CN101833018A - Scanning probe surface measurement system and measurement method based on optical fiber sensor - Google Patents
Scanning probe surface measurement system and measurement method based on optical fiber sensor Download PDFInfo
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Abstract
本发明提供了一种基于光纤传感的扫描探针表面测量系统和测量方法，所述系统包括：光纤位移传感单元，用于检测发射光纤入射到接收光纤的光功率，将光功率转换成电信号输入系统控制单元；光纤对准单元；微悬臂探针单元，用于通过改变弹性微悬臂的位置或弹性形变，调整微探针在样品表面上的位置，并带动微平板测头产生垂直位移，改变入射到接收光纤的光功率；三维扫描单元，用于使样品做三维移动扫描；系统控制单元，用于对上述单元的运动进行监视或控制，并对接收到的电信号和微探针在样品表面上的位置进行数据处理，获得样品的表面结构。本发明结构简单、光学器件少、稳定性好；可以实现高分辨率、大范围超精表面的检测。
The invention provides a scanning probe surface measurement system and measurement method based on optical fiber sensing. The system includes: an optical fiber displacement sensing unit, which is used to detect the optical power of the transmitting optical fiber incident on the receiving optical fiber, and convert the optical power into Electrical signal input system control unit; optical fiber alignment unit; micro-cantilever probe unit, which is used to adjust the position of the micro-probe on the sample surface by changing the position or elastic deformation of the elastic micro-cantilever, and drive the micro-plate probe to generate vertical Displacement, changing the optical power incident to the receiving fiber; three-dimensional scanning unit, used to make the sample do three-dimensional mobile scanning; system control unit, used to monitor or control the movement of the above-mentioned unit, and to monitor the received electrical signal and micro-probe The position of the needle on the surface of the sample is processed to obtain the surface structure of the sample. The invention has the advantages of simple structure, few optical devices and good stability; it can realize the detection of high-resolution and large-scale super-precision surfaces.
Description
Technical field
The present invention relates to the surface detection technique field, particularly relate to a kind of scanning probe surface measurement system and measuring method thereof based on Fibre Optical Sensor.
Background technology
The high integration of electronic product and high performance development trend and MEMS (micro electro mechanical system) (MicroElectro Mechanical Systems, MEMS) technology and application development, superfinish and microstructure detection are proposed more and more higher requirement, thereby driven developing rapidly of superfinish micro-nano measuring technique.At present, the micro-nano measuring technique can be divided into contact and contactless two classes, and contact detecting method comprises inductance type, piezoelectric type, photo-electric etc., and non-contact detection method comprises optical method, electronic method etc.Superfinish measuring method commonly used comprises traditional optical interferometry, scan-probe measurement, capacitive displacement measurement, scanning electron microscope measurement etc.
Present measuring method detects for roughness can reach the dust class resolution ratio, as laser interferance method, ellipsometry, scattering method etc.But owing to limited by the Rayleigh diffraction limit, the superfinish that the lateral resolution of optical detection system has limited horizontal nanometer scale resolution detects.
In addition, scanning tunnel microscope (Scanning Tunneling Microscope, STM) with atomic force microscope (Atomic Force Microscopy, AFM) vertical, the lateral resolution that the surface is detected can both reach nano-precision, but the composition of its system, structure be very complicated, cost an arm and a leg, and measurement range is less, generally have only several microns to tens microns, and very high to requirements such as measurement environment; Simultaneously, utilize scanning tunnel microscope can only observe conducting sample.
In a word, need the urgent technical matters that solves of those skilled in the art to be exactly: how a kind of sample surfaces measurement scheme can be provided, and system architecture is simple, and when guaranteeing measurement range, realizes the detection demand of high-resolution superfinish.
Summary of the invention
Technical matters to be solved by this invention provides a kind of scanning probe surface measurement system and measuring method thereof based on Fibre Optical Sensor, this simple in measurement system structure, and can realize high resolving power, the detection of superfinish on a large scale.
