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CN100418221C - Electro-optical devices and electronic instruments - Google Patents

Electro-optical devices and electronic instruments Download PDF

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Publication number
CN100418221C
CN100418221C CNB2006101625744A CN200610162574A CN100418221C CN 100418221 C CN100418221 C CN 100418221C CN B2006101625744 A CNB2006101625744 A CN B2006101625744A CN 200610162574 A CN200610162574 A CN 200610162574A CN 100418221 C CN100418221 C CN 100418221C
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wiring
layer
electrode
power supply
light
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CN1967835A (en
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青木幸司
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Seiko Epson Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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Abstract

The invention provides an electrooptical device and electronic apparatus. The electro-optical apparatus are capable of narrowing the frame region. A light-emitting power source wiring lines and second electrode wiring lines disposed around a first electrode region where first electrodes are arranged in a matrix on a substrate, the light-emitting power source wiring lines being connected to the first electrodes, the second electrode wiring lines being connected to a second electrode, a functional layer being interposed between the first electrodes and the second electrode, wherein the light-emitting power source wiring lines and the second electrode wiring lines are arranged such that at least some of the wiring lines overlap each other in plan view. In addition, the electronic apparatus has the electrooptical device.

Description

电光装置和电子仪器 Electro-optical devices and electronic instruments

本申请是申请号:03140936.9、发明名称:电光装置和电子仪器,申请日:2003.6.4的申请的分案申请。This application is a divisional application of the application number: 03140936.9, the name of the invention: electro-optic device and electronic instrument, and the application date: 2003.6.4.

技术领域 technical field

本发明涉及电光装置和电子仪器。The present invention relates to electro-optical devices and electronic instruments.

背景技术 Background technique

近年,在形成有象素电极的衬底和公共电极之间具有使用了有机发光材料的发光元件的有机EL(场致发光)显示装置(例如,参照特开平5-3080号公报)引人注目。In recent years, an organic EL (Electroluminescence) display device having a light-emitting element using an organic light-emitting material between a substrate on which a pixel electrode is formed and a common electrode (for example, refer to JP-A-5-3080) has attracted attention. .

在有机EL显示装置中,通过向发光元件供给电流,发光元件发光。这时,发光元件的亮度基本上由供给的电流的电流量决定。In an organic EL display device, a light-emitting element emits light by supplying a current to the light-emitting element. At this time, the luminance of the light emitting element is basically determined by the amount of current supplied.

如上所述,发光元件的亮度基本上由所供给的电流的电流量决定,所以有必要正确设定,使电流量变为所需的值。As described above, the luminance of the light-emitting element is basically determined by the current amount of the supplied current, so it is necessary to set it correctly so that the current amount becomes a desired value.

另外,如果要确保充分的电流量,则用于供给电流的布线的宽度增大,框区域增大,有时在向各种电子仪器搭载时会引起障碍。In addition, if a sufficient amount of current is to be ensured, the width of wiring for supplying current increases, and the frame area increases, which may cause trouble when mounting it in various electronic devices.

发明内容 Contents of the invention

本发明是鉴于所述事实而提出的,其第一目的在于确保充分的电流量,或者抑制由电源电压的变动而引起的发光元件的亮度变动。其另一目的在于提供一种,满足所述的要求,同时使窄框化成为可能的发光装置和电子仪器。The present invention has been made in view of the above facts, and its first object is to secure a sufficient amount of current or to suppress fluctuations in luminance of light-emitting elements caused by fluctuations in power supply voltage. Another object of the present invention is to provide a light-emitting device and an electronic device that satisfy the above-mentioned requirements and enable frame narrowing.

为了实现所述目的,本发明采用了以下的结构。In order to achieve the object, the present invention employs the following structures.

本发明之一的电光装置是,多条发光用电源布线配置在衬底上的第一层中,把发光用电源布线连接于对应的电极上的多条连接用布线,配置在与第一层电绝缘的第二层中,其特征在于,多条发光用电源布线中,位于最外侧的发光用电源布线,设置在第一层和第二层两方中。In an electro-optic device according to one aspect of the present invention, a plurality of light-emitting power supply wirings are arranged in the first layer on the substrate, and a plurality of connecting wirings connecting the light-emitting power supply wirings to corresponding electrodes are arranged in the first layer connected to the first layer. In the electrically insulating second layer, the power supply wiring for light emission located on the outermost side among the plurality of power supply wirings for light emission is provided on both the first layer and the second layer.

位于最外侧的发光用电源布线在平面上与连接用布线不重叠,所以也能设置在第二层中。由此,在本发明中,如果电连接设置在第一层和第二层中的发光用电源布线,则与只设置在一层中时相比,能减小各层中的发光用电源布线的宽度。因此,在本发明中,能减少相当于发光用电源布线的宽度减少那一部分的面板的框。Since the light-emitting power supply wiring located on the outermost side does not overlap the connection wiring in plan, it can also be provided in the second layer. Therefore, in the present invention, if the light-emitting power supply wirings provided in the first layer and the second layer are electrically connected, the number of light-emitting power supply wirings in each layer can be reduced compared with the case where only one layer is provided. width. Therefore, in the present invention, it is possible to reduce the frame of the panel corresponding to the reduction in the width of the power supply wiring for light emission.

在所述电光装置中,理想的是,多条发光用电源布线中,至少与位于最内侧的发光用电源布线连接的连接用布线设置在第一层中。In the electro-optic device, preferably, among the plurality of light-emitting power supply wirings, a connection wiring connected to at least the light-emitting power supply wiring located on the innermost side is provided in the first layer.

因为与位于最内侧的发光用电源布线相连接的连接用布线,不与除该发光用电源布线以外的布线重叠,所以能设置在第一层中。Since the wiring for connection connected to the power supply wiring for light emission positioned on the innermost side does not overlap with wiring other than the power supply wiring for light emission, it can be provided in the first layer.

因此,在本发明中,该连接用布线的宽度部分能使设置在第二层中的其它连接用布线变粗,能使连接用布线的制造变得容易。另外,不需要最外侧以及内侧的发光用电源布线和连接用布线的接点,能减小接点电阻的依赖性。Therefore, in the present invention, the width portion of the connection wiring can make the other connection wiring provided in the second layer thicker, and the manufacture of the connection wiring can be facilitated. In addition, contact points between the outermost and inner light-emitting power supply lines and connection lines are unnecessary, and the dependence of contact resistance can be reduced.

能采用,在电极上设置有空穴注入/输送层和与该空穴注入/输送层相邻形成的由有机场致发光材料构成的发光层的结构。A structure in which a hole injection/transport layer and a light emitting layer made of an organic electroluminescent material formed adjacent to the hole injection/transport layer are provided on the electrode can be employed.

因此,在本发明中,得到了通过发光用电源布线和连接用布线,在电极上外加驱动电流而发光的,小型、接点电阻依赖性小的面板。Therefore, in the present invention, a small-sized panel with little dependency on contact resistance is obtained in which driving current is applied to the electrodes to emit light through the light-emitting power supply wiring and the connection wiring.

本发明之二的电光装置是,在第一电极在衬底上配置为矩阵状的第一电极区域的周围,配置有与所述第一电极连接的发光用电源布线和连接于与所述第一电极之间夹着功能层的第二电极上的第二电极用布线,其特征在于,所述发光用电源布线和所述第二电极用布线配置为,在平面视图中至少一部分彼此重叠。In the electro-optical device according to the second aspect of the present invention, a light-emitting power supply wiring connected to the first electrode and a power supply wiring connected to the first electrode are arranged around the first electrode region in which the first electrodes are arranged in a matrix on the substrate. The second electrode wiring on the second electrode sandwiching the functional layer between the first electrodes is characterized in that the light emitting power supply wiring and the second electrode wiring are arranged so as to at least partially overlap each other in plan view.

在所述的电光装置中,理想的是,在所述发光用电源布线和第二电极用布线之间配置有层间绝缘层。由此,在所述的电光装置中,发光用电源布线和第二电极用布线在俯视图中重叠的部分,能减少基于这些布线的专有面积,能使面板的框变窄。另外,通过使发光用电源布线和第二电极用布线的至少一部分重叠,形成了静电电容,使驱动电流的电位变动更小,而能稳定进行图象显示。In the above-mentioned electro-optical device, it is preferable that an interlayer insulating layer is disposed between the light-emitting power supply wiring and the second electrode wiring. Accordingly, in the electro-optic device, the portion where the power supply wiring for light emission and the wiring for the second electrode overlap in plan view can reduce the area dedicated to these wirings, and narrow the frame of the panel. In addition, by overlapping at least a part of the light-emitting power supply wiring and the second electrode wiring, an electrostatic capacitance is formed, so that the potential fluctuation of the driving current is reduced, and image display can be stably performed.

在所述的电光装置中,理想的是,在发光用电源布线和第二电极用布线之间配置层间绝缘膜。由此,能使发光用电源布线和第二电极用布线绝缘。In the electro-optic device described above, it is desirable that an interlayer insulating film is disposed between the light-emitting power source wiring and the second electrode wiring. Thereby, the power source wiring for light emission and the wiring for 2nd electrode can be insulated.

在所述的电光装置中,也能采用把发光用电源布线和第二电极用布线的任意一方配置在另一方占有的区域内的结构。In the electro-optical device described above, either one of the light-emitting power supply wiring and the second electrode wiring can be arranged in a region occupied by the other.

由此,本发明中,在俯视图中没必要另外设置,配置发光用电源布线和第二电极用布线中的任意一方的区域,能进一步有助于窄框化。Therefore, in the present invention, it is not necessary to provide additionally in a plan view, and it is possible to further contribute to frame narrowing by arranging an area of either one of the power supply wiring for light emission and the wiring for the second electrode.

作为功能层,能采用设置空穴注入/输送层和与该空穴注入/输送层相邻形成的由有机场致发光材料构成的发光层的结构。As the functional layer, a structure in which a hole injection/transport layer and a light emitting layer made of an organic electroluminescent material formed adjacent to the hole injection/transport layer can be employed.

因此,在本发明中,能得到通过发光用电源布线,在第一电极上外加驱动电流而发光的小型面板。Therefore, in the present invention, it is possible to obtain a small panel that emits light by applying a drive current to the first electrode through the power source wiring for light emission.

本发明之三的电光装置的特征在于,包括:设置在衬底上的有效区域中的、包括具有夹在第一电极和第二电极之间的功能层的电光元件的多个象素;在所述有效区域的外侧与所述第二电极相连的电极用布线;通过有源元件与所述第一电极连接,至少设置在所述有效区域上的连接用布线;在所述有效区域的外侧与所述连接用布线相连的电源线;并且,所述电源线的至少一部分由通过层间绝缘膜隔开的多个导电膜和把所述多个导电膜彼此电连接的导电材料形成。The electro-optic device of the present invention 3 is characterized in that it includes: a plurality of pixels including an electro-optic element having a functional layer sandwiched between a first electrode and a second electrode provided in an active area on a substrate; The electrode wiring connected to the second electrode outside the effective area; the connecting wiring provided at least on the effective area to connect to the first electrode through an active element; outside the effective area A power supply line connected to the connection wiring; and at least a part of the power supply line is formed of a plurality of conductive films separated by an interlayer insulating film and a conductive material electrically connecting the plurality of conductive films to each other.

