CN108579366A - A kind of exhaust processor based on brown gases - Google Patents
A kind of exhaust processor based on brown gases Download PDFInfo
- Publication number
- CN108579366A CN108579366A CN201810505691.9A CN201810505691A CN108579366A CN 108579366 A CN108579366 A CN 108579366A CN 201810505691 A CN201810505691 A CN 201810505691A CN 108579366 A CN108579366 A CN 108579366A
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- Prior art keywords
- gas
- exhaust
- combustion box
- exhaust gas
- water tank
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- 239000007789 gas Substances 0.000 title claims abstract description 128
- 238000002485 combustion reaction Methods 0.000 claims abstract description 57
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 52
- 239000001301 oxygen Substances 0.000 claims abstract description 25
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000000446 fuel Substances 0.000 claims abstract description 15
- 238000009434 installation Methods 0.000 claims abstract description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 33
- 229910052757 nitrogen Inorganic materials 0.000 claims description 17
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 8
- 239000002912 waste gas Substances 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 6
- 238000005868 electrolysis reaction Methods 0.000 claims description 5
- 206010016754 Flashback Diseases 0.000 claims description 4
- 239000002341 toxic gas Substances 0.000 claims description 4
- 230000002411 adverse Effects 0.000 claims description 3
- 239000000112 cooling gas Substances 0.000 claims description 3
- 238000003860 storage Methods 0.000 claims description 3
- 238000004880 explosion Methods 0.000 abstract description 6
- 230000009471 action Effects 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 239000002360 explosive Substances 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 4
- 238000003889 chemical engineering Methods 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Treating Waste Gases (AREA)
Abstract
The present invention relates to a kind of exhaust processors based on brown gases, fuel supply comb, combustion box, exhaust gas including brown gas generator, igniter, connection igniter and brown gas generator flow into pipe, cooler bin, water tank, exhaust pipe, the installation connection successively from the bottom up of the water tank, cooler bin, combustion box, the exhaust pipe are mounted on one side of water tank and are connected with the inside of water tank.The beneficial effects of the invention are as follows：Using brown gases as fuel burning when generate high-temperature vapor, avoid because fuel combustion generate polluted gas；High-temperature vapor can make to be heated evenly in combustion box, to the imflammable gas in the exhaust gas for inflow of igniting；Since brown gases have the peculiar property for causing implosion phenomenon in burning, the portion in combustion explosion of the explosive gas in exhaust gas can be made to show explosion phenomenon while making formation negative pressure in combustion box that there is sucking action to exhaust gas and oxygen, promote the imflammable gas burning in exhaust gas abundant.
Description
Technical field
The present invention relates to technical field of waste gas treatment more particularly to a kind of exhaust processors based on brown gases, more in detail
Thin explanation is to handle the exhaust-gas treatment for the toxic gas being discharged in the engineerings such as semiconductor manufacturing engineering or chemical engineering
Device.
Background technology
In general, semiconductor manufacturing engineering or the exhaust gas of chemical engineering discharge, especially as containing C2F4, CF4, C3F8,
NF3, SF6The exhaust gas of equal perfluorochemicals, toxicity, explosivity and corrosivity are all very strong, thus it is more than harmful, if not
Purification is exhausted directly in air that serious environmental pollution can be caused.Therefore it is discharged in semiconductor manufacturing engineering or chemical engineering useless
Gas needs just be discharged in air after the content of harmful components is reduced to allowable range or less.The nothing of such exhaust gas
Evilization processing have mode of oxidizing, catalyst mode of oxidizing, plasma isolation, chemicals treatment mode, absorb removing method,
Various exhaust-gas treatment processor such as cryogenic freezing mode is being used.Especially the exhaust-gas treatment of mode of oxidizing is equipped, and is
Combustion box is flowed exhaust into, then will be generated instead with oxygen in heater box after the exhaust gas utilization heater box preheating for flowing into combustion box
Answer waste gas decomposition.
