CN106681108A - Target image alignment device and exposure machine with same - Google Patents

Abstract

The target image alignment device comprises two dimensional transfer units and an optical detection unit, wherein each two dimensional transfer unit comprises a first slide rail, a first slide seat, a second slide rail and a second slide seat, and the first slide rail is arranged on the exposure machine, is positioned at the adjacent side of an alignment position and is configured in a manner that the sliding direction of the first slide rail is parallel to the first direction; the first sliding seat is movably arranged on the first sliding rail and driven to slide; the second slide rail is combined with the first slide seat and configured in a way that the sliding direction of the second slide rail is parallel to the second direction and extends to the position above the alignment position, and the second direction is vertical to the first direction; the second sliding seat is movably arranged on the second sliding rail and driven to slide; the optical detection unit is disposed on the second slide, and during the alignment procedure, the relative position between the optical detection unit and the second slide is fixed.

Description

Target image alignment device and exposure machine with the device

technical field

The invention relates to a target image alignment device and an exposure machine with the device. The exposure machine is used for exposing a substrate, and the target image alignment device is used for detecting whether the substrate and the film are Correct alignment.

Background technique

Please refer to FIG. 1 and FIG. 2, which are schematic diagrams of an existing double-sided exposure machine, which has a target image alignment device 100, two exposure frame units 200A, 200B and an exposure device 300, The two exposure frame units 200A, 200B alternately move back and forth between a pair of alignment positions and an exposure position, and each exposure frame unit 200A, 200B performs an alignment process on the alignment position to ensure that each exposure frame After the film in the unit 200A, 200B is correctly aligned with the substrate, it is transported to the exposure position, and the exposure device 300 is arranged above the exposure position for exposing each of the exposure frame units 200A, 200B.

The existing double-sided exposure machine can have one or more target alignment devices, and the target image alignment device 100 is arranged on the double-sided exposure machine and is located directly above the alignment position, which includes a CCD camera 110 1. A light source module 120 and a lifting module 130, the lens of the CCD camera 110 is facing the alignment position for taking images of the exposure frame unit 200A or 200B on the alignment position, the light source module 120 is arranged on the lifting module 130 bottom end.

As shown in Figure 1, when it is necessary to replace the negative film or take and place the substrate, the upper frames of the exposure frame units 200A, 200B must be lifted upwards. At this time, the lifting module 130 is in a retracted state, so that the light source module 120 is a certain distance away from the alignment position, so that the upper frames of the exposure frame units 200A and 200B have space to lift up; as shown in Figure 2, in the alignment procedure, the lifting module 130 is driven by a motor and a pulley and lower to make the light source module 120 close to the exposure frame unit 200A or 200B at the alignment position, so as to provide the illumination brightness required by the CCD camera 110 when taking images.

In order to make enough space for the upper frames of each of the exposure frame units 200A, 200B to lift upward, the light source module 120 must be driven by the lifting module 130 for a sufficient lifting stroke. However, the optical module 120 is easy to produce Shaking and instability lead to adverse effects on accuracy. Moreover, each time in the alignment process, it is necessary to wait for the optical module 120 to drop to a fixed point before taking an image, thus causing the disadvantage of long alignment time. It further reduces production efficiency. On the other hand, the target image alignment device 100 is installed directly above the alignment position, so the double-side exposure machine has a high equipment height, takes up a lot of factory space and is unfavorable for transportation.

Contents of the invention

In order to improve the shortcomings of existing double-sided exposure machines such as poor optical detection accuracy, long alignment process time, low production efficiency, and equipment space occupation, the present invention proposes a target image alignment device and a device with the device. exposure machine.

In order to achieve the above and other purposes, the present invention discloses a target image alignment device, which is applied to an exposure machine for the alignment process between the target of the substrate and the film. The exposure machine includes two parts for carrying the substrate and the film An exposure frame unit, the two exposure frame units are alternately reciprocally transferred to the alignment position and the exposure position along the first direction, the target image alignment device includes a two-dimensional transfer unit and an optical detection unit, the two-dimensional shift The loading unit includes a first sliding rail, a first sliding seat, a second sliding rail and a second sliding seat. The first sliding rail is used to be arranged on the exposure machine and is located on the adjacent side of the alignment position, and its sliding direction Parallel to the first direction; the first sliding seat is movably arranged on the first sliding rail to be driven to slide; the second sliding rail is combined with the first sliding seat and its sliding direction is parallel to The second direction is arranged in a manner extending above the alignment position, and the second direction is perpendicular to the first direction; the second sliding seat is movably arranged on the second slide rail to be driven to slide; the optical detection unit Installed on the second sliding seat, the optical detection unit has a light source group and a camera. During the alignment process, the relative position between the optical detection unit and the second sliding seat is fixed.

