CN103521491B - Cleaning fluid absorbing device and developing liquid washing equipment - Google Patents

Abstract

The present invention relates to the field of display technology, in particular to a cleaning solution suction device that absorbs cleaning solution mixed with developing solution through a suction head to achieve uniform development of a display substrate, and a developer flushing device equipped with the cleaning solution suction device. The cleaning liquid suction device includes a suction head arrangement frame installed on the display substrate transfer table and a plurality of suction heads arranged on the suction head distribution frame, and each suction head is connected to a suction pump. The invention adopts the design of the suction head, which can timely absorb the cleaning solution after being rinsed by the developing solution washing device, so as to solve the phenomenon that the developing solution flushing equipment on the surface of the display substrate is unevenly rinsed by the existing developing solution cleaning device without a cleaning solution suction device .

Description

Cleaning solution suction device and developer solution rinsing equipment

technical field

The present invention relates to the field of display technology, in particular to a cleaning solution suction device that absorbs a cleaning solution mixed with a developer through a suction head to achieve uniform development of a display substrate, and a developer flushing device equipped with the cleaning solution suction device.

Background technique

Currently, in the manufacturing process of display substrates, there is a problem of uneven rinsing in the developer solution washing equipment, which will lead to the problem that the critical size of the local developed pattern of the display substrate is too large or too small, which does not meet the design requirements. In addition, due to the large flow rate of the rinsing liquid, the rinsing liquid will push the working developer to flow to the edge of the display substrate, which will increase the flow rate of the chemical solution at the edge of the display substrate, thereby enhancing the development effect of the edge, and will also cause the edge The key size of the area development pattern is uneven; this is because: the flushing device of the developer flushing device generally sprays clean water evenly toward the opposite direction of the display substrate to achieve the purpose of diluting and flushing the developer on the display substrate There are drawbacks in the above design, namely: in the actual factory production process, due to the existence of some unforeseen factors, the cleaning water sprayed by the flushing device will cause local uneven phenomena on the display substrate due to its sprayed speed and distance limitations , which will lead to changes in the critical dimensions of the developed graphics due to partial unwashed display substrates; in addition, during the development process of the display substrate, due to the spraying of cleaning water, the developer will be driven to the edge of the display substrate and flow out For the display substrate, during the flushing process, the overall flow rate of the developer at the edge of the display substrate is larger than that at the middle position, resulting in an enhanced development effect at the edge of the display substrate and uneven development of the entire display substrate.

Therefore, it is necessary to provide a cleaning liquid suction device and a developer washing device equipped with the cleaning liquid suction device to solve the above problems.

Contents of the invention

The technical problem to be solved by the present invention is to provide a cleaning solution suction device and a developer flushing device; the cleaning solution suction device sucks the cleaning solution mixed with the developer through a suction head to realize uniform development of the display substrate.

The purpose of the present invention is achieved by the following technical solutions: a cleaning liquid suction device, including a suction head arrangement rack installed on the display substrate transfer table and a plurality of suction heads arranged on the suction head arrangement rack, the The suction head is connected with a suction pump.

Further, the suction head is a partition formed by a plurality of horizontal plates and a plurality of vertical plates arranged at the lower end of the suction head arrangement rack.

Further, the horizontal plates are arranged perpendicular to the length direction of the display substrate transfer table, and the distance from each of the horizontal plates to the display substrate transfer table increases sequentially along the display substrate transfer direction.

Further, the suction head communicates with the suction pump through a suction pipeline; the suction pipeline includes a branch suction pipe for connecting the suction head and a branch suction pipe for connecting the suction pump and the branch suction pipe. Total straw.

Further, the overall suction pipe is provided with a total flow rate control valve for adjusting the suction force of the general suction pipe.

Further, the branch suction pipe is provided with a branch flow rate control valve for adjusting the suction force of the branch suction pipe.

Further, both the main channel flow rate control valve and the branch channel flow rate control valve are manually controlled butterfly valves or electronically controlled butterfly valves.

