CN102107162A - sprinkler - Google Patents

Abstract

The invention discloses a spraying device which is suitable for spraying treatment liquid to a substrate in a display and comprises a rack, a linear driver, a spraying bracket, a horizontal conveying device and a plurality of spray pipes, wherein the substrate is borne on the horizontal conveying device, the horizontal conveying device drives the substrate to be conveyed in the horizontal direction, the spraying bracket is movably connected to the rack and is positioned above the substrate, the linear driver drives the spraying bracket to do linear reciprocating motion in the horizontal direction, the motion direction of the spraying bracket is vertical to the conveying direction of the substrate, the spray pipes are arranged on the spraying bracket in parallel, the spray pipes are provided with treatment liquid inlet openings communicated with the treatment liquid, and one side of each spray pipe, facing the substrate, is provided with a plurality of pinhole-shaped spray nozzles. The spraying device is suitable for cleaning the semiconductor substrate, and has the advantages of simple structure, convenience in operation and control and uniform spraying.

Description

sprinkler

technical field

The invention relates to a spraying device, in particular to a spraying device for cleaning a substrate in a display with a spraying treatment liquid.

Background technique

Production of semiconductor memory devices or flat panel displays such as liquid crystal displays, plasma displays, and organic light-emitting diode displays usually requires various repetitive unit processes on substrates such as semiconductor substrates and glass substrates. For example, various unit processes such as thin film processing, patterning of thin films, and cleaning processes are performed on semiconductor substrates or glass substrates to form circuit patterns with various electrical and optical characteristics on the substrates, and these unit processes are usually It is carried out with some special handling methods using various processing equipment in a clean room. Specifically, the method of performing etching, cleaning and drying on the semiconductor substrate is to supply the processing liquid onto the substrate. For example, in a cleaning process, various cleaning solutions are delivered to a shower device and supplied from the shower device to a substrate to remove impurities on a semiconductor substrate such as a glass substrate. However, the existing spraying devices all have the technical defects of complex structure, difficult control and cumbersome movement.

Therefore, there is a need for a spraying device capable of cleaning the semiconductor substrate, which has a simple structure, is convenient to operate, and sprays evenly.

Contents of the invention

The object of the present invention is to provide a spraying device capable of cleaning semiconductor substrates, simple in structure, convenient in manipulation and uniform in spraying.

In order to achieve the above object, the present invention provides a spraying device, which is suitable for spraying treatment liquid on the substrate in the display, including a frame, a linear drive, a spraying bracket, a horizontal conveying device, and several nozzles. On the horizontal conveying device, the horizontal conveying device drives the substrate to be transported in the horizontal direction, the spray bracket is movably connected to the frame and located above the substrate, and the linear driver drives the The spraying support moves linearly and reciprocatingly in the horizontal direction, the moving direction of the spraying support is perpendicular to the conveying direction of the substrate, the nozzles are installed in parallel on the spraying support, and the nozzles are provided with The inlet of the treatment liquid communicated with the treatment liquid, the side of the nozzle facing the substrate is provided with a number of pinhole-shaped nozzles.

Preferably, the spray pipes are evenly distributed on the spray bracket. A plurality of spray pipes are distributed on the spray bracket, which can effectively improve the spray efficiency.

Preferably, the inlet of the treatment liquid is opened in the middle of the nozzle and vertically upward. The vertically upward processing liquid inlet allows the processing liquid to enter conveniently.

Preferably, the nozzles are evenly distributed on the spray pipe and vertically downward. The nozzle can spray mist-like processing liquid, and the processing liquid can be directly dropped onto the substrate vertically downward, so that the substrate can be sprayed very evenly.

Preferably, the spray bracket includes a nozzle bearing frame, a support shaft and a transmission shaft, the nozzle is fixed on the nozzle bearing frame, the transmission shaft is horizontally arranged and one end is carried by the nozzle The frame is fixedly connected, the other end of the transmission shaft is connected to the linear driver, the support shaft is horizontally arranged and one end is fixed on the frame, and the other end of the support shaft is slidably connected to the machine frame. on the shelf. Through the linear movement of the transmission shaft and the support shaft, the nozzle carrying frame moves back and forth along the direction perpendicular to the conveying direction of the substrate, further making the substrate spray more evenly.

Preferably, the horizontal conveying device includes a rotating motor and a plurality of roller shafts, rollers are sleeved on the roller shafts, the roller shafts are uniformly installed on the frame and located on the same plane, and the rotating motor drives The roller shaft rotates, and the substrate is carried on the roller. The roller shaft is driven to rotate to drive the roller to roll, so that the roller drives the substrate to move, the structure is simple, the transmission is reliable, and the control is easy.

Compared with the prior art, because the present invention places the spray pipe on the spray bracket, and sets a plurality of pinhole-shaped nozzles on the spray pipe device, the nozzles can The treatment liquid is sprayed out so that the treatment liquid falls on the substrate in the form of mist, and the spray support is driven back and forth in a direction perpendicular to the conveying direction of the substrate by using a linear driver to drive the spray support, Therefore, the spraying is more uniform, and the whole spraying device has a simple structure and is easy to operate, and is suitable for cleaning, developing, etching and stripping the semiconductor substrate.

Description of drawings

Fig. 1 is a schematic structural view of the spraying device of the present invention.

