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CN1072367C - Improved photoresist material containing photosensitive component for cathode ray tube and its preparation method - Google Patents

Improved photoresist material containing photosensitive component for cathode ray tube and its preparation method Download PDF

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CN1072367C
CN1072367C CN 96111482 CN96111482A CN1072367C CN 1072367 C CN1072367 C CN 1072367C CN 96111482 CN96111482 CN 96111482 CN 96111482 A CN96111482 A CN 96111482A CN 1072367 C CN1072367 C CN 1072367C
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photoresist
coating
photosensitive component
ketone group
azido
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CN1172971A (en
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童华苏
胡俊民
俞有中
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Chunghwa Picture Tubes Ltd
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Abstract

A photoresist coating is applied to the inner surface of a glass display screen panel of a Cathode Ray Tube (CRT) in the form of a substrate (matrix) having a plurality of spaced areas each surrounded by the black photoresist region using optical micro-development. Phosphors for producing the three primary colors red, green and blue are deposited in these spaced apart regions with the surrounding black photoresist to provide improved video image color contrast. After the photoresist material is deposited on the glass display screen panel, the photosensitive photoresist coating is cured by Ultraviolet (UV) light irradiation with a specific wavelength having a maximum intensity. The photosensitive component of the photoresist coating is selected to have maximum photosensitivity at the maximum intensity wavelength of the UV light source to provide a high quality black matrix to improve video impact image color contrast. The photosensitive component is characterized in that it comprises a ketone group.

Description

用于阴极射线管的含光敏组分的 改良光阻材料及其制备方法Improved photoresist material containing photosensitive component for cathode ray tube and its preparation method

本发明一般而言是关于一种阴极射线管(CRT)型的影像显示屏,尤指一种用以涂布阴极射线管的玻璃显示屏面板内表面以提供视讯影像色彩对比的改良光阻材料。The present invention relates generally to a video display screen of the cathode ray tube (CRT) type, and more particularly to an improved photoresist material for coating the inner surface of a glass display panel of a cathode ray tube to provide color contrast in video images .

光学微显影技术是一种广泛用于CRT玻璃显示屏面板的屏幕处理,以产生红、绿与蓝原色磷光体的方法。此基本屏幕印刷技术典型地涉及一光敏胶体的暴光,其暴光区域在显影后因为不可溶而保留。为了改善色彩对比度,在磷光体屏幕处理之前,先使用一微显影技术在显示荧屏上提供一图案规画,其中未被彩色磷光体所占据的区域在一所谓“黑底化”的程序中涂上一层石墨超细粉末。该磷光体屏幕处理方法涉及将一光阻材料施加在该显示荧屏的内表面上。该光阻材料典型地包括聚乙烯吡咯烷酮(PVP)、4,4′-二叠氮反二苯代乙烯-2,2′-二磺酸二钠盐与水。将此光阻材料黏着至该CRT玻璃显示荧屏上,一直有产率降低的问题。为了克服此问题,将聚乙烯醇(PVA)加入该光阻材料中。PVA的加入提供两个好处。首先,基本上可改善该光阻材料与玻璃显示屏面板间的黏合性。其次,将PVA加入光阻材料中可抑制其含氧量,从而缩短该光阻涂层暴露于紫外光下硬化所需的时间。然而,当PVA加入含PVP的光阻材料中时会遇到几个问题。第一个问题是PVP与PVA间不相容的问题,这会使加入PVA后的涂层很难以均匀厚度薄膜的形式施加在玻璃显示屏面板上,此问题在本案发明人与本案受让人于1995年4月19日所申请的美国专利申请案号08/424,907,案名“INPROVED PHOTORESIST FOR CATHODE RAY TUBES”(1996年5月27日所提台湾专利申请案号85106291,案名“阴极射线管用改良光阻材料及其制备方法”)中有所说明。PVP与PVA间的不相容问题在前述专利申请案中通过将乙烯吡咯烷酮-乙烯醇(VP-VA)共聚物加至该有机粘合剂与光阻材料混合的物中而获解决。Optical microlithography is a method widely used in screen processing of CRT glass display panels to produce red, green and blue primary color phosphors. This basic screen printing technique typically involves exposure of a photosensitive colloid, the exposed areas of which remain after development as insoluble. To improve color contrast, prior to phosphor screen processing, a micrographic technique is used to provide a pattern plan on the display screen in which areas not occupied by colored phosphors are painted in a process called "black matrixing". The upper layer of graphite ultra-fine powder. The phosphor screen processing method involves applying a photoresist material on the inner surface of the display screen. The photoresist typically includes polyvinylpyrrolidone (PVP), 4,4'-diazidestilbene-2,2'-disulfonic acid disodium salt, and water. Adhering the photoresist material to the CRT glass display screen has always had the problem of reduced yield. To overcome this problem, polyvinyl alcohol (PVA) is added to the photoresist. The addition of PVA provides two benefits. First, the adhesion between the photoresist material and the glass display panel is substantially improved. Second, adding PVA to the photoresist suppresses its oxygen content, thereby shortening the time it takes for the photoresist coating to harden upon exposure to UV light. However, several problems are encountered when PVA is added to PVP-containing photoresists. The first problem is the incompatibility between PVP and PVA, which will make it difficult for the coating after adding PVA to be applied on the glass display panel in the form of a film of uniform thickness. U.S. Patent Application No. 08/424,907 filed on April 19, 1995, titled "INPROVED PHOTORESIST FOR CATHODE RAY TUBES" (Taiwan Patent Application No. 85106291 filed on May 27, 1996, titled "Cathode Ray It is explained in the improved photoresist material and its preparation method"). The incompatibility problem between PVP and PVA was solved in the aforementioned patent application by adding vinylpyrrolidone-vinyl alcohol (VP-VA) copolymer to the mixture of organic binder and photoresist material.

