CN101436562A - Large elevating magnification ratio double-arm crystal transmission manipulator - Google Patents

Abstract

The utility model relates to a double-arm wafer transfer manipulator with a large lifting and telescoping ratio, which relates to a wafer transfer manipulator. The present invention solves the problems of low reliability, short service life, limited vertical travel and inability to meet the needs of large expansion and contraction ratio movement in the vertical direction and inconvenient disassembly and maintenance of existing wafer transfer manipulators. question. The upper end of the auxiliary screw shaft of the auxiliary screw drive assembly of the present invention passes through the middle flange and maintains a suspended state, and the upper end of the main screw shaft of the main screw drive assembly passes through the middle flange and slides on the Z axis The bracket, the T-axis lower flange, the T-axis upper flange and the R-axis lower flange are kept in a suspended state, and the lower end of the main spline guide rail spline shaft of the main spline guide rail assembly is fixed to the middle flange , the wiring module assembly is arranged between the T-axis upper flange and the R-axis lower flange. The invention has the advantages of high reliability of circuit and gas pipe connection, long service life, large stroke in the vertical direction and extremely convenient disassembly and maintenance.

Description

Large lifting telescoping ratio dual-arm wafer transfer manipulator

technical field

The invention relates to a wafer transfer manipulator.

Background technique

At present, the wafer transfer manipulator widely used in the field of integrated circuit (IC) manufacturing equipment (see Figure 7 and Figure 8) has the following problems: 1. The traditional single-arm wafer transfer manipulator can only increase its movement speed in order to improve the operation efficiency , but reduces the reliability and service life of the manipulator; 2. In order to meet the working requirements of the wafer transfer system, the drop height of the manipulator body must be lower than the minimum operating point of the wafer transfer. When the minimum operating point is low, the traditional The maximum stroke capacity of the wafer transfer manipulator in the Z-axis direction is limited, which cannot meet the needs of large expansion and contraction ratio movements in the vertical direction; 3. The R-axis line and air pipe of the traditional wafer transfer manipulator pass through the T-axis barrel. When the shaft rotates, the lines and air pipes will be subjected to tensile force, which reduces the reliability of the connection of the lines and air pipes, and this way of routing makes the disassembly and maintenance of the manipulator extremely inconvenient.

Contents of the invention

The purpose of the present invention is to solve the problems of the existing wafer transfer manipulators, such as low reliability, short service life, and limited travel in the vertical direction, which cannot meet the needs of large expansion ratio movement in the vertical direction and disassembly and assembly. To solve the problem of extremely inconvenient maintenance, a dual-arm wafer transfer manipulator with a large lift-to-telescopic ratio is provided.