本发明之四的电光装置的特征在于:包括:设置在衬底上的有效区域中的、包括具有夹在第一电极和第二电极之间的功能层的电光元件的多个象素;在所述有效区域的外侧与所述第二电极连接的电极用布线;通过有源元件,与所述第一电极连接,至少设置在所述有效区域上的连接用布线;在所述有效区域的外侧与所述连接用布线相连的电源线;并且,在所述有效区域的外侧设置有多条所述电源线,所述电源线中,设置在最远离所述有效区域的位置的电源线的至少一部分由通过层间绝缘膜隔开的多个导电膜和把所述多个导电膜彼此电连接的导电材料形成。The electro-optic device of the fourth aspect of the present invention is characterized in that it includes: a plurality of pixels including an electro-optic element having a functional layer sandwiched between a first electrode and a second electrode provided in an active area on a substrate; The wiring for electrodes connected to the second electrode on the outside of the effective area; the wiring for connecting to the first electrode through an active element and provided at least on the effective area; The outer side of the power line connected to the connection wiring; and a plurality of the power lines are provided outside the effective area, and among the power lines, the power line that is arranged at the position farthest from the effective area At least a part is formed of a plurality of conductive films separated by an interlayer insulating film and a conductive material electrically connecting the plurality of conductive films to each other.

通过象所述电光装置那样,使电源线多层化,与只用一个布线层构成电源线时相比,能减少一层的线宽。由此,不但能确保充分的电流,而且使窄框化成为可能。By making the power supply lines multilayered as in the electro-optical device described above, the line width of one layer can be reduced compared to the case where the power supply lines are formed by only one wiring layer. Accordingly, not only sufficient current can be ensured, but also frame narrowing can be achieved.

本发明之五的电光装置的特征在于,包括:设置在衬底上的有效区域中的、包含具有夹在第一电极和第二电极之间的功能层的电光元件的多个象素;在所述有效区域的外侧与所述第二电极连接的电极用布线;通过有源元件,与所述第一电极连接,至少设置在所述有效区域上的连接用布线;在所述有效区域的外侧与所述连接用布线相连的电源线;并且,在所述有效区域的外侧设置了多条所述电源线,所述电源线中,设置在最靠近所述有效区域的位置的电源线由只设置在一个布线层中的导电膜形成。The electro-optic device of the fifth aspect of the present invention is characterized in that it includes: a plurality of pixels including an electro-optic element having a functional layer sandwiched between a first electrode and a second electrode, provided in an active area on a substrate; The wiring for electrodes connected to the second electrode on the outside of the effective area; the wiring for connecting to the first electrode through an active element and provided at least on the effective area; The outer side is connected to the power line connected with the wiring for connection; and a plurality of the power lines are arranged outside the effective area, and among the power lines, the power line arranged at the position closest to the effective area is composed of A conductive film provided only in one wiring layer is formed.

本发明之六的电光装置的特征在于,包括:设置在衬底上的有效区域中的、包含具有夹在第一电极和第二电极之间的功能层的电光元件的多个象素;在所述有效区域的外侧与所述第二电极连接的电极用布线;通过有源元件,与所述第一电极连接,至少设置在所述有效区域上的连接用布线;在所述有效区域的外侧与所述连接用布线相连的电源线;并且,所述连接用布线的线宽与该连接用布线连接的所述电源线的线宽不同。The electro-optical device of the sixth aspect of the present invention is characterized in that it includes: a plurality of pixels including an electro-optical element having a functional layer sandwiched between a first electrode and a second electrode provided in an active area on a substrate; The wiring for electrodes connected to the second electrode on the outside of the effective area; the wiring for connecting to the first electrode through an active element and provided at least on the effective area; A power supply line connected to the connection wiring on the outside; and the line width of the connection wiring is different from that of the power supply line connected to the connection wiring.

在有效区域内,有时有必要按照象素间隔使所述连接用布线的线宽变窄,但是有必要充分确保通过所述连接用布线提供给象素的电流量。因此,在所述电光装置中,通过使所述电源线的线宽比所述连接用布线的线宽大,从而能对应于象素间隔,并且能确保电流量。In the active area, it is sometimes necessary to narrow the line width of the connection wiring for every pixel interval, but it is necessary to ensure a sufficient amount of current supplied to the pixels through the connection wiring. Therefore, in the electro-optical device, by making the line width of the power supply line larger than the line width of the connection wiring, it is possible to correspond to the pixel interval and ensure the amount of current.

本发明之七的电光装置的特征在于,包括:设置在衬底上的有效区域中的、包含具有夹在第一电极和第二电极之间的功能层的电光元件的多个象素;在所述有效区域的外侧与所述第二电极连接的电极用布线;通过有源元件,与所述第一电极连接,至少设置在所述有效区域上的连接用布线;在所述有效区域的外侧与所述连接用布线相连的电源线;并且,所述连接用布线的第一部分的线宽和第二部分的线宽彼此不同。The electro-optical device of the seventh aspect of the present invention is characterized in that it includes: a plurality of pixels including an electro-optical element having a functional layer sandwiched between a first electrode and a second electrode, provided in an active area on a substrate; The wiring for electrodes connected to the second electrode on the outside of the effective area; the wiring for connecting to the first electrode through an active element and provided at least on the effective area; A power supply line externally connected to the wiring for connection; and a line width of a first portion of the wiring for connection and a line width of a second portion of the wiring for connection are different from each other.

在所述电光装置中,所述第一部分是指,例如所述连接用布线中的所述连接用布线和所述电源线连接的接点部附近;所述第二部分是指,例如比所述第一部分更靠近所述有效区域,或位于所述有效区域的部分。这时,所述第一部分的线宽最好比所述第二部分的线宽大。这样,通过在所述连接用布线那样的同一布线上设置线宽彼此不同的部分,能缓和接点部等的线宽或材料的差异等引起的电压下降或电阻增加等引起的供给电流量的电动和不稳定化。In the electro-optic device, the first part refers to, for example, the vicinity of a contact point where the connection wiring and the power supply line are connected among the connection wiring; the second part refers to, for example, the The first part is closer to the active area, or is located in a part of the active area. In this case, the line width of the first portion is preferably larger than the line width of the second portion. In this way, by providing portions having different line widths on the same wiring such as the above-mentioned connection wiring, it is possible to alleviate the electromotive force caused by the voltage drop or the resistance increase caused by the difference in the line width or material of the contact portion or the like. and destabilization.

本发明之八的电光装置的特征在于,包括:设置在衬底上的有效区域中的、包含具有夹在第一电极和第二电极之间的功能层的电光元件的多个象素;在所述有效区域的外侧与所述第二电极连接的电极用布线;通过有源元件,与所述第一电极连接,并至少设置在所述有效区域上的连接用布线;在所述有效区域的外侧与所述连接用布线相连的电源线;并且,设置了多条所述连接用布线,所述多条连接用布线中的至少一条是由设置在不同的多个各布线层中的导电膜和把所述导电膜彼此连接的导电材料构成。The eighth electro-optical device of the present invention is characterized in that it includes: a plurality of pixels including an electro-optical element having a functional layer sandwiched between a first electrode and a second electrode, provided in an active area on a substrate; The wiring for electrodes connected to the second electrode on the outside of the effective area; the wiring for connecting connected to the first electrode through an active element and provided at least on the effective area; in the active area The outer side of the power line connected to the wiring for connection; and a plurality of wiring for connecting is provided, at least one of the wiring for connecting is made of a conductive wire provided in a plurality of different wiring layers. The film and the conductive material that connects the conductive films to each other.

在所述有效区域上,最好所述连接用布线基本上都设置在同一层上。而在所述连接用布线的与所述电源线的接点部附近,存在多个接点部,所以至少在所述连接用布线的与所述电源线的接点部附近,把全部的所述连接用布线设置在同一层中,对于有效利用限定的空间是不利的。因此,象所述电光装置那样,通过利用不同的布线层构成所述连接用布线中的至少一个,能满足上述的两个要求。In the effective area, it is preferable that the connection wirings are basically all provided on the same layer. In the vicinity of the contact portion of the connection wiring with the power line, there are a plurality of contact portions, so at least in the vicinity of the contact portion of the connection wiring with the power line, all of the connection wiring Wiring is arranged in the same layer, which is not good for efficient use of the limited space. Therefore, by configuring at least one of the connection wirings with different wiring layers like the electro-optical device, the above-mentioned two requirements can be satisfied.

本发明之九的电光装置的特征在于,包括:设置在衬底上的有效区域中的、包含具有夹在第一电极和第二电极之间的功能层的电光元件的多个象素;在所述有效区域的外侧与所述第二电极连接的电极用布线;通过有源元件,与所述第一电极连接,且至少设置在所述有效区域上的连接用布线;在所述有效区域的外侧与所述连接用布线相连的电源线;并且,在构成所述电极用布线的至少一部分的第一导电膜和所述衬底之间,形成了构成所述电源线的至少一部分的第二导电膜;通过层间绝缘膜,彼此隔开形成了所述第一导电膜和所述第二导电膜;重叠配置了所述第一导电膜的至少一部分和所述第二导电膜的至少一部分。The electro-optical device according to the ninth aspect of the present invention is characterized in that it includes: a plurality of pixels including an electro-optical element having a functional layer sandwiched between a first electrode and a second electrode provided in an active area on a substrate; The wiring for electrodes connected to the second electrode outside the effective area; the wiring for connecting connected to the first electrode through an active element and provided at least on the active area; in the active area and a first conductive film constituting at least a part of the electrode wiring is formed between the first conductive film constituting at least a part of the electrode wiring and the substrate. Two conductive films; the first conductive film and the second conductive film are separated from each other by an interlayer insulating film; at least a part of the first conductive film and at least a part of the second conductive film are overlapped and arranged part.

象所述电光装置那样,通过隔着层间绝缘膜层叠所述电源线和所述电极用布线,能减少框区域。并且,因为在所述电源线和所述电极用布线之间能形成电容,所以具有缓和电压变动的效果。Like the above-mentioned electro-optic device, by laminating the power supply line and the electrode wiring through an interlayer insulating film, the frame area can be reduced. Furthermore, since capacitance can be formed between the power supply line and the electrode wiring, there is an effect of alleviating voltage fluctuations.

在所述电光装置中,理想的是,所述第二导电膜通过设置在所述层间绝缘膜上的接触部连接着所述连接用布线。In the electro-optical device, it is preferable that the second conductive film is connected to the connection wiring through a contact portion provided on the interlayer insulating film.

在所述电光装置中,所述功能层可以由有机场致发光材料构成。In the electro-optic device, the functional layer may be composed of an organic electroluminescent material.

本发明的电子仪器的特征在于,具有所述电光装置。An electronic device according to the present invention includes the electro-optical device.

附图说明Description of drawings

下面简要说明附图。The accompanying drawings are briefly described below.

图1是表示本发明的实施例的图,即显示装置的布线构造的平面模式图。FIG. 1 is a schematic plan view showing an embodiment of the present invention, that is, a wiring structure of a display device.

图2是实施例1的显示装置的平面模式图。FIG. 2 is a schematic plan view of the display device of Example 1. FIG.

图3是图2中的A-A’线剖视图。Fig. 3 is a sectional view taken along line A-A' in Fig. 2 .

图4是图3所示的剖视图的放大图。FIG. 4 is an enlarged view of the cross-sectional view shown in FIG. 3 .

图5是实施例1的电源线和连接了各电源线的连接用布线的放大图。FIG. 5 is an enlarged view of the power supply lines and connection wiring to which the respective power supply lines are connected according to the first embodiment.

图6(a)~(d)是说明本发明实施例的显示装置的制造方法的工序图。6( a ) to ( d ) are process diagrams illustrating a method of manufacturing a display device according to an embodiment of the present invention.

图7(a)~(c)是说明本发明实施例的显示装置的制造方法的工序图。7( a ) to ( c ) are process diagrams illustrating a method of manufacturing a display device according to an embodiment of the present invention.

图8(a)~(c)是说明本发明实施例的显示装置的制造方法的工序图。8( a ) to ( c ) are process diagrams illustrating a method of manufacturing a display device according to an embodiment of the present invention.

图9(a)~(c)是说明本发明实施例的显示装置的制造方法的工序图。9( a ) to ( c ) are process diagrams illustrating a method of manufacturing a display device according to an embodiment of the present invention.

