CN102222718A - Film coating process for solar cell slice - Google Patents
Film coating process for solar cell slice Download PDFInfo
- Publication number
- CN102222718A CN102222718A CN2010101542790A CN201010154279A CN102222718A CN 102222718 A CN102222718 A CN 102222718A CN 2010101542790 A CN2010101542790 A CN 2010101542790A CN 201010154279 A CN201010154279 A CN 201010154279A CN 102222718 A CN102222718 A CN 102222718A
- Authority
- CN
- China
- Prior art keywords
- battery sheet
- container
- closed container
- vacuum pumping
- cell slice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a film coating process for a solar cell slice, which sequentially comprises the following steps of: A, putting: putting a cell slice into a closed container; B, vacuum pumping: carrying out vacuum pumping operation on the interior of the closed container by using a vacuum pumping device, wherein the vacuum pumping operation is performed by two steps, and an operating speed of the vacuum pumping in the previous step is slower than that in the latter step to finally make the air pressure in the closed container be kept in 140-170 Pascal; C, ammonia gas filling: filling the container with a proper amount of ammonia gas; D, pre-discharging: discharging the interior of the container for 120-150 seconds by using a high-frequency discharging device; E, depositing: keeping the pressure in the container in 160 Pascal and the temperature in 450 DEG C and continuously keeping for 450 seconds under the state; F, nitrogen filling: carrying out vacuum pumping and nitrogen filling on the interior of the container, and repeating for 2-5 times; and G, taking out: taking the cell slice out of the closed container. The durability, the light conversion rate and various electrical property parameters of the cell slice, which is processed by the process disclosed by the invention, are obviously improved.
Description
Technical field
The invention belongs to the battery sheet processing technology field in the solar battery sheet course of processing, relate in particular to a kind of technology of the solar battery sheet surface being carried out coating film treatment.
Background technology
Day by day the increasing of energy pressure has promoted the flourish of solar energy industry.Crystal silicon solar energy battery uses silicon to be material of main part, discharges electric energy behind the battery sheet absorption solar energy through processing.Greatest factor to the solar energy industry influence on development is exactly the cost problem of solar power generation, is reflected in then to be embodied in two aspects, the one, the photoelectric conversion efficiency of battery sheet, the 2nd, the useful life of battery component on the industry technology.In order to raise the efficiency life-saving, in the process of making the battery sheet, often antireflective and surface treatment are carried out in battery sheet surface, existing processing method to the solar battery sheet surface mainly contains two kinds in general, and a kind of method is at the transparent diaphragm of battery sheet external coating; Another kind method is to carry out plated film on battery sheet surface.Adopt the method for brushing transparent protective film can not guarantee to provide good protective action to the battery sheet, the diaphragm on the microcosmic meaning is not necessarily tight with the applying on surface, and the material cost height, and task difficulty height, diaphragm consistency of thickness everywhere is difficult for guaranteeing.Adopt existing film plating process material cost height, especially effectively illustration in the application of reality, also do not occur.
Summary of the invention
For overcoming above-mentioned defective, the technical issues that need to address of the present invention are: provide a kind of easy to operate, operating cost is low, the effective solar battery sheet coating process on treatment of battery sheet surface.
In order to solve the technical problem technical scheme of the present invention: a kind of solar battery sheet coating process comprises following order step:
A, put boat the battery sheet is put in the closed container;
B, vacuumize and utilize vacuum extractor that closed container inside is vacuumized operation, when vacuumizing operation, operate in two steps, the operating speed that back vacuumizes will be slower than the operating speed that one step of back vacuumizes, and finally makes the air pressure in the closed container maintain 140-170 Pascal;
C, fill ammonia and in container, charge into an amount of ammonia;
D, pre-arcing utilize the high-frequency discharge device that internal tank is discharged 120-150 second;
It is 450 degree that E, deposit make the pressure of internal tank maintain 160 Pascals, temperature, and continuous discharge 450 seconds under this state;
F, fill nitrogen internal tank is vacuumized and charge into nitrogen successively, and repeat 2 to 5 times;
G, get boat the battery sheet is taken out from closed container is inner.
The battery sheet need be put in the graphite boat in advance, and should leave the gap between adjacent two battery sheets, and graphite boat integral body is put into closed container then, or takes out in airtight container.In the deposition process of E step, for the pressure that makes internal tank maintains 160 Pascals, can extract a certain amount of gas according to circumstances from container out or charge into the nitrogen of certain aequum in the container, in normal condition, should be the nitrogen that charges into certain aequum.Described high-frequency discharge device can be commercial or self-control, and the discharge part of electric discharge device should be in internal tank.Silicon generation chemical reaction in ammonia and the cell panel can generate a certain amount of silane, after silane and ammonia are ionized following chemical reaction can take place, and promptly is: SiH
4+ NH
3-→ SixNyHz+H
2↑.Specifically be to utilize high frequency glow discharge generation plasma that thin film deposition process is exerted one's influence, promote gas molecule decomposition, chemical combination, excite and ionization, and promote the generation of reaction active groups.Because having of NH3 is beneficial to flowing and diffusion of active group.Improved growth for Thin Film speed, and the temperature when greatly reducing deposit.Film forming thickness can only be to reach micron level, generally only is tens micron thickness.