The technical solution of the present invention is: the double-arm wafer transfer manipulator with large lifting and telescopic ratio includes a base, a main screw drive assembly, an auxiliary screw drive assembly, three auxiliary spline guide rail assemblies, a middle flange, three Main spline guide rail assembly, Z-axis sliding bracket, Z-axis drive motor, support sleeve assembly, T-axis lower flange, T-axis drive assembly, T-axis drive motor, T-axis upper flange, R-axis Lower flange, R axis right arm drive assembly, R axis right arm drive motor, R axis left arm drive assembly, R axis left arm drive motor, R axis upper flange, R axis left arm assembly, R axis Axis right arm assembly, cable routing module assembly, Z-axis driving pulley, Z-axis driving and driven driving pulley, Z-axis auxiliary driven driving pulley, Z-axis synchronous transmission belt and Z-axis driving motor. The assembly is composed of a circuit assembly and a mainspring. The R-axis left arm assembly is composed of a left large arm, a left forearm and a left end hand holder. The R-axis right arm assembly is composed of a right large arm, a right forearm , right end hand support, right end hand stand and right end hand support, the main screw drive assembly, Z-axis drive motor, auxiliary screw drive assembly and three auxiliary spline guide rail assemblies are installed On the base, the upper end of the auxiliary screw shaft of the auxiliary screw drive assembly passes through the middle flange and remains suspended, and the intersection of the auxiliary screw shaft and the middle flange passes through the auxiliary screw drive assembly The auxiliary screw nut is fixedly connected, the lower end of the auxiliary screw shaft of the auxiliary screw drive assembly passes through the base and is fixedly connected with the corresponding Z-axis auxiliary driven drive pulley, and the spline of the auxiliary spline guide rail assembly is fixed in the middle In the mounting hole of the blue plate, the spline slides on the guide rail, and the upper end of the main screw shaft of the main screw drive assembly passes through the middle flange, the Z-axis sliding bracket, and the T-axis from bottom to top. The lower flange, the upper flange of the T-axis and the lower flange of the R-axis are kept in a suspended state. The finished main screw nut is affixed, the lower end of the main screw shaft of the main screw drive assembly passes through the base and is fixedly connected with the Z-axis driving and driven pulley, and the support sleeve assembly is set on the main screw shaft, and the upper end and lower end of the support sleeve assembly are respectively fixed with the T-axis lower flange and the middle flange, and the lower end of the main spline guide rail spline shaft of the main spline guide rail assembly is connected with the middle flange Fixed connection, the upper end of the main spline guide rail spline shaft of the main spline guide rail assembly passes through the Z-axis sliding bracket and the T-axis lower flange in sequence from bottom to top, and the main spline guide rail of the main spline guide rail assembly The splines are fixed in the installation holes of the Z-axis sliding bracket, the splines of the main spline guide rail slide on the spline shaft of the main spline guide rail, and the T-axis driving motor is installed on the lower flange of the T-axis On the end face, the lower end of the T-axis transmission assembly is connected to the lower flange of the T-axis, and the T-axis drive motor is connected to the T-axis transmission assembly through the T-axis three-stage synchronous transmission belt, and the T-axis transmission assembly The formed upper end passes through the T-axis upper flange and connects with the R-axis lower flange. The R-axis right arm transmission assembly, the R-axis left arm transmission assembly, the R-axis right arm drive motor and the R-axis left arm The driving motors are installed on the upper end surface of the lower flange of the R-axis, and the R-axis left arm transmission assembly and the R-axis left arm drive motor pass through the left arm The three-stage synchronous transmission belt is connected, the R-axis right arm transmission assembly is connected with the R-axis right arm drive motor through the right arm three-stage synchronous transmission belt, and the R-axis upper flange is installed on the R-axis right arm transmission assembly and the upper end surface of the R-axis left arm transmission assembly, the shaft of the R-axis left arm transmission assembly passes through the flange on the R-axis and is hinged with one end of the left arm of the R-axis left arm assembly, and the R The other end of the left big arm of the shaft left arm assembly is hinged with one end of the left forearm of the R-axis left arm assembly, and the other end of the left forearm of the R-axis left arm assembly is connected with the left end hand holder One end is hinged, the shaft of the R-axis right arm transmission assembly passes through the flange on the R-axis and is hinged with one end of the right arm of the R-axis right arm assembly, and the right arm of the R-axis right arm assembly The other end of the arm is hinged with one end of the right forearm of the R-axis right arm assembly, and the other end of the right forearm of the R-axis right arm assembly is hinged with one end of the right end underhand bracket, and the right end underhand The other end of the support is hinged with one end of the right end hand stand support, the other end of the right end hand stand support is hinged with one end of the right end hand support, and the output shaft of the Z axis drive motor passes through the base and the Z The driving pulley of the shaft is fixedly connected, the Z-axis driving pulley, the Z-axis auxiliary driving pulley and the Z-axis driving pulley are connected through the Z-axis synchronous transmission belt, and the wiring module assembly is arranged on the T-axis Between the flange and the lower flange of the R-axis, the circuit assembly is covered on the outer surface of the mainspring, and the outer end of the mainspring is fixedly connected to the upper flange of the T-axis. The inner end is fixedly connected with the lower flange of the R-axis.

Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention adopts a double-arm R-axis structure, which effectively improves the wafer transfer operation efficiency of the manipulator under the same operating speed condition, and improves the service life; 2. 1. The present invention adopts a stacked Z-axis transmission mode, which realizes a larger vertical stroke in a limited vertical and radial dimension space; 3. The Z-axis stacked transmission mechanism of the present invention adopts a unipolar drive mode, that is, A motor drives each layer of mechanism in a fixed ratio to realize synchronous vertical telescopic movement, which makes the Z-axis compact in structure, easy to control, easy to disassemble and maintain; The circuit is not subjected to tensile force, thereby improving the reliability of the connection of the circuit and the trachea; 5. The present invention also has the advantage of stable operation.

Description of drawings

Fig. 1 is a three-dimensional schematic view of the overall structure of the present invention, Fig. 2 is a longitudinal sectional view of the present invention, Fig. 3 is a schematic view of the overall appearance of the present invention, Fig. 4 is a bottom view of Fig. 2 , Fig. 5 is a schematic diagram of a spring-type wiring method, FIG. 6 is a schematic diagram of the installation of the Z-axis drive motor, FIG. 7 is a schematic front view of a traditional manipulator, and FIG. 8 is a top view of FIG. 7 .

Detailed ways

Specific Embodiment 1: This embodiment is described with reference to Fig. 1, Fig. 2, Fig. 4-8. This embodiment includes a base 1, a main screw drive assembly 2, an auxiliary screw drive assembly 3, and three auxiliary splines Guide rail assembly 4, middle flange 5, three main spline guide rail assembly 6, Z-axis sliding bracket 7, Z-axis drive motor 35, support sleeve assembly 8, T-axis lower flange 9, T-axis Transmission assembly 10, T-axis drive motor 11, T-axis upper flange 12, R-axis lower flange 13, R-axis right arm drive assembly 14, R-axis right arm drive motor 15, R-axis left arm drive assembly Cheng 16, R-axis left arm drive motor 17, R-axis upper flange 18, R-axis left arm assembly 19, R-axis right arm assembly 20, wiring module assembly 21, Z-axis driving pulley 23, Z Shaft driving pulley 25, Z-axis auxiliary driven pulley 27, Z-axis synchronous transmission belt 28 and Z-axis drive motor 35, the wiring module assembly 21 is composed of a line assembly 29 and a mainspring 30, the R axis left arm assembly 19 is made up of left big arm 19-1, left forearm 19-2 and left end hand fixing frame 19-3, and described R axis right arm assembly 20 is made up of right big arm 20-1, right Forearm 20-2, right end underhand support 20-3, right end hand stand support 20-4 and right end hand support 20-5 are composed of the main screw drive assembly 2, Z-axis drive motor 35, auxiliary The screw drive assembly 3 and three auxiliary spline guide rail assemblies 4 are installed on the base 1, and the upper end of the auxiliary screw shaft 3-3 of the auxiliary screw drive assembly 3 passes through the middle flange 5 and remains suspended state, the intersection of the auxiliary screw shaft 3-3 and the middle flange 5 is affixed through the auxiliary screw nut 3-2 of the auxiliary screw drive assembly 3, and the auxiliary screw of the auxiliary screw drive assembly 3 The lower end of the shaft 3-3 passes through the base 1 and is fixedly connected to the corresponding Z-axis auxiliary driven drive pulley 27, and the spline 4-4 of the auxiliary spline guide rail assembly 4 is fixed in the mounting hole of the middle flange 5, The spline 4-4 slides on the guide rail 4-3, and the upper end of the main screw shaft 2-3 of the main screw drive assembly 2 slides through the middle flange 5 and the Z axis in turn from bottom to top The bracket 7, the lower flange 9 of the T axis, the upper flange 12 of the T axis and the lower flange 13 of the R axis are kept suspended, and the main screw shaft 2-3 of the main screw drive assembly 2 is connected to the Z The intersection of the shaft sliding bracket 7 is fixedly connected by the main screw nut 2-2 of the main screw drive assembly 2, and the lower end of the main screw shaft 2-3 of the main screw drive assembly 2 passes through the base 1 and the The Z-axis driving and driven drive pulley 25 is affixed, the support sleeve assembly 8 is set on the