CN103684035B - Multilayer high power nano friction generator - Google Patents
Multilayer high power nano friction generator Download PDFInfo
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- CN103684035B CN103684035B CN201210350828.0A CN201210350828A CN103684035B CN 103684035 B CN103684035 B CN 103684035B CN 201210350828 A CN201210350828 A CN 201210350828A CN 103684035 B CN103684035 B CN 103684035B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Abstract
A kind of nano friction generator, comprises the electrode be cascading, high molecular polymer insulating barrier, and friction electrode; At least one face in two faces that high molecular polymer insulating barrier and friction electrode are oppositely arranged is provided with micro-nano concaveconvex structure; Described electrode and friction electrode are friction generator voltage and current output electrode.The present invention adopts conductivity (metal) film and polymer friction, and because metal easily loses electronics, friction electrode and high molecular polymer insulating barrier form induction field.
Description
Technical field
The present invention relates to a kind of friction generator, especially relate to a kind of conduction (metal) material that utilizes as the multilayer high power nano friction generator of friction electrode.
Background technology
Along with modern life level improves constantly, rhythm of life is constantly accelerated, and has occurred applying convenient, low to condition depended degree self power generation equipment.Existing self power generation equipment utilizes the piezoelectric property of material usually.Such as 2006, mechanical energy was successfully converted to electric energy by georgia ,u.s.a Institute of Technology professor Wang Zhonglin etc. within the scope of nanoscale, develops generator-nano generator minimum in the world.The general principle of nano generator is: when nano wire (NWs) during dynamic tensile, generates piezoelectricity electromotive force under external force in nano wire, and corresponding transient current flows at two ends to balance Fermi level.
Mutually rub between object and object, will make negative electricity on side's band, the opposing party becomes positively charged, because electricity fricative between object is friction electricity.Friction electricity is one of modal phenomenon of nature, but is left in the basket because being difficult to Collection utilization.If can be applied in self power generation equipment by friction electricity, bring more facility will certainly to the life of people.
Summary of the invention
The technical problem that the present invention solves is: overcome the defect that existing friction generator power output is not high, provide a kind of multilayer high power nano friction generator, utilizes conduction (metal) material and polymer friction, produces induction field, thus completes self-powered.Because friction generator of the present invention employs conduction (metal) material, improve the power output of electric energy.In addition, the products such as existing touch-screen are all that metal directly covers high molecular polymer, can be combined with the present invention.
In order to solve the problems of the technologies described above, the first technical scheme provided by the invention is, a kind of nano friction generator, comprises the electrode be cascading, high molecular polymer insulating barrier, and friction electrode; At least one face in two faces that high molecular polymer insulating barrier and friction electrode are oppositely arranged is provided with micro-nano concaveconvex structure; Described electrode and friction electrode are friction generator voltage and current output electrode.
Preferably, described electrode material therefor is indium tin oxide, Graphene, nano silver wire film, metal or alloy, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy; Described friction electrode material therefor is metal or alloy, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
Preferably, described high molecular polymer insulating barrier material therefor is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde-phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
Preferably, the micro-nano concaveconvex structure that described high molecular polymer surface of insulating layer is arranged is nanoscale extremely micron-sized concaveconvex structure, the nano concavo-convex structure of preferred height of projection 50nm-300nm.
Preferably, the micro-nano concaveconvex structure that described friction electrode surface is arranged is nanoscale extremely micron-sized concaveconvex structure, the nano concavo-convex structure of preferred height of projection 300nm-1 μm.
Second technical scheme provided by the invention is, a kind of nano friction generator, and described nano friction generator comprises the first electrode be cascading, the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier and the second electrode; Wherein, friction electrode is provided with between the first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier; At least one face in first high molecular polymer insulating barrier and friction electrode two opposite faces is provided with micro-nano concaveconvex structure; At least one face in second high molecular polymer insulating barrier and friction electrode two opposite faces is provided with micro-nano concaveconvex structure; Described first electrode and the series connection of the second electrode are an output electrode of friction generator voltage and current; Described friction electrode is another output electrode of friction generator voltage and current.
Preferably, described friction electrode material therefor to select conductive film, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy is (plumbous, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).
Preferably, described first high molecular polymer insulating barrier is identical with described second high molecular polymer insulating barrier material.
Preferably, described first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier are selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge films, pet film, polyvinyl butyral film, formaldehyde-phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.
Preferably, described friction electrode comprises the third electrode layer be cascading, third high molecular polymer layer and the 4th electrode layer; At least one face in first high molecular polymer insulating barrier and third electrode layer two opposite face is provided with micro-nano concaveconvex structure; At least one face in second high molecular polymer insulating barrier and the 4th electrode layer two opposite faces is provided with micro-nano concaveconvex structure; Described first electrode and the series connection of the second electrode are an output electrode of friction generator voltage and current; The third electrode layer of described friction electrode and the series connection of the 4th electrode layer are another output electrode of friction generator voltage and current.
Preferably, described first high molecular polymer insulating barrier and described second high molecular polymer insulating barrier material identical or different; Described third electrode layer and the 4th electrode layer material identical or different.
