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CN108233155A - A kind of solid state laser cooling heat sink - Google Patents

A kind of solid state laser cooling heat sink Download PDF

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Publication number
CN108233155A
CN108233155A CN201810029391.8A CN201810029391A CN108233155A CN 108233155 A CN108233155 A CN 108233155A CN 201810029391 A CN201810029391 A CN 201810029391A CN 108233155 A CN108233155 A CN 108233155A
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heat sink
cooling
solid
state laser
heat exchange
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CN108233155B (en
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吕坤鹏
杨雪
唐晓军
赵鸿
刘磊
王超
梁兴波
刘洋
王文涛
陈露
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CETC 11 Research Institute
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/0405Conductive cooling, e.g. by heat sinks or thermo-electric elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/0407Liquid cooling, e.g. by water
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/042Arrangements for thermal management for solid state lasers

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Lasers (AREA)

Abstract

本发明公开了一种固体激光器冷却热沉,包括封盖和热沉基底,所述热沉基底上分布设置有柱状凸起阵列;所述柱状凸起阵列上设置有弹性换热机构,所述弹性换热机构在冷却介质的流动作用下产生振动;所述封盖与所述热沉基底封装后形成冷却热沉。热沉基底上设置的柱状凸起阵列,有效增大了热沉内部的换热面积,热沉内部的弹性换热机构内特有的多孔金属纤维网,具有强化换热的效果。同时,弹性换热机构内的金属丝弹簧线圈增大了冷却介质的当量导热系数,加强了流体内部的混合和扰动,消除了传统柱状凸起后方区域换热系数明显低于迎流面区域换热系数的缺点,进一步增大了热沉的换热效率,大幅提高了冷却效率。

The invention discloses a solid-state laser cooling heat sink, which includes a cover and a heat sink base, and a columnar protrusion array is distributed on the heat sink base; an elastic heat exchange mechanism is arranged on the columnar protrusion array, and the The elastic heat exchange mechanism vibrates under the flow of the cooling medium; the cover is packaged with the heat sink base to form a cooling heat sink. The array of columnar protrusions set on the base of the heat sink effectively increases the heat exchange area inside the heat sink, and the unique porous metal fiber mesh in the elastic heat exchange mechanism inside the heat sink has the effect of strengthening heat exchange. At the same time, the wire spring coil in the elastic heat exchange mechanism increases the equivalent thermal conductivity of the cooling medium, strengthens the mixing and disturbance inside the fluid, and eliminates the fact that the heat transfer coefficient of the area behind the traditional columnar protrusion is significantly lower than that of the area on the facing surface. The disadvantage of the thermal coefficient further increases the heat transfer efficiency of the heat sink and greatly improves the cooling efficiency.

Description

一种固体激光器冷却热沉A solid-state laser cooling heat sink

技术领域technical field

本发明涉及光电子技术领域,尤其涉及到一种固体激光器冷却热沉。The invention relates to the field of optoelectronic technology, in particular to a solid laser cooling heat sink.

背景技术Background technique

高功率固体激光器系统中,激光增益介质吸收的泵浦光只有部分转化为激光输出,其余绝大部分转换为废热沉积在增益介质内部,形成非均匀的热分布,以双端面泵浦的板条固体激光器为例,泵浦光在增益介质中传输时按指数形式被吸收而衰减,因此沿着板条长度方向内热源分布近似为平缓的“V”型。由于固体增益介质只能依靠非泵浦外表面的冷却将热量带走,内部的生热和外表面的冷却必然在增益介质内部形成温度梯度,相应产生的热应力和热应变以及增益介质折射率的改变最终导致激光输出功率的降低和光束质量的下降。在激光器的发展历程中,热效应问题一直是制约激光器向超高功率和优质光束质量方向发展的一个主要障碍。In a high-power solid-state laser system, only part of the pump light absorbed by the laser gain medium is converted into laser output, and most of the rest is converted into waste heat and deposited inside the gain medium, forming a non-uniform heat distribution. Taking a solid-state laser as an example, the pump light is absorbed and attenuated exponentially when it is transmitted in the gain medium, so the heat source distribution along the length of the slab is approximately a flat "V" shape. Since the solid gain medium can only rely on the cooling of the non-pumped outer surface to take away the heat, the internal heat generation and the cooling of the outer surface will inevitably form a temperature gradient inside the gain medium, and the corresponding thermal stress and strain and the refractive index of the gain medium The change of the laser will eventually lead to the reduction of laser output power and the decline of beam quality. In the development of lasers, thermal effects have always been a major obstacle restricting the development of lasers in the direction of ultra-high power and high-quality beam quality.

