移动离开吊架10,并且然后允许顶夹具22和侧夹具24、26返回到它们的关闭状态。To unload the PCB 28 from the hanger 10 , the substrate carrier 52 is moved up into the hanger 10 to re-engage the PCB 28 . The top clamp 22 and side clamps 24 , 26 are then moved to their respective open positions (in the manner described above) to release the hold on the top edge 30 and the hold on the side edges of the PCB 28 . The substrate carrier 52 is then moved vertically downwards away from the hanger 10 and the top clamp 22 and side clamps 24, 26 are then allowed to return to their closed state.

图15和图16示出具有PCB装载/卸载模块54的根据本发明的电镀系统,该PCB装载/卸载模块54用于将PCB28装载到吊架10上和从吊架10卸载PCB28。如图15和图16中所示,PCB28最初以水平取向(即PCB28的主表面向上和向下面向)布置在支撑件56上。PCB28然后与基板载体52接合,并且由基板载体52拾取并移动离开支撑件56,如图17中所示。FIGS. 15 and 16 show an electroplating system according to the invention with a PCB loading/unloading module 54 for loading and unloading PCBs 28 onto and from hangers 10 . As shown in FIGS. 15 and 16 , the PCB 28 is initially disposed on the support 56 in a horizontal orientation (ie, the major surfaces of the PCB 28 face upward and downward). The PCB 28 is then engaged with the substrate carrier 52 and picked up by the substrate carrier 52 and moved away from the support 56 as shown in FIG. 17 .

基板载体52(与PCB28一起)然后转动90°以使得PCB28处于竖直取向,其顶边缘30竖直向上面向,如图18中所示。基板载体52然后移动通过图19中的位置到图20中示出的位置,以将PCB28布置在吊架10的竖直正下方,以便以上述方式从下方装载到吊架10中。在电镀和其它处理过程之后,并且在从吊架10中将PCB28卸载回到基板载体52之后,基板载体52移动通过图20中示出的位置,然后到图19中示出的位置,并且然后到图18中示出的位置。基板载体52(与PCB28一起)然后沿相反方向转动90°以将PCB28返回到竖直取向。PCB28然后以水平取向下降到支撑件56上。Substrate carrier 52 (together with PCB 28 ) is then rotated 90° so that PCB 28 is in a vertical orientation with its top edge 30 facing vertically upward, as shown in FIG. 18 . The substrate carrier 52 is then moved through the position in FIG. 19 to the position shown in FIG. 20 to arrange the PCB 28 vertically below the hanger 10 for loading into the hanger 10 from below in the manner described above. After plating and other processing, and after unloading the PCB 28 from the hanger 10 back to the substrate carrier 52, the substrate carrier 52 moves through the position shown in FIG. 20, then to the position shown in FIG. 19, and then to the position shown in Figure 18. Substrate carrier 52 (together with PCB 28 ) is then rotated 90° in the opposite direction to return PCB 28 to a vertical orientation. PCB 28 is then lowered onto support 56 in a horizontal orientation.

能够看到,上述布置促进了将PCB28自动加载到吊架10上和从吊架10自动卸载PCB28。It can be seen that the above arrangement facilitates the automatic loading and unloading of the PCB 28 onto and from the hanger 10 .