Brown gases are the gas that will be obtained after water electrolysis, be hydrogen and oxygen proportion are 2:1 mixed gas.Usually will
Water electrolysis generates hydrogen in cathode, and anode generates oxygen, is Blang without detaching the gas that two kinds of gases are collected simultaneously by acquisition
Gas.Brown gases are different from general gas flow, and there is the peculiar property for causing implosion phenomenon in when burning.That is, not showed when burning quick-fried
Fried phenomenon instead internally assemble and form focus by surrounding vacuum by spark.So can obtain can be by fusing point for combusting Brown gas body
Highest tungsten can distil the highest temperature of degree.Again because not emitting to outside, without because of energy loss caused by radiant heat
So possessing outstanding energy efficiency.Moreover because burning only will produce water, without pollution problem.
The fuel used in existing waste gas treatment process will produce polluted gas in burning, increase exhaust-gas treatment hardly possible
Degree；Exhaust gas in exhaust gas is susceptible to explosion phenomenon when common heating is burnt；Existing combustion box using air and exhaust gas into
Row mixing, be susceptible to oxygen concentration it is low when burn it is insufficient；Treated, and exhaust gas temperature in discharge is high, to ambient atmosphere ring
Border impacts；The junction of combustion box and water tank easy tos produce powder due to temperature difference.
Invention content
It is an object of the invention to overcome problem above of the existing technology, a kind of exhaust gas based on brown gases is provided
Processor.
To realize above-mentioned technical purpose and the technique effect, the invention is realized by the following technical scheme：
A kind of exhaust processor based on brown gases includes the cloth that water electrolysis is mixed to brown gases at oxygen and hydrogen
The fuel supply row of bright gas generator, the igniter for lighting brown gases, connection igniter and brown gas generator
The combustion box for managing, providing the square in waste gas burning space, the exhaust gas being connected with combustion box flow into pipe, to the exhaust gas after burning
Cooling cooler bin is carried out, the water tank of energy water decomposition gas or toxic gas in exhaust gas is dissolved and absorbed, treated gives up for being discharged
The exhaust pipe of gas, installation connection successively, the exhaust pipe are mounted on water tank one from the bottom up for the water tank, cooler bin, combustion box
Side and it is connected with the inside of water tank.
Further setting, the cooler bin include two funnel shaped deflectors, and two deflectors overlap intermediate formed
For the logical cavity of cooling gas stream, the surrounding of the cavity is equipped with air nozzle, and the air nozzle is compressed by conduit and air
Machine is connected to.
So set, the cold air that air nozzle sprays can form isolation barrier, the interconnecting piece of combustion box and water tank is avoided
Powder is generated because of temperature difference.
Further it is arranged, porous plate is installed in the water tank, the center of the porous plate is equipped with square hole, the square hole
Surrounding is equipped with four pieces of partition boards perpendicular with porous plate, and it is logical that four pieces of partition boards enclose the air-flow to circulate downwards for exhaust gas
Road is located at the sparge pipe being provided with above porous plate for water spray in the water tank.
So set, exhaust gas is fully scattered by porous plate, the hydrone sprayed with sparge pipe comes into full contact with, and effectively removes
Toxic and soluble gas in exhaust gas.
Further it is arranged, the more insulating tubes for keeping the temperature and guiding exhaust gas on fire is installed in the combustion box.
So set, insulating tube can store the heat of combustion of brown gas generation, keep the Temperature Distribution in combustion box equal
It is even, be conducive to imflammable gas arbitrary space combustion in combustion box.
Further setting, the outer cup of the combustion box are equipped with the protective shell parallel with combustion box, the protective shell with
Oxygen supply access is formed between combustion box, is equipped on the combustion box and multiple is sprayed in oxygen supply access into combustion box
The spray-hole of oxygen.
So set, keeping oxygen in combustion box sufficient, ensure that imflammable gas fully burns.
Further it is arranged, the nitrogen nozzle for cooling down exhaust gas is installed in the exhaust pipe, the nitrogen nozzle passes through
Pipeline is connected to nitrogen storage tank, is located in the exhaust pipe above nitrogen nozzle and is equipped with water spout.