近年来,为了适应高功率密度电子产品散热的需要,半导体制冷、微喷射制冷、气液沸腾相变冷、微热管冷却等比较先进、独特的冷却技术相继出现并发展起来,并率先在微电子领域获得应用,而在固体激光器上的应用则报道很少,主要是由于固体激光器的瞬时热功率远远超过现有的高功率电子产品,一些先进的冷却技术在超高热功率下往往出现不稳定的换热恶化现象,给激光器增益介质带来极大的隐患。In recent years, in order to meet the heat dissipation needs of high-power density electronic products, advanced and unique cooling technologies such as semiconductor refrigeration, micro-jet refrigeration, gas-liquid boiling phase cooling, and micro-heat pipe cooling have emerged and developed one after another, and are the first in microelectronics. However, there are few reports on the application of solid-state lasers, mainly because the instantaneous thermal power of solid-state lasers far exceeds that of existing high-power electronic products, and some advanced cooling technologies often appear unstable under ultra-high thermal power The deterioration of the heat transfer phenomenon brings great hidden dangers to the laser gain medium.

现阶段高功率固体激光器的通用冷却方式为液体直接冷却和依靠微通道热沉强制对流冷却,其中微通道冷却热沉是最常用且可靠程度最高的冷却方式,微通道冷却技术主要是基于微通道内的微尺度效应来提高对流换热系数,根据R.A.Riddle等人的研究:流量一定时,矩形通道中流体总的传热系数与通道水力直径成反比,因此,随着通道直径的减小,换热系数增加。At present, the common cooling methods for high-power solid-state lasers are liquid direct cooling and forced convection cooling by relying on micro-channel heat sinks. Among them, micro-channel cooling heat sinks are the most commonly used and most reliable cooling methods. Micro-channel cooling technology is mainly based on micro-channel According to the research of R.A.Riddle et al.: When the flow rate is constant, the total heat transfer coefficient of the fluid in the rectangular channel is inversely proportional to the hydraulic diameter of the channel. Therefore, as the channel diameter decreases, The heat transfer coefficient increases.

目前,高功率固体激光器微通道冷却热沉的当量直径一般在0.1mm~0.4mm之间,激光器输出功率的日益提升对微通道热沉的冷却效率提升提出了较高的要求,进一步缩小冷却热沉当量直径可能会造成通道的堵塞,且冷却效率不会有显著提高,因此仅仅通过减小通道的水力直径已无法满足激光器的冷却需求。为提高微通道热沉的冷却效率,需要在微通道内部设置复杂的流道结构以进一步减薄流动边界层或者在流经微通道热沉的冷却介质中添加高导热系数颗粒以提高冷却介质的导热系数,但是复杂的流道结构研制成本高,加工难度大,难以大批量生产制造,且在冷却介质汇总添加高导热系数颗粒后往往会造成微通道的堵塞,进而使整个热沉冷却失效。目前高功率激光器冷却方案中广泛采用结构最简单的平行沟槽状或针肋状微通道热沉,尚没有较好的方式来大幅度提高其冷却效率,且其内部简单的流道无法与激光增益介质内部近似“V”型的热量分布相匹配。At present, the equivalent diameter of high-power solid-state laser microchannel cooling heat sinks is generally between 0.1mm and 0.4mm. The increasing output power of lasers puts forward higher requirements for the cooling efficiency of microchannel heat sinks, and further reduces the cooling heat. A reduced equivalent diameter may cause blockage of the channel, and the cooling efficiency will not be significantly improved. Therefore, only reducing the hydraulic diameter of the channel cannot meet the cooling requirements of the laser. In order to improve the cooling efficiency of the micro-channel heat sink, it is necessary to set a complex channel structure inside the micro-channel to further thin the flow boundary layer or to add high thermal conductivity particles to the cooling medium flowing through the micro-channel heat sink to improve the cooling medium. Thermal conductivity, but the development cost of the complex flow channel structure is high, the processing is difficult, and it is difficult to mass-produce and manufacture, and the addition of particles with high thermal conductivity to the cooling medium will often cause blockage of the microchannel, and then make the cooling of the entire heat sink invalid. At present, the simplest parallel groove-shaped or pin-fin microchannel heat sink is widely used in high-power laser cooling schemes. The approximate "V"-shaped heat distribution inside the gain medium is matched.

发明内容Contents of the invention

本发明提供一种固体激光器冷却热沉,用以解决现有技术高功率激光器冷却方案中广泛采用结构最简单的平行沟槽状或针肋状微通道热沉,尚没有较好的方式来大幅度提高高功率激光器冷却效率的问题。The invention provides a cooling heat sink for solid-state lasers, which is used to solve the problem that the parallel groove-like or pin-rib micro-channel heat sinks with the simplest structure are widely used in the prior art high-power laser cooling schemes, and there is no better way to The problem of greatly improving the cooling efficiency of high-power lasers.