In order to address the above problem, the invention discloses a kind of scanning probe surface measurement system based on Fibre Optical Sensor, comprising:
The fiber optics displacement sensing unit comprises launching fiber and receives optical fiber, is used to detect launching fiber and incides the luminous power that receives optical fiber, and convert described luminous power to electric signal and be input to system control unit;
The optical fiber align unit is used for according to the supervision of system control unit launching fiber and reception optical fiber being carried out the axle aligning;
The micro-cantilever probe unit comprises band gauge head microprobe, and described band gauge head microprobe comprises: the elasticity micro-cantilever, respectively with an end of elasticity micro-cantilever microplate gauge head connected vertically and microprobe, described microplate gauge head is at launching fiber and receive between the optical fiber; Described micro-cantilever probe unit is used for the control according to system control unit, by changing the position or the elastic deformation of elasticity micro-cantilever, adjust the position of microprobe on sample surfaces, and drive microplate gauge head generation perpendicular displacement, change and incide the luminous power that receives optical fiber;
Three-dimensional scanning unit is used for the control according to system control unit, makes sample do three-dimensional motion scan;
System control unit, being used for motion to axle alignment function, the microprobe of optical fiber align unit and three-dimensional scanning unit monitors or controls, and the electric signal and the position of microprobe on sample surfaces that receive carried out data processing, obtain the surface structure of sample.
Preferably, described fiber optics displacement sensing unit also comprises:
LASER Light Source is used to export light;
Optical fiber collimator is used for carrying out shaping by the light beam to LASER Light Source output, is coupled in the launching fiber;
Photodetector is used for producing correspondent voltage by the light that receives optical fiber output is carried out opto-electronic conversion;
The A/D capture card is used to gather the voltage of photodetector output, and by the A/D conversion electric signal that obtains is input to system control unit.
Preferably, described optical fiber align unit comprises:
Five dimension alignment tools are used for fixing the launching fiber of fiber optics displacement sensing unit, and the position of the light output end by regulating launching fiber is to launching fiber with receive optical fiber and carry out axle aligning;
Fiber fixed frame is used for fixing the reception optical fiber of fiber optics displacement sensing unit;
The microimaging head is used for the light output end of launching fiber and the light inlet end face of reception optical fiber are taken;
Video frequency collection card is used to gather the vision signal that the microimaging head photographs, and with described video signal transmission to system control unit.
Preferably, described micro-cantilever probe unit also comprises:
Signal generator is used for the control according to system control unit, to high frequency piezoelectric blocks output drive signal;
The high frequency piezoelectric blocks is used for vibrating according to described drive signal generation telescopic displacement or according to predetermined frequency, amplitude;
The other end of then described elasticity micro-cantilever is fixed on the high frequency piezoelectric blocks, and the elasticity micro-cantilever drives microprobe generation perpendicular displacement according to the motion of high frequency piezoelectric blocks.
Preferably, described elasticity micro-cantilever carries out contactless vertical moving according to the perpendicular displacement drive microplate gauge head of microprobe with respect to the light output end of launching fiber and the light inlet end face of reception optical fiber;
The initial position on the top of described microplate gauge head is positioned at launching fiber and receives on the axis of optical fiber.
Preferably, described three-dimensional scanning unit comprises:
The 3-D scanning platform is used for fixing sample to be measured, and does translation scan according to driving voltage drive sample in space X, three directions of Y, Z;
The high voltage stabilizing source is used for control according to system control unit to 3-D scanning platform outputting drive voltage, drives the 3-D scanning platform and moves.
Preferably, described system control unit comprises:
System control interface is used for the control signal to signal generator and high voltage stabilizing source output industrial computer, and receives the electric signal of A/D capture card and the vision signal of video frequency collection card;
Monitor is used for the light output end of launching fiber and the light inlet end face of reception optical fiber are carried out visual monitor;
Industrial computer is used to produce control signal, and data processing is carried out in the electric signal that receives, the perpendicular displacement of microprobe generation and the flat scanning position of sample, obtains the surface structure of sample.
Preferably, the mode of operation of described measuring system comprises: contact, contactless and rap formula.
In addition, the invention also discloses a kind of scanning probe surface measurement method, comprising based on Fibre Optical Sensor:
According to the supervision of system control unit, launching fiber and reception optical fiber are carried out the axle aligning by the optical fiber align unit;
According to the control of system control unit, make sample do three-dimensional motion scan; Adjust the position of elasticity micro-cantilever simultaneously by the micro-cantilever probe unit, change the position of microprobe on sample surfaces, and drive microplate gauge head generation perpendicular displacement, change and incide the luminous power that receives optical fiber;
Detect launching fiber by the fiber optics displacement sensing unit and incide the luminous power that receives optical fiber, and convert described luminous power to electric signal and be input to system control unit;
In system control unit, data processing is carried out in the electric signal and the position of microprobe on sample surfaces that receive, obtain the surface structure of sample.
