CN108557787A - A kind of recycling crude argon method of purification again - Google Patents
A kind of recycling crude argon method of purification again Download PDFInfo
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- CN108557787A CN108557787A CN201810714139.0A CN201810714139A CN108557787A CN 108557787 A CN108557787 A CN 108557787A CN 201810714139 A CN201810714139 A CN 201810714139A CN 108557787 A CN108557787 A CN 108557787A
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- argon
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 title claims abstract description 299
- 229910052786 argon Inorganic materials 0.000 title claims abstract description 151
- 238000000034 method Methods 0.000 title claims abstract description 55
- 238000004064 recycling Methods 0.000 title claims abstract description 44
- 238000000746 purification Methods 0.000 title claims abstract description 38
- 239000007789 gas Substances 0.000 claims abstract description 70
- 239000001257 hydrogen Substances 0.000 claims abstract description 21
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000006243 chemical reaction Methods 0.000 claims abstract description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000003463 adsorbent Substances 0.000 claims abstract description 15
- 238000010521 absorption reaction Methods 0.000 claims abstract description 14
- 238000001816 cooling Methods 0.000 claims abstract description 10
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 229910001868 water Inorganic materials 0.000 claims description 10
- 239000001569 carbon dioxide Substances 0.000 claims description 9
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 9
- 239000006096 absorbing agent Substances 0.000 claims description 7
- 230000006837 decompression Effects 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000003139 buffering effect Effects 0.000 claims description 4
- 238000003795 desorption Methods 0.000 claims description 4
- 239000003610 charcoal Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 238000004781 supercooling Methods 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 13
- 229910052760 oxygen Inorganic materials 0.000 abstract description 13
- 239000001301 oxygen Substances 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract description 2
- 238000009434 installation Methods 0.000 abstract description 2
- 239000003921 oil Substances 0.000 description 19
- 238000011084 recovery Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 5
- 238000005265 energy consumption Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000010913 used oil Substances 0.000 description 2
- 241001076960 Argon Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 235000013876 argon Nutrition 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006392 deoxygenation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
- C01B23/0052—Physical processing only by adsorption in solids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0029—Obtaining noble gases
- C01B2210/0034—Argon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
- C01B2210/0045—Oxygen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
- C01B2210/0046—Nitrogen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
- C01B2210/0051—Carbon dioxide
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
- C01B2210/0068—Organic compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
The invention discloses a kind of recycling crude argon methods of purification again, recycle that argon gas is pressurized, with hydrogen hybrid reaction removes oxygen after primary precooling, high temperature argon after reaction is successively after cooling, secondary precooling, it is purified again to handle to obtain dry crude argon, it is characterized in that, dry crude argon is sent into the psa unit containing the first contactor and the second contactor, the first contactor for being filled with adsorbent selectively adsorbs oxygen, carbon dioxide, nitrogen gas component under operating pressure, and the pure argon after absorption is gone out by the first contactor top row；Second contactor desorbs the foreign gas adsorbed in adsorbent, and passes through the second contactor bottom inverse put discharge.The recycling crude argon method of purification again of the present invention simplifies technique and in-site installation construction, eliminates Deep Cooling Method and denitrogenate unit, the cost and manufacturing schedule of the complete set of equipments substantially reduced.
Description
Technical field
The present invention relates to a kind of method of gas recovery more particularly to a kind of recycling crude argon methods of purification again.
Background technology
Vertical pulling method is to produce the main method of monocrystalline silicon, and the monocrystalline silicon in the whole world 70%~80% is produced by vertical pulling method.Most
Common vertical pulling method production monocrystalline silicon technique is using i.e. as vacuum technology is again as the decompression crystal pulling technique of flowing atmosphere technique；Subtract
Pressure technique is that high purity argon, while vacuum pump are passed through to continuous constant speed into single crystal growing furnace burner hearth in silicon single crystal pulling process
Constantly from the outside pump Argon of burner hearth, keep in burner hearth vacustat in 20 supports or so, this existing vacuum technology of technique
The characteristics of, and have the characteristics of flowing atmosphere technique.The vacuum pump of crystal pulling technique is depressurized generally using slide valve pump, slide valve pump is with oil
To keep the oil-sealed rotary pump of sealing.Argon gas carries the Si oxide generated due to high temperature during crystal-pulling and impurity is waved
Object is sent out, and air is discharged by pumping for vacuum pump.