本发明是通过以下技术方案实现的,一种固体激光器冷却热沉,包括封盖和热沉基底,The present invention is achieved through the following technical solutions, a solid-state laser cooling heat sink, including a cover and a heat sink base,

所述热沉基底上分布设置有柱状凸起阵列;An array of columnar protrusions is distributed on the heat sink base;

所述柱状凸起阵列上设置有弹性换热机构,所述弹性换热机构在冷却介质的流动作用下产生振动;The columnar protrusion array is provided with an elastic heat exchange mechanism, and the elastic heat exchange mechanism vibrates under the action of the flow of the cooling medium;

所述封盖与所述热沉基底封装后形成冷却热沉。The cover is packaged with the heat sink base to form a cooling heat sink.

可选的,所述弹性换热机构包括多孔金属纤维网;Optionally, the elastic heat exchange mechanism includes a porous metal fiber mesh;

所述多孔金属纤维网贯穿所述柱状凸起阵列中的每一个柱状凸起并固定在所述柱状凸起上。The porous metal fiber mesh runs through each columnar protrusion in the array of columnar protrusions and is fixed on the columnar protrusions.

可选的,所述弹性换热机构还包括多个金属丝弹簧线圈;Optionally, the elastic heat exchange mechanism further includes a plurality of wire spring coils;

各个述金属丝弹簧线圈分别套装在所述多孔金属纤维网上、下方的各个所述柱状凸起上。Each of the wire spring coils is respectively sleeved on the porous metal fiber mesh and each of the columnar protrusions below.

可选的,所述封盖上设置有供冷却介质出入的入口和出口,所述封盖与所述热沉基底封装后分别在所述入口和出口的位置形成入口集液腔和出口集液腔。Optionally, the cover is provided with an inlet and an outlet for the cooling medium to enter and exit, and after the cover is packaged with the heat sink base, an inlet liquid collection chamber and an outlet liquid collection chamber are respectively formed at the positions of the inlet and the outlet cavity.

可选的,还包括设置在所述入口集液腔内的分流隔板;所述分流隔板上设置有拱形通道。Optionally, it also includes a flow divider arranged in the inlet liquid collection chamber; an arched channel is arranged on the flow divider.

可选的,所述分流隔板的拱形通道为呈“M”形结构的双拱形通道。Optionally, the arched channel of the splitter is a double-arched channel in an "M" shape.

可选的,所述柱状凸起阵列位于所述入口集液腔和出口集液腔之间。Optionally, the columnar protrusion array is located between the inlet liquid collection chamber and the outlet liquid collection chamber.

可选的,所述分流隔板的高度与所述柱状凸起的高度一致。Optionally, the height of the flow divider is consistent with the height of the columnar protrusion.

可选的,所述柱状凸起采用如下结构之一:Optionally, the columnar protrusion adopts one of the following structures:

圆柱结构;cylindrical structure;

方柱结构;square column structure;

及针肋状突起结构。and needle rib-like protrusions.

可选的,所述多孔金属纤维网采用金属丝线编织制成,所述金属丝线包括金线或铜线。Optionally, the porous metal fiber mesh is made by braiding metal wires, and the metal wires include gold wires or copper wires.

本发明的有益效果为:The beneficial effects of the present invention are:

通过在热沉基底上设置柱状凸起阵列,有效增大了热沉内部的换热面积,热沉内部的弹性换热机构内特有的多孔金属纤维网,具有强化换热的效果。同时,弹性换热机构内的金属丝弹簧线圈增大了冷却介质的当量导热系数,在流动冷却介质的作用下会绕着柱状凸起发生转动或者上下跳动,加强了流体内部的混合和扰动,消除了传统柱状凸起后方区域换热系数明显低于迎流面区域换热系数的缺点,进一步增大了热沉的换热效率,大幅提高了冷却效率。The heat exchange area inside the heat sink is effectively increased by setting the array of columnar protrusions on the base of the heat sink, and the unique porous metal fiber mesh in the elastic heat exchange mechanism inside the heat sink has the effect of strengthening heat exchange. At the same time, the wire spring coil in the elastic heat exchange mechanism increases the equivalent thermal conductivity of the cooling medium. Under the action of the flowing cooling medium, it will rotate around the columnar protrusion or jump up and down, which strengthens the mixing and disturbance inside the fluid. It eliminates the disadvantage that the heat transfer coefficient of the area behind the traditional columnar protrusion is significantly lower than the heat transfer coefficient of the facing surface area, further increases the heat transfer efficiency of the heat sink, and greatly improves the cooling efficiency.

上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,而可依照说明书的内容予以实施,并且为了让本发明的上述和其它目的、特征和优点能够更明显易懂,以下特举本发明的具体实施方式。The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the contents of the description, and in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable , the specific embodiments of the present invention are enumerated below.

