[go: up one dir, main page]

CN107703105A - The adjustable substrate of surface plasma performance and preparation method - Google Patents

The adjustable substrate of surface plasma performance and preparation method Download PDF

Info

Publication number
CN107703105A
CN107703105A CN201711043664.6A CN201711043664A CN107703105A CN 107703105 A CN107703105 A CN 107703105A CN 201711043664 A CN201711043664 A CN 201711043664A CN 107703105 A CN107703105 A CN 107703105A
Authority
CN
China
Prior art keywords
substrate
pdms
surface plasmon
noble metal
fabricated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711043664.6A
Other languages
Chinese (zh)
Inventor
洪瑞金
邵文
孙文峰
邓操
陶春先
张大伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Shanghai for Science and Technology
Original Assignee
University of Shanghai for Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Shanghai for Science and Technology filed Critical University of Shanghai for Science and Technology
Priority to CN201711043664.6A priority Critical patent/CN107703105A/en
Publication of CN107703105A publication Critical patent/CN107703105A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/552Attenuated total reflection
    • G01N21/553Attenuated total reflection and using surface plasmons
    • G01N21/554Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Laminated Bodies (AREA)

Abstract

本发明涉及一种表面等离子体性能可调的基底及制备方法,该基底包括一个PDMS基片,PDMS基片上沉积贵金属膜层;该制备方法:以AAO为模板,将表面结构转移至PDMS基片上,使PDMS基片带有纳米柱阵列结构表面;在制作的PDMS基片表面沉积贵金属膜层;对制作后的基底进行拉伸:将制作后的贵金属PDMS基底平整的放置于一维平移拉伸夹中,基底一端固定,另一端夹在可移动平台上,基底可沿移动平台移动方向在PDMS弹性范围内进行拉伸;对拉伸后的基底进行检测:拉伸后的基底表面等离子体吸收峰出现蓝移,吸收强度减弱。表明该基底实现了表面等离子体性能可调。本发明的基底制作工艺简单高效,基底灵敏性好、可控性高,工艺周期短。

The invention relates to a substrate with adjustable surface plasmon properties and a preparation method. The substrate includes a PDMS substrate on which a noble metal film layer is deposited; the preparation method: using AAO as a template to transfer the surface structure to the PDMS substrate , so that the PDMS substrate has a nano-column array structure surface; deposit a noble metal film layer on the surface of the fabricated PDMS substrate; stretch the fabricated substrate: place the fabricated noble metal PDMS substrate flatly on a one-dimensional translation stretching In the clamp, one end of the substrate is fixed, and the other end is clamped on the movable platform, and the substrate can be stretched within the elastic range of PDMS along the moving direction of the mobile platform; the stretched substrate is tested: the plasma absorption on the surface of the stretched substrate The peak appears blue-shifted and the absorption intensity weakens. It shows that the substrate realizes tunable surface plasmon properties. The substrate manufacturing process of the invention is simple and efficient, the substrate has good sensitivity, high controllability and short process cycle.

Description

表面等离子体性能可调的基底及制备方法Substrate with adjustable surface plasmon properties and preparation method

技术领域technical field

本发明涉及一种表面等离子性能可调技术,特别是一种表面等离子体性能可调的新型基底。The invention relates to a surface plasma performance adjustable technology, in particular to a novel substrate with adjustable surface plasma performance.

