[go: up one dir, main page]

CN101126825A - A New Method of Aspherical Grating Replication - Google Patents

A New Method of Aspherical Grating Replication Download PDF

Info

Publication number
CN101126825A
CN101126825A CNA2007100560427A CN200710056042A CN101126825A CN 101126825 A CN101126825 A CN 101126825A CN A2007100560427 A CNA2007100560427 A CN A2007100560427A CN 200710056042 A CN200710056042 A CN 200710056042A CN 101126825 A CN101126825 A CN 101126825A
Authority
CN
China
Prior art keywords
grating
aspheric
master
copy
aspheric grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2007100560427A
Other languages
Chinese (zh)
Inventor
李文昊
巴音贺希格
齐向东
唐玉国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CNA2007100560427A priority Critical patent/CN101126825A/en
Publication of CN101126825A publication Critical patent/CN101126825A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

The utility model relates to a new method of non-spherical grating copy, belonging to a method of non-spherical grating copy in the spectrum technical field. The technical problem to be solved is providing a new method of non-spherical grating copy. The utility model adopts the technical proposal with following steps: firstly, selection of a non-spherical grating mother version; second, selection of a copying base; third, fabrication of a first copy version; fourth, fabrication of a second copy version. The utility model has the advantages of novel method, low cost and easy implementation. The fabrication cycle is shortened, and various lower cost non-spherical gratings can be made using the method. The method can bed used for mass production of non-spherical grating.