附图说明Description of drawings

通过阅读下文优选实施方式的详细描述,各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的,而并不认为是对本发明的限制。而且在整个附图中,用相同的参考符号表示相同的部件。在附图中:Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiment. The drawings are only for the purpose of illustrating a preferred embodiment and are not to be considered as limiting the invention. Also throughout the drawings, the same reference numerals are used to designate the same components. In the attached picture:

图1为本发明提供的固体激光器冷却热沉在一具体实施例中的结构示意图;Fig. 1 is a schematic structural view of a solid-state laser cooling heat sink provided by the present invention in a specific embodiment;

图2为图1的正视图;Fig. 2 is the front view of Fig. 1;

图3为分流隔板的主视图。Figure 3 is a front view of the splitter.

图中:1-封盖,11-出口,12-入口,2-出口集液腔,3-金属丝弹簧线圈,4-热沉基底,5-多孔金属纤维网,6-入口集液腔,7-分流隔板,71-双拱形通道,8-柱状凸起。In the figure: 1-cover, 11-outlet, 12-inlet, 2-outlet liquid collection chamber, 3-wire spring coil, 4-heat sink base, 5-porous metal fiber mesh, 6-inlet liquid collection chamber, 7-distributor partition, 71-double arched channel, 8-pillar protrusion.

具体实施方式Detailed ways

下面将参照附图更详细地描述本公开的示例性实施例。虽然附图中显示了本公开的示例性实施例,然而应当理解,可以以各种形式实现本公开而不应被这里阐述的实施例所限制。相反,提供这些实施例是为了能够更透彻地理解本公开,并且能够将本公开的范围完整的传达给本领域的技术人员。Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

请参见图1、图2,在本发明的第一实施例中,提供了一种固体激光器冷却热沉,包括封盖1和热沉基底4,热沉基底4上分布设置有柱状凸起阵列;柱状凸起阵列上设置有弹性换热机构,弹性换热机构在冷却介质的流动作用下产生振动,封盖1与热沉基底4封装后形成冷却热沉。Please refer to Fig. 1 and Fig. 2, in the first embodiment of the present invention, a solid-state laser cooling heat sink is provided, including a cover 1 and a heat sink base 4, and a columnar protrusion array is distributed on the heat sink base 4 The array of columnar protrusions is provided with an elastic heat exchange mechanism, and the elastic heat exchange mechanism vibrates under the flow of the cooling medium, and the cover 1 and the heat sink base 4 are packaged to form a cooling heat sink.

可选的,弹性换热机构包括多孔金属纤维网5,在可选实施例中,多孔金属纤维网5采用金属丝线编织制成,金属丝线包括金线或铜线。多孔金属纤维网贯穿所述柱状凸起阵列中的每一个柱状凸起8并固定在所述柱状凸起8上。多孔金属纤维网5在冷却介质的流动作用下,发生自振,从而引起热沉内部通道截面积的周期性变化,对流体产生扰流,引发流体发生脉动或者振动,破坏并减薄流体的边界层,起到强化换热的效果。在可选实施例中,柱状凸起8采用如下结构之一:Optionally, the elastic heat exchange mechanism includes a porous metal fiber net 5. In an optional embodiment, the porous metal fiber net 5 is made of braided metal wires, and the metal wires include gold wires or copper wires. The porous metal fiber mesh runs through each columnar protrusion 8 in the array of columnar protrusions and is fixed on the columnar protrusions 8 . Under the action of the flow of the cooling medium, the porous metal fiber mesh 5 undergoes self-vibration, which causes periodic changes in the cross-sectional area of the channel inside the heat sink, disturbs the fluid, causes the fluid to pulsate or vibrate, and destroys and thins the boundary of the fluid. Layer, to enhance the effect of heat transfer. In an optional embodiment, the columnar protrusion 8 adopts one of the following structures:

圆柱结构;cylindrical structure;

方柱结构;square column structure;

及针肋状突起结构。and needle rib-like protrusions.

可选的,弹性换热机构还包括多个金属丝弹簧线圈3,各个所述金属丝弹簧线圈3分别套装在所述多孔金属纤维网5上、下方的各个所述柱状凸起8上。柱状凸起8上的金属丝弹簧线圈3增大了冷却介质的当量导热系数,在流动冷却介质的作用下金属丝弹簧线圈3会绕着柱状凸起8发生转动或者上下跳动,加强了流体内部的混合和扰动,消除了传统柱状凸起8后方区域换热系数明显低于迎流面区域换热系数的缺点,进一步增大了热沉的换热效率。Optionally, the elastic heat exchange mechanism further includes a plurality of wire spring coils 3 , and each of the wire spring coils 3 is respectively sleeved on each of the columnar protrusions 8 on and below the porous metal fiber mesh 5 . The wire spring coil 3 on the columnar protrusion 8 increases the equivalent thermal conductivity of the cooling medium. Under the action of the flowing cooling medium, the wire spring coil 3 will rotate around the columnar protrusion 8 or jump up and down, which strengthens the fluid internal The mixing and disturbance of the traditional columnar protrusion 8 eliminates the disadvantage that the heat transfer coefficient of the area behind the traditional columnar protrusion 8 is significantly lower than the heat transfer coefficient of the facing surface area, and further increases the heat transfer efficiency of the heat sink.

