CN106849898A - A kind of 17% relative bandwidth low-loss SAW filter and preparation method thereof - Google Patents
A kind of 17% relative bandwidth low-loss SAW filter and preparation method thereof Download PDFInfo
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- CN106849898A CN106849898A CN201611148487.3A CN201611148487A CN106849898A CN 106849898 A CN106849898 A CN 106849898A CN 201611148487 A CN201611148487 A CN 201611148487A CN 106849898 A CN106849898 A CN 106849898A
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- 238000002360 preparation method Methods 0.000 title claims description 15
- 239000000463 material Substances 0.000 claims abstract description 27
- 229910003327 LiNbO3 Inorganic materials 0.000 claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 11
- 238000000576 coating method Methods 0.000 claims abstract description 11
- 230000002745 absorbent Effects 0.000 claims abstract description 5
- 239000002250 absorbent Substances 0.000 claims abstract description 5
- 239000010949 copper Substances 0.000 claims description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 241000826860 Trapezium Species 0.000 claims description 9
- 239000007772 electrode material Substances 0.000 claims description 8
- 239000011358 absorbing material Substances 0.000 claims description 7
- 210000003746 feather Anatomy 0.000 claims description 3
- 230000004044 response Effects 0.000 abstract description 7
- 238000007493 shaping process Methods 0.000 abstract description 4
- 230000008878 coupling Effects 0.000 abstract description 3
- 238000010168 coupling process Methods 0.000 abstract description 3
- 238000005859 coupling reaction Methods 0.000 abstract description 3
- 238000005259 measurement Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6406—Filters characterised by a particular frequency characteristic
- H03H9/6413—SAW comb filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/026—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the tuning fork type
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The invention discloses a kind of 17% relative bandwidth low-loss SAW filter, including wafer material, wafer material is provided with trapezoidal sound table transducer and surface coating absorbent treatment, and trapezoidal sound table transducer includes series resonance arm and parallel resonance arm.The wafer material for using is 15 ° of YX LiNbO3, its electromechanical coupling factor (k2) it is more than 20%, it is adaptable to prepare broadband low loss device；Design structure uses trapezoidal design structure, and it obtains the response of wave filter by the use of sound wave face wave resonator as the base impedance element of ladder type topology.Outside the band of the passband of the resonant frequency of series arm resonator and the anti-resonance frequency shaping filter of parallel arm, the anti-resonance frequency of series arm resonator and the resonant frequency shaping filter of parallel arm.The low-loss SAW filter of 3dB relative bandwidths 17% is realized, wherein emulation frequency response figure is as shown in figure 3,3dB relative bandwidths are 19%；Actual measurement device center frequency is 415M, and three dB bandwidth is 70.6M, and relative bandwidth is 17%, and 3.6dB, passband fluctuation 0.8dB is lost.
Description
Technical field
The present invention relates to a kind of design of SAW filter and technology of preparing, more particularly to a kind of 17% relative bandwidth low-loss
SAW filter and preparation method thereof.
Background technology
With information system requirement more and more higher, communication passes voice, image and develops into biography video etc., its output transmission from original
It is wide that MHz magnitudes even tens MHz magnitudes are changed into from kHz magnitudes.Future communications will also be towards two-forty, Large Copacity, highly sensitive
Degree direction is developed.
At present, SAW filter realizes that broadband mainly uses 128 ° of-LiNbO3, YZ-LiNbO3 and 41 ° of three kinds of-LiNbO3
Substrate material.Wherein 128 °-LiNbO3 and YZ-LiNbO3 materials can realize that 3dB maximum relative bandwidths are about 60%, but needs
With using, and larger (16~20dB) is lost, meanwhile, the upper and lower side width of same finger of sector design structure of use is not
One, for medium, high frequency device, finger width is smaller, and technology difficulty is larger；41 ° of-LiNbO3 materials can realize compared with low-loss (3~
5dB), without matching, but its 3dB maximum relative bandwidths are only about 10%.Therefore, it is now main to realize that broadband is low using LC wave filters
The index request of loss, but LC wave filter volumes are larger, usually 25mm*9mm or 15mm*8mm, rectangular degree is poor, and needs anti-
Polyphony is tried.
The content of the invention
It is an object of the invention to provide a kind of with small, small volume the 17% relative bandwidth low-loss sound table filter of wide, loss
Ripple device and preparation method thereof.
