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CN109557675A - Diode laser laser beam homogenization optics based on aspherical mirror aberration effect - Google Patents

Diode laser laser beam homogenization optics based on aspherical mirror aberration effect Download PDF

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CN109557675A
CN109557675A CN201811575955.4A CN201811575955A CN109557675A CN 109557675 A CN109557675 A CN 109557675A CN 201811575955 A CN201811575955 A CN 201811575955A CN 109557675 A CN109557675 A CN 109557675A
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lens
meniscus
refractive power
concave
convex lens
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CN109557675B (en
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杨振
张建隆
郭鑫民
于祥燕
张全
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Shanghai Jinze Biotechnology Co ltd
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Harbin Institute of Technology Shenzhen
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

本发明公开了一种基于非球面镜像差效应的长焦深激光光束均匀化光学系统，所述光学系统包括光束均匀化非球面镜组和长焦深球面准直镜组，其中：所述光束均匀化非球面镜组包括负光焦度弯月凸透镜、第一正光焦度弯月凸透镜、含有非球面的负光焦度弯月凹透镜、负光焦度双凹透镜、第二正光焦度弯月凸透镜；所述长焦深球面准直镜组包括第三正光焦度弯月凸透镜、负光焦度凹透镜、正光焦度凸透镜、负光焦度弯月凹透镜；各透镜在光的传播方向上依次同轴排列。该光学系统能够将高斯光束转换成分布均匀的平顶高斯光束，为强激光损伤测量、激光清洗、激光抛光及激光燃烧诊断提供优质、高效的激光光束，促进这些领域的深入发展。

The invention discloses an optical system for homogenizing laser beams with a long focal depth based on aspheric mirror aberration effect. The aspherical lens group includes a meniscus convex lens with negative refractive power, a first meniscus convex lens with positive refractive power, a concave meniscus lens with negative refractive power, a biconcave lens with negative refractive power, and a second meniscus convex lens with positive refractive power; The telephoto deep spherical collimating lens group includes a third meniscus convex lens with positive refractive power, a concave lens with negative refractive power, a convex lens with positive refractive power, and a meniscus concave lens with negative refractive power; each lens is coaxial in turn in the direction of light propagation arrangement. The optical system can convert a Gaussian beam into a flat-topped Gaussian beam with uniform distribution, providing high-quality and efficient laser beams for intense laser damage measurement, laser cleaning, laser polishing and laser combustion diagnosis, and promotes the in-depth development of these fields.