如图1中所示并且如图21中更清楚地示出的,相应的屏蔽板58、60接合到每一个侧夹具24、26,该屏蔽板由电绝缘材料组成。屏蔽板58、60是细长的并且基本上矩形的,并且具有与接合到其上的相应的侧夹具24、26基本上相同的长度。屏蔽板58、60平行于侧夹具24、26并且从相应的侧夹具24、26间隔开不超过15mm的距离a,尽管能够手动调节这个距离a。一旦距离a被调节,它就将不变化直到第二次被调节。屏蔽板58、60分别与侧夹具24、26接合,并且屏蔽板58、60能够与侧夹具24、26同时移动。屏蔽板58、60离开相应的侧夹具24、26并且屏蔽和重叠PCB28的宽度b是从20mm到40mm。As shown in FIG. 1 and more clearly shown in FIG. 21 , a respective shielding plate 58 , 60 is joined to each side clamp 24 , 26 , the shielding plate being composed of an electrically insulating material. The shield plates 58, 60 are elongate and substantially rectangular, and have substantially the same length as the respective side clips 24, 26 to which they are joined. The shielding plates 58, 60 are parallel to the side clamps 24, 26 and are spaced apart from the respective side clamps 24, 26 by a distance a of no more than 15mm, although this distance a can be adjusted manually. Once the distance a is adjusted, it will not change until the second time it is adjusted. The shield plates 58 , 60 are respectively engaged with the side clamps 24 , 26 and the shield plates 58 , 60 are movable simultaneously with the side clamps 24 , 26 . The shielding plates 58, 60 are away from the respective side clamps 24, 26 and the width b of the shielding and overlapping PCB 28 is from 20mm to 40mm.

屏蔽板58、60相对于侧夹具24、26的接合、布置和定位有效地帮助控制PCB28上的电镀分布,并且现场微调是可能的且相对容易的。通过这种布置也可减小拖延率。The engagement, placement and positioning of the shield plates 58, 60 relative to the side clamps 24, 26 effectively helps control the plating distribution on the PCB 28, and field fine-tuning is possible and relatively easy. The procrastination rate can also be reduced by this arrangement.

应当理解,上面仅仅示出能够执行本发明的例子,并且在不偏离本发明的精神的情况下能够对其作出各种修改和/或变化。也应当理解,这里为了简洁起见而在单个实施例的情况中描述的本发明的各种特征也能够分离地提供或以任何适当子组合的方式提供。It should be understood that the above shows only examples where the present invention can be carried out, and that various modifications and/or changes can be made thereto without departing from the spirit of the present invention. It should also be understood that various features of the invention which are, for brevity, described herein in the context of a single embodiment, can also be provided separately or in any suitable subcombination.

Claims (23)

