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CN107416838A - The recyclable silicon material regeneration purifying technique of photovoltaic industry chain - Google Patents

The recyclable silicon material regeneration purifying technique of photovoltaic industry chain Download PDF

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CN107416838A
CN107416838A CN201710140109.9A CN201710140109A CN107416838A CN 107416838 A CN107416838 A CN 107416838A CN 201710140109 A CN201710140109 A CN 201710140109A CN 107416838 A CN107416838 A CN 107416838A
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silicon
silicon material
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CN107416838B (en
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高文秀
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Shanghai Deshijia Materials Co.,Ltd.
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YIXING YUYUAN ENERGY EQUIPMENT TECHNOLOGY DEVELOPMENT CO LTD
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    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • C01B33/037Purification
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    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/007Apparatus for preparing, pre-treating the source material to be used for crystal growth
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    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
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    • C01P2006/80Compositional purity

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Abstract

The invention discloses the recyclable silicon material regeneration purifying technique of photovoltaic industry chain, regeneration purification is carried out to the recyclable silicon material of photovoltaic industry chain, obtains the silicon material for meeting solar level standard, the technique includes:(1)Classification cleaning,(2)Melting cleans,(3)Vacuum, which is overflow, stays removal of impurities,(4)Product classification step.The technique has the characteristics of environmentally friendly, simple, energy-conservation, inexpensive, meets the output capacity > 70% of the silicon material of solar level standard, and purity of silicon is purified to more than 6N from 2 3N.

Description

光伏产业链可回收硅料再生提纯工艺Photovoltaic industry chain recyclable silicon material regeneration and purification process

技术领域technical field

本发明涉及光伏硅料回用技术领域,具体的,涉及光伏产业链可回收硅料再生提纯工艺。The invention relates to the technical field of photovoltaic silicon material recycling, and specifically relates to a regeneration and purification process of recyclable silicon material in the photovoltaic industry chain.

背景技术Background technique

据2016年国家能源局印发的《太阳能发展“十三五”规划》太阳能的发展目标:到2020年底,太阳能发电装机达到1.1亿千瓦以上,其中,光伏发电装机达到1.05亿千瓦以上,太阳能年利用量达到1.4亿吨标准煤以上。为达到“十三五”规划的发展目标,每年需要铸锭炉提纯和铸锭硅料或者拉单晶硅料达到100万吨以上,将产生大约30万吨左右的光伏产业链边皮和头尾回收硅料。如此数量之大的回收硅料,目前还没有查找到国内外文献报道有关技术可进行处理。部分企业为了降低成本,将部分回收硅料掺杂到高纯硅中进行铸锭,造成电池不稳定和衰减率高等缺陷,但是依然还有大量光伏产业链后的回收硅料无法处理。According to the "Thirteenth Five-Year Plan for Solar Energy Development" issued by the National Energy Administration in 2016, the development goal of solar energy: by the end of 2020, the installed capacity of solar power generation will reach more than 110 million kilowatts, of which the installed capacity of photovoltaic power generation will reach more than 105 million kilowatts, and the annual utilization of solar energy The volume reached more than 140 million tons of standard coal. In order to achieve the development goals of the "13th Five-Year Plan", more than 1 million tons of ingot furnace purification and ingot silicon material or single crystal silicon material must be pulled each year, which will generate about 300,000 tons of photovoltaic industry chain scrap and head Recycle silicon material at the end. Such a large amount of recycled silicon material has not yet found relevant technologies reported in domestic and foreign literature that can be processed. In order to reduce costs, some enterprises doped some recycled silicon materials into high-purity silicon for ingot casting, resulting in defects such as cell instability and high attenuation rate, but there are still a large number of recycled silicon materials in the photovoltaic industry chain that cannot be processed.

发明内容Contents of the invention

本发明的目的是为了解决上述问题,提供光伏产业链可回收硅料再生提纯工艺。The object of the present invention is to solve the above problems and provide a process for regeneration and purification of recyclable silicon materials in the photovoltaic industry chain.

本发明的目的通过以下技术方案来具体实现的:The purpose of the present invention is specifically achieved through the following technical solutions:

光伏产业链可回收硅料再生提纯工艺,对光伏产业链可回收硅料进行再生提纯,得到符合太阳能级标准的硅料,该工艺包括:(1)分类清洗,(2)熔炼除杂,(3)真空溢留除杂,(4)产品分类步骤。Photovoltaic industry chain recyclable silicon material regeneration and purification process, regenerate and purify recyclable silicon material in the photovoltaic industry chain, and obtain silicon material that meets solar-grade standards. The process includes: (1) classified cleaning, (2) smelting and removing impurities, ( 3) Vacuum overflow and impurity removal, (4) Product classification steps.

进一步的,具体包括如下步骤:Further, it specifically includes the following steps:

(1)分类清洗,具体方法如下:(1) Classified cleaning, the specific method is as follows:

分类:将回收的硅料按电阻率进行分类,分成电阻率<0.5Ω·cm、0.5~3Ω·cm和>3Ω·cm三类;Classification: Classify the recovered silicon material according to the resistivity, and divide it into three categories with resistivity <0.5Ω·cm, 0.5~3Ω·cm and >3Ω·cm;

表面机械处理:对分类后的硅料表面进行机械打磨和喷砂处理,去掉硅料表皮;Surface mechanical treatment: mechanically polish and sandblast the surface of the classified silicon material to remove the silicon material skin;

湿法清洗:采用溶液浸泡法处理硅料,所述溶液包括酸-H2O2水溶液、NH4OH-H2O2水溶液,H2SO4-H2O2水溶液可去除硅料表面的有机污染物和金属,NH4OH-H2O2水溶液可去除硅料表面的颗粒,根据硅料表面的污染情况单独使用或联合使用;Wet cleaning: use solution immersion method to treat silicon material, the solution includes acid-H 2 O 2 aqueous solution, NH 4 OH-H 2 O 2 aqueous solution, H 2 SO 4 -H 2 O 2 aqueous solution can remove silicon material surface Organic pollutants and metals, NH 4 OH-H 2 O 2 aqueous solution can remove particles on the surface of silicon materials, used alone or in combination according to the pollution of the surface of silicon materials;

纯水清洗:经过湿法清洗后的硅料用纯水通过超声波技术进行清洗,然后烘干;Pure water cleaning: the silicon material after wet cleaning is cleaned with pure water by ultrasonic technology, and then dried;

(2)熔炼除杂,具体方法如下:(2) Smelting and removing impurities, the specific method is as follows:

经过步骤(1)分类清洗的硅料放入熔炼坩埚中送入真空炉,炉内温度控制在1500~1700℃,硅料完全熔化后,控制液态硅温度在1500℃以上;The silicon material that has been sorted and cleaned in step (1) is put into a melting crucible and sent to a vacuum furnace. The temperature in the furnace is controlled at 1500~1700°C. After the silicon material is completely melted, the temperature of the liquid silicon is controlled above 1500°C;

启动吹气除杂系统,向液态硅中吹入氩气,利用氩气带入电泳剂颗粒,去除硅料中的P、B及其他杂质;Start the blowing impurity removal system, blow argon into the liquid silicon, and use the argon to bring in the electrophoretic agent particles to remove P, B and other impurities in the silicon material;

(3)真空溢留除杂,具体方法如下:(3) Vacuum overflow and impurity removal, the specific method is as follows:

将步骤(2)熔炼除杂后的液态硅转移到溢留包内,转移前向溢留包通入氩气,液态硅转移后用盖罩盖住溢留包,使溢留包处于封闭环境中;Transfer the liquid silicon after smelting and removing impurities in step (2) to the overflow bag, and argon gas is introduced into the overflow bag before the transfer, and the overflow bag is covered with a cover after the liquid silicon is transferred, so that the overflow bag is in a closed environment middle;

