[go: up one dir, main page]

CN109196673A - Piezo Film - Google Patents

Piezo Film Download PDF

Info

Publication number
CN109196673A
CN109196673A CN201780033533.1A CN201780033533A CN109196673A CN 109196673 A CN109196673 A CN 109196673A CN 201780033533 A CN201780033533 A CN 201780033533A CN 109196673 A CN109196673 A CN 109196673A
Authority
CN
China
Prior art keywords
piezoelectricity
piezoelectric membrane
coating
layer
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780033533.1A
Other languages
Chinese (zh)
Inventor
别府浩史
矢野孝伸
拝师基希
木曽宪俊
梨木智刚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority claimed from PCT/JP2017/019979 external-priority patent/WO2017209080A1/en
Publication of CN109196673A publication Critical patent/CN109196673A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/043—Improving the adhesiveness of the coatings per se, e.g. forming primers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/098—Forming organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Human Computer Interaction (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Laminated Bodies (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)

Abstract

Piezoelectric membrane (10) of the invention has the laminated body of base film (11) with the coating (12) with piezoelectricity.Coating (12) with piezoelectricity includes fluororesin.Fluororesin is the polymer of vinylidene or the copolymer of more than two kinds in vinylidene, trifluoro-ethylene, chlorotrifluoroethylene.Coating (12) with piezoelectricity is by obtaining the solution coating of fluororesin in base film (11) and being dried.Piezoelectric membrane (10) through the invention realizes the piezoelectric membrane that haze value is small, total light transmittance is high.

