CN102666055B - Performance Evaluation Method of Organic Release Agent, Method of Manufacturing Mold, and Method of Manufacturing Transparent Film with Fine Concave-Convex Structure on Surface - Google Patents
Performance Evaluation Method of Organic Release Agent, Method of Manufacturing Mold, and Method of Manufacturing Transparent Film with Fine Concave-Convex Structure on Surface Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
- B29C59/046—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts for layered or coated substantially flat surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/565—Consisting of shell-like structures supported by backing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/60—Releasing, lubricating or separating agents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C37/0067—Using separating agents during or after moulding; Applying separating agents on preforms or articles, e.g. to prevent sticking to each other
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/045—Anodisation of aluminium or alloys based thereon for forming AAO templates
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/24—Chemical after-treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
- B29C33/424—Moulding surfaces provided with means for marking or patterning
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Abstract
本发明涉及具有下述工序(I)~(III)的模具的制造方法:(I)制作表面形成了微细凹凸结构的模具主体的工序;(II)按照有机系脱模剂的性能评价方法评价有机系脱模剂的性能的工序;以及(III)用通过上述工序(II)判定为性能良好的有机系脱模剂处理上述工序(I)中制作的模具主体的表面的工序;其中,所述有机系脱模剂的性能评价方法为:将有机系脱模剂与试验用有机溶剂混合,通过有机系脱模剂在试验用有机溶剂中的溶解性好坏来判定有机系脱模剂的性能好坏的方法。
The present invention relates to a method for manufacturing a mold comprising the following steps (I) to (III): (I) a step of preparing a mold body having a fine concavo-convex structure formed on its surface; (II) a step of evaluating the performance of an organic release agent according to a method for evaluating the performance of an organic release agent; and (III) a step of treating the surface of the mold body prepared in the above step (I) with the organic release agent judged to have good performance in the above step (II); wherein the method for evaluating the performance of the organic release agent comprises mixing the organic release agent with a test organic solvent and judging the performance of the organic release agent by the solubility of the organic release agent in the test organic solvent.
Description
技术领域 technical field
本发明涉及有机系脱模剂的性能评价方法、模具的制造方法和表面具有微细凹凸结构的透明薄膜的制造方法。The present invention relates to a method for evaluating the performance of an organic mold release agent, a method for manufacturing a mold, and a method for manufacturing a transparent film having a fine concave-convex structure on the surface.
本申请要求基于2009年12月24日在日本提出的特愿2009-291775号的优先权,其内容在此处引用。this application claims priority based on Japanese Patent Application No. 2009-291775 for which it applied to Japan on December 24, 2009, The content is used here.
背景技术 Background technique
近年来,已知的是,表面具有可见光波长以下的周期的微细凹凸结构的物品表现了防反射效果、荷叶效应(Lotus effect)等。尤其已知的是,称之为蛾眼结构(moth-eye structure)的微细凹凸结构由于折射率从空气的折射率连续增大到物品的材料的折射率,因此构成了有效的防反射手段。In recent years, it has been known that an article having a fine concave-convex structure with a period equal to or less than the wavelength of visible light on the surface exhibits antireflection effects, lotus effects, and the like. In particular, it is known that a fine concavo-convex structure called a moth-eye structure constitutes an effective anti-reflection means due to the continuous increase in the refractive index from that of air to that of the material of the article.
作为表面具有微细凹凸结构的透明薄膜的制造方法,已知有通过光纳米压印法、热纳米压印法等将模具表面的微细凹凸结构转印到基材薄膜的表面的方法。As a method for producing a transparent film having a fine uneven structure on the surface, a method of transferring the fine uneven structure on the surface of a mold to the surface of a base film by optical nanoimprinting, thermal nanoimprinting, or the like is known.
作为光纳米压印法,例如已知有包括下述工序(I)~(III)的方法(例如专利文献1):As an optical nanoimprint method, for example, a method including the following steps (I) to (III) is known (for example, Patent Document 1):
(I)在表面具有微细凹凸结构的反转结构的模具与构成透明薄膜主体的基材薄膜之间夹持紫外线固化性树脂组合物的工序;(I) A step of sandwiching an ultraviolet curable resin composition between a mold having an inverted structure having a fine uneven structure on the surface and a base film constituting the main body of the transparent film;
(II)对紫外线固化性树脂组合物照射紫外线,使上述紫外线固化性树脂组合物固化,形成具有微细凹凸结构的固化覆膜,获得透明薄膜的工序;以及(II) A step of irradiating ultraviolet rays to the ultraviolet curable resin composition to cure the above ultraviolet curable resin composition to form a cured film having a fine uneven structure to obtain a transparent film; and
(III)将上述模具与上述透明薄膜分离的工序。(III) A step of separating the mold from the transparent film.
模具的表面通常用有机系脱模剂处理。然而,模具表面的处理中使用的有机系脱模剂有时由于在模具的表面处理中反复使用,或长期间放置而劣化。通过劣化的有机系脱模剂表面处理过的模具有时表面的脱模性不充分,结果,难以稳定地制造透明薄膜。The surface of the mold is usually treated with an organic mold release agent. However, the organic mold release agent used for the treatment of the surface of the mold may deteriorate due to repeated use in the surface treatment of the mold or standing for a long period of time. A mold surface-treated with a deteriorated organic mold release agent may have insufficient surface mold release properties, and as a result, it may be difficult to stably produce a transparent film.
现有技术文献prior art literature
专利文献patent documents
专利文献1:日本特开2007-326367号公报Patent Document 1: Japanese Patent Laid-Open No. 2007-326367
发明内容 Contents of the invention
发明要解决的问题The problem to be solved by the invention
本发明提供了能够短时间简单地判定性能好坏的有机系脱模剂的性能评价方法;可制造表面脱模性充分的模具的方法;以及能够稳定地制造表面具有微细凹凸结构的透明薄膜的方法。The present invention provides a method for evaluating the performance of an organic mold release agent that can easily judge performance in a short time; a method that can produce a mold with sufficient surface releasability; and a method that can stably produce a transparent film with a fine uneven structure on the surface method.
用于解决问题的方案solutions to problems
本发明的第一实施方式的模具的制造方法的特征在于,其具有下述的工序(I)~(III):The method for manufacturing a mold according to the first embodiment of the present invention is characterized in that it has the following steps (I) to (III):
(I)制作表面形成了微细凹凸结构的模具主体的工序;(1) The process of making the mold body with a fine concave-convex structure formed on the surface;
(II)通过下述有机系脱模剂的性能评价方法评价有机系脱模剂的性能的工序;以及,(II) A step of evaluating the performance of the organic mold release agent by the following performance evaluation method of the organic mold release agent; and,
(III)用通过上述工序(II)判定为性能良好的有机系脱模剂处理上述工序(I)中制作的模具主体的表面的工序;(III) A step of treating the surface of the mold body prepared in the above step (I) with an organic mold release agent judged to have good performance in the above step (II);
所述有机系脱模剂的性能评价方法是,将有机系脱模剂与试验用有机溶剂混合,通过有机系脱模剂在试验用有机溶剂中的溶解性好坏来判定有机系脱模剂的性能好坏的方法。The method for evaluating the performance of the organic mold release agent is to mix the organic mold release agent with the organic solvent for the test, and judge the organic mold release agent by the solubility of the organic mold release agent in the organic solvent for the test. The performance of the method is good or bad.
上述工序(I)优选是在铝基材的表面形成具有多个细孔的阳极氧化氧化铝而制作模具主体的工序。The above step (I) is preferably a step of forming the anodized alumina having a plurality of pores on the surface of the aluminum substrate to produce the mold main body.
上述有机系脱模剂优选是具有水解性甲硅烷基或硅醇基的氟化合物。The above-mentioned organic mold release agent is preferably a fluorine compound having a hydrolyzable silyl group or silanol group.
上述试验用有机溶剂的介电常数优选是22~40。The dielectric constant of the above-mentioned test organic solvent is preferably 22-40.
上述试验用有机溶剂优选是乙醇或N,N-二甲基甲酰胺。The above-mentioned test organic solvent is preferably ethanol or N,N-dimethylformamide.
优选的是,通过有机系脱模剂与试验用有机溶剂的混合物的透光率来判断有机系脱模剂在上述试验用有机溶剂中的溶解性的好坏。Preferably, the solubility of the organic mold release agent in the test organic solvent is judged by the light transmittance of the mixture of the organic mold release agent and the test organic solvent.
本发明的第二实施方式的有机系脱模剂的性能评价方法是,将有机系脱模剂和试验用有机溶剂混合,通过有机系脱模剂在试验用有机溶剂中的溶解性好坏来判定有机系脱模剂的性能好坏的方法。The method for evaluating the performance of the organic mold release agent according to the second embodiment of the present invention is to mix the organic mold release agent with the organic solvent for the test, and determine the solubility of the organic mold release agent in the organic solvent for the test. A method for judging the performance of organic release agents.
优选的是,预先将上述有机系脱模剂用稀释用有机溶剂稀释,形成上述脱模剂溶液。It is preferable to dilute the above-mentioned organic release agent with an organic solvent for dilution in advance to form the above-mentioned release agent solution.
优选的是,上述有机系脱模剂用于处理表面形成了微细凹凸结构的模具主体的表面。Preferably, the above-mentioned organic mold release agent is used to treat the surface of the mold main body having a fine uneven structure formed on the surface.
本发明的第三实施方式的表面具有微细凹凸结构的透明薄膜的制造方法的特征在于,将通过本发明的第一实施方式中所述的模具的制造方法获得的模具的表面的微细凹凸结构转印到基材薄膜的表面。The method for producing a transparent film having a fine uneven structure on the surface according to the third embodiment of the present invention is characterized in that the fine uneven structure on the surface of the mold obtained by the method for producing the mold described in the first embodiment of the present invention is converted into Printed onto the surface of the substrate film.
发明的效果The effect of the invention
根据本发明的第二实施方式的有机系脱模剂的性能评价方法,可以在短时间内简单地判定有机系脱模剂的性能好坏。According to the method for evaluating the performance of an organic mold release agent according to the second embodiment of the present invention, it is possible to easily determine whether the performance of an organic mold release agent is good or bad in a short time.
根据本发明的第一实施方式的模具的制造方法,可以制造表面脱模性充分的模具。According to the method of manufacturing a mold according to the first embodiment of the present invention, a mold having sufficient surface releasability can be produced.
根据本发明的第三实施方式的表面具有微细凹凸结构的透明薄膜的制造方法,可以稳定地制造透明薄膜。According to the method for producing a transparent film having a fine uneven structure on the surface according to the third embodiment of the present invention, a transparent film can be stably produced.
附图说明 Description of drawings
图1所示为阳极氧化氧化铝的细孔的形成过程的截面图。FIG. 1 is a cross-sectional view showing the formation process of pores of anodized alumina.
图2所示为表面具有微细凹凸结构的透明薄膜的制造装置的一个例子的构成图。FIG. 2 is a configuration diagram showing an example of an apparatus for manufacturing a transparent thin film having a fine uneven structure on its surface.
图3所示为表面具有微细凹凸结构的透明薄膜的一个例子的截面图。Fig. 3 is a cross-sectional view showing an example of a transparent film having a fine uneven structure on the surface.
附图标记说明Explanation of reference signs
10铝基材10 aluminum substrate
12细孔12 pores
14氧化覆膜14 oxide film
18模具主体18 mold body
20模具20 dies
40透明薄膜40 transparent film
42基材薄膜42 base film
44固化覆膜44 curing film
46凸部46 Convex
具体实施方式 Detailed ways
在本说明书中,(甲基)丙烯酸酯是指丙烯酸酯或甲基丙烯酸酯。透明是指至少透过波长400~1170nm的光。另外,活性能量射线是指可见光线、紫外线、电子束、等离子体、热射线(红外线等)等。In this specification, (meth)acrylate means acrylate or methacrylate. Transparency means that at least light with a wavelength of 400~1170nm is transmitted. In addition, active energy rays refer to visible rays, ultraviolet rays, electron beams, plasma, heat rays (infrared rays, etc.), and the like.
<有机系脱模剂的性能评价方法><Performance Evaluation Method of Organic Release Agent>
本发明的第二实施方式的有机系脱模剂的性能评价方法是将有机系脱模剂和试验用有机溶剂混合,通过有机系脱模剂在试验用有机溶剂中的溶解性好坏来判定有机系脱模剂的性能好坏的方法。The performance evaluation method of the organic mold release agent according to the second embodiment of the present invention is to mix the organic mold release agent with the organic solvent for the test, and judge by the solubility of the organic mold release agent in the organic solvent for the test How to improve the performance of organic mold release agents.
有机系脱模剂由于在模具的表面处理中反复使用或长期间放置而劣化,有时不能充分发挥脱模性。本发明人发现,该原因在于,在具有水解性甲硅烷基的化合物的情况下,发生分子间缩合,与模具主体的反应性降低,密合性降低。然而,有机系脱模剂的劣化仅凭有机系脱模剂的外观不能判定。分子间缩合的有无还可以用核磁共振谱等来调查,但测定需要劳力与时间,另外,需要昂贵的装置。因此,本发明人着眼于,由于有机系脱模剂的劣化,即由分子间缩合导致的有机系脱模剂的高分子量化,有机系脱模剂在有机溶剂中的溶解性降低,从而完成了本发明。An organic mold release agent may deteriorate due to repeated use or long-term storage for surface treatment of molds, and may fail to exhibit sufficient mold release properties. The inventors of the present invention found that the reason for this is that, in the case of a compound having a hydrolyzable silyl group, intermolecular condensation occurs, the reactivity with the mold main body decreases, and the adhesiveness decreases. However, deterioration of an organic mold release agent cannot be judged only by the appearance of an organic mold release agent. The presence or absence of intermolecular condensation can also be investigated by nuclear magnetic resonance spectroscopy, etc., but the measurement requires labor and time, and requires expensive equipment. Therefore, the present inventors focused on the deterioration of the organic mold release agent, that is, the increase in the molecular weight of the organic mold release agent due to intermolecular condensation, and the decrease in the solubility of the organic mold release agent in an organic solvent. the invention.
(判定方法)(Measure to judge)
劣化的有机系脱模剂在试验用有机溶剂中的溶解性降低,发生白浊。作为确认白浊有无或多少的方法,可列举出测定透光率的方法、测定光散射的方法等,从在短时间内能简便地测定的观点来看,测定透光率的方法是优选的。The solubility of the degraded organic mold release agent in the organic solvent for a test was lowered, and it became cloudy. As a method of confirming the presence or absence of cloudiness, the method of measuring the light transmittance, the method of measuring light scattering, etc. are mentioned, and the method of measuring the light transmittance is preferable from the viewpoint of being able to measure easily in a short time. of.