1.一种用于可释放地保持基板以便电镀的吊架,所述基板具有第一边缘、第二边缘和第三边缘,其中所述第二边缘和第三边缘彼此相对,所述吊架包括:1. A hanger for releasably holding a substrate for electroplating, said substrate having a first edge, a second edge and a third edge, wherein said second edge and third edge are opposite each other, said hanger include: 至少一第一保持器,所述第一保持器用于可释放地保持所述基板的所述第一边缘,at least one first retainer for releasably retaining said first edge of said substrate, 至少一第二保持器,所述第二保持器用于可释放地保持所述基板的所述第二边缘,和at least one second retainer for releasably retaining said second edge of said substrate, and 至少一第三保持器,所述第三保持器用于可释放地保持所述基板的所述第三边缘,at least one third retainer for releasably retaining said third edge of said substrate, 其中所述第一保持器是导电的,并且wherein the first holder is conductive, and 其中所述第二保持器和所述第三保持器是电绝缘的。Wherein the second holder and the third holder are electrically insulated. 2.根据权利要求1所述的吊架,其中,所述第一保持器能够在用于保持所述基板的关闭状态和所述基板能够从所述第一保持器中移除的打开状态之间移动。2. The hanger of claim 1, wherein the first retainer is switchable between a closed state for holding the base plate and an open state in which the base plate can be removed from the first retainer to move between. 3.根据权利要求2所述的吊架,其中,所述第一保持器被朝向所述关闭状态偏压。3. The hanger of claim 2, wherein the first retainer is biased towards the closed condition. 4.根据权利要求1所述的吊架,其中,所述第二保持器能够在用于保持所述基板的关闭状态和所述基板能够从所述第二保持器中移除的打开状态之间移动,并且其中所述第三保持器能够在用于保持所述基板的关闭状态和所述基板能够从所述第三保持器移除的打开状态之间移动。4. The hanger of claim 1, wherein the second retainer is switchable between a closed state for holding the base plate and an open state in which the base plate can be removed from the second retainer and wherein the third holder is movable between a closed state for holding the substrate and an open state in which the substrate can be removed from the third holder. 5.根据权利要求4所述的吊架,其中,所述第二保持器和所述第三保持器被朝向各自的关闭状态偏压。5. The hanger of claim 4, wherein the second retainer and the third retainer are biased towards respective closed positions. 6.根据权利要求1所述的吊架,其中,该吊架还包括第一屏蔽构件,所述第一屏蔽构件与所述第二保持器接合以便同时移动。6. The hanger of claim 1, further comprising a first shield member engaged with the second retainer for simultaneous movement. 7.根据权利要求6所述的吊架,其中,所述第一屏蔽构件与所述第二保持器间隔开至多15mm的距离。7. A hanger according to claim 6, wherein the first shielding member is spaced apart from the second retainer by a distance of at most 15 mm. 8.根据权利要求7所述的吊架,其中,所述第一屏蔽构件与所述第二保持器间隔开的所述距离能够调节。8. The hanger of claim 7, wherein the distance by which the first shielding member is spaced apart from the second retainer is adjustable. 9.根据权利要求6所述的吊架,其中,所述第一屏蔽构件适于以基本上20mm到基本上40mm的宽度屏蔽所述基板。9. The hanger according to claim 6, wherein the first shielding member is adapted to shield the substrate with a width of substantially 20mm to substantially 40mm. 10.根据权利要求6所述的吊架,其中,该吊架还包括第二屏蔽构件,所述第二屏蔽构件与所述第三保持器接合以便同时移动。10. The hanger of claim 6, further comprising a second shield member engaged with the third retainer for simultaneous movement. 11.一种电镀系统,所述电镀系统包括至少一个根据权利要求1的吊架。11. An electroplating system comprising at least one hanger according to claim 1. 12.根据权利要求11所述的系统,其中,所述吊架的所述第一保持器能够在用于保持所述基板的关闭状态与所述基板能够从所述第一保持器中移除的打开状态之间移动,并且其中所述系统还包括第一移动装置,所述第一移动装置用于将所述第一保持器从所述关闭状态移动到所述打开状态。12. The system of claim 11 , wherein the first holder of the hanger is capable of being in a closed state for holding the substrate and the substrate is removable from the first holder. and wherein the system further includes first moving means for moving the first retainer from the closed state to the open state. 13.根据权利要求11所述的系统,其中,所述吊架的所述第二保持器能够在用于保持所述基板的关闭状态与所述基板能够从所述第二保持器移除的打开状态之间移动,并且其中所述吊架的所述第三保持器能够在用于保持所述基板的关闭状态与所述基板能够从所述第三保持器移除的打开状态之间移动,并且其中所述系统还包括第二移动装置,所述第二移动装置用于将所述第二保持器从所述第二保持器的关闭状态移动到所述第二保持器的打开状态。13. The system of claim 11 , wherein the second holder of the hanger is movable in a closed state for holding the substrate and the substrate is removable from the second holder. movable between an open state, and wherein the third holder of the hanger is movable between a closed state for holding the substrate and an open state in which the substrate can be removed from the third holder , and wherein the system further comprises second moving means for moving the second retainer from a closed state of the second retainer to an open state of the second retainer. 14.根据权利要求13所述的系统,其中,所述第二移动装置适于将所述第三保持器从所述第三保持器的关闭状态移动到所述第三保持器的打开状态。