The purpose of the present invention is achieved through the following technical solutions：
17% relative bandwidth low-loss SAW filter of the invention, including wafer material, the wafer material are provided with
Sound table transducer and surface coating absorbent treatment, the sound table transducer designs are trapezium structure, including series resonance arm and parallel connection
Resonance arm, one end of the series resonance arm is provided with input electrode, the other end and is provided with output electrode, under the parallel resonance arm
End is provided with earth electrode.
The preparation method of above-mentioned 17% relative bandwidth low-loss SAW filter of the invention, comprises the following steps：
Step A, from wafer material；
Step B, design structure is the sound table transducer of trapezium structure on the wafer material；
Step C, the electrode material that sound table transducer is used is copper film；
Step D, surface coating sound-absorbing material.
As seen from the above technical solution provided by the invention, the low damage of 17% relative bandwidth provided in an embodiment of the present invention
Consumption SAW filter and preparation method thereof, its with it is wide, small, small volume is lost, it is adaptable to transceiver channel radio-frequency front-end filter or
Intermediate frequency filtering.
Brief description of the drawings
Fig. 1 is the entirety of 17% relative bandwidth low-loss SAW filter provided in an embodiment of the present invention and preparation method thereof
Structural representation.
Fig. 2 is the structural representation of ladder-type filter in the embodiment of the present invention；
Fig. 3 is emulation frequency response figure in the embodiment of the present invention；
Fig. 4 is actual measurement frequency response figure in the embodiment of the present invention.
Specific embodiment
With reference to the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Ground description, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Based on this
Inventive embodiment, the every other implementation that those of ordinary skill in the art are obtained under the premise of creative work is not made
Example, belongs to protection scope of the present invention.
17% relative bandwidth low-loss SAW filter of the invention, its preferably specific embodiment is：
Including wafer material, the wafer material is provided with sound table transducer and surface coating absorbent treatment, and the sound table is changed
Energy device is designed as trapezium structure, including series resonance arm and parallel resonance arm, and one end of the series resonance arm is provided with input electricity
Pole, the other end are provided with output electrode, and the lower end of the parallel resonance arm is provided with earth electrode.
The preparation method of 17% relative bandwidth low-loss SAW filter of the invention, its preferably specific embodiment
It is：
Comprise the following steps：
Step A, from wafer material；
Step B, design structure is the sound table transducer of trapezium structure on the wafer material；
Step C, the electrode material that sound table transducer is used is copper film；
Step D, surface coating sound-absorbing material.
In the step A, the wafer material for using is 15 ° of YX-LiNbO3, wafer thickness is 0.40~0.65 μm, the back side
360~No. 1000 feather pluckings.
In the step B, trapezium structure series is Pyatyi, comprising three series resonance arms and two parallel resonance arms, its
In：
The wavelength of the first series resonance arm is λ s1, and aperture is 25~31 λ s1, refers to that radical, for 127~137, reflects lattice wave
A length of λ R1=λ s1, refer to that radical is 15~22；
The wavelength of the second series resonance arm is λ s2, and aperture is 25~31 λ s2, refers to that radical, for 95~110, reflects lattice wave
λ R2=λ s2 long, refer to that radical is 15~22；
The wavelength of the 3rd series resonance arm is λ s3, and aperture is 28~31 λ s3, refers to that radical, for 127~137, reflects lattice wave
λ R3=λ s3 long, refer to that radical is 15~22；
The wavelength of the first parallel resonance arm is λ p1, and aperture is 15~20 λ p1, refers to that radical, for 115~130, reflects lattice wave
λ R1=λ p1 long, refer to radical for 5~18, false fingering line width and length weight；
The wavelength of the second parallel resonance arm P2 is λ p2, and aperture is 15~20 λ p2, refers to that radical is 115~130, reflecting grating
Wavelength X R2=λ p2, refer to radical for 5~18, false fingering line width and length weight.
In the step C, the thickness wavelength ratio of copper film electrode material is 2%~9%.
In the step D, the thickness of the surface coating sound-absorbing material for using is 0.5~5 μm.