Description

Piezoelectric membrane
Technical field
The present invention relates to piezoelectric membranes.
Background technique
Typically for touch panel, carried out to the two-dimensional position of the finger or pen on touch panel surface on the surface is touched Detection.(" finger or pen " is referred to as " finger " below, the two-dimensional position of finger or pen on touch panel surface is known as " the XY coordinate of finger ".) pressure that finger touches cannot be detected in this case.(the pressure size for below touching finger It is thought of as in Z-direction, and is known as " Z coordinate of finger ".) i.e. no matter finger touch pressure (Z coordinate of finger) size How, detectable is only the XY coordinate of finger touch position.
However, according to the application program used on touch panel, be also required to sometimes pressure that identification finger touches (finger Z coordinate).In the case where common capacitive touch panel, the position touched is selected by finger touch, is performed simultaneously The order of position in touch.In the very high situation of sensitivity of capacitive touch panel, only connect by finger The optional and immediate position of finger nearly capacitive touch panel (even if finger is not touching) is performed simultaneously to be in and be somebody's turn to do The order of position.However, in the case where being impermissible for executing the order of mistake on such as the operation panel in work mechanism, it is ideal Be make selection with execution separate.That is, maloperation in order to prevent, it is generally desirable to, (or close by finger) is touched by finger Carry out select command, but only by order can't be executed in this way, pressure is then applied by finger and just executes order.
This touch panel that can also detect finger touch pressure (Z coordinate of finger) is for example in the (Japan of patent document 1 Special open 2010-26938) in have it is recorded.In the case where the touch panel of patent document 1, using contain Kynoar-four The two sides of the piezoelectric body layer of fluoride copolymers is laminated with the laminated body of transparent electrode.It is total containing Kynoar-tetrafluoroethene The piezoelectric body layer of polymers with a thickness of 20 μm~300 μm.Due to describe patent document 1 containing Kynoar-tetrafluoro second The piezoelectric body layer of alkene copolymer is manufactured using the tape casting or extrusion molding, it can thus be assumed that being that independent film (is not laminated in it The film of its film).
Haze value (the haze containing Kynoar-TFE copolymer piezoelectric body layer is described in patent document 1 It value) is 5%~7%, total light transmittance 95%.Haze value, the total light transmittance of the embodiment of the patent document 1 are that stacking is saturating Being individually worth before prescribed electrode layer containing Kynoar-TFE copolymer piezoelectric body layer.
According to the experiment of present inventor, the visuality positioned at the display image at the touch panel back side is at least pressed The influence of the haze value and total light transmittance of conductive film.Patent document 1 contains Kynoar-TFE copolymer piezoelectricity The haze value of body layer is big, therefore has the visual worry reduced of the display image positioned at the touch panel back side.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2010-26938 bulletin
Summary of the invention
Problems to be solved by the invention
According to the experiment of present inventor, the visual drop of the display image for being located at the touch panel back side Low, the influence of haze value is greater than total light transmittance.Therefore it is an object of the invention to realize that haze value is small and then total light transmittance is high Piezoelectric membrane.
The solution to the problem
(1) piezoelectric membrane of the invention has the laminated body of base film with the coating with piezoelectricity.
(2) piezoelectric membrane of the invention has priming coat between base film and coating with piezoelectricity.
(3) piezoelectric membrane of the invention has on the surface coating with piezoelectricity and that base film is in opposite side Lack 1 layer of optical adjustment layer to the utmost.At least 1 layer of optical adjustment layer refers to that optical adjustment layer can be 2 layers or more of multilayer film.
(4) piezoelectric membrane of the invention has at least 1 layer of the 1st optics between base film and coating with piezoelectricity Adjustment layer.At least 1 layer of the 1st optical adjustment layer refers to that the 1st optical adjustment layer can be 2 layers or more of multilayer film.
(5) piezoelectric membrane of the invention the coating with piezoelectricity, the table of opposite side is in the 1st optical adjustment layer Mask lacks 1 layer of the 2nd optical adjustment layer to the utmost.At least 1 layer of the 2nd optical adjustment layer refers to that the 2nd optical adjustment layer can be 2 layers or more Multilayer film.
(6) piezoelectric membrane of the invention has at least 1 layer between base film and coating with piezoelectricity and prevents adhesion Layer.At least 1 layer of antiblocking layers refer to that antiblocking layers can be 2 layers or more of multilayer film.
(7) piezoelectric membrane of the invention has on the surface that base film and with piezoelectricity coating is in opposite side Lack 1 layer of antiblocking layers to the utmost.
(8) piezoelectric membrane of the invention has on the surface coating with piezoelectricity and that base film is in opposite side Lack 1 layer of transparent adhesive layer to the utmost.At least 1 layer of transparent adhesive layer refers to that transparent adhesive layer can be 2 layers or more of multilayer film.
(9) piezoelectric membrane of the invention has on the surface that base film and with piezoelectricity coating is in opposite side Lack 1 layer of transparent adhesive layer to the utmost.
(10) for piezoelectric membrane of the invention, the coating with piezoelectricity includes fluororesin.
(11) for piezoelectric membrane of the invention, fluororesin is for the polymer of vinylidene or selected from vinylidene, trifluoro Copolymer of more than two kinds in ethylene, chlorotrifluoroethylene.
(12) for piezoelectric membrane of the invention, fluororesin is the copolymer of vinylidene and trifluoro-ethylene, in copolymer The molar ratio of the vinylidene and trifluoro-ethylene that include is (50~85): the range of (50~15) when by being integrally set as 100.
(13) for piezoelectric membrane of the invention, fluororesin is the copolymerization of vinylidene and trifluoro-ethylene and chlorotrifluoroethylene The molar ratio of object, the vinylidene and trifluoro-ethylene that include in copolymer and chlorotrifluoroethylene is (63 when by being integrally set as 100 ~65): (27~29): the range of (10~6).
(14) for piezoelectric membrane of the invention, the coating with piezoelectricity is that the solution coating of fluororesin is thin in substrate Film and coating obtained from being dried.
(15) for piezoelectric membrane of the invention, the coating with piezoelectricity with a thickness of 0.5 μm~20 μm.
(16) for piezoelectric membrane of the invention, the material of base film is selected from polyethylene terephthalate, poly- naphthalene Naphthalate, polyolefin, polycyclic alkene, cyclic olefine copolymer, polycarbonate, polyether sulfone, polyarylate, polyimides, It is polyamide, polystyrene, at least one kind of in polynorbornene.
(17) haze value of piezoelectric membrane of the invention is 5% or less.
(18) total light transmittance of piezoelectric membrane of the invention is 90% or more.
The effect of invention
For piezoelectric membrane of the invention, piezoelectric body layer is formed by coating, thus the thickness of piezoelectric body layer than in the past by The piezoelectric body layer that independent film is constituted wants thin.Therefore, the drop of the rising of the haze value as caused by piezoelectric body layer and total light transmittance It is low fewer than the piezoelectric body layer being made of independent film.By the effect, it can be achieved that the pressure that haze value is small, total light transmittance is high Conductive film.When piezoelectric membrane of the invention is used as the Z coordinate detection piezoelectric membrane of touch panel, it can be realized and be located at touch The visuality of the display of back side of panel is good and has the touch panel of Z coordinate (the signature pressure of finger) detection function.
Detailed description of the invention
Fig. 1 is the 1st schematic diagram constituted substantially of piezoelectric membrane of the invention
Fig. 2 is the 2nd schematic diagram constituted substantially of piezoelectric membrane of the invention
Fig. 3 is the 3rd schematic diagram constituted substantially of piezoelectric membrane of the invention
Fig. 4 is the 4th schematic diagram constituted substantially of piezoelectric membrane of the invention
Fig. 5 is the 5th schematic diagram constituted substantially of piezoelectric membrane of the invention
Fig. 6 is the 6th schematic diagram constituted substantially of piezoelectric membrane of the invention
Fig. 7 is the 7th schematic diagram constituted substantially of piezoelectric membrane of the invention
Fig. 8 is the 8th schematic diagram constituted substantially of piezoelectric membrane of the invention
Fig. 9 is the 9th schematic diagram constituted substantially of piezoelectric membrane of the invention
Figure 10 is to show that piezoelectric membrane of the invention is provided with the schematic diagram of the composition of transparent electrode
Specific embodiment
[the basic composition of piezoelectric membrane]
Fig. 1 shows the 1st basic composition of piezoelectric membrane of the invention.The 1st of piezoelectric membrane of the invention is constituted substantially There is piezoelectric membrane 10 made of the coating 12 of piezoelectricity in the stacking of base film 11.In base film 11 and there is piezoelectricity Adhesive layer (not shown) can also be laminated between coating 12.