Further, it also includes a master control circuit for automatically controlling the suction force of the suction head, and the master control circuit is electrically connected to the master flow rate control valve and the branch flow rate control valve respectively.

Further, it also includes a pressure sensor for monitoring the suction force of the suction head in real time, and the pressure sensor is electrically connected with the master control circuit.

A developing solution rinsing device, comprising the cleaning solution suction device described in any one of the above, wherein the cleaning solution suction device is installed correspondingly to the display substrate delivery platform through the suction head arrangement frame.

Further, a rinsing device is further included, the rinsing device is arranged above the substrate conveying table, and the cleaning liquid suction device and the rinsing device are arranged in sequence along the conveying direction of the display substrate.

Compared with the prior art, the present invention has the following advantages:

1. The present invention adopts the design of the suction head, which can timely absorb the cleaning liquid rinsed by the developer flushing equipment, so as to solve the uneven flushing of the developer on the surface of the display substrate by the existing developer flushing equipment without the cleaning liquid suction device. The phenomenon of the phenomenon; through multiple suction heads to cooperate with the speed of the display substrate transfer table to transfer the display substrate, to achieve uniform absorption of the cleaning liquid on the surface of the display substrate; at the same time, it effectively inhibits the display of the cleaning water that is still developing and has not yet reached the rinse area In addition, during the development process of the display substrate, the suction head absorbs the cleaning solution, which can effectively avoid the total flow of the developer at the edge of the glass substrate caused by the ejection of cleaning water driving the developer to the edge of the display substrate and flowing out of the glass substrate. The flow rate at the middle position is larger, which increases the developing effect at the edge of the display substrate; thereby effectively ensuring the uniformity of the display substrate development.

2. The present invention adopts a relatively closed partition design, which can block each suction head, so as to avoid mutual influence between the cleaning liquid sucked by each suction head, thereby causing the problem of uneven suction; effectively ensuring that the cleaning liquid suction device Excellent absorption quality; objectively guarantees the developing effect of the display device.

3. The present invention adopts the design that the suction head includes multiple suction heads, which can weaken the phenomenon of local uneven suction of the cleaning liquid due to fluid compensation from the mutual influence between the suction heads to only occur in each suction head Influence, thereby ensuring the uniformity of the cleaning liquid suction device for the entire display substrate cleaning liquid absorption; thereby effectively ensuring the flushing effect of the developer flushing equipment for the display substrate.

4. The present invention adopts the design of the master control circuit, the pressure sensor and the electric control butterfly valve, which can realize the automatic monitoring of the cleaning liquid suction by the cleaning liquid suction device; ensure the suction accuracy, save labor, and simplify the suction process.

Description of drawings

The present invention will be further described below in conjunction with drawings and embodiments.

Fig. 1 is a schematic structural view (front view) of the cleaning liquid suction device described in Embodiment 1 of the present invention;

Fig. 2 is a schematic structural view (bottom view) of the suction head deployment rack described in Embodiment 1 of the present invention;

Fig. 3 is a schematic structural view (bottom view) of the suction head described in Embodiment 1 of the present invention;

Fig. 4 is a schematic structural view (sectional view) of the suction head described in Embodiment 1 of the present invention;

FIG. 5 is a schematic structural view (top view) of the display substrate transfer platform described in Embodiment 1 of the present invention;

Fig. 6 is a schematic diagram (block diagram) of circuit connection of the cleaning liquid suction device described in Embodiment 1 of the present invention;

Fig. 7 is a schematic structural view (front view) of the cleaning liquid suction device described in Embodiment 2 of the present invention;

Fig. 8 is a schematic structural view (bottom view) of the suction head described in Embodiment 2 of the present invention.

detailed description

Embodiment one:

