CN107167135A - A kind of scanning mirror points to high-precision static state angle measurement method - Google Patents

Abstract

The invention discloses a scanning mirror pointing high-precision static angle measurement method. In the method, a high-precision gyro goniometer is installed and fixed on the rotating shaft of the scanning mirror. Under the action of the scanning controller, the gyro goniometer and the scanning mirror Under the drive of the torque motor, it is synchronously and continuously moving at a uniform speed lower than 1°/s, so as to obtain the motion angle data of the scanning mirror under this speed condition. During the measurement, the angle measurement data of the inductosynchronizer component and the angle measurement data of the laser gyroscope are transmitted to the peripheral computer, and the computer compares the two sets of angle measurement data, and corrects the angle measurement data of the inductosynchronizer component through a suitable algorithm . The beneficial effect of the invention is that the frequency of data collection can reach more than 2000 Hz, the measurement range can reach more than 10°, the measurement accuracy can reach 0.3" (3σ), and the test angle interval is 1.8". After correction, the pointing accuracy of the scanning mirror reaches 0.5″ (3σ).

Description

A Scanning Mirror Pointing High Precision Static Angle Measurement Method

technical field

The invention relates to an online high-precision static angle measurement method of a space scanning mechanism, which belongs to the technical field of angle measurement of a scanning mechanism.

Background technique

The space high-precision scanning mechanism generally uses a circular induction synchronizer as an angle sensor, and the circular induction synchronizer is composed of a rotor and a stator. When the scanning mechanism is assembled, the rotor and stator of the circular induction synchronizer are installed on the mechanism frame and the rotating shaft respectively. The angle measurement signal of the induction synchronizer is amplified and converted by the circuit, and then transmitted to the controller. The induction synchronizer and its information processing circuit, the motor and its control circuit constitute a complete closed-loop control system. At the same time, due to the deviation of the inductosynchronizer itself, the comprehensive static error may exceed 1″ (1σ), resulting in the angular measurement accuracy of the inductosynchronizer components not meeting the measurement and control accuracy requirements of the actual scanning mirror pointing. The precision is tested, and the test results are used to correct the precision of the inductive synchronizer components, so that the pointing precision of the scanning mirror is further improved.

At present, the angle measurement of space high-precision scanning mechanism generally uses high-precision theodolite for static angle measurement. When using a high-precision theodolite for static angle measurement, the accuracy is generally lower than 1″ (1σ) due to the influence of error factors such as the instrument itself and readings. At the same time, due to the influence of time and cost factors, the density of the theodolite for static angle measurement will not Very high, that is, the angle interval between two adjacent measurement points is relatively large. The angle value between two adjacent points is derived by interpolation, so it is impossible to obtain continuous high-precision angle measurement values, which is not conducive to the realization of high-precision angle The correction algorithm cannot further improve the pointing accuracy of the scanning mirror.

Contents of the invention

The object of the present invention is to propose a laser gyro goniometer online test method on the basis of the pointing accuracy of the scanning mirror of the existing high-precision scanning mechanism in space, to realize high-precision, high-density, and large-scale static measurement of the scanning mirror pointing, and to measure The results are used to correct the precision of the inductosynchronizer assembly, which can obviously improve the pointing precision of the scanning mirror.

The technical solution of the present invention is to install and fix the high-precision gyro goniometer on the rotating shaft of the scanning mirror. °/s at a constant speed, so as to obtain the motion angle data of the scanning mirror under this speed condition. During the measurement, the angle measurement data of the inductosynchronizer components and the angle measurement data of the laser gyroscope are transmitted to the peripheral computer, and the computer compares the two sets of angle measurement data, and corrects the angle measurement data of the inductosynchronizer components through a suitable algorithm . The corrected angle measurement data of the inductosynchronizer assembly is reused for closed-loop control, which significantly improves the pointing accuracy of the scanning mirror.