对溢留包抽真空,调整通入溢留包的氩气流量和压力,开启加热装置,所述加热装置包括内部加热器和顶部加热器,对溢留包顶面和内部的液体硅进行加热,加热装置进行自转运动,顶部加热器的温度始终>1450℃,内部加热器的温度从1560℃降至1450℃,降温过程中溢留包始终通入氩气;Vacuum the overflow bag, adjust the argon flow and pressure leading into the overflow bag, and turn on the heating device, which includes an internal heater and a top heater, to heat the top surface of the overflow bag and the liquid silicon inside , the heating device rotates, the temperature of the top heater is always > 1450°C, the temperature of the internal heater drops from 1560°C to 1450°C, and the overflow bag is always filled with argon during the cooling process;

溢留包加热装置开启的同时也开启冷却水,对溢留包四周及底部外表面进行冷却,液态硅从四周向中心凝固,整个过程保持溢留包内部加热器和包内凝固硅料外壁的温差为90~150℃,真空溢留除杂的最后阶段,将溢留包中心的液态硅倒入铸锭构成的水箱内冷却,溢留包内凝固的硅料降温至200℃时进行拆包,取出硅料;When the heating device of the overflow bag is turned on, the cooling water is also turned on to cool the surrounding surface of the overflow bag and the outer surface of the bottom, and the liquid silicon solidifies from the periphery to the center. The temperature difference is 90~150°C. In the final stage of vacuum overflow and impurity removal, the liquid silicon in the center of the overflow bag is poured into a water tank composed of ingots for cooling, and the solidified silicon material in the overflow bag is cooled to 200°C before unpacking. , take out the silicon material;

(4)产品分类:经步骤(3)真空溢留除杂得到的硅料按P、B和总金属的含量进行分类,分选出符合太阳能级多晶硅标准的硅料。(4) Product classification: The silicon material obtained by vacuum overflow and impurity removal in step (3) is classified according to the content of P, B and total metal, and the silicon material meeting the standard of solar-grade polysilicon is sorted out.

更进一步的,所述步骤(1)中,表面机械处理的喷砂处理包括高压喷射法、离心喷射法、流体力学法,去掉硅料表皮的厚度为:四周和底部表皮为0.1~8 mm,顶部表皮为0.2~10 mm;Furthermore, in the step (1), the sandblasting treatment of surface mechanical treatment includes high-pressure spraying method, centrifugal spraying method, and fluid mechanics method, and the thickness of the silicon material skin is removed: the surrounding and bottom skins are 0.1-8 mm, The top skin is 0.2~10 mm;

湿法清洗中,溶液浸泡的时间为15~120min,所述酸-H2O2水溶液中酸、H2O2和水的体积比为3~10:1:1,所述酸为25~60wt%硫酸或30~40wt%盐酸,所述NH4OH-H2O2水溶液中NH4OH、H2O2和水的体积比为2~8:1:1,所述NH4OH为20~30wt%氨水,所述H2O2的质量分数为25~35%;In wet cleaning, the soaking time of the solution is 15~120min, the volume ratio of acid , H2O2 and water in the acid - H2O2 aqueous solution is 3 ~10:1:1, and the acid is 25~ 60wt% sulfuric acid or 30~40wt% hydrochloric acid, the volume ratio of NH4OH , H2O2 and water in the NH4OH - H2O2 aqueous solution is 2 ~ 8 : 1 :1, and the NH4OH is 20~30wt% ammoniacal liquor, the massfraction of described H 2 O 2 is 25~35%;

所述烘干过程在真空中进行。The drying process is carried out in vacuum.

更进一步的,所述步骤(2)中,所述真空炉包括真空中频炉、真空熔炼炉,加热熔化硅料过程在真空或惰性气体保护下进行;Furthermore, in the step (2), the vacuum furnace includes a vacuum intermediate frequency furnace and a vacuum melting furnace, and the process of heating and melting the silicon material is carried out under the protection of vacuum or inert gas;

所述氩气的纯度>99.99%,氩气的压力为0.2~1Mpa,流量为0.05~0.5m3/h,所述电泳剂包括钙系和/或钠系电泳剂;The purity of the argon gas is >99.99%, the pressure of the argon gas is 0.2-1Mpa, the flow rate is 0.05-0.5m 3 /h, and the electrophoretic agent includes calcium-based and/or sodium-based electrophoretic agents;

所述熔炼坩埚材质为石墨或刚玉;The melting crucible is made of graphite or corundum;

熔炼除杂时间和电泳剂的用量为:电阻率在0.5~3 Ω·cm的硅料,加入电泳剂的量为硅料重量的1/150~1/300,处理时间为5~10 h;电阻率<0.5 Ω·cm的硅料,加入电泳剂的量为硅料重量的1/50~1/150,处理时间为10~15h;电阻率>3 Ω·cm的硅料,加入电泳剂的量为硅料重量的1/300~1/450,处理时间为3~5 h。The smelting impurity removal time and the amount of electrophoretic agent are: for silicon materials with a resistivity of 0.5~3 Ω·cm, the amount of electrophoretic agent added is 1/150~1/300 of the weight of the silicon material, and the treatment time is 5~10 h; For silicon material with resistivity <0.5 Ω·cm, the amount of electrophoretic agent added is 1/50~1/150 of the weight of silicon material, and the treatment time is 10~15h; for silicon material with resistivity>3 Ω·cm, electrophoretic agent is added The amount is 1/300~1/450 of the weight of the silicon material, and the processing time is 3~5 h.

更进一步的,所述步骤(3)中,通入溢留包的氩气经脱油、脱脂和干燥处理,氩气通过从溢留包上部插入的吹气管或溢留包底部通入,液态硅倒入溢留包前通入氩气的压力为0.3~0.6Mpa,流量为0.1~0.6 m³/min,液态硅移入溢留包并加盖后通入的氩气压力为0.1~0.3 MPa,流量为0.05~0.2 m³/min;Furthermore, in the step (3), the argon gas passed into the overflow bag is deoiled, degreased and dried, and the argon gas is introduced through the blowing pipe inserted from the upper part of the overflow bag or the bottom of the overflow bag, and the liquid state Before the silicon is poured into the overflow bag, the pressure of argon gas is 0.3~0.6Mpa, and the flow rate is 0.1~0.6 m³/min. The flow rate is 0.05~0.2 m³/min;

溢留包抽真空后真空度保持4000~6000 Pa;After vacuuming the overflow bag, the vacuum degree is maintained at 4000~6000 Pa;

所述内部加热器为硅钼棒加热器或石墨加热器,位于溢留包中心,所述顶部加热器为石墨加热器;The internal heater is a silicon-molybdenum rod heater or a graphite heater, which is located in the center of the overflow bag, and the top heater is a graphite heater;

降温过程的时间为:电阻率在0.5~3 Ω·cm的硅料,时间为5~10 h;电阻率<0.5 Ω·cm的硅料,时间>10h;电阻率>3 Ω·cm的硅料,时间<5 h;The time of the cooling process is: for silicon materials with a resistivity of 0.5~3 Ω cm, the time is 5~10 h; for silicon materials with a resistivity <0.5 Ω cm, the time is >10 h; material, time <5 h;

所述冷却水温度<25℃,水压为0.2~0.6Mpa,流量为30~75 m3/h。The temperature of the cooling water is <25°C, the water pressure is 0.2-0.6Mpa, and the flow rate is 30-75 m 3 /h.

更进一步的,所述步骤(4)中,P≤0.5pptWt、B≤0.3pptWt、总金属含量≤1pptWt的硅料符合太阳能级多晶硅标准。Furthermore, in the step (4), the silicon material with P≤0.5pptWt, B≤0.3pptWt, and total metal content≤1pptWt meets the solar grade polysilicon standard.

