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CN108818163A - Multifrequency vibration micro-structure surface processing unit (plant) - Google Patents

Multifrequency vibration micro-structure surface processing unit (plant) Download PDF

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Publication number
CN108818163A
CN108818163A CN201810715779.3A CN201810715779A CN108818163A CN 108818163 A CN108818163 A CN 108818163A CN 201810715779 A CN201810715779 A CN 201810715779A CN 108818163 A CN108818163 A CN 108818163A
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plant
processing unit
structure surface
surface processing
vibration
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钟美鹏
袁巨龙
吕冰海
邓乾发
姚蔚峰
林苍
刘家志
郑秋扬
沈同舟
朱钢城
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Jiaxing University
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Jiaxing University
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Priority to CN201810715779.3A priority Critical patent/CN108818163A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

Multifrequency vibration micro-structure surface processing unit (plant).Mainly solve the problems, such as that traditional machine add mode can not good machining of non-metallic crisp and hard material.The present invention provides multifrequency vibration micro-structure surface processing unit (plant), assistance processing method on the basis of ordinary ultrasonic processing, three kinds of methods of the secondary process being added:Compressed air is added in the tool, acceleration drainage is carried out to abrasive material abrasive material(It drives abrasive grain abrasive material to rush at the finished surface of workpiece by hose, reduces grinding temperature, be conducive to chip removal);Rotary motion is aided with to the mounting plate equipped with workpiece(It converge abrasive grain abrasive material can preferably during processing, improve the cutting service efficiency of abrasive grain abrasive material);Low-frequency vibration is added to the mounting plate equipped with workpiece, low-frequency vibration keeps the collision of abrasive grain abrasive material more abundant with ultrasonic vibration, and processing effect is good.

Description

复频振动微结构表面加工装置Multiple frequency vibration microstructure surface processing device

技术领域technical field

本发明涉及超声振动加工领域,具体为复频振动微结构表面加工装置。The invention relates to the field of ultrasonic vibration processing, in particular to a multi-frequency vibration microstructure surface processing device.

背景技术Background technique

随着科学技术和工业生产的飞速发展,具有复杂微米/纳米结构化表面应用领域越来越广泛,如光学,太阳能技术,生物工程,自动清洁,先进制造等。与简单的光滑表面相比,这些微米/纳米结构表面可以表现出许多新颖的功能和优异的特征。With the rapid development of science and technology and industrial production, the application fields of complex micro/nano structured surfaces are more and more extensive, such as optics, solar technology, bioengineering, automatic cleaning, advanced manufacturing, etc. Compared with simple smooth surfaces, these micro/nanostructured surfaces can exhibit many novel functions and excellent characteristics.

为了从结构化表面获得最大的利用,复杂微米/纳米结构化表面的应用技术在过去几十年中一直是一个热点研究课题。利用复杂微米/纳米结构化表面制成薄而轻的太阳能板,调节合适的太阳能电池发射角,可以使效率达到38%,因此,研究各种材料的微纳结构的制造技术有重要意义。In order to obtain the maximum utilization from structured surfaces, the application technology of complex micro/nanostructured surfaces has been a hot research topic in the past decades. Using complex micro/nano structured surfaces to make thin and light solar panels, adjusting the appropriate solar cell emission angle can make the efficiency reach 38%. Therefore, it is of great significance to study the manufacturing technology of micro/nano structures of various materials.

伴着机械工业行业的发展,对高硬度零部件的需要也在逐日上升,由此也促进了陶瓷、复合材料、硅、石英、铁氧体等材料的应用。正是因为这些材料均具有硬度高和脆性的要求高,以及零部件外形复杂,一般通过传统的机加方式加工具有一定的难度。With the development of the machinery industry, the demand for high-hardness components is also increasing day by day, which also promotes the application of materials such as ceramics, composite materials, silicon, quartz, and ferrite. It is precisely because these materials have high requirements for high hardness and brittleness, and the shape of parts is complex, it is generally difficult to process them by traditional machining methods.