背景技术Background technique

表面等离子体是指金属表面自由电子与入射光子相互耦合形成的非辐射局域电磁模式。在特定条件下,当光波入射到金属和介质的交界面处时,倏逝波和表面等离子体波将产生共振,这种现象称为表面等离子体共振(Surface Plasmon Resonance,SPR)。SPR技术具有灵敏度高、分辨率高、可实时分析等优点,因此具有很多潜在的应用前景,如:生物与化学传感、光电子器件、非线性光学、表面拉曼增强等诸多的领域。这些应用的效率与强度常常与等离子体共振波长紧密相关。理论表明,通过改变金属纳米颗粒几何形状、尺寸大小、环境因素和材料成分等,其等离子体共振频率也会随之发生变化。对SPR的研究主要在于贵金属表面,如金、银、铂等贵金属,这主要是因为在一般条件下它们的性质比较稳定,并且电子载荷密度高。但是,通过控制贵金属颗粒的形状与大小实现SPR性能可调依然是关键问题。Surface plasmon refers to the non-radiative localized electromagnetic mode formed by the mutual coupling of free electrons and incident photons on the metal surface. Under certain conditions, when the light wave is incident on the interface between the metal and the medium, the evanescent wave and the surface plasmon wave will resonate. This phenomenon is called surface plasmon resonance (Surface Plasmon Resonance, SPR). SPR technology has the advantages of high sensitivity, high resolution, and real-time analysis, so it has many potential application prospects, such as: biological and chemical sensing, optoelectronic devices, nonlinear optics, surface Raman enhancement and many other fields. The efficiency and strength of these applications are often closely related to the plasmon resonance wavelength. Theory shows that by changing the geometric shape, size, environmental factors and material composition of metal nanoparticles, the plasmon resonance frequency will also change accordingly. The research on SPR is mainly on the surface of noble metals, such as gold, silver, platinum and other noble metals, mainly because of their relatively stable properties and high electron loading density under general conditions. However, it is still a key issue to realize the tunable SPR performance by controlling the shape and size of noble metal particles.

PDMS(Polydimethylsiloxane,聚二甲基硅氧烷,通常称作有机硅)是一种高分子有机硅化合物,具有光学透明、光学特性、低表面能、高透气性和很好的弹性。PDMS在液态时为一种黏稠液体,被称为硅油;在固态时则为惰性硅胶,具有无毒、疏水性、透明弹性的特征。在进行实验时会将主剂与固化剂以一定比例均匀混合后,再利用抽真空使混合液中的空气排出,最后在一定温度下烘烤一定时间可使PDMS固化。PDMS (Polydimethylsiloxane, polydimethylsiloxane, commonly referred to as organosilicon) is a polymer organosilicon compound with optical transparency, optical properties, low surface energy, high gas permeability and good elasticity. PDMS is a viscous liquid in the liquid state, known as silicone oil; in the solid state, it is inert silica gel, which is non-toxic, hydrophobic, transparent and elastic. During the experiment, the main agent and the curing agent will be evenly mixed in a certain proportion, and then the air in the mixture will be discharged by vacuuming, and finally the PDMS will be cured by baking at a certain temperature for a certain period of time.

目前,制备与调控SPR的方法主要使用胶质金属颗粒或者金属薄膜退火方式,而这些工艺繁琐、重复性差、成本过高。因此可以凭借PDMS的弹性性质,由贵金属PDMS基底的拉伸控制金属颗粒的间隙以此来实现SPR性能可控,有很高的研究价值和现实意义。At present, the method of preparing and regulating SPR mainly uses colloidal metal particles or metal thin film annealing, but these processes are cumbersome, poor in repeatability, and high in cost. Therefore, by virtue of the elastic properties of PDMS, the gap between metal particles can be controlled by the stretching of noble metal PDMS substrates to achieve controllable SPR performance, which has high research value and practical significance.

发明内容Contents of the invention

鉴于现有控制表面等离子体共振的方法存在制备过程复杂,复现性差与成本高等缺点,本发明的目的是提供一种表面等离子体性能可调的基底及制备方法,实现基底制作工艺简单高效,基底灵敏性好、可控性高,工艺周期短等优点。In view of the disadvantages of complex preparation process, poor reproducibility and high cost in the existing methods for controlling surface plasmon resonance, the purpose of the present invention is to provide a substrate with adjustable surface plasmon properties and a preparation method to realize a simple and efficient substrate manufacturing process. The substrate has the advantages of good sensitivity, high controllability, and short process cycle.