常用光阻材料所遇到的另一个问题是光阻材料中二钠盐的水溶性与光敏性问题。典型的是,4,4′-二叠氮反二苯代乙烯-2,2′-二磺酸二钠的水溶性有限,会导致该光阻的光敏性受到限制,因而导致低的视讯影像色彩对比度。在本案发明人与本案受让人所提的另一专利申请案(案名“阴极射线管用具高水溶性光敏组分的改良光阻材料及其制备方法)中说明了此问题,它提供了一种含有较佳水溶性光敏组分的光阻材料,因而允许含有较高浓度的光敏组分,从而获得光敏性较佳的光阻材料。Another problem encountered by commonly used photoresist materials is the water solubility and photosensitivity of disodium salt in photoresist materials. Typically, the limited aqueous solubility of disodium 4,4'-diazidostilbene-2,2'-disulfonate results in limited photosensitivity of the photoresist, resulting in poor video image color contrast. This problem has been explained in another patent application filed by the inventor of this case and the assignee of this case (case name "improved photoresist material with highly water-soluble photosensitive component for cathode ray tube and preparation method thereof), which provides A photoresist material that contains a better water-soluble photosensitive component, thus allowing a higher concentration of the photosensitive component to obtain a photoresist material with better photosensitivity.

在将该光阻材料施加在CRT玻璃显示屏面板的内表面后,以特定波长的紫外光(UV)照射该光阻材料,以活化其光敏成分而使光阻层硬化。另一个常用光阻材料所遇到的问题来自该光阻材料的光敏组分与其硬化所用UV光的特性。一般而言,在前述黑底化应用中一般是使用在365nm、405nm及440nm具有最大强度的水银UV光源。然而,该光阻材料(4,4′-二叠氮反二苯代乙烯-2,2′-二磺酸二钠)的光敏组分的最大光敏性在335nm处。此最大强度与最大光阻材料光敏性的入射UV光波长的差异造成光阻涂层中的不均匀性与不规则性,因而使视讯影像色彩对比度不佳。After the photoresist material is applied on the inner surface of the CRT glass display panel, the photoresist material is irradiated with ultraviolet light (UV) of a specific wavelength to activate its photosensitive components to harden the photoresist layer. Another problem encountered with conventional photoresists arises from the nature of the photosensitive component of the photoresist and the UV light used for its curing. Generally speaking, mercury UV light sources with maximum intensity at 365nm, 405nm and 440nm are generally used in the aforementioned black matrix application. However, the photosensitive component of this photoresist (disodium 4,4'-diazidestilbene-2,2'-disulfonate) has a maximum photosensitivity at 335 nm. The difference between this maximum intensity and the wavelength of incident UV light at which the photoresist material is most photosensitive causes non-uniformity and irregularities in the photoresist coating, resulting in poor color contrast in the video image.