图10是实施例2的显示装置的平面模式图。FIG. 10 is a schematic plan view of a display device of Example 2. FIG.

图11是图10的A-A’线剖视图。Fig. 11 is a sectional view taken along line A-A' of Fig. 10 .

图12是实施例2的电源线和连接了各电源线的连接用布线的放大图。FIG. 12 is an enlarged view of the power supply lines and the connection wiring to which the respective power supply lines are connected according to the second embodiment.

图13是表示具有有机EL显示装置的电子仪器的一个例子的图,(a)是移动电话的立体图,(b)是手表型电子仪器的立体图,(c)是便携式信息处理装置的立体图。13 is a diagram showing an example of an electronic device having an organic EL display device, (a) is a perspective view of a mobile phone, (b) is a perspective view of a watch-type electronic device, and (c) is a perspective view of a portable information processing device.

图中,1-显示装置(有机EL显示装置、电光装置);2-衬底;2a-有效区域(显示区域);99R、99G、99B-连接用布线;103、103R、103G、103B-电源线(发光用电源布线);110a-空穴注入/输送层;110b-发光层;111-象素电极(电极);135-第一布线层(第一层);136-第二布线层(第二层);144a-第一层间绝缘膜(绝缘层)。In the figure, 1-display device (organic EL display device, electro-optical device); 2-substrate; 2a-active area (display area); 99R, 99G, 99B-wiring for connection; 103, 103R, 103G, 103B-power supply 110a-hole injection/transport layer; 110b-light-emitting layer; 111-pixel electrode (electrode); 135-first wiring layer (first layer); 136-second wiring layer ( second layer); 144a—first interlayer insulating film (insulating layer).

具体实施方式 Detailed ways

下面,参照图1~图10说明本发明的电光装置和电子仪器的实施例。须指出的是,在以下所示的各图中,为了使各层和各构件在附图中为可识别程度的大小,使各层和各构件的比例尺不同。Next, embodiments of the electro-optic device and electronic equipment of the present invention will be described with reference to FIGS. 1 to 10 . In each of the drawings shown below, the scales of the layers and members are different in order to make the layers and members recognizable in the drawings.

图1是表示本发明的电光装置的布线构造的平面模式图。FIG. 1 is a schematic plan view showing the wiring structure of the electro-optical device of the present invention.

如图1所示,本实施例的显示装置(电光装置)1具有分别配置了多条扫描线101、在与扫描线101交叉的方向延伸的多条数据线102、与数据线102并列延伸的多条连接用布线99的结构,并且与由扫描线101和数据线102交叉而形成的各区划部分相对应地设置有象素区域A。As shown in FIG. 1 , the display device (electro-optic device) 1 of this embodiment has a plurality of scanning lines 101 arranged respectively, a plurality of data lines 102 extending in a direction intersecting with the scanning lines 101, and a plurality of data lines 102 extending in parallel with the data lines 102. A plurality of connecting wires 99 are formed, and pixel regions A are provided corresponding to divisions formed by intersections of scanning lines 101 and data lines 102 .

在数据线102上连接有,具有移位寄存器、电平移动器、视频线和模拟开关等的数据一侧驱动电路104。另外,在扫描线101上连接有具有移位寄存器和电平移动器的扫描一侧驱动电路105。在各象素区域A中设置有:通过扫描线101等向栅极供给扫描信号的开关用薄膜晶体管112;通过该开关用薄膜晶体管112,保持从数据线102共有的象素信号的保持电容cap;把由该保持电容cap保持的象素信号作为电压提供给栅极的驱动用薄膜晶体管123;当通过该驱动用薄膜晶体管123和连接用布线99(99R、99G、99B),与电源线(发光用电源布线)103电连接时,驱动电流从该电源线103流入的象素电极(电极)111;夹在该象素电极111和公共电极(阴极12)之间的功能层110。通过象素电极111、公共电极12和功能层110构成了发光元件。A data-side drive circuit 104 including a shift register, a level shifter, a video line, an analog switch, and the like is connected to the data line 102 . Also, a scanning-side driver circuit 105 including a shift register and a level shifter is connected to the scanning line 101 . In each pixel area A, there is provided: a thin film transistor 112 for switching that supplies a scanning signal to the gate through the scanning line 101 and the like; ; The pixel signal held by the storage capacitor cap is provided as a voltage to the driving thin film transistor 123 of the gate; When electrically connected to the power supply wiring for light emission) 103, the pixel electrode (electrode) 111 that the driving current flows from the power supply wiring 103; the functional layer 110 sandwiched between the pixel electrode 111 and the common electrode (cathode 12). A light emitting element is formed by the pixel electrode 111, the common electrode 12 and the functional layer 110.

根据有关结构,如果扫描线101被驱动,开关用薄膜晶体管112变为导通,则这时数据线102的电位保持在保持电容cap,在该保持电容cap中按照状态,决定驱动用薄膜晶体管123的导通状态。而且,通过驱动用薄膜晶体管123的沟道,电流从电源线103通过连接用布线99和薄膜晶体管123流向象素电极111,电流再通过功能层110流向公共电极12。功能层110按照流过它的电流量发光。According to the relevant structure, when the scanning line 101 is driven and the switching thin film transistor 112 is turned on, the potential of the data line 102 is held at the storage capacitor cap at this time, and the driving thin film transistor 123 is determined according to the state of the storage capacitor cap. conduction state. And, through the channel of the thin film transistor 123 for driving, the current flows from the power supply line 103 to the pixel electrode 111 through the connection wiring 99 and the thin film transistor 123 , and then flows to the common electrode 12 through the functional layer 110 . The functional layer 110 emits light according to the amount of current flowing through it.

在图2中表示本实施例的电光装置的平面模式图。FIG. 2 shows a schematic plan view of the electro-optical device of this embodiment.

衬底2是例如玻璃等透明衬底,划分为,位于衬底2的中央的显示区域(电极区域)2a和位于衬底2的周围并配置在有效区域2a的外侧的非有效区域2b。有效区域2a是由具有配置为矩阵状的发光元件的象素R、象素G、象素B形成的区域,是实际对显示有贡献的显示区域。象素R、象素G、象素B分别对应于红、绿、蓝的象素。The substrate 2 is a transparent substrate such as glass, and is divided into a display area (electrode area) 2a located in the center of the substrate 2 and an inactive area 2b located around the substrate 2 outside the active area 2a. The active area 2a is an area formed by pixels R, G, and B having light-emitting elements arranged in a matrix, and is a display area that actually contributes to display. Pixel R, pixel G, and pixel B correspond to red, green, and blue pixels, respectively.

与公共电极12连接的公共电极用布线12a,形成包围构成有效区域2a外周的4边中的3边的コ字。The common electrode wiring 12a connected to the common electrode 12 forms a U-shaped shape surrounding three of the four sides constituting the outer periphery of the active region 2a.

电源线103设置在有效区域2a和公共电极用布线12a之间。电源线103R、电源线103G以及电源线103B,分别通过图1所示的连接用布线99R、99G、99B,向象素R、象素G、象素B供给电源电压。The power supply line 103 is provided between the active region 2a and the common electrode wiring 12a. Power supply line 103R, power supply line 103G, and power supply line 103B supply power supply voltage to pixel R, pixel G, and pixel B through connection wiring lines 99R, 99G, and 99B shown in FIG. 1, respectively.

电源线103R、103G、103B中位于离开有效区域2a最远的位置的电源线103B,具有2重布线构造,并且为了进行上下导通而设置了接触孔103B3Among the power supply lines 103R, 103G, and 103B, the power supply line 103B located farthest from the active area 2a has a double-wiring structure, and a contact hole 103B 3 is provided for vertical conduction.

在电源线103中最靠近有效区域2a的电源线103R和有效区域2a之间设置有检查电路106。在制造过程和出厂时,为了进行对显示装置的质量、缺陷等的检查,使用该检查电路106。An inspection circuit 106 is provided between the power supply line 103R closest to the active area 2 a among the power supply lines 103 and the active area 2 a. The inspection circuit 106 is used to inspect the quality, defects, and the like of the display device during the manufacturing process and shipment.

在对于有效区域2a,检查电路106的相反一侧的衬底2的一边侧安装有具有驱动IC6的柔性衬底5。上述的公共电极用布线12a和电源线103都通过布线5a连接着驱动IC6。A flexible substrate 5 having a driver IC 6 is mounted on one side of the substrate 2 opposite to the inspection circuit 106 with respect to the active region 2 a. The above-mentioned wiring 12a for common electrodes and the power supply line 103 are both connected to the driver IC 6 via the wiring 5a.

从衬底2的安装有柔性衬底5的一边侧开始,在衬底2的与该边相对的方向上,在有效区域2a和电源线103R之间的区域、有效区域2a和电源线103G之间的区域上分别设置有扫描线驱动电路105。在扫描线驱动电路105和电源线103R之间的区域、扫描线驱动电路105和电源线103G之间的区域中,设置有用于向扫描线驱动电路105供给控制信号和电源电压的控制驱动电路用控制信号布线105a和驱动电路用电源布线105b。Starting from the side of the substrate 2 on which the flexible substrate 5 is mounted, in the direction opposite to the side of the substrate 2, between the active region 2a and the power supply line 103R, between the active region 2a and the power supply line 103G Scanning line driving circuits 105 are respectively provided in the areas between them. In the area between the scanning line driving circuit 105 and the power supply line 103R, and in the area between the scanning line driving circuit 105 and the power supply line 103G, a control driving circuit for supplying a control signal and a power supply voltage to the scanning line driving circuit 105 is provided. Control signal wiring 105a and drive circuit power supply wiring 105b.

图3是图2中的A-A’截面模式图。如图3所示,在对应于有效区域2a而设置的由发光元件和隔壁(bank)部构成的发光元件部11和衬底2之间,设置了有源元件层14,在该源元件层14中设置有所述的扫描线、数据线、保持电容、开关用薄膜晶体管112和驱动用薄膜晶体管123等。Fig. 3 is a schematic cross-sectional view taken along line A-A' in Fig. 2 . As shown in FIG. 3 , an active element layer 14 is provided between a light-emitting element portion 11 composed of a light-emitting element and a bank portion provided corresponding to the active region 2a, and the substrate 2. 14 is provided with the aforementioned scanning lines, data lines, storage capacitors, switching thin film transistors 112, driving thin film transistors 123, and the like.

另外,与有源元件层14的非有效区域2b对应,配置有所述电源线103(103R、103G、103B)。把非有效区域2b的一部分作为虚设区域2d使用。虚设区域2d主要是在使用喷墨工艺形成发光元件110之前,用于使形成发光元件的材料的喷出量稳定化的区域,可以说是用于试喷的区域。In addition, the power supply line 103 ( 103R, 103G, 103B) is arranged corresponding to the non-active region 2 b of the active element layer 14 . A part of the non-effective area 2b is used as a dummy area 2d. The dummy region 2d is mainly a region for stabilizing the ejection amount of the material forming the light emitting element before forming the light emitting element 110 by the inkjet process, and it can be said to be a region for trial spraying.

在虚设区域2d的下方的有源元件层14内设置了,所述扫描一侧驱动电路105、驱动电路用控制信号布线105a和驱动电路用电源布线105b。在图3中虽然未图示,但是可以在检查电路106的上方设置虚设区域2d。In the active element layer 14 below the dummy region 2d, the scanning-side driver circuit 105, the control signal wiring 105a for the driver circuit, and the power supply wiring 105b for the driver circuit are provided. Although not shown in FIG. 3 , a dummy region 2 d may be provided above the inspection circuit 106 .

