CN102148132B - Optical detection device - Google Patents

Abstract

The invention discloses an optical detection device, which comprises a microscope mechanism opposite to a track; a product clamping mechanism movably arranged on the track and composed of an opening/closing clamping jaw structure and a clamping bracket in a sliding fit with the track; a driving mechanism connected with the product clamping mechanism; a first sensor arranged at the tail end of a clip relatively so as to detect a detected product clamped at the outlet of the clip; a second sensor arranged on the track relatively so as to detect a detected product detained on the track; a control mechanism composed of an alarm and a rocking handle control button mechanism, which are arranged oppositely; and a detecting means at least composed of a visual mechanism opposite to the track. The optical detection device improves the stability of equipment during operation and can provide a plurality of detection means. Meanwhile, the automation degree of the optical detection device is improved and the detection precision thereof is also increased. The optical detection device has the advantages of small size and compact structure, which greatly reduces the occupying space of equipment.

Description

Optical detection device

technical field

The invention relates to the field of mechanical technology, in particular to an optical detection device used in the semiconductor chip manufacturing industry.

Background technique

With the rapid development of semiconductor chip technology and the gradual intensification of market competition, the quality stability and production efficiency of chip products are particularly important to manufacturers.

In the past, the quality inspection of chip products was mainly done manually. The disadvantages of manual detection are obvious: low detection efficiency, poor accuracy of detection results, high personnel cost and long-term detection will damage the eyesight of employees.

In the later stage, there are also some semi-automatic detection equipment, but there are few detection items, single detection means, and low detection efficiency; and there is no fault alarm link. In actual use, special situations such as magazine deformation and product deformation will cause damage to the product. constitute damage.

Therefore, those skilled in the art have been devoting themselves to developing a detection device for chip products with a high degree of automation and multiple detection means.

Contents of the invention

In view of the above-mentioned defects in the prior art, the technical problem to be solved by the present invention is to provide an optical detection device with a high degree of automation and multiple detection means.

In order to achieve the above object, the present invention provides an optical detection device, which is arranged at one end of a track on the bed body and is set opposite to the clip for accommodating the product to be inspected at the other end of the track; the detection device at least It includes: a microscope mechanism arranged opposite to the track; a product clamping mechanism for grasping the product to be inspected, which is movably arranged on the track, and the product clamping mechanism includes an openable and closable Clamping jaw structure and a clamping bracket that slides and cooperates with the track; a driving mechanism connected with the product clamping mechanism; a first sensor arranged at the relative position of the end of the clip so that the first sensor A product to be inspected that is stuck at the outlet of the clip can be detected; a second sensor is arranged at a relative position of the track so that the second sensor can detect the product to be checked that is stuck on the track inspection products; also includes a control mechanism, the control mechanism includes an alarm device and a rocker control button mechanism.

Preferably, it also includes a driving mechanism connected with the product clamping mechanism to drive the product clamping mechanism to move. The driving mechanism is a screw nut mechanism. The lead screw of the lead screw nut mechanism is connected to the motor power, and the nut of the lead screw nut mechanism is detachably and fixedly connected to the product clamping mechanism.

Preferably, the control mechanism has a control panel for inputting working modes.

The control mechanism triggers the alarm device to work after receiving the alarm signal from the first sensor and/or the second sensor.

The present invention is mainly used in the semiconductor chip manufacturing industry, and is used to complete a process in the production of semiconductor packaging—the third optical inspection (3rd Optical Inspection) process, which is carried out after wire bonding (Wire Bond). During the inspection process of chip products in the semiconductor industry, the products will be derailed and damaged from time to time, and then scrapped. The invention can effectively prevent the detected product from being destroyed during the detection process through the detection of the on-rail material jam condition, thereby improving the stability of the equipment during the operation process.

The invention is a detection device for chip products with high degree of automation and multiple detection means. The detection device is aimed at highly integrated chips with small volume and multiple functions, and plays an important role in improving production efficiency and product yield rate in the production of extremely large-scale integrated circuits.

Due to the adoption of the above-mentioned structural design, the present invention can be equipped with various detection means, which improves the automation degree of the detection device and improves the detection accuracy; an alarm mechanism is also provided to effectively prevent the damage to the product caused by the detection operation; the device is small in size, The structure is compact, which greatly reduces the footprint of the equipment.

The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.

Description of drawings

Fig. 1 is the three-dimensional structure schematic diagram of a specific embodiment of the present invention;

Fig. 2 is a front view structural schematic diagram of the embodiment shown in Fig. 1;

Fig. 3 is a partial enlarged view of part A in Fig. 1;

FIG. 4 is a schematic top view of the embodiment shown in FIG. 1 .

Figure number:

Product B, bed body 1, track 2, clip 3, microscope mechanism 4, microscope mounting bracket 41, product clamping mechanism 5, first sensor 6, second sensor 7, control mechanism 8, control panel 81, alarm device 82 , rocker control button mechanism 83, a drive mechanism 9.

Detailed ways

As shown in Figures 1 to 4, it is a specific embodiment of the present invention. The optical detection device is arranged on one end of a track 2 on the bed body 1, and is arranged on the other end of the track 2 for accommodating a product B. 3 relative settings. The clip 3 is placed on the platform of the Z-direction lifting mechanism 31 . The detection device includes:

A microscope mechanism 4 used as a visual mechanism is fixed on the bed body 1 through a microscope mounting bracket 41, and its line of sight falls on the track 2 to cover the product B.

A product clamping mechanism 5 for clamping the product B is movably arranged on the track 2 . The product clamping mechanism 5 includes a clamping jaw structure that can be opened and closed and a clamping bracket (not shown) that slides and fits with the track 2 . The openable jaw structure realizes the clamping operation of product B.

A driving mechanism 9 is connected with the product clamping mechanism 5 to drive the product clamping mechanism 5 to move. In this embodiment, the driving mechanism 9 is an XY-direction mobile platform, specifically a lead screw nut mechanism, the lead screw of the lead screw nut mechanism is connected to the motor power provided in the bed body 1, and the nut of the lead screw nut mechanism is connected to the product holder. The clamping bracket of the holding mechanism 5 is detachably fixedly connected.

A first sensor 6 is arranged at a position opposite to the end of the clip 3 . The meaning of the "relative position" is that those skilled in the art can use existing technical means to adjust the position so that the first sensor 6 can detect the product B that is stuck at the outlet of the clip 3 .

A second sensor 7 is arranged on the relative position of the track 2 . The meaning of the "relative position" is that those skilled in the art can use existing technical means to adjust the position so that the second sensor 7 can detect the product B that is stuck on the track 2 due to various unexpected reasons.

The detection device also includes a control mechanism 8 . The control mechanism 8 has a control panel 81 for inputting multiple working modes, and the inspection mode of the detection device is selected through the control panel 81 on the machine platform.

The control mechanism 8 also includes an alarm device 82 , and the control mechanism 8 triggers the alarm device 82 to work after receiving the alarm signal from the first sensor 6 and/or the second sensor 7 .

The control mechanism 8 also includes a rocker control button mechanism 83 .

The detection mode of the present invention is described below, and the detection device of the present invention has three detection modes:

1. Manual sampling mode:

The operator enters the subject to be detected through the control panel 82, directly presses the rocker control button mechanism 83, sends a signal to the motor, controls the X-direction motor 91 in the drive mechanism 9 to start to move, and drives the clamping bracket along the X-direction through the lead screw. move. Before the clamping mechanism 5 moves to the position of clamping the product B, the jaws are in the open and closed state. When the clamping position of the product is reached, the cylinder of the clamping mechanism 5 starts to work, and the jaws are closed under the action of the cylinder. After clamping the product B, a signal is given to the X-direction motor 91 through program control to drive the screw to reverse By rotating, the product B can be pulled from the clip 3 to the microscope mechanism 4 for detection.

2. Automatic sampling mode:

As long as the operator directly presses the rocker control button mechanism 83, the product B to be inspected in the magazine 3 placed on the Z-direction lifting platform 31 can be pulled to the microscope mechanism 4 one by one in order from bottom to top for inspection .

3. Random inspection mode:

In this mode, the tested product B is randomly pulled from the magazine 3 to the microscope mechanism 4 for testing.

The operation method of the detection device of the present invention is described below in conjunction with the working principle of the detection device of the present invention:

The detection device of the present invention detects the jamming of the product on the rail. The sensor can detect the signal of material jam in real time, and stop the machine for alarm processing. After the operator finishes cleaning the material, it can resume normal work. When the air clamp sends the product into the magazine and retreats, the product is deformed and the product is taken out of the magazine. When the elevator runs down, the product will be broken. At this time, another sensor can be used to detect whether there is a product in the track before proceeding. It can carry out lifting action, and when there is a product on the track, the system will alarm and shut down for processing.

Specifically, during normal operation, the operator presses the switch button on the rocker control button mechanism 83, and the clamping mechanism 5 of the product B will pull the product B out of the magazine clip 3, and move along the track 2 to the microscope mechanism 4. detection.

When the product B is sent back to the clip 3 after the detection is completed, and the product B is not completely pushed out of the track 2, the second sensor 7 for judging whether there is a product B in the track 2 starts to work, and reminds the operator that the product B is not released. Completely out of track 2, product B needs to be manually moved out of track 2. In this state, the Z-direction lifting mechanism 31 will stop moving up and down. Only after the product B is completely removed from the track 2, the Z-direction lifting mechanism 31 starts to operate normally again, so that the phenomenon of destroying the product B is avoided.

After the product B is detected, it passes through the track 2 and is sent back to the clip 3. When the product B is not sent into the clip 3 due to the deformation of the clip 3, it is used as the first sensor for the jam alarm. 6 starts to work, the product clamping mechanism 5 stops running, and the alarm device 82 on the machine platform prompts the operator to make a mistake, so as to avoid destroying the product B detected.

To sum up, what is described in this specification are only several preferred specific embodiments of the present invention, and the above embodiments are only used to illustrate the technical solution of the present invention rather than limit it. All technical solutions that can be obtained by those skilled in the art based on the concept of the present invention through logical analysis, reasoning or limited experiments on the basis of the prior art shall be within the protection scope of the claims of the present invention.

Claims (4)

1. An optical detection device, which is arranged on one end of a track on the bed body, and is arranged opposite to a magazine for accommodating products to be inspected arranged at the other end of the track; it is characterized in that: the detection device at least includes: a A microscope mechanism arranged opposite to the track; a product clamping mechanism for grasping the product to be inspected, which is movably arranged on the track, and the product clamping mechanism includes a jaw structure that can be opened and closed and a clamping bracket that slides and fits with the track; a driving mechanism, connected with the product clamping mechanism; a first sensor, arranged at the relative position of the end of the clip so that the first sensor can detect The product to be inspected is stuck at the outlet of the clip; a second sensor is arranged at a relative position of the track so that the second sensor can detect the product to be inspected staying on the track; It also includes a control mechanism, which includes an alarm device and a rocker control button mechanism. 2. The optical detection device according to claim 1, wherein the driving mechanism is a screw nut mechanism. 3. The optical detection device according to claim 2, characterized in that: the lead screw of the lead screw nut mechanism is connected to the motor power, and the nut of the lead screw nut mechanism is detachably and fixedly connected to the product clamping mechanism . 4. The optical detection device according to claim 1, wherein the control mechanism has a control panel for inputting working modes.

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