17% relative bandwidth low-loss SAW filter of the invention and preparation method thereof, is filtered by improving low-loss sound table
The relative bandwidth of ripple device, the problems such as outer need to being matched to solve traditional big bandwidth SAW filter, be lost big, expands surface acoustic wave filter
Ripple device range of application.SAW filter can realize broadband, low-loss, to replace LC wave filters, greatly reduce volume, beneficial to whole machine
The miniaturization of system, meanwhile, SAW filter uses semiconductor technology, exempts from debugging, and one is improve relative to LC wave filters
Cause property and reliability, in terms of index, sound table has rectangular degree higher, more preferable to being had using the spurious signal near frequency range
Inhibition.
Wafer material of the invention uses 15 ° of YX-LiNbO3Material, its electromechanical coupling factor (k2) it is more than 20%, it is adaptable to
Prepare broadband low loss device；Design structure uses trapezoidal design structure, and the schematic diagram of trapezium structure is as shown in figure 1, it is utilized
Sound wave face wave resonator obtains the response of wave filter as the base impedance element of ladder type topology.Series arm resonator
The passband of the anti-resonance frequency shaping filter of resonant frequency and parallel arm, the anti-resonance frequency and parallel arm of series arm resonator
Resonant frequency shaping filter band outside.Trapezoidal design structure has the advantages that to be lost that small, rectangular degree is high and small volume, can lead to
The difference regulation bandwidth of the resonant frequency of series arm resonator and the anti-resonance frequency of parallel arm is overregulated, broadband low loss is prepared
SAW filter.Electrode material uses copper film, Cu to belong to low velocity section bar material as Au, Ag material, and copper film can be effective
The speed of LOVE ripples is reduced, while increasing electromechanical coupling factor and because Cu membrane conductivities are high, in the case of relatively thin Cu films,
The ohmic loss of device will not also increase, therefore, relative bandwidth can be increased using copper film, reduce loss is adapted to preparation broadband low
Loss SAW filter.
Method as shown in the present invention, the method such as weighting and coating sound-absorbing material is referred to by design and processes optimization, vacation
Treatment, realizes the low-loss SAW filter of 3dB relative bandwidths 17%, wherein emulation frequency response figure is as shown in figure 3,3dB is relative
With a width of 19%；Actual measurement frequency response figure is as shown in figure 4, survey device center frequency for 415M, three dB bandwidth is 70.6M, relative bandwidth
It is 17%, 3.6dB, passband fluctuation 0.8dB is lost.
Specific embodiment：
The overall structure of 17% relative bandwidth low-loss SAW filter is as shown in Figure 1：
Trapezoidal sound table transducer 102, surface coating absorbent treatment 103 including wafer material 101, copper grating array,
Wherein specific requirement is as follows：
(1) wafer material is 15 ° of YX-LiNbO3, wafer thickness is 0.40~0.65 μm, the feather plucking of the back side 360~1000.
(2) the trapezoidal design structure of sound table transducer 102 is trapezoidal design structure, and its structure chart is as shown in Figure 2.Trapezoidal sound table
Transducer 102 can be according to specific targets requirement and the series and combination composing mode of packaged type selective resonance device.
(3) functional membrane is copper film, and thickness wavelength ratio (h/ λ) is 2%~9%.
(4) surface coating layer is sound-absorbing material, and thickness is 0.5~5 μm.
Trapezoidal design structural representation of the present invention is as shown in Fig. 2 it mainly includes five parts：Input electrode 201, output electricity
Pole 202, earth electrode 203, series resonance arm 204, parallel resonance arm 205, wherein specific requirement are as follows：
(1) Pyatyi trapezoidal design structure is used, comprising three series resonance arms and two parallel resonance arms.
(2) input electrode, output electrode and ground electrode area are not less than 100 μm * 100 μm.
(3) series resonance arm S1 wavelength is λ s1, the λ s1 of aperture 25~31, refers to radical 127~137, reflecting grating wavelength X R1
=λ s1, refer to radical 15~22.
(4) series resonance arm S2 wavelength is λ s2, the λ s2 of aperture 25~31, refers to radical 95~110, reflecting grating wavelength X R2
=λ s2, refer to radical 15~22.
(5) series resonance arm S3 wavelength is λ s3, the λ s3 of aperture 28~31, refers to radical 127~137, reflecting grating wavelength X R3
=λ s3, refer to radical 15~22.