Preferably, described first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier independently be selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge films, pet film, polyvinyl butyral film, formaldehyde-phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.
Preferably, described third electrode layer and the 4th electrode layer material therefor being selected from independently is preferred, described friction electrode material therefor to select conductive film, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy is (plumbous, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).
Preferably, third high molecular polymer layer material used is different with the second high polymer layer from the first high polymer layer, be selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde-phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
Preferably, the micro-nano concaveconvex structure that described first high molecular polymer insulating barrier and the second high molecular polymer surface of insulating layer are arranged be nanoscale to micron-sized concaveconvex structure, the nano concavo-convex structure of preferred height of projection 50nm-300nm.
Preferably, the micro-nano concaveconvex structure that described friction electrode surface is arranged is nanoscale extremely micron-sized concaveconvex structure, the nano concavo-convex structure of preferred height of projection 300nm-1 μm.
Preferably, described first electrode layer and the second electrode lay material therefor independently be selected from indium tin oxide, Graphene electrodes, nano silver wire film, and metal or alloy, wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
Preferably, described first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier, third high Molecularly Imprinted Polymer insulating barrier are transparent material.Described first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier, third high molecular polymer layer material therefor independently be selected from following transparent high polymer any one: PETG (PET), dimethyl silicone polymer (PDMS), polystyrene (PS), polymethyl methacrylate (PMMA), Merlon (PC) and polymeric liquid crystal copolymer (LCP).Described first electrode, the second electrode, third electrode and the 4th electrode independently be selected in indium tin oxide (ITO), Graphene electrodes and nano silver wire film any one.After adopting above-mentioned preferred material, at this moment whole friction generator is a full transparent and soft device.
3rd technical scheme provided by the invention is: a kind of nano friction generator group, comprises the nano friction generator as above of multiple serial or parallel connection.
4th technical scheme provided by the invention is: nano friction generator described above or the application of nano friction generator group in diaphragm pressure sensor.
The present invention adopts conductivity (metal) film and polymer friction, because metal easily loses electronics, friction electrode and high molecular polymer insulating barrier (comprising the first high molecular polymer insulating barrier and/or the second high molecular polymer insulating barrier) form induction field.Lose electronics because metal is easier than polymer, larger electrical potential difference can be formed in metallic film and polymer friction process in theory.Friction generator of the present invention exports and reaches crest voltage 150V, electric current 27 μ A.
Accompanying drawing explanation
Fig. 1 is the generalized section of a kind of embodiment of nano friction generator of the present invention.
Fig. 2 is the structural representation of Fig. 1 nano friction generator of the present invention.
Fig. 3 is the generalized section of the another kind of embodiment of nano friction generator of the present invention.
Fig. 4 is the structural representation of Fig. 3 nano friction generator of the present invention.
Fig. 5 is the generalized section of the another kind of embodiment of nano friction generator of the present invention.
Fig. 6 is the structural representation of Fig. 5 nano friction generator of the present invention.
Fig. 7 is silicon template schematic diagram of the present invention.
Fig. 8 is the thin polymer film schematic diagram of band micro-nano bulge-structure of the present invention.。
Embodiment
For fully understanding the object of the present invention, feature and effect, by following concrete execution mode, the present invention is elaborated.
The present invention is a kind of nano friction generator, adopt conductivity (metal) film and polymer friction, because metal easily loses electronics, friction electrode and high molecular polymer insulating barrier (comprising the first high molecular polymer insulating barrier and/or the second high molecular polymer insulating barrier) form induction field.
As depicted in figs. 1 and 2, nano friction generator of the present invention comprises the electrode 11 be cascading, high molecular polymer insulating barrier 12, and friction electrode 13; At least one face in two faces that high molecular polymer insulating barrier 12 and friction electrode 13 are oppositely arranged is provided with micro-nano concaveconvex structure (not shown); Described electrode 11 and friction electrode 13 are friction generator voltage and current output electrode.。
In a specific embodiment of the present invention, nano friction generator is nontransparent layer flexible slab construction, and bending or distortion causes triboelectrification between high molecular polymer insulating barrier 12 and friction electrode 13 arbitrarily.
Electrode 11 pairs of material therefors do not have particular provisions, the material of conductive layer can be formed all within protection scope of the present invention, such as indium tin oxide, Graphene electrodes, nano silver wire film, and metal or alloy, wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
The electrode 13 that rubs in present embodiment can select conductive film, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy is (plumbous, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).The thickness preferably 100 μm-500 μm of friction electrode 13, more preferably 200 μm, the surface of the relative high molecular polymer insulating barrier 12 of friction electrode 13 is provided with micro-nano concaveconvex structure (not shown).This micro-nano concaveconvex structure is nanoscale extremely micron-sized concaveconvex structure, the concaveconvex structure of preferred height of projection 300nm-1 μm.
High molecular polymer insulating barrier 12 is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge films, pet film, polyvinyl butyral film, formaldehyde-phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.Preferably, the thickness of high molecular polymer insulating barrier 12 is 100 μm-500 μm.
