CN107543661A - The adjustable vacuum leak hunting automated system of sensitivity - Google Patents
The adjustable vacuum leak hunting automated system of sensitivity Download PDFInfo
- Publication number
- CN107543661A CN107543661A CN201610586739.4A CN201610586739A CN107543661A CN 107543661 A CN107543661 A CN 107543661A CN 201610586739 A CN201610586739 A CN 201610586739A CN 107543661 A CN107543661 A CN 107543661A
- Authority
- CN
- China
- Prior art keywords
- leak
- valve
- vacuum
- mass spectrometer
- helium mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000035945 sensitivity Effects 0.000 title claims abstract description 15
- 238000001514 detection method Methods 0.000 claims abstract description 37
- 239000001307 helium Substances 0.000 claims abstract description 36
- 229910052734 helium Inorganic materials 0.000 claims abstract description 36
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000005259 measurement Methods 0.000 claims abstract description 8
- 238000012545 processing Methods 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims 1
- 238000001819 mass spectrum Methods 0.000 claims 1
- 238000012360 testing method Methods 0.000 abstract description 7
- 238000007599 discharging Methods 0.000 description 3
- 239000000700 radioactive tracer Substances 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
本发明公开了一种灵敏度可调的真空检漏自动化系统，主要包括真空获得和测量单元以及检漏单元；所述真空获得与测量单元包括真空室、分子泵、螺杆泵、真空计、气动插板阀、可控蝶阀、电磁阀和过滤器；所述检漏单元包括氦质谱检漏仪、标准漏孔、充放气设备和计算机控制系统，计算机控制系统通过PLC程序对分子泵、螺杆泵、氦质谱检漏仪以及各阀门进行控制。本发明通过计算机控制系统，提高了试验仪器操作的便捷性和准确率，试验数据处理能力有效提升，节省了试验时间和经费。
The invention discloses a vacuum leak detection automation system with adjustable sensitivity, which mainly includes a vacuum acquisition and measurement unit and a leak detection unit; the vacuum acquisition and measurement unit includes a vacuum chamber, a molecular pump, a screw pump, a vacuum gauge, a pneumatic insert plate valve, controllable butterfly valve, electromagnetic valve and filter; the leak detection unit includes helium mass spectrometer leak detector, standard leak hole, filling and deflation equipment and computer control system, and the computer control system controls molecular pump and screw pump through PLC program , helium mass spectrometer leak detector and various valves are controlled. The invention improves the convenience and accuracy of the test instrument operation through the computer control system, effectively improves the test data processing ability, and saves test time and expenses.
Description
技术领域technical field
本发明真空检漏技术领域，具体而言，本发明涉及一种灵敏度可调的真空检漏自动化系统，该系统采用可控蝶阀调节检漏系统流量，电磁阀控制标准漏孔开闭，自动控制氦质谱检漏仪，实现灵敏度可调节。The technical field of vacuum leak detection of the present invention, specifically, the present invention relates to a vacuum leak detection automation system with adjustable sensitivity. Helium mass spectrometer leak detector with adjustable sensitivity.
背景技术Background technique
目前，一般真空检漏系统主要包括真空室、高真空分子泵、辅助泵、真空计、截止阀、标准漏孔和检漏仪等。首先对真空室抽真空，达到检漏要求的真空度时打开截止阀，使真空室与正常工作的检漏仪连接，在检漏仪稳定后记录系统本底值，然后打开标准漏孔，待检漏仪示值稳定，记录反应值，关闭标准漏孔等待检漏仪回到本底初值，对被检件充入工作压力的氦气，记录检漏仪的反应值，从而达到真空检漏目的。At present, the general vacuum leak detection system mainly includes a vacuum chamber, a high vacuum molecular pump, an auxiliary pump, a vacuum gauge, a stop valve, a standard leak hole, and a leak detector. First evacuate the vacuum chamber, and when the vacuum required for leak detection is reached, open the stop valve to connect the vacuum chamber to a leak detector that is working normally. After the leak detector is stable, record the background value of the system, then open the standard leak hole, and wait The indication value of the leak detector is stable, record the reaction value, close the standard leak and wait for the leak detector to return to the initial value of the background, fill the tested part with helium gas under the working pressure, and record the reaction value of the leak detector, so as to achieve vacuum detection. Miss purpose.