本发明的有益效果为:The beneficial effects of the present invention are:

(1)本发明是专门针对光伏产业链可回收硅料再提纯生产技术,具有环保、简单、节能、低成本的特点;(1) This invention is specifically aimed at the repurification production technology of recyclable silicon materials in the photovoltaic industry chain, which has the characteristics of environmental protection, simplicity, energy saving and low cost;

(2)可规模化生产出符合国际SEMI PV17-1012标准的太阳能级多晶硅铸锭用硅料,符合标准的硅料产出率大于70%,大大提高光伏产业链可回收料再生产铸锭质量;(2) Large-scale production of silicon materials for solar-grade polysilicon ingots that meets the international SEMI PV17-1012 standard, and the output rate of silicon materials that meet the standards is greater than 70%, which greatly improves the quality of ingots for the reproduction of recyclable materials in the photovoltaic industry chain;

(3)除杂过程中吹入的气体对硅液有搅拌作用,不断让表面硅液和内部硅液发生质量交换,去除易挥发杂质,溢留包吹气使固液面上杂质快速扩散到液态中,减少了杂质对高纯固态硅的扩散;(3) The gas blown in during the impurity removal process has a stirring effect on the silicon liquid, continuously allowing mass exchange between the surface silicon liquid and the internal silicon liquid, removing volatile impurities, and blowing air in the overflow bag to quickly diffuse impurities on the solid-liquid surface. In the liquid state, the diffusion of impurities to high-purity solid silicon is reduced;

(4)溢留除杂中的低纯硅在液体状态时进行了分离,实现了高纯度硅和低纯度硅的快速分离;(4) The low-purity silicon in the overflow and impurity removal is separated in a liquid state, realizing the rapid separation of high-purity silicon and low-purity silicon;

(5)吹气使液态硅始终处于动态状态,实现了动态的定向凝固;(5) Air blowing keeps the liquid silicon in a dynamic state all the time, realizing dynamic directional solidification;

(6)在液态硅内部加热,提高了热源的利用率;(6) Heating inside the liquid silicon improves the utilization rate of the heat source;

(7)硅料纯度从2-3N提纯到6N以上。(7) The purity of silicon material is purified from 2-3N to above 6N.

具体实施方式detailed description

以下对本发明的优选实施例进行说明,应当理解,此处所描述的优选实施例仅用于说明和解释本发明,并不用于限定本发明。Preferred embodiments of the present invention are described below, and it should be understood that the preferred embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

光伏产业链可回收硅料再生提纯工艺,对光伏产业链可回收硅料进行再生提纯,得到符合太阳能级标准的硅料,该工艺包括:(1)分类清洗,(2)熔炼除杂,(3)真空溢留除杂,(4)产品分类步骤。具体包括如下步骤:Photovoltaic industry chain recyclable silicon material regeneration and purification process, regenerate and purify recyclable silicon material in the photovoltaic industry chain, and obtain silicon material that meets solar-grade standards. The process includes: (1) classified cleaning, (2) smelting and removing impurities, ( 3) Vacuum overflow and impurity removal, (4) Product classification steps. Specifically include the following steps:

(1)分类清洗(1) Classified cleaning

分类:光伏产业链可回收硅料分为四周边皮、锅底料和头尾料,根据不同部位的电阻率,推算出其杂质含量范围。一般提纯四周、头部回收硅料、铸锭头部回收硅料和拉单晶硅锅底料等电阻率相对偏小,而提纯底部回收硅料、铸锭四周、底部回收硅料和单晶硅棒边皮硅料等电阻率相对偏高。由电阻测试仪与人工配合对光伏产业链可回收硅料进行筛选,参照不同电阻测量范围,进行不同的提纯技术处理时间。电阻率在0.5~3 Ω·cm之间的硅料按照正常提纯时间进行熔炼除杂和真空溢留除杂处理,时间为10~20 h;回收硅料电阻率<0.5 Ω·cm,相对杂质含量偏高,除杂提纯处理时间相对较长,一般>20 h;对于电阻率>3Ω·cm硅料,相对杂质含量偏低,一般处理时间<10 h。Classification: Recyclable silicon materials in the photovoltaic industry chain are divided into peripheral skins, pot bottom materials, and head and tail materials. According to the resistivity of different parts, the range of impurity content is calculated. Generally, the resistivity of the four sides of purification, the recovery of silicon material at the head, the recovery of silicon material at the head of the ingot, and the bottom material of the monocrystalline silicon pot are relatively small, while the silicon material recovered at the bottom of the purification, the surrounding area of the ingot, and the bottom recovery of silicon material and monocrystalline The resistivity of the silicon rod edge skin silicon material is relatively high. The recyclable silicon material in the photovoltaic industry chain is screened by the resistance tester and manual cooperation, and different purification technology processing times are carried out with reference to different resistance measurement ranges. Silicon materials with a resistivity between 0.5 and 3 Ω·cm are subjected to smelting and vacuum overflow removal of impurities according to the normal purification time, and the time is 10 to 20 h; the resistivity of recovered silicon materials is less than 0.5 Ω·cm. If the impurity content is high, the treatment time for impurity removal and purification is relatively long, generally >20 h; for silicon materials with a resistivity >3Ω·cm, the relative impurity content is low, and the general treatment time is <10 h.

表面机械处理:在多晶硅光伏产业链过程中,使用石英坩埚进行了氮化硅涂层处理。在铸锭炉内经过熔化和再凝固过程,对硅料四周和底部表面造成部分污染,光伏产业链出来的硅锭上表面是硅锭杂质含量最高部位,因此需要通过机械方式对硅锭六表面部位硅料进行机械处理。光伏产业链可回收硅料分类之后,首先对回收硅料表面进行机械处理。通过机械打磨和喷砂的高压喷射法、离心喷射法、流体力学法等机械方式对回收硅料表面进行处理,减少回收硅料表面的杂质含量。机械处理四周和底部表皮厚度为0.1~8 mm,顶部表皮厚度为0.2~10 mm。Surface mechanical treatment: In the process of polysilicon photovoltaic industry chain, silicon nitride coating treatment is carried out using quartz crucible. After melting and re-solidification in the ingot furnace, the surrounding and bottom surfaces of the silicon materials are partially polluted. The upper surface of the silicon ingots from the photovoltaic industry chain is the part with the highest impurity content in the silicon ingots. Therefore, it is necessary to mechanically clean the six surfaces of the silicon ingots. Part silicon material is mechanically treated. After the classification of recyclable silicon materials in the photovoltaic industry chain, the surface of the recycled silicon materials is first mechanically treated. The surface of the recovered silicon material is treated by mechanical methods such as mechanical grinding and sandblasting, such as high-pressure injection method, centrifugal injection method, and fluid mechanics method, to reduce the impurity content on the surface of the recovered silicon material. The thickness of the skin around and at the bottom of the mechanical treatment is 0.1-8 mm, and the thickness of the top skin is 0.2-10 mm.

湿法清洗:硅料经过开方和机械去除表面后,表面留下了大量的油性、乳性等污脏物质,需要进一步进行清理。开方流程中的切割液含有油性和乳性物质,主要由聚乙二醇、螯合剂和有机醇等组成。硅料表面一般还沉积有粒子、金属、有机物、灰尘、湿气分子和自然氧化物等的一种或几种,必须加以清除。Wet cleaning: After prescribing and mechanically removing the surface of the silicon material, a large amount of oily, milky and other dirty substances are left on the surface, which needs further cleaning. The cutting fluid in the prescribing process contains oily and milky substances, mainly composed of polyethylene glycol, chelating agents and organic alcohols. Generally, one or more of particles, metals, organic matter, dust, moisture molecules and natural oxides are deposited on the surface of the silicon material, which must be removed.