The above-mentioned target image alignment device further includes a jacking unit, the jacking unit is used to be arranged below the alignment position of the exposure machine, so as to lift the exposure frame unit at the alignment position, so that There is a default distance between each exposure frame unit and the optical detection unit.

The above-mentioned target image alignment device, which further includes a height fine-adjustment seat, the height fine-adjustment seat is arranged on the second sliding seat and carries the camera, and is used to adjust the camera relative to the exposure frame at the alignment position The location of the unit.

In the above-mentioned target image aligning device, the optical detection unit has a laser module for aligning and emitting a laser beam within the field of view of the camera.

To achieve the above and other objectives, the present invention also discloses an exposure machine comprising two exposure frame units, the above-mentioned target image alignment device and exposure device, the two exposure frame units alternately move back and forth along the first direction It is carried in the alignment position and the exposure position; the exposure device is arranged above the exposure position, and is used for exposing each exposure frame unit.

Accordingly, compared with the prior art, in terms of structural configuration, the optical detection unit is closer to the exposure frame unit located at the alignment position, so the accuracy of detection can be improved. In addition, since the optical detection unit is relatively fixed to the second sliding seat during the alignment process, the optical detection unit does not need to be raised and lowered during the alignment process before, during, and after movement, thus reducing the shaking during the transfer process and improving accuracy.

Description of drawings

Fig. 1 is the side schematic diagram of existing double-sided exposure machine;

FIG. 2 is a schematic diagram of a light source module descending close to an alignment position in an existing double-sided exposure machine;

3 is a schematic side view of an exposure machine according to an embodiment of the present invention;

4 is a schematic top view of a marker image alignment device according to an embodiment of the present invention;

Fig. 5 is a schematic side view of a marker image alignment device according to an embodiment of the present invention;

6 is a schematic front view of a marker image alignment device according to an embodiment of the present invention;

FIG. 7 is a schematic diagram of the start of the alignment program in the exposure machine according to the embodiment of the present invention;

FIG. 8 is a schematic diagram of the state of the alignment program in the exposure machine according to the embodiment of the present invention;

9 is a schematic diagram of an open state of the exposure frame unit in the exposure machine according to the embodiment of the present invention;

FIG. 10 is a schematic diagram of an optical detection unit in a marker image alignment device according to an embodiment of the present invention.

【Symbol Description】

1 Target image alignment device

2 exposure frame unit

3 exposure frame unit

4 Exposure device

10 Two-dimensional transfer unit

11 First rail

12 first slider

13 Second rail

14 Second carriage

20 Optical detection unit

21 light source group

22 cameras

23 laser module

30 jacking unit

40 height fine adjustment seat

41 knob

100 target image alignment device

110 CCD cameras

120 light source module

130 lift module

200A exposure frame unit

200B exposure frame unit

300 exposure device

detailed description

In order to fully understand the purpose, features and effects of the present invention, now through the following specific embodiments, and in conjunction with the accompanying drawings, the present invention will be further described in detail, as follows:

In the embodiments disclosed below, the article "a" before each component may be "more than one", rather than limiting the quantity of each component during implementation.

Referring to FIG. 3 , an embodiment of the present invention discloses an exposure machine including a target image alignment device 1 . The exposure machine includes two exposure frame units 2 , 3 , a target image alignment device 1 and an exposure device 4 .

The target image alignment device 1 is used to carry out the alignment process between the targets of the substrate and the film (not shown in the figure), the exposure machine includes two exposure frame units 2, 3 for carrying the substrate and the film, the two The exposure frame units 2 and 3 are alternately reciprocated and loaded at the alignment position and an exposure position along a first direction, and each exposure frame unit performs an alignment procedure at the alignment position to detect whether the film and the substrate are aligned. It uses the optical detection unit to detect whether the target image on the film and the substrate is superimposed. If the film and the target image on the substrate are superimposed, it means that the film and the substrate are aligned; After the negative in the exposure frame unit on the position is aligned with the substrate, the exposure frame unit is transported to the exposure position, and the exposure device 4 is arranged above the exposure position for exposing each of the exposure frame units 2, 3 .