main screw shaft 2-3, and the upper end and the lower end of the support sleeve assembly 8 are respectively connected to the T-axis lower flange 9 and the middle flange 5, the lower end of the main spline guide rail spline shaft 6-3 of the main spline guide rail assembly 6 is fixedly connected with the middle flange 5, and the main spline of the main spline guide rail assembly 6 The upper end of the key guide rail spline shaft 6-3 passes through the Z-axis sliding bracket 7 and the T-axis lower flange 9 sequentially from bottom to top, and the main spline guide rail splines 6-4 of the main spline guide rail assembly 6 are fixed In the mounting hole of the Z-axis sliding bracket 7, the main spline guide rail spline 6-4 is on the main spline guide rail spline Sliding on the shaft 6-3, the T-axis driving motor 11 is installed on the upper end surface of the T-axis lower flange 9, and the lower end of the T-axis transmission assembly 10 is connected with the T-axis lower flange 9, so The T-axis driving motor 11 is connected to the T-axis transmission assembly 10 through the T-axis three-stage synchronous transmission belt 10-1, and the upper end of the T-axis transmission assembly 10 passes through the T-axis upper flange 12 and the R-axis lower method The blue plate 13 is connected, and the R-axis right arm transmission assembly 14, the R-axis left arm transmission assembly 16, the R-axis right arm drive motor 15 and the R-axis left arm drive motor 17 are all installed on the flange under the R-axis 13, the R-axis left arm transmission assembly 16 is connected to the R-axis left arm drive motor 17 through the left arm three-stage synchronous transmission belt 16-1, and the R-axis right arm transmission assembly 14 is connected to the R-axis The right arm driving motor 15 is connected through the right arm three-stage synchronous transmission belt 14-1, and the flange 18 on the R axis is installed on the upper end surface of the R axis right arm transmission assembly 14 and the R axis left arm transmission assembly 16 , the R-axis left arm transmission assembly 16 shafts pass through the R-axis upper flange 18 and are hinged to one end of the left big arm 19-1 of the R-axis left arm assembly 19, and the R-axis left arm assembly 19 The other end of the left big arm 19-1 is hinged with one end of the left forearm 19-2 of the R-axis left arm assembly 19, and the other end of the left forearm 19-2 of the R-axis left arm assembly 19 is connected with One end of the left end hand holder 19-3 is hinged, and the shaft of the R-axis right arm transmission assembly 14 passes through the flange 18 on the R-axis and the right big arm 20-1 of the R-axis right arm assembly 20. One end is hinged, the other end of the right big arm 20-1 of the R-axis right arm assembly 20 is hinged with one end of the right forearm 20-2 of the R-axis right arm assembly 20, and the R-axis right arm assembly The other end of the right forearm 20-2 of 20 is hinged with one end of the right end underhand support 20-3, and the other end of the right end underhand support 20-3 is hinged with one end of the right end hand stand support 20-4 , the other end of the right end hand stand support 20-4 is hinged with one end of the right end hand support 20-5, and the output shaft 22 of the Z axis drive motor 35 passes through the base 1 and the Z axis drive pulley 23 Fixed connection, the Z-axis driving pulley 25, the Z-axis auxiliary driven pulley 27 and the Z-axis driving pulley 23 are connected through the Z-axis synchronous transmission belt 28, and the wiring module assembly 21 is arranged on the T-axis Between the upper flange 12 and the R-axis lower flange 13, the line assembly 29 is covered on the outer surface of the mainspring 30, and the outer end 30-1 of the mainspring 30 is connected to the upper flange of the T-axis. The disc 12 is fixedly connected, and the inner end 30-2 of the mainspring 30 is fixedly connected with the lower flange 13 of the R-axis. The main screw drive assembly 2 is produced by NSK Corporation of Japan, and its model is PSS1020N1D0608; the auxiliary screw drive assembly 3 is produced by NSK Corporation of Japan, and its model is PSS1010N1D0307; the auxiliary spline guide rail assembly 4 is produced by Produced by Japan THK Company, its model is LF20UU+L360; the main spline guide rail assembly 6 is produced by Japan THK Company, its model is LF20UU+L360.

Specific Embodiment 2: This embodiment is described in conjunction with FIG. 3 . The manipulator of this embodiment also has a primary cover 31 , a secondary cover 32 and a tertiary cover 33 , and the primary cover 31 is arranged on the outside of the middle flange 5 , the lower end of the primary cover 31 is fixed on the base 1, the secondary cover 32 is arranged on the outside of the middle flange 5 and the flange 12 on the T-axis, and the upper end of the secondary cover 32 is fixed on the T-axis On the flange 12, the tertiary cover 33 is arranged outside the flange 18 on the R-axis and the flange 12 on the T-axis, and the upper end of the tertiary cover 33 is fixed on the flange 18 on the R-axis. And the secondary cover 32 is set on the outside of the primary cover 31 , and the tertiary cover 33 is set on the outside of the secondary cover 32 . Set in this way to supplement the effect. Other compositions and connections are the same as in the first embodiment.

The working principle of the present invention is illustrated in conjunction with Fig. 1, Fig. 2, Fig. 4 and Fig. 5: the manipulator of the present invention has four degrees of freedom: namely two telescopic motions in the R direction, rotary motion in the T direction and vertical motion in the Z direction.

The first R-axis telescopic principle: the R-axis left arm drive motor 17 drives the left big arm 19-1 and the left forearm 19-2 through the left arm three-stage synchronous transmission belt 16-1, and finally realizes the left end hand fixing frame 19- 3 movements;

The second R axis expansion and contraction principle: drive the right big arm 20-1, the right forearm 20-2, the right end underhand support 20-3 and the right The end hand supports 20-4, and finally realizes the movement of the right end hand support 20-5;

The principle of T-axis rotary motion: the T-axis driving motor 11 drives the T-axis transmission assembly 10 through the T-axis three-stage synchronous transmission belt 10-1 to drive the R-axis lower flange 12 to rotate, and all components on the R-axis lower flange 12 Co-rotate with the lower flange 12 of the R-axis to form the rotary motion of the T-axis;

The principle of Z-axis stacked lifting movement: the output shaft 22 of the Z-axis drive motor 35 rotates to drive the Z-axis driving pulley 23 to rotate, thereby simultaneously driving the main screw shaft of the main screw drive assembly 2 through the Z-axis synchronous transmission belt 28 2-3 and the auxiliary screw shaft 3-3 of the auxiliary screw drive assembly 3 rotate, driving the main screw shaft 2-3 of the main screw drive assembly 2 to rotate to drive the main screw of the main screw drive assembly 2 The lever nut 2-2 moves upward, thereby pushing the Z-axis sliding bracket 7 to move upward along the main spline guide rail assembly 6, and the auxiliary screw shaft 3-3 of the auxiliary screw drive assembly 3 rotates to drive the auxiliary screw drive assembly 3 The auxiliary lead screw nut 3-2 moves upwards so as to push the middle flange 5 to move upwards, thereby making the main spline guide rail assembly 6 move upward, realizing the extension of the main spline guide rail assembly 6 and realizing cascading lifting.

Clockwork routing principle: When the lower flange 13 of the R-axis rotates and the upper flange 12 of the T-axis is fixed, then all the lines of the R-axis have relative stretching movement relative to the upper flange 12 of the T-axis. After the strip-type wiring method, the clockwork joint inside the wiring module assembly 21 is connected to the lower flange 13 of the R-axis, and the outer joint is connected to the upper flange 12 of the T-axis, so that when the T-axis is rotating Only the clockwork is stressed but the circuit is not stressed, and the expansion and contraction of the circuit can be realized.

Claims (2)

1. A dual-arm wafer transfer manipulator with a large lift-to-telescopic ratio, which includes a base (1), a main screw drive assembly (2), an auxiliary screw drive assembly (3), and three auxiliary spline guide rail assemblies (4), middle flange (5), three main spline guide rail assemblies (6), Z-axis sliding bracket (7), Z-axis drive motor (35), support sleeve assembly (8), T Shaft lower flange (9), T-axis transmission assembly (10), T-axis drive motor (11), T-axis upper flange (12), R-axis lower flange (13), R-axis right arm Transmission assembly (14), R axis right arm drive motor (15), R axis left arm drive assembly (16), R axis left arm drive motor (17), R axis upper flange (18), R axis Left arm assembly (19), R-axis right arm assembly (20), cable routing module assembly (21), Z-axis driving pulley (23), Z-axis driving pulley (25), Z-axis auxiliary The driven transmission pulley (27), the Z-axis synchronous transmission belt (28) and the Z-axis drive motor (35), are characterized in that: the wiring module assembly (21) is composed of a line assembly (29) and a mainspring (30) ), the R-axis left arm assembly (19) is composed of the left big arm (19-1), the left forearm (19-2) and the left end hand holder (19-3), and the R-axis right Arm assembly (20) is made up of right large arm (20-1), right forearm (20-2), right end hand support (20-3), right end hand support (20-4) and right end hand support The main screw drive assembly (2), the Z-axis drive motor (35), the auxiliary screw drive assembly (3) and the three auxiliary spline guide rail assemblies (4) are all composed of brackets (20-5). Installed on the base 1, the upper end of the auxiliary screw shaft (3-3) of the auxiliary screw drive assembly (3) passes through the middle flange (5) and maintains a suspended state, the auxiliary screw shaft (3- 3) The intersection with the middle flange (5) is fixed through the auxiliary screw nut (3-2) of the auxiliary screw drive assembly (3), and the auxiliary screw shaft of the auxiliary screw drive assembly (3) The lower end of (3-3) passes through the base (1) and is fixedly connected with the corresponding Z-axis auxiliary driven drive pulley (27), and the spline (4-4) of the auxiliary spline guide rail assembly (4) is fixed in the middle In the mounting hole of the flange (5), the spline (4-4) slides on the guide rail (4-3), and the main screw shaft (2-3) of the main screw drive assembly (2) ) passes through the middle flange (5), the Z-axis sliding support (7), the T-axis lower flange (9), the T-axis upper flange (12) and the R-axis lower flange from bottom to top. The blue plate (13) is kept in a suspended state, and the intersection of the main screw shaft (2-3) of the main screw drive assembly (2) and the Z-axis sliding bracket (7) passes through the main screw drive assembly ( 2) the main screw nut (2-2) is fixed, and the lower end of the main screw shaft (2-3) of the main screw drive assembly (2) passes through the base (1) and the Z-axis master and slave The transmission pulley (25) is fixedly connected, and the support sleeve assembly (8) is sleeved on the main screw shaft (2-3), and the upper end and the lower end of the support sleeve assembly (8) are respectively connected to the T-axis The lower flange (9) and the middle flange (5) are fixedly connected, and the lower end of the main spline guide rail spline shaft (6-3) of the main spline guide rail assembly (6) is connected to the middle flange (5) Fixed connection, the upper end of the main spline guide rail spline shaft (6-3) of the main spline guide rail assembly (6) passes through the Z-axis sliding bracket (7) and the T-axis lower flange ( 9), the main spline guide rail splines (6-4) of the main spline guide rail assembly (6) are fixed in the mounting holes of the Z-axis sliding bracket (7), and the main spline guide rail splines (6-4) -4) Slide on the main spline guideway spline shaft (6-3), the T-axis drive motor (11) is installed on the upper end surface of the T-axis lower flange (9), and the T-axis transmission assembly The lower end of the assembly (10) is connected to the T-axis lower flange (9), and the T-axis drive motor (11) is connected to the T-axis transmission assembly (10) through the T-axis three-stage synchronous transmission belt (10-1). connection, the upper end of the T-axis transmission assembly (10) passes through the T-axis upper flange (12) and connects with the R-axis lower flange (13), and the R-axis right arm transmission assembly (14) , the R axis left arm drive assembly (16), the R axis right arm drive motor (15) and the R axis left arm drive motor (17) are all installed on the upper end face of the R axis lower flange (13), the The R axis left arm transmission assembly (16) is connected with the R axis left arm drive motor (17) through the left arm three-stage synchronous transmission belt (16-1), and the R axis right arm transmission assembly (14) is connected with the R axis The right arm driving motor (15) is connected through the right arm three-stage synchronous transmission belt (14-1), and the flange (18) on the R axis is installed on the R axis right arm transmission assembly (14) and the R axis left arm On the upper end face of the transmission assembly (16), the shaft of the left arm transmission assembly (16) of the R axis passes through the flange (18) on the R axis and the left big arm ( One end of 19-1) is hinged, and the other end of the left arm (19-1) of the R-axis left arm assembly (19) is connected to the left forearm (19-2) of the R-axis left arm assembly (19). ) is hinged at one end, the other end of the left forearm (19-2) of the R-axis left arm assembly (19) is hinged with one end of the left end hand holder (19-3), and the R-axis right The shaft of the arm transmission assembly (14) passes through the flange plate (18) on the R axis and is hinged with one end of the right big arm (20-1) of the R axis right arm assembly (20), and the R axis right arm The other end of the right large arm (20-1) of the assembly (20) is hinged with one end of the right forearm (20-2) of the R-axis right arm assembly (20), and the R-axis right arm assembly ( 20) The other end of the right forearm (20-2) is hinged with an end of the right end underhand support (20-3), and the other end of the right end underhand support (20-3) is connected with the right end hand stand support ( 20-4) is hinged at one end, the other end of the right end hand stand support (20-4) is hinged with one end of the right end hand support (20-5), and the Z axis drive motor (35) The output shaft (22) passes through the base (1) and is fixedly connected with the Z-axis driving pulley (23), the Z-axis driving and driven pulley (25), the Z-axis auxiliary The driven transmission pulley (27) and the Z-axis driving pulley (23) are connected through the Z-axis synchronous transmission belt (28), and the wiring module assembly (21) is arranged on the T-axis flange (12) and the R Between the flanges (13) under the shaft, the line assembly (29) is covered on the outer surface of the mainspring (30), and the outer end (30-1) of the mainspring (30) is connected to the T-axis The upper flange (12) is affixed, and the inner end (30-2) of the mainspring (30) is affixed to the R-axis lower flange (13). 2. According to claim 1, the dual-arm wafer transfer manipulator with large lifting and telescoping ratio is characterized in that: the manipulator also includes a primary cover (31), a secondary cover (32) and a tertiary cover (33), the The primary cover (31) is arranged on the outside of the middle flange (5), the lower end of the primary cover (31) is fixed on the base (1), and the secondary cover (32) is arranged on the middle flange (5) and the outside of the flange (12) on the T axis, the upper end of the secondary cover (32) is fixed on the flange (12) on the T axis, and the third cover (33) is arranged on the R axis On the outside of the upper flange (18) and the flange (12) on the T axis, the upper end of the tertiary cover (33) is fixed on the flange (18) on the R axis, and the second cover (32 ) is set on the outside of the primary cover (31), and the third cover (33) is set on the outside of the secondary cover (32).

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