Preferably, the mode of operation of described measuring method comprises: contact, contactless and rap formula.
Compared with prior art, the present invention has the following advantages:
A kind of scanning probe surface measurement system and measuring method thereof that the present invention proposes based on Fibre Optical Sensor, change by the different distance of microprobe at sample surfaces, drive the microplate gauge head and produce vertical change in displacement, the luminous power (corresponding electric signal) that detects is changed, thereby check and analysis obtain the structure on the sample surfaces.The present invention has avoided conventional optical systems to build required complex optical path and many discrete optical device, and optic fibre light path is simple in structure, optical device is few, and Optical Fiber Transmission is subjected to the influence of air turbulence lower, good stability.
Further, by the vertical vibration displacement of fiber optics displacement sensing unit measurement microprobe, on the one hand, utilize the nanoscale needle point of microprobe, obtain the lateral resolution of nanometer scale, on the other hand, based on optical fiber light intensity displacement sensing, realize the longitudinal frame of nanometer scale precision.The fiber optics displacement sensing combines with band gauge head microprobe, and measuring system resolution, precision are improved, and measurement range is adjustable, can reach tens microns.
In addition, utilizing five dimension alignment tools and machine vision modes can realize that optical fiber is contactless aims at; Measuring system of the present invention can work in contact, contactless and rap under three kinds of patterns of formula, can realize high resolving power, the detection system of super fine surface roughness, profile and characteristic surface dimension on a large scale.
Description of drawings
Fig. 1 is the structural drawing of a kind of scanning probe surface measurement system embodiment based on Fibre Optical Sensor of the present invention;
Fig. 2 is the principle schematic of a kind of scanning probe surface measurement system embodiment based on Fibre Optical Sensor of the present invention;
Fig. 3 is the process flow diagram of a kind of scanning probe surface measurement method embodiment based on Fibre Optical Sensor of the present invention.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
With reference to Fig. 1, show the structural drawing of a kind of scanning probe surface measurement system embodiment one based on Fibre Optical Sensor of the present invention, comprising:
Fiber optics displacement sensing unit 100 comprises launching fiber 101 and receives optical fiber 102, is used to detect launching fiber and incides the luminous power that receives optical fiber, and convert described luminous power to electric signal and be input to system control unit;
Optical fiber align unit 200 is used for according to the supervision of system control unit 500 launching fiber 101 and reception optical fiber 102 being carried out the axle aligning;
Micro-cantilever probe unit 300, comprise band gauge head microprobe, described band gauge head microprobe comprises: elasticity micro-cantilever 3011, respectively with an end of elasticity micro-cantilever 3011 microprobe 3012 connected vertically and microplate gauge head 3013, described microplate gauge head 3013 is at launching fiber 101 and receive between the optical fiber 102; Described micro-cantilever probe unit 300 is used for the control according to system control unit 500, by changing the position or the elastic deformation of elasticity micro-cantilever 3011, adjust the position of microprobe 3012 on sample surfaces, and it is vertical to drive 3013 generations of microplate gauge head, changes and incides the luminous power that receives optical fiber 102;
Three-dimensional scanning unit 400 is used for the control according to system control unit 500, makes sample do three-dimensional motion scan;
Further, in a preferred embodiment of the invention, as shown in Figure 1, above-mentioned each unit is by forming with lower member:
Described fiber optics displacement sensing unit 100 also comprises:
LASER Light Source 103 is used to export light;
A/D capture card 106 is used to gather the voltage of photodetector output, and by the A/D conversion electric signal that obtains is input to system control unit.
Described optical fiber align unit 200 comprises:
Five dimension alignment tools 201 are used for fixing the launching fiber of fiber optics displacement sensing unit, and the position of the light output end by regulating launching fiber is to launching fiber with receive optical fiber and carry out axle aligning;
Fiber fixed frame 202 is used for fixing the reception optical fiber of fiber optics displacement sensing unit;
Video frequency collection card 204 is used to gather the vision signal that the microimaging head photographs, and with described video signal transmission to system control unit.