系统灵敏度是指被检产品与检漏系统连接后，检漏仪和检漏系统在具体的工作条件下，纯示漏气体通过漏孔时检漏仪所能检出的最小漏率。System sensitivity refers to the minimum leak rate that the leak detector can detect when the leak detector and the leak detector system are connected to the leak detection system under specific working conditions when pure leak-indicating gas passes through the leak hole.
目前，真空检漏系统的灵敏度基本是一个固定值。根据国外相关资料及国内经验，卫星推进系统的总漏率的真实值通常在10-6Pa·m3/s～10-7Pa·m3/s的量级。由于不同产品的漏率要求不同，因此对于允许漏率较小的产品，普通的真空检漏系统无法进行检漏。At present, the sensitivity of the vacuum leak detection system is basically a fixed value. According to foreign relevant data and domestic experience, the real value of the total leakage rate of satellite propulsion system is usually in the order of 10 -6 Pa·m 3 /s～10 -7 Pa·m 3 /s. Due to the different leak rate requirements of different products, ordinary vacuum leak detection systems cannot detect leaks for products with a small allowable leak rate.
因此，有必要研制一种灵敏度可调的真空检漏自动化系统。Therefore, it is necessary to develop a vacuum leak detection automation system with adjustable sensitivity.
发明内容Contents of the invention
本发明的目的在于提供一种灵敏度可调的真空检漏自动化系统，该系统采用可控蝶阀调节检漏系统流量，电磁阀控制标准漏孔开闭，自动控制氦质谱检漏仪，从而实现检漏灵敏度可调节的真空检漏自动化系统。The purpose of the present invention is to provide a vacuum leak detection automation system with adjustable sensitivity. The system adopts a controllable butterfly valve to adjust the flow rate of the leak detection system, a solenoid valve to control the opening and closing of the standard leak hole, and automatically controls the helium mass spectrometer leak detector to realize the leak detection. Automatic vacuum leak detection system with adjustable leak sensitivity.
为了实现上述目的，本发明采用了如下的技术解决方案：In order to achieve the above object, the present invention adopts the following technical solutions:
灵敏度可调的真空检漏自动化系统，主要包括真空获得和测量单元以及检漏单元；所述真空获得与测量单元包括真空室、分子泵、螺杆泵、真空计、气动插板阀、可控蝶阀、电磁阀和过滤器；所述检漏单元包括氦质谱检漏仪、标准漏孔、充放气设备和计算机控制系统，其中，分子泵一端通过气动插板阀一连接在真空室上，分子泵另一端分别通过电磁阀一和可控蝶阀与氦质谱检漏仪、螺杆泵管路连通，螺杆泵与可控蝶阀管路又分别通过气动插板阀二和电磁阀二与真空室、过滤器一连通；真空室上还分别设置有真空计、通过电磁阀三连通的过滤器二以及通过电磁阀四连接的标准漏孔，真空室还连接有充放气设备，对待测样品进行充放气，计算机控制系统通过PLC程序对分子泵、螺杆泵、氦质谱检漏仪以及各阀门进行控制。The vacuum leak detection automation system with adjustable sensitivity mainly includes a vacuum acquisition and measurement unit and a leak detection unit; the vacuum acquisition and measurement unit includes a vacuum chamber, a molecular pump, a screw pump, a vacuum gauge, a pneumatic flapper valve, and a controllable butterfly valve , an electromagnetic valve and a filter; the leak detection unit includes a helium mass spectrometer leak detector, a standard leak hole, an inflation and deflation device, and a computer control system, wherein one end of the molecular pump is connected to the vacuum chamber through a pneumatic flapper valve, and the molecular The other end of the pump is connected to the helium mass spectrometer leak detector and the pipeline of the screw pump through the solenoid valve 1 and the controllable butterfly valve respectively. The vacuum chamber is also equipped with a vacuum gauge, a filter two connected through the solenoid valve three, and a standard leak hole connected through the solenoid valve four. The vacuum chamber is also connected with a charging and discharging device for charging and discharging the sample Gas, the computer control system controls the molecular pump, screw pump, helium mass spectrometer leak detector and various valves through the PLC program.
进一步地，所述可控蝶阀通过设置阀门开度来控制阀门的流量。Further, the controllable butterfly valve controls the flow rate of the valve by setting the opening degree of the valve.
进一步地，所述计算机控制系统用于向真空泵、各阀门、氦质谱检漏仪发出控制信号，并且处理真空泵、各阀门、氦质谱检漏仪传入的数据信号，再将控制、测量结果呈现出来。Further, the computer control system is used to send control signals to the vacuum pump, each valve, and helium mass spectrometer leak detector, and process the data signals from the vacuum pump, each valve, and helium mass spectrometer leak detector, and then present the control and measurement results come out.
进一步地，螺杆泵与气动插板阀二的管路上还设置有真空计。Further, a vacuum gauge is also provided on the pipeline between the screw pump and the second pneumatic flapper valve.
进一步地，电磁阀四与标准漏孔之间的管路上还设置有备用电磁阀五，用于平衡标准漏孔压力。Further, a backup solenoid valve five is also arranged on the pipeline between the solenoid valve four and the standard leak hole, which is used to balance the pressure of the standard leak hole.
灵敏度可调的真空检漏自动化方法，包括以下步骤：An automatic method for vacuum leak detection with adjustable sensitivity, comprising the following steps:
1)将待检漏产品设置在真空室内，连接好充放气设备，对真空室抽气；1) Set the product to be leak detected in the vacuum chamber, connect the inflation and deflation equipment, and pump air into the vacuum chamber;
2)达到检漏要求真空度后，启动氦质谱检漏仪，氦质谱检漏仪正常工作后，连入检漏系统；2) After reaching the required vacuum degree for leak detection, start the helium mass spectrometer leak detector, and connect it to the leak detection system after the helium mass spectrometer leak detector works normally;
3)通过可控蝶阀调节进入螺杆泵气体量，从而改变进入氦质谱检漏仪的气体量，改变氦质谱检漏仪的本底噪声；3) Adjust the amount of gas entering the screw pump through the controllable butterfly valve, thereby changing the amount of gas entering the helium mass spectrometer leak detector and changing the background noise of the helium mass spectrometer leak detector;
4)通过计算机控制系统标定标准漏孔，记录相关数据，标定完毕后恢复至系统本底后，对待检漏产品充入要求压力的示踪气体，记录检漏仪数据并将结果反馈给计算机控制系统，再经计算机控制系统处理后，得出待检漏产品的参数。4) Calibrate the standard leak hole through the computer control system, record the relevant data, after the calibration is completed and return to the system background, fill the tracer gas with the required pressure into the leak detection product, record the data of the leak detector and feed back the results to the computer control system, and then processed by the computer control system, the parameters of the product to be leaked are obtained.
本发明的优点在于，能够在一套真空检漏系统中可以实现检漏系统灵敏度自由调节，从而实现对不同漏率要求的产品的真空检漏，提高了单台试验设备的使用率。同时，通过计算机控制系统，提高了试验仪器操作的便捷性和准确率，试验数据处理能力有效提升，节省了试验时间和经费。The invention has the advantage that the sensitivity of the leak detection system can be freely adjusted in a set of vacuum leak detection system, thereby realizing vacuum leak detection for products with different leak rate requirements, and improving the utilization rate of a single test equipment. At the same time, through the computer control system, the convenience and accuracy of the test instrument operation are improved, the test data processing ability is effectively improved, and the test time and funds are saved.
附图说明Description of drawings
图1为本发明的灵敏度可调的真空检漏自动化系统的示意图。Fig. 1 is a schematic diagram of the vacuum leak detection automation system with adjustable sensitivity of the present invention.
具体实施方式detailed description
以下结合附图对本发明的实施方式作进一步地说明。Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
参照图1，本发明的整套系统主要包括真空获得和测量单元以及检漏单元；所述真空获得与测量单元包括真空室7、分子泵9、螺杆泵13、真空计6、气动插板阀8，17、可控蝶阀10、电磁阀和过滤器；所述检漏单元包括氦质谱检漏仪12、标准漏孔3、充放气设备18和计算机控制系统20，其中，分子泵9一端通过气动插板阀一18连接在真空室7上，分子泵9另一端分别通过电磁阀一11和可控蝶阀10与氦质谱检漏仪12、螺杆泵13管路连通，螺杆泵13与可控蝶阀10管路又分别通过气动插板阀二7和电磁阀二15与真空室7、过滤器一14连通，螺杆泵与气动插板阀二的管路上还设置有真空计；所述可控蝶阀通过设置阀门开度来控制阀门的流量，真空室上还分别设置有真空计6、通过电磁阀三5连通的过滤器二4以及通过电磁阀四2连接的标准漏孔3，真空室7还连接有充放气设备18，对待测样品19进行充放气，计算机控制系统20通过PLC程序对分子泵9、螺杆泵13、氦质谱检漏仪12以及各阀门进行控制，具体地，计算机控制系统用于向真空泵、各阀门、氦质谱检漏仪发出控制信号，并且处理真空泵、各阀门、氦质谱检漏仪传入的数据信号，再将控制、测量结果呈现出来。Referring to Fig. 1, the complete system of the present invention mainly includes a vacuum acquisition and measurement unit and a leak detection unit; , 17, controllable butterfly valve 10, electromagnetic valve and filter; Described leak detection unit comprises helium mass spectrometer leak detector 12, standard leak hole 3, filling and deflation equipment 18 and computer control system 20, wherein, molecular pump 9 one ends pass through The pneumatic flapper valve 18 is connected to the vacuum chamber 7, and the other end of the molecular pump 9 is connected to the helium mass spectrometer leak detector 12 and the screw pump 13 through the solenoid valve 11 and the controllable butterfly valve 10 respectively, and the screw pump 13 is connected to the controllable The pipeline of butterfly valve 10 is communicated with vacuum chamber 7 and filter one 14 through pneumatic gate valve two 7 and electromagnetic valve two 15 respectively, and a vacuum gauge is also arranged on the pipeline of screw pump and pneumatic gate valve two; The butterfly valve controls the flow rate of the valve by setting the valve opening. The vacuum chamber is also equipped with a vacuum gauge 6, a filter 2 connected through the solenoid valve 3 5, a standard leak hole 3 connected through the solenoid valve 4 2, and a vacuum chamber 7 It is also connected with inflation and deflation equipment 18, and the sample 19 to be tested is charged and deflated. The computer control system 20 controls the molecular pump 9, the screw pump 13, the helium mass spectrometer leak detector 12 and each valve through the PLC program. Specifically, the computer The control system is used to send control signals to the vacuum pump, each valve, and helium mass spectrometer leak detector, and process the data signals from the vacuum pump, each valve, and helium mass spectrometer leak detector, and then present the control and measurement results.
在一具体的实施方式中，电磁阀四与标准漏孔之间的管路上还设置有备用电磁阀五，用于平衡标准漏孔压力。In a specific embodiment, a backup solenoid valve five is also arranged on the pipeline between the solenoid valve four and the standard leak hole, for balancing the pressure of the standard leak hole.
使用本发明的系统进行真空检漏的方法如下：第一步，将产品安装在真空室，连接好充放气设备及管路，关闭真空室大门；第二步，启动螺杆泵，开启气动插板阀17，对真空室抽气，通过真空计6监测真空室真空度；第三步，当真空度达到10Pa时，关闭气动插板阀17，开启可控蝶阀和气动插板阀8，启动分子泵；第四步，真空室达到检漏要求真空度5×10-3Pa后，启动氦质谱检漏仪，氦质谱检漏仪正常工作后，开启电磁阀11，使氦质谱检漏仪连入检漏系统；第五步，通过计算机控制系统调节可控蝶阀阀门开度，控制进入螺杆泵气体量，从而改变进入氦质谱检漏仪的气体量，改变氦质谱检漏仪的本底噪声值，如5×10-9Pa·m3/s；第六步，通过计算机控制系统打开标准漏孔，对真空检漏系统进行标定，记录标准漏孔标称值和氦质谱检漏仪的变化值，得出系统检漏灵敏度；第七步，标准漏孔标定完毕后氦质谱检漏仪恢复至系统本底5×10-9Pa·m3/s后，通过充放气设备对产品充入要求压力的示踪气体(高纯氦气)，记录三分钟内检漏仪数据变化值并将结果反馈给计算机控制系统；第八步，经计算机控制系统计算处理后，得出产品的漏率值，该值小于等于允许漏率值则产品漏率合格，该值大于允许漏率值则产品漏率不合格。The method of vacuum leak detection using the system of the present invention is as follows: first step, install the product in the vacuum chamber, connect the inflation and deflation equipment and pipelines, and close the door of the vacuum chamber; second step, start the screw pump, open the pneumatic plug The plate valve 17 pumps air to the vacuum chamber, and monitors the vacuum degree of the vacuum chamber through the vacuum gauge 6; in the third step, when the vacuum degree reaches 10Pa, close the pneumatic flapper valve 17, open the controllable butterfly valve and the pneumatic flapper valve 8, and start Molecular pump; in the fourth step, after the vacuum chamber reaches the required vacuum degree of 5×10-3Pa, start the helium mass spectrometer leak detector. After the helium mass spectrometer leak detector works normally, open the solenoid valve 11 to make the helium mass spectrometer leak detector continuously The fifth step is to adjust the opening of the controllable butterfly valve through the computer control system to control the amount of gas entering the screw pump, thereby changing the amount of gas entering the helium mass spectrometer leak detector and changing the background noise of the helium mass spectrometer leak detector value, such as 5×10 -9 Pa·m 3 /s; the sixth step is to open the standard leak through the computer control system, calibrate the vacuum leak detection system, and record the nominal value of the standard leak and the helium mass spectrometer leak detector. change value to obtain the system leak detection sensitivity; the seventh step, after the calibration of the standard leak is completed, the helium mass spectrometer leak detector returns to the system background of 5×10 -9 Pa·m 3 /s, and the product is tested by the charging and discharging equipment. Fill the tracer gas (high-purity helium) with the required pressure, record the change value of the leak detector data within three minutes and feed back the result to the computer control system; the eighth step, after calculation and processing by the computer control system, the product’s Leak rate value, if the value is less than or equal to the allowable leak rate value, the product leak rate is qualified, and if the value is greater than the allowable leak rate value, the product leak rate is unqualified.
尽管上文对本发明的具体实施方式进行了详细描述和说明，但是应该指明的是，本领域的技术人员可以依据本发明的精神对上述实施方式进行各种等效改变和修改，其所产生的功能作用在未超出说明书及附图所涵盖的精神时，均应在本发明的保护范围之内。Although the specific embodiments of the present invention have been described and illustrated in detail above, it should be noted that those skilled in the art can make various equivalent changes and modifications to the above embodiments according to the spirit of the present invention, and the resulting When the functional effect does not exceed the spirit covered by the specification and drawings, it shall be within the protection scope of the present invention.
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610586739.4A CN107543661B (en) | 2016-07-22 | 2016-07-22 | The adjustable vacuum leak hunting automated system of sensitivity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610586739.4A CN107543661B (en) | 2016-07-22 | 2016-07-22 | The adjustable vacuum leak hunting automated system of sensitivity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107543661A true CN107543661A (en) | 2018-01-05 |
| CN107543661B CN107543661B (en) | 2019-11-26 |
Family
ID=60966717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610586739.4A Active CN107543661B (en) | 2016-07-22 | 2016-07-22 | The adjustable vacuum leak hunting automated system of sensitivity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107543661B (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109297640A (en) * | 2018-09-18 | 2019-02-01 | 西安先为电器科技有限责任公司 | A kind of device and method improving vacuum ionization halogen gas detector accuracy |
| CN109323811A (en) * | 2017-07-31 | 2019-02-12 | 深圳市远望工业自动化设备有限公司 | Mass spectrum leak detection equipment with vacuum cavity |
| CN109357819A (en) * | 2018-12-19 | 2019-02-19 | 国联汽车动力电池研究院有限责任公司 | A device and method for testing the sealing performance of a battery system box |
| CN109655212A (en) * | 2018-12-17 | 2019-04-19 | 兰州空间技术物理研究所 | A kind of extruding metal sealing device for detecting leak rate and method |
| CN109765004A (en) * | 2019-01-21 | 2019-05-17 | 辽宁工程技术大学 | A Gas Sealing Performance Simulation Comprehensive Detection System |
| US20190187021A1 (en) * | 2017-12-20 | 2019-06-20 | Miasolé Equipment Integration (Fujian) Co., Ltd. | Airtightness detection equipment |
| CN111739663A (en) * | 2020-07-27 | 2020-10-02 | 核工业西南物理研究院 | A vacuum helium leak detection tool and method suitable for nuclear fusion reaction device |
| CN112857695A (en) * | 2021-01-15 | 2021-05-28 | 合肥工业大学 | Laser gyro stable inflation and high-precision leak detection system |
| CN113029460A (en) * | 2021-02-03 | 2021-06-25 | 武汉英飞光创科技有限公司 | Leak detection method for optical device |
| CN114411110A (en) * | 2022-01-24 | 2022-04-29 | 苏州中科科仪技术发展有限公司 | Coating apparatus and control method of coating apparatus |
| CN114918431A (en) * | 2022-05-19 | 2022-08-19 | 西安增材制造国家研究院有限公司 | Vacuum environment control method, system, equipment and medium for EBSM equipment forming chamber |
| CN115712273A (en) * | 2022-12-09 | 2023-02-24 | 成都中科唯实仪器有限责任公司 | Control system for helium leakage detection of conductor assembly |
| CN116399520A (en) * | 2023-02-28 | 2023-07-07 | 宣城开盛新能源科技有限公司 | Vacuum chamber product leakage detection device and leakage detection method thereof |
| CN118010261A (en) * | 2023-12-27 | 2024-05-10 | 北京中科科仪股份有限公司 | A helium mass spectrometer leak detector and a helium spray leak detection method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4499752A (en) * | 1983-06-22 | 1985-02-19 | Varian Associates, Inc. | Counterflow leak detector with cold trap |
| CN103091052A (en) * | 2011-11-04 | 2013-05-08 | 北京卫星环境工程研究所 | Normal temperature vacuum leak-detection system used for spacecraft part assembly |
| CN104006929A (en) * | 2014-06-10 | 2014-08-27 | 北京卫星环境工程研究所 | Mass spectrometry single point leak detection system and method based on voltage limiting-shunting method in atmospheric environment |
| CN105651464A (en) * | 2016-03-03 | 2016-06-08 | 北京卫星环境工程研究所 | Leakage detection sensitivity post-calibration method for large spacecraft leakage detection |
-
2016
- 2016-07-22 CN CN201610586739.4A patent/CN107543661B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4499752A (en) * | 1983-06-22 | 1985-02-19 | Varian Associates, Inc. | Counterflow leak detector with cold trap |
| CN103091052A (en) * | 2011-11-04 | 2013-05-08 | 北京卫星环境工程研究所 | Normal temperature vacuum leak-detection system used for spacecraft part assembly |
| CN104006929A (en) * | 2014-06-10 | 2014-08-27 | 北京卫星环境工程研究所 | Mass spectrometry single point leak detection system and method based on voltage limiting-shunting method in atmospheric environment |
| CN105651464A (en) * | 2016-03-03 | 2016-06-08 | 北京卫星环境工程研究所 | Leakage detection sensitivity post-calibration method for large spacecraft leakage detection |
Non-Patent Citations (2)
| Title |
|---|
| 姜永明: "大型空间环境模拟试验设备的检漏", 《真空与低温》 * |
| 张伟等: "真空设备的检漏", 《新技术新产品》 * |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109323811A (en) * | 2017-07-31 | 2019-02-12 | 深圳市远望工业自动化设备有限公司 | Mass spectrum leak detection equipment with vacuum cavity |
| US20190187021A1 (en) * | 2017-12-20 | 2019-06-20 | Miasolé Equipment Integration (Fujian) Co., Ltd. | Airtightness detection equipment |
| CN109297640A (en) * | 2018-09-18 | 2019-02-01 | 西安先为电器科技有限责任公司 | A kind of device and method improving vacuum ionization halogen gas detector accuracy |
| CN109655212B (en) * | 2018-12-17 | 2021-06-04 | 兰州空间技术物理研究所 | A metal extrusion seal leak rate detection device and method |
| CN109655212A (en) * | 2018-12-17 | 2019-04-19 | 兰州空间技术物理研究所 | A kind of extruding metal sealing device for detecting leak rate and method |
| CN109357819A (en) * | 2018-12-19 | 2019-02-19 | 国联汽车动力电池研究院有限责任公司 | A device and method for testing the sealing performance of a battery system box |
| CN109765004A (en) * | 2019-01-21 | 2019-05-17 | 辽宁工程技术大学 | A Gas Sealing Performance Simulation Comprehensive Detection System |
| CN111739663A (en) * | 2020-07-27 | 2020-10-02 | 核工业西南物理研究院 | A vacuum helium leak detection tool and method suitable for nuclear fusion reaction device |
