CN106384722A - Quick air cooling structure of heat treatment device - Google Patents
Quick air cooling structure of heat treatment device Download PDFInfo
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- CN106384722A CN106384722A CN201610968368.6A CN201610968368A CN106384722A CN 106384722 A CN106384722 A CN 106384722A CN 201610968368 A CN201610968368 A CN 201610968368A CN 106384722 A CN106384722 A CN 106384722A
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- 238000001816 cooling Methods 0.000 title claims abstract description 45
- 238000010438 heat treatment Methods 0.000 title abstract description 7
- 238000009413 insulation Methods 0.000 claims abstract description 51
- 238000000137 annealing Methods 0.000 claims description 42
- 238000000034 method Methods 0.000 claims description 33
- 238000000605 extraction Methods 0.000 claims description 20
- 239000012774 insulation material Substances 0.000 claims description 5
- 238000003475 lamination Methods 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 45
- 235000012431 wafers Nutrition 0.000 description 7
- 239000002356 single layer Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 210000000038 chest Anatomy 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a quick air cooling structure of a heat treatment device, wherein the quick air cooling structure is embedded into a heat insulation layer and comprises the components of an annular side heat insulation block which is arranged at the sidewall of the heat insulation layer and is provided with a longitudinal air channel which is through in the vertical direction, wherein a plurality of radial air channels which are communicated with a hearth are arranged in the side wall of the longitudinal air channel; an annular top air inlet heat insulation block which is arranged at top of the heat insulation layer and is correspondingly connected with the upper end of the annular side heat insulation block, wherein an air inlet annular trough is arranged at the lower end of the circumference of the annular top air inlet heat insulation block, and the air inlet annular trough is provided with air inlets for communicating with outside of the heat insulation layer, and the air inlet annular trough is communicated with the longitudinal air channel; and a top heat-discharging heat insulation block which is arranged at top of the heat insulation layer and is correspondingly connected with the top of the annular top air inlet heat insulation block and is provided with air outlets which are communicated with the hearth and outside of the heat insulation layer. Cooling air is introduced through the air inlets and enters the hearth through the air inlet annular trough, the longitudinal air channel and the radial air channels successively. After heat exchange, the cooling air is discharged out of the air outlets. The quick air cooling structure of the heat treatment device can perform compulsive cooling for realizing quick temperature reduction on the hearth.
Description
Technical field
The present invention relates to semiconductor manufacturing equipment technical field, more particularly, to a kind of fast for annealing device
Fast air-cooled structure.
Background technology
In semiconductor equipment manufacture process, generally semiconductor crystal wafer carried out aoxidize, spread using annealing device,
CVD etc. is processed.And, as processing one of annealing device of these wafers, be usually used can single treatment multiple
The vertical thermal-processing device of wafer.
For the conventional vertical thermal-processing device of tradition, it does not often possess the ability of fast cooling.If adopted
The mode of Temperature fall, then rate of temperature fall is slow, and the process time is long.
Refer to Fig. 1, Fig. 1 is a kind of existing vertical heat processing apparatus structural representation.As shown in figure 1, this Vertical Heat
Processing meanss comprise the parts such as cassette 1, process container 2, heater 3 and 4.Cassette 1 container 2 that is processed surrounds, and heater is arranged
Outside process container, the space between heater and process container constitutes burner hearth.Heater is provided with the guarantor surrounding process container
Warm layer 4, heat-insulation layer 4 inwall is laid with heater strip 3, and heater strip is exposed in burner hearth.During annealing device work, heater strip 3 produces
Raw amount of heat, is stored in the furnace cavity between process container 2 and heat-insulation layer 4, by process container 2 to the crystalline substance in cassette 1
Circle carries out various process.
At present, in order to make at the end of heat treatment, wafer and annealing device itself are rapid to lower the temperature, reach processing speed and
The raising of production capacity, has adopted the furnace cavity between cooling air-flow importing heater and process container, has forced heat therein
Atmosphere is discharged from gas extraction system, carries out forcing cooling, reaches the purpose of fast cooling, to improve productivity ratio.
However, the air-cooled structure of existing annealing device, there is complex structure, import cooling air-flow during run into slow
The problems such as punching hinders more, has had a strong impact on cooling efficiency.And pass through individually to increase cooling air-flow flow, or big by choosing
Power conveys cooling air-flow equipment to realize the mode of target of lowering the temperature, and considerably increases cost again.