Described micro-cantilever probe unit 300 also comprises:
High frequency piezoelectric blocks 303 is used for vibrating according to described drive signal generation telescopic displacement or according to predetermined frequency, amplitude;
The other end of then described elasticity micro-cantilever 3011 is fixed on the described high frequency piezoelectric blocks 303, and the elasticity micro-cantilever drives microprobe 3012 generation perpendicular displacements according to the motion of high frequency piezoelectric blocks.
Wherein, described microprobe carries out contactless vertical moving by elasticity micro-cantilever drive microplate gauge head with respect to the light output end of launching fiber and the light inlet end face of reception optical fiber;
The initial position on the top of described microplate gauge head is positioned at launching fiber and receives on the axis of optical fiber.
Described three-dimensional scanning unit 400 comprises:
3-D scanning platform 401 is used for fixing sample to be measured, and does translation scan according to driving voltage drive sample in space X, three directions of Y, Z;
High voltage stabilizing source 402 is used for control according to system control unit to 3-D scanning platform outputting drive voltage, drives the 3-D scanning platform and moves.
Described system control unit 500 comprises:
The specific implementation process of this system is as follows:
In fiber optics displacement sensing unit 100, the light of LASER Light Source 103 outputs is coupled in the launching fiber 101 after optical fiber collimator 104 carries out beam shaping; Launching fiber 101 is fixed on the five dimension alignment tools 201 of optical fiber align unit 200; Receiving optical fiber 102 is fixed on the fiber fixed frame 202 of optical fiber align unit 200; The light output end of launching fiber 101 (being the right side in the present embodiment) can be by five dimension alignment tools, 201 accurate adjustment of optical fiber align unit 200 with the relative position relation that receives optical fiber 102 light inlet end faces (being the left side in the present embodiment), to guarantee that the two obtains optimum optically-coupled and imitates, the adjusting of described five dimension alignment tools comprises: the translation of X, Y, Z direction, and the rotation of X, Y direction, wherein the Z direction is the axial direction of launching fiber and incident optical.Receive the light of optical fiber 102 conduction, output, carry out light-to-current inversion, produce and the corresponding voltage of light intensity (or luminous power) by photodetector 105 receptions and to light intensity; The output voltage of photodetector 105 through A/D capture card 106, is a digital signal with analog signal conversion, and the control interface 501 by system control unit 500 collects in the industrial computer 503, and measuring subsequent treatment for superfinish provides Z to data source.
In optical fiber align unit 200, the launching fiber 101 in five dimension alignment tools, the 201 fixed fiber displacement sensing unit 100, and the locus of minute adjustment launching fiber 103 right sides; Fiber fixed frame 202 is used for fixing the reception optical fiber 102 in the fiber optics displacement sensing unit 100; The operating distance and the enlargement factor of microimaging 203 are adjustable; Launching fiber 101 right sides and the relative position relation that receives optical fiber 102 left sides in the fiber optics displacement sensing unit 100, realize visual imagings through microimaging 203 and video frequency collection card 204, carry out real time monitoring by the display in the system control unit 500 502, and match with the minute adjustment of five dimension alignment tools 201, realize launching fiber 101 right sides and the close-loop feedback control that receives optical fiber 102 left side relative space position.
In micro-cantilever probe unit 300, band gauge head microprobe is rigidly secured on the high frequency piezoelectric blocks 303; Band gauge head microprobe comprises elasticity micro-cantilever 3011 (horizontal positioned), microplate gauge head 3013 (vertically placement, its bottom links to each other with an end of elasticity micro-cantilever) and microprobe 3012 (vertically place, its top links to each other with an end of elasticity micro-cantilever) three parts; Microplate gauge head 3013 launching fiber 101 right sides and receiving between optical fiber 102 left sides in fiber optics displacement sensing unit 100 can be done relative to the two and contactlessly be moved vertically; In the systematic survey process, microprobe 3012 and sample upper surface can carry out contact, contactless or rap three kinds of different working modes; Elasticity micro-cantilever 3013 is made by having certain flexible material, can bend under external force (elastic deformation) or vibrates, and its left end is connected with microplate gauge head 3013, microprobe 3012, and right-hand member is fixed on the high frequency piezoelectric blocks 303; High frequency piezoelectric blocks 303 is driven by the output voltage signal of signal generator 302, produce telescopic displacement or vibrate according to predetermined frequency, amplitude, thereby make band gauge head microprobe 3012 along space Z to producing relative displacement up and down.