可选的,所述封盖1上设置有供冷却介质出入的入口12和出口11,所述封盖1与所述热沉基底4封装后分别在所述入口12和出口11的位置形成入口集液腔6和出口集液腔2。所述柱状凸起阵列位于所述入口集液腔6和出口集液腔2之间。Optionally, the cover 1 is provided with an inlet 12 and an outlet 11 for the cooling medium to enter and exit, and the cover 1 and the heat sink base 4 are packaged to form inlets at the positions of the inlet 12 and the outlet 11 respectively. Liquid collection chamber 6 and outlet liquid collection chamber 2. The columnar protrusion array is located between the inlet liquid collection chamber 6 and the outlet liquid collection chamber 2 .

可选的,参见图3,冷却热沉还包括设置在所述入口集液腔6内的分流隔板7,分流隔板7上设置有拱形通道。所述分流隔板7的高度与所述柱状凸起8的高度一致。在可选实施例中,分流隔板7的拱形通道为与激光增益介质热量分布相匹配的呈“M”形结构的双拱形通道71。Optionally, referring to FIG. 3 , the cooling heat sink further includes a flow divider 7 arranged in the inlet liquid collection chamber 6 , and an arched channel is arranged on the flow divider 7 . The height of the flow divider 7 is consistent with the height of the columnar protrusion 8 . In an optional embodiment, the arched channel of the splitter 7 is a double arched channel 71 in an "M" shape that matches the heat distribution of the laser gain medium.

请参见图1~3,在本发明的第二实施例中,提供一种流动阻力小、对流换热系数高的微结构高功率固体激光器冷却热沉,包括封盖1和热沉基底4,热沉基底4上分布设置有柱状凸起阵列,本发明优选实施例中,柱状凸起阵列中各个柱状凸起可以是交错分布的,也可以是按行列整齐排列分布的,在此,本发明实施例对柱状凸起阵列的分布方式不做唯一的限定。柱状凸起阵列上设置有弹性换热机构,弹性换热机构在冷却介质的流动作用下产生振动。柱状凸起阵列和弹性换热机构组成具有强化换热效果的微结构,封盖1与具有强化换热微结构的热沉基底4封装后形成冷却热沉,整个冷却热沉的下表面与激光增益介质紧密连接,用于冷却激光增益介质。Please refer to FIGS. 1-3. In the second embodiment of the present invention, a microstructure high-power solid-state laser cooling heat sink with small flow resistance and high convective heat transfer coefficient is provided, including a cover 1 and a heat sink base 4, The heat sink base 4 is distributed with an array of columnar protrusions. In a preferred embodiment of the present invention, each columnar protrusion in the array of columnar protrusions can be distributed in a staggered manner, or arranged in order in rows and columns. Here, the present invention The embodiment does not make a unique limitation on the distribution manner of the columnar protrusion array. An elastic heat exchange mechanism is arranged on the columnar projection array, and the elastic heat exchange mechanism vibrates under the action of the flow of the cooling medium. The columnar protrusion array and the elastic heat exchange mechanism form a microstructure with enhanced heat exchange effect. After the cover 1 is packaged with the heat sink base 4 with enhanced heat exchange microstructure, a cooling heat sink is formed. The lower surface of the entire cooling heat sink and the laser The gain medium is closely connected to cool the laser gain medium.

封盖1上设置有供冷却介质出入的入口12和出口11,入口12和出口11均设置成直径相同的圆形通孔,所述封盖1与所述热沉基底4封装后分别在所述入口12和出口11的位置形成入口集液腔6和出口集液腔2。在入口集液腔6内设置有分流隔板7,分流隔板7上设置有拱形通道。所述分流隔板7的高度与柱状凸起8的高度一致,分流隔板7的下表面与热沉基底4上表面贴合,通过焊接工艺实现稳固连接。The cover 1 is provided with an inlet 12 and an outlet 11 for the cooling medium to come in and out, and the inlet 12 and the outlet 11 are all set as circular through holes with the same diameter. After the cover 1 and the heat sink base 4 are packaged, respectively The positions of the inlet 12 and the outlet 11 form the inlet collecting chamber 6 and the outlet collecting chamber 2 . A flow divider 7 is arranged in the inlet liquid collection chamber 6 , and an arched channel is arranged on the flow divider 7 . The height of the splitter baffle 7 is consistent with the height of the columnar protrusion 8 , and the lower surface of the splitter baffle 7 is attached to the upper surface of the heat sink base 4 , and a stable connection is achieved through a welding process.