使用设置在第一布线层135中的导电膜形成了电源线103R。同样,使用设置在第一布线层135中的导电膜形成了电源线103G。而如上所述,电源线103B具有2重布线构造。具体而言,由设置在第一布线层135中的导电膜和设置在第二布线层136中的导电膜构成。在所述两个导电膜之间,设置有第一层间绝缘膜144a,并且通过设置在第一层间绝缘膜144a上的接触孔(与图2所示的接触孔103B3对应),电连接了所述两个导电膜。The power supply line 103R is formed using a conductive film provided in the first wiring layer 135 . Also, the power supply line 103G is formed using a conductive film provided in the first wiring layer 135 . On the other hand, as described above, the power supply line 103B has a double wiring structure. Specifically, it is composed of a conductive film provided in the first wiring layer 135 and a conductive film provided in the second wiring layer 136 . Between the two conductive films, a first interlayer insulating film 144a is provided, and through a contact hole (corresponding to the contact hole 103B3 shown in FIG. 2 ) provided on the first interlayer insulating film 144a, the electrical The two conductive films are connected.

具体而言,公共电极用布线12a是由设置在第一布线层135中的导电膜和设置在第二布线层136中的导电膜构成。Specifically, the common electrode wiring 12 a is composed of a conductive film provided in the first wiring layer 135 and a conductive film provided in the second wiring layer 136 .

通过密封部3覆盖了发光元件部11上方。该密封部3是由设置在有源元件层14上的密封树脂603和密封衬底604构成。密封树脂603是由热固化树脂或紫外线固化树脂等构成,特别希望是由作为热固化树脂的一种的环氧树脂构成。该密封树脂603是沿着衬底的外周而配置的,它例如由微分配器等形成。该密封树脂603接合有源元件层14和密封衬底604,所以防止水或氧从有源元件层14和密封衬底604之间向由发光元件部11形成的空间侵入,防止在公共电极12或发光元件部11内形成的省略图示的发光层的劣化。The upper part of the light emitting element part 11 is covered by the sealing part 3 . The sealing portion 3 is composed of a sealing resin 603 and a sealing substrate 604 provided on the active element layer 14 . The sealing resin 603 is composed of a thermosetting resin, an ultraviolet curable resin, or the like, and is particularly preferably composed of an epoxy resin that is one type of thermosetting resin. The sealing resin 603 is arranged along the outer periphery of the substrate, and is formed of, for example, a micro-dispenser or the like. The sealing resin 603 joins the active element layer 14 and the sealing substrate 604, so that water or oxygen is prevented from entering the space formed by the light emitting element portion 11 from between the active element layer 14 and the sealing substrate 604, and the common electrode 12 is prevented from Or deterioration of the light-emitting layer (not shown) formed in the light-emitting element portion 11 .

密封衬底604由例如玻璃、塑料、金属等构成,在其内侧设置有容纳发光元件部11的凹部604a。另外,在凹部604a中配置有吸收氧等的吸气剂605,能吸收侵入到由密封衬底604和发光元件部11形成的空间中的水或氧。须指出的是,也可以省略吸气剂605。The sealing substrate 604 is made of, for example, glass, plastic, metal, or the like, and has a concave portion 604 a for accommodating the light emitting element portion 11 inside. In addition, a getter 605 for absorbing oxygen or the like is disposed in the concave portion 604 a, and can absorb water or oxygen entering the space formed by the sealing substrate 604 and the light emitting element portion 11 . It should be noted that the getter 605 can also be omitted.

形成公共电极12的铝使从发光层110b发出的光反射到衬底2一侧,除了Al膜,最好由Ag膜、Al和Ag的层叠膜等构成。另外,它的厚度最好例如是100~1000nm的范围,特别理想的是200nm左右。Aluminum forming the common electrode 12 reflects light emitted from the light-emitting layer 110b to the substrate 2 side, and is preferably composed of an Ag film, a laminated film of Al and Ag, or the like in addition to the Al film. In addition, its thickness is preferably in the range of, for example, 100 to 1000 nm, and particularly preferably about 200 nm.

在铝上,还可以设置由SiO、SiO2、SiN等构成的用于保护公共电极12的保护层15。On the aluminum, a protective layer 15 made of SiO, SiO 2 , SiN, etc. for protecting the common electrode 12 may also be provided.

保护层15覆盖公共电极12,并且保护公共电极用布线12a和公共电极12的连接部。另外,保护层15延伸到密封树脂603的下方,存在于密封树脂603和有源元件层14之间。The protective layer 15 covers the common electrode 12 and protects the connecting portion between the common electrode wiring 12 a and the common electrode 12 . In addition, the protective layer 15 extends below the sealing resin 603 and exists between the sealing resin 603 and the active element layer 14 .

图4表示放大了显示装置的显示区域的截面构造的图。在该图4中,图示了3个象素区域A。该显示装置1的结构为,在衬底2上依次层叠了形成有TFT等电路的有源元件层14和形成有功能层110的发光元件部11。FIG. 4 shows an enlarged view of a cross-sectional structure of a display region of a display device. In this FIG. 4 , three pixel regions A are illustrated. The display device 1 has a structure in which an active element layer 14 in which circuits such as TFTs are formed and a light emitting element portion 11 in which a functional layer 110 is formed are laminated in this order on a substrate 2 .

在该显示装置1中,从功能层110向衬底2一侧发出的光,透过有源元件层14和衬底2,射出到衬底2的下方(观察者一侧),并且从功能层110向衬底2的相反一侧发出的光由公共电极12反射,透过有源元件层14和衬底2,出射到衬底2的下方(观察者一侧)。须指出的是,通过使用透明材料作为公共电极12,能使从公共电极一侧发出的光射出。作为透明材料,例如能使用ITO、Pt、Ir、Ni或Pd。作为膜厚,理想的是75nm左右的膜厚,更理想的是比该膜厚还薄。In this display device 1, the light emitted from the functional layer 110 to the substrate 2 side passes through the active element layer 14 and the substrate 2, and is emitted to the lower side of the substrate 2 (on the observer's side). The light emitted from the layer 110 to the opposite side of the substrate 2 is reflected by the common electrode 12 , passes through the active element layer 14 and the substrate 2 , and exits to the bottom of the substrate 2 (observer side). It should be noted that by using a transparent material as the common electrode 12, light emitted from the common electrode side can be emitted. As a transparent material, for example, ITO, Pt, Ir, Ni or Pd can be used. The film thickness is preferably about 75 nm, and more preferably thinner than the film thickness.

在有源元件层14中,在衬底2上形成了由氧化硅薄膜等构成的底层保护膜2c,在该底层保护膜2c上形成了由多晶硅构成的岛状的半导体膜141。须指出的是,通过注入高浓度B离子,在半导体膜141上形成有漏区域141a和源区域141b。须指出的是,未导入B的部分变为沟道区域141c。In the active element layer 14, an underlying protective film 2c made of a silicon oxide thin film or the like is formed on the substrate 2, and an island-shaped semiconductor film 141 made of polysilicon is formed on the underlying protective film 2c. It should be noted that the drain region 141 a and the source region 141 b are formed on the semiconductor film 141 by implanting high-concentration B ions. It should be noted that the portion where B is not introduced becomes the channel region 141c.

在有源元件层14中,形成了覆盖底层保护膜2c和半导体膜141的透明的栅绝缘膜142,在栅绝缘膜142上形成有由Al、Mo、Ta、Ti、W等构成的栅极143(扫描线101),在栅极143和栅绝缘膜142形成有透明的第一层间绝缘膜144a和第二层间绝缘膜144b。栅极143设置在半导体膜141的与沟道区域141c对应的位置。In the active element layer 14, a transparent gate insulating film 142 covering the underlying protective film 2c and the semiconductor film 141 is formed, and a gate electrode composed of Al, Mo, Ta, Ti, W, etc. is formed on the gate insulating film 142. 143 (scanning line 101 ), a transparent first interlayer insulating film 144 a and a second interlayer insulating film 144 b are formed on the gate electrode 143 and the gate insulating film 142 . The gate electrode 143 is provided at a position corresponding to the channel region 141c of the semiconductor film 141 .

另外,贯通第一、第二层间绝缘膜144a、144b,形成有分别连接着半导体膜141的漏、源区域141a、141b的接触孔145、146。而且,在第二层间绝缘膜144b上,由ITO等构成的透明的象素电极111构图形成给定的形状,漏区域141a通过接触孔145,与象素电极111连接。另外,源区域141b,通过接触孔146与连接用布线99连接。这样,在有源元件层14中,形成了连接各象素电极111的驱动用薄膜晶体管123。须指出的是,在有源元件层14,形成有所述的保持电容cap和开关用薄膜晶体管112,但是在图4中省略了它们的图示。In addition, contact holes 145 and 146 are formed through the first and second interlayer insulating films 144a and 144b to connect the drain and source regions 141a and 141b of the semiconductor film 141, respectively. Furthermore, on the second interlayer insulating film 144b, a transparent pixel electrode 111 made of ITO or the like is patterned into a predetermined shape, and the drain region 141a is connected to the pixel electrode 111 through a contact hole 145 . In addition, the source region 141b is connected to the connection wiring 99 through the contact hole 146 . Thus, in the active element layer 14, the driving thin film transistor 123 connected to each pixel electrode 111 is formed. It should be noted that the aforementioned storage capacitor cap and the switching thin film transistor 112 are formed in the active element layer 14 , but their illustration is omitted in FIG. 4 .

接着,如图4所示,发光元件部11以分别层叠在多个象素电极111上的功能层110、划分各功能层110的隔壁部112、形成在功能层110上的公共电极12为主体构成。由这些象素电极111、功能层110和公共电极12构成了发光元件。这里,象素电极111例如由ITO形成,构图形成为从俯视图看近矩形。该象素电极111的厚度,理想的是50~200nm的范围,特别理想的是150nm左右。隔壁部112由位于衬底2一侧的无机物隔壁层112a和远离衬底2的有机物隔壁层112b层叠构成。Next, as shown in FIG. 4 , the light-emitting element portion 11 is mainly composed of a functional layer 110 stacked on a plurality of pixel electrodes 111, a partition wall portion 112 dividing each functional layer 110, and a common electrode 12 formed on the functional layer 110. constitute. These pixel electrodes 111, functional layer 110, and common electrode 12 constitute a light emitting element. Here, the pixel electrode 111 is formed of, for example, ITO, and its pattern is substantially rectangular in plan view. The thickness of the pixel electrode 111 is preferably in the range of 50 to 200 nm, particularly preferably about 150 nm. The barrier rib portion 112 is formed by laminating an inorganic barrier rib layer 112 a on the substrate 2 side and an organic barrier rib layer 112 b away from the substrate 2 .

形成了无机物隔壁层112a、有机物隔壁层112b,使其位于象素电极111的周边部上。在平面上,成为象素电极111的周围与无机物隔壁层112a配置为平面重叠的构造。另外,有机物隔壁层112b也同样,配置为与象素电极111的一部分在平面上重叠。另外,无机物隔壁层112a形成在比有机物隔壁层112b更靠象素电极111的中央一侧。这样,通过在象素电极111的内侧形成无机物隔壁层112a的各第一层叠部112e,设置有与象素电极111的形成位置对应的下部开口部112c。The inorganic barrier rib layer 112a and the organic barrier rib layer 112b are formed so as to be located on the peripheral portion of the pixel electrode 111 . Planarly, the periphery of the pixel electrode 111 and the inorganic barrier rib layer 112a are arranged so as to overlap in a plane. In addition, the organic partition wall layer 112b is similarly arranged so as to overlap a part of the pixel electrode 111 in plan. In addition, the inorganic barrier rib layer 112a is formed closer to the center side of the pixel electrode 111 than the organic barrier rib layer 112b. In this way, by forming each first lamination portion 112e of the inorganic barrier rib layer 112a inside the pixel electrode 111, the lower opening 112c corresponding to the formation position of the pixel electrode 111 is provided.