有机系脱模剂在试验用有机溶剂中的溶解性好坏通过有机系脱模剂与试验用有机溶剂的混合物的透光率来判断时,作为判断基准的透光率的阈值例如可以如下确定:When the solubility of the organic mold release agent in the test organic solvent is judged by the light transmittance of the mixture of the organic mold release agent and the test organic solvent, the threshold value of the light transmittance as a judgment standard can be determined as follows, for example :
(1)使用分光光度计测定用于模具本体的表面处理之前的有机系脱模剂(未使用产品)和试验用有机溶剂的混合物的透光率。接着,使用用有机系脱模剂(未使用产品)表面处理过的模具,进行后述的透明薄膜的制造,评价脱模性。(1) The light transmittance of the mixture of the organic release agent (unused product) and the test organic solvent before the surface treatment of the mold body was measured using a spectrophotometer. Next, using a mold surface-treated with an organic mold release agent (unused product), the transparent film described later was produced, and mold release properties were evaluated.
(2)使用分光光度计,测定进行过1次~多次模具主体的表面处理的有机系脱模剂和试验用有机溶剂的混合物的透光率。接着,用上述有机系脱模剂表面处理过的模具进行后述透明薄膜的制造,评价脱模性。(2) Using a spectrophotometer, measure the light transmittance of the mixture of the organic mold release agent and the organic solvent for the test that have been subjected to surface treatment of the mold body once to multiple times. Next, a transparent film to be described later was produced using the mold surface-treated with the above-mentioned organic mold release agent, and mold release properties were evaluated.
(3)重复上述(2)的操作,直到脱模性的评价判定为不可为止。(3) The operation of (2) above was repeated until the evaluation of mold releasability was judged to be impossible.
(4)用于模具主体的表面处理前的有机系脱模剂(未使用产品)和试验用有机溶剂的混合物的透光率的光谱与判定为不可评价脱模性的有机系脱模剂(劣化产品)和试验用有机溶剂的混合物的透光率的光谱进行比较,将透光率差最大的波长下的有机系脱模剂(劣化产品)和试验用有机溶剂的混合物的透光率设定为阈值。(4) Spectrum of light transmittance of a mixture of an organic mold release agent (unused product) and an organic solvent for testing before surface treatment of the mold body and an organic mold release agent judged to be unable to evaluate mold release properties ( Deteriorated product) and the spectrum of the light transmittance of the mixture of the organic solvent for the test were compared, and the light transmittance of the mixture of the organic mold release agent (deteriorated product) and the organic solvent for the test at the wavelength at which the difference in light transmittance was the largest was set set as the threshold.
透光率的测定用分光光度计进行。具体而言,下述的脱模剂溶液与试验用有机溶剂按2/8~8/2的体积比混合得到的物质作为测定溶液。另外,作为参照,使用用于脱模剂溶液的稀释溶剂与试验用有机溶剂按上述体积比混合的混合物。作为测定波长,使用紫外~可见区域(例如200~900nm左右)。The light transmittance was measured with a spectrophotometer. Specifically, what was obtained by mixing the following release agent solution and the organic solvent for the test at a volume ratio of 2/8 to 8/2 was used as a measurement solution. In addition, as a reference, a mixture in which the dilution solvent for the release agent solution and the organic solvent for the test were mixed in the above-mentioned volume ratio was used. As the measurement wavelength, an ultraviolet to visible region (for example, about 200 to 900 nm) is used.
(有机系脱模剂)(organic release agent)
作为有机系脱模剂,可列举出硅酮树脂、氟树脂、氟化合物等,从脱模性优异的观点、与模具的密合性优异的观点出发,具有水解性甲硅烷基或硅醇基的氟化合物是优选的,具有水解性甲硅烷基的氟化合物是特别优选的。作为具有水解性甲硅烷基的氟化合物的市售产品,可列举出氟烷基硅烷、KBM-7803(信越化学工业公司制造)、“OPTOOL”系列(DAIKININDUSTRIES,Ltd.制造)、Novec EGC-1720(住友3M公司制造)等。Examples of organic mold release agents include silicone resins, fluororesins, and fluorine compounds, which have hydrolyzable silyl groups or silanol groups from the viewpoint of excellent mold release properties and excellent adhesion to molds. Fluorine compounds are preferred, and fluorine compounds having a hydrolyzable silyl group are particularly preferred. Commercially available products of fluorine compounds having a hydrolyzable silyl group include fluoroalkylsilane, KBM-7803 (manufactured by Shin-Etsu Chemical Co., Ltd.), "OPTOOL" series (manufactured by DAIKIN INDUSTRIES, Ltd.), Novec EGC-1720 (manufactured by Sumitomo 3M Co., Ltd.), etc.
(试验用有机溶剂)(organic solvent for test)
作为试验用有机溶剂,使用在正常的有机系脱模剂与劣化的有机系脱模剂之间见到了溶解性(形成混合物时的透光率)差别的溶剂。例如,试验用有机溶剂的极性过低时,两者均容易溶解,而极性过高时,两者均不容易溶解,没有见到溶解性(形成混合物时的透光率)差别。因此,作为试验用有机溶剂,具有适度的极性(即介电常数)的有机溶剂是优选的。试验用有机溶剂介电常数优选为10~70,更优选为30~60,最优选为22~40。As the organic solvent for the test, a solvent in which a difference in solubility (light transmittance when forming a mixture) was observed between a normal organic release agent and a deteriorated organic release agent was used. For example, when the polarity of the organic solvent for the test is too low, both are easily soluble, but when the polarity is too high, neither is easily soluble, and there is no difference in solubility (light transmittance when forming a mixture). Therefore, an organic solvent having moderate polarity (that is, a dielectric constant) is preferable as the test organic solvent. The dielectric constant of the organic solvent used in the test is preferably 10-70, more preferably 30-60, and most preferably 22-40.
作为试验用有机溶剂,对于具有水解性甲硅烷基或硅醇基的氟化合物,从增大正常氟化合物与劣化氟化合物之间的溶解性(形成混合物时的透光率)差的观点出发,优选乙醇[介电常数:23.8(25℃)]、N,N-二甲基甲酰胺[介电常数:36.7(25℃)],特别优选为N,N-二甲基甲酰胺。As an organic solvent for the test, for fluorine compounds having hydrolyzable silyl groups or silanol groups, from the viewpoint of increasing the difference in solubility (light transmittance when forming a mixture) between normal fluorine compounds and degraded fluorine compounds, Ethanol [dielectric constant: 23.8 (25° C.)] and N,N-dimethylformamide [dielectric constant: 36.7 (25° C.)] are preferable, and N,N-dimethylformamide is particularly preferable.
本发明中的介电常数是将真空的介电常数设定为1时的相对介电常数,使用文献值[“溶剂手册”,Kodansha S cientific Ltd.,1976年,第734页]。The dielectric constant in the present invention is a relative permittivity when the dielectric constant of vacuum is set to 1, and a literature value ["Solvent Handbook", Kodansha Scientific Ltd., 1976, p. 734] is used.
(稀释用有机溶剂)(organic solvent for dilution)
通常在用于模具本身的表面处理时将有机系脱模剂用稀释用有机溶剂稀释,使得能够均一地处理模具主体的表面,作为脱模剂溶液使用。因此,在本发明的有机系脱模剂的性能评价方法中,优选的是,有机系脱模剂实际上为用于模具主体的表面处理的状态的、在用稀释用有机溶剂稀释的脱模剂溶液的状态下评价。作为稀释用有机溶剂,只要溶解有机系脱模剂即可,对其没有特别限制,在有机系脱模剂使用具有水解性甲硅烷基或硅醇基的氟化合物时,介电常数低的溶剂是优选的,可列举出己烷、氯仿、二乙醚、四氢呋喃、二氯甲烷、丙酮、乙腈、N,N-二甲基甲酰胺等。尤其,在使用“OPTOOL”系列(DAIKININDUSTRIES,Ltd.制造)作为有机系脱模剂时,优选使用氟系有机溶剂“DURASURF”系列(HARVES Co.,Ltd.制造)。Usually, when used for the surface treatment of the mold itself, the organic mold release agent is diluted with an organic solvent for dilution so that the surface of the mold body can be uniformly treated, and used as a mold release agent solution. Therefore, in the performance evaluation method of the organic type mold release agent of the present invention, it is preferable that the organic type mold release agent is actually used for the surface treatment of the mold main body, and is diluted with an organic solvent for dilution. evaluated in the state of the solution. The organic solvent for dilution is not particularly limited as long as it dissolves the organic release agent. When a fluorine compound having a hydrolyzable silyl group or silanol group is used as the organic release agent, a solvent with a low dielectric constant Preferable examples include hexane, chloroform, diethyl ether, tetrahydrofuran, dichloromethane, acetone, acetonitrile, N,N-dimethylformamide and the like. In particular, when using the "OPTOOL" series (manufactured by DAIKININDUSTRIES, Ltd.) as the organic release agent, it is preferable to use the fluorine-based organic solvent "DURASURF" series (manufactured by HARVES Co., Ltd.).
(具体例)(specific example)
以下以有机系脱模剂为具有水解性甲硅烷基的氟化合物[“OPTOOL”系列,DAIKIN INDUSTRIES,Ltd.制造]的场合为例来进一步详细说明。Hereinafter, the case where the organic release agent is a fluorine compound having a hydrolyzable silyl group ["OPTOOL" series, manufactured by DAIKIN INDUSTRIES, Ltd.] will be described in more detail as an example.
作为试验用有机溶剂,从增大正常的“OPTOOL”系列与劣化的“OPTOOL”系列之间的溶解性(形成混合物时的透光率)差的观点出发,N,N-二甲基甲酰胺是特别优选的。As an organic solvent for testing, from the viewpoint of increasing the difference in solubility (light transmittance when forming a mixture) between the normal "OPTOOL" series and the deteriorated "OPTOOL" series, N,N-Dimethylformamide is particularly preferred.
作为稀释用有机溶剂,从有机系脱模剂的溶解性的观点出发,氟系的有机溶剂DURASURF HD-ZV(HARVES Co.,Ltd.制造)是优选的。As the organic solvent for dilution, the fluorine-based organic solvent DURASURF HD-ZV (manufactured by HARVES Co., Ltd.) is preferable from the viewpoint of the solubility of the organic mold release agent.
脱模剂溶液与试验用有机溶剂的混合物中的“OPTOOL”系列浓度过高或过低时,难以表现对应于劣化的溶解性差。因此,用DURASURF HD-ZV稀释“OPTOOL”系列而获得的0.1质量%脱模剂溶液与N,N-二甲基甲酰胺的混合比(脱模剂溶液/N,N-二甲基甲酰胺)优选为2/8~8/2(体积比),更优选为4/6~6/4(体积比),特别优选为5/5(体积比)。When the concentration of "OPTOOL" series in the mixture of the release agent solution and the organic solvent for the test is too high or too low, it is difficult to express the poor solubility corresponding to the deterioration. Therefore, the mixing ratio of 0.1% by mass release agent solution to N,N-dimethylformamide obtained by diluting the "OPTOOL" series with DURASURF HD-ZV (release agent solution/N,N-dimethylformamide ) is preferably 2/8 to 8/2 (volume ratio), more preferably 4/6 to 6/4 (volume ratio), and particularly preferably 5/5 (volume ratio).
“OPTOOL”系列用DURASURF HD-ZV稀释而成的0.1质量%的脱模剂溶液与同体积的N,N-二甲基甲酰胺混合时,即使是未使用品也有少许白浊,脱模性降低的劣化产品则显著白浊。上述脱模剂溶液性能好坏的判定这样进行:优选的是,根据后述实施例的结果,透光率急剧减少的波长400nm下的混合物的透光率为36%以上则判定为性能良好,更优选的是,透光率为45%以上判定为性能良好。When a 0.1% by mass release agent solution of the "OPTOOL" series diluted with DURASURF HD-ZV is mixed with the same volume of N,N-dimethylformamide, even unused products are slightly cloudy, and the release properties The reduced deteriorated product was remarkably cloudy. The judgment of the performance of the above-mentioned release agent solution is carried out like this: preferably, according to the result of the embodiment described later, the light transmittance of the mixture under the wavelength 400nm that the light transmittance decreases sharply is more than 36% and then judged as good performance, More preferably, a light transmittance of 45% or more is judged as good performance.
(作用效果)(Effect)
在以上说明的本发明的第二实施方式的有机系脱模剂的性能评价方法中,将有机系脱模剂与试验用有机溶剂混合,通过有机系脱模剂在试验用有机溶剂中的溶解性好坏来判定有机系脱模剂的性能好坏,因此可以在短时间内简易地判定有机系脱模剂的性能好坏。In the performance evaluation method of the organic mold release agent according to the second embodiment of the present invention described above, the organic mold release agent is mixed with the organic solvent for the test, and the organic mold release agent is dissolved in the organic solvent for the test. The performance of the organic release agent can be judged according to the performance of the organic release agent, so the performance of the organic release agent can be easily judged in a short time.
而且,由于事先能够判定有机系脱模剂的性能,因此在开始透明薄膜制造之后,可以避免因有机系脱模剂劣化导致的模具脱模性的恶化等麻烦。另外,可以有效地使用有机系脱模剂达到极限。Furthermore, since the performance of the organic mold release agent can be judged in advance, it is possible to avoid troubles such as deterioration of the mold releasability due to deterioration of the organic mold release agent after the production of the transparent film is started. In addition, organic mold release agents can be effectively used to the limit.
本发明的第二实施方式的性能评价方法适合于评价后述的使用具有形成了平均间隔20~400nm的细孔的微细凹凸结构的模具来制造透明薄膜时使用的有机系脱模剂。尤其适合于细孔通过阳极氧化来形成的情况。The performance evaluation method according to the second embodiment of the present invention is suitable for evaluating an organic release agent used when producing a transparent film using a mold having a fine uneven structure with pores formed at an average interval of 20 to 400 nm, which will be described later. It is especially suitable when pores are formed by anodic oxidation.