Description

The new method that a kind of aspheric grating duplicates
One, technical field
The invention belongs to the new method that a kind of aspheric grating of relating in the spectral technique field duplicates.
Two, background technology
Concave grating has the self-focusing characteristic, does not need collimating optical system and Focused Optical system can form spectral line when imaging.Aspheric grating is used for spectrometer system to have than concave grating superior characteristic more, can utilize the grating face shape of aspheric grating to adjust the aberration of spectrometer system.
Use aspheric grating can reduce the aberration of optical system, the size of dwindling spectral instrument reduces the amount of parts of forming, and improves image quality, resolving power and the measuring accuracy of spectral instrument.Therefore, aspheric grating becomes the indispensable optical element of development spectral technique.
The making of mother matrix aspheric grating has the processing technology complexity, fabrication cycle is long, production efficiency is low, processing cost is high and shortcoming such as repeatable difference.Adopting the epoxide-resin glue reproduction technology to produce aspheric grating can dwindle fabrication cycle, enhances productivity, reduce cost.Because the face shape of mother matrix is an aspheric surface, so require very strictness for the face shape of copy substrates, if copy substrates adopts aspheric surface can increase the cost of replica grating, the radius-of-curvature for substrate when adopting the sphere copy substrates requires very strict.The substrate curvature radius is excessive, can cause the epoxide-resin glue of core between motherboard aspheric grating and the copy substrates blocked up, separates the back because Temperature Influence causes cracked easily; The substrate curvature radius is too small, can cause that core contacts between motherboard aspheric grating and the copy substrates, and the epoxide-resin glue at edge is blocked up, equally can be because Temperature Influence cause crackedly, and the edge epoxide-resin glue flows out easily.So it is very important that selection has the copy substrates of suitable radius-of-curvature.
Three, summary of the invention
In order to overcome the defective that above-mentioned prior art exists, the objective of the invention is to propose a kind of new, cheaply, the aspheric grating that is easy to the realize new method of duplicating.
The technical problem to be solved in the present invention is: the new method that provides a kind of aspheric grating to duplicate.The technical scheme of technical solution problem is: the selection of the first step, mother matrix aspheric grating; Any once duplicate the mother matrix aspheric grating of all wanting selective light gate technique parameter to satisfy design, request for utilization because the performance of the aspheric grating that the mother matrix aspheric grating that is used for duplicating is decision after duplicating and the basic foundation of quality; The surface quality of mother matrix aspheric grating will be got well, and any defect on surface all can embody on the aspheric grating after duplicating; The selection of second step, copy substrates comprises the selection of copy substrates and secondary copy substrates; The mother matrix aspheric grating is a concave surface, one time copy substrates should be selected protruding sphere, and the protruding sphere of a copy substrates and the male and fomale(M﹠F) of mother matrix aspheric grating are during relative the coupling, contact around two face shapes, center section separates, and can make the epoxide-resin glue between grating and the substrate can retain like this; According to aspheric surface equation y 2+ z 2=2Rx-(1-e 2) x 2, solve the concavo-convex sphere curvature radius that is complementary.In the formula, R represents vertex curvature radius, e 2The expression secondry constants; Peak-valley after being in contact with one another according to the substrate of mother matrix aspheric grating and a copy substrates is minimum principle, accurately solve protruding spherical radius with the most approaching relatively sphere of mother matrix aspherical concave grating by aspheric surface equation The numerical example, this is the radius of a copy substrates just; When selecting the secondary copy substrates, regard the mother matrix aspheric grating as convex surface, the secondary copy substrates should be selected concave surface, and at the face shape of mother matrix convex aspheric surface grating and secondary copy substrates concave spherical surface during relative