另外,在有机物隔壁层112b中形成有上部开口部112d。In addition, an upper opening 112d is formed in the organic barrier rib layer 112b.

该上部开口部112d设置为,与象素电极111的形成位置以及下部开口部112c对应。如图4所示,上部开口部112d形成为比下部开口部112c更宽,比象素电极111更窄。另外,有时形成为上部开口部112d的上部位置与象素电极111的端部几乎变为相同位置。这时,如图4所示,有机物隔壁层112b的上部开口部112d的截面变为倾斜形状。The upper opening 112d is provided so as to correspond to the formation position of the pixel electrode 111 and the lower opening 112c. As shown in FIG. 4 , the upper opening 112 d is formed wider than the lower opening 112 c and narrower than the pixel electrode 111 . In addition, the upper position of the upper opening 112 d may be formed at substantially the same position as the end of the pixel electrode 111 . At this time, as shown in FIG. 4 , the cross section of the upper opening 112 d of the organic barrier rib layer 112 b becomes inclined.

另外,无机物隔壁层112a最好由SiO2、TiO2等无机材料形成。该无机物隔壁层112a的膜厚,理想的是50~200nm,特别理想的是150nm。In addition, the inorganic barrier rib layer 112a is preferably formed of an inorganic material such as SiO 2 or TiO 2 . The film thickness of the inorganic barrier rib layer 112a is preferably 50 to 200 nm, particularly preferably 150 nm.

有机物隔壁层112b由丙烯酸树脂、聚酰亚胺树脂等具有耐热性、耐溶剂性的材料形成。该有机物隔壁层112b的厚度,理想的是在0.1~3.5μm的范围。如果有机物隔壁层112b的厚度为2μm以上,则能使数据线102或扫描线101等供给信号的信号布线与公共电极12充分地分离,所以能减小在信号布线和公共电极12之间产生的寄生电容,从而能减轻信号的延迟、钝化等问题。The organic barrier rib layer 112b is formed of a material having heat resistance and solvent resistance, such as acrylic resin and polyimide resin. The thickness of the organic barrier layer 112b is desirably in the range of 0.1 to 3.5 μm. If the thickness of the organic barrier rib layer 112b is more than 2 μm, the signal wiring for supplying signals, such as the data line 102 or the scanning line 101, can be sufficiently separated from the common electrode 12, so the friction generated between the signal wiring and the common electrode 12 can be reduced. Parasitic capacitance, which can alleviate problems such as signal delay and passivation.

另外,在隔壁部112中形成有表现亲液性的区域和表现疏液性的区域。表现亲液性的区域是无机物隔壁层112a的第一层叠部112e和象素电极111的电极面111a,这些区域通过把氧作为处理气体的等离子体处理,表面被处理成为亲液性。表现疏液性的区域是上部开口部112d的壁面和有机物隔壁层112的上表面112f,这些区域通过以四氟化甲烷为前体的等离子体处理,表面被氟化处理(处理为疏液性)。须指出的是,有机物隔壁层可以由包含氟聚合物的材料形成。In addition, a lyophilic region and a lyophobic region are formed in the partition wall portion 112 . The regions exhibiting lyophilicity are the first laminated portion 112e of the inorganic barrier rib layer 112a and the electrode surface 111a of the pixel electrode 111, and the surfaces of these regions are treated to be lyophilic by plasma treatment using oxygen as a processing gas. The region exhibiting lyophobicity is the wall surface of the upper opening 112d and the upper surface 112f of the organic partition wall layer 112, and these regions are subjected to fluorination treatment (treated to be lyophobic) by plasma treatment using tetrafluoromethane as a precursor. ). It should be noted that the organic barrier layer may be formed of a material containing fluoropolymer.

功能层110是由层叠在象素电极111上的空穴注入/输送层110a和在空穴注入/输送层110a上相邻形成的由有机场致发光材料构成的发光层110b构成。须指出的是,还可以与发光层110b相邻形成具有电子注入输送层等功能的其他功能层。The functional layer 110 is composed of a hole injection/transport layer 110a stacked on the pixel electrode 111 and a light emitting layer 110b made of an organic electroluminescent material formed adjacent to the hole injection/transport layer 110a. It should be noted that other functional layers having functions such as an electron injection and transport layer may also be formed adjacent to the light emitting layer 110b.

空穴注入/输送层110a具有把空穴注入发光层110b中的功能,并且具有在空穴注入/输送层110a内部输送空穴的功能。通过在象素电极111和发光层110b之间设置这样的空穴注入/输送层110a,发光层110b的发光效率、寿命等元件特性提高。另外,在发光层110b中,从空穴注入/输送层110a注入的空穴和从公共电极12注入的电子在发光层中再结合,实现发光。The hole injection/transport layer 110a has a function of injecting holes into the light emitting layer 110b, and has a function of transporting holes inside the hole injection/transport layer 110a. By providing such a hole injection/transport layer 110a between the pixel electrode 111 and the light-emitting layer 110b, device characteristics such as luminous efficiency and lifetime of the light-emitting layer 110b are improved. In addition, in the light emitting layer 110b, holes injected from the hole injection/transport layer 110a and electrons injected from the common electrode 12 are recombined in the light emitting layer to realize light emission.

空穴注入/输送层110a由位于下部开口部112c内并且形成在象素电极面111a上的平坦部110a1、位于上部开口部112d内并且形成在无机物隔壁层112的第一层叠部112e上的周边部110a2构成。另外,空穴注入/输送层110a根据构造,只形成在象素电极111上,且在无机物隔壁层110a之间(下部开口部110c)(也有只形成在所述的平坦部上的形态)。该平坦部110a1的厚度一定,例如在50~70nm的范围中形成。The hole injection/transport layer 110a consists of a flat portion 110a1 located in the lower opening 112c and formed on the pixel electrode surface 111a, and a flat portion 112e formed in the upper opening 112d and formed on the inorganic barrier rib layer 112. Peripheral portion 110a2 constitutes. In addition, depending on the structure, the hole injection/transport layer 110a is formed only on the pixel electrode 111, and between the inorganic barrier rib layers 110a (the lower opening 110c) (there is also a form in which it is formed only on the above-mentioned flat portion). . The flat portion 110a1 has a constant thickness, for example, formed in a range of 50 to 70 nm.

在形成有周边部110a2时,周边部110a2位于第一层叠部112e上,与上部开口部112d的壁面即有机物隔壁层112b紧贴。另外,周边部110a2的厚度在靠近电极面111a一侧薄,沿着离开电极面111a的方向增大,在上部开口部112d的壁面附近变为最厚。When the peripheral portion 110a2 is formed, the peripheral portion 110a2 is located on the first laminated portion 112e and is in close contact with the organic barrier layer 112b which is the wall surface of the upper opening 112d. In addition, the thickness of the peripheral portion 110a2 is thinner near the electrode surface 111a, increases in the direction away from the electrode surface 111a, and becomes thickest near the wall surface of the upper opening 112d.

作为周边部110a2表现所述形状的理由,是因为空穴注入/输送层110a是向开口部112内喷出包含空穴注入/输送层的形成材料和极性溶剂的第一组成物后,除去极性溶剂而形成的,并且极性溶剂的挥发主要发生在无机物隔壁层的第一层叠部112e上,空穴注入/输送层的形成材料在该第一层叠部112e上集中地浓缩、析出。The reason why the peripheral portion 110a2 exhibits the above-mentioned shape is because the hole injection/transport layer 110a is removed after ejecting the first composition including the material for forming the hole injection/transport layer and a polar solvent into the opening 112. formed by a polar solvent, and the volatilization of the polar solvent mainly occurs on the first laminated part 112e of the inorganic barrier layer, and the forming material of the hole injection/transport layer is intensively concentrated and precipitated on the first laminated part 112e. .

另外,跨空穴注入/输送层110a的平坦部110a1和周边部110a2上形成了发光层110b,在平坦部110a1上的厚度为50~80nm的范围。发光层110b具有发红光(R)的红色发光层110b1、发绿光(G)的绿色发光层110b2、发蓝光(B)的蓝发光层110b3等三种,各发光层110b1~110b3为条纹配置。须指出的是,作为空穴注入/输送层的形成材料,例如能使用聚乙烯二氧噻吩等聚噻吩衍生物和聚苯乙烯磺酸等的混合物。另外,作为发光层110b的材料,能使用聚芴衍生物、聚苯撑衍生物、聚乙烯咔唑、聚噻吩衍生物或在这些它们的高分子材料中可以掺杂二萘嵌苯类色素、香豆素类色素、若丹明类色素,例如红荧烯、二萘嵌苯、9、10-联苯蒽、四苯基丁二烯、尼罗红、香豆素6、喹吖酮等而使用。In addition, the light emitting layer 110b is formed across the flat portion 110a1 and the peripheral portion 110a2 of the hole injection/transport layer 110a, and the thickness on the flat portion 110a1 is in the range of 50 to 80 nm. The light emitting layer 110b has three types: a red light emitting layer 110b1 that emits red light (R), a green light emitting layer 110b2 that emits green light (G), and a blue light emitting layer 110b3 that emits blue light (B). The light emitting layers 110b1 to 110b3 are stripes. configuration. It should be noted that, as a material for forming the hole injection/transport layer, for example, a mixture of polythiophene derivatives such as polyethylenedioxythiophene and polystyrenesulfonic acid can be used. In addition, as the material of the light-emitting layer 110b, polyfluorene derivatives, polyphenylene derivatives, polyvinylcarbazole, polythiophene derivatives can be used, or these polymer materials can be doped with perylene dyes, Coumarin pigments, rhodamine pigments, such as rubrene, perylene, 9, 10-biphenylanthracene, tetraphenylbutadiene, Nile red, coumarin 6, quinacridone, etc. And use.

公共电极12形成在发光元件部11的整个面上,与象素电极111成对,完成使电流流过功能层110的任务。当该公共电极12是阴极时,例如可以是钙层或铝层等金属层层叠而成。这时,最好对靠近发光层的一侧的阴极设置功函数低的,特别是在本形态中,直接挨着发光层110b,完成把电子注入发光层110b中的任务。另外,氟化锂根据发光层的材料,能高效地发光,所以有时在发光层110和公共电极12之间形成LiF。The common electrode 12 is formed on the entire surface of the light-emitting element portion 11 , is paired with the pixel electrode 111 , and fulfills the role of allowing current to flow through the functional layer 110 . When the common electrode 12 is a cathode, for example, it may be formed by stacking metal layers such as calcium layers or aluminum layers. At this time, it is better to provide a cathode with a low work function on the side close to the light-emitting layer, especially in this embodiment, directly adjacent to the light-emitting layer 110b to complete the task of injecting electrons into the light-emitting layer 110b. In addition, since lithium fluoride can emit light efficiently depending on the material of the light emitting layer, LiF may be formed between the light emitting layer 110 and the common electrode 12 .

须指出的是,对于红色和绿色的发光层110b1、110b2并不局限于氟化锂,也可以使用其它材料。因此,这时,只对蓝色(B)发光层110b3形成由氟化锂构成的层,对其它的红色和绿色的发光层110b1、110b2可以层叠氟化锂以外的材料。另外,在红色和绿色的发光层110b1、110b2上不形成氟化锂,可以只形成钙。须指出的是,氟化锂的厚度例如理想的是2~5nm的范围,特别理想的是2nm左右。另外,钙的厚度例如理想的是2~50nm的范围,特别理想的是20nm左右。It should be noted that the red and green light emitting layers 110b1, 110b2 are not limited to lithium fluoride, other materials can also be used. Therefore, at this time, a layer made of lithium fluoride is formed only for the blue (B) light emitting layer 110b3, and materials other than lithium fluoride may be laminated for the other red and green light emitting layers 110b1 and 110b2. In addition, lithium fluoride is not formed on the red and green light-emitting layers 110b1 and 110b2, and only calcium may be formed. It should be noted that the thickness of lithium fluoride is, for example, preferably in the range of 2 to 5 nm, particularly preferably about 2 nm. In addition, the thickness of calcium is, for example, preferably in the range of 2 to 50 nm, particularly preferably about 20 nm.

图5是有效区域2a的上方区域中的电源线103R、103G、103B和与各电源线连接的连接用布线99R、99G、99B的放大图。利用形成在第一布线层135和第二布线层136中的导电膜构成了连接用布线99R、99G、99B,在本实施例中,与位于最靠近有效区域2a的位置的电源线103R连接的连接用布线99R是,由设置在第一布线层135上的导电膜构成,与位于最远离有效区域2a的位置的电源线103B连接的连接用布线99B是,利用设置在第二布线层136上的导电膜形成。与夹在电源线103R和电源线103B之间的电源线103G连接的连接用布线99G用贯穿第一层间绝缘膜114a的接点100G连接了电源线103G。在该接点100G,确保了设置在第一布线层135中的导电膜和设置在第二布线层136中的导电膜的导通。FIG. 5 is an enlarged view of power supply lines 103R, 103G, and 103B and connection wirings 99R, 99G, and 99B connected to the respective power supply lines in the upper region of the active area 2 a. The connection wirings 99R, 99G, and 99B are formed by conductive films formed in the first wiring layer 135 and the second wiring layer 136. The connection wiring 99R is made of a conductive film provided on the first wiring layer 135 , and the connection wiring 99B connected to the power supply line 103B located farthest from the active region 2 a is made of a conductive film provided on the second wiring layer 136 . conductive film formation. The connection wiring 99G connected to the power supply line 103G sandwiched between the power supply line 103R and the power supply line 103B is connected to the power supply line 103G at a contact 100G penetrating through the first interlayer insulating film 114 a. At this contact 100G, conduction between the conductive film provided in the first wiring layer 135 and the conductive film provided in the second wiring layer 136 is ensured.

在本实施例中,利用第一布线层135和第二布线层136形成了连接用布线99R、99G、99B,所以能尽可能不设置100G那样的接点部。这样,通过减少接点部,能减少断线等问题。In this embodiment, since the connection wirings 99R, 99G, and 99B are formed by the first wiring layer 135 and the second wiring layer 136 , it is possible to eliminate as much as possible a contact portion such as 100G. In this way, by reducing the number of contact points, problems such as disconnection can be reduced.

连接用布线99R、99G、99B向着有效区域2a近平行地延伸,连接用布线99R、99G、99B的各自的至少一部分的宽度不同。这是因为为了稳定地供给电源电压,在确保连接用布线99R、99G、99B、电源线103R、103G、103B的充分线宽的同时,与有效区域2a的象素间隔相适应,使连接用布线99R、99G、99B的各线宽变窄。The connection wirings 99R, 99G, and 99B extend substantially parallel to the active region 2 a, and at least some of the connection wirings 99R, 99G, and 99B have different widths. This is because in order to stably supply the power supply voltage, while ensuring a sufficient line width of the connection wiring 99R, 99G, 99B, and the power supply line 103R, 103G, 103B, the connection wiring is adapted to the pixel interval of the effective area 2a. The respective line widths of 99R, 99G, and 99B are narrowed.

须指出的是,如图3所示,理想的是,在有效区域2a内,连接用布线99R、99G、99B基本上都利用位于同一布线层中的导电膜形成,在本实施例中,利用设置在第二布线层136中的导电膜形成。而连接用布线99R在与电源线103R的接点部附近,如图5所示,是利用第一布线层135被形成,所以连接用布线99R在从所述的接点部到有效区域2a之间的区域中,有必要进行从设置在第一布线层135上的导电膜到设置在第二布线层136上的导电膜的连接。It should be noted that, as shown in FIG. 3, it is desirable that in the effective region 2a, the connection wirings 99R, 99G, and 99B are basically formed using a conductive film located in the same wiring layer. In this embodiment, using A conductive film provided in the second wiring layer 136 is formed. On the other hand, the connection wiring 99R is formed by the first wiring layer 135 near the contact portion with the power supply line 103R as shown in FIG. In the region, it is necessary to perform connection from the conductive film provided on the first wiring layer 135 to the conductive film provided on the second wiring layer 136 .

下面,参照附图,说明本实施例的显示装置的制造方法。Next, a method of manufacturing the display device of this embodiment will be described with reference to the drawings.

首先,参照图6~图8,说明在衬底2上形成有源元件层14的方法。须指出的是,图6~图8所示的各剖视图对应于沿着图2中的A-A’线的截面。须指出的是,在以下的说明中,杂质浓度都是表示为活性化退火后的杂质。First, a method for forming the active element layer 14 on the substrate 2 will be described with reference to FIGS. 6 to 8 . It should be noted that each cross-sectional view shown in FIGS. 6 to 8 corresponds to a cross-section along line A-A' in FIG. 2 . It should be noted that in the following description, the impurity concentration is expressed as the impurity after the activation annealing.

首先,如图6(a)所示,在衬底2上形成由氧化硅薄膜等构成的底层保护膜2c。接着,使用ICVD法、等离子体CVD法等形成非晶体硅层后,通过激光退火法或急速加热法使结晶粒成长,作为多晶硅层501。First, as shown in FIG. 6(a), an underlying protective film 2c made of a silicon oxide film or the like is formed on a substrate 2. As shown in FIG. Next, after forming an amorphous silicon layer using ICVD, plasma CVD, or the like, crystal grains are grown by laser annealing or rapid heating to form polycrystalline silicon layer 501 .

接着,如图6(b)所示,通过光刻法对多晶硅层501构图,形成岛状的硅层241、251和261,再形成由氧化硅薄膜构成的栅绝缘膜142。Next, as shown in FIG. 6(b), the polysilicon layer 501 is patterned by photolithography to form island-shaped silicon layers 241, 251, and 261, and then a gate insulating film 142 made of silicon oxide film is formed.

硅层241形成在与有效区域2a对应的位置,构成连接了象素电极111的薄膜晶体管123(以下,有时称作“象素用TFT”),硅层251、261分别构成扫描线驱动电路105内的P沟道型和N沟道型的薄膜晶体管(以下,有时称作“驱动电路用TFT”)。The silicon layer 241 is formed at a position corresponding to the active region 2a, and constitutes the thin film transistor 123 (hereinafter, sometimes referred to as "pixel TFT") connected to the pixel electrode 111, and the silicon layers 251 and 261 constitute the scanning line driving circuit 105, respectively. P-channel type and N-channel type thin film transistors (hereinafter sometimes referred to as "driver circuit TFT").

通过等离子体CVD法、热氧化法等,形成覆盖各硅层241、251、261和底层保护膜2c的厚度约30nm~200nm的氧化硅薄膜,从而形成栅绝缘层142。这里,当利用热氧化法形成栅绝缘层142时,也进行硅层241、251、261的结晶化,能使这些硅层成为多晶硅层。在进行沟道掺杂时,例如在这时,以约1×1012cm-2的剂量注入硼离子。其结果,硅层241、251、261成为杂质浓度约1×1017cm-3的低浓度P型的硅层。The gate insulating layer 142 is formed by forming a silicon oxide thin film with a thickness of about 30 nm to 200 nm covering each of the silicon layers 241 , 251 , 261 and the underlying protective film 2 c by plasma CVD, thermal oxidation, or the like. Here, when the gate insulating layer 142 is formed by the thermal oxidation method, the crystallization of the silicon layers 241, 251, and 261 also proceeds, and these silicon layers can be made into polysilicon layers. When channel doping is performed, for example at this time, boron ions are implanted at a dose of about 1×10 12 cm −2 . As a result, the silicon layers 241, 251, and 261 are low-concentration P-type silicon layers having an impurity concentration of approximately 1×10 17 cm −3 .

接着,如图6(c)所示,在硅层241、261的一部分上形成离子注入选择掩模M1,并在该状态下,以约1×1015cm-2的剂量,离子注入磷离子。其结果,对于离子注入选择掩模M1,自动调整(self align)地导入了高浓度杂质,在硅层241、261中形成了高浓度源区域241S和261S以及高浓度漏区域241D和261D。Next, as shown in FIG. 6(c), an ion implantation selection mask M1 is formed on a part of the silicon layers 241, 261, and in this state, phosphorus ions are ion-implanted at a dose of about 1×1015 cm −2 . As a result, high-concentration impurities are self-aligned into ion implantation selective mask M1, and high-concentration source regions 241S and 261S and high-concentration drain regions 241D and 261D are formed in silicon layers 241 and 261 .

接着,如图6(d)所示,在除去离子注入选择掩模M1后,在栅绝缘膜142上,作为第一布线层135形成掺杂硅、硅化物膜、或铝膜和铬膜、钽膜等厚度约500nm左右的金属膜,再通过对该金属膜构图,形成P沟道型的驱动电路用TFT的栅极252、象素用TFT的栅极242、N沟道型的驱动电路用TFT的栅极262。另外,通过所述构图,同时形成扫描线驱动电路用控制信号布线105a、电源线103R、103G、103B、连接用布线99R、公共电极用布线12a的一部分。Next, as shown in FIG. 6(d), after the ion implantation selection mask M1 is removed, doped silicon, a silicide film, or an aluminum film and a chromium film are formed on the gate insulating film 142 as the first wiring layer 135. A metal film with a thickness of about 500nm such as a tantalum film is patterned to form the gate 252 of the P-channel drive circuit TFT, the gate 242 of the pixel TFT, and the N-channel drive circuit. The gate 262 of the TFT is used. In addition, through the patterning described above, the control signal wiring 105a for scanning line driving circuit, the power supply lines 103R, 103G, and 103B, the wiring for connection 99R, and a part of the wiring for common electrodes 12a are simultaneously formed.

把栅极242、252、262作为掩模,以约4×1013cm-2的掺杂量对硅层241、251、261进行离子注入。其结果,对栅极242、252、262自动调整地导入了低浓度杂质,如图6(d)所示,在硅层241和261中形成低浓度源区域241b和261b以及低浓度漏区域241c和261c。另外,在硅层251中形成了低浓度杂质区域251S和251D。Using the gate electrodes 242, 252, 262 as masks, the silicon layers 241, 251, 261 are implanted with ions at a doping amount of about 4×1013 cm −2 . As a result, low-concentration impurities are automatically adjusted and introduced into the gates 242, 252, and 262, and low-concentration source regions 241b and 261b and low-concentration drain regions 241c are formed in silicon layers 241 and 261 and 261c. In addition, low-concentration impurity regions 251S and 251D are formed in the silicon layer 251 .

接着如图7(a)所示,在除了栅极252周边的整个面上形成离子注入选择掩模M2。使用该离子注入选择掩模M2,以1.5×1015cm-2的掺杂量对硅层251进行离子注入。作为结果,栅极252也作为掩模起作用,在硅层252中自动调整地掺杂了高浓度杂质。由此,251S和251D被反掺杂(counter dope),成为P沟道型的驱动电录用TFT的源区域和漏区域。Next, as shown in FIG. 7( a ), an ion implantation selective mask M2 is formed on the entire surface except the periphery of the gate electrode 252 . Using this ion implantation selective mask M2, the silicon layer 251 is implanted with ions at a doping amount of 1.5×10 15 cm −2 . As a result, the gate electrode 252 also functions as a mask, and the silicon layer 252 is automatically doped with a high concentration of impurities. As a result, 251S and 251D are counter-doped, and become the source region and the drain region of the P-channel type driving electrologging TFT.