湿法清洗采用溶液浸泡法,通过溶液与硅料表面的污染杂质在浸泡过程中发生化学反应及溶解作用来达到清除硅料表面污染杂质的目的,浸泡总时间控制在15~120min之间,一般在30min左右。硅料表面有机物和金属的去除清洗液是酸-H2O2水溶液,酸、H2O2和水的体积比为3~10:1:1,酸选用25~60wt%硫酸或30~40wt%盐酸,H2O2的质量分数为25~35%,该溶液具有很强的氧化能力,可将金属氧化后溶于溶液中,并能把有机物氧化生成CO2 和水,可去除硅料表面的重有机沾污和部分金属,但是当有机物沾污较重时会使有机物碳化而难以去除。如选用硫酸-H2O2水溶液清洗后,硅料表面会残留有硫化物,这些硫化物很难用去离子水冲洗掉。硅料表面的颗粒去除主要用NH4OH-H2O2水溶液清洗,NH4OH、H2O2和水的体积比为2~8:1:1,NH4OH为20~30wt%氨水,H2O2的质量分数为25~35%。在清洗液中,由于H2O2的作用,硅料表面有一层自然氧化膜SiO2 ,呈亲水性,硅料表面和粒子之间可用清洗液浸透,硅料表面的自然氧化膜和硅被NH4OH 腐蚀,硅料表面的粒子便落入清洗液中。在清洗液中,由于硅料表面的电位为负,与大部分粒子间都存在排斥力,防止了粒子向硅料表面吸附。上述两种清洗方法根据硅料表面的污染情况单独使用或联合使用。Wet cleaning adopts the solution immersion method, through the chemical reaction and dissolution of the solution and the contamination impurities on the surface of the silicon material during the soaking process to achieve the purpose of removing the contamination impurities on the surface of the silicon material. The total soaking time is controlled between 15 and 120 minutes. About 30 minutes. The cleaning solution for the removal of organic matter and metals on the surface of silicon materials is acid-H 2 O 2 aqueous solution, the volume ratio of acid, H 2 O 2 and water is 3~10:1:1, and the acid is 25~60wt% sulfuric acid or 30~40wt% % hydrochloric acid, the mass fraction of H 2 O 2 is 25~35%. This solution has a strong oxidizing ability. It can oxidize metals and dissolve them in the solution, and can oxidize organic matter to generate CO 2 and water, which can remove silicon materials. Heavy organic contamination and some metals on the surface, but when the organic contamination is heavy, the organic matter will be carbonized and difficult to remove. If sulfuric acid-H 2 O 2 aqueous solution is used for cleaning, sulfides will remain on the surface of the silicon material, and these sulfides are difficult to wash off with deionized water. Particle removal on the surface of silicon material is mainly cleaned with NH 4 OH-H 2 O 2 aqueous solution, the volume ratio of NH 4 OH, H 2 O 2 and water is 2~8:1:1, and NH 4 OH is 20~30wt% ammonia water , the mass fraction of H 2 O 2 is 25~35%. In the cleaning solution, due to the action of H 2 O 2 , there is a layer of natural oxide film SiO 2 on the surface of the silicon material, which is hydrophilic, and the surface of the silicon material and between the particles can be soaked with the cleaning solution. Corroded by NH 4 OH, the particles on the surface of the silicon material fall into the cleaning solution. In the cleaning solution, since the potential on the surface of the silicon material is negative, there is a repulsive force between most of the particles, which prevents the particles from adsorbing to the surface of the silicon material. The above two cleaning methods are used alone or in combination according to the contamination of the surface of the silicon material.

纯水清洗:硅料经纯水通过超声波清洗技术进行再清洗,最后经过真空烘干,处理好的多晶硅光伏产业链回收料进行下一步提纯工艺。Pure water cleaning: the silicon material is re-cleaned by pure water through ultrasonic cleaning technology, and finally vacuum-dried, and the processed polysilicon photovoltaic industry chain recycled materials are subjected to the next purification process.

(2)熔炼除杂(2) Melting and impurity removal

经真空烘干的回收硅料,首先进行熔炼除杂工艺。通过真空中频炉、真空熔炼炉或者其它真空炉加热熔化,加热熔化过程可在真空状态或者惰性气体保护下进行,熔化温度控制在1500~1700℃,熔炼坩埚采用石墨或者刚玉材质。固态回收硅料完全熔化后,液态硅温度控制在1500℃以上。启动吹气除杂系统,通过吹入纯度>99.99%氩气,利用氩气带入颗粒状的电泳剂,电泳剂包括钙系、钠系或其他电泳剂中的一种或几种,从除杂装置中的碳管或者刚玉管进入液态硅中,氩气压力为0.2~1 Mpa,流量为0.05~0.5 m³/h。通过电泳剂和液态硅的反应,降低P、B和其他杂质含量。根据熔化回收硅料的分类不同,整个处理时间和电泳剂用量不同,电阻率在0.5~3 Ω·cm的硅料,加入电泳剂的量为硅料重量的1/150~1/300,处理时间为5~10 h;回收硅料电阻率<0.5 Ω·cm,加入电泳剂的量为硅料重量的1/50~1/150,处理时间为10~15 h;电阻率>3 Ω·cm的硅料,相对杂质含量偏低,加入电泳剂的量为硅料重量的1/300~1/450,处理时间为3~5 h。The recovered silicon material after vacuum drying is firstly smelted and impurity-removed. It is heated and melted by vacuum intermediate frequency furnace, vacuum melting furnace or other vacuum furnaces. The heating and melting process can be carried out in a vacuum state or under the protection of inert gas. The melting temperature is controlled at 1500~1700°C. The melting crucible is made of graphite or corundum. After the solid recycled silicon material is completely melted, the temperature of the liquid silicon is controlled above 1500°C. Start the gas blowing impurity removal system, by blowing argon with a purity >99.99%, use the argon to bring in the granular electrophoretic agent, the electrophoretic agent includes one or more of calcium-based, sodium-based or other electrophoretic agents, from the removal The carbon tube or corundum tube in the miscellaneous device enters the liquid silicon, the argon pressure is 0.2~1 Mpa, and the flow rate is 0.05~0.5 m³/h. Through the reaction of electrophoretic agent and liquid silicon, the content of P, B and other impurities is reduced. According to the different classifications of melted and recovered silicon materials, the entire processing time and the amount of electrophoretic agent are different. For silicon materials with a resistivity of 0.5~3 Ω·cm, the amount of electrophoretic agent added is 1/150~1/300 of the weight of the silicon material. The time is 5~10 h; the resistivity of the recovered silicon material is less than 0.5 Ω·cm, the amount of electrophoretic agent added is 1/50~1/150 of the weight of the silicon material, and the treatment time is 10~15 h; the resistivity is greater than 3 Ω·cm cm silicon material, the relative impurity content is relatively low, the amount of electrophoretic agent added is 1/300~1/450 of the weight of the silicon material, and the treatment time is 3~5 h.

(3)真空溢留除杂(3) Vacuum overflow and impurity removal

利用液态硅自身潜热能,把熔炼真空炉内的液态硅转移到溢留包,进行溢留除杂。液态硅控制在1500℃以上,把液态硅倒入溢留包内。倒入前,通过从溢留包上部插入的吹气管或溢留包底部通入氩气,通入氩气的压力为0.3~0.6 Mpa,流量为0.1~0.6 m³/min,氩气经脱油、脱脂、干燥处理,不间断通入溢留包内,保持整个出炉过程不浮动变化。液态硅倒完后,加盖专门设计的盖罩,使硅液在一个完全封闭溢留包环境中,防止外部环境污染。Using the latent heat energy of liquid silicon itself, the liquid silicon in the smelting vacuum furnace is transferred to the overflow bag for overflow and impurity removal. The liquid silicon is controlled above 1500°C, and the liquid silicon is poured into the overflow bag. Before pouring, argon gas is introduced through the blowing pipe inserted from the upper part of the overflow bag or the bottom of the overflow bag. , degreasing, drying treatment, uninterrupted feeding into the overflow bag, keeping the whole process of leaving the furnace without fluctuations. After the liquid silicon is poured, cover it with a specially designed cover to keep the silicon liquid in a completely closed overflow bag environment to prevent external environmental pollution.

通过机械真空泵或者罗茨泵对溢留包进行抽真空,保持真空度在4000~6000 Pa。调整通入溢留包的氩气压力为0.1~0.3 MPa,流量为0.05~0.2 m³/min。然后接通水和电,开启加热装置,加热装置包括内部加热器和顶部加热器,对包内的液体硅进行顶面和内部加热,加热装置在加热过程中进行自转运动,使对硅液的辐射热和传导热稳定一致。内部加热器为硅钼棒加热器或石墨加热器,顶部加热器为石墨加热器。顶面加热器的温度始终大于1450℃,内部加热器的温度从初始1560℃缓慢降至1450℃,保证溢留包内部的硅始终处于熔化状态。根据硅料电阻率的不同,此段工艺吹气和降温时间不同。电阻率在0.5~3 Ω·cm的硅料,吹气和降温处理时间为5~10h;电阻率<0.5 Ω·cm的硅料,吹气和降温处理时间为>10h;电阻率>3 Ω·cm的硅料,吹气和降温处理时间<5h。Use a mechanical vacuum pump or a Roots pump to evacuate the overflow bag and keep the vacuum at 4000~6000 Pa. Adjust the argon pressure into the overflow bag to be 0.1~0.3 MPa, and the flow rate to be 0.05~0.2 m³/min. Then turn on the water and electricity, and turn on the heating device. The heating device includes an internal heater and a top heater to heat the top surface and the inside of the liquid silicon in the bag. The heating device rotates during the heating process to make the silicon liquid Radiant heat and conduction heat are stable and consistent. The inner heater is silicon molybdenum rod heater or graphite heater, and the top heater is graphite heater. The temperature of the top heater is always greater than 1450°C, and the temperature of the internal heater is slowly lowered from the initial 1560°C to 1450°C to ensure that the silicon inside the overflow bag is always in a molten state. Depending on the resistivity of the silicon material, the gas blowing and cooling time of this process are different. For silicon materials with a resistivity of 0.5~3 Ω cm, the time for blowing and cooling is 5~10 hours; for silicon materials with a resistivity <0.5 Ω cm, the time for blowing and cooling is >10 hours; for resistivity> 3 Ω · cm silicon material, blowing and cooling treatment time <5h.

开启溢留包加热装置的同时,溢留包的四周和底部外表面通水冷却,水压为0.2~0.6 MPa,流量为30~75 m3/h。水温保持低于25℃。整个过程保持内部加热器温度与包内凝固硅料外壁的温度差在90~150℃之间。液态硅从四周往中心定向凝固,由于定向凝固的原因,杂质元素被排除到液态硅中,四周高纯凝固固态硅纯度远远高于液态硅。因提纯工艺完成后剩余部分液态硅,其杂质含量极高,为防止其凝固成固态影响到已凝固的高纯固态硅,使高纯硅和含杂质量极高的低纯硅分离,把含杂质量高的低纯液态硅在凝固之前倒出溢留包,实现了高纯硅和低纯硅的分离,此部分液态硅占整个液态硅重量的10%-30%,把该部分低纯液态硅倒进用铸锭构成的水冷箱内,使其迅速冷却成锭。关闭加热装置,待溢留包内凝固的固态硅温度降至200℃进行拆包,取出提纯后的硅料。While the heating device of the overflow bag is turned on, water is passed around the outer surface of the overflow bag and the outer surface of the bottom for cooling, the water pressure is 0.2~0.6 MPa, and the flow rate is 30~75 m 3 /h. The water temperature is kept below 25°C. During the whole process, the temperature difference between the temperature of the internal heater and the outer wall of the solidified silicon material in the bag is kept between 90 and 150°C. The liquid silicon is directional solidified from the surrounding to the center. Due to the directional solidification, impurity elements are excluded into the liquid silicon, and the purity of the high-purity solidified solid silicon around is much higher than that of liquid silicon. Because the impurity content of the remaining part of liquid silicon after the purification process is completed is extremely high, in order to prevent it from solidifying into a solid state and affecting the solidified high-purity solid silicon, high-purity silicon is separated from low-purity silicon with a very high impurity content. The low-purity liquid silicon with high impurity is poured out of the overflow bag before solidification, realizing the separation of high-purity silicon and low-purity silicon. This part of liquid silicon accounts for 10%-30% of the weight of the entire liquid silicon. Liquid silicon is poured into a water-cooled box made of cast ingots to rapidly cool it into ingots. Turn off the heating device, wait for the temperature of the solidified silicon in the overflow bag to drop to 200°C to unpack, and take out the purified silicon material.

(4)产品分类:溢留除杂后的固态硅料开方后进行检测,根据检测后的结果按P、B和总金属含量进行分类。对于杂质浓度B≤ 0.3 ppmWt, P≤ 0.5 ppmWt,Σ金属≤1 ppmWt,是符合做太阳能电池多晶硅材料;对于杂质浓度B>0.3 ppmWt ,P>0.5 ppmWt,Σ金属>1ppmWt的硅料进行重新提纯或者以低纯度硅料销售。(4) Product classification: The solid silicon material after overflow and removal of impurities is prescribed and tested, and classified according to P, B and total metal content according to the test results. For impurity concentration B≤ 0.3 ppmWt, P≤ 0.5 ppmWt, Σ metal ≤ 1 ppmWt, it is suitable for polysilicon materials for solar cells; for impurity concentration B>0.3 ppmWt, P>0.5 ppmWt, Σ metal > 1ppmWt silicon material is re-purified Or sold as low-purity silicon material.

以上述方法对光伏产业链可回用硅料进行再生提纯处理,得到的高纯度硅料检测后符合太阳能级多晶硅标准SEMI PV17-1012的硅料直接进入铸锭炉,成品后直接出售,不符合太阳能级硅料标准的低纯度和低品质的部分硅料回炉继续提纯,或者用于对硅质量要求不高的地方。The above method is used to regenerate and purify the reusable silicon material in the photovoltaic industry chain. The obtained high-purity silicon material meets the solar-grade polysilicon standard SEMI PV17-1012 after testing. The silicon material directly enters the ingot furnace, and the finished product is sold directly. Part of the standard low-purity and low-quality silicon materials of solar grade silicon materials are returned to the furnace for further purification, or used in places where the quality of silicon is not high.

本发明的可回用硅料再生提纯工艺对光伏产业链可回收硅料提纯,符合太阳能级标准硅料的产出率大于70%,提纯后的多晶硅纯度达到光伏级所需的6N(99.9999%)以上。The regeneration and purification process of the reusable silicon material of the present invention purifies the recyclable silicon material in the photovoltaic industry chain, and the output rate of the silicon material conforming to the solar-grade standard is greater than 70%, and the purity of the purified polysilicon reaches 6N (99.9999%) required by the photovoltaic grade. )above.

