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CN109269999A - Infrared photoacoustic spectroscopy detection system - Google Patents

Infrared photoacoustic spectroscopy detection system Download PDF

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Publication number
CN109269999A
CN109269999A CN201811426122.1A CN201811426122A CN109269999A CN 109269999 A CN109269999 A CN 109269999A CN 201811426122 A CN201811426122 A CN 201811426122A CN 109269999 A CN109269999 A CN 109269999A
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Prior art keywords
infrared light
signal
amplifier
microphone
infrared
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CN201811426122.1A
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Inventor
苗玉龙
谢刚文
印华
邱妮
张施令
侯雨杉
姚强
吴彬
周艳玲
刘航
胡晓锐
宫林
籍勇亮
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Electric Power Research Institute of State Grid Chongqing Electric Power Co Ltd
State Grid Corp of China SGCC
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Electric Power Research Institute of State Grid Chongqing Electric Power Co Ltd
State Grid Corp of China SGCC
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Priority to CN201811426122.1A priority Critical patent/CN109269999A/en
Publication of CN109269999A publication Critical patent/CN109269999A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The invention discloses a kind of infrared photoacoustic spectra detection systems, it includes: infrared light supply for emitting infrared light;Chopper receives the infrared light of infrared light supply transmitting, and is modulated to the infrared light received, changes infrared light periodically;Optical filter wheel is connect with chopper, and optical filter wheel includes multiple optical filters, and optical filter is used to filter the infrared light of under test gas frequency;Photoacoustic cell is attached with optical filter wheel, for converting optical signals to acoustical signal;Microphone is connect with photoacoustic cell, for acoustical signal to be converted to telecommunications and is exported to lock-in amplifier;Lock-in amplifier is connect with microphone, for extracting in microphone output electric signal by the modulated frequency signal of chopper, and filters out other signals.The present invention uses wideband infrared light supply, and in conjunction with wideband infrared light supply and laser light source, respectively different advantage realizes the optimization of entire photo-acoustic detection system to different gas progress photo-acoustic detections.

Description

A kind of infrared photoacoustic spectra detection system
Technical field
The present invention relates to gas detection technology field, especially a kind of infrared photoacoustic spectra detection system.
Background technique
The gas-insulated metal-enclosed electrical equipment of SF6 (GIS) has high dielectric strength, operational safety stabilization, conducive to environment Protection, the advantages that time between overhauls(TBO) is long, occupied area is small and maintenance workload is small, in the power system, especially in big and medium-sized cities It is used widely in Urban Net Construction and transformation.But in terms of operating condition in recent years, GIS both domestic and external occurs in operation Many problems, mainly failure caused by its internal inevitably defect, once failure occurs, GIS is closed due to its Structure makes the execution of diagnosis and the service work of failure extremely difficult, and failure can constantly expand with operation, therefore meeting Lead to immeasurable economic loss.
Existing infrared photo acoustic detection device mid-infrared light source is generally weaker, infrared detector sensitivity is lower, causes micro- The detection for measuring gas component is extremely difficult.
Summary of the invention
In view of the above drawbacks of the prior art, it is an object of the invention to provide a kind of infrared photoacoustic spectra detection systems System, using wideband infrared light supply, in conjunction with wideband infrared light supply and laser light source respectively different advantage to different gas progress Photo-acoustic detection realizes the optimization of entire photo-acoustic detection system, has reached good detection effect.
It is realized the purpose of the present invention is technical solution in this way, a kind of infrared photoacoustic spectra detection system, it is wrapped It has included: infrared light supply, chopper, optical filter wheel, photoacoustic cell, microphone and lock-in amplifier;
The infrared light supply is for emitting infrared light;
The chopper receives the infrared light of infrared light supply transmitting, and is modulated to the infrared light received, makes infrared Light is periodically changed;
The optical filter wheel is connect with the chopper, and the optical filter wheel includes multiple optical filters, the optical filter For filtering the infrared light of under test gas frequency;
The photoacoustic cell is attached with the optical filter wheel, for converting optical signals to acoustical signal;
The microphone is connect with the photoacoustic cell, for acoustical signal to be converted to telecommunications and is exported to lock-in amplifier;
The lock-in amplifier is connect with the microphone, for extracting in microphone output electric signal by chopper tune Frequency signal after system, and filter out other signals.
Further, photoacoustic cell further includes having pressure sensor and thermocouple;
The pressure sensor is connect with optical filter wheel and microphone respectively;
The thermocouple is connect with the microphone, and the thermocouple is also connect with thermocouple controller, for measuring Temperature, and temperature signal is converted into thermo-electromotive force signal.