本案说明了已知技术的前述限制,本发明则在光阻涂层中提供一种光敏组分,使该光阻涂层对入射于其上的UV光具有改善的光敏性,以活化并硬化该涂层,改进显示屏面板上的视讯影像色彩对比度。While this case illustrates the aforementioned limitations of the known technology, the present invention provides a photosensitive component in a photoresist coating that has improved photosensitivity to UV light incident thereon to activate and harden The coating improves the color contrast of video images on display panels.

为此,本发明目的之一是提供一种用于涂布如CRT等影像显示屏装置玻璃显示屏面板内表面的改良光阻材料。Therefore, one object of the present invention is to provide an improved photoresist material for coating the inner surface of a glass display panel of an image display device such as a CRT.

本发明的另一目的是提供一种用于影像显示屏,装置玻璃显示屏面板内表面的光阻材料,它提供高度光敏性从而改进视讯影像色彩对比度。Another object of the present invention is to provide a photoresist material for the inner surface of a glass display panel of a video display device, which provides a high degree of photosensitivity to improve the color contrast of a video image.

本发明的又一目的是提供一种用于涂布CRT玻璃显示屏面板内表面的光阻材料,它具有一种光敏组分,该光敏组分在用以硬化该光阻材料的UV光的最大强度波长处具有改良的光敏性。Yet another object of the present invention is to provide a photoresist for coating the inner surface of a CRT glass display panel, which has a photosensitive component that reacts in the presence of UV light used to harden the photoresist. Improved photosensitivity at the wavelength of maximum intensity.

本发明意在对玻璃影像显示屏面板内表面上光阻涂层进行改进,其中该光阻涂层包含一种对于入射于其上的紫外光有反应性的光敏组分,以硬化该光阻涂层,该入射UV光的特征在于在一特定波长具有最大强度,该改进是将一种具有酮基的光敏组分加至该光阻涂层中,该具有酮基的光敏组分的特征在于在该入射UV光的最大强度处或附近具有峰值敏感性。The present invention is directed to the improvement of photoresist coatings on the interior surfaces of glass image display panels, wherein the photoresist coating includes a photosensitive component reactive to ultraviolet light incident thereon to harden the photoresist Coating, the incident UV light is characterized by having a maximum intensity at a specific wavelength, the improvement is the addition of a photosensitive component having a ketone group to the photoresist coating, the photosensitive component having a ketone group is characterized by By having a peak sensitivity at or near the maximum intensity of the incident UV light.

所附的权利要求书叙述了本发明特征的新颖特性。然而,参阅一较佳实施例的详细说明与附图,将更好地理解本发明本身以及其进一步的目的与优点,该附图根据本发明的原理,在其玻璃显示屏面板内表面上有一光阻涂层的CRT纵向剖面图。The appended claims set forth the novel features which characterize the invention. However, the invention itself and its further objects and advantages will be better understood with reference to the detailed description of a preferred embodiment and the accompanying drawings which, in accordance with the principles of the invention, have a glass display panel on the inner surface thereof A longitudinal cross-section of a CRT with a photoresist coating.

图1是一根据本发明原理的CRT10截面图,该CRT中有以磷光体为基础的光阻涂层24。在以下讨论中,“显示荧屏”、“显示屏面板”及“面板”等词交替使用。CRT10包含具有前凸形面板或显示屏面板14的密封玻璃封套12、尾颈部分18、及中间漏斗状部分16。该光阻涂层24包含几个不连续的磷光沉积体或元件,当电子束入射到其上时发光,从而在显示幕面板上产生视讯影像。彩色CRT10包含三个电子束22,射向该CRT玻璃显示屏面板14并聚集于其上。位于CRT玻璃封套12的尾颈部分18内,有几个电子枪20,它们典型地并排排列,发出电子束22射向该显示荧屏14。这些电子束22用一磁性偏转系统(mag-neticdeflection yoke)作垂直与水平偏转,然后一起通过以磷光体为基础的光阻涂层24。为了简化,该磁性偏转系统未示于图中。影罩26与磷光体荧屏14相隔一定距离安置,影罩26上有许多隔开的供电子束通过的狭缝,影罩26的四周有裙状部分28。1 is a cross-sectional view of a CRT 10 having a phosphor-based photoresist coating 24 therein in accordance with the principles of the present invention. In the following discussion, the terms "display screen," "display panel," and "panel" are used interchangeably. CRT 10 includes a sealed glass envelope 12 having a front convex or display panel 14 , a rear neck portion 18 , and a central funnel portion 16 . The photoresist coating 24 comprises several discrete phosphorescent deposits or elements that emit light when an electron beam is incident thereon, thereby producing a video image on the display screen panel. The color CRT 10 contains three electron beams 22 directed toward and focused on the CRT glass display panel 14 . Located within the neck portion 18 of the CRT glass envelope 12 are several electron guns 20, typically arranged side by side, which emit electron beams 22 towards the display screen 14. These electron beams 22 are vertically and horizontally deflected by a mag-netic deflection yoke and pass together through a phosphor-based photoresist coating 24 . For simplicity, the magnetic deflection system is not shown in the figure. The shadow mask 26 is arranged at a certain distance from the phosphor screen 14. There are many separated slits for electron beams to pass through the shadow mask 26. There is a skirt portion 28 around the shadow mask 26.

该影罩的裙状部分28固定在该影周围的影罩装配固定物30上。该影罩装配固定物30附着在CRT玻璃封套12的内表面,且可包含传统的附件与定位结构,如罩框与装置弹簧,为简化之故也未示于图中。该影罩装配固定物30可以传统方式(如焊接或玻璃熔接)附着在该CRT玻璃封套12的内表面上,且该影罩26可以传统方式附着到该装配固定物。位于该显示荧屏14外表面上的是抗静电/抗反射涂层32。The skirt portion 28 of the shadow mask is secured to mask mounting fixtures 30 around the shadow. The shadow mask assembly fixture 30 is attached to the inner surface of the CRT glass envelope 12, and may include conventional accessories and positioning structures, such as a mask frame and device springs, which are not shown in the figure for the sake of simplification. The shadow mask mounting fixture 30 can be attached to the inner surface of the CRT glass envelope 12 in a conventional manner, such as welding or glass fusing, and the shadow mask 26 can be attached to the mounting fixture in a conventional manner. Located on the outer surface of the display screen 14 is an antistatic/antireflective coating 32 .

如上所述,常用的光阻材料含有PVA、PVP、以及如4,4′-二叠氮反二苯代乙烯-2,2′-二磺酸二钠之类光敏与二钠盐,后者具有以下分子式4,4′-二叠氮反二苯代乙烯-2,2′-二磺酸二钠As mentioned above, commonly used photoresist materials contain PVA, PVP, and photosensitive and disodium salts such as 4,4'-diazidostilbene-2,2'-disodium disulfonate, the latter has the following molecular formula Disodium 4,4′-diazide trans-stilbene-2,2′-disulfonate

此钠盐在335nm具有最大的光敏感度。硬化该光阻材料的UV光源一般为汞水源,它在365nm、405nm与440nm强度最大。因为该二钠盐的最大光敏性并非发生在该UV光源的最大强度波长,因此使光阻涂层的硬化不佳,且呈现于显示屏面板上的视讯影像色彩对比度不佳。This sodium salt has a maximum photosensitivity at 335nm. The UV light source used to harden the photoresist is generally a mercury water source, which is most intense at 365nm, 405nm and 440nm. Because the maximum photosensitivity of the disodium salt does not occur at the maximum intensity wavelength of the UV light source, the hardening of the photoresist coating is poor and the color contrast of the video image presented on the display panel is poor.

根据本发明,以含酮基的化合物取代常用的二钠盐如4,4′-二叠氮反二苯代乙烯-2,2′-二磺酸二钠,以改善光敏感度。用作该光阻涂层的光敏组分的酮基取代化合物的实例包括:

Figure C9611148200061
(360nm)2,2′-(1,5-五-3-酮基-1,4-二烯基)双(5-叠氮基苯磺酸)二钠
Figure C9611148200062
(356nm)2,6-二(对叠氮基亚苄基)环己酮
Figure C9611148200063
(356nm)2,6-二(对叠氮基亚苄基)-4-甲基环己酮2,5-双(4-叠氮基-2-磺基亚苄基钠)环戊酮(360nm)4,4′-二叠氮基亚苄基丙酮-2,2′-二磺酸二钠盐According to the present invention, the commonly used disodium salt such as 4,4'-diazide-stilbene-2,2'-disulphonic acid disodium is replaced by a ketone group-containing compound to improve photosensitivity. Examples of keto-substituted compounds useful as the photosensitive component of the photoresist coating include:
Figure C9611148200061
(360nm) Disodium 2,2′-(1,5-penta-3-keto-1,4-dienyl)bis(5-azidobenzenesulfonate)
Figure C9611148200062
(356nm) 2,6-bis(p-azidobenzylidene)cyclohexanone
Figure C9611148200063
(356nm) 2,6-bis(p-azidobenzylidene)-4-methylcyclohexanone 2,5-Bis(4-azido-2-sulfobenzylidene sodium)cyclopentanone (360nm) 4,4′-diazidobenzylideneacetone-2,2′-disulfonic acid disodium salt

所列的化合物仅供作为根据本发明的改良光敏性光阻材料的实例,而并不代表所有用于本发明光阻材料涂层中的含酮基光敏性化合物。The listed compounds are only examples of the improved photosensitive photoresist material according to the present invention, and do not represent all ketone-containing photosensitive compounds used in the photoresist coating layer of the present invention.

最适合的黑底化光学微显影技术波长为365nm,而常用的光敏化合物4,4’-二叠氮反二苯代乙烯-2,2′-二磺酸二钠在335nm具有最大光敏感度,因此无法进行所需效果的光学微显影。本发明利用光阻材料的光敏组分中的酮基(-C=O)使光敏性移向较长的波长。在每一个上列光阻材料的光敏组分后的括弧内列出其对入射UV光具最大光敏性的特征波长。从上列最大光敏性波长可知,每一个上列化合物的光敏性均比常用光阻材料中的光敏化合物大。在一优选实施例中,该光敏组分的含量介于该光阻涂料重量的1-30wt%。The most suitable wavelength for black background optical micro-development technology is 365nm, and the commonly used photosensitive compound 4,4'-diazide transstilbene-2,2'-disodium disulfonate has the maximum light sensitivity at 335nm, Optical microdevelopment to the desired effect is therefore not possible. The present invention utilizes the ketone group (-C=O) in the photosensitive component of the photoresist material to shift the photosensitivity to a longer wavelength. The characteristic wavelength of maximum photosensitivity to incident UV light is listed in parentheses after the photosensitive component of each photoresist material listed above. From the maximum photosensitivity wavelength listed above, it can be known that the photosensitivity of each of the compounds listed above is greater than that of photosensitive compounds in common photoresist materials. In a preferred embodiment, the content of the photosensitive component is 1-30wt% of the weight of the photoresist coating.

用本发明含酮基化合物的光阻涂料制备阴极射线管的玻璃显示屏面板内表面时,可如下实施。首先形成包含聚乙烯吡咯烷酮(PVP)与水的涂料溶液;再将聚乙烯醇(PVA)加入该涂料溶液中,以改善该涂料溶液黏合至该玻璃影像显示屏面板的黏合性;然后将本发明的具有酮基的光敏性二钠盐加入该涂料溶液中;进一步硬化该涂层,其中该UV光源最大强度所在的波长与本发明含酮基化合物的峰值UV光敏性所在波长基本对应,因此可大幅提高涂层的光敏性。When the photoresist coating containing the ketone compound of the present invention is used to prepare the inner surface of the glass display panel of a cathode ray tube, it can be carried out as follows. Firstly, a coating solution comprising polyvinylpyrrolidone (PVP) and water is formed; then polyvinyl alcohol (PVA) is added to the coating solution to improve the adhesion of the coating solution to the glass image display panel; then the present invention is applied The photosensitive disodium salt with ketone group is added in the coating solution; the coating is further hardened, wherein the wavelength of the maximum intensity of the UV light source corresponds substantially to the wavelength of the peak UV photosensitivity of the ketone group-containing compound of the present invention, so it can be Significantly increases the photosensitivity of the coating.

因此所显示的是利用光学微显影技术将光阻材料涂层以具有多个相隔区域的基体(matrix)形式施加在阴极射线管(CRT)玻璃显示屏面板的内表面上,其中每一个相隔区域均被该黑光阻材料区所包围。在光阻涂层沉积于该玻璃显示屏面板上后,利用在特定波长具有最大强度的紫外(UV)光照射,使该光敏性光阻涂层硬化。该光阻涂层的光敏组分经过选择,使得它在该UV光的最大强度波长具有最大光敏性,从而提供高品质的黑底,改善视讯影像色彩对比。该光敏组分的特征在于含有一酮基。Thus shown is a photoresist coating applied to the inner surface of a cathode ray tube (CRT) glass display panel using optical micrographic techniques in the form of a matrix having a plurality of spaced apart areas, each spaced apart are surrounded by the black photoresist material area. After the photoresist coating is deposited on the glass display panel, the photosensitive photoresist coating is hardened by irradiation with ultraviolet (UV) light having a maximum intensity at a specific wavelength. The photosensitive component of the photoresist coating is selected such that it has maximum photosensitivity at the wavelength of maximum intensity of the UV light, thereby providing a high quality black matrix and improving video image color contrast. The photosensitive component is characterized by containing a ketone group.

本发明的特殊实施例已在上文中表示与说明,本行业熟练技术人员所做的各种修改,都包含在本发明的宽广范围之内。因此,权利要求书涵盖了所有本发明精神与范围内的修饰与修改。前述说明与附图中所描述的仅是举例说明,而非用以限制。本发明的确实范围是在以下权利要求书所限定的。While particular embodiments of the invention have been shown and described above, various modifications by those skilled in the art are intended to be embraced within the broad scope of the invention. Accordingly, the appended claims cover all such modifications and modifications as are within the spirit and scope of this invention. What has been described in the foregoing description and accompanying drawings is by way of illustration only and not by way of limitation. The true scope of the invention is defined in the following claims.

Claims (2)

1. improvement photoresistance coating that is used for cathode-ray tube (CRT), it is characterized in that, it comprises polyvinylpyrrolidone PVP, polyvinyl alcohol (PVA) and a kind of photosensitive component with ketone group, this has the ketone group photosensitive component and is selected from 2,2 '-(1,5-five-3-ketone group-1, the 4-dialkylene) two (5-triazobenzene sulfonic acid) disodium, 2,6-two (to the azido benzal) cyclohexanone, 2,6-two (to the azido benzal)-4-methyl cyclohexanone, 2, two (4-azido-2-sulfo group benzal sodium) cyclopentanone of 5-, with 4,4 '-diazido BENZYLIDENE ACETONE-2,2 '-disulfonic acid disodium salt, the content of this photosensitive component is between the 1-30wt% of this photoresistance coating weight.
2. method for preparing the used photoresistance coating of glass image display screen panel inside surface that is used for cathode-ray tube (CRT), this method comprises the following steps:
Formation comprises the coating solution of polyvinylpyrrolidone (PVP) and water:
Polyvinyl alcohol (PVA) (PVA) is added in this coating solution, to improve the adhesion of this coating solution bonding to this glass image display screen panel;
To be selected from 2,2 '-(1,5-five-3-ketone group-1, the 4-dialkylene) two (5-triazobenzene sulfonic acid) disodium, 2,6-two (to the azido benzal) cyclohexanone, 2,6-two (to the azido benzal)-4-methyl cyclohexanone, 2, two (4-azido-2-sulfo group benzal sodium) cyclopentanone of 5-, with 4,4 '-diazido BENZYLIDENE ACETONE-2,2 '-the photosensitivity disodium salt with ketone group of disulfonic acid disodium salt adds in this coating solution;
With light source UV this photoresistance coating that hardens.
CN 96111482 1996-08-02 1996-08-02 Improved photoresist material containing photosensitive component for cathode ray tube and its preparation method Expired - Fee Related CN1072367C (en)

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