The 2nd Fig. 2 shows piezoelectric membrane of the invention is constituted substantially.Phase is marked to common element is constituted substantially with the 1st Same symbol.Basic constitute in the 2nd of piezoelectric membrane of the invention is priming coat 13 to be laminated on base film 11 and then in primary coat Stacking has piezoelectric membrane 20 made of the coating 12 of piezoelectricity on layer 13.Priming coat 13 (or anchor coat), which has, improves base Material film 11 and the adaptation with the coating 12 of piezoelectricity.
Fig. 3 shows the 3rd basic composition of piezoelectric membrane of the invention.Phase is marked to common element is constituted substantially with the 1st Same symbol.The 3rd of piezoelectric membrane of the invention be basic constitute be stacking has piezoelectricity on base film 11 coating 12, And then piezoelectric membrane 30 made of few 1 layer of optical adjustment layer 14 is laminated on the coating 12 with piezoelectricity.Optical adjustment layer 14 (Index matching layer) (also referred to as refractive index adjustment layer) have the function of adjusting the reflectivity of piezoelectric membrane 30. Adhesive layer (not shown) can also be laminated between base film 11 and coating 12 with piezoelectricity.
Fig. 4 shows the 4th basic composition of piezoelectric membrane of the invention.Phase is marked to common element is constituted substantially with the 1st Same symbol.Basic constitute in the 4th of piezoelectric membrane of the invention is that few 1 layer of the 1st pH effect is laminated on base film 11 Layer 15, stacking has piezoelectric membrane 40 made of the coating 12 of piezoelectricity at least 1 layer of the 1st optical adjustment layer 15 in turn.
Fig. 5 shows the 5th basic composition of piezoelectric membrane of the invention.Phase is marked to common element is constituted substantially with the 4th Same symbol.Basic constitute in the 5th of piezoelectric membrane of the invention is that few 1 layer of the 1st pH effect is laminated on base film 11 The coating 12 with piezoelectricity is laminated and then with piezoelectricity in layer 15 at least 1 layer of the 1st optical adjustment layer 15 in turn Piezoelectric membrane 50 made of few 1 layer of the 2nd optical adjustment layer 16 is laminated on coating 12.
Fig. 6 shows the 6th basic composition of piezoelectric membrane of the invention.Phase is marked to common element is constituted substantially with the 1st Same symbol.The 6th of piezoelectric membrane of the invention be basic constitute be laminated on base film 11 few 1 layer of antiblocking layers 17, And then stacking has piezoelectric membrane 60 made of the coating 12 of piezoelectricity at least 1 layer of antiblocking layers 17.Antiblocking layers 17 have There is the function of preventing overlapped or rolled piezoelectric membrane 60 from crimping (adhesion) each other.
Fig. 7 shows the 7th basic composition of piezoelectric membrane of the invention.Phase is marked to common element is constituted substantially with the 3rd Same symbol.Basic constitute in the 7th of piezoelectric membrane of the invention is that stacking has piezoelectricity in the one side of base film 11 Coating 12, and then with piezoelectricity coating 12 be laminated at least 1 layer of optical adjustment layer 14, on the another side of base film 11 Piezoelectric membrane 70 made of at least 1 layer of antiblocking layers 17 is laminated.Between base film 11 and coating 12 with piezoelectricity also Adhesive layer (not shown) can be laminated with.
Fig. 8 shows the 8th basic composition of piezoelectric membrane of the invention.Phase is marked to common element is constituted substantially with the 1st Same symbol.The 8th of piezoelectric membrane of the invention be basic constitute be stacking has piezoelectricity on base film 11 coating 12, And then piezoelectric membrane 80 made of few 1 layer of transparent adhesive layer 18 is laminated on the coating 12 with piezoelectricity.At least 1 layer transparent Adhesive layer 18 can be at least 1 layer of clear adhesive.It can be with layer between base film 11 and coating 12 with piezoelectricity It is laminated with adhesive layer (not shown).
Fig. 9 shows the 9th basic composition of piezoelectric membrane of the invention.It is identical that common element mark is constituted substantially with the 8th Symbol.Basic constitute in the 9th of piezoelectric membrane of the invention is painting of the stacking with piezoelectricity in the one side of base film 11 Layer 12 is laminated to piezoelectric membrane 90 made of few 1 layer of transparent adhesive layer 18 on the another side of base film 11.At least 1 layer thoroughly Bright adhesive layer 18 can be at least 1 layer of clear adhesive.It can be between base film 11 and coating 12 with piezoelectricity It is laminated with adhesive layer (not shown).
[base film]
Base film 11 is for example by polyethylene terephthalate, polyethylene naphthalate, polyolefin, polycyclic alkene Hydrocarbon, cyclic olefine copolymer, polycarbonate, polyether sulfone, polyarylate, polyimides, polyamide, polystyrene, polynorbornene etc. Macromolecule membrane is constituted.The material of base film 11 is not limited to these, and preferably clear, heat resistance and mechanical property are excellent Polyethylene terephthalate (PET).
The thickness of base film 11 is preferably 10 μm~200 μm, but is not limited to these.The wherein thickness of base film 11 When lower than 10 μm, the worry that there is operation to become difficult.In addition it when the thickness of base film 11 is more than 200 μm, is difficult to piezoelectricity The worry that film (10,20,30,40,50,60,70,80,90) is wound into a roll.In addition the thickness of base film 11 is more than 200 μm When, there is thickness when piezoelectric membrane (10,20,30,40,50,60,70,80,90) is installed on touch panel etc. above to become blocked up Worry.
[coating with piezoelectricity]
As long as the material of the coating 12 with piezoelectricity can be coated into film-form and coating on the surface of base film 11 There is film afterwards the material of piezoelectricity to be just not particularly limited.For the coating 12 with piezoelectricity, it is generally desirable to even if not Polarized (polarization process) also show that the coating of piezoelectricity but it is also possible to be the coating for showing piezoelectricity after polarization.
There are contactless polarization and contact polarization as polarization (polarization process).For contactless polarization, for example, logical It crosses and is carried out by Corona discharge Treatment and coating 12 is made to polarize for coating 12.It polarizes for contact, such as is applied with 2 metal plate clampings Layer 12 applies voltage between 2 metal plates to make coating 12 polarize.
Coating 12 with piezoelectricity can for example obtain in the following way: keep the material of the coating 12 with piezoelectricity molten Solution is made in solution in solvent, and the apparatus for coating known to bar coater, gravure coater etc. is relatively thin and is equably coated on substrate The surface of film 11, then makes it dry.
[material of the coating with piezoelectricity]
The material of coating 12 with piezoelectricity for example can be suitable for using the material comprising fluororesin.Specifically example goes out to wrap It when the material of fluorine resin, can enumerate: the polymer of vinylidene, the copolymer of vinylidene and trifluoro-ethylene, inclined fluorine second Alkene and trifluoro-ethylene and the copolymer of chlorotrifluoroethylene, the copolymer of hexafluoropropene and vinylidene, perfluoroalkyl vinyl ether and partially The copolymer of vinyl fluoride, the copolymer of tetrafluoroethene and vinylidene, hexafluoropropylene oxide and vinylidene copolymer, hexafluoro The copolymer of propylene and tetrafluoroethene and vinylidene.These polymer can be used alone or use mixture.
Material comprising fluororesin is preferably the copolymer or vinylidene and trifluoro-ethylene of vinylidene and trifluoro-ethylene With the copolymer of chlorotrifluoroethylene.The copolymer of vinylidene and trifluoro-ethylene is known as 2 yuan of based copolymers.By vinylidene with Trifluoro-ethylene and the copolymer of chlorotrifluoroethylene are known as 3 yuan of based copolymers.
The copolymer (2 yuan of based copolymers) of vinylidene and trifluoro-ethylene is used as to the material of the coating 12 with piezoelectricity When, the molar ratio of vinylidene and trifluoro-ethylene is (50~85) when by being integrally set as 100: the range of (50~15) is suitable 's.
In addition, vinylidene and trifluoro-ethylene and the copolymer (3 yuan of based copolymers) of chlorotrifluoroethylene, which are used as, has pressure When the material of electrical coating 12, vinylidene is with the molar ratio of trifluoro-ethylene and chlorotrifluoroethylene when by being integrally set as 100 For (63~65): (27~29): the range of (10~6) is suitable.
[thickness of the coating with piezoelectricity]
The thickness of coating 12 with piezoelectricity does not limit, when considering aftermentioned optical characteristics, preferably 0.5 μm~20 μ M, more preferable 0.5 μm~10 μm, it is 0.5 μm~5 μm further preferred.When the thickness of coating 12 with piezoelectricity is lower than 0.5 μm, Being formed by film becomes incomplete worry.When the thickness of coating 12 with piezoelectricity is more than 20 μm, there is optical characteristics (mist Angle value and total light transmittance) worry that becomes unsuitable for.
[transparent adhesive layer]
Transparent adhesive layer 18 preferably comprises optically clear adhesive.It is, for example, possible to use the pieces of optically clear adhesive to come Form transparent adhesive layer 18.In addition, clear adhesive preferably comprises optical clear bonding agent.For example, the light of liquid can be coated with It learns transparent adhesive, irradiation ultraviolet light and it is made to be solidified to form clear adhesive.It is desirable that transparent adhesive layer 18 or transparent The refractive index of adhesive layer is to be laminated in the median of the respective refractive index of material of its two sides.By so selecting transparent adhesive layer 18 or clear adhesive refractive index, so as to inhibit in transparent adhesive layer 18 or clear adhesive and be laminated in its two sides The reflection of the light at the interface of material.
[optical characteristics of piezoelectric membrane]