So set, to treated, high-temp waste gas cools down nitrogen nozzle injection nitrogen, it is located above nitrogen nozzle
Water spout phase exhaust pipe in spray water, on the one hand be used for exhaust gas cool down, on the other hand be used for the inner wall of exhaust pipe is rushed
Brush avoids the remaining dust in exhaust gas from being deposited in exhaust pipe because of cooling condense.
Further setting, the junction of the igniter and fuel supply comb, which is equipped with, prevents oxygen and hydrogen adverse current
Flash-back arrestor.
It flows back to brown gas generator so set, preventing the brown gases lighted from supplying comb by gas.
The beneficial effects of the invention are as follows：Using brown gases as fuel burning when generate high-temperature vapor, avoid because of fuel
Burning generates polluted gas；High-temperature vapor can make to be heated evenly in combustion box, to flammable in the exhaust gas for inflow of igniting
Property gas；Since brown gases have the peculiar property for causing implosion phenomenon in burning, the explosive gas in exhaust gas can be made
In combustion explosion, portion shows explosion phenomenon while making to form negative pressure in combustion box to exhaust gas and oxygen with sucking action, promotion
Imflammable gas burning in exhaust gas is abundant；Cooler bin is set in the interconnecting piece of combustion box and water tank, avoids combustion box and water tank
It is in direct contact because temperature difference generates powder.
Description of the drawings
Attached drawing described herein is used to provide further understanding of the present invention, and is constituted part of this application, this hair
Bright illustrative embodiments and their description are not constituted improper limitations of the present invention for explaining the present invention.In the accompanying drawings：
Fig. 1 is the sectional view of the exhaust processor of the embodiment of the present invention；
Fig. 2 is the decomposing section of the exhaust processor of the embodiment of the present invention；
Fig. 3 is the structural schematic diagram of the part-structure of the exhaust processor of the embodiment of the present invention；
Figure label explanation：1- brown gas generators, 2- igniters, 21- flash-back arrestors, 3- fuel supply comb, 4- combustions
Saggar, 41- insulating tubes, 42- oxygen supplies access, 5- exhaust gas inflow pipe, 6- cooler bins, 7- water tanks, 71- sparge pipes, 72- are porous
Plate, 8- exhaust pipes, 81- nitrogen nozzle, 82- water spouts.
Specific implementation mode
It is below with reference to the accompanying drawings and in conjunction with the embodiments, next that the present invention will be described in detail.
As shown in Figures 1 to 3, a kind of exhaust processor based on brown gases, including water electrolysis is mixed at oxygen and hydrogen
Close the brown gas generator that brown gases are made, the igniter for lighting brown gases, connection igniter and brown gases
The fuel supply comb of generator, the combustion box of square that waste gas burning space is provided, the waste gas stream that is connected with combustion box
Enter pipe, the water tank of energy water decomposition gas or toxic gas in cooling cooler bin, solution absorption exhaust gas is carried out to the exhaust gas after burning,
For the exhaust pipe for the exhaust gas that is discharged that treated, the installation connection successively from the bottom up of water tank, cooler bin, combustion box, exhaust pipe peace
It is connected mounted in one side of water tank and with the inside of water tank.
Cooler bin includes two funnel shaped deflectors, and two deflectors overlap what intermediate formation was led to for cooling gas stream
The surrounding of cavity, cavity is equipped with air nozzle, and air nozzle is connected to by conduit with air compressor.
Porous plate is installed, the center of porous plate is equipped with square hole, and the surrounding of square hole is equipped with four pieces and porous plate in water tank
Perpendicular partition board, four pieces of partition boards enclose the gas channel to circulate downwards for exhaust gas, are located in water tank above porous plate and set
It is equipped with the sparge pipe for water spray.
The more insulating tubes for keeping the temperature and guiding exhaust gas on fire are installed in combustion box.The Blang lighted in igniter
Gas is the mixed gas of hydrogen and oxygen, and vapor is restored to after completely burned with 1200 degree or more of heating temperature pair
Insulating tube is heated, and after so that burning the temperature inside the box is become uniformly, the ignite exhaust gas of inflow of insulating tube burns.
The outer cup of combustion box is equipped with the protective shell parallel with combustion box, forms oxygen between protective shell and combustion box and supplies
Access is answered, multiple spray-holes for spraying oxygen in oxygen supply access into combustion box are installed on combustion box.