接着,如图7(b)所示,在除去了离子注入选择掩模M2后,在衬底2的整个面上形成第一层间绝缘膜144a,再通过光刻法对第一层间绝缘膜144a构图,在与各TFT的源极和漏极以及公共电极用布线12a对应的位置上设置用于形成接触孔的孔H1。Next, as shown in FIG. 7(b), after removing the ion implantation selective mask M2, a first interlayer insulating film 144a is formed on the entire surface of the substrate 2, and then the first interlayer insulating film 144a is formed by photolithography. The film 144a is patterned, and holes H1 for forming contact holes are provided at positions corresponding to the source and drain electrodes of each TFT and the common electrode wiring 12a.

如图7(c)所示,通过覆盖第一层间绝缘膜144a形成由铝、铬、钽等金属构成的厚度约200nm~800nm的导电层504,在之前形成的孔H1中嵌入这些金属,形成接触孔。另外,在导电层504上形成构图用掩模M3。As shown in FIG. 7( c), by covering the first interlayer insulating film 144a, a conductive layer 504 made of metals such as aluminum, chromium, and tantalum with a thickness of about 200nm to 800nm is formed, and these metals are embedded in the previously formed hole H1, Form contact holes. In addition, a patterning mask M3 is formed on the conductive layer 504 .

接着,如图8(a)所示,通过构图用掩模M3对导电层504构图,形成各TFT的源极243、253、263,漏极244和254,电源线103B,连接用布线99G、99B,扫描线电路用电源布线105b和公共电极用布线12a作为第二布线层136。Next, as shown in FIG. 8( a), the conductive layer 504 is patterned by the patterning mask M3 to form the source electrodes 243, 253, 263 of each TFT, the drain electrodes 244 and 254, the power supply line 103B, the connection wiring 99G, 99B, the power supply wiring 105b for the scanning line circuit and the wiring 12a for the common electrode serve as the second wiring layer 136 .

接着,如图8(b)所示,通过例如丙烯酸类等的树脂材料形成覆盖第一层间绝缘膜144a的第二层间绝缘膜144b。该第二层间绝缘膜144b最好形成约1~2μm左右的厚度。Next, as shown in FIG. 8( b ), a second interlayer insulating film 144 b covering the first interlayer insulating film 144 a is formed of a resin material such as acrylic. The second interlayer insulating film 144b is preferably formed to have a thickness of about 1 to 2 μm.

接着,如图8(c)所示,通过蚀刻除去第二层间绝缘膜144b中,与象素用TFT的漏极244对应的部分,形成用于形成接触孔的孔H2。这时,同时也除去公共电极用布线12a上的第二层间绝缘膜144b。这样,在衬底2上形成了有源元件层14。Next, as shown in FIG. 8(c), a portion of the second interlayer insulating film 144b corresponding to the drain electrode 244 of the pixel TFT is removed by etching to form a hole H2 for forming a contact hole. At this time, the second interlayer insulating film 144b on the common electrode wiring 12a is also removed at the same time. Thus, the active element layer 14 is formed on the substrate 2 .

下面,参照图9,说明通过在有源元件层14上形成发光元件部11,得到显示装置1的步骤。图9所示的剖视图对应于沿着图2中的A-A’线剖开的截面。Next, the procedure for obtaining the display device 1 by forming the light emitting element portion 11 on the active element layer 14 will be described with reference to FIG. 9 . The sectional view shown in FIG. 9 corresponds to a section taken along line A-A' in FIG. 2 .

首先,如图9(a)所示,覆盖衬底2的整个面形成由ITO等透明电极材料构成的薄膜,通过对该薄膜构图,嵌入设置在第二层间绝缘膜144b中的孔H2,形成接触孔111a,并且形成象素电极111和虚设象素电极111’。象素电极111只形成在薄膜晶体管123的形成部分上,通过接触孔111a连接了电流薄膜晶体管123(开关元件)。须指出的是,虚设电极111’配置为岛状。First, as shown in FIG. 9(a), a thin film made of a transparent electrode material such as ITO is formed covering the entire surface of the substrate 2. By patterning the thin film, holes H2 provided in the second interlayer insulating film 144b are embedded. A contact hole 111a is formed, and a pixel electrode 111 and a dummy pixel electrode 111' are formed. The pixel electrode 111 is formed only on the portion where the thin film transistor 123 is formed, and is connected to the current thin film transistor 123 (switching element) through the contact hole 111a. It should be noted that the dummy electrodes 111' are configured in an island shape.

然后,如图9(b)所示,在第二层间绝缘膜144b、象素电极111和虚设电极111’上形成无机物隔壁(bank)层112a和虚设无机物隔壁层212a。无机物隔壁层112a以象素电极111的一部分开口的形态形成,完全覆盖虚设象素电极111’而形成虚设无机物隔壁层212a。例如通过CVD法、TEOS法、溅射法、蒸镀法等,在第二层间绝缘膜144b和象素电极111的整个面上形成SiO2、TiO2、SiN等的无机物质膜后,通过对该无机物质膜构图而形成无机物隔壁层112a和虚设无机物隔壁层212a。Then, as shown in FIG. 9(b), an inorganic bank layer 112a and a dummy inorganic bank layer 212a are formed on the second interlayer insulating film 144b, the pixel electrode 111, and the dummy electrode 111'. The inorganic barrier rib layer 112a is formed in a form in which a part of the pixel electrode 111 is opened, and completely covers the dummy pixel electrode 111' to form a dummy inorganic barrier rib layer 212a. For example, by CVD method, TEOS method, sputtering method, vapor deposition method, etc., after forming an inorganic material film such as SiO 2 , TiO 2 , SiN, etc. on the entire surface of the second interlayer insulating film 144b and the pixel electrode 111, by This inorganic material film is patterned to form the inorganic material barrier rib layer 112a and the dummy inorganic material barrier rib layer 212a.

如图9(b)所示,在无机物隔壁层112a和虚设无机物隔壁层212a上形成有机物隔壁层112b和虚设有机物隔壁层212b。以隔着无机物隔壁层112a,象素电极111的一部分开口的形态,形成有机物隔壁层112b,以虚设无机物隔壁层212a的一部分开口的形态,形成虚设有机物隔壁层212b。这样,在第二层间绝缘膜144b上形成隔壁112。As shown in FIG. 9( b ), the organic barrier rib layer 112 b and the dummy organic barrier rib layer 212 b are formed on the inorganic barrier rib layer 112 a and the dummy inorganic barrier rib layer 212 a. The organic barrier rib layer 112b is formed so that part of the pixel electrode 111 is opened through the inorganic barrier rib layer 112a, and the dummy organic barrier rib layer 212b is formed so that a part of the dummy inorganic barrier rib layer 212a is opened. In this way, partition walls 112 are formed on second interlayer insulating film 144b.

接着,在隔壁112的表面形成表现亲液性的区域和表现疏液性的区域。在本实施例中,通过等离子体处理工序,形成各区域。具体而言,该等离子体处理工序至少具有,使象素电极111、无机物隔壁层112a和虚设无机物隔壁层212a成为亲液性的亲液化工序和使有机物隔壁层112b和虚设有机物隔壁层212b成为疏液性的疏液化步骤。Next, a lyophilic region and a lyophobic region are formed on the surface of the partition wall 112 . In this embodiment, each region is formed by a plasma processing step. Specifically, this plasma treatment process includes at least a lyophilic step of making the pixel electrode 111, the inorganic barrier rib layer 112a, and the dummy inorganic barrier rib layer 212a lyophilic, and making the organic barrier rib layer 112b and the dummy organic barrier rib layer 212b A lyophobic step that becomes lyophobic.

即把隔壁112加热到给定温度(例如70~80℃左右),接着,作为亲液化工序,在大气环境中,进行以氧为反应气体的等离子体处理(O2等离子体处理)。然后,作为疏液化步骤,在大气环境中,进行以四氟化甲烷为反应气体的等离子体处理(CF4等离子体处理),把为了等离子体处理而加热的隔壁112冷却到室温,从而对给定位置付与了亲液性和疏液性。That is, the partition wall 112 is heated to a predetermined temperature (for example, about 70 to 80° C.), and then, as a lyophilic step, plasma treatment (O 2 plasma treatment) using oxygen as a reactive gas is performed in an air environment. Then, as a lyophobic step, plasma treatment ( CF4 plasma treatment) using tetrafluoromethane as a reactive gas is carried out in the air environment, and the partition wall 112 heated for the plasma treatment is cooled to room temperature, so that the given Positioning imparts lyophilicity and lyophobicity.

在象素电极111上和无机物隔壁层212a上分别通过喷墨法形成功能层110和虚设功能层210。在喷出包含空穴注入/输送层材料的组合物墨水并使其干燥后,通过喷出包含发光层材料的组合物墨水并使其干燥,而形成了功能层110和虚设功能层210。须指出的是,在该功能层110和虚设功能层210的形成工序以后,为了防止空穴注入/输送层和发光层的氧化,理想的是在氮气气氛、氩气气氛等惰性气体气氛中进行。The functional layer 110 and the dummy functional layer 210 are respectively formed on the pixel electrode 111 and the inorganic partition wall layer 212a by an inkjet method. The functional layer 110 and the dummy functional layer 210 are formed by ejecting and drying the composition ink containing the material for the hole injection/transporting layer, and then discharging and drying the composition ink containing the material for the light emitting layer. It should be noted that, after the formation process of the functional layer 110 and the dummy functional layer 210, in order to prevent oxidation of the hole injection/transport layer and the light emitting layer, it is desirable to carry out in an inert gas atmosphere such as a nitrogen atmosphere or an argon atmosphere. .

接着,如图9(c)所示,形成覆盖隔壁112、功能层110和虚设功能210的公共电极12。通过在隔壁112、功能层110和虚设功能210上形成第一公共电极层12b后,覆盖第一公共电极层12b而形成与衬底2上的公共电极用布线12a连接的第二公共电极层12c,从而得到公共电极12。Next, as shown in FIG. 9( c ), the common electrode 12 covering the partition wall 112 , the functional layer 110 and the dummy function 210 is formed. After forming the first common electrode layer 12b on the partition wall 112, the functional layer 110 and the dummy function 210, the second common electrode layer 12c connected to the common electrode wiring 12a on the substrate 2 is formed by covering the first common electrode layer 12b. , so as to obtain the common electrode 12 .

最后,在衬底2上涂敷环氧树脂等的密封树脂603,通过该密封树脂603在衬底2上接合密封衬底604。这样,就得到了图1~图3所示的显示装置1。Finally, a sealing resin 603 such as epoxy resin is applied on the substrate 2 , and a sealing substrate 604 is bonded to the substrate 2 through the sealing resin 603 . In this way, the display device 1 shown in FIGS. 1 to 3 is obtained.

这样,对于有效区域2a在最外侧的电源线103B,因为与连接其它的电源线103R、103G的连接用布线99R、99G在平面上不重叠,所以能在第一布线层135和第二布线层136的双方上设置。因此,在本实施例中,比在第一布线层135和第二布线层136中的任意一方的层中设置了电源线103B时相比,能以近一半的宽度形成,并且电源线103B的宽度减少的部分能减小面板的框。In this way, since the power supply line 103B on the outermost side of the active area 2a does not overlap with the connection wiring 99R, 99G connecting the other power supply lines 103R, 103G on a plane, it is possible to connect the first wiring layer 135 and the second wiring layer. 136 set on both sides. Therefore, in this embodiment, compared with the case where the power supply line 103B is provided in any one of the first wiring layer 135 and the second wiring layer 136, it can be formed with a width nearly half, and the width of the power supply line 103B The reduced portion can reduce the frame of the panel.

