CN103046137A - Sapphire crystal with high mechanical property and fabrication method thereof - Google Patents
Sapphire crystal with high mechanical property and fabrication method thereof Download PDFInfo
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- 239000013078 crystal Substances 0.000 title claims abstract description 180
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 90
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- 238000000034 method Methods 0.000 title claims abstract description 55
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- 229910052799 carbon Inorganic materials 0.000 claims abstract description 31
- 239000002994 raw material Substances 0.000 claims abstract description 24
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 13
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- 239000011733 molybdenum Substances 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 5
- -1 carbon ions Chemical class 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 4
- 238000011161 development Methods 0.000 description 3
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
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- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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Abstract
本发明涉及一种高强力学性能蓝宝石晶体及其制备方法。本发明的高强力学性能蓝宝石晶体为一种掺碳钛蓝宝石晶体,碳掺杂量为晶体总质量的1000~10000ppm,钛掺杂量为晶体总质量的500~3000ppm。本发明还公开了该晶体的制备方法,包括如下步骤:按配比将原料混料、研磨和成型工艺制得晶体生长原料,然后采用温梯法或下降法或泡生法技术生长。本发明的掺碳钛蓝宝石晶体具有更强的表面硬度,更高的断裂强度和断裂韧性,同时掺杂离子不会损害蓝宝石晶体的光学透过性能。
The invention relates to a sapphire crystal with high-strength mechanical properties and a preparation method thereof. The high-strength mechanical property sapphire crystal of the present invention is a carbon-doped titanium sapphire crystal, the carbon doping amount is 1000-10000 ppm of the total crystal mass, and the titanium doping amount is 500-3000 ppm of the total crystal mass. The invention also discloses a preparation method of the crystal, which includes the following steps: mixing raw materials according to the ratio, grinding and molding processes to obtain crystal growth raw materials, and then growing by temperature gradient method, descending method or kyropoulos method. The carbon-doped titanium sapphire crystal of the invention has stronger surface hardness, higher fracture strength and fracture toughness, and at the same time, doping ions will not damage the optical transmission performance of the sapphire crystal.
Description
技术领域 technical field
本发明涉及一种蓝宝石晶体,尤其涉及一种具有优良力学性能的蓝宝石晶体及其制备方法。 The invention relates to a sapphire crystal, in particular to a sapphire crystal with excellent mechanical properties and a preparation method thereof.
背景技术 Background technique
蓝宝石晶体因其宽波段高透过性能和相对优越的综合物化性能,使其在现代国防科学和民用技术应用领域中有着重要价值。在军用光电设备领域:用蓝宝石晶体做成的红外光学窗口和整流罩,已广泛用于机载、星载、舰载以及潜基、陆基光电设备,尤其在高马赫数导弹整流罩、透明装甲、潜艇窗口以及高功率强激光等军用设备中的地位和作用不可替代。在民用领域:蓝宝石晶体因具有宽波段透过性、高强度、耐高温、耐磨损、耐腐蚀,而可用作在各种高温、高压等恶劣环境下工作的设备或仪器的观察窗口和探测窗口,如:耐高温的热电偶及锅炉水位计,耐磨损的商品条码扫描仪窗口,耐高温和腐蚀的煤、气、油井探测用的传感器及探测器窗口等;但蓝宝石晶体同样也存在着本征缺陷,由于蓝宝石晶体是典型的共价键,具有明显的方向性,同号离子相遇,斥力极大;而且蓝宝石晶体属刚玉型结构,三方晶系R-3C对称,晶体结构复杂,其晶体内部没有滑移系统,在外界气动热的冲击下存在脆性断裂的缺点,这是蓝宝石晶体材料在实际应用中的一大弱点,限制了蓝宝石晶体在更广领域的应用和发展。并且在高温环境压应力作用下,蓝宝石晶体r面容易产生孪晶,在压应力下孪晶的松动,导致其弯曲强度出现迅速下降的缺点。 Sapphire crystal is of great value in modern defense science and civilian technology applications because of its wide-band high transmission performance and relatively superior comprehensive physical and chemical properties. In the field of military optoelectronic equipment: infrared optical windows and fairings made of sapphire crystals have been widely used in airborne, spaceborne, shipborne, submarine-based, and land-based optoelectronic equipment, especially in high Mach number missile fairings, transparent The status and role of military equipment such as armor, submarine windows, and high-power strong lasers are irreplaceable. In the civil field: Sapphire crystal can be used as the observation window and Detection windows, such as: high-temperature resistant thermocouples and boiler water level gauges, wear-resistant commodity barcode scanner windows, high-temperature and corrosion-resistant coal, gas, oil well detection sensors and detector windows, etc.; but sapphire crystals are also There are intrinsic defects. Since sapphire crystal is a typical covalent bond, it has obvious directionality. When ions of the same number meet, the repulsion force is extremely large; moreover, sapphire crystal has a corundum structure, and the trigonal crystal system is R-3C symmetrical, and the crystal structure is complex. , there is no slip system inside the crystal, and there is a shortcoming of brittle fracture under the impact of external aerodynamic heat. This is a major weakness of sapphire crystal materials in practical applications, which limits the application and development of sapphire crystals in wider fields. And under the action of compressive stress in high temperature environment, the r-face of sapphire crystal is prone to twins, and the loosening of twins under compressive stress leads to the disadvantage of a rapid decline in its bending strength.