Detailed ways

As shown in Figure 1, the spray device 100 of the present invention includes a frame (not shown in the figure), a linear drive (not shown in the figure), a spray support 1, a horizontal conveying device 2 and several spray pipes 3, and the horizontal conveying The device 2 includes a rotating motor (not shown in the figure) and a plurality of roller shafts 21, the roller shafts 21 are sleeved with rollers 22, and the roller shafts 21 are uniformly installed on the frame and are located on the same plane, the The rotating motor drives the roller shaft 21 to rotate, the substrate 200 is carried on the roller 22 , and the horizontal conveying device 2 drives the substrate 200 to be transported in the horizontal direction. The spray bracket 1 is movably connected to the frame and located above the base plate 200, and includes a nozzle bearing frame 11, a support shaft 12 and a transmission shaft 13, and the nozzle 3 is fixed on the nozzle bearing On the frame 11, the transmission shaft 13 is arranged horizontally and one end is fixedly connected with the nozzle carrying frame 11, the other end of the transmission shaft 13 is connected with the linear driver, the support shaft 12 is arranged horizontally and one end Fixed on the frame, the other end of the support shaft 12 is slidably connected to the frame. The linear driver drives the spraying frame 1 to perform linear reciprocating motion in the horizontal direction, the moving direction of the spraying frame 1 is perpendicular to the conveying direction of the substrate 200, and the nozzles 3 are installed in parallel and evenly distributed On the spray bracket 1, the spray pipe 3 is provided with a treatment liquid inlet 31 communicating with the treatment liquid, and the treatment liquid inlet 31 is opened in the middle of the spray pipe 3 and is vertically upward. A side of the nozzle 3 facing the substrate 200 is provided with a number of pinhole-shaped nozzles 32 , and the nozzles 32 are evenly distributed on the nozzle 3 and vertically downward.

Based on the above, the working principle of the spraying device 100 is described in detail below, as follows:

When working, the substrate 200 is placed on the horizontal conveying device 2, and then the horizontal conveying device 2 is driven to move, the roller shaft 21 rotates to drive the roller 22 to rotate, and the roller 22 drives the substrate 200, Make the substrate 200 slowly move below the nozzle 3, at this time, inject the processing liquid with a certain pressure into the nozzle 3 from the processing liquid inlet 31, and spray it through the nozzle 32. Because the nozzle 32 is a pinhole nozzle, the sprayed treatment liquid is in the form of mist and falls on the substrate 200. At the same time, the linear driver linearly drives the transmission shaft 13, and the transmission shaft 13 drives the spray The shower support 1 moves back and forth in a direction perpendicular to the conveying direction of the substrate 200 so as to uniformly spray the substrate 200 .

Since the present invention places a plurality of nozzles 3 on the spray bracket 1, and a plurality of nozzles 32 in the shape of pinholes are arranged on the nozzles 3, the nozzles 32 can treat the The liquid is sprayed out so that the processing liquid falls on the substrate 200 in the form of mist, and the spray support 1 is driven by a linear driver through the transmission shaft 13 and the support shaft 12, so that the spray support 1 is aligned with the The conveying direction of the substrate 200 moves back and forth in the direction perpendicular to the axial direction, which not only improves the spraying efficiency but also makes the spraying more uniform. The whole spraying device 100 is simple in structure and easy to operate, and is suitable for cleaning, developing, etching and Stripping and other processes.

The working principles of the frame and the linear driver involved in the spraying device 100 of the present invention are well known to those skilled in the art, and will not be described in detail here.

The above disclosures are only preferred examples of the present invention, and of course cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made according to the patent scope of the present invention still fall within the scope of the present invention.

Claims (6)

1. A spraying device, which is suitable for spraying treatment liquid into the substrate in the display, is characterized in that: it includes a frame, a linear drive, a spraying support, a horizontal conveying device and some spray pipes, and the substrate is carried on the On the horizontal conveying device, the horizontal conveying device drives the substrate to be transported in the horizontal direction, the spray bracket is movably connected to the frame and located above the substrate, and the linear driver drives the spray The support moves linearly and reciprocatingly in the horizontal direction, the movement direction of the spray support is perpendicular to the conveying direction of the substrate, the nozzles are installed in parallel on the spray support, and the nozzles are equipped with A liquid-communicated processing liquid inlet, and the side of the nozzle facing the substrate is provided with a number of pinhole-shaped nozzles. 2. The spray device according to claim 1, characterized in that: the spray pipes are evenly distributed on the spray bracket. 3 . The spraying device according to claim 1 , wherein the treatment liquid inlet is opened in the middle of the spray pipe and vertically upward. 4 . 4. The spraying device according to claim 1, characterized in that: the nozzles are evenly distributed on the spray pipe and vertically downward. 5. The spray device according to any one of claims 1-4, wherein the spray bracket includes a nozzle bearing frame, a support shaft and a drive shaft, and the nozzle is fixed on the nozzle On the bearing frame, the transmission shaft is arranged horizontally and one end is fixedly connected to the nozzle bearing frame, the other end of the transmission shaft is connected to the linear driver, the support shaft is arranged horizontally and one end is fixed to the On the frame, the other end of the support shaft is slidably connected to the frame. 6. The spraying device according to claim 1, wherein the horizontal conveying device comprises a rotating motor and a plurality of roller shafts, the roller shafts are sleeved with rollers, and the roller shafts are uniformly installed on the On the frame and on the same plane, the rotating motor drives the roller shaft to rotate, and the substrate is carried on the roller.

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