Description

Diode laser laser beam homogenization optics based on aspherical mirror aberration effect
Technical field
The invention belongs to laser Application Optics field, the Gaussian beam energy for being related to a kind of continuous laser and pulse laser is empty Between the homogenization optics that are distributed.
Background technique
Light laser is in recent years with material interaction, laser cleaning, laser polishing, laser melting coating, combustion diagnosis with laser The hot research field of laser application technique development.When light laser and material interact inevitably to material surface and Inside generates damage or destroys, and generalling use damage threshold in the world at present, (damage can be caused by acting on material surface Average laser power density or energy density) carry out the degree of this damage effect of quantitative assessment.However, the light beam of laser output It is generally the hot spot of Gauss or class Gaussian Profile, this hot spot has the characteristics that the weak Energy distribution in intermediate high both sides, using this Kind light beam acts on material itself, the Energy distribution of material and spatial points when laser interaction will be made uneven, caused Do not have unified codes and standards using average laser power density or mean energy density characterization laser damage threshold.Even if Mean power/energy density of various lasers manufacturer is identical, but due to the other parameters of laser different (such as laser pulse widths, light Beam quality etc.), therefore laser peak power/energy density is also not necessarily completely the same.These problems will cause to swash using different The research that light carries out does not have comparativity and referential, brings very big puzzlement to quantitative assessment damage from laser standard is established.
Laser cleaning, laser polishing and laser melting coating are also the important research field of present laser application technology.Laser is clear Wash the extent of the destruction that can be effectively reduced compared to traditional chemical cleaning to environment.Compared to artificial cleaning, can greatly mention Rise the efficiency of cleaning.Therefore, laser cleaning is known as the green cleaning mode of 21 century, future be expected to be applied to aerospace, The important engineering field such as high-speed rail, ocean, nuclear power.However, laser cleaning mostly uses vibration mirror scanning type cleaning way at present, using swashing Pendulum mirror inside light cleaning head quickly rotates, and laser facula is made to act on the surface of cleaned workpiece point by point, completes cleaning.It is this Mode disadvantage first is that its cleaning when hot spot be unevenly distributed, cause cleaning when hot spot center high-efficient, hot spot two Side is low, i.e., cleaning efficiency is not high enough.When often cleaning one time, the cleaning of spot center position it is thorough, two sides are washed or clearly in the presence of leakage Except not clean situation.
Combustion diagnosis with laser is the advantageous methods for studying the large and medium-sized burner such as aero-engine and gas turbine.Laser Combustion diagnosis can contactlessly obtain the information such as temperature and component distribution inside combustion field by laser, to instruct reality The optimization and improvement of burner.Planar laser-induced fluorescence is a kind of laser measurement skill using sheet beam diagnosing combustion field Art, it carries out shaping to the light beam that laser exports using laser sheet optical orthopedic systems, and then is incident to tested combustion zone.So And existing laser output is not the uniform light beam of Energy distribution, is also point by the linear light spot exported after orthopedic systems Cloth is non-uniform, if will lead to also inconsistent (some regions of the Signal-to-Noise detected using this light velocity measurement combustion field Signal-to-noise ratio it is high, and the signal-to-noise ratio in some regions is very low), this measurement accuracy that extreme influence is final.
Summary of the invention
The object of the present invention is to provide a kind of Diode laser laser beam homogenizing opticals based on aspherical mirror aberration effect Gaussian beam can be converted into the uniform Flattened Gaussian Beams of Energy distribution by system, the optical system, be surveyed for light laser damage Amount, laser cleaning, laser polishing and combustion diagnosis with laser provide high-quality, efficient laser beam, promote going deep into for these fields Development.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of Diode laser laser beam homogenization optics based on aspherical mirror aberration effect, including beam uniformity aspheric Face microscope group and Diode laser spherical surface collimate microscope group, in which:
The aspherical microscope group of beam uniformity includes negative power bent moon convex lens, the first positive light coke bent moon convex lens, contains There are aspherical negative power bent moon concavees lens, negative power biconcave lens, the second positive light coke bent moon convex lens；
The Diode laser spherical surface collimation microscope group includes third positive light coke bent moon convex lens, negative power concavees lens, positive light coke Convex lens, negative power bent moon concavees lens；
It is the negative power bent moon convex lens, the first positive light coke bent moon convex lens, recessed containing aspherical negative power bent moon Lens, negative power biconcave lens, the second positive light coke bent moon convex lens, third positive light coke bent moon convex lens, negative power Concavees lens, positive light coke convex lens, negative power bent moon concavees lens sequentially coaxially arrange in the direction of propagation of light.
Compared with the prior art, the present invention has the advantage that
1, the aberration effect of aspherical mirror is utilized in optical system of the invention, and Gaussian beam intermediate energy is distributed stronger area Domain projects to fringe region by aberration effect, to achieve the purpose that uniform beam Energy distribution.
2, optical system of the invention can promote light laser in the skimble-scamble problem of material damage standard, can not only improve Laser cleaning, the efficiency in laser polishing engineer application field, moreover it is possible to improve Signal-to-Noise and the survey in combustion diagnosis with laser field Accuracy of measurement provides important technical support for the development in these fields.
3, compared to common laser beam even method, optical system of the invention have structure it is simple, it is easy to process, The advantages of at low cost, beam uniformity effect good (can reach 98% or more).
4, the composite can be widely applied to laser cleaning, laser polishing, laser melting coating, quantitative assessment laser damage threshold and The research fields such as laser combustion field measurement can grind for laser cleaning, laser polishing, light laser and material damage mechanism and application Study carefully, laser diagnostics in combustion provides uniformly, it is clear laser can be substantially improved in and the flat laser beam of high light beam quality It washes and burns with the laser of laser polishing efficiency, promotion unified standard to the establishment of standard of material damage threshold ratings, improving laser The signal-to-noise ratio and measurement accuracy of signal in diagnosis.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of Diode laser laser beam homogenization optics of the present invention；
Fig. 2 is focal point spot energy distribution (beam uniformity 98%)；
Fig. 3 is away from spot energy distribution (beam uniformity 98%) at focus 100mm；
Fig. 4 is to locate spot energy distribution (beam uniformity 95%) away from focus -100mm.
Specific embodiment
Further description of the technical solution of the present invention with reference to the accompanying drawing, and however, it is not limited to this, all to this Inventive technique scheme is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be covered Within the protection scope of the present invention.
As shown in Figure 1, the Diode laser laser beam homogenizing optical provided by the invention based on aspherical mirror aberration effect System is made of the aspherical microscope group of beam uniformity and Diode laser spherical surface collimation microscope group, in which:
The aspherical microscope group of beam uniformity by negative power bent moon convex lens 1, the first positive light coke bent moon convex lens 2, contain It is made of aspherical negative power bent moon concavees lens 3, negative power biconcave lens 4, the second positive light coke bent moon convex lens 5；
The Diode laser spherical surface collimation microscope group is by third positive light coke bent moon convex lens 6, negative power concavees lens 7, positive light coke Convex lens 8, negative power bent moon concavees lens 9 form；
The negative power bent moon convex lens 1, contains aspherical negative power bent moon at first positive light coke bent moon convex lens 2 Concavees lens 3, the second positive light coke bent moon convex lens 5, third positive light coke bent moon convex lens 6, are born negative power biconcave lens 4 Focal power concavees lens 7, positive light coke convex lens 8, negative power bent moon concavees lens 9 are sequentially coaxially arranged in the direction of propagation of light Column.
In the present invention, the negative power bent moon convex lens 1, the first positive light coke bent moon convex lens 2, containing aspherical Negative power bent moon concavees lens 3, negative power biconcave lens 4, the second positive light coke bent moon convex lens 5, third positive light coke are curved Month convex lens 6, negative power concavees lens 7, positive light coke convex lens 8, negative power bent moon concavees lens 9 material be F_ SILICA(vitreous silica) and it is coated with anti-reflection film, guarantee that the transmitance of each lens is 99.9%.
In the present invention, the negative power bent moon convex lens 1, the first positive light coke bent moon convex lens 2, containing aspherical Negative power bent moon concavees lens 3, negative power biconcave lens 4, the second positive light coke bent moon convex lens 5, third positive light coke are curved Month convex lens 6, negative power concavees lens 7, positive light coke convex lens 8, negative power bent moon concavees lens 9 along the direction of propagation of light according to (interval refers to the specular surface center apart from next phase at face type, radius of curvature and the interval of 18 mirror surfaces of secondary arrangement The physical distance at adjacent specular surface center, and so on) it is respectively as follows: convex spherical, 10.55mm, 4.062mm；Concave spherical surface, 7.809mm,6.069mm；Concave spherical surface, -26.507mm, 4.606mm；Convex spherical, -11.379mm, 10.620mm；Concave aspherical surface ,- 13.422mm,3.065mm；Convex spherical, -32.824mm, 2.003mm；Concave spherical surface, -51.004mm, 3.072mm；Concave spherical surface 19.7mm,21.834mm；Concave spherical surface, -39.519mm, 6.768；Convex spherical, -24.834mm, 2.001mm；Convex spherical, 27.599mm,8.845mm；Concave spherical surface, 251.38mm, 10.716mm；Concave spherical surface, -22.763mm, 4.61mm；Convex spherical ,- 170.08mm,6.04mm；Concave spherical surface, -600.036mm, 6.621mm；Convex spherical, -43.026mm, 7.231mm；Concave spherical surface ,- 30.851mm,5.018mm；Convex spherical, -41.139mm.
In the present invention, the negative power bent moon convex lens 1, the first positive light coke bent moon convex lens 2, containing aspherical Negative power bent moon concavees lens 3, negative power biconcave lens 4, the second positive light coke bent moon convex lens 5, third positive light coke are curved Month convex lens 6, negative power concavees lens 7, positive light coke convex lens 8, the blank medium between negative power bent moon concavees lens 9 are Air.
In the present invention, the operation wavelength of the optical system is 1064nm and 1080nm, and depth of focus is ± 100mm, and focal length is 1000mm。
In the present invention, the optical system is not less than 95% to the homogenization degree of Gaussian beam.
In the present invention, every particular technique feature of the optical system is shown in Table 1, and each data unit is mm in table.
Table 1
The data of the concave aspherical surface front lens containing aspherical negative power bent moon concavees lens 3 of serial number 5 are shown in Table 2, whereink For quadratic surface coefficient,a 2、a 4、a 6、a 8For high order aspheric surface coefficient.
Table 2
In the present invention, actual facula uniform analog result of the optical system at focal point and distance focal point ± 100mm is such as Shown in Fig. 2, Fig. 3 and Fig. 4.Initial Gaussian light beam is shaped to energy after optical system of the invention it can be seen from Fig. 2-4 Measure the Flattened Gaussian Beams being evenly distributed, and the energy uniformity at the Flattened Gaussian Beams distance focal point ± 100mm after shaping Minimum 95%, reach as high as 98%.This shows that optical system of the invention has depth of focus long (± 100mm) and energy uniformity good The advantages of (being not less than 95%), compared to other laser beam homogenization methods, simple, easy to process, at low cost with structure, The feature that depth of focus is long, beam uniformity effect is good.

Claims (7)

1.一种基于非球面镜像差效应的长焦深激光光束均匀化光学系统，其特征在于所述光学系统包括光束均匀化非球面镜组和长焦深球面准直镜组，其中：1. a long focal depth laser beam homogenization optical system based on aspheric mirror aberration effect, it is characterized in that described optical system comprises beam homogenizing aspheric lens group and long focal depth spherical surface collimating lens group, wherein: 所述光束均匀化非球面镜组包括负光焦度弯月凸透镜、第一正光焦度弯月凸透镜、含有非球面的负光焦度弯月凹透镜、负光焦度双凹透镜、第二正光焦度弯月凸透镜；The light beam homogenization aspheric lens group includes a meniscus convex lens with negative refractive power, a first meniscus convex lens with positive refractive power, a concave meniscus lens with negative refractive power containing an aspheric surface, a double concave lens with negative refractive power, and a second positive refractive power. Meniscus convex lens; 所述长焦深球面准直镜组包括第三正光焦度弯月凸透镜、负光焦度凹透镜、正光焦度凸透镜、负光焦度弯月凹透镜；The telephoto depth spherical collimating lens group includes a third meniscus convex lens with positive refractive power, a concave lens with negative refractive power, a convex lens with positive refractive power, and a meniscus concave lens with negative refractive power; 所述负光焦度弯月凸透镜、第一正光焦度弯月凸透镜、含有非球面的负光焦度弯月凹透镜、负光焦度双凹透镜、第二正光焦度弯月凸透镜、第三正光焦度弯月凸透镜、负光焦度凹透镜、正光焦度凸透镜、负光焦度弯月凹透镜在光的传播方向上依次同轴排列。The negative refractive power meniscus convex lens, the first positive refractive power meniscus convex lens, the negative refractive power meniscus concave lens containing an aspheric surface, the negative refractive power biconcave lens, the second positive refractive power meniscus convex lens, the third positive light The power meniscus convex lens, the negative power concave lens, the positive power convex lens, and the negative power meniscus concave lens are coaxially arranged in turn in the light propagation direction. 2.根据权利要求1所述的基于非球面镜像差效应的长焦深激光光束均匀化光学系统，其特征在于所述负光焦度弯月凸透镜、第一正光焦度弯月凸透镜、含有非球面的负光焦度弯月凹透镜、负光焦度双凹透镜、第二正光焦度弯月凸透镜、第三正光焦度弯月凸透镜、负光焦度凹透镜、正光焦度凸透镜、负光焦度弯月凹透镜的材质均为F_SILICA并镀有增透膜，保证每个透镜的透过率为99.9%。2. The optical system for homogenizing a laser beam with a long focal depth based on aspheric mirror aberration effect according to claim 1, wherein the negative refractive power meniscus convex lens, the first positive refractive power meniscus convex lens, the Spherical Negative Power Meniscus Concave Lens, Negative Power Biconcave Lens, Second Positive Power Meniscus Convex Lens, Third Positive Power Meniscus Convex Lens, Negative Power Concave Lens, Positive Power Convex Lens, Negative Power The meniscus concave lenses are made of F_SILICA and coated with anti-reflection coating to ensure the transmittance of each lens is 99.9%. 3.根据权利要求1或2所述的基于非球面镜像差效应的长焦深激光光束均匀化光学系统，其特征在于所述负光焦度弯月凸透镜、第一正光焦度弯月凸透镜、含有非球面的负光焦度弯月凹透镜、负光焦度双凹透镜、第二正光焦度弯月凸透镜、第三正光焦度弯月凸透镜、负光焦度凹透镜、正光焦度凸透镜、负光焦度弯月凹透镜沿光的传播方向依次排列的18个镜面的面型、曲率半径及间隔分别为：凸球面、10.55mm、4.062mm；凹球面、7.809mm、6.069mm；凹球面、-26.507mm、4.606mm；凸球面、-11.379mm、10.620mm；凹非球面、-13.422mm、3.065mm；凸球面、-32.824mm、2.003mm；凹球面、-51.004mm，3.072mm；凹球面19.7mm、21.834mm；凹球面、-39.519mm、6.768；凸球面、-24.834mm、2.001mm；凸球面、27.599mm、8.845mm；凹球面、251.38mm、10.716mm；凹球面、-22.763mm、4.61mm；凸球面、-170.08mm、6.04mm；凹球面、-600.036mm、6.621mm；凸球面、-43.026mm、7.231mm；凹球面、-30.851mm、5.018mm；凸球面、-41.139mm。3. The long-focus depth laser beam homogenization optical system based on aspheric mirror image aberration effect according to claim 1 or 2 is characterized in that the negative refractive power meniscus convex lens, the first positive refractive power meniscus convex lens, Negative Power Meniscus Concave Lens, Negative Power Biconcave Lens, Second Positive Power Meniscus Convex Lens, Third Positive Power Meniscus Convex Lens, Negative Power Concave Lens, Positive Power Convex Lens, Negative Light Containing Aspheric Surface The surface type, curvature radius and interval of the 18 mirror surfaces of the meniscus concave lens arranged in sequence along the light propagation direction are: convex spherical surface, 10.55mm, 4.062mm; concave spherical surface, 7.809mm, 6.069mm; concave spherical surface, -26.507 mm, 4.606mm; convex spherical surface, -11.379mm, 10.620mm; concave aspheric surface, -13.422mm, 3.065mm; convex spherical surface, -32.824mm, 2.003mm; concave spherical surface, -51.004mm, 3.072mm; concave spherical surface 19.7mm , 21.834mm; concave spherical, -39.519mm, 6.768; convex spherical, -24.834mm, 2.001mm; convex spherical, 27.599mm, 8.845mm; concave spherical, 251.38mm, 10.716mm; concave spherical, -22.763mm, 4.61mm ; convex spherical surface, -170.08mm, 6.04mm; concave spherical surface, -600.036mm, 6.621mm; convex spherical surface, -43.026mm, 7.231mm; concave spherical surface, -30.851mm, 5.018mm; convex spherical surface, -41.139mm. 4.根据权利要求3所述的基于非球面镜像差效应的长焦深激光光束均匀化光学系统，其特征在于所述负光焦度弯月凸透镜、第一正光焦度弯月凸透镜、含有非球面的负光焦度弯月凹透镜、负光焦度双凹透镜、第二正光焦度弯月凸透镜、第三正光焦度弯月凸透镜、负光焦度凹透镜、正光焦度凸透镜、负光焦度弯月凹透镜之间的间隔介质为空气。4. The optical system for homogenizing a laser beam with a long focal depth based on aspheric mirror image aberration effect according to claim 3, wherein the negative refractive power meniscus convex lens, the first positive refractive power meniscus convex lens, the Spherical Negative Power Meniscus Concave Lens, Negative Power Biconcave Lens, Second Positive Power Meniscus Convex Lens, Third Positive Power Meniscus Convex Lens, Negative Power Concave Lens, Positive Power Convex Lens, Negative Power The space medium between the meniscus concave lenses is air. 5.根据权利要求1所述的基于非球面镜像差效应的长焦深激光光束均匀化光学系统，其特征在于所述光学系统的工作波长为1064nm和1080nm，焦深为±100mm，焦距为1000mm。5. The long focal depth laser beam homogenization optical system based on aspheric mirror aberration effect according to claim 1, it is characterized in that the working wavelength of described optical system is 1064nm and 1080nm, focal depth is ±100mm, focal length is 1000mm . 6.根据权利要求1或5所述的基于非球面镜像差效应的长焦深激光光束均匀化光学系统，其特征在于所述光学系统对高斯光束的均匀化程度不小于95%。6 . The optical system for homogenizing a laser beam with a long focal depth based on the aspheric mirror aberration effect according to claim 1 , wherein the degree of homogenization of the Gaussian beam by the optical system is not less than 95%. 7 . 7.根据权利要求3所述的基于非球面镜像差效应的长焦深激光光束均匀化光学系统，其特征在于所述含有非球面的负光焦度弯月凹透镜的前镜面的数据为：二次曲面系数k=-3.74，高次非球面系数a 2、a 4、a 6、a 8均为0。7. the long focal depth laser beam homogenization optical system based on aspheric mirror aberration effect according to claim 3, it is characterized in that the data of the front mirror surface of the negative refractive power meniscus concave lens that contains aspheric surface is: two The subsurface coefficient k =-3.74, and the high-order aspherical coefficients a 2 , a 4 , a 6 , and a 8 are all 0.
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CN110471144A (en) * 2019-08-07 2019-11-19 北京工业大学 A kind of myriawatt grade optical fiber connector of anaberration
CN114236859A (en) * 2021-12-17 2022-03-25 哈尔滨工业大学 Sheet light energy homogenization optical shaping system based on total reflection integral cavity
CN114951973A (en) * 2022-06-22 2022-08-30 桂林电子科技大学 Beam shaping method, system and application device of water jet guiding high-power laser

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