发明内容Contents of the invention

为了克服背景技术的不足,本发明提供复频振动微结构表面加工装置,主要解决了传统的机加方式无法很好的加工非金属脆硬材料的问题。In order to overcome the shortcomings of the background technology, the present invention provides a multi-frequency vibration microstructure surface processing device, which mainly solves the problem that the traditional machining method cannot process non-metallic brittle and hard materials well.

本发明所采用的技术方案是:The technical scheme adopted in the present invention is:

复频振动微结构表面加工装置,包括对应设置的基座和支架,所述支架上设有可升降的横梁,所述横梁上设有与超声发生器连接的换能器,所述换能器底部连接有变幅杆,所述变幅杆底部设有研磨头,所述研磨头内设有气流通道;The multi-frequency vibration microstructure surface processing device includes a correspondingly arranged base and a support, and the support is provided with a liftable beam, and the beam is provided with a transducer connected to an ultrasonic generator, and the transducer The bottom is connected with a horn, and the bottom of the horn is provided with a grinding head, and an air flow channel is arranged in the grinding head;

所述基座上设有由第一动力源带动转动的平台,所述平台上设有第二动力源带动振动的安装板,所述安装板上设有用于固定工件的夹具;The base is provided with a platform driven by the first power source to rotate, the platform is provided with a mounting plate driven by the second power source to vibrate, and the mounting plate is provided with a fixture for fixing the workpiece;

还包括空气压缩机,所述空气压缩机通过导管与所述气流通道连通。An air compressor is also included, and the air compressor communicates with the air flow channel through a conduit.

所述气流通道包括设于所述研磨头侧壁的进口和设于所述研磨头底部的出口,所述进口与所述出口连通。The air flow channel includes an inlet arranged on the side wall of the grinding head and an outlet arranged at the bottom of the grinding head, and the inlet communicates with the outlet.

所述支架上设有由第三动力源驱动转动的丝杆,所述丝杆上设有相配合的滑座,所述横梁与所述滑座连接。The support is provided with a screw driven by the third power source, the screw is provided with a matching sliding seat, and the cross beam is connected with the sliding seat.

所述第一动力源为电机,所述基座上设有固定座,所述固定座上设有由所述电机带动转动的主轴,还包括转动筒,所述主轴顶端伸入所述转动筒内且带动所述转动筒转动,所述安装板设于所述转动筒顶部。The first power source is a motor, the base is provided with a fixed seat, the fixed seat is provided with a main shaft driven by the motor, and a rotating cylinder, the top of the main shaft extends into the rotating cylinder and drives the rotating cylinder to rotate, and the mounting plate is arranged on the top of the rotating cylinder.

所述转动筒内设有所述第二动力源,所述第二动力源为偏振电机。The second power source is provided inside the rotating cylinder, and the second power source is a polarization motor.

所述安装板底部设有连接板,所述偏振电机通过螺钉安装于所述连接板上,所述转动筒边缘设有凸缘,所述凸缘上端面设有弹性件,所述弹性件的上端面与所述连接板的下端面抵压配合。The bottom of the mounting plate is provided with a connecting plate, the polarizing motor is mounted on the connecting plate through screws, the edge of the rotating cylinder is provided with a flange, and the upper end of the flange is provided with an elastic member. The upper end surface is press-fitted with the lower end surface of the connecting plate.

所述弹性件为弹簧。The elastic member is a spring.

还包括研磨液放置罐,所述研磨液放置罐与所述导管连通,所述导管上设有单向阀,所述单向阀依次与所述研磨液放置罐与刀具连通。It also includes a grinding liquid storage tank, the grinding liquid storage tank communicates with the conduit, and the conduit is provided with a one-way valve, and the one-way valve communicates with the grinding liquid storage tank and the tool in turn.

所述超声发生器发出的频率为15000~30000Hz,振幅为15~50μm和所述偏振电机的输出振动的频率为20~200Hz、振幅为100~200μm。The ultrasonic generator emits a frequency of 15000-30000 Hz and an amplitude of 15-50 μm, and the output vibration frequency of the polarization motor is 20-200 Hz and an amplitude of 100-200 μm.