(6) parallel resonance arm P1 wavelength is λ p1, the λ p1 of aperture 15~20, refers to radical 115~130, reflecting grating wavelength X R1
=λ p1, refer to radical 5~18, false fingering line width and length weight.
(7) parallel resonance arm P2 wavelength is λ p2, the λ p2 of aperture 15~20, refers to radical 115~130, reflecting grating wavelength X R2
=λ p2, refer to radical 5~18, false fingering line width and length weight.
The preparation method of 17% relative bandwidth low-loss SAW filter, including following several steps：
Step (1), the wafer material for using is 15 ° of YX-LiNbO3；
Step (2), the design structure for using is trapezoidal design structure；
Step (3), the electrode material for using is copper film；
Step (4), surface coating sound-absorbing material.
The wafer material that the step (1) uses is 15 ° of YX-LiNbO3, and wafer thickness is 0.40~0.65 μm, the back side
360~No. 1000 feather pluckings.
Trapezium structure series is Pyatyi in the step (2), comprising three series resonance arms and two parallel resonance arms, filter
Ripple device can be according to specific targets requirement and the series and combination composing mode of packaged type selective resonance device.
The wavelength of series resonance arm S1 is λ s1 in the step (2), and aperture is 25~31 λ s1, refers to that radical is 127~137
Root, reflecting grating wavelength is λ R1=λ s1, refers to that radical is 15~22.
The wavelength of series resonance arm S2 is λ s2 in the step (2), and aperture is 25~31 λ s2, refers to that radical is 95~110
Root, reflecting grating wavelength X R2=λ s2 refer to that radical is 15~22.
The wavelength of series resonance arm S3 is λ s3 in the step (2), and aperture is 28~31 λ s3, refers to that radical is 127~137
Root, reflecting grating wavelength X R3=λ s3 refer to that radical is 15~22.
The wavelength of parallel resonance arm P1 is λ p1 in the step (2), and aperture is 15~20 λ p1, refers to that radical is 115~130
Root, reflecting grating wavelength X R1=λ p1 refer to radical for 5~18, false fingering line width and length weight.
The wavelength of parallel resonance arm P2 is λ p2 in the step (2), and aperture is 15~20 λ p2, refers to that radical is 115~130
Root, reflecting grating wavelength X R2=λ p2 refer to radical for 5~18, false fingering line width and length weight.
The electrode material used in the step (3) is copper film, and thickness wavelength ratio (h/ λ) is 2%~9%.
The surface coating sound-absorbing material used in the step (4), thickness is 0.5~5 μm.
The above, the only present invention preferably specific embodiment, but protection scope of the present invention is not limited thereto,
Any one skilled in the art in the technical scope of present disclosure, the change or replacement that can be readily occurred in,
Should all be included within the scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims
Enclose and be defined.
Claims (6)
1. a kind of 17% relative bandwidth low-loss SAW filter, it is characterised in that including wafer material, on the wafer material
Be provided with sound table transducer and surface coating absorbent treatment, the sound table transducer designs be trapezium structure, including series resonance arm and
Parallel resonance arm, one end of the series resonance arm is provided with input electrode, the other end and is provided with output electrode, the parallel resonance arm
Lower end be provided with earth electrode.
2. a kind of preparation method of 17% relative bandwidth low-loss SAW filter described in claim 1, it is characterised in that bag
Include following steps：
Step A, from wafer material；
Step B, design structure is the sound table transducer of trapezium structure on the wafer material；
Step C, the electrode material that sound table transducer is used is copper film；
Step D, surface coating sound-absorbing material.
3. the preparation method of 17% relative bandwidth low-loss SAW filter according to claim 2, it is characterised in that institute
State in step A, the wafer material for using is 15 ° of YX-LiNbO3, wafer thickness is 0.40~0.65 μm, the back side 360~1000
Feather plucking.