In general, thering is the time not also to be absorbed and scatter even if the haze value of piezoelectric membrane becomes larger, therefore total light transmittance sometimes It will not reduce.However, even if the total light transmittance of piezoelectric membrane does not reduce, also can due to haze value becomes larger display image it is visual Property reduce.Therefore the visuality of display image can not be only judged by the value of the total light transmittance of piezoelectric membrane.According to the application The experiment of inventor, in order to ensure the visuality of display image, the haze value of piezoelectric membrane preferably 5% or less, more preferable 4% Below, further preferably 3% or less, particularly preferred 2% or less, particularly preferred 1% or less.In addition, the total light transmission of piezoelectric membrane Rate preferably 90% or more, more preferable 91% or more, particularly preferred 92% or more.It is when the haze value of piezoelectric membrane is more than 5% or total When light transmittance is lower than 90%, there is the worry for the image that can not clearly recognize display.
[transparent electrode]
In addition, transparent electrode is laminated on the piezoelectric membrane 10 of the application, it is capable of detecting when that there is pressure by transparent electrode The variation of the current potential of electrical coating 12.For example, as shown in Figure 10, optical adjustment layer 14 is laminated on the piezoelectric membrane 10 of Fig. 1 With transparent electrode 20.In addition, the surface layer for being in opposite side with the coating 12 with piezoelectricity in base film 11, which is folded, to be had The hard conating 22 for the function that prevents adhesion.
Transparent electrode 20 can enumerate: indium system complex oxide, it is representative be indium tin composite oxides (ITO:Indium Tin Oxide), indium zinc composite oxide, can also enumerate the indium oxide for being doped with 4 valence metal ions or divalent metal ion (In2O3).Indium system complex oxide, which has the feature that, is up to 80% or more in visible light region (380~780nm) transmitance, And the sheet resistance of per unit area is low (30~1000 Ω/).
The sheet resistance value of above-mentioned indium system complex oxide be preferably 300 Ω/ (ohms per square) below, into One step is preferably 150 Ω/.The small transparent electrode of sheet resistance for example obtains in the following way: utilizing sputtering method or vacuum After the uncrystalline layer of indium system complex oxide is formed on curing resin layer by vapour deposition method, carried out at heating at 100~200 DEG C Reason makes uncrystalline layer become crystalline layer.
Transparent electrode 20 is not limited to above-mentioned material, and tin zinc oxide, zinc oxide, Fluorin doped tin-oxide etc. can be used The electroconductive polymers such as transparent conductive oxides, polyethylene dioxythiophene.
Can enumerate as an example the coating 12 with piezoelectricity with a thickness of 0.5~10 μm, optical adjustment layer 14 With a thickness of 80~160nm, transparent electrode 20 with a thickness of 20nm or more.In addition, can enumerate has pressure as an example The refractive index of electrical coating 12 is 1.40~1.50, the refractive index of optical adjustment layer 14 is 1.50~1.70, transparent electrode 20 Refractive index be 1.90~2.10.In addition, the thickness of base film 11 is set as 2~100 μm, refractive index is set as to 1.50~ 1.70.By the thickness and refractive index more than being set as, to make the reflection differences of transparent electrode 20 Yu optical adjustment layer 14 2.0% hereinafter, appearance becomes good.
Embodiment
[embodiment 1]
The piezoelectric membrane 10 of embodiment 1 is constituted substantially by the 1st of piezoelectric membrane of the invention.The piezoelectricity of embodiment 1 Film 10 makes as follows: being initially formed on the surface of the 1st base film 11 (pet film) not shown Adhesive layer, be then coated with the solution of the copolymer (2 yuan of based copolymers) of vinylidene and trifluoro-ethylene.Base film 11 (pet film) with a thickness of 23 μm.
When production has the coating 12 of piezoelectricity, firstly, using ultrasonic wave by the copolymerization of vinylidene and trifluoro-ethylene Object (2 yuan of based copolymers) is dissolved in methyl ethyl ketone, has made the copolymer (2 yuan of based copolymers) of vinylidene and trifluoro-ethylene Solution.Mole of the vinylidene and trifluoro-ethylene that include in the copolymer (2 yuan of based copolymers) of vinylidene and trifluoro-ethylene Than being 70/30.
Followed by bar coater by the solution coating of vinylidene and the copolymer (2 yuan of based copolymers) of trifluoro-ethylene in base The surface of material film 11 (pet film).Then thin to substrate under 60 DEG C, 5 minutes drying conditions Film 11 (pet film) and undried coating are dried, and obtain the coating 12 with piezoelectricity. The coating 12 with piezoelectricity after drying with a thickness of 1 μm.
[embodiment 2]
The piezoelectric membrane 10 of embodiment 2 is constituted substantially by the 1st of piezoelectric membrane of the invention.For embodiment 2 Piezoelectric membrane 10, it is dry after the coating 12 with piezoelectricity with a thickness of 5 μm, in addition to this with the piezoelectric membrane of embodiment 1 10 similarly make.
[embodiment 3]
The piezoelectric membrane 10 of embodiment 3 is constituted substantially by the 1st of piezoelectric membrane of the invention.For embodiment 3 Piezoelectric membrane 10, it is dry after the coating 12 with piezoelectricity with a thickness of 10 μm, in addition to this with the piezoelectric membrane of embodiment 1 10 similarly make.
[embodiment 4]
The piezoelectric membrane 10 of embodiment 4 is constituted substantially by the 1st of piezoelectric membrane of the invention.For embodiment 4 Piezoelectric membrane 10, it is dry after the coating 12 with piezoelectricity with a thickness of 20 μm, in addition to this with the piezoelectric membrane of embodiment 1 10 similarly make.
[embodiment 5]
The piezoelectric membrane 10 of embodiment 5 is constituted substantially by the 1st of piezoelectric membrane of the invention.For embodiment 5 Include in the copolymer (2 yuan of based copolymers) of piezoelectric membrane 10, vinylidene and trifluoro-ethylene, vinylidene and trifluoro-ethylene Molar ratio be 75/25, made in the same manner as the piezoelectric membrane 10 of embodiment 1 in addition to this.
[embodiment 6]
The piezoelectric membrane 10 of embodiment 6 is constituted substantially by the 1st of piezoelectric membrane of the invention.For embodiment 6 Piezoelectric membrane 10, it is dry after the coating 12 with piezoelectricity with a thickness of 5 μm, in addition to this with the piezoelectric membrane of embodiment 5 10 similarly make.
[embodiment 7]
The piezoelectric membrane 10 of embodiment 7 is constituted substantially by the 1st of piezoelectric membrane of the invention.For embodiment 7 Piezoelectric membrane 10, it is dry after the coating 12 with piezoelectricity with a thickness of 10 μm, in addition to this with the piezoelectric membrane of embodiment 5 10 similarly make.
[embodiment 8]
The piezoelectric membrane 10 of embodiment 8 is constituted substantially by the 1st of piezoelectric membrane of the invention.For embodiment 8 Piezoelectric membrane 10, it is dry after the coating 12 with piezoelectricity with a thickness of 2 μm and drying condition be 135 DEG C, 5 minutes, remove It is made in the same manner as the piezoelectric membrane 10 of embodiment 5 other than this.
[embodiment 9]
The piezoelectric membrane 10 of embodiment 9 is constituted substantially by the 1st of piezoelectric membrane of the invention.For embodiment 9 Piezoelectric membrane 10, the material of the coating 12 with piezoelectricity are the copolymer (3 of vinylidene and trifluoro-ethylene and chlorotrifluoroethylene First based copolymer), it is made in the same manner as the piezoelectric membrane 10 of embodiment 1 in addition to this.
When production has the coating 12 of piezoelectricity, firstly, using ultrasonic wave by vinylidene and trifluoro-ethylene and trifluoro The copolymer (3 yuan of based copolymers) of vinyl chloride is dissolved in the methyl iso-butyl ketone (MIBK) of room temperature, has made vinylidene and trifluoro second The solution of alkene and the copolymer (3 yuan of based copolymers) of chlorotrifluoroethylene.Vinylidene and trifluoro-ethylene and chlorotrifluoroethylene are total to The molar ratio of the vinylidene and trifluoro-ethylene that include in polymers (3 yuan of based copolymers) and chlorotrifluoroethylene is 64.2/27.1/ 8.7。
Followed by bar coater by vinylidene and trifluoro-ethylene and the copolymer (3 yuan of based copolymers) of chlorotrifluoroethylene Solution coating is in the surface of base film 11 (pet film).Then, in 60 DEG C, drying in 5 minutes Under the conditions of base film 11 (pet film) and undried coating are dried, having made has The coating 12 of piezoelectricity.The coating 12 with piezoelectricity after drying with a thickness of 1 μm.
[embodiment 10]
The piezoelectric membrane 10 of embodiment 10 is constituted substantially by the 1st of piezoelectric membrane of the invention.For embodiment 10 Piezoelectric membrane 10, it is dry after the coating 12 with piezoelectricity with a thickness of 5 μm, it is thin with the piezoelectricity of embodiment 9 in addition to this Film 10 similarly makes.
[comparative example 1]
The piezoelectric membrane of comparative example 1 by vinylidene polymer (Kynoar), 40 μm of thickness independent thin Film (not having base film) is constituted.The piezoelectric membrane of comparative example 1 makes in the following way: will make inclined fluorine second using ultrasonic wave Solution made of the polymer (Kynoar) of alkene is dissolved in the isobutyl ketone of room temperature with after drying with a thickness of 40 μm Mode is coated on the surface of pet film, shells from pet film after dry From to make.
[table 1]