另外,与对于有效区域2a在最内侧的电源线103R相连接的连接用布线99R,与其它的电源线103G、103B在平面上不重叠,所以能在第一布线层135上形成。因此,在本实施例中,能使设置在第二布线层136上的连接用布线99G、99B的宽度变粗相当于连接用布线99R的宽度那一部分,能使掩模的制作等显示装置的制造变得容易。在本实施例中,用于电连接电源线和连接用布线的接点只有100G一个地方,所以能减少接点电阻的依存性。In addition, the connection wiring 99R connected to the innermost power supply line 103R with respect to the active region 2 a can be formed on the first wiring layer 135 because it does not planarly overlap the other power supply lines 103G and 103B. Therefore, in this embodiment, the width of the connection wiring 99G, 99B provided on the second wiring layer 136 can be increased by a portion corresponding to the width of the connection wiring 99R. Manufacturing made easy. In this embodiment, the contact point for electrically connecting the power supply line and the connection wiring is only one 100G, so that the dependence of the contact resistance can be reduced.

[实施例2][Example 2]

下面,说明实施例2。图10所示的实施例2的显示装置的布局与图2所示的实施例1的布局的主要不同点在于:公共电极用布线12a的至少一部分与设置在有效区域2a的周围的电源线103R、103G、103B中的至少一部分在俯视图中重叠。公共电极用布线12a,从安装有柔性衬底5的一边侧向着与该边相对的边延伸,分别设置在构成衬底2的外周的4边中彼此相对的2边和有效区域2a之间,一方的公共电极用布线12a与电源线103R重叠配置,另一方的公共电极用布线12a与103G、103B的至少一部分重叠配置。Next, Example 2 will be described. The main difference between the layout of the display device of Example 2 shown in FIG. 10 and the layout of Example 1 shown in FIG. At least some of , 103G, 103B overlap in plan view. The common electrode wiring 12a extends from the side on which the flexible substrate 5 is mounted to the side opposite to the side, and is respectively provided between two sides facing each other among the four sides constituting the outer periphery of the substrate 2 and the active region 2a, One common electrode wiring 12a is arranged to overlap the power supply line 103R, and the other common electrode wiring 12a is arranged to overlap at least a part of 103G and 103B.

图11表示了与此对应的剖视图。公共电极用布线12a由设置在第二布线层136上的导电膜构成,与公共电极12连接。FIG. 11 shows a sectional view corresponding to this. The common electrode wiring 12 a is made of a conductive film provided on the second wiring layer 136 and is connected to the common electrode 12 .

通过设置在第二布线层136下方的第一布线层135上的导电膜形成了电源线103R、103G、103B。公共电极用布线12a和电源线103R、103G、103B由第一层间绝缘膜144a隔开,电绝缘。在公共电极用布线12a和公共电极12的连接中,夹杂由ITO等构成的导电层12d。The power supply lines 103R, 103G, 103B are formed by a conductive film provided on the first wiring layer 135 below the second wiring layer 136 . The common electrode wiring 12a and the power supply lines 103R, 103G, and 103B are separated and electrically insulated by the first interlayer insulating film 144a. A conductive layer 12d made of ITO or the like is interposed between the common electrode wiring 12a and the common electrode 12 .

如上所述,公共电极用布线12a形成为与电源线103R、103G、103B的至少一部分重叠,由此,公共电极用布线12a和电源线103R、103G、103B之间形成了电容,缓和了电源电压的变动,使电光元件的稳定驱动成为可能。As described above, the common electrode wiring 12a is formed so as to overlap at least a part of the power supply lines 103R, 103G, and 103B, whereby capacitance is formed between the common electrode wiring 12a and the power supply lines 103R, 103G, and 103B, thereby relaxing the power supply voltage. The change of the electro-optic element makes it possible to drive stably.

电源线103R、103G、103B在有效区域2a和与安装了柔性衬底的边相对的边之间的区域中,如图12所示,分别通过接点100R、100G、100B连接着连接用布线99R、99G、99B。在接点100R、100G、100B中,连接着设置在第一布线层135上的导电膜和设置在第二布线层136上的导电膜。使用设置在第二布线层136上的导电膜构成了连接用布线99R、99G、99B。连接用布线99R、99G、99B的线宽比对应的电源线103R、103G、103B的线宽小。The power supply lines 103R, 103G, 103B are in the area between the active area 2a and the side opposite to the side on which the flexible substrate is mounted, as shown in FIG. 99G, 99B. In the contacts 100R, 100G, and 100B, the conductive film provided on the first wiring layer 135 and the conductive film provided on the second wiring layer 136 are connected. The connection wirings 99R, 99G, and 99B are formed using a conductive film provided on the second wiring layer 136 . The line widths of the connection wiring lines 99R, 99G, and 99B are smaller than those of the corresponding power supply lines 103R, 103G, and 103B.

须指出的是,如上所述,理想的是,在有效区域2a内,连接用布线99R、99G、99B基本上利用全部位于同一布线层中的导电膜而形成,在本实施例中,利用设置在第二布线层136上的导电膜形成。而利用设置在第二布线层136上的导电膜形成连接用布线99R、99G、99B。因此,与图5所示的情形不同,在从接点部到有效区域2a之间的区域中,连接用布线99R、99G、99B没必要进行从设置在第一布线层135上的导电膜到设置在第二布线层136上的导电膜的连接。It should be noted that, as described above, ideally, in the effective region 2a, the connection wirings 99R, 99G, and 99B are basically formed using a conductive film that is all located in the same wiring layer. A conductive film is formed on the second wiring layer 136 . On the other hand, the connection wirings 99R, 99G, and 99B are formed using a conductive film provided on the second wiring layer 136 . Therefore, unlike the case shown in FIG. 5 , in the region between the contact portion and the active region 2a, the connection wirings 99R, 99G, and 99B do not need to be formed from the conductive film provided on the first wiring layer 135 to the one provided on the first wiring layer 135. Connection of the conductive film on the second wiring layer 136 .

下面,说明具有所述实施例的显示装置1的电子仪器的例子。Next, an example of electronic equipment including the display device 1 of the embodiment will be described.

图13(a)是表示移动电话的一个例子的立体图。图10(a)中,符号1000表示移动电话主体,符号1001表示使用所述有机EL装置1的显示部。Fig. 13(a) is a perspective view showing an example of a mobile phone. In FIG. 10( a ), reference numeral 1000 denotes a mobile phone main body, and reference numeral 1001 denotes a display portion using the organic EL device 1 .

图13(b)是表示手表型电子仪器的一个例子的立体图。在图10(b)中,符号1100表示手表主体,符号1101表示使用所述有机EL装置1的显示部。Fig. 13(b) is a perspective view showing an example of a watch-type electronic device. In FIG. 10( b ), reference numeral 1100 denotes a watch main body, and reference numeral 1101 denotes a display portion using the organic EL device 1 .

图13(c)是表示文字处理器、个人电脑等便携式信息处理装置的一个例子的立体图。在图13(c)中,符号1200表示信息处理装置,符号1202表示键盘等的输入部,符号1204表示信息处理装置主体,符号1206表示使用所述有机EL装置1的显示部。Fig. 13(c) is a perspective view showing an example of a portable information processing device such as a word processor and a personal computer. In FIG. 13( c ), reference numeral 1200 denotes an information processing device, reference numeral 1202 denotes an input unit such as a keyboard, reference numeral 1204 denotes a main body of an information processing device, and reference numeral 1206 denotes a display unit using the organic EL device 1 .

须指出的是,本发明的技术范围并不局限于所述实施例,在不脱离本发明的宗旨的范围中,能做各种变更。It should be noted that the technical scope of the present invention is not limited to the above-described examples, and various changes can be made within the scope not departing from the gist of the present invention.

例如,在所述实施例中,电源线103B为二层构造,如果是对于有效区域2a配置在最外侧的电源线,就可以是其他电源线。另外,可以为把设置在第一布线层135和第二布线层136上的电源线、连接用布线等配置为相反的结构。For example, in the above-mentioned embodiment, the power supply line 103B has a two-layer structure, but if it is the power supply line arranged on the outermost side with respect to the active area 2a, it may be another power supply line. In addition, the arrangement of the power supply line, connection wiring, and the like provided on the first wiring layer 135 and the second wiring layer 136 may be reversed.

另外,在所述实施例中,作为发光元件部11的结构,以从衬底2一侧开始按象素电极111、空穴注入/输送层110a、发光层110b、公共电极12的顺序形成,但是并不局限于此,也能采用以相反的顺序配置的结构。在所述实施例中,使用发光元件部11的发光通过透明衬底2,射出到外面一侧的形式的例子进行了说明,但也可适用发光元件部11的发光从与透明衬底2相反一侧,通过密封部3射出的形式。这时,设置具有上述的优异光透射性(透明性)的公共电极和密封层,就可以了。In addition, in the above-described embodiment, as the structure of the light-emitting element portion 11, the pixel electrode 111, the hole injection/transport layer 110a, the light-emitting layer 110b, and the common electrode 12 are formed in order from the substrate 2 side, However, it is not limited to this, and a structure arranged in the reverse order may also be employed. In the above-described embodiment, an example in which light emitted from the light emitting element portion 11 passes through the transparent substrate 2 and is emitted to the outside side has been described. One side, in the form of injection through the sealing part 3. In this case, it is sufficient to provide a common electrode and a sealing layer having the above-mentioned excellent light transmission properties (transparency).

另外,在所述实施例中,说明了把R、G、B的各发光层进行条纹配置时的情形,但是本发明并不局限于此,可以采用各种配置构造。例如,除了条纹配置,也能是镶嵌配置和三角配置。In addition, in the above-mentioned embodiments, the case where the light-emitting layers of R, G, and B are arranged in stripes has been described, but the present invention is not limited thereto, and various arrangement structures can be adopted. For example, in addition to the striped configuration, mosaic and triangular configurations are also possible.

如上所述,在本发明中能得到实现了窄框化的小型、并且制造容易的高质量电光装置和电子仪器。As described above, in the present invention, it is possible to obtain a compact and easy-to-manufacture high-quality electro-optical device and electronic equipment that achieve a narrow frame.

须指出的是,上述的本实施例表示了本发明的一个形态,并不限定本发明,在本发明的技术思想的范围内,能任意变更。It should be noted that the present embodiment described above shows one form of the present invention, and does not limit the present invention, and can be changed arbitrarily within the scope of the technical idea of the present invention.

Claims (4)

1. 一种电光装置,第一电极在衬底上具有配置为矩阵状的第一电极区域,在所述第一电极区域的周围配置有与所述第一电极相连接的发光用电源布线、和连接了与所述第一电极之间夹着功能层的第二电极的第二电极用布线,所述功能层至少具备发光层,所述电光装置的特征在于,所述发光用电源布线和所述第二电极用布线配置为,在平面视图中至少一部分彼此重叠。1. An electro-optical device, the first electrode has a first electrode area arranged in a matrix on the substrate, and a power supply wiring for light emission connected to the first electrode is arranged around the first electrode area, and a wiring for a second electrode connected to a second electrode with a functional layer sandwiched between the first electrode and the functional layer having at least a light emitting layer, and the electro-optic device is characterized in that the power supply wiring for light emission and The wiring for the second electrodes is arranged such that at least a part thereof overlaps with each other in plan view. 2. 根据权利要求1所述的电光装置,其特征在于,在所述发光用电源布线和第二电极用布线之间配置有层间绝缘膜。2. The electro-optic device according to claim 1, wherein an interlayer insulating film is disposed between the light-emitting power supply wiring and the second electrode wiring. 3. 根据权利要求1或者2所述的电光装置,其特征在于,所述发光用电源布线和第二电极用布线的任意一方配置在另一方占有的区域内。3. The electro-optical device according to claim 1 or 2, wherein any one of the light-emitting power supply wiring and the second electrode wiring is arranged in an area occupied by the other. 4. 一种电子仪器,其特征在于,具有权利要求1~3中的任意一项所述的电光装置。4. An electronic instrument, characterized in that it has the electro-optic device according to any one of claims 1 to 3.
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