本发明的有益效果是:本发明提供复频振动微结构表面加工装置,在普通超声加工的基础上辅助加工方法,其加入的辅助加工的三种方法:在工具中加入压缩空气对磨料磨料进行加速引流(通过软管带动磨粒磨料冲向工件的加工表面,降低研磨温度,有利于排屑);对装有工件的安装板辅以旋转运动(使磨粒磨料在加工的过程中能更好的汇聚,提高磨粒磨料的切削使用效率);对装有工件的安装板加入低频振动,低频振动与超声振动使磨粒磨料的碰撞更加的充分。The beneficial effects of the present invention are: the present invention provides a multi-frequency vibration microstructure surface processing device, on the basis of ordinary ultrasonic processing, auxiliary processing methods, three methods of auxiliary processing added by it: adding compressed air to the tool to perform abrasive grinding Accelerated drainage (through the hose to drive the abrasive grains and abrasives to the processing surface of the workpiece, reducing the grinding temperature, which is conducive to chip removal); the mounting plate with the workpiece is supplemented by rotating motion (to make the abrasive grains and abrasives in the process of processing more. Good convergence, improve the cutting efficiency of abrasive grains and abrasives); add low-frequency vibration to the mounting plate with workpieces, low-frequency vibration and ultrasonic vibration make the collision of abrasive grains and abrasives more sufficient.

附图说明Description of drawings

图1为本发明一个实施例的剖视示意图。Fig. 1 is a schematic cross-sectional view of an embodiment of the present invention.

图2为本发明一个实施例的侧视剖视示意图。Fig. 2 is a schematic side view sectional view of an embodiment of the present invention.

图3为图1中A处的放大示意图。FIG. 3 is an enlarged schematic view of point A in FIG. 1 .

图4为图2中B处的放大示意图。FIG. 4 is an enlarged schematic view of point B in FIG. 2 .

图5为图2中C处的放大示意图。FIG. 5 is an enlarged schematic view of point C in FIG. 2 .

图6为本发明一个实施例的原理示意图。Fig. 6 is a schematic diagram of the principle of an embodiment of the present invention.

具体实施方式Detailed ways

下面结合附图对本发明作进一步说明:复频振动微结构表面加工装置,包括对应设置的基座1和支架2,所述支架上设有可升降的横梁21,所述横梁上设有与超声发生器6连接的换能器22,所述换能器底部连接有变幅杆23,所述变幅杆底部设有研磨头24,所述研磨头内设有气流通道241;所述基座上设有由第一动力源91带动转动的平台11,所述平台上设有第二动力源92带动振动的安装板12,所述安装板上设有用于固定工件7的夹具121;还包括空气压缩机3,所述空气压缩机通过导管31与所述气流通道连通。作为优选,该夹具为三爪卡盘,工件外壁为圆柱形通过卡盘定位。The present invention will be further described below in conjunction with the accompanying drawings: the multi-frequency vibration microstructure surface processing device includes a correspondingly arranged base 1 and a support 2, the support is provided with a liftable beam 21, and the beam is provided with an ultrasonic The transducer 22 connected to the generator 6, the bottom of the transducer is connected with a horn 23, the bottom of the horn is provided with a grinding head 24, and an air flow channel 241 is provided in the grinding head; the base A platform 11 driven by the first power source 91 to rotate is provided on the platform, and a mounting plate 12 driven by the second power source 92 to vibrate is provided on the platform, and a clamp 121 for fixing the workpiece 7 is provided on the mounting plate; An air compressor 3 , the air compressor communicates with the airflow channel through a conduit 31 . Preferably, the fixture is a three-jaw chuck, and the outer wall of the workpiece is cylindrical and positioned by the chuck.