By the analysis to discharging argon gas, major impurity ingredient is oxygen, nitrogen, carbon monoxide, carbon dioxide, methane
Equal alkane；Recycling this part argon gas has very big realistic meaning.The known technology of argon gas recovery purifying：It is returned to coming from single crystal growing furnace
The argon gas of receipts carries out thick oil removing, then high-precision oil removing dedusting after compressed cooling；Then the hydro carbons such as methane are made by high-temperature catalytic
Water and carbon dioxide are produced with oxygen reaction with carbon monoxide, ensures that slightly excessively (impurity oxygen is inadequate for oxygen in catalysis reaction
Oxygen is then added)；By making excessive oxygen generate water with the hydrogen reaction being added after cooling under the action of catalyst, and ensure anti-
Answer hydrogen excessive, impurity component is water, carbon dioxide, hydrogen and nitrogen in argon gas after processing；Finally pass through argon gas room temperature to adsorb
Unit adsorbs water and carbon dioxide, obtains the crude argon for containing only nitrogen and hydrogen is impurity.Argon gas room temperature absorbing unit is by two
A absorber forms, and the adsorbent equipped with absorption water and carbon dioxide in absorber, an absorber carries out absorption work, another
It includes pressure release that a absorber, which carries out, heats, blows cold reproduction operation.When argon gas room temperature absorbing unit and psa unit pass through
Between cyclelog auto-controll operation switch.
In the method and apparatus of argon gas recovery purifying in patent 201210078306X monocrystalline silicon productions, cryogenic rectification portion
Divide and use air cycle refrigeration, high energy consumption, flow is complicated, the excess hydrogen emptying of addition, and utilization rate is low.For another example patent《It is a kind of
The argon gas recovery purifying equipment and argon gas recovery purifying method of double tower coupling》(application number：201410618341.5) in, use air
Compression, double-column process, energy consumption is without advantage, complicated, increase equipment investment.Therefore, those skilled in the art is dedicated to out
It is more succinct to send out flow, more convenient operation, the lower argon gas recovery method of energy consumption.
Invention content
The purpose of the present invention is being directed to more moving component in existing argon gas recycling, high energy consumption, big investment, Yi Jizhen
The problem of unit making is long in time limit, investment is big, the process is more complicated is denitrogenated to Deep Cooling Method, a kind of recycling crude argon is provided and is purified again
Method denitrogenates method by changing, keeps argon gas retracting device easier, more for economy.
To achieve the above object, the present invention uses following technical scheme：
The first aspect of the invention is to provide a kind of recycling crude argon method of purification again, and recycling argon gas is pressurized, primary
Oxygen is removed with hydrogen hybrid reaction after precooling, the high temperature argon after reaction is successively through cooling down, after secondary precooling, then purified place
Dry crude argon is managed to obtain, dry crude argon is sent into the pressure-variable adsorption list containing the first contactor and the second contactor
Member, first contactor for being filled with adsorbent selectively adsorb oxygen, carbon dioxide, nitrogen under operating pressure
Gas component, the pure argon after absorption are gone out by the first contactor top row；Second contactor will be inhaled in adsorbent
Attached foreign gas desorbs, and passes through the second contactor bottom inverse put discharge.
Further, in the recycling crude argon again method of purification, the recycling argon gas after the pressurization is first through crude argon
It is once pre-chilled into the first forecooler after gas surge tank buffering, the crude argon temperature after a precooling treatment is 5-8
℃。
Further, in the recycling crude argon again method of purification, the crude argon after a precooling treatment, first
Successively after oil strainer and active carbon adsorber oil removing, it is re-fed into oxygen-eliminating device and removes oxygen with hydrogen hybrid reaction.
It is further preferred that in the recycling crude argon again method of purification, inhaled through the oil strainer and activated carbon
Crude argon oil content after adnexa oil removing is less than 1ppm.
Further, in the recycling crude argon again method of purification, the temperature of the high temperature argon is 200-300
℃。
Further, in the recycling crude argon again method of purification, the high temperature argon is cooled to through subcooler
40 DEG C, then it is cooled to 5-8 DEG C through the second argon gas precooler.
Further, in the recycling crude argon again method of purification, the purification treating method is using purifier
The water and carbon dioxide in argon gas are removed, the argon gas main component after purification process is Ar, N2And O2。
Further, in the recycling crude argon again method of purification, go out from the first contactor top row pure
Purity of argon is 99%-99.99%.
Further, in the recycling crude argon again method of purification, second contactor is using decompression or often
The mode of pressure desorption or heating parsing desorbs the foreign gas adsorbed in adsorbent.
