CN100399595C - Wheeled Scanning Probes for Scanning Imaging Devices - Google Patents
Wheeled Scanning Probes for Scanning Imaging Devices Download PDFInfo
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Abstract
本发明公开了一种用于扫描成像装置的轮式扫描探头。该探头包括一圆筒状支撑体和嵌套在筒内的中空轮轴;支撑体外表面等间距嵌有换能器单元;换能器单元沿支撑体径向所对应的支撑体的内表面设有两个引出电极。轮轴设有两个电极滑块,且分别通过电极压簧与两个引出电极电刷式连接;两个电极滑块各有一根电极引线通过轮轴的中空部分引出到轮轴外部;换能器单元由压电块和非压电块组成;压电块和非压电块交错放置;换能器单元的上下表面分别覆盖有上电极和下电极,分别与该换能器单元对应的两个引出电极连接。本发明提供的用于扫描成像装置的轮式扫描探头,可用于固体材料的超声无损检测,其中包括粘接界面的质量评价。
The invention discloses a wheel-type scanning probe used for a scanning imaging device. The probe includes a cylindrical support body and a hollow wheel shaft nested in the cylinder; the outer surface of the support body is embedded with transducer units at equal intervals; Two extraction electrodes. The wheel shaft is provided with two electrode sliders, which are respectively connected to the two lead-out electrode brushes through the electrode compression spring; each of the two electrode sliders has an electrode lead wire that is led out of the wheel shaft through the hollow part of the wheel shaft; the transducer unit is composed of Composed of piezoelectric blocks and non-piezoelectric blocks; piezoelectric blocks and non-piezoelectric blocks are placed alternately; the upper and lower surfaces of the transducer unit are covered with upper electrodes and lower electrodes, respectively, and the two lead-out electrodes corresponding to the transducer unit connect. The wheel-type scanning probe used in the scanning imaging device provided by the invention can be used for the ultrasonic non-destructive testing of solid materials, including the quality evaluation of the bonding interface.
Description
技术领域 technical field
本发明涉及一种用于扫描成像装置的探头,具体地说,涉及一种用于扫描成像装置的轮式扫描探头。The invention relates to a probe for scanning imaging devices, in particular to a wheel-type scanning probe for scanning imaging devices.
背景技术 Background technique
传统的多通道成像技术利用超声纵波探头组成直探头阵列或轮式探头阵列对检测对象进行电子扫描成像。由于在固体中存在波型转换,传统的纵波相控阵技术在用于固体介质的检测时会遇到额外的干扰。另外,在粘接界面的液体夹层及零间隙脱粘的检测中,采用超声纵波无法检测。The traditional multi-channel imaging technology uses ultrasonic longitudinal wave probes to form a straight probe array or a wheel probe array to electronically scan and image the detection object. Due to the existence of wave mode conversion in solids, the traditional longitudinal wave phased array technology will encounter additional interference when used in the detection of solid media. In addition, in the detection of liquid interlayer and zero-gap debonding at the bonding interface, ultrasonic longitudinal waves cannot be used to detect.
相对于纵波,横波探测有其独特的优势。从传播理论可知,对于各向异性等复杂介质材料纯横波的散射、反射特性比较单纯,采用横波检测有纵波无法达到的效果。在相同的频率条件下,横波波长比纵波波长几乎要小一倍,因此对同样大小的缺陷,横波的反射能量相对也要大的多。同时,在对粘接界面缺陷中液体夹层的检测中,横波的灵敏度也远比纵波高。Compared with longitudinal wave, shear wave detection has its unique advantages. It can be seen from the propagation theory that the scattering and reflection characteristics of pure shear waves in complex dielectric materials such as anisotropy are relatively simple, and the detection of shear waves has the effect that longitudinal waves cannot achieve. Under the condition of the same frequency, the wavelength of the shear wave is almost twice as small as that of the longitudinal wave, so the reflected energy of the shear wave is relatively much larger for defects of the same size. At the same time, in the detection of liquid interlayers in the bonding interface defects, the sensitivity of shear waves is much higher than that of longitudinal waves.
虽然在焊缝的超声检测中,有时使用横波阵列探头(Roy,O.Mahaut,S.Casula,O.Development of a smart flexible transducer to inspect component ofcomplex geometry:modeling and experiment,AIP Conference Proceedingsno.615A:908-14,2002),但是,组成探头阵列的阵元直接辐射纵波,然后倾斜入射在耦合界面上,利用波型转换在检测介质中产生横波。这种利用波型转换技术,产生横波的效率受到影响,并常伴有纵波或表面波使其检测受到影响。也有使用电磁声技术产生SH横波进行金属板测厚[2],但设备相对比较复杂,检测条件要求高,且只适用于铁磁性介质,目前也还没有实际可以用于小当量缺陷检测的产品。使用其他方法也能够产生横波([1].Murray,P.R.Dewhurst,R.J.Laser/EMAT measurement systems for ultrasound B-scan imaging,Sensors and theirApplications XI.Proceedings of the Eleventh Conference on Sensors and theirApplications:169-74,2001;[2].Every,A.G.Sachse,W.Imaging of laser-generatedultrasonic waves in silicon,Physical Review B(Condensed Matter),vol.44,no.13:6689-99,1 Oct.1991Language:English;[3].汪承灏,乔东海,固体表面菲涅尔阵列产生的声束聚焦的研究,声学学报,Vol.24,No.4,1999,pp351-356),但也常伴随纵波,不能够得到模式纯净的横波辐射声场。Although in ultrasonic testing of welds, shear wave array probes are sometimes used (Roy, O.Mahaut, S.Casula, O.Development of a smart flexible transducer to inspect component of complex geometry: modeling and experiment, AIP Conference Proceedingsno.615A: 908 -14, 2002), however, the array elements that make up the probe array directly radiate longitudinal waves, and then obliquely incident on the coupling interface, using wave mode conversion to generate shear waves in the detection medium. This use of wave mode conversion technology affects the efficiency of generating shear waves, and is often accompanied by longitudinal waves or surface waves to affect the detection. There is also the use of electromagnetic acoustic technology to generate SH transverse waves to measure the thickness of metal plates [2] , but the equipment is relatively complicated, the detection conditions are high, and it is only suitable for ferromagnetic media. At present, there is no product that can actually be used for small equivalent defect detection. . Transverse waves can also be generated using other methods ([1]. Murray, PRDewhurst, RJLaser/EMAT measurement systems for ultrasound B-scan imaging, Sensors and their Applications XI. Proceedings of the Eleventh Conference on Sensors and their Applications: 169-74, 2001; [ 2]. Every, AGSachse, W. Imaging of laser-generated ultrasonic waves in silicon, Physical Review B (Condensed Matter), vol.44, no.13: 6689-99, 1 Oct.1991Language: English; [3]. Wang Chenghao , Qiao Donghai, Research on Acoustic Beam Focusing Produced by Fresnel Array on Solid Surface, Acta Acoustica Sinica, Vol.24, No.4, 1999, pp351-356), but it is often accompanied by longitudinal waves, and cannot obtain pure shear wave radiation sound field.
发明内容 Contents of the invention
本发明的目的是为了克服现有技术中扫描成像装置的探头不能直接发射横波,因而效率低并限制其应用等缺点,通过设计可直接产生横波的换能器单元,从而提供了一种用于扫描成像装置的轮式扫描探头。The purpose of the present invention is to overcome the shortcomings of the scanning imaging device in the prior art that the probe cannot directly emit shear waves, thus having low efficiency and limiting its application, and by designing a transducer unit that can directly generate shear waves, thereby providing a kind for The wheeled scanning probe of the scanning imaging device.
本发明的技术方案为:Technical scheme of the present invention is:
一种用于扫描成像装置的轮式扫描探头,该探头包括一圆筒状支撑体1和嵌套在筒内的中空轮轴7;支撑体1外表面等间距嵌有换能器单元2,换能器单元2呈长方体,其长度方向与支撑体1的轴线平行;换能器单元2沿支撑体1径向所对应的支撑体1的内表面设有两个引出电极8;轮轴7设有两个电极滑块9,且分别通过电极压簧10与两个引出电极8电刷式连接;两个电极滑块9各有一根电极引线11通过轮轴7的中空部分引出到轮轴7外部;所述换能器单元2由压电块3和非压电块4组成;所述压电块3和非压电块4交错放置;换能器单元2的上下表面分别覆盖有上电极5和下电极6,分别与该换能器单元2对应的两个引出电极8连接。A wheeled scanning probe for scanning imaging devices, the probe includes a
所述支撑体1和轮轴7之间采用轴承类或直接摩擦式连接方式。所述换能器单元2的宽度小于等于λ/2,其厚度小于等于λ/2,其中λ等于所需发射声波的波长。相邻换能器单元2之间的距离大于等于隔离换能器单元间耦合振动需要的最小距离。所述压电块3的偏振方向沿换能器单元2的长度方向或者宽度方向。该探头还包括设置在所述换能器单元2声辐射面上的保护膜,设置在所述换能器单元2背面上的背衬。The
在实际使用时,可将本发明提供的轮式扫描探头与现有技术的扫描成像装置的发射/接收电路部分通过多束高频屏蔽电缆连接,从而构成完整的多通道扫描成像装置。In actual use, the wheel-type scanning probe provided by the present invention can be connected to the transmitting/receiving circuit part of the scanning imaging device in the prior art through multiple bundles of high-frequency shielded cables, thereby forming a complete multi-channel scanning imaging device.
本发明提供的用于扫描成像装置的轮式扫描探头的优点在于:该探头可以直接产生纯横波,避免了波型转换带来的能量损失或其它干扰,避免了固体中声波波型转换带来的影响;使用该探头,不仅可以利用电子相控技术实现对固体材料的垂直纯横波声束电子扫描,还可对粘接界面的液体夹层及零间隙脱粘进行检测。The advantage of the wheel-type scanning probe used for scanning imaging devices provided by the present invention is that the probe can directly generate pure shear waves, avoiding energy loss or other interference caused by wave mode conversion, and avoiding the effects of sound wave mode conversion in solids. Using this probe, not only can use the electronic phase control technology to realize the electronic scanning of the vertical pure shear wave acoustic beam on the solid material, but also detect the liquid interlayer and zero-gap debonding at the bonding interface.
本发明提供的用于扫描成像装置的轮式扫描探头,可用于固体材料的超声无损检测,其中包括粘接界面的质量评价。The wheel-type scanning probe used in the scanning imaging device provided by the invention can be used for the ultrasonic non-destructive testing of solid materials, including the quality evaluation of the bonding interface.
附图说明 Description of drawings
图1(a)是本发明轮式扫描探头的正视图;Fig. 1 (a) is the front view of wheel type scanning probe of the present invention;
图1(b)是本发明轮式扫描探头的侧视图;Fig. 1 (b) is the side view of wheel type scanning probe of the present invention;
图2是图1中换能器单元的结构示意图;Fig. 2 is a schematic structural view of the transducer unit in Fig. 1;
图3是另一种换能器单元的结构示意图Figure 3 is a structural schematic diagram of another transducer unit
图4是应用本发明轮式扫描探头的扫描成像装置机械部分的结构示意图;4 is a schematic structural view of the mechanical part of the scanning imaging device using the wheel scanning probe of the present invention;
图5是应用本发明轮式扫描探头的扫描成像装置电子部分的结构示意图;5 is a schematic structural view of the electronic part of the scanning imaging device using the wheel scanning probe of the present invention;
图面说明:Graphic description:
支撑体1 换能器单元2 压电块3 非压电块4
上电极5 下电极6 轮轴7 引出电极8
电极滑块9 电极压簧10 电极引线11Electrode slider 9
具体实施方式 Detailed ways
下面结合附图与具体实施方式对本发明作进一步详细描述:Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
图1是轮式扫描探头的结构示意图,图1(a)是正视图,图1(b)是侧视图。该探头整体上包括一环氧树脂材料做成的圆筒状支撑体1和嵌套在筒内的中空轮轴7,它们之间采用轴承类或者直接摩擦式连接方式。支撑体1外表面一周等间距嵌有多个换能器单元2,相邻换能器之间的间距为2毫米。换能器单元2呈长方体,其长度方向与支撑体1的轴线平行。每个换能器单元2都对应两个引出电极8,引出电极8位于支撑体1的内表面,且与对应的换能器单元2处于支撑体1的同一半径方向。轮轴7上设有两个电极滑块9,且分别通过电极压簧10与两个引出电极8电刷式连接;两个电极滑块9各有一根电极引线11通过轮轴7的中空部分引出到轮轴7外部。Figure 1 is a schematic structural view of the wheel-type scanning probe, Figure 1(a) is a front view, and Figure 1(b) is a side view. The probe as a whole includes a
换能器单元2的一种结构如图2所示,其宽度为0.8毫米,厚度为1.1毫米,长度为10毫米,该换能器单元2发射声波的波长为3毫米(对应于检测体为金属钢的情形)。换能器单元2上下表面分别覆盖有上电极5和下电极6,这两个电极用于分别与该换能器单元2对应的两个引出电极8连接。换能器单元2由3个压电块3和4个非压电块4交错放置组成,其偏振方向沿换能器单元2的长度方向;压电块3使用压电材料,可以为锆钛酸铅压电陶瓷,如PZT-5A和PZT-4,也可用其它系列的压电材料如钛酸钡、偏铌酸铅、铌酸钾钠、钛酸铅压电陶瓷或石英晶体。非压电块的材料为环氧树脂如E-51,或其它双酚A型环氧树脂如E-44或E-55。A kind of structure of
换能器单元2还可以有另外一种构成方式,如图3所示,由7个压电块3和7个非压电块4交错放置组成,其偏振方向沿换能器单元2的宽度方向。The
换能器单元2的声辐射面上设有材料为环氧树脂加280目金刚砂的保护膜(未示出),其中,金刚砂也可用硅酸盐类微粉或刚玉类微粉等绝缘材料微粉代替。换能器单元2的背面设有环氧树脂加金属粉末的背衬(未示出),例如加钨粉。The sound radiation surface of the
应用本发明的轮式扫描探头的扫描成像装置,包括电子部分和机械部分。机械部分如图4所示,电子部分如图5所示。轮式扫描探头与扫描架一起构成的轮式探头扫描机构。扫描架由支撑导轨、扫描架基座、步进电机、电缆接头组成。扫描架基座安装在支撑导轨上,在步进电机的驱动下可以沿轨道移动。轮式扫描探头安装在基座的下方,扫描架可以给轮式扫描探头施加一定的压载荷。电缆接头将来自轮式扫描探头的电极引线11、步进电机的驱动/控制线分别与电子部分发射/接收电路、扫描控制驱动电路连接起来,其中电极引线11使用高频同轴屏蔽电缆。The scanning imaging device using the wheel-type scanning probe of the present invention includes an electronic part and a mechanical part. The mechanical part is shown in Figure 4, and the electronic part is shown in Figure 5. A wheel-type probe scanning mechanism composed of a wheel-type scanning probe and a scanning frame. The scanning frame is composed of supporting guide rails, scanning frame base, stepping motor, and cable connector. The scanning frame base is installed on the supporting guide rail, and can move along the rail under the drive of the stepping motor. The wheel-type scanning probe is installed under the base, and the scanning frame can apply a certain pressure load to the wheel-type scanning probe. The cable connector connects the electrode leads 11 from the wheel-type scanning probe, the drive/control line of the stepping motor with the transmitting/receiving circuit of the electronic part, and the scanning control drive circuit respectively, wherein the electrode leads 11 use high-frequency coaxial shielded cables.
电子部分包括发射电路、接收电路、A/D转换电路、工业控制计算机、显示器、打印机。扫描系统包括扫描控制驱动电路和扫描驱动装置。工业控制计算机负责设备的控制、波形处理、识别、分类和成像等工作。发射电路负责产生驱动压电换能器的高压脉冲信号,通常发射脉冲幅度≥200伏特,上升沿/下降沿≤10纳秒。接收电路负责将接收到的信号放大,并送到A/D转换电路,通常接收电路中的放大器带宽≥15兆赫兹,增益≥64分贝,增益控制范围≥74分贝。A/D转换电路采用波形采集卡,使用不小于20兆赫兹采样频率采集回波信号并存放在双端口存储器中,最后将采集的波形数据送给工业控制计算机供处理、显示。显示器用于对设备系统实行菜单式操作和对回波信号波形实施实时监视并显示成像结果。打印机完成打印输出成像结果及有关参数的功能。The electronic part includes transmitting circuit, receiving circuit, A/D conversion circuit, industrial control computer, display, printer. The scanning system includes a scanning control driving circuit and a scanning driving device. The industrial control computer is responsible for equipment control, waveform processing, identification, classification and imaging. The transmitting circuit is responsible for generating the high-voltage pulse signal to drive the piezoelectric transducer, usually the transmitting pulse amplitude is ≥200 volts, and the rising edge/falling edge is ≤10 nanoseconds. The receiving circuit is responsible for amplifying the received signal and sending it to the A/D conversion circuit. Usually, the amplifier bandwidth in the receiving circuit is ≥15 MHz, the gain is ≥64 decibels, and the gain control range is ≥74 decibels. The A/D conversion circuit adopts a waveform acquisition card, uses a sampling frequency not less than 20 MHz to collect echo signals and stores them in a dual-port memory, and finally sends the collected waveform data to an industrial control computer for processing and display. The display is used for menu-based operation of the equipment system, real-time monitoring of echo signal waveforms and display of imaging results. The printer completes the function of printing out imaging results and related parameters.
开始扫描时,筒体上与电极滑块连接的换能器单元位于筒体正下方和工件表面上,而其他单元则处于断开状态。此时发射电路发出激励电脉冲,换能器单元向工件中辐射横波。当接收电路收到来自工件的回波后,扫描控制电路发出扫描进行信号,扫描驱动电路驱动扫描架向前移动,筒体滚动到下一个换能器单元,进入新的扫描检测循环。因此,本发明中,扫描速度应足够小,以充分使得每个工作的换能器单元能够接收到工件中可能存在的最远缺陷的回波信号。When scanning starts, the transducer unit connected to the electrode slider on the cylinder is located directly under the cylinder and on the surface of the workpiece, while the other units are disconnected. At this time, the transmitting circuit sends out excitation electric pulses, and the transducer unit radiates transverse waves into the workpiece. When the receiving circuit receives the echo from the workpiece, the scanning control circuit sends a scanning signal, and the scanning driving circuit drives the scanning frame to move forward, and the cylinder rolls to the next transducer unit to enter a new scanning detection cycle. Therefore, in the present invention, the scanning speed should be small enough so that each working transducer unit can receive the echo signal of the farthest defect that may exist in the workpiece.
检测过程中需要在工件表面涂抹横波耦合剂如粘稠蜂蜜等,并施加一定的耦合压力载荷,因此滚轮轴及筒状支撑体的填充物、支撑导轨、扫描架等都应选用合适的材料使其具有一定的强度。During the detection process, it is necessary to apply a shear wave coupling agent such as viscous honey on the surface of the workpiece, and apply a certain coupling pressure load. Therefore, suitable materials should be selected for the filling of the roller shaft and cylindrical support, the support guide rail, and the scanning frame. It has a certain strength.
在图4的扫描过程中,所实现的实际扫描区域为一系列平行排列的矩形扫描区域,这些区域给出了使用本发明的装置进行扫描成像时的扫描覆盖率或能达到的不漏检缺陷的最小尺寸。In the scanning process of Fig. 4, the actual scanning area realized is a series of rectangular scanning areas arranged in parallel, and these areas provide the scanning coverage when using the device of the present invention for scanning imaging or the non-missing defects that can be achieved minimum size of .
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| CN101143591B (en) * | 2007-10-19 | 2012-01-11 | 上海铁路局 | Combined wheel set detecting device for reversible wheel array probe |
| CN101894592B (en) * | 2010-06-23 | 2012-07-11 | 中广核检测技术有限公司 | Front-end probe mechanism of reactor pressure vessel inspection machine |
| CN107014907B (en) * | 2017-04-10 | 2023-05-26 | 中国科学院声学研究所 | A flexible probe structure |
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| GB2208138A (en) * | 1987-06-19 | 1989-03-01 | Circulation Res Ltd | Ultrasonic transducer array around a flexible tube |
| JPH02107236A (en) * | 1988-10-18 | 1990-04-19 | Yokogawa Medical Syst Ltd | Probe for ultrasonic diagnosis |
| US5250869A (en) * | 1990-03-14 | 1993-10-05 | Fujitsu Limited | Ultrasonic transducer |
| CN1224840A (en) * | 1997-11-11 | 1999-08-04 | 通用电器横河医疗系统株式会社 | Method of manufacturing ultrasonic probe, ultrasonic probe and ultrasonic imaging apparatus |
| JP2003070096A (en) * | 2001-01-25 | 2003-03-07 | Matsushita Electric Ind Co Ltd | Composite piezoelectric body, ultrasonic probe for ultrasonic diagnostic apparatus, ultrasonic diagnostic apparatus, and method of manufacturing composite piezoelectric body |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2208138A (en) * | 1987-06-19 | 1989-03-01 | Circulation Res Ltd | Ultrasonic transducer array around a flexible tube |
| JPH02107236A (en) * | 1988-10-18 | 1990-04-19 | Yokogawa Medical Syst Ltd | Probe for ultrasonic diagnosis |
| US5250869A (en) * | 1990-03-14 | 1993-10-05 | Fujitsu Limited | Ultrasonic transducer |
| CN1224840A (en) * | 1997-11-11 | 1999-08-04 | 通用电器横河医疗系统株式会社 | Method of manufacturing ultrasonic probe, ultrasonic probe and ultrasonic imaging apparatus |
| JP2003070096A (en) * | 2001-01-25 | 2003-03-07 | Matsushita Electric Ind Co Ltd | Composite piezoelectric body, ultrasonic probe for ultrasonic diagnostic apparatus, ultrasonic diagnostic apparatus, and method of manufacturing composite piezoelectric body |
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| CN1530649A (en) | 2004-09-22 |
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