在本实施例中,柱状凸起阵列位于所述入口集液腔6和出口集液腔2之间,柱状凸起8采用圆柱结构,直径为0.5mm~1mm,高度为2mm~4mm,中心间距为1.5~2mm,柱状凸起8的尺寸及其内部流道的当量直径均大于传统微通道当量直径,可有效地降低了热沉的流动阻力。In this embodiment, the columnar protrusion array is located between the inlet liquid collection chamber 6 and the outlet liquid collection chamber 2. The columnar protrusions 8 adopt a cylindrical structure with a diameter of 0.5 mm to 1 mm and a height of 2 mm to 4 mm. The size of the columnar protrusion 8 and the equivalent diameter of the internal flow channel are both larger than the equivalent diameter of the traditional microchannel, which can effectively reduce the flow resistance of the heat sink.

弹性换热机构包括多孔金属纤维网5,优选的,多孔金属纤维网5为三维网状结构,多孔金属纤维网5的厚度为0.05~0.1mm,孔隙率为0.6~0.8,采用直径为0.02mm~0.05mm的金属丝线编织制成,金属丝线包括韧性强、导热系数高、耐腐蚀的金线或铜线,或其它韧性强、导热系数高、耐腐蚀的金属丝线。多孔金属纤维网5贯穿所述柱状凸起阵列中的每一个柱状凸起8并通过真空扩散焊接的工艺的焊接固定在柱状凸起8上的中部位置处。多孔金属纤维网5在冷却介质的流动作用下,发生自振,从而引起热沉内部通道截面积的周期性变化,对流体产生扰流,引发流体发生脉动或者振动,破坏并减薄流体的边界层,起到强化换热的效果。The elastic heat exchange mechanism includes a porous metal fiber net 5. Preferably, the porous metal fiber net 5 has a three-dimensional network structure, the thickness of the porous metal fiber net 5 is 0.05-0.1 mm, the porosity is 0.6-0.8, and the diameter is 0.02 mm. ~0.05mm metal wire braided, the metal wire includes strong toughness, high thermal conductivity, corrosion-resistant gold wire or copper wire, or other toughness, high thermal conductivity, corrosion-resistant metal wire. The porous metal fiber mesh 5 runs through each columnar protrusion 8 in the array of columnar protrusions and is fixed at the middle position on the columnar protrusion 8 by vacuum diffusion welding. Under the action of the flow of the cooling medium, the porous metal fiber mesh 5 undergoes self-vibration, which causes periodic changes in the cross-sectional area of the channel inside the heat sink, disturbs the fluid, causes the fluid to pulsate or vibrate, and destroys and thins the boundary of the fluid. Layer, to enhance the effect of heat transfer.

弹性换热机构还包括多个金属丝弹簧线圈3,各个金属丝弹簧线圈3分别套装在多孔金属纤维网5上、下方的各个柱状凸起8上。金属丝弹簧线圈3的丝径为0.05~0.1mm,线圈高度为0.5~1mm,线圈直径与柱状凸起8的当量直径相匹配,金属丝弹簧线圈3在冷却热沉内部仅会绕柱状凸起8发生转动或上下跳动,不会发生水平位移。柱状凸起8上的金属丝弹簧线圈3增大了冷却介质的当量导热系数,在流动冷却介质的作用下金属丝弹簧线圈3会绕着柱状凸起8发生转动或者自由上下跳动,加强了流体内部的混合和扰动,消除了传统柱状凸起8后方区域换热系数明显低于迎流面区域换热系数的缺点,进一步增大了冷却热沉的换热效率。The elastic heat exchange mechanism also includes a plurality of wire spring coils 3 , and each wire spring coil 3 is sleeved on each columnar protrusion 8 on and below the porous metal fiber net 5 . The wire diameter of the wire spring coil 3 is 0.05-0.1 mm, the coil height is 0.5-1 mm, the coil diameter matches the equivalent diameter of the columnar protrusion 8, and the wire spring coil 3 only wraps around the columnar protrusion inside the cooling heat sink 8 rotation or jumping up and down, no horizontal displacement. The wire spring coil 3 on the columnar protrusion 8 increases the equivalent thermal conductivity of the cooling medium. Under the action of the flowing cooling medium, the wire spring coil 3 will rotate around the columnar protrusion 8 or jump up and down freely, which strengthens the flow of the fluid. The internal mixing and turbulence eliminates the disadvantage that the heat transfer coefficient of the area behind the traditional columnar protrusion 8 is obviously lower than that of the area facing the flow surface, and further increases the heat transfer efficiency of the cooling heat sink.