为实现上述目的,本发明的技术方案是:For realizing the above object, technical scheme of the present invention is:

一种表面等离子体性能可调的基底,包括一个PDMS基片,所述的PDMS基片上转移有AAO模板的纳米柱阵列结构,具有纳米柱阵列结构的PDMS基片上沉积有贵金属膜层。A substrate with adjustable surface plasmon properties comprises a PDMS substrate, on which a nano-pillar array structure of an AAO template is transferred, and a noble metal film layer is deposited on the PDMS substrate with a nano-pillar array structure.

进一步,所述贵金属膜层的材料为Ag或Au或Pt。Further, the material of the noble metal film layer is Ag, Au or Pt.

一种表面等离子体性能可调的基底的制备方法,具体步骤如下:A method for preparing a substrate with adjustable surface plasmon properties, the specific steps are as follows:

(1)将AAO模板上的结构转移到PDMS基片上,使PDMS基片表面具有纳米柱阵列结构;(1) transfer the structure on the AAO template to the PDMS substrate, so that the surface of the PDMS substrate has a nanocolumn array structure;

(2)在制作后的PDMS基片上沉积贵金属膜层,得到一种表面等离子体性能可调的基底;(2) Depositing a noble metal film layer on the fabricated PDMS substrate to obtain a substrate with adjustable surface plasmon properties;

(3)对制作后的表面等离子体性能可调的基底进行拉伸:将制作后的贵金属PDMS基底平整的放置于一维平移拉伸夹中,基底一端固定,另一端夹在可移动平台上,使制作后的贵金属PDMS基底沿着移动平台移动方向在PDMS弹性范围内拉伸一定的长度;(3) Stretch the fabricated substrate with adjustable surface plasmon properties: place the fabricated noble metal PDMS substrate flatly in a one-dimensional translation stretching clamp, one end of the substrate is fixed, and the other end is clamped on a movable platform , so that the fabricated noble metal PDMS substrate is stretched for a certain length within the elastic range of PDMS along the moving direction of the mobile platform;

(4)对拉伸后的基底进行检测:检测拉伸后基底的吸收光谱,拉伸基底可实现对表面等离子体性能调控。(4) Detecting the stretched substrate: detecting the absorption spectrum of the stretched substrate, and stretching the substrate can realize the regulation of surface plasmon properties.

本发明和已有技术相比,所具有的有益效果是:通过本发明获得的表面等离子体性能可控的基底,其对设备要求低,成本低、工艺简单且周期短,并且此基底具有良好的灵敏度,对谐调表面等离子体性能具有很高的研究价值和应用前景。Compared with the prior art, the present invention has the beneficial effects that: the substrate with controllable surface plasmon performance obtained by the present invention has low equipment requirements, low cost, simple process and short cycle, and the substrate has good It has high research value and application prospect for tuning surface plasmon properties.

附图说明Description of drawings

图1是本发明的表面等离子体性能可控基底的制备方法流程图;Fig. 1 is the flow chart of the preparation method of the substrate with controllable surface plasmon properties of the present invention;

图2是本发明的表面等离子体性能可控基底的工艺示意图,Fig. 2 is a process schematic diagram of the substrate with controllable surface plasmon properties of the present invention,

其中,(a)PDMS混合液倾覆于AAO模板表面;(b)固化PDMS基片;(c)在PDMS基片上沉积贵金属膜层,对制作后的基底进行拉伸;(d)拉伸后的基底;Among them, (a) the PDMS mixture is overturned on the surface of the AAO template; (b) the PDMS substrate is cured; (c) the noble metal film is deposited on the PDMS substrate, and the fabricated substrate is stretched; (d) the stretched base;

图3是本发明的表面等离子体性能可控基底拉伸前与拉伸后的吸收光谱图,Fig. 3 is the absorption spectrum diagram of the substrate with controllable surface plasmon properties of the present invention before stretching and after stretching,

其中,图中a表示拉伸前基底的吸收曲线;图中b表示拉伸后基底的吸收曲线。Wherein, a in the figure represents the absorption curve of the substrate before stretching; b in the figure represents the absorption curve of the substrate after stretching.