<模具的制造方法><Mold manufacturing method>
本发明的第一实施方式的模具的制造方法是具有下述工序(I)~(III):The manufacturing method of the mold of the first embodiment of the present invention has the following steps (I) to (III):
(I)制作表面形成了微细凹凸结构的模具主体的工序;(1) The process of making the mold body with a fine concave-convex structure formed on the surface;
(II)通过下述有机系脱模剂的性能评价方法评价有机系脱模剂的性能的工序;以及,(II) A step of evaluating the performance of the organic mold release agent by the following performance evaluation method of the organic mold release agent; and,
(III)用通过上述工序(II)判定为性能良好的有机系脱模剂处理上述工序(I)中制作的模具主体的表面的工序,(III) A step of treating the surface of the mold main body prepared in the above step (I) with an organic mold release agent judged to have good performance in the above step (II),
所述有机系脱模剂的性能评价方法是将有机系脱模剂与试验用有机溶剂混合,通过有机系脱模剂在试验用有机溶剂中的溶解性好坏来判定有机系脱模剂的性能好坏的方法。The performance evaluation method of the organic mold release agent is to mix the organic mold release agent with the organic solvent for the test, and judge the performance of the organic mold release agent by the solubility of the organic mold release agent in the organic solvent for the test. Methods with good or bad performance.
其中,本发明的第二实施方式的有机系脱模剂的性能评价方法可以作为本发明的第一实施方式的有机系脱模剂的性能评价方法使用。Among them, the performance evaluation method of the organic release agent according to the second embodiment of the present invention can be used as the performance evaluation method of the organic release agent according to the first embodiment of the present invention.
(工序(I))(Process (I))
在工序(I)中,在基材的表面形成微细凹凸结构,制作模具主体。In the step (I), a fine concavo-convex structure is formed on the surface of the base material to produce a mold main body.
作为基材的材料,可列举出金属(包括表面形成有氧化覆膜的金属)、石英、玻璃、树脂、陶瓷等。Examples of the material of the substrate include metals (including metals having an oxide film formed on the surface), quartz, glass, resin, ceramics, and the like.
作为基材的形状,可列举出辊状、圆管状、平板状、片状等。Examples of the shape of the substrate include a roll shape, a circular tube shape, a flat plate shape, a sheet shape, and the like.
作为模具主体的制造方法,例如可列举出下述方法(I-1)或(I-2),从可以大面积化且制作简便的观点出发,方法(I-1)是特别优选的。As a method of manufacturing the mold main body, for example, the following method (I-1) or (I-2) can be mentioned, and the method (I-1) is particularly preferable from the viewpoint that the area can be increased and the production is simple.
(I-1)在铝基材的表面形成具有多个细孔(凹部)的阳极氧化氧化铝的方法。(I-1) A method of forming anodized alumina having a plurality of pores (recesses) on the surface of an aluminum substrate.
(I-2)在基材的表面通过光刻法形成微细凹凸结构的方法。(I-2) A method of forming a fine uneven structure on the surface of a substrate by photolithography.
作为方法(I-1),具有下述的工序(a)~(e)的方法是优选的。As the method (I-1), a method having the following steps (a) to (e) is preferable.
(a)在电解液中在恒定电压下对铝基材进行阳极氧化,在铝基材的表面形成氧化覆膜的工序。(a) A step of anodizing an aluminum substrate at a constant voltage in an electrolytic solution to form an oxide film on the surface of the aluminum substrate.
(b)去除氧化覆膜,在铝基材的表面形成阳极氧化的细孔产生点的工序。(b) A step of removing the oxide film and forming anodized pore generation sites on the surface of the aluminum substrate.
(c)在电解液中对铝基材再次进行阳极氧化,形成在细孔产生点具有细孔的工序。(c) A step of anodizing the aluminum substrate again in an electrolytic solution to form pores at the pore generation points.
(d)扩大细孔孔径的工序。(d) A step of enlarging the diameter of the pores.
(e)上述工序(d)之后,在电解液中再次阳极氧化的工序。(e) After the above-mentioned step (d), a step of re-anodizing in an electrolytic solution.
(f)反复进行上述工序(d)与工序(e),获得在铝表面形成了具有多个细孔的阳极氧化氧化铝的模具主体的工序。(f) A step of repeating the steps (d) and (e) above to obtain a mold body in which anodized alumina having a plurality of fine pores is formed on the aluminum surface.
工序(a):Process (a):
如图1所示,将铝基材10阳极氧化时,形成具有细孔12的氧化覆膜14。As shown in FIG. 1 , when an aluminum substrate 10 is anodized, an oxide film 14 having pores 12 is formed.
作为铝基材的形状,可列举出辊状、圆管状、平板状、片状等。Examples of the shape of the aluminum substrate include a roll shape, a circular tube shape, a flat plate shape, a sheet shape, and the like.
为了将表面状态平滑化,铝基材优选用机械研磨、布研磨、化学研磨、电解研磨(蚀刻处理)等进行研磨。另外,铝基材在加工成规定的形状时会附着有所使用的油,因此,优选在阳极氧化之前预先进行脱脂处理。In order to smooth the surface state, the aluminum substrate is preferably polished by mechanical polishing, cloth polishing, chemical polishing, electrolytic polishing (etching treatment), or the like. In addition, since the oil used adheres to the aluminum substrate when it is processed into a predetermined shape, it is preferable to degrease before anodizing.
铝的纯度优选为99%以上,更优选为99.5%以上,特别优选为99.8%以上。铝的纯度较低时,在阳极氧化时,由于杂质的偏析,可形成散射可见光的大小的凹凸结构,阳极氧化中获得的细孔的规则性降低。The purity of aluminum is preferably 99% or higher, more preferably 99.5% or higher, and particularly preferably 99.8% or higher. When the purity of aluminum is low, during anodization, due to segregation of impurities, a concave-convex structure of a size that scatters visible light may be formed, and the regularity of pores obtained during anodization may decrease.
作为电解液,可列举出硫酸、草酸、磷酸等。Examples of the electrolytic solution include sulfuric acid, oxalic acid, phosphoric acid, and the like.
使用草酸作为电解液时:When using oxalic acid as electrolyte:
草酸的浓度优选为0.7M以下。草酸的浓度超过0.7M时,电流值过高,氧化覆膜的表面有时变粗糙。The concentration of oxalic acid is preferably 0.7M or less. When the concentration of oxalic acid exceeds 0.7M, the current value becomes too high, and the surface of the oxide film may become rough.
化成电压为30~60V时,可以获得具有周期为100nm左右的规则性高的细孔的阳极氧化氧化铝。化成电压高于该范围或低于该范围,则规则性趋向于降低。When the formation voltage is 30 to 60V, anodized alumina having highly regular pores with a period of about 100 nm can be obtained. When the formation voltage is higher than this range or lower than this range, the regularity tends to decrease.
电解液的温度优选为60℃以下,更优选为45℃以下。电解液的温度超过60℃时,发生所谓的“烧伤”的现象,细孔被破坏,或表面溶解,细孔的规则性被打乱。The temperature of the electrolytic solution is preferably 60°C or lower, more preferably 45°C or lower. When the temperature of the electrolytic solution exceeds 60° C., a so-called “burning” phenomenon occurs, and the pores are destroyed, or the surface dissolves, and the regularity of the pores is disturbed.
使用硫酸作为电解液时:When using sulfuric acid as electrolyte:
硫酸的浓度优选为0.7M以下。硫酸的浓度超过0.7M时,电流值变得过高,不能维持恒定电压。The concentration of sulfuric acid is preferably 0.7M or less. When the concentration of sulfuric acid exceeds 0.7M, the current value becomes too high, and a constant voltage cannot be maintained.
化成电压为25~30V时,可以获得具有周期为63nm左右的规则性高的细孔的阳极氧化氧化铝。化成电压高于或低于该范围时,规则性趋向于降低。When the formation voltage is 25~30V, anodized alumina having highly regular pores with a period of about 63nm can be obtained. The regularity tends to decrease when the formation voltage is higher or lower than this range.
电解液的温度优选为30℃以下,更优选为20℃以下。电解液的温度超过30℃时,发生所谓的“烧伤”的现象,细孔被破坏,或表面溶解,细孔的规则性被打乱。The temperature of the electrolytic solution is preferably 30°C or lower, more preferably 20°C or lower. When the temperature of the electrolytic solution exceeds 30° C., a phenomenon called “burning” occurs, and the pores are destroyed, or the surface dissolves, and the regularity of the pores is disturbed.
工序(b):Process (b):
如图1所示,先去除氧化覆膜14,使其形成阳极氧化的细孔产生点16,从而可以提高细孔的规则性。As shown in FIG. 1 , the oxide film 14 is first removed to form anodized pore generation points 16 , thereby improving the regularity of the pores.
作为去除氧化覆膜的方法,可列举出在不溶解铝而选择性溶解氧化覆膜的溶液中溶解、去除的方法。作为这种溶液,例如可列举出铬酸/磷酸混合液等。As a method of removing the oxide film, a method of dissolving and removing the oxide film in a solution that does not dissolve aluminum but selectively dissolves the oxide film can be mentioned. As such a solution, a chromic acid/phosphoric acid mixed liquid etc. are mentioned, for example.
工序(c):Process (c):
如图1所示,将去除了氧化覆膜的铝基材10再次阳极氧化时,形成了具有圆柱状的细孔12的氧化覆膜14。As shown in FIG. 1 , when the aluminum substrate 10 from which the oxide film has been removed is anodized again, an oxide film 14 having columnar pores 12 is formed.
阳极氧化可以在与工序(a)同样的条件下进行。延长阳极氧化的时间可以获得深的细孔。Anodic oxidation can be performed under the same conditions as step (a). Extending the time of anodizing can obtain deep pores.
工序(d):Process (d):
如图1所示,进行扩大细孔12的孔径的处理(以下称为细孔孔径扩大处理)。细孔孔径扩大处理是浸渍在溶解氧化覆膜的溶液中,使阳极氧化中获得的细孔的孔径扩大的处理。作为这种溶液,例如可列举出5质量%左右的磷酸水溶液等。As shown in FIG. 1 , a process of enlarging the pore diameter of the pores 12 (hereinafter referred to as pore diameter enlarging process) is performed. The pore diameter enlarging treatment is a process of enlarging the pore diameters of the pores obtained by anodizing by immersing in a solution for dissolving the oxide film. As such a solution, for example, a phosphoric acid aqueous solution of about 5% by mass or the like may be mentioned.
细孔孔径扩大处理的时间越长,细孔孔径越大。The longer the pore diameter enlarging treatment time, the larger the pore diameter.
工序(e):Process (e):
如图1所示,再次阳极氧化时,进一步形成从圆柱状的细孔12的底部向下延伸的直径小的圆柱状的细孔12。As shown in FIG. 1 , during re-anodization, the cylindrical pores 12 with a small diameter extending downward from the bottom of the cylindrical pores 12 are further formed.
阳极氧化可以在与工序(a)同样的条件下进行。阳极氧化的时间长则可获得深的细孔。Anodic oxidation can be performed under the same conditions as step (a). Long anodizing time can obtain deep pores.
工序(f):Process (f):
如图1所示,重复工序(d)的细孔孔径扩大处理和工序(e)的阳极氧化时,可形成具有直径从开口部向深度方向连续减小的形状的细孔12的氧化覆膜14,可获得在铝基材10的表面形成有阳极氧化氧化铝(铝的多孔氧化覆膜(alumite,氧化铝膜))的模具主体18。最后,优选在工序(d)结束。As shown in FIG. 1 , when the pore diameter enlarging treatment in step (d) and the anodizing in step (e) are repeated, an oxide film having pores 12 whose diameters continuously decrease from the opening to the depth direction can be formed. 14. A mold main body 18 in which anodized aluminum oxide (porous aluminum oxide film (alumite, aluminum oxide film)) is formed on the surface of the aluminum substrate 10 can be obtained. Finally, it is preferable to end in step (d).
重复次数优选合计为3次以上,更优选为5次以上。重复次数为2次以下时,由于细孔孔径非连续性减小,因此,使用具有这种细孔的阳极氧化氧化铝形成的蛾眼结构的反射率减低效果不充分。The number of repetitions is preferably 3 or more in total, and more preferably 5 or more. When the number of repetitions is 2 or less, since the pore size discontinuity decreases, the reflectance reduction effect of the moth-eye structure formed using anodized alumina having such pores is insufficient.
作为细孔12的形状,可列举出大致圆锥形状、棱锥形状、圆柱形状等,象圆锥形状、棱锥形状等那样的、与深度方向正交的方向的细孔截面积从最表面向深度方向连续减小的形状是优选的。As the shape of the pores 12, substantially conical shapes, pyramidal shapes, cylindrical shapes, etc. can be mentioned, such as conical shapes, pyramidal shapes, etc., the pore cross-sectional area in the direction perpendicular to the depth direction is continuous from the outermost surface to the depth direction. A reduced shape is preferred.
细孔12的平均间隔为可见光线的波长以下,即400nm以下。细孔12之间的平均间隔优选为20nm以上。The average interval of the pores 12 is equal to or less than the wavelength of visible light, that is, equal to or less than 400 nm. The average interval between pores 12 is preferably 20 nm or more.
细孔12之间的平均间隔是通过电子显微镜观察来测定邻接的细孔12之间的50个间隔(从细孔12的中心到邻接的细孔12的中心的距离),将这些值平均而获得的。The average interval between the fine holes 12 is to measure 50 intervals between the adjacent fine holes 12 (the distance from the center of the fine hole 12 to the center of the adjacent fine hole 12) by electron microscope observation, and these values are averaged to obtain acquired.
细孔12的深度在平均间隔为100nm时优选为80~500nm,更优选为120~400nm,特别优选为150~300nm。The depth of the pores 12 is preferably 80 to 500 nm, more preferably 120 to 400 nm, and particularly preferably 150 to 300 nm when the average interval is 100 nm.
细孔12的深度是,通过电子显微镜观察在3000倍的倍率下观察时,细孔12的最底部与细孔12之间存在的凸部的最顶部之间的距离的测定值。The depth of the pores 12 is a measured value of the distance between the bottom of the pores 12 and the top of the protrusions existing between the pores 12 when observed with an electron microscope at a magnification of 3000 times.
细孔12的深宽比(细孔的深度/细孔之间的平均间隔)优选为0.8~5,更优选为1.2~4,特别优选为1.5~3。The aspect ratio of the pores 12 (depth of pores/average interval between pores) is preferably 0.8-5, more preferably 1.2-4, and particularly preferably 1.5-3.
(工序(II)和(III))(Processes (II) and (III))
作为用有机系脱模剂处理模具本体的表面的方法,可列举出下述的方法(II-1)、(II-2),从能够用有机系脱模剂均匀地处理模具主体的形成有微细凹凸结构的一侧的表面的观点来看,方法(II-1)是特别优选的。As a method of treating the surface of the mold body with an organic mold release agent, the following methods (II-1) and (II-2) can be mentioned, from the formation of the mold body that can be uniformly treated with an organic mold release agent From the viewpoint of the surface of one side of the fine uneven structure, the method (II-1) is particularly preferable.