Heat-insulating property is an important indicator of annealing device.The existing annealing device with fast cooling ability,
Because its radiating is too fast, the temperature outside heater can be led to rise too fast；Simultaneously as there is temperature during its fast cooling becoming
Change big problem, the product quality problem causing because chilling temperature is uneven also easily occurs.
Content of the invention
It is an object of the invention to the drawbacks described above overcoming prior art to exist, provide a kind of quick wind of annealing device
Air-cooled structure, with reduce cooling air-flow enter burner hearth when be subject to hinder, improve cooling efficiency, and be capable of structure simplify,
Reduces cost, and improve the heat-insulating property of annealing device.
For achieving the above object, technical scheme is as follows：
A kind of quick air-cooled structure of annealing device, described annealing device from-inner-to-outer is provided with process container, heating
Device, heater is provided with the heat-insulation layer surrounding process container and is laid in heater strip, heat-insulation layer and process appearance at heat-insulation layer inwall
Space between device constitutes burner hearth, and described quick air-cooled structure is embedded in heat-insulation layer, including：
Ring-type sidepiece heat insulating block, located at heat-insulation layer side-walls, its circumference is provided with longitudinal air channel of up/down perforation, indulges along described
It is communicated with how several radial passage of burner hearth to air channel side wall；
Circular top air intake heat insulating block, at heat-insulation layer top, and joint corresponding with ring-type sidepiece heat insulating block upper end, its
Circumferentially lower end is provided with air intake annular groove, and described air intake annular groove is communicated with the air inlet outside heat-insulation layer, and described air intake annular groove is even
Logical longitudinal direction air channel；
Top heat extraction heat insulating block, at heat-insulation layer top, and joint corresponding with circular top air intake heat insulating block upper end, its
It is communicated with the exhaust outlet outside burner hearth and heat-insulation layer；
Wherein, cooling air-flow is imported by air inlet, enters burner hearth through air intake annular groove, longitudinal air channel, radial passage successively,
Discharged by exhaust outlet after heat exchange, cooled down with the pressure that burner hearth is carried out with fast cooling.
Preferably, described ring-type sidepiece heat insulating block is multilayer laminate constructions, and its every layer is provided with longitudinal air holes, and connection is vertical
To the radial passage of air holes and burner hearth, the corresponding joint of longitudinal air holes of each layer constitutes longitudinal air channel.
Preferably, described radial passage increased number setting from top to bottom.
Preferably, the angled distribution in axle center of described radial passage and heater.
Preferably, longitudinal air channel sidewall locations between heater strip for the described radial passage.
Preferably, described annealing device seals on base plate, and the base plate in described annealing device is provided with bottom
Heat insulating block, its joint corresponding with the lower end of ring-type sidepiece heat insulating block, longitudinal air channel is closed.
Preferably, described top heat extraction heat insulating block is provided with upper and lower heat insulating block, and described exhaust outlet is on lower heat insulating block.
Preferably, it is provided with support heat insulating block between described upper and lower heat insulating block.
Preferably, also include heater outer shield, it surrounds described heat-insulation layer setting.
Preferably, described ring-type sidepiece heat insulating block, circular top air intake heat insulating block, top heat extraction heat insulating block are respectively and are combined
Rotating fields, the outer layer of described lamination layer structure is insulation material.
From technique scheme as can be seen that by the present invention in that cooling air-flow is entered by air inlet is embedded at heat-insulation layer
It is circulated inside interior quick air-cooled structure, air inlet is connected with air intake annular groove, cooling effectiveness can be increased, and can directly will be cold
But air-flow is transported to longitudinal air channel, and cooling air-flow is travel downwardly by longitudinal air channel, after equalize in burner hearth through radial passage
Spray, cooling air-flow can be reduced and enter obstruction during space between heater and process container so that chilling temperature in burner hearth
Quickly, uniformly decline, and the heat-insulating property of device can be improved, outside the thermal uniformity deterioration of suppression heater body and heater
Temperature rises, thus can effectively ensure that the uniformity of product quality.