具体实施方式detailed description

为了使本发明实现的技术手段、创作特征、达成目的与功效易于明白了解,以下实施例结合附图对本发明一种表面等离子体性能可控的基底及其制备方法作具体阐述,但本发明的保护范围不限于下述的实施例。In order to make the technical means, creative features, goals and effects of the present invention easy to understand, the following examples will specifically describe a substrate with controllable surface plasmon properties and its preparation method according to the present invention in conjunction with the accompanying drawings. The scope of protection is not limited to the examples described below.

本发明的表面等离子体性能可调的基底,包括一个PDMS基片、贵金属膜层。PDMS基片上转移有AAO模板的纳米柱阵列结构,具有纳米柱阵列结构的PDMS基片上沉积有贵金属膜层。贵金属膜层的材料为Ag或Au或Pt。The substrate with adjustable surface plasmon properties of the present invention comprises a PDMS substrate and a noble metal film layer. A nano-pillar array structure of the AAO template is transferred on the PDMS substrate, and a noble metal film layer is deposited on the PDMS substrate with the nano-pillar array structure. The material of the noble metal film layer is Ag, Au or Pt.

如图1所示,本发明的表面等离子体性能可调的基底制备方法的流程如下:As shown in Figure 1, the process flow of the substrate preparation method with adjustable surface plasmon properties of the present invention is as follows:

1)将AAO模板的结构转移到PDMS基片上,则PDMS基片表面具有纳米柱阵列结构;1) Transfer the structure of the AAO template to the PDMS substrate, then the surface of the PDMS substrate has a nanopillar array structure;

2)在制作后的PDMS基片上沉积贵金属膜层,即可得到一种表面等离子体性能可调的新型基底;2) Deposit a noble metal film layer on the fabricated PDMS substrate to obtain a new type of substrate with adjustable surface plasmon properties;

3)对制作后的基底进行拉伸:将制作后的贵金属PDMS基底平整的放置于一维平移拉伸夹中,基底一端固定,另一端夹在可移动平台上,基底沿着移动平台移动方向在PDMS弹性范围内可拉伸一定的长度;3) Stretch the prepared substrate: Place the fabricated noble metal PDMS substrate flatly in a one-dimensional translation stretching clamp, one end of the substrate is fixed, and the other end is clamped on the movable platform, and the substrate moves along the moving direction of the mobile platform It can be stretched to a certain length within the elastic range of PDMS;

4)对拉伸后的基底进行检测:检测拉伸后基底的吸收光谱。4) Detecting the stretched substrate: detecting the absorption spectrum of the stretched substrate.

实施例1:Example 1:

实施例1结合了图2对本发明的基底制备工艺作具体阐述。具体的操作步骤如下:Embodiment 1 elaborates the substrate preparation process of the present invention in combination with FIG. 2 . The specific operation steps are as follows:

(a)将按10:1配制的PDMS混合液倾覆于AAO模板表面,利用抽真空的方法使混合液中的空气排出,使PDMS渗入AAO孔径中,见图2(a);(a) Pour the PDMS mixed solution prepared at 10:1 on the surface of the AAO template, and use the method of vacuuming to discharge the air in the mixed solution, so that the PDMS penetrates into the aperture of the AAO, see Figure 2(a);

(b)在80℃下烘烤3小时使PDMS固化,将固化的PDMS剥离,得到带有纳米柱阵列结构的PDMS基片,见图2(b);(b) Bake at 80° C. for 3 hours to cure the PDMS, and peel off the cured PDMS to obtain a PDMS substrate with a nanocolumn array structure, as shown in Figure 2(b);