(II-1)在有机系脱模剂用稀释用有机溶剂稀释而成的脱模剂溶液中浸渍模具主体的方法。(II-1) A method of immersing the mold main body in a mold release agent solution obtained by diluting the organic mold release agent with an organic solvent.
(II-2)将有机系脱模剂或脱模剂溶液在模具主体的形成有微细凹凸结构的一侧的表面涂布的方法。(II-2) A method of applying an organic release agent or a release agent solution to the surface of the mold main body on which the fine uneven structure is formed.
作为方法(II-1),例如可列举出包括下述工序(g)~(k)的方法。As method (II-1), the method including following process (g)-(k) is mentioned, for example.
(g)将模具主体水洗的工序。(g) A step of washing the mold main body with water.
(h)将空气吹送到模具主体上,去除模具主体的表面附着的水滴的工序。(h) A step of blowing air onto the mold main body to remove water droplets adhering to the surface of the mold main body.
(i)将模具主体在脱模剂溶液中浸渍的工序。(i) A step of immersing the mold main body in a release agent solution.
(j)从溶液中缓慢提升所浸渍的模具主体的工序。(j) A step of slowly lifting the dipped mold body from the solution.
(k)将模具干燥的工序。(k) A step of drying the mold.
(作用效果)(Effect)
以上说明的本发明的第一实施方式的模具的制造方法中,由于用通过有机系脱模剂的性能评价方法判定为性能良好的有机系脱模剂处理模具主体的表面,因此可以制造表面脱模性充分的模具。In the manufacturing method of the mold according to the first embodiment of the present invention described above, since the surface of the mold main body is treated with an organic mold release agent judged to have good performance by the performance evaluation method of an organic mold release agent, it is possible to manufacture a surface mold release agent. Fully molded molds.
<透明薄膜的制造方法><Manufacturing method of transparent film>
本发明的第三实施方式的表面具有微细凹凸结构的透明薄膜(以下将“表面具有微细凹凸结构的透明薄膜”简称为“透明薄膜”)的制造方法是利用将通过本发明的模具的制造方法获得的模具的表面的微细凹凸结构转印到基材薄膜的表面的所谓的纳米压印法的制造方法。The third embodiment of the present invention is a method for producing a transparent film having a micro-concave-convex structure on the surface (hereinafter, "transparent film having a micro-concave-convex structure" is simply referred to as "transparent film") is a method of producing a mold that will pass through the present invention. A manufacturing method called nanoimprint method in which the fine uneven structure obtained on the surface of the mold is transferred to the surface of the base film.
纳米压印法是,将表面具有纳米级微细凹凸的模具按压到树脂等基材上,从而转印模具的微细凹凸的微细成型加工法,主要分类为利用热转印方式的热纳米压印法和利用光固化方式的光纳米压印法,在本发明中可以使用任何一种。The nanoimprint method is a micro-molding method that presses a mold with nano-scale fine unevenness on the surface onto a substrate such as resin to transfer the fine unevenness of the mold. It is mainly classified into the thermal nanoimprint method using a thermal transfer method. Any of the photonanoimprint method using photocuring method can be used in the present invention.
热纳米压印法是,将基材(热塑性材料)加热至玻璃化转变温度以上(即提高树脂的流动性),按压模具,将基材冷却后将模具脱模的方法。The thermal nanoimprint method is a method in which the base material (thermoplastic material) is heated above the glass transition temperature (that is, the fluidity of the resin is increased), the mold is pressed, and the base material is cooled, and then the mold is released.
光纳米压印法是,在将模具按压到基材表面的活性能量射线固化性树脂组合物上的状态下,照射紫外线等活性能量射线,使活性能量射线固化性组合物固化后,将模具脱模的方法。The photonanoimprint method is to irradiate an active energy ray such as an ultraviolet ray in a state where a mold is pressed against an active energy ray-curable resin composition on the surface of a base material, and after the active energy ray-curable composition is cured, the mold is released. model method.
作为本发明的透明薄膜的制造方法,具有下述工序(A)~(C)的方法是优选的:As a method for producing the transparent film of the present invention, a method having the following steps (A) to (C) is preferred:
(A)在基材薄膜的表面与表面具有微细凹凸结构的反转结构且该表面用有机系脱模剂处理过的模具之间夹持活性能量射线固化性树脂组合物的工序。(A) A step of sandwiching the active energy ray-curable resin composition between the surface of the base film and a mold having an inverse structure of a fine uneven structure on the surface and the surface of which has been treated with an organic mold release agent.
(B)从基材薄膜侧向活性能量射线固化性树脂组合物照射活性能量射线,使活性能量射线固化性树脂组合物固化,形成固化覆膜,从而获得透明薄膜的工序。(B) A step of irradiating the active energy ray-curable resin composition with active energy rays from the base film side, curing the active energy ray-curable resin composition, forming a cured film, and obtaining a transparent film.
(C)将透明薄膜与模具分离的工序。(C) Process of separating the transparent film from the mold.
(制造装置)(manufacturing device)
利用具有工序(A)~(C)的方法制造透明薄膜例如可以使用图2所示的装置如下进行。Production of a transparent thin film by the method having steps (A) to (C) can be performed as follows, for example, using the apparatus shown in FIG. 2 .
在表面具有微细凹凸结构(图示略)的辊状模具20与沿着模具20的表面移动的带状基材薄膜42之间,从罐22供给活性能量射线固化性树脂组合物。The active energy ray-curable resin composition is supplied from a tank 22 between a roll-shaped mold 20 having a fine concave-convex structure (not shown) on the surface and a strip-shaped base film 42 moving along the surface of the mold 20 .
在模具20与通过气压缸24调整辊隙压力24的夹辊26之间夹紧基材薄膜42和活性能量射线固化性树脂组合物,使活性能量射线固化性树脂组合物在基材薄膜42与模具20之间均一地遍布,同时填充到模具20的微细凹凸结构的凹部内。The substrate film 42 and the active energy ray-curable resin composition are clamped between the mold 20 and the nip roller 26 whose nip pressure 24 is adjusted by the pneumatic cylinder 24, so that the active energy ray-curable resin composition is formed between the substrate film 42 and the active energy ray-curable resin composition. The molds 20 are spread uniformly, and at the same time, the concave portions of the fine concavo-convex structure of the mold 20 are filled.
从模具20的下方设置的活性能量射线照射装置28透过基材薄膜42将活性能量射线照射于活性能量射线固化性树脂组合物上,使活性能量射线固化性树脂组合物固化,从而形成转印有模具20表面的微细凹凸结构的固化覆膜44。The active energy ray irradiation device 28 installed below the mold 20 irradiates the active energy ray curable resin composition through the base film 42 to cure the active energy ray curable resin composition, thereby forming a transfer print. Cured film 44 having a fine uneven structure on the surface of mold 20 .
通过剥离辊30,将表面形成有固化覆膜44的基材薄膜42从模具20上剥离,从而获得图3所示的透明薄膜40。The base film 42 on which the cured film 44 is formed on the surface is peeled from the mold 20 by the peeling roller 30 to obtain the transparent film 40 shown in FIG. 3 .
作为活性能量射线照射装置28,高压汞灯、金属卤化物灯等是优选的,该情况下的光照射能量优选为100~10000mJ/cm2。As the active energy ray irradiation device 28, a high-pressure mercury lamp, a metal halide lamp, or the like is preferable, and the light irradiation energy in this case is preferably 100 to 10000 mJ/cm 2 .
(基材薄膜)(substrate film)
作为基材薄膜42,从透过基材薄膜42照射活性能量射线的观点来看,透明性高的薄膜是优选的。作为上述薄膜的材料,例如,可列举出丙烯酸系树脂、聚对苯二甲酸乙二醇酯、聚碳酸酯、三乙酰纤维素等。As the base film 42 , a film with high transparency is preferable from the viewpoint of irradiating active energy rays through the base film 42 . As a material of the said film, acrylic resin, polyethylene terephthalate, polycarbonate, triacetyl cellulose, etc. are mentioned, for example.
(固化覆膜)(cured film)
固化覆膜44是后述活性能量射线固化性树脂组合物的固化物形成的膜,表面具有微细凹凸结构。The cured film 44 is a film formed of a cured product of an active energy ray-curable resin composition to be described later, and has a fine uneven structure on the surface.
使用阳极氧化氧化铝的模具时的透明薄膜40的表面的微细凹凸结构是转印阳极氧化氧化铝表面的微细凹凸结构而形成的,具有由活性能量射线固化性树脂组合物的固化物构成的多个凸部46。When using an anodized aluminum mold, the fine uneven structure on the surface of the transparent film 40 is formed by transferring the fine uneven structure on the anodized aluminum surface, and has many a convex portion 46.
微细凹凸结构优选是多个大致圆锥形状、棱锥形状等突起(凸部)排列而形成的所谓蛾眼结构。已知的是,突起之间的间隔为可见光波长以下的蛾眼结构由于折射率从空气的折射率连续增大至材料的折射率,从而,构成了有效的防反射手段。The fine concavo-convex structure is preferably a so-called moth-eye structure formed by arranging a plurality of substantially conical, pyramidal, or other protrusions (convex portions). It is known that a moth-eye structure with a spacing between protrusions below the wavelength of visible light constitutes an effective anti-reflection means due to the continuous increase in the refractive index from that of air to that of the material.
凸部之间的平均间隔优选为可见光的波长以下,即400nm以下。使用阳极氧化氧化铝的模具形成凸部时,凸部之间的平均间隔为100nm左右,更优选为200nm以下,特别优选为150nm以下。The average interval between convex portions is preferably equal to or less than the wavelength of visible light, that is, equal to or less than 400 nm. When the protrusions are formed using an anodized alumina mold, the average interval between the protrusions is about 100 nm, more preferably 200 nm or less, particularly preferably 150 nm or less.
从容易形成凸部的观点考虑,凸部之间的平均间隔优选为20nm以上。From the viewpoint of easy formation of the convex portions, the average interval between the convex portions is preferably 20 nm or more.
凸部之间的平均间隔是通过电子显微镜观察,测定邻接的凸部19之间的50个间隔(从凸部的中心到邻接的凸部的中心的距离),将这些值平均而获得的值。The average interval between convex portions is a value obtained by measuring 50 intervals between adjacent convex portions 19 (the distance from the center of the convex portion to the center of the adjacent convex portion) by electron microscope observation, and averaging these values. .
在平均间隔为100nm时,凸部的高度优选为80~500nm,更优选为120~400nm,特别优选为150~300nm。如果凸部的高度为80nm以上,则反射率明显变低,且反射率的波长依赖性小。如果凸部的高度为500nm以下,则凸部的耐擦伤性变得良好。When the average interval is 100 nm, the height of the convex portion is preferably 80 to 500 nm, more preferably 120 to 400 nm, particularly preferably 150 to 300 nm. When the height of the convex portion is 80 nm or more, the reflectance becomes significantly lower, and the wavelength dependence of the reflectance is small. The scratch resistance of a convex part becomes favorable as the height of a convex part is 500 nm or less.
凸部的高度是通过电子显微镜在30000倍倍率下观察时的凸部的最顶部与凸部之间存在的凹部的最低部之间的距离的测定值。The height of the convex portion is a measured value of the distance between the topmost portion of the convex portion and the lowest portion of the concave portion existing between the convex portions when observed with an electron microscope at a magnification of 30,000.
凸部的高宽比(凸部的高度/凸部之间的平均间隔)优选为0.8~5.0,更优选为1.2~4.0,特别优选为1.5~3.0。凸部的高宽比为1.0以上时,反射率明显变低。凸部的高宽比为5.0以下时,则凸部的耐擦伤性变得良好。The aspect ratio of the protrusions (the height of the protrusions/the average interval between the protrusions) is preferably 0.8 to 5.0, more preferably 1.2 to 4.0, and particularly preferably 1.5 to 3.0. When the aspect ratio of a convex part is 1.0 or more, reflectance becomes low remarkably. When the aspect ratio of a convex part is 5.0 or less, the abrasion resistance of a convex part will become favorable.
凸部的形状是与高度方向正交的方向的凸部截面积从最表面向深度方向连续增加的形状,即,凸部的高度方向的截面形状优选是三角形、梯形、吊钟形等形状。The shape of the convex part is a shape in which the cross-sectional area of the convex part in the direction perpendicular to the height direction increases continuously from the outermost surface to the depth direction, that is, the cross-sectional shape of the convex part in the height direction is preferably a triangle, trapezoid, bell shape or the like.
固化覆膜44的折射率与基材薄膜42的折射率之差优选为0.2以下,更优选为0.1以下,特别优选为0.05以下。如果折射率差为0.2以下,则可抑制固化覆膜44与基材薄膜42的界面上的反射。The difference between the refractive index of the cured film 44 and the base film 42 is preferably 0.2 or less, more preferably 0.1 or less, particularly preferably 0.05 or less. When the refractive index difference is 0.2 or less, reflection at the interface between the cured coating film 44 and the base film 42 can be suppressed.
已知的是,表面具有微细凹凸结构时,如果该表面由疏水性的材料形成,则通过荷叶效应可获得超憎水性,如果该表面由亲水性的材料形成,则可获得超亲水性。It is known that when the surface has a fine concave-convex structure, if the surface is formed of a hydrophobic material, superhydrophobicity can be obtained through the lotus leaf effect, and if the surface is formed of a hydrophilic material, superhydrophilicity can be obtained. sex.
固化覆膜44的材料为疏水性时的微细凹凸结构的表面的水接触角优选为90°以上,更优选为110°以上,特别优选为120°以上。如果水接触角为90°以上,则不容易附着水渍,因此可发挥充分的防污性。另外,由于不容易附着水,预期可以防止结冰。When the material of the cured film 44 is hydrophobic, the water contact angle of the surface of the fine uneven structure is preferably 90° or more, more preferably 110° or more, and particularly preferably 120° or more. When the water contact angle is 90° or more, water stains are less likely to adhere, and thus sufficient antifouling properties can be exhibited. In addition, since water does not easily adhere, it is expected that freezing can be prevented.
固化覆膜44的材料为亲水性时的微细凹凸结构的表面的水接触角优选为25°以下,更优选为23°以下,特别优选为21°以下。如果水接触角为25°以下,表面附着的污垢可用水洗掉,另外不容易附着油污,因此,可发挥充分的防污性。从可抑制固化覆膜44的吸水导致的微细凹凸结构的变形、与此相随的反射率的上升的观点来看,上述水接触角优选为3°以上。When the material of the cured coating 44 is hydrophilic, the water contact angle of the surface of the fine uneven structure is preferably 25° or less, more preferably 23° or less, particularly preferably 21° or less. If the water contact angle is 25° or less, the dirt adhering to the surface can be washed off with water, and oil stains are less likely to adhere, so sufficient antifouling properties can be exhibited. The water contact angle is preferably 3° or more from the viewpoint of suppressing the deformation of the fine uneven structure due to water absorption of the cured film 44 and the accompanying increase in reflectance.
(活性能量射线固化性树脂组合物)(Active energy ray curable resin composition)
活性能量射线固化性树脂组合物含有聚合性化合物和聚合引发剂。The active energy ray curable resin composition contains a polymerizable compound and a polymerization initiator.
作为聚合性化合物,可列举出分子中具有自由基聚合性键和/或阳离子聚合性键的单体、低聚物、反应性聚合物等。Examples of the polymerizable compound include monomers, oligomers, and reactive polymers having a radically polymerizable bond and/or a cationically polymerizable bond in the molecule.
活性能量射线固化性树脂组合物还可以含有非反应性的聚合物、活性能量射线溶胶-凝胶反应性组合物。The active energy ray-curable resin composition may contain a non-reactive polymer and an active energy ray sol-gel reactive composition.
作为具有自由基聚合性键的单体,可列举出单官能单体、多官能单体。As a monomer which has a radically polymerizable bond, a monofunctional monomer and a polyfunctional monomer are mentioned.
作为单官能单体,可列举出(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸异丁酯、(甲基)丙烯酸仲丁酯、(甲基)丙烯酸叔丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸烷基酯、(甲基)丙烯酸十三烷基酯、(甲基)丙烯酸硬脂酯、(甲基)丙烯酸环己酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸苯氧基乙酯、(甲基)丙烯酸异冰片酯、(甲基)丙烯酸缩水甘油酯、(甲基)丙烯酸四氢糠酯、(甲基)丙烯酸烯丙酯、(甲基)丙烯酸2-羟乙酯、(甲基)丙烯酸羟丙酯、(甲基)丙烯酸2-甲氧基乙酯、(甲基)丙烯酸2-乙氧基乙酯等(甲基)丙烯酸酯衍生物;(甲基)丙烯酸、(甲基)丙烯腈;苯乙烯、α-甲基苯乙烯等苯乙烯衍生物;(甲基)丙烯酰胺、N-二甲基(甲基)丙烯酰胺、N-二乙基(甲基)丙烯酰胺、二甲基氨基丙基(甲基)丙烯酰胺等(甲基)丙烯酰胺衍生物等。这些可以单独使用一种,也可以将两种以上组合使用。Examples of monofunctional monomers include methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, n-butyl (meth)acrylate, and isobutyl (meth)acrylate. , sec-butyl (meth)acrylate, tert-butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, lauryl (meth)acrylate, alkyl (meth)acrylate, (meth)acrylate base) tridecyl acrylate, stearyl (meth)acrylate, cyclohexyl (meth)acrylate, benzyl (meth)acrylate, phenoxyethyl (meth)acrylate, (meth) Isobornyl acrylate, Glycidyl (meth)acrylate, Tetrahydrofurfuryl (meth)acrylate, Allyl (meth)acrylate, 2-Hydroxyethyl (meth)acrylate, Hydroxy(meth)acrylate (Meth)acrylate derivatives such as propyl ester, 2-methoxyethyl (meth)acrylate, 2-ethoxyethyl (meth)acrylate; (meth)acrylic acid, (meth)acrylonitrile ; Styrene derivatives such as styrene and α-methylstyrene; (meth)acrylamide, N-dimethyl(meth)acrylamide, N-diethyl(meth)acrylamide, dimethyl (Meth)acrylamide derivatives such as aminopropyl (meth)acrylamide, etc. These may be used alone or in combination of two or more.
作为多官能单体,可列举出乙二醇二(甲基)丙烯酸酯、三丙二醇二(甲基)丙烯酸酯、异氰脲酸环氧乙烷改性二(甲基)丙烯酸酯、三甘醇二(甲基)丙烯酸酯、二甘醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、1,5-戊二醇二(甲基)丙烯酸酯、1,3-丁二醇二(甲基)丙烯酸酯、聚丁二醇二(甲基)丙烯酸酯、2,2-双(4-(甲基)丙烯酰氧基聚乙氧基苯基)丙烷、2,2-双(4-(甲基)丙烯酰氧基乙氧基苯基)丙烷、2,2-双(4-(3-(甲基)丙烯酰氧基-2-羟基丙氧基)苯基)丙烷、1,2-双(3-(甲基)丙烯酰氧基-2-羟基丙氧基)乙烷、1,4-双(3-(甲基)丙烯酰氧基-2-羟基丙氧基)丁烷、二羟甲基三环癸烷二(甲基)丙烯酸酯、双酚A的环氧乙烷加合物二(甲基)丙烯酸酯、双酚A的环氧丙烷加合物二(甲基)丙烯酸酯、羟基新戊酸新戊二醇二(甲基)丙烯酸酯、二乙烯基苯、亚甲基双丙烯酰胺等二官能性单体;季戊四醇三(甲基)丙烯酸酯、三羟甲基丙烷三(甲基)丙烯酸酯、三羟甲基丙烷环氧乙烷改性三(甲基)丙烯酸酯、三羟甲基丙烷环氧丙烷改性三丙烯酸酯、三羟甲基丙烷环氧乙烷改性三丙烯酸酯、异氰脲酸环氧乙烷改性三(甲基)丙烯酸酯等三官能单体;丁二酸/三羟甲基乙烷/丙烯酸的缩合反应混合物、二季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二(三羟甲基丙烷)四丙烯酸酯、四羟甲基甲烷四(甲基)丙烯酸酯等四官能以上的单体;二官能以上的氨基甲酸酯基丙烯酸酯、二官能以上的聚酯丙烯酸酯等。这些可以单独使用一种,也可以将两种以上组合使用。Examples of polyfunctional monomers include ethylene glycol di(meth)acrylate, tripropylene glycol di(meth)acrylate, isocyanurate ethylene oxide-modified di(meth)acrylate, triglyceride Alcohol di(meth)acrylate, Diethylene glycol di(meth)acrylate, Neopentyl glycol di(meth)acrylate, 1,6-Hexanediol di(meth)acrylate, 1,5 -Pentylene glycol di(meth)acrylate, 1,3-butanediol di(meth)acrylate, polytetramethylene glycol di(meth)acrylate, 2,2-bis(4-(methyl) )acryloyloxypolyethoxyphenyl) propane, 2,2-bis(4-(meth)acryloyloxyethoxyphenyl)propane, 2,2-bis(4-(3-( Meth)acryloyloxy-2-hydroxypropoxy)phenyl)propane, 1,2-bis(3-(meth)acryloyloxy-2-hydroxypropoxy)ethane, 1,4 - Ethylene oxide addition of bis(3-(meth)acryloyloxy-2-hydroxypropoxy)butane, dimethyloltricyclodecane di(meth)acrylate, bisphenol A Di(meth)acrylate, propylene oxide adduct of bisphenol A di(meth)acrylate, hydroxypivalic acid neopentyl glycol di(meth)acrylate, divinylbenzene, methylene Bifunctional monomers such as bisacrylamide; pentaerythritol tri(meth)acrylate, trimethylolpropane tri(meth)acrylate, trimethylolpropane ethylene oxide modified tri(meth)acrylic acid Ester, trimethylolpropane propylene oxide modified triacrylate, trimethylolpropane ethylene oxide modified triacrylate, isocyanurate ethylene oxide modified tri(meth)acrylate, etc. Functional monomers; condensation reaction mixture of succinic acid/trimethylolethane/acrylic acid, dipentaerythritol hexa(meth)acrylate, dipentaerythritol penta(meth)acrylate, bis(trimethylolpropane) tetra Acrylic esters, tetramethylolmethane tetra(meth)acrylate and other monomers with more than four functions; urethane-based acrylates with more than two functions, polyester acrylates with more than two functions, etc. These may be used alone or in combination of two or more.
作为具有阳离子聚合性键的单体,可列举出具有环氧基、氧杂环丁基、噁唑基、乙烯氧基等的单体,具有环氧基的单体是特别优选的。Examples of the monomer having a cationic polymerizable bond include monomers having an epoxy group, oxetanyl group, oxazolyl group, vinyloxy group, and the like, and monomers having an epoxy group are particularly preferable.
作为低聚物或反应性聚合物,可列举出不饱和二羧酸与多元醇的缩合物等不饱和聚酯类;聚酯(甲基)丙烯酸酯、聚醚(甲基)丙烯酸酯、多元醇(甲基)丙烯酸酯、环氧(甲基)丙烯酸酯、氨基甲酸酯(甲基)丙烯酸酯、阳离子聚合型环氧化合物、侧链上具有自由基聚合性键的上述单体的均聚物或共聚物等。Examples of oligomers or reactive polymers include unsaturated polyesters such as condensation products of unsaturated dicarboxylic acids and polyhydric alcohols; polyester (meth)acrylates, polyether (meth)acrylates, Alcohol (meth)acrylates, epoxy (meth)acrylates, urethane (meth)acrylates, cationic polymerizable epoxy compounds, homogeneous combinations of the above monomers having radically polymerizable bonds on the side chains polymers or copolymers etc.
作为非反应性的聚合物,可列举出丙烯酸系树脂、苯乙烯系树脂、聚氨酯、纤维素系树脂、聚乙烯醇缩丁醛、聚酯、热塑性弹性体等。Examples of non-reactive polymers include acrylic resins, styrene resins, polyurethanes, cellulose resins, polyvinyl butyral, polyesters, and thermoplastic elastomers.
作为活性能量射线溶胶-凝胶反应性组合物,可列举出烷氧基硅烷化合物、硅酸烷基酯化合物等。Examples of the active energy ray sol-gel reactive composition include alkoxysilane compounds, alkyl silicate compounds, and the like.
作为烷氧基硅烷化合物,可列举出下述式(1)的化合物:Examples of the alkoxysilane compound include compounds of the following formula (1):
R11 xSi(OR12)y ···(1)R 11 x Si(OR 12 ) y ···(1)
其中,R11、R12各自表示碳原子数1~10的烷基,x、y表示满足x+y=4的关系的整数。However, R 11 and R 12 each represent an alkyl group having 1 to 10 carbon atoms, and x and y represent integers satisfying the relationship of x+y=4.
作为烷氧基硅烷化合物,可列举出四甲氧基硅烷、四异丙氧基硅烷、四正丙氧基硅烷、四正丁氧基硅烷、四仲丁氧基硅烷、四叔丁氧基硅烷、甲基三乙氧基硅烷、甲基三丙氧基硅烷、甲基三丁氧基硅烷、二甲基二甲氧基硅烷、二甲基二乙氧基硅烷、三甲基乙氧基硅烷、三甲基甲氧基硅烷、三甲基丙氧基硅烷、三甲基丁氧基硅烷等。Examples of alkoxysilane compounds include tetramethoxysilane, tetraisopropoxysilane, tetra-n-propoxysilane, tetra-n-butoxysilane, tetra-sec-butoxysilane, tetra-tert-butoxysilane , Methyltriethoxysilane, Methyltripropoxysilane, Methyltributoxysilane, Dimethyldimethoxysilane, Dimethyldiethoxysilane, Trimethylethoxysilane , Trimethylmethoxysilane, trimethylpropoxysilane, trimethylbutoxysilane, etc.
作为硅酸烷基酯化合物,可列举出下述式(2)的化合物:Examples of the alkyl silicate compound include compounds of the following formula (2):
R21O[Si(OR23)(OR24)O]zR22···(2)R 21 O[Si(OR 23 )(OR 24 )O] z R 22 ···(2)
其中,R21~R24各自表示碳原子数1~5的烷基,z表示3~20的整数。Wherein, R 21 to R 24 each represent an alkyl group having 1 to 5 carbon atoms, and z represents an integer of 3 to 20.
作为硅酸烷基酯化合物,可列举出硅酸甲酯、硅酸乙酯、硅酸异丙酯、硅酸正丙酯、硅酸正丁酯、硅酸正戊酯、乙酰硅酸酯等。Examples of alkyl silicate compounds include methyl silicate, ethyl silicate, isopropyl silicate, n-propyl silicate, n-butyl silicate, n-pentyl silicate, and acetyl silicate. .
利用光固化反应时,作为光聚合引发剂,例如可列举出苯偶姻、苯偶姻甲醚、苯偶姻乙醚、苯偶姻异丙醚、苯偶姻异丁醚、苯偶酰、二苯甲酮、对甲氧基二苯甲酮、2,2-二乙氧基乙酰苯、α,α-二甲氧基-α-苯基乙酰苯、苯甲酰甲酸甲酯、苯甲酰甲酸乙酯、4,4’-双(二甲基氨基)二苯甲酮、2-羟基-2-甲基-1-苯基丙-1-酮等羰基化合物;一硫化四甲基秋兰姆、二硫化四甲基秋兰姆等硫化合物;2,4,6-三甲基苯甲酰二甲基氧化膦、苯甲酰二乙氧基氧化膦等。这些可以单独使用一种,也可以将两种以上组合使用。When photocuring reaction is used, examples of photopolymerization initiators include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzyl, Benzophenone, p-methoxybenzophenone, 2,2-diethoxyacetophenone, α,α-dimethoxy-α-phenylacetophenone, methyl benzoylformate, benzoyl Carbonyl compounds such as ethyl formate, 4,4'-bis(dimethylamino)benzophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, etc.; Tetramethylqiuran monosulfide 2,4,6-trimethylbenzoyldimethylphosphine oxide, benzoyldiethoxyphosphine oxide, etc. These may be used alone or in combination of two or more.