High molecular polymer insulating barrier 12 arranges micro-nano concaveconvex structure (not shown) on a surface, then adopts the conventional methods such as radio frequency sputter, and the face not arranging micro-nano concaveconvex structure at high molecular polymer insulating barrier 12 arranges electrode 11.This micro-nano concaveconvex structure (not shown) is nanoscale extremely micron-sized concaveconvex structure, the concaveconvex structure of preferred height of projection 50-300nm.
The surface with micro-nano concaveconvex structure of high molecular polymer insulating barrier 12 relatively contacts with friction electrode 13 and stacks formation duplexer, and interlayer is without any binding.The edge of this friction generator seals with common adhesive plaster, ensures that polymer insulation layer contacts with the appropriateness of friction electrode.
In a specific embodiment of the present invention, the surface of high molecular polymer insulating barrier 12 Relative friction electrode 13 does not arrange micro-nano concaveconvex structure, the surface of the electrode 13 that only rubs is provided with micro-nano concaveconvex structure.
In another embodiment of the present invention, the surface of high molecular polymer insulating barrier 12 Relative friction electrode 13 is provided with micro-nano concaveconvex structure, and the surface of the electrode 13 that rubs does not arrange micro-nano concaveconvex structure.
As shown in Figure 3 and Figure 4, in the preferred embodiments of the disclosure, nano friction generator comprises the first electrode 21, first high molecular polymer insulating barrier 22, second high molecular polymer insulating barrier 23 and the second electrode 24 be cascading; Wherein, friction electrode 25 is provided with between the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23; The face of the first high molecular polymer insulating barrier 22 Relative friction electrode 25 is provided with micro-nano concaveconvex structure (not shown) with at least one face in the face of the relative first high molecular polymer insulating barrier 22 of friction electrode 25; The face of the second high molecular polymer insulating barrier 23 Relative friction electrode 25 is provided with micro-nano concaveconvex structure (not shown) with at least one face in the face of the relative second high molecular polymer insulating barrier 23 of friction electrode 25; Described first electrode 21 and the series connection of the second electrode 24 are an output electrode of friction generator voltage and current; Described friction electrode 25 is another output electrode of friction generator voltage and current.
In a specific embodiment of the present invention, nano friction generator is nontransparent layer flexible slab construction, bending or distortion causes between the first high molecular polymer insulating barrier 22 and friction electrode 25 arbitrarily, triboelectrification between friction electrode 25 and the second high molecular polymer insulating barrier 23.This friction generator comprises the first electrode 21, the first high molecular polymer insulating barrier 22 be cascading, friction electrode 25, second high molecular polymer insulating barrier 23 and the second electrode 24.
First electrode 21 and the second electrode 24 pairs of material therefors do not have particular provisions, the material of conductive layer can be formed all within protection scope of the present invention, such as indium tin oxide, Graphene electrodes, nano silver wire film, and metal or alloy, wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
The electrode 25 that rubs in present embodiment can select conductive film, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy is (plumbous, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).The thickness preferably 100 μm-500 μm of friction electrode 25, two surfaces of friction electrode 25 is equipped with micro-nano concaveconvex structure by more preferably 200 μm.This micro-nano concaveconvex structure is nanoscale extremely micron-sized concaveconvex structure or the irregular nanoscale extremely micron-sized concaveconvex structure of highly ordered array structure, the concaveconvex structure of preferred height of projection 300nm-1 μm.
First high molecular polymer insulating barrier 22 is identical with the second high molecular polymer insulating barrier 23 material, be selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge films, pet film, polyvinyl butyral film, formaldehyde-phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.Preferably, the thickness of the first high molecular polymer insulating barrier 2 and the second high molecular polymer insulating barrier 23 is 100 μm-500 μm.
First high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange micro-nano concaveconvex structure respectively on their surface, then adopt the conventional methods such as radio frequency sputter, the face that micro-nano concaveconvex structure is not set at the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arranges the first electrode 21 and the second electrode 24.Micro-nano concaveconvex structure is nanoscale extremely micron-sized concaveconvex structure, the concaveconvex structure of preferred height of projection 50-300nm.
The surface with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22 relatively contacts with friction electrode 25 and stacks, then the surface with micro-nano concaveconvex structure of the second high molecular polymer insulating barrier 23 is stacked on friction electrode 25 and forms duplexer, and interlayer is without any binding.The edge of this friction generator seals with common adhesive plaster, ensures that polymer insulation layer contacts with the appropriateness of friction electrode.
In a specific embodiment of the present invention, on the surface of the first high molecular polymer insulating barrier 22 Relative friction electrode 25, all do not arrange micro-nano concaveconvex structure with on the surface of the second high molecular polymer insulating barrier 23 Relative friction electrode 25, two surfaces of the electrode 25 that only rubs are provided with micro-nano concaveconvex structure.
In another embodiment of the present invention, on the surface of the first high molecular polymer insulating barrier 22 Relative friction electrode 25, be provided with micro-nano concaveconvex structure with the surface of the second high molecular polymer insulating barrier 23 Relative friction electrode 25, and two surfaces of the electrode 25 that rubs do not arrange micro-nano concaveconvex structure.