参照说明书附图6,该研磨头上设有微小刀具249,微小刀具只有超声上下振动,不转动,工件在安装板上既有转动,又有低频上下振动,工件和微小刀具的相对运动,就加工出来了表面微结构,同时超声空化作用对表面微结构边缘和内部进行抛光加工,这样使得复杂的微结构具有更好的性能。Referring to accompanying drawing 6 of the specification, the grinding head is provided with a tiny cutter 249, the tiny cutter only vibrates up and down ultrasonically, and does not rotate. The surface microstructure is processed, and at the same time, ultrasonic cavitation polishes the edge and interior of the surface microstructure, which makes the complex microstructure have better performance.

通过实验我们发现脆硬金属材料都可通过超声振动加工方法来实现,这种加工方式一般都更加适用于加工玻璃、陶瓷等不导电的非金属脆硬材料。超声振动微结构功能表面加工技术是将超声振动系统应用于精密加工和超精密加工的新技术,且微结构功能表面所体现出来的功能有非常优越的性能,所加工出来的零件具有可以传递材料的物理、化学等特殊的性能。具体加工原理如下:Through experiments, we found that brittle and hard metal materials can be processed by ultrasonic vibration processing. This processing method is generally more suitable for processing non-conductive non-metallic brittle and hard materials such as glass and ceramics. Ultrasonic vibration microstructure functional surface processing technology is a new technology that applies ultrasonic vibration system to precision machining and ultra-precision machining, and the function reflected by the microstructure functional surface has very superior performance, and the processed parts have the ability to transfer materials Physical, chemical and other special properties. The specific processing principle is as follows:

在气流驱动下复频振动微结构加工装置(原理如图6所示),包括超声振动机构、低频振动机构、气流输入机构、化学抛光液输送机构和刀具。超声振动系统包括超声发生器、换能器和变幅杆,用于产生超声频振动;空气压缩机通过导管与研磨头连通,研磨头周向外壁上设有若干通孔。研磨工具头具有超声频振动;工件具有低频振动和随工作台的旋转运动;根据轨迹法原理可以生成微/纳米纹理。The multi-frequency vibration microstructure processing device driven by airflow (the principle is shown in Figure 6), includes an ultrasonic vibration mechanism, a low-frequency vibration mechanism, an airflow input mechanism, a chemical polishing liquid delivery mechanism and a tool. The ultrasonic vibration system includes an ultrasonic generator, a transducer and a horn for generating ultrasonic frequency vibration; the air compressor communicates with the grinding head through a conduit, and several through holes are arranged on the peripheral outer wall of the grinding head. The grinding tool head has ultrasonic frequency vibration; the workpiece has low frequency vibration and rotational movement with the worktable; micro/nano texture can be generated according to the principle of trajectory method.

同时超声研磨可以研磨微/纳米纹理结构内部和边界的表面,这样可以得到表面质量好的微/纳米纹理结构。超声微研磨装置的工作原理是:超声波发生器将220V、50Hz的交流电转换为超声频电振荡信号,换能器将超声波发生器产生的电振荡信号转换为超声频机械振动,变幅杆将换能器的振动放大后传输给研磨工具。At the same time, ultrasonic grinding can grind the surface of the micro/nano texture structure and the boundary, so that the micro/nano texture structure with good surface quality can be obtained. The working principle of the ultrasonic micro-grinding device is: the ultrasonic generator converts the 220V, 50Hz alternating current into an ultrasonic frequency electrical oscillation signal, the transducer converts the electrical oscillation signal generated by the ultrasonic generator into an ultrasonic frequency mechanical vibration, and the horn will change The vibration of the transducer is amplified and transmitted to the grinding tool.