The beneficial effect of the invention is that the frequency of data collection can reach more than 2000 Hz, the measurement range can reach more than 10°, the measurement accuracy can reach 0.3" (3σ), and the test angle interval is 1.8". After correction, the pointing accuracy of the scanning mirror reaches 0.5″ (3σ).

The high-precision scanning mechanism static angle measurement method is realized by a device composed of a gyro goniometer, an inductive synchronizer and its processing circuit, a scanning mirror and its mechanism components, a scanning controller, and a control computer.

The gyro goniometer is composed of a laser gyro and its fixed tooling, and a gyro test computer.

Description of drawings

Figure 1 is a layout diagram of the high-precision dynamic angle measurement method for scanning mirror movement.

In Fig. 1, 1 is a laser gyro; 2 is a scanning mechanism frame; 3 is a scanning mirror and its rotating shaft; 4 is an inductive synchronizer.

Fig. 2 is a flow chart of data processing of the high-precision dynamic angle measurement method for scanning mirror movement.

detailed description

The specific implementation of the present invention will be described in detail below in conjunction with examples.

As shown in Fig. 1 and Fig. 2, "a high-precision dynamic angle measurement method for scanning mirror motion" of the present invention is embodied by an angle measurement device composed of a gyro goniometer and a computer system.

First, the gyro goniometer 1 composed of a high-precision laser gyro and its fixed tooling is installed and fixed on the rotating shaft of the scanning mirror; the scanning mechanism frame 2 supports the scanning mirror and its rotating shaft 3, and the scanning controller drives the torque motor and the scanning mirror to move. The induction synchronizer 4 is used as an angle feedback element. The scanning controller sends motion control instructions according to the requirements of the target angular position, and the scanning mirror performs closed-loop movement under the control of the scanning controller. Since the gyro goniometer is fixedly connected to the rotating shaft, the gyro goniometer and the rotating part of the scanning mechanism are driven by the torque motor to move continuously and slowly at a uniform speed. It can be considered that the movement angle value of the gyro goniometer and the induction synchronizer is identical. The gyro and the induction synchronizer perform angle sampling synchronously, and the angle measurement data of the gyro are sent to the gyro test computer in real time after being processed by the circuit; the angle measurement data of the induction synchronizer are processed by the circuit, and then sent to the scanning controller in real time. Compare and correct the angle data of the induction synchronizer and the angle data of the laser gyroscope with a suitable algorithm, and bring the correction result into the angle measurement feedback data of the induction synchronizer component obtained by the scan controller, and measure the angle of the induction synchronizer component The feedback data is corrected and reused for the scanning mirror pointing feedback control, thus realizing the high-precision static angle test and correction of the scanning mirror pointing, and significantly improving the pointing accuracy of the scanning mirror.

Claims (1)

1. A scanning mirror points to a high-precision static angle measurement method, and the method is realized by a test device composed of a gyro goniometer and a host system; the test device includes a gyro goniometer, an inductive synchronizer and a processing circuit thereof , a scanning mirror and its mechanism components, a scanning controller and a control computer; it is characterized in that the method is as follows: Install and fix the gyro goniometer on the rotating shaft of the scanning mirror, and under the action of the scanning controller, the gyro goniometer and the scanning mirror are driven by the torque motor synchronously and continuously and slowly at a uniform speed below 1°/s , so as to realize the motion angle data of the scanning mirror under this speed condition; because the speed is very low, the influence of the high-frequency harmonic error of the inductive synchronizer can be ignored, and the dynamic test data can be directly used as the static test result, so as to realize the high precision of the scanning mirror pointing , high-density and fast measurement; during measurement, the angle measurement data of the induction synchronizer component and the angle measurement data of the laser gyroscope are transmitted to the peripheral computer, and the computer compares the two sets of angle measurement data, and synchronizes the induction through a suitable algorithm The angle measurement data of the sensor component is corrected. The corrected angle measurement data of the inductosynchronizer assembly is reused for closed-loop control, which significantly improves the pointing accuracy of the scanning mirror.