In this coating process, after described E step finishes, repeat D step and E step again.After battery sheet process D step and the E step processing; can form thin film on battery sheet surface; but the performance of this layer film does not reach expected effect sometimes; for example might be insufficient in some position reaction of battery sheet; now repeat D step and E step again; can effectively stop the generation of this phenomenon, help to improve the quality of film, for battery sheet surface provides good protective action.And owing to be formed with double-layer films, even after outer membrane changes because of long-time use, internal layer membrane still can continue to provide protective effect to battery sheet surface.
Therefore, beneficial effect of the present invention:
Ionization by ammonia; and react with battery sheet surface; the solid-state product that is generated is deposited on battery sheet surface and forms thin film; thereby for the surface of battery sheet provides good protective action; improved the durability of battery sheet itself; reduce the decay of battery sheet power, helped shaping up of solar energy industry.Adopt this coating process once to handle multi-disc battery sheet, be beneficial to intensification and produce, speed of production is fast, and operation intensity is low, and operating cost is low.Form described film on battery sheet surface, also help of the absorption of battery sheet surface to light, calculate by reality, the battery sheet that adopts this PROCESS FOR TREATMENT to cross is compared with the battery sheet that common process was handled, its phototransformation rate can improve about 15%, and the short circuit current Isc of battery sheet, parallel resistance Rsh, reverse current Irev2 takes an evident turn for the better.
Embodiment
Solar battery sheet coating process of the present invention comprises following order step:
A, put boat the battery sheet is put in the closed container;
B, vacuumize and utilize vacuum extractor that closed container inside is vacuumized operation, when vacuumizing operation, operate in two steps, the operating speed that back vacuumizes will be slower than the operating speed that one step of back vacuumizes, and finally makes the air pressure in the closed container maintain 140-170 Pascal;
C, fill ammonia and in container, charge into an amount of ammonia;
D, pre-arcing utilize the high-frequency discharge device that internal tank is discharged 120-150 second;
E, deposit make the pressure of internal tank maintain 160 Pascals, temperature is 450 degree, and continue 450 seconds under this state;
F, fill nitrogen internal tank is vacuumized and charge into nitrogen successively, and repeat 2 to 5 times;
G, get boat the battery sheet is taken out from closed container is inner.
In above-mentioned these steps, relevant parameters all is the optimum datas that draw by repetition test, though some parameter still can be implemented under the situation of doing suitably variation, the optical attenuation, phototransformation rate and the current parameters that are embodied in the battery sheet have corresponding different variation.For example, in E step deposition process, the pressure and temperature of internal tank should remain on the described numerical value, otherwise just can not finish deposition process smoothly.
The process that vacuumizes in F step and fill nitrogen is the fail safe that improves operation.Fill in the ammonia process in the C step, the described amount that charges into ammonia should be according to the size of what and container of battery sheet and different, also will be according to film forming thickness on battery sheet surface, and the relation of the chemical reaction of corresponding one-tenth branch generation is determined, the amount of the ammonia that charges into should be slightly larger than the amount of ammonia institute actual consumption, this can calculate and test acquisition in advance in the production of reality, and can be corresponding numerical marker under the different situations on the lateral surface of container.
By guaranteeing that above-mentioned D step and E step can repeat once or twice together again in the film forming quality in battery sheet surface.
Claims (2)
1. solar battery sheet coating process comprises following order step:
A, put boat the battery sheet is put in the closed container;
B, vacuumize and utilize vacuum extractor that closed container inside is vacuumized operation, when vacuumizing operation, operate in two steps, the operating speed that back vacuumizes will be slower than the operating speed that one step of back vacuumizes, and finally makes the air pressure in the closed container maintain 140-170 Pascal;
C, fill ammonia and in container, charge into an amount of ammonia;
D, pre-arcing utilize the high-frequency discharge device that internal tank is discharged 120-150 second;
It is 450 degree that E, deposit make the pressure of internal tank maintain 160 Pascals, temperature, and continuous discharge 450 seconds under this state;
F, fill nitrogen internal tank is vacuumized and charge into nitrogen successively, and repeat 2 to 5 times;
G, get boat the battery sheet is taken out from closed container is inner.