The present invention is had the following technical effect that compared with prior art using above-mentioned technical proposal：
The recycling crude argon method of purification again of the present invention, by the way that the crude argon dried is sent into psa unit, first
Selectively oxygen, carbon dioxide, nitrogen gas component are fallen in absorption to contactor under operating pressure, pure argon after absorption by
First contactor top row goes out；Second contactor desorbs the foreign gas adsorbed in adsorbent, and is inhaled by second
Attached container bottom inverse put discharge；Method of purification simplifies technique and in-site installation construction to the recycling crude argon again, eliminates deep cooling
Method denitrogenates unit, the cost and manufacturing schedule of the complete set of equipments substantially reduced.
Description of the drawings
Fig. 1 is a kind of flow diagram of recycling crude argon method of purification again of the present invention；
Wherein, each reference numeral is：
1- argon gas compressor, 2- crude argons surge tank, the first argon gas of 3- precooler, 4- oxygen-eliminating devices, 5- coolers, 6- second
Argon gas precooler, 7- purifiers, 8- psa units, 9- Hydrogen Lines, the first contactors of 10-, the absorption of 11- second are held
Device.
Specific implementation mode
The present invention is described in more detail below by specific embodiment, for a better understanding of the present invention,
But following embodiments are not intended to limit the scope of the invention.
Embodiment 1
Present embodiments provide a kind of recycling crude argon method of purification again, recycling argon gas is pressurized, after primary precooling with hydrogen
Gas hybrid reaction removes oxygen, and high temperature argon after reaction is successively after cooling, secondary precooling, then purified handles dry
Crude argon, dry crude argon are sent into the psa unit containing the first contactor and the second contactor, are filled with suction
Selectively oxygen, carbon dioxide, nitrogen gas component are fallen in absorption to attached dose of first contactor under operating pressure, inhale
Attached pure argon is gone out by the first contactor top row；The foreign gas that second contactor will adsorb in adsorbent
It desorbs, and passes through the second contactor bottom inverse put discharge.
In the present embodiment, the recycling argon gas after the pressurization first enters the first forecooler after crude argon surge tank buffering
It is once pre-chilled, the crude argon temperature after a precooling treatment is 5-8 DEG C.
In the present embodiment, the crude argon after a precooling treatment, first successively through oil strainer and activated carbon adsorption
After device oil removing, it is re-fed into oxygen-eliminating device and removes oxygen with hydrogen hybrid reaction.(not shown), used oil strainer and work
Property charcoal absorber be this field conventional equipment, details are not described herein, after the oil strainer and active carbon adsorber oil removing
Crude argon oil content is less than 1ppm.
In the present embodiment, the temperature of the high temperature argon is 200-300 DEG C.The high temperature argon cools down through subcooler
It is cooled to 5-8 DEG C to 40 DEG C, then through the second argon gas precooler.
In the present embodiment, the purification treating method is the water and carbon dioxide removed using purifier in argon gas, pure
It is Ar, N to change treated argon gas main component2And O2。
In the present embodiment, the pure argon purity gone out from the first contactor top row is 99%-99.99%.
In the present embodiment, second contactor will absorption by the way of decompression or normal pressure desorption or heating parsing
The foreign gas adsorbed in agent desorbs.
Embodiment 2
As shown in Figure 1, present embodiments providing a kind of recycling crude argon purification system again, including pass sequentially through pipeline connection
Argon gas compressor 1, the first argon gas precooler 3, oxygen-eliminating device 4, the second argon precooler 6, purifier 7 and psa unit 8；
Wherein, it is connected with Hydrogen Line 9 on the pipeline between the first argon gas precooler 3 and oxygen-eliminating device 4, is deoxygenation by Hydrogen Line 9
Device 4 provides the hydrogen needed for reaction；The outlet at bottom of purifier 7 connects the bottom inlet of psa unit 8 by pipeline, becomes
Pressure absorbing unit 8 is made of the first contactor 10 being arranged in parallel and the second contactor 11, is selected by the first contactor 10
Oxygen, carbon dioxide, nitrogen gas component are adsorbed to selecting property, and by the pure argon after absorption by 10 top of the first contactor
Discharge, pure argon purity are 99%-99.99%, are connected to pure argon user；By the second contactor 11 by the first contactor
Adsorbent foreign gas desorbs in 10, and foreign gas is discharged by the bottom inverse put of the second contactor 11.