由于激光增益介质内部近似“V”型的热量分布,所述分流隔板7的拱形通道为与激光增益介质内部近似“V”型的热量分布相匹配的呈“M”形结构的双拱形通道71。双拱形通道最高点距离分流隔板上表面的高度为0.5~1mm,其最低点距离分流隔板下表面的高度为0.5~1mm。Due to the approximately "V"-shaped heat distribution inside the laser gain medium, the arched channel of the splitter 7 is a double arch in an "M" shape that matches the approximately "V"-shaped heat distribution inside the laser gain medium Shaped channel 71. The height of the highest point of the double-arch channel from the upper surface of the diversion partition is 0.5-1mm, and the height of the lowest point from the lower surface of the diversion partition is 0.5-1mm.

冷却介质从封盖1的入口12进入冷却热沉的入口集液腔6中,在具有双拱形通道的分流隔板7的作用下调整流经冷却热沉内部柱状凸起阵列中不同区域的冷却介质流量,以达到与激光增益介质中的热量分布相匹配的目的。冷却介质在冷却热沉内部流动时,烧结在柱状凸起8中间部位的超薄多孔金属纤维网5在冷却介质流动的作用下发生周期性的上下波动,进而带动套装在柱状凸起8上的金属丝弹簧线圈3发生上下跳动,同时金属丝弹簧线圈3还会在冷却介质(或冷却液)的冲击下绕着柱状凸起8旋转,加强了流体内部的混合和扰动,有效地减薄了贴壁区域的流体边界层,并强化了柱状凸起8后边缘的对流换热,从而提高了整个冷却热沉的冷却效率。The cooling medium enters the inlet liquid collection chamber 6 of the cooling heat sink from the inlet 12 of the cover 1, and under the action of the splitter 7 with double arched channels, the cooling medium flows through different areas in the columnar protrusion array inside the cooling heat sink. Cooling medium flow to match the heat distribution in the laser gain medium. When the cooling medium flows inside the cooling heat sink, the ultra-thin porous metal fiber mesh 5 sintered in the middle of the columnar protrusion 8 fluctuates periodically up and down under the action of the cooling medium flow, and then drives the The wire spring coil 3 jumps up and down, and at the same time, the wire spring coil 3 also rotates around the columnar protrusion 8 under the impact of the cooling medium (or cooling liquid), which strengthens the mixing and disturbance inside the fluid and effectively thins the The fluid boundary layer in the wall-adhering area strengthens the convective heat transfer at the rear edge of the columnar protrusion 8, thereby improving the cooling efficiency of the entire cooling heat sink.

显然,本发明通过在热沉基底上设置柱状凸起阵列,有效增大了热沉内部的换热面积,热沉内部的弹性换热机构内特有的多孔金属纤维网,在冷却介质流动时会发生自振,从而引起热沉内部通道截面积的周期性变化,对流体产生扰流,引发流体发生脉动或者振动,破坏并减薄流体的边界层,具有强化换热的效果。同时,弹性换热机构内的金属丝弹簧线圈增大了冷却介质的当量导热系数,且在流动冷却介质的作用下会绕着柱状凸起发生转动或者上下跳动,加强了流体内部的混合和扰动,消除了传统柱状凸起后方区域换热系数明显低于迎流面区域换热系数的缺点,进一步增大了热沉的换热效率,大幅提高了冷却效率。Apparently, the present invention effectively increases the heat exchange area inside the heat sink by arranging the array of columnar protrusions on the base of the heat sink. The unique porous metal fiber mesh in the elastic heat exchange mechanism inside the heat sink will Natural vibration occurs, which causes periodic changes in the cross-sectional area of the internal channel of the heat sink, turbulence to the fluid, causes the fluid to pulsate or vibrate, destroys and thins the boundary layer of the fluid, and has the effect of enhancing heat transfer. At the same time, the wire spring coil in the elastic heat exchange mechanism increases the equivalent thermal conductivity of the cooling medium, and under the action of the flowing cooling medium, it will rotate around the columnar protrusion or jump up and down, which strengthens the mixing and disturbance inside the fluid , Eliminate the disadvantage that the heat transfer coefficient of the area behind the traditional columnar protrusion is significantly lower than the heat transfer coefficient of the facing surface area, further increase the heat transfer efficiency of the heat sink, and greatly improve the cooling efficiency.