In FIG. 3 , the exposure frame unit 2 is located at the alignment position, and the exposure frame unit 3 is located at the exposure position. The exposure machine is provided with transport rails (not shown) on both sides from the alignment position to the exposure position, and each exposure frame unit 2, 3 is alternately reciprocated and loaded on the alignment position along the first direction through the transport rails. position and the exposure position.

4 to 6, the target image alignment device 1 includes a two-dimensional transfer unit 10 and an optical detection unit 20, the two-dimensional transfer unit 10 includes a first slide rail 11, a first slide Seat 12, a second sliding rail 13 and a second sliding seat 14, the first sliding rail 11 is used to be arranged on the exposure machine and is located on the adjacent side of the alignment position, and its sliding direction is parallel to the first direction; the first sliding seat 12 is movably arranged on the first sliding rail 11 to be driven to slide, as shown in Figure 5; the second sliding rail 13 is combined with the first sliding seat 12 and Its sliding direction is parallel to a second direction and extends to the way above the alignment position, the second direction is perpendicular to the first direction; the second sliding seat 14 is movably arranged on the second sliding rail 13 to Driven to slide, as shown in Figure 6; the optical detection unit 20 is arranged on the second sliding seat 14, the optical detection unit 20 has a light source group 21 and a camera 22, during the alignment procedure, the optical detection unit The relative position between 20 and the second sliding seat 14 is fixed.

4 to 6 illustrate that the target image alignment device 1 is equipped with two first slide rails 11, four first slide seats 12, four second slide rails 13 and four second slide seats 14, and two first slide rails 13 and four second slide seats 14. A slide rail 11 is respectively arranged on opposite sides of the alignment position. FIG. 4 shows a schematic top view of the target image alignment device 1. FIG. 5 shows a side schematic view of the target image alignment device 1. FIG. 6 shows the target image alignment device 1. The front schematic diagram of the target image alignment device 1, two first sliding seats 12 are arranged on each first sliding rail 11, and each first sliding seat 12 is equipped with a second sliding rail 13 and a second sliding seat seat 14, and an optical detection unit 20 is mounted on each second sliding seat 14, therefore, a total of four optical detection units 20 correspond to four target positions on the default substrate and film. However, the numbers of components such as the first slide rail 11, the first slide seat 12, the second slide rail 13, the second slide seat 14 and the optical detection unit mentioned above are only for illustration, and the scope of the present invention is not limited to this embodiment It can be changed according to factors such as the actual application, the target design on the substrate and negative film, and the specifications of the equipment.

When starting the alignment program, as shown in Figure 7, each of the first sliding seats 12 is driven to slide along the first direction on the first slide rail 11, and the second sliding seat on each of the first sliding seats 12 Rail 13 moves together; As shown in Figure 8, each of the first slides 12 approaches the target position in the first direction, and as shown in Figure 6, each of the second slides 14 is driven along the second slide in a direction so that each of the optical detection units 20 is aligned with the corresponding target position.

As shown in FIG. 9 , each of the exposure frame units 2 is intended to be opened for taking out the exposed substrate and putting the substrate to be exposed, or before replacing the film, each of the first sliding seats 12 is driven along the first direction and toward The direction of the exposure position moves, so that the first slide 12 together with the second slide rail 13, the third slide 14 and the optical detection unit 20 stagnate at the rear side of the alignment position, leaving the alignment The space directly above the position, so that the upper frame body of the exposure frame unit 2 can be lifted upwards.

Accordingly, in the alignment procedure of the marker image alignment device 1 of this embodiment, the optical detection unit 20 moves along the first direction through the two-dimensional transfer unit 10 and then moves along the second direction, so that The optical detection unit 20 moves to directly above the default target position, and the relative position between the optical detection unit 20 and the second sliding seat 14 is fixed during the entire alignment process, so it can solve the problems in the prior art. Because the light source component will shake when it is lowered close to the exposure frame unit, it will reduce the problem of alignment accuracy, and can reduce the alignment time, thereby improving efficiency and production capacity.

In this embodiment, the marker image alignment device 1 includes a jacking unit 30, which is used to be arranged below the alignment position of the exposure machine, for lifting the image at the alignment position. Expose the frame unit 2, so that each of the exposure frame units 2, 3 and the optical detection unit 20 is at a default distance, so that during the alignment procedure, the two exposure frame units 2, 3 move to the alignment Can be located at the position of the same height after the position, that is, the distance between the two exposure frame units 2 and 3 and the optical detection unit 20 is the same, therefore, the camera 22 in the optical detection device 20 of the present embodiment can adopt a fixed magnification The lens does not need to use a lens with adjustable magnification in response to the exposure frame units of different heights, so the time for adjusting the magnification is saved, and the efficiency can be improved.

