CN108281574B - Organic light-emitting display panel and preparation method thereof - Google Patents
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Abstract
Description
技术领域technical field
本发明实施例涉及半导体显示技术领域,尤其涉及一种有机发光显示面板及其制备方法。Embodiments of the present invention relate to the technical field of semiconductor displays, and in particular, to an organic light-emitting display panel and a method for fabricating the same.
背景技术Background technique
有机发光二极管(Organic Light-Emitting Diode,OLED)显示装置具有自发光、驱动电压低、发光效率高、响应时间短、清晰度与对比度高、近180°视角、使用温度范围宽,可实现柔性显示与大面积全色显示灯诸多优点,被业界公认为最有发展潜力的显示装置。Organic Light-Emitting Diode (OLED) display device has self-luminescence, low driving voltage, high luminous efficiency, short response time, high definition and contrast ratio, nearly 180° viewing angle, and wide operating temperature range, which can realize flexible display With many advantages of large-area full-color display lamps, it is recognized as the most promising display device in the industry.
现阶段,基于真空工艺制备的OLED显示器件已大规模量产,但是,该技术设备投资和维护费用高昂、材料浪费严重,难以实现更大面积,且成本居高不下。喷墨打印技术制备OLED显示屏则具有低成本、大面积的技术和产品优势,还可以实现打印的精准定位,具有图案制作能力,节省材料,并与几乎所有类型的基板兼容,是实现低成本,全彩色印刷显示器必不可少的技术。At this stage, OLED display devices prepared based on vacuum process have been mass-produced. However, this technology has high equipment investment and maintenance costs, serious waste of materials, and it is difficult to achieve a larger area, and the cost remains high. The preparation of OLED displays by inkjet printing technology has the advantages of low cost, large area technology and products, and can also achieve precise positioning of printing, has pattern making capabilities, saves materials, and is compatible with almost all types of substrates. , an essential technology for full-color printed displays.
喷墨打印制程工艺是将数十兆分之一升(皮升)的溶液(通常在一皮升到几十皮升之间),以每秒数百次以上的频率喷洒在特定的OLED显示像素内,然后将溶剂去除形成干燥薄膜的成膜制程技术。这就要求设备具备有较好的对位和移动精度,保证每一滴喷墨打印的墨水能放入指定的像素坑内,同时还需要保证每次打印的墨水在指定的皮升体积范围内,这些都对设备提出了精密的要求。现阶段一般认为,喷墨打印工艺仅适合准备大尺寸电视,因为大尺寸电视对显示屏分辨率要求不高(一般像素密度<100PPI),然而,由于人们对画质要求的提升,未来电视分辨率朝8K技术发展(像素密度>150PPI),这将要求喷墨打印设备具备更高的对位和移动精度,更小更精确的打印墨水体积控制,这势必将增加打印成本。The inkjet printing process is to spray tens of trillionths of a liter (picoliter) of solution (usually between one picoliter to tens of picoliters) on a specific OLED display at a frequency of hundreds of times per second. In the pixel, the solvent is then removed to form a film-forming process technology that forms a dry film. This requires the equipment to have good alignment and movement accuracy, to ensure that each drop of inkjet printed ink can be placed in the designated pixel pit, and also to ensure that the ink printed each time is within the specified picoliter volume range. All put forward precise requirements for the equipment. At this stage, it is generally believed that the inkjet printing process is only suitable for preparing large-size TVs, because large-size TVs do not require high display resolution (generally pixel density < 100PPI). The rate of development towards 8K technology (pixel density > 150PPI), which will require inkjet printing equipment to have higher alignment and movement accuracy, smaller and more precise control of printing ink volume, which will inevitably increase printing costs.
发明内容SUMMARY OF THE INVENTION
有鉴于此,本发明实施例提供一种有机发光显示面板及其制备方法,以解决现有技术中有机发光显示面板中像素分辨率与喷墨打印精度无法兼顾的技术问题。In view of this, embodiments of the present invention provide an organic light emitting display panel and a method for fabricating the same, so as to solve the technical problem that pixel resolution and inkjet printing accuracy cannot be taken into account in the organic light emitting display panel in the prior art.
第一方面,本发明实施例提供了一种有机发光显示面板的制备方法,包括:In a first aspect, an embodiment of the present invention provides a method for preparing an organic light-emitting display panel, including:
提供一衬底基板;providing a base substrate;
在所述衬底基板一侧制备多个独立设置的第一子电极以及位于相邻两个所述第一子电极之间的非导电层;所述非导电层包括第一非导电层和第二非导电层,相邻两个所述第二非导电层之间包括至少一个所述第一非导电层;A plurality of independently arranged first sub-electrodes and a non-conductive layer located between two adjacent first sub-electrodes are prepared on one side of the base substrate; the non-conductive layer includes a first non-conductive layer and a second non-conductive layer. Two non-conductive layers, including at least one of the first non-conductive layers between two adjacent second non-conductive layers;
在所述第二非导电层处制备像素定义层,相邻两个所述像素定义层之间形成有机发光显示区域;A pixel definition layer is prepared at the second non-conductive layer, and an organic light emitting display area is formed between two adjacent pixel definition layers;
在所述有机发光显示区域制备同一类型有机发光层;preparing the same type of organic light-emitting layer in the organic light-emitting display area;
在所述有机发光层和所述像素定义层远离所述衬底基板的一侧制备第二电极。A second electrode is prepared on a side of the organic light-emitting layer and the pixel definition layer away from the base substrate.
可选的,在所述衬底基板一侧制备多个独立设置的第一子电极以及位于相邻两个所述第一子电极之间的非导电层,包括:Optionally, preparing a plurality of independently arranged first sub-electrodes and a non-conductive layer between two adjacent first sub-electrodes on one side of the base substrate, including:
在所述衬底基板一侧制备非导电材料层,所述非导电材料层覆盖所述衬底基板;A non-conductive material layer is prepared on one side of the base substrate, and the non-conductive material layer covers the base substrate;
对所述非导电材料层中与所述第一子电极设置位置对应的所述非导电材料层进行离子注入,形成间隔设置的导电层与非导电层,所述导电层对应多个独立设置的第一子电极,所述非导电层对应相邻两个所述第一子电极之间的非导电层。Perform ion implantation on the non-conductive material layer in the non-conductive material layer corresponding to the location where the first sub-electrode is arranged to form a conductive layer and a non-conductive layer arranged at intervals, and the conductive layer corresponds to a plurality of independently arranged The first sub-electrode, the non-conductive layer corresponds to the non-conductive layer between two adjacent first sub-electrodes.