Further it is arranged, the nitrogen nozzle for cooling down exhaust gas is installed in the exhaust pipe, the nitrogen nozzle passes through
Pipeline is connected to nitrogen storage tank, is located in the exhaust pipe above nitrogen nozzle and is equipped with water spout.
The junction of igniter and fuel supply comb is equipped with the flash-back arrestor for preventing oxygen and hydrogen adverse current.
Using brown gases as fuel burning when generate high-temperature vapor, avoid because fuel combustion generate polluted gas；It is high
Temperature steam can make to be heated evenly in combustion box, to the imflammable gas in the exhaust gas for inflow of igniting；Due to brown gases
There is the peculiar property for causing implosion phenomenon in burning, the portion in combustion explosion of the explosive gas in exhaust gas can be made to show quick-fried
Fried phenomenon makes formation negative pressure in combustion box have sucking action to exhaust gas and oxygen simultaneously, promotes the imflammable gas combustion in exhaust gas
It burns abundant；Cooler bin is set in the interconnecting piece of combustion box and water tank, combustion box is avoided to be in direct contact with water tank because temperature difference generates
Powder.
It is water tank below combustion box and cooler bin, when exhaust gas is flowed by porous plate, exhaust gas passes through sprays with sprinkler head
Hydrone carries out 1 water process.It will continue to by exhaust pipe by the exhaust gas of above-mentioned water tank, be located on nitrogen nozzle in exhaust pipe
The hydrone that the water spout of side sprays carries out exhaust gas cooling and 2 water process.
The basic principles, main features and advantages of the present invention have been shown and described above.The technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the above embodiments and description only describe this
The principle of invention, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes
Change and improvement all fall within the protetion scope of the claimed invention.
Claims (7)
1. a kind of exhaust processor based on brown gases, it is characterised in that：Including water electrolysis is mixed system at oxygen and hydrogen
At the brown gas generator of brown gases（1）, igniter for lighting brown gases（2）, connection igniter（2）With Blang
Gas generator（1）Fuel supply comb（3）, provide waste gas burning space square combustion box（4）With combustion box
（4）The exhaust gas being connected flows into pipe（5）, cooling cooler bin is carried out to the exhaust gas after burning（6）, dissolve and absorb can water in exhaust gas
Solve the water tank of gas or toxic gas（7）, for the exhaust pipe for the exhaust gas that is discharged that treated（8）, the water tank（7）, cooler bin
（6）, combustion box（4）Installation connection successively from the bottom up, the exhaust pipe（8）Mounted on water tank（7）Side and and water tank（7）'s
Inside is connected.
2. the exhaust processor according to claim 1 based on brown gases, it is characterised in that：The cooler bin（6）Packet
Include two funnel shaped deflectors, two deflectors overlap it is intermediate formed for the logical cavity of cooling gas stream, the cavity
Surrounding is equipped with air nozzle, and the air nozzle is connected to by conduit with air compressor.
3. the exhaust processor according to claim 1 based on brown gases, it is characterised in that：The water tank（7）Middle peace
Equipped with porous plate（72）, the porous plate（72）Center be equipped with square hole, the surrounding of the square hole is equipped with four pieces and porous plate
Perpendicular partition board, four pieces of partition boards enclose the gas channel to circulate downwards for exhaust gas, the water tank（7）In be located at it is porous
Plate（72）Top be provided with the sparge pipe for water spray（71）.
4. the exhaust processor according to claim 1 based on brown gases, it is characterised in that：Installation in the combustion box
There are the more insulating tubes for keeping the temperature and guiding exhaust gas on fire（41）.
5. the exhaust processor according to claim 1 based on brown gases, it is characterised in that：The combustion box（4）'s
Outer cup is equipped with and combustion box（4）Parallel protective shell forms oxygen supply access between the protective shell and combustion box
(42), multiple spray-holes that oxygen in oxygen supply access is sprayed into combustion box are installed on the combustion box.
6. the exhaust processor according to claim 1 based on brown gases, it is characterised in that：The exhaust pipe（8）In
Nitrogen nozzle for cooling down exhaust gas is installed（81）, the nitrogen nozzle（81）It is connected to nitrogen storage tank by pipeline, it is described
Exhaust pipe（8）In be located at nitrogen nozzle（81）Top water spout is installed（82）.
7. the exhaust processor according to claim 1 based on brown gases, it is characterised in that：The igniter（2）With
Fuel supplies comb（3）Junction the flash-back arrestor for preventing oxygen and hydrogen adverse current is installed（21）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810505691.9A CN108579366A (en) | 2018-05-24 | 2018-05-24 | A kind of exhaust processor based on brown gases |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810505691.9A CN108579366A (en) | 2018-05-24 | 2018-05-24 | A kind of exhaust processor based on brown gases |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108579366A true CN108579366A (en) | 2018-09-28 |
Family
ID=63629275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810505691.9A Withdrawn CN108579366A (en) | 2018-05-24 | 2018-05-24 | A kind of exhaust processor based on brown gases |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108579366A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109974010A (en) * | 2019-03-26 | 2019-07-05 | 化州市联合民生轮业有限公司 | A kind of family life solid refuse processing unit |
| CN115999358A (en) * | 2023-01-06 | 2023-04-25 | 武汉大学 | A sulfur hexafluoride degradation device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000065525A (en) * | 1999-04-06 | 2000-11-15 | 김동수 | Gas scrubber |
| KR20040045981A (en) * | 2002-11-26 | 2004-06-05 | 엠에이티 주식회사 | Filter bag assembly for gas scrubber and gas scrubber having the same |
| CN1923342A (en) * | 2005-09-02 | 2007-03-07 | 清洁系统韩国股份有限公司 | Scrubber for processing semiconductor waste gas |
| KR100815024B1 (en) * | 2007-05-21 | 2008-03-18 | 김상남 | Waste Gas Incineration Treatment System by VEE System |
| KR20100103925A (en) * | 2009-03-16 | 2010-09-29 | 최동규 | Combustion device using brown's gas for promoting combustion of the fuel gas and method for the same |
| CN106211790A (en) * | 2015-03-26 | 2016-12-07 | 韩国能源技术研究院 | Energy-saving combustion device and method for incineration treatment of refractory harmful gas |
| CN208553685U (en) * | 2018-05-24 | 2019-03-01 | 无锡洁安洁通用设备有限公司 | A kind of exhaust processor based on brown gases |
-
2018
- 2018-05-24 CN CN201810505691.9A patent/CN108579366A/en not_active Withdrawn
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000065525A (en) * | 1999-04-06 | 2000-11-15 | 김동수 | Gas scrubber |
| KR20040045981A (en) * | 2002-11-26 | 2004-06-05 | 엠에이티 주식회사 | Filter bag assembly for gas scrubber and gas scrubber having the same |
| CN1923342A (en) * | 2005-09-02 | 2007-03-07 | 清洁系统韩国股份有限公司 | Scrubber for processing semiconductor waste gas |
| KR100815024B1 (en) * | 2007-05-21 | 2008-03-18 | 김상남 | Waste Gas Incineration Treatment System by VEE System |
| KR20100103925A (en) * | 2009-03-16 | 2010-09-29 | 최동규 | Combustion device using brown's gas for promoting combustion of the fuel gas and method for the same |
| CN106211790A (en) * | 2015-03-26 | 2016-12-07 | 韩国能源技术研究院 | Energy-saving combustion device and method for incineration treatment of refractory harmful gas |
| CN208553685U (en) * | 2018-05-24 | 2019-03-01 | 无锡洁安洁通用设备有限公司 | A kind of exhaust processor based on brown gases |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109974010A (en) * | 2019-03-26 | 2019-07-05 | 化州市联合民生轮业有限公司 | A kind of family life solid refuse processing unit |
| CN115999358A (en) * | 2023-01-06 | 2023-04-25 | 武汉大学 | A sulfur hexafluoride degradation device |
| CN115999358B (en) * | 2023-01-06 | 2024-05-24 | 武汉大学 | A sulfur hexafluoride degradation device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180928 |