In three-dimensional scanning unit 400, sample to be measured is fixed on the 3-D scanning platform 401, and does accurate translation scan with 3-D scanning platform 401 in space X, three directions of Y, Z; The driving voltage of 3-D scanning platform 401 is by 402 outputs of high voltage stabilizing source.
In system control unit 500, system control interface 501 is connected with A/D capture card 106, video frequency collection card 204, signal generator 302, the interface in high voltage stabilizing source 402 in other unit respectively; By launching fiber 103 right sides in 502 pairs of optical fiber align unit of monitor and the visualization display that receives optical fiber 104 left side relative positions, and carry out system by industrial computer 503 and control and Measurement and Data Processing.
As shown in Figure 2, be the principle schematic of a kind of scanning probe surface measurement system embodiment based on Fibre Optical Sensor of the present invention.Wherein, form band gauge head microprobe 301 by elasticity micro-cantilever, microprobe and microplate gauge head.In the measuring process, LASER Light Source 101 output power W
0, after optical fiber collimator 104 shapings, be coupled to launching fiber 101, power W
OutBand gauge head microprobe 301 and sample surfaces are with contact, contactless or different mode such as rap and interact, and 3-D scanning platform 401 drives samples when XOY surface level interscan campaign, the different distance changes delta H of microprobe 3012 and sample surfaces.
Wherein, in contact mode (contact mode) scanning survey, 3-D scanning platform 401 drives sample in XOY surface level interscan campaign, keep microprobe 3012 to contact with sample surfaces, under repulsive force between atom and the 3011 elastic-restoring force effects of elasticity micro-cantilever, the different distance changes delta H of microprobe 3012 and sample surfaces makes microplate gauge head 3013 produce displacement Z in vertical plane, and Δ H and Δ Z are linear.
In contactless (non-contact mode) scanning survey, microprobe 3012 keeps certain distance (because microprobe does not contact with sample with sample surfaces, therefore sample surfaces can not be damaged in the measuring process), because long effect between the two apart from the atom attractive force, the different distance changes delta H of microprobe 3012 and sample surfaces, make microplate gauge head 3013 produce displacement Z in vertical plane, Δ H and Δ Z are nonlinear relationship.
Rap in formula (tapping mode) scanning survey, microprobe 3012 vibrates with certain amplitude and frequency sine (or cosine) under the driving of high frequency piezoelectric blocks 303, as vibrating by Asin (ω t) mode, the different distance changes delta H of microprobe 3012 and sample surfaces, the vibration amplitude that causes microprobe 3012 changes, because atomic effect changes thereby make microplate gauge head 3011 produce displacement Z in vertical plane, Δ H and Δ Z are nonlinear relationship.
In contact, contactless or rap in any one pattern of formula, the perpendicular displacement change Delta Z of microplate gauge head 3011 will cause to receive optical fiber 102 received power changes delta W, through photodetector 105 optical power change will be converted to relevant voltage changes delta U.Utilize measuring system to set up sample surfaces and Fibre Optical Sensor relation,, can realize the measurement of sample surfaces 3 D super precision in conjunction with piezoelectric scanning in the XOY face.
According to a kind of scanning probe surface measurement system based on Fibre Optical Sensor that the embodiment of the invention proposes, its workflow is as follows:
Step (1), mechanical splice LASER Light Source 103 and optical fiber collimator 104, and open LASER Light Source 103, carry out preheating earlier;
Step (2) is fixed in launching fiber 101 and reception optical fiber 102 on five dimension alignment tools 201 and the fiber fixed frame 202 respectively;
Step (3) is adjusted the operating distance and the enlargement factor of microimaging 203, makes launching fiber 101 and to receive the opposing end surface view field imaging of optical fiber 102 clear;
Step (4), the accurate five dimension alignment tools 201 of adjusting utilize the visual feedback of microimaging that monitor 502 shows 203, make launching fiber 101 right sides and reception optical fiber 102 left sides are parallel, the center is coaxial;
Step (5) is adjusted the locus of elasticity micro-cantilever 3011 in the micro-cantilever probe unit 300, and it is at launching fiber 101 and receive between optical fiber 102 both ends of the surface, and parallel with both ends of the surface on the vertical direction;
Step (6) is further adjusted the relative position of elasticity micro-cantilever 3011 at vertical direction, is alignd with the optical fiber axle center in its top, and surveys the initial position of sample surfaces as it;
Step (7) connects signal generator 302, and the control output signal drives high frequency piezoelectric blocks 303 and drives microprobe 3012 vibrations;
Step (8) is positioned over sample on the 3-D scanning platform 401, adjusts sample in the position of vertical direction, reaches and elasticity micro-cantilever 3011 interacting states;
Step (9), record current location point is by the sample surfaces elevation information of fiber optics displacement sensory feedback;
Step (10) connects high voltage stabilizing source 402, and the output control signal drives 3-D scanning platform 401 in the XOY plane interscan;
Step (11) is utilized the surface elevation information of XOY plane interscan position data, fiber optics displacement sensory feedback and the electric signal that receives carries out data processing, realizes the superfinish three-dimensional measurement.
At specific embodiment, following configuration can be selected in each unit of described measuring system:
(1) LASER Light Source is selected green glow, output power 500mW; Photodetector is selected Model 840 type light power meters for use, and highest resolution reaches 10pW;
(2) multimode optical fiber of 62 μ m fibre cores of launching fiber and reception optical fiber select tape joint and tail optical fiber;
(3) microprobe is selected the MADOTR4-10 type of VEECO company, material: silicon nitride (SiliconNitride); Elasticity coefficient: 0.06～0.58N/m, needle type radius (Tip Radius): 10nm, needle point height (Tip Height): 2～3.5 μ m;
(4) a microimaging parameter---image resolution ratio: 1600 * 1200; Camera lens: Dual Axis 27 * and 100 *; Focusing range: 10mm arrives infinite distance (infinity), manual mode; Frame frequency: be greatly 30f/s; Enlargement factor: 20 * to 200 *.
According to above configuration, the key technical indexes of this measuring system can reach:
(1) sensing range＜50 μ m;
(2) detection sensitivity: 2nm/1nW.That is, when the height change 2nm of sample surfaces, luminous power be changed to 1nW.
The measuring system measurement range that the embodiment of the invention proposes can reach tens microns, and can realize the nanometer scale resolution of vertical and horizontal.
With reference to Fig. 3, show the process flow diagram of a kind of scanning probe surface measurement method embodiment based on Fibre Optical Sensor of the present invention, comprising:
In the preferred embodiments of the present invention, the mode of operation of described measuring method comprises: contact, contactless and rap formula.
Identical similar part is mutually referring to getting final product between each embodiment of each embodiment in this instructions.For method embodiment, because it is similar substantially to system embodiment, so description is fairly simple, relevant part gets final product referring to the part explanation of system embodiment.
More than to a kind of scanning probe surface measurement system and measuring method provided by the present invention based on Fibre Optical Sensor, be described in detail, used specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that all can change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (10)
1. the scanning probe surface measurement system based on Fibre Optical Sensor is characterized in that, comprising:
The fiber optics displacement sensing unit comprises launching fiber and receives optical fiber, is used to detect launching fiber and incides the luminous power that receives optical fiber, and convert described luminous power to electric signal and be input to system control unit;
The optical fiber align unit is used for according to the supervision of system control unit launching fiber and reception optical fiber being carried out the axle aligning;
The micro-cantilever probe unit comprises band gauge head microprobe, and described band gauge head microprobe comprises: the elasticity micro-cantilever, respectively with an end of elasticity micro-cantilever microplate gauge head connected vertically and microprobe, described microplate gauge head is at launching fiber and receive between the optical fiber; Described micro-cantilever probe unit is used for the control according to system control unit, by changing the position or the elastic deformation of elasticity micro-cantilever, adjust the position of microprobe on sample surfaces, and drive microplate gauge head generation perpendicular displacement, change and incide the luminous power that receives optical fiber;
Three-dimensional scanning unit is used for the control according to system control unit, makes sample do three-dimensional motion scan;
System control unit, being used for motion to axle alignment function, the microprobe of optical fiber align unit and three-dimensional scanning unit monitors or controls, and the electric signal and the position of microprobe on sample surfaces that receive carried out data processing, obtain the surface structure of sample.
2. the system as claimed in claim 1 is characterized in that, described fiber optics displacement sensing unit also comprises:
LASER Light Source is used to export light;
Optical fiber collimator is used for carrying out shaping by the light beam to LASER Light Source output, is coupled in the launching fiber;
Photodetector is used for producing correspondent voltage by the light that receives optical fiber output is carried out opto-electronic conversion;
The A/D capture card is used to gather the voltage of photodetector output, and by the A/D conversion electric signal that obtains is input to system control unit.
3. the system as claimed in claim 1 is characterized in that, described optical fiber align unit comprises:
Five dimension alignment tools are used for fixing the launching fiber of fiber optics displacement sensing unit, and the position of the light output end by regulating launching fiber is to launching fiber with receive optical fiber and carry out axle aligning;
Fiber fixed frame is used for fixing the reception optical fiber of fiber optics displacement sensing unit;
The microimaging head is used for the light output end of launching fiber and the light inlet end face of reception optical fiber are taken;
Video frequency collection card is used to gather the vision signal that the microimaging head photographs, and with described video signal transmission to system control unit.
4. the system as claimed in claim 1 is characterized in that, described micro-cantilever probe unit also comprises:
Signal generator is used for the control according to system control unit, to high frequency piezoelectric blocks output drive signal;
The high frequency piezoelectric blocks is used for vibrating according to described drive signal generation telescopic displacement or according to predetermined frequency, amplitude;
The other end of then described elasticity micro-cantilever is fixed on the high frequency piezoelectric blocks, and the elasticity micro-cantilever drives microprobe generation perpendicular displacement according to the motion of high frequency piezoelectric blocks.
5. system as claimed in claim 4 is characterized in that,
Described elasticity micro-cantilever carries out contactless vertical moving according to the perpendicular displacement drive microplate gauge head of microprobe with respect to the light output end of launching fiber and the light inlet end face of reception optical fiber;
The initial position on the top of described microplate gauge head is positioned at launching fiber and receives on the axis of optical fiber.
6. the system as claimed in claim 1 is characterized in that, described three-dimensional scanning unit comprises:
The 3-D scanning platform is used for fixing sample to be measured, and does translation scan according to driving voltage drive sample in space X, three directions of Y, Z;
The high voltage stabilizing source is used for control according to system control unit to 3-D scanning platform outputting drive voltage, drives the 3-D scanning platform and moves.
7. the system as claimed in claim 1 is characterized in that, described system control unit comprises:
System control interface is used for the control signal to signal generator and high voltage stabilizing source output industrial computer, and receives the electric signal of A/D capture card and the vision signal of video frequency collection card;
Monitor is used for the light output end of launching fiber and the light inlet end face of reception optical fiber are carried out visual monitor;
Industrial computer is used to produce control signal, and data processing is carried out in the electric signal that receives, the perpendicular displacement of microprobe generation and the flat scanning position of sample, obtains the surface structure of sample.
8. the system as claimed in claim 1 is characterized in that,
The mode of operation of described measuring system comprises: contact, contactless and rap formula.
9. the scanning probe surface measurement method based on Fibre Optical Sensor is characterized in that, comprising:
According to the supervision of system control unit, launching fiber and reception optical fiber are carried out the axle aligning by the optical fiber align unit;
According to the control of system control unit, make sample do three-dimensional motion scan; Adjust the position of elasticity micro-cantilever simultaneously by the micro-cantilever probe unit, change the position of microprobe on sample surfaces, and drive microplate gauge head generation perpendicular displacement, change and incide the luminous power that receives optical fiber;
Detect launching fiber by the fiber optics displacement sensing unit and incide the luminous power that receives optical fiber, and convert described luminous power to electric signal and be input to system control unit;
In system control unit, data processing is carried out in the electric signal and the position of microprobe on sample surfaces that receive, obtain the surface structure of sample.
10. method as claimed in claim 9 is characterized in that,
The mode of operation of described measuring method comprises: contact, contactless and rap formula.
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| CN 201010185004 CN101833018B (en) | 2010-05-21 | 2010-05-21 | A scanning probe surface measurement system and measurement method based on optical fiber sensing |
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| CN 201010185004 CN101833018B (en) | 2010-05-21 | 2010-05-21 | A scanning probe surface measurement system and measurement method based on optical fiber sensing |
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| CN101833018A true CN101833018A (en) | 2010-09-15 |
| CN101833018B CN101833018B (en) | 2013-05-22 |
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| CN110133108A (en) * | 2019-05-13 | 2019-08-16 | 浙江大学 | A measurement system and method for subsurface micro-nano defects of ultra-precision components |
| CN112804420A (en) * | 2019-11-13 | 2021-05-14 | 株式会社迪思科 | Image capturing apparatus |
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