In the present embodiment, purification system includes being set to argon gas compressor 1 and the first argon gas is pre- to the recycling crude argon again
Crude argon surge tank 2 between cold 3, argon gas compressor 1 connect the lower part of crude argon surge tank 2, the first argon gas by pipeline
Precooler 3 connects the top of crude argon surge tank 2 by pipeline.Recycling argon gas after pressurization is first after crude argon surge tank buffering
First time precooling is carried out into the first forecooler, the crude argon temperature after first time precooling treatment is 5-8 DEG C.
In the present embodiment, purification system further includes being set to oxygen-eliminating device 4 and the second argon precooler 6 to the recycling crude argon again
Between cooler 5.It is that 200-300 DEG C of high temperature argon is cooled to by the cooler for the temperature after reacting oxygen-eliminating device 4
40 DEG C, then it is cooled to 5-8 DEG C through the second argon gas precooler.
In the present embodiment, the recycling crude argon again purification system further include be set in turn in the first argon gas precooler 3 with
Oil strainer between oxygen-eliminating device 4 and active carbon adsorber (not shown), used oil strainer and activated carbon adsorption
Device is this field conventional equipment, and details are not described herein, and the crude argon after the cooling of the first argon gas precooler 3 is first filtered through oil successively
After device and active carbon adsorber oil removing, it is re-fed into oxygen-eliminating device and removes oxygen with hydrogen hybrid reaction, and through oil strainer and activity
Crude argon oil content after charcoal absorber oil removing is less than 1ppm.
In the present embodiment, second contactor will absorption by the way of decompression or normal pressure desorption or heating parsing
The foreign gas adsorbed in agent desorbs, and foreign gas is discharged from the bottom inverse put of the second contactor.
Embodiment 3
The present embodiment provides the Application Example that a kind of the method for the present invention and system purify recycling crude argon again,
Technological process is as shown in Figure 1, specifically include：
Crude argon atmospheric pressure is very low when recycling, and is mixed into air about 5%, first passes around argon gas compressor 1 and is pressurized to 0.7MPa
(A), for stabilization of export pressure, configuration crude argon surge tank 2, the crude argon come out from crude argon surge tank 2 is in the first argon gas
Cooled in precooler 3 5-8 DEG C enter oxygen-eliminating device 4 be added hydrogen mix after, in oxygen-eliminating device 4, oxygen and hydrogen generation
Reaction generates water and discharges heat, and temperature rise is to about 200~300 DEG C.High temperature argon is cooled to 40 DEG C through subcooler 5, then
It is cooled to 5-8 DEG C with the second argon gas precooler 6, dew point is removed water into purifier 7 is de-<- 70 DEG C and carbon dioxide<1ppm；It is surplus
Under argon gas be mainly：Ar, N2, H2 etc..Dry crude argon enters psa unit 8 (containing two contactors),
The first contactor 10 adsorbs under operating pressure, and the Special adsorbent loaded in the first contactor 10 selectively adsorbs
Oxygen, carbon dioxide, nitrogen gas component, and as product gas pure argon by with the purity of 99%-99.99% by contactor
Top row goes out；The decompression (vacuumizing) of second contactor 11 or normal pressure desorb or heating parses, adsorbent foreign gas
It desorbs, by the 11 bottom inverse put discharge of the second contactor, after purging, adsorbent is regenerated.Complete the suction after regeneration
Attached container can be transferred to absorption again after boost pressure.Two contactors are used alternatingly, and achieve the purpose that continuous purification argon gas.
The present invention recycles crude argon, and the advantage of purification system is that the facility of liquid argon offer is had using recycling scene again, uses liquid
Argon provides cold, it is not necessary to expanding machine be separately provided, purify crude argon using known technology, cryogenic rectification method is recycled to remove nitrogen
Gas, hydrogen recycle the excess hydrogen of addition, improve the rate of recovery of argon gas and the utilization rate of hydrogen, simplify cryogenic rectification
Flow and operation, reduce operation energy consumption.
Specific embodiments of the present invention are described in detail above, but it is intended only as example, the present invention is simultaneously unlimited
It is formed on particular embodiments described above.To those skilled in the art, it is any to the equivalent modifications that carry out of the present invention and
It substitutes also all among scope of the invention.Therefore, without departing from the spirit and scope of the invention made by impartial conversion and
Modification, all should be contained within the scope of the invention.