可选的,对所述非导电材料层中与所述第一子电极设置位置对应的所述非导电材料层进行离子注入,形成间隔设置的导电层与非导电层,所述导电层对应多个独立设置的第一子电极,所述非导电层对应相邻两个所述第一子电极之间的非导电层,包括:Optionally, ion implantation is performed on the non-conductive material layer in the non-conductive material layer corresponding to the location where the first sub-electrode is arranged to form a conductive layer and a non-conductive layer arranged at intervals, and the conductive layers correspond to multiple layers. independent first sub-electrodes, the non-conductive layer corresponds to the non-conductive layer between two adjacent first sub-electrodes, including:
在所述非导电材料层远离所述衬底基板的一侧制备光刻胶层;preparing a photoresist layer on the side of the non-conductive material layer away from the base substrate;
对所述光刻胶层进行图案化处理,得到光刻胶保留区域和光刻胶剥离区域,所述光刻胶剥离区域暴露与所述第一子电极设置位置对应的所述非导电材料层;The photoresist layer is patterned to obtain a photoresist retention area and a photoresist peeling area, and the photoresist peeling area exposes the non-conductive material layer corresponding to the setting position of the first sub-electrode ;
对所述光刻胶暴露区域对应的所述非导电材料层进行离子注入,并去除所述光刻胶保留区域遗留的所述光刻胶层,形成间隔设置的导电层与非导电层,所述导电层对应多个独立设置的第一子电极,所述非导电层对应相邻两个所述第一子电极之间的非导电层。Perform ion implantation on the non-conductive material layer corresponding to the photoresist exposed area, and remove the photoresist layer left in the photoresist reserved area to form a conductive layer and a non-conductive layer arranged at intervals. The conductive layer corresponds to a plurality of independently arranged first sub-electrodes, and the non-conductive layer corresponds to the non-conductive layer between two adjacent first sub-electrodes.
可选的,在所述第二非导电层处制备像素定义层,包括:Optionally, preparing a pixel definition layer at the second non-conductive layer, including:
刻蚀所述第二非导电层;etching the second non-conductive layer;
在所述第二非导电层对应位置处制备像素定义层。A pixel definition layer is prepared at the position corresponding to the second non-conductive layer.
可选的,所述非导电材料层包括无机薄膜或者聚合物薄膜。Optionally, the non-conductive material layer includes an inorganic thin film or a polymer thin film.
可选的,离子注入的离子包括Cr、Cu、Ag、Ti、Mo以及Ni金属离子中的至少一种,或者K+、N+、Ga+、Ar+、Li+以及Ne+离子中的至少一种。Optionally, the ions to be implanted include at least one of Cr, Cu, Ag, Ti, Mo and Ni metal ions, or at least one of K+, N+, Ga+, Ar+, Li+ and Ne+ ions.
可选的,离子注入时的离子注入剂量大于或者等于5*1015/cm2。Optionally, the ion implantation dose during ion implantation is greater than or equal to 5*10 15 /cm 2 .
可选的,在所述有机发光显示区域制备同一类型有机发光层,包括:Optionally, preparing the same type of organic light-emitting layer in the organic light-emitting display area, including:
采用喷墨打印的方式,在所述有机发光显示区域制备同一类型有机发光层。The same type of organic light-emitting layer is prepared in the organic light-emitting display area by means of inkjet printing.
可选的,采用喷墨打印的方式,在所述有机发光显示区域制备同一类型的有机发光层,包括:Optionally, an organic light-emitting layer of the same type is prepared in the organic light-emitting display area by means of inkjet printing, including:
在所述有机发光显示区域制备空穴注入层;preparing a hole injection layer in the organic light emitting display region;
在所述空穴注入层远离所述第一子电极的一侧制备空穴传输层;preparing a hole transport layer on the side of the hole injection layer away from the first sub-electrode;
采用喷墨打印的方式,在所述空穴传输层远离所述空穴注入层的一侧制备同一类型的有机发光材料层;By means of inkjet printing, the same type of organic light-emitting material layer is prepared on the side of the hole transport layer away from the hole injection layer;
在所述有机发光材料层远离所述空穴传输层的一侧制备电子传输层;preparing an electron transport layer on the side of the organic light-emitting material layer away from the hole transport layer;
在所述电子传输层远离所述有机发光材料层的一侧制备电子注入层。An electron injection layer is prepared on the side of the electron transport layer away from the organic light emitting material layer.
第二方面,本发明实施例还提供了一种有机发光显示面板,采用第一方面所述的有机发光显示面面板的制备方法制备得到,包括:In a second aspect, an embodiment of the present invention further provides an organic light-emitting display panel, which is prepared by using the method for preparing an organic light-emitting display panel described in the first aspect, including:
衬底基板;substrate substrate;
位于所述衬底基板一侧的多个独立设置的第一子电极以及位于相连两个所述第一子电极之间的非导电层,所述非导电层包括第一非导电层和第二非导电层,相邻两个所述第二非导电层之间包括至少一个所述第一非导电层;a plurality of independently arranged first sub-electrodes located on one side of the base substrate and a non-conductive layer located between two connected first sub-electrodes, the non-conductive layer comprising a first non-conductive layer and a second non-conductive layer a non-conductive layer, including at least one of the first non-conductive layers between two adjacent second non-conductive layers;
位于所述第二非导电层处的像素定义层,相邻两个所述像素定义层之间形成有机发光显示区域;a pixel definition layer located at the second non-conductive layer, an organic light-emitting display area is formed between two adjacent pixel definition layers;
位于所述有机发光显示区域的同一类型的有机发光层;an organic light-emitting layer of the same type located in the organic light-emitting display region;
位于所述有机发光层和所述像素定义层远离所述衬底基板的一侧的第二电极。a second electrode located on a side of the organic light-emitting layer and the pixel definition layer away from the base substrate.