Referring to Fig. 1 and Fig. 2, a cleaning solution suction device in this embodiment includes a suction head arrangement rack 2 installed on the display substrate transfer table 1 of the developer solution washing device and a suction head arrangement rack 2 arranged on the suction head distribution platform. Multiple suction heads 3 on the rack 2; multiple suction heads 3 are evenly arranged along the length direction of the suction head arrangement rack 2; the suction heads 3 are connected to a suction pump 4 through a suction pipeline. In this embodiment, the suction head arrangement rack 2 includes a mounting plate 5 erected horizontally on the display substrate transfer platform 1 for mounting the suction head 3 and mounting plates 5 mounted on both ends of the mounting plate 5 and connected to the display. Both ends of the substrate transfer platform 1 are connected to support plates 6 for horizontally supporting the mounting plate 5 ; in order to ensure the uniformity of suction, the suction heads 3 are closely adjacent to each other.

In this embodiment, the suction head 3 includes a suction port 7 and an interface 8 arranged on the suction port 7, and the suction port 7 communicates with the interface 8; The piercing hole (not shown in the figure) on the mounting plate 5 of the suction head deployment rack 2 corresponds to the piercing; the interface 8 and the piercing hole are arranged in a tight fit, so that the suction The head 3 is installed on the suction head arrangement rack 2; the cross-sectional shape of the suction port 7 can be a circular disk, a rectangular disk or a regular polygonal disk, and the design of a circular disk is adopted in this embodiment; the interface 8 Pass through the piercing hole and correspondingly connect with the suction pipeline to provide suction power for the suction head 3 . In this embodiment, the suction heads 3 are all distributed on the lower end of the mounting plate 5, and the interface 8 passes through the piercing hole correspondingly upwards, and communicates with the suction pipeline located above the mounting plate 5 . In this embodiment, the suction pump 4 provides suction power for the suction head 3 through the suction pipeline; the suction pump 4 can be a commonly used centrifugal pump, vacuum pump and the like.

Referring to Fig. 3, the suction head 3 in this embodiment is arranged in a partitioned manner; A partition 16 formed by a plurality of horizontal plates 14 and a plurality of vertical plates 15 arranged horizontally and vertically is formed. Wherein, preferably, each of the horizontal plates 14 is arranged along the length direction of the installation plate 5, and each of the horizontal plates 14 is arranged in parallel; each of the vertical plates 15 is arranged along the width direction of the installation plate 5, and each The risers 15 are arranged in parallel.

The present invention adopts the suction head design of the partition type, which can not only avoid the mutual influence between the cleaning liquids sucked by each suction head, thus causing the problem of uneven suction; but also ensure the close adjacency between the suction heads; thus effectively The suction quality of the cleaning liquid suction device is ensured to a great extent; the developing effect of the display device is guaranteed objectively; and the arrangement is simple in structure and cheap in cost.

Referring to FIG. 4 , in this embodiment, the horizontal plate 14 is arranged perpendicular to the length direction of the display substrate transfer table 1, and the distance from each of the horizontal plates 14 to the display substrate transfer table 1 is along the length of the display substrate transfer table 1. The conveying direction increases successively; that is to say, the heights of each of the horizontal plates 14 are arranged to decrease or increase in height according to the same height difference. Specifically, the height of the horizontal plates 14 means that the horizontal plates The distance between the bottom end of 14 and the bottom surface of the mounting plate 5 is illustrated by taking the four horizontal plates 14 set on the mounting plate 5 as an example. The height of the first horizontal plate 14 is higher than that of the second adjacent one. The difference between the heights of the horizontal plates 14 is a height difference, and in the same way, the difference between the height of the second horizontal plate 14 and the height of its adjacent third horizontal plate 14 is the height difference, and so on, the height difference between each adjacent two described horizontal plates 14 is equal; that is to say, the height difference of each described horizontal plate 14 is uniformly increasing or uniformly decreasing; correspondingly, the height difference of the vertical plate 15 The bottom end surface is set as an inclined surface adapted to the height of each horizontal plate 14 .