综上所述,蓝宝石晶体力学性能的弱点已经制约了该晶体进一步在更广领域的应用和发展,因此,开发高强力学性能蓝宝石晶体已成为本领域技术人员亟需解决的问题。 To sum up, the weakness of the mechanical properties of sapphire crystals has restricted the further application and development of the crystals in wider fields. Therefore, the development of sapphire crystals with high mechanical properties has become an urgent problem to be solved by those skilled in the art.
基于蓝宝石晶体力学性能缺陷人们提出了多种解决方法,如在美国专利US5702654中,工艺要点是:将MgO粉末覆盖于蓝宝石上,并在大气或通氩气的环境下加热至一定温度(1500℃~1750℃)并保持一定时间,使Mg2+产生表面扩散,再将MgO粉末移去,改用第二种温度(1800℃~2000℃)保温一定时间后使表面的Mg2+均匀分布至整片晶体内,经过一段时间将Mg2+均匀化后的晶体急速退火至第三种温度(1200℃~1450℃),再以此温度进行退火或时效,以使析出硬化的第二相来强化蓝宝石。虽然该方法可以在一定程度上提高蓝宝石晶体的力学性能,但是仅仅通过表面改性的办法来达到强化的目的是不够的,而且Mg2+在约2000℃高温退火中很容易挥发,达不到预期的目的。而在美国专利US6222194B1中,采用的方法为:采用快中子辐照强化蓝宝石,快中子的能量大于0.1MeV,辐照注入量为1×1014~9×1019neutron/cm2。辐照过程中蓝宝石晶体由10B和Cd包裹,以除去热中子的影响。当经1×1018neutrons/cm2的快中子辐照后,由于快中子辐照阻碍了孪晶的形成,故晶体的c轴强度在600℃提高了3倍。该方法由于高昂的成本和设备无法满足大尺寸蓝宝石辐照条件,还无法开展规模的产业应用。基于上述背景,目前在提高蓝宝石晶体力学性能的技术上仍然存在明显的不足,难以达到工业生产所需的要求。 A variety of solutions have been proposed based on the mechanical properties of sapphire crystals. For example, in U.S. Patent No. 5,702,654, the key point of the process is to cover the sapphire with MgO powder and heat it to a certain temperature (1500°C) in the atmosphere or in an argon atmosphere. ~1750℃) and keep it for a certain period of time to make Mg 2+ diffuse on the surface, then remove the MgO powder and switch to the second temperature (1800℃~2000℃) for a certain period of time to make the Mg 2+ on the surface evenly distributed to In the whole crystal, after a period of time, the homogenized Mg 2+ crystal is rapidly annealed to the third temperature (1200°C~1450°C), and then annealed or aged at this temperature to precipitate the hardened second phase. Strengthened sapphire. Although this method can improve the mechanical properties of sapphire crystals to a certain extent, it is not enough to achieve the purpose of strengthening only through surface modification, and Mg 2+ is easy to volatilize during high-temperature annealing at about 2000 ° C, which cannot achieve intended purpose. In US Pat. No. 6,222,194B1, the method adopted is: sapphire is strengthened by fast neutron irradiation, the energy of the fast neutron is greater than 0.1 MeV, and the irradiation injection amount is 1×10 14 ~9×10 19 neutron/cm 2 . During the irradiation process, the sapphire crystal is wrapped by 10B and Cd to remove the influence of thermal neutrons. After being irradiated by fast neutrons of 1×10 18 neutrons/cm 2 , the c-axis strength of the crystal increases by 3 times at 600°C because the fast neutron radiation hinders the formation of twins. Due to the high cost and the inability of the equipment to meet the irradiation conditions of large-scale sapphire, this method cannot be used in large-scale industrial applications. Based on the above background, there are still obvious deficiencies in the technology for improving the mechanical properties of sapphire crystals, and it is difficult to meet the requirements for industrial production.