本发明实施例提供的有机发光显示面板及其制备方法,通过在衬底基板一侧制备多个独立设置的第一子电极以及位于相邻两个第一子电极之间的非导电层,非导电层包括第一非导电层和第二非导电层,相邻两个第二非导电层之间包括至少一个第一非导电层,在第二非导电层处制备像素定义层,相邻两个像素定义层之间形成有机发光显示区域,并且在有机发光显示区域制备同一类型有机发光层,每一个同一类型的有机发光层对应至少两个第一子电极,即制备一次有机发光层可以形成至少两个有机发光显示单元,保证在现有有机发光层制备工艺不变的情况下,提升有机发光显示面板的像素分辨率。In the organic light-emitting display panel and the method for manufacturing the same provided by the embodiments of the present invention, a plurality of independently arranged first sub-electrodes and a non-conductive layer located between two adjacent first sub-electrodes are prepared on one side of the base substrate. The conductive layer includes a first non-conductive layer and a second non-conductive layer, at least one first non-conductive layer is included between two adjacent second non-conductive layers, a pixel definition layer is prepared at the second non-conductive layer, and two adjacent second non-conductive layers are formed. An organic light-emitting display area is formed between the pixel definition layers, and the same type of organic light-emitting layer is prepared in the organic light-emitting display area, and each organic light-emitting layer of the same type corresponds to at least two first sub-electrodes. At least two organic light-emitting display units ensure that the pixel resolution of the organic light-emitting display panel can be improved under the condition that the existing organic light-emitting layer preparation process remains unchanged.
附图说明Description of drawings
为了更加清楚地说明本发明示例性实施例的技术方案,下面对描述实施例中所需要用到的附图做一简单介绍。显然,所介绍的附图只是本发明所要描述的一部分实施例的附图,而不是全部的附图,对于本领域普通技术人员,在不付出创造性劳动的前提下,还可以根据这些附图得到其他的附图。In order to illustrate the technical solutions of the exemplary embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in describing the embodiments. Obviously, the introduced drawings are only a part of the drawings of the embodiments to be described in the present invention, rather than all drawings. For those of ordinary skill in the art, without creative work, they can also obtain the drawings according to these drawings. Additional drawings.
图1是本发明实施例提供的一种有机发光显示面板的制备方法的流程示意图;FIG. 1 is a schematic flowchart of a method for manufacturing an organic light-emitting display panel according to an embodiment of the present invention;
图2是本发明实施例提供的一种衬底基板的结构示意图;2 is a schematic structural diagram of a base substrate provided by an embodiment of the present invention;
图3是本发明实施例提供的一种在衬底基板一侧制备多个独立设置的第一子电极以及位于相邻两个第一子电极之间的非导电层的结构示意图;3 is a schematic structural diagram of preparing a plurality of independently arranged first sub-electrodes and a non-conductive layer between two adjacent first sub-electrodes on one side of a substrate substrate according to an embodiment of the present invention;
图4是本发明实施例提供的在第二非导电层处制备像素定义层的结构示意图;4 is a schematic structural diagram of preparing a pixel definition layer at the second non-conductive layer provided by an embodiment of the present invention;
图5是本发明实施例提供的制备有机发光层的结构示意图;5 is a schematic structural diagram of preparing an organic light-emitting layer according to an embodiment of the present invention;
图6是本发明实施例提供的制备第二电极的结构示意图;6 is a schematic structural diagram of preparing a second electrode according to an embodiment of the present invention;
图7-图10是本发明实施例提供的在衬底基板上制备多个独立设置的第一子电极以及位于相邻两个第一子电极之间的非导电层各个流程的结构示意图;7-10 are schematic structural diagrams of each process of preparing a plurality of independently arranged first sub-electrodes and a non-conductive layer located between two adjacent first sub-electrodes on a base substrate according to an embodiment of the present invention;
图11是本发明实施例提供的一种有机发光显示面板中有机发光显示单元排列结构示意图;11 is a schematic diagram of an arrangement structure of organic light-emitting display units in an organic light-emitting display panel according to an embodiment of the present invention;
图12是本发明实施例提供的另一种有机发光显示面板中有机发光显示单元排列结构示意图;12 is a schematic diagram of an arrangement structure of organic light-emitting display units in another organic light-emitting display panel provided by an embodiment of the present invention;
图13是本发明实施例提供的又一种有机发光显示面板中有机发光显示单元排列结构示意图。FIG. 13 is a schematic diagram of the arrangement structure of another organic light emitting display unit in an organic light emitting display panel provided by an embodiment of the present invention.
具体实施方式Detailed ways
为使本发明的目的、技术方案和优点更加清楚,以下将结合本发明实施例中的附图,通过具体实施方式,完整地描述本发明的技术方案。显然,所描述的实施例是本发明的一部分实施例,而不是全部的实施例,基于本发明的实施例,本领域普通技术人员在没有做出创造性劳动的前提下获得的所有其他实施例,均落入本发明的保护范围之内。In order to make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be completely described below with reference to the accompanying drawings in the embodiments of the present invention and through specific implementation manners. Obviously, the described embodiments are a part of the embodiments of the present invention, rather than all the embodiments, based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work, All fall within the protection scope of the present invention.
本发明实施例提供一种有机发光显示面板的制备方法,包括提供一衬底基板;在衬底基板一侧制备多个独立设置的第一子电极以及位于相邻两个第一子电极之间的非导电层;非导电层包括第一非导电层和第二非导电层,相邻两个第二非导电层之间包括至少一个第一非导电层;在第二非导电层处制备像素定义层,相邻两个像素定义层之间形成有机发光显示区域;在有机发光显示区域制备同一类型有机发光层;在有机发光显层和像素定义层远离衬底基板的一侧制备第二电极。采用上述技术方案,相邻两个第二非导电层之间包括至少一个第一非导电层,在第二非导电层处制备像素定义层,相邻两个像素定义层之间形成有机发光显示区域,并且在有机发光显示区域制备同一类型有机发光层,每一个同一类型的有机发光层对应至少两个第一子电极,即制备一次有机发光层可以形成至少两个有机发光显示单元,保证在现有有机发光层制备工艺不变的情况下,提升有机发光显示面板的像素分辨率。An embodiment of the present invention provides a method for fabricating an organic light-emitting display panel, which includes providing a base substrate; preparing a plurality of independently arranged first sub-electrodes on one side of the base substrate and located between two adjacent first sub-electrodes The non-conductive layer includes a first non-conductive layer and a second non-conductive layer, and at least one first non-conductive layer is included between two adjacent second non-conductive layers; pixels are prepared at the second non-conductive layer A definition layer, an organic light-emitting display area is formed between two adjacent pixel definition layers; an organic light-emitting layer of the same type is prepared in the organic light-emitting display area; a second electrode is prepared on the side of the organic light-emitting display layer and the pixel definition layer away from the substrate . Using the above technical solution, at least one first non-conductive layer is included between two adjacent second non-conductive layers, a pixel definition layer is prepared at the second non-conductive layer, and an organic light-emitting display is formed between two adjacent pixel definition layers The same type of organic light-emitting layer is prepared in the organic light-emitting display area, and each organic light-emitting layer of the same type corresponds to at least two first sub-electrodes, that is, one preparation of the organic light-emitting layer can form at least two organic light-emitting display units. The pixel resolution of the organic light-emitting display panel is improved under the condition that the existing organic light-emitting layer preparation process remains unchanged.