(c)利用电子束蒸发镀膜系统,真空度低于9.0×10-4Pa,在PDMS基片表面沉积贵金属膜层,得到一种表面等离子体性能可调的新型基底,并对制作后的基底进行拉伸:将制作后的贵金属PDMS基底平整的放置于一维平移拉伸夹中,基底一端固定,另一端夹在可移动平台上,沿着移动平台移动方向在PDMS弹性范围内拉伸一定的长度,见图2(c);(c) Using the electron beam evaporation coating system, the vacuum degree is lower than 9.0×10 -4 Pa, depositing a noble metal film layer on the surface of the PDMS substrate to obtain a new type of substrate with adjustable surface plasmon properties, and the prepared substrate Stretching: Place the fabricated noble metal PDMS substrate flatly in a one-dimensional translation stretching clamp, one end of the substrate is fixed, the other end is clamped on the movable platform, and stretched within the elastic range of PDMS along the moving direction of the mobile platform to a certain extent length, see Figure 2(c);

(d)得到拉伸后的基底,见图2(d),并对拉伸后的基底进行检测:检测拉伸后基底的吸收光谱图。(d) Obtain the stretched substrate, see FIG. 2(d), and detect the stretched substrate: detect the absorption spectrum of the stretched substrate.

本实例具体描述了发明的表面等离子体性能可控的基底,包括一个PDMS基片和贵金属膜层。This example specifically describes the inventive substrate with controllable surface plasmon properties, including a PDMS substrate and a noble metal film layer.

本实例中,贵金属膜层位于PDMS基片上表面。In this example, the noble metal film layer is located on the upper surface of the PDMS substrate.

本实例中,贵金属膜层材料为银薄膜。In this example, the material of the noble metal film layer is silver thin film.

本实例中,银薄膜的厚度为8nm。In this example, the thickness of the silver thin film is 8nm.

实施例2:Example 2:

本实例是在实施例1的基础上,检测表面等离子体性能可控的基底的吸收特性,即贵金属PDMS基底拉伸前后的吸收光谱图。In this example, on the basis of Example 1, the absorption characteristics of the substrate with controllable surface plasmon properties are detected, that is, the absorption spectra of the noble metal PDMS substrate before and after stretching.

如图3所示,本实例所得到的本发明的基底拉伸前后的吸收曲线图,其中图中a表示拉伸前基底的吸收曲线;图中b表示拉伸后基底的吸收曲线。对比a与b的吸收曲线,拉伸基底一定长度后,会对Ag颗粒的形状和大小产生影响,从而导致了吸收峰的蓝移,同时吸收强度减弱。说明了所制备的贵金属PDMS基底具有很好的谐调作用,能够满足本发明表面等离子体性能可控基底的要求。As shown in Figure 3, the absorption curves of the substrate of the present invention before and after stretching obtained in this example, wherein a in the figure represents the absorption curve of the substrate before stretching; b in the figure represents the absorption curve of the substrate after stretching. Comparing the absorption curves of a and b, after stretching the substrate for a certain length, the shape and size of the Ag particles will be affected, resulting in a blue shift of the absorption peak and a weakening of the absorption intensity. It shows that the prepared noble metal PDMS substrate has a good tuning effect and can meet the requirements of the substrate with controllable surface plasmon properties of the present invention.

以上实施例仅为本发明构思下的基本说明,不对本发明进行限制。依据本发明的技术方案所作的任何等效变换均属于本发明保护范围。The above embodiments are only basic descriptions of the concept of the present invention, and do not limit the present invention. Any equivalent transformation made according to the technical solution of the present invention belongs to the protection scope of the present invention.

Claims (3)

1.一种表面等离子体性能可调的基底,包括一个PDMS基片,所述的PDMS基片上转移有AAO模板的纳米柱阵列结构,其特征在于:具有纳米柱阵列结构的PDMS基片上沉积有贵金属膜层。1. A substrate with adjustable surface plasmon properties, comprising a PDMS substrate, on the described PDMS substrate, a nanocolumn array structure with an AAO template is transferred, characterized in that: the PDMS substrate with the nanocolumn array structure is deposited with Precious metal film layer. 2.根据权利要求1所述的表面等离子体性能可调的基底,其特征在于:所述贵金属膜层的材料为Ag或Au或Pt。2. The substrate with adjustable surface plasmon properties according to claim 1, characterized in that: the material of the noble metal film layer is Ag or Au or Pt. 3.一种权利要求1或2所述的表面等离子体性能可调的基底的制备方法,其特征在于,具体步骤如下:3. A method for preparing a substrate with adjustable surface plasmon properties according to claim 1 or 2, wherein the specific steps are as follows: 1)将AAO模板上的结构转移到PDMS基片上,使PDMS基片表面具有纳米柱阵列结构;1) Transfer the structure on the AAO template to the PDMS substrate, so that the surface of the PDMS substrate has a nanopillar array structure; 2)在制作后的PDMS基片上沉积贵金属膜层,得到一种表面等离子体性能可调的基底;2) Deposit a noble metal film layer on the fabricated PDMS substrate to obtain a substrate with adjustable surface plasmon properties; 3)对制作后的表面等离子体性能可调的基底进行拉伸:将制作后的贵金属PDMS基底平整的放置于一维平移拉伸夹中,基底一端固定,另一端夹在可移动平台上,使制作后的贵金属PDMS基底沿着移动平台移动方向在PDMS弹性范围内拉伸一定的长度;3) Stretch the manufactured substrate with adjustable surface plasmon properties: place the fabricated noble metal PDMS substrate flatly in a one-dimensional translation stretching clamp, one end of the substrate is fixed, and the other end is clamped on a movable platform. Stretch the fabricated noble metal PDMS substrate for a certain length within the elastic range of PDMS along the moving direction of the mobile platform; 4)对拉伸后的基底进行检测:检测拉伸后基底的吸收光谱,拉伸基底可实现对表面等离子体性能调控。4) Detect the stretched substrate: detect the absorption spectrum of the stretched substrate, stretching the substrate can realize the regulation of surface plasmon properties.
CN201711043664.6A 2017-10-31 2017-10-31 The adjustable substrate of surface plasma performance and preparation method Pending CN107703105A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711043664.6A CN107703105A (en) 2017-10-31 2017-10-31 The adjustable substrate of surface plasma performance and preparation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711043664.6A CN107703105A (en) 2017-10-31 2017-10-31 The adjustable substrate of surface plasma performance and preparation method

Publications (1)

Publication Number Publication Date
CN107703105A true CN107703105A (en) 2018-02-16

Family

ID=61177182

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711043664.6A Pending CN107703105A (en) 2017-10-31 2017-10-31 The adjustable substrate of surface plasma performance and preparation method

Country Status (1)

Country Link
CN (1) CN107703105A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109270046A (en) * 2018-08-30 2019-01-25 东南大学 A kind of construction method of the controllable micro-nano array based on gold and silver nano brick and its application

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150177139A1 (en) * 2013-12-19 2015-06-25 Sk Innovation Co., Ltd. Sensor including flexible nanostructure and method for fabricating the same
CN104878427A (en) * 2015-06-16 2015-09-02 华中科技大学 Method for preparing flexible transparent surface-enhanced Raman scattering substrate through nano-imprinting
WO2017015063A1 (en) * 2015-07-23 2017-01-26 The Regents Of The University Of California Plasmonic micropillar array with embedded nanoparticles for large area cell force sensing
CN106558621A (en) * 2016-10-12 2017-04-05 华中科技大学 A kind of device at continuously adjustable plasmon resonance peak
CN106918850A (en) * 2017-03-09 2017-07-04 中国科学院半导体研究所 A kind of flexible super surface texture