2. solar battery sheet coating process according to claim 1 is characterized in that, after described E step finishes, repeats D step and E step again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101542790A CN102222718A (en) | 2010-04-19 | 2010-04-19 | Film coating process for solar cell slice |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101542790A CN102222718A (en) | 2010-04-19 | 2010-04-19 | Film coating process for solar cell slice |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102222718A true CN102222718A (en) | 2011-10-19 |
Family
ID=44779219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101542790A Pending CN102222718A (en) | 2010-04-19 | 2010-04-19 | Film coating process for solar cell slice |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102222718A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101022135A (en) * | 2007-02-09 | 2007-08-22 | 江苏艾德太阳能科技有限公司 | Silicon solar battery antireflective thin film |
| CN101241953A (en) * | 2007-02-07 | 2008-08-13 | 北京中科信电子装备有限公司 | Method for improving quality of reflection reduction film of single crystal silicon solar battery |
| US20090283141A1 (en) * | 2006-04-12 | 2009-11-19 | Renewable Energy Corporation Asa | Solar Cells and Methods for Manufacturing Same |
| JP2010504651A (en) * | 2006-09-25 | 2010-02-12 | イーシーエヌ・エネルギーオンデルゾエク・セントルム・ネーデルランド | Method for manufacturing crystalline silicon solar cell with improved surface passivation |
-
2010
- 2010-04-19 CN CN2010101542790A patent/CN102222718A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090283141A1 (en) * | 2006-04-12 | 2009-11-19 | Renewable Energy Corporation Asa | Solar Cells and Methods for Manufacturing Same |
| JP2010504651A (en) * | 2006-09-25 | 2010-02-12 | イーシーエヌ・エネルギーオンデルゾエク・セントルム・ネーデルランド | Method for manufacturing crystalline silicon solar cell with improved surface passivation |
| CN101241953A (en) * | 2007-02-07 | 2008-08-13 | 北京中科信电子装备有限公司 | Method for improving quality of reflection reduction film of single crystal silicon solar battery |
| CN101022135A (en) * | 2007-02-09 | 2007-08-22 | 江苏艾德太阳能科技有限公司 | Silicon solar battery antireflective thin film |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102864439B (en) | Method for preparing antireflection film with potential induced degradation (PID) effect resistance | |
| CN102544138A (en) | Copper indium gallium selenium thin film solar cell provided with aluminum nitride (AIN) thin film layer | |
| JP2008078619A (en) | Semiconductor thin film manufacturing method, semiconductor thin film manufacturing apparatus, photoelectric conversion element manufacturing method, and photoelectric conversion element | |
| CN103646972B (en) | A kind of TCO thin film and preparation method thereof | |
| CN102185012A (en) | Method for plating silicon nitride anti-reflecting film | |
| CN102637780B (en) | Preparation method for improving performance of industrial silicon thin-film cell component | |
| CN101603171A (en) | Chamber system and process of equipment for preparing transparent conductive film | |
| CN104377261B (en) | One prepares CdTe thin film solar panel method | |
| CN101800268B (en) | A method for improving the performance of amorphous silicon solar cells | |
| CN102222718A (en) | Film coating process for solar cell slice | |
| CN102943251B (en) | Device for enhancing uniformity of PECVD (plasma enhanced chemical vapour deposition) coating film | |
| CN101834229B (en) | Method for improving microstructure and electric property of silicon film solar battery | |
| CN110295358A (en) | A kind of PECVD board saturation process of low EL blackspot | |
| CN104319306A (en) | Efficient laminated thin film solar cell and preparing method thereof | |
| CN102021538A (en) | Film deposition method | |
| CN102816999A (en) | Selenium film deposition method and system and plasma head thereof | |
| CN203049035U (en) | Device for improving PECVD (plasma enhanced chemical vapor deposition) coating uniformity | |
| CN113053718A (en) | Method for cleaning vacuum cavity after deposition of doped crystalline silicon thin film | |
| TW201201396A (en) | Method for manufacturing a solar panel | |
| CN101775591A (en) | Method for depositing film | |
| CN102169925B (en) | Method for manufacturing buffer layer of amorphous silicon thin-film solar cell | |
| CN101235491A (en) | Pulse plasma coating method | |
| CN205295538U (en) | Crystal silicon surface oxidation unit of induced damping effect of anti current potential | |
| CN103022259A (en) | Solar cell film-coating method | |
| CN110629202A (en) | A coating process for improving cell graying |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C53 | Correction of patent of invention or patent application | ||
| CB02 | Change of applicant information |
Address after: Luqiao District of Taizhou city in Zhejiang province 318050 Tyrone Street No. 358 Applicant after: SOPRAY ENERGY CO., LTD. Address before: Luqiao District of Taizhou city in Zhejiang province 318050 Tyrone Street No. 358 Applicant before: Zhejiang Sopray Photoelectric Technology Co.,Ltd. |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: ZHEJIANG SOPRAY OPTOELECTRONIC TECHNOLOGY CO., LTD. TO: SOPRAY ENERGY CO., LTD. |
|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20111019 |