the coupling, two faces contact around being, center section separates, help the middle epoxide-resin glue of two minute surfaces so not to outflow, peak-valley after being in contact with one another according to the substrate of mother matrix aspheric grating and secondary copy substrates is minimum principle, accurately solve the concave spherical surface radius of the most approaching relatively sphere of mother matrix aspheric grating by aspheric surface equation The numerical example, this is the radius of secondary copy substrates just; The making of the 3rd step, a duplicate plate, as shown in Figure 1, at first mother matrix aspheric grating 1 is put into vacuum coating equipment and plated separation oil film 2 and aluminium film 3 respectively, after the taking-up epoxide-resin glue is coated on the aluminium film 3 of mother matrix aspheric grating 1, form epoxy glue layer 4, then with copy substrates 5 with have mother matrix aspheric grating 1 bonding of separating oil film 2, aluminium film 3 and epoxide-resin glue 4, putting into drying box then solidifies, separate at last and cleaning, can obtain face shape is a duplicate plate 6 of protruding sphere; The making of the 4th step, secondary duplicate plate, as shown in Figure 2, a duplicate plate 6 is put into vacuum coating equipment plate separation oil film 7, aluminium film 8 respectively, after the taking-up epoxide-resin glue 9 is coated on the aluminium film 8 of a duplicate plate 6, then with secondary copy substrates 10 with have a duplicate plate 6 bondings of separating oil film 7, aluminium film 8 and epoxide-resin glue 9, putting into baking oven then solidifies, separate at last and cleaning, can obtain secondary duplicate plate 11, this edition is and the identical duplicated aspheric grating of 1 shape of mother matrix aspheric grating.
Principle of work explanation of the present invention: the peak-valley of utilization aspheric grating substrate and copy substrates should be minimum principle and selects suitable copy substrates, take the method for vacuum evaporation separation oil film and aluminium film, the glue bond of use epoxy resin, the aspheric grating that is not easy to make is made with the method for duplicating.Step 1 is selected the mother matrix aspheric grating.Step 2 is selected one time copy substrates.Step 3, the making of a duplicate plate.Step 4 is selected the secondary copy substrates.Step 5, the making of secondary duplicate plate, this edition is and the identical duplicated aspheric grating of 1 shape of mother matrix aspheric grating.
Good effect of the present invention is: the new method that aspheric grating of the present invention duplicates be novel, cheaply, be easy to realize, save cost widely, shortened fabrication cycle, utilize the inventive method can produce lower-cost all kinds of aspheric grating, this method can be used to produce in batches aspheric grating.
Four, description of drawings
Fig. 1 is the manufacturing process synoptic diagram of a duplicate plate among the present invention.Fig. 2 is the manufacturing process synoptic diagram of secondary duplicate plate among the present invention.
Five, embodiment
The present invention implements by technical scheme making step illustrated in figures 1 and 2, and is specific as follows:
1, option table and do not have flaw, the measured mother matrix aspheric grating of face shape matter, what we adopted is concave grating;
2, the peak-valley according to a substrate of mother matrix aspheric grating and a copy substrates should be minimum principle, by aspheric surface equation y 2+ z 2=2Rx-(1-e 2) x 2, The numerical example accurately solves the most approaching relatively radius of sphere of mother matrix aspheric grating, and this is the radius of a copy substrates just;
3, the mother matrix aspheric grating is put into vacuum coating equipment plating separating oil and aluminium film;
4, use epoxide-resin glue with copy substrates and mother matrix aspheric grating bonding, carry out in the drying box that is operated in 60 ℃ that bonds;
5, the mother matrix aspheric grating that bonds together and a copy substrates are put into drying box and solidify, solidification temperature is about 65 ℃, 4-5 hour set time;
6, with blade scrape off accumulate in around and the epoxide-resin glue that has cured of Chamfer Edge place, a copy substrates after solidifying is separated with the cohesive body of mother matrix aspheric grating, carry out cleaning then with blowing up a balloon;
7, the method in the utilization step 2 is calculated the radius of secondary copy substrates;
8, the method in the utilization step 3,4,5 is made the secondary duplicate plate.

Claims (1)

1.一种非球面光栅复制的新方法,其特征在于:第一步、母版非球面光栅的选择;任何一次的复制都要选择光栅技术参数满足设计、使用要求的母版非球面光栅,因为用来复制的母版非球面光栅是决定复制后的非球面光栅的性能和质量的基本依据;母版非球面光栅的表面质量要好,表面的任何疵病都会在复制后的非球面光栅上体现出来;第二步、复制基底的选择,包括一次复制基底和二次复制基底的选择;母版非球而光栅是凹面的,一次复制基底应该选择凸球面,并且一次复制基底的凸球面与母版非球面光栅的凹凸面相对匹配时,两个面形四周接触,中间部分是分离的,这样可使光栅与基底之间的环氧树脂胶能留存住;根据非球面方程式y2+z2=2Rx-(1-e2)x2,求解出凹凸相匹配的球面曲率半径。式中,R表示顶点曲率半径,e2表示二次常数;根据母版非球面光栅基底与一次复制基底相互接触后的峰-谷值为最小的原则,通过非球面方程式数值算例精确求解出与母版非球面凹面光栅的最接近比较球面的凸球面半径,这也就是一次复制基底的半径;选择二次复制基底时,将母版非球面光栅看成凸面,二次复制基底应该选择凹面的,并且在母版凸非球面光栅的面形与二次复制基底凹球面相对匹配时,两个面是四周接触,中间部分是分离的,这样有利于两镜面中间的环氧树脂胶不向外流,根据母版非球面光栅基底与二次复制基底相互接触后的峰-谷值为最小的原则,通过非球面方程式数值算例精确求解出母版非球面光栅的最接近比较球面的凹球面半径,这也就是二次复制基底的半径;第三步、一次复制版的制作,首先将母版非球面光栅(1)放入真空镀膜机中分别镀分离油膜(2)和铝膜(3),取出后将环氧树脂胶涂在母版非球面光栅(1)的铝膜(3)上,形成环氧树脂胶层(4),接着将一次复制基底(5)与带有分离油膜(2)、铝膜(3)和环氧树脂胶(4)的母版非球面光栅(1)粘结,然后放入干燥箱中固化,最后分离和清洁处理,即可得到面形为凸球面的一次复制版(6);第四步、二次复制版的制作,将一次复制版(6)放入真空镀膜机中分别镀分离油膜(7)、铝膜(8),取出后将环氧树脂胶(9)涂在一次复制版(6)的铝膜(8)上,接着将二次复制基底(10)与带有分离油膜(7)、铝膜(8)和环氧树脂胶(9)的一次复制版(6)粘结,然后放入烘箱中固化,最后分离和清洁处理,即可得到二次复制版(11),该版是与母版非球面光栅(1)面形相同的复制出的非球面光栅。1. A new method for aspheric grating replication, characterized in that: the first step, the selection of the master aspheric grating; any replication will select the master aspheric grating whose grating technical parameters meet design and service requirements, Because the master aspheric grating used for replication is the basic basis for determining the performance and quality of the replicated aspheric grating; the surface quality of the master aspheric grating is better, and any defects on the surface will be on the replicated aspheric grating Reflected; the second step, the selection of the copy base, including the selection of the first copy base and the second copy base; the master is aspherical and the grating is concave, the first copy base should choose a convex spherical surface, and the convex spherical surface of the first copy base is the same as When the concave and convex surfaces of the master aspheric grating are relatively matched, the two surfaces are in contact with each other, and the middle part is separated, so that the epoxy resin glue between the grating and the substrate can be retained; according to the aspheric surface equation y 2 +z 2 =2Rx-(1-e 2 )x 2 , to find out the radius of curvature of the spherical surface matching the concavo-convex. In the formula, R represents the radius of curvature of the apex, and e2 represents the quadratic constant; according to the principle that the peak-to-valley value of the master aspheric grating substrate and the primary copy substrate are in contact with each other, the aspheric surface equation is accurately solved through a numerical example. The closest comparison with the master aspherical concave grating is the convex spherical radius of the sphere, which is the radius of the first copy base; when selecting the second copy base, the master aspheric grating is regarded as a convex surface, and the second copy base should choose a concave surface , and when the surface shape of the master convex aspheric grating is relatively matched with the concave spherical surface of the secondary replication base, the two surfaces are in contact with each other, and the middle part is separated, which is conducive to the epoxy resin in the middle of the two mirrors. Outflow, according to the principle that the peak-to-valley value of the master aspheric grating substrate and the secondary copy substrate are in contact with each other, the concave spherical surface closest to the comparison spherical surface of the master aspheric grating is accurately solved through numerical examples of the aspheric surface equation Radius, which is the radius of the secondary copy substrate; the third step, the production of a copy plate, first put the master aspheric grating (1) into the vacuum coating machine to coat the separated oil film (2) and aluminum film (3 ), after taking it out, apply epoxy resin glue on the aluminum film (3) of the master plate aspheric grating (1) to form an epoxy resin glue layer (4), and then apply the primary replication base (5) and the aluminum film (3) with the separation oil film (2), the aluminum film (3) and the master aspheric grating (1) of the epoxy resin glue (4) are bonded, and then placed in a drying oven to cure, and finally separated and cleaned, the surface shape can be obtained. The primary replica (6) of the spherical surface; the fourth step, the production of the secondary replica, put the primary replica (6) into the vacuum coating machine to coat the separated oil film (7) and aluminum film (8) respectively, and put the Epoxy resin glue (9) is coated on the aluminum film (8) of primary replication plate (6), and then the secondary replication base (10) is mixed with separation oil film (7), aluminum film (8) and epoxy resin The primary copy (6) of the glue (9) is bonded, then put into an oven for curing, and finally separated and cleaned to obtain the second copy (11), which is the same as the master aspheric grating (1) A copied aspheric grating with the same surface shape.
CNA2007100560427A 2007-09-07 2007-09-07 A New Method of Aspherical Grating Replication Pending CN101126825A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA2007100560427A CN101126825A (en) 2007-09-07 2007-09-07 A New Method of Aspherical Grating Replication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNA2007100560427A CN101126825A (en) 2007-09-07 2007-09-07 A New Method of Aspherical Grating Replication

Publications (1)

Publication Number Publication Date
CN101126825A true CN101126825A (en) 2008-02-20

Family

ID=39094898

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007100560427A Pending CN101126825A (en) 2007-09-07 2007-09-07 A New Method of Aspherical Grating Replication

Country Status (1)