In addition, the optical detection unit 20 can have a laser module 23. When the target position is to be located at the beginning, the laser module 23 is adjusted to emit a laser beam in the field of view of the camera 22, so as to Point to the position to confirm the target position on the film, and then help to establish the position where the camera 22 can clearly obtain the target image as the default position of the optical detection module 20 . Accordingly, with the arrangement of the laser module 23, the default position of the optical detection unit 20 can be easier to operate.

Referring to FIG. 10 , the image alignment device 1 further includes a height fine-adjustment seat 40, which is arranged on the second sliding seat 14 and carries the camera 22 for adjusting the camera 22 relative to the The distance (that is, the height) of the exposure frame unit at the alignment position is used for fine-tuning and correction. The height fine-tuning base 40 has a knob 41 for rotating the knob 41 to raise and lower the camera 22 .

In this embodiment, preferably, in the process of the same batch of substrates to be exposed, the distance between the light source group 21 and the camera 22 of the optical detection unit 20 relative to the exposure frame unit at the alignment position (that is, the height ) only needs to be adjusted or corrected at the beginning. In the alignment procedure, the distance (ie height) between the light source group 21 and the camera 22 of the optical detection unit 20 relative to the exposure frame unit at the alignment position is Fixed without lifting action.

Accordingly, compared with the prior art, in terms of structural configuration, the optical detection unit is relatively close to the exposure frame unit at the alignment position in the image alignment device and exposure machine of this embodiment, so the detection can be improved. The accuracy and fixed magnification lens can be used. In addition, since the optical detection unit is relatively fixed with the second sliding seat in the alignment procedure, that is, the optical detection unit is uniform in the process of alignment before, during and after the alignment procedure. There is no need for lifting action, so the shaking during the transfer process is reduced and the accuracy is improved.

The present invention has been disclosed above through preferred embodiments, but those skilled in the art should understand that the embodiments are only used to describe the present invention, and should not be construed as limiting the scope of the present invention. It should be noted that all changes and substitutions equivalent to this embodiment should be included within the scope of the present invention. Therefore, the protection scope of the present invention should be determined by the scope defined in the claims.

Claims (5)

1. a kind of target image alignment device, it is characterised in that be applied to exposure machine for carrying out substrate With the contraposition program between the target of egative film, two exposure frame lists of the exposure machine comprising bearing substrate with egative film Unit, two exposure frame units alternately come and go in the first direction transfer in para postion and exposure position, The target image alignment device is included：

Two-dimentional transfer unit, including：

First slide rail, for being arranged on the exposure machine and positioned at the adjacent side of the para postion, and with its cunning The dynamic mode for being oriented parallel to the first direction is configured；

First slide, is movably arranged on first slide rail and is slided with being driven；

Second slide rail, is combined with the first slide and parallel to second direction and is extended to its glide direction Mode above the para postion is configured, the vertical first direction of the second direction；And

Second slide, is movably arranged on second slide rail and is slided with being driven；And

Optical detection unit, is arranged in the second slide, and the optical detection unit has light source group and takes the photograph Shadow machine, during contraposition program, the relative position between the optical detection unit and the second slide is solid It is fixed.

2. target image alignment device as claimed in claim 1, it is characterised in that further include One jacking unit, the jacking unit is used for the lower section of the para postion for being arranged at the exposure machine, for lift Rise the exposure frame unit positioned at the para postion, and make respectively the exposure frame unit and the optical detection unit it Between apart have default distance.

3. target image alignment device as claimed in claim 1 or 2, it is characterised in that further Comprising height fine adjusting function seat, the height fine adjusting function seat is arranged in the second slide and carries the video camera, is used for Adjust the distance of exposure frame unit of the video camera relative to position on the para postion.

4. target image alignment device as claimed in claim 3, it is characterised in that the optical detection Unit has laser module, for being directed at the transmitting laser beam within sweep of the eye of the video camera.

5. a kind of exposure machine, it is characterised in that include：

Two exposure frame units, alternately come and go in the first direction transfer in para postion and exposure position；

Target image alignment device as any one of Claims 1-4；And

Exposure device, is arranged at the exposure position top, for the respectively exposure frame unit exposure.