4. the preparation method of 17% relative bandwidth low-loss SAW filter according to claim 3, it is characterised in that institute
State in step B, trapezium structure series is Pyatyi, comprising three series resonance arms and two parallel resonance arms, wherein：
The wavelength of the first series resonance arm is λ s1, and aperture is 25~31 λ s1, refers to that radical is 127~137, and reflecting grating wavelength is
λ R1=λ s1, refer to that radical is 15~22；
The wavelength of the second series resonance arm is λ s2, and aperture is 25~31 λ s2, refers to that radical is 95~110, reflecting grating wavelength X R2
=λ s2, refer to that radical is 15~22；
The wavelength of the 3rd series resonance arm is λ s3, and aperture is 28~31 λ s3, refers to that radical is 127~137, reflecting grating wavelength X
R3=λ s3, refer to that radical is 15~22；
The wavelength of the first parallel resonance arm is λ p1, and aperture is 15~20 λ p1, refers to that radical is 115~130, reflecting grating wavelength X
R1=λ p1, refer to radical for 5~18, false fingering line width and length weight；
The wavelength of the second parallel resonance arm P2 is λ p2, and aperture is 15~20 λ p2, refers to that radical is 115~130, reflecting grating wavelength
λ R2=λ p2, refer to radical for 5~18, false fingering line width and length weight.
5. 17% relative bandwidth low-loss SAW filter according to claim 2 and preparation method thereof, it is characterised in that
In the step C, the thickness wavelength ratio of copper film electrode material is 2%~9%.
6. 17% relative bandwidth low-loss SAW filter according to claim 2 and preparation method thereof, it is characterised in that
In the step D, the thickness of the surface coating sound-absorbing material for using is 0.5~5 μm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201611148487.3A CN106849898A (en) | 2016-12-13 | 2016-12-13 | A kind of 17% relative bandwidth low-loss SAW filter and preparation method thereof |
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| CN201611148487.3A CN106849898A (en) | 2016-12-13 | 2016-12-13 | A kind of 17% relative bandwidth low-loss SAW filter and preparation method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110995293A (en) * | 2019-11-04 | 2020-04-10 | 三维通信股份有限公司 | In-band fluctuation suppression device and radio frequency system |
| WO2021068670A1 (en) * | 2019-10-11 | 2021-04-15 | 天津大学 | Filter circuit and method for improving performance of filter circuit, and signal processing device |
| CN113676154A (en) * | 2021-08-13 | 2021-11-19 | 重庆中易智芯科技有限责任公司 | A low insertion loss high frequency surface acoustic wave filter |
| CN116232270A (en) * | 2023-03-07 | 2023-06-06 | 重庆邮电大学 | A High Frequency Multilayer Film Surface Acoustic Wave Resonator |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1257347A (en) * | 1998-11-24 | 2000-06-21 | 株式会社村田制作所 | Surface sound wave filter |
| CN1751436A (en) * | 2003-12-01 | 2006-03-22 | 株式会社村田制作所 | filter device |
| JP2015119449A (en) * | 2013-12-20 | 2015-06-25 | 株式会社村田製作所 | Surface acoustic wave filter |
-
2016
- 2016-12-13 CN CN201611148487.3A patent/CN106849898A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1257347A (en) * | 1998-11-24 | 2000-06-21 | 株式会社村田制作所 | Surface sound wave filter |
| CN1751436A (en) * | 2003-12-01 | 2006-03-22 | 株式会社村田制作所 | filter device |
| JP2015119449A (en) * | 2013-12-20 | 2015-06-25 | 株式会社村田製作所 | Surface acoustic wave filter |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021068670A1 (en) * | 2019-10-11 | 2021-04-15 | 天津大学 | Filter circuit and method for improving performance of filter circuit, and signal processing device |
| CN110995293A (en) * | 2019-11-04 | 2020-04-10 | 三维通信股份有限公司 | In-band fluctuation suppression device and radio frequency system |
| CN110995293B (en) * | 2019-11-04 | 2022-06-07 | 三维通信股份有限公司 | In-band fluctuation suppression device and radio frequency system |
| CN113676154A (en) * | 2021-08-13 | 2021-11-19 | 重庆中易智芯科技有限责任公司 | A low insertion loss high frequency surface acoustic wave filter |
| CN116232270A (en) * | 2023-03-07 | 2023-06-06 | 重庆邮电大学 | A High Frequency Multilayer Film Surface Acoustic Wave Resonator |
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Inventor after: Yang Sichuan Inventor after: Yan Kunkun Inventor after: Wei Yongping Inventor after: Huang Xin Inventor after: Zhang Enyu Inventor before: Yan Kunkun Inventor before: Wei Yongping Inventor before: Yang Sichuan Inventor before: Huang Xin Inventor before: Zhang Enyu |
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Application publication date: 20170613 |