以上是本发明的核心思想,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下,所获得的所有其他实施例,都属于本发明保护的范围。The above is the core idea of the present invention, and the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.
图1是本发明实施例提供的一种有机发光显示面板的制备方法的流程示意图,如图1所示,本发明实施例提供的有机发光显示面板的制备方法可以包括:FIG. 1 is a schematic flowchart of a method for preparing an organic light-emitting display panel provided by an embodiment of the present invention. As shown in FIG. 1 , the method for preparing an organic light-emitting display panel provided by an embodiment of the present invention may include:
S110、提供一衬底基板。S110, providing a base substrate.
示例性的,图2是本发明实施例提供的一种衬底基板的结构示意图,如图2所示,衬底基板10可以为柔性衬底基板,其材料可以包括聚酰亚胺、聚对苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚碳酸酯、聚芳酯以及聚醚砜中的至少一种;衬底基板10还可以为刚性衬底基板,具体可以为玻璃衬底或者其他刚性衬底。本发明实施例对衬底基板10的种类以及材料不进行限定。Exemplarily, FIG. 2 is a schematic structural diagram of a base substrate provided by an embodiment of the present invention. As shown in FIG. 2 , the
S120、在所述衬底基板一侧制备多个独立设置的第一子电极以及位于相邻两个所述第一子电极之间的非导电层,所述非导电层包括第一非导电层和第二非导电层,相邻两个所述第二非导电层之间包括至少一个所述第一非导电层。S120. Prepare a plurality of independently arranged first sub-electrodes and a non-conductive layer located between two adjacent first sub-electrodes on one side of the base substrate, where the non-conductive layer includes a first non-conductive layer and a second non-conductive layer, at least one of the first non-conductive layers is included between two adjacent second non-conductive layers.
示例性的,图3是本发明实施例提供的在衬底基板一侧制备多个独立设置的第一子电极以及位于相邻两个第一子电极之间的非导电层的结构示意图,如图3所示,在衬底基板10一侧制备多个独立设置的第一子电极201,第一子电极201可以为有机发光显示面板的阳极电极。可选的,相邻两个第一子电极201之间形成有非导电层30,沿垂直衬底基板10的方向上,如图3中所示的X方向,第一子电极201的厚度可以与非导电层30的厚度相同;沿衬底基板10的延伸方向上,如图3中所示的Y方向,第一子电极201与非导电层30间隔设置,保证相邻两个第一子电极201绝缘设置。Exemplarily, FIG. 3 is a schematic structural diagram of preparing a plurality of independently arranged first sub-electrodes on one side of the base substrate and a non-conductive layer between two adjacent first sub-electrodes provided by an embodiment of the present invention, as shown in FIG. As shown in FIG. 3 , a plurality of independently arranged
可选的,本发明实施例中的非导电层30可以包括第一非导电层301和第二非导电层302,且相邻两个第二非导电层302之间形成有至少一个第一非导电层301,如图3所示。由于相邻两个第一子电极201之间形成有非导电层30,非导电层包括第一非导电层301和第二非导电层302,且相邻两个第二非导电层302之间形成有至少一个第一非导电层301,因此,相邻两个第二非导电层302之间形成有至少两个第一子电极201。图3仅以相邻两个第二非导电层302之间形成有一个第一非导电层301,相邻两个第二非导电层302之间形成有两个第一子电极201为例进行说明。Optionally, the
S130、在所述第二非导电层处制备像素定义层,相邻两个所述像素定义层之间形成有机发光显示区域。S130, a pixel definition layer is prepared at the second non-conductive layer, and an organic light emitting display area is formed between two adjacent pixel definition layers.
示例性的,图4是本发明实施例提供的在第二非导电层处制备像素定义层的结构示意图,如图4所示,在第二非导电层302处制备像素定义层40,相邻两个像素定义层40之间形成有机发光显示区域,通过像素定义层40可以防止或降低像素间的颜色混合。可选的,像素定义层40的材料可以包括聚酰亚胺、聚酰胺、丙烯酸树脂、并环丁烯和酚醛树脂等有机绝缘材料中的至少一种;像素定义层40还可以包括SiO2、SiNx、Al2O3、CuOx、Tb4O7、Y2O3、Nb2O5和Pr2O3等无机绝缘材料中的至少一种;而且,像素定义层40还可以具有有机绝缘材料和无机绝缘材料交替形成的多层结构。可选的,像素定义层40的厚度可以为1-3μm。Exemplarily, FIG. 4 is a schematic structural diagram of preparing a pixel definition layer at the second non-conductive layer provided by an embodiment of the present invention. As shown in FIG. 4 , a
S140、在所述有机发光显示区域制备同一类型有机发光层。S140, preparing an organic light-emitting layer of the same type in the organic light-emitting display region.