Brief description
Fig. 1 is a kind of existing vertical heat processing apparatus structural representation；
Fig. 2 is that a kind of contour structures of the quick air-cooled structure of annealing device of a preferred embodiment of the present invention are illustrated
Figure；
Fig. 3 is that a kind of cross-section structure of the quick air-cooled structure of annealing device of a preferred embodiment of the present invention is illustrated
Figure；
Fig. 4 is a kind of structural representation of circular top air intake heat insulating block of a preferred embodiment of the present invention；
Fig. 5 is the single layer structure schematic diagram of a kind of stacked ring-type sidepiece heat insulating block of a preferred embodiment of the present invention；
Fig. 6 is a kind of cross-sectional view of top heat extraction heat insulating block of a preferred embodiment of the present invention.
In figure：1st, cassette；2nd, process container；3rd, heater strip；4th, heat-insulation layer；5th, circular top air intake heat insulating block；6th, air intake
Mouthful；7th, top heat extraction heat insulating block；8th, exhaust outlet；9th, ring-type sidepiece heat insulating block；10th, heater outer shield；11st, radial passage；
12nd, base plate；13 longitudinal air channels；14th, bottom heat insulating block；15th, air intake annular groove；16th, longitudinal air holes；17th, upper heat insulating block；18th, lower guarantor
Warm block；19th, support heat insulating block；20th, looping pit.
Specific embodiment
Below in conjunction with the accompanying drawings, the specific embodiment of the present invention is described in further detail.
It should be noted that in following specific embodiments, when describing embodiments of the present invention in detail, in order to clear
Ground represents the structure of the present invention in order to illustrate, special to the structure in accompanying drawing not according to general scale, and carried out local
Amplify, deformation and simplification are processed, therefore, should avoid being understood in this, as limitation of the invention.
In specific embodiment of the invention below, refer to Fig. 2, Fig. 2 is one kind of a preferred embodiment of the present invention
The contour structures schematic diagram of the quick air-cooled structure of annealing device.As shown in Fig. 2 a kind of annealing device of the present invention is fast
Fast air-cooled structure, is arranged on inside annealing device, including ring-type sidepiece heat insulating block 9, circular top air intake heat insulating block 5, top
The several major part of heat extraction heat insulating block 7.Wherein, circular top air intake heat insulating block is provided with air inlet 6, and air inlet can be with outer gas stream
Supply arrangement is connected；Top heat extraction heat insulating block is provided with exhaust outlet 8, and exhaust outlet can be connected with external heat rejection equipment.Cooling air-flow
Air inlet can be entered by outer gas stream supply arrangement, after in annealing device inner loop, by top heat extraction heat insulating block
On exhaust outlet enter external heat rejection pipeline, finally can become cooling air-flow and carry out again after the cooling of outer gas stream supply arrangement
Circulation.
, refer to Fig. 1 taking vertical heat processing apparatus as a example.Described annealing device from-inner-to-outer is provided with process container 2, adds
Hot device 3 and 4.Process container is used for loading cassette 1, and cassette can accommodate multiple wafers；Heater can heat treated container and its
Internal wafer.Heater is arranged on outside process container, and the space between heater and process container constitutes burner hearth.Heater
It is provided with the cylindric heat-insulation layer 4 surrounding process container, heat-insulation layer is made by insulation material and formed.Heat-insulation layer inwall is laid with heating
Silk 3, it typically is heating resistor；Heater strip is exposed in burner hearth, can produce amount of heat when annealing device works, and
It is stored in the furnace cavity between process container and heat-insulation layer, various places can be carried out to the wafer in cassette by process container
Reason.
The quick air-cooled structure of the present invention is embedded in the heat-insulation layer 4 in above-mentioned annealing device.
Refer to Fig. 3.In described quick air-cooled structure, ring-type sidepiece heat insulating block 9 is embedded the side wall of heat-insulation layer 4 in FIG
Place, that is, it is equally around process container setting.Space between ring-type sidepiece heat insulating block and process container sidepiece namely stove
Thorax space.Longitudinal air channel 13 of up/down perforation is provided with the annular circumferential of ring-type sidepiece heat insulating block 9；It is preferred that described longitudinal direction
Air channel can be symmetrical arranged several in the annular circumferential of ring-type sidepiece heat insulating block.Sidewall locations in described longitudinal air channel 13, i.e.
It is interval with how several radial passage 11 of connection burner hearth from top to bottom near the sidewall locations of burner hearth side.And, at each
The identical height and position in longitudinal air channel, can be set up in parallel more than one radial passage.
Circular top air intake heat insulating block 5 arranges at the top of heat-insulation layer 4 in FIG, be located at guarantor above process container
Warm layer position, the annular circumferential lower end of circular top air intake heat insulating block 5 is corresponding with the annular circumferential upper end of ring-type sidepiece heat insulating block 9
Engage.And, the space between circular top air intake heat insulating block and process container top namely furnace cavity.Along circular top
The annular circumferential lower end of air intake heat insulating block, is provided with the air intake annular groove 15 of annular, and the position of air intake annular groove 15 is incubated with ring-type sidepiece
Longitudinal air channel 13 position in block corresponds to, thus air intake annular groove is able to be connected with each longitudinal air channel.In described air intake annular groove
Lateral wall position, be machined with outside air inlet 6 (not shown) of connection heat-insulation layer (heater), and can further with outside gas
Stream supply arrangement is connected.Air inlet can arrange one it is also possible to arrange several, to improve effect during air intake around air intake annular groove
Rate and airflow homogeneity.
Refer to Fig. 4.It shows that a kind of circular top air intake heat insulating block 5 structure with two air inlets 6 (is illustrated as down
Put direction), and it is provided inwardly with the air intake annular groove 15 with upright side walls along its annular circumferential lower end.The position of air intake annular groove 15 with
Longitudinal air channel 13 is corresponding, and air inlet 6 connects with air intake annular groove 15, and cooling air-flow, also can be to indulging during the motion of this air intake annular groove
To duct flows, thus, air inlet 6, air intake annular groove 15, longitudinal air channel 13, radial passage 11 are sequentially communicated.
Please continue to refer to Fig. 3.Top heat extraction heat insulating block 7 is also provided with FIG at the top of heat-insulation layer 4, and is located at ring-type
The top of top air intake heat insulating block 5, the periphery lower end of top heat extraction heat insulating block 7 is round with the annular of circular top air intake heat insulating block 5
Zhou Shangduan is corresponding to be engaged.It is machined with, in top heat extraction heat insulating block, the exhaust outlet 8 that can connect outside burner hearth and heat-insulation layer, and one can be entered
Step is connected with external heat rejection equipment.Exhaust outlet can arrange one it is also possible to top heat extraction heat insulating block surrounding arrange several,
To improve efficiency and equilibrium air draft during air draft.
So, the cooling air-flow being provided by outer gas stream supply arrangement, you can annealing device is imported by air inlet 6,
And enter burner hearth through air intake annular groove 15, longitudinal air channel 13, radial passage 11 successively, now the temperature of cooling air-flow gradually rises,
After heat exchange, external heat rejection equipment is expelled to by exhaust outlet 8, the heat between heater heat-insulation layer 4 and process container 2 is taken away,
Such that it is able to carry out to burner hearth forcing cooling, and realize the purpose of fast cooling.
Described ring-type sidepiece heat insulating block 9 can be formed using multilayer laminate constructions.Refer to Fig. 5, it shows ring-type sidepiece
One single layer structure 9 ' of heat insulating block.Be designed with the annular circumferential of each (layer) ring-type sidepiece heat insulating block single layer structure 9 ' one to
Some longitudinal air holes 16, are all machined with the longitudinal air holes of connection and the one of burner hearth longitudinally in each and as do radial passage in air holes 16
11.By some single layer structure 9 ' stacked on top of one another, so that the corresponding joint of longitudinal air holes 16 of each layer is connected, that is, constitute complete longitudinal direction
Air channel 13.So, after cooling air-flow enters longitudinal air channel, flow process can be assigned to each radial passage on the way.
Required according to lowering temperature uniform, distributed quantity up and down in ring-type sidepiece heat insulating block 9 for the described radial passage 11 is not
Same, can arrange according to the variation tendency assuming radial passage increased number from top to bottom.Make every layer of ring-type side from top to bottom
Radial passage quantity in the single layer structure 9 ' of portion's heat insulating block is gradually increased.
Further, radial passage can be along the radial arrangement of ring-type sidepiece heat insulating block.It is also possible that state radial passage setting
It is set to the distribution at an angle and axle center of heater between.For example, it is possible to make each radial passage of each layer be horizontally disposed with, and
Arrange at an angle clockwise or counterclockwise by the axle center around heater, so that cooling air-flow is formed after entering burner hearth
Air flow clockwise or counterclockwise, such that it is able to guide air-flow quickly to discharge.The radial passage of each layer can also be made
From bottom to top by the lift angle setting gradually raised, so that cooling air-flow accelerates to flow up and discharge rapidly from burner hearth bottom.This
Invention not limited to this.
Longitudinal air channel sidewall locations between heater strip 3 for the described radial passage 11, in order to avoid cooling air-flow directly blows to
Heater strip, causes the obstruction to air-flow.
Refer to Fig. 6.Described top heat extraction heat insulating block 7 can be combined by some heat insulating blocks and be formed, for example, the heat extraction of described top
Heat insulating block can be provided with upper and lower heat insulating block 17,18, and described exhaust outlet 8 can be arranged on lower heat insulating block 18.Lower heat insulating block 18 can
It is machined with the looping pit 20 of up/down perforation, looping pit 20 is corresponding with the hollow position of circular top air intake heat insulating block 5, thus can be with
Burner hearth connects.The exhaust outlet 8 of such as two larger areas can be processed in the lateral wall of looping pit 20, so that exhaust outlet 8 one end is connected
Outside, the other end connects looping pit 20, realizes the quick discharge of thermal current in burner hearth.Upper heat insulating block 17 can adopt cap-shaped structure,
So that roof of the furnace to be isolated from the outside, for stopping scattering and disappearing of annealing device internal heat, it is to avoid make heater external temperature
Rise too fast.And can arrange between upper and lower heat insulating block support heat insulating block 19 carry out structural strengthening.
Refer to Fig. 3.Whole annealing device may be installed on base plate 12.In the base plate in described annealing device
It is provided with bottom heat insulating block 14, its joint corresponding with the lower end of ring-type sidepiece heat insulating block 9, longitudinal air channel 13 is closed, can rise
It is incubated and stops the function of cooling air-flow to being thermally shielded to device.
Further, it is also possible in the outside covering heater outer shield 10 of heater, the described heat-insulation layer 4 in Fig. 1 be surrounded
Get up and protected and strengthened heat insulating function.
Above-mentioned ring-type sidepiece heat insulating block, circular top air intake heat insulating block, top heat extraction heat insulating block can adopt lamination layer structure,
The outer layer of described lamination layer structure can adopt and heat-insulation layer identical insulation material, and is located in the ring-type sidepiece heat insulating block of internal layer
Longitudinal air channel and radial passage, in air intake annular groove and air inlet, top heat extraction heat insulating block in circular top air intake heat insulating block
The gas channel position such as looping pit and exhaust outlet can be made using the suitable material through intensive treatment.The internal layer gas of each heat insulating block
Circulation road can ensure that structural strength, outer layer insulation material good heat insulating, Stability Analysis of Structures, can avoid radiating too fast, lead to plus
Hot device external temperature rises, and contributes to temperature in annealing device and uniformly decline, thus ensureing product quality.
Above-mentioned each insulation block structure may also be employed being integrally formed making, and its structure is simple, easy for installation.
In sum, by the present invention in that cooling air-flow is entered by air inlet is embedded at insulation in the layer quickly air-cooled knot
It is circulated inside structure, air inlet is connected with air intake annular groove, cooling effectiveness can be increased, and can directly cooling air-flow be transported to vertical
To air channel, cooling air-flow is travel downwardly by longitudinal air channel, after equalize ejection through radial passage in burner hearth, cooling can be reduced
Air-flow enters obstruction during space between heater and process container so that the chilling temperature in burner hearth is quick, uniformly decline, and
The heat-insulating property of device can be improved, the thermal uniformity of suppression heater body deteriorates and the temperature outside heater rises, thus can
The uniformity of product quality is effectively ensured.
Above-described only the preferred embodiments of the present invention, the patent that described embodiment is simultaneously not used to limit the present invention is protected
The equivalent structure change that shield scope, the description of therefore every utilization present invention and accompanying drawing content are made, should be included in the same manner
In protection scope of the present invention.
Claims (10)
1. the quick air-cooled structure of a kind of annealing device, described annealing device from-inner-to-outer is provided with process container, heater,
Heater is provided with and surrounds the heat-insulation layer of process container and be laid in heater strip at heat-insulation layer inwall, heat-insulation layer and process container it
Between space constitute burner hearth it is characterised in that described quick air-cooled structure is embedded in heat-insulation layer, including：
Ring-type sidepiece heat insulating block, located at heat-insulation layer side-walls, its circumference is provided with longitudinal air channel of up/down perforation, along described Longitudinal Wind
Road side wall is communicated with how several radial passage of burner hearth；
Circular top air intake heat insulating block, at heat-insulation layer top, and joint corresponding with ring-type sidepiece heat insulating block upper end, it is along circle
All lower ends are provided with air intake annular groove, and described air intake annular groove is communicated with the air inlet outside heat-insulation layer, and described air intake annular groove connection is vertical
To air channel；
Top heat extraction heat insulating block, at heat-insulation layer top, and joint corresponding with circular top air intake heat insulating block upper end, it is provided with
Exhaust outlet outside connection burner hearth and heat-insulation layer；
Wherein, cooling air-flow is imported by air inlet, enter burner hearth through air intake annular groove, longitudinal air channel, radial passage successively, through changing
Discharged by exhaust outlet after heat, cooled down with the pressure that burner hearth is carried out with fast cooling.