Table 1 shows the composition of the embodiment of piezoelectric membrane of the invention and the piezoelectric membrane of comparative example, with piezoelectricity The haze value and total light transmittance of the molar ratio and thickness of coating, piezoelectric membrane.In table 1, VDF indicates that vinylidene, TrFE indicate Trifluoro-ethylene, CTFE indicate that chlorotrifluoroethylene, pet sheet show polyethylene terephthalate.P () indicates copolymer.Therefore, " P (VDF-TrFE) " refers to " copolymer of vinylidene and trifluoro-ethylene "." P (VDF-TrFE-CTFE) " refers to " vinylidene With the copolymer of trifluoro-ethylene and chlorotrifluoroethylene "." P (VDF-TrFE)/PET base material film " refers to " by vinylidene and three The copolymer of vinyl fluoride is coated on the surface of the base film 11 formed by polyethylene terephthalate "."P(VDF- TrFE-CTFE)/PET base material film " refer to " by the copolymer of vinylidene and trifluoro-ethylene and chlorotrifluoroethylene be coated on by The surface for the base film 11 that polyethylene terephthalate is formed ".PVDF refers to the polymer (polyvinylidene fluoride of vinylidene Alkene).
The composition of the piezoelectric membrane of 1~embodiment of embodiment 4 is identical with material, but the thickness of the coating 12 with piezoelectricity It is different.If being compared 1~embodiment of embodiment 4, can be observed to thicken with the thickness of the coating 12 with piezoelectricity, The tendency that haze value rises.However, the haze value and total light transmittance of the piezoelectric membrane of 1~embodiment of embodiment 4 are that do not have all The level of problem.
The composition of the piezoelectric membrane of 5~embodiment of embodiment 7 is identical with material, but the thickness of the coating 12 with piezoelectricity It is different.If being compared 5~embodiment of embodiment 7, can be observed to thicken with the thickness of the coating 12 with piezoelectricity, The tendency that haze value slightly rises.However, the haze value and total light transmittance of the piezoelectric membrane of 5~embodiment of embodiment 7 are all The level that there is no problem.
The piezoelectric membrane of embodiment 8 is identical as the composition of the piezoelectric membrane of embodiment 5 and material, and the thickness of coating 12 is also close Seemingly, but haze value has larger difference.The big reason of the haze value of the piezoelectric membrane of embodiment 8 is that drying temperature is 135 DEG C of (its The drying temperature of its embodiment is 60 DEG C).In this way, thering is the haze value of piezoelectric membrane to increase when improving the drying temperature of coating 12 Tendency.
Embodiment 9 is identical with material with the composition of the piezoelectric membrane of embodiment 10, but the thickness of the coating 12 with piezoelectricity Degree is different.According to embodiment 9 and embodiment 10, can be observed to thicken with the thickness of the coating 12 with piezoelectricity, haze value The tendency of rising.However, the haze value and total light transmittance of the piezoelectric membrane of embodiment 9 and embodiment 10 are that all there is no problem It is horizontal.
The independent film and the embodiment of the present invention 1 of the polymer (Kynoar) of the vinylidene of comparative example 1~ The piezoelectric membrane of embodiment 10 is compared, and haze value is very big.Therefore, visual a possibility that reducing of display image, is big.So And the total light transmittance of the piezoelectric membrane of comparative example 1 and the piezoelectric membrane of 1~embodiment of the embodiment of the present invention 10 are almost without difference Not.By comparative example 1 it is found that not necessarily being reduced haze value becomes larger total light transmittance.
[measuring method]
(thickness)
For the thickness of the film lower than 1 μm, simultaneously using transmission electron microscope (Hitachi H-7650) observation Measure section.The thickness of film or film more than 1 μm uses film thickness gauge (Peacock corporation Digital dial gauge DG-205 it) is measured.
[haze value, total light transmittance]
Haze value, total light transmittance use Direct Reading Haze Computer (Suga Test Instruments Corporation HGM-ZDP) it is measured.
[embodiment 11~16]
In addition, as shown in Figure 10, it is assumed that the case where transparent electrode 20 are laminated on the piezoelectric membrane 10 of the application, determine Between piezoelectric membrane 10 and transparent electrode 20 configure optical adjustment layer 14 when with the coating 12 of piezoelectricity, optical adjustment layer 14, the thickness and refractive index of transparent electrode 20.Piezoelectric membrane 10 is same as the previously described embodiments, and inclined fluorine is coated in PET film The copolymer of ethylene and trifluoro-ethylene.
For optical adjustment layer 14 as shown in table 2 below, refractive index is respectively 1.54,1.62,1.7.Due to manufacturing method root It is illustrated respectively according to the different and different of refractive index, therefore according to refractive index.When refractive index is 1.54, in the painting with piezoelectricity Layer 12 passes through melamine resin on one side: alkyd resin: the thermohardening type resin of the weight ratio 2:2:1 of organosilan condensation product The optical adjustment layer 14 that (the refractive index n=1.54 of light) forms with a thickness of 120nm.
When refractive index is 1.62, the coated on one side using gravure coater in the coating 12 with piezoelectricity contains ultraviolet light PH effect composition (the JSR of 47 mass parts of curable resin, 57 mass parts of zirconia particles (median particle diameter 40nm) and PGME Corporation, " OPSTAR Z7412 ", 12 mass % of solid component), added immediately with 60 DEG C under windless condition (being lower than 0.1m/ seconds) Heated drying 1 minute.Then, high voltage mercury lamp radiation accumulated light 250mJ/cm is utilized2Ultraviolet light and implement curing process.Benefit The optics that with a thickness of 90,120 or 150nm and refractive index is 1.62 is formd on the coating 12 with piezoelectricity with this method Adjustment layer 14.
When refractive index is 1.7, it is prepared in the thermosetting comprising melamine resin, alkyd resin and organosilan condensation product TiO is mixed in change type resin (with weight ratio meter melamine resin: alkyd resin: organosilan condensation product=2:2:1)2 Resin combination made of the particle of (refractive index=2.35).At this point, having adjusted TiO2The combined amount of particle makes above-mentioned resin The refractive index of composition becomes 1.70.Then, above-mentioned resin combination is coated on the coating 12 with piezoelectricity, and keeps it solid Change, and forms the optical adjustment layer 14 (refractive index 1.70) of thickness 150nm.
In addition, transparent electrode 20 is formed a film and sputtering to indium tin oxide.It the results are shown in table 2, " the 1st layer " For the coating 12 with piezoelectricity, " the 2nd layer " is optical adjustment layer 14, and " the 3rd layer " is transparent electrode 20.
Each embodiment have as described above the coating 12 of piezoelectricity with a thickness of 0.5~10 μm, the thickness of optical adjustment layer 14 Degree be 80~160nm, transparent electrode 20 with a thickness of 20nm or more.In addition, the refractive index of the coating 12 with piezoelectricity is 1.40~1.50, the refractive index of optical adjustment layer 14 is 1.50~1.70, the refractive index of transparent electrode 20 is 1.90~2.10.Thoroughly The reflection differences of prescribed electrode 20 and optical adjustment layer 14 are 2% hereinafter, appearance is good.
It should be noted that transparent electrode 20 is etched and becomes desired electrode as needed etc..It finds out above-mentioned When refractive index, the refractive index of optical adjustment layer 14, which is used, eliminates the part after transparent electrode 20 by etching.Therefore, by by Each refractive index finds out the reflectivity of air and transparent electrode 20, air and optical adjustment layer 14, so as to find out reflection differences.
[comparative example 2~3]
As the comparative example relative to embodiment 11~16, carry out the case where without optical adjustment layer 14 (comparative example 2) The case where with the refractive index of optical adjustment layer 14 less than 1.5 (comparative example 3).In the case where there is no optical adjustment layer 14, reflectivity Difference is the difference of transparent electrode 20 with the coating 12 with piezoelectricity.Reflection differences are greater than 2%, and appearance is deteriorated.
It should be noted that for the optical adjustment layer 14 of (comparative example 4) when refractive index is 1.46, with solid component concentration Silica solution (Colcoat Co., Ltd. system, Colcoat P) is diluted for 2% mode ethyl alcohol, utilizes silica-coating method Be coated in 12 one side of coating with piezoelectricity, then make it dry, solidify 2 minutes at 150 DEG C, formed with a thickness of Layer (the SiO of 120nm2Film, the refractive index 1.46 of light) and as optical adjustment layer 14.The manufacturing method of other compositions in comparative example It is identical as embodiment.
[table 2]
By having transparent electrode 20 on the coating 12 with piezoelectricity, thus sometimes because transparent electrode 20 shows Huang Color dark brown makes appearance damage.It will be appreciated that: by the way that optical adjustment layer 14 is arranged as above-described embodiment, and to become above-mentioned The mode of the range of value adjust transparent electrode 20, optical adjustment layer 14, coating 12 with piezoelectricity thickness and refractive index, by This can reduce reflection differences as shown in table 2, will not damage appearance.It is appreciated that even if the front surface in display configures It is laminated made of optical adjustment layer 14 and transparent electrode 20 and constitutes on piezoelectric membrane 10, the appearance of display will not be damaged.
Industrial availability
Piezoelectric membrane of the invention is used without limitation, is particularly suited for use as the Z coordinate (hand for detecting touch panel Refer to touch pressure) piezoelectric membrane.
Description of symbols
10,20,30,40,50,60,70,80,90 piezoelectric membrane
11 base films
12 coatings with piezoelectricity
13 priming coats
14 optical adjustment layers
15 the 1st optical adjustment layers
16 the 2nd optical adjustment layers
17 antiblocking layers
18 transparent adhesive layers
20 transparent electrodes
22 have the hard conating for the function that prevents adhesion

Claims (18)

1.一种压电薄膜，其具备：基材薄膜与具有压电性的涂层的层叠体。1. A piezoelectric thin film comprising: a laminate of a base film and a coating layer having piezoelectricity. 2.根据权利要求1所述的压电薄膜，其中，在所述基材薄膜与所述具有压电性的涂层之间具备底涂层。2 . The piezoelectric thin film according to claim 1 , wherein an undercoat layer is provided between the base film and the coating layer having piezoelectricity. 3 . 3.根据权利要求1所述的压电薄膜，其中，在所述具有压电性的涂层的、与所述基材薄膜处于相反侧的表面具备至少1层光学调整层。3 . The piezoelectric thin film according to claim 1 , wherein at least one optical adjustment layer is provided on the surface of the coating layer having piezoelectricity on the opposite side to the base film. 4 . 4.根据权利要求1所述的压电薄膜，其中，在所述基材薄膜与所述具有压电性的涂层之间具备至少1层第1光学调整层。4 . The piezoelectric thin film according to claim 1 , wherein at least one first optical adjustment layer is provided between the base film and the coating layer having piezoelectricity. 5 . 5.根据权利要求4所述的压电薄膜，其中，在所述具有压电性的涂层的、与所述第1光学调整层处于相反侧的表面具备至少1层第2光学调整层。5 . The piezoelectric thin film according to claim 4 , wherein at least one second optical adjustment layer is provided on the surface of the piezoelectric coating layer on the opposite side to the first optical adjustment layer. 6 . 6.根据权利要求1所述的压电薄膜，其中，在所述基材薄膜与所述具有压电性的涂层之间具备至少1层防粘连层。6 . The piezoelectric film according to claim 1 , wherein at least one anti-blocking layer is provided between the base film and the coating layer having piezoelectricity. 7 . 7.根据权利要求3所述的压电薄膜，其中，在所述基材薄膜的、与所述具有压电性的涂层处于相反侧的表面具备至少1层防粘连层。7 . The piezoelectric thin film according to claim 3 , wherein at least one anti-blocking layer is provided on the surface of the base film on the opposite side to the coating layer having piezoelectricity. 8 . 8.根据权利要求1所述的压电薄膜，其中，在所述具有压电性的涂层的、与所述基材薄膜处于相反侧的表面具备至少1层透明粘合层。8 . The piezoelectric film according to claim 1 , wherein at least one transparent adhesive layer is provided on the surface of the coating layer having piezoelectricity on the opposite side to the base film. 9 . 9.根据权利要求1所述的压电薄膜，其中，在所述基材薄膜的、与所述具有压电性的涂层处于相反侧的表面具备至少1层透明粘合层。9 . The piezoelectric thin film according to claim 1 , wherein at least one transparent adhesive layer is provided on the surface of the base film on the opposite side to the coating layer having piezoelectricity. 10 . 10.根据权利要求1～9中任一项所述的压电薄膜，其中，所述具有压电性的涂层包含氟树脂。10 . The piezoelectric thin film according to claim 1 , wherein the coating layer having piezoelectricity contains a fluororesin. 11 . 11.根据权利要求10所述的压电薄膜，其中，所述氟树脂为偏氟乙烯的聚合物、或选自偏氟乙烯、三氟乙烯、三氟氯乙烯中的2种以上的共聚物。11. The piezoelectric film according to claim 10, wherein the fluororesin is a polymer of vinylidene fluoride, or a copolymer of two or more kinds selected from the group consisting of vinylidene fluoride, trifluoroethylene, and chlorotrifluoroethylene . 12.根据权利要求11所述的压电薄膜，其中，所述氟树脂为偏氟乙烯与三氟乙烯的共聚物，所述共聚物中包含的所述偏氟乙烯与所述三氟乙烯的摩尔比在将整体设为100时为(50～85)：(50～15)的范围。12 . The piezoelectric film according to claim 11 , wherein the fluororesin is a copolymer of vinylidene fluoride and trifluoroethylene, and a copolymer of the vinylidene fluoride and the trifluoroethylene contained in the copolymer is 12 . The molar ratio is in the range of (50 to 85):(50 to 15) when the whole is set as 100. 13.根据权利要求11所述的压电薄膜，其中，所述氟树脂为偏氟乙烯与三氟乙烯与三氟氯乙烯的共聚物，所述共聚物中包含的所述偏氟乙烯与所述三氟乙烯与所述三氟氯乙烯的摩尔比在将整体设为100时为(63～65)：(27～29)：(10～6)的范围。13 . The piezoelectric film according to claim 11 , wherein the fluororesin is a copolymer of vinylidene fluoride, trifluoroethylene and chlorotrifluoroethylene, and the vinylidene fluoride contained in the copolymer and the The molar ratio of the said trifluoroethylene and the said chlorotrifluoroethylene is the range of (63-65):(27-29):(10-6), when the whole is made into 100. 14.根据权利要求10～13中任一项所述的压电薄膜，其中，所述具有压电性的涂层是将所述氟树脂的溶液涂布于所述基材薄膜并进行干燥而得到的涂层。14 . The piezoelectric film according to claim 10 , wherein the coating layer having piezoelectricity is obtained by applying a solution of the fluororesin to the base film and drying it. 15 . the resulting coating. 15.根据权利要求1～14中任一项所述的压电薄膜，其中，所述具有压电性的涂层的厚度为0.5μm～20μm。15 . The piezoelectric thin film according to claim 1 , wherein the coating layer having piezoelectricity has a thickness of 0.5 μm to 20 μm. 16 . 16.根据权利要求1～15中任一项所述的压电薄膜，其中，所述基材薄膜的材料选自聚对苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚烯烃、聚环烯烃、环烯烃共聚物、聚碳酸酯、聚醚砜、聚芳酯、聚酰亚胺、聚酰胺、聚苯乙烯、聚降冰片烯中的至少1种。16. The piezoelectric film according to any one of claims 1 to 15, wherein the material of the base film is selected from the group consisting of polyethylene terephthalate, polyethylene naphthalate, polyethylene At least one of olefin, polycycloolefin, cycloolefin copolymer, polycarbonate, polyethersulfone, polyarylate, polyimide, polyamide, polystyrene, and polynorbornene. 17.根据权利要求1～16中任一项所述的压电薄膜，其雾度值为5％以下。17 . The piezoelectric thin film according to claim 1 , which has a haze value of 5% or less. 18 . 18.根据权利要求1～17中任一项所述的压电薄膜，其总透光率为90％以上。18. The piezoelectric thin film according to any one of claims 1 to 17, which has a total light transmittance of 90% or more.
CN201780033533.1A 2016-05-30 2017-05-30 Piezo Film Pending CN109196673A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2016107050 2016-05-30
JP2016-107050 2016-05-30
JP2017-104590 2017-05-26
JP2017104590A JP2017216450A (en) 2016-05-30 2017-05-26 Piezoelectric film
PCT/JP2017/019979 WO2017209080A1 (en) 2016-05-30 2017-05-30 Piezoelectric film

Publications (1)

Publication Number Publication Date
CN109196673A true CN109196673A (en) 2019-01-11

Family

ID=60575896

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780033533.1A Pending CN109196673A (en) 2016-05-30 2017-05-30 Piezo Film

Country Status (4)

Country Link
JP (1) JP2017216450A (en)
KR (1) KR20190015188A (en)
CN (1) CN109196673A (en)
TW (1) TW201743176A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020194135A1 (en) * 2019-03-22 2020-10-01 Gentex Corporation Piezoelectric films with low haze and methods of making and using
CN115585922A (en) * 2022-09-19 2023-01-10 煤炭科学研究总院有限公司 Drilling type multi-point and multi-direction coal rock mass stress meter and coal rock mass stress monitoring method
CN116234701A (en) * 2020-10-30 2023-06-06 株式会社吴羽 Piezoelectric film, touch panel, and manufacturing method of piezoelectric film

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6327334B2 (en) * 2014-02-26 2018-05-23 ダイキン工業株式会社 Bimorph type piezoelectric film
CN113121935A (en) * 2019-12-27 2021-07-16 株式会社吴羽 Sheet for touch panel
WO2022091827A1 (en) * 2020-10-30 2022-05-05 株式会社クレハ Transparent piezoelectric laminated film and touch panel
TWI888061B (en) * 2023-04-19 2025-06-21 日商吳羽股份有限公司 Multilayer piezoelectric and manufacturing method thereof

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005059409A (en) * 2003-08-13 2005-03-10 Mitsubishi Plastics Ind Ltd Sheet material laminated with fluororesin film
JP2007018869A (en) * 2005-07-07 2007-01-25 Bridgestone Corp Transparent conductive film and touch panel
JP2008054277A (en) * 2006-07-27 2008-03-06 Koike Co Ltd Piezoelectric substrate and manufacturing method thereof
US20090263671A1 (en) * 2008-04-21 2009-10-22 Kui Yao Ferroelectric Poly (Vinylidene Fluoride) Film on a Substrate and Method for its Formation
WO2010018760A1 (en) * 2008-08-12 2010-02-18 コニカミノルタエムジー株式会社 Organic piezoelectric material, method for manufacturing organic piezoelectric material film, ultrasonic oscillator, and ultrasonic probe
US20100256497A1 (en) * 2007-11-21 2010-10-07 Kenji Ohnuma Oscillator for ultrasonic wave reception, its manufacturing method, ultrasonic wave probe and ultrasonic wave medical diagnostic imaging system
JP2011222679A (en) * 2010-04-07 2011-11-04 Daikin Ind Ltd Transparent piezoelectric sheet
WO2014168188A1 (en) * 2013-04-10 2014-10-16 三井化学株式会社 Laminate
WO2015053345A1 (en) * 2013-10-08 2015-04-16 ダイキン工業株式会社 Transparent piezoelectric panel
WO2015064328A1 (en) * 2013-10-29 2015-05-07 ダイキン工業株式会社 Piezoelectric film
US20150234446A1 (en) * 2014-02-18 2015-08-20 Arokia Nathan Dynamic switching of power modes for touch screens using force touch
JP2015188055A (en) * 2014-10-20 2015-10-29 三井化学株式会社 laminate
JP2015215734A (en) * 2014-05-09 2015-12-03 日東電工株式会社 Sheet sensor for touch panel
JP2015214053A (en) * 2014-05-09 2015-12-03 日東電工株式会社 Laminated body

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8564177B2 (en) * 2011-09-09 2013-10-22 Dvx, Llc Piezopolymer transducer with matching layer
JP2015186910A (en) * 2014-10-20 2015-10-29 三井化学株式会社 laminate

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005059409A (en) * 2003-08-13 2005-03-10 Mitsubishi Plastics Ind Ltd Sheet material laminated with fluororesin film
JP2007018869A (en) * 2005-07-07 2007-01-25 Bridgestone Corp Transparent conductive film and touch panel
JP2008054277A (en) * 2006-07-27 2008-03-06 Koike Co Ltd Piezoelectric substrate and manufacturing method thereof
US20100256497A1 (en) * 2007-11-21 2010-10-07 Kenji Ohnuma Oscillator for ultrasonic wave reception, its manufacturing method, ultrasonic wave probe and ultrasonic wave medical diagnostic imaging system
US20090263671A1 (en) * 2008-04-21 2009-10-22 Kui Yao Ferroelectric Poly (Vinylidene Fluoride) Film on a Substrate and Method for its Formation
WO2010018760A1 (en) * 2008-08-12 2010-02-18 コニカミノルタエムジー株式会社 Organic piezoelectric material, method for manufacturing organic piezoelectric material film, ultrasonic oscillator, and ultrasonic probe
JP2011222679A (en) * 2010-04-07 2011-11-04 Daikin Ind Ltd Transparent piezoelectric sheet
WO2014168188A1 (en) * 2013-04-10 2014-10-16 三井化学株式会社 Laminate
WO2015053345A1 (en) * 2013-10-08 2015-04-16 ダイキン工業株式会社 Transparent piezoelectric panel
WO2015064328A1 (en) * 2013-10-29 2015-05-07 ダイキン工業株式会社 Piezoelectric film
US20150234446A1 (en) * 2014-02-18 2015-08-20 Arokia Nathan Dynamic switching of power modes for touch screens using force touch
JP2015215734A (en) * 2014-05-09 2015-12-03 日東電工株式会社 Sheet sensor for touch panel
JP2015214053A (en) * 2014-05-09 2015-12-03 日東電工株式会社 Laminated body
JP2015188055A (en) * 2014-10-20 2015-10-29 三井化学株式会社 laminate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020194135A1 (en) * 2019-03-22 2020-10-01 Gentex Corporation Piezoelectric films with low haze and methods of making and using
US11531414B2 (en) 2019-03-22 2022-12-20 Gentex Corporation Piezoelectric films with low haze and methods of making and using
CN116234701A (en) * 2020-10-30 2023-06-06 株式会社吴羽 Piezoelectric film, touch panel, and manufacturing method of piezoelectric film
EP4238763A4 (en) * 2020-10-30 2024-04-10 Kureha Corporation PIEZOELECTRIC FILM, TOUCH SCREEN AND MANUFACTURING METHOD OF PIEZOELECTRIC FILM
CN115585922A (en) * 2022-09-19 2023-01-10 煤炭科学研究总院有限公司 Drilling type multi-point and multi-direction coal rock mass stress meter and coal rock mass stress monitoring method

Also Published As

Publication number Publication date
TW201743176A (en) 2017-12-16
JP2017216450A (en) 2017-12-07
KR20190015188A (en) 2019-02-13

Similar Documents

Publication Publication Date Title
CN109196673A (en) Piezo Film
TWI733819B (en) Piezoelectric film with transparent electrode and pressure sensor
JP7050469B2 (en) Piezoelectric film and piezo sensor
CN102985898B (en) Transparent and electrically conductive film and manufacture method thereof
JP5160325B2 (en) Transparent conductive film and touch panel
CN105793805B (en) Composite polarizer-integrated touch sensing electrode and touch screen panel including the same
JP6879826B2 (en) Touch sensor
CN109196452B (en) Touch sensor
TWI616797B (en) Display device with capacitive touch panel
JP5512624B2 (en) Capacitive touch sensor and display device having the same
TWI524234B (en) Touch panel sensor
JP7050426B2 (en) Piezoelectric sensor and display using the piezoelectric sensor
KR20130028284A (en) Integrated touch polarizing plate and liquid crystal display device integrating the same
KR102365236B1 (en) A piezoelectric sensor and a display using the piezoelectric sensor
WO2017209080A1 (en) Piezoelectric film
CN116941347A (en) Conductive piezoelectric laminated film and method for producing same
KR101114028B1 (en) Touch panel
KR20120004576A (en) Capacitive touch panel, manufacturing method thereof and liquid crystal display device provided with the same
CN102667682B (en) Board of touch panel, manufacturing method thereof, and touch panel
KR20130121607A (en) Touch panel and method for manufacturing the same
US20140071533A1 (en) Transparent Conductive FILM And Touch Panel Provided With Same
TWI623873B (en) Transparent electrode layer board and touch screen panel containing the same

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20190111

WD01 Invention patent application deemed withdrawn after publication