示例性的,图5是本发明实施例提供的制备有机发光层的结构示意图,有机发光层50位于相邻两个像素定义层40限定的有机发光显示区域。本发明实施例中同一类型的有机发光层,指的是发光颜色相同的有机发光层,例如红色有机发光层,绿色有机发光层,蓝色有机发光层等。可选的有机发光层50可以包括依序堆叠的空穴注入层、空穴传输层、有机发光材料层、电子传输层和电子注入层。可选的,有机发光层50可以利用低分子或高分子有机材料形成。Exemplarily, FIG. 5 is a schematic structural diagram of preparing an organic light-emitting layer according to an embodiment of the present invention. The organic light-emitting
可选的,在有机发光显示区域制备同一类型的有机发光层,可以是采用喷墨打印的方式,在有机发光显示区域制备同一类型的有机发光层。采用喷墨打印方式制备有机发光层,可以实现打印的精准定位,图案制备能力强,且节省材料,成本低。可选的,在有机发光显示区域制备同一类型的有机发光层,还可以是采用蒸镀的方式,本发明实施例对制备有机发光层的具体方法不进行限定。Optionally, to prepare the same type of organic light-emitting layer in the organic light-emitting display area, the same type of organic light-emitting layer may be prepared in the organic light-emitting display area by means of inkjet printing. Using the inkjet printing method to prepare the organic light-emitting layer can realize precise positioning of printing, strong pattern preparation ability, material saving and low cost. Optionally, the same type of organic light-emitting layer is prepared in the organic light-emitting display area, and the method of vapor deposition may also be used. The embodiment of the present invention does not limit the specific method for preparing the organic light-emitting layer.
S150、在所述有机发光层和所述像素定义层远离所述衬底基板的一侧制备第二电极。S150. Prepare a second electrode on the side of the organic light-emitting layer and the pixel definition layer that is away from the base substrate.
示例性的,图6是本发明实施例提供的制备第二电极的结构示意图,如图6所示,在有机发光层50和像素定义层40远离衬底基板10的一侧制备第二电极60,第二电极60可以为整面设置的电极,与多个单独设置的第一子电极201配合使用,实现有机发光显示面板正常显示发光。Exemplarily, FIG. 6 is a schematic structural diagram of preparing a second electrode provided by an embodiment of the present invention. As shown in FIG. 6 , a
可选的,第二电极60的材料可以为Ag、Mg、Al、Au、Ni,或者复合电极Mg:Ag中的至少一种。Optionally, the material of the
综上,本发明实施例提供的有机发光显示面板的制备方法,通过在衬底基板一侧制备多个独立设置的第一子电极以及位于相邻两个第一子电极之间的非导电层,非导电层包括第一非导电层和第二非导电层,相邻两个第二非导电层之间包括至少一个第一非导电层,在第二非导电层处制备像素定义层,相邻两个像素定义层之间形成有机发光显示区域,并且在有机发光显示区域制备同一类型有机发光层,每一个同一类型的有机发光层对应至少两个第一子电极,即制备一次有机发光层可以形成至少两个有机发光显示单元,保证在现有有机发光层制备工艺不变的情况下,提升有机发光显示面板的像素分辨率。To sum up, the method for fabricating an organic light-emitting display panel provided by the embodiments of the present invention prepares a plurality of independently arranged first sub-electrodes and a non-conductive layer located between two adjacent first sub-electrodes on one side of the base substrate. , the non-conductive layer includes a first non-conductive layer and a second non-conductive layer, at least one first non-conductive layer is included between two adjacent second non-conductive layers, and a pixel definition layer is prepared at the second non-conductive layer. An organic light-emitting display area is formed between two adjacent pixel definition layers, and an organic light-emitting layer of the same type is prepared in the organic light-emitting display area, and each organic light-emitting layer of the same type corresponds to at least two first sub-electrodes, that is, an organic light-emitting layer is prepared once At least two organic light-emitting display units can be formed to ensure that the pixel resolution of the organic light-emitting display panel can be improved without changing the existing organic light-emitting layer preparation process.
可选的,在衬底基板一侧制备多个独立设置的第一子电极以及位于相邻两个第一子电极之间的非导电层,可以包括:Optionally, preparing a plurality of independently arranged first sub-electrodes and a non-conductive layer between two adjacent first sub-electrodes on one side of the base substrate may include:
在衬底基板一侧制备非导电材料层,非导电材料层覆盖衬底基板;A non-conductive material layer is prepared on one side of the base substrate, and the non-conductive material layer covers the base substrate;
对非导电材料层中与第一子电极设置位置对应的非导电材料层进行离子注入,形成间隔设置的导电层与非导电层,导电层对应多个独立设置的第一子电极,非导电层对应相邻两个所述第一子电极之间的非导电层。Perform ion implantation on the non-conductive material layer in the non-conductive material layer corresponding to the location where the first sub-electrode is arranged to form a conductive layer and a non-conductive layer arranged at intervals, the conductive layer corresponds to a plurality of independently arranged first sub-electrodes, and the non-conductive layer Corresponding to the non-conductive layer between two adjacent first sub-electrodes.
可选的,对非导电材料层中与第一子电极设置位置对应的非导电材料层进行离子注入,形成间隔设置的导电层与非导电层,导电层对应多个独立设置的第一子电极,非导电层对应相邻两个第一子电极之间的非导电层,可以包括:Optionally, ion implantation is performed on the non-conductive material layer in the non-conductive material layer corresponding to the setting position of the first sub-electrode to form a conductive layer and a non-conductive layer arranged at intervals, and the conductive layer corresponds to a plurality of independently arranged first sub-electrodes. , the non-conductive layer corresponds to the non-conductive layer between two adjacent first sub-electrodes, and may include:
在非导电材料层远离衬底基板的一侧制备光刻胶层;Prepare a photoresist layer on the side of the non-conductive material layer away from the base substrate;
对光刻胶层进行图案化处理,得到光刻胶保留区域和光刻胶剥离区域,光刻胶剥离区域暴露与第一子电极设置位置对应的非导电材料层;patterning the photoresist layer to obtain a photoresist retention area and a photoresist peeling area, and the photoresist peeling area exposes the non-conductive material layer corresponding to the setting position of the first sub-electrode;
对光刻胶暴露区域对应的非导电材料层进行离子注入,并去除光刻胶保留区域遗留的光刻胶层,形成间隔设置的导电层与非导电层,导电层对应多个独立设置的第一子电极,非导电层对应相邻两个第一子电极之间的非导电层。Ion implantation is performed on the non-conductive material layer corresponding to the photoresist exposed area, and the photoresist layer left in the photoresist reserved area is removed to form a conductive layer and a non-conductive layer arranged at intervals, and the conductive layer corresponds to a plurality of independently arranged first layers. A sub-electrode, and the non-conductive layer corresponds to the non-conductive layer between two adjacent first sub-electrodes.
具体的,图7-图10是本发明实施例提供的在衬底基板上制备多个独立设置的第一子电极以及位于相邻两个第一子电极之间的非导电层各个流程的结构示意图,参考图7-图10,在衬底基板上制备多个独立设置的第一子电极以及位于相邻两个第一子电极之间的非导电层具体包括:Specifically, FIG. 7 to FIG. 10 are the structures of each process of preparing a plurality of independently arranged first sub-electrodes and a non-conductive layer located between two adjacent first sub-electrodes on a base substrate provided by an embodiment of the present invention Schematic diagram, referring to FIGS. 7-10 , the preparation of a plurality of independently arranged first sub-electrodes on the base substrate and the non-conductive layer between two adjacent first sub-electrodes specifically include:
如图7所示,在衬底基板10一侧制备整层设置的非导电材料层70,非导电材料层70覆盖衬底基板10。可选的,可以采用蒸镀的方法在衬底基板10一侧制备整层设置的非导电材料层70。非导电材料层70可以包括无机薄膜或者聚合物薄膜,当非导电材料层70为无机薄膜时,其材料例如可以为非晶硅、氧化硅以及氮化硅中的至少一种;当非导电材料层70为聚合物薄膜时,其材料例如可以为SU8。As shown in FIG. 7 , an entire
如图8所示,在非导电材料层70远离衬底基板10的一侧制备光刻胶层80,光刻胶层80覆盖非导电材料层70。As shown in FIG. 8 , a photoresist layer 80 is prepared on the side of the
如图9所示,对光刻胶层80进行图案化处理,得到光刻胶保留区域801和光刻胶剥离区域802,光刻胶剥离区域802暴露与第一子电极201设置位置对应的非导电材料层70。As shown in FIG. 9 , the photoresist layer 80 is patterned to obtain a photoresist reserved
如图10所示,对光刻胶暴露区域802对应的非导电材料层70进行离子注入,并去除光刻胶保留区域801遗留的光刻胶层,形成间隔设置的导电层和非导电层,其中,导电层对应多个独立设置的第一子电极201,非导电层对应相邻两个第一子电极201之间的非导电层30。As shown in FIG. 10 , ion implantation is performed on the
可选的,对非导电材料层70进行离子注入时,离子注入的离子可以包括Cr、Cu、Ag、Ti、Mo以及Ni金属离子中的至少一种,或者K+、N+、Ga+、Ar+、Li+以及Ne+离子中的至少一种。可选的,对非导电材料层70进行离子注入时,离子注入时的离子注入剂量可以大于或者等于5*1015/cm2。Optionally, when the
可选的,当非导电材料层70为非晶硅、氧化过或者氮化硅之类的无机薄膜时,通过向无机薄膜注入Cr、Cu、Ag、Ti、Mo以及Ni金属离子中的至少一种,注入剂量可以大于或者等于5*1015/cm2,用于增加无机薄膜的导电性能,非导电材料层70经过离子注入形成导电层,作为有机发光显示面板中的第一子电极,即阳极电极。例如,可以采用等离子体增强化学的气相沉积法在衬底基板10上生长氧化硅材料的非导电材料层70,之后采用金属蒸发真空弧离子注入系统,例如注入Ti离子,离子注入时的电压可以为40KV,离子注入束流可以为5*1016/cm 2,如此可以保证无机薄膜的电导率从10-14S/cm上升到500S/cm,增加无机薄膜的导电性能,非导电材料层70经过离子注入形成导电层,作为有机发光显示面板中的第一子电极201。Optionally, when the
可选的,当非导电材料层70为有机聚合物薄膜时,通过向有机聚合物薄膜注入K+、N+、Ga+、Ar+、Li+以及Ne+离子中的至少一种,注入剂量可以大于或者等于5*1015/cm2,注入能量可以大于或者等于20keV,用于增加有机聚合物薄膜的导电性能,非导电材料层70经过离子注入形成导电层,作为有机发光显示面板中的第一子电极,即阳极电极。例如,可以采用离子注入机首先用能量为40keV,注入剂量为1015/cm2的Ar+注入聚苯胺薄膜,然后再用能量为70keV,注入剂量2.3×1017/cm2的Ga+注入聚苯胺(Ar+)薄膜。如此可以保证有机物聚合薄膜的电导率从10-15S/cm上升到200S/cm,增加有机聚合物薄膜的导电性能,非导电材料层70经过离子注入形成导电层,作为有机发光显示面板中的第一子电极201。Optionally, when the
可选的,在第二非导电层处制备像素定义层,可以包括:Optionally, preparing a pixel definition layer at the second non-conductive layer may include:
刻蚀第二非导电层;etching the second non-conductive layer;
在第二非导电层对应位置处制备像素定义层。A pixel definition layer is prepared at the corresponding position of the second non-conductive layer.
可选的,本发明实施例中,可以采用喷墨打印的方式,在有机发光显示区域制备同一类型的有机发光层,具体可以包括:Optionally, in the embodiment of the present invention, an organic light-emitting layer of the same type may be prepared in the organic light-emitting display area by means of inkjet printing, which may specifically include:
在有机发光显示区域制备空穴注入层;preparing a hole injection layer in the organic light emitting display area;
在空穴注入层远离第一子电极的一侧制备空穴传输层;preparing a hole transport layer on the side of the hole injection layer away from the first sub-electrode;
采用喷墨打印的方式,在空穴传输层远离空穴注入层的一侧制备同一类型的有机发光材料层;The same type of organic light-emitting material layer is prepared on the side of the hole transport layer away from the hole injection layer by means of inkjet printing;
在有机发光材料层远离空穴传输层的一侧制备电子传输层;preparing an electron transport layer on the side of the organic light-emitting material layer away from the hole transport layer;
在电子传输层远离有机发光材料层的一侧制备电子注入层。The electron injection layer is prepared on the side of the electron transport layer away from the organic light emitting material layer.
示例性的,在有机发光显示区域制备空穴注入层之前,可以先对基板进行清洗和表面等离子体处理,以使表面接触角小于20°。之后,采用旋涂,刮涂,挤出式涂布方式依次涂布空穴注入层,然后进行热处理,热处理温度可以为80-200℃,除去剩余溶剂,保证空穴注入层的膜厚控制在20-100nm之间。空穴注入层制备完成之后,采用旋涂,刮涂,挤出式涂布方式依次涂布空穴传输层,然后进行热处理,热处理温度可以为80-200℃,除去剩余溶剂,保证空穴注入层的膜厚控制在10-100nm之间。空穴注入层制备完成后,将事先按照一定浓度(0.2%~10%)、粘度(0.5-10cp)的RGB发光材料墨水,采用喷墨打印机分别打印,RGB打印墨水体积根据提供显示屏实际分辨率以及设计确定,要求体积精度控制在±20%以内。之后进行真空加热干燥,真空度控制在1~105Pa,干燥温度40-200℃,干燥完后,有机发光层材料层的膜厚在10-100nm之间。有机发光材料层制备完成之后,采用旋涂,刮涂,挤出式涂布方式依次涂布电子传输层,然后进行热处理,热处理温度可以为80-200℃,除去剩余溶剂,保证电子传输层的膜厚控制在10-80nm之间。电子传输层制备完成之后,转入真空腔室,进行电子注入层制备。Exemplarily, before the hole injection layer is prepared in the organic light emitting display region, the substrate may be cleaned and surface plasma treated, so that the surface contact angle is less than 20°. After that, the hole injection layer is sequentially coated by spin coating, blade coating, and extrusion coating method, and then heat treatment is performed. Between 20-100nm. After the hole injection layer is prepared, spin coating, blade coating, and extrusion coating are used to coat the hole transport layer in turn, and then heat treatment. The heat treatment temperature can be 80-200 ° C to remove the remaining solvent to ensure hole injection. The film thickness of the layers is controlled between 10-100 nm. After the hole injection layer is prepared, the RGB luminescent material ink with a certain concentration (0.2%-10%) and viscosity (0.5-10cp) will be printed separately by an inkjet printer. The volume of the RGB printing ink is based on the actual resolution of the display screen. The rate and design are determined, and the volume accuracy is required to be controlled within ±20%. Then, vacuum heating and drying are performed, the vacuum degree is controlled at 1-105 Pa, and the drying temperature is 40-200° C. After drying, the film thickness of the organic light-emitting layer material layer is between 10-100 nm. After the organic light-emitting material layer is prepared, spin coating, blade coating, and extrusion coating are used to coat the electron transport layer in turn, and then heat treatment. The film thickness is controlled between 10-80nm. After the preparation of the electron transport layer is completed, it is transferred to a vacuum chamber to prepare the electron injection layer.
可选的,继续参考图6,本发明实施例还提供了一种有机发光显示面板,所述有机发光显示面板采用本发明实施例提供的有机发光显示面板的制备方法制备得到,具体可以包括:Optionally, continuing to refer to FIG. 6 , an embodiment of the present invention further provides an organic light-emitting display panel, the organic light-emitting display panel is prepared by using the method for preparing an organic light-emitting display panel provided by the embodiment of the present invention, which may specifically include:
衬底基板10;
位于衬底基板10一侧的多个独立设置的第一子电极201以及位于相邻两个第一子电极201之间形成非导电层30;非导电层包括第一非导电层301和第二非导电层302,相邻两个第二非导电层302之间包括至少一个第一非导电层301;A plurality of independently arranged
位于第二非导电层302处的像素定义层40,相邻两个像素定义层40之间形成有机发光显示区域;The
位于有机发光显示区域的同一类型的有机发光层50;the same type of organic light-emitting
位于有机发光显层50和像素定义层40远离衬底基板10的一侧的第二电极60。The
本发明实施例提供的有机发光显示面板,相邻两个第二非导电层之间包括至少一个第一非导电层,在第二非导电层处设置有像素定义层,相邻两个像素定义层之间形成有机发光显示区域,并且在有机发光显示区域制备同一类型有机发光层,每一个同一类型的有机发光层对应至少两个第一子电极,即一个有机发光层可以对应至少两个有机发光显示单元,保证在现有有机发光层制备工艺不变的情况下,提升有机发光显示面板的像素分辨率。The organic light emitting display panel provided by the embodiment of the present invention includes at least one first non-conductive layer between two adjacent second non-conductive layers, a pixel definition layer is provided at the second non-conductive layer, and two adjacent pixels define An organic light-emitting display area is formed between the layers, and an organic light-emitting layer of the same type is prepared in the organic light-emitting display area. Each organic light-emitting layer of the same type corresponds to at least two first sub-electrodes, that is, one organic light-emitting layer can correspond to at least two organic light-emitting layers. The light-emitting display unit ensures that the pixel resolution of the organic light-emitting display panel can be improved under the condition that the existing organic light-emitting layer preparation process remains unchanged.
可选的,图11是本发明实施例提供的一种有机发光显示面板中有机发光显示单元排列结构示意图,如图11所示,本发明实施例提供的有机发光显示面板中,有机发光层50可以包括红色有机发光层501、绿色有机发光层502和蓝色有机发光层503,其中,每一个红色有机发光层501、绿色有机发光层502和蓝色有机发光层503至少对应两个第一子电极201,图11仅以每一个红色有机发光层501、绿色有机发光层502和蓝色有机发光层503对应两个第一子电极201为例进行说明。如图11所示,每一个同一类型的有机发光层50对应至少两个第一子电极201,即制备一次有机发光层50可以形成至少两个有机发光显示单元,保证在现有有机发光层制备工艺不变的情况下,提升有机发光显示面板的像素分辨率。Optionally, FIG. 11 is a schematic diagram of an arrangement structure of organic light-emitting display units in an organic light-emitting display panel provided by an embodiment of the present invention. As shown in FIG. 11 , in the organic light-emitting display panel provided by the embodiment of the present invention, the organic light-emitting
可选的,图12是本发明实施例提供的另一种有机发光显示面板中有机发光显示单元排列结构示意图,图12所示有机发光显示单元排列与图11所示的有机发光显示单元排列不同,图12中相邻两个有机发光层50不规则排列,不仅保证制备一次有机发光层50可以形成至少两个有机发光显示单元,保证在现有有机发光层制备工艺不变的情况下,提升有机发光显示面板的像素分辨率;同时使用像素渲染方法,进一步提升有机发光显示面板的像素分辨率。Optionally, FIG. 12 is a schematic diagram of an arrangement structure of organic light emitting display units in another organic light emitting display panel provided by an embodiment of the present invention. The arrangement of the organic light emitting display units shown in FIG. 12 is different from the arrangement of the organic light emitting display units shown in FIG. 11 . 12, the two adjacent organic light-emitting
可选的,图13是本发明实施例提供的由一种有机发光显示面板中有机发光显示单元排列结构示意图,图13所示有机发光显示单元排列与图11以及图12所示的有机发光显示单元排列不同,图13中每一个红色有机发光层501、绿色有机发光层502和蓝色有机发光层503对应四个第一子电极201,制备一次有机发光层50可以形成四个有机发光显示单元,保证在现有有机发光层制备工艺不变的情况下,提升有机发光显示面板的像素分辨率。同时使用像素渲染方法,进一步提升有机发光显示面板的像素分辨率。Optionally, FIG. 13 is a schematic diagram of an arrangement structure of organic light-emitting display units in an organic light-emitting display panel provided by an embodiment of the present invention. The arrangement of the organic light-emitting display units shown in FIG. 13 is the same as that of the organic light-emitting display units shown in FIGS. 11 and 12 . The units are arranged differently. In FIG. 13 , each of the red organic light-emitting
下面以120PPI显示屏实现方案为例进行说明。其中,子像素大小为70μm*210μm,其中显示区中子像素大小为40μm*150μm。以绿色有机发光材料层的制备为例,墨水打印浓度为1%,粘度为1.2cp,各方案对比情况如下:The following is an example of the implementation of the 120PPI display screen. The size of the sub-pixel is 70 μm*210 μm, and the size of the sub-pixel in the display area is 40 μm*150 μm. Taking the preparation of the green organic light-emitting material layer as an example, the ink printing concentration is 1% and the viscosity is 1.2cp. The comparison of each scheme is as follows:
现有技术与本发明实施例提供的技术方案喷墨打印要求情况对照表Comparison table of inkjet printing requirements of the prior art and the technical solutions provided by the embodiments of the present invention
如上表所示,现有技术中,采用喷墨打印技术制备有机发光显示单元时,每个有机发光显示单元中所需的墨水量为45pl,以每滴墨水量为15pl为例,需要3滴墨水,要求墨水体积的精度为±1pl,喷墨打印时要求打印区域所在的两个方向的精度分别为±5μm和±10μm,墨水体积精度要求和打印精度要求都较高。采用如图11所示的方案一时,一次喷墨打印形成两个子像素,(每个有机发光显示区域包括两个有机发光显示单元),所需墨水体积从45pl增加至120pl,所需墨水滴水从3滴增加到4滴,对应的每滴墨水打印的体积从15pl增加至30pl,对喷墨打印机每次喷出的墨水量的要求降低了,同时墨水的体积精度也降低,从±1pl变为±2pl。另外,方案1对设备运行的精度要求也降低,比如y方向精度从±10um的位移精度降低到±15um的位移精度。或者在喷墨打印要求精度不变的情况下,提升有机发光显示面板的像素分辨率。图12所示的方案方案2和图13所示的方案3页同理,特别是方案3,一次喷墨打印形成四个子像素,(每个有机发光显示区域包括四个有机发光显示单元),每次打印的墨水体积增加,墨水精度要求降低,使打印设备对墨水体积控制要求降低了,同时设备x方向移位精度和y方向移位精度均降低,预计可大幅降低设备成本。或者在喷墨打印要求精度不变的情况下,提升有机发光显示面板的像素分辨率。As shown in the table above, in the prior art, when using inkjet printing technology to prepare organic light-emitting display units, the required amount of ink in each organic light-emitting display unit is 45pl. Ink, the accuracy of the ink volume is required to be ±1pl, and the accuracy of the two directions in which the printing area is required to be ±5μm and ±10μm respectively during inkjet printing. The requirements for ink volume accuracy and printing accuracy are high. When scheme 1 as shown in Fig. 11 is adopted, two sub-pixels are formed by one inkjet printing (each organic light-emitting display area includes two organic light-emitting display units), the required ink volume is increased from 45pl to 120pl, and the required ink dripping from 3 drops increased to 4 drops, the corresponding volume of ink per drop increased from 15pl to 30pl, the requirement for the amount of ink ejected each time by the inkjet printer was reduced, and the volume accuracy of the ink was also reduced, from ±1pl to ±2pl. In addition, scheme 1 also reduces the accuracy requirements of equipment operation, for example, the y-direction accuracy is reduced from the displacement accuracy of ±10um to the displacement accuracy of ±15um. Or under the condition that inkjet printing requires the same accuracy, the pixel resolution of the organic light emitting display panel can be improved. Scheme 2 shown in FIG. 12 and Scheme 3 shown in FIG. 13 are the same, especially scheme 3, four sub-pixels are formed by one inkjet printing, (each organic light-emitting display area includes four organic light-emitting display units), The ink volume per printing increases, and the ink precision requirements are reduced, which reduces the ink volume control requirements of the printing equipment. At the same time, the displacement accuracy of the device in the x-direction and the displacement accuracy in the y-direction are both reduced, which is expected to greatly reduce the equipment cost. Or under the condition that inkjet printing requires the same accuracy, the pixel resolution of the organic light emitting display panel can be improved.
注意,上述仅为本发明的较佳实施例及所运用技术原理。本领域技术人员会理解,本发明不限于这里所述的特定实施例,对本领域技术人员来说能够进行各种明显的变化、重新调整、相互结合和替代而不会脱离本发明的保护范围。因此,虽然通过以上实施例对本发明进行了较为详细的说明,但是本发明不仅仅限于以上实施例,在不脱离本发明构思的情况下,还可以包括更多其他等效实施例,而本发明的范围由所附的权利要求范围决定。Note that the above are only preferred embodiments of the present invention and applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, combinations and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and can also include more other equivalent embodiments without departing from the concept of the present invention. The scope is determined by the scope of the appended claims.
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| CN104393005A (en) * | 2014-11-24 | 2015-03-04 | 京东方科技集团股份有限公司 | Display substrate, manufacturing method thereof and display device |
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