发明内容 Contents of the invention
本发明的目的是提供一种高强力学性能蓝宝石晶体及其制备方法。本发明所要解决的是目前蓝宝石晶体力学性能存在不足的问题。 The object of the present invention is to provide a sapphire crystal with high mechanical properties and a preparation method thereof. What the invention aims to solve is the problem of insufficient mechanical properties of the current sapphire crystal.
为了实现上述目的,本发明采用的技术方案如下: In order to achieve the above object, the technical scheme adopted in the present invention is as follows:
本发明第一个方面提供一种高强力学性能蓝宝石晶体,所述晶体为掺杂碳钛元素的蓝宝石晶体,其中,碳掺杂量为晶体总质量的1000~10000ppm,钛掺杂量为晶体总质量的500~3000ppm。 The first aspect of the present invention provides a sapphire crystal with high-strength mechanical properties. The crystal is a sapphire crystal doped with carbon and titanium elements, wherein the carbon doping amount is 1000-10000 ppm of the total crystal mass, and the titanium doping amount is 10000 ppm of the total crystal mass. 500~3000ppm of mass.
所述高强力学性能蓝宝石晶体优选为按照本发明第二个方面所述的方法制备。 The sapphire crystal with high mechanical properties is preferably prepared according to the method described in the second aspect of the present invention.
本发明第二个方面是提供一种制备高强力学性能蓝宝石晶体的方法,所述方法包括如下步骤: A second aspect of the present invention provides a method for preparing sapphire crystals with high mechanical properties, said method comprising the steps of:
步骤1,按照碳掺杂量为晶体总质量的1000~10000ppm、钛掺杂量为晶体总质量的500~3000ppm提供α-Al2O3基质原料、钛源和碳源;混料、研磨和成型工艺制得晶体生长原料;
步骤2,生长得到晶体。
其中,钛源优选为TiO2。 Among them, the titanium source is preferably TiO 2 .
其中,碳源优选为石墨碳。 Among them, the carbon source is preferably graphitic carbon.
本发明第二个方面所述的方法中,步骤1中所述成型工艺优选为冷等静压成型。
In the method described in the second aspect of the present invention, the forming process in
本发明第二个方面所述的方法中,步骤2中可以采用温梯法、或下降法、或泡生法生长技术制得晶体。
In the method described in the second aspect of the present invention, in
优选地,所述温梯法生长晶体的具体步骤为:在容器籽晶槽中放入籽晶,将晶体生长原料放入容器内;≤5×10-3Pa压力下,持续升温至2333~2363K,待晶体生长原料熔化后恒温1~3h至完全熔化后,然后以1~5K/h的速率降温生长晶体;生长结束后,取出的晶体再经过1873K~2073K温度的空气气氛退火48~72h后,降至室温。 Preferably, the specific steps of growing crystals by the temperature gradient method are: placing a seed crystal in the seed crystal tank of the container, putting the crystal growth raw material into the container; under a pressure of ≤5×10 -3 Pa, continuously raising the temperature to 2333~2363K, After the crystal growth raw material is melted, keep the temperature for 1~3h until it is completely melted, and then grow the crystal at a rate of 1~5K/h; Bring to room temperature.
所述容器优选为坩埚,更优选为钼坩埚、钨钼坩埚、钨坩埚,最优选为钼坩埚。 The container is preferably a crucible, more preferably a molybdenum crucible, a tungsten molybdenum crucible, a tungsten crucible, most preferably a molybdenum crucible.
所述籽晶优选为[11-20]方向的蓝宝石晶体。 The seed crystal is preferably a sapphire crystal in the [11-20] direction.
优选地,所述下降法生长晶体的具体步骤为:在容器籽晶槽中放入籽晶,将晶体生长原料放入容器内;≤5×10-3Pa压力下,持续升温至2333~2363K,待原料熔化后恒温3~5h完全熔化后,以0.3~1mm/h的速率下降容器生长晶体;生长结束后,取出的晶体再经过1873K~2073K温度的空气气氛退火48~72h后,降至室温。 Preferably, the specific steps of growing crystals by the descending method are: put the seed crystal in the seed crystal groove of the container, put the crystal growth raw material into the container; under the pressure of ≤5×10 -3 Pa, continuously raise the temperature to 2333~2363K After the raw material is melted and kept at a constant temperature for 3~5h and completely melted, the container is grown at a rate of 0.3~1mm/h to grow crystals; room temperature.