利用电子束固化反应时,作为聚合引发剂,例如可列举出二苯甲酮、4,4-双(二乙基氨基)二苯甲酮、2,4,6-三甲基二苯甲酮、邻苯甲酰基苯甲酸甲酯、4-苯基二苯甲酮、叔丁基蒽醌、2-乙基蒽醌、2,4-二乙基噻吨酮、异丙基噻吨酮、2,4-二氯噻吨酮等噻吨酮类;二乙氧基乙酰苯、2-羟基-2-甲基-1-苯基丙-1-酮、安息香双甲醚、1-羟基环己基-苯基酮、2-甲基-2-吗啉基(4-硫代甲基苯基)丙-1-酮、2-苄基-2-二甲基氨基-1-(4-吗啉基苯基)-丁酮等乙酰苯类;苯偶姻甲醚、苯偶姻乙醚、苯偶姻异丙醚、苯偶姻异丁醚等苯偶姻醚类;2,4,6-三甲基苯甲酰二苯基氧化膦、双(2,6-二甲氧基苯甲酰基)-2,4,4-三甲基戊基氧化膦、双(2,4,6-三甲基苯甲酰基)-苯基氧化膦等酰基氧化膦类;苯甲酰基甲酸甲酯、1,7-双吖啶基庚烷、9-苯基吖啶等。这些可以单独使用一种,也可以将两种以上组合使用。When the electron beam curing reaction is used, examples of the polymerization initiator include benzophenone, 4,4-bis(diethylamino)benzophenone, and 2,4,6-trimethylbenzophenone. , methyl phthaloylbenzoate, 4-phenylbenzophenone, tert-butylanthraquinone, 2-ethylanthraquinone, 2,4-diethylthioxanthone, isopropylthioxanthone, Thioxanthones such as 2,4-dichlorothioxanthone; diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzoin dimethyl ether, 1-hydroxycyclo Hexyl-phenyl ketone, 2-methyl-2-morpholinyl (4-thiomethylphenyl) propan-1-one, 2-benzyl-2-dimethylamino-1-(4-morpholin benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether and other benzoin ethers; 2,4,6- Trimethylbenzoyldiphenylphosphine oxide, bis(2,6-dimethoxybenzoyl)-2,4,4-trimethylpentylphosphine oxide, bis(2,4,6-tri Acyl phosphine oxides such as methylbenzoyl)-phenylphosphine oxide; methyl benzoylformate, 1,7-diacridinylheptane, 9-phenylacridine, etc. These may be used alone or in combination of two or more.
利用热固化反应时,作为热聚合引发剂,例如可列举出过氧化甲乙酮、过氧化苯甲酰、过氧化二异丙苯、叔丁基过氧化氢、氢过氧化枯烯、过氧化辛酸叔丁酯、过氧化苯甲酸叔丁酯、过氧化月桂酰等有机过氧化物;偶氮双异丁腈等偶氮系化合物;将N,N-二甲基苯胺、N,N-二甲基-对甲苯胺等胺与上述有机过氧化物组合的氧化还原聚合引发剂等。When thermal curing reaction is utilized, examples of thermal polymerization initiators include methyl ethyl ketone peroxide, benzoyl peroxide, dicumyl peroxide, tert-butyl hydroperoxide, cumene hydroperoxide, tertiary octanoic acid peroxide, Butyl ester, tert-butyl peroxybenzoate, lauroyl peroxide and other organic peroxides; azo-based compounds such as azobisisobutyronitrile; N,N-dimethylaniline, N,N-dimethyl - A redox polymerization initiator in which an amine such as p-toluidine is combined with the above-mentioned organic peroxide, and the like.
聚合引发剂的量相对于100质量份聚合性化合物优选为0.1~10质量份。聚合引发剂的量低于0.1质量份时,难以进行聚合。聚合引发剂的量超过10质量份时,固化膜有时着色或机械强度降低。The amount of the polymerization initiator is preferably 0.1 to 10 parts by mass relative to 100 parts by mass of the polymerizable compound. When the amount of the polymerization initiator is less than 0.1 parts by mass, it is difficult to carry out polymerization. When the quantity of a polymerization initiator exceeds 10 mass parts, a cured film may be colored or mechanical strength may fall.
活性能量射线固化性树脂组合物根据需要可以含有抗静电剂、脱模剂、用于提高防污性的氟化合物等添加剂、微粒以及少量的溶剂。The active energy ray-curable resin composition may contain antistatic agents, mold release agents, additives such as fluorine compounds for improving antifouling properties, fine particles, and a small amount of solvents, as needed.
(疏水性材料)(hydrophobic material)
为了将固化覆膜44的微细凹凸结构的表面的水接触角设定为90°以上,作为可形成疏水性的材料的活性能量射线固化性树脂组合物,优选使用含有含氟化合物或硅酮系化合物的组合物。In order to set the water contact angle of the surface of the fine uneven structure of the cured film 44 to 90° or more, it is preferable to use a fluorine-containing compound or a silicone-based active energy ray-curable resin composition as a material capable of forming hydrophobicity. Composition of compounds.
含氟化合物:Fluorochemicals:
作为含氟化合物,具有下述式(3)表示的氟烷基的化合物是优选的:As the fluorine-containing compound, a compound having a fluoroalkyl group represented by the following formula (3) is preferable:
-(CF2)n-X ···(3)-(CF 2 ) n -X ···(3)
其中,X表示氟原子或氢原子,n表示1以上的整数,优选为1~20,更优选为3~10,特别优选为4~8。Wherein, X represents a fluorine atom or a hydrogen atom, n represents an integer of 1 or more, preferably 1-20, more preferably 3-10, particularly preferably 4-8.
作为含氟化合物,可列举出含氟单体、含氟硅烷偶联剂、含氟表面活性剂、含氟聚合物等。Examples of the fluorine-containing compound include fluorine-containing monomers, fluorine-containing silane coupling agents, fluorine-containing surfactants, fluorine-containing polymers, and the like.
作为含氟单体,可列举出氟烷基取代的乙烯基单体、氟烷基取代开环聚合性单体等。Examples of the fluorine-containing monomer include fluoroalkyl-substituted vinyl monomers, fluoroalkyl-substituted ring-opening polymerizable monomers, and the like.
作为氟烷基取代乙烯基单体,可列举出氟烷基取代(甲基)丙烯酸酯、氟烷基取代(甲基)丙烯酰胺、氟烷基取代乙烯基醚、氟烷基取代苯乙烯等。Examples of fluoroalkyl-substituted vinyl monomers include fluoroalkyl-substituted (meth)acrylates, fluoroalkyl-substituted (meth)acrylamides, fluoroalkyl-substituted vinyl ethers, and fluoroalkyl-substituted styrenes. .
作为氟烷基取代开环聚合性单体,可列举出氟烷基取代环氧化合物、氟烷基取代氧杂环丁烷化合物、氟烷基取代噁唑啉化合物等。As a fluoroalkyl-substituted ring-opening polymerizable monomer, a fluoroalkyl-substituted epoxy compound, a fluoroalkyl-substituted oxetane compound, a fluoroalkyl-substituted oxazoline compound, etc. are mentioned.
作为含氟单体,氟烷基取代(甲基)丙烯酸酯是优选的,下述式(4)的化合物是特别优选的。As the fluorine-containing monomer, a fluoroalkyl-substituted (meth)acrylate is preferable, and a compound of the following formula (4) is particularly preferable.
CH2=C(R41)C(O)O-(CH2)m-(CF2)n-X ···(4)CH 2 =C(R 41 )C(O)O-(CH 2 ) m -(CF 2 ) n -X ···(4)
其中,R41表示氢原子或甲基,X表示氢原子或氟原子,m表示1~6的整数,优选1~3,更优选1或2,n表示1~20的整数,优选3~10,更优选4~8。Wherein, R represents a hydrogen atom or a methyl group, X represents a hydrogen atom or a fluorine atom, m represents an integer of 1 to 6, preferably 1 to 3, more preferably 1 or 2, n represents an integer of 1 to 20, preferably 3 to 10 , more preferably 4~8.
作为含氟硅烷偶联剂,氟烷基取代硅烷偶联剂是优选的,下述式(5)的化合物是特别优选的:As the fluorine-containing silane coupling agent, the fluoroalkyl-substituted silane coupling agent is preferred, and the compound of the following formula (5) is particularly preferred:
(Rf)aR51 bSiYc ···(5)(R f ) a R 51 b SiY c ···(5)
Rf表示任选含有1个以上醚键或酯键的碳原子数1~20的氟取代烷基。作为Rf,可列举出3,3,3-三氟丙基、十三氟-1,1,2,2-四氢辛基、3-三氟甲氧基丙基、3-三氟乙酰氧基丙基等。R f represents a fluorine-substituted alkyl group having 1 to 20 carbon atoms optionally containing one or more ether bonds or ester bonds. Examples of R f include 3,3,3-trifluoropropyl, tridecafluoro-1,1,2,2-tetrahydrooctyl, 3-trifluoromethoxypropyl, 3-trifluoroacetyl Oxypropyl etc.
R51表示碳原子数1~10的烷基。作为R51,可列举出甲基、乙基、环己基等。R 51 represents an alkyl group having 1 to 10 carbon atoms. Examples of R 51 include methyl, ethyl, cyclohexyl and the like.
Y表示羟基或水解性基团。Y represents a hydroxyl group or a hydrolyzable group.
作为水解性基团,可列举出烷氧基、卤素原子、R52C(O)O(其中,R52表示氢原子或碳原子数1~10的烷基)等。Examples of the hydrolyzable group include an alkoxy group, a halogen atom, R 52 C(O)O (where R 52 represents a hydrogen atom or an alkyl group having 1 to 10 carbon atoms), and the like.
作为烷氧基,可列举出甲氧基、乙氧基、丙氧基、异丙氧基、丁氧基、异丁氧基、叔丁氧基、戊氧基、己氧基、环己氧基、庚氧基、辛氧基、2-乙基己氧基、壬氧基、癸氧基、3,7-二甲基辛氧基、月桂基氧基等。Examples of the alkoxy group include methoxy, ethoxy, propoxy, isopropoxy, butoxy, isobutoxy, tert-butoxy, pentyloxy, hexyloxy, and cyclohexyloxy Heptyloxy, octyloxy, 2-ethylhexyloxy, nonyloxy, decyloxy, 3,7-dimethyloctyloxy, lauryloxy, etc.
作为卤素原子,可列举出Cl、Br、I等。Cl, Br, I, etc. are mentioned as a halogen atom.
作为R52C(O)O,可列举出CH3C(O)O、C2H5C(O)O等。Examples of R 52 C(O)O include CH 3 C(O)O, C 2 H 5 C(O)O, and the like.
a、b、c表示满足a+b+c=4且a≥1、c≥1的整数,优选a=1、b=0、c=3。a, b, and c represent integers satisfying a+b+c=4 and a≥1, c≥1, preferably a=1, b=0, c=3.
作为含氟硅烷偶联剂,可列举出3,3,3-三氟丙基三甲氧基硅烷、3,3,3-三氟丙基三乙酰氧基硅烷、二甲基-3,3,3-三氟丙基甲氧基硅烷、十三氟-1,1,2,2-四氢辛基三乙氧基硅烷等。Examples of fluorine-containing silane coupling agents include 3,3,3-trifluoropropyltrimethoxysilane, 3,3,3-trifluoropropyltriacetoxysilane, dimethyl-3,3, 3-trifluoropropylmethoxysilane, tridecafluoro-1,1,2,2-tetrahydrooctyltriethoxysilane, etc.
作为含氟表面活性剂,可列举出含氟烷基阴离子型表面活性剂、含氟烷基阳离子型表面活性剂等。As a fluorine-containing surfactant, a fluorine-containing alkyl anionic surfactant, a fluorine-containing alkyl cationic surfactant, etc. are mentioned.
作为含氟烷基阴离子型表面活性剂,可列举出碳原子数2~10的氟烷基羧酸或其金属盐、全氟辛基磺酰基谷氨酸二钠、3-[ω-氟烷基(C6~C11)氧基]-1-烷基(C3~C4)磺酸钠、3-[ω-氟烷酰基(C6~C8)-N-乙基氨基]-1-丙基磺酸钠、氟烷基(C11~C20)羧酸或其金属盐、全氟烷基羧酸(C7~C13)或其金属盐、全氟烷基(C4~C12)磺酸或其金属盐、全氟辛基磺酸二乙醇酰胺、N-丙基-N-(2-羟乙基)全氟辛基磺酰胺、全氟烷基(C6~C10)磺酰胺丙基三甲基铵盐、全氟烷基(C6~C10)-N-乙基磺酰基甘氨酸盐、单全氟烷基(C6~C16)乙基磷酸酯等。Examples of fluorine-containing alkyl anionic surfactants include fluoroalkyl carboxylic acids with 2 to 10 carbon atoms or metal salts thereof, disodium perfluorooctylsulfonyl glutamate, 3-[ω-fluoroalkane Base (C 6 ~C 11 )oxy]-1-alkyl (C 3 ~C 4 ) sodium sulfonate, 3-[ω-fluoroalkanoyl (C 6 ~C 8 )-N-ethylamino]- Sodium 1-propylsulfonate, fluoroalkyl (C 11 ~C 20 ) carboxylic acid or its metal salt, perfluoroalkyl carboxylic acid (C 7 ~C 13 ) or its metal salt, perfluoroalkyl (C 4 ~C 12 ) sulfonic acid or its metal salt, perfluorooctane sulfonic acid diethanolamide, N-propyl-N-(2-hydroxyethyl) perfluorooctane sulfonamide, perfluoroalkyl (C 6 ~ C 10 ) sulfonamide propyl trimethyl ammonium salt, perfluoroalkyl (C 6 ~C 10 )-N-ethylsulfonyl glycinate, monoperfluoroalkyl (C 6 ~C 16 ) ethyl phosphate wait.
作为含氟烷基阳离子型表面活性剂,可列举出含氟烷基脂肪族伯、仲或叔氨基酸,全氟烷基(C6~C10)磺酰胺丙基三甲基铵盐等脂肪族季铵盐,苯甲烃铵盐、苄索氯铵(benzethoniumchloride)、吡啶鎓盐、咪唑鎓盐等。As fluorine-containing alkyl cationic surfactants, fluorine-containing alkyl aliphatic primary, secondary or tertiary amino acids, perfluoroalkyl (C 6 ~C 10 ) sulfonamide propyl trimethyl ammonium salt and other aliphatic Quaternary ammonium salts, benzalkonium salts, benzethonium chloride, pyridinium salts, imidazolium salts, etc.
作为含氟聚合物,可列举出含氟烷基单体聚合物、含氟烷基单体与含聚(氧化亚烷基)单体的共聚物、含氟烷基单体与含交联反应性基团单体的共聚物等。含氟聚合物也可以是含氟烷基单体与可共聚合的其他单体的共聚物。Examples of fluoropolymers include polymers of fluoroalkyl monomers, copolymers of fluoroalkyl monomers and poly(oxyalkylene) monomers, fluoroalkyl monomers Copolymers of sexual group monomers, etc. Fluoropolymers may also be copolymers of fluoroalkyl monomers and other copolymerizable monomers.
作为含氟聚合物,含氟烷基单体与含聚(氧化亚烷基)单体的共聚物是优选的。As the fluorine-containing polymer, copolymers of fluorine-containing alkyl monomers and poly(oxyalkylene)-containing monomers are preferred.