| CN112857695A (en) * | 2021-01-15 | 2021-05-28 | 合肥工业大学 | Laser gyro stable inflation and high-precision leak detection system |
| CN113029460A (en) * | 2021-02-03 | 2021-06-25 | 武汉英飞光创科技有限公司 | Leak detection method for optical device |
| CN113029460B (en) * | 2021-02-03 | 2021-12-31 | 武汉英飞光创科技有限公司 | Leak detection method for optical device |
| CN114411110A (en) * | 2022-01-24 | 2022-04-29 | 苏州中科科仪技术发展有限公司 | Coating apparatus and control method of coating apparatus |
| CN114411110B (en) * | 2022-01-24 | 2023-04-14 | 苏州中科科仪技术发展有限公司 | Coating apparatus and control method of coating apparatus |
| CN114918431A (en) * | 2022-05-19 | 2022-08-19 | 西安增材制造国家研究院有限公司 | Vacuum environment control method, system, equipment and medium for EBSM equipment forming chamber |
| CN115712273A (en) * | 2022-12-09 | 2023-02-24 | 成都中科唯实仪器有限责任公司 | Control system for helium leakage detection of conductor assembly |
| CN116399520A (en) * | 2023-02-28 | 2023-07-07 | 宣城开盛新能源科技有限公司 | Vacuum chamber product leakage detection device and leakage detection method thereof |
| CN116399520B (en) * | 2023-02-28 | 2025-09-26 | 宣城开盛新能源科技有限公司 | A vacuum chamber product leak detection device and leak detection method |
| CN118010261A (en) * | 2023-12-27 | 2024-05-10 | 北京中科科仪股份有限公司 | A helium mass spectrometer leak detector and a helium spray leak detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107543661B (en) | 2019-11-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107543661B (en) | The adjustable vacuum leak hunting automated system of sensitivity | |
| CN103365306B (en) | A kind of high-speed wind tunnel special test compressed air require adjusting means and method | |
| CN204177537U (en) | A kind of container helium mass spectrum leak detection device | |
| US9429493B2 (en) | Manifold assembly for a portable leak tester | |
| KR20180091901A (en) | Leakage test apparatus and method | |
| CN208858547U (en) | An air compressor performance test system | |
| CN113340527B (en) | Differential pressure transmitter verification system | |
| CN205157139U (en) | Leak rate detection device of malleation standard leak | |
| CN106679895B (en) | Automatic leak rate testing system applied to large-scale space environment simulator | |
| CN103398830B (en) | A kind of grease chamber's sealing leak hunting method of load ratio bridging switch | |
| CN103837215A (en) | Reversing valve type pVTt-method gas flow device | |
| CN106556430A (en) | A kind of gas Actual flow test system and method with self-calibration function | |
| CN104198115A (en) | Calibration device for detecting vacuum gauges with relative errors of indicating values no less than 30% | |
| CN103900665A (en) | Container combination and reversing valve type pVTt-method gas flow device | |
| CN108088623B (en) | Vacuum chamber system leakage detection device and method for 3D printing equipment | |
| CN105758990B (en) | A kind of calibration system for being used for SF6 gas micro water content detectors in GIS | |
| CN207610829U (en) | Total pressure minute leakage precision measurement system | |
| CN104155070A (en) | Airtightness detecting device and method | |
| CN104502039A (en) | Gas tightness detecting method for fuel gas meter | |
| CN102749180B (en) | Stop valve leak rate online test method | |
| CN204142420U (en) | Vacuum and leak rate Multifunctional school standard apparatus | |
| CN110243444B (en) | Negative pressure source device, gas meter verification gas circuit system and verification method | |
| JP2007108102A (en) | Flow-rate-type performance inspection device and inspection method thereof | |
| CN209764338U (en) | Calibration equipment for a pressure vacuum gauge | |
| CN107796574A (en) | A kind of aircraft is airtight to check complex control system and its application method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |