CN102768348A - System for automatically testing service life of probe - Google Patents

Abstract

The invention discloses an automatic probe life testing system, which includes a force sensor, a probe, a probe clamp, a probe electrode lead wire, an up and down movement device, a four-wire tester and automatic storage of test data and real-time data The data processing system for analysis is characterized in that: the probe clamp is installed on the moving end of the up and down movement device, the probe is installed below the probe clamp, and the probe clamp is installed above the probe clamp. The circuit board from which the electrode of the needle is drawn, the circuit board is connected to the input end of the four-wire tester through the electrode lead wire of the probe, the force sensor is fixed directly below the probe, and the force sensor is fixed directly below the probe. The sensor is connected to the data processing system through wires, and the output terminal of the four-wire tester is connected to the data processing system. The invention has the advantages of simple structure, accurate test data and automatic evaluation of the service life of the probe.

Description

A Probe Life Automatic Test System

technical field

The invention relates to an automatic test system for probe life. the

Background technique

After each integrated circuit (IC) is packaged, the performance of the product needs to be tested. IC testing is juxtaposed with IC design, IC manufacturing and IC packaging, forming the four pillars of the IC industry. The characteristic of the cost development of the semiconductor industry is that its unit function manufacturing cost decreases by an average of 25% to 30% per year, while the test cost increases by an average of 10.5% per year. Use a microprobe (needle diameter 50-500 microns) to contact the bump of the IC chip, input voltage/current signals to the chip, and obtain the electrical signal of the IC chip from the microprobe, so as to analyze whether the electrical performance of the IC chip meets the requirements IC product requirements, this micro-probe test method has become one of the important ways to test the electrical performance of IC products. the

However, the microprobe contacts the IC during the test process, and the contact pressure is related to the measured electrical signal value. The test probes of a large number of IC products contact the needle, the internal spring of the probe, the wear of the needle and the needle tube, etc. lead to probe failure, so the manufactured microprobe needs to be evaluated for its performance and lifetime. Therefore, it is necessary to develop an automatic test system for microprobe performance and life to meet the requirements of microprobe product evaluation. the

Contents of the invention

The technical problem to be solved by the present invention is to provide an automatic probe life testing system with simple structure, accurate test data, and automatic evaluation of probe service life. the

An automatic test system for probe life, including force sensors, probes, probe fixtures, probe electrode leads, up and down movement devices, four-wire testers, and data processing for automatic storage of test data and real-time data analysis system, the moving end of the up and down movement device is equipped with the probe clamp, the probe is installed below the probe clamp, and the circuit board for leading the electrodes of the probe is installed above the probe clamp, The circuit board is connected to the input terminal of the four-wire tester through the electrode lead wire of the probe, the force sensor is fixed directly below the probe, and the force sensor is connected to the data processing device through wires. System connection, the output end of the four-wire tester is connected to the data processing system. the

In the present invention, the touch force sensor is a high frequency response touch force sensor. the

In the present invention, a motion controller for realizing precise positioning of the up and down movement device is installed on the up and down movement device. the

In the present invention, the probe can be single or multiple probes. the

Owing to adopting said scheme, the present invention has following advantage:

1. The up and down movement device is used to simulate the cyclic contact of the probe with the integrated circuit IC during the test, and then the data of the force sensor and the probe is fed back to the data processing system, so as to realize the automatic evaluation of the service life of the probe. the

2. The up and down movement device realizes precise positioning and up and down movement through the motion controller, making the test data more accurate. the

3. Simultaneously collect the contact resistance and contact pressure of the probe to obtain the internal relationship between the two, and provide guidance for the rational use of the probe. the

4. Through the number of probes installed on the probe fixture, single or multiple probes can be tested at the same time. the

Description of drawings

Fig. 1 is a structural representation of the present invention;

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. the

As shown in Figure 1: An automatic test system for probe life, as shown in Figure 1, the high-frequency response force sensor 1 is placed on the platform, and the single or multiple probes 2 to be tested are loaded into the Probe holder 3, according to the size of probe 2, its diameter is generally 50-300 microns, and the probe holder 3 of fixed probe 2 can be fixed in one probe holder 3 simultaneously with one or more probes 2, to satisfy Simultaneous measurement of a single probe and multiple probes requires that the electrodes of the probe 2 be drawn out through the circuit board 10 fixed on the probe holder 3, and then through the probe electrode lead wire 4 and the four wires connected to the circuit board 10 The four-wire tester 8 is connected to the contact resistance of the probe 2 through the four-wire tester 8. The probe fixture 3 is fixed on the moving guide rail 5. The up and down movement device 5 realizes the up and down movement through the motion controller 6 and the motor drive power supply 7. , use the servo motor to manually obtain the precise position of the probe through the software program and the motion controller 6 and record the coordinates, and then send it to the limit coordinates in the automatic movement mode, so as to accurately realize the positioning and reciprocating movement of the probe, and move the guide rail 5 The downward movement makes the probe 2 touch the high-frequency response force sensor 1, and the high-frequency response force sensor 1 is touched by the probe 2 cycle, and the high-frequency response force sensor 1 obtains the real-time pressure signal of the probe contact process through the acquisition card , and connect the computer 9 with the data line of the four-wire tester 8 to obtain the contact resistance data of the four-wire tester 8 . A data processing system is installed in the computer 9, and the data processing system realizes an automatic cycle test for the entire test process, and automatically saves and analyzes the test data in real time, and evaluates the cycle life and resistance/pressure performance of the probe. the

Claims (4)

1. An automatic test system for the life of a probe, including a force sensor, a probe, a probe fixture, a probe electrode lead wire, an up and down movement device, a four-wire tester, and a device for automatically saving and real-time data analysis of test data The data processing system is characterized in that: the probe clamp is installed on the moving end of the up and down movement device, the probe is installed below the probe clamp, and the probe clamp is installed above the probe clamp. The circuit board from which the electrodes are drawn, the circuit board is connected to the input end of the four-wire tester through the electrode lead wire of the probe, the force sensor is fixed directly below the probe, and the force sensor passes through The wire is connected to the data processing system, and the output end of the four-wire tester is connected to the data processing system. 2 . The probe life automatic testing system according to claim 1 , wherein the force sensor is a high-frequency force force sensor. 3 . 3. The probe life automatic testing system according to claim 2, characterized in that: said up and down moving device is equipped with a motion controller for realizing precise positioning of said up and down moving device. 4. The probe life automatic testing system according to any one of claims 1 to 3, characterized in that: the probes can be single or multiple probes.

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