Country Link
CN (1) CN101126825A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101487975B (en) * 2009-02-18 2011-06-29 潍坊学院 Fabrication method of θ-modulated holographic grating
WO2015043046A1 (en) * 2013-09-29 2015-04-02 清华大学深圳研究生院 Manufacturing method for blazed concave grating
CN104749673A (en) * 2015-04-21 2015-07-01 中国科学院长春光学精密机械与物理研究所 Copying and splicing method of large-size plane diffraction grating
CN107884856A (en) * 2017-12-28 2018-04-06 中国科学院上海技术物理研究所杭州大江东空间信息技术研究院 A kind of novel grating clone method based on ultra-violet curing
CN108254819A (en) * 2017-12-26 2018-07-06 中国科学院长春光学精密机械与物理研究所 A kind of production method of Chinese character pin-shaped displacement measurement grating
CN112684530A (en) * 2021-01-22 2021-04-20 宜兴市晶科光学仪器有限公司 Method for preparing aberration-eliminating aspheric flat-field holographic concave grating

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101487975B (en) * 2009-02-18 2011-06-29 潍坊学院 Fabrication method of θ-modulated holographic grating
WO2015043046A1 (en) * 2013-09-29 2015-04-02 清华大学深圳研究生院 Manufacturing method for blazed concave grating
US9470824B2 (en) 2013-09-29 2016-10-18 Graduate School At Shenzhen, Tsinghua University Manufacture method for blazed concave grating
CN104749673A (en) * 2015-04-21 2015-07-01 中国科学院长春光学精密机械与物理研究所 Copying and splicing method of large-size plane diffraction grating
CN108254819A (en) * 2017-12-26 2018-07-06 中国科学院长春光学精密机械与物理研究所 A kind of production method of Chinese character pin-shaped displacement measurement grating
CN107884856A (en) * 2017-12-28 2018-04-06 中国科学院上海技术物理研究所杭州大江东空间信息技术研究院 A kind of novel grating clone method based on ultra-violet curing
CN112684530A (en) * 2021-01-22 2021-04-20 宜兴市晶科光学仪器有限公司 Method for preparing aberration-eliminating aspheric flat-field holographic concave grating

Similar Documents

Publication Publication Date Title
CN101126825A (en) A New Method of Aspherical Grating Replication
JP4969277B2 (en) Glass mold for spectacle lens, manufacturing method thereof, and manufacturing method of spectacle lens
CN116256829A (en) Preparation method of diffraction grating waveguide of near-eye display
CN102229082A (en) A kind of manufacturing method of wedge mirror
US8611026B2 (en) Optical device including at least one replicated surface and associated methods
JPWO2015108002A1 (en) Template for imprint, template capable of forming transfer pattern, and production method thereof
CN101441286A (en) Method for manufacturing aspherical grating by copy technology
CN102029716B (en) Spherical Fresnel lens processing method
TW201040005A (en) Methods and devices for manufacturing an array of lenses
CN105607163B (en) A kind of impression manufacture method on the surface with lenticule or microlens array structure
JP2018099677A (en) Additive manufacturing of optical components
CN101879765A (en) Stamper manufacturing method, stamper, and molded product manufacturing method
TWI719261B (en) Apparatus of additive manufacturing using optical pickup head
CN201041596Y (en) A multi-chip panoramic surround-view imaging lens
CN116577853A (en) Micro-lens surface type etching process method
US20250109053A1 (en) Method for manufacturing aspherical prism and aspherical prism
JPH04205936A (en) Transfer molding medium and its manufacturing method
CN112692679A (en) High-precision prism bonding device and processing method
CN100504450C (en) A kind of process method of making aspheric mirror by adopting replication technology
CN102116917B (en) Optical cement method for optical element and implementation thereof in pyramid array
KR20120092025A (en) Mold-forming substrate and inspection method
CN205080364U (en) Composite nanowire impression soft mode board
CN214054722U (en) High-precision prism bonding device
CN115519435A (en) A processing method of large asphericity and high steepness aspheric lens
CN106342022B (en) A kind of spherical polishing die craft equipment fixture and the method for making bitumen ball mirror polish mould

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication