CN106399948A - Multifunctional film coating equipment and film coating method - Google Patents
Multifunctional film coating equipment and film coating method Download PDFInfo
- Publication number
- CN106399948A CN106399948A CN201510455754.0A CN201510455754A CN106399948A CN 106399948 A CN106399948 A CN 106399948A CN 201510455754 A CN201510455754 A CN 201510455754A CN 106399948 A CN106399948 A CN 106399948A
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- Prior art keywords
- film
- vacuum chamber
- pressure gas
- vacuum
- crucible
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- 239000007888 film coating Substances 0.000 title claims abstract description 33
- 238000009501 film coating Methods 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims abstract description 15
- 230000005674 electromagnetic induction Effects 0.000 claims abstract description 9
- 238000005289 physical deposition Methods 0.000 claims abstract description 9
- 239000007789 gas Substances 0.000 claims description 40
- 239000011248 coating agent Substances 0.000 claims description 22
- 238000000576 coating method Methods 0.000 claims description 22
- 238000007747 plating Methods 0.000 claims description 13
- 239000007921 spray Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 238000000338 in vitro Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 claims description 2
- 230000033228 biological regulation Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 abstract description 4
- 239000007769 metal material Substances 0.000 abstract description 3
- 238000005507 spraying Methods 0.000 abstract description 3
- 238000009504 vacuum film coating Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000004531 microgranule Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The invention relates to multifunctional film coating equipment, which comprises a vacuum chamber, wherein a crucible, an electromagnetic induction coil, a medium and high frequency power supply, a work-piece table disk and a high pressure gas pipeline are arranged in the vacuum chamber, and a self-control table frame, a target conveyor, a vacuum pump and a high pressure gas supply system are arranged outside the vacuum chamber. With the multifunctional film coating equipment of the present invention, the two film coating methods such as inside-vacuum-chamber physical deposition film coating and outside-high-pressure-gas-chamber fine spraying film coating can be achieved, and the problems that a variety of different film layers are plated, the film coating of the metal and non-metallic material requires the purchasing of a variety of vacuum film coating machines, and the equipment investment is high can be solved.
Description
Technical field
The present invention relates to application techniques, particularly to a kind of Multi-functional coating device and film plating process.
Background technology
At present, vacuum coating equipment is the special equipment for being surface-treated PVD film layer, including vacuum magnetic-control sputtering
Coater, vacuum evaporating coating machine, vacuum multi-arc ion plating machine etc., vacuum magnetron sputtering film plating machine can be in low temperature
Carry out nonmetallic materials under state and carry out plated film, vacuum evaporating coating machine and vacuum multi-arc ion plating machine belong to high temperature
Plated film is it is adaptable to metal material plated film.Every kind of coater has features and range to limit, and such as need to be coated with
Multiple difference film layers and the plated film entering row metal and nonmetallic materials, need to purchase above-mentioned multiple vacuum coating equipment,
Have the shortcomings that equipment investment is big.
Content of the invention
The purpose of the present invention is it is simply that in order to solve the above problems, provide a kind of Multi-functional coating device and film plating process.
In order to achieve the above object, present invention employs technical scheme below：A kind of Multi-functional coating device, its bag
Include：
Vacuum chamber；
For holding the crucible of target, it is arranged in vacuum chamber；
Electromagnetic induction coil, is wrapped in outside crucible, medium-high frequency power supply outside vacuum chamber for its both positive and negative polarity connect setting；
For loading the workpiece desk tray of film-coating workpiece, it is arranged on vacuum chamber inwall and is arranged on above crucible, this work
Part desk tray can horizontally rotate and carry heater；
High-pressure gas pipeline, is passed through vacuum chamber and is connected with crucible bottom；
For loading the automatic control stand of film-coating workpiece, arrange outside vacuum chamber and be connected to the right side of high-pressure gas pipeline
End；
For conveying the target carrier of thread target into vacuum chamber, it is connected to vacuum chamber outer wall and vacuum
Chamber；
For the vacuum pump to vacuum chamber evacuation, it is connected to vacuum chamber outer wall and connects with vacuum chamber；
High pressure air feed system, is connected to the left end of high-pressure gas pipeline.
The major part of described high-pressure gas pipeline is permanent footpath pipe, there is one section of increaser on right side, and middle setting is for embedding
The groove of dress crucible, is respectively arranged at two ends with high voltage bearing one-way cock about high-pressure gas pipeline.
Described crucible bottom is provided with multiple leakage micropores；Be correspondingly provided with the groove of described high-pressure gas pipeline multiple enter
Liquid micropore.
Described target is graininess, bar-shaped or thread target.
Multiple preformed holes are additionally provided with the wall of described vacuum chamber, for leading to cooling water, input target or thickness inspection
Survey.
A kind of is film-coating workpiece to be placed on workpiece desk tray, passes through based on the film plating process of Multi-functional coating device
Vacuum pump, to vacuum chamber evacuation, makes within the chamber vacuum≤1 × 10-5Pa, adjusting medium-high frequency power supply makes electromagnetism sense
Answer coil electricity, heating fusing target, realize vacuum intracavity physical deposition plated film.
Described vacuum intracavity physical deposition plated film realizes the hyperfine equal of 1～2 nanometer of deposition in film-coating workpiece lower surface
Even film layer.
A kind of based on the film plating process of Multi-functional coating device be, using the crucible with leakage micropore for the crucible bottom, with
And in groove, it is provided with the high-pressure gas pipeline of feed liquor micropore, film-coating workpiece is placed on automatic control stand and makes plated film work
Part is close to the outlet of high-pressure gas pipeline right-hand member, and adjusting medium-high frequency power supply makes electromagnetic induction coil be energized, heating fusing target
Material, opens high pressure air feed system, and gases at high pressure wash the one-way cock at high-pressure gas pipeline two ends open, and take away from earthenware
Crucible leakage micropore enters target liquid or gas particles in high-pressure gas pipeline, sprays to the plated film base of film-coating workpiece
Face, realizes heavy pressure gas chamber and finely sprays plated film in vitro.
The plated film basal plane of described automatic control stand adjust automatically film-coating workpiece, realizes Automatic continuous plated film.
Described heavy pressure gas chamber finely sprays plated film in vitro and realizes deposition 1 × 10 on film-coating workpiece surface-6～1mm's is equal
Even film layer.
Using the Multi-functional coating device of the present invention, achievable vacuum intracavity physical deposition plated film and gases at high pressure cavity
Finely spray outward two kinds of film plating process of plated film.And solve and be coated with multiple difference film layers and enter row metal and nonmetallic
The plated film of material needs to purchase the big problem of multiple vacuum coating equipments, equipment investment.
Brief description
Fig. 1 is the structural representation of Multi-functional coating device of the present invention.
Fig. 2 is the A-A of Fig. 1 to generalized section.
Specific embodiment
Referring to Fig. 1, Fig. 2, the Multi-functional coating device of the present invention, including a vacuum chamber 1, vacuum chamber 1
Inside it is provided with：Crucible 2, in vacuum chamber 1, central authorities, are used for holding graininess, bar-shaped or thread target,
Target is metal or non-metallic material；Electromagnetic induction coil 3, is wrapped in crucible lateral surface, its both positive and negative polarity and vacuum
The medium-high frequency power supply 10 in the outer left side of chamber 1 is connected；Workpiece desk tray 4, directly over crucible 2, for filling
Carry film-coating workpiece, and rotatable in the horizontal direction and carry heater；High-pressure gas pipeline 5, positioned at crucible 2
Lower section, around two ends be located at that vacuum chamber 1 is outer and pass across vacuum chamber 1, it is below crucible 2 and its left
Sidepiece is divided into permanent footpath pipe, and is provided with the groove with crucible bottom cooperation immediately below crucible, right below crucible 2
Sidepiece is divided into increaser, and two ends are additionally provided with high voltage bearing one-way cock 51 and 52 around；
It is provided with outside vacuum chamber 1：Automatic control stand 6, positioned at the right side of the outer high-pressure gas pipeline 5 of vacuum chamber,
For loading lamellar or web-like film-coating workpiece；Target carrier 7, for continuing to convey thread target into vacuum chamber
Material；Vacuum pump 8, by the preformed hole in chamber walls to vacuum chamber evacuation；High pressure air feed system 9, position
In the outer left side of vacuum chamber, for providing high pressure nitrogen or air to high-pressure gas pipeline.
Multiple preformed holes 11 are additionally provided with chamber walls, for leading to cooling water, input target or Thickness sensitivity.
Using the Multi-functional coating device of the present invention, achievable vacuum intracavity physical deposition plated film and gases at high pressure cavity
Finely spray outward two kinds of film plating process of plated film.
When carrying out vacuum intracavity physical deposition plated film, film-coating workpiece is placed on workpiece desk tray 4, and passes through vacuum
Pump 8 is not more than 1 × 10 to vacuum chamber 1 evacuation, within the chamber vacuum-5Pa, and adjust medium-high frequency power supply 10
So that electromagnetic induction coil 3 is energized, make the target in crucible 2 heat fusing evaporation, realize vacuum intracavity physical deposition
Plated film.The hyperfine uniform film layer of 1～2 nanometer thickness can be deposited in film-coating workpiece lower surface.
When carrying out fine spraying plated film outside pressure-air cavity, the crucible 2 bottom belt leakage micropore 21 of employing is high
It is provided with feed liquor micropore 53 in the groove of pressure gas piping 5.The position of adjustment crucible 2 makes crucible bottom leakage micropore
21 just leakage pores 53 on be aligned high-pressure gas pipeline 5, and adjust automatic control stand 6 and so that film-coating workpiece is close to
High-pressure gas pipeline 5 right-hand member exports, and adjusting medium-high frequency power supply 10 makes electromagnetic induction coil 3 be energized, and makes crucible 2
Interior target heating fusing, and open high pressure air feed system 9, gases at high pressure wash high-pressure gas pipeline 5 two ends open
One-way cock 51 and 52, and take away target liquid or the gas entering in high-pressure gas pipeline 5 from crucible leakage micropore
Body microgranule, sprays to the plated film basal plane of film-coating workpiece, realizes fine spraying plated film outside pressure-air cavity.In plated film mistake
Cheng Zhong, film-coating workpiece automatic control stand 6 can adjust automatically film-coating workpiece plated film basal plane, realize Automatic continuous plated film.
Can achieve that thickness is 1 × 10 on film-coating workpiece surface-6The uniform film layer of～1mm.
Claims (10)
1. a kind of Multi-functional coating device is it is characterised in that include：
Vacuum chamber；
For holding the crucible of target, it is arranged in vacuum chamber；
Electromagnetic induction coil, is wrapped in outside crucible, medium-high frequency power supply outside vacuum chamber for its both positive and negative polarity connect setting；
For loading the workpiece desk tray of film-coating workpiece, it is arranged on vacuum chamber inwall and is arranged on above crucible, this work
Part desk tray can horizontally rotate and carry heater；
High-pressure gas pipeline, is passed through vacuum chamber and is connected with crucible bottom；
For loading the automatic control stand of film-coating workpiece, arrange outside vacuum chamber and be connected to the right side of high-pressure gas pipeline
End；
For conveying the target carrier of thread target into vacuum chamber, it is connected to vacuum chamber outer wall and vacuum
Chamber；
For the vacuum pump to vacuum chamber evacuation, it is connected to vacuum chamber outer wall and connects with vacuum chamber；
High pressure air feed system, is connected to the left end of high-pressure gas pipeline.
2. Multi-functional coating device as claimed in claim 1 it is characterised in that：Described high-pressure gas pipeline
Most of there is one section of increaser on right side for permanent footpath pipe, the groove for being embedded in crucible for the middle setting, gases at high pressure
It is respectively arranged at two ends with high voltage bearing one-way cock about pipeline.
3. Multi-functional coating device as claimed in claim 1 it is characterised in that：Described crucible bottom is provided with many
Individual leakage micropore；Multiple feed liquor micropores are correspondingly provided with the groove of described high-pressure gas pipeline.
4. Multi-functional coating device as claimed in claim 1 it is characterised in that：Described target be graininess,
Bar-shaped or thread target.
5. Multi-functional coating device as claimed in claim 1 it is characterised in that：On the wall of described vacuum chamber
It is additionally provided with multiple preformed holes, for leading to cooling water, input target or Thickness sensitivity.
6. a kind of film plating process based on Multi-functional coating device it is characterised in that：Film-coating workpiece is placed on work
On part desk tray, by vacuum pump to vacuum chamber evacuation, make within the chamber vacuum≤1 × 10-5Pa is high in regulation
Frequency power makes electromagnetic induction coil be energized, heating fusing target, realizes vacuum intracavity physical deposition plated film.
7. according to right 6 requires the film plating process based on Multi-functional coating device it is characterised in that：Described
Vacuum intracavity physical deposition plated film realizes the hyperfine uniform film layer of 1～2 nanometer of deposition in film-coating workpiece lower surface.
8. a kind of film plating process based on Multi-functional coating device it is characterised in that：Using crucible bottom band leakage
The crucible of micropore, and in groove, it is provided with the high-pressure gas pipeline of feed liquor micropore, film-coating workpiece is placed in automatic control platform
On frame and make film-coating workpiece be close to high-pressure gas pipeline right-hand member outlet, adjust medium-high frequency power supply make electromagnetic induction coil lead to
Electricity, heating fusing target, open high pressure air feed system, gases at high pressure wash the check valve at high-pressure gas pipeline two ends open
Door, and take away target liquid or the gas particles entering in high-pressure gas pipeline from crucible leakage micropore, spray to plated film
The plated film basal plane of workpiece, realizes heavy pressure gas chamber and finely sprays plated film in vitro.
9. according to right 8 requires the film plating process based on Multi-functional coating device it is characterised in that：Described
The plated film basal plane of automatic control stand adjust automatically film-coating workpiece, realizes Automatic continuous plated film.
10. according to right 8 requires the film plating process based on Multi-functional coating device it is characterised in that：Described
Heavy pressure gas chamber finely sprays plated film in vitro and realizes deposition 1 × 10 on film-coating workpiece surface-6The uniform film layer of～1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510455754.0A CN106399948A (en) | 2015-07-29 | 2015-07-29 | Multifunctional film coating equipment and film coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510455754.0A CN106399948A (en) | 2015-07-29 | 2015-07-29 | Multifunctional film coating equipment and film coating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106399948A true CN106399948A (en) | 2017-02-15 |
Family
ID=58009500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510455754.0A Pending CN106399948A (en) | 2015-07-29 | 2015-07-29 | Multifunctional film coating equipment and film coating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106399948A (en) |
-
2015
- 2015-07-29 CN CN201510455754.0A patent/CN106399948A/en active Pending
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170215 |
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| WD01 | Invention patent application deemed withdrawn after publication |