Claims (9)
1. a kind of recycling crude argon method of purification again, recycling argon gas is pressurized, after primary precooling with hydrogen hybrid reaction except deoxidation
Gas, the high temperature argon after reaction is successively through cooling down, after secondary precooling, then the purified crude argon for handling to dry, feature exist
In dry crude argon is sent into the psa unit containing the first contactor and the second contactor, is filled with adsorbent
First contactor under operating pressure selectively absorption fall oxygen, carbon dioxide, nitrogen gas component, after absorption
Pure argon gone out by the first contactor top row；Second contactor desorbs the foreign gas adsorbed in adsorbent
Out, and pass through the second contactor bottom inverse put discharge.
2. recycling crude argon according to claim 1 method of purification again, which is characterized in that the recycling argon gas after the pressurization
It is first once pre-chilled into the first forecooler after crude argon surge tank buffering, the crude argon temperature after a precooling treatment
Degree is 5-8 DEG C.
3. recycling crude argon according to claim 1 method of purification again, which is characterized in that after a precooling treatment
Crude argon is re-fed into oxygen-eliminating device with hydrogen hybrid reaction except deoxidation first successively after oil strainer and active carbon adsorber oil removing
Gas.
4. recycling crude argon according to claim 3 method of purification again, which is characterized in that through the oil strainer and activity
Crude argon oil content after charcoal absorber oil removing is less than 1ppm.
5. recycling crude argon according to claim 1 method of purification again, which is characterized in that the temperature of the high temperature argon is
200-300℃。
6. recycling crude argon according to claim 1 method of purification again, which is characterized in that the high temperature argon is through supercooling
Device is cooled to 40 DEG C, then is cooled to 5-8 DEG C through the second argon gas precooler.
7. recycling crude argon according to claim 1 method of purification again, which is characterized in that the purification treating method is to adopt
The water and carbon dioxide in argon gas are removed with purifier, the argon gas main component after purification process is Ar, N2And O2。
8. recycling crude argon according to claim 1 method of purification again, which is characterized in that from first contactor top
The pure argon purity of discharge is 99%-99.99%.
9. recycling crude argon according to claim 1 method of purification again, which is characterized in that second contactor uses
Decompression or the mode of normal pressure desorption or heating parsing desorb the foreign gas adsorbed in adsorbent.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810714139.0A CN108557787A (en) | 2018-06-29 | 2018-06-29 | A kind of recycling crude argon method of purification again |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810714139.0A CN108557787A (en) | 2018-06-29 | 2018-06-29 | A kind of recycling crude argon method of purification again |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115744845A (en) * | 2022-10-20 | 2023-03-07 | 上海联风能源科技有限公司 | Argon gas recovery purification efficiency increasing system |
| CN116920565A (en) * | 2023-09-18 | 2023-10-24 | 上海联风气体有限公司 | Waste argon separation system and method that can reduce cryogenic waste argon emissions |
| CN116989532A (en) * | 2023-06-30 | 2023-11-03 | 上海跃绅能源科技有限公司 | Inert gas protection recovery method and device |
| CN119015857A (en) * | 2024-10-28 | 2024-11-26 | 上海联风气体有限公司 | Argon tail gas treatment device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1199851A (en) * | 1997-03-26 | 1998-11-25 | 普拉塞尔技术有限公司 | Cryogenic hybrid system for producing high purity argon |
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| CN1199851A (en) * | 1997-03-26 | 1998-11-25 | 普拉塞尔技术有限公司 | Cryogenic hybrid system for producing high purity argon |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115744845A (en) * | 2022-10-20 | 2023-03-07 | 上海联风能源科技有限公司 | Argon gas recovery purification efficiency increasing system |
| CN116989532A (en) * | 2023-06-30 | 2023-11-03 | 上海跃绅能源科技有限公司 | Inert gas protection recovery method and device |
| CN116920565A (en) * | 2023-09-18 | 2023-10-24 | 上海联风气体有限公司 | Waste argon separation system and method that can reduce cryogenic waste argon emissions |
| CN116920565B (en) * | 2023-09-18 | 2023-12-22 | 上海联风气体有限公司 | Waste argon separation system and method that can reduce cryogenic waste argon emissions |
| CN117504525A (en) * | 2023-09-18 | 2024-02-06 | 上海联风气体有限公司 | Dirty argon separation system and method capable of reducing cryogenic dirty argon discharge |
| CN117504525B (en) * | 2023-09-18 | 2024-04-12 | 上海联风气体有限公司 | Dirty argon separation system and method capable of reducing cryogenic dirty argon discharge |
| CN119015857A (en) * | 2024-10-28 | 2024-11-26 | 上海联风气体有限公司 | Argon tail gas treatment device |
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