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150177139A1 (en) * 2013-12-19 2015-06-25 Sk Innovation Co., Ltd. Sensor including flexible nanostructure and method for fabricating the same
CN104878427A (en) * 2015-06-16 2015-09-02 华中科技大学 Method for preparing flexible transparent surface-enhanced Raman scattering substrate through nano-imprinting
WO2017015063A1 (en) * 2015-07-23 2017-01-26 The Regents Of The University Of California Plasmonic micropillar array with embedded nanoparticles for large area cell force sensing
CN106558621A (en) * 2016-10-12 2017-04-05 华中科技大学 A kind of device at continuously adjustable plasmon resonance peak
CN106918850A (en) * 2017-03-09 2017-07-04 中国科学院半导体研究所 A kind of flexible super surface texture

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MEHMET KAHRAMAN ET AL.: "Fabrication and Characterization of Flexible and Tunable Plasmonic Nanostructures", 《SCIENCE REPORTS》 *
UGO CATALDI ET AL.: "Growing gold nanoparticles on a flexible substrate to enable simple mechanical control of their plasmonic coupling", 《JOURNAL OF MATERIALS CHEMISTRY C》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109270046A (en) * 2018-08-30 2019-01-25 东南大学 A kind of construction method of the controllable micro-nano array based on gold and silver nano brick and its application

Similar Documents

Publication Publication Date Title
US11203523B2 (en) Bionic SERS substrate with metal-based compound eye bowl structure and its construction method and application
CN105951049B (en) A kind of metallic particles manufacture method with nanoscale gap
CN106435472B (en) A kind of preparation method of Golden Triangle nano-grain array and the compound nested structure of vanadium dioxide film
CN106567119A (en) Polymer based nanometer cone structure SERS substrate and preparation method
CN103361601B (en) A kind of method making surface enhanced Raman scattering substrate
CN107275421A (en) A kind of quantum dot light electric explorer and preparation method thereof
CN106404738B (en) A kind of graphene oxide/silver nanoparticles/pyramidal silicon three-dimensional Raman enhanced substrate and its preparation method and application
CN104656170A (en) Broadband light full absorber and preparation method thereof
Wang et al. Large-scale bio-inspired flexible antireflective film with scale-insensitivity arrays
CN106929807A (en) The preparation method of the polyacrylonitrile nano post array film SERS substrates of Nano silver piece modification
CN101983914B (en) Method for preparing micro number density or size gradient metal nano-particle lattice
CN104764732A (en) Surface-enhanced raman scattering base on basis of special-material superabsorbers and preparation method thereof
CN110618478B (en) Fano resonance structure based on single metal silver nanoparticle-metal silver film and preparation method thereof
CN102787445A (en) Method of preparing porous graphene film by using electrostatic spray process
CN112795870A (en) A kind of preparation method and application of nano-chain structure array
CN107860760A (en) Graphene oxide/silver nano-grain/pyramid PMMA three-dimension flexibles Raman enhancing substrate and preparation method and application
Cheng et al. Preparation and structural investigation of ultra-uniform Mo films on a Si/SiO2 wafer by the direct-current magnetron sputtering method
Chao et al. Anti-reflection textured structures by wet etching and island lithography for surface-enhanced Raman spectroscopy
CN106918853A (en) A kind of flexible wide-angle wide range efficient absorption body and preparation method
CN104616833A (en) Method for preparing silver nanowire transparent electrodes at large scale and silver nanowire transparent electrode
CN107703105A (en) The adjustable substrate of surface plasma performance and preparation method
CN102001621A (en) Preparation method of silver nanoparticle lattice with wide plasmon resonant frequency regulation range
CN107101967A (en) A kind of application ITO nano materials as infrared spectrum sum of fundamental frequencies area surface enhanced substrate method
CN116031326A (en) A kind of ordered lattice of non-close-packed noble metal nanoparticles and its preparation method
CN110923627B (en) Photo-controlled hydrophilicity-hydrophobicity conversion composite material, preparation method and application thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20180216

WD01 Invention patent application deemed withdrawn after publication