作为聚(氧化亚烷基),下述式(6)所示的基团是优选的:As the poly(oxyalkylene), groups represented by the following formula (6) are preferred:
-(OR61)p-···(6)-(OR 61 ) p -···(6)
其中,R61表示碳原子数2~4的亚烷基,p表示2以上的整数。作为R61,可列举出-CH2CH2-、-CH2CH2CH2-、-CH(CH3)CH2-、-CH(CH3)CH(CH3)-等。Wherein, R 61 represents an alkylene group having 2 to 4 carbon atoms, and p represents an integer of 2 or more. Examples of R 61 include -CH 2 CH 2 -, -CH 2 CH 2 CH 2 -, -CH(CH 3 )CH 2 -, -CH(CH 3 )CH(CH 3 )-, and the like.
聚(氧化亚烷基)可以是由相同的氧化亚烷基单元(OR61)形成的基团,也可以是由2种以上的氧化亚烷基单元(OR61)形成的基团。2种以上的氧化亚烷基单元(OR61)的排列可以是嵌段的,也可以是无规的。The poly(oxyalkylene) may be a group consisting of the same oxyalkylene unit (OR 61 ), or a group consisting of two or more kinds of oxyalkylene units (OR 61 ). The arrangement of two or more kinds of oxyalkylene units (OR 61 ) may be block or random.
硅酮系化合物:Silicone compounds:
作为硅酮系化合物,可列举出(甲基)丙烯酸改性硅酮、硅酮树脂、硅酮系硅烷偶联剂等。Examples of the silicone-based compound include (meth)acrylic-modified silicone, silicone resin, silicone-based silane coupling agent, and the like.
作为(甲基)丙烯酸改性硅酮,可列举出硅酮(二)(甲基)丙烯酸酯等。Examples of the (meth)acryl-modified silicone include silicone (di)(meth)acrylate and the like.
(亲水性材料)(hydrophilic material)
为了将固化覆膜44的微细凹凸结构的表面的水接触角设定为25°以下,作为可形成亲水性的材料的活性能量射线固化性树脂组合物,优选使用至少含有亲水性单体的组合物。另外,从赋予耐擦伤性、耐水性的观点考虑,更优选含有可交联的多官能单体。其中,亲水性单体与可交联的多官能单体可以是相同的(即亲水性多官能单体)。此外,活性能量射线固化性树脂组合物可以含有其他单体。In order to set the water contact angle of the surface of the fine concavo-convex structure of the cured film 44 to 25° or less, as the active energy ray-curable resin composition that can form a hydrophilic material, it is preferable to use Compositions. In addition, from the viewpoint of imparting scratch resistance and water resistance, it is more preferable to contain a crosslinkable polyfunctional monomer. Wherein, the hydrophilic monomer and the crosslinkable polyfunctional monomer may be the same (ie, hydrophilic polyfunctional monomer). In addition, the active energy ray-curable resin composition may contain other monomers.
作为可形成亲水性材料的活性能量射线固化性树脂组合物,更优选使用含有源自下述聚合性化合物的构成单元的组合物。相对于100质量%的构成聚合性化合物的构成单元的合计,优选使用源自聚合性化合物的构成单元包含10~50质量%的源自4官能以上的多官能(甲基)丙烯酸酯的构成单元、30~80质量%的源自2官能以上的亲水性(甲基)丙烯酸酯的构成单元和0~20质量%的源自单官能单体的构成单元的组合物。As the active energy ray-curable resin composition capable of forming a hydrophilic material, it is more preferable to use a composition containing a structural unit derived from a polymerizable compound described below. It is preferable to use a polymeric compound-derived structural unit containing 10 to 50% by mass of a tetrafunctional or more functional (meth)acrylate-derived structural unit with respect to 100% by mass of the total of the structural units constituting the polymeric compound. , A composition comprising 30 to 80 mass % of structural units derived from bifunctional or higher hydrophilic (meth)acrylates and 0 to 20 mass % of structural units derived from monofunctional monomers.
作为4官能以上的多官能(甲基)丙烯酸酯,可列举出双(三羟甲基丙烷)四(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、季戊四醇乙氧基四(甲基)丙烯酸酯、二季戊四醇羟基五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、琥珀酸/三羟甲基乙烷/丙烯酸的摩尔比1:2:4的缩合反应混合物、氨基甲酸酯基丙烯酸酯类(DAICEL-CYTEC Company LTD.制造:EBECRYL220,EBECRYL1290、EBECRYL1290K 、EBECRYL5129、EBECRYL8210、EBECRYL8301、KRM8200)、聚醚丙烯酸酯类(DAICEL-CYTEC Company LTD.制造,EBECRYL81)、改性环氧丙烯酸酯类(DAICEL-CYTEC CompanyLTD.制造,EBECRYL3416)、聚酯丙烯酸酯类(DAICEL-CYTECCompany LTD.制造:EBECRYL450、EBECRYL657、EBECRYL800、EBECRYL810、EBECRYL811、EBECRYL812、EBECRYL1830、EBECRYL845、EBECRYL846、EBECRYL1870)等。这些可以单独使用一种,也可以将两种以上组合使用。Examples of polyfunctional (meth)acrylates having four or more functions include bis(trimethylolpropane)tetra(meth)acrylate, pentaerythritol tetra(meth)acrylate, pentaerythritol ethoxytetra(meth)acrylate, ) acrylate, dipentaerythritol hydroxypenta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, condensation reaction mixture of succinic acid/trimethylolethane/acrylic acid molar ratio 1:2:4, amino Formate acrylates (manufactured by DAICEL-CYTEC Company LTD.: EBECRYL220, EBECRYL1290, EBECRYL1290K , EBECRYL5129, EBECRYL8210, EBECRYL8301, KRM8200), polyether acrylates (manufactured by DAICEL-CYTEC Company LTD., EBECRYL81, modified) Epoxy acrylates (manufactured by DAICEL-CYTEC Company LTD., EBECRYL3416), polyester acrylates (manufactured by DAICEL-CYTEC Company LTD.: EBECRYL450, EBECRYL657, EBECRYL800, EBECRYL810, EBECRYL811, EBECRYL812, EBECRYL1830, EBECRYB848, etc.) . These may be used alone or in combination of two or more.
作为4官能以上的多官能(甲基)丙烯酸酯,5官能以上的多官能(甲基)丙烯酸酯是更优选的。As the tetrafunctional or more polyfunctional (meth)acrylate, pentafunctional or more polyfunctional (meth)acrylate is more preferable.
源自4官能以上的多官能(甲基)丙烯酸酯的构成单元的比例优选为10~50质量%,从耐水性、耐化学品性的观点考虑,更优选为20~50质量%,特别优选为30~50质量%。如果源自4官能以上的多官能(甲基)丙烯酸酯的构成单元的比例为10质量%以上,弹性模量增高,且耐擦伤性改进。如果源自4官能以上的多官能(甲基)丙烯酸酯的构成单元的比例为50质量%以下,则表面难以形成小的龟裂,不容易出现外观不良。The proportion of constituent units derived from tetrafunctional or higher polyfunctional (meth)acrylates is preferably 10 to 50% by mass, more preferably 20 to 50% by mass from the viewpoint of water resistance and chemical resistance, and particularly preferably It is 30~50% by mass. When the ratio of the constituent units derived from the tetrafunctional or higher polyfunctional (meth)acrylate is 10% by mass or more, the modulus of elasticity increases and scratch resistance improves. When the ratio of the constituent units derived from the tetrafunctional or higher polyfunctional (meth)acrylate is 50% by mass or less, small cracks are less likely to be formed on the surface, and appearance defects are less likely to occur.
作为2官能以上的亲水性(甲基)丙烯酸酯,可列举出ARONIX M-240、ARONIX M260(东亚合成公司制造)、NKESTER AT-20E、NK ESTER ATM-35E(新中村化学公司制造)等具有长链聚乙二醇的多官能丙烯酸酯、聚乙二醇二甲基丙烯酸酯等。这些可以单独使用一种,也可以将两种以上组合使用。Examples of bifunctional or higher hydrophilic (meth)acrylates include ARONIX M-240, ARONIX M260 (manufactured by Toagosei Co., Ltd.), NKESTER AT-20E, NK ESTER ATM-35E (manufactured by Shin-Nakamura Chemical Co., Ltd.), etc. Polyfunctional acrylates with long chain polyethylene glycol, polyethylene glycol dimethacrylate, etc. These may be used alone or in combination of two or more.
在聚乙二醇二甲基丙烯酸酯中,1分子内存在的聚乙二醇链的平均重复单元的合计优选为6~40,更优选为9~30,特别优选为12~20。如果聚乙二醇链的平均重复单元为6以上,则亲水性变得充分,防污性改进。如果聚乙二醇链的平均重复单元为40以下,则与4官能以上的多官能(甲基)丙烯酸酯的相容性变得良好,活性能量射线固化性树脂组合物不容易分离。In polyethylene glycol dimethacrylate, the total of the average repeating units of polyethylene glycol chains present in one molecule is preferably 6-40, more preferably 9-30, and particularly preferably 12-20. When the average repeating unit of the polyethylene glycol chain is 6 or more, hydrophilicity becomes sufficient and antifouling property improves. When the average repeating unit of the polyethylene glycol chain is 40 or less, the compatibility with the tetrafunctional or more polyfunctional (meth)acrylate becomes favorable, and the active energy ray-curable resin composition is not easily separated.
源自2官能以上的亲水性(甲基)丙烯酸酯的构成单元的比例优选为30~80质量%,更优选为40~70质量%。如果2官能以上的亲水性(甲基)丙烯酸酯的比例为30质量%以上,则亲水性变得充分,防污性改进。如果2官能以上的亲水性(甲基)丙烯酸酯的比例为80质量%以下,则弹性模量增高,耐擦伤性得到改进。The ratio of the structural unit derived from the bifunctional or more hydrophilic (meth)acrylate is preferably 30 to 80% by mass, more preferably 40 to 70% by mass. When the ratio of the bifunctional or higher hydrophilic (meth)acrylate is 30% by mass or more, hydrophilicity becomes sufficient and antifouling property improves. When the proportion of bifunctional or higher hydrophilic (meth)acrylate is 80% by mass or less, the modulus of elasticity increases and scratch resistance improves.
作为单官能单体,亲水性单官能单体是优选的。As the monofunctional monomer, a hydrophilic monofunctional monomer is preferable.
作为亲水性单官能单体,可列举出M-20G、M-90G、M-230G(新中村化学公司制造)等酯基上具有聚乙二醇链的单官能(甲基)丙烯酸酯、(甲基)丙烯酸羟烷基酯等酯基上具有羟基的单官能(甲基)丙烯酸酯、单官能丙烯酰胺类、甲基丙烯酰胺丙基三甲基甲基硫酸铵、甲基丙烯酰氧基乙基三甲基甲基硫酸铵等阳离子性单体类等。Examples of the hydrophilic monofunctional monomer include monofunctional (meth)acrylates having polyethylene glycol chains on their ester groups such as M-20G, M-90G, and M-230G (manufactured by Shin-Nakamura Chemical Co., Ltd.), Monofunctional (meth)acrylates having a hydroxyl group on the ester group such as hydroxyalkyl (meth)acrylate, monofunctional acrylamides, methacrylamidopropyltrimethylammonium methylsulfate, methacryloxy Cationic monomers such as ethyl ethyl trimethyl ammonium methyl sulfate, etc.
另外,作为单官能单体,可以使用丙烯酰基吗啉、乙烯基吡咯烷酮等粘度调整剂、提高在物品主体上的密合性的丙烯酰基异氰酸酯类等密合性提高剂等。Moreover, as a monofunctional monomer, viscosity modifiers, such as acryloyl morpholine and vinylpyrrolidone, and an adhesive improvement agent, such as acryloyl isocyanate which improves the adhesiveness to an article main body, etc. can be used.
源自单官能单体的构成单元的比例优选为0~20质量%,更优选为5~15质量%。通过使用源自单官能单体的构成单元,部件主体与固化性树脂的密合性改进。如果源自单官能单体的构成单元的比例为20质量%以下,则源自4官能以上的多官能(甲基)丙烯酸酯的构成单元或源自2官能以上的亲水性(甲基)丙烯酸酯的构成单元充足,充分表现了防污性或耐擦伤性。The proportion of constituent units derived from monofunctional monomers is preferably 0 to 20% by mass, more preferably 5 to 15% by mass. By using the structural unit derived from a monofunctional monomer, the adhesiveness of a part main body and curable resin improves. If the proportion of structural units derived from monofunctional monomers is 20% by mass or less, structural units derived from tetrafunctional or higher polyfunctional (meth)acrylates or bifunctional or higher hydrophilic (meth) Acrylic constituent units are sufficient to fully express stain resistance or scratch resistance.
单官能单体作为一种或两种以上聚合(共聚合)的低聚合度的聚合物可以在活性能量射线固化性树脂组合物中配合0~35质量份。作为低聚合度的聚合物,可列举出M-230G(新中村化学公司制造)等酯基上具有聚乙二醇链的单官能(甲基)丙烯酸酯类与甲基丙烯酰胺丙基三甲基甲基硫酸铵的40/60共聚合低聚物(MRC UNITEC Co.,Ltd.制造,MG聚合物)等。Monofunctional monomers can be blended in an active energy ray-curable resin composition in an amount of 0 to 35 parts by mass as one or more polymers (copolymerized) with a low degree of polymerization. Examples of polymers with a low degree of polymerization include M-230G (manufactured by Shin-Nakamura Chemical Co., Ltd.), monofunctional (meth)acrylates having a polyethylene glycol chain on the ester group, and methacrylamidopropyltrimethylmethacrylate. 40/60 copolymerized oligomer of ammonium methylsulfate (manufactured by MRC UNITEC Co., Ltd., MG Polymer), etc.
(用途)(use)
作为透明薄膜40的用途,可列举出防反射薄膜、防雾性薄膜、防污性薄膜、憎水性薄膜,更具体而言,可列举出,显示器用防反射薄膜、汽车仪表盖(meter cover)、汽车反光镜、汽车车窗、有机或无机电致发光的光输出效率提高部件、太阳能电池部件等。Examples of applications of the transparent film 40 include anti-reflection films, anti-fogging films, anti-fouling films, and water-repellent films, and more specifically, anti-reflection films for displays and meter covers for automobiles. , automotive reflectors, automotive windows, organic or inorganic electroluminescent light output efficiency improvement components, solar cell components, etc.
其中,透明薄膜不限于图示例的透明薄膜40。例如,微细凹凸结构可以不设置固化覆膜44,可以在基材薄膜42的表面直接形成。然而,从使用辊状的模具20有效地形成微细凹凸结构的观点来看,优选在固化覆膜44的表面形成有微细凹凸结构。However, the transparent film is not limited to the transparent film 40 of the illustrated example. For example, the fine concavo-convex structure may be formed directly on the surface of the base film 42 without providing the cured coating 44 . However, from the viewpoint of efficiently forming the fine uneven structure using the roll-shaped mold 20 , it is preferable to form the fine uneven structure on the surface of the cured film 44 .
(作用效果)(Effect)
以上说明的本发明的第三实施方式的透明薄膜的制造方法由于使用通过本发明的模具制造方法获得的表面脱模性充分的模具,因此,可以稳定地制造透明薄膜。The method for producing a transparent film according to the third embodiment of the present invention described above uses a mold having sufficient surface releasability obtained by the method for producing a mold of the present invention, so that a transparent film can be stably produced.
实施例Example
以下更具体地通过实施例说明本发明,但本发明不受这些例子限制。Hereinafter, the present invention will be described more specifically by way of examples, but the present invention is not limited by these examples.
(实施例1)(Example 1)
(脱模剂溶液的制备)(Preparation of release agent solution)
使用OPTOOL DSX(DAIKIN INDUSTRIES,Ltd.制造)作为有机系脱模剂、使用DURASURF HD-ZV(HARVES Co.,Ltd.制造)作为稀释用有机溶剂,制备脱模剂浓度为0.1质量%的脱模剂溶液。Using OPTOOL DSX (manufactured by DAIKIN INDUSTRIES, Ltd.) as an organic release agent and DURASURF HD-ZV (manufactured by HARVES Co., Ltd.) as an organic solvent for dilution, a release agent concentration of 0.1% by mass was prepared. agent solution.
(脱模剂的性能评价)(Performance evaluation of release agent)
将所制备的脱模剂溶液与N,N-二甲基甲酰胺(和光纯药工业公司制造,特级,介电常数(25℃):36.71)按1:1的体积比混合,形成混合物。混合物的透光率用分光光度计(日立制作所公司制造,U-3300)测定。作为参照,使用DURASURF HD-ZV与N,N-二甲基甲酰胺按1:1的体积比的混合物。作为测定结果,波长400nm下的透光率为93%。The prepared release agent solution was mixed with N,N-dimethylformamide (manufactured by Wako Pure Chemical Industries, Ltd., special grade, dielectric constant (25° C.): 36.71) at a volume ratio of 1:1 to form a mixture. The light transmittance of the mixture was measured with a spectrophotometer (manufactured by Hitachi, Ltd., U-3300). As a reference, a 1:1 volume ratio mixture of DURASURF HD-ZV and N,N-dimethylformamide was used. As a result of the measurement, the light transmittance at a wavelength of 400 nm was 93%.
(模具的制造)(manufacturing of molds)
将50mm×50mm×厚度0.3mm的铝板(纯度99.99%)在高氯酸/乙醇混合溶液(1/4体积比)中电解研磨。An aluminum plate (purity 99.99%) of 50mm×50mm×thickness 0.3mm was electrolytically ground in a mixed solution of perchloric acid/ethanol (1/4 volume ratio).
工序(a):Process (a):
将上述铝板在0.3M草酸水溶液中在直流40V、温度16℃的条件下进行6小时阳极氧化。The above-mentioned aluminum plate was anodized in 0.3M oxalic acid aqueous solution for 6 hours under the conditions of direct current 40V and temperature 16°C.
工序(b):Process (b):
将形成了氧化覆膜的铝板在6质量%磷酸/1.8质量%铬酸混合水溶液中浸渍3小时,去除氧化覆膜。The aluminum plate on which the oxide film was formed was immersed in a 6% by mass phosphoric acid/1.8% by mass chromic acid mixed aqueous solution for 3 hours to remove the oxide film.
工序(c):Process (c):
将上述铝板在0.3M草酸水溶液中在直流40V、温度16℃的条件下进行30秒阳极氧化。The above-mentioned aluminum plate was anodized in 0.3M oxalic acid aqueous solution for 30 seconds under the conditions of direct current 40V and temperature 16°C.
工序(d):Process (d):
将形成有氧化覆膜的铝板在32℃的5质量%磷酸水溶液中浸渍8分钟,进行细孔孔径扩大处理。The aluminum plate on which the oxide film was formed was immersed in a 5% by mass phosphoric acid aqueous solution at 32° C. for 8 minutes to perform a pore diameter expanding treatment.
工序(e):Process (e):
将上述铝板在0.3M草酸水溶液中在直流40V、温度16℃的条件下进行30秒阳极氧化。The above-mentioned aluminum plate was anodized in 0.3M oxalic acid aqueous solution for 30 seconds under the conditions of direct current 40V and temperature 16°C.
工序(f):Process (f):
将上述工序(d)和工序(e)合计重复4次,最后进行工序(d),获得表面形成有具有平均周期:约100nm、深度:约240nm的大致圆锥形状的细孔的阳极氧化氧化铝的模具主体a。The above step (d) and step (e) were repeated 4 times in total, and finally step (d) was performed to obtain anodized aluminum oxide having roughly conical pores with an average period of about 100 nm and a depth of about 240 nm formed on the surface The mold body a.
工序(g):Process (g):
使用淋浴轻轻地冲洗掉模具主体a的表面的磷酸水溶液,然后将模具主体a在流水中浸渍10分钟。The phosphoric acid aqueous solution on the surface of the mold main body a was lightly rinsed off using a shower, and then the mold main body a was immersed in running water for 10 minutes.
工序(h):Process (h):
用气枪将空气吹送到模具主体a上,去除模具主体a的表面附着的水滴。Air is blown onto the mold main body a with an air gun to remove water droplets adhering to the surface of the mold main body a.
工序(i):Process (i):
将模具主体a在上述脱模剂溶液中在室温下浸渍10分钟。The mold main body a was dipped in the above-mentioned release agent solution at room temperature for 10 minutes.
工序(j):Process (j):
以3mm/sec的速度将模具主体a从脱模剂溶液中提起。Lift the mold body a out of the release agent solution at a speed of 3 mm/sec.
工序(k):Process (k):
将模具主体a风干15分钟,获得用脱模剂处理过的模具。The mold main body a was air-dried for 15 minutes to obtain a mold treated with a release agent.
(活性能量射线固化性树脂组合物)(Active energy ray curable resin composition)
作为活性能量射线固化性树脂组合物,准备以下组成的组合物:As the active energy ray-curable resin composition, a composition of the following composition was prepared:
丁二酸/三羟甲基乙烷/丙烯酸的摩尔比1:2:4的缩合反应混合物:45质量份,Condensation reaction mixture with a molar ratio of succinic acid/trimethylolethane/acrylic acid of 1:2:4: 45 parts by mass,
1,6-己二醇二丙烯酸酯(大阪有机化学工业公司制造):45质量份,1,6-hexanediol diacrylate (manufactured by Osaka Organic Chemical Industry Co., Ltd.): 45 parts by mass,
自由基聚合性硅油(信越化学工业公司制造,X-22-1602):10质量份Radical polymerizable silicone oil (manufactured by Shin-Etsu Chemical Co., Ltd., X-22-1602): 10 parts by mass
1-羟基环己基苯基酮(Ciba Specialty Chemicals公司制造,Irgacure 184);3质量份。1-hydroxycyclohexyl phenyl ketone (manufactured by Ciba Specialty Chemicals, Irgacure 184); 3 parts by mass.
(透明薄膜的制造)(Manufacture of transparent film)
在模具的形成有微细凹凸结构的一侧流入活性能量射线固化性树脂组合物,覆盖作为基材薄膜的丙烯酸薄膜之后,通过紫外线照射机(高压汞灯,累计光量:400mJ/cm2)进行固化。接着,通过将固化覆膜与基材薄膜一起从模具脱膜,将模具的微细凹凸结构转印到丙烯酸薄膜上。可以顺利地进行脱膜。The active energy ray-curable resin composition is poured into the side of the mold on which the fine concave-convex structure is formed, covered with an acrylic film as a base film, and then cured by an ultraviolet irradiation machine (high-pressure mercury lamp, cumulative light intensity: 400mJ/cm 2 ) . Next, by releasing the cured film from the mold together with the base film, the fine concave-convex structure of the mold was transferred to the acrylic film. The stripping can be carried out smoothly.
(实施例2)(Example 2)
不更换实施例1的脱模剂溶液,用相同的脱模剂溶液重复进行合计10次模具主体a的表面处理,测定脱模剂溶液和与实施例1同样的N,N-二甲基甲酰胺的1:1体积比的混合物的透光率,结果,波长400nm下的透光率为80%。The release agent solution of Example 1 was not replaced, and the surface treatment of the mold main body a was repeated 10 times with the same release agent solution, and the release agent solution and the same N,N-dimethyl formazan as in Example 1 were measured. The light transmittance of the 1:1 volume ratio mixture of amides, as a result, the light transmittance at a wavelength of 400nm is 80%.
除了使用上述脱模剂溶液以外,与实施例1同样地,将模具的微细凹凸结构转印到丙烯酸薄膜上。可以顺利地进行脱膜。Except having used the above-mentioned release agent solution, it carried out similarly to Example 1, and transferred the fine uneven|corrugated structure of a mold to an acrylic film. The stripping can be carried out smoothly.
(实施例3)(Example 3)
不更换实施例1的脱模剂溶液,用相同的脱模剂溶液重复进行合计20次模具主体a的表面处理,测定脱模剂溶液和与实施例1同样的N,N-二甲基甲酰胺的1:1体积比的混合物的透光率,结果,波长400nm下的透光率为64%。The release agent solution of Example 1 was not replaced, and the surface treatment of the mold main body a was repeated 20 times with the same release agent solution, and the release agent solution and the same N,N-dimethyl formazan as in Example 1 were measured. The light transmittance of the 1:1 volume ratio mixture of amides, as a result, the light transmittance at a wavelength of 400nm is 64%.
除了使用上述脱模剂溶液以外,与实施例1同样地,将模具的微细凹凸结构转印到丙烯酸薄膜上。可以顺利地进行脱膜。Except having used the above-mentioned release agent solution, it carried out similarly to Example 1, and transferred the fine uneven|corrugated structure of a mold to an acrylic film. The stripping can be carried out smoothly.
(比较例1)(comparative example 1)
不更换实施例2的脱模剂溶液,用相同的脱模剂溶液进一步进行5次以上的模具主体a的表面处理,测定脱模剂溶液和与实施例1同样的N,N-二甲基甲酰胺的1:1体积比的混合物的透光率,结果,波长400nm下的透光率为35%。The release agent solution of Example 2 was not replaced, and the surface treatment of the mold body a was further carried out more than 5 times with the same release agent solution, and the release agent solution and the same N,N-dimethyl The light transmittance of the 1:1 volume ratio mixture of formamide, as a result, the light transmittance at a wavelength of 400nm is 35%.
除了使用上述脱模剂溶液以外,与实施例1同样地,将模具的微细凹凸结构转印到丙烯酸薄膜上,结果从第一次转印开始不能将丙烯酸薄膜从模具上脱膜。In the same manner as in Example 1, except that the mold release agent solution was used, the fine concave-convex structure of the mold was transferred to the acrylic film. As a result, the acrylic film could not be released from the mold from the first transfer.
产业上的可利用性Industrial availability
用本发明的制造方法获得的模具可用于制造表面具有称之为蛾眼结构的微细凹凸结构的光学薄膜。The mold obtained by the production method of the present invention can be used to produce an optical film having a fine concave-convex structure called a moth-eye structure on the surface.
Claims (10)
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| JP2009-291775 | 2009-12-24 | ||
| JP2009291775 | 2009-12-24 | ||
| PCT/JP2010/073218 WO2011078265A1 (en) | 2009-12-24 | 2010-12-22 | Method for evaluating performance of organic release agent, process for producing mold, and process for producing transparent film with finely roughened structure on surface |
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| JP5615772B2 (en) * | 2011-07-12 | 2014-10-29 | 株式会社日立産機システム | Pattern transfer apparatus and pattern transfer method |
| JP6600078B2 (en) * | 2016-03-23 | 2019-10-30 | シャープ株式会社 | Manufacturing method of optical film |
| PH12021550642B1 (en) * | 2018-09-27 | 2022-10-21 | Toyo Boseki | Release film for production of ceramic green sheet |
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| JP2003501506A (en) * | 1999-06-01 | 2003-01-14 | バイエル アクチェンゲゼルシャフト | Polycarbonate molding composition having good release properties, and molded and semi-finished products produced therefrom |
| JP2008238502A (en) * | 2007-03-27 | 2008-10-09 | Asahi Glass Co Ltd | Method for producing imprint mold |
| CN101484614A (en) * | 2006-06-30 | 2009-07-15 | 三菱丽阳株式会社 | Mold, method for manufacturing mold, and method for manufacturing sheet |
| CN101501087A (en) * | 2006-08-09 | 2009-08-05 | 瓦克化学有限公司 | Solutions containing solids of siliconorganocopolymers with hight silicon content and high solid conent and method for the production and the use thereof |
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| JP2003306661A (en) * | 2002-02-12 | 2003-10-31 | Mitsubishi Chemicals Corp | Release agent |
| JP4605187B2 (en) * | 2007-06-18 | 2011-01-05 | ダイキン工業株式会社 | Imprint mold and manufacturing method thereof |
| JP2009241351A (en) * | 2008-03-31 | 2009-10-22 | Mitsubishi Rayon Co Ltd | Film for insert molding, insert-molded article and method of manufacturing the same |
| KR20110031275A (en) * | 2008-06-05 | 2011-03-25 | 아사히 가라스 가부시키가이샤 | Mold for nanoimprint, a method of manufacturing the same, and a method of manufacturing a resin molded body having a fine concavo-convex structure on its surface, and a method of manufacturing a wire grid polarizer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2003501506A (en) * | 1999-06-01 | 2003-01-14 | バイエル アクチェンゲゼルシャフト | Polycarbonate molding composition having good release properties, and molded and semi-finished products produced therefrom |
| CN101484614A (en) * | 2006-06-30 | 2009-07-15 | 三菱丽阳株式会社 | Mold, method for manufacturing mold, and method for manufacturing sheet |
| CN101501087A (en) * | 2006-08-09 | 2009-08-05 | 瓦克化学有限公司 | Solutions containing solids of siliconorganocopolymers with hight silicon content and high solid conent and method for the production and the use thereof |
| JP2008238502A (en) * | 2007-03-27 | 2008-10-09 | Asahi Glass Co Ltd | Method for producing imprint mold |
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| WO2011078265A1 (en) | 2011-06-30 |
| KR20120099090A (en) | 2012-09-06 |
| JP5768711B2 (en) | 2015-08-26 |
| CN102666055A (en) | 2012-09-12 |
| TW201124250A (en) | 2011-07-16 |
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