As shown in Figure 5 and Figure 6, in a specific embodiment of the present invention, nano friction generator is nontransparent layer flexible slab construction, bending or distortion causes between the first high molecular polymer insulating barrier 22 and friction electrode 25 arbitrarily, triboelectrification between friction electrode 25 and the second high molecular polymer insulating barrier 23.This friction generator comprises the first electrode 21, the first high molecular polymer insulating barrier 22 be cascading, friction electrode 25, second high molecular polymer insulating barrier 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 be cascading, third high molecular polymer layer 252 and the 4th electrode layer 253.The surface of third electrode layer 251 and the 4th electrode layer 253 is provided with micro-nano concaveconvex structure (not shown).This micro-nano concaveconvex structure is nanoscale extremely micron-sized concaveconvex structure, the concaveconvex structure of preferred height of projection 300nm-1 μm (more preferably 350-500nm).
First electrode 21 and the second electrode 24 pairs of material therefors do not have particular provisions, the material of conductive layer can be formed all within protection scope of the present invention, such as indium tin oxide, Graphene electrodes, nano silver wire film, and metal or alloy, wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.。
First high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 material can be the same or different, independently be selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge films, pet film, polyvinyl butyral film, formaldehyde-phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.Preferably, the thickness of the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 is 100 μm-500 μm.
First high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange micro-nano concaveconvex structure respectively on their surface, then adopt the conventional methods such as radio frequency sputter, the face that micro-nano concaveconvex structure is not set at the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arranges the first electrode 21 and the second electrode 24.Micro-nano concaveconvex structure is nanoscale extremely micron-sized concaveconvex structure, the concaveconvex structure of preferred height of projection 50-300nm.
Third high molecular polymer layer 252 material used is different with the second high polymer layer from the first high polymer layer, is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde-phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film, preferably its thickness is 100 μm-500 μm, is more preferably 200 μm.
Third electrode layer 251 and the 4th electrode layer 253 pairs of material therefors do not have particular provisions, the material of conductive layer can be formed all within protection scope of the present invention, such as conductive film can be selected, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy is (plumbous, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).
The surface with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22 relatively contacts with the third electrode layer 251 of friction electrode 5 and stacks, then the surface with micro-nano concaveconvex structure of the second high molecular polymer insulating barrier 23 be stacked to friction electrode 25 the 4th electrode layer 253 on form duplexer, interlayer is without any binding.The edge of this friction generator seals with common adhesive plaster, ensures that polymer insulation layer contacts with the appropriateness of friction electrode.First electrode 21 and the series connection of the second electrode 24 are an output electrode of friction generator voltage and current; The third electrode layer 251 of friction electrode and the series connection of the 4th electrode layer 253 are another output electrode of friction generator voltage and current.
In a specific embodiment of the present invention, on the surface of the first high molecular polymer insulating barrier 22 Relative friction electrode 25 third electrode layer 251, all do not arrange micro-nano concaveconvex structure with on the surface of the second high molecular polymer insulating barrier 23 Relative friction electrode 25 the 4th electrode layer 253, only the surface of third electrode layer 251 and the 4th electrode layer 253 is provided with micro-nano concaveconvex structure.
In another embodiment of the present invention, on the surface of the first high molecular polymer insulating barrier 22 Relative friction electrode 25 third electrode layer 251, be provided with micro-nano concaveconvex structure with the surface of the second high molecular polymer insulating barrier 23 Relative friction electrode 25 the 4th electrode layer 253, and the surface of third electrode layer 251 and the 4th electrode layer 253 does not arrange micro-nano concaveconvex structure.
As shown in Figure 5 and Figure 6, in a specific embodiment of the present invention, nano friction generator is transparent layer flexible slab construction, bending or distortion causes between the first high molecular polymer insulating barrier 22 and friction electrode 25 arbitrarily, triboelectrification between friction electrode 25 and the second high molecular polymer insulating barrier 23.This friction generator comprises the first electrode 21, the first high molecular polymer insulating barrier 22 be cascading, friction electrode 25, second high molecular polymer insulating barrier 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 be cascading, third high molecular polymer layer 252 and the 4th electrode layer 253.At least one face in the face of the face first high molecular polymer insulating barrier 22 relative to third electrode layer 251 of the relative third electrode layer 251 of the first high molecular polymer insulating barrier 22 is provided with micro-nano concaveconvex structure (not shown); At least one face in the face of the face second high molecular polymer insulating barrier 23 relative to the 4th electrode layer 253 of relative 4th electrode layer 253 of the second high molecular polymer insulating barrier 23 is provided with micro-nano concaveconvex structure.Described first electrode 21 and the series connection of the second electrode 24 are an output electrode of friction generator voltage and current; The third electrode layer 251 of described friction electrode and the series connection of the 4th electrode layer 253 are another output electrode of friction generator voltage and current.
First electrode 21, second electrode 24, third electrode layer 251 and the 4th electrode layer 253 independently be selected from indium tin oxide (ITO), Graphene electrodes and nano silver wire film any one.First high molecular polymer insulating barrier 22, second high molecular polymer insulating barrier 23, third high molecular polymer layer 252 independently be selected from following transparent high polymer any one: PETG (PET), dimethyl silicone polymer (PDMS), polystyrene (PS), polymethyl methacrylate (PMMA), Merlon (PC) and polymeric liquid crystal copolymer (LCP).After adopting above-mentioned preferred material, at this moment whole friction generator is a full transparent and soft device.
Micro-nano concaveconvex structure can adopt multiple method to be prepared, such as, with there being the silicon template of ad hoc rules bulge-structure to suppress, with sand papering metal surface and additive method.A kind of preparation method of micro-nano concaveconvex structure 6 is described in detail below with reference to Fig. 7 and Fig. 8.
S1 makes silicon template.The method of silicon chip photoetching is made the figure of rule on surface.Carry out the technique anisotropic etching of the silicon chip wet etching of figure, the rectangular pyramid array structure of spill can be carved, or also can carve the cubic array structure of spill with the technique isotropic etching at dry quarter.Template acetone after carving well and isopropyl alcohol clean up, and then all templates all carry out the process of surface silanization in the atmosphere of trim,ethylchlorosilane, and the silicon template handled well is stand-by.
S2 makes the polymer membrane with micro-nano relief structured surface.First polymer paste is coated on silicon template surface, vacuum degassing, by the mode of rotary coating, mixture unnecessary for silicon chip surface is removed, form the polymeric liquid film of thin layer.Whole template is solidified, then peels off, be there is the polymer film of specific microstructure array uniformly.
Introduce the electricity generating principle of above-mentioned friction generator below in detail.When each layer of friction generator of the present invention is bent downwardly, due to the micro-nano concaveconvex structure existed, friction electrode in friction generator and high molecular polymer insulating barrier (comprise high molecular polymer insulating barrier 12, or first high molecular polymer insulating barrier 22 and/or the surperficial phase mutual friction of the second high molecular polymer insulating barrier 23 produce electrostatic charge, the generation of electrostatic charge can make the electric capacity between electrode and friction electrode change, thus causes occurring electrical potential difference between electrode and friction electrode.Due to the existence of electrical potential difference between electrode and friction electrode, free electron flows to the high side of electromotive force by by external circuit by the side that electromotive force is low, thus forms electric current in external circuit.When each layer of friction generator of the present invention returns to original state, at this moment the built-in potential be formed between electrode and friction electrode disappears, now will again produce reverse electrical potential difference between Balanced electrode and friction electrode, then free electron forms reverse current by external circuit.By repeatedly rubbing and recovering, just periodic ac signal can be formed in external circuit.
Set forth the enforcement of method of the present invention below by specific embodiment, one skilled in the art will appreciate that this should not be understood to the restriction to the claims in the present invention scope.
Embodiment 1
As illustrated in fig. 1 and 2, the present embodiment nano friction generator is nontransparent multi-layer film type, is of a size of 4.5cm × 1.2cm, and gross thickness is approximately 250 μm.This friction generator comprises the electrode 11 be cascading, high molecular polymer insulating barrier 12, friction electrode 13.
Adopt (4.5cm × 1.2cm) polyimide film (thickness 125 μm, Du Pont 500HN) of rectangle as high molecular polymer insulating barrier 12.High molecular polymer insulating barrier 12 arranges the micro-nano concaveconvex structure 6(of height of projection 150nm on a surface see Fig. 7 and 8), another plates the gold thin film of thickness 100nm on the surface, and this gold thin film is electrode 11.
Adopt the Copper Foil of thickness 100 μm as friction electrode 13, two surfaces of this Copper Foil adopt the method for fine sandpaper polishing to arrange the micro-nano concaveconvex structure of irregular height of projection within the scope of 350-500nm.
Friction electrode 13, with the surface with micro-nano concaveconvex structure 6 facing to high molecular polymer insulating barrier 12 of micro-nano concaveconvex structure, is stacked on high molecular polymer insulating barrier 12, obtains friction generator 1# by friction electrode 13.The edge of this friction generator seals with common adhesive plaster.
Friction generator 1# is at I-V(current-voltage) measurement in show typical open circuit feature.The stepping motor of life cycle vibration (deformation of 0.33Hz and 0.13%) makes the bending of friction generator 1# generating period and release, and the maximum output voltage of friction generator 1# and current signal reach 70V respectively and 18 μ A(please supplement).
Embodiment 2
As shown in Figure 3 and Figure 4, the present embodiment nano friction generator is nontransparent multi-layer film type, is of a size of 4.5cm × 1.2cm, and gross thickness is approximately 500 μm.This friction generator comprises the first electrode 21, the first high molecular polymer insulating barrier 22 be cascading, friction electrode 25, second high molecular polymer insulating barrier 23 and the second electrode 24.
Adopt (4.5cm × 1.2cm) polyimide film (thickness 125 μm, Du Pont 500HN) of rectangle as the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23.First high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange the micro-nano concaveconvex structure of height of projection 150nm respectively on a surface, another plates the aluminium film of thickness 100nm on the surface, and this aluminium film is the first electrode 21 and the second electrode 24.