实施例1Example 1

可回用硅料再生提纯工艺,包括如下步骤:Recyclable silicon material regeneration and purification process includes the following steps:

(1)分类清洗(1) Classified cleaning

用电阻测试仪与人工配合对光伏产业链回收的硅料进行筛选,筛选出电阻率在0.5~3Ω·cm之间的硅料。The silicon material recovered from the photovoltaic industry chain was screened with a resistance tester and manual cooperation, and the silicon material with a resistivity between 0.5 and 3Ω·cm was screened out.

对上述分选出的硅料进行开放,表面进行机械打磨,去掉四周和底部表皮厚度0.1~8 mm,顶部表皮厚度0.2~10 mm。The above-mentioned sorted silicon material is opened, and the surface is mechanically polished to remove the surrounding and bottom skin with a thickness of 0.1-8 mm, and the top skin with a thickness of 0.2-10 mm.

用体积比5:1:1的30wt%硫酸、28wt% H2O2和水的混合液浸泡硅料15min,再用体积比5:1:1的25wt%氨水、28wt% H2O2和水的混合液浸泡15min。Soak the silicon material with a mixture of 30wt% sulfuric acid, 28wt% H 2 O 2 and water at a volume ratio of 5:1:1 for 15 minutes, and then use 25wt% ammonia water, 28wt% H 2 O 2 and Soak in the water mixture for 15 minutes.

硅料经纯水通过超声波清洗技术进行再清洗,最后经过真空烘干,处理好的硅料进行下一步提纯工艺。The silicon material is cleaned again by ultrasonic cleaning technology with pure water, and finally vacuum dried, and the treated silicon material is subjected to the next purification process.

(2)熔炼除杂(2) Melting and impurity removal

经真空烘干的硅料放入石墨熔炼坩埚中,进入真空熔炼炉加热熔化,加热熔化过程氩气保护下进行,炉内温度控制在1500~1700℃。固态回收硅料完全熔化后,液态硅温度控制在1500℃以上。启动吹气除杂系统,吹入纯度>99.99%氩气,利用氩气带入钙系电泳剂颗粒,从除杂装置中的碳管或者刚玉管进入液态硅中,氩气压力为0.2~1 Mpa,流量为0.05~0.5 m³/h。熔炼除杂过程处理时间为8h,加入电泳剂的量为硅料重量的1/200。The vacuum-dried silicon material is put into a graphite melting crucible, and then enters a vacuum melting furnace for heating and melting. The heating and melting process is carried out under the protection of argon, and the temperature in the furnace is controlled at 1500~1700°C. After the solid recycled silicon material is completely melted, the temperature of the liquid silicon is controlled above 1500°C. Start the gas blowing impurity removal system, blow in argon with a purity >99.99%, use the argon to bring the calcium-based electrophoretic agent particles into the liquid silicon from the carbon tube or corundum tube in the impurity removal device, and the argon pressure is 0.2~1 Mpa, the flow rate is 0.05~0.5 m³/h. The processing time of the smelting and impurity removal process is 8 hours, and the amount of the electrophoretic agent added is 1/200 of the weight of the silicon material.

(3)真空溢留除杂(3) Vacuum overflow and impurity removal

把真空熔炼炉内的液态硅倒入溢留包,液态硅控制在1500℃以上,倒入前,通过从溢留包上部插入的吹气管通入经脱油、脱脂、干燥处理的氩气,氩气不间断通入,通入氩气的压力为0.3~0.6 Mpa,流量为0.1~0.6 m³/min。液态硅倒完后,加盖专门设计的盖罩。Pour the liquid silicon in the vacuum melting furnace into the overflow bag. The liquid silicon is controlled at a temperature above 1500°C. Before pouring, the argon gas that has been deoiled, degreased and dried is introduced through the blowing pipe inserted from the upper part of the overflow bag. The argon gas is fed continuously, the pressure of the argon gas is 0.3~0.6 Mpa, and the flow rate is 0.1~0.6 m³/min. After the liquid silicon is poured, cover it with a specially designed cover.

通过机械真空泵对溢留包抽真空,保持真空度在4000~6000 Pa。调整通入溢留包的氩气压力为0.1~0.3 MPa,流量为0.05~0.2 m³/min。开启加热装置,加热装置包括内部加热器和顶部加热器,对包内的液体硅进行顶面和内部加热,加热装置在加热过程中进行自转运动,使对硅液的辐射热和传导热稳定一致。内部加热器为硅钼棒加热器,顶部加热器为石墨加热器。顶面加热器的温度始终大于1450℃,内部加热器的温度从初始1560℃缓慢降至1450℃。吹气和降温处理时间为8h。Vacuum the overflow bag through a mechanical vacuum pump to keep the vacuum at 4000~6000 Pa. Adjust the argon pressure into the overflow bag to be 0.1~0.3 MPa, and the flow rate to be 0.05~0.2 m³/min. Turn on the heating device. The heating device includes an internal heater and a top heater to heat the top surface and the inside of the liquid silicon in the bag. The heating device rotates during the heating process to make the radiation heat and conduction heat of the silicon liquid stable and consistent. . The internal heater is a silicon molybdenum rod heater, and the top heater is a graphite heater. The temperature of the top heater is always greater than 1450°C, and the temperature of the inner heater is slowly decreased from the initial 1560°C to 1450°C. The blowing and cooling treatment time is 8h.

开启溢留包加热装置的同时,溢留包的四周和底部外表面通水冷却,水压为0.2~0.6 MPa,流量为30~75 m3/h。水温保持低于25℃。整个过程保持内部加热器温度与包内凝固硅料外壁的温度差在90~150℃之间。液态硅从四周往中心定向凝固。吹起和降温处理完后把含杂质量高的低纯液态硅在凝固之前倒入用铸锭构成的水冷箱内,使其迅速冷却成锭。关闭加热装置,待溢留包内凝固的固态硅温度降至200℃进行拆包,取出提纯后的硅料。While the heating device of the overflow bag is turned on, water is passed around the outer surface of the overflow bag and the outer surface of the bottom for cooling, the water pressure is 0.2~0.6 MPa, and the flow rate is 30~75 m 3 /h. The water temperature is kept below 25°C. During the whole process, the temperature difference between the temperature of the internal heater and the outer wall of the solidified silicon material in the bag is kept between 90 and 150°C. Liquid silicon solidifies directionally from the periphery to the center. After the blowing and cooling process, the low-purity liquid silicon with high impurity content is poured into the water-cooled box made of ingots before solidification, so that it can be rapidly cooled into ingots. Turn off the heating device, wait for the temperature of the solidified silicon in the overflow bag to drop to 200°C to unpack, and take out the purified silicon material.

(4)产品分类:溢留除杂后的固态硅料开方后进行检测,根据检测后的结果按P、B和总金属含量分选出符合太阳能级多晶硅标准的硅料。(4) Product classification: The solid silicon material after overflow and removal of impurities is prescribed and then tested. According to the test results, the silicon material that meets the solar-grade polysilicon standard is sorted out according to P, B and total metal content.

本实施例中符合太阳能级多晶硅标准的硅料产率为74%。In this embodiment, the yield of silicon material meeting the solar grade polysilicon standard was 74%.

实施例2Example 2

本实施例与实施例1基本相同,区别在于:This embodiment is basically the same as Embodiment 1, the difference is:

(1)分类清洗步骤筛选出电阻率<0.5 Ω·cm之间的硅料。(1) The classification cleaning step screens out silicon materials with a resistivity <0.5 Ω·cm.

(2)熔炼除杂过程处理时间为12h,加入电泳剂的量为硅料重量的1/100。(2) The treatment time of the smelting and impurity removal process is 12 hours, and the amount of electrophoretic agent added is 1/100 of the weight of the silicon material.

(3)真空溢留除杂吹气和降温处理时间为12h。(3) The time for vacuum overflow, impurity removal, air blowing and cooling treatment is 12 hours.

本实施例中符合太阳能级多晶硅标准的硅料产率为71%。In this embodiment, the yield of silicon material meeting the solar grade polysilicon standard was 71%.

实施例3Example 3

本实施例与实施例1基本相同,区别在于:This embodiment is basically the same as Embodiment 1, the difference is:

(1)分类清洗步骤筛选出电阻率>3 Ω·cm之间的硅料。(1) The classification cleaning step screens out silicon materials with a resistivity > 3 Ω·cm.

(2)熔炼除杂过程处理时间为4h,加入电泳剂的量为硅料重量的1/400。(2) The treatment time of the smelting and impurity removal process is 4 hours, and the amount of electrophoretic agent added is 1/400 of the weight of the silicon material.

(3)真空溢留除杂吹气和降温处理时间为4h。(3) The time for vacuum overflow, impurity removal, air blowing and cooling treatment is 4 hours.

本实施例中符合太阳能级多晶硅标准的硅料产率为76%。In this embodiment, the yield of silicon material meeting the solar grade polysilicon standard was 76%.

表1和表2为实施例2硅料提纯前和提出后杂质元素的含量。Table 1 and Table 2 are the contents of impurity elements before and after the purification of the silicon material in Example 2.

表1 提纯前多晶硅杂质元素含量(ppmWt)Table 1 Content of impurity elements in polysilicon before purification (ppmWt)

表2 提纯后多晶硅杂质元素含量(ppmWt)Table 2 Content of impurity elements in polysilicon after purification (ppmWt)

以上所述仅为本发明的优选实施例而已,并不用于限制本发明,尽管参照前述实施例对本发明进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still understand the foregoing embodiments The recorded technical solutions are modified, or some of the technical features are equivalently replaced. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (6)