Further, the internal structure connection of the lock-in amplifier is as follows:
Input amplifier is exported for receiving input signal, and after signal is amplified to bandpass filter;
Further include having trigger pulse, the trigger pulse for receiving reference signal, the trigger pulse also with phase shifter Connection;
The bandpass filter and phase shifter are connect with low-pass filter;
The low-pass filter is also attached with the output end amplifier, is exported and is believed by the output end amplifier Number.
By adopting the above-described technical solution, the present invention has the advantage that: wideband infrared light supply is used, in conjunction with wideband Respectively different advantage carries out photo-acoustic detection to different gas for infrared light supply and laser light source, realizes entire photo-acoustic detection system Optimization, reached good detection effect.
Other advantages, target and feature of the invention will be illustrated in the following description to a certain extent, and And to a certain extent, based on will be apparent to those skilled in the art to investigating hereafter, Huo Zheke To be instructed from the practice of the present invention.
Detailed description of the invention
Detailed description of the invention of the invention is as follows:
Fig. 1 is the connection schematic diagram of infrared photoacoustic spectra detection system.
Fig. 2 is infrared light supply and its energy spectrogram.
Fig. 3 be temperature be 298K and pressure be 0.1MPa under SO2Infrared absorpting light spectra.
Fig. 4 be temperature be 298K and pressure be 0.1MPa under CF4Infrared absorpting light spectra.
Fig. 5 be temperature be 298K and pressure be 0.1MPa under CO2Infrared absorpting light spectra.
Fig. 6 be temperature be 298K and pressure be 0.1MPa under SF6Infrared absorpting light spectra.
Fig. 7 is SOF2Infrared absorpting light spectra.
Fig. 8 is the frequency response curve of microphone.
Fig. 9 is lock-in amplifier structure chart.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
Embodiment, as shown in Figures 1 to 9;A kind of infrared photoacoustic spectra detection system, it includes: infrared light supply, copped wave Device, optical filter wheel, photoacoustic cell, microphone and lock-in amplifier;
Infrared light supply is for emitting infrared light;Minimum gas concentration is detected using photoacoustic technique, it is desirable that uses monochromatic source And power is sufficiently large, monochromatic source can be the narrow laser light source of very bandwidth, can also cooperate optical filter with continuous spectrum light source Part is realized.Selecting the principle that needs follow when light source is: lambda1-wavelength must be consistent with the absorption line of tested gas, and It is required that avoiding the overlapping region of other components absorption line.Laser light source has enough power and monochromaticjty is good, in trace gas It is very widely used in detection, but SF6The infrared absorption line of electric discharge decomposition components is concentrated mainly on mid infrared region, commonly Laser is difficult to meet the requirements;Middle infrared light-emitting diode (LED) light source has high-efficient, small in size, service life long and can arteries and veins The advantages that modulated, but the optical power that LED light source generates is usually less than 2 μ W, and the photoacoustic signal of excitation also will be very faint, from And greatly reduce detection sensitivity.It is wanted so the present invention using a kind of infra red radiation light source, can obtain meeting detecting The continuous spectrum and optical power asked.
SF6The gas and its absorption peak of decomposition components is substantially distributed in 2 μm~20 μm of middle infrared band at PD, thus The present invention selects the infrared wide spectrum light source of GY-3 type, the infrared wide spectrum light source of GY-3 type and its energy spectrogram as shown in Fig. 2, its luminous light Spectral limit is 0.6 μm~25 μm, can cover SF6The absorption peak range of decomposition components standard spectrogram.It is using special line around red Outer illuminator, and it is coated with the preferable film material of stability on its surface, the stability and reliability of system are not only increased, Effectively extend service life.Its key technical indexes is shown in Table 1.
1 GY-3 type infrared light supply major parameter of table
Model Operating voltage Operating current Focal length Smooth surface temperature Spectral region
GY-3 5V 11A 130mm 1150℃ 0.6-25μm
Chopper receives the infrared light of infrared light supply transmitting, and is modulated to the infrared light received, make infrared light into Row periodically variation;
The incident light of constant intensity will not inspire photoacoustic signal, it is necessary to which carrying out certain frequency to light intensity, (modulating frequency needs Will be in audio range) modulation could generate photoacoustic signal.Intensity modulation usually has electroosmotic pulse modulation and mechanical copped wave tune Two ways processed: electroosmotic pulse, which is modulated, relies primarily on the operating current for cut-offfing light source to realize, generally with the increase of modulating frequency Its modulation depth strongly reduces, and modulating frequency is not high.Mechanical chopping modulation is to carry out discontinuity to light beam using mechanical chopper On-off is realized, suitable for the modulation of different wave length light beam, and has very high modulation efficiency.
Since the exothermic material specific heat capacity of IR thermal emitter is larger, it is difficult to obtain with electroosmotic pulse intensity modulated higher Modulating frequency, therefore the present invention is modulated infrared beam using mechanical chopping way.Mechanical chopper is usually by being provided with Chopper disk, stabilization of speed, controllable motor and the frequency control apparatus three parts of light hole form, and Specifeca tion speeification is shown in Table 2.
2 C-995 chopper major parameter of table
Optical filter wheel is connect with chopper, and optical filter wheel includes multiple optical filters, and optical filter is for filtering under test gas The infrared light of frequency;
When detecting multicomponent gas, it is desirable that system has good selectivity.To reach this purpose, it is necessary to using certain The incident light of wavelength excites specific tested sample, and what it is due to infra red radiation light source generation is continuous spectrum, so needing Corresponding optical filter is selected to be divided.
Before selecting suitable optical filter, it is necessary to first determine SF6Gas and its at PD decomposition components major absorbance peak. The SF provided according to IEC604806The standard spectrogram of decomposition components, the absorption peak of each component are substantially distributed in 2 μm~20 μm Infrared band, it is specific as shown in table 3.
3 SF of table6And its typical absorption peak of decomposition components
Since HF is highly acid substance, is easily reacted with materials such as equipment metal, insulation and generate stable fluoride, and SOF4Very unstable, facile hydrolysis generates SOF2, therefore both components should not all be analyzed as PD characteristic gas, this system Mainly for relatively stable SO2、CO2、CF4、SOF2It is detected.For the infrared absorption for further studying tested component gas Characteristic uses line-by-line integration method to calculate in the case where temperature is 0.1MPa for 298K, pressure according to HITRAN2004 infrared data library First three component and SF6Infrared absorption spectrum it is as shown in Figures 3 to 6, due to SOF2It is non-common gas, absorption spectrum ginseng It examines Fourier's infrared analysis and sees Fig. 7.By comparing absorption spectrum, so that it may the characteristic absorption peak of selected each component gas.
The selection principle of characteristic absorption peak: first is that avoid the absorption line overlapping region of each gas to improve Systematic selection Property, second is that the absorption peak that select absorption intensity big is to improve system sensitivity.To select SO2For gas characteristic absorption peak, There are two major absorbance peak, one of absorption peak (18.881 μm) and SOF for it2An absorption peak (18.868 μm) for gas is deposited In more serious overlapping, so the present invention chooses the characteristic absorption peak that 7.352 μm are the gas, and corresponding filter is determined Piece.Table 4 gives the optical filter parameter of corresponding each decomposition components.
4 optical filter parameter of table
Photoacoustic cell is attached with optical filter wheel, for converting optical signals to acoustical signal;
In photo-acoustic detection system, the performance of photoacoustic cell is to determine one of the key factor of detection sensitivity.General optoacoustic Chamber is divided into disresonance type and resonant mode, and in the chamber by air seal, intracavitary acoustic pressure is distributed and space bit for disresonance PA cell Set unrelated, pressure is equal everywhere for synchronization, and such PA cell needs to seal and sensitivity is lower.In resonant mode PA cell In, when the modulating frequency of incident light is identical with the resonance frequency of PA cell, standing wave will be formed in PA cell, obtains photoacoustic signal Enhance to resonance, cavity is without sealing, and the influence of low-frequency noise can be effectively suppressed in higher modulating frequency, and signal-to-noise ratio is more It is good.Since resonant mode PA cell has the characteristics that make simple, practical, high sensitivity, measured in trace gas analysis and general frequency In applying, resonant mode PA cell is mostly used.Common acoustic resonant cavity has helmholtz resonance chamber, hole type resonant cavity and one Tie up resonant cavity.Since One-dimensional cavity has, cavity size is small, resonance frequency is high, window noise level is low and detectable flowing The advantages that gas, therefore the present invention uses One-dimensional cavity modelling photoacoustic cell.
Microphone is connect with photoacoustic cell, microphone, that is, sonic transducer, for acquiring generated faint sound letter in photoacoustic cell Number, and convert thereof into electric signal.In gas photo-acoustic detection, frequently with electret type or the capacitor microphony of biased electrical die mould Device.The present invention selects MPA201 electret capacitor type microphone, as shown in figure 8, microphone frequency within the scope of 20Hz-3000Hz Rate response curve is very flat, can carry out effectively, reliably detecting to acoustical signal faint in photoacoustic cell, associated technical parameters are shown in Table 5。
5 MPA201 microphone important technological parameters of table
Diameter Sound field type Frequency response Sensitivity Dynamic range Background noise
1/2` Free field 20Hz-20kHz 50mV/Pa 16-134dBA <16dBA
Lock-in amplifier is connect with microphone, for extracting in microphone output electric signal by the modulated frequency of chopper Rate signal, and filter out other signals.
The feature of photoacoustic signal maximum is exactly (consistent with chopper frequencies) known to signal frequency, utilizes this feature, base In principle of correlation analysis, generallys use lock-in amplifier and photoacoustic signal is handled.Lock-in amplifier is actually a simulation Fourier transformer, the output of lock-in amplifier is a DC voltage, is proportional to (the ginseng of a certain specific frequency in input signal Examine frequency) signal amplitude, and other frequency contents in input signal will not have an impact output voltage, lock-in amplifier Basic structure it is as shown in Figure 9.
Signal path is located at before correlator, by the active filter of low-noise preamplifier, input transformer, various functions Wave device and main amplifier composition, function are small-signal to be amplified to the level for being enough to make correlator to work, and have inhibition With filter out part interference effect, to expand the dynamic range of lock-in amplifier;Reference channel is that lock-in amplifier is indispensable Few component part, be typically referenced to channel output is the symmetrical square wave synchronous with measured signal, for driving the field of correlator Effect pipe switch, reference channel are mainly made of trigger circuit, phase-shift circuit, frequency multiplier circuit and square wave driving circuit;Correlator For realizing the correlation function operation of both reference signal and measured signal, it is necessary to have dynamic range is big, drift is small, the time is normal The number performances such as adjustable, wide frequency range and gain stabilization, correlator are generally made by multiplier and integrator, theoretically come It says, with the integrator of an analog multiplier and a time of integration infinity, so that it may micro- in any noise by being buried in Testing of Feeble Signals comes out.
The present invention selects the SR830 lock-in amplifier of Stanford company production, and the key technical indexes is shown in Table 6.
6 SR830 the key technical indexes of table
Working frequency Sensitivity Noise Common-mode rejection ratio Harmonic distortion Phase accuracy Time constant
1mHz-102KHz 2nv-1v 6nv 100dB -80dB 0.01° 10μS-30S
During gas photo-acoustic detection, influenced clearly by pressure, temperature factor.To guarantee identical experiment item Part, while influence of the analysis pressure and temperature to photo-acoustic detection characteristic for convenience, it is necessary to the pressure in real-time monitoring photoacoustic cell And temperature parameter.Therefore needing to install pressure sensor and thermocouple in photoacoustic cell, thermocouple use environment temperature is -20~ 70 DEG C, elementary error is ± 0.2%, liquid crystal display;Pressure sensor 0~1MPa of measurement range, measurement accuracy ± 0.25%FS. When detection, entire detection system is fixed on laboratory table, then by being mounted on the devices such as infrared light supply, chopper, photoacoustic cell Adjustable (device or more, front and rear, left and right can the be made mobile) optical bracket of three-dimensional below part, carries out the light path part of whole device Debugging is overlapped the longitudinal center line of these devices on the same line.
The present invention uses wideband infrared light supply, in conjunction with wideband infrared light supply and laser light source respectively different advantage to difference Gas carry out photo-acoustic detection, realize the optimization of entire photo-acoustic detection system, reached good detection effect.
Finally it should be noted that: the above embodiments are merely illustrative of the technical scheme of the present invention and are not intended to be limiting thereof, to the greatest extent Invention is explained in detail referring to above-described embodiment for pipe, it should be understood by those ordinary skilled in the art that: still It can be with modifications or equivalent substitutions are made to specific embodiments of the invention, and without departing from any of spirit and scope of the invention Modification or equivalent replacement, should all cover within the scope of the claims of the present invention.

Claims (3)

1.一种红外光声光谱检测系统,其特征在于,所述系统包括有红外光源、斩波器、滤光片轮、光声池、微音器及锁相放大器;An infrared photoacoustic spectroscopy detecting system, characterized in that the system comprises an infrared light source, a chopper, a filter wheel, a photoacoustic cell, a microphone and a lock-in amplifier; 所述红外光源用于发射红外光;The infrared light source is configured to emit infrared light; 所述斩波器接收红外光源发射的红外光,并对接收到的红外光进行调制,使红外光进行周期性的变化;The chopper receives the infrared light emitted by the infrared light source, and modulates the received infrared light to make the infrared light periodically change; 所述滤光片轮与所述斩波器连接,所述滤光片轮包括有多个滤光片,所述滤光片用于滤过待测气体频率的红外光;The filter wheel is coupled to the chopper, and the filter wheel includes a plurality of filters for filtering infrared light of a gas frequency to be measured; 所述光声池与所述滤光片轮进行连接,用于将光信号转换为声信号;The photoacoustic cell is connected to the filter wheel for converting an optical signal into an acoustic signal; 所述微音器与所述光声池连接,用于将声信号转换为电信并输出至锁相放大器;The microphone is connected to the photoacoustic cell for converting an acoustic signal into a telecommunication and outputting to a lock-in amplifier; 所述锁相放大器与所述微音器连接,用于提取微音器输出电信号中经过斩波器调制后的频率信号,并滤除其他信号。The lock-in amplifier is connected to the microphone for extracting a frequency signal modulated by a chopper in an output electrical signal of the microphone, and filtering out other signals. 2.如权利要求1所述的红外光声光谱检测系统,其特征在于,光声池还包括有压力传感器和热电偶;2. The infrared photoacoustic spectroscopy detection system of claim 1 wherein the photoacoustic cell further comprises a pressure sensor and a thermocouple; 所述压力传感器分别与滤光片轮和微音器连接;The pressure sensors are respectively connected to the filter wheel and the microphone; 所述热电偶与所述微音器连接,且所述热电偶还与热电偶控制器连接,用于测量温度,并把温度信号转换成热电动势信号。The thermocouple is coupled to the microphone, and the thermocouple is also coupled to a thermocouple controller for measuring temperature and converting the temperature signal to a thermoelectromotive force signal. 3.如权利要求1所述的红外光声光谱检测系统,其特征在于,所述锁相放大器的内部结构连接如下:3. The infrared photoacoustic spectroscopy detection system according to claim 1, wherein the internal structure of the lock-in amplifier is connected as follows: 输入端放大器用于接收输入信号,并将信号放大后输出至带通滤波器;The input amplifier is used to receive the input signal, and the signal is amplified and output to the band pass filter; 还包括有触发脉冲,所述触发脉冲用于接收参考信号,所述触发脉冲还与移相器连接;Also included is a trigger pulse for receiving a reference signal, the trigger pulse also being coupled to the phase shifter; 所述带通滤波器和移相器均与低通滤波器连接;The band pass filter and the phase shifter are both connected to a low pass filter; 所述低通滤波器还与所述输出端放大器进行连接,通过所述输出端放大器输出信号。The low pass filter is also coupled to the output amplifier, and a signal is output through the output amplifier.
CN201811426122.1A 2018-11-27 2018-11-27 Infrared photoacoustic spectroscopy detection system Pending CN109269999A (en)

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CN110208195A (en) * 2019-06-25 2019-09-06 南京无书化工有限公司 A kind of optoacoustic spectroscopy single channel locking phase amplifying device and method for gas detection
CN110389106A (en) * 2019-07-25 2019-10-29 国网重庆市电力公司电力科学研究院 A kind of infrared photoacoustic spectra quantitative analysis method of SF6 decomposition components
CN111323376A (en) * 2020-04-16 2020-06-23 中国科学院电工研究所 Parallel incidence infrared thermal radiation photoacoustic spectrum gas sensing device
CN111735773A (en) * 2020-05-29 2020-10-02 武汉派奥斯传感技术有限公司 System and method for processing output signal of microphone in photoacoustic spectroscopy unit
CN112903595A (en) * 2021-01-25 2021-06-04 安徽宝龙环保科技有限公司 Online multicomponent gas analysis photoacoustic spectrometer
CN112945851A (en) * 2021-01-29 2021-06-11 大连理工大学 Device capable of reducing external interference and detachably fixing photoacoustic cell
CN113447776A (en) * 2021-06-25 2021-09-28 国网江苏省电力有限公司检修分公司 SF6 decomposed component gas photoacoustic detection device and method
CN113552070A (en) * 2021-08-13 2021-10-26 国网上海市电力公司 Gas detection system based on photoacoustic spectroscopy
CN114923853A (en) * 2022-04-21 2022-08-19 汕头大学 Infrared photoacoustic detection device and infrared photoacoustic detection method based on dimming film
CN116183538A (en) * 2023-03-02 2023-05-30 南京理工大学 Infrared light sound spectrum gas concentration detection device based on non-resonance type photoacoustic cell
CN119064286A (en) * 2024-10-09 2024-12-03 武汉豪迈光电科技有限公司 A gas detection method and system based on photoacoustic cell acoustic pulse excitation

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Application publication date: 20190125