总之,以上所述仅为本发明的较佳实施例而已,并非用于限定本发明的保护范围。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。In a word, the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (10)

1.一种固体激光器冷却热沉,包括封盖和热沉基底,其特征在于,1. A solid-state laser cooling heat sink, comprising a cover and a heat sink base, is characterized in that, 所述热沉基底上分布设置有柱状凸起阵列;An array of columnar protrusions is distributed on the heat sink base; 所述柱状凸起阵列上设置有弹性换热机构,所述弹性换热机构在冷却介质的流动作用下产生振动;The columnar protrusion array is provided with an elastic heat exchange mechanism, and the elastic heat exchange mechanism vibrates under the action of the flow of the cooling medium; 所述封盖与所述热沉基底封装后形成冷却热沉。The cover is packaged with the heat sink base to form a cooling heat sink. 2.如权利要求1所述的固体激光器冷却热沉,其特征在于,2. solid-state laser cooling heat sink as claimed in claim 1, is characterized in that, 所述弹性换热机构包括多孔金属纤维网;The elastic heat exchange mechanism includes a porous metal fiber mesh; 所述多孔金属纤维网贯穿所述柱状凸起阵列中的每一个柱状凸起并固定在所述柱状凸起上。The porous metal fiber mesh runs through each columnar protrusion in the array of columnar protrusions and is fixed on the columnar protrusions. 3.如权利要求2所述的固体激光器冷却热沉,其特征在于,所述弹性换热机构还包括多个金属丝弹簧线圈;3. The solid-state laser cooling heat sink according to claim 2, wherein the elastic heat exchange mechanism also includes a plurality of wire spring coils; 各个所述金属丝弹簧线圈分别套装在所述多孔金属纤维网上、下方的各个所述柱状凸起上。Each of the wire spring coils is respectively sleeved on the porous metal fiber mesh and each of the columnar protrusions below. 4.如权利要求1所述的固体激光器冷却热沉,其特征在于,所述封盖上设置有供冷却介质出入的入口和出口,所述封盖与所述热沉基底封装后分别在所述入口和出口的位置形成入口集液腔和出口集液腔。4. The solid-state laser cooling heat sink according to claim 1, wherein the cover is provided with an inlet and an outlet for the cooling medium to enter and exit, and the cover and the heat sink base are packaged respectively in the The positions of the inlet and outlet described above form an inlet manifold and an outlet manifold. 5.如权利要求4所述的固体激光器冷却热沉,其特征在于,还包括设置在所述入口集液腔内的分流隔板;所述分流隔板上设置有拱形通道。5 . The solid-state laser cooling heat sink according to claim 4 , further comprising a divider baffle arranged in the inlet liquid collection cavity; an arched channel is arranged on the divider baffle. 6 . 6.如权利要求5所述的固体激光器冷却热沉,其特征在于,所述分流隔板的拱形通道为呈“M”形结构的双拱形通道。6 . The solid-state laser cooling heat sink according to claim 5 , wherein the arched channel of the splitter partition is a double arched channel in an "M" shape. 7.如权利要求4所述的固体激光器冷却热沉,其特征在于,所述柱状凸起阵列位于所述入口集液腔和出口集液腔之间。7 . The heat sink for cooling solid-state lasers according to claim 4 , wherein the columnar protrusion array is located between the inlet liquid collection chamber and the outlet liquid collection chamber. 8 . 8.如权利要求5所述的固体激光器冷却热沉,其特征在于,所述分流隔板的高度与所述柱状凸起的高度一致。8 . The solid-state laser cooling heat sink according to claim 5 , wherein the height of the shunt partition plate is consistent with the height of the columnar protrusion. 9 . 9.如权利要求2所述的固体激光器冷却热沉,其特征在于,所述柱状凸起采用如下结构之一:9. The solid-state laser cooling heat sink according to claim 2, wherein the columnar protrusion adopts one of the following structures: 圆柱结构;cylindrical structure; 方柱结构;square column structure; 及针肋状突起结构。and needle rib-like protrusions. 10.如权利要求2所述的固体激光器冷却热沉,其特征在于,所述多孔金属纤维网采用金属丝线编织制成,所述金属丝线包括金线或铜线。10. The heat sink for cooling solid-state lasers according to claim 2, wherein the porous metal fiber mesh is made by weaving metal wires, and the metal wires include gold wires or copper wires.
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CN111970897A (en) * 2020-08-06 2020-11-20 中国电子科技集团公司第三十八研究所 Heat exchange radiator is reinforceed to semi-enclosed island type rib pole side hole vortex
CN111970897B (en) * 2020-08-06 2022-06-21 中国电子科技集团公司第三十八研究所 Heat exchange radiator is reinforceed to semi-enclosed island type rib pole side hole vortex
CN112582864A (en) * 2021-01-18 2021-03-30 北京同方华光系统科技有限公司 Evaporative cooling type laser
CN114975320A (en) * 2022-07-12 2022-08-30 桂林电子科技大学 Micro-runner radiator for improving fluid distribution

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