14. The system of claim 13, wherein the second moving means is adapted to move the third retainer from a closed state of the third retainer to an open state of the third retainer. 15.根据权利要求14所述的系统,其中,所述第二移动装置适于同时将所述第二保持器和所述第三保持器从各自的关闭状态移动到各自的打开状态。15. The system of claim 14, wherein the second moving means is adapted to simultaneously move the second retainer and the third retainer from a respective closed state to a respective open state. 16.根据权利要求11所述的系统,其中,所述第二保持器能够在用于保持所述基板的关闭状态与所述基板能够从所述第二保持器移除的打开状态之间移动,并且所述第三保持器能够在用于保持所述基板的关闭状态与所述基板能够从所述第三保持器移除的打开状态之间移动,该系统还包括:16. The system of claim 11, wherein the second holder is movable between a closed state for holding the substrate and an open state for removing the substrate from the second holder , and the third holder is movable between a closed state for holding the substrate and an open state in which the substrate can be removed from the third holder, the system further comprising: 本体,所述第一保持器、所述第二保持器和所述第三保持器与所述本体接合,和a body with the first retainer, the second retainer and the third retainer engaged with the body, and 维持装置,在所述第二保持器和所述第三保持器在各自的关闭状态和打开状态之间移动期间,所述维持装置用于维持所述本体基本上静止。maintaining means for maintaining said body substantially stationary during movement of said second retainer and said third retainer between respective closed and open states. 17.根据权利要求16所述的系统,其中,所述第二保持器能够相对于所述本体平移移动以在所述第二保持器的关闭状态和打开状态之间移动。17. The system of claim 16, wherein the second retainer is movable in translation relative to the body to move between a closed state and an open state of the second retainer. 18.根据权利要求11所述的系统,其中,该系统还包括用于从所述吊架下方将所述基板装载到所述吊架上和/或从所述吊架下方从所述吊架卸载所述基板的装置。18. The system of claim 11 , further comprising means for loading the substrate onto the hanger from below the hanger and/or loading the substrate from the hanger from under the hanger. means for unloading the substrate. 19.根据权利要求18所述的系统,其中,用于装载和/或卸载的所述装置适于与所述基板接合以便将所述基板转动至少基本上90°。19. The system of claim 18, wherein the means for loading and/or unloading are adapted to engage with the substrate to rotate the substrate by at least substantially 90°. 20.一种将基板装载到吊架上和从所述吊架卸载所述基板的方法,所述基板具有顶边缘和两个相对的侧边缘,并且所述吊架至少具有第一保持器、第二保持器和第三保持器,所述方法包括:20. A method of loading and unloading a substrate onto and from a hanger, the base plate having a top edge and two opposing side edges, and the hanger having at least a first retainer, A second holder and a third holder, the method comprising: (a)将所述基板以所述顶边缘基本上水平的取向基本上布置在所述吊架的正下方,(a) disposing said base plate substantially directly below said hanger in a substantially horizontal orientation of said top edge, (b)将所述基板基本上竖直向上地移动到所述吊架中,(b) moving the base plate substantially vertically upward into the hanger, (c)所述吊架的所述第一保持器可释放地保持所述基板的所述顶边缘,(c) said first retainer of said hanger releasably retains said top edge of said base plate, (d)所述吊架的所述第二保持器和第三保持器的每一个可释放地保持所述基板的所述侧边缘的相应的一个,和(d) each of said second and third retainers of said hanger releasably retains a respective one of said side edges of said base plate, and (e)从所述吊架卸载所述基板。(e) unloading the base plate from the hanger. 21.根据权利要求20所述的方法,其中,所述步骤(e)包括:21. The method of claim 20, wherein said step (e) comprises: (f)所述吊架的所述第二保持器和第三保持器释放所述基板的所述侧边缘,(f) said second and third retainers of said hanger release said side edges of said base plate, (g)所述第一保持器释放所述基板的所述顶边缘,(g) said first retainer releases said top edge of said substrate, (h)将所述基板基本上竖直向下地从所述吊架移出。(h) moving the base plate substantially vertically downward from the hanger. 22.根据权利要求20所述的方法,其中,该方法在所述步骤(a)之前还包括沿第一方向将所述基板转动至少基本上90°的步骤(i)。22. The method according to claim 20, wherein the method further comprises, prior to said step (a), the step (i) of rotating said substrate in a first direction by at least substantially 90°. 23.根据权利要求22所述的方法,其中,该方法在所述步骤(h)之后还包括沿第二方向将所述基板转动至少基本上90°的步骤(j),所述第二方向与所述第一方向相反。23. A method according to claim 22, wherein, after said step (h), the method further comprises the step (j) of rotating said substrate by at least substantially 90° in a second direction, said second direction Opposite to the first direction.
CN201310009275.7A 2012-10-18 2013-01-09 Hanger and electroplating system with same Pending CN103774201A (en)

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