2. the quick air-cooled structure of annealing device according to claim 1 is it is characterised in that described ring-type sidepiece is incubated
Block is multilayer laminate constructions, and its every layer is provided with longitudinal air holes, and the radial passage of the longitudinal air holes of connection and burner hearth, each layer vertical
Constitute longitudinal air channel to corresponding joint of air holes.
3. the quick air-cooled structure of annealing device according to claim 1 and 2 is it is characterised in that described radial passage
Increased number setting from top to bottom.
4. the quick air-cooled structure of annealing device according to claim 1 and 2 is it is characterised in that described radial passage
The angled distribution with the axle center of heater.
5. the quick air-cooled structure of annealing device according to claim 1 and 2 is it is characterised in that described radial passage
Longitudinal air channel sidewall locations between heater strip.
6. the quick air-cooled structure of annealing device according to claim 1 is it is characterised in that described annealing device is close
On base plate, the base plate in described annealing device is provided with bottom heat insulating block to envelope, its lower end with ring-type sidepiece heat insulating block
Corresponding joint, longitudinal air channel is closed.
7. the quick air-cooled structure of annealing device according to claim 1 is it is characterised in that the heat extraction of described top is incubated
Block is provided with upper and lower heat insulating block, and described exhaust outlet is on lower heat insulating block.
8. the quick air-cooled structure of annealing device according to claim 7 is it is characterised in that described upper and lower heat insulating block
Between be provided with support heat insulating block.
9. the quick air-cooled structure of annealing device according to claim 1 is it is characterised in that also include outside heater
Guard shield, it surrounds described heat-insulation layer setting.
10. the quick air-cooled structure of annealing device according to claim 1 is it is characterised in that described ring-type sidepiece is protected
Warm block, circular top air intake heat insulating block, top heat extraction heat insulating block are respectively lamination layer structure, and the outer layer of described lamination layer structure is
Insulation material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610968368.6A CN106384722A (en) | 2016-10-28 | 2016-10-28 | Quick air cooling structure of heat treatment device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610968368.6A CN106384722A (en) | 2016-10-28 | 2016-10-28 | Quick air cooling structure of heat treatment device |
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| CN106384722A true CN106384722A (en) | 2017-02-08 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111128785A (en) * | 2018-10-30 | 2020-05-08 | 北京北方华创微电子装备有限公司 | Heat treatment device |
| CN120473415A (en) * | 2025-07-15 | 2025-08-12 | 北京和崎精密科技有限公司 | A thermal insulation structure for semiconductor heat treatment equipment with high uniformity and rapid cooling |
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| KR20050116247A (en) * | 2004-06-07 | 2005-12-12 | 조정희 | Furnace apparatus and heat treatment method using the apparatus |
| CN101993990A (en) * | 2010-11-29 | 2011-03-30 | 苏州中门子科技有限公司 | Strong convection structure on heat treatment furnace |
| CN103773923A (en) * | 2014-02-20 | 2014-05-07 | 北京七星华创电子股份有限公司 | Fast heating/cooling furnace body for heat treatment |
| CN104576463A (en) * | 2015-01-22 | 2015-04-29 | 北京七星华创电子股份有限公司 | Rapid cooling and heat treatment system |
| CN104561456A (en) * | 2015-01-22 | 2015-04-29 | 北京七星华创电子股份有限公司 | Furnace body for cooling rapidly |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111128785A (en) * | 2018-10-30 | 2020-05-08 | 北京北方华创微电子装备有限公司 | Heat treatment device |
| CN120473415A (en) * | 2025-07-15 | 2025-08-12 | 北京和崎精密科技有限公司 | A thermal insulation structure for semiconductor heat treatment equipment with high uniformity and rapid cooling |
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