研磨工具将超声振动传递给研磨液71,研磨液在超声振动作用下产生空化效应。空化效应是液体中泡核在声强作用下振动、生长和崩溃、闭合的动力学过程。在压力波的作用下,液体中分子的平均距离随着分子的振动而变化,当对液体施加足够的负压时,分子间距离超过保持液体作用的临界分子间距离,就会形成空穴,一旦空穴形成,它将一直增长至负声压达到极大值,但是在相继而来的声波正压相内这些空穴又将被压缩,其结果是一些空化泡将进入持续振荡,而另外一些将完全崩溃。并伴生强烈的冲击波和时速达400km的射流,射流冲击波推动磨粒研磨工件。在气压的作用下,会增加其空化的效率,进而增加超声波研磨的效率,由超声震动机构产生一个超声频机械震荡,传递到研磨头,研磨头对工件进行研磨;并通过空压机将气流打入研磨头内,并从研磨头上的通孔冲出,对工件及研磨液进行冲刷,增加了研磨液的空化效率而且利于排除磨屑。同时化学抛光液的化学作用与超声空化的物理作用同时对工件表面进行抛光,提高了加工效率。The grinding tool transmits ultrasonic vibration to the grinding fluid 71, and the grinding fluid produces cavitation effect under the action of the ultrasonic vibration. Cavitation effect is the dynamic process of vibration, growth, collapse and closure of bubble nuclei in liquid under the action of sound intensity. Under the action of the pressure wave, the average distance of the molecules in the liquid changes with the vibration of the molecules. When a sufficient negative pressure is applied to the liquid, the distance between the molecules exceeds the critical distance between the molecules that maintain the action of the liquid, and a cavity will be formed. Once the cavitation is formed, it will grow until the negative acoustic pressure reaches a maximum value, but these cavities will be compressed again in the subsequent positive pressure phase of the acoustic wave. As a result, some cavitation bubbles will enter into continuous oscillation, while Others will collapse completely. It is accompanied by a strong shock wave and a jet with a speed of 400km per hour, and the jet shock wave pushes the abrasive grains to grind the workpiece. Under the action of air pressure, it will increase its cavitation efficiency, and then increase the efficiency of ultrasonic grinding. The ultrasonic vibration mechanism generates an ultrasonic mechanical vibration, which is transmitted to the grinding head, and the grinding head grinds the workpiece; and through the air compressor. The air flow enters the grinding head and rushes out from the through hole on the grinding head to wash the workpiece and the grinding liquid, which increases the cavitation efficiency of the grinding liquid and facilitates the removal of grinding debris. At the same time, the chemical action of the chemical polishing liquid and the physical action of the ultrasonic cavitation simultaneously polish the surface of the workpiece, which improves the processing efficiency.

综上,本发明在普通超声加工的基础上辅助加工方法,其加入的辅助加工的三种方法:在工具中加入压缩空气对磨料磨料进行加速引流(通过软管带动磨粒磨料冲向工件的加工表面,降低研磨温度,有利于排屑);对装有工件的安装板辅以旋转运动(使磨粒磨料在加工的过程中能更好的汇聚,提高磨粒磨料的切削使用效率);对装有工件的安装板加入低频振动,低频振动与超声振动使磨粒磨料的碰撞更加的充分。To sum up, the present invention assists the processing method on the basis of ordinary ultrasonic processing, and adds three methods of auxiliary processing: adding compressed air to the tool to accelerate the drainage of the abrasive (abrasives are driven to the workpiece through the hose) machining surface, reducing the grinding temperature, which is conducive to chip removal); the mounting plate with the workpiece is supplemented by rotating motion (so that the abrasive grains can be better gathered during the processing process, and the cutting efficiency of the abrasive grains and abrasives can be improved); Low-frequency vibration is added to the mounting plate with the workpiece, and the low-frequency vibration and ultrasonic vibration make the collision of abrasive grains and abrasives more sufficient.

在本实施例中,如图所示,所述气流通道包括设于所述研磨头侧壁的进口2411和设于所述研磨头底部的出口2412,所述进口与所述出口连通。In this embodiment, as shown in the figure, the airflow channel includes an inlet 2411 provided on the side wall of the grinding head and an outlet 2412 provided at the bottom of the grinding head, and the inlet communicates with the outlet.

在本实施例中,如图所示,所述支架上设有由第三动力源驱动转动的丝杆201,所述丝杆上设有相配合的滑座202,所述横梁与所述滑座连接。第三动力源可以为电机等,通过电机带动丝杆转动,进而带动滑座上下活动。In this embodiment, as shown in the figure, a screw rod 201 driven and rotated by a third power source is provided on the support, and a sliding seat 202 is provided on the screw rod, and the beam and the sliding seat 202 are arranged on the screw rod. seat connection. The third power source can be a motor, etc., and the motor drives the screw to rotate, and then drives the sliding seat to move up and down.

在本实施例中,如图所示,所述第一动力源为电机,所述基座上设有固定座10,所述固定座上设有由所述电机带动转动的主轴101,还包括转动筒102,所述主轴顶端伸入所述转动筒内且带动所述转动筒转动,所述安装板设于所述转动筒顶部。作为优选,电机可以通过齿轮传动机构带动主轴转动。In this embodiment, as shown in the figure, the first power source is a motor, the base is provided with a fixed seat 10, and the fixed seat is provided with a main shaft 101 driven by the motor to rotate, and includes The rotating cylinder 102, the top end of the main shaft extends into the rotating cylinder and drives the rotating cylinder to rotate, and the mounting plate is arranged on the top of the rotating cylinder. Preferably, the motor can drive the main shaft to rotate through a gear transmission mechanism.

在本实施例中,如图所示,所述转动筒内设有所述第二动力源,所述第二动力源为偏振电机。In this embodiment, as shown in the figure, the rotating cylinder is provided with the second power source, and the second power source is a polarization motor.

在本实施例中,如图所示,所述安装板底部设有连接板26,所述偏振电机通过螺钉安装于所述连接板上,所述转动筒边缘设有凸缘103,所述凸缘上端面设有弹性件104,所述弹性件的上端面与所述连接板的下端面抵压配合。由于一个装置的振动容易对整个系统的振动产生更大的影响,则采用旋转部分和振动部分之间的振动连接使用弹簧和螺栓进行对基座振动影响进行弱化,采用合适刚性的弹簧来消除偏振电机对系统振动的影响。In this embodiment, as shown in the figure, the bottom of the mounting plate is provided with a connecting plate 26, the polarization motor is mounted on the connecting plate through screws, and a flange 103 is provided on the edge of the rotating cylinder. An elastic piece 104 is provided on the upper end surface of the edge, and the upper end surface of the elastic piece is press-fitted with the lower end surface of the connecting plate. Since the vibration of a device tends to have a greater impact on the vibration of the entire system, the vibration connection between the rotating part and the vibrating part is used to weaken the vibration of the base using springs and bolts, and the spring with appropriate rigidity is used to eliminate polarization. Effect of motor on system vibration.

在本实施例中,如图所示,所述弹性件为弹簧。In this embodiment, as shown in the figure, the elastic member is a spring.

在本实施例中,如图所示,还包括研磨液放置罐8,所述研磨液放置罐与所述导管连通,所述导管上设有单向阀311,所述单向阀依次与所述研磨液放置罐与刀具连通。防止导流,使用安全。In this embodiment, as shown in the figure, it also includes a grinding liquid storage tank 8, the grinding liquid storage tank is communicated with the conduit, and the conduit is provided with a one-way valve 311, and the one-way valve is sequentially connected with the The above-mentioned grinding liquid placement tank is communicated with the cutting tool. Prevent diversion, safe to use.

在本实施例中,如图所示,所述超声发生器发出的频率为15000~30000Hz,振幅为15~50μm和所述偏振电机的输出振动的频率为20~200Hz、振幅为100~200μm。在该范围内,可以取得较好的研磨效果。In this embodiment, as shown in the figure, the frequency emitted by the ultrasonic generator is 15000-30000 Hz and the amplitude is 15-50 μm, and the output vibration frequency of the polarization motor is 20-200 Hz and the amplitude is 100-200 μm. Within this range, a better grinding effect can be achieved.

在本发明的描述中,需要理解的是,术语“长度”、“宽度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In describing the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientation or positional relationship indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than Nothing indicating or implying that a referenced device or element must have a particular orientation, be constructed, and operate in a particular orientation should therefore not be construed as limiting the invention.

