CN109494281A

CN109494281A - The anti-PID device of solar battery

Info

Publication number: CN109494281A
Application number: CN201811468764.8A
Authority: CN
Inventors: 陈五奎; 刘强; 陈磊; 徐文州; 石平
Original assignee: Leshan Topraycell Co Ltd
Current assignee: Leshan Topraycell Co Ltd
Priority date: 2018-12-03
Filing date: 2018-12-03
Publication date: 2019-03-19
Anticipated expiration: 2038-12-03
Also published as: CN109494281B

Abstract

The invention discloses a solar cell anti-PID device which can avoid gas entrapment and at the same time ensure that the mixed gas is evenly distributed around the surface of the silicon wafer. The solar cell anti-PID device includes a nitrogen and oxygen one-way mixing device, a double oxygen generator, a gas mixing and homogenizing device and a gas pipe; the nitrogen and oxygen one-way mixing device is communicated with the air inlet of the double oxygen generator; The gas mixing and homogenizing device is communicated with the gas outlet of the hydrogen peroxide generator through a gas pipe. The solar cell anti-PID device can effectively avoid the reverse flow and serial flow of the gas; at the same time, it can ensure that the mixed gas is evenly covered around the surface of the silicon wafer, and can be applied to silicon wafers of different lengths; it can effectively reduce the production cost.

Description

The anti-PID device of solar battery

Technical field

The present invention relates to the anti-field PID of solar battery, especially a kind of anti-PID device of solar battery.

Background technique

Well-known: the full name in English of the PID effect of solar battery is: Potential Induced Degradation, i.e. potential induction attenuation.SunPower company, the U.S. finds for the first time and proposes PID effect, finger assembly within 2005 For a long time in high voltage operation, there are leakage currents between cover-plate glass, encapsulating material, frame, and a large amount of accumulations are in cell piece Surface causes fill factor, short circuit current, open-circuit voltage to reduce, makes component so that the passivation effect on cell piece surface deteriorates Design standard can be lower than, but this decaying is reversible.

Therefore solar panel needs to carry out it anti-PID processing, so that it is existing to avoid solar panel from PID occur As；Then the existing anti-PID equipment of solar panel needs mix by oxygen and nitrogen to be produced by ozone generator Ozone is covered on silicon chip surface by the mixed gas of ozone, oxygen and nitrogen, guarantees that silicon chip surface forms the two of high-purity compact Silicon oxide layer, thickness are imitated probably in 10-20nm to solve potential inducing caused by the sodium ion that glass generates in battery component It answers.

The existing anti-PID device of solar battery is easy to appear following problems:

1, the mixing arrangement of existing nitrogen and oxygen can not adjust in real time the flow of nitrogen and oxygen, while can not prevent Oxygen and nitrogen are collaborated, while being easy to appear refluence phenomenon.

2, mixed gas is directly passed directly to silicon chip surface, so that the gas that silicon chip surface touches is uneven It is even, to not can guarantee the silicon dioxide layer that silicon chip surface forms high-purity compact.

Summary of the invention

It can be avoided gas technical problem to be solved by the invention is to provide one kind to collaborate, while can guarantee gaseous mixture Body is evenly distributed on the anti-PID device of the solar battery around silicon chip surface.

The technical solution adopted by the present invention to solve the technical problems is: the anti-PID device of solar battery, including nitrogen and The unidirectional mixing arrangement of oxygen, dioxygen generator, gas mixing homogenizer and tracheae；

The nitrogen and the unidirectional mixing arrangement of oxygen are connected to the air inlet of dioxygen generator；The gas mixing is disguised It sets and is connected to by tracheae with the gas outlet of dioxygen generator；

The nitrogen and the unidirectional mixing arrangement of oxygen include gas mixing ontology；The gas mixing ontology has both ends equal The inner cavity of opening；

One end of the gas mixing ontology is provided with the first sealing plate, and the other end is provided with the second sealing plate；The gas The cavity top that body hybrid ontology has is provided with first level partition, and lower part is provided with the second horizontal baffle；First water Oxygen inlet chamber is formed between flat partition board and the top of gas mixing ontology cavity；Two horizontal baffle and gas mixing ontology Nitrogen inlet chamber is formed between the bottom of cavity；

It is provided with the nitrogen inlet duct being connected to nitrogen inlet chamber on first sealing plate, is set on the nitrogen inlet duct It is equipped with the first check valve and first flow regulating valve；

The gas mixing body upper surface is provided with the oxygen intake pipe being connected to oxygen inlet chamber；The oxygen air inlet Second one-way valve and second flow regulating valve are provided on pipe；

The first air hole is provided on the first level partition；The lower surface of the first level partition is provided with along cross To equally distributed first vertical baffle；The second ventilation mouth is provided on second horizontal baffle；Second horizontal baffle Upper surface be provided with transversely equally distributed second vertical baffle；

The second vertical baffle on second horizontal baffle be located on first level partition adjacent two piece first vertically every The underface in gap between plate；

Outlet nozzle is provided on second sealing plate；Air-distributing tube is connected on the outlet nozzle；The one of the air-distributing tube End is connected to outlet nozzle, and the other end is provided with sealing plate；Air distribution plate is provided in the air-distributing tube；It is provided on the sealing plate The escape pipe being connected to air-distributing tube；Third check valve and third flow control valve are provided on the escape pipe；

The gas mixing homogenizer includes homogenizing main casing, homogenizing region adjusting body and part flow arrangement；It is described equal Change the inner cavity that main casing has lower openings, is provided with air inlet pipe at the top of the homogenizing main casing；Under the homogenizing main casing Portion edge is provided with flange；

The inner cavity top of the homogenizing main casing is back taper cavity, and lower part is rectangular cavities；In the back taper cavity It is provided at least two layers of first homogenizing plates；Every layer of first homogenizing plate includes at least two piece of first homogenizing plate, and is transversely uniformly divided Cloth；The first homogenizing plate of adjacent two layers is alternately distributed, i.e., the gap between adjacent two piece of first homogenizing plate in upper layer is located at lower layer first The surface of homogenizing plate；

There are at least two layers of second homogenizing plates in the rectangular cavities；Every layer of second homogenizing plate includes at least two piece second equal Flowing plate, and be transversely uniformly distributed；The second homogenizing plate of adjacent two layers is alternately distributed, i.e., between adjacent two piece of second homogenizing plate in upper layer Gap be located at the surface of the second homogenizing plate of lower layer；

The homogenizing region adjusts body center and is provided with installation cavity；The both ends that the homogenizing region adjusts body are all provided with It is equipped with adjusting cavity；Snorkel is provided with above the adjusting cavity；

The homogenizing region adjusts body and is sleeved on homogenizing main casing, and the homogenizing main casing passes through installation cavity；It is described Installation cavity is matched with the lower end for being homogenized main casing；

The end face and lower surface of the adjusting cavity have opening, and one end of the adjusting cavity is provided with side sealing plate；Institute It states and is provided at least two layers lateral homogenizing plate in adjusting cavity；The center of the adjusting cavity is provided with lateral screw rod；

The driving motor of driving screw rod rotation is provided on the side sealing plate；It is slidably fitted in the adjusting cavity Change adjustable plate；It is provided on the homogenizing adjustable plate and the matched perforation of homogenizing plate；The homogenizing plate passes through homogenizing adjustable plate, institute It states screw rod and passes through homogenizing adjustable plate, and be threadedly engaged with homogenizing adjustable plate；

The snorkel is connected to by gas-guide tube with part flow arrangement, and the air inlet pipe is connected to stream device；The snorkel Solenoid valve is provided on gas-guide tube between part flow arrangement；

The part flow arrangement is connected to by tracheae with the gas outlet of dioxygen generator；The escape pipe and dioxygen generator Air inlet connection.

Further, the lower end two sides of the homogenizing adjustable plate are provided with convex block；The side wall upper and lower of the adjusting cavity It is provided with and the matched horizontal concrete chute of convex block；The convex block is slidably mounted in horizontal concrete chute.

Preferably, the part flow arrangement uses four-way pipe.

Further, first homogenizing plate is trapezoidal plate, and second homogenizing plate is rectangular slab.

Further, the bottom of the rectangular cavities is connected to the bottom of adjusting cavity.

Further, the side wall upper part of the gas mixing chamber body is provided with and first level partition matched first Slot, the lower sidewall of the gas mixing chamber body are provided with and matched second slot of the second horizontal baffle；Described One horizontal baffle is mounted in the first slot；Second horizontal baffle is mounted in the second slot.

Further, between first sealing plate and gas mixing ontology and the second sealing plate and gas mixing ontology Between be provided with seal washer.

Further, at least two pieces of air distribution plates being parallel to each other, the air distribution plate is provided in the air-distributing tube vertically to set It sets.

The beneficial effects of the present invention are: the anti-PID device of solar battery of the present invention has the advantage that

1, due to nitrogen and the unidirectional mixing arrangement of oxygen, the first check valve and first-class is provided on nitrogen inlet duct Adjustable valve；Second one-way valve and second flow regulating valve are provided on oxygen intake pipe；It is arranged on escape pipe simultaneously There are third check valve and third flow control valve；So as to effectively avoid refluence and the crossfire of gas；

Secondly as forming oxygen inlet chamber between the first level partition and the top of gas mixing ontology cavity； Nitrogen inlet chamber is formed between two horizontal baffle and the bottom of gas mixing ontology cavity；It is set on the first level partition It is equipped with the first air hole；The lower surface of the first level partition is provided with transversely equally distributed first vertical baffle；Institute It states and is provided with the second ventilation mouth on the second horizontal baffle；The upper surface of second horizontal baffle, which is provided with, to be transversely uniformly distributed The second vertical baffle；The second vertical baffle on second horizontal baffle is located on first level partition adjacent two piece first The underface in gap between vertical baffle；Therefore enable to oxygen and nitrogen first level partition and the second horizontal baffle it Between be sufficiently mixed uniformly；And it can be avoided gas backflow.

2, due to gas mixing homogenizer, it is provided with two layers of homogenizing plate in homogenizing main casing, so as to by equal Flowing plate makes the gas flowed out out of homogenizing main casing be evenly distributed in the opening for being homogenized main casing lower end；So as to make Mixed gas can and be distributed in around silicon chip surface.

Simultaneously as gas mixing homogenizer, which is additionally provided with homogenizing region, adjusts body, body tune is adjusted by homogenizing region Throttle body is homogenized region, so as to be suitable for the silicon wafer of different length；Therefore it can be improved and set for the anti-PID of solar battery The application range of standby gas mixing homogenizer.

Thereby it is ensured that mixed gas uniform fold is around silicon chip surface, while different length can be suitable for Silicon wafer；Production cost can be effectively reduced.

Detailed description of the invention

Fig. 1 is the perspective view of the anti-PID device of solar battery in the embodiment of the present invention；

Fig. 2 is the main view of the anti-PID device of solar battery in the embodiment of the present invention；

Fig. 3 is the top view of the anti-PID device of solar battery in the embodiment of the present invention；

Fig. 4 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention Perspective view of the explosion；

Fig. 5 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention Perspective view；

Fig. 6 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention Main view；

Fig. 7 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention Top view；

Fig. 8 is the A-A cross-sectional view of Fig. 7；

Fig. 9 is the B-B cross-sectional view of Fig. 6；

Figure 10 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention Perspective view of the explosion；

Figure 11 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention Perspective view；

Figure 12 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention Main view；

Figure 13 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention Top view；

Figure 14 is the nitrogen and the unidirectional mixing arrangement of oxygen that the anti-PID equipment of solar battery is used in the embodiment of the present invention Bottom view；

Figure 15 is the C-C cross-sectional view of Figure 12；

Figure 16 is the D-D cross-sectional view of Figure 13；

It is indicated in figure: 100- nitrogen and the unidirectional mixing arrangement of oxygen, 11- gas mixing ontology, the first sealing plate of 12-, 13- Second sealing plate, 14- nitrogen inlet duct, the first check valve of 15-, 151- first flow regulating valve, 16- oxygen intake pipe, 17- Two check valves, 171- second flow regulating valve, 18- air-distributing tube, 19- sealing plate, 110- escape pipe, 111- third check valve, 1111- third flow control valve；112- first level partition, the first air hole of 113-, the first vertical baffle of 114-, 115- second Horizontal baffle, the second vertical baffle of 116-, the second air hole of 117-, 118- air distribution plate；200- ozone generator；

300- gas mixing homogenizer；31- homogenizing main casing, 32- air inlet pipe, 33- flange, the first homogenizing plate of 34-, The second homogenizing plate of 35-, 36- homogenizing region adjusting body, 37- homogenizing plate, the side 38- sealing plate, 39- driving motor, 310- screw rod, 311- homogenizing adjustable plate, 312- snorkel, 313- part flow arrangement, 314- gas-guide tube, 315- solenoid valve, 316- back taper cavity, 317- central through hole, 318- perforation；400- tracheae.

Specific embodiment

Present invention will be further explained below with reference to the attached drawings and examples.

As shown in Fig. 1 to Figure 16, the anti-PID device of solar battery of the present invention, including nitrogen and oxygen are unidirectionally mixed It attaches together and sets 100, dioxygen generator 200, gas mixing homogenizer 300 and tracheae 400；

The nitrogen and the unidirectional mixing arrangement 100 of oxygen are connected to the air inlet 201 of dioxygen generator 200；The gas Mixing homogenizer 300 is connected to by tracheae 400 with the gas outlet 202 of dioxygen generator 200；

The nitrogen and the unidirectional mixing arrangement 100 of oxygen include gas mixing ontology 11；The gas mixing ontology 11 has There is the inner cavity that both ends are open；

One end of the gas mixing ontology 11 is provided with the first sealing plate 12, and the other end is provided with the second sealing plate 13； The cavity top that the gas mixing ontology 11 has is provided with first level partition 112, and lower part is provided with the second horizontal baffle 115；Oxygen inlet chamber is formed between the top of 11 cavity of the first level partition 112 and gas mixing ontology；Two water Nitrogen inlet chamber is formed between the bottom of 11 cavity of flat partition board 115 and gas mixing ontology；

The nitrogen inlet duct 14 being connected to nitrogen inlet chamber, the nitrogen inlet duct are provided on first sealing plate 12 The first check valve 15 and first flow regulating valve 151 are provided on 14；

11 upper surface of gas mixing ontology is provided with the oxygen intake pipe 16 being connected to oxygen inlet chamber；The oxygen Second one-way valve 17 and second flow regulating valve 171 are provided in air inlet pipe 16；

The first air hole 113 is provided on the first level partition 112；The lower surface of the first level partition 112 It is provided with transversely equally distributed first vertical baffle 114；The second ventilation mouth is provided on second horizontal baffle 115 117；The upper surface of second horizontal baffle 115 is provided with transversely equally distributed second vertical baffle 116；

The second vertical baffle 116 on second horizontal baffle 115 is located on first level partition 112 adjacent two piece The underface in gap between one vertical baffle 114；

Outlet nozzle 131 is provided on second sealing plate 13；Air-distributing tube 118 is connected on the outlet nozzle 131；It is described One end of air-distributing tube 118 is connected to outlet nozzle 131, and the other end is provided with sealing plate 19；Gas distribution is provided in the air-distributing tube 118 Plate 118；The escape pipe 110 being connected to air-distributing tube 118 is provided on the sealing plate 19；Is provided on the escape pipe 110 Three check valves 111 and third flow control valve 1111；

The gas mixing homogenizer 300 includes homogenizing main casing 31, homogenizing region adjusting body 36 and part flow arrangement 313；The homogenizing main casing 31 has the inner cavity of lower openings, is provided with air inlet pipe 32 at the top of the homogenizing main casing 31；Institute The lower edge for stating homogenizing main casing 31 is provided with flange 33；

The inner cavity top of the homogenizing main casing 31 is back taper cavity 316, and lower part is rectangular cavities；The back taper chamber At least two layers of first homogenizing plates 34 are provided in body 316；Every layer of first homogenizing plate 34 includes at least two piece of first homogenizing plate 34, and Transversely it is uniformly distributed；The first homogenizing plate of adjacent two layers 34 is alternately distributed, i.e., between adjacent two piece of first homogenizing plate 34 in upper layer Gap is located at the surface of the first homogenizing plate of lower layer 34；

There are at least two layers of second homogenizing plates 35 in the rectangular cavities；Every layer of second homogenizing plate 35 includes at least two pieces the Two homogenizing plates 35, and be transversely uniformly distributed；The second homogenizing plate of adjacent two layers 35 is alternately distributed, i.e., upper layer it is adjacent two piece second Gap between flowing plate 35 is located at the surface of the second homogenizing plate of lower layer 35；

The homogenizing region adjusts 36 center of body and is provided with installation cavity 361；The homogenizing region adjusts body 36 Both ends are provided with adjusting cavity 362；Snorkel 312 is provided with above the adjusting cavity 362；

The homogenizing region adjusts body 36 and is sleeved on homogenizing main casing 31, and the homogenizing main casing 31 passes through installation cavity 361；The installation cavity 361 is matched with the lower end for being homogenized main casing 31；

The end face and lower surface of the adjusting cavity 362 have opening, and one end of the adjusting cavity 362 is provided with side sealing Plate 38；At least two layers lateral homogenizing plate 37 is provided in the adjusting cavity 362；The center of the adjusting cavity 362 is arranged There is lateral screw rod 310；

The driving motor 39 that driving screw rod 310 rotates is provided on the side sealing plate 38；It is sliding in the adjusting cavity 362 It is dynamic that homogenizing adjustable plate 311 is installed；It is provided on the homogenizing adjustable plate 311 and the matched perforation 318 of homogenizing plate 37；It is described equal Flowing plate 37 passes through homogenizing adjustable plate 311, and the screw rod 310 passes through homogenizing adjustable plate 311, and matches with homogenizing 311 screw thread of adjustable plate It closes；

The snorkel 312 is connected to by gas-guide tube 314 with part flow arrangement 313, and the air inlet pipe 32 connects with stream device 313 It is logical；Solenoid valve 315 is provided on gas-guide tube 314 between the snorkel 312 and part flow arrangement 313；

The part flow arrangement 313 is connected to by tracheae 400 with the gas outlet 202 of dioxygen generator 200；The escape pipe 110 are connected to the air inlet 201 of dioxygen generator 200.

During the work time:

Nitrogen and oxygen are mixed in nitrogen and the unidirectional mixing arrangement 100 of oxygen first；By pure oxygen feeder It is connected to oxygen intake pipe 16, purity nitrogen feeder is connected to nitrogen inlet duct 14；When work, first flow valve 151 is opened With second flow valve 171；Then it is supplied by pure oxygen feeder into oxygen inlet chamber；Purity nitrogen feeder is to nitrogen air inlet Intracavitary gas supply；Oxygen flows to first level by the first air hole 113 on first level partition by the oxygen inlet chamber on top Cavity between partition 112 and the second horizontal baffle 115；Nitrogen passes through the second horizontal baffle 115 by the nitrogen inlet chamber of lower part On the second air hole 117 flow to the cavity between first level partition 112 and the second horizontal baffle 115；

Due to being provided with the first air hole 113 on the first level partition 112；Under the first level partition 112 Surface is provided with transversely equally distributed first vertical baffle 114；It is ventilative that second is provided on second horizontal baffle 115 Mouth 117；The upper surface of second horizontal baffle 115 is provided with transversely equally distributed second vertical baffle 116；Described The second vertical baffle 116 on two horizontal baffles 115 is located at adjacent two piece of first vertical baffle 114 on first level partition 112 Between gap underface；So that the chamber of nitrogen and oxygen between first level partition 112 and the second horizontal baffle 115 It is uniformly mixed in vivo.

It is entered in air-distributing tube 18 after oxygen and nitrogen mixing by the outlet nozzle 131 on the second sealing plate 13, passes through cloth Air distribution plate 118 in inflator 18, so that uniform gas flow, is then discharged mixed gas by the escape pipe 110 on sealing plate 19, By going out, the third flow valve 111 on pipe 110 adjusts flow, avoids gas backstreaming by third check valve 1111.

Then, entered in ozone generator 200 by the mixed gas that escape pipe 110 is discharged and prepare ozone, obtain ozone, The mixed gas of oxygen and nitrogen.

Finally, the mixed gas of ozone, oxygen and nitrogen is passed into mixed gas homogenizer 300 by tracheae 400 It is interior, so that gas is homogenised for., tracheae 400 is connected to part flow arrangement 13 first；Then anti-PID processing is carried out as needed The size of silicon wafer determines a need for starting homogenizing region adjusting body 36 and the region of gas homogenization is adjusted；If homogenizing The lower end of main casing 31 is enough to cover silicon wafer；Then close solenoid valve 315；Start feeder and gas is fed to homogenizing main casing In 31, then make gas in homogenizing main casing by the first homogenizing plate 34 and the second homogenizing plate 35 that are arranged in homogenizing main casing 31 It is uniformly distributed at 31 lower ending opening of body, so that mixed gas is evenly distributed in around silicon wafer.

When the lower end of homogenizing main casing 31 cannot cover silicon wafer；Then open solenoid valve 315；Starting feeder supplies gas Enter to homogenizing main casing 31 and homogenizing region and adjust in body 36, then starts driving motor 39 and driving motor 39 is made to drive screw rod 310 rotations, so that position of the homogenizing adjustable plate 311 in adjusting cavity 362 is adjusted, so that adjusting cavity 362 has the region of gas Silicon wafer can be covered with the lower end area of homogenizing main casing 31.

The mixed gas in homogenizing main casing 31 is entered, 34 He of the first homogenizing plate being arranged in homogenizing main casing 31 is passed through Second homogenizing plate 35 is uniformly distributed gas at homogenizing 31 lower ending opening of main casing, adjusts the mixed of body 36 into homogenizing region Gas is closed, when coming out by the opening that the homogenizing plate 37 in homogenizing region adjusting body 36 makes gas adjust 36 lower end of body from region It is uniformly distributed；So that mixed gas and be distributed in around silicon wafer.

In conclusion the anti-PID device of solar battery of the present invention has the advantage that

For the ease of installation, simplify structure, further, the side wall upper part of 11 inner cavity of gas mixing ontology is provided with With matched first slot of first level partition 112, the lower sidewall of 11 inner cavity of gas mixing ontology is provided with and second Matched second slot of horizontal baffle 115；The first level partition 112 is mounted in the first slot；Described second it is horizontal every Plate 115 is mounted in the second slot.

In order to enable equipment better tightness, further, between first sealing plate 12 and gas mixing ontology 11 And second be provided with seal washer between sealing plate 13 and gas mixing ontology 11.

In order to enable uniform gas flow, further, it is provided at least two pieces in the air-distributing tube 18 and is parallel to each other Air distribution plate 118, the air distribution plate 118 are vertically arranged.

It is slidably installed in adjusting cavity 362 for the ease of homogenizing adjustable plate 311, further, the homogenizing adjustable plate 311 Lower end two sides be provided with convex block；The side wall upper and lower of the adjusting cavity 362 is provided with and the matched horizontal concrete chute of convex block 363；The convex block is slidably mounted in horizontal concrete chute 363.

It in order to simplify structure, is easily installed, reduces cost, it is preferred that the part flow arrangement 313 uses four-way pipe.

For the ease of realizing the water conservancy diversion to air-flow, further, as shown in figure 15, first homogenizing plate 34 is trapezoidal Plate, second homogenizing plate 35 are rectangular slab；And it is arranged according to arrangement as shown in figure 15.

In order to guarantee that gas can be evenly distributed in around silicon chip surface, further, the bottom of the rectangular cavities Portion is connected to the bottom of adjusting cavity 362.

Claims

1. solar cell anti-PID device, is characterized in that: comprise nitrogen and oxygen one-way mixing device (100), double oxygen generator (200), gas mixing and homogenizing device (300) and trachea (400);

The nitrogen and oxygen one-way mixing device (100) is communicated with the air inlet (201) of the hydrogen peroxide generator (200); the gas mixing and homogenizing device (300) is connected to the hydrogen peroxide generator ( The air outlet (202) of 200) is communicated;

The nitrogen and oxygen one-way mixing device (100) includes a gas mixing body (11); the gas mixing body (11) has an inner cavity with both ends open;

One end of the gas mixing body (11) is provided with a first sealing plate (12), and the other end is provided with a second sealing plate (13); the upper part of the cavity of the gas mixing body (11) is provided with a first horizontal A separator (112), a second horizontal separator (115) is arranged at the lower part; an oxygen gas inlet cavity is formed between the first horizontal separator (112) and the top of the cavity of the gas mixing body (11); the two A nitrogen gas inlet cavity is formed between the horizontal partition plate (115) and the bottom of the cavity of the gas mixing body (11);

The first sealing plate (12) is provided with a nitrogen gas inlet pipe (14) communicating with the nitrogen gas inlet chamber, and a first one-way valve (15) and a first flow regulator are provided on the nitrogen gas inlet pipe (14). valve (151);

The upper surface of the gas mixing body (11) is provided with an oxygen gas inlet pipe (16) communicating with the oxygen gas inlet chamber; the oxygen gas inlet pipe (16) is provided with a second one-way valve (17) and a second flow regulator valve (171);

The first horizontal partition plate (112) is provided with first ventilation holes (113); the lower surface of the first horizontal partition plate (112) is provided with first vertical partition plates (114) uniformly distributed in the lateral direction ; The second horizontal partition plate (115) is provided with a second ventilation port (117); the upper surface of the second horizontal partition plate (115) is provided with a second vertical partition plate (116) uniformly distributed along the transverse direction );

The second vertical partition plate (116) on the second horizontal partition plate (115) is located directly below the gap between the two adjacent first vertical partition plates (114) on the first horizontal partition plate (112). ;

An air outlet (131) is arranged on the second sealing plate (13); an air distribution cylinder (118) is connected to the air outlet (131); one end of the air distribution cylinder (118) is communicated with the air outlet (131). , the other end is provided with a sealing plate (19); the air distribution cylinder (118) is provided with an air distribution plate (118); the sealing plate (19) is provided with an air outlet pipe (110) that communicates with the air distribution cylinder (118). ); the air outlet pipe (110) is provided with a third one-way valve (111) and a third flow regulating valve (1111);

The gas mixing and homogenizing device (300) includes a homogenizing main casing (31), a homogenizing area adjusting body (36) and a flow dividing device (313); the homogenizing main casing (31) has an inner casing with a lower opening. A cavity, an air inlet pipe (32) is provided on the top of the main homogenization shell (31); a flange (33) is provided on the lower edge of the main homogenization shell (31);

The upper part of the inner cavity of the homogenizing main casing (31) is an inverted conical cavity (316), and the lower part is a rectangular cavity; at least two layers of first flow equalization are arranged in the inverted conical cavity (316). Plates (34); each layer of the first equalizing plates (34) includes at least two first equalizing plates (34), which are evenly distributed in the lateral direction; the adjacent two layers of the first equalizing plates (34) are alternately distributed, namely The gap between the two adjacent first equalizing plates (34) on the upper layer is located directly above the first equalizing plates (34) in the lower layer;

The rectangular cavity is provided with at least two layers of second equalizing plates (35); each layer of second equalizing plates (35) includes at least two second equalizing plates (35), which are evenly distributed in the lateral direction; The second equalizing plates (35) of the layers are alternately distributed, that is, the gap between the two adjacent second equalizing plates (35) of the upper layer is located directly above the second equalizing plates (35) of the lower layer;

An installation through cavity (361) is provided at the center of the homogenization area adjustment body (36); adjustment cavities (362) are provided at both ends of the homogenization area adjustment body (36); the adjustment cavity (362) A vent pipe (312) is provided above;

The homogenization area adjusting body (36) is sleeved on the homogenization main casing (31), and the homogenization main casing (31) passes through the installation through cavity (361); the installation through cavity (361) is connected with The lower end of the homogenizing main casing (31) is matched;

The end surface and the lower surface of the adjustment cavity (362) have openings, and one end of the adjustment cavity (362) is provided with a side sealing plate (38); at least two layers of lateral flow equalization are arranged in the adjustment cavity (362) a plate (37); a horizontal screw rod (310) is arranged at the center of the adjustment cavity (362);

A drive motor (39) for driving a screw rod (310) to rotate is provided on the side sealing plate (38); a homogenization adjustment plate (311) is slidably installed in the adjustment cavity (362); the homogenization adjustment plate (311) is provided with perforations (318) matched with the equalizing plate (37); the equalizing plate (37) passes through the homogenizing adjustment plate (311), and the screw rod (310) passes through the equalizing adjustment plate (311) a plate (311), and is screwed with the homogenization adjustment plate (311);

The ventilation pipe (312) is communicated with the shunt device (313) through the air duct (314), the air intake pipe (32) is communicated with the flow device (313); the ventilation pipe (312) is connected with the shunt device (313) A solenoid valve (315) is arranged on the air conduit (314) between the two;

The shunt device (313) is communicated with the air outlet (202) of the hydrogen peroxide generator (200) through the trachea (400); the air outlet pipe (110) is connected to the air inlet (201) of the hydrogen peroxide generator (200). Connected.

2. The solar cell anti-PID device according to claim 1, characterized in that: bumps are provided on both sides of the lower end of the homogenization adjustment plate (311); the upper and lower sides of the sidewall of the adjustment cavity (362) A transverse sliding slot (363) matching the projection is provided; the projection is slidably installed in the transverse sliding slot (363).

3. The solar cell anti-PID device according to claim 2, wherein the shunt device (313) adopts a four-way pipe.

4. The solar cell anti-PID device according to claim 3, characterized in that: the first equalizing plate (34) is a trapezoidal plate, and the second equalizing plate (35) is a rectangular plate.

5. The solar cell anti-PID device according to claim 4, wherein the bottom of the rectangular cavity communicates with the bottom of the adjustment cavity (362).

6. The solar cell anti-PID device according to claim 1, characterized in that: the upper part of the side wall of the inner cavity of the gas mixing body (11) is provided with a first slot matching the first horizontal partition plate (112). , the lower part of the side wall of the inner cavity of the gas mixing body (11) is provided with a second slot matching the second horizontal partition (115); the first horizontal partition (112) is installed in the first slot ; The second horizontal partition plate (115) is installed in the second slot.

7. The solar cell anti-PID device according to claim 6, characterized in that: between the first sealing plate (12) and the gas mixing body (11) and between the second sealing plate (13) and the gas mixing body ( 11) There are sealing gaskets between them.

8. The solar cell anti-PID device according to claim 7, wherein at least two air distribution plates (118) parallel to each other are arranged in the air distribution cylinder (18), and the air distribution plates (118) Vertical setting.