The present invention adopts the above-mentioned design mainly because the water level of the cleaning liquid will change when it is in different areas on the display substrate. Incremental settings can be used for corresponding suction according to different liquid levels of the cleaning liquid; the suction heads have different suction depths to ensure that the cleaning liquid suction device can better absorb the cleaning liquid; effectively ensure that the cleaning liquid suction device The absorption quality is excellent; the developing effect of the display device is guaranteed objectively; and the arrangement is simple in structure and cheap in cost.

The cleaning solution mentioned in the present invention refers to a mixed solution of the developer residue attached to the display substrate 9 for development and the cleaning water used for rinsing the developer, which are rinsed off by the rinse nozzle of the developer rinse device.

The invention adopts the design of the suction head, which can timely absorb the cleaning solution after being rinsed by the developing solution washing device, so as to solve the phenomenon that the developing solution flushing equipment on the surface of the display substrate is unevenly rinsed by the existing developing solution cleaning device not equipped with a cleaning solution suction device ;Use multiple suction heads to cooperate with the speed of the display substrate transfer table to transfer the display substrate to achieve uniform suction of the cleaning liquid on the surface of the display substrate; at the same time, it effectively prevents the cleaning water from being carried out on the display substrate that is still developing and has not yet reached the rinse area. Rinse; in addition, during the development process of the display substrate, the suction head absorbs the cleaning solution, which can effectively avoid the total flow rate of the developer at the edge of the glass substrate caused by the ejection of cleaning water driving the developing solution to the edge of the display substrate and flowing out of the glass substrate. The flow rate at the position is large, which increases the developing effect at the edge of the display substrate; thereby effectively ensuring the uniformity of the display substrate development.

In this embodiment, the suction head 3 communicates with the suction pump 4 through a suction pipeline; Total Road Straw11. In the present embodiment, each of the suction heads 3 is connected in parallel with the main suction pipe 11 through the branch suction pipe 10; thereby realizing the purpose of the suction pump 4 providing suction power to each of the suction heads 3; That is to say, through this parallel structure, each of the branch suction pipes can share the suction force transmitted from the main suction pipe 11 equally; so that the suction generated by each of the suction heads 3 on the cleaning liquid is equal.

In the present embodiment, when the number of the suction heads 3 is large, since many branch suction pipes 10 need to be connected correspondingly, a plurality of the suction heads 3 can be unitized; Several described suction heads 3 arranged sequentially along the width direction of the mounting plate 5 are set as a suction unit; including three suction heads 3 with each suction unit as an example; three of each suction unit can be Each of the suction heads 3 is respectively connected to a transition pipe (not shown in the figure) through the branch suction pipe 10; and then connected to the general suction pipe 11 through the transition pipe; that is to say, each of the suction units is One of the transition pipes is connected to one of the general suction pipes 11, and each of the suction units is connected in parallel. The design of the transition tube can ensure that the suction force transmitted to each of the suction heads 3 is more even; so that the cleaning liquid suction device absorbs the cleaning liquid on the display substrate 9 more delicately and evenly, so as to avoid the The suction force of the suction head 3 is relatively large or small, which causes uneven flushing of the developer on the display device on the display substrate 9; thus ensuring the uniformity of the overall developing effect of the display substrate 9 sex.

In this embodiment, the main road suction pipe 11 is provided with a general road flow rate control valve 12 for adjusting the suction force of the general road suction pipe; Control valve 13; a transition pipe flow rate control valve for controlling the diameter of the transition pipe to adjust its suction is also arranged on the transition pipe.

The suction pump 4 described in this embodiment is connected to a cleaning liquid collection tank (belonging to the prior art, not shown in the figure) through a liquid discharge pipe. The cleaning liquid collection box is used to collect the sucked cleaning liquid; Display), discharge the cleaning solution to the sewage treatment system; in this way, the cleaning solution will not cause secondary pollution to the display substrate in the relatively closed developing and rinsing area.

The design of the suction unit in the present invention is based on the principle of fluid mechanics; due to the irregularity of the flow of the cleaning liquid, the amount of cleaning liquid flowing to each suction head will be uneven; the following examples are used to illustrate: when each of the suction When there is only one suction head in the unit; when a certain suction head does not absorb the cleaning liquid, under the premise that the suction force of each suction head is balanced, since the fluid is compensatory, that is to say, the cleaning liquid will flow to the The suction heads that have not absorbed the cleaning liquid converge until the suction heads there absorb the cleaning liquid; during the process of the cleaning liquid convergence, the suction volume of the other suction heads will decrease relatively; This will lead to uneven absorption of the cleaning liquid by the cleaning liquid suction device; thus, the developing liquid in some parts of the display substrate will not be fully cleaned, which will cause uneven development of the display substrate, thus Change the critical dimension of the partial display of the display device. When each of the suction units has three suction heads; as long as one of the three suction heads does not absorb the cleaning liquid, the suction of each of the suction heads is balanced. In this case, the other two suction heads in the suction unit will also have reduced suction due to the compensation of the cleaning liquid; for the suction heads in each suction unit, due to the uniform Suction is provided through the same transition pipe, so that the suction of each of the suction heads is the same; when one of the suction heads in the suction unit cannot absorb water, the suction of the other suction heads will decrease, This is because the cleaning fluid weighs more than air, so the suction head sucks a lot of air. As a result, the suction head in each suction unit cannot normally absorb the cleaning liquid, and the cleaning liquid flows from a position with a high liquid level to a position with a low liquid level (corresponding to the suction head that cannot absorb water); until When the suction head at this place absorbs the cleaning liquid, the suction volume of the other two suction heads will tend to be normal; thus, the phenomenon of less cleaning liquid at one of the suction heads can be alleviated;

During the process of cleaning liquid converging, for the other two suction heads in the suction unit, the amount of suction is relatively reduced; No impact; therefore, the design of the suction unit can weaken the local uneven suction of the cleaning fluid due to the fluid compensation from the mutual influence between the suction units to the influence only in each suction unit, thereby The uniformity of the cleaning solution suction device for absorbing the cleaning solution on the entire display substrate is ensured; thereby effectively ensuring the flushing effect of the developer solution flushing device on the display substrate.

The overall flow rate control valve 12, the transition pipe flow control valve and the branch flow control valve 13 described in this embodiment can all adopt manual control butterfly valves; Tube diameter size to adjust its suction.

As shown in FIG. 6 , in this embodiment, the flow rate control valve 12 of the main channel, the flow rate control valve of the transition pipe and the flow rate control valve 13 of the branch circuit can all be electronically controlled butterfly valves. The flushing liquid suction device also includes a master control circuit for automatically controlling the suction force of the suction head 3, and the master control circuit is respectively connected with the master flow control valve 12, the transition pipe flow control valve and the branch flow rate through wires. The control valve 13 is electrically connected.

This embodiment also includes a pressure sensor for real-time monitoring of the suction force of each suction head 3 , the pressure sensor is set in the interface 8 of the suction head 3 , and the pressure sensor is electrically connected to the master control circuit through wires.

When the overall flow rate control valve 12, the transition pipe flow rate control valve and the branch flow rate control valve 13 are all set with electronically controlled butterfly valves, the pressure sensor in this embodiment monitors the suction in each of the ports in real time, and The suction value is sent back to the master control circuit, and the master control circuit compares the suction value with the preset target suction value and automatically writes a control command, which is sent to the flow rate control valve 12 of the main road and the flow rate control valve of the transition pipe. And the branch flow rate control valve 13, in order to control the suction in the main road suction pipe 11, the transition pipe and the branch suction pipe 10; to adjust the suction of the suction head 3, to ensure that the cleaning liquid suction device is effective The suction effect of the cleaning liquid; the design of the master control circuit, pressure sensor and electronically controlled butterfly valve can realize the automatic monitoring of the suction of the cleaning liquid by the cleaning liquid suction device; ensure the suction accuracy, save labor, and simplify the suction process.

The present invention also provides a developing solution flushing device, as shown in Figure 5 (the direction of the arrow in the figure is the direction in which the display substrate transfer platform transports the display substrate), the developing solution flushing device includes the above-mentioned cleaning solution suction device; the cleaning The liquid suction device is installed corresponding to the display substrate delivery platform 102 through the suction head arrangement frame 101 .

The developing solution rinsing device further includes a rinsing device 103, which is arranged above the substrate transfer table 102, and the cleaning solution suction device and the rinsing device 103 are arranged in sequence along the display substrate transfer direction.

With respect to FIG. 5 , along the direction of display substrate conveyance in this embodiment, a cleaning liquid absorbing device is first installed on the display substrate conveying platform 1, and then a rinse device 103 is installed. The cleaning liquid absorbing device and the setting The flushing device 103 for spraying cleaning water at the upper end of the display substrate transfer table 1 is correspondingly arranged; the direction in which the flushing device 103 sprays clean water is opposite to the direction in which the display substrate transfer table 1 transfers the display substrate ; In this area between the cleaning liquid suction device and the washing device 103, on the display substrate transfer table 1 is the actual developer cleaning area of the display substrate; in order to prevent too much cleaning liquid from passing through the The cleaning solution sucks the device and flows to the area containing the developing solution to be cleaned; effectively reducing the impact of the cleaning solution on the development uniformity and cleaning effect of the display substrate located in the area to be cleaned. The distance between the cleaning liquid suction device and the flushing device 103 in this embodiment can be freely adjusted according to actual parameters such as the spraying speed and spraying distance of the cleaning water by the flushing device; The device includes a long strip nozzle, which is provided with a rectangular water outlet horizontally arranged along the width direction of the display substrate transfer table; the cleaning water sprayed by the flushing device is evenly sprayed on the on the display substrate; the specific structure of the flushing device belongs to the prior art, and will not be repeated here.

Embodiment two:

The cleaning liquid suction device in this embodiment is an improvement on the basis of Embodiment 1. The technical content disclosed in Embodiment 1 will not be described repeatedly, and the content disclosed in Embodiment 1 also belongs to the content disclosed in this embodiment.

Referring to Fig. 7 and Fig. 8, the cleaning liquid suction device described in this embodiment includes a suction head arrangement frame 202 installed on the display substrate transfer platform 201 and a suction head arrangement frame 202 arranged on the suction head distribution frame 202. head 203, the suction head 203 is connected with a suction pump 204. The suction head 203 includes a strip suction nozzle 205 installed on the lower end of the mounting plate 207 and a plurality of interfaces 206 arranged on the strip suction nozzle 205, and the strip suction nozzle 205 communicates with each of the interfaces 206; The interface 206 is correspondingly mounted on the installation board 207 . In order to ensure the uniformity of suction, the interfaces 206 are closely adjacent to each other. The strip-shaped suction nozzle 205 in this embodiment is a strip-shaped through hole for sucking cleaning liquid; The piercing hole (not shown) on the mounting plate 207 is corresponding to the piercing; the interface 206 and the piercing hole are arranged in close fit, so that the suction head 203 is installed on the suction head cloth Put it on the rack 202; the interface 206 passes through the piercing hole and is correspondingly connected with the suction pipeline, so as to provide suction power for the suction head 203 . In this embodiment, the length direction of the strip-shaped through hole on the suction head 203 is adapted to the length direction of the mounting plate 207; and the length of the strip-shaped through hole is adapted to the width of the display substrate; the strip-shaped suction The nozzle communicates with the suction pipeline located above the mounting plate 207 through the interface 206 . In this embodiment, the suction pump 204 provides suction power for the suction head 203 through the suction pipeline; the suction pump 204 can be a commonly used centrifugal pump, vacuum pump and the like.

In this embodiment, the suction head 203 communicates with the suction pump 204 through a suction pipeline; Straw 209. In this embodiment, the suction head 203 communicates with the main road suction pipe 209 through a plurality of branch suction pipes 208, and each of the branch suction pipes 208 is connected in parallel; in this way, the suction pump 204 passes through a plurality of suction pipes respectively. The branch suction pipe 208 provides suction power to the suction head 203; that is to say, through this parallel structure, each branch suction pipe 208 can share the suction force transmitted from the total suction pipe 209; The suction force generated by the suction head 203 on the cleaning liquid is equal.

In this embodiment, when the number of branch suction pipes 208 is large, a plurality of branch suction pipes 208 can be arranged in units; specifically, several can be arranged sequentially along the width direction of the mounting plate 207 The branch suction pipes 208 of each suction unit are set as a suction unit; each suction unit includes three branch suction pipes 208 as an example; the three branch suction pipes 208 of each suction unit can be respectively It is connected with a transition pipe (not shown in the figure); and then connected with the general suction pipe 209 through the transition pipe; connection, each of the suction units is connected in parallel. The design of the transition tube can ensure that the suction force delivered to each of the branch suction pipes 208 is more uniform; so that the cleaning liquid suction device absorbs the cleaning liquid on the display substrate more delicately and evenly, so as to avoid the suction caused by a certain branch. The suction of the suction pipe 208 is relatively large or small, resulting in uneven flushing of the developer on the display device on the display substrate; thereby ensuring the uniformity of the overall developing effect of the display substrate.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention without limitation, although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention can be modified Or equivalent replacements without departing from the spirit and scope of the technical solution of the present invention, all of which should be covered by the claims of the present invention.

Claims (10)

1. A cleaning liquid suction device, characterized in that it comprises a suction head placement rack installed on the display substrate transfer table and a plurality of suction heads arranged on the suction head placement rack, the suction heads are connected with suction heads pump, the suction head is a partition formed by a plurality of horizontal plates and a plurality of vertical plates arranged at the lower end of the suction head arrangement rack. 2 . The cleaning liquid suction device according to claim 1 , wherein the horizontal plate is arranged perpendicular to the length direction of the display substrate transfer table, and the distance from each of the horizontal plates to the display substrate transfer table is along the The conveying direction of the display substrates increases sequentially. 3. The cleaning liquid suction device according to claim 1 or 2, wherein the suction head communicates with the suction pump through a suction pipeline; the suction pipeline includes a branch for connecting the suction head A road suction pipe and a total road suction pipe for connecting the suction pump and the branch suction pipe. 4 . The cleaning liquid suction device according to claim 3 , wherein a flow rate control valve for adjusting the suction force of the main suction pipe is provided on the main suction pipe. 5 . 5 . The cleaning liquid suction device according to claim 4 , wherein the branch suction pipe is provided with a branch flow velocity control valve for adjusting the suction force of the branch suction pipe. 6 . 6 . The cleaning fluid suction device according to claim 5 , wherein both the flow rate control valve of the main channel and the flow rate control valves of the branch channels are manually controlled butterfly valves or electronically controlled butterfly valves. 7 . 7. The cleaning liquid suction device according to any one of claims 5 or 6, further comprising a master control circuit for automatically controlling the suction force of the suction head, the master control circuit is connected with the main circuit respectively The flow rate control valve is electrically connected with the branch flow rate control valve. 8 . The cleaning liquid suction device according to claim 7 , further comprising a pressure sensor for real-time monitoring of the suction force of the suction head, and the pressure sensor is electrically connected to the master control circuit. 9. A developing solution washing device, characterized in that it comprises the cleaning solution suction device according to any one of claims 1-8, and the cleaning solution suction device is conveyed to the display substrate through the suction head arrangement frame corresponding installation. 10. The developing solution washing device according to claim 9, further comprising a washing device, the washing device is arranged above the substrate transfer table, and the washing liquid suction device and the washing device are displayed along the The substrate conveying directions are set sequentially.