1.光伏产业链可回收硅料再生提纯工艺,对光伏产业链可回收硅料进行再生提纯,得到符合太阳能级标准的硅料,其特征在于,该工艺包括:(1)分类清洗,(2)熔炼除杂,(3)真空溢留除杂,(4)产品分类步骤。1. Regeneration and purification process of recyclable silicon materials in the photovoltaic industry chain, which regenerates and purifies recyclable silicon materials in the photovoltaic industry chain to obtain silicon materials that meet solar-grade standards. It is characterized in that the process includes: (1) classified cleaning, (2) ) Smelting to remove impurities, (3) Vacuum overflow to remove impurities, (4) Product classification steps. 2.根据权利要求1所述的光伏产业链可回收硅料再生提纯工艺,其特征在于,具体包括如下步骤:2. The regeneration and purification process of recyclable silicon material in the photovoltaic industry chain according to claim 1, characterized in that it specifically comprises the following steps: (1)分类清洗,具体方法如下:(1) Classified cleaning, the specific method is as follows: 分类:将回收的硅料按电阻率进行分类,分成电阻率<0.5Ω·cm、0.5~3Ω·cm和>3Ω·cm三类;Classification: Classify the recovered silicon material according to the resistivity, and divide it into three categories with resistivity <0.5Ω·cm, 0.5~3Ω·cm and >3Ω·cm; 表面机械处理:对分类后的硅料表面进行机械打磨和喷砂处理,去掉硅料表皮;Surface mechanical treatment: mechanically polish and sandblast the surface of the classified silicon material to remove the silicon material skin; 湿法清洗:采用溶液浸泡法处理硅料,所述溶液包括酸-H2O2水溶液、NH4OH-H2O2水溶液,H2SO4-H2O2水溶液可去除硅料表面的有机污染物和金属,NH4OH-H2O2水溶液可去除硅料表面的颗粒,根据硅料表面的污染情况单独使用或联合使用;Wet cleaning: use solution immersion method to treat silicon material, the solution includes acid-H 2 O 2 aqueous solution, NH 4 OH-H 2 O 2 aqueous solution, H 2 SO 4 -H 2 O 2 aqueous solution can remove silicon material surface Organic pollutants and metals, NH 4 OH-H 2 O 2 aqueous solution can remove particles on the surface of silicon materials, used alone or in combination according to the pollution of the surface of silicon materials; 纯水清洗:经过湿法清洗后的硅料用纯水通过超声波技术进行清洗,然后烘干;Pure water cleaning: the silicon material after wet cleaning is cleaned with pure water by ultrasonic technology, and then dried; (2)熔炼除杂,具体方法如下:(2) Smelting and removing impurities, the specific method is as follows: 经过步骤(1)分类清洗的硅料放入熔炼坩埚中送入真空炉,炉内温度控制在1500~1700℃,硅料完全熔化后,控制液态硅温度在1500℃以上;The silicon material that has been sorted and cleaned in step (1) is put into a melting crucible and sent to a vacuum furnace. The temperature in the furnace is controlled at 1500~1700°C. After the silicon material is completely melted, the temperature of the liquid silicon is controlled above 1500°C; 启动吹气除杂系统,向液态硅中吹入氩气,利用氩气带入电泳剂颗粒,去除硅料中的P、B及其他杂质;Start the blowing impurity removal system, blow argon into the liquid silicon, and use the argon to bring in the electrophoretic agent particles to remove P, B and other impurities in the silicon material; (3)真空溢留除杂,具体方法如下:(3) Vacuum overflow and impurity removal, the specific method is as follows: 将步骤(2)熔炼除杂后的液态硅转移到溢留包内,转移前向溢留包通入氩气,液态硅转移后用盖罩盖住溢留包,使溢留包处于封闭环境中;Transfer the liquid silicon after smelting and removing impurities in step (2) to the overflow bag, and argon gas is introduced into the overflow bag before the transfer, and the overflow bag is covered with a cover after the liquid silicon is transferred, so that the overflow bag is in a closed environment middle; 对溢留包抽真空,调整通入溢留包的氩气流量和压力,开启加热装置,所述加热装置包括内部加热器和顶部加热器,对溢留包顶面和内部的液体硅进行加热,加热装置进行自转运动,顶部加热器的温度始终>1450℃,内部加热器的温度从1560℃降至1450℃,降温过程中溢留包始终通入氩气;Vacuum the overflow bag, adjust the argon flow and pressure leading into the overflow bag, and turn on the heating device, which includes an internal heater and a top heater, to heat the top surface of the overflow bag and the liquid silicon inside , the heating device rotates, the temperature of the top heater is always > 1450°C, the temperature of the internal heater drops from 1560°C to 1450°C, and the overflow bag is always filled with argon during the cooling process; 溢留包加热装置开启的同时也开启冷却水,对溢留包四周及底部外表面进行冷却,液态硅从四周向中心凝固,整个过程保持溢留包内部加热器和包内凝固硅料外壁的温差为90~150℃,真空溢留除杂的最后阶段,将溢留包中心的液态硅倒入铸锭构成的水箱内冷却,溢留包内凝固的硅料降温至200℃时进行拆包,取出硅料;When the heating device of the overflow bag is turned on, the cooling water is also turned on to cool the surrounding surface of the overflow bag and the outer surface of the bottom, and the liquid silicon solidifies from the periphery to the center. The temperature difference is 90~150°C. In the final stage of vacuum overflow and impurity removal, the liquid silicon in the center of the overflow bag is poured into a water tank composed of ingots for cooling, and the solidified silicon material in the overflow bag is cooled to 200°C before unpacking. , take out the silicon material; (4)产品分类:经步骤(3)真空溢留除杂得到的硅料按P、B和总金属含量进行分类,分选出符合太阳能级多晶硅标准的硅料。(4) Product classification: The silicon material obtained by vacuum overflow and impurity removal in step (3) is classified according to P, B and total metal content, and the silicon material that meets the solar-grade polysilicon standard is sorted out. 3.根据权利要求2所述的光伏产业链可回收硅料再生提纯工艺,其特征在于,所述步骤(1)中,表面机械处理的喷砂处理包括高压喷射法、离心喷射法、流体力学法,去掉硅料表皮的厚度为:四周和底部表皮为0.1~8 mm,顶部表皮为0.2~10 mm;3. The regeneration and purification process of recyclable silicon materials in the photovoltaic industry chain according to claim 2, characterized in that, in the step (1), the sandblasting treatment of surface mechanical treatment includes high-pressure spraying method, centrifugal spraying method, fluid mechanics method, the thickness of the silicon material skin is removed: the surrounding and bottom skins are 0.1~8 mm, and the top skin is 0.2~10 mm; 湿法清洗中,溶液浸泡的时间为15~120min,所述酸-H2O2水溶液中酸、H2O2和水的体积比为3~10:1:1,所述酸为25~60wt%硫酸或30~40wt%盐酸,所述NH4OH-H2O2水溶液中NH4OH、H2O2和水的体积比为2~8:1:1,所述NH4OH为20~30wt%氨水,所述H2O2的质量分数为25~35%;In wet cleaning, the soaking time of the solution is 15~120min, the volume ratio of acid , H2O2 and water in the acid - H2O2 aqueous solution is 3 ~10:1:1, and the acid is 25~ 60wt% sulfuric acid or 30~40wt% hydrochloric acid, the volume ratio of NH4OH , H2O2 and water in the NH4OH - H2O2 aqueous solution is 2 ~ 8 : 1 :1, and the NH4OH is 20~30wt% ammoniacal liquor, the massfraction of described H 2 O 2 is 25~35%; 所述烘干过程在真空中进行。The drying process is carried out in vacuum. 4.根据权利要求2所述的光伏产业链可回收硅料再生提纯工艺,其特征在于,所述步骤(2)中,所述真空炉包括真空中频炉、真空熔炼炉,加热熔化硅料过程在真空或惰性气体保护下进行;4. The regeneration and purification process of recyclable silicon material in the photovoltaic industry chain according to claim 2, characterized in that in the step (2), the vacuum furnace includes a vacuum intermediate frequency furnace and a vacuum melting furnace, and the process of heating and melting the silicon material Carry out under vacuum or inert gas protection; 所述氩气的纯度>99.99%,氩气的压力为0.2~1Mpa,流量为0.05~0.5m3/h,所述电泳剂包括钙系和/或钠系电泳剂;The purity of the argon gas is >99.99%, the pressure of the argon gas is 0.2-1Mpa, the flow rate is 0.05-0.5m 3 /h, and the electrophoretic agent includes calcium-based and/or sodium-based electrophoretic agents; 所述熔炼坩埚材质为石墨或刚玉;The melting crucible is made of graphite or corundum; 熔炼除杂时间和电泳剂的用量为:电阻率在0.5~3 Ω·cm的硅料,加入电泳剂的量为硅料重量的1/150~1/300,处理时间为5~10 h;电阻率<0.5 Ω·cm的硅料,加入电泳剂的量为硅料重量的1/50~1/150,处理时间为10~15h;电阻率>3 Ω·cm的硅料,加入电泳剂的量为硅料重量的1/300~1/450,处理时间为3~5 h。The smelting impurity removal time and the amount of electrophoretic agent are: for silicon materials with a resistivity of 0.5~3 Ω·cm, the amount of electrophoretic agent added is 1/150~1/300 of the weight of the silicon material, and the treatment time is 5~10 h; For silicon material with resistivity <0.5 Ω·cm, the amount of electrophoretic agent added is 1/50~1/150 of the weight of silicon material, and the treatment time is 10~15h; for silicon material with resistivity>3 Ω·cm, electrophoretic agent is added The amount is 1/300~1/450 of the weight of the silicon material, and the processing time is 3~5 h. 5.根据权利要求2所述的光伏产业链可回收硅料再生提纯工艺,其特征在于,所述步骤(3)中,通入溢留包的氩气经脱油、脱脂和干燥处理,氩气通过从溢留包上部插入的吹气管或溢留包底部通入,液态硅倒入溢留包前通入氩气的压力为0.3~0.6Mpa,流量为0.1~0.6 m³/min,液态硅移入溢留包并加盖后通入的氩气压力为0.1~0.3 MPa,流量为0.05~0.2 m³/min;5. The regeneration and purification process of recyclable silicon materials in the photovoltaic industry chain according to claim 2, characterized in that, in the step (3), the argon gas passed into the overflow bag is deoiled, degreased and dried, and the argon The gas is introduced through the blowing pipe inserted from the upper part of the overflow bag or the bottom of the overflow bag. Before the liquid silicon is poured into the overflow bag, the pressure of argon gas is 0.3~0.6Mpa, and the flow rate is 0.1~0.6 m³/min. After moving into the overflow bag and capping it, the pressure of argon gas is 0.1~0.3 MPa, and the flow rate is 0.05~0.2 m³/min; 溢留包抽真空后真空度保持4000~6000 Pa;After vacuuming the overflow bag, the vacuum degree is maintained at 4000~6000 Pa; 所述内部加热器为硅钼棒加热器或石墨加热器,位于溢留包中心,所述顶部加热器为石墨加热器;The internal heater is a silicon-molybdenum rod heater or a graphite heater, which is located in the center of the overflow bag, and the top heater is a graphite heater; 降温过程的时间为:电阻率在0.5~3 Ω·cm的硅料,时间为5~10 h;电阻率<0.5 Ω·cm的硅料,时间>10h;电阻率>3 Ω·cm的硅料,时间<5 h;The time of the cooling process is: for silicon materials with a resistivity of 0.5~3 Ω cm, the time is 5~10 h; for silicon materials with a resistivity <0.5 Ω cm, the time is >10 h; material, time <5 h; 所述冷却水温度<25℃,水压为0.2~0.6Mpa,流量为30~75 m3/h。The temperature of the cooling water is <25°C, the water pressure is 0.2-0.6Mpa, and the flow rate is 30-75 m 3 /h. 6.根据权利要求2所述的光伏产业链可回收硅料再生提纯工艺,其特征在于,所述步骤(4)中,P≤0.5pptWt、B≤0.3pptWt、总金属含量≤1pptWt的硅料符合太阳能级多晶硅标准。6. The regeneration and purification process of recyclable silicon materials in the photovoltaic industry chain according to claim 2, characterized in that in the step (4), silicon materials with P≤0.5pptWt, B≤0.3pptWt, and total metal content≤1pptWt Meets solar grade polysilicon standards.
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US20210253435A1 (en) * 2018-06-14 2021-08-19 Rosi Treatment process for recycling silicon ingot cutting waste
US12195342B2 (en) * 2018-06-14 2025-01-14 Rosi Treatment process for recycling silicon ingot cutting waste
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CN112195513A (en) * 2020-11-02 2021-01-08 南通大学 Regenerative polycrystalline silicon ingot casting process based on silicon waste classification
CN112359415A (en) * 2020-11-23 2021-02-12 安阳工学院 Manufacturing process of solar P-type polycrystalline silicon wafer
CN115341263A (en) * 2021-05-13 2022-11-15 内蒙古中环协鑫光伏材料有限公司 Crucible bottom material suction process and workpiece suitable for same
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CN117263189A (en) * 2023-09-20 2023-12-22 四川长虹格润环保科技股份有限公司 Method for preparing silicon-carbon composite material by utilizing photovoltaic cut Fang Shi silicon powder
CN117263189B (en) * 2023-09-20 2025-08-19 四川长虹格润环保科技股份有限公司 Method for preparing silicon-carbon composite material by utilizing photovoltaic-cut Fang Shi silicon powder

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