CN109323781A - A method for fabricating flexible self-powered integrated pressure sensing arrays - Google Patents
A method for fabricating flexible self-powered integrated pressure sensing arrays Download PDFInfo
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- CN109323781A CN109323781A CN201810952194.3A CN201810952194A CN109323781A CN 109323781 A CN109323781 A CN 109323781A CN 201810952194 A CN201810952194 A CN 201810952194A CN 109323781 A CN109323781 A CN 109323781A
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- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000003491 array Methods 0.000 title 1
- 239000003990 capacitor Substances 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims description 59
- 229920006254 polymer film Polymers 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 13
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 12
- 230000027756 respiratory electron transport chain Effects 0.000 claims description 10
- 238000004528 spin coating Methods 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- JTCFNJXQEFODHE-UHFFFAOYSA-N [Ca].[Ti] Chemical compound [Ca].[Ti] JTCFNJXQEFODHE-UHFFFAOYSA-N 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 239000002042 Silver nanowire Substances 0.000 claims description 6
- 239000002041 carbon nanotube Substances 0.000 claims description 6
- 239000008367 deionised water Substances 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 6
- 235000019441 ethanol Nutrition 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 4
- 229910021389 graphene Inorganic materials 0.000 claims description 4
- XDXWNHPWWKGTKO-UHFFFAOYSA-N 207739-72-8 Chemical group C1=CC(OC)=CC=C1N(C=1C=C2C3(C4=CC(=CC=C4C2=CC=1)N(C=1C=CC(OC)=CC=1)C=1C=CC(OC)=CC=1)C1=CC(=CC=C1C1=CC=C(C=C13)N(C=1C=CC(OC)=CC=1)C=1C=CC(OC)=CC=1)N(C=1C=CC(OC)=CC=1)C=1C=CC(OC)=CC=1)C1=CC=C(OC)C=C1 XDXWNHPWWKGTKO-UHFFFAOYSA-N 0.000 claims description 3
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 3
- 239000002390 adhesive tape Substances 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims description 3
- 229920005839 ecoflex® Polymers 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 229920002521 macromolecule Polymers 0.000 claims description 3
- 239000002105 nanoparticle Substances 0.000 claims description 3
- 239000002861 polymer material Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 229910001887 tin oxide Inorganic materials 0.000 claims description 3
- 238000010146 3D printing Methods 0.000 claims description 2
- 230000005525 hole transport Effects 0.000 claims description 2
- 238000000967 suction filtration Methods 0.000 claims description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 claims 8
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims 8
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims 8
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims 8
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims 8
- 230000005611 electricity Effects 0.000 claims 1
- 238000006116 polymerization reaction Methods 0.000 claims 1
- 238000005286 illumination Methods 0.000 abstract description 3
- 238000011031 large-scale manufacturing process Methods 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 229920001225 polyester resin Polymers 0.000 description 4
- 239000004645 polyester resin Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 239000011149 active material Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- RFVNOJDQRGSOEL-UHFFFAOYSA-N 2-hydroxyethyl octadecanoate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OCCO RFVNOJDQRGSOEL-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 229950007687 macrogol ester Drugs 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920002627 poly(phosphazenes) Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/10—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
本发明实施例公开了一种新型的自供能的柔性压力传感器阵列制备方法，其可以利用交叉电极形成电容式传感器阵列，并将太阳能电池柔性化集成到传感器阵列上，集成太阳能之后的传感器性能基本保持不变，在传感器和太阳能电池中间还增加了一个柔性电容器。本发明实施例的方法制备的传感器阵列可以在光照下正常工作，并且能够侦测出最小1Pa的压强，具有很好的线性度。并且该方法简单操作，成本较低，适合大规模生产化的需要。
The embodiment of the present invention discloses a novel method for preparing a self-powered flexible pressure sensor array, which can use cross electrodes to form a capacitive sensor array, and flexibly integrate solar cells into the sensor array. The sensor performance after integrating solar energy is basically Staying the same, a flexible capacitor was added between the sensor and the solar cell. The sensor array prepared by the method of the embodiment of the present invention can work normally under illumination, and can detect a pressure of a minimum of 1 Pa, and has good linearity. In addition, the method has simple operation and low cost, and is suitable for the needs of large-scale production.
Description
Technical field
The present invention relates to solar energy and sensor fields, prepare flexible self energizing integrated pressure biography more particularly, to a kind of
Feel the method for array.
Background technique
With between computer technology, the communication technology and sensing technology infiltration and intelligent terminal it is increasingly general
And strong technical support and vast market prospect are provided for the research of wearable sensor, application field is related to
Sport, game, medical treatment and scientific research etc..The wearable electronic for having tactilely-perceptible function is current one of research hotspot,
So the research and development of flexible sensor are particularly important with evolution.
Traditional sensor, since their rigidity can not capture analyte, signal conversion is very poor.In contrast,
Sensor flexible can more effectively capture object, and generate higher-quality signal.The research and development of flexible sensor need
It does and breaks through in the design of material, including the selection and synthesis of active material and conductive material and flexible substrate.For rigidity
Material, once it is thinning and form nanostructure, so that it may deformation occurs.In emerging flexible sensor material, a wiener
Rice material (such as nano wire, nanotube) and two-dimension nano materials (such as graphene) can also be brought as active material.And
Have highly sensitive and satisfactory electrical conductivity non-transition-metal oxide (such as ZnO, SnO2、Ln2O3And Ga2O3Deng) can also be brought
As active material.
CNTs(carbon nanotube) and AgNWs(silver nanowires) be all monodimension nanometer material, their electric conductivity, draftability,
Transparency is all very high.Different places is the reticular structure that CNTs is hexagon, and AgNWs is simple wire-like knot
Structure, this both will lead in performance somewhat difference, but for being applied on flexible sensor electrode, both
It can.
For base part, including polyimides (PI), polyether-ketone, polyether sulfone (PES), polycarbonate, Macrogol Ester
(PEN), polyester resin (PET), dimethyl silicone polymer (PDMS) etc. can all be used as preparing sensor substrate.Material it is heat-resisting
Property, chemical resistance, the transparency and the flexible practical application that all should be taken into account sensor.
The wearable electronic product of a new generation is required that wearing can be carried out on soft human body surface skin and can
To be stretched (average elongation is from 3% to 55%).Wearable electronic based on fiber also has vast platform, because
It has it is soft, can deformation, the characteristics such as ventilative, durable, washable, therefore also can be the important of the following flexible wearable electronic product
Use material.In addition, nano science and nanotechnology accelerate the miniaturization of electronic equipment in the fast development of last decade.Pass through
By the fusion of the technologies such as textile technology and electro-engineering, the advantageous properties of the two are combined, make modern electronic product
Have quickly response and the properties such as computing capability, flexible wearable, stretchable.
The work of general flexible sensor requires a stable power supply to provide energy, these power supplys are typically rigid
Property, and it is unsatisfactory for the demand of overall flexibility, needless to say health detecting etc. needs the device of high flexibility.
Summary of the invention
An object of the present invention is to provide a kind of pliable pressure sensor array preparation method of novel self energizing.
In one embodiment, a kind of method for preparing flexible self energizing integrated pressure sensor array is provided.This method packet
It includes: obtaining flexible base material, the flexible base material includes PDMS, PI, Ecoflex or PET；By the flexible substrates material
Material is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then places in the vacuum chamber half an hour, and will be described
Flexible base material drying；Carbon nanotube, silver nanowires, zinc oxide nanowire or graphene are passed through into spraying method or 3D
Method of printing is sprayed or is printed on the flexible base material, is formed on the flexible base material a plurality of of the same size
Strips of conductive electrode；Using two flexible base materials with strips of conductive electrode by high molecular polymer film as medium
Layer is opposite to fit together, and obtains sensor array layer, wherein the high molecular polymer film is PDMS film, it is opposite to be bonded
The strips of conductive electrode on described two flexible base materials together is mutually perpendicular to；It is formed in the sensor array layer
Flexible capacitor layer；Glass substrate is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then in vacuum chamber
Middle placement half an hour, and the glass substrate is dried；Flexible ITO is adhered into the glass substrate by heat-conducting double-sided adhesive tape
On；One layer of SnO 2 thin film is formed on the flexibility ITO by spin coating tin oxide nanoparticles, forms electron transfer layer, so
High annealing is carried out to the electron transfer layer afterwards；Calcium titanium ore bed is formed on the electron transport layer；In the calcium titanium ore bed
Upper spin coating Spiro-OMeTAD forms hole transmission layer；Electrode is formed on the hole transport layer, wherein the flexibility ITO,
The electron transfer layer, the calcium titanium ore bed, the hole transmission layer and the electrode form flexible solar battery layer；By institute
It states flexible solar battery layer to remove from the glass substrate, and is connected on the flexible capacitor layer.
In one embodiment, a plurality of strips of conductive electrode of the same size is formed on the flexible base material includes:
The strips of conductive electrode, and one layer of PDMS of spin coating on the strips of conductive electrode are obtained with the method for suction filtration, is then dissolved
Fall filter paper, makes in the strips of conductive electrode insertion PDMS.
In one embodiment, it includes: not consolidate that the flexible solar battery layer, which is connected to the flexible capacitor layer,
The PDMS of change is coated in the flexible capacitor layer surface, then the flexible solar battery layer is fitted to the institute for having applied PDMS
It states on flexible capacitor layer.
In one embodiment, 16 strips of conductive electrodes of the same size are formed on each flexible base material.
In one embodiment, the size of the sensor array layer is 2 centimetres of 2 cm x.
In one embodiment, two flexible base materials with strips of conductive electrode are passed through into high molecular polymer film
It include: one be spun to also uncured PDMS in described two flexible base materials as opposite fit together of dielectric layer
On a flexible base material, and another flexible base material is affixed on thereon, and solidifies the PDMS.
In one embodiment, two flexible base materials with strips of conductive electrode are passed through into high molecular polymer film
It include: to form high molecular polymer film with macromolecule polymer material as opposite fit together of dielectric layer；By described two
A flexible base material and the high molecular polymer film combine, wherein the high molecular polymer film is located at institute
It states between two flexible base materials as dielectric layer.
In the embodiment of the present invention, a kind of pliable pressure sensor array preparation method of novel self energizing is provided,
It can use the capacitive sensor array that 16 pairs of crossed electrodes form 16*16, and the size of entire device is the 2cm*2cm sun
Energy cell flexible is integrated on sensor array, and the sensor performance after integrated solar is held essentially constant, in order to incite somebody to action
The luminous energy that solar battery absorbs is converted to electrical energy for storage and use, also adds one among sensor and solar battery
A flexible capacitor.The sensor array of this method preparation can work normally under light illumination, and can detect minimum 1Pa
Pressure, have the good linearity.Process simple operations provided by the present invention, cost is relatively low, is suitble to extensive raw
The needs of productionization.
Detailed description of the invention
Fig. 1 is the signal of the flexible self energizing integrated pressure sensor array of method preparation according to an embodiment of the invention
Figure；
Fig. 2 is the schematic diagram for showing sensor array layer according to an embodiment of the invention.
Specific embodiment
Below in conjunction with the manufacture flexibility self energizing integrated pressure sensor array of the attached drawing embodiment that the present invention will be described in detail
Method specific steps.
With reference to Fig. 1 and Fig. 2, in one embodiment, a kind of method preparing flexible self energizing integrated pressure sensor array can
To include the following steps.
It is possible, firstly, to obtain flexible base material 60, the flexible base material 60 may include PDMS, PI, Ecoflex or
PET.Flexible base material 60 is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then in the vacuum chamber
Half an hour is placed, and flexible base material 60 is dried.
Then, carbon nanotube, silver nanowires, zinc oxide nanowire or graphene are passed through into spraying method or 3D printing
Method is sprayed or is printed on flexible base material, and a plurality of strips of conductive electrode of the same size is formed on flexible base material
61, and two flexible base materials with strips of conductive electrode 61 are opposite as dielectric layer by high molecular polymer film
It fits together, obtains sensor array layer 6.Wherein high molecular polymer film can be PDMS film, opposite to be fitted in one
The strips of conductive electrode on two flexible base materials risen is mutually perpendicular to.Sensor display layer 6 on can also be arranged respectively with
The conducting wire 62 that each strips of conductive electrode 61 is electrically connected.The response variation of sensor array layer 6 is since thickness of dielectric layers variation is led
Cause capacitance variations.
It is then possible to form flexible capacitor layer 5 in sensor array layer 6.The flexible capacitor layer 5 can store or
Person, which discharges, uses solar cell layer energy obtained described below.
It is then possible to prepare solar cell layer and be connected in the sensor array layer 6.
In one embodiment, glass substrate successively can be cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water,
Then it places in the vacuum chamber half an hour, and glass substrate is dried, flexible ITO is then adhered into glass by heat-conducting double-sided adhesive tape
On glass substrate, and one layer of SnO 2 thin film is formed on flexible ITO by spin coating tin oxide nanoparticles, form electron transfer layer
4, and high annealing is carried out to electron transfer layer 4.Then, calcium titanium ore bed 3 is formed on electron transfer layer 4, and in calcium titanium ore bed 3
Upper spin coating Spiro-OMeTAD forms hole transmission layer 2.Finally, forming electrode 1 on hole transmission layer 2.In this way, flexibility ITO,
Electron transfer layer 4, calcium titanium ore bed 3, hole transmission layer 2 and electrode 1 form flexible solar battery layer.
It is then possible to which flexible solar battery layer is removed from glass substrate, and it is connected on flexible capacitor layer.One
In a embodiment, uncured PDMS can be coated in flexible capacitor layer surface, then be bonded flexible solar battery layer
Onto the flexible capacitor layer for having applied PDMS, so that solar cell layer can adhere securely to flexible capacitor layer.
In one embodiment, strips of conductive electrode above-mentioned can be obtained with the method filtered, and in strips of conductive electrode
One layer of PDMS of upper spin coating, then dissolves filter paper, make strips of conductive electrode insertion PDMS in, thus increase strips of conductive electrode with
The combination stability of flexible base material.
In one embodiment, the size of sensor array layer can be 2 centimetres of 2 cm x, and can be in each flexibility
16 strips of conductive electrodes of the same size are formed on base material.
In one embodiment, two flexible base materials with strips of conductive electrode are passed through into high molecular polymer film
It may include: that also uncured PDMS is spun in described two flexible base materials as opposite fit together of dielectric layer
A flexible base material on, and another flexible base material is affixed on thereon, and solidify the PDMS.
In one embodiment, two flexible base materials with strips of conductive electrode are passed through into high molecular polymer film
It also may include: to form polyphosphazene polymer with macromolecule polymer material (for example, PDMS) as opposite fit together of dielectric layer
Close object film；Described two flexible base materials and the high molecular polymer film are combined, wherein the high score
Sub- thin polymer film is used as dielectric layer between described two flexible base materials.
In the embodiment of the present invention, a kind of pliable pressure sensor array preparation method of novel self energizing is provided,
It can use the capacitive sensor array that 16 pairs of crossed electrodes form 16*16, and the size of entire device is the 2cm*2cm sun
Energy cell flexible is integrated on sensor array, and the sensor performance after integrated solar is held essentially constant, in order to incite somebody to action
The luminous energy that solar battery absorbs is converted to electrical energy for storage and use, also adds one among sensor and solar battery
A flexible capacitor.The sensor array of this method preparation can work normally under light illumination, and can detect minimum 1Pa
Pressure, have the good linearity.Process simple operations provided by the present invention, cost is relatively low, is suitble to extensive raw
The needs of productionization.
Above by specific embodiment, the present invention is described, but the present invention is not limited to these specific implementations
Example.It will be understood by those skilled in the art that various modifications, equivalent replacement, variation etc. can also be done to the present invention, these transformation
It, all should be within protection scope of the present invention without departing from spirit of the invention.In addition, " a reality described in the above many places
Apply example " indicate different embodiments, naturally it is also possible to it is completely or partially combined in one embodiment.
Claims (7)
1. a kind of method for preparing flexible self energizing integrated pressure sensor array characterized by comprising
Flexible base material is obtained, the flexible base material includes PDMS, PI, Ecoflex or PET；
The flexible base material is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then in vacuum chamber
Middle placement half an hour, and the flexible base material is dried；
Carbon nanotube, silver nanowires, zinc oxide nanowire or graphene are sprayed by spraying method or 3D printing method
Or print on the flexible base material, a plurality of strips of conductive electricity of the same size is formed on the flexible base material
Pole；
Using two flexible base materials with strips of conductive electrode by high molecular polymer film as the opposite patch of dielectric layer
It is combined, obtains sensor array layer, wherein the high molecular polymer film is PDMS film, fit together relatively
Strips of conductive electrode on described two flexible base materials is mutually perpendicular to；
Flexible capacitor layer is formed in the sensor array layer；
Glass substrate is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then places half in the vacuum chamber
Hour, and the glass substrate is dried；
Flexible ITO is adhered in the glass substrate by heat-conducting double-sided adhesive tape；
One layer of SnO 2 thin film is formed on the flexibility ITO by spin coating tin oxide nanoparticles, forms electron transfer layer, so
High annealing is carried out to the electron transfer layer afterwards；
Calcium titanium ore bed is formed on the electron transport layer；
Spin coating Spiro-OMeTAD forms hole transmission layer on the calcium titanium ore bed；
Electrode is formed on the hole transport layer, wherein the flexibility ITO, the electron transfer layer, the calcium titanium ore bed, institute
It states hole transmission layer and the electrode forms flexible solar battery layer；
The flexible solar battery layer is removed from the glass substrate, and is connected on the flexible capacitor layer.
2. the method as described in claim 1, which is characterized in that formed on the flexible base material by mask plate a plurality of
Strips of conductive electrode of the same size includes: the method acquisition strips of conductive electrode with suction filtration, and in the strips of conductive
One layer of PDMS of spin coating, then dissolves filter paper on electrode, makes in the strips of conductive electrode insertion PDMS.
3. method as described in claim 1 or 2, which is characterized in that be connected to the flexible solar battery layer described
Flexible capacitor layer includes: that uncured PDMS is coated in the flexible capacitor layer surface, then by the flexible solar
Battery layers fit on the flexible capacitor layer for having applied PDMS.
4. the method as described in any one of claims 1 to 3, it is characterised in that: on each flexible base material
Form 16 strips of conductive electrodes of the same size.
5. the method as described in any one of Claims 1-4, it is characterised in that: the size of the sensor array layer is 2
2 centimetres of cm x.
6. the method as described in any one of claim 1 to 5, which is characterized in that by two with strips of conductive electrode
Flexible base material includes: by also uncured PDMS as opposite fit together of dielectric layer by high molecular polymer film
It is spun on a flexible base material in described two flexible base materials, and another flexible base material is affixed on it
On, and solidify the PDMS.
7. the method as described in any one of claim 1 to 5, which is characterized in that by two with strips of conductive electrode
Flexible base material is fit together by high molecular polymer film as dielectric layer relatively
High molecular polymer film is formed with macromolecule polymer material；
Described two flexible base materials and the high molecular polymer film are combined, wherein the high molecular polymerization
Object film is used as dielectric layer between described two flexible base materials.
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| CN201810952194.3A CN109323781A (en) | 2018-08-21 | 2018-08-21 | A method for fabricating flexible self-powered integrated pressure sensing arrays |
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| CN201810952194.3A CN109323781A (en) | 2018-08-21 | 2018-08-21 | A method for fabricating flexible self-powered integrated pressure sensing arrays |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109974907A (en) * | 2019-03-15 | 2019-07-05 | 钛深科技(深圳)有限公司 | Integrated pliable pressure sensor of actively powering |
| CN110564402A (en) * | 2019-09-16 | 2019-12-13 | 哈尔滨工业大学 | Perovskite-like intermediate gel, preparation and method for preparing electronic skin by using perovskite-like intermediate gel |
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| CN111791623A (en) * | 2020-07-21 | 2020-10-20 | 艾感科技(广东)有限公司 | Method and device for preparing gas sensor array by inkjet printing |
| CN112379537A (en) * | 2020-10-27 | 2021-02-19 | 季华实验室 | Perovskite-based spatial terahertz modulator and preparation method |
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| CN112820830A (en) * | 2020-12-30 | 2021-05-18 | 中国科学院苏州生物医学工程技术研究所 | Preparation method and preparation device of flexible electronic device |
| CN113049150A (en) * | 2021-02-02 | 2021-06-29 | 诺瑞(深圳)新技术有限公司 | Flexible pressure sensor, preparation method thereof, robot skin and wearable equipment |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004303606A (en) * | 2003-03-31 | 2004-10-28 | Fujikura Ltd | Solar cell |
| CN104900672A (en) * | 2015-04-27 | 2015-09-09 | 电子科技大学 | Perovskite solar cell-super capacitor combined integrated device |
| CN105067160A (en) * | 2015-07-23 | 2015-11-18 | 东南大学 | Oxidized graphene sponge-based flexible pressure sensor and manufacturing method thereof |
| CN107290082A (en) * | 2016-04-11 | 2017-10-24 | 刘垚 | A kind of capacitance type touch sensor |
| CN107622875A (en) * | 2017-09-04 | 2018-01-23 | 吉林大学 | A kind of preparation method of the wearable device of the self-powered of electromagnetic shielding |
-
2018
- 2018-08-21 CN CN201810952194.3A patent/CN109323781A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004303606A (en) * | 2003-03-31 | 2004-10-28 | Fujikura Ltd | Solar cell |
| CN104900672A (en) * | 2015-04-27 | 2015-09-09 | 电子科技大学 | Perovskite solar cell-super capacitor combined integrated device |
| CN105067160A (en) * | 2015-07-23 | 2015-11-18 | 东南大学 | Oxidized graphene sponge-based flexible pressure sensor and manufacturing method thereof |
| CN107290082A (en) * | 2016-04-11 | 2017-10-24 | 刘垚 | A kind of capacitance type touch sensor |
| CN107622875A (en) * | 2017-09-04 | 2018-01-23 | 吉林大学 | A kind of preparation method of the wearable device of the self-powered of electromagnetic shielding |
Cited By (18)
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| CN109974907A (en) * | 2019-03-15 | 2019-07-05 | 钛深科技(深圳)有限公司 | Integrated pliable pressure sensor of actively powering |
| CN110564402A (en) * | 2019-09-16 | 2019-12-13 | 哈尔滨工业大学 | Perovskite-like intermediate gel, preparation and method for preparing electronic skin by using perovskite-like intermediate gel |
| CN110564402B (en) * | 2019-09-16 | 2022-11-29 | 哈尔滨工业大学 | Perovskite-like intermediate gel, preparation method thereof and method for preparing electronic skin by using perovskite-like intermediate gel |
| CN111653534B (en) * | 2019-09-24 | 2021-11-26 | 浙江集迈科微电子有限公司 | Manufacturing method of three-dimensional heterogeneous module based on graphene as heat dissipation coating |
| CN111653534A (en) * | 2019-09-24 | 2020-09-11 | 浙江集迈科微电子有限公司 | Manufacturing method of three-dimensional heterogeneous module based on graphene as heat dissipation coating |
| CN111211227A (en) * | 2020-01-13 | 2020-05-29 | 北京交通大学 | Preparation method of solar cell |
| CN111780659A (en) * | 2020-07-02 | 2020-10-16 | 山西工程职业学院 | Touch sensor based on pvdf piezoelectric film |
| CN111780659B (en) * | 2020-07-02 | 2022-06-28 | 山西工程职业学院 | Touch sensor based on pvdf piezoelectric film |
| CN111791623A (en) * | 2020-07-21 | 2020-10-20 | 艾感科技(广东)有限公司 | Method and device for preparing gas sensor array by inkjet printing |
| CN112379537A (en) * | 2020-10-27 | 2021-02-19 | 季华实验室 | Perovskite-based spatial terahertz modulator and preparation method |
| CN112379537B (en) * | 2020-10-27 | 2023-01-31 | 季华实验室 | Perovskite-based spatial terahertz modulator and preparation method |
| CN112562349A (en) * | 2020-12-02 | 2021-03-26 | 湖北文理学院 | Traffic violation detection system |
| CN112820830A (en) * | 2020-12-30 | 2021-05-18 | 中国科学院苏州生物医学工程技术研究所 | Preparation method and preparation device of flexible electronic device |
| CN113049150A (en) * | 2021-02-02 | 2021-06-29 | 诺瑞(深圳)新技术有限公司 | Flexible pressure sensor, preparation method thereof, robot skin and wearable equipment |
| CN113156670A (en) * | 2021-03-29 | 2021-07-23 | 枣庄学院 | Metamaterial modulator |
| CN113156670B (en) * | 2021-03-29 | 2022-07-12 | 江苏大学 | Metamaterial modulator |
| CN113108956A (en) * | 2021-05-08 | 2021-07-13 | 香港中文大学（深圳） | Touch sensor and robot |
| CN113108956B (en) * | 2021-05-08 | 2025-09-16 | 香港中文大学（深圳） | Touch sensing robot and robot |
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