此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

参考附图描述的实施例是示例性的,旨在用于解释本发明,而不能理解为对本发明的限制。实施例不应视为对本发明的限制,但任何基于本发明的精神所作的改进,都应在本发明的保护范围之内。The embodiments described with reference to the figures are exemplary, and are intended to explain the present invention, and should not be construed as limiting the present invention. The embodiments should not be regarded as limiting the present invention, but any improvement based on the spirit of the present invention should be within the protection scope of the present invention.

Claims (10)

1. multifrequency vibration micro-structure surface processing unit (plant), including the pedestal being correspondingly arranged(1)And bracket(2), it is characterised in that:Institute Bracket is stated equipped with liftable crossbeam(21), the crossbeam is equipped with and ultrasonic generator(6)The energy converter of connection(22), institute It states energy converter bottom and is connected with amplitude transformer(23), the amplitude transformer bottom is equipped with grinding head(24), the grinding head is interior to be equipped with gas Circulation road(241);
The pedestal is equipped with by the first power source(91)Drive the platform of rotation(11), the platform is equipped with the second power source (92)Drive the mounting plate of vibration(12), the mounting plate is equipped with for fixing workpiece(7)Fixture(121);
It further include air compressor(3), the air compressor passes through conduit(31)It is connected to the airflow channel.
2. multifrequency vibration micro-structure surface processing unit (plant) according to claim 1, it is characterised in that:The airflow channel Import including being set to the grinding head side wall(2411)With the outlet for being set to the grinding head bottom(2412), the import with The outlet.
3. multifrequency vibration micro-structure surface processing unit (plant) according to claim 2, it is characterised in that:It is set on the bracket There is the screw rod rotated by third power source drive(201), the screw rod is equipped with the slide matched(202), the crossbeam with The slide connection.
4. multifrequency vibration micro-structure surface processing unit (plant) according to claim 3, it is characterised in that:First power Source is motor, and the pedestal is equipped with fixing seat(10), the fixing seat, which is equipped with, drives the main shaft rotated by the motor (101), further include rotary cylinder(102), the rotary cylinder rotation is protruded into the rotary cylinder and is driven on the main shaft top, described Mounting plate is set at the top of the rotary cylinder.
5. multifrequency vibration micro-structure surface processing unit (plant) according to claim 4, it is characterised in that:In the fixing seat Guide protrusions equipped with v-shaped(108), the rotary cylinder bottom is equipped with the guide groove being slidably matched with the guide protrusions (1021).
6. multifrequency vibration micro-structure surface processing unit (plant) according to claim 5, it is characterised in that:In the rotary cylinder Equipped with second power source, second power source is polarization motor.
7. multifrequency vibration micro-structure surface processing unit (plant) according to claim 6, it is characterised in that:The mounting plate bottom Portion is equipped with connecting plate(26), the polarization motor is installed on the connecting plate by screw, and the rotary cylinder edge is equipped with convex Edge(103), the flange upper surface is equipped with elastic component(104), the lower end surface of the upper surface of the elastic component and the connecting plate Compress cooperation.
8. multifrequency vibration micro-structure surface processing unit (plant) according to claim 7, it is characterised in that:The elastic component is Spring.
9. multifrequency vibration micro-structure surface processing unit (plant) according to claim 8, it is characterised in that:It further include lapping liquid Placing tank(8), the lapping liquid placing tank is connected to the conduit, and the conduit is equipped with check valve(311), the check valve Successively it is connected to the lapping liquid placing tank with cutter.
10. multifrequency vibration micro-structure surface processing unit (plant) according to claim 9, it is characterised in that:The ultrasound hair The frequency that raw device issues is 15000 ~ 30000Hz, and amplitude is 15 ~ 50 μm and the frequency of the output vibration of the polarization motor is 20 ~ 200Hz, amplitude are 100 ~ 200 μm.
CN201810715779.3A 2018-07-03 2018-07-03 Multifrequency vibration micro-structure surface processing unit (plant) Pending CN108818163A (en)

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