Adopt the Copper Foil of thickness 100 μm as friction electrode 25, two surfaces of this Copper Foil adopt the method for fine sandpaper polishing to arrange the micro-nano concaveconvex structure of irregular height of projection within the scope of 350-500nm respectively.
Friction electrode 25 is stacked on the surface with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22, then the second high molecular polymer insulating barrier 23 has micro-nano concaveconvex structure face relatively (namely towards) friction electrode 25, be stacked on friction electrode 25, obtain friction generator 2#.The edge of this friction generator seals with common adhesive plaster.
Friction generator 2# is at I-V(current-voltage) measurement in show typical open circuit feature.The stepping motor of life cycle vibration (deformation of 0.33Hz and 0.13%) makes the bending of friction generator 2# generating period and release, and the maximum output voltage of friction generator 2# and current signal reach 80V and 16 μ A respectively.
Embodiment 3
The structure of the present embodiment is substantially the same manner as Example 2, difference be only rub electrode 25 two surfaces on micro-nano concaveconvex structure is not set, the first high molecular polymer insulating barrier 22 material therefor is polyformaldehyde.Adopt the method identical with embodiment 2 to test, the maximum output voltage of friction generator 3# and current signal reach 50V and 10 μ A respectively.
Embodiment 4
As shown in Figure 5 and Figure 6, the present embodiment nano friction generator is nontransparent multi-layer film type, is of a size of 4.5cm × 1.2cm, and gross thickness is approximately 650 μm.This friction generator comprises the first electrode 21, the first high molecular polymer insulating barrier 22 be cascading, friction electrode 25, second high molecular polymer insulating barrier 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 be cascading, third high molecular polymer layer 252 and the 4th electrode layer 253.
Adopt (4.5cm × 1.2cm) polyimide film (thickness 125 μm, Du Pont 500HN) of rectangle as the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23.First high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange the micro-nano concaveconvex structure of height of projection 300nm respectively on a surface, another plates the molybdenum alloy film of thickness 100nm on the surface, and this molybdenum alloy film is the first electrode 21 and the second electrode 24.
Adopt the PETG (PET) of thickness 200 μm as third high Molecularly Imprinted Polymer insulating barrier 252, the gold thin film of method thickness setting 1 μm on two surfaces of PETG of employing magnetron sputtering or evaporation is as third electrode layer 251 and the 4th electrode layer 253.。
Third electrode layer 251 is relative with the face with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22, friction electrode 25 is stacked on the first high molecular polymer insulating barrier 22, then the second high molecular polymer insulating barrier 23 has relative 4th electrode layer 253 in micro-nano concaveconvex structure face, second high molecular polymer insulating barrier 23 is stacked on friction electrode 25, obtains friction generator 4#.The edge of this friction generator seals with common adhesive plaster.
Adopt the method identical with embodiment 1 to test, the maximum output voltage of friction generator 4# and current signal reach 150V and 27 μ A respectively.
Embodiment 5
As shown in Figure 5 and Figure 6, the present embodiment nano friction generator is nontransparent multi-layer film type, is of a size of 4.5cm × 1.2cm, and gross thickness is approximately 650 μm.This friction generator comprises the first electrode 21, the first high molecular polymer insulating barrier 22 be cascading, friction electrode 25, second high molecular polymer insulating barrier 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 be cascading, third high molecular polymer layer 252 and the 4th electrode layer 253.
Adopt (4.5cm × 1.2cm) styrene-acrylonitrile copolymer copolymer film (thickness 125 μm) of rectangle as the first high molecular polymer insulating barrier 22, adopt the polymethyl methacrylate of thickness 220 μm as the second high molecular polymer insulating barrier 23.First high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange the micro-nano concaveconvex structure of height of projection 50nm respectively on a surface, another plates the gold thin film of thickness 100nm on the surface, and this gold thin film is the first electrode 21 and the second electrode 24.
Adopt the PETG (PET) of thickness 200 μm as third high Molecularly Imprinted Polymer insulating barrier 252, adopt the gold thin film of method thickness setting 1 μm on two surfaces of PETG of magnetron sputtering or evaporation as third electrode layer 251 and the 4th electrode layer 253.
Third electrode layer 251 is relative with the face with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22, friction electrode 25 is stacked on the first high molecular polymer insulating barrier 22, then the second high molecular polymer insulating barrier 23 has relative 4th electrode layer 253 in micro-nano concaveconvex structure face, second high molecular polymer insulating barrier 23 is stacked on friction electrode 25, obtains friction generator 5#.The edge of this friction generator seals with common adhesive plaster.
Adopt the method identical with embodiment 1 to test, the maximum output voltage of friction generator 5# and current signal reach 130V and 22 μ A respectively.
Embodiment 6
As shown in Figure 5 and Figure 6, the present embodiment nano friction generator is transparent multi-layer film type, is of a size of 4.5cm × 1.2cm, and gross thickness is approximately 650 μm.This friction generator comprises the first electrode 21, the first high molecular polymer insulating barrier 22 be cascading, friction electrode 25, second high molecular polymer insulating barrier 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 be cascading, third high molecular polymer layer 252 and the 4th electrode layer 253.
Adopt the dimethyl silicone polymer of thickness 220 μm as the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23.First high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange the micro-nano concaveconvex structure of height of projection 150nm respectively on a surface, another adopts conventional vacuum sputtering technology to form indium tin oxide (ITO) conductive film on the surface, and this conductive film is the first electrode 21 and the second electrode 24.
Adopt the PETG (PET) of thickness 200 μm as third high Molecularly Imprinted Polymer insulating barrier 252, adopt conventional vacuum sputtering technology to form indium tin oxide (ITO) conductive film respectively on two surfaces of third high Molecularly Imprinted Polymer insulating barrier 252, this conductive film is third electrode layer 251 and the 4th electrode layer 253.
Relative with the face with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22 according to third electrode layer 251, friction electrode 25 is stacked on the first high molecular polymer insulating barrier 22, then according to the second high molecular polymer insulating barrier 23, there is relative 4th electrode layer 253 in micro-nano concaveconvex structure face, second high molecular polymer insulating barrier 23 is stacked on friction electrode 25, obtains friction generator 6#.The edge of this friction generator seals with common adhesive plaster.
Adopt the method identical with embodiment 1 to test, the maximum output voltage of friction generator 6# and current signal reach 80V and 18 μ A respectively.
Embodiment 7
The present embodiment nano friction generator is nontransparent multi-layer film type, 4.5cm × 1.2cm, and gross thickness is approximately 400 μm.This friction generator comprises the first electrode be cascading, the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier and the second electrode.
Adopt (4.5cm × 1.2cm) polyimide film (thickness 125 μm of rectangle, Du Pont 500HN) as the first high molecular polymer insulating barrier, PETG (PET) film that thickness is 220 μm is used as the second high molecular polymer insulating barrier.First high molecular polymer insulating barrier and the second high molecular polymer insulating barrier arrange the micro-nano concaveconvex structure of height of projection 150nm respectively on a surface, and another plates the gold thin film of thickness 100nm on the surface, and this gold thin film is the first electrode and the second electrode.The edge of this friction generator seals with common adhesive plaster, obtains friction generator 7#.
Adopt the method identical with embodiment 1 to test, the maximum output voltage of friction generator 7# and current signal reach 18V and 1 μ A respectively.
Friction generator of the present invention can be applied to various self actuating system as touch-screen, electronic console, and has in other personal electric product in potential using value field, production cost is low, generating efficiency is high effect that it has.The friction generator of embodiment 2-6 employs friction electrode as intervening electrode, is equivalent to two generators to integrate together, effectively can improves the power output of generator.The friction generator maximum output voltage of embodiment 1-6 and current signal reach 80V and 16 more than μ A, thus can apply in diaphragm pressure sensor.
When such scheme comprises first-selected embodiment and puts on record during the optimal mode that this is invented known for inventor, above-described embodiment only provides as illustrative example.To many alienation of the specific embodiment disclosed in this explanation, not departing from the spirit and scope of this invention, easily differentiating being.Therefore, this scope of invention is determined by appended claim, and the special embodiment described above being not limited to.
Claims (20)
1. a nano friction generator, comprises the electrode be cascading, high molecular polymer insulating barrier, and friction electrode;
Described friction electrode surface in two faces that described high molecular polymer insulating barrier and described friction electrode are oppositely arranged is provided with micro-nano concaveconvex structure;
The height of projection of the micro-nano concaveconvex structure that described friction electrode surface is arranged is 350nm-500nm;
Described electrode and friction electrode are friction generator voltage and current output electrode.
2. nano friction generator according to claim 1, it is characterized in that, described electrode material therefor is indium tin oxide, Graphene, nano silver wire film, metal, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium, aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy; Described friction electrode material therefor is metal, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium, aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
3. nano friction generator according to claim 1, it is characterized in that, described high molecular polymer insulating barrier material therefor is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde-phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
4. nano friction generator according to claim 2, it is characterized in that, described high molecular polymer insulating barrier material therefor is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde-phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
5. the nano friction generator according to any one of claim 1-4, is characterized in that, the micro-nano concaveconvex structure that described high molecular polymer surface of insulating layer is arranged is that nanoscale is to micron-sized concaveconvex structure.
6. nano friction generator according to claim 5, is characterized in that, the height of projection of the micro-nano concaveconvex structure that described high molecular polymer surface of insulating layer is arranged is 50nm-300nm.
7. a nano friction generator, comprises the first electrode be cascading, the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier and the second electrode; It is characterized in that, between the first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier, be provided with friction electrode;
Described friction electrode surface in described first high molecular polymer insulating barrier and described friction electrode two opposite faces is provided with micro-nano concaveconvex structure;
Described friction electrode surface in described second high molecular polymer insulating barrier and described friction electrode two opposite faces is provided with micro-nano concaveconvex structure;
The height of projection 300nm-1 μm of the micro-nano concaveconvex structure that described friction electrode surface is arranged;
Described first electrode and the series connection of the second electrode are an output electrode of friction generator voltage and current; Described friction electrode is another output electrode of friction generator voltage and current.
8. nano friction generator according to claim 7, it is characterized in that, described friction electrode material therefor is metal, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium, aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
9. nano friction generator according to claim 8, is characterized in that, described first high molecular polymer insulating barrier is identical with described second high molecular polymer insulating barrier material, described first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier material therefor are selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde-phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
10. nano friction generator according to claim 7, is characterized in that, described friction electrode comprises the third electrode layer be cascading, third high molecular polymer layer and the 4th electrode layer;
Described third electrode layer in described first high molecular polymer insulating barrier and described third electrode layer two opposite face is provided with micro-nano concaveconvex structure on the surface;
Described 4th electrode layer surface in described second high molecular polymer insulating barrier and described 4th electrode layer two opposite faces is provided with micro-nano concaveconvex structure;
Described first electrode and the series connection of the second electrode are an output electrode of friction generator voltage and current; The third electrode layer of described friction electrode and the series connection of the 4th electrode layer are another output electrode of friction generator voltage and current.
11. nano friction generator according to claim 10, is characterized in that, described first high molecular polymer insulating barrier and described second high molecular polymer insulating barrier material identical or different; Described third electrode layer and the 4th electrode layer material identical or different.
12. nano friction generator according to claim 11, is characterized in that, described first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier independently be selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde-phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film, described third electrode layer and the 4th electrode layer independently be selected from metal, wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium, aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
13. nano friction generator according to any one of claim 7-12, it is characterized in that, third high molecular polymer layer material used is different with the second high polymer layer from the first high polymer layer, is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde-phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
14. nano friction generator according to claim 7, described first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier, third high Molecularly Imprinted Polymer insulating barrier are transparent material; Described first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier, third high molecular polymer layer material therefor independently be selected from following transparent high polymer any one: PETG (PET), dimethyl silicone polymer (PDMS), polystyrene (PS), polymethyl methacrylate (PMMA), Merlon (PC) and polymeric liquid crystal copolymer (LCP).
15. nano friction generator according to claim 7-12 or 14 any one, it is characterized in that, the micro-nano concaveconvex structure that described first high molecular polymer insulating barrier and the second high molecular polymer surface of insulating layer are arranged is that nanoscale is to micron-sized concaveconvex structure.
16. nano friction generator according to claim 13, is characterized in that, the micro-nano concaveconvex structure that described first high molecular polymer insulating barrier and the second high molecular polymer surface of insulating layer are arranged is that nanoscale is to micron-sized concaveconvex structure.
17. nano friction generator according to claim 15, is characterized in that, the micro-nano concaveconvex structure height of projection 50nm-300nm that described first high molecular polymer insulating barrier and the second high molecular polymer surface of insulating layer are arranged.
18. nano friction generator according to claim 16, is characterized in that, the micro-nano concaveconvex structure height of projection 50nm-300nm that described first high molecular polymer insulating barrier and the second high molecular polymer surface of insulating layer are arranged.
19. 1 kinds of nano friction generator groups, comprise the nano friction generator as described in claim 1-6 or any one of 7-18 of multiple serial or parallel connection.
20. application of nano friction generator in diaphragm pressure sensor as described in claim 1-6 or any one of 7-18.
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| PCT/CN2013/079288 WO2014044077A1 (en) | 2012-09-20 | 2013-07-12 | Multi-layer high-power nano friction-based generator |
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| CN102684546A (en) * | 2012-05-15 | 2012-09-19 | 纳米新能源（唐山）有限责任公司 | Friction generator |
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| WO2005084284A2 (en) * | 2004-02-27 | 2005-09-15 | Georgia Tech Research Corporation | Multiple element electrode cmut devices and fabrication methods |
| CN101599716A (en) * | 2009-03-02 | 2009-12-09 | 高章玉 | A kind of self-powered technology and device that does not have energy consumption |
| CN202818150U (en) * | 2012-09-20 | 2013-03-20 | 纳米新能源（唐山）有限责任公司 | Nano friction generator |
| CN203057022U (en) * | 2012-12-27 | 2013-07-10 | 纳米新能源（唐山）有限责任公司 | Nanometer friction generator |
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2012
- 2012-09-20 CN CN201210350828.0A patent/CN103684035B/en active Active
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|---|---|---|---|---|
| DE4429029A1 (en) * | 1994-08-16 | 1996-02-29 | Gore & Ass | Electrostatic generator responding to movement, used e.g. as clothing |
| CN101039082A (en) * | 2007-04-28 | 2007-09-19 | 中国科学院力学研究所 | Electrostatic force driving arch brake |
| CN102684546A (en) * | 2012-05-15 | 2012-09-19 | 纳米新能源（唐山）有限责任公司 | Friction generator |
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| WO2014044077A1 (en) | 2014-03-27 |
| CN103684035A (en) | 2014-03-26 |
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