所述容器优选为坩埚,更优选为钼坩埚、钨钼坩埚、钨坩埚,最优选为钨钼坩埚。 The container is preferably a crucible, more preferably a molybdenum crucible, a tungsten molybdenum crucible, a tungsten crucible, most preferably a tungsten molybdenum crucible.
所述籽晶优选为[11-20]方向的蓝宝石晶体。 The seed crystal is preferably a sapphire crystal in the [11-20] direction.
优选地,上述下降法生长晶体的过程中,生长界面温度梯度优选为30~40K/cm。 Preferably, during the crystal growth process by the above-mentioned descending method, the temperature gradient at the growth interface is preferably 30-40K/cm.
优选的,所述泡生法生长晶体的具体步骤为:将晶体生长原料放入容器内,籽晶悬挂于容器正上端,密封;≤5×10-3Pa压力下,持续升温至2333~2383K,待原料完全熔化后恒温3~8h,降温至熔点附近并将籽晶缓慢下降,使之与容器内熔体液面接触,待籽晶端部与熔体完全熔接后进行缩颈引晶操作,然后以0.05~3mm/h提拉速度、0.1~1.5K/h的降温速度进行晶体放肩和等径生长。结晶结束后,以5~35K/h速率降至室温。取出的晶体再经过1873K~2073K温度的空气气氛退火48~72h。 Preferably, the specific steps of growing crystals by the Kyropoulos method are as follows: put the crystal growth raw materials into the container, hang the seed crystal on the upper end of the container, and seal it; under the pressure of ≤5×10 -3 Pa, continue to heat up to 2333~2383K After the raw material is completely melted, keep the temperature for 3~8 hours, cool down to the melting point and lower the seed crystal slowly to make it contact with the liquid surface of the melt in the container, and perform the necking seeding operation after the end of the seed crystal is completely welded with the melt , and then carry out crystal shouldering and equal diameter growth at a pulling speed of 0.05~3mm/h and a cooling speed of 0.1~1.5K/h. After the crystallization is completed, the temperature is lowered to room temperature at a rate of 5-35K/h. The crystals taken out are then annealed in an air atmosphere at a temperature of 1873K~2073K for 48~72h.
所述容器优选为坩埚,更优选为钼坩埚、钨钼坩埚、钨坩埚,最优选为钨坩埚。 The container is preferably a crucible, more preferably a molybdenum crucible, a tungsten molybdenum crucible, a tungsten crucible, most preferably a tungsten crucible.
所述籽晶优选为[11-20]方向的蓝宝石晶体。 The seed crystal is preferably a sapphire crystal in the [11-20] direction.
本发明提供了一种高强力学性能蓝宝石晶体,该晶体在蓝宝石(sapphire)晶体中掺杂一定质量分数的高纯石墨碳和二氧化钛,采用温梯法或下降法或泡生法技术生长得到掺杂碳钛元素的蓝宝石(C,Ti:sapphire)晶体。通过碳离子进入晶格间隙形成间隙碳离子,间隙离子对蓝宝石单晶的开裂具有钉扎作用,提高了晶体的断裂表面能,达到常温下强韧化蓝宝石单晶的效果,同时,掺杂的四价钛离子固溶进入基质三价铝离子格位,形成不等价和不等径取代作用,导致晶格缺陷和晶格畸变而形成新的应力场,提高了蓝宝石晶体的弹性模量和断裂表面能,对蓝宝石晶体起到了强化机制。与普通蓝宝石晶体相比,本发明的C,Ti:sapphire晶体具有显著更高更强的表面硬度、断裂强度和断裂韧性,并且掺杂的碳钛离子不损害蓝宝石晶体的透过性能,为蓝宝石晶体作为窗口材料或者衬底材料提供了更广的空间。 The invention provides a sapphire crystal with high mechanical properties. The crystal is doped with a certain mass fraction of high-purity graphite carbon and titanium dioxide in the sapphire crystal, and the doped carbon-titanium is grown by the temperature gradient method, the descending method or the Kyropoulos method. Elemental sapphire (C,Ti:sapphire) crystal. Interstitial carbon ions are formed by carbon ions entering the lattice gap. The interstitial ions have a pinning effect on the cracking of the sapphire single crystal, which improves the fracture surface energy of the crystal and achieves the effect of strengthening and toughening the sapphire single crystal at room temperature. At the same time, the doped Tetravalent titanium ions enter the trivalent aluminum ion sites of the matrix in solid solution, forming unequal and unequal diameter substitutions, resulting in lattice defects and lattice distortions to form a new stress field, improving the elastic modulus and sapphire crystal. Fracture surface energy acts as a strengthening mechanism for the sapphire crystal. Compared with ordinary sapphire crystals, the C,Ti:sapphire crystals of the present invention have significantly higher and stronger surface hardness, fracture strength and fracture toughness, and the doped carbon-titanium ions do not damage the transmission performance of sapphire crystals. Crystal provides a wider space as a window material or substrate material.
附图说明 Description of drawings
图1实施例1中制得的C,Ti:sapphire晶体的表面硬度;
The C obtained in Fig. 1
图2实施例1中制得的C,Ti:sapphire晶体的断裂强度;
The C obtained in Fig. 2
图3实施例1中制得的C,Ti:sapphire晶体的断裂韧性;
C obtained in Fig. 3
图4实施例1中制得的C,Ti:sapphire晶体的吸收光谱曲线。 The absorption spectrum curve of the C,Ti:sapphire crystal prepared in Example 1 in FIG. 4 .
具体实施方式 Detailed ways
本发明提供了一种高强力学性能的掺杂碳钛的蓝宝石晶体,以Al2O3为基质材料,碳掺杂量为1000~10000ppm,钛掺杂量为500~3000ppm。常温下其表面硬度达到1900~2200Kg/mm2,断裂强度达到600~800MPa,断裂韧性达到2.6~3.0MPa·m1/2。 The invention provides a carbon-titanium-doped sapphire crystal with high mechanical properties, which uses Al 2 O 3 as a matrix material, the carbon doping amount is 1000-10000ppm, and the titanium doping amount is 500-3000ppm. At room temperature, its surface hardness reaches 1900~2200Kg/mm 2 , its fracture strength reaches 600~800MPa, and its fracture toughness reaches 2.6~3.0MPa · m 1/2 .
下面结合实施例进一步阐述本发明。应理解,这些实施例仅用于说明本发明,而非限制本发明的范围。 The present invention is further set forth below in conjunction with embodiment. It should be understood that these examples are only used to illustrate the present invention, not to limit the scope of the present invention.
实施例1:温梯法生长掺杂量为5000ppm石墨碳和1000ppmTiOEmbodiment 1: temperature gradient method growth doping amount is 5000ppm graphitic carbon and 1000ppmTiO 22 的C,Ti:sapphire晶体C,Ti:sapphire crystals
分别称取纯度为99.999%的α-Al2O3原料3Kg,1000ppm的光谱纯TiO2(即3g),以及5000ppm光谱纯石墨碳(即15g),在行星球磨机上混合研磨24h,取出后冷干压成型为块料备用。 Weigh 3Kg of α-Al 2 O 3 raw materials with a purity of 99.999%, 1000ppm spectroscopically pure TiO 2 (ie 3g), and 5000ppm spectroscopically pure graphite carbon (ie 15g), mix and grind them on a planetary ball mill for 24 hours, take them out and cool them Dry pressing is formed into blocks for later use.
采用温梯法生长C,Ti:sapphire晶体,具体步骤为:选用a向[11-20]纯蓝宝石做籽晶,在钼坩埚籽晶槽中放入纯蓝宝石籽晶,将压制好的块料均匀的放入坩埚内,盖上坩埚盖,装炉。抽真空至炉压<5×10-3Pa,持续升温至2333K,待原料熔化后恒温3h,熔体完全熔化并稳定后,以1K/h的速率降温熔体由籽晶处开始缓慢结晶,直到熔体完全结晶为止,以40K/h的速率降温至室温取出晶体,取出的晶体再经过1973K空气气氛退火60h,再以35K/h的速率降温至室温,即制得C,Ti:sapphire晶体。 The temperature gradient method is used to grow C, Ti: sapphire crystals. The specific steps are: select a-oriented [11-20] pure sapphire as the seed crystal, put the pure sapphire seed crystal in the molybdenum crucible seed crystal tank, and uniformly press the block material Put it into the crucible, cover the crucible lid, and install the furnace. Vacuum until the furnace pressure is <5×10 -3 Pa, continue to heat up to 2333K, keep the temperature for 3 hours after the raw material is melted, and after the melt is completely melted and stabilized, cool down at a rate of 1K/h and the melt starts to slowly crystallize from the seed crystal. Until the melt is completely crystallized, cool down to room temperature at a rate of 40K/h and take out the crystal, and then anneal in an air atmosphere at 1973K for 60 hours, and then cool down to room temperature at a rate of 35K/h to obtain C,Ti:sapphire crystal .
生长得到的C,Ti:sapphire晶体完整,无明显包裹物和气泡的出现,晶体略显微红色,沿着基面[0001]分别切割成片状和条状晶体,对抛光后样品的常温表面硬度、断裂强度和断裂韧性做了测量。 The grown C,Ti:sapphire crystals are complete, without obvious inclusions and bubbles, and the crystals are slightly reddish. They are cut into flakes and strips along the basal plane [0001], respectively. The room temperature surface of the polished sample Hardness, fracture strength and fracture toughness were measured.
图1是本实施例中制得的C,Ti:sapphire晶体的常温c面表面硬度测试结果。与纯蓝宝石的平均表面硬度1701 Kg/mm2相比,C,Ti:sapphire晶体的平均表面硬度明显提高,达到2031Kg/mm2。图2和图3是C,Ti:sapphire晶体在常温下的断裂强度和断裂韧性测试结果,样品测量尺寸标准为4mm×36mm(C面)×3mm,结果表明掺杂1000ppmTiO2和5000ppm石墨碳的蓝宝石其断裂强度有较大提高,而断裂韧性也显著优化。纯sapphire晶体的常温断裂强度测量值平均为492Mpa,掺杂C,Ti:sapphire晶体断裂强度值平均达到703MPa,而断裂韧性则由纯sapphire的平均1.81Mpa·m1/2优化到平均2.77 MPa·m1/2。同时掺杂离子不会损害蓝宝石晶体的光学透过性能,图4为本实施例中制得的C,Ti:sapphire晶体的可见-近红外光谱的透过光谱图,其在可见-近红外光谱的透过率达到80%。本实施例制备的C,Ti:sapphire晶体具有高强力学性能特征,同时保证了晶体的优良光谱透过性能,在窗口材料领域和衬底材料领域具有广泛的应用前景。 Fig. 1 is the test result of the surface hardness of the C,Ti:sapphire crystal at room temperature on the c-plane prepared in this example. Compared with the average surface hardness of pure sapphire, which is 1701 Kg/mm 2 , the average surface hardness of C,Ti:sapphire crystal is significantly improved, reaching 2031Kg/mm 2 . Figure 2 and Figure 3 are the test results of fracture strength and fracture toughness of C, Ti: sapphire crystal at room temperature. The sample measurement standard is 4mm×36mm (C surface)×3mm. The fracture strength of sapphire has been greatly improved, and the fracture toughness has also been significantly optimized. The average temperature fracture strength of pure sapphire crystals is 492Mpa, and the average fracture strength of doped C, Ti: sapphire crystals reaches 703MPa, while the fracture toughness is optimized from the average 1.81Mpa m 1/2 of pure sapphire to an average of 2.77 MPa m 1/2 . Simultaneous doping ion can not damage the optical transmittance property of sapphire crystal, Fig. 4 is the visible-near-infrared spectrum of the visible-near-infrared spectrum of the C that makes in the present embodiment, Ti:sapphire crystal, and it is in visible-near-infrared spectrum The transmittance reaches 80%. The C,Ti:sapphire crystal prepared in this embodiment has high-strength mechanical properties, and at the same time ensures the excellent spectral transmission performance of the crystal, and has broad application prospects in the field of window materials and substrate materials.
实施例2:温梯法生长掺杂量为1000ppm石墨碳和500ppmTiOEmbodiment 2: temperature gradient method growth doping amount is 1000ppm graphitic carbon and 500ppmTiO 22 的C,Ti:sapphire晶体C,Ti:sapphire crystals
除了添加的掺杂石墨碳为1000ppm(即3g),和掺杂TiO2为500ppm(即1.5g)以外,其他配料同实施例1,在行星球磨机上混合研磨24h,取出后冷干压成型为块料备用。 Except that the added doped graphite carbon is 1000ppm (ie 3g), and the doped TiO 2 is 500ppm (ie 1.5g), other ingredients are the same as in Example 1, mixed and ground on a planetary ball mill for 24h, taken out and then cold-dried and pressed into Block material spare.
采用温梯法生长C,Ti:sapphire晶体,具体步骤为:选用a向[11-20]纯蓝宝石做籽晶,在钼坩埚的籽晶槽中放入蓝宝石籽晶,将压制好的块料均匀的放入坩埚内,盖上坩埚盖,装炉。抽真空至炉压<5×10-3Pa,持续升温至2363K,待原料熔化后恒温1h,熔体完全熔化并稳定后,以1.5K/h的速率降温熔体由籽晶处开始缓慢结晶,直到熔体完全结晶为止,以35K/h的速率降温至室温取出晶体,取出的晶体再经过1873K空气气氛退火48h,再以40K/h的速率降温至室温,即制得C,Ti:sapphire晶体。 The temperature gradient method is used to grow C, Ti: sapphire crystals. The specific steps are: select a-oriented [11-20] pure sapphire as the seed crystal, put the sapphire seed crystal in the seed crystal groove of the molybdenum crucible, and uniformly press the block material Put it into the crucible, cover the crucible lid, and install the furnace. Vacuumize to furnace pressure <5×10 -3 Pa, continue to heat up to 2363K, keep the temperature for 1 hour after the raw material is melted, and after the melt is completely melted and stabilized, cool down at a rate of 1.5K/h and the melt starts to slowly crystallize from the seed crystal , until the melt is completely crystallized, the crystal is cooled to room temperature at a rate of 35K/h to take out the crystal, and the taken out crystal is annealed in an air atmosphere at 1873K for 48 hours, and then cooled to room temperature at a rate of 40K/h, that is, the C,Ti:sapphire crystals.
实施例3:温梯法生长掺杂量为10000ppm石墨碳和3000ppmTiOEmbodiment 3: temperature gradient method growth doping amount is 10000ppm graphitic carbon and 3000ppmTiO 22 的C,Ti:sapphire晶体C,Ti:sapphire crystals
除了添加的掺杂石墨碳为10000ppm(即30g),和掺杂TiO2为3000ppm(即9g)以外,其他配料同实施例1,在行星球磨机上混合研磨24h,取出后冷干压成型为块料备用。 Except that the added doped graphite carbon is 10000ppm (ie 30g), and the doped TiO 2 is 3000ppm (ie 9g), other ingredients are the same as in Example 1, mixed and ground on a planetary ball mill for 24h, taken out and then cold-dried and pressed into blocks Material spare.
采用温梯法生长C,Ti:sapphire晶体,具体步骤为:选用a向[11-20]纯蓝宝石做籽晶,在钼坩埚的籽晶槽中放入Sapphire籽晶,将压制好的块料均匀的放入坩埚内,盖上坩埚盖,装炉。抽真空至炉压<5×10-3Pa,持续升温至2348K,待原料熔化后恒温2h,熔体完全熔化并稳定后,以2K/h的速率降温熔体由籽晶处开始缓慢结晶,直到熔体完全结晶为止,以45K/h的速率降温至室温取出晶体,取出的晶体再经过2073K空气气氛退火72h,再以38K/h的速率降温至室温,即制得C,Ti:sapphire晶体。 C, Ti: sapphire crystals are grown by the temperature gradient method. The specific steps are: select a-oriented [11-20] pure sapphire as the seed crystal, put the Sapphire seed crystal in the seed crystal tank of the molybdenum crucible, and uniformly press the block material Put it into the crucible, cover the crucible lid, and install the furnace. Vacuumize to furnace pressure <5×10 -3 Pa, continue to heat up to 2348K, keep the temperature for 2 hours after the raw material is melted, and after the melt is completely melted and stabilized, cool down at a rate of 2K/h and the melt starts to slowly crystallize from the seed crystal. Until the melt is completely crystallized, the crystal is cooled to room temperature at a rate of 45K/h to take out the crystal, and the taken out crystal is annealed in an air atmosphere at 2073K for 72 hours, and then cooled to room temperature at a rate of 38K/h to obtain C,Ti:sapphire crystal .
实施例4:下降法生长掺杂量为5000ppm石墨碳和1000ppmTiOEmbodiment 4: Down method growth doping amount is 5000ppm graphitic carbon and 1000ppmTiO 22 的C,Ti:sapphire晶体C,Ti:sapphire crystals
分别称取纯度为99.999%α-Al2O310Kg,5000ppm光谱纯石墨碳(即50g),以及1000ppm的光谱纯TiO2(即10g),在行星球磨机上混合研磨24h,取出后冷干压成型为块料备用。 Weigh 10Kg of α-Al 2 O 3 with a purity of 99.999%, 5000ppm spectroscopically pure graphite carbon (ie 50g), and 1000ppm spectroscopically pure TiO 2 (ie 10g), mix and grind them on a planetary ball mill for 24 hours, take them out and dry press them Molded into blocks for later use.
采用下降法生长C,Ti:sapphire晶体,具体步骤为:将混合好的晶体生长原料放入坩埚内,盖上坩埚盖,装炉,抽真空至炉压<5×10-3Pa,持续升温至2353K,待原料熔化后恒温4h,熔体完全熔化并稳定后,保持生长界面温度梯度为35K/cm,然后以0.6mm/h的速率下降坩埚开始结晶生长,直到熔体完全结晶为止,以35K/h的速率降温至室温取出晶体,取出的晶体再经过1973K空气气氛退火60h,再以35K/h的速率降温至室温,即制得C,Ti:sapphire晶体。 C, Ti: sapphire crystals are grown by the descending method. The specific steps are as follows: put the mixed crystal growth materials into the crucible, cover the crucible lid, install the furnace, evacuate until the furnace pressure is <5×10 -3 Pa, and continue to heat up To 2353K, after the raw material is melted, keep the temperature for 4h, after the melt is completely melted and stabilized, keep the temperature gradient of the growth interface at 35K/cm, then lower the crucible at a rate of 0.6mm/h and start to crystallize until the melt is completely crystallized. The temperature was lowered to room temperature at a rate of 35K/h to take out the crystal, and the taken out crystal was annealed in an air atmosphere at 1973K for 60 hours, and then cooled to room temperature at a rate of 35K/h to obtain a C,Ti:sapphire crystal.
实施例5:泡生法生长掺杂量为5000ppm石墨碳和1000ppmTiOEmbodiment 5: Kyropoulos growth doping amount is 5000ppm graphitic carbon and 1000ppmTiO 22 的C,Ti:sapphire晶体C,Ti:sapphire crystals
分别称取纯度为99.999%α-Al2O3 30Kg, 5000ppm光谱纯石墨碳(即150g),以及1000ppm的光谱纯TiO2(即30g),在行星球磨机上混合研磨24h,取出后冷干压成型为块料备用。 Weigh 30Kg of α-Al 2 O 3 with a purity of 99.999%, 5000ppm spectroscopically pure graphite carbon (ie 150g), and 1000ppm spectroscopically pure TiO 2 (ie 30g), mix and grind them on a planetary ball mill for 24 hours, take them out and dry press them Molded into blocks for later use.
采用泡生法生长C,Ti:sapphire晶体,具体步骤为:将晶体生长原料放入钨坩埚内,将坩埚装入炉膛中,[11-20]方向的Al2O3籽晶固定于籽晶夹头而置于坩埚正上方,盖好炉盖并密封。抽真空至炉压低于5×10-3Pa,持续升温至2373K,待原料完全熔化后恒温5h,逐步降温至熔点附近,然后将籽晶缓慢下降使之与熔体液面接触,注意观察籽晶端部的融化,待籽晶端部与熔体完全熔接后进行缩颈引晶操作,然后以0.1~0.3mm/h提拉速度、0.6~1K/h的降温速度进行晶体放肩和等径生长。生长结束后,以20K/h速率降至室温取出晶体,取出的晶体再经过2000K空气气氛退火72h,再以30K/h的速率降温至室温,即制得C,Ti:sapphire晶体。 The C,Ti:sapphire crystal is grown by the Kyropoulos method, and the specific steps are as follows: put the crystal growth raw material into a tungsten crucible, put the crucible into the furnace, and fix the Al 2 O 3 seed crystal in the [11-20] direction on the seed crystal Put the collet directly above the crucible, cover the furnace cover and seal it. Vacuum until the furnace pressure is lower than 5×10 -3 Pa, continue to heat up to 2373K, keep the temperature for 5 hours after the raw materials are completely melted, and gradually cool down to near the melting point, then slowly lower the seed crystal to make it contact with the melt surface, pay attention to observe the temperature of the seed crystal The melting of the crystal end, after the end of the seed crystal is completely welded to the melt, the necking seeding operation is performed, and then the crystal is shouldered and so on at a pulling speed of 0.1~0.3mm/h and a cooling speed of 0.6~1K/h. diameter growth. After the growth, the crystal was taken out at a rate of 20K/h down to room temperature, and the taken out crystal was annealed in an air atmosphere of 2000K for 72h, and then cooled down to room temperature at a rate of 30K/h to obtain a C,Ti:sapphire crystal.
以上对本发明的具体实施例进行了详细描述,但其只是作为范例,本发明并不限制于以上描述的具体实施例。对于本领域技术人员而言,任何对本发明进行的等同修改和替代也都在本发明的范畴之中。因此,在不脱离本发明的精神和范围下所作的均等变换和修改,都应涵盖在本发明的范围内。 The specific embodiments of the present invention have been described in detail above, but they are only examples, and the present invention is not limited to the specific embodiments described above. For those skilled in the art, any equivalent modifications and substitutions to the present invention are also within the scope of the present invention. Therefore, equivalent changes and modifications made without departing from the spirit and scope of the present invention shall fall within the scope of the present invention.
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| CN107937983A (en) * | 2018-01-04 | 2018-04-20 | 河北工业大